WO2014068690A1 - Substrate holding device - Google Patents

Substrate holding device Download PDF

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Publication number
WO2014068690A1
WO2014068690A1 PCT/JP2012/078099 JP2012078099W WO2014068690A1 WO 2014068690 A1 WO2014068690 A1 WO 2014068690A1 JP 2012078099 W JP2012078099 W JP 2012078099W WO 2014068690 A1 WO2014068690 A1 WO 2014068690A1
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WO
WIPO (PCT)
Prior art keywords
substrate
movable member
end side
adhesive
holding plate
Prior art date
Application number
PCT/JP2012/078099
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French (fr)
Japanese (ja)
Inventor
八郎 戸内
賢治 岩成
秀展 松岡
Original Assignee
中外炉工業株式会社
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Application filed by 中外炉工業株式会社 filed Critical 中外炉工業株式会社
Priority to PCT/JP2012/078099 priority Critical patent/WO2014068690A1/en
Priority to JP2014544110A priority patent/JP5968456B2/en
Publication of WO2014068690A1 publication Critical patent/WO2014068690A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Definitions

  • the present invention is a substrate holding apparatus in which a substrate is held on a holding plate by the adhesive force of an adhesive member provided on the holding plate, and the held substrate is peeled off from the above adhesive member and separated from the holding plate. It is about In particular, when the substrate is peeled off from the adhesive member provided on the holding plate to separate the substrate from the holding plate, the substrate can be properly separated from the holding plate without deformation of the substrate. It has a feature.
  • a substrate for a display is held by a substrate holding device, and the substrate held in this manner is separated from the substrate holding device and set at a predetermined position.
  • the substrate held by the holding plate is set at a predetermined position by the adhesive force of the adhesive member as described above, the substrate is peeled off from the adhesive member and separated from the holding plate.
  • the substrate adhered and held to the adhesive member such as the adhesive sheet. Is pressed downward by a pin or a pressing member to separate the substrate from the adhesive member and release it from the holding plate, or by spraying gas or the like from the hole provided at the center of the adhesive pin to the substrate. It is made to exfoliate from and to make it separate from a holding plate.
  • the present invention relates to a substrate holding apparatus in which the substrate is held on a holding plate by the adhesive force of an adhesive member provided on the holding plate in order to hold the substrate properly even in a vacuum environment. It is an object of the present invention to solve the above-mentioned problems in the case where the substrate held as described above is peeled off from the above-mentioned adhesive member and detached from the holding plate.
  • the adhesive member provided on the holding plate is brought into contact with the substrate, and the adhesive force of the adhesive member is used to hold the substrate on the holding plate.
  • a movable member provided with the adhesive member is provided on the holding plate so as to be movable with respect to the substrate, and the movable member Is moved in a direction in which the substrate is inclined with respect to the substrate and separated from the substrate, and separation means is provided to separate the substrate from one end side of the adhesive member provided on the movable member and separate it from the holding plate.
  • the movable member when the substrate held by the holding plate is detached from the holding plate by the adhesive force of the adhesive member, the movable member is inclined relative to the substrate by the separation means.
  • the substrate is gradually separated from the portion of the adhesive member on the one end side of the movable member which is inclined in the direction away from the substrate so that the substrate is separated from the holding plate.
  • a plurality of the movable members provided with the adhesive member can be provided on the holding plate, and a plurality of separation means can be provided corresponding to the respective movable members.
  • one large substrate is brought into contact with each adhesive member provided on each movable member, and the adhesive force of each adhesive member holds the substrate on the holding plate, while corresponding to each movable member.
  • Each of the separation means provided separates the substrate from the one end side of the adhesive member provided on each movable member as described above, thereby separating the one large substrate from the holding plate. it can.
  • the movable member when the adhesive member is provided on the movable member, the movable member is inclined with respect to the substrate by the separating means as described above, and one end of the movable member is inclined in a direction away from the substrate.
  • a magnetic member is provided on the surface of the movable member opposite to the surface on which the adhesive member is provided, and the magnetic member faces the magnetic member.
  • a plurality of magnetic force generating devices can be provided from one end side to the other end side of the inclined movable member via a required interval.
  • the magnetic force generating device is sequentially operated from the magnetic force generating device provided on one end side of the movable member to the other end side, and the movable member is sequentially separated from the substrate from the one end side to the other end side
  • the movable member is inclined with respect to the substrate by changing the distance for moving the movable member away from the substrate by the respective magnetic force generating devices from one end side to the other end side of the movable member.
  • the substrate adhered to the adhesive member in the movable member is gradually peeled off from one end side of the adhesive member.
  • separating means a plurality of arm portions are provided on the moving member moved by the moving device from the one end side to the other end side of the inclined movable member with a required spacing therebetween, and the locking holes are provided in each arm portion , And the movable member is provided with an engaging projection which engages with the locking hole provided in each arm, and the length in the moving direction of the locking hole provided in each arm is as described above.
  • the movable member can be made longer as it goes from one end side to the other end side.
  • each engagement of the movable member engaged with the locking holes having different lengths in the moving direction is a substrate in order from the side of the arm portion provided with the locking hole having the short length in the moving direction.
  • the movable member is inclined relative to the substrate, and the substrate adhered to the adhesive member in the movable member is gradually peeled off from one end side of the adhesive member.
  • the movable plate is provided on the holding plate so as to be movable in the vertical direction with respect to the substrate, and the movable member is vertically arranged with respect to the substrate by the separating means. It is preferable that the substrate be peeled off from one end side of the adhesive member in the movable member which is inclined and moved away from the substrate and inclined upward and separated from the substrate. In this case, when the movable member is inclined upward with respect to the substrate and the substrate is peeled from one end side of the adhesive member provided on the movable member, the weight of the substrate is added and the movable member is not largely inclined. Even in this case, the substrate is properly peeled off from one end of the adhesive member.
  • the holding plate is peeled off from the holding member by the adhesive force of the pressure-sensitive adhesive member provided on the holding plate, and the holding plate is separated from the holding plate as described above.
  • a movable member provided with an adhesive member is provided movably with respect to the substrate, and the movable member holding the substrate by the adhesive member is moved in a direction in which the separating unit tilts the substrate with respect to the substrate and separates from the substrate.
  • the substrate is gradually peeled off from the portion of the adhesive member at one end side of the movable member which is inclined in the direction away from the substrate, and is separated from the holding plate.
  • the substrate held on the holding plate by the adhesive force of the adhesive member is pushed downward by pins or pressing members or the like, or gas or the like is sprayed through the holes to peel off the substrate from the adhesive member.
  • the substrate is not broken or deformed at the position pressed by the pin or the pressing member or the position where the gas or the like is blown, as in the case of Become.
  • the movable member is held by the holding plate, the adhesive member provided on the movable member is protruded from the lower surface of the holding plate, and the substrate is adhered to the adhesive member.
  • substrate holding apparatus which concerns on said embodiment WHEREIN: It is the schematic bottom view which showed the state which protruded the adhesive member provided in the movable member from the lower surface of the holding plate through the through-hole provided in the holding plate.
  • FIG. 13 is an exploded perspective view showing the upper plate, the movable member, the holding plate, and the substrate in the substrate holding device according to the embodiment.
  • FIG. 13 is a schematic front view showing a modification of the separating means in which the movable member is inclined and lifted in the substrate holding device according to the embodiment.
  • FIG. 7 is a schematic front view showing a state in which the movable member is inclined and lifted by the separating means according to the modification shown in FIG.
  • FIG. 7 is a schematic front view showing a state in which a substrate is adhered to and held by adhesive members provided on movable members protruding from the lower surface of a holding plate in the modification shown in FIG. 9;
  • the substrate holding device according to the present invention is not particularly limited to those shown in the following embodiments, and can be appropriately changed and implemented without departing from the scope of the present invention.
  • a movable member 20 provided with an adhesive member 21 is provided movably in the vertical direction with respect to a holding plate 10 for holding the substrate 1.
