WO2013177824A1 - 配向膜制造装置 - Google Patents

配向膜制造装置 Download PDF

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Publication number
WO2013177824A1
WO2013177824A1 PCT/CN2012/076751 CN2012076751W WO2013177824A1 WO 2013177824 A1 WO2013177824 A1 WO 2013177824A1 CN 2012076751 W CN2012076751 W CN 2012076751W WO 2013177824 A1 WO2013177824 A1 WO 2013177824A1
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Prior art keywords
alignment film
manufacturing apparatus
support portion
film manufacturing
support
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PCT/CN2012/076751
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English (en)
French (fr)
Inventor
余少鑫
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深圳市华星光电技术有限公司
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Priority to US13/575,303 priority Critical patent/US20130320605A1/en
Publication of WO2013177824A1 publication Critical patent/WO2013177824A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Definitions

  • Embodiments of the present invention relate to the field of liquid crystal display technologies, and in particular, to an alignment film manufacturing apparatus for manufacturing an alignment film for a liquid crystal display device.
  • the liquid crystal display module has been widely used in mobile phones, personal digital assistants, notebook computers, personal computers and televisions due to its low radiation, small size, short power consumption and low power consumption.
  • the liquid crystal display module generally includes a thin film transistor (TFT) substrate, a color filter (CF) substrate, and a liquid crystal layer.
  • TFT thin film transistor
  • CF color filter
  • the thin film transistor substrate and the color filter substrate are disposed opposite to each other, and the liquid crystal layer is located between the thin film transistor substrate and the color filter substrate.
  • the thin film transistor substrate and the color filter substrate generally respectively include an alignment film adjacent to the liquid crystal layer.
  • the alignment film is mainly used for pre-alignment of a liquid crystal, which needs to undergo a pre-drying process to volatilize a solvent (for example, N-methylpyrrolidone, NMP) in a solution to facilitate uniform formation of polyimide (PI).
  • a solvent for example, N-methylpyrrolidone, NMP
  • PI film Since the thickness of the PI film is only about 1000 angstroms and needs to be very uniform, if it is not well controlled during the manufacturing process, various defects may occur.
  • the pre-drying method of PI is generally to heat a substrate coated with a solution containing PI to evaporate various solvents in the solution, thereby increasing the solid content of PI.
  • Both of the above problems reduce the optical quality of the resulting alignment film.
  • the technical problem mainly solved by the present invention is that the pre-drying process of the alignment film manufacturing process is prone to the problem that the halo region and the support point and the surrounding point are unevenly heated due to uneven heating at the edge of the solution.
  • an embodiment of the present invention discloses an alignment film manufacturing apparatus including a heat generating plate, a coating substrate, and a support frame, and the coating substrate is disposed above the heat generating plate.
  • the support frame is a movable bracket, and includes a support portion and a driving unit. The support portion supports the coated substrate, and the driving unit drives the support portion to move to a preset position.
  • the support portion is a poor conductor of heat.
  • the support portion is made of a polytetrafluoroethylene material.
  • the support portion includes a metal reflective layer opposite to the bottom surface of the heat generating plate, and the metal reflective layer is located between the coated substrate and the heat generating plate.
  • a plurality of alignment film solution coating regions are disposed on a surface of the coating substrate away from the support portion, and an abutting position of the support portion and the coating substrate corresponds to The position of the non-alignment film solution coating region around the coating solution coating region is described.
  • the alignment film manufacturing apparatus includes a plurality of support frames, and the plurality of drive units of the plurality of support frames are independent of each other.
  • an embodiment of the present invention further discloses an alignment film manufacturing apparatus, including a heat generating plate, a coating substrate, and a support frame, wherein the first surface of the coating substrate includes an alignment film solution coating region, The heating plate provides thermal radiation to the coated substrate.
  • the support frame supports a second surface of the coated substrate relative to the first surface, and the support frame is correspondingly moved according to a position of the coating solution of the alignment film solution, and correspondingly moving the second surface thereof a support position corresponding to a position of the non-alignment film solution coating region around the alignment film solution coating region.
  • the support frame includes a support portion that supports the coated substrate, and the support portion is made of a polytetrafluoroethylene material.
  • the support portion includes a metal reflective layer opposite to the bottom surface of the heat generating plate, and the metal reflective layer is located between the coated substrate and the heat generating plate.
