WO2014013996A1 - Manufacturing method for reinforced cover glass, and reinforced cover glass - Google Patents

Manufacturing method for reinforced cover glass, and reinforced cover glass Download PDF

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Publication number
WO2014013996A1
WO2014013996A1 PCT/JP2013/069324 JP2013069324W WO2014013996A1 WO 2014013996 A1 WO2014013996 A1 WO 2014013996A1 JP 2013069324 W JP2013069324 W JP 2013069324W WO 2014013996 A1 WO2014013996 A1 WO 2014013996A1
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WO
WIPO (PCT)
Prior art keywords
cover glass
reinforced cover
glass plate
polishing
glass
Prior art date
Application number
PCT/JP2013/069324
Other languages
French (fr)
Japanese (ja)
Inventor
出 鹿島
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旭硝子株式会社
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Publication of WO2014013996A1 publication Critical patent/WO2014013996A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/005Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means

Definitions

  • the present invention relates to a method for producing a reinforced cover glass, a reinforced cover glass, a method for producing a reinforced cover glass with an integrated touch sensor, and a reinforced cover glass with an integrated touch sensor.
  • Capacitive touch panels used in electronic terminal devices such as smartphones and tablet computers have touch sensor wiring, such as translucent input position detection electrodes, formed on a glass plate and reinforced on the upper surface of the touch sensor wiring. It is constituted by arranging a cover glass.
  • Patent Document 1 proposes a touch sensor-integrated reinforced cover glass in which touch sensor wiring is directly formed on the reinforced cover glass without using the glass plate. According to the touch sensor integrated reinforced cover glass of Patent Document 1, the number of parts can be reduced and the thickness can be reduced.
  • one large-sized glass plate (hereinafter, in this specification, a large-sized glass plate for cutting out product-sized glass plates of various electronic device products).
  • the base plate which is a glass plate is referred to as “first glass plate”.
  • a base plate is made of a glass plate of a product size of a desired dimension (hereinafter referred to as a product size glass plate in this specification).
  • a method of taking a large number of touch sensor-integrated reinforced cover glasses by cutting into “second glass plate”) is preferable.
  • Patent Documents 2 and 3 propose a reinforced cover glass suitable for a touch sensor integrated reinforced cover glass. Its contents are measured by the method specified in JIS R1601: 2008 by specifying the composition of the glass and chamfering or etching the end face of the chemically strengthened reinforced cover glass. 4 point bending strength: also called end face strength).
  • Patent Documents 2 and 3 do not specify a manufacturing process for increasing the bending strength of the reinforced cover glass. Moreover, since the processing methods of Patent Documents 2 and 3 for increasing the bending strength only perform chamfering or etching on the end face of the reinforced cover glass, the bending strength cannot be sufficiently increased.
  • the bending strength of the reinforced cover glass currently on the market is approximately 600 to 700 MPa. Also, there is a correlation between bending strength and impact strength. In the market, a reinforced cover glass having high bending strength, that is, high impact strength is desired.
  • the present invention has been made in view of such circumstances, and a method for manufacturing a reinforced cover glass and a reinforced cover glass having unprecedented bending strength, a method for manufacturing a reinforced cover glass integrated with a touch sensor, and a touch sensor.
  • An object is to provide a body-type reinforced cover glass.
  • a first glass plate having two opposing main planes that is, main surfaces
  • the first glass plate having two opposing main planes is chemically strengthened to at least one of the two main planes.
  • a polishing step for polishing the end face to be connected and an etching step for etching the end face of the second glass plate are provided.
  • the manufacturing method of an above-described reinforced cover glass is implemented according to the order of an above-described process.
  • One aspect of the reinforced cover glass of the present invention is characterized by being manufactured by the method for manufacturing a reinforced cover glass of one aspect of the present invention in order to achieve the above object.
  • one aspect of the reinforced cover glass of the present invention has two opposing principal planes and an end face connecting the two principal planes, and compressive stress is applied to at least one of the principal planes.
  • a layer is formed, the arithmetic average roughness Ra of the end face is 20 nm or less, and the four-point bending strength measured by a method defined in JIS R1601: 2008 is 1000 MPa or more.
  • a compressive stress layer is formed on the main planes on both sides of the reinforced cover glass.
  • the first object has two main planes facing each other and an end face connecting between the two main planes.
  • the manufacturing method of an above-described reinforced cover glass is implemented according to the order of an above-described process.
  • the present invention also provides a touch sensor-integrated reinforced cover glass manufactured by the above-described manufacturing method.
  • One aspect of the reinforced cover glass with an integrated touch sensor according to the present invention has two main planes facing each other and an end face connecting between the two main planes in order to achieve the above object.
  • Compressive stress layer is formed on at least one of them
  • touch sensor wiring is formed on one of the main planes
  • the arithmetic mean roughness Ra of the end face is 20 nm or less, and measured by a test method defined in JIS R1601: 2008
  • the four-point bending strength is 1000 MPa or more.
  • a compressive stress layer is formed on the main planes on both sides of the reinforced cover glass.
  • the present invention also provides a glass plate processing process for further enhancing the bending strength of the glass plate by providing a polishing step before the etching step.
  • the present invention includes a polishing step before the etching step, and polishes the end surface of the second glass plate in the polishing step to remove scratches that cause cracks and reduce the roughness of the end surface. And the end surface is etched in an etching process.
  • “providing a polishing step before the etching step” includes “being equipped with a polishing step immediately before the etching step” as well as “polishing step, chemical strengthening step, and then etching step in that order”.
  • another process for example, a cleaning process may be added between the above-described processes.
  • a reinforced cover glass having a 4-point bending strength of 1000 MPa or more measured by a test method defined in JIS R1601: 2008, and a touch sensor An integrated reinforced cover glass can be provided. This strength is unprecedented.
  • the arithmetic average roughness Ra of the end face is set to 20 nm or less by polishing the end face of the second glass plate in the polishing step.
  • a reinforced cover glass having a four-point bending strength of 1000 MPa or more as measured by a test method defined in JIS R1601: 2008.
  • the polishing step contacts a brush that moves continuously while supplying a polishing liquid containing abrasive grains to the end face of the second glass plate. It is preferable that the end face is polished by the above.
  • the arithmetic average roughness Ra of the end face of the second glass plate can be reduced to 20 nm or less by performing the polishing step and then the etching step.
  • a cutting step of cutting the first glass plate into a desired shape is provided between the chemical strengthening step and the polishing step.
  • the first glass plate is chemically strengthened.
  • the chemically strengthened first glass plate is cut into a desired shape, and a large number of reinforced cover glasses having desired dimensions are taken.
  • “multi-piece” means that a second glass plate having a smaller size (for example, a glass plate having a product size applied to a touch panel product) is cut out from the first glass plate.
  • the end face of the reinforced cover glass is polished to reduce the end face roughness. Thereafter, the end face is etched.
  • the manufacturing process of the reinforced cover glass includes a cutting process
  • the end surface of the reinforced cover glass is polished to reduce the roughness of the end surface because the polishing process is included in the previous process of the etching process.
  • a reinforced cover glass having a bending strength that is not found in the past can be obtained.
  • a cutting step of cutting the first glass plate into a second glass plate having a desired shape is provided as a pre-process of the polishing step.
  • the first glass plate is cut into a desired shape, and a large number of second glass plates having desired dimensions are taken.
  • the end face of the second glass plate is polished to reduce the end face roughness.
  • the second glass plate is chemically strengthened to produce a reinforced cover glass.
  • the end face having a small roughness of the reinforced cover glass is etched.
  • the manufacturing process of the reinforced cover glass includes a cutting process, the end surface of the reinforced cover glass is polished to reduce the roughness of the end surface because the polishing process is included in the previous process of the etching process.
  • a reinforced cover glass having a bending strength that is not found in the prior art can be obtained.
  • the arithmetic average roughness Ra of the end surface is 20 nm or less by polishing the end surface of the second glass plate in the polishing step. It is preferable to make it. As described above, if the arithmetic average roughness Ra of the end surface is 20 nm or less by polishing the end surface of the second glass plate in the polishing step, the end surface of the second glass plate is subjected to etching treatment. After that, the arithmetic average roughness Ra of the end surface of the second glass plate subjected to the etching treatment can be set to 20 nm or less.
  • a touch sensor integrated reinforced cover glass having a four-point bending strength of 1000 MPa or more measured by a test method defined in JIS R1601: 2008.
  • the polishing step continuously moves while supplying a polishing liquid containing polishing abrasive grains to the end surface of the second glass plate. It is preferable to polish the said end surface by making the brush to contact.
  • the arithmetic average roughness Ra of the end face of the second glass plate can be 20 nm or less.
  • One embodiment of the present invention is to polish an end face with a polishing liquid containing abrasive grains, preferably so-called free abrasive grains, whereby the end face of a glass plate can be satisfactorily polished.
  • the abrasive grains are not limited to loose abrasive grains, and even if the end face of the glass plate is polished with a fixed abrasive grain (grinding stone) to which a large abrasive grain is fixed, the arithmetic average roughness of the end face Ra can be 20 nm or less.
  • the present invention it is possible to provide a method for manufacturing a reinforced cover glass and a reinforced cover glass having an unprecedented bending strength, a method for manufacturing a touch sensor integrated reinforced cover glass, and a touch sensor integrated reinforced cover glass.
  • the manufacturing method of the reinforced cover glass which comprises the input operation surface of capacitive touch panels, such as a smart phone and a tablet computer, and the manufacturing method of a touch sensor integrated reinforced cover glass are demonstrated to an example.
  • FIG. 1 is an enlarged cross-sectional view of a main part schematically showing the configuration of a reinforced cover glass 1 with an integrated touch sensor.
  • the touch sensor-integrated reinforced cover glass 1 has a function as a cover glass constituting an input operation surface of a capacitive touch panel, and a function as a sensor substrate on which touch sensor wiring such as an input position detection electrode is formed. Have both.
  • the touch sensor integrated reinforced cover glass 1 is configured by providing an input position detecting electrode 12, a black light shielding layer 14, a peripheral wiring 16, a protective layer 18 and the like on one main plane 10A of the reinforced cover glass 10. .
  • the other main plane 10B of the reinforced cover glass 10 is an input operation surface.
  • the thickness of the reinforced cover glass 10 is usually about 0.3 to 1.5 mm, preferably 0.5 to 1.1 mm.
  • the end surface 10C which connects between the two main planes 10A and 10B which oppose is chamfered as needed. That is, the ridge angle part between main plane 10A, 10B and the end surface 10C is ground, and the chamfered surface 11 of predetermined width is formed in the peripheral part of main plane 10A, 10B.
  • the input position detection electrode 12 is made of a light-transmitting conductive film such as an ITO (Indium Tin Oxide) film or the like in the central region of one main plane 10A of the reinforced cover glass 10 (that is, a display such as a liquid crystal display panel). Effective pixel area).
  • the thickness of the translucent conductive film forming the input position detecting electrode 12 is about 20 to 100 nm.
  • the light shielding layer 14 is formed to completely control the light incident on the liquid crystal display panel, and is formed in a region around the central region where the input position detecting electrode 12 is formed, that is, in a peripheral region.
  • the light shielding layer 14 is formed of, for example, a black photosensitive resin (photoresist) containing titanium black or the like.
  • the thickness of the light shielding layer 14 is about 1 to 2 ⁇ m.