  • the adhesive member 21 provided on the movable member 20 is protruded from the lower surface of the holding plate 10 to bring the substrate 1 into contact with the adhesive member 21 in the movable member 20, and the adhesive force of the adhesive member 21 makes the substrate 1
  • the holding plate 10 is made to hold.
  • both ends of the pair of substantially crescent-shaped projecting portions 22 are opposed to each other in proximity to each other.
  • the pair of protrusions 22 are protruded downward, and the crescent-shaped adhesive members 21 corresponding to the lower surfaces of the protrusions 22 are attached.
  • the through hole 11 larger than the adhesive member 21 has a shape corresponding to the adhesive member 21 attached to the movable member 20 at a position corresponding to each adhesive member 21 in the movable member 20. It is provided.
  • the adhesive members 21 attached to the projections 22 of the movable member 20 are projected from the lower surface of the holding plate 10 through the through holes 11 provided in the holding plate 10 to hold the movable member 20. It is held on the plate 10 so that the movable member 20 can be moved up and down on the holding plate 10.
  • the holding plate 10 holding the movable member 20 in this manner is attached to the upper plate 30 provided above the holding plate 10 by the connecting member 31 with a predetermined gap therebetween.
  • a separation means 40 for peeling the substrate 1 from one end side of the adhesive member 21 provided on the movable member 20 At two positions corresponding to both end portions of the pair of substantially crescent-shaped adhesive members 21 via a required interval, and these two magnetic force generating devices Two magnets 42 are provided on the upper surface of the movable member 20 opposed to 41, and the magnetic force generator 41 is operated to lift the movable member 20 via the magnet 42.
  • the adhesive members 21 of the movable member 20 protruding from the lower surface of the holding plate 10 are brought into contact with the substrate 1 in this manner, and the substrate 1 is held by the adhesive force of the adhesive members 21.
  • the suction groove 14 is formed in a square ring along the peripheral portion of the lower surface of the holding plate 10, and suction is performed by the suction device 14 through the suction hole 13 communicating with the suction groove 12, and the substrate 1 is The substrate 1 is brought into contact with the adhesive members 21 of the movable member 20 by suctioning the holding plate 10 provided with the suction grooves 12.
  • the holding plate 10 when holding the substrate 1 on the holding plate 10 by the adhesive force of each adhesive member 21, the holding plate 10 may be pressed against the substrate 1 or the substrate 1 may be held on the holding plate 10. It is also possible to press the head, and it is also possible to use these in combination with the above-mentioned suction.
  • the movable member 20 is prevented from being pushed upward.
  • the movable members 20 can be pressed against the substrate 1 by causing the magnets 42 provided on the upper surface of the movable member 20 to exert a repulsive force by the magnetic force generation devices 41.
  • the substrate 1 is held on the holding plate 10 by the adhesive force of each adhesive member 21 provided on the movable member 20 in this manner, the substrate 1 is guided to a predetermined position and subjected to a predetermined operation. The substrate 1 is separated from the holding plate 10.
  • one of the magnetic force generating devices 41a in the two magnetic force generating devices 41 is operated to generate the magnetic force.
  • One of the magnets 42a provided on the movable member 20 in the device 41a is attracted by magnetic force, and one end side of the movable member 20 is lifted and inclined.
  • the substrate 1 is gradually peeled off from the portion of the adhesive member 21 at the one end side of the inclined movable member 20 by its own weight or the like. Thereafter, when the other magnetic force generator 41b is operated, the other magnet 42b provided on the movable member 20 is attracted to the magnetic force generator 41b by the magnetic force, and the other end side of the movable member 20 is also lifted. 1 comes off from the adhesive member 21.
  • the substrate 1 when peeling the substrate 1 from the adhesive member 21, the substrate 1 is gradually peeled from one end by a small force, and the substrate 1 is not broken or deformed, and the holding plate 10 to the substrate 1 Will be properly withdrawn.
  • one of the magnetic force generating devices 41a of the two magnetic force generating devices 41 is actuated first to lift the one end side of the movable member 20 first to incline the movable member 20.
  • the heights of the magnets 42 provided on the movable member 20 are made different, and the heights for lifting the movable member 20 by the respective magnetic force generating devices 41 are made different between the one end side and the other end side to incline the movable member 20. It can also be
  • the number and shape of the protrusions 22 provided on the lower surface of the movable member 20 and the shape of the adhesive member 21 attached to the lower surface of the protrusions 22 are not limited to those described in the above embodiment, as described above.
  • the substrate 1 When one end side of the movable member 20 is lifted and inclined, the substrate 1 may be appropriately peeled off from the portion of the adhesive member 21 at the one end side of the inclined movable member 20 by its own weight or the like. For this reason, it is preferable to provide as the adhesion member 21 what extended along the other end side from the one end side of the movable member 20 which inclines.
  • three elongated projections 22 extending from one end to the other end of the movable member 20 are made to project downward and arranged in parallel, and the lower surfaces of the projections 22 respectively A correspondingly elongated adhesive member 21 can be attached.
  • the separating means 40 for peeling the substrate 1 from one end side of the adhesive member 21 provided on the movable member 20 is not limited to the one shown in the above embodiment.
  • a plurality of (three in the example shown) arm portions 45 (45a to 45c) are movable on the moving member 44 moved in the vertical direction by the moving device 43.
  • Locking holes 47 (provided at one end side to the other end side of the member 20 via a required interval) and engaged with the engaging convex portions 46 (46a to 46c) provided on the movable member 20 in the respective arm portions 45 ( 47a to 47c), and the length in the moving direction of the movable member 20 in the locking holes 47 (47a to 47c), that is, the length in the vertical direction is measured from the arm 45a positioned on one end side of the movable member 20. It is possible to use one which is sequentially lengthened toward the arm portion 45c located on the other end side.
  • the engagement convex portion 46a on one end side of the movable member 20 abuts on the lower end of the short locking hole 47a provided in the arm portion 45a located on one end side of the movable member 20
  • the one end side of the movable member 20 provided with the above-mentioned engaging convex portion 46a is lifted together with the arm portion 45a
  • the engaging convex portion 46b at the central position of the movable member 20 is positioned at the center A central portion of the movable member 20 in which the lower end of the intermediate length locking hole 47b provided in the arm portion 45b is abutted and locked, and the engaging convex portion 46b is provided together with the arm portion 45b
  • the engagement projection 46c on the other end side of the movable member 20 abuts on the lower end of the long locking hole 47c provided in the arm portion 45c located on the other end side of the movable member 20. Locked, this Said engaging projection 46c comes to be lifted is the other end of
  • the movable member 20 and the projection 22 are made of a flexible material, three or more arm portions 45 having different lengths of the locking holes 47 as described above are provided, and one end of the holding plate 10
  • the side is lifted up so as to be separated from the substrate 1, as shown in FIG. 8, the movable member 20, the protrusion 22 and the adhesive member 21 are curved according to the change of the length of the locking hole 47. While being carried out, these one end side is lifted, and the substrate 1 can be gradually peeled off from the one end side of the adhesive member 21 which has been bent and lifted in this way.
  • the movable member 20 is lifted so as to gradually incline from the one end side, and the substrate 1 is self-weighted from the portion of the adhesive member 21 at the one end side of the inclined movable member 20.
  • the substrate 1 is gradually peeled off, and the substrate 1 is properly separated from the holding plate 10 without deformation of the substrate 1.
  • a plurality of (six in the illustrated example) movable members 20 are provided vertically movable to one holding plate 10 as in the above embodiment. It is also possible to bring each adhesive member 21 into contact with the substrate 1 and hold the substrate 1 on the holding plate 10 by the adhesive force of each adhesive member 21.
  • the suction grooves 12 are provided on the lower surface of the holding plate 10 so as to partition the movable members 20.
  • the substrate 1 held by the holding plate 10 is peeled off from the pressure-sensitive adhesive member 21 by the adhesive force of the pressure-sensitive adhesive members 21 of the movable members 20 as described above, the substrate 1 is separated from the holding plate 10 as described above.
  • the substrate 1 is gradually peeled off from the portion of the adhesive member 21 at one end side of each of the movable members 20 by lifting and tilting the one end side of each movable member 20. 1 is peeled off, and the substrate 1 is separated from the holding plate 10.
