WO2013165092A1 - 절삭공구용 경질피막 - Google Patents
절삭공구용 경질피막 Download PDFInfo
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- WO2013165092A1 WO2013165092A1 PCT/KR2013/002188 KR2013002188W WO2013165092A1 WO 2013165092 A1 WO2013165092 A1 WO 2013165092A1 KR 2013002188 W KR2013002188 W KR 2013002188W WO 2013165092 A1 WO2013165092 A1 WO 2013165092A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Definitions
- the present invention relates to a hard film formed on a hard base material such as cemented carbide, cermet, high speed steel, end mills, drills, cBN, etc. used in cutting tools, wherein thin layer A, thin layer B, and thin layer C are laminated in order of thin layer ABAC.
- the present invention relates to a hard coating film for cutting tools, which is composed of a nano multilayer structure or a repeat lamination structure thereof, and which has improved wear resistance, lubricity, toughness, and chipping resistance as compared with a conventional multilayer thin film structure.
- wear resistance, oxidation resistance, or impact resistance such as TiN, Al 2 O 3 , TiAlN, AlTiN, AlCrN, etc.
- a base material such as cemented carbide, cermet, end mill, and drills
- the workpieces are gradually hardened, and the demand for machining of hard-working materials with low thermal conductivity and severe welding is also increasing.
- stainless steel, heat-resistant alloy steel, and nodular graphite cast iron have lower thermal conductivity than general steel.
- cutting heat is not discharged by the chip and heat is concentrated on the cutting edge of the cutting tool, wear, welding and dropping of the cutting tool edge easily occur due to chemical reaction between the cutting tool and the workpiece. This is drastically reduced.
- Korean Patent No. 876366 discloses an underlayer for physical adhesion and the orientation of (200) planes on a cemented carbide tool insert, end mill, drill or cermet tool by physical vapor deposition (PVD).
- PVD physical vapor deposition
- the A, B, C and D layer consisting of TiAlN or AlTiSiN but different composition
- a thin film structure is disclosed in which the uppermost layer having a structure composed of layers and alternately stacked thereon is improved in wear resistance and oxidation resistance of the uppermost layer.
- Wear resistance and oxidation resistance can be improved through the multilayer structure as described above, but in order to evenly improve various characteristics required for cutting operations such as wear resistance, impact resistance (toughness) and chipping resistance, development of a hard film having a new structure is required. do.
- the present invention is to provide a hard coating for a cutting tool is improved overall wear resistance, lubricity, toughness (impact resistance), chipping resistance and the like.
- the hard film for cutting tools is a hard film formed on the surface of the base material, the hard film is thin layer A, thin layer B and thin layer C from the base material in order of thin layer ABAC
- the nano multilayer structure is made of a laminated structure or a structure in which the nano multilayer structure is repeatedly stacked two or more times, the thin layer A is made of Ti 1-x Al x N (0.3 ⁇ x ⁇ 0.7), the thin layer B is Al 1-y Cr y N (0.3 ⁇ y ⁇ 0.7) and the thin layer C is made of MeN (Me is any one of Nb, V, Cr).
- the said thin layer A, thin layer B, and thin layer C are equipped with an average thickness of 3-50 nm, respectively.
- the thin layer A, thin layer B, and thin layer C are most preferably provided with an average thickness of 20 to 40 nm, respectively.
- the hard film for cutting tools is provided with an average thickness of 1-20 micrometers.
- the hard film for cutting tools has a deterioration hardness of 35 GPa or more which is deteriorated at 900 ° C. for 30 minutes.
- a composite nitride layer of Ti and Al having excellent abrasion resistance
- a composite nitride layer of Al and Cr having excellent lubricity and excellent toughness and chipping resistance
- Abrasion resistance, lubricity, toughness and chipping resistance through alternating repeated lamination of nano multilayer structure formed by laminating nitride layer of any one of Nb, V and Cr (thin layer C) which is improved in high temperature environment in the order of thin layer ABAC. Since various characteristics required for the hard film for cutting tools such as can be improved evenly, it can be suitably used for the processing of difficult materials.
- the hard film for cutting tool of the present invention is laminated to repeat the thin layer to enhance the wear resistance, lubricity, toughness and chipping resistance periodically to maximize the function of each thin layer, accordingly required Abrasion resistance, lubricity, toughness and chipping resistance can be improved in a balanced manner.
