WO2014010768A1 - Structure d'électrode de type à décharge de barrière diélectrique permettant de générer du plasma - Google Patents

Structure d'électrode de type à décharge de barrière diélectrique permettant de générer du plasma Download PDF

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Publication number
WO2014010768A1
WO2014010768A1 PCT/KR2012/005561 KR2012005561W WO2014010768A1 WO 2014010768 A1 WO2014010768 A1 WO 2014010768A1 KR 2012005561 W KR2012005561 W KR 2012005561W WO 2014010768 A1 WO2014010768 A1 WO 2014010768A1
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electrode structure
plasma
electrode
dielectric
electrodes
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PCT/KR2012/005561
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English (en)
Korean (ko)
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손희식
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주식회사 에스피텍
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Priority to PCT/KR2012/005561 priority Critical patent/WO2014010768A1/fr
Publication of WO2014010768A1 publication Critical patent/WO2014010768A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases

Definitions

  • the present invention relates to a plasma electrode structure applied to an air cleaning system, and more particularly, by generating a plasma in a gaseous fluid such as air, electrons, ions and ultraviolet rays generated at this time reacts with bacteria and odor molecules and harmful gases
  • the present invention relates to a plasma generation electrode structure of a dielectric barrier discharge (DBD) method for purifying air present in an interior of an air conditioner, a refrigerator, a washing machine, a vehicle, and the like.
  • DBD dielectric barrier discharge
  • Such techniques include filter type, electrostatic precipitating type, plasma type, UV / photocatalyst type, and hybrid type of various types.
  • the air cleaning method using plasma is known to have a great effect in removing contaminants.
  • the electrons and radicals generated through the plasma discharge phenomenon remove most of harmful gases such as VOCs (Volatile Organic Compounds), NOx, CFCs with high oxidative power, and have an excellent effect on sterilization. It combines with fine dust and binds them together by electric force, converting them into a form that is easy to remove.
  • This plasma method can be divided into corona discharge and dielectric barrier discharge.
  • the corona consists of a pointed cathode and a flat counter electrode.
  • a negative high pressure is applied to the cathode, electrons emitted from the electrode collide with the particles to generate cations, which are accelerated to the cathode due to electrical attraction and collide with the cathode to release high energy secondary electrons. These high energy electrons and heavy particles cause inelastic collisions to produce chemically reactive species.
  • 1 is an electrode structure type of corona discharge, (a) is a single needle (b) is a multi-needle type.
  • the corona electrode has a simple structure and a simple structure, which is inexpensive. However, a large amount of ozone is generated during discharge and its life is long, which is harmful to the human body. The amount of production is small, so the sterilization effect is weak.
  • the treatment area since the plasma volume is very small, the treatment area must be limited to a small area, so there is a method in which the number of cathodes is increased to increase the treatment area, but in this case, the micro arc (streamer) in a direction perpendicular to the electrode gap is also used. And these streamers are usually concentrated in the same place, resulting in localized treatment effects.
  • Dielectric barriers are widely used in industry because they can generate high output discharges at atmospheric pressure and do not require complex pulsed power supplies.
  • dielectric barriers are widely used for ozone generation, CO2 lasers, ultraviolet light sources, pollutant treatment, and the like.
  • a dielectric barrier discharge (DBD) device is composed of two parallel metal electrodes. At least one of the electrodes is covered with a dielectric layer.
  • a current cannot flow through the electrode, thereby generating plasma using AC power.
  • the spacing between electrodes is limited to a few millimeters for stable plasma generation and plasma gas flows between these spacings.
  • Such dielectric barrier discharges are sometimes referred to as quiet discharges because there are no local wave or noise discharges.
  • the discharge is ignited by a sine function or pulsed power supply.
  • the discharge is in the form of a filament or glow.
  • the filamentary discharge is produced by a micro discharge or streamer that develops on the surface of the dielectric layer.