  • each movable member 20 when lifting and tilting one end side of each movable member 20 and peeling the substrate 1 from each adhesive member 21 in each movable member 20, lift one end side of the plurality of movable members 20 simultaneously.
  • the substrate 1 is inclined so as to simultaneously peel the substrate 1 from each adhesive member 21 in the plurality of movable members 20.
  • one end side of the movable member 20 is lifted and inclined in order from the movable member 20 at an appropriate position. It is also possible to peel off each adhesive member 21 in each movable member 20 in order.

Abstract

The present invention addresses the problem of, when a substrate held on a holding plate by the adhesive force of an adhesive member is detached from the adhesive member, enabling the substrate to be appropriately released from the holding plate without causing the substrate to be deformed and the like. When a substrate (1) held on a holding plate (10) by the adhesive force of an adhesive member (21) is detached from the adhesive member and released from the holding plate, a movable member (20) provided with an adhesive member is held by the holding plate in a movable state with respect to the substrate. A splitting means (40) moves the movable member in a direction that causes separation from the substrate so that the movable member is inclined with respect to the substrate, and the held substrate is gradually detached from one end side of the adhesive member provided to the movable member and released from the holding plate.

Description

基板保持装置Substrate holding device
　本発明は、保持プレートに設けられた粘着部材の粘着力により、基板を保持プレートに保持させる一方、保持された基板を上記の粘着部材から剥離させて保持プレートから離脱させるようにした基板保持装置に関するものである。特に、保持プレートに設けられた粘着部材から基板を剥離させて、基板を保持プレートから離脱させる際に、基板が変形したりすることなく、基板を保持プレートから適切に離脱できるようにした点に特徴を有するものである。 The present invention is a substrate holding apparatus in which a substrate is held on a holding plate by the adhesive force of an adhesive member provided on the holding plate, and the held substrate is peeled off from the above adhesive member and separated from the holding plate. It is about In particular, when the substrate is peeled off from the adhesive member provided on the holding plate to separate the substrate from the holding plate, the substrate can be properly separated from the holding plate without deformation of the substrate. It has a feature.
　従来から、液晶ディスプレイ等を製造するにあたり、ディスプレイ用の基板を基板保持装置により保持させ、このように保持された基板を基板保持装置から離脱させて所定の位置にセットすることが行われている。 Conventionally, in manufacturing a liquid crystal display or the like, a substrate for a display is held by a substrate holding device, and the substrate held in this manner is separated from the substrate holding device and set at a predetermined position. .
　ここで、このように基板保持装置によって基板を保持させるにあたり、従来においては、真空環境下においても基板が適切に保持されるようにするため、特許文献１～４等に示されるように、基板を保持させる保持プレートに粘着シートや粘着ピン等の粘着部材を設け、この粘着部材の粘着力により、基板を保持プレートに保持させるようにしたものが使用されている。 Here, when the substrate is held by the substrate holding apparatus in this manner, conventionally, the substrate is properly held in a vacuum environment as shown in Patent Documents 1 to 4, etc. An adhesive member such as an adhesive sheet or adhesive pin is provided on a holding plate for holding the substrate, and the substrate is held on the holding plate by the adhesive force of the adhesive member.
　そして、このように粘着部材の粘着力により保持プレートに保持された基板を所定の位置にセットした後、この基板を前記の粘着部材から剥離させて保持プレートから離脱させるようにしている。 Then, after the substrate held by the holding plate is set at a predetermined position by the adhesive force of the adhesive member as described above, the substrate is peeled off from the adhesive member and separated from the holding plate.
　ここで、上記のように粘着部材からこの基板を剥離させて保持プレートから離脱させるにあたり、前記特許文献１～４に示されるものにおいては、粘着シート等の粘着部材に粘着されて保持された基板を、ピンや押圧部材等により下方に押して、基板を粘着部材から剥離させて保持プレートから離脱させ、或いは粘着ピンの中心部に設けられた孔から基板にガス等を吹き付けて、基板を粘着ピンから剥離させて保持プレートから離脱させるようにしている。 Here, when the substrate is peeled off from the adhesive member and separated from the holding plate as described above, in the devices disclosed in Patent Documents 1 to 4, the substrate adhered and held to the adhesive member such as the adhesive sheet. Is pressed downward by a pin or a pressing member to separate the substrate from the adhesive member and release it from the holding plate, or by spraying gas or the like from the hole provided at the center of the adhesive pin to the substrate. It is made to exfoliate from and to make it separate from a holding plate.
　しかし、上記のように基板をピンや押圧部材等により下方に押したり、孔を通して基板にガス等を吹き付けたりした場合、基板に集中的な力が加わるため、ピンや押圧部材等によって押し付けられた位置やガス等が吹き付けられた位置において基板が割れたり、変形したりするという問題があった。 However, as described above, when pressing the substrate downward with a pin or pressing member or blowing gas etc. onto the substrate through the hole, the substrate is pressed by the pin or pressing member because a concentrated force is applied to the substrate. There has been a problem that the substrate is broken or deformed at the position or at the position where gas or the like is blown.
特許第４９０３９０６号公報Patent No. 4903906 特開２００５－１３４６８７号公報JP 2005-134687 A 特開２００５－１６５１５９号公報JP, 2005-165159, A 特開２００７－３１００４１号公報Japanese Patent Application Publication No. 2007-310041
　本発明は、真空環境下においても基板が適切に保持されるようにするため、保持プレートに設けられた粘着部材の粘着力により、基板を保持プレートに保持させるようにした基板保持装置において、このように保持された基板を、上記の粘着部材から剥離させて保持プレートから離脱させる場合における上記のような問題を解決することを課題とするものである。 The present invention relates to a substrate holding apparatus in which the substrate is held on a holding plate by the adhesive force of an adhesive member provided on the holding plate in order to hold the substrate properly even in a vacuum environment. It is an object of the present invention to solve the above-mentioned problems in the case where the substrate held as described above is peeled off from the above-mentioned adhesive member and detached from the holding plate.
　すなわち、本発明においては、上記のように保持プレートに設けられた粘着部材の粘着力により保持された基板を、粘着部材から剥離させて保持プレートから離脱させるにあたり、基板が割れたり、変形したりすることなく、基板を保持プレートから適切に離脱できるようにすることを課題とするものである。 That is, in the present invention, when the substrate held by the adhesive force of the adhesive member provided on the holding plate as described above is peeled off from the adhesive member and separated from the holding plate, the substrate is broken or deformed It is an object of the present invention to properly remove the substrate from the holding plate without
　本発明においては、上記のような課題を解決するため、保持プレートに設けられた粘着部材を基板に接触させ、この粘着部材の粘着力により基板を保持プレートに保持させる一方、保持された基板を上記の粘着部材から剥離させて保持プレートから離脱させる基板保持装置において、前記の保持プレートに、前記の粘着部材が設けられた可動部材を前記の基板に対して移動可能に設けると共に、この可動部材を基板に対し傾斜させて基板から離間させる方向に移動させ、可動部材に設けられた粘着部材の一端側から基板を剥離させて保持プレートから離脱させる分離手段を設けるようにした。 In the present invention, in order to solve the problems as described above, the adhesive member provided on the holding plate is brought into contact with the substrate, and the adhesive force of the adhesive member is used to hold the substrate on the holding plate. In the substrate holding device which is separated from the adhesive member and separated from the holding plate, a movable member provided with the adhesive member is provided on the holding plate so as to be movable with respect to the substrate, and the movable member Is moved in a direction in which the substrate is inclined with respect to the substrate and separated from the substrate, and separation means is provided to separate the substrate from one end side of the adhesive member provided on the movable member and separate it from the holding plate.