- FIG. 1 is a cross-sectional view schematically showing the structure of the hard film for cutting tools according to the present invention.
- FIG. 1 is a cross-sectional view schematically showing the structure of a hard film for cutting tools according to an embodiment of the present invention.
- the hard film for cutting tools according to a preferred embodiment of the present invention the thin layer A, thin layer B, thin layer C is laminated on the base material in the order of the thin layer ABAC two or more times the nano multilayer structure again It has a laminated structure repeatedly.
- the thin layer A is a thin layer whose main purpose is improved wear resistance and hardness, and its composition is made of Ti 1-x Al x N (0.3 ⁇ x ⁇ 0.7).
- the content of Al is preferably 0.3 or more and 0.7 or less.
- the thin layer B is a thin layer whose main purpose is to improve lubricity, and is composed of Al 1-y Cr y N (0.3 ⁇ y ⁇ 0.7).
- the Cr content is less than 0.3, the insulation is increased, which makes it difficult to deposit DC due to the characteristics of the equipment.
- the Cr content is preferably 0.3 to 0.7. .
- the thin layer C is a thin layer mainly designed to improve toughness and chipping resistance, and is basically made of NbN, VN, or CrN having excellent fracture toughness and chipping resistance.
- the thin layer C has a phase change to Nb 2 O 5 , V 2 O 5 or Cr 2 O 3 in a high temperature working environment, thereby improving lubrication characteristics.
- the improvement in properties prevents the coating from falling off together with the workpiece, thereby further improving chipping resistance and toughness.
- the thin layer C made of NbN, VN, or CrN forms a nano-level multilayer with thin films of different compositions, and the hard coating film for cutting tools according to the present invention is uniform in terms of toughness, chipping resistance, lubricity, and abrasion resistance. It has a high characteristic.
- the thin layer A, thin layer B and thin layer C is preferably the average thickness of each 3 ⁇ 50nm.
- the thin film is strengthened as the generation and movement of dislocations is suppressed.
- the thickness of the thin layer is too thin, less than 3 nm, the boundary between nanolayers that suppress the generation and movement of dislocations is unclear.
- the mixing zone is formed by mutual diffusion between two layers, the hardness and modulus of elasticity are lowered, so it is better to form it to be less than 3 nm, and when it exceeds 50 nm, the generation and movement of dislocations becomes easy, This is because not only the elastic modulus is lowered but also the matching strain energy is reduced by the formation of misfit dislocations, which is not preferable because of the phenomenon of decreasing the strengthening effect.
- the average thickness is 20 ⁇ 40nm through the experiment of only the thickness of the thin layer A, thin layer B, thin layer C, the excellent interfacial strengthening effect that the interface between each thin layer suppresses dislocation movement due to plastic deformation It can be seen that can be obtained was confirmed to be the most preferred.
- the thin layer A, thin layer B and thin layer C was implemented to form a nano multilayer structure of the thin layer ABAC, so when the thin layer A, thin layer B and thin layer C forms a nano multilayer structure of the thin layer ABAC, Compared with the nano multilayer structure laminated in other forms, such as thin layer ABC, the period of different elastic modulus difference and lattice constant difference is shortened, and thus the effect of improving wear resistance can be maximized.
- the hard film for cutting tools according to the present invention having the above-described nano multilayer structure or a structure in which the nano multilayer structure is repeatedly laminated two or more times preferably has an average thickness of 1 to 20 ⁇ m.
- the present invention forms a nano-layered structure by laminating TiAlN, AlCrN, TiAlN-based thin layer and any one of NbN, VN, CrN in order to form a nano-layered structure, wear resistance, lubricity, toughness, and resistance to the entire hard film It is characterized by the even improvement of chipping property.
- the present invention is based on the WC-10wt% Co base material using the arc ion plating method of physical vapor deposition (PVD) on a hard base material surface including cemented carbide, cermet, high speed steel, end mill, drills, etc.
- PVD physical vapor deposition
- a hard thin film was formed on the coating, and at the time of coating, a TiAl target for thin layer A, an AlCr target for thin layer B, and an Nb, V, or Cr target for thin layer C were used.
- Initial vacuum pressure was reduced to 8.5 ⁇ 10 -5 Torr or less, and N 2 was injected into the reaction gas.
- Gas pressure for the coating is 30mTorr or less, preferably 20mTorr or less, the coating temperature is 400 ⁇ 550 °C, the substrate bias voltage was applied at -20 ⁇ -150V during coating.