  • the light shielding layer 14 can also be formed by a screen printing method or the like. However, when the printing method is used, since the thickness of the light shielding layer 14 is as thick as about 10 to 30 ⁇ m, it is preferable to use a photoresist for the light shielding layer 14.
  • the peripheral wiring 16 is formed on the light shielding layer 14 from a metal such as a laminated structure of Mo—Nb alloy / Al / Mo—Nb alloy or a laminated structure of Mo—Nb alloy / Al—Nd alloy / Mo—Nb alloy. Formed by the film.
  • the thickness of the metal film forming the peripheral wiring 16 is about 0.3 to 0.5 ⁇ m.
  • the protective layer 18 is formed mainly to protect the input position detection electrode 12, the light shielding layer 14, and the peripheral wiring 16, and to cover the input position detection electrode 12, the light shielding layer 14, and the peripheral wiring 16.
  • the protective layer 18 is formed of, for example, a translucent photoresist.
  • the thickness of the protective layer 18 is about 1 to 2 ⁇ m.
  • FIG. 2 is a flowchart showing a manufacturing process of the first manufacturing method of the reinforced cover glass 10, in which a large number of second glass plates having a product size are taken from the base plate which is the first glass plate, and the reinforced cover glass is obtained.
  • 10 is a flowchart of a manufacturing process for manufacturing 10; Hereinafter, this manufacturing process will be described with reference to the structure of the reinforced cover glass of FIG.
  • an unreinforced glass plate that is the same size as the reinforced cover glass 10 that is, the second glass plate
  • the unstrengthened base plate is cut to obtain a plurality of product-sized glass plates 10 (step S40: cutting step).
  • step S41 polishing step
  • the end face 10C of the glass plate 10 is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C
  • the polishing step it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less.
  • the glass plate 10 is chemically strengthened by a chemical strengthening method (that is, an ion exchange strengthening method) to manufacture the strengthened cover glass 10 (step S42: chemical strengthening step).
  • the chemical strengthening treatment is performed by, for example, immersing the glass plate 10 in a molten salt of an alkali metal salt at 400 ° C. to 550 ° C. for a certain period of time, for example, about 1 to 48 hours, so that alkali metal ions (typically Forms a surface compressive stress layer on the surface of the glass plate 10 by exchanging Na ions) with alkali metal ions (typically K ions) in a molten salt having a larger ion radius than the alkali metal ions. It is a process to strengthen.
  • alkali metal ions typically Forms a surface compressive stress layer on the surface of the glass plate 10 by exchanging Na ions
  • alkali metal ions typically K ions
  • the molten salt used for the chemical strengthening treatment is not particularly limited as long as it contains, for example, potassium ions.
  • a molten salt of potassium nitrate (KNO 3 ) is preferably used.
  • KNO 3 potassium nitrate sodium nitrate
  • KNO 3 potassium nitrate sodium nitrate
  • NaNO 3 sodium nitrate
  • step S43 etching process
  • the entire surface of the end face 10C can be uniformly etched, and the arithmetic average roughness Ra of the end face after the etching process is processed. Can be made 20 nm or less. Therefore, according to the 1st manufacturing method, the reinforced cover glass 10 which has the bending strength which is not in the past can be obtained.
  • FIG. 3 is a flowchart showing a manufacturing process of the second manufacturing method of the reinforced cover glass 10. A chemical strengthening process is performed on the base plate which is the first glass plate, and the reinforced cover glass 10 having a product size is formed from the base plate. It is a flowchart of the manufacturing process which takes many sheets.
  • the base plate is chemically strengthened by a chemical strengthening method to form a base plate size reinforced cover glass (step S30: chemical strengthening step).
  • step S31 cutting step
  • the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C (step S32: polishing step). ).
  • the polishing step it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less.
  • the entire surface of the end face 10C can be etched more uniformly, and the arithmetic average roughness Ra of the end face after this etching process can be reduced to 20 nm or less.
  • step S33 etching process
  • the polishing process is provided in the previous process of the etching process, the entire end face 10C can be uniformly etched. Therefore, according to the 2nd manufacturing method, the reinforced cover glass 10 which has the bending strength which is not in the past can be obtained.
  • FIG. 4 is a flowchart showing a manufacturing process of the manufacturing method of the touch sensor-integrated reinforced cover glass 1, which is performed by performing a chemical strengthening process on the base plate, which is the first glass plate, and then performing a wiring forming process. It is a flowchart of the manufacturing process which manufactures the touch sensor integrated reinforced cover glass 1 of a product size from a base plate.
  • the unstrengthened base plate is chemically strengthened to make a base plate-sized reinforced cover glass (step S60: chemical strengthening step).
  • step S61 wiring forming step. Since the method for forming these touch sensor wirings is a known technique, a specific description thereof will be omitted.
  • step S62 cutting step
  • step S63 polishing). Process
  • the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C (step S63: polishing). Process).
  • the polishing step it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less.
  • the entire surface of the end face 10C can be etched more uniformly, and the arithmetic average roughness Ra of the end face after this etching process can be reduced to 20 nm or less.
  • step S64 etching process
  • the touch sensor integrated reinforced cover glass 1 As described above, according to the method of manufacturing the reinforced cover glass 1 with an integrated touch sensor, since the polishing process is provided in the previous process of the etching process, the entire end surface 10C can be uniformly etched. Therefore, according to the manufacturing method of the touch sensor integrated reinforced cover glass 1, the touch sensor integrated reinforced cover glass 1 having a bending strength that has not been conventionally available can be obtained.
  • the thickness of the compressive stress layer on the main planes 10A and 10B of the reinforced cover glass 10 formed in the chemical tempering process and the treatment in the etching process is performed before the chemical strengthening process. Even in the case of the first manufacturing method of FIG.
  • the thickness of the compressive stress layer is preferably 10 ⁇ m or more, and the etching amount is preferably 2 ⁇ m to 10 ⁇ m.
  • the etching amount refers to the thickness at which the surface of the end face of the glass plate is removed by etching.
  • the etching amount is controlled by the immersion time in the mixed aqueous solution containing HF (hydrofluoric acid). Specifically, after performing etching for a predetermined time using glass of the same composition in advance to calculate the etching amount, etching is performed by adjusting the immersion time so that the desired etching amount is obtained. Depending on the type of glass, the hydrofluoric acid concentration may be changed to adjust the etching amount.
  • FIG. 5 is a side view of the brush polishing apparatus 30 that polishes the end face 10 ⁇ / b> C of the reinforced cover glass (glass plate) 10.
  • a brush polishing apparatus 30 shown in FIG. 1 includes a laminated body 20 formed by laminating a plurality of (for example, 200) reinforced cover glasses (glass plates) 10, and a polishing brush that rotates an outer peripheral portion of the laminated body 20.
  • This is an apparatus that polishes the end face 10C of each reinforced cover glass (glass plate) 10 in a lump by polishing by 34.
  • the reinforced cover glass (glass plate) 10 is laminated with the interval adjusting member 22 interposed therebetween, and the interval G in the laminating direction is adjusted to a predetermined value.
  • the brush polishing apparatus 30 includes a laminate holding unit 32, a polishing brush 34, a driving unit (not shown) that drives the polishing brush 34, and a polishing liquid supply unit 36 that supplies a polishing liquid 38.
  • the laminate holder 32 holds the laminate 20 in a detachable manner.
  • the stacked body 20 is held by being sandwiched from both sides in the stacking direction.
  • the polishing brush 34 includes a shaft 34A and a large number of brush hairs 34B provided radially on the outer periphery of the shaft 34A.
  • the shaft 34A is formed in a cylindrical shape having a predetermined outer diameter.
  • the brush bristles 34B are provided on the outer periphery of the shaft 34A by spirally winding the thing implanted in the belt-like body around the outer periphery of the shaft 34A.
  • the brush bristles 34B are made of, for example, a flexible wire made of polyamide resin or the like.
  • the wire may contain particles such as alumina (Al 2 O 3 ), silicon carbide (SiC), and diamond.
  • the polishing liquid supply unit 36 supplies the polishing liquid to the contact portion between the polishing brush 34 and the laminate 20.
  • the polishing liquid 38 contains polishing abrasive grains and a dispersion medium, and is adjusted to a predetermined specific gravity.
  • the abrasive grains for example, cerium oxide, zirconia, or the like is used.
  • the average particle diameter (D50) of the abrasive grains is, for example, 5 ⁇ m or less, preferably 2 ⁇ m or less.
  • the specific gravity of the polishing liquid is preferably 1.1 to 1.4.
  • the polishing brush 34 is rotated at a constant rotation speed.
  • the polishing brush 34 is moved horizontally toward the laminate 20, and the abrasive brush 34 is pressed and brought into contact with the outer peripheral portion of the laminate 20. At this time, the polishing brush 34 is moved horizontally so as to come into contact with a predetermined pushing amount.
  • the polishing liquid is supplied at a predetermined supply amount from the polishing liquid supply unit 36 to the contact portion between the polishing brush 34 and the laminate 20.
  • the polishing brush 34 is reciprocated at a predetermined speed in the axial direction (lamination direction of the glass plate 10).
  • the end surface 10C of the glass plate 10 of several sheets can be grind
  • FIG. 6A is a cross-sectional view of the end face 10C schematically showing the roughness (shape) of the end face 10C immediately after cutting
  • FIG. 6B is the roughness (shape) of the end face 10C after the polishing process.
  • the uneven portion of the scratch on the end surface 10C of the reinforced cover glass (glass plate) 10 is polished and removed by the polishing brush 34, and the arithmetic average roughness Ra of the end surface 10C is 20 nm or less. Became. In addition, arithmetic mean roughness Ra was measured based on JIS0B0601.
  • an etching process for etching the end face 10C of the reinforced cover glass 10 is provided as a subsequent process of the polishing process by the brush polishing apparatus 30. ing.
  • the sharpened portion of the minute uneven portion present on the polished surface of the end surface 10C can be blunted, and the etching process is uniformly performed on the entire surface of the end surface 10C. Therefore, the bending strength of the reinforced cover glass 10 can be further increased.
  • the end face 10C of the reinforced cover glass 10 is immersed in a mixed aqueous solution containing 2 wt% HF (hydrofluoric acid) in 6 mol / L HCl (hydrochloric acid), and the end face 10C is dissolved by about 1 ⁇ m to 5 ⁇ m from the surface layer.
  • a masking film is formed in the required area
  • the masking film is peeled off.
  • the bending strength of the reinforced cover glass 10 was further increased, and the reinforced cover glass 10 having a four-point bending strength of 1000 MPa or more measured by a method defined in JIS R1601: 2008 was obtained.
  • the base plate is cut by a scribe / break method, a laser cutting method, or the like.
  • the scribe break method is a method in which a scribe line (groove line) is formed on a main surface of a glass plate along a planned cutting line with a scribe cutter, and then the glass plate is bent to be cut.
  • the laser cutting method is a method of irradiating the surface of the glass plate with laser light along the planned cutting line and cleaving it with thermal stress.
  • a discharge electrode can be used instead of the laser light source.
  • the individual reinforced cover glasses (glass plates) 10 are cut into the same size.
  • a chamfering process may be provided in the pre-process of the polishing process.
  • a rotating grinding wheel is brought into contact with the end surface of the reinforced cover glass (glass plate) 10, and the ridge angle between the main planes 10A and 10B on the front and back of the reinforced cover glass (glass plate) 10 and the end surface 10C is obtained. This is done by grinding away the part.
  • chamfering can be performed by other methods.