　ここで、この基板保持装置においては、粘着部材の粘着力により保持プレートに保持された基板を保持プレートから離脱させるにあたり、前記の分離手段により、上記の可動部材を基板に対して傾斜させて基板から離間させる方向に移動させ、基板から離れる方向に傾斜した可動部材の一端側における粘着部材の部分から基板を徐々に剥離させて、基板を保持プレートから離脱させるようにする。 Here, in this substrate holding apparatus, when the substrate held by the holding plate is detached from the holding plate by the adhesive force of the adhesive member, the movable member is inclined relative to the substrate by the separation means. The substrate is gradually separated from the portion of the adhesive member on the one end side of the movable member which is inclined in the direction away from the substrate so that the substrate is separated from the holding plate.
　また、本発明の基板保持装置においては、前記の保持プレートに、粘着部材が設けられた前記の可動部材を複数設けると共に、各可動部材に対応させて複数の分離手段を設けることができる。このようにすると、１枚の大きな基板を各可動部材に設けられた各粘着部材に接触させて、各粘着部材の粘着力によりこの基板を保持プレートに保持させる一方、各可動部材に対応して設けられた各分離手段により、前記のように各可動部材に設けられた粘着部材の一端側からそれぞれ基板を剥離させて、前記の１枚の大きな基板を保持プレートから分離させるようにすることができる。 Further, in the substrate holding device of the present invention, a plurality of the movable members provided with the adhesive member can be provided on the holding plate, and a plurality of separation means can be provided corresponding to the respective movable members. In this case, one large substrate is brought into contact with each adhesive member provided on each movable member, and the adhesive force of each adhesive member holds the substrate on the holding plate, while corresponding to each movable member. Each of the separation means provided separates the substrate from the one end side of the adhesive member provided on each movable member as described above, thereby separating the one large substrate from the holding plate. it can.
　また、本発明の基板保持装置において、前記の可動部材に粘着部材を設けるにあたっては、前記のように分離手段により可動部材を基板に対して傾斜させ、基板から離れる方向に傾斜した可動部材の一端側における粘着部材の部分から基板を徐々に剥離させるため、前記の粘着部材を傾斜する可動部材の一端側から他端側に沿って設けることが好ましい。このようにすると、粘着部材の幅が狭くなるため、基板を剥離させる時の力が小さくてすむようになる。 Further, in the substrate holding device according to the present invention, when the adhesive member is provided on the movable member, the movable member is inclined with respect to the substrate by the separating means as described above, and one end of the movable member is inclined in a direction away from the substrate. In order to gradually peel the substrate from the portion of the adhesive member on the side, it is preferable to provide the adhesive member along one end side to the other end side of the movable member to be inclined. In this case, the width of the adhesive member is narrowed, and the force for peeling the substrate can be reduced.
　また、本発明の基板保持装置においては、前記の分離手段として、前記の可動部材における粘着部材が設けられた面と反対側の面に磁性部材を設けると共に、この磁性部材と対向するようにして磁力発生装置を、傾斜する可動部材の一端側から他端側に所要間隔を介して複数設けるようにすることができる。そして、可動部材の一端側に設けた磁力発生装置から他端側に向けて順番に磁力発生装置を作動させて、可動部材をその一端側から他端側に向けて順番に基板から離間させる方向に移動させ、或いは各磁力発生装置によって可動部材を基板から離間させる方向に移動させる距離を、可動部材の一端側から他端側に向けて異ならせるようにすると、可動部材が基板に対して傾斜されるようになり、可動部材における粘着部材に粘着された基板が、粘着部材の一端側から徐々に剥離されるようになる。 In the substrate holding device of the present invention, as the separation means, a magnetic member is provided on the surface of the movable member opposite to the surface on which the adhesive member is provided, and the magnetic member faces the magnetic member. A plurality of magnetic force generating devices can be provided from one end side to the other end side of the inclined movable member via a required interval. Then, the magnetic force generating device is sequentially operated from the magnetic force generating device provided on one end side of the movable member to the other end side, and the movable member is sequentially separated from the substrate from the one end side to the other end side The movable member is inclined with respect to the substrate by changing the distance for moving the movable member away from the substrate by the respective magnetic force generating devices from one end side to the other end side of the movable member. The substrate adhered to the adhesive member in the movable member is gradually peeled off from one end side of the adhesive member.
　また、前記の分離手段として、移動装置によって移動される移動部材に複数のアーム部を、傾斜する可動部材の一端側から他端側に所要間隔を介して複数設け、各アーム部に係止孔を設けると共に、前記の可動部材に、各アーム部に設けられた係止孔と係合する係合凸部を設け、各アーム部に設ける係止孔の移動方向の長さを、前記のように傾斜する可動部材の一端側から他端側に向かうに従って長くすることができる。そして、上記の移動装置によって移動部材に設けられた各アーム部を、基板から離間させる方向に移動させると、移動方向の長さが異なる各係止孔に係合された可動部材の各係合凸部が、移動方向の長さが短い係止孔から順番に係止孔に係止されて、移動方向の長さが短い係止孔が設けられたアーム部側から順番に可動部材が基板から離間する方向に移動され、可動部材が基板に対して傾斜されるようになり、可動部材における粘着部材に粘着された基板が、粘着部材の一端側から徐々に剥離されるようになる。 Further, as the separating means, a plurality of arm portions are provided on the moving member moved by the moving device from the one end side to the other end side of the inclined movable member with a required spacing therebetween, and the locking holes are provided in each arm portion , And the movable member is provided with an engaging projection which engages with the locking hole provided in each arm, and the length in the moving direction of the locking hole provided in each arm is as described above. The movable member can be made longer as it goes from one end side to the other end side. Then, when each arm provided on the moving member is moved by the moving device in the direction of moving away from the substrate, each engagement of the movable member engaged with the locking holes having different lengths in the moving direction The movable member is a substrate in order from the side of the arm portion provided with the locking hole having the short length in the moving direction. The movable member is inclined relative to the substrate, and the substrate adhered to the adhesive member in the movable member is gradually peeled off from one end side of the adhesive member.
　また、本発明の基板保持装置においては、前記の保持プレートに、前記の可動部材を基板に対して上下方向に移動可能に設け、前記の分離手段により、この可動部材を基板に対し上下方向に傾斜して基板から離間させる方向に移動させ、上方に傾斜して基板から離間される可動部材における粘着部材の一端側から基板を剥離させるようにすることが好ましい。このようにすると、可動部材を基板に対して上方に傾斜させて、基板を可動部材に設けられた粘着部材の一端側から剥離させる際に、基板の自重が加わり、可動部材を大きく傾斜させなくても、基板が粘着部材の一端側から適切に剥離されるようになる。 Further, in the substrate holding device of the present invention, the movable plate is provided on the holding plate so as to be movable in the vertical direction with respect to the substrate, and the movable member is vertically arranged with respect to the substrate by the separating means. It is preferable that the substrate be peeled off from one end side of the adhesive member in the movable member which is inclined and moved away from the substrate and inclined upward and separated from the substrate. In this case, when the movable member is inclined upward with respect to the substrate and the substrate is peeled from one end side of the adhesive member provided on the movable member, the weight of the substrate is added and the movable member is not largely inclined. Even in this case, the substrate is properly peeled off from one end of the adhesive member.
　本発明における基板保持装置においては、保持プレートに設けられた粘着部材の粘着力によって保持プレートに保持された基板を、粘着部材から剥離させて保持プレートから離脱させるにあたり、前記のように保持プレートに、粘着部材が設けられた可動部材を基板に対して移動可能に設け、粘着部材によって基板が保持された可動部材を、分離手段により基板に対し傾斜させて基板から離間させる方向に移動させるようにしたため、基板から離れる方向に傾斜した可動部材の一端側における粘着部材の部分から基板が徐々に剥離されて、保持プレートから離脱されるようになる。 In the substrate holding device according to the present invention, the holding plate is peeled off from the holding member by the adhesive force of the pressure-sensitive adhesive member provided on the holding plate, and the holding plate is separated from the holding plate as described above. A movable member provided with an adhesive member is provided movably with respect to the substrate, and the movable member holding the substrate by the adhesive member is moved in a direction in which the separating unit tilts the substrate with respect to the substrate and separates from the substrate. As a result, the substrate is gradually peeled off from the portion of the adhesive member at one end side of the movable member which is inclined in the direction away from the substrate, and is separated from the holding plate.
