WO2014021160A1 - Pièce pour pompes à vide, et pompe à vide - Google Patents

Pièce pour pompes à vide, et pompe à vide Download PDF

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Publication number
WO2014021160A1
WO2014021160A1 PCT/JP2013/070021 JP2013070021W WO2014021160A1 WO 2014021160 A1 WO2014021160 A1 WO 2014021160A1 JP 2013070021 W JP2013070021 W JP 2013070021W WO 2014021160 A1 WO2014021160 A1 WO 2014021160A1
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WO
WIPO (PCT)
Prior art keywords
vacuum pump
reinforced composite
composite material
fiber
surface portion
Prior art date
Application number
PCT/JP2013/070021
Other languages
English (en)
Japanese (ja)
Inventor
樺澤　剛志
野中　学
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to CN201380039323.5A priority Critical patent/CN104471254A/zh
Priority to US14/417,037 priority patent/US20150184669A1/en
Priority to EP13824768.9A priority patent/EP2881590A4/fr
Priority to KR20147033866A priority patent/KR20150037747A/ko
Publication of WO2014021160A1 publication Critical patent/WO2014021160A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/516—Surface roughness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Definitions

  • the present invention relates to a vacuum pump component and a vacuum pump used in a vacuum pump used as a gas exhaust means for a process chamber and other sealed chambers in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, and a solar panel manufacturing apparatus.
  • the present invention relates to a vacuum pump component and a vacuum pump that can appropriately perform a film forming process on the surface of a fiber-reinforced composite material.
  • the cylinder made of FRP often has the release agent used at the time of molding attached or melted on its surface. For this reason, its surface is coated, and the coating material such as a plating layer is coated on the surface. In order to adhere to the surface of the FRP cylinder, it is necessary to remove this release agent in advance. *
  • the release agent attached to or melted into the surface of the FRP cylinder can be removed by grinding the surface with a grindstone, sandpaper, blasting, etc. There is a detrimental effect that damages the fibers and causes a reduction in the strength of the material.
  • Condition 1 The amount of polishing is strictly controlled to prevent damage to the fibers near the surface of the FRP cylinder. *
  • condition 1 when polishing with fine abrasive grains, condition 1 is easily satisfied because the polishing amount can be easily managed, but condition 3 is difficult to satisfy because surface irregularities are reduced.
  • the present invention has been made to solve such problems, and the object of the present invention is to provide a vacuum pump component that can appropriately perform a film forming process on the surface of a fiber-reinforced composite material. And providing a vacuum pump.
  • the vacuum pump component of the present invention is a fiber reinforced composite material provided with a coating, wherein the coating removes at least a surface portion of the fiber reinforced composite material, It is formed through a roughening step of roughening the surface of the fiber reinforced composite material.
  • the removal processing step includes a process of dissolving the fiber reinforced composite material with a chemical to remove the surface portion.
  • the removal processing step includes a process of removing the surface portion by polishing the fiber reinforced composite material using an abrasive in which abrasive grains are fixed to a flexible base material.
  • the said removal process process includes the process which removes the said surface part by apply
  • the said removal process process includes the process which removes the said surface part by blasting the said fiber reinforced composite material.
  • the surface is roughened by polishing the fiber-reinforced composite material after removing the surface portion using an abrasive in which abrasive grains are fixed to a flexible base material. It includes a process for converting to *
  • the roughening step includes a process of roughening the surface by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material after removing the surface portion. It is characterized by that.
  • the roughening step includes a process of roughening the surface of the fiber-reinforced composite material after removing the surface portion by blasting.
  • the fiber reinforced composite material may be removed by polishing the fiber reinforced composite material using a polishing material in which abrasive grains are fixed to a flexible substrate, or the fiber reinforced composite material may be removed.
  • a polishing material in which abrasive grains are fixed to a flexible substrate
  • the fiber reinforced composite material may be removed.
  • Including a treatment of removing the surface portion by applying abrasive grains to a flexible base material and polishing, and the roughening step softens the fiber-reinforced composite material after the surface portion is removed.
  • the surface of the surface is roughened by polishing with a polishing material having abrasive grains fixed to a substrate having a surface, or the fiber-reinforced composite material after removing the surface portion is made into a flexible substrate.
  • the removal processing step includes a process of removing the surface portion by blasting the fiber reinforced composite material, and the roughening step blasts the fiber reinforced composite material after removing the surface portion.
  • the particle size of the blasting material used in the blasting in the roughening step is three times or more the particle size of the blasting material used in the blasting in the removal processing step. It is characterized by that.
  • a fiber-reinforced composite material having a coating formed on the surface includes a removal processing step for removing at least a surface portion of the fiber-reinforced composite material, and a roughening step for roughening the surface.
  • a vacuum pump can be provided.
  • FIG. 3 is an enlarged view of a partial cross section indicated by A of the FRP cylinder shown in FIG. It is sectional drawing of the other vacuum pump to which this invention is applied.
  • FIG. 1 is a cross-sectional view of a vacuum pump to which the present invention is applied.