  • the chamfering process is a process that is selectively performed. That is, the chamfering process is not necessarily a process that must be performed, but is a process that is selectively performed as necessary. However, by providing this chamfering step, cracking of the edge portion of the reinforced cover glass (glass plate) 10 can be effectively prevented, and the end face of the reinforced cover glass (glass plate) 10 can be strengthened.
  • the “end face” of the reinforced cover glass (glass plate) 10 means a cut surface when the base plate is cut, and the chamfered surface 11 is included when chamfering is performed after cutting. Shall be.
  • SYMBOLS 1 Touch sensor integrated reinforced cover glass, 10 ... Reinforced cover glass (glass plate), 11 ... Chamfered surface, 12 ... Input position detection electrode, 14 ... Light shielding layer, 16 ... Peripheral wiring, 18 ... Protective layer, 20 ... Laminated body, 22 ... spacing adjusting member, 30 ... brush polishing device, 32 ... laminated body holding section, 34 ... polishing brush, 34A ... shaft, 34B ... brush hair, 36 ... polishing liquid supply section, 38 ... polishing liquid

Abstract

 The purpose of the present invention is to provide a manufacturing method for a reinforced cover glass having greater strength than conventional glass, a reinforced cover glass, a manufacturing method for a reinforced cover glass having an integrated touch sensor, and a reinforced cover glass having an integrated touch sensor. In the manufacturing method for a reinforced cover glass according to the present invention: first, a raw glass sheet is cut into a glass sheet (10) of a desired size (cutting step); the end surface (10c) of the glass sheet (10) is polished by a polishing means (polishing step), thus removing flaws in the end surface (10c) which can cause cracks, and reducing the roughness of the end surface (10c). Next, the glass sheet (10) is chemically reinforced by means of a chemical reinforcement method (chemical reinforcement step). Subsequently, the end surface (10c) of the glass sheet (10) is etched (etching step). The manufacturing method for a reinforced cover glass according to the present invention includes the polishing step prior to the etching step, and thus the entirety of the end surface (10c) can be uniformly etched. Therefore, the manufacturing method for a reinforced cover glass according to the present invention enables a reinforced cover glass (10) that has greater bending strength than conventional glass to be obtained.

Description

強化カバーガラスの製造方法及び強化カバーガラスMethod for producing reinforced cover glass and reinforced cover glass
 本発明は、強化カバーガラスの製造方法及び強化カバーガラス並びにタッチセンサ一体型強化カバーガラスの製造方法及びタッチセンサ一体型強化カバーガラスに関する。 The present invention relates to a method for producing a reinforced cover glass, a reinforced cover glass, a method for producing a reinforced cover glass with an integrated touch sensor, and a reinforced cover glass with an integrated touch sensor.
 スマートフォン及びタブレットコンピュータ等の電子端末機器に用いられる静電容量型タッチパネルは、透光性の入力位置検出用電極等のタッチセンサ用配線をガラス板に形成し、このタッチセンサ用配線の上面に強化カバーガラスを配置することによって構成される。 Capacitive touch panels used in electronic terminal devices such as smartphones and tablet computers have touch sensor wiring, such as translucent input position detection electrodes, formed on a glass plate and reinforced on the upper surface of the touch sensor wiring. It is constituted by arranging a cover glass.
 一方、特許文献1には、前記ガラス板を使用せず、タッチセンサ用配線を前記強化カバーガラスに直接形成したタッチセンサ一体型強化カバーガラスが提案されている。特許文献1のタッチセンサ一体型強化カバーガラスによれば、部品点数を削減でき、薄型化を図ることができる。 On the other hand, Patent Document 1 proposes a touch sensor-integrated reinforced cover glass in which touch sensor wiring is directly formed on the reinforced cover glass without using the glass plate. According to the touch sensor integrated reinforced cover glass of Patent Document 1, the number of parts can be reduced and the thickness can be reduced.
 ところで、特許文献1のタッチセンサ一体型強化カバーガラスを得るためには、1枚の大サイズのガラス板(以下、本明細書において、各種電子機器製品の製品サイズのガラス板を切り出す大サイズのガラス板である素板を「第1のガラス板)」と称する。)に成膜処理、及びパターンニング処理等を施してタッチセンサ用配線を形成し、その後、素板を所望の寸法の製品サイズのガラス板(以下、本明細書において、製品サイズのガラス板を「第2のガラス板」と称する。)に切断することによって、タッチセンサ一体型強化カバーガラスを多数枚取りする方法が生産性の観点から好ましい。 By the way, in order to obtain the touch sensor integrated reinforced cover glass of Patent Document 1, one large-sized glass plate (hereinafter, in this specification, a large-sized glass plate for cutting out product-sized glass plates of various electronic device products). The base plate which is a glass plate is referred to as “first glass plate”. ) Is subjected to a film forming process, a patterning process, etc. to form a wiring for a touch sensor, and then a base plate is made of a glass plate of a product size of a desired dimension (hereinafter referred to as a product size glass plate in this specification). From the viewpoint of productivity, a method of taking a large number of touch sensor-integrated reinforced cover glasses by cutting into “second glass plate”) is preferable.
 しかしながら、素板として強化ガラスを用いると、切断されたタッチセンサ一体型強化カバーガラスの端面に引張応力層が露出する。そして、前記端面に傷が生じると、傷を起点にタッチセンサ一体型強化カバーガラスが容易に割れるという問題があった。 However, when tempered glass is used as the base plate, a tensile stress layer is exposed on the end face of the cut tempered cover glass with integrated touch sensor. When the end face is scratched, the touch sensor integrated reinforced cover glass easily breaks from the scratch.
 特許文献2、3には、タッチセンサ一体型強化カバーガラスに好適な強化カバーガラスが提案されている。その内容は、ガラスの組成を特定するとともに、化学強化した強化カバーガラスの端面に面取り加工、又はエッチング処理を施すことによって強化カバーガラスの曲げ強さ(JIS R1601:2008年に定める方法で測定される4点曲げ強さ:端面強度ともいう)を上げるものである。 Patent Documents 2 and 3 propose a reinforced cover glass suitable for a touch sensor integrated reinforced cover glass. Its contents are measured by the method specified in JIS R1601: 2008 by specifying the composition of the glass and chamfering or etching the end face of the chemically strengthened reinforced cover glass. 4 point bending strength: also called end face strength).
日本特開2011-197708号公報Japanese Unexamined Patent Publication No. 2011-197708 日本特許第4888845号公報Japanese Patent No. 4888845 日本特開2011-178662号公報Japanese Unexamined Patent Publication No. 2011-178862
 しかしながら、特許文献2、3には、強化カバーガラスの曲げ強さを高めるための製造工程は明記されていない。また、曲げ強さを高めるための特許文献2、3の加工方法は、強化カバーガラスの端面に面取り加工、又はエッチング処理を施すのみであるため曲げ強さを十分に高めることができない。 However, Patent Documents 2 and 3 do not specify a manufacturing process for increasing the bending strength of the reinforced cover glass. Moreover, since the processing methods of Patent Documents 2 and 3 for increasing the bending strength only perform chamfering or etching on the end face of the reinforced cover glass, the bending strength cannot be sufficiently increased.
 なお、現在市場で流通されている強化カバーガラスの曲げ強さは、おおよそ600~700MPaである。また、曲げ強さと衝撃強度とは相関関係がある。市場では曲げ強さの高い、すなわち、衝撃強度の高い強化カバーガラスが望まれている。 Note that the bending strength of the reinforced cover glass currently on the market is approximately 600 to 700 MPa. Also, there is a correlation between bending strength and impact strength. In the market, a reinforced cover glass having high bending strength, that is, high impact strength is desired.
 本発明は、このような事情に鑑みてなされたもので、従来にはない曲げ強さを有する強化カバーガラスの製造方法及び強化カバーガラス並びにタッチセンサ一体型強化カバーガラスの製造方法及びタッチセンサ一体型強化カバーガラスを提供することを目的とする。 The present invention has been made in view of such circumstances, and a method for manufacturing a reinforced cover glass and a reinforced cover glass having unprecedented bending strength, a method for manufacturing a reinforced cover glass integrated with a touch sensor, and a touch sensor. An object is to provide a body-type reinforced cover glass.
 本発明の強化カバーガラスの製造方法の一態様は、前記目的を達成するために、対向する二つの主平面(すなわち、主表面)を有する第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、前記第2のガラス板の二つの主平面の間を接続する端面を研磨する研磨工程と、前記第2のガラス板に化学強化を施して前記主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、前記第2のガラス板の端面をエッチングするエッチング工程と、を備えたことを特徴とする。上記した強化カバーガラスの製造方法は、上記した工程の順番に従って実施される。 In one aspect of the method for producing a tempered cover glass of the present invention, in order to achieve the above object, a first glass plate having two opposing main planes (that is, main surfaces) is cut into a desired shape. A cutting step for forming the second glass plate, a polishing step for polishing an end face connecting between the two main planes of the second glass plate, and chemical strengthening of the second glass plate to form the main plane It is characterized by comprising a chemical strengthening step of forming a compressive stress layer on at least one and an etching step of etching the end face of the second glass plate. The manufacturing method of an above-described reinforced cover glass is implemented according to the order of an above-described process.
 本発明の強化カバーガラスの製造方法の一態様は、前記目的を達成するために、対向する二つの主平面を有する第1のガラス板に化学強化を施して前記二つの主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、前記第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、前記第2のガラス板の二つの主平面の間を接続する端面を研磨する研磨工程と、前記第2のガラス板の端面をエッチングするエッチング工程と、を備えたことを特徴とする。上記した強化カバーガラスの製造方法は、上記した工程の順番に従って実施される。 In one aspect of the method for producing a reinforced cover glass according to the present invention, in order to achieve the above object, the first glass plate having two opposing main planes is chemically strengthened to at least one of the two main planes. A chemical strengthening step of forming a compressive stress layer, a cutting step of cutting the first glass plate into a desired shape to form a second glass plate, and between the two main planes of the second glass plate. A polishing step for polishing the end face to be connected and an etching step for etching the end face of the second glass plate are provided. The manufacturing method of an above-described reinforced cover glass is implemented according to the order of an above-described process.
 本発明の強化カバーガラスの一態様は、前記目的を達成するために、本発明の一態様の強化カバーガラスの製造方法により製造されたことを特徴とする。 One aspect of the reinforced cover glass of the present invention is characterized by being manufactured by the method for manufacturing a reinforced cover glass of one aspect of the present invention in order to achieve the above object.
 本発明の強化カバーガラスの一態様は、前記目的を達成するために、対向する二つの主平面と前記二つの主平面の間を接続する端面を有し、前記主平面の少なくとも一方に圧縮応力層が形成され、前記端面の算術平均粗さRaが20nm以下であり、JIS R1601:2008年に定める方法で測定される4点曲げ強度が1000MPa以上であることを特徴とする。好ましくは、強化カバーガラスの両面側の主平面に圧縮応力層が形成されている。 In order to achieve the above object, one aspect of the reinforced cover glass of the present invention has two opposing principal planes and an end face connecting the two principal planes, and compressive stress is applied to at least one of the principal planes. A layer is formed, the arithmetic average roughness Ra of the end face is 20 nm or less, and the four-point bending strength measured by a method defined in JIS R1601: 2008 is 1000 MPa or more. Preferably, a compressive stress layer is formed on the main planes on both sides of the reinforced cover glass.