　このため、従来のように、粘着部材の粘着力によって保持プレートに保持された基板を、ピンや押圧部材等により下方に押したり、孔を通してガス等を吹き付けたりして、基板を粘着部材から剥離させる場合のように、ピンや押圧部材等によって押し付けられた位置やガス等が吹き付けられた位置において基板が割れたり、変形したりするということがなく、基板を保持プレートから適切に離脱できるようになる。 For this reason, as in the prior art, the substrate held on the holding plate by the adhesive force of the adhesive member is pushed downward by pins or pressing members or the like, or gas or the like is sprayed through the holes to peel off the substrate from the adhesive member. In order to be able to separate the substrate from the holding plate properly, the substrate is not broken or deformed at the position pressed by the pin or the pressing member or the position where the gas or the like is blown, as in the case of Become.
本発明の一実施形態に係る基板保持装置において、可動部材を保持プレートに保持させて、この可動部材に設けられた粘着部材を保持プレートの下面から突出させ、この粘着部材に基板を粘着させて保持させた状態を示した概略正面図である。In the substrate holding device according to an embodiment of the present invention, the movable member is held by the holding plate, the adhesive member provided on the movable member is protruded from the lower surface of the holding plate, and the substrate is adhered to the adhesive member. It is the schematic front view which showed the state made to hold | maintain. 前記の実施形態に係る基板保持装置において、可動部材に設けられた粘着部材を保持プレートに設けられた貫通孔を通して、保持プレートの下面から突出させた状態を示した概略底面図である。The board | substrate holding apparatus which concerns on said embodiment WHEREIN: It is the schematic bottom view which showed the state which protruded the adhesive member provided in the movable member from the lower surface of the holding plate through the through-hole provided in the holding plate. 前記の実施形態に係る基板保持装置において、上プレートと可動部材と保持プレートと基板とを示した分解斜視図である。FIG. 13 is an exploded perspective view showing the upper plate, the movable member, the holding plate, and the substrate in the substrate holding device according to the embodiment. 前記の実施形態に係る基板保持装置において、分離手段により前記の可動部材を傾斜させて持ち上げて、粘着部材に粘着された基板を粘着部材の一端側から剥離させる状態を示した概略正面図である。In the substrate holding device according to the embodiment, it is a schematic front view showing a state in which the movable member is inclined and lifted by the separation means, and the substrate adhered to the adhesive member is peeled off from one end side of the adhesive member. . 前記の実施形態に係る基板保持装置において、前記の可動部材に設ける粘着部材を変更させた変更例の概略底面図である。It is a schematic bottom view of the example of a change to which the adhesion member provided in the above-mentioned movable member was changed in the substrate holding device concerning the above-mentioned embodiment. 前記の実施形態に係る基板保持装置において、前記の可動部材を傾斜させて持ち上げる分離手段の変更例を示した概略正面図である。FIG. 13 is a schematic front view showing a modification of the separating means in which the movable member is inclined and lifted in the substrate holding device according to the embodiment. 図６に示した変更例に係る分離手段により、前記の可動部材を傾斜させて持ち上げて、粘着部材に粘着された基板を粘着部材の一端側から剥離させる状態を示した概略正面図である。FIG. 7 is a schematic front view showing a state in which the movable member is inclined and lifted by the separating means according to the modification shown in FIG. 6 to peel off the substrate adhered to the adhesive member from one end side of the adhesive member. 図７に示した分離手段の変更例において、可動部材を柔軟性のある材質で構成し、この可動部材を傾斜させて持ち上げて、粘着部材に粘着された基板を粘着部材の一端側から剥離させる状態を示した概略正面図である。In the modification of the separating means shown in FIG. 7, the movable member is made of a flexible material, and the movable member is inclined and lifted to peel off the substrate adhered to the adhesive member from one end side of the adhesive member. It is the schematic front view which showed the state. 前記の実施形態に係る基板保持装置において、１つの保持プレートに複数の可動部材を保持させて、各可動部材に設けられた粘着部材を保持プレートの下面から突出させた変更例の概略底面図である。In the substrate holding device according to the embodiment, a schematic bottom view of a modification in which a plurality of movable members are held by one holding plate and an adhesive member provided on each movable member is protruded from the lower surface of the holding plate is there. 図９に示した変更例において、保持プレートの下面から突出された各可動部材に設けられた各粘着部材に基板を粘着させて保持させた状態を示した概略正面図である。FIG. 10 is a schematic front view showing a state in which a substrate is adhered to and held by adhesive members provided on movable members protruding from the lower surface of a holding plate in the modification shown in FIG. 9;
　以下、本発明の実施形態に係る基板保持装置を添付図面に基づいて具体的に説明する。なお、本発明に係る基板保持装置は、特に下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。 Hereinafter, a substrate holding device according to an embodiment of the present invention will be specifically described based on the attached drawings. The substrate holding device according to the present invention is not particularly limited to those shown in the following embodiments, and can be appropriately changed and implemented without departing from the scope of the present invention.
　この実施形態に係る基板保持装置においては、図１に示すように、基板１を保持する保持プレート１０に対して、粘着部材２１が設けられた可動部材２０を上下方向に移動可能に設け、この可動部材２０に設けられた粘着部材２１を前記の保持プレート１０の下面から突出させて、可動部材２０における粘着部材２１に基板１を接触させて、この粘着部材２１の粘着力により、基板１を保持プレート１０に保持させるようにしている。 In the substrate holding device according to this embodiment, as shown in FIG. 1, a movable member 20 provided with an adhesive member 21 is provided movably in the vertical direction with respect to a holding plate 10 for holding the substrate 1. The adhesive member 21 provided on the movable member 20 is protruded from the lower surface of the holding plate 10 to bring the substrate 1 into contact with the adhesive member 21 in the movable member 20, and the adhesive force of the adhesive member 21 makes the substrate 1 The holding plate 10 is made to hold.
　ここで、この実施形態における前記の可動部材２０においては、図２及び図３に示すように、その下面に一対の略三日月状になった突出部２２を、その両端部が近接して対向するように配置させて、この一対の突出部２２を下方に突出させると共に、各突出部２２の下面にそれぞれ対応する略三日月状になった粘着部材２１を取り付けている。 Here, in the movable member 20 in this embodiment, as shown in FIG. 2 and FIG. 3, both ends of the pair of substantially crescent-shaped projecting portions 22 are opposed to each other in proximity to each other. As arranged, the pair of protrusions 22 are protruded downward, and the crescent-shaped adhesive members 21 corresponding to the lower surfaces of the protrusions 22 are attached.
　また、前記の保持プレート１０においては、可動部材２０に取り付けられた粘着部材２１と対応した形状で、粘着部材２１よりも大きな貫通孔１１を、可動部材２０における各粘着部材２１と対応した位置に設けている。 Further, in the holding plate 10, the through hole 11 larger than the adhesive member 21 has a shape corresponding to the adhesive member 21 attached to the movable member 20 at a position corresponding to each adhesive member 21 in the movable member 20. It is provided.
　そして、前記の可動部材２０の各突出部２２に取り付けられた各粘着部材２１を、保持プレート１０に設けられた貫通孔１１を通して保持プレート１０の下面から突出させるようにして、可動部材２０を保持プレート１０の上に保持させ、この可動部材２０を保持プレート１０の上において上下方向に移動できるようにしている。 The adhesive members 21 attached to the projections 22 of the movable member 20 are projected from the lower surface of the holding plate 10 through the through holes 11 provided in the holding plate 10 to hold the movable member 20. It is held on the plate 10 so that the movable member 20 can be moved up and down on the holding plate 10.
　また、このように可動部材２０を保持させた保持プレート１０を、その上方に設けられた上プレート３０に対して、連結部材３１により所要間隔を介するようにして取り付けている。 Further, the holding plate 10 holding the movable member 20 in this manner is attached to the upper plate 30 provided above the holding plate 10 by the connecting member 31 with a predetermined gap therebetween.