  • the vacuum pump P1 shown in the figure is used as a gas exhaust means for a process chamber and other sealed chambers in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, and a solar panel manufacturing apparatus. *
  • the vacuum pump P1 includes in the outer case 1 a blade exhaust portion Pt that exhausts gas by the rotating blade 13 and the fixed blade 14 and a screw groove pump portion Ps that exhausts gas by using the screw groove 19. is doing. *
  • the exterior case 1 has a bottomed cylindrical shape in which a cylindrical pump case 1A and a bottomed cylindrical pump base 1B are integrally connected with bolts in the cylinder axis direction.
  • An upper end portion of the pump case 1A is opened as a gas intake port 2, and a gas exhaust port 3 is provided on a side surface of the lower end portion of the pump base 1B.
  • the gas inlet 2 is connected to a sealed chamber (not shown), which is a high vacuum, such as a process chamber of a semiconductor manufacturing apparatus, by a bolt (not shown) provided on the flange 1C on the upper edge of the pump case 1A.
  • the gas exhaust port 3 is connected so as to communicate with an auxiliary pump (not shown).
  • a cylindrical stator column 4 containing various electrical components is provided in the center of the pump case 1A, and the stator column 4 is erected in such a manner that its lower end is screwed and fixed onto the pump base 1B. is there. *
  • a rotor shaft 5 is provided inside the stator column 4, and the rotor shaft 5 is arranged such that its upper end portion faces the gas inlet 2 and its lower end portion faces the pump base 1B. is there. Further, the upper end portion of the rotor shaft 5 is provided so as to protrude upward from the cylindrical upper end surface of the stator column 4.
  • the rotor shaft 5 is supported by a radial magnetic bearing 10 and an axial magnetic bearing 11 so as to be rotatable in the radial direction and the axial direction, and is rotationally driven by the drive motor 12 in this state.
  • the drive motor 12 has a structure including a stator 12 ⁇ / b> A and a rotor 12 ⁇ / b> B, and is provided near the center of the rotor shaft 5.
  • the stator 12 ⁇ / b> A of the drive motor 12 is installed inside the stator column 4, and the rotor 12 ⁇ / b> B of the drive motor 12 is integrally mounted on the outer peripheral surface side of the rotor shaft 5.
  • Two sets of radial magnetic bearings 10 are arranged one by one above and below the drive motor 12, and one set of axial magnetic bearings 11 is arranged on the lower end side of the rotor shaft 5.
  • the two sets of radial magnetic bearings 10 and 10 are respectively a radial electromagnet target 10A attached to the outer peripheral surface of the rotor shaft 5, a plurality of radial electromagnets 10B installed on the inner side surface of the stator column 4 facing this, and a radial direction displacement sensor. 10C is comprised.
  • the radial electromagnet target 10A is made of a laminated steel plate in which steel plates of high permeability material are laminated, and the radial electromagnet 10B attracts the rotor shaft 5 with a magnetic force in the radial direction through the radial electromagnet target 10A.
  • the radial direction displacement sensor 10 ⁇ / b> C detects the radial displacement of the rotor shaft 5. Then, by controlling the exciting current of the radial electromagnet 10B based on the value detected by the radial direction displacement sensor 10C (the radial direction displacement of the rotor shaft 5), the rotor shaft 5 is levitated and supported by a magnetic force at a predetermined position in the radial direction.
  • the axial magnetic bearing 11 includes a disk-shaped armature disk 11A attached to the outer periphery of the lower end portion of the rotor shaft 5, an axial electromagnet 11B facing up and down across the armature disk 11A, and a position slightly away from the lower end surface of the rotor shaft 5. And an axial direction displacement sensor 11C installed in *
  • the armature disk 11A is made of a material having high magnetic permeability, and the upper and lower axial electromagnets 11B attract the armature disk 11A from the upper and lower directions with a magnetic force.
  • the axial direction displacement sensor 11 ⁇ / b> C detects the axial displacement of the rotor shaft 5. Then, the rotor shaft 5 is levitated and supported at a predetermined position in the axial direction by controlling the excitation current of the upper and lower axial electromagnets 11B based on the detection value (axial displacement of the rotor shaft 5) detected by the axial direction displacement sensor 11C.
  • a rotor 6 is provided outside the stator column 4 as a rotating body of the vacuum pump P.
  • the rotor 6 has a cylindrical shape that surrounds the outer periphery of the stator column 4, and has two cylindrical bodies (a first cylindrical body 61 and a first cylindrical body 61) having different diameters via an annular plate-like circular member 60 that is positioned approximately in the middle. 2 cylinders 62) are connected in the axial direction. *
  • the first cylindrical member 61 is made of the same material as the circular member 60 (for example, aluminum or an alloy thereof).
  • the second cylindrical member 62 is made of FRP (Fiber Reinforced Plastics). *
  • the first cylindrical member 61 is cut from an aluminum lump or an alloy lump thereof by cutting or the like.
  • the circular member 60 is shaped like a flange provided on the outer periphery of the end of the first cylindrical member 61, and together with the first cylindrical member 61, the aluminum lump or It is cut out from the alloy lump.
  • the second cylindrical member 62 is formed separately from the circular member 60 and the first cylindrical member 61, and then fitted and joined to the outer periphery of the circular member 60 by press fitting. Note that the second cylindrical member 62 may be bonded to the outer periphery of the circular member 60 by bonding.
  • An end member 63 is provided at the upper end of the first cylindrical member 61, and the rotor 6 and the rotor shaft 5 are integrated via the end member 63.
  • a boss hole 7 is provided in the center of the end member 63, and a stepped shoulder (hereinafter referred to as “rotor shaft shoulder” is formed on the outer periphery of the upper end of the rotor shaft 5. Part 9 ").
