WO2013191682A1 - Système de caractérisation de surface - Google Patents

Système de caractérisation de surface Download PDF

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Publication number
WO2013191682A1
WO2013191682A1 PCT/US2012/043110 US2012043110W WO2013191682A1 WO 2013191682 A1 WO2013191682 A1 WO 2013191682A1 US 2012043110 W US2012043110 W US 2012043110W WO 2013191682 A1 WO2013191682 A1 WO 2013191682A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
splitting
splitting unit
unit
characterization system
Prior art date
Application number
PCT/US2012/043110
Other languages
English (en)
Inventor
Wen Tse HSU
Chia-Lin Lee
Pang-Chen KUO
Original Assignee
Ardic Instruments Co.
Liou, Albert Ge-Shean
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardic Instruments Co., Liou, Albert Ge-Shean filed Critical Ardic Instruments Co.
Priority to PCT/US2012/043110 priority Critical patent/WO2013191682A1/fr
Publication of WO2013191682A1 publication Critical patent/WO2013191682A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Definitions

  • the present invention relates to a surface characterization system, and more particularly to a surface characterization system through which surface characteristic information and surface characteristic image information of an object can be synchronously obtained during a measurement operation.
  • an optical measurement system with nano- level resolution becomes increasingly important currently.
  • an atomic force microscope uses a tip with a radius of several nanometers as a probe to measure surface characteristics of a measured object, such as smoothness, according to fluctuation and variation occurring due to interaction between the probe and a surface of the measured object.
  • the nano probe measures people cannot directly read the currently measured position and the variation of the probe with naked eyes. Therefore, it is required to read or measure displacement information of the nano probe through another measurement system and then convert the displacement information into actual object surface fluctuation.
  • an optical system is generally used to directly measure or read the movement of the nano probe.
  • multiple four- quadrant photodetectors may also be used to generate several pieces of variation information at the same time, and then more precise variation information is generated after comparison.
  • the application of the multiple four-quadrant photodetectors directly increases the system construction cost and complicates the light path design.
  • US patent No. US20110095210 discloses a light path mechanism, which is a combination of an astigmatic detection system and an optical image system.
  • a collimating lens enables a beam emitted from a light source to become parallel beams, the parallel beams are focused on a surface of a measured object with an effect of two beam splitters through an objective lens, and reflected light of the measured object passes through the objective lens and one of the beam splitters and is split into an image beam and a measurement beam.
  • the image beam passes through one of the beam splitters, and is focused and projected onto an image sensing unit of the optical image system through a sensing lens.
  • the measurement beam is refracted by the beam splitter, then sequentially passes through the other beam splitter, a detecting lens and an astigmatic lens, and is projected onto the four-quadrant photodetector, so as to generate a surface measurement signal of the measured object.
  • the algorithm for processing the surface measurement signal of the measured object is disclosed in US patent No. US7247827.
  • the image sensing unit obtains the surface image information of the measured object in the measured area through the image beam projected onto the image sensing unit.
  • US patent No. US20110095210 discloses a light path system, in which an image sensing unit is assembled on a perpendicular optical axis formed through the beam splitter and the measured object, and an optical signal received by the image sensing unit is obtained through the effect of the objective lens and the beam splitter after being reflected from the measured object. More attention needs to be paid on the light path calibration during assembly for the design of the perpendicular coaxial light path; otherwise deflections or errors are easily occur in the surface image information.
  • a main objective of the present invention is to provide a surface characterization system through which object surface characteristic information and surface image information of a measured object can be synchronously obtained during the implementation, so that a user can know the measurement conditions in time during the measurement.
  • the surface characterization system of the present invention includes, in a light path of the system, a light-emitting module, a first light- splitting unit, a refraction unit, a second light-splitting unit, a lens set, a detection module and an image capture module.
  • the light-emitting module includes a primary light source, where a primary projection optical axis is formed according to a light path of the primary light source.
  • the first light-splitting unit is located on a light path of the primary projection optical axis, and a light-splitting axis is formed from the first light-splitting unit.
  • the refraction unit is located behind the first light-splitting unit, where the primary projection optical axis is refracted by the refraction unit and then a refracted optical axis is formed from the refraction unit.
  • the second light-splitting unit is located on a light path of the refracted optical axis formed from the refraction unit, and another light-splitting axis is formed from the second light-splitting unit.
  • the lens set is located on a light path of the refracted optical axis formed from the second light-splitting unit.
  • the detection module is located on a light path of the light-splitting axis formed from the first light-splitting unit, and is used to convert received reflected light into surface characteristic information.
  • the image capture module is located on a light path of the another light-splitting axis formed from the second light-splitting unit, and is used to convert another received reflected light into image information.
  • the image information may be further displayed on a display device. In this way, during measurement, through the surface characteristic information and the surface image information synchronously generated, the user can rapidly access the current state of the measurement operation of the system.
  • Fig. 1 is a schematic composition view of the present invention.
  • Fig. 2 is a schematic view of a light path of the present invention.
  • Fig.3 illustrates another preferred embodiment of the present invention.
  • a surface characterization system 1 of the present invention mainly includes a light-emitting module 11, a detection module 12, a refraction unit 13, a first light-splitting unit 14, a second light-splitting unit 15, an image capture module 16 and a lens set 17.
  • the elements are arranged as follows:
  • the first light- splitting unit 14 is located on a light path of the primary projection optical axis INi, and a light-splitting axis IN 2 formed from the first light- splitting unit 14.
  • the refraction unit 13 is located on a light path of a projection light path INi formed from the first light-splitting unit 14, and the primary projection optical axis INi is refracted by the refraction unit 13 and then a refracted optical axis IN 3 is formed from the refraction unit 13.