　そして、この実施形態においては、可動部材２０に設けられた前記の粘着部材２１の一端側から基板１を剥離させる分離手段４０として、保持プレート１０に保持された可動部材２０と対向する上プレート３０の位置に、電磁石からなる２つの磁力発生装置４１を、所要間隔を介して前記の一対の略三日月状になった粘着部材２１の両端部と対応した位置に設けると共に、この２つの磁力発生装置４１と対向する可動部材２０の上面に２つの磁石４２を設け、磁力発生装置４１を作動させて前記の磁石４２を介して可動部材２０を持ち上げるようにしている。 And, in this embodiment, the upper plate 30 facing the movable member 20 held by the holding plate 10 as a separation means 40 for peeling the substrate 1 from one end side of the adhesive member 21 provided on the movable member 20. At two positions corresponding to both end portions of the pair of substantially crescent-shaped adhesive members 21 via a required interval, and these two magnetic force generating devices Two magnets 42 are provided on the upper surface of the movable member 20 opposed to 41, and the magnetic force generator 41 is operated to lift the movable member 20 via the magnet 42.
　また、この実施形態においては、このように保持プレート１０の下面より突出された可動部材２０の各粘着部材２１を基板１に接触させて、各粘着部材２１の粘着力により基板１を保持プレート１０に保持させるにあたり、保持プレート１０の下面の周辺部に沿って四角環状になった吸引溝１２を設け、この吸引溝１２と連通する吸引孔１３を通して吸引装置１４により吸引を行い、基板１を上記の吸引溝１２が設けられた保持プレート１０に吸引させて、基板１を可動部材２０の各粘着部材２１に接触させるようにしている。 Further, in this embodiment, the adhesive members 21 of the movable member 20 protruding from the lower surface of the holding plate 10 are brought into contact with the substrate 1 in this manner, and the substrate 1 is held by the adhesive force of the adhesive members 21. The suction groove 14 is formed in a square ring along the peripheral portion of the lower surface of the holding plate 10, and suction is performed by the suction device 14 through the suction hole 13 communicating with the suction groove 12, and the substrate 1 is The substrate 1 is brought into contact with the adhesive members 21 of the movable member 20 by suctioning the holding plate 10 provided with the suction grooves 12.
　また、各粘着部材２１の粘着力により基板１を保持プレート１０に保持させるにあたっては、このような方法以外に、保持プレート１０を基板１に向かって押し付けるようにしたり、基板１を保持プレート１０に向かって押し付けるようにしたりすることも可能であり、これらと上記のような吸引とを併用させることも可能である。 In addition, when holding the substrate 1 on the holding plate 10 by the adhesive force of each adhesive member 21, the holding plate 10 may be pressed against the substrate 1 or the substrate 1 may be held on the holding plate 10. It is also possible to press the head, and it is also possible to use these in combination with the above-mentioned suction.
　また、このように可動部材２０の各粘着部材２１に接触させた基板１を各粘着部材２１に押し付けて粘着させる場合において、前記の可動部材２０が上方に押し上げられるのを抑制するため、前記の各磁力発生装置４１により可動部材２０の上面に設けられた磁石４２に反発力を作用させて、可動部材２０を基板１に押し付けるようにすることができる。 Further, in the case where the substrate 1 brought into contact with the respective adhesive members 21 of the movable member 20 is pressed against and adhered to the respective adhesive members 21 in this manner, the movable member 20 is prevented from being pushed upward. The movable members 20 can be pressed against the substrate 1 by causing the magnets 42 provided on the upper surface of the movable member 20 to exert a repulsive force by the magnetic force generation devices 41.
　そして、このように基板１を可動部材２０に設けられた各粘着部材２１の粘着力により保持プレート１０に保持させた状態で、この基板１を所定の位置に導いて所定の操作を行った後、この基板１を保持プレート１０から離脱させるようにする。 Then, in a state where the substrate 1 is held on the holding plate 10 by the adhesive force of each adhesive member 21 provided on the movable member 20 in this manner, the substrate 1 is guided to a predetermined position and subjected to a predetermined operation. The substrate 1 is separated from the holding plate 10.
　ここで、基板１を保持プレート１０から離脱させるにあたり、この実施形態においては、図４に示すように、前記の２つの磁力発生装置４１における一方の磁力発生装置４１ａを作動させて、この磁力発生装置４１ａに可動部材２０に設けられた一方の磁石４２ａを磁力により吸着させて、可動部材２０の一端側を持ち上げて傾斜させるようにする。 Here, in order to separate the substrate 1 from the holding plate 10, in this embodiment, as shown in FIG. 4, one of the magnetic force generating devices 41a in the two magnetic force generating devices 41 is operated to generate the magnetic force. One of the magnets 42a provided on the movable member 20 in the device 41a is attracted by magnetic force, and one end side of the movable member 20 is lifted and inclined.
　このように可動部材２０の一端側を持ち上げて傾斜させると、傾斜した可動部材２０の一端側における粘着部材２１の部分から基板１が自重等により徐々に剥離されるようになる。その後、他方の磁力発生装置４１ｂを作動させると、この磁力発生装置４１ｂに可動部材２０に設けられた他方の磁石４２ｂが磁力により吸着されて、可動部材２０の他端側も持ち上げられて、基板１が粘着部材２１から剥離されるようになる。 When one end side of the movable member 20 is lifted and inclined as described above, the substrate 1 is gradually peeled off from the portion of the adhesive member 21 at the one end side of the inclined movable member 20 by its own weight or the like. Thereafter, when the other magnetic force generator 41b is operated, the other magnet 42b provided on the movable member 20 is attracted to the magnetic force generator 41b by the magnetic force, and the other end side of the movable member 20 is also lifted. 1 comes off from the adhesive member 21.
　この結果、基板１を粘着部材２１から剥離させる際に、小さな力で基板１が一端側から徐々に剥離され、基板１が割れたり、変形したりするということがなく、保持プレート１０から基板１が適切に離脱されるようになる。 As a result, when peeling the substrate 1 from the adhesive member 21, the substrate 1 is gradually peeled from one end by a small force, and the substrate 1 is not broken or deformed, and the holding plate 10 to the substrate 1 Will be properly withdrawn.
　なお、この実施形態においては、２つの磁力発生装置４１における一方の磁力発生装置４１ａを先に作動させて、可動部材２０の一端側を先に持ち上げて、可動部材２０を傾斜させるようにしたが、前記の可動部材２０に設ける磁石４２の高さを異ならせ、各磁力発生装置４１によって可動部材２０を持ち上げる高さを一端側と他端側とで異ならせて、可動部材２０を傾斜させるようにすることもできる。 In this embodiment, one of the magnetic force generating devices 41a of the two magnetic force generating devices 41 is actuated first to lift the one end side of the movable member 20 first to incline the movable member 20. The heights of the magnets 42 provided on the movable member 20 are made different, and the heights for lifting the movable member 20 by the respective magnetic force generating devices 41 are made different between the one end side and the other end side to incline the movable member 20. It can also be
　また、前記の可動部材２０の下面に設ける突出部２２の数や形状及び突出部２２の下面に取り付ける粘着部材２１の形状は、上記の実施形態に示したものに限定されず、前記のように可動部材２０の一端側を持ち上げて傾斜させた場合に、傾斜した可動部材２０の一端側における粘着部材２１の部分から基板１が自重等により適切に剥離されるようになっていればよい。このため、粘着部材２１としては、傾斜する可動部材２０の一端側から他端側に沿うように伸びたものを設けることが好ましい。例えば、図５に示すように、可動部材２０の一端側から他端側に伸びた３つの細長い形状になった突出部２２を下方に突出させて並設させ、各突出部２２の下面にそれぞれ対応した細長い形状になった粘着部材２１を取り付けるようにすることができる。 Further, the number and shape of the protrusions 22 provided on the lower surface of the movable member 20 and the shape of the adhesive member 21 attached to the lower surface of the protrusions 22 are not limited to those described in the above embodiment, as described above. When one end side of the movable member 20 is lifted and inclined, the substrate 1 may be appropriately peeled off from the portion of the adhesive member 21 at the one end side of the inclined movable member 20 by its own weight or the like. For this reason, it is preferable to provide as the adhesion member 21 what extended along the other end side from the one end side of the movable member 20 which inclines. For example, as shown in FIG. 5, three elongated projections 22 extending from one end to the other end of the movable member 20 are made to project downward and arranged in parallel, and the lower surfaces of the projections 22 respectively A correspondingly elongated adhesive member 21 can be attached.