  • the rotor 6 and the rotor shaft 5 are integrated by fitting the tip of the rotor shaft 5 above the rotor shaft shoulder 9 into the boss hole 7 of the end member 63, and the end member 63 and the rotor shaft shoulder 9. Was fixed with bolts. *
  • the rotor 6 composed of the first and second cylindrical members 61 and 62 and the circular member 60 is axially centered by the radial magnetic bearings 10 and 10 and the axial magnetic bearing 11 via the rotor shaft 5 (rotor shaft 5). It is supported so as to be rotatable around. The supported rotor 6 is rotationally driven around the rotor shaft 5 by the rotation of the rotor shaft 5 by the drive motor 12. *
  • the pump support system / rotary drive system including the rotor shaft 5, the radial magnetic bearings 10, 10 and the axial magnetic bearing 11 and the drive motor 12 is the circular member 60, the first and the first.
  • the two cylindrical members 61 and 62 function as driving means for rotationally driving around the center thereof.
  • the rotor 6 is located upstream from the substantially intermediate position of the rotor 6 (specifically, the position of the circular member 60; the same applies hereinafter).
  • the range up to the end of the gas intake port 2 side functions as the blade exhaust part Pt.
  • the detailed configuration of the blade exhaust part Pt is as follows. *
  • the component part of the rotor 6 upstream of the substantially intermediate position of the rotor 6, that is, the first cylindrical member 61 is a part that rotates as a rotating body of the blade exhaust part Pt.
  • a plurality of wings 13 are provided integrally.
  • the plurality of rotor blades 13 are arranged radially about the rotor shaft 5 that is the rotation axis of the rotor 6 or the axis of the outer case 1 (hereinafter referred to as “pump axis”). *
  • a plurality of fixed blades 14 are provided on the inner peripheral surface side of the pump case 1A, and these fixed blades 14 are also arranged in a radial pattern around the pump shaft center.
  • the rotor blades 13 and the fixed blades 14 as described above are alternately arranged in multiple stages along the pump axis, thereby forming the blade exhaust part Pt.
  • Each of the rotor blades 13 is a blade-like cut product that is cut and formed integrally with the outer diameter machining portion of the first cylindrical member 61, and is inclined at an optimum angle for exhausting gas molecules. Yes.
  • Each fixed blade 14 is also inclined at an angle optimum for exhausting gas molecules.
  • Screw Groove Pump Part Ps In the composite pump P1 of FIG. 1, it is downstream from a substantially middle position of the rotor 6 (a range from a substantially middle position of the rotor 6 to a gas exhaust port 3 side end of the rotor 6. The same functions as the thread groove pump portion Ps.
  • the detailed configuration of the thread groove pump portion Ps is as follows. *
  • a portion of the rotor 6 that is downstream of the middle of the rotor 6, that is, the second cylindrical member 62 is a portion that rotates as a rotating member of the thread groove pump portion Ps, and there is a thread groove on the outer periphery of the second cylindrical member 62.
  • a cylindrical fixing member 18 is provided as a pump portion stator, and this cylindrical fixing member (thread groove pump portion stator) 18 has a structure surrounding the outer periphery of the second cylindrical member 62. The lower end of the fixing member 18 is supported by the pump base 1B. *
  • a spiral thread groove pump flow path S is provided between the fixing member 18 and the second cylindrical member 62.
  • the second cylindrical member 62 is fixed to the second cylindrical member 62 by forming the outer peripheral surface of the second cylindrical member 62 as a curved surface having no irregularities and forming the spiral thread groove 19 on the inner surface side of the fixing member 18.
  • a configuration in which a thread groove pump flow path S is formed between the member 18 and the member 18 is adopted.
  • the second cylindrical member 62 and the fixing member are formed by forming such a thread groove 19 on the outer peripheral surface of the second cylindrical member 62 and making the inner surface of the fixing member 18 a curved surface without unevenness.
  • a thread groove pump flow path S may be formed between the two. *
  • the thread groove 19 is formed so that its depth changes to a tapered cone shape with a diameter decreasing downward.
  • the screw groove 19 is engraved in a spiral shape from the upper end to the lower end of the fixing member 18.
  • the depth of the thread groove 19 is set upstream of the thread groove pump flow path S. It is set so as to be deepest on the inlet side (flow path opening end closer to the gas inlet 2) and shallowest on the downstream outlet side (flow path opening end closer to the gas exhaust port 3).
  • the vacuum pump component of this embodiment according to the present invention is applied to the second cylindrical member 62 which is a component part of the thread groove pump portion Ps.
  • FIG. 2 is a perspective view showing the second cylindrical member 62 constituting the thread groove pump portion Ps of the vacuum pump shown in FIG. 1, and FIG. 3 is a perspective view of the FRP cylinder A shown in FIG.
  • FIG. 2 is an enlarged view of a partial cross section shown in FIG. 1, and is a diagram for explaining a removal processing step and a roughening step according to the present invention. *
  • the second cylindrical member 62 constituting the thread groove pump portion Ps in this embodiment uses, for example, carbon fiber as a reinforcing material, and mainly uses an epoxy resin as a base material. Is formed from a fiber reinforced composite material used. *
  • the reinforcing fibers 621 that are reinforcing materials are wound in multiple layers along the circumferential direction of the second cylindrical member 62 as shown in FIG. And the surface of this 2nd cylindrical member 62 is not flat by the winding nonuniformity of this reinforcement fiber 621, and some waviness has arisen.
  • the second cylindrical member 62 of this embodiment is formed by heating and pressure molding, at the time of mold release, as shown in FIG. A release agent layer 622 to which the agent is attached or melted is formed.
  • the presence of the release agent layer 622 reduces the adhesion of a plating layer made of, for example, a nickel alloy formed by an electroless plating process as a coating process performed later.