  • the role of the dielectric layer is to enable the operation in the continuous pulse mode by blocking the inversion current and avoiding the transition to the arc, and electrons are accumulated on the dielectric surface to randomly distribute the streamer on the surface to produce a uniform discharge. To induce.
  • the dielectric barrier discharge (DBD: Dielectic Barrier Discharge) has a number of variations as follows.
  • a typical dielectric barrier electrode structure in which an insulating material such as glass is sandwiched between one or both electrodes between parallel electrodes with a distance of several mm, and when an alternating voltage is applied, a small discharge in pulse phase is not generated without causing a glow discharge. It happens a lot. This is called a silent discharge, and is widely applied in industrial fields such as removing harmful gases due to generation of active ions.
  • Fig. 4A is a plate dielectric barrier electrode structure.
  • the electric field applied to the surface is uniform, so that the charges are statistically specified in a non-uniformly deposited dielectric with a specific distribution shape, which induces streamer discharges rather than glow discharges, thereby reducing the amount of ultraviolet rays generated. There is a tendency.
  • FIG. 4 (b) is a mesh DBD structure that is a variation of the plate DBD.
  • This method uses a mesh electrode rather than a normal plate electrode, as well as the electric field enhancement inside the reactor, as well as the streamer discharge through the geometry of the mesh electrode, the concentration of electrons in the plasma is inherent to the mesh. Due to its uniform distribution, it is a structure that can generate multi-glow discharge with excellent plasma uniformity and efficiency. As a result, compared with the conventional corona discharge and the general DBD discharge, the plasma generates an excellent amount of ultraviolet generation, active species such as OH radicals and O (atomic oxygen).
  • micro gap discharge shows another modified electrode structure called micro gap discharge. It is a method of generating plasma strongly using a very small discharge gap of about tens to hundreds of micrometers between electrodes. In this method, a large noise and a large amount of ozone are generated during the streamer discharge, so the applied voltage must be adjusted so that the streamer is not generated. In addition, the probability of contact between air and active species in the plasma section is much higher than that of other structures, resulting in the generation of more effective species for air cleaning and sterilization, resulting in better sterilization effect, less noise, and less ozone generation than mesh DBD discharge. Less. As the prior art, the invention disclosed in Korean Patent Laid-Open Publication No. 2006-0017191 may be mentioned.
  • this method has a complicated structure because it is necessary to form a fine gap between the electrodes, and to support the structure with an insulator from the outside of the metal electrode or a spacer (spacer) that is an insulator.
  • the method of inserting between electrodes has been used.
  • this method has the disadvantage of significantly increasing the manufacturing cost of the structure.
  • Underwater discharge forms micro bubbles in water and contains bacteria with high sterilizing power such as hydroxyl (OH), active oxygen (O-, O2, O3) and hydrogen peroxide (H2O2) in water by plasma action. And it can be used to remove the virus, the applications are food processing, food industry, animal husbandry or hospital, such as household appliances such as washing machines, air conditioners, air purifiers and humidifiers and sterilization sterilization water.
  • the method of generating bubbles of active oxygen and ozone through the underwater discharge is based on the bubble mechanism theory, and the plasma electrode is placed in the water and discharged to fine bubbles generated by vaporization of water by discharge heat or the like or injected from the outside. It causes phenomena to generate radicals, such as hydroxyl groups, active oxygen and hydrogen peroxide. These radicals oxidize heavy metals in the water and also kill bacteria and viruses in the water.
  • the plasma electrode used in the underwater discharge is mainly used as the dielectric barrier electrode, which is basically out of the above-mentioned plasma electrode type.
  • the invention disclosed in Korean Patent Registration No. 10-0924649 and Korean Patent Publication No. 2009-009675 may be mentioned.
  • the present invention has been made to solve the above-mentioned problems of the prior art, and not only has stability of plasma but also has a large amount of active ions, excellent sterilizing power, low ozone generation, low power consumption, and economical dielectric barrier. It is an object of the present invention to provide a discharge type plasma generating electrode structure.
