WO2014026818A1 - Dispositif d'observation pour dispositif sous vide - Google Patents

Dispositif d'observation pour dispositif sous vide Download PDF

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Publication number
WO2014026818A1
WO2014026818A1 PCT/EP2013/065064 EP2013065064W WO2014026818A1 WO 2014026818 A1 WO2014026818 A1 WO 2014026818A1 EP 2013065064 W EP2013065064 W EP 2013065064W WO 2014026818 A1 WO2014026818 A1 WO 2014026818A1
Authority
WO
WIPO (PCT)
Prior art keywords
observation
receptacle
tube
window
vacuum
Prior art date
Application number
PCT/EP2013/065064
Other languages
German (de)
English (en)
Inventor
Jörg MARGRAF
Original Assignee
Carl Zeiss Microscopy Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy Gmbh filed Critical Carl Zeiss Microscopy Gmbh
Priority to DE201311004056 priority Critical patent/DE112013004056A5/de
Publication of WO2014026818A1 publication Critical patent/WO2014026818A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/004—Sight-glasses therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/007—Pressure-resistant sight glasses

Definitions

  • the present application relates to observation devices for vacuum devices, vacuum devices equipped with a corresponding observation device and methods for operating such observation devices.
  • vacuum devices In many processes, workpieces are treated in a vacuum, ie at a pressure less than the ambient pressure. Such devices are generally referred to in this application as vacuum devices.
  • An example of such vacuum apparatuses are coating devices in which workpieces in a vacuum for example, of the order of 10 "6 to 10" 7 hPa be coated, for example by appropriate coating materials are vaporized and deposited on the workpiece.
  • Such coating devices can assume relatively large dimensions with several coating stations, between which the workpieces are transported, for example in order to be able to carry out a plurality of coating steps sequentially.
  • observation windows are partially required, through which visual inspections can be carried out or via which optical measurements can be carried out, for example by analyzing light emerging through the window (optionally in conjunction with an excitation light source).
  • observation windows often also have a sealing function, i. simply removing the window would leave behind a hole through which ambient air can flow into the vacuum device and thus destroy the vacuum. This can also lead to the destruction of pumps such as turbopumps.
  • evaporated material for example, also deposits on such observation windows in coating systems, so that they become intransparent with time and must be replaced.
  • simply swapping, ie, removing the viewing window and replacing it with a new one would cause the vacuum to be destroyed.
  • the vacuum device controlled ventilated and temporarily shut down which is relatively complex and time consuming and therefore in terms of productivity is not desirable.
  • an observation device according to claim 1 and a method for operating such an observation device according to claim 13 are provided.
  • the dependent claims define further embodiments as well as a vacuum device equipped with such an observation device.
  • an observation device for a vacuum apparatus comprising: an observation tube, and a movable member disposed transversely of the observation tube with a window member receptacle, the movable member being disposed between a first position in which the receptacle is disposed in the observation tube , and a second position in which the receptacle is arranged outside the observation tube, is movable.
  • a window element can be easily changed by bringing the receptacle with the window element to be changed from the first position to the second position.
  • the observer may include a seal between the viewing tube and the moveable member, wherein the receptacle in the second position is outside a sealed portion of the seal. By such a seal, a tightness of the observation device can be improved.
  • the observation device may comprise a further receptacle for a window element. In this case, when the movable element is in the first position, the further receptacle is arranged outside the observation tube, and, when the movable element in the second position, the further recording is arranged in the observation tube. In such an embodiment, a time in which no observation by the observation tube is possible at a window change can be reduced by merely switching between the first position and the second position and thus bringing a new window element into the observation tube.
  • the observation tube may be coupled to an optical system, for example to focus light emerging from a vacuum device through the observation tube into a light guide such as a glass fiber or in a measuring device.
  • an optical system for example to focus light emerging from a vacuum device through the observation tube into a light guide such as a glass fiber or in a measuring device.
  • the observation tube may be formed a transverse tube approach piece, through which the further element extends.
  • cover caps for fitting to the pipe fitting so as to further improve, for example, a seal in a case where the movable member does not have to be moved.
  • a vacuum device for example a coating device, is provided with such an observation device.
  • a window element in particular a soiled window element, is exchanged by means of the observation device, as already described above.
  • FIG. 1 is a perspective view of an observation device according to an embodiment of the invention.
  • FIG. 1 is another perspective view of the embodiment of FIG. 1,
  • Fig. 3 is a schematic cross-sectional view of the embodiment of Figures 1 and 2, and
  • FIGS. 1 and 2 respectively show perspective views of the observation device, while Fig. 3 shows a cross-sectional view.
  • the observation device 10 of FIGS. 1-3 has an observation tube 11, which can be flange-mounted via a flange 12 to a vacuum device, for example a coating device (indicated as 17 in FIG. 3). As indicated in Fig. 3 with a dashed arrow 1 18, 1 1 light from the vacuum device 1 17 can be coupled via the observation tube. Conversely, with such a monitoring device, however, also light can be coupled into a vacuum device.
  • the observation tube 1 1 has a circular cross-section, but other cross-sectional shapes are possible, for example a rectangular cross-section.