  • FIG. 3B shows a state after the removal of the surface portion including the release agent layer 622, and a surface 623 indicated by a solid line indicates the second portion after the removal of the surface portion including the release agent layer 622.
  • the outer surface (surface) of the cylindrical member 62 is shown, and a surface 624 shown by an imaginary line shows the outer surface of the second cylindrical member 62 before the removal of the surface portion including the release agent layer 622. . *
  • the removal amount of the surface portion including the release agent layer 622 must be strictly managed so as not to reach the reinforcing fibers 621 and cut a large amount of the reinforcing fibers 621.
  • the removal amount of the surface portion including the release agent layer 622 reaches the reinforcing fibers 621 and damages the reinforcing fibers 621, the reinforcing fibers 621 are peeled off and scattered starting from this portion. This type of vacuum pump causes serious disadvantages.
  • a surface portion including the release agent layer 622 is dissolved and removed by a chemical.
  • the chemicals used here include organic solvents such as “Silicon Off” manufactured by Sansai Kagaku, “Silicon Cut” manufactured by Nichido Kagaku Kogyo, and “esolv 21 series” manufactured by Kaneko Chemical, chromic acid, permanganic acid, etc. Can be used. *
  • the surface portion including the release agent layer 622 is removed by polishing the surface using an abrasive in which abrasive grains are fixed to a flexible substrate.
  • the abrasive with the abrasive grains fixed to the flexible base material is as follows: 1) Abrasive grains adhered to the sponge surface 2) Abrasive grains adhered to the nylon nonwoven fabric 3) Abrasives on the nylon thread A brush in which grains are bonded 4) A flap wheel made of an abrasive-bonded abrasive cloth with slits can be used.
  • the abrasive grains used here are preferably selected from # 240 or more, and for example, # 600 abrasive grains are used. *
  • a surface portion including the release agent layer 622 is removed by applying abrasive grains to a flexible substrate and polishing the surface.
  • This method is a so-called buffing method, and the abrasive grains used here are preferably selected from # 240 or more. For example, # 600 abrasive grains are used. *
  • the blasting here is a technique called air blasting in which a blasting material (grains of various abrasives) is sprayed onto the surface of the product with compressed air or continuously projected with a rotary blade.
  • a blasting material grain of various abrasives
  • it can replace with the said air blast and can also use the liquid honing which sprays the processing liquid which disperse
  • the reinforced fiber 921 is made to follow the undulation of this surface.
  • the release agent layer 622 can be removed without causing damage.
  • This roughening step is performed by any of the following methods. *
  • a surface is roughened by polishing the surface 623 after removing the surface portion including the release agent layer 622 using an abrasive in which abrasive grains are fixed to a flexible base material.
  • abrasive in which abrasive grains are fixed to a flexible substrate as in A-2
  • 1) abrasive grains adhered to the sponge surface 2) abrasive grains adhered to the nylon nonwoven fabric 3)
  • a flap wheel made of an abrasive-bonded abrasive cloth with slits can be used.
  • the abrasive grains used here are preferably selected from # 180 or less. For example, abrasive grains of # 100 are used. *
  • the surface is roughened by polishing the surface 623 after applying abrasive grains to a flexible substrate to remove the surface portion including the release agent layer 622.
  • this method is a so-called buffing method, but the abrasive grains used here are preferably selected from # 180 or less, and for example, # 100 abrasive grains are used. *
  • the grain size of the abrasive grains used in B-1) or B-2) is preferably 3 or more times the grain diameter of the abrasive grains used in A-2) or A-3).
  • This method is the same as in A-4), but here, it is preferable to use a blast material having a particle size of 3 times or more the particle size of the blast material used in the blasting process of A-4).
  • the surface of the second cylindrical member 62 is effectively formed with unevenness as shown by the surface 625 in FIG. Faced. *
  • a plating layer 626 as a coating layer is formed by electroless plating. It is formed.
  • the plating layer 626 is strongly adhered to the surface of the second cylindrical member 62 by an anchor effect due to the unevenness formed on the surface 625.
  • the film as a coating layer may be formed by coating etc.
  • the present invention is applied to the composite vacuum pump having the blade exhaust part Pt and the thread groove pump part Ps.
  • the present invention is similarly applied to a vacuum pump including only the thread groove pump. Can be applied to. *
  • FIG. 4 is a cross-sectional view of another vacuum pump P2 to which the present invention is applied. *
  • the vacuum pump P2 in the figure has a form in which the blade exhaust part Pt in the vacuum pump P1 in FIG. 1 is omitted, and as a basic configuration, a circular member 60 and a drive that rotationally drives the circular member 60 around its center.
  • Means (specifically, a pump support system / rotation drive system comprising the rotor shaft 5, radial magnetic bearings 10, 10 and axial magnetic bearing 11, and drive motor 12), and a cylindrical member 62 joined to the outer periphery of the circular member 60;
  • a fixing member 18 as a thread groove pump portion stator surrounding the outer periphery of the cylindrical member 62, a screw groove pump flow path S formed between the cylindrical member 62 and the fixing member 18, and a circular shape
  • Exhaust gas through the thread groove pump flow path S by rotation of the member 60 and the cylindrical member 62 is the same as in the composite pump P1 of FIG. Detailed description thereof will be omitted. *
  • the rotor 6 including the circular member 60 and the cylindrical member 62 is integrated with the rotor shaft 5 with the same structure as the rotor 6 of FIG. *
  • the present invention can be applied to the cylindrical member 62 of the vacuum pump P2 shown in FIG. 4 in the same manner as the second cylindrical member 62 shown in FIG. *