  • the second light-splitting unit 15 is located on a light path of the refracted optical axis IN 3 formed from the refraction unit 13, and another light-splitting axis IN 4 is formed from the second light splitting unit 15.
  • the lens set 17 is located on a light path of the refracted optical axis IN 3 formed from the second light-splitting unit 15.
  • the detection module 12 is located on a light path of the light-splitting axis IN 2 formed from the first light-splitting unit 14.
  • the detection module 12 is preferably a four- quadrant photodetector, and is used to convert a received light into surface characteristic information.
  • the surface characteristic information is, for example, information of a surface shape of the measured object;
  • the image capture module 16 is located on a light path of the light-splitting axis IN 4 formed from the second light-splitting unit 15.
  • the image capture module 16 can be, for example, a Charge-Coupled Device (CCD), and is used to convert received light into image information.
  • CCD Charge-Coupled Device
  • a schematic view of a light path of the present invention is shown.
  • the primary light source 112 of the light-emitting module 11 emits projection light LI (shown in heavy line).
  • the projection light LI goes forward along the primary projection optical axis INi, passes through the first light-splitting unit 14, reaches the refraction unit 13.
  • the projection light LI is refracted, goes forward along the refracted optical axis IN 3 , passes through the second light-splitting unit 15, reaches and passes through the lens set 17, and then is projected onto a surface Bl of a measured object B, so as to measure the surface Bl .
  • reflected light RLl is then reflected by the measured object B.
  • the reflected light RLl first passes through the second light-splitting unit 15 when going forward along the refracted optical axis IN 3 .
  • the reflected light RLl is partially split by the second light- splitting unit 15, and the split light RLl 2 is projected onto the image capture module 16.
  • the refiected light RLl continuously goes forward, and reaches the refraction unit 13. Then the refiected light RLl is refracted to continuously go forward along the primary projection optical axis INi and passes through the first light- splitting unit 14.
  • the split light RLl 2 generated due to the light-splitting effect is captured by the image capture module 16, and then is converted into image information. Therefore, a surface image of the measured object B can be accordingly generated and then optionally displayed on a display device 2.
  • surface characteristic information of the surface Bl of the measured object B can be accordingly generated. Therefore, the operator can synchronously obtain the surface characteristic information and the image information of the surface Bl of the measured object B during the measurement operation.
  • FIG. 3 another preferred embodiment of the present invention is shown.
  • relevant components can be installed in the system according to the requirements.
  • a cylindrical lens 30 is installed between the first light-splitting unit 14 and the detection module 12, so that after the split light RL14 passes through the cylindrical lens 30, an astigmatic effect occurs and then the split light RL14 is projected onto the detection module 12.
  • the split light RL14 received by the detection module 12 can be converted through an algorithm into the surface characteristic information of the surface Bl of the measured object B.
  • a collimating lens 40 is installed between the first light- splitting unit 14 and the refraction unit 13, so as to collimate projection light LI emitted from the primary light source 112. Therefore and light scattering is prevented in the projection path, and the projection light LI can be collimated into parallel light when passing through the collimating lens 40.
  • a third light-splitting unit 18, in cooperation with an auxiliary optical module 50, is installed between the refraction unit 13 and the second light-splitting unit 15.
  • the auxiliary optical module 50 can generate auxiliary light 501 as an auxiliary light source, so as to be complementary to the case of an insufficient light during the measurement process. Therefore the whole measurement result is clearer.
  • the auxiliary light 501 generated by the auxiliary optical module 50 is deflected by the third light- splitting unit 18 located on the light path of the refracted optical axis IN 3 , then goes forward along the refracted optical axis IN 3 , passes through the second light-splitting unit 15 and the lens set 17, and finally illuminates the surface Bl of the measured object B and the adjacent area thereof.
  • the auxiliary light 501 is reflected and then is partially split by the second light- splitting unit 15 onto the light- splitting axis IN 4 , and is projected onto the image capture module 16, thereby complementing the light required in the operation of the image capture module 16.
  • a filter 60 is installed between the image capture module 16 and the second light-splitting unit 15, so as to filter parasitic light and further improve the definition of the captured image.
  • the lens set 17 is adjustable, so that the operator can adjust the lens set 17 upward or downward (the shown dashed arrow) according to the requirements during the measurement operation, so as to adjust the focus. In this way, the operator can select a proper focus for measurement by adjusting the position of the lens set 17 during the measurement.
  • the surface characterization system of the present invention two light splitters are installed on the light path formed according to the system, so that the reflected light generated during the measurement operation of the system is received by the detection module and the image capture module separately.
  • the surface characteristic information and the image information of the measured object can be synchronously obtained, thereby improving the convenience during the measurement operation and achieving the efficacy of precise operation. Therefore, after the implementation of the present invention, through the surface characterization system of the present invention, the object surface characteristic information and the surface image information of the measured object can be synchronously obtained during the implementation, so that a user can know the measurement conditions in time during the measurement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un système de caractérisation de surface. Le système de caractérisation de surface comprend principalement dans son trajet lumineux une première unité de séparation de lumière et une seconde unité de séparation de lumière, qui produisent respectivement une première lumière réfléchie et une seconde lumière réfléchie à partir de la lumière réfléchie par une surface d'un objet mesuré. Un module de détection reçoit la première lumière réfléchie par l'intermédiaire de la première unité de séparation de lumière, et produit des données de caractéristique de surface relatives à l'objet mesuré. De plus, un module de capture d'image reçoit la seconde lumière réfléchie par l'intermédiaire de la seconde unité de séparation de lumière, et produit des données d'image.
PCT/US2012/043110 2012-06-19 2012-06-19 Système de caractérisation de surface WO2013191682A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2012/043110 WO2013191682A1 (fr) 2012-06-19 2012-06-19 Système de caractérisation de surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2012/043110 WO2013191682A1 (fr) 2012-06-19 2012-06-19 Système de caractérisation de surface