  • the alignment film manufacturing apparatus includes a plurality of support frames, each of the plurality of support frames respectively includes a plurality of independent drive units, and the plurality of drive units respectively drive the plurality of The support frame moves to a preset position.
  • an embodiment of the present invention further discloses an alignment film manufacturing apparatus, including a heat generating plate, a coating substrate, and a support frame.
  • the coating substrate is disposed above the heat generating plate, and the support frame is a moving bracket comprising a support portion supporting the coated substrate, the driving unit driving the support portion to move to a preset position, the support portion being a poor conductor of heat, the support
  • the bottom surface of the heating plate includes a metal reflective layer, the metal reflective layer is located between the coating substrate and the heat generating plate, and the coating substrate is provided with a plurality of alignment films away from the surface of the supporting portion.
  • the alignment film manufacturing device including a plurality of A support frame, the plurality of drive units of the plurality of support frames being independent of each other.
  • the support portion is made of a polytetrafluoroethylene material.
  • the alignment film manufacturing apparatus includes a plurality of support frames, each of the plurality of support frames respectively includes a plurality of independent drive units, and the plurality of drive units respectively drive the plurality of The support frame moves to a preset position.
  • the alignment film manufacturing apparatus of the embodiment of the invention has the advantages of adapting to the manufacture of a plurality of alignment films, and the resulting alignment film has no halo defects and spot defects.
  • FIG. 1 is a side view showing the structure of an alignment film manufacturing apparatus according to a preferred embodiment of the present invention
  • Figure 2 is a front view showing the structure of the alignment film manufacturing apparatus shown in Figure 1;
  • Fig. 3 is a schematic plan view showing the structure of the alignment film manufacturing apparatus shown in Fig. 1.
  • FIG. 1 is a side structural view of an alignment film manufacturing apparatus according to a preferred embodiment of the present invention
  • FIG. 2 is an alignment film manufacturing apparatus shown in FIG.
  • FIG. 3 is a schematic top plan view of the alignment film manufacturing apparatus shown in FIG. 1 .
  • the alignment film manufacturing apparatus 1 includes a heat generating plate 2, a coating substrate 4, and a support frame 6.
  • the heat generating plate 2 is a common heating element whose main function is to dissipate heat and supply the heat to the coated substrate 4 in the form of heat radiation to the upper surface 40 of the coated substrate 4.
  • the supported PI-containing solution is heated.
  • the coated substrate 4 is disposed above the heat generating plate 2, the upper surface 40 of the coated substrate 4 includes a plurality of alignment film solution coating regions 400, and the plurality of alignment film solution coating regions The 400s are spaced apart from each other.
  • the coated substrate 4 receives the heat radiation of the heat generating plate 2 and conducts the heat radiation to the solution coated on the upper surface 40 thereof, so that the solvent in the solution is dissipated by heat, and the process is an alignment film. Pre-drying process in the manufacturing process.
  • the coated substrate 4 may be a flat glass substrate.
  • the support frame 6 is a movable bracket, and includes a support portion 60 and a driving unit 62.
  • the support portion 60 supports the coated substrate 4, and the driving unit 62 drives the support portion 60 to move to a preset position.
  • the support portion 60 is made of a material having good wear resistance and poor thermal conductivity. That is, the support portion 60 is a poor conductor of heat.
  • the support portion 60 may be made of polytetrafluoroethylene, which has the characteristics of being resistant to acids and alkalis, resistant to various organic solvents, and almost insoluble in all solvents, and at the same time, the polytetrafluoroethylene is also resistant. High temperature and very low friction coefficient.
  • the support portion 60 abuts against the lower surface 42 of the coated substrate 4 opposite to the upper surface 40.
  • the abutting position of the supporting portion 60 and the coating substrate 4 corresponds to a position of the non-alignment film solution coating region around the alignment film solution coating region 400. That is, the support portion 60 abuts at the position of the lower surface 42 of the coated substrate 4, corresponding to the spacing between the plurality of alignment film solution coating regions 400 of the upper surface 40.
  • the heat of the support portion 60 abutting on the coated substrate 4 is little or does not affect the solution located in the alignment film solution coating region 400.