  • an optics 18 is provided at one of the flange 12 opposite end of the observation tube 1 1, to the vacuum device via the observation tube 1 1 coupled out light in an attached to a coupling piece 19 optical fiber 1 10, for example, a glass fiber, couple.
  • the light can then be further examined, for example by means of a spectrometer.
  • no optical fiber is provided and, for example, an analyzing device for analyzing the coupled-out light may be mounted directly on the observation tube 11.
  • such an analysis device may be completely omitted, and the observation tube may be used to visually inspect the interior of the vacuum device 117.
  • the observation tube 1 1 pipe extensions 13A, 13B, through which transverse to the observation tube 1 1, a movable element 14 extends, which in the direction of an arrow 1 14 (FIG. 3) is movable.
  • the movable member 14 has a cylindrical shape, but there are other cross sections, for example, a square or rectangular cross-section or another at least partially constant cross-section possible.
  • the movable element 14 has a first receptacle 15 in the form of a through hole and a second receptacle 16 in the form of a through hole. In the illustration of FIGS. 1-3, a window element in the form of an observation window 17 is accommodated in the second receptacle 16.
  • the first receptacle 15, however, is empty.
  • a position of the movable member 14 may be fixed by screws 12A and 112B or other members to prevent inadvertent movement of the movable member 14.
  • annular sealing elements 1 15A, 1 15B for example, plastic seals, which seal between the Rohransatz Cultureen 13 A, 13 B and the movable member 14.
  • the movable member 14 may fit snugly within the tube lugs 13A, 13B so that the seal achieves a seal.
  • the interior of the vacuum device 1 17 is sealed by the observation window 17 and the sealing elements 15A, 15B.
  • the observation window can be fixed in the receptacle 16 by fixing means, such as a screw or a pin, and / or can be sealed to the movable element 14 by means of a suitable seal, for example a rubber seal.
  • observation window 17 is dirty and has to be replaced, a new observation window is inserted into the empty receptacle 15 in the exemplary embodiments of FIGS. Then, the movable member 14 is moved so that I the recording 15 and thus the new observation window in the observation tube 1 1 is located, ie in the position in which the second receptacle 16 is in Figures 1 -3. The second receptacle 16 is then located outside the area sealed by the sealing elements 15A, 15B, and thus the (polluted) observation window 17 can be removed and, for example, measurements can be continued directly with the new observation window without the vacuum in the vacuum device 1 17 to significantly affect.
  • the movable element 14 can be moved manually, but it can also be a corresponding drive, for example an electric motor, be provided for moving the movable member 14.
  • a corresponding centering device for example in the pipe extension pieces 13A, 13B, be provided.
  • caps 1 1 1A, 1 1 1 B are plugged onto the pipe extensions 13A, 13B and sealed, for example, about seals 1 16A, 1 16B, for example, O-rings or other plastic seals.
  • This can increase the tightness of the entire observation device.
  • the caps 1 1 1A, 1 1 1 B are removed. Although this can reduce the tightness somewhat during the time of the change of the observation window, the sealing elements 15A, 15B nevertheless still provide a sufficient tightness.
  • the caps 1 1 1A, 1 1 1 B can be plugged again.
  • screws 1 13A and 1 13B may be provided, which may serve as a spacer to the movable member 14 and / or for fixing the caps 1 1 1A, 1 1 1 B, for example.
  • the movable member 14 in the illustrated embodiment has two receptacles 15, 16, may be provided in other embodiments, only a single shot. In this case, however, a change of the observation window takes a little longer, since the (then only) recording must first be moved out of the observation tube, then the observation window must be replaced and then the recording must be moved back into the observation tube. On the other hand, more than two shots can be provided.
  • a method for changing an observation window for example for the exemplary embodiment of FIGS.
  • a new observation window is turned into an inactive shot, i. a recording not in an observation beam path, for example the observation tube 1 1 of FIG. 1, is used.
  • the inactive shot i. a recording not in an observation beam path, for example the observation tube 1 1 of FIG. 1, is used.
  • the first shot 15 the inactive shot.
  • step 21 the movable element is then moved in such a way that the window used in step 20 is moved into the beam path, for example into the observation tube 1 1 of FIG. 3.
  • step 22 the dirty window is then removed.
  • the method of Fig. 4 may be adapted to modification of the observer. If, for example, as explained above, only one receptacle is present, to change the window, the movable element is first moved to bring this receptacle to an inactive position outside the beam path, then the soiled window is replaced with a new window (or the soiled window) Window cleaned if necessary), and then the movable element is moved to bring the new or cleaned window back into the beam path.
  • caps are provided in a corresponding observation device such as the caps 1 1 1A, 1 1 1 B of Figures 1 -3, these caps are removed at the beginning of the implementation of the method and put back to the end of the implementation of the method.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne un dispositif d'observation (10) pour un dispositif sous vide (117), par exemple un dispositif de revêtement, un élément fenêtre (17) pouvant être facilement remplacé par déplacement d'un élément (14) mobile de manière simple sans perturber notablement le vide régnant dans le dispositif sous vide (117).
PCT/EP2013/065064 2012-08-16 2013-07-17 Dispositif d'observation pour dispositif sous vide WO2014026818A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE201311004056 DE112013004056A5 (de) 2012-08-16 2013-07-17 Beobachtungseinrichtung für eine Vakuumvorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201210107497 DE102012107497A1 (de) 2012-08-16 2012-08-16 Beobachtungseinrichtung für eine Vakuumvorrichtung
DE102012107497.6 2012-08-16