  • the protrusion may have a shape of a circle, a square, an ellipse, a polygon, a star, a combination thereof, and the like.
  • processes such as spraying, plasma spraying, coating, screen printing, and the like may be used.
  • the path of the through hole forms a straight line perpendicular to the surface of the electrode structure, forms an inclination with respect to the vertical straight line, forms a curved shape or is curved at least one or more times, or forms a combination thereof. Can be achieved.
  • the upper and lower dielectric layers may be at least one, and each dielectric layer may be the same material or different materials.
  • the through hole may have a shape of any one of a circle, a rectangle, an ellipse, a polygon, a star, another shape, and a combination thereof.
  • the dielectric layer may have a pattern matching each other or may have a different pattern.
  • At least one of a protective coating layer, a dielectric layer, and a special functional layer may be formed on a surface of the upper and lower conductive electrodes and / or an inner surface of the through hole.
  • a dielectric layer may be additionally introduced on the upper and lower conducting electrodes of the structure, and a metal electrode may be installed at the upper and lower electrodes of the upper electrode and the lower electrode and the lower electrode and the electric electrode, and the fluid may easily pass therethrough.
  • the upper or lower portion of the electrode structure may be a composite arrangement of the particle filter, the ultraviolet light filter and the ozone filter.
  • the fluid may also be air or a gas other than air or water or a liquid other than water.
  • two or more electrode structures may be arranged in series, spaced apart in series, insulated between the structures and in close contact with each other, or may be stacked in two or more layers having different electrical polarities, and expanded in parallel. Can be arranged.
  • Plasma electrode structure according to the invention of the above-described structure is low noise, excellent in plasma efficiency, and many active species are generated not only is the structure life way low back pressure of the air excellent in power consumption if the structure, the purification of air, sterilization Of course, it is possible to fundamentally remove the smell of air conditioning.
  • the plasma electrode structure can be configured in various ways according to the characteristics of the required application, most of the limitations of the electrode design according to the existing plasma electrode structure can be solved, which is very advantageous for miniaturization.
  • the electrode structure of the present invention is not limited to the field of air cleaning, but can be easily applied to other gaseous fluids and liquid phases, such as water, and in the case of water, microbubbles in water are ionized by plasma, which is the same principle as air clean principle. By sterilizing and purifying water, it can be easily applied to various applications other than air.
  • FIG. 1 is a diagram showing the electrode structure type of a typical corona discharge.
  • FIG. 4 is a diagram illustrating a typical Volume DBD electrode structure, which shows (a) plate-shaped DBD, (b) mesh-type DBD, and (c) micro-gap DBD.
  • FIG. 5 is a diagram illustrating a plasma generating region in a conventional volume DBD electrode structure.
  • FIG. 6 is a diagram illustrating a vertical plasma dielectric barrier electrode structure and a plasma generating region according to an embodiment of the present invention.
  • FIG. 7 is a diagram illustrating various types of through-hole patterns of the plasma electrode according to an embodiment of the present invention.
  • FIG. 8 is a view showing a plasma enhanced structure according to an embodiment of the present invention.
  • FIG. 9 is a view showing a fluid clean reactor according to an embodiment of the present invention.
  • FIG. 10 is an exemplary diagram of a vertical plasma DBD electrode configuration according to an embodiment of the present invention.
  • dielectric barrier plasma electrodes there are various dielectric barrier plasma electrodes to date, but all of them have a common structure, as illustrated in FIGS. 5 (a) and 5 (b), in which the electrode and the dielectric layer are formed in parallel with each other in a plate shape. It is a structure that appears in parallel and flows parallel to the electrode arrangement. Some electrodes also have a plate-shaped cylinder, but the results are the same. In the case of the micro-gap method, a complicated design is required to maintain the micro-gap space between the electrodes, and the fluid passage interval is reduced, resulting in back pressure on the fluid flow and noise.