- the coating conditions may be different from the present embodiment depending on the equipment characteristics and conditions.
- a nano-layered structure was formed by stacking in order of thin film ABAC with an average thickness of 20 nm, and the nano-layered structure was repeatedly formed to complete a hard film for cutting tool according to an embodiment of the present invention having a total thickness of 3.4 to 3.6 ⁇ m.
- the hard film for the cutting tool according to the embodiment of the present invention uses physical vapor deposition (PVD), the thickness of the thin film may be formed up to about 20 ⁇ m.
- PVD physical vapor deposition
- Table 1 shows the composition, the target composition ratio, the average thickness of the thin layer, the total film thickness, and the lamination structure for the hard film for the cutting tool formed according to the embodiment of the present invention.
- Comparative Examples 1 to 4 alternately stack TiAlN or AlTiN and AlCrN films with an average thickness of 18 to 20 nm as an A / B lamination structure to form a hard film having a total thickness of 3.4 to 3.6 ⁇ m.
- Comparative Examples 5 to 7 were formed by alternately laminating a TiAlN film and an NbN, VN or CrN film with an average thickness of 19 to 20 nm as an A / B lamination structure to form a hard film having a total thickness of 3.6 ⁇ m.
- Hard coating is to check the difference in cutting performance according to the nano-layered composition (except for some thin films) and the laminated structure (structure of two laminated thin films alternately) with the hard film for cutting tools according to an embodiment of the present invention will be.
- the TiAlN film, the AlTiN film, the AlCrN film, and the NbN, VN, and CrN films were alternately laminated with an average thickness of 19-20 nm in an A / B / C lamination structure.
- these hard films have a difference in cutting performance according to a difference in the laminated structure (the structure in which three thin films are alternately stacked) with the hard film for cutting tools according to the embodiment of the present invention. It is to confirm.
- the actual composition of the formed hard film for the cutting tool is slightly different from the target composition, but shows a nearly similar composition.
- This microhardness test was carried out under the conditions of a load of 30 mN, an unload of 30 mN, a load time of 10 sec, an unload time of 10 sec, and a creep time of 5 sec.
- Comparative Examples 1 to 7 were found to be higher than the 0.31 to 0.46 level of Examples 1 to 12 of most of the friction coefficient is 0.4 ⁇ 0.71 except for 0.37 of Comparative Example 3, the crack length also Comparative Examples 1 to 7 are 42 to 49 ⁇ m, whereas Examples 1 to 12 of the present invention are 40 to 45 ⁇ m, all of which are short within 45 ⁇ m, and thus the tough film of the hard coating film for cutting tools according to the embodiment of the present invention is excellent. Confirmed.
- the room temperature hardness is 31.1 ⁇ 36.4GPa level Comparative Example 1 Although higher than ⁇ 7, it is still inferior to the 36.2 to 38.4 GPa level of Examples 1 to 12 of the present invention.
- the deterioration hardness is 31.5 to 34.2 GPa level, and the level of 35.2 to 37 GPa of Examples 1 to 12 of the present invention is increased. Compared with Comparative Examples 1 to 7, the hardness was significantly decreased in the high temperature deterioration environment.
- Comparative Examples 8 to 13 were also 0.41 to 0.52, which were higher than those of 0.31 to 0.46 of Examples 1 to 12 of the present invention, and crack lengths of Comparative Examples 8 to 13 were 44 to 51 ⁇ m.
- Examples 1 to 12 of the present invention was 40 to 45 ⁇ m, all shorter within 45 ⁇ m, and it was confirmed that the toughness of the hard film for cutting tools according to the embodiment of the present invention was much better.
- the hard film of Examples 1 to 12 of the present invention is more uniform in hardness, lubricity (friction coefficient) and toughness (crack resistance) than the hard film of Comparative Examples 1 to 13. It can be seen that the improvement.
- Examples 1 to 12 of the present invention has a cutting life of 17 to 21.5m, all 17m or more and the cause of end of life are all normal wear, according to an embodiment of the present invention
- the hard coatings of Comparative Examples 1 to 7 having alternating lamination structures of A / B except for some thin films in the nano multilayered composition all have no end of life through normal wear and are damaged or excessive.
- the end of life due to wear, cutting life is less than 10m, only 5 ⁇ 9.2m it can be seen that the wear resistance is significantly reduced.