  • the size and position of the alignment film solution coating region 400 may be adaptively adjusted. According to such adjustment, the support frame 6 is coated according to the alignment film solution. The position of the 400 changes, the driving unit 62 drives the support portion 60 correspondingly, and adjusts the position of the support portion 60 such that the support portion 60 abuts on the lower surface 42 of the coated substrate 4. .
  • the driving unit 62 drives the support portion 60 correspondingly, and adjusts the position of the support portion 60 such that the support portion 60 abuts on the lower surface 42 of the coated substrate 4.
  • the driving unit 62 moves the support position of the support portion 60 and the lower surface 42 to correspond to the alignment film solution coating region 400.
  • the driving unit 62 may be a small driving motor.
  • the support portion 60 includes a metal reflective layer 64 opposite to the bottom surface (not labeled) of the heat generating plate 2, and the metal reflective layer 64 is located between the coated substrate 4 and the heat generating plate 2, The metal reflective layer 64 can reflect a portion of the heat from the heat generating plate 2 back to the heat generating plate 2.
  • the heat radiating portion emitted from the heat generating plate 2 reaches the support frame 6, and partially reaches the lower surface 42 of the coated substrate 4.
  • a portion of the heat radiation reaching the support frame 6 is absorbed by the support frame 6, a portion is reflected by the metal reflective layer 64 back to the heat generating plate 2, and a portion passes through the metal reflective layer 64 and is conducted to the The lower surface 42 of the coated substrate 4 is described.
  • the coated substrate 4 heats the solution located in the alignment film solution coating region 400 with the heat to evaporate the solvent therein.
  • the original heat is still maintained in the solution-free portion, resulting in a temperature difference at the edge of the solution, causing the solution to flow toward the edge, so the pre-dried PI
  • the edge thickness of the layer is greater than its in-plane thickness to form a halo defect.
  • the thermal conductivity of the support portion 60 is poor, so that the support portion 60 transmits heat to the coated substrate 4 at a slower rate, thus reducing the temperature difference caused by the support position;