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Le problème à résoudre dans le cadre de la présente invention consiste à proposer une pièce pour des pompes à vides, ainsi qu'une pompe à vide pour laquelle un revêtement peut être formé de manière appropriée sur la surface d'un matériau composite renforcé de fibres. La solution proposée consiste en une pièce pour une pompe à vide qui est un second élément de type cylindre (62) de forme cylindrique composé d'un matériau composite renforcé de fibres sur la surface duquel une couche de placage (626), qui constitue le revêtement, est formée en tant que couche de revêtement. La couche de placage (626) est formée après une étape de suppression consistant à supprimer une partie de la surface, qui contient une couche d'agent de libération (622), de la surface du second élément de type cylindre (62) de forme cylindrique, et après une étape de rugosification de surface consistant à rendre rugueuse la surface (623) du second élément de type cylindre (62) après suppression de la partie de la surface qui contient la couche d'agent de libération (622).
PCT/JP2013/070021 2012-08-01 2013-07-24 Pièce pour pompes à vide, et pompe à vide WO2014021160A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201380039323.5A CN104471254A (zh) 2012-08-01 2013-07-24 真空泵用零件以及真空泵
US14/417,037 US20150184669A1 (en) 2012-08-01 2013-07-24 Vacuum pump part and vacuum pump
EP13824768.9A EP2881590A4 (fr) 2012-08-01 2013-07-24 Pièce pour pompes à vide, et pompe à vide
KR20147033866A KR20150037747A (ko) 2012-08-01 2013-07-24 진공 펌프용 부품 및 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012171432A JP2014031734A (ja) 2012-08-01 2012-08-01 真空ポンプ用部品および真空ポンプ
JP2012-171432 2012-08-01