- the end of life due to normal wear, cutting life is less than 16m to 11 to 15.3m level
- Examples 1 to 12 of the present invention It was found to lag significantly behind the 17 ⁇ 21.5m level.
- the hard coating film for cutting tools of Examples 1 to 12 of the present invention has the alternating lamination structure of A / B except for some of the thin films, or the comparative examples 1 to 13 having the alternating lamination structure of A / B / C. Compared with the hard coating, it is confirmed that it has excellent wear resistance characteristics.
- Examples 1 to 12 of the present invention has a cutting life of 8.9 ⁇ 10m level
- Comparative Examples 1 to 13 is a cutting life of 6.1 to 8.4m level in all 8.5m It was confirmed that it does not reach the hard film for cutting tools according to an embodiment of the present invention shows that it has excellent impact resistance.
- the drilling process is slower than the milling process, and the cutting process is performed in wet conditions, so the lubrication (welding resistance) and toughness of the cutting tool are very important.
- the workpiece carbon steel (SM45C, carbon steel drilling), sample number: SPMT07T208 / XOMT07T205 (indexable drill insert, 20 ⁇ -5D), cutting speed: 150m / min, cutting feed rate: 0.1mm / rev, cutting depth: 90mm (penetration), the performance evaluation of drilling cutting performance was performed, as a result Are shown in Tables 11 and 12, respectively.
- the life of the cutting tool forming the hard coating of the Examples 1 to 12 of the present invention similar to the wear resistance, toughness (impact resistance) evaluation results described above is much better than the Comparative Examples 1 to 13 High levels.
- all of Comparative Examples 1 to 13 were found to end their life due to welding, chipping or excessive wear, so that the hard coating film for cutting tools of Examples 1 to 12 of the present invention, which was all normally worn in the comprehensive cutting performance evaluation, was very excellent. Performance was demonstrated.
- the Ti and Al composite nitride layer (thin layer A) having excellent abrasion resistance, the composite nitride layer (thin layer B) having Al and Cr having excellent lubricity, the toughness and the chipping resistance, and the lubrication characteristics are improved in a high temperature working environment.
- the nano multilayer structure in which the nitride layer (thin layer C) of any one of Nb, V and Cr is laminated in the order of the thin layer ABAC has various characteristics required for the hard coating for cutting tools such as wear resistance, lubricity, toughness, and chipping resistance. It has been confirmed that it can be improved evenly and can be suitably used for cutting tools for difficult materials.
- the nano multilayer structure of the present invention in which the nitride layer (thin layer A) was formed between the thin layer B and the thin layer C, respectively, had a significant effect on the performance improvement of the hard film.
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Abstract
Description
실시예No. | 경질피막의 구조 | |||
나노 다층구조(타겟조성비) | 박층 평균두께 (nm) | 총 피막두께(㎛) | 적층구조 | |
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 20 | 3.5 | A/B/A/C |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 20 | 3.5 | A/B/A/C |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 20 | 3.5 | A/B/A/C |
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 20 | 3.6 | A/B/A/C |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 20 | 3.6 | A/B/A/C |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 20 | 3.5 | A/B/A/C |
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 20 | 3.5 | A/B/A/C |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 20 | 3.5 | A/B/A/C |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 20 | 3.5 | A/B/A/C |
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 20 | 3.6 | A/B/A/C |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 20 | 3.5 | A/B/A/C |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 20 | 3.5 | A/B/A/C |
비교예No. | 경질피막의 구조 | |||
나노 다층구조(타겟조성비) | 박층 평균두께 (nm) | 총 피막두께(㎛) | 적층구조 | |