  • the metal reflective layer 64 of the support portion 60 can reflect a portion of the heat back to the heat generating plate 2, thus further reducing the temperature difference effect at the support position. Both of the above effects can effectively reduce the heat transfer of the support portion 60 to the coated substrate 4 at the support position, thereby reducing or even eliminating the temperature difference at the edge of the solution.
  • the plurality of driving units 62 of the support frame 6 are independent of each other, the plurality of supporting portions 60 can be respectively moved to a preset position. Therefore, when manufacturing different alignment films, the support positions of the support portions 60 can be adjusted to the spacing regions between the corresponding alignment film solution coating regions 400, avoiding the support points of the corresponding alignment film solution coating regions 400. A stain caused by uneven heating with surrounding points.
  • the alignment film manufacturing apparatus of the embodiment of the invention has the advantages of adapting to the manufacture of a plurality of alignment films, and the resulting alignment film has no halo defects and spot defects.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
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Abstract

一种配向膜制造装置（1）包括发热板（2）、涂敷基板（4）和支撑架（6）。所述涂敷基板（4）设置在所述发热板（2）上方，并且所述支撑架（6）为可移动支架。所述支撑架（6）包括支撑部（60）和驱动单元（62）并支撑所述涂敷基板（4）。所述驱动单元（62）带动所述支撑部（60）移动至预设位置。所述配向膜制造装置（1）具有适应多种配向膜的制造、所制得配向膜没有光晕缺陷和斑迹缺陷等优点。

Description

配向膜制造装置
【技术领域】
本发明实施例涉及液晶显示技术领域，尤其涉及一种例如制造用于液晶显示装置的配向膜的配向膜制造装置。
【背景技术】
液晶显示模组因具有低辐射性、体积轻薄短小及耗电低等特点，已广泛应用于手机、个人数字助理、笔记本电脑、个人电脑及电视等领域。
液晶显示模组通常包括薄膜晶体管（TFT）基板、彩色滤光片（CF）基板和液晶层。所述薄膜晶体管基板和所述彩色滤光片基板相对设置，所述液晶层位于所述薄膜晶体管基板和所述彩色滤光片基板之间。其中，所述薄膜晶体管基板和所述彩色滤光片基板通常分别包括相邻所述液晶层的配向膜。
所述配向膜主要用于液晶的预取向，其需要经过预干燥过程，以将溶液中的溶剂（例如N-甲基吡咯烷酮，NMP）挥发出来，便于聚酰亚胺（PI）形成具有均匀厚度的PI薄膜。由于PI薄膜的厚度只有约1000埃，且需要十分均匀，因此在制造过程中若控制不好，将可能产生各种缺陷。
目前，PI的预干燥方式一般是加热涂覆有含PI的溶液的基板，使溶液中的各种溶剂蒸发，从而提高PI的固含量。预干燥过程通常存在两个主要问题：一是由于溶液受热后流动性加强，溶液涂覆面内与边缘外的溶液受热不均导致光晕区域（Halo Area）的产生；二是由于位于涂覆面内的支撑物的支撑点位与周边点位受热不均所造成的斑迹（Mura）。上述两个问题都会降低所制得的配向膜的光学品质。
【发明内容】
本发明主要解决的技术问题是配向膜制造工艺的预干燥过程容易因溶液边缘处受热不均产生光晕区域和支撑点位与周边点位受热不均所造成斑迹的问题。
为了解决上述技术问题，本发明实施例公开了一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板设置在所述发热板上方。所述支撑架为可移动支架，其包括支撑部和驱动单元，所述支撑部支撑所述涂覆基板，所述驱动单元带动所述支撑部移动至预设位置。
在本发明一个较佳实施例中，所述支撑部为热的不良导体。
在本发明一个较佳实施例中，所述支撑部由聚四氟乙烯材料制成。