Publications (1)

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WO2014021160A1 true WO2014021160A1 (fr) 2014-02-06

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PCT/JP2013/070021 WO2014021160A1 (fr) 2012-08-01 2013-07-24 Pièce pour pompes à vide, et pompe à vide

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US (1) US20150184669A1 (fr)
EP (1) EP2881590A4 (fr)
JP (1) JP2014031734A (fr)
KR (1) KR20150037747A (fr)
CN (1) CN104471254A (fr)
WO (1) WO2014021160A1 (fr)

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TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
JP2022185262A (ja) * 2021-06-02 2022-12-14 株式会社島津製作所 真空ポンプおよびリークディテクタ

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JPH074383A (ja) 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
JP2004256903A (ja) * 2003-02-27 2004-09-16 Toshiba Corp ロータの補修方法及びロータ補修装置
JP2004278512A (ja) 2002-10-11 2004-10-07 Alcatel 複合材を用いたスカート（ｃｏｍｐｏｓｉｔｅｓｋｉｒｔ）を有するターボ／ドラッグポンプ

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GB0314692D0 (en) * 2003-06-25 2003-07-30 Boc Group Plc Improvements in turbomolecular pumps
DE202004010821U1 (de) * 2003-07-23 2004-12-23 The Boc Group Plc, Windlesham Vakuumpumpenbauteil
US20080159870A1 (en) * 2006-12-14 2008-07-03 Hontek Corporation Method and coating for protecting and repairing an airfoil surface using molded boots, sheet or tape
KR101823703B1 (ko) * 2010-06-24 2018-03-14 에드워즈 가부시키가이샤 진공 펌프

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JPH074383A (ja) 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
JP2004278512A (ja) 2002-10-11 2004-10-07 Alcatel 複合材を用いたスカート（ｃｏｍｐｏｓｉｔｅｓｋｉｒｔ）を有するターボ／ドラッグポンプ
JP2004256903A (ja) * 2003-02-27 2004-09-16 Toshiba Corp ロータの補修方法及びロータ補修装置

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EP2881590A4 (fr) 2016-04-06
EP2881590A1 (fr) 2015-06-10
US20150184669A1 (en) 2015-07-02
KR20150037747A (ko) 2015-04-08
CN104471254A (zh) 2015-03-25
JP2014031734A (ja) 2014-02-20

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