  • the present invention adopts a micro-gap method with high efficiency, adopts a structure in which the flow of fluid occurs in a direction perpendicular to the arrangement of the electrodes so that back pressure generation to the fluid flow is small, and at the same time, the electrode
  • a protrusion embssing
  • the plate-shaped conducting electrode to facilitate the formation of the gap between them, and forming a dielectric layer thereon, a pair of electrodes are in close contact with each other to provide an electrode structure that is easy to form and maintain the gap between the electrodes.
  • FIG. 6 is a diagram illustrating a dielectric barrier electrode structure and a plasma generation region according to an embodiment of the present invention.
  • the dielectric barrier plasma electrode structure of the present invention includes a plate-shaped upper and lower conducting electrodes 10 and 10 ′, upper and lower dielectric layers 30 formed on upper and lower portions of the upper and / or lower conducting electrodes, respectively. 30 '), one or more protrusions 50 formed between each of the upper and lower dielectric layers or between any one of the upper and lower dielectric layers and any one of the upper and lower conducting electrodes to maintain a predetermined distance d between the formed layers. And through holes 70 formed in at least one of the upper and lower conductive electrodes and the dielectric layer.
  • the plasma 90 is formed at the formed interval d by applying a direct current or an alternating voltage to the upper and lower conducting electrodes, and the fluid is activated by supplying the fluid active species generated by the plasma to the fluid flowing into the through hole. Can purify.
  • the electrode structure of the present invention includes an upper conducting electrode 10 and a lower conducting electrode 10 '.
  • the electrodes 10 and 10 ' may be concave or convex, depending on the required characteristics of a flat plate having a circular, square, elliptical or other shape.
  • the upper and lower conducting electrodes 10 and 10 ' are connected by a power supply device so that DC or AC voltages can be applied thereto.
  • the protrusion 5 may be formed on at least one or more places of the lower surface of the upper electrode and / or the upper surface of the lower electrode.
  • the protruding portion 5 is formed by pressing the electrode substrate to a predetermined height by a method such as pressing or by adding another metal.
  • the projecting portion 5 serves to maintain a predetermined height interval when the upper and lower pairs of electrodes are in close contact with each other, the height is a region of several ⁇ m to 1mm or less commonly used.
  • the number of the protrusions 5 can be freely adjusted the number within the range in which the distance between the electrodes is maintained.
  • the position of the protrusion part 5 may be formed in the upper electrode, the lower electrode, or both electrodes.
  • the electrode protrusions may be formed before the dielectric layer forming step described later, but may be performed after the dielectric layers are formed in a reversed order. In this case, however, care should be taken in dropping the dielectric layer during the formation of the protrusion.
  • the protrusions 5 are for forming the protrusions 50 for maintaining the gaps between the dielectric layers 30 and 30 ', which will be described later. You can do it.
  • the electrode structure of the present invention includes upper and lower dielectric layers 30 and 30 'formed on the upper and lower conductive electrodes 10 and / or 10', respectively.
  • the upper and lower dielectric layers 30 and 30 ' are made of a material such as ceramic, quartz, and glass, which have both electrical insulation and dielectric properties.
  • the thickness is, for example, several micrometers to several millimeters and the area is arbitrarily set according to the processing capacity. It may be, for example, from several mm 2 to several hundred cm 2 .
  • the upper and lower dielectric layers 30 and 30 ' may be formed by spraying, plasma spraying, coating, screen printing, or the like. At this time, the thickness of each dielectric layer is in the range of several micrometers to several mm depending on the dielectric material.
  • the upper and lower dielectric layers 30 and 30 ' may be formed of a mixture of two or more dielectric compositions, respectively, and may be formed in one or more layers.
  • the material when forming one or more dielectric layers, the material may be the same for each dielectric layer, it may be different.