在本发明一个较佳实施例中，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间。
在本发明一个较佳实施例中，所述涂覆基板远离所述支撑部的表面设置有多个配向膜溶液涂覆区域，所述支撑部与所述涂覆基板的抵接位置对应于所述配向膜溶液涂覆区域周边非配向膜溶液涂覆区域的位置。
在本发明一个较佳实施例中，所述配向膜制造装置包括多个支撑架，所述多个支撑架的多个驱动单元之间相互独立。
为了解决上述技术问题，本发明实施例还公开了一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板的第一表面包括配向膜溶液涂覆区域，所述发热板提供热辐射给所述涂覆基板。所述支撑架支撑所述涂覆基板的相对于所述第一表面的第二表面，所述支撑架根据所述配向膜溶液涂覆区域的位置变化，对应移动其与所述第二表面的支撑位置，所述支撑位置对应于所述配向膜溶液涂覆区域周边非配向膜溶液涂覆区域的位置。
在本发明一个较佳实施例中，所述支撑架包括支撑所述涂覆基板的支撑部，所述支撑部由聚四氟乙烯材料制成。
在本发明一个较佳实施例中，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间。
在本发明一个较佳实施例中，所述配向膜制造装置包括多个支撑架，所述多个支撑架分别包括多个相互独立的驱动单元，所述多个驱动单元分别带动所述多个支撑架移动至预设位置。
为了解决上述技术问题，本发明实施例又公开了一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板设置在所述发热板上方，所述支撑架为可移动支架，其包括支撑部和驱动单元，所述支撑部支撑所述涂覆基板，所述驱动单元带动所述支撑部移动至预设位置，所述支撑部为热的不良导体，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间，所述涂覆基板远离所述支撑部的表面设置有多个配向膜溶液涂覆区域，所述支撑部与所述涂覆基板的抵接位置对应于所述配向膜溶液涂覆区域周边的非配向膜溶液涂覆区域的位置，所述配向膜制造装置包括多个支撑架，所述多个支撑架的多个驱动单元之间相互独立。
在本发明一个较佳实施例中，所述支撑部由聚四氟乙烯材料制成。
在本发明一个较佳实施例中，所述配向膜制造装置包括多个支撑架，所述多个支撑架分别包括多个相互独立的驱动单元，所述多个驱动单元分别带动所述多个支撑架移动至预设位置。
本发明实施例的配向膜制造装置具有适应多种配向膜的制造、所制得的配向膜没有光晕缺陷和斑迹缺陷等优点。
【附图说明】
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图，其中：
图1是本发明优选实施例配向膜制造装置的侧面结构示意图；
图2是图1所示配向膜制造装置的正面结构示意图；
图3是图1所示配向膜制造装置的俯视结构示意图。
【具体实施方式】
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。
本发明实施例公开了一种配向膜制造装置，请参阅图1至图3，其中，图1是本发明优选实施例配向膜制造装置的侧面结构示意图，图2是图1所示配向膜制造装置的正面结构示意图，图3是图1所示配向膜制造装置的俯视结构示意图。
所述配向膜制造装置1包括发热板2、涂覆基板4和支撑架6。
所述发热板2为常见的加热元件，其主要作用是散发热量，并将所述热量以热辐射的形式提供给所述涂覆基板4，以对所述涂覆基板4的上表面40所承载的含PI的溶液进行加热。
所述涂覆基板4设置在所述发热板2的上方，所述涂覆基板4的所述上表面40包括多个配向膜溶液涂覆区域400，且所述多个配向膜溶液涂覆区域400之间具有间距而相互间隔。所述涂覆基板4接收所述发热板2的热辐射，并将所述热辐射传导给涂覆在其上表面40的溶液，使得所述溶液中的溶剂受热散发，此过程即为配向膜制造工艺中的预干燥过程。在本发明实施例中，所述涂覆基板4可以为平整的玻璃基板。
所述支撑架6为可移动支架，包括支撑部60和驱动单元62。所述支撑部60支撑所述涂覆基板4，所述驱动单元62带动所述支撑部60移动至预设位置。
具体来说，所述支撑部60由耐磨性好、导热性差的材料制得。也就是说，所述支撑部60为热的不良导体。例如，所述支撑部60可以由聚四氟乙烯制成，聚四氟乙烯具有抗酸抗碱、抗各种有机溶剂的特点，几乎不溶于所有的溶剂，同时，聚四氟乙烯还具有耐高温和摩擦系数极低的特点。
在本发明实施例中，所述支撑部60抵接支撑所述涂覆基板4的相对所述上表面40的下表面42。其中，所述支撑部60与所述涂覆基板4的抵接位置对应于所述配向膜溶液涂覆区域400周边非配向膜溶液涂覆区域的位置。即，所述支撑部60抵接在所述涂覆基板4的下表面42的位置，对应于所述上表面40的所述多个配向膜溶液涂覆区域400之间的间距。从另一方面来看，所述支撑部60与所述涂覆基板4抵接处的热量极少或者不会影响到位于所述配向膜溶液涂覆区域400的溶液。
为了在不同位置和制作不同尺寸的配向膜，所述配向膜溶液涂覆区域400的大小和位置可能做适应性调整，因应这样的调整，所述支撑架6根据所述配向膜溶液涂覆区域400的位置变化，所述驱动单元62对应驱动所述支撑部60，调整所述支撑部60的位置，使得所述支撑部60抵接在所述涂覆基板4的所述下表面42的位置。对应于本发明实施例中有多个支撑架6，每一个支撑架6均包括单独的驱动单元62。即，所述支撑架6的多个驱动单元62之间相互独立，所述多个驱动单元62可以分别带动所述多个支撑架6移动至预设位置。例如，当所述配向膜溶液涂覆区域400的位置发生变化之后，所述驱动单元62移动所述支撑部60与所述下表面42的支撑位置至对应于所述配向膜溶液涂覆区域400位置调整后的周边非配向膜溶液涂覆区域的位置。在本发明实施例中，所述驱动单元62可以为小型驱动电机。