 本発明のタッチセンサ一体型強化カバーガラスの製造方法の一態様は、前記目的を達成するために、対向する二つの主平面と前記二つの主平面の間を接続する端面とを有する第1のガラス板に化学強化を施して前記主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、前記第1のガラス板の前記主平面の一方にタッチセンサ用配線を形成する配線形成工程と、前記第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、前記第2のガラス板の端面を研磨する研磨工程と、前記第2のガラス板の端面をエッチングするエッチング工程と、を備えたことを特徴とする。上記した強化カバーガラスの製造方法は、上記した工程の順番に従って実施される。 In one aspect of the method for manufacturing a reinforced cover glass with an integrated touch sensor according to the present invention, the first object has two main planes facing each other and an end face connecting between the two main planes. A chemical strengthening step of chemically strengthening the glass plate to form a compressive stress layer on at least one of the main planes; and a wiring forming step of forming a touch sensor wiring on one of the main planes of the first glass plate; A cutting step of cutting the first glass plate into a desired shape to form a second glass plate, a polishing step of polishing an end surface of the second glass plate, and an end surface of the second glass plate And an etching step for etching. The manufacturing method of an above-described reinforced cover glass is implemented according to the order of an above-described process.
 また、本発明は、前述の製造方法により製造されたことを特徴とするタッチセンサ一体型強化カバーガラスを提供する。 The present invention also provides a touch sensor-integrated reinforced cover glass manufactured by the above-described manufacturing method.
 本発明のタッチセンサ一体型強化カバーガラスの一態様は、前記目的を達成するために、対向する二つの主平面と、前記二つの主平面の間を接続する端面とを有し、前記主平面の少なくとも一方に圧縮応力層が形成され、前記主平面の一方にタッチセンサ用配線が形成され、前記端面の算術平均粗さRaが20nm以下であり、JIS R1601:2008年に定める試験方法で測定される4点曲げ強さが1000MPa以上であることを特徴とする。好ましくは、強化カバーガラスの両面側の主平面に圧縮応力層が形成されている。 One aspect of the reinforced cover glass with an integrated touch sensor according to the present invention has two main planes facing each other and an end face connecting between the two main planes in order to achieve the above object. Compressive stress layer is formed on at least one of them, touch sensor wiring is formed on one of the main planes, the arithmetic mean roughness Ra of the end face is 20 nm or less, and measured by a test method defined in JIS R1601: 2008 The four-point bending strength is 1000 MPa or more. Preferably, a compressive stress layer is formed on the main planes on both sides of the reinforced cover glass.
 本発明は、また、エッチング工程の前工程に研磨工程を備えることによって、ガラス板の曲げ強さを一層高めるためのガラス板の加工プロセスを提供するものである。 The present invention also provides a glass plate processing process for further enhancing the bending strength of the glass plate by providing a polishing step before the etching step.
 すなわち、従来の如く、ガラス板の端面を単にエッチング処理しただけでは、端面が粗いため、端面全面を均一にエッチング処理することができず、曲げ強さを十分に高めることは困難である。 That is, as in the prior art, if the end face of the glass plate is simply etched, the end face is rough, and the entire end face cannot be uniformly etched, and it is difficult to sufficiently increase the bending strength.
 そこで、本発明は、エッチング工程の前工程に研磨工程を備え、研磨工程にて第2のガラス板の端面を研磨し、割れの原因になる傷を除去するとともに端面の粗さを小さくする。そして、その端面をエッチング工程にてエッチング処理する。これにより、本発明の製造方法によれば、端面全面を均一にエッチング処理できるので、従来にはない曲げ強さを有する強化カバーガラス、及びタッチセンサ一体型強化カバーガラスを提供することができる。なお、「エッチング工程の前工程に研磨工程を備える」とは、「エッチング工程の直前に研磨工程を備える」ことの他、「研磨工程、化学強化工程、次いでエッチング工程の順番に行なうことも含む。また、前記した各工程の間に別の工程(例えば洗浄工程)が加わってもよい。 Therefore, the present invention includes a polishing step before the etching step, and polishes the end surface of the second glass plate in the polishing step to remove scratches that cause cracks and reduce the roughness of the end surface. And the end surface is etched in an etching process. Thereby, according to the manufacturing method of this invention, since the whole end surface can be etched uniformly, the reinforced cover glass and the touch sensor integrated reinforced cover glass which have the bending strength which are not in the past can be provided. In addition, “providing a polishing step before the etching step” includes “being equipped with a polishing step immediately before the etching step” as well as “polishing step, chemical strengthening step, and then etching step in that order”. In addition, another process (for example, a cleaning process) may be added between the above-described processes.
 また、研磨工程において端面の算術平均粗さRaを20nm以下にすることによって、JIS R1601:2008年に定める試験方法で測定される4点曲げ強さが1000MPa以上である強化カバーガラス、及びタッチセンサ一体型強化カバーガラスを提供できる。この強度は、従来にはないものである。 Further, by making the arithmetic average roughness Ra of the end face 20 nm or less in the polishing process, a reinforced cover glass having a 4-point bending strength of 1000 MPa or more measured by a test method defined in JIS R1601: 2008, and a touch sensor An integrated reinforced cover glass can be provided. This strength is unprecedented.
 本発明の強化カバーガラスの製造方法の一態様によれば、前記研磨工程にて前記第2のガラス板の端面を研磨することにより、該端面の算術平均粗さRaを20nm以下にする。 According to one aspect of the method for producing a reinforced cover glass of the present invention, the arithmetic average roughness Ra of the end face is set to 20 nm or less by polishing the end face of the second glass plate in the polishing step.
 本発明の一態様によれば、JIS R1601:2008年に定める試験方法で測定される4点曲げ強さが1000MPa以上である強化カバーガラスを提供できる。 According to one aspect of the present invention, it is possible to provide a reinforced cover glass having a four-point bending strength of 1000 MPa or more as measured by a test method defined in JIS R1601: 2008.
 本発明の強化カバーガラスの製造方法の一態様によれば、前記研磨工程は、前記第2のガラス板の端面に研磨砥粒を含有する研磨液を供給しながら連続的に運動するブラシを接触させることにより前記端面を研磨することが好ましい。 According to one aspect of the method for producing a reinforced cover glass of the present invention, the polishing step contacts a brush that moves continuously while supplying a polishing liquid containing abrasive grains to the end face of the second glass plate. It is preferable that the end face is polished by the above.
 本発明の一態様によれば、前記研磨工程を施し、次いでエッチング工程を施すことにより、第2のガラス板の端面の算術平均粗さRaを20nm以下にできる。 According to one aspect of the present invention, the arithmetic average roughness Ra of the end face of the second glass plate can be reduced to 20 nm or less by performing the polishing step and then the etching step.
 本発明の強化カバーガラスの製造方法の一態様によれば、前記化学強化工程と前記研磨工程との間に、前記第1のガラス板を所望の形状に切断する切断工程を備える。 According to one aspect of the method for producing a reinforced cover glass of the present invention, a cutting step of cutting the first glass plate into a desired shape is provided between the chemical strengthening step and the polishing step.
 本発明の一態様によれば、まず、第1のガラス板を化学強化する。次に、化学強化した第1のガラス板を所望の形状に切断して所望の寸法の強化カバーガラスを多数枚取りする。なお、本明細書において「多数枚取り」とは、第1のガラス板から、より小サイズの第2のガラス板(例えば、タッチパネルの製品に適用する製品サイズのガラス板)を切り出すことをいう。次いで、強化カバーガラスの端面を研磨して端面の粗さを小さくする。この後、端面をエッチング処理する。つまり、強化カバーガラスの製造工程に切断工程を備えていても、エッチング工程の前工程に研磨工程を備えているため、強化カバーガラスの端面が研磨されて端面の粗さを小さくされているので、従来にはない曲げ強さを有する強化カバーガラスを得ることができる。 According to one aspect of the present invention, first, the first glass plate is chemically strengthened. Next, the chemically strengthened first glass plate is cut into a desired shape, and a large number of reinforced cover glasses having desired dimensions are taken. In the present specification, “multi-piece” means that a second glass plate having a smaller size (for example, a glass plate having a product size applied to a touch panel product) is cut out from the first glass plate. . Next, the end face of the reinforced cover glass is polished to reduce the end face roughness. Thereafter, the end face is etched. In other words, even if the manufacturing process of the reinforced cover glass includes a cutting process, the end surface of the reinforced cover glass is polished to reduce the roughness of the end surface because the polishing process is included in the previous process of the etching process. Thus, a reinforced cover glass having a bending strength that is not found in the past can be obtained.
 本発明の強化カバーガラスの製造方法の一態様によれば、前記研磨工程の前工程に、前記第1のガラス板を所望の形状の第2のガラス板に切断する切断工程を備える。 According to one aspect of the method for producing a reinforced cover glass of the present invention, a cutting step of cutting the first glass plate into a second glass plate having a desired shape is provided as a pre-process of the polishing step.
 本発明の一態様によれば、まず、第1のガラス板を所望の形状に切断して所望の寸法の第2のガラス板を多数枚取りする。次に、第2のガラス板の端面を研磨して端面の粗さを小さくする。次いで、第2のガラス板を化学強化して強化カバーガラスを製造する。その後、強化カバーガラスの粗さの小さい端面をエッチング処理する。つまり、強化カバーガラスの製造工程に切断工程を備えていても、エッチング工程の前工程に研磨工程を備えているため、強化カバーガラスの端面が研磨されて端面の粗さを小さくされているので、従来にはない曲げ強さを有する強化カバーガラスを得ることができる。 According to one aspect of the present invention, first, the first glass plate is cut into a desired shape, and a large number of second glass plates having desired dimensions are taken. Next, the end face of the second glass plate is polished to reduce the end face roughness. Next, the second glass plate is chemically strengthened to produce a reinforced cover glass. Thereafter, the end face having a small roughness of the reinforced cover glass is etched. In other words, even if the manufacturing process of the reinforced cover glass includes a cutting process, the end surface of the reinforced cover glass is polished to reduce the roughness of the end surface because the polishing process is included in the previous process of the etching process. Thus, a reinforced cover glass having a bending strength that is not found in the prior art can be obtained.
 なお、前記化学強化工程の前工程に、前記第1のガラス板を所望の形状に切断する切断工程を備えてもよい。 In addition, you may provide the cutting process which cut | disconnects a said 1st glass plate in a desired shape in the front process of the said chemical strengthening process.
 本発明のタッチセンサ一体型強化カバーガラスの製造方法の一態様によれば、前記研磨工程にて前記第2のガラス板の端面を研磨することにより、前記端面の算術平均粗さRaを20nm以下にすることが好ましい。このように、前記研磨工程にて前記第2のガラス板の端面を研磨することにより、前記端面の算術平均粗さRaを20nm以下にすれば、第2のガラス板の端面をエッチング処理の施した後、エッチング処理を施した第2のガラス板の端面の算術平均粗さRaを20nm以下とすることができる。 According to one aspect of the method for producing a reinforced cover glass with an integrated touch sensor of the present invention, the arithmetic average roughness Ra of the end surface is 20 nm or less by polishing the end surface of the second glass plate in the polishing step. It is preferable to make it. As described above, if the arithmetic average roughness Ra of the end surface is 20 nm or less by polishing the end surface of the second glass plate in the polishing step, the end surface of the second glass plate is subjected to etching treatment. After that, the arithmetic average roughness Ra of the end surface of the second glass plate subjected to the etching treatment can be set to 20 nm or less.