  • the characteristics of the plasma formed by changing the number, total thickness, and material of the upper and lower dielectric layers 30 and 30 ' may be changed, and the electrode properties may be enhanced by changing the material of each dielectric layer for each layer.
  • the electrode structure of the present invention may be disposed between the upper and lower dielectric layers 30 and 30 'or between any one of the upper and lower dielectric layers 30 and 30' and any one of the upper and lower conductive electrodes 10 and 10 '. And one or more protrusions 50 formed to maintain a predetermined spacing d between the formed layers. For example, if the upper and lower dielectric layers 30 and 30 'are uniformly formed on the upper and lower conducting electrodes 10 and 10', when the upper and lower conducting electrodes are in close contact with each other due to the presence of the protrusions 50, the protrusions 50 may be spaced apart. It serves as a spacer to form. In the case of the present invention, a gap can be formed by a process different from the general spacer formation method, and the material of the protrusion 50 is the same as that of the dielectric layers 30 and 30 '.
  • the gap between the pair of plasma electrodes is controlled by the effect of the protrusion 50.
  • d) is easily formed.
  • the two conductive electrodes 10 and 10 ′ are structurally in contact with the protrusion 50, but since the dielectric has an insulating property as a ceramic, the current is blocked between the two electrodes so that the original function of the plasma electrode does not occur.
  • the thickness of the dielectric layers 30 and 30 ' should be sufficient to withstand the applied voltage, and the thickness will vary depending on the material.
  • the electrode structure of the present invention may exhibit various combinations of structures depending on the formation of the protrusion 50. That is, if the protrusion 50 is formed between the upper and lower dielectric layers 30 and 30 ', the structure of the upper electrode, the upper dielectric layer, the protrusion, the lower dielectric layer, and the lower electrode may be represented. If the protrusion 50 is formed between any one of the upper and lower dielectric layers 30 and 30 'and any one of the upper and lower conducting electrodes 10 and 10', the dielectric layers 30 and 30 'are formed. Depending on which one is formed, it may exhibit a structure such as an upper electrode / protrusion / lower dielectric layer / lower electrode.
  • the electrode structure of the present invention also includes a through hole 70 formed in at least one or more of the dielectric layers 30 and 30 'and the upper and lower conducting electrodes 10 and 10'. That is, one or more through holes are formed in the plate-shaped electrode structure so that the fluid moves through the through holes.
  • the passage of the through hole 70 forms a straight line perpendicular to the surface of the electrode structure, forms an inclination with respect to the vertical straight line, forms a shape that is bent at least one time, or curves. Or a combination thereof.
  • the through hole 70 may form any one of the shape of a circle, a square, a star, other shapes and combinations thereof, the size of the hole, the type of shape, or the size and type Various combinations can be combined together to change the pattern.
  • the upper and lower conducting electrodes 10 and 10 ' are connected by a power supply device so that DC or AC voltages can be applied thereto.
  • the power supply connected to the electrode may be supplied at a specific frequency of several tens of Hz to several tens of Hz as an AC voltage ranging from several V to 30 kV, for example. Therefore, when electric power is supplied by operating the power supply device, electrical discharge occurs in the gap formed between the electrodes, thereby generating the plasma 90. At this time, the active element is generated by the generated plasma 90 to supply active species to the fluid flowing into the through hole 70 to impart a clean function.
  • the upper and lower electrodes 10 and 10 'and the dielectric layers 30 and 30' may have patterns that match each other or may have different patterns.
  • a protective coating layer, a dielectric layer, or a special functional layer may be formed on the upper and lower conductive electrodes 10 and 10 ′ and / or the inner surface of the through hole 70.
  • dielectric layers 33 and 33 ′ are further introduced into outer surfaces of the upper and lower electrode electrodes 10 and 10 ′, and an electric electrode is disposed below the upper and lower conductive electrodes. If a different metal electrode is installed at a predetermined interval apart, additional plasma may be generated on the outer surface of the electrode structure, thereby providing a greater effect.