　また、可動部材２０に設けられた前記の粘着部材２１の一端側から基板１を剥離させる分離手段４０も、上記の実施形態に示したものに限定されない。 Further, the separating means 40 for peeling the substrate 1 from one end side of the adhesive member 21 provided on the movable member 20 is not limited to the one shown in the above embodiment.
　例えば、図６に示すように、分離手段４０として、移動装置４３によって上下方向に移動される移動部材４４に複数（図に示す例では３つ）のアーム部４５（４５ａ～４５ｃ）を、可動部材２０の一端側から他端側に所要間隔を介して設けると共に、各アーム部４５にそれぞれ可動部材２０に設けられた係合凸部４６（４６ａ～４６ｃ）と係合する係止孔４７（４７ａ～４７ｃ）を設け、これらの係止孔４７（４７ａ～４７ｃ）における可動部材２０の移動方向の長さ、すなわち上下方向の長さを、可動部材２０の一端側に位置するアーム部４５ａから他端側に位置するアーム部４５ｃに向けて順々に長くしたものを用いることができる。 For example, as shown in FIG. 6, as the separating means 40, a plurality of (three in the example shown) arm portions 45 (45a to 45c) are movable on the moving member 44 moved in the vertical direction by the moving device 43. Locking holes 47 (provided at one end side to the other end side of the member 20 via a required interval) and engaged with the engaging convex portions 46 (46a to 46c) provided on the movable member 20 in the respective arm portions 45 ( 47a to 47c), and the length in the moving direction of the movable member 20 in the locking holes 47 (47a to 47c), that is, the length in the vertical direction is measured from the arm 45a positioned on one end side of the movable member 20. It is possible to use one which is sequentially lengthened toward the arm portion 45c located on the other end side.
　そして、この分離手段４０において、基板１を可動部材２０に設けられた粘着部材２１から剥離させて、保持プレート１０から離脱させるにあたっては、図７に示すように、上記の移動装置４３によって移動部材４４に設けられた各アーム部４５（４５ａ～４５ｃ）を基板１から離間させるように上方に持ち上げるようにする。 Then, in this separation means 40, when the substrate 1 is peeled off from the adhesive member 21 provided on the movable member 20 and separated from the holding plate 10, as shown in FIG. Each arm 45 (45 a to 45 c) provided at 44 is lifted upward to be separated from the substrate 1.
　このようにすると、最初に、可動部材２０の一端側における係合凸部４６ａが、可動部材２０の一端側に位置するアーム部４５ａに設けられた短い係止孔４７ａの下端に当接して係止され、このアーム部４５ａと一緒に上記の係合凸部４６ａが設けられた可動部材２０の一端側が持ち上げられ、次いで、可動部材２０の中央位置における係合凸部４６ｂが、中央に位置するアーム部４５ｂに設けられた中間の長さの係止孔４７ｂの下端に当接して係止され、このアーム部４５ｂと一緒に上記の係合凸部４６ｂが設けられた可動部材２０の中央部が持ち上げられ、最後に、可動部材２０の他端側における係合凸部４６ｃが、可動部材２０の他端側に位置するアーム部４５ｃに設けられた長い係止孔４７ｃの下端に当接して係止され、このアーム部４５ｃと一緒に上記の係合凸部４６ｃが設けられた可動部材２０の他端側が持ち上げられるようになる。 In this case, first, the engagement convex portion 46a on one end side of the movable member 20 abuts on the lower end of the short locking hole 47a provided in the arm portion 45a located on one end side of the movable member 20 And the one end side of the movable member 20 provided with the above-mentioned engaging convex portion 46a is lifted together with the arm portion 45a, and then the engaging convex portion 46b at the central position of the movable member 20 is positioned at the center A central portion of the movable member 20 in which the lower end of the intermediate length locking hole 47b provided in the arm portion 45b is abutted and locked, and the engaging convex portion 46b is provided together with the arm portion 45b Finally, the engagement projection 46c on the other end side of the movable member 20 abuts on the lower end of the long locking hole 47c provided in the arm portion 45c located on the other end side of the movable member 20. Locked, this Said engaging projection 46c comes to be lifted is the other end of the movable member 20 provided with the part 45 c.
　なお、前記のものにおいては、係止孔４７の長さを異ならせたアーム部４５を３つ設けるようにしたが、係止孔４７の長さを異ならせたアーム部４５は２つ設けるだけであっても、上記のように保持プレート１０の一端側を基板１から離間させるように上方に持ち上げて傾斜させ、粘着部材２１の一端側から基板１を剥離させるようにすることができる。 In the above, three arm portions 45 having different lengths of the locking holes 47 are provided, but only two arm portions 45 having different lengths of the locking holes 47 are provided. Even in this case, one end side of the holding plate 10 can be lifted upward to be separated from the substrate 1 as described above, and the substrate 1 can be peeled off from the one end side of the adhesive member 21.
　また、前記の可動部材２０及び突出部２２を柔軟な材料で構成した場合において、上記のように係止孔４７の長さを異ならせたアーム部４５を３つ以上設け、保持プレート１０の一端側を基板１から離間させるように上方に持ち上げると、図８に示すように、係止孔４７の長さの変化に応じて、前記の可動部材２０と突出部２２と粘着部材２１とが湾曲されながら、これらの一端側が持ち上がり、このように湾曲して持ち上げられた粘着部材２１の一端側から基板１を徐々に剥離させることができるようになる。 When the movable member 20 and the projection 22 are made of a flexible material, three or more arm portions 45 having different lengths of the locking holes 47 as described above are provided, and one end of the holding plate 10 When the side is lifted up so as to be separated from the substrate 1, as shown in FIG. 8, the movable member 20, the protrusion 22 and the adhesive member 21 are curved according to the change of the length of the locking hole 47. While being carried out, these one end side is lifted, and the substrate 1 can be gradually peeled off from the one end side of the adhesive member 21 which has been bent and lifted in this way.
　この結果、この分離手段４０においても、前記の可動部材２０が、その一端側から次第に傾斜するように持ち上げられ、傾斜した可動部材２０の一端側における粘着部材２１の部分から基板１が自重等により徐々に剥離されて、基板１が変形するということがなく、保持プレート１０から基板１が適切に離脱されるようになる。 As a result, also in the separating means 40, the movable member 20 is lifted so as to gradually incline from the one end side, and the substrate 1 is self-weighted from the portion of the adhesive member 21 at the one end side of the inclined movable member 20. The substrate 1 is gradually peeled off, and the substrate 1 is properly separated from the holding plate 10 without deformation of the substrate 1.
　また、この実施形態においては、１つの保持プレート１０に１つの可動部材２０を設けるようにしただけであるが、保持プレート１０に大きな基板１を保持させる場合には、図９及び図１０に示すように、１つの保持プレート１０に対して、前記の実施形態に示すようにして、複数（図に示す例では６つ）の可動部材２０を上下方向に移動可能に設け、各可動部材２０における各粘着部材２１を基板１に接触させて、各粘着部材２１の粘着力により基板１を保持プレート１０に保持させるようにすることも可能である。なお、この実施形態においては、保持プレート１０の下面に、各可動部材２０を区画させるようにして吸引溝１２を設けている。 Moreover, in this embodiment, only one movable member 20 is provided on one holding plate 10, but in the case of holding the large substrate 1 on the holding plate 10, it is shown in FIGS. As described in the above embodiment, a plurality of (six in the illustrated example) movable members 20 are provided vertically movable to one holding plate 10 as in the above embodiment. It is also possible to bring each adhesive member 21 into contact with the substrate 1 and hold the substrate 1 on the holding plate 10 by the adhesive force of each adhesive member 21. In this embodiment, the suction grooves 12 are provided on the lower surface of the holding plate 10 so as to partition the movable members 20.