 本発明の一態様によれば、JIS R1601:2008年に定める試験方法で測定される4点曲げ強さが1000MPa以上であるタッチセンサ一体型強化カバーガラスを提供できる。 According to one aspect of the present invention, it is possible to provide a touch sensor integrated reinforced cover glass having a four-point bending strength of 1000 MPa or more measured by a test method defined in JIS R1601: 2008.
 本発明のタッチセンサ一体型強化カバーガラスの製造方法の一態様によれば、前記研磨工程は、前記第2のガラス板の端面に研磨砥粒を含有する研磨液を供給しながら連続的に運動するブラシを接触させることにより、前記端面を研磨することが好ましい。 According to one aspect of the method for producing a touch sensor-integrated reinforced cover glass of the present invention, the polishing step continuously moves while supplying a polishing liquid containing polishing abrasive grains to the end surface of the second glass plate. It is preferable to polish the said end surface by making the brush to contact.
 本発明の一態様によれば、第2のガラス板の端面の算術平均粗さRaを20nm以下にできる。本発明の一態様は、研磨砥粒、好ましくは、いわゆる遊離砥粒を含有する研磨液によって端面を研磨するものであり、これによって、ガラス板の端面を良好に研磨できる。なお、研磨砥粒としては、遊離砥粒に限定されるものではなく、番手の大きい砥粒を固着した固定砥粒(砥石)によってガラス板の端面を研磨しても、端面の算術平均粗さRaを20nm以下にできる。 According to one aspect of the present invention, the arithmetic average roughness Ra of the end face of the second glass plate can be 20 nm or less. One embodiment of the present invention is to polish an end face with a polishing liquid containing abrasive grains, preferably so-called free abrasive grains, whereby the end face of a glass plate can be satisfactorily polished. The abrasive grains are not limited to loose abrasive grains, and even if the end face of the glass plate is polished with a fixed abrasive grain (grinding stone) to which a large abrasive grain is fixed, the arithmetic average roughness of the end face Ra can be 20 nm or less.
 本発明によれば、従来にはない曲げ強さを有する強化カバーガラスの製造方法及び強化カバーガラス並びにタッチセンサ一体型強化カバーガラスの製造方法及びタッチセンサ一体型強化カバーガラスを提供できる。 According to the present invention, it is possible to provide a method for manufacturing a reinforced cover glass and a reinforced cover glass having an unprecedented bending strength, a method for manufacturing a touch sensor integrated reinforced cover glass, and a touch sensor integrated reinforced cover glass.
実施の形態のタッチセンサ一体型強化カバーガラスの要部拡大断面図The principal part expanded sectional view of the touch sensor integrated reinforced cover glass of embodiment 強化カバーガラスの第1の製造方法の製造工程を示したフローチャートThe flowchart which showed the manufacturing process of the 1st manufacturing method of the reinforced cover glass 強化カバーガラスの第2の製造方法の製造工程を示したフローチャートThe flowchart which showed the manufacturing process of the 2nd manufacturing method of the reinforced cover glass タッチセンサ一体型強化カバーガラスの製造方法の製造工程を示したフローチャートFlow chart showing the manufacturing process of the manufacturing method of the touch sensor integrated reinforced cover glass ブラシ研磨装置の構成を示した側面図Side view showing the configuration of the brush polishing device 切断直後の端面の粗さと研磨後の端面の粗さを模式的に示した端面の断面図Cross-sectional view of the end face schematically showing the roughness of the end face immediately after cutting and the roughness of the end face after polishing
 以下、添付図面に従って本発明に係る強化カバーガラスの製造方法及び強化カバーガラス並びにタッチセンサ一体型強化カバーガラスの製造方法及びタッチセンサ一体型強化カバーガラスの好ましい実施の形態について詳説する。 Hereinafter, preferred embodiments of a method for producing a reinforced cover glass, a reinforced cover glass, a method for producing a reinforced cover glass integrated with a touch sensor, and a reinforced cover glass with an integrated touch sensor according to the present invention will be described in detail with reference to the accompanying drawings.
 なお、ここでは、スマートフォン及びタブレットコンピュータ等の静電容量型タッチパネルの入力操作面を構成する強化カバーガラスの製造方法、及びタッチセンサ一体型強化カバーガラスの製造方法を例に説明する。 In addition, here, the manufacturing method of the reinforced cover glass which comprises the input operation surface of capacitive touch panels, such as a smart phone and a tablet computer, and the manufacturing method of a touch sensor integrated reinforced cover glass are demonstrated to an example.
 《タッチセンサ一体型強化カバーガラスの構成について》
 図1は、タッチセンサ一体型強化カバーガラス1の構成を概略的に示した要部拡大断面図である。
《Configuration of reinforced cover glass with integrated touch sensor》
FIG. 1 is an enlarged cross-sectional view of a main part schematically showing the configuration of a reinforced cover glass 1 with an integrated touch sensor.
 タッチセンサ一体型強化カバーガラス1は、静電容量型タッチパネルの入力操作面を構成するカバーガラスとしての機能と、入力位置検出用電極等のタッチセンサ用配線が形成されるセンサ基板としての機能とを併せ持つ。 The touch sensor-integrated reinforced cover glass 1 has a function as a cover glass constituting an input operation surface of a capacitive touch panel, and a function as a sensor substrate on which touch sensor wiring such as an input position detection electrode is formed. Have both.
 タッチセンサ一体型強化カバーガラス1は、強化カバーガラス10の一方の主平面10Aに入力位置検出用電極12、黒色の遮光層14、周辺配線16、及び保護層18等が設けられて構成される。なお、タッチセンサ一体型強化カバーガラス1においては、強化カバーガラス10の他方の主平面10Bが入力操作面になる。 The touch sensor integrated reinforced cover glass 1 is configured by providing an input position detecting electrode 12, a black light shielding layer 14, a peripheral wiring 16, a protective layer 18 and the like on one main plane 10A of the reinforced cover glass 10. . In the touch sensor integrated reinforced cover glass 1, the other main plane 10B of the reinforced cover glass 10 is an input operation surface.
 強化カバーガラス10の厚さは、通常、0.3~1.5mm程度であり、好ましくは、0.5~1.1mmである。強化カバーガラス10は、対向する二つの主平面10A、10Bの間を接続する端面10Cが必要に応じて面取り加工される。すなわち、主平面10A、10Bと端面10Cとの間の稜角部分が研削され、主平面10A、10Bの周縁部に所定幅の面取り面11が形成される。 The thickness of the reinforced cover glass 10 is usually about 0.3 to 1.5 mm, preferably 0.5 to 1.1 mm. As for the reinforced cover glass 10, the end surface 10C which connects between the two main planes 10A and 10B which oppose is chamfered as needed. That is, the ridge angle part between main plane 10A, 10B and the end surface 10C is ground, and the chamfered surface 11 of predetermined width is formed in the peripheral part of main plane 10A, 10B.
 入力位置検出用電極12は、ITO(Indium Tin Oxide:酸化インジウムスズ)膜等の透光性導電膜によって、強化カバーガラス10の一方の主平面10Aの中央領域(すなわち、液晶表示パネル等の表示手段の有効画素領域)に形成される。入力位置検出用電極12を形成する透光性導電膜の厚さは20~100nm程度である。 The input position detection electrode 12 is made of a light-transmitting conductive film such as an ITO (Indium Tin Oxide) film or the like in the central region of one main plane 10A of the reinforced cover glass 10 (that is, a display such as a liquid crystal display panel). Effective pixel area). The thickness of the translucent conductive film forming the input position detecting electrode 12 is about 20 to 100 nm.
 遮光層14は、液晶表示パネルに入射する光を完全に制御するために形成され、入力位置検出用電極12が形成された中央領域の周りの領域、すなわち、周辺領域に形成される。遮光層14は、例えば、チタンブラック等を含む黒色の感光性樹脂(フォトレジスト)により形成される。遮光層14の厚さは1~2μm程度である。この他、遮光層14は、スクリーン印刷法等によっても形成することもできる。ただし、印刷法を用いた場合、遮光層14の厚さは10~30μm程度と厚くなるため、遮光層14はフォトレジストの使用が好ましい。 The light shielding layer 14 is formed to completely control the light incident on the liquid crystal display panel, and is formed in a region around the central region where the input position detecting electrode 12 is formed, that is, in a peripheral region. The light shielding layer 14 is formed of, for example, a black photosensitive resin (photoresist) containing titanium black or the like. The thickness of the light shielding layer 14 is about 1 to 2 μm. In addition, the light shielding layer 14 can also be formed by a screen printing method or the like. However, when the printing method is used, since the thickness of the light shielding layer 14 is as thick as about 10 to 30 μm, it is preferable to use a photoresist for the light shielding layer 14.
 周辺配線16は、遮光層14上に、例えば、Mo-Nb合金/Al/Mo-Nb合金の積層構成、あるいはMo-Nb合金/Al-Nd合金/Mo-Nb合金の積層構成等の金属からなる膜によって形成される。周辺配線16を形成する金属膜の厚さは0.3~0.5μm程度である。 The peripheral wiring 16 is formed on the light shielding layer 14 from a metal such as a laminated structure of Mo—Nb alloy / Al / Mo—Nb alloy or a laminated structure of Mo—Nb alloy / Al—Nd alloy / Mo—Nb alloy. Formed by the film. The thickness of the metal film forming the peripheral wiring 16 is about 0.3 to 0.5 μm.
 保護層18は、主として、入力位置検出用電極12、遮光層14及び周辺配線16の保護を目的とし、入力位置検出用電極12、遮光層14及び周辺配線16を被覆するように形成される。保護層18は、例えば、透光性のフォトレジストにより形成される。保護層18の厚さは、1~2μm程度である。 The protective layer 18 is formed mainly to protect the input position detection electrode 12, the light shielding layer 14, and the peripheral wiring 16, and to cover the input position detection electrode 12, the light shielding layer 14, and the peripheral wiring 16. The protective layer 18 is formed of, for example, a translucent photoresist. The thickness of the protective layer 18 is about 1 to 2 μm.
 《強化カバーガラス10の製造方法について》
 〔第1の製造方法〕
 図2は、強化カバーガラス10の第1の製造方法の製造工程を示すフローチャートであり、第1のガラス板である素板から製品サイズの第2のガラス板を多数枚取りし、強化カバーガラス10を製造する製造工程のフローチャートである。以下、この製造工程を、図1の強化カバーガラスの構造を参照しながら、説明する。なお、ここでは、強化カバーガラス10と同サイズであって未強化のガラス板(すなわち、第2のガラス板)も、強化カバーガラス10と同一の符号「10」を用いて説明する。
<< About the manufacturing method of the reinforced cover glass 10 >>
[First production method]
FIG. 2 is a flowchart showing a manufacturing process of the first manufacturing method of the reinforced cover glass 10, in which a large number of second glass plates having a product size are taken from the base plate which is the first glass plate, and the reinforced cover glass is obtained. 10 is a flowchart of a manufacturing process for manufacturing 10; Hereinafter, this manufacturing process will be described with reference to the structure of the reinforced cover glass of FIG. Here, an unreinforced glass plate that is the same size as the reinforced cover glass 10 (that is, the second glass plate) will also be described using the same reference numeral “10” as the reinforced cover glass 10.
 図2の如く、まず、未強化の前記素板を切断して製品サイズのガラス板10を複数枚取りする(ステップS40:切断工程)。 As shown in FIG. 2, first, the unstrengthened base plate is cut to obtain a plurality of product-sized glass plates 10 (step S40: cutting step).