  • the fluid may be a gas such as air or a liquid such as water, and the electrode structure may be easily and efficiently generated when the above-described electrode structure is placed in water. Become applicable.
  • FIG. 9 is a view showing a fluid clean reactor according to an embodiment of the present invention.
  • a fluid clean reactor using a cold plasma basically has a body that is at least larger than the plasma electrode area.
  • a flow distributor having an inlet for introducing fluid into the body.
  • the body includes one or more plasma electrode structures.
  • the completed plasma electrode structure is disposed perpendicular to the flow of fluid in the reactor body, as shown in FIG. 9, and the contacts other than the conducting terminals are insulated. According to the reaction process of the reactor configured as described above, when electric power is first applied to the reactor, electrical discharge occurs at intervals between upper and lower electrodes, thereby generating plasma.
  • the principles of the present invention are also applied to the electrode structure of the present invention to form a laminated structure by alternately changing the electrode by introducing a laminated structure that is applied in the battery field.
  • the electrode structure of the present invention Due to the characteristics of the electrode structure of the present invention, it is easy to arrange various filters or mesh screens in series in the front and rear of the electrode structure, and thus, an additional filter or screen complementing the ozone removing function, the ultraviolet ray increasing function, and the odor removing function is applied. That is, as shown in FIG. 10, the particle filter, the ultraviolet light reinforcing filter, and the ozone filter may be arranged in front and rear of the electrode structure.
  • the electrode structure of the present invention may be formed by two or more are arranged at intervals in series, insulated between the structures and in close contact with each other, or stacked in two or more by alternating electrical polarities, Parallel arrays are also available to increase capacity.
  • the electrode structure structure of the present invention can easily increase the flow rate by increasing the number of through holes in the plate-shaped electrode can overcome the limitations of the electrode design due to the back pressure.
  • deformation of the electric field may be induced to impart various characteristics to the plasma electrode. That is, if a pointed shape is given to the cross-sectional area of the through hole, electrons are concentrated in this area, so discharge is easily generated, so that plasma can be easily generated at a low voltage. In the case of a circular shape, an electric field is uniformly distributed to reduce concentration of voltage. Streamer discharge can be avoided, and a uniform glow discharge is produced. Therefore, the discharge form of the plasma can be easily designed. By mixing the pattern shape and size, it is possible to control the ratio of streamer discharge and glow discharge, active ion generation amount and UV generation amount, discharge start voltage and power consumption.
  • the electrode structure of the present invention is a structure that can easily increase the air-cleaning effect because the same electrode is arranged in a plurality of overlapping or laminated structure with a predetermined interval so that the fluid passes through the plasma several times.
  • an air cleaner module including a fluid inlet port, a plasma electrode, and a fluid outlet unit was used.
  • the conducting electrode is made of stainless steel 403 and has a disk shape of 50mm in diameter and 1mm in thickness, and then uses five presses and five projections at the center of the radius at an angle equal to the outer part of the diameter using a press. It was produced at a height of 50 ⁇ m. Furthermore, 48 circular through-holes with a diameter of 3.6 mm were formed on the plate so as to distribute uniformly on the plate. This corresponds to an opening area of 25% of the total area.
  • a dielectric layer was formed to a thickness of 70 ⁇ m on a metal disc by a conventional spraying (spray) process using alumina and barium titanate powder having a particle size of 1-2 ⁇ m as a dielectric composition and a polymer PVDF (Polyvinylidene fluoride) as a binder.
  • alumina and barium titanate powder having a particle size of 1-2 ⁇ m as a dielectric composition
  • a polymer PVDF Polyvinylidene fluoride
  • an alternating current having a voltage of 1000 V and a frequency of 700 kHz was applied to the electrode structure, and the concentration of anion water and ozone generated through an ion counter and an ozone analyzer was measured at an air outlet.