　そして、前記のように各可動部材２０における各粘着部材２１の粘着力により保持プレート１０に保持された基板１を、各粘着部材２１から剥離させて保持プレート１０から離脱させるにあたっては、前記のように各可動部材２０の一端側を持ち上げて傾斜させ、傾斜した各可動部材２０の一端側における粘着部材２１の部分から基板１を徐々に剥離させて、各可動部材２０における各粘着部材２１から基板１を剥離させ、この基板１を前記の保持プレート１０から離脱させるようにする。 When the substrate 1 held by the holding plate 10 is peeled off from the pressure-sensitive adhesive member 21 by the adhesive force of the pressure-sensitive adhesive members 21 of the movable members 20 as described above, the substrate 1 is separated from the holding plate 10 as described above. The substrate 1 is gradually peeled off from the portion of the adhesive member 21 at one end side of each of the movable members 20 by lifting and tilting the one end side of each movable member 20. 1 is peeled off, and the substrate 1 is separated from the holding plate 10.
　ここで、前記のように各可動部材２０の一端側を持ち上げて傾斜させ、各可動部材２０における各粘着部材２１から基板１を剥離させるにあたっては、複数の可動部材２０の一端側を同時に持ち上げて傾斜させ、複数の可動部材２０における各粘着部材２１から基板１を同時に剥離させるようにする他、適当な位置における可動部材２０から順番に、可動部材２０の一端側を持ち上げて傾斜させ、基板１を各可動部材２０における各粘着部材２１から順々に剥離させるようにすることも可能である。 Here, as described above, when lifting and tilting one end side of each movable member 20 and peeling the substrate 1 from each adhesive member 21 in each movable member 20, lift one end side of the plurality of movable members 20 simultaneously. The substrate 1 is inclined so as to simultaneously peel the substrate 1 from each adhesive member 21 in the plurality of movable members 20. In addition, one end side of the movable member 20 is lifted and inclined in order from the movable member 20 at an appropriate position. It is also possible to peel off each adhesive member 21 in each movable member 20 in order.
　１　基板
　１０　保持プレート
　１１　貫通孔
　１２　吸引溝
　１３　吸引孔
　１４　吸引装置
　２０　可動部材
　２１　粘着部材
　２２　突出部
　３０　上プレート
　３１　連結部材
　４０　分離手段
　４１，４１ａ，４１ｂ　磁力発生装置
　４２，４２ａ，４２ｂ　磁石
　４３　移動装置
　４４　移動部材
　４５，４５ａ～４５ｃ　アーム部
　４６，４６ａ～４６ｃ　係合凸部
　４７，４７ａ～４７ｃ　係止孔 Reference Signs List 1 substrate 10 holding plate 11 through hole 12 suction groove 13 suction hole 14 suction device 20 movable member 21 adhesive member 22 projecting portion 30 upper plate 31 connecting member 40 separating means 41, 41a, 41b magnetic force generator 42, 42a, 42b magnet 43 Moving device 44 Moving member 45, 45a to 45c Arm portion 46, 46a to 46c Engaging convex portion 47, 47a to 47c Locking hole

Claims (6)

  1. 　保持プレートに設けられた粘着部材の粘着力により、基板を保持プレートに保持させる一方、保持された基板を上記の粘着部材から剥離させて保持プレートから離脱させる基板保持装置において、前記の保持プレートに、前記の粘着部材が設けられた可動部材を前記の基板に対して移動可能に設けると共に、この可動部材を基板に対し傾斜させて基板から離間させる方向に移動させ、可動部材に設けられた粘着部材の一端側から基板を剥離させて保持プレートから離脱させる分離手段を設けたことを特徴とする基板保持装置。 In the substrate holding apparatus, the substrate is held on the holding plate by the adhesive force of the pressure-sensitive adhesive member provided on the holding plate, and the held substrate is peeled off from the above-mentioned pressure-sensitive adhesive member and separated from the holding plate. A movable member provided with the adhesive member movably with respect to the substrate, and the movable member is inclined relative to the substrate and moved in a direction away from the substrate, and the adhesive provided on the movable member What is claimed is: 1. A substrate holding apparatus comprising: separation means for separating a substrate from one end side of a member and separating the substrate from the holding plate.
  2. 　請求項１に記載の基板保持装置において、前記の保持プレートに、粘着部材が設けられた前記の可動部材を複数設けると共に、各可動部材に対応させて複数の分離手段を設けたことを特徴とする基板保持装置。 2. The substrate holding device according to claim 1, wherein the holding plate is provided with a plurality of the movable members provided with the adhesive members, and a plurality of separating means are provided corresponding to the respective movable members. Substrate holding device.
  3. 　請求項１又は請求項２に記載の基板保持装置において、前記の可動部材に粘着部材を設けるにあたり、粘着部材を可動部材の傾斜方向の一端側から他端側に沿って設けたことを特徴とする基板保持装置。 3. The substrate holding device according to claim 1, wherein the adhesive member is provided along one end side to the other end side of the movable member in the inclination direction in providing the adhesive member to the movable member. Substrate holding device.
  4. 　請求項１～請求項３の何れか１項に記載の基板保持装置において、前記の分離手段として、前記の可動部材における粘着部材が設けられた面と反対側の面に磁性部材を設けると共に、磁性部材と対向するようにして磁力発生装置を、可動部材の傾斜方向の一端側から他端側に所要間隔を介して複数設けたことを特徴とする基板保持装置。 The substrate holding device according to any one of claims 1 to 3, wherein a magnetic member is provided on the surface of the movable member opposite to the surface provided with the adhesive member as the separation means. What is claimed is: 1. A substrate holding device comprising a plurality of magnetic force generating devices, each facing a magnetic member, provided from one end side to the other end side of the movable member in the inclination direction with a predetermined space therebetween.
  5. 　請求項１～請求項３の何れか１項に記載の基板保持装置において、前記の分離手段として、移動装置によって移動される移動部材に複数のアーム部を、傾斜する可動部材の一端側から他端側に所要間隔を介して設け、各アーム部に係止孔を設けると共に、前記の可動部材に、各アーム部に設けられた係止孔と係合する係合凸部を設け、各アーム部に設ける係止孔の移動方向の長さを、前記のように傾斜する可動部材の一端側から他端側に向かうに従って長くしたことを特徴とする基板保持装置。 The substrate holding device according to any one of claims 1 to 3, wherein, as the separation means, the moving member moved by the moving device is provided with a plurality of arm portions from the one end side of the movable member which inclines. A predetermined distance is provided on the end side, and a locking hole is provided in each arm portion, and an engagement convex portion engaged with the locking hole provided in each arm portion is provided on the movable member, each arm A substrate holding device characterized in that the length in the moving direction of the locking hole provided in the portion is increased from the one end side to the other end side of the movable member inclined as described above.
  6. 　請求項１～請求項５の何れか１項に記載の基板保持装置において、前記の保持プレートに、可動部材を基板に対して上下方向に移動可能に設け、前記の分離手段により、可動部材を基板に対し上下方向に傾斜して基板から離間させる方向に移動させて、可動部材に設けられた粘着部材の一端側から基板を剥離させて分離させることを特徴とする基板保持装置。 The substrate holding device according to any one of claims 1 to 5, wherein the movable plate is provided on the holding plate so as to be movable in the vertical direction with respect to the substrate, and the movable member is formed by the separating unit. A substrate holding apparatus characterized in that the substrate is peeled from one end side of an adhesive member provided on a movable member by separating the substrate from one end side of a pressure-sensitive adhesive member provided on a movable member by tilting in the vertical direction with respect to the substrate and moving in a direction separating from the substrate.
PCT/JP2012/078099 2012-10-31 2012-10-31 Substrate holding device WO2014068690A1 (en)

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PCT/JP2012/078099 WO2014068690A1 (en) 2012-10-31 2012-10-31 Substrate holding device
JP2014544110A JP5968456B2 (en) 2012-10-31 2012-10-31 Substrate holding device

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WO2014068690A1 true WO2014068690A1 (en) 2014-05-08

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Cited By (3)

* Cited by examiner, † Cited by third party
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