进一步的，所述支撑部60相对所述发热板2的底面（未标示）包括金属反射层64，所述金属反射层64位于所述涂覆基板4和所述发热板2之间，所述金属反射层64可以将部分来自所述发热板2的热量反射回所述发热板2。
在本发明实施例的配向膜制造装置1中，所述发热板2所发出的热辐射部分到达所述支撑架6，部分直接到达所述涂覆基板4的所述下表面42。到达所述支撑架6的热辐射一部分被所述支撑架6所吸收，一部分被所述金属反射层64反射回所述发热板2，还有一部分穿过所述金属反射层64并传导至所述涂覆基板4的下表面42。
所述涂覆基板4利用所述热量对位于所述配向膜溶液涂覆区域400的溶液进行加热，以使其中的溶剂蒸发。在现有技术中，由于有溶液处会因为溶剂的蒸发而带走部分热量，无溶液处仍然维持原来的热量，导致了溶液边缘的温差，使得溶液向边缘处流动，因此预干燥后的PI层的边缘厚度大于其面内厚度，从而形成光晕缺陷。
而在本发明实施例中，上述这种情况可以减小甚至消除，主要是因为以下两个方面：
一方面，所述支撑部60的导热性较差，因此所述支撑部60将热量传递给所述涂覆基板4的速率较慢，如此降低支撑位置处带来的温差影响；
另一方面，所述支撑部60的所述金属反射层64可以将部分热量反射回所述发热板2，如此进一步降低支撑位置处带来的温差影响。上述两种效应都可以有效减少所述支撑部60对于支撑位置处涂覆基板4的热量传递，从而减小甚至消除所述溶液边缘处的温差。
还有，由于所述支撑架6的多个驱动单元62之间相互独立，并可以分别带动所述多个支撑部60移动至预设位置。因此，在制造不同的配向膜时，所述支撑部60的支撑位置都可以调整至对应配向膜溶液涂覆区域400之间的间距区域，避免了对应配向膜溶液涂覆区域400的支撑点位与周边点位受热不均所造成的斑迹。
综上所述，本发明实施例的配向膜制造装置具有适应多种配向膜的制造、所制得的配向膜没有光晕缺陷和斑迹缺陷等优点。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其它相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (13)

  1. 一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板设置在所述发热板上方，其中，所述支撑架为可移动支架，其包括支撑部和驱动单元，所述支撑部支撑所述涂覆基板，所述驱动单元带动所述支撑部移动至预设位置。
  2. 根据权利要求1所述的配向膜制造装置，其中，所述支撑部为热的不良导体。
  3. 根据权利要求2所述的配向膜制造装置，其中，所述支撑部由聚四氟乙烯材料制成。
  4. 根据权利要求2所述的配向膜制造装置，其中，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间。
  5. 根据权利要求1所述的配向膜制造装置，其中，所述涂覆基板远离所述支撑部的表面设置有多个配向膜溶液涂覆区域，所述支撑部与所述涂覆基板的抵接位置对应于所述配向膜溶液涂覆区域周边的非配向膜溶液涂覆区域的位置。
  6. 根据权利要求1所述的配向膜制造装置，其中，所述配向膜制造装置包括多个支撑架，所述多个支撑架的多个驱动单元之间相互独立。
  7. 一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板的第一表面包括配向膜溶液涂覆区域，所述发热板提供热辐射给所述涂覆基板，其中，所述支撑架支撑所述涂覆基板的相对于所述第一表面的第二表面，所述支撑架根据所述配向膜溶液涂覆区域的位置变化，对应移动其与所述第二表面的支撑位置，所述支撑位置对应于所述配向膜溶液涂覆区域的周边非配向膜溶液涂覆区域的位置。
  8. 根据权利要求7所述的配向膜制造装置，其中，所述支撑架包括支撑所述涂覆基板的支撑部，所述支撑部由聚四氟乙烯材料制成。
  9. 根据权利要求8所述的配向膜制造装置，其中，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间。
  10. 根据权利要求7所述的配向膜制造装置，其中，所述配向膜制造装置包括多个支撑架，所述多个支撑架分别包括多个相互独立的驱动单元，所述多个驱动单元分别带动所述多个支撑架移动至预设位置。
  11. 一种配向膜制造装置，包括发热板、涂覆基板和支撑架，所述涂覆基板设置在所述发热板上方，其中，所述支撑架为可移动支架，其包括支撑部和驱动单元，所述支撑部支撑所述涂覆基板，所述驱动单元带动所述支撑部移动至预设位置，所述支撑部为热的不良导体，所述支撑部相对所述发热板的底面包括金属反射层，所述金属反射层位于所述涂覆基板和所述发热板之间，所述涂覆基板远离所述支撑部的表面设置有多个配向膜溶液涂覆区域，所述支撑部与所述涂覆基板的抵接位置对应于所述配向膜溶液涂覆区域周边的非配向膜溶液涂覆区域的位置，所述配向膜制造装置包括多个支撑架，所述多个支撑架的多个驱动单元之间相互独立。
  12. 根据权利要求11所述的配向膜制造装置，其中，所述支撑部由聚四氟乙烯材料制成。
  13. 根据权利要求11所述的配向膜制造装置，其中，所述配向膜制造装置包括多个支撑架，所述多个支撑架分别包括多个相互独立的驱动单元，所述多个驱动单元分别带动所述多个支撑架移动至预设位置。
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