 次に、ガラス板10の端面10Cを研磨手段によって研磨して、割れの原因になる端面10Cの傷を除去するとともに端面10Cの粗さを小さくする(ステップS41:研磨工程)。なお、研磨工程では、端面10Cの算術平均粗さRaが20nm以下になるように端面10Cを研磨手段によって研磨することが好ましい。これにより、後段のエッチング工程において、端面10Cの全面をより一層均一にエッチング処理でき、このエッチング工程処理後の端面の算術平均粗さRaを20nm以下とすることができる。 Next, the end face 10C of the glass plate 10 is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C (step S41: polishing step). In the polishing step, it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less. Thereby, in the subsequent etching process, the entire surface of the end face 10C can be etched more uniformly, and the arithmetic average roughness Ra of the end face after this etching process can be reduced to 20 nm or less.
 次いで、ガラス板10を化学強化法(すなわち、イオン交換強化法)によって化学強化処理して強化カバーガラス10を製造する(ステップS42:化学強化工程)。
 化学強化処理は、例えば、ガラス板10を400℃~550℃のアルカリ金属塩の溶融塩中に一定時間、例えば1~48時間程度浸漬し、ガラス板表面に存在するアルカリ金属イオン(典型的には、Naイオン)を、当該アルカリ金属イオンよりイオン半径の大きい溶融塩中のアルカリ金属イオン(典型的には、Kイオン)とイオン交換することでガラス板10の表面に表面圧縮応力層を形成して強化する処理である。化学強化処理に用いる溶融塩としては、例えばカリウムイオンを含むものであれば、特に限定されないが、例えば硝酸カリウム(KNO)の溶融塩が好適に用いられる。その他、硝酸ナトリウム(NaNO)の溶融塩や硝酸カリウム(KNO)と硝酸ナトリウム(NaNO)とを混合した溶融塩を用いてもよい。
Next, the glass plate 10 is chemically strengthened by a chemical strengthening method (that is, an ion exchange strengthening method) to manufacture the strengthened cover glass 10 (step S42: chemical strengthening step).
The chemical strengthening treatment is performed by, for example, immersing the glass plate 10 in a molten salt of an alkali metal salt at 400 ° C. to 550 ° C. for a certain period of time, for example, about 1 to 48 hours, so that alkali metal ions (typically Forms a surface compressive stress layer on the surface of the glass plate 10 by exchanging Na ions) with alkali metal ions (typically K ions) in a molten salt having a larger ion radius than the alkali metal ions. It is a process to strengthen. The molten salt used for the chemical strengthening treatment is not particularly limited as long as it contains, for example, potassium ions. For example, a molten salt of potassium nitrate (KNO 3 ) is preferably used. Other, it may also be used molten salt of a mixture of a molten salt or potassium nitrate sodium nitrate (NaNO 3) (KNO 3) and sodium nitrate (NaNO 3).
 その後、強化カバーガラス10の引張応力層が露出した端面10Cをエッチング処理する(ステップS43:エッチング工程)。 Thereafter, the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is etched (step S43: etching process).
 上述の如く、第1の製造方法によれば、エッチング工程の前工程に研磨工程を備えたので、端面10Cの全面を均一にエッチング処理でき、このエッチング工程処理後の端面の算術平均粗さRaを20nm以下とすることができる。よって、第1の製造方法によれば、従来にはない曲げ強さを有する強化カバーガラス10を得ることができる。 As described above, according to the first manufacturing method, since the polishing process is provided in the previous process of the etching process, the entire surface of the end face 10C can be uniformly etched, and the arithmetic average roughness Ra of the end face after the etching process is processed. Can be made 20 nm or less. Therefore, according to the 1st manufacturing method, the reinforced cover glass 10 which has the bending strength which is not in the past can be obtained.
 〔第2の製造方法〕
 図3は、強化カバーガラス10の第2の製造方法の製造工程を示すフローチャートであり、第1のガラス板である素板に化学強化工程を施し、この素板から製品サイズの強化カバーガラス10を多数枚取りする製造工程のフローチャートである。
[Second production method]
FIG. 3 is a flowchart showing a manufacturing process of the second manufacturing method of the reinforced cover glass 10. A chemical strengthening process is performed on the base plate which is the first glass plate, and the reinforced cover glass 10 having a product size is formed from the base plate. It is a flowchart of the manufacturing process which takes many sheets.
 図3の如く、まず、前記素板を化学強化法によって化学強化して、素板サイズの強化カバーガラスにする(ステップS30:化学強化工程)。 As shown in FIG. 3, first, the base plate is chemically strengthened by a chemical strengthening method to form a base plate size reinforced cover glass (step S30: chemical strengthening step).
 次に、前記素板サイズの強化カバーガラスを切断して、製品サイズの強化カバーガラス10を多数枚取りする(ステップS31:切断工程)。 Next, the base plate size reinforced cover glass is cut, and a large number of product size reinforced cover glasses 10 are taken (step S31: cutting step).
 次いで、強化カバーガラス10の引張応力層が露出した端面10Cを研磨手段によって研磨して、割れの原因になる端面10Cの傷を除去するとともに端面10Cの粗さを小さくする(ステップS32:研磨工程)。
 なお、研磨工程では、端面10Cの算術平均粗さRaが20nm以下になるように端面10Cを研磨手段によって研磨することが好ましい。これにより、後段のエッチング工程において、端面10Cの全面をより一層均一にエッチング処理でき、このエッチング工程処理後の端面の算術平均粗さRaを20nm以下とすることができる。
Next, the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C (step S32: polishing step). ).
In the polishing step, it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less. Thereby, in the subsequent etching process, the entire surface of the end face 10C can be etched more uniformly, and the arithmetic average roughness Ra of the end face after this etching process can be reduced to 20 nm or less.
 その後、強化カバーガラス10の引張応力層が露出した端面10Cをエッチング処理する(ステップS33:エッチング工程)。 Thereafter, the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is etched (step S33: etching process).
 上述の如く、第2の製造方法によれば、エッチング工程の前工程に研磨工程を備えたので、端面10Cの全面を均一にエッチング処理できる。よって、第2の製造方法によれば、従来にはない曲げ強さを有する強化カバーガラス10を得ることができる。 As described above, according to the second manufacturing method, since the polishing process is provided in the previous process of the etching process, the entire end face 10C can be uniformly etched. Therefore, according to the 2nd manufacturing method, the reinforced cover glass 10 which has the bending strength which is not in the past can be obtained.
 《タッチセンサ一体型強化カバーガラスの製造方法について》
 図4は、タッチセンサ一体型強化カバーガラス1の製造方法の製造工程を示すフローチャートであり、第1のガラス板である素板素板に化学強化工程を施し、次いで配線形成工程を施し、この素板から製品サイズのタッチセンサ一体型強化カバーガラス1を製造する製造工程のフローチャートである。
<< About the manufacturing method of the reinforced cover glass with integrated touch sensor >>
FIG. 4 is a flowchart showing a manufacturing process of the manufacturing method of the touch sensor-integrated reinforced cover glass 1, which is performed by performing a chemical strengthening process on the base plate, which is the first glass plate, and then performing a wiring forming process. It is a flowchart of the manufacturing process which manufactures the touch sensor integrated reinforced cover glass 1 of a product size from a base plate.
 まず、未強化の前記素板を化学強化して、素板サイズの強化カバーガラスにする(ステップS60:化学強化工程)。 First, the unstrengthened base plate is chemically strengthened to make a base plate-sized reinforced cover glass (step S60: chemical strengthening step).
 次に、前記素板サイズの強化カバーガラスの一方の主平面(図1の主平面10Aに相当)に入力位置検出用電極12、遮光層14、周辺配線16、保護層18等を形成し、素板サイズの強化カバーガラスに製品単位でタッチセンサ配線を形成する(ステップS61:配線形成工程)。これらのタッチセンサ配線を形成する方法については、公知の技術であるので、その具体的な説明は省略する。 Next, the input position detection electrode 12, the light shielding layer 14, the peripheral wiring 16, the protective layer 18 and the like are formed on one main plane (corresponding to the main plane 10A in FIG. 1) of the reinforced cover glass of the base plate size, Touch sensor wiring is formed on a base plate-sized reinforced cover glass in units of products (step S61: wiring forming step). Since the method for forming these touch sensor wirings is a known technique, a specific description thereof will be omitted.
 次いで、前記素板サイズの強化カバーガラスを切断して製品サイズの強化カバーガラス10を複数枚取りする(ステップS62:切断工程)。 Next, the base-plate-sized reinforced cover glass is cut to obtain a plurality of product-sized reinforced cover glasses 10 (step S62: cutting step).
 次に、強化カバーガラス10の引張応力層が露出した端面10Cを研磨手段によって研磨して、割れの原因になる端面10Cの傷を除去するとともに端面10Cの粗さを小さくする(ステップS63:研磨工程)。
 なお、研磨工程では、端面10Cの算術平均粗さRaが20nm以下になるように端面10Cを研磨手段によって研磨することが好ましい。これにより、後段のエッチング工程において、端面10Cの全面をより一層均一にエッチング処理でき、このエッチング工程処理後の端面の算術平均粗さRaを20nm以下とすることができる。
Next, the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is polished by a polishing means to remove scratches on the end face 10C that cause cracks and reduce the roughness of the end face 10C (step S63: polishing). Process).
In the polishing step, it is preferable that the end face 10C is polished by a polishing means so that the arithmetic average roughness Ra of the end face 10C is 20 nm or less. Thereby, in the subsequent etching process, the entire surface of the end face 10C can be etched more uniformly, and the arithmetic average roughness Ra of the end face after this etching process can be reduced to 20 nm or less.
 その後、強化カバーガラス10の引張応力層が露出した端面10Cをエッチング処理する(ステップS64:エッチング工程)。 Thereafter, the end face 10C where the tensile stress layer of the reinforced cover glass 10 is exposed is etched (step S64: etching process).
 上述の如く、タッチセンサ一体型強化カバーガラス1の製造方法によれば、エッチング工程の前工程に研磨工程を備えたので、端面10Cの全面を均一にエッチング処理できる。よって、タッチセンサ一体型強化カバーガラス1の製造方法によれば、従来にはない曲げ強さを有するタッチセンサ一体型強化カバーガラス1を得ることができる。 As described above, according to the method of manufacturing the reinforced cover glass 1 with an integrated touch sensor, since the polishing process is provided in the previous process of the etching process, the entire end surface 10C can be uniformly etched. Therefore, according to the manufacturing method of the touch sensor integrated reinforced cover glass 1, the touch sensor integrated reinforced cover glass 1 having a bending strength that has not been conventionally available can be obtained.
 なお、4点曲げ強さが1000MPa以上の強化カバーガラス10を得るためには、化学強化工程において形成される強化カバーガラス10の主平面10A、10Bの圧縮応力層の厚さと、エッチング工程において処理されるエッチング量とを、化学強化工程の後工程に切断工程が存在する図3の第2の製造方法、及び図4の製造方法の場合であっても、化学強化工程の前工程に切断工程が存在する図2の第1の製造方法の場合であっても等しくすることが好ましい。 In addition, in order to obtain the reinforced cover glass 10 having a four-point bending strength of 1000 MPa or more, the thickness of the compressive stress layer on the main planes 10A and 10B of the reinforced cover glass 10 formed in the chemical tempering process and the treatment in the etching process. Even in the case of the second manufacturing method of FIG. 3 in which a cutting process is present in the subsequent process of the chemical strengthening process and the manufacturing method of FIG. 4, the cutting process is performed before the chemical strengthening process. Even in the case of the first manufacturing method of FIG.