Publications (1)

Publication Number Publication Date
WO2013191682A1 true WO2013191682A1 (fr) 2013-12-27

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ID=49769138

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PCT/US2012/043110 WO2013191682A1 (fr) 2012-06-19 2012-06-19 Système de caractérisation de surface

Country Status (1)

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WO (1) WO2013191682A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106574871A (zh) * 2014-06-16 2017-04-19 法国原子能及替代能源委员会 用于光束表征的设备和方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070024998A1 (en) * 2004-12-19 2007-02-01 Bills Richard E System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
US20070030493A1 (en) * 2005-05-13 2007-02-08 Laytec Gesellschaft Fuer In-Situ Und Nano-Sensorik Mbh Device and Method for the Measurement of the Curvature of a Surface
US20080094616A1 (en) * 2005-05-25 2008-04-24 Olympus Corporation Surface defect inspection apparatus
US20110095210A1 (en) * 2009-10-23 2011-04-28 Academia Sinica Optical imaging system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070024998A1 (en) * 2004-12-19 2007-02-01 Bills Richard E System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
US20070030493A1 (en) * 2005-05-13 2007-02-08 Laytec Gesellschaft Fuer In-Situ Und Nano-Sensorik Mbh Device and Method for the Measurement of the Curvature of a Surface
US20080094616A1 (en) * 2005-05-25 2008-04-24 Olympus Corporation Surface defect inspection apparatus
US20110095210A1 (en) * 2009-10-23 2011-04-28 Academia Sinica Optical imaging system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106574871A (zh) * 2014-06-16 2017-04-19 法国原子能及替代能源委员会 用于光束表征的设备和方法
CN106574871B (zh) * 2014-06-16 2019-07-16 法国原子能及替代能源委员会 用于光束表征的设备和方法

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