Publications (1)

Publication Number Publication Date
WO2014026818A1 true WO2014026818A1 (fr) 2014-02-20

Family

ID=48795577

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/065064 WO2014026818A1 (fr) 2012-08-16 2013-07-17 Dispositif d'observation pour dispositif sous vide

Country Status (2)

Country Link
DE (2) DE102012107497A1 (fr)
WO (1) WO2014026818A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016087355A1 (fr) * 2014-12-04 2016-06-09 Universite De Nantes Dispositif pour la synthèse et l'étude de composés sous températures et pressions contrôlées
WO2018011055A1 (fr) * 2016-07-11 2018-01-18 Bayer Aktiengesellschaft Couvercle de hublot muni d'un dispositif de nettoyage intégré
CN112833318A (zh) * 2019-11-22 2021-05-25 常州松英视液镜有限公司 一种带有透视镜式油差开关探头及其制作工艺

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0541913A1 (fr) * 1991-11-14 1993-05-19 Leybold Aktiengesellschaft Dispositif d'observation du déroulement de processus
DE4222006A1 (de) * 1992-07-04 1994-01-05 Hpt Konstruktion Und Service H Vorrichtung zum Wechseln von Schaugläsern an unter Druck stehenden Behältern
WO1997007051A2 (fr) * 1995-08-11 1997-02-27 Tpa, Inc. Element d'observation scelle pour une unite de recuperation de soufre

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1773945A1 (de) * 1968-07-30 1972-01-13 Ruhstrat Geb Sichtfenster fuer geschlossene Gehaeuse,Kessel und umbaute Raeume
JPH03229632A (ja) * 1990-02-05 1991-10-11 Matsushita Electric Ind Co Ltd ビューイングポート
JP2005222980A (ja) * 2004-02-03 2005-08-18 Matsushita Electric Ind Co Ltd 真空処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0541913A1 (fr) * 1991-11-14 1993-05-19 Leybold Aktiengesellschaft Dispositif d'observation du déroulement de processus
DE4222006A1 (de) * 1992-07-04 1994-01-05 Hpt Konstruktion Und Service H Vorrichtung zum Wechseln von Schaugläsern an unter Druck stehenden Behältern
WO1997007051A2 (fr) * 1995-08-11 1997-02-27 Tpa, Inc. Element d'observation scelle pour une unite de recuperation de soufre

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016087355A1 (fr) * 2014-12-04 2016-06-09 Universite De Nantes Dispositif pour la synthèse et l'étude de composés sous températures et pressions contrôlées
FR3029428A1 (fr) * 2014-12-04 2016-06-10 Univ Nantes Dispositif pour la synthese et l'etude de composes sous temperatures et pressions controlees
WO2018011055A1 (fr) * 2016-07-11 2018-01-18 Bayer Aktiengesellschaft Couvercle de hublot muni d'un dispositif de nettoyage intégré
CN112833318A (zh) * 2019-11-22 2021-05-25 常州松英视液镜有限公司 一种带有透视镜式油差开关探头及其制作工艺
CN112833318B (zh) * 2019-11-22 2022-03-18 常州松英视液镜有限公司 一种带有透视镜式油差开关探头的制作工艺

Also Published As

Publication number Publication date
DE102012107497A1 (de) 2014-02-20
DE112013004056A5 (de) 2015-05-07

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