 すなわち、圧縮応力層の厚さは10μm以上が好ましく、また、エッチング量は2μm~10μmが好ましい。なお、ここにおいて、エッチング量とは、エッチングによってガラス板の端面の表面を除去する厚さをいう。 That is, the thickness of the compressive stress layer is preferably 10 μm or more, and the etching amount is preferably 2 μm to 10 μm. Here, the etching amount refers to the thickness at which the surface of the end face of the glass plate is removed by etching.
 エッチング量は、HF(フッ酸)を含む混合水溶液に対する浸漬時間で制御される。具体的には、あらかじめ同一組成のガラスを用いて所定時間エッチングを行ってエッチング量を算出した後、所望のエッチング量となるように浸漬時間を調整してエッチングを行う。なお、ガラスの種類によっては、エッチング量を調整するためにフッ酸濃度を変更することがある。 The etching amount is controlled by the immersion time in the mixed aqueous solution containing HF (hydrofluoric acid). Specifically, after performing etching for a predetermined time using glass of the same composition in advance to calculate the etching amount, etching is performed by adjusting the immersion time so that the desired etching amount is obtained. Depending on the type of glass, the hydrofluoric acid concentration may be changed to adjust the etching amount.
 以下、研磨工程の研磨方法、エッチング工程のエッチング処理方法、素板の切断方法、及び端面の面取り方法の一例を説明する。 Hereinafter, an example of the polishing method in the polishing step, the etching method in the etching step, the cutting method of the base plate, and the chamfering method of the end surface will be described.
 《研磨手段による強化カバーガラス(ガラス板)10の端面の研磨方法について》
 図5は、強化カバーガラス(ガラス板)10の端面10Cを研磨するブラシ研磨装置30の側面図である。
<< About the grinding | polishing method of the end surface of the reinforced cover glass (glass plate) 10 by a grinding | polishing means >>
FIG. 5 is a side view of the brush polishing apparatus 30 that polishes the end face 10 </ b> C of the reinforced cover glass (glass plate) 10.
 同図に示すブラシ研磨装置30は、複数枚(例えば、200枚)の強化カバーガラス(ガラス板)10を積層して積層体20を構成し、その積層体20の外周部を回転する研磨ブラシ34によって研磨して、個々の強化カバーガラス(ガラス板)10の端面10Cを一括して研磨する装置である。積層体20を構成する際には、強化カバーガラス(ガラス板)10が間隔調整部材22を介在させて積層され、積層方向の間隔Gが所定の値に調整される。 A brush polishing apparatus 30 shown in FIG. 1 includes a laminated body 20 formed by laminating a plurality of (for example, 200) reinforced cover glasses (glass plates) 10, and a polishing brush that rotates an outer peripheral portion of the laminated body 20. This is an apparatus that polishes the end face 10C of each reinforced cover glass (glass plate) 10 in a lump by polishing by 34. When the laminated body 20 is configured, the reinforced cover glass (glass plate) 10 is laminated with the interval adjusting member 22 interposed therebetween, and the interval G in the laminating direction is adjusted to a predetermined value.
 ブラシ研磨装置30は積層体保持部32、研磨ブラシ34、研磨ブラシ34を駆動する駆動部(不図示)、及び研磨液38を供給する研磨液供給部36を備えている。 The brush polishing apparatus 30 includes a laminate holding unit 32, a polishing brush 34, a driving unit (not shown) that drives the polishing brush 34, and a polishing liquid supply unit 36 that supplies a polishing liquid 38.
 積層体保持部32は、積層体20を着脱可能に保持する。同図に示す例では、積層体20を積層方向の両側から挟んで保持している。 The laminate holder 32 holds the laminate 20 in a detachable manner. In the example shown in the figure, the stacked body 20 is held by being sandwiched from both sides in the stacking direction.
 研磨ブラシ34は、軸34Aと、軸34Aの外周に放射状に設けられた多数のブラシ毛34Bとによって構成される。軸34Aは、所定の外径を有する円筒状に形成される。ブラシ毛34Bは、帯状体に植設されたものを軸34Aの外周に螺旋状に巻き付けることによって、軸34Aの外周に設けられる。ブラシ毛34Bは、例えば、ポリアミド樹脂等からなる可撓性の線材で構成される。この線材には、アルミナ(Al)、炭化ケイ素(SiC)、ダイヤモンド等の粒子が含まれていてもよい。 The polishing brush 34 includes a shaft 34A and a large number of brush hairs 34B provided radially on the outer periphery of the shaft 34A. The shaft 34A is formed in a cylindrical shape having a predetermined outer diameter. The brush bristles 34B are provided on the outer periphery of the shaft 34A by spirally winding the thing implanted in the belt-like body around the outer periphery of the shaft 34A. The brush bristles 34B are made of, for example, a flexible wire made of polyamide resin or the like. The wire may contain particles such as alumina (Al 2 O 3 ), silicon carbide (SiC), and diamond.
 研磨液供給部36は、研磨ブラシ34と積層体20との接触部に研磨液を供給する。研磨液38は、研磨砥粒と分散媒とを含有し、所定の比重に調整される。研磨砥粒としては、例えば、酸化セリウム、ジルコニア等が使用される。研磨砥粒の平均粒径(D50)は、例えば、5μm以下であり、好ましくは2μm以下である。研磨液の比重は、1.1~1.4とすることが好ましい。 The polishing liquid supply unit 36 supplies the polishing liquid to the contact portion between the polishing brush 34 and the laminate 20. The polishing liquid 38 contains polishing abrasive grains and a dispersion medium, and is adjusted to a predetermined specific gravity. As the abrasive grains, for example, cerium oxide, zirconia, or the like is used. The average particle diameter (D50) of the abrasive grains is, for example, 5 μm or less, preferably 2 μm or less. The specific gravity of the polishing liquid is preferably 1.1 to 1.4.
 次に、ブラシ研磨装置30の作用について説明する。 Next, the operation of the brush polishing apparatus 30 will be described.
 まず、研磨ブラシ34を一定の回転速度で回転させる。 First, the polishing brush 34 is rotated at a constant rotation speed.
 次に、研磨ブラシ34を積層体20に向けて水平に移動させ、研磨ブラシ34を積層体20の外周部に押圧当接させる。この際、所定の押し込み量で当接するように、研磨ブラシ34を水平に移動させる。 Next, the polishing brush 34 is moved horizontally toward the laminate 20, and the abrasive brush 34 is pressed and brought into contact with the outer peripheral portion of the laminate 20. At this time, the polishing brush 34 is moved horizontally so as to come into contact with a predetermined pushing amount.
 次に、研磨ブラシ34と積層体20との接触部に研磨液供給部36から研磨液を所定の供給量で供給する。 Next, the polishing liquid is supplied at a predetermined supply amount from the polishing liquid supply unit 36 to the contact portion between the polishing brush 34 and the laminate 20.
 次に、研磨ブラシ34を軸方向(ガラス板10の積層方向)に所定速度で往復移動させる。これにより、複数枚のガラス板10の端面10Cを一括して研磨処理することができ、端面10Cの算術平均粗さRaが20nm以下の強化カバーガラス(ガラス板)10を得ることができる。 Next, the polishing brush 34 is reciprocated at a predetermined speed in the axial direction (lamination direction of the glass plate 10). Thereby, the end surface 10C of the glass plate 10 of several sheets can be grind | polished collectively, and the reinforced cover glass (glass plate) 10 whose arithmetic mean roughness Ra of the end surface 10C is 20 nm or less can be obtained.
 図6(a)は、切断直後の端面10Cの粗さ(形状)を模式的に示した端面10Cの断面図であり、図6(b)は、研磨処理後の端面10Cの粗さ(形状)を模式的に示した端面10Cの断面図であり、図6(b)において一点鎖線は、研磨処理後の端面10Cの表面状態を示している。 6A is a cross-sectional view of the end face 10C schematically showing the roughness (shape) of the end face 10C immediately after cutting, and FIG. 6B is the roughness (shape) of the end face 10C after the polishing process. ) Is a cross-sectional view of the end surface 10C schematically, and in FIG. 6B, the alternate long and short dash line indicates the surface state of the end surface 10C after the polishing process.
 図6(a)、(b)に示すように、強化カバーガラス(ガラス板)10の端面10Cの傷の凹凸部が研磨ブラシ34によって研磨除去され、端面10Cの算術平均粗さRaが20nm以下になった。なお、算術平均粗さRaは、JIS B0601に基づいて測定した。 As shown in FIGS. 6A and 6B, the uneven portion of the scratch on the end surface 10C of the reinforced cover glass (glass plate) 10 is polished and removed by the polishing brush 34, and the arithmetic average roughness Ra of the end surface 10C is 20 nm or less. Became. In addition, arithmetic mean roughness Ra was measured based on JIS0B0601.
 《エッチング処理方法について》
 強化カバーガラス10の端面10Cの曲げ強さをより一層高めるため、実施の形態においては、前記ブラシ研磨装置30による研磨工程の後工程に、強化カバーガラス10の端面10Cをエッチングするエッチング工程を備えている。
<< Etching treatment method >>
In order to further increase the bending strength of the end face 10C of the reinforced cover glass 10, in the embodiment, an etching process for etching the end face 10C of the reinforced cover glass 10 is provided as a subsequent process of the polishing process by the brush polishing apparatus 30. ing.
 エッチング工程においてエッチング処理が端面10Cに施されることによって、端面10Cの研磨面に存在する微小な凹凸部の先鋭部を鈍角化でき、かつ、エッチング処理が端面10Cの全面において均一に施されるので、強化カバーガラス10の曲げ強さを一層高めることができる。 By performing the etching process on the end surface 10C in the etching step, the sharpened portion of the minute uneven portion present on the polished surface of the end surface 10C can be blunted, and the etching process is uniformly performed on the entire surface of the end surface 10C. Therefore, the bending strength of the reinforced cover glass 10 can be further increased.
 エッチング処理の一例として、6mol/LのHCl(塩酸)中に2wt%のHF(フッ酸)を含む混合水溶液に強化カバーガラス10の端面10Cを浸漬し、端面10Cを表層から1μm~5μm程度溶解させる。なお、上記強化ガラス10をエッチング処理用の水溶液に浸漬してエッチング処理する場合には、必要に応じてマスキング膜が強化ガラスの必要領域に形成される。この場合、エッチング処理後、このマスキング膜は、剥離される。これにより、強化カバーガラス10の曲げ強さが一層高められ、JIS R1601:2008年に定める方法で測定される4点曲げ強度が1000MPa以上の強化カバーガラス10になった。 As an example of the etching process, the end face 10C of the reinforced cover glass 10 is immersed in a mixed aqueous solution containing 2 wt% HF (hydrofluoric acid) in 6 mol / L HCl (hydrochloric acid), and the end face 10C is dissolved by about 1 μm to 5 μm from the surface layer. Let In addition, when the said tempered glass 10 is immersed in the aqueous solution for an etching process and etched, a masking film is formed in the required area | region of tempered glass as needed. In this case, after the etching process, the masking film is peeled off. Thereby, the bending strength of the reinforced cover glass 10 was further increased, and the reinforced cover glass 10 having a four-point bending strength of 1000 MPa or more measured by a method defined in JIS R1601: 2008 was obtained.
 《素板の切断方法について》
 前記素板の切断は、スクライブ・ブレイク法、レーザ切断法等によって行われる。
<About the cutting method of the base plate>
The base plate is cut by a scribe / break method, a laser cutting method, or the like.