  • the UV generation density generated by using OES was measured, and E. coli smeared on agar medium was placed at a distance of 20 cm from the derivation unit and sterilized halo after 24 hours. Observation was performed to determine the bactericidal power.
  • the amount of anion generation was 145,000 / cm3
  • the concentration of ozone was 0.030 ppm or less
  • the amount of ultraviolet rays was about 2800
  • the bacteria were sterilized more than 99.9%.
  • the amount of ultraviolet rays generated was about 300, only about 10% compared to the present invention, and the amount of anions generated was 1450 / cm 3 , and the sterilization effect was after 72 hours. It was insignificant.
  • the voltage was applied more than 2kV to generate the plasma, the handling and the risk of use were very large.
  • the electrode structure of the present invention is not limited to the field of air cleaning, but can be easily applied to liquid phases such as other gaseous fluids and water. Water can be sterilized and purified, so that it can be easily applied to various applications other than air.

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  • Physics & Mathematics (AREA)
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  • Life Sciences & Earth Sciences (AREA)
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Abstract

La présente invention a trait à une structure d'électrode de type à décharge de barrière diélectrique permettant de générer du plasma. La structure d'électrode, selon la présente invention, comprend : des électrodes souples supérieure et inférieure ; des couches diélectriques supérieure et inférieure, qui sont formées sous l'électrode souple supérieure et/ou au-dessus de l'électrode souple inférieure, respectivement ; au moins une protubérance, qui est formée entre les couches diélectriques supérieure et inférieure ou entre un côté des couches diélectriques supérieure et inférieure et un côté des électrodes souples supérieure et inférieure, afin de maintenir un écart spécifique (d) entre les couches qui sont formées ; et un trou traversant qui est formé sur au moins une position sur les électrodes souples supérieure et inférieure et les couches diélectriques, le plasma étant formé dans l'écart formé (d) en appliquant un courant continu ou un courant alternatif aux électrodes souples supérieure et inférieure, et un fluide de substance active, qui est généré au moyen du plasma, étant fourni au fluide qui est introduit à l'intérieur du trou traversant, ce qui permet de la sorte de purifier le fluide.
PCT/KR2012/005561 2012-07-13 2012-07-13 Structure d'électrode de type à décharge de barrière diélectrique permettant de générer du plasma WO2014010768A1 (fr)

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CN110523241A (zh) * 2019-10-08 2019-12-03 西安空天能源动力智能制造研究院有限公司 一种用于废气处理的孔板式介质阻挡放电等离子产生装置
CN110662578A (zh) * 2017-05-31 2020-01-07 奇诺格有限责任公司 面式敷贴组件
IT201800007762A1 (it) * 2018-08-02 2020-02-02 2 Zeta Srl Apparato di trattamento aria
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WO2021257511A1 (fr) * 2020-06-16 2021-12-23 Knorr Brake Company Llc Système de purification d'air à deux étages pour emplacements fermés
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CN110662578A (zh) * 2017-05-31 2020-01-07 奇诺格有限责任公司 面式敷贴组件
IT201800007762A1 (it) * 2018-08-02 2020-02-02 2 Zeta Srl Apparato di trattamento aria
WO2020026183A1 (fr) * 2018-08-02 2020-02-06 2Zeta S.R.L. Appareil de traitement de l'air
CN112739388A (zh) * 2018-08-02 2021-04-30 2Zeta有限责任公司 用于处理空气的设备
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CN111248393A (zh) * 2020-02-27 2020-06-09 西安交通大学 流体食品协同杀菌装置及方法
CN115768942A (zh) * 2020-06-02 2023-03-07 普林斯顿大学理事会 低温织物介电阻挡放电装置
WO2021257511A1 (fr) * 2020-06-16 2021-12-23 Knorr Brake Company Llc Système de purification d'air à deux étages pour emplacements fermés

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