 スクライブ・ブレイク法は、割断予定線に沿ってスクライブカッタでガラス板の主面にスクライブ線(溝線)を形成し、その後、ガラス板を折り曲げることによって切断する方法である。 The scribe break method is a method in which a scribe line (groove line) is formed on a main surface of a glass plate along a planned cutting line with a scribe cutter, and then the glass plate is bent to be cut.
 レーザ切断法は、割断予定線に沿ってガラス板の表面にレーザ光を照射し、熱応力で割断する方法である。熱源として、レーザ光源に代えて放電電極を用いることもできる。なお、切断に際して、個々の強化カバーガラス(ガラス板)10は、同じサイズに切断される。 The laser cutting method is a method of irradiating the surface of the glass plate with laser light along the planned cutting line and cleaving it with thermal stress. As the heat source, a discharge electrode can be used instead of the laser light source. At the time of cutting, the individual reinforced cover glasses (glass plates) 10 are cut into the same size.
 《面取り方法について》
 図2から図4に示した製造工程において、研磨工程の前工程に面取り工程を設けてもよい。面取り工程は、例えば、回転する砥石車を強化カバーガラス(ガラス板)10の端面に接触させて、強化カバーガラス(ガラス板)10の表裏の主平面10A、10Bと端面10Cとの間の稜角部分を研削除去することにより行われる。ただし、これ以外の方法によって面取り加工を施すこともできる。
《About chamfering method》
In the manufacturing process shown in FIGS. 2 to 4, a chamfering process may be provided in the pre-process of the polishing process. In the chamfering step, for example, a rotating grinding wheel is brought into contact with the end surface of the reinforced cover glass (glass plate) 10, and the ridge angle between the main planes 10A and 10B on the front and back of the reinforced cover glass (glass plate) 10 and the end surface 10C is obtained. This is done by grinding away the part. However, chamfering can be performed by other methods.
 面取り工程は、選択的に行われる工程である。すなわち、面取り加工は、必ずしも実施しなければならない処理ではなく、必要に応じて選択的に行われる処理である。ただし、この面取り工程を設けることにより、強化カバーガラス(ガラス板)10のエッジ部の割れを効果的に防止でき、強化カバーガラス(ガラス板)10の端面強化を図ることができる。 The chamfering process is a process that is selectively performed. That is, the chamfering process is not necessarily a process that must be performed, but is a process that is selectively performed as necessary. However, by providing this chamfering step, cracking of the edge portion of the reinforced cover glass (glass plate) 10 can be effectively prevented, and the end face of the reinforced cover glass (glass plate) 10 can be strengthened.
 《その他の実施の形態》
 本発明は、以上説明した実施の形態の記載内容に限定されるものではなく、本発明の要旨を逸脱しない範囲で適宜変更可能であることはいうまでもない。
<< Other Embodiments >>
It goes without saying that the present invention is not limited to the description of the embodiment described above, and can be appropriately changed without departing from the gist of the present invention.
 なお、本発明において、強化カバーガラス(ガラス板)10の「端面」とは、素板を切断したときの切断面を意味し、切断後に面取り加工を施した場合には、面取り面11を含むものとする。 In the present invention, the “end face” of the reinforced cover glass (glass plate) 10 means a cut surface when the base plate is cut, and the chamfered surface 11 is included when chamfering is performed after cutting. Shall be.
 本発明によれば、従来に比べより高い曲げ強さを有する強化カバーガラス、及びタッチセンサ一体型強化カバーガラスを提供できるので、スマートフォン、タブレットコンピュータ、その他各種電子端末機器に用いられるタッチパネル用として有用である。
 なお、2012年7月17日に出願された日本特許出願2012-158818号の明細書、特許請求の範囲、図面および要約書の全内容をここに引用し、本発明の開示として取り入れるものである。
According to the present invention, it is possible to provide a reinforced cover glass having a higher bending strength than a conventional one and a touch sensor integrated reinforced cover glass, which is useful for touch panels used in smartphones, tablet computers, and other various electronic terminal devices. It is.
The entire contents of the description, claims, drawings and abstract of Japanese Patent Application No. 2012-158818 filed on July 17, 2012 are incorporated herein by reference. .
 1…タッチセンサ一体型強化カバーガラス、10…強化カバーガラス(ガラス板)、11…面取り面、12…入力位置検出用電極、14…遮光層、16…周辺配線、18…保護層、20…積層体、22…間隔調整部材、30…ブラシ研磨装置、32…積層体保持部、34…研磨ブラシ、34A…軸、34B…ブラシ毛、36…研磨液供給部、38…研磨液 DESCRIPTION OF SYMBOLS 1 ... Touch sensor integrated reinforced cover glass, 10 ... Reinforced cover glass (glass plate), 11 ... Chamfered surface, 12 ... Input position detection electrode, 14 ... Light shielding layer, 16 ... Peripheral wiring, 18 ... Protective layer, 20 ... Laminated body, 22 ... spacing adjusting member, 30 ... brush polishing device, 32 ... laminated body holding section, 34 ... polishing brush, 34A ... shaft, 34B ... brush hair, 36 ... polishing liquid supply section, 38 ... polishing liquid

Claims (11)

  1.  対向する二つの主平面を有する第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、
     前記第2のガラス板の二つの主平面の間を接続する端面を研磨する研磨工程と、
     前記第2のガラス板に化学強化を施して前記主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、
     前記第2のガラス板の端面をエッチングするエッチング工程と、
     を備えたことを特徴とする強化カバーガラスの製造方法。
    A cutting step of cutting a first glass plate having two opposing main planes into a desired shape to form a second glass plate;
    A polishing step of polishing an end face connecting between two main planes of the second glass plate;
    A chemical strengthening step of chemically strengthening the second glass plate to form a compressive stress layer on at least one of the main planes;
    An etching step of etching an end face of the second glass plate;
    A method for producing a reinforced cover glass, comprising:
  2.  対向する二つの主平面を有する第1のガラス板に化学強化を施して前記二つの主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、
     前記第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、
     前記第2のガラス板の二つの主平面の間を接続する端面を研磨する研磨工程と、
     前記第2のガラス板の端面をエッチングするエッチング工程と、
     を備えたことを特徴とする強化カバーガラスの製造方法。
    A chemical strengthening step of chemically strengthening a first glass plate having two opposing main planes to form a compressive stress layer on at least one of the two main planes;
    A cutting step of cutting the first glass plate into a desired shape to form a second glass plate;
    A polishing step of polishing an end face connecting between two main planes of the second glass plate;
    An etching step of etching an end face of the second glass plate;
    A method for producing a reinforced cover glass, comprising:
  3.  前記研磨工程にて前記第2のガラス板の端面を研磨することにより、該端面の算術平均粗さRaを20nm以下にする請求項1又は2に記載の強化カバーガラスの製造方法。 The method for producing a reinforced cover glass according to claim 1 or 2, wherein the end surface of the second glass plate is polished in the polishing step so that the arithmetic average roughness Ra of the end surface is 20 nm or less.
  4.  前記研磨工程は、前記第2のガラス板の端面に研磨砥粒を含有する研磨液を供給しながら回転運動するブラシを接触させることにより、前記端面を研磨する請求項1~3のいずれか1項に記載の強化カバーガラスの製造方法。 4. The polishing step according to claim 1, wherein the end surface is polished by bringing a rotating brush into contact with an end surface of the second glass plate while supplying a polishing liquid containing abrasive grains. The manufacturing method of the reinforced cover glass as described in a term.
  5.  請求項1~4のいずれか1項に記載の強化カバーガラスの製造方法により製造されたことを特徴とする強化カバーガラス。 A reinforced cover glass produced by the method for producing a reinforced cover glass according to any one of claims 1 to 4.
  6.  対向する二つの主平面と、前記二つの主平面の間を接続する端面を有し、前記主平面の少なくとも一方に圧縮応力層が形成され、前記端面の算術平均粗さRaが20nm以下であり、JIS R1601:2008年に定める方法で測定される4点曲げ強度が1000MPa以上であることを特徴とする強化カバーガラス。 Two opposing principal planes and an end face connecting the two principal planes, a compressive stress layer is formed on at least one of the principal planes, and the arithmetic mean roughness Ra of the end faces is 20 nm or less , JIS R1601: A tempered cover glass having a four-point bending strength measured by a method defined in 2008 of 1000 MPa or more.
  7.  対向する二つの主平面と前記二つの主平面の間を接続する端面とを有する第1のガラス板に化学強化を施して前記主平面の少なくとも一方に圧縮応力層を形成する化学強化工程と、
     前記第1のガラス板の前記主平面の一方にタッチセンサ用配線を形成する配線形成工程と、
     前記第1のガラス板を所望の形状に切断して第2のガラス板とする切断工程と、
     前記第2のガラス板の端面を研磨する研磨工程と、
     前記第2のガラス板の端面をエッチングするエッチング工程と、
     を備えたことを特徴とするタッチセンサ一体型強化カバーガラスの製造方法。
    A chemical strengthening step of chemically strengthening a first glass plate having two opposing principal planes and an end face connecting the two principal planes to form a compressive stress layer on at least one of the principal planes;
    A wiring formation step of forming a touch sensor wiring on one of the main planes of the first glass plate;
    A cutting step of cutting the first glass plate into a desired shape to form a second glass plate;
    A polishing step of polishing an end face of the second glass plate;
    An etching step of etching an end face of the second glass plate;
    A method for producing a reinforced cover glass integrated with a touch sensor.
  8.  前記研磨工程にて前記第2のガラス板の端面を研磨することにより、前記端面の算術平均粗さRaを20nm以下にする請求項7に記載のタッチセンサ一体型強化カバーガラスの製造方法。 The method for producing a reinforced cover glass with an integrated touch sensor according to claim 7, wherein the end surface of the second glass plate is polished in the polishing step so that the arithmetic average roughness Ra of the end surface is 20 nm or less.
  9.  前記研磨工程は、前記第2のガラス板の端面に研磨砥粒を含有する研磨液を供給しながら連続的に運動するブラシを接触させることにより、前記端面を研磨する請求項7又は8に記載のタッチセンサ一体型強化カバーガラスの製造方法。 The said grinding | polishing process grinds the said end surface by contacting the brush which moves continuously, supplying the polishing liquid containing an abrasive grain to the end surface of the said 2nd glass plate. Manufacturing method of reinforced cover glass with integrated touch sensor.
  10.  請求項7~9のいずれか1項に記載のタッチセンサ一体型強化カバーガラスの製造方法により製造されたことを特徴とするタッチセンサ一体型強化カバーガラス。 10. A touch sensor-integrated reinforced cover glass produced by the method for manufacturing a touch sensor-integrated reinforced cover glass according to any one of claims 7 to 9.
  11.  対向する二つの主平面と前記二つの主平面の間を接続する端面とを有し、前記主平面の少なくとも一方に圧縮応力層が形成され、前記主平面の一方にタッチセンサ用配線が形成され、前記端面の算術平均粗さRaが20nm以下であり、JIS R1601:2008年に定める試験方法で測定される4点曲げ強さが1000MPa以上であることを特徴とするタッチセンサ一体型強化カバーガラス。 Two opposing principal planes and an end face connecting the two principal planes, a compressive stress layer is formed on at least one of the principal planes, and a touch sensor wiring is formed on one of the principal planes. An arithmetic average roughness Ra of the end face is 20 nm or less, and a four-point bending strength measured by a test method defined in JIS R1601: 2008 is 1000 MPa or more. .
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