1 | TiAlN(5:5)/AlCrN(7:3) | 20 | 3.5 | A/B |
2 | AlTiN(67:33)/AlCrN(7:3) | 19 | 3.5 | A/B |
3 | TiAlN(5:5)/AlCrN(5:5) | 18 | 3.4 | A/B |
4 | AlTiN(67:33)/AlCrN(5:5) | 19 | 3.6 | A/B |
5 | TiAlN(5:5)/NbN | 20 | 3.6 | A/B |
6 | TiAlN(5:5)/VN | 20 | 3.6 | A/B |
7 | TiAlN(5:5)/CrN | 19 | 3.6 | A/B |
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 20 | 3.7 | A/B/C |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 20 | 3.7 | A/B/C |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 19 | 3.6 | A/B/C |
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 20 | 3.7 | A/B/C |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 20 | 3.5 | A/B/C |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 20 | 3.5 | A/B/C |
실시예No. | 나노 다층구조(타겟조성비) | 박막 조성(EDX, at%) | |||||
Al | Ti | Cr | Nb | V | N | ||
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 20.5 | 13.7 | 6.8 | 13.7 | 45.4 | |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 20.3 | 13.6 | 6.8 | 13.6 | 45.8 | |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 20.5 | 13.7 | 20.5 | 45.4 | ||
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 25.2 | 9.0 | 6.9 | 13.7 | 45.2 | |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 25.6 | 9.2 | 7.0 | 13.9 | 44.4 | |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 25.7 | 9.2 | 21.0 | 44.1 | ||
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 23.8 | 14.0 | 4.2 | 14.0 | 44 | |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 23.5 | 13.8 | 4.1 | 13.8 | 44.8 | |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 23.8 | 14.0 | 18.17 | 44.1 | ||
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 28.6 | 9.2 | 4.2 | 14.0 | 44 | |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 28.1 | 9.1 | 4.1 | 13.8 | 45 | |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 28.6 | 9.2 | 18.2 | 44 |
비교예No. | 나노 다층구조(타겟조성비) | 박막 조성(EDX, at%) | |||||
Al | Ti | Cr | Nb | V | N | ||
1 | TiAlN(5:5)/AlCrN(7:3) | 33.6 | 14 | 8.4 | 44 | ||
2 | AlTiN(67:33)/AlCrN(7:3) | 38.5 | 9.6 | 8.7 | 43.2 | ||
3 | TiAlN(5:5)/AlCrN(5:5) | 27.8 | 13.9 | 13.9 | 44.5 | ||
4 | AlTiN(67:33)/AlCrN(5:5) | 31.8 | 9.0 | 13.6 | 45.7 | ||
5 | TiAlN(5:5)/NbN | 13.5 | 13.5 | 27.1 | 45.9 | ||
6 | TiAlN(5:5)/VN | 13.6 | 13.6 | 27.2 | 45.7 | ||
7 | TiAlN(5:5)/CrN | 13.5 | 13.5 | 27.0 | 46.1 | ||
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 21.7 | 9.0 | 5.4 | 18.1 | 45.8 | |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 21.7 | 9.0 | 5.4 | 18.1 | 45.8 | |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 21.8 | 9.1 | 23.7 | 45.4 | ||
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 22.6 | 6.4 | 9.7 | 19.3 | 42 | |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 22.2 | 6.3 | 9.5 | 19 | 43 | |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 22.0 | 6.2 | 28.3 | 43.5 |
실시예No. | 나노 다층구조(타겟조성비) | 상온경도(GPa) | 열화경도(GPa) | 마찰계수(COF) | 크랙길이(㎛) |
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 37 | 36.1 | 0.46 | 43 |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 37.4 | 36.2 | 0.42 | 41 |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 36.2 | 35.8 | 0.39 | 44 |
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 37.9 | 37 | 0.41 | 45 |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 37.3 | 36.9 | 0.4 | 41 |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 36.7 | 35.9 | 0.31 | 42 |
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 36.9 | 36 | 0.41 | 41 |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 37 | 36 | 0.39 | 41 |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 36.4 | 35.2 | 0.32 | 40 |
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 38.1 | 37 | 0.41 | 40 |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 38.4 | 37 | 0.39 | 42 |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 37.2 | 36 | 0.32 | 40 |
비교예No. | 나노 다층구조(타겟조성비) | 상온경도(GPa) | 열화경도(GPa) | 마찰계수(COF) | 크랙길이(㎛) |
1 | TiAlN(5:5)/AlCrN(7:3) | 31 | 27 | 0.5 | 43 |
2 | AlTiN(67:33)/AlCrN(7:3) | 32 | 27.5 | 0.4 | 49 |
3 | TiAlN(5:5)/AlCrN(5:5) | 30 | 27.1 | 0.37 | 44 |
4 | AlTiN(67:33)/AlCrN(5:5) | 31 | 28 | 0.4 | 45 |
5 | TiAlN(5:5)/NbN | 35 | 33 | 0.71 | 44 |
6 | TiAlN(5:5)/VN | 34.7 | 33.1 | 0.52 | 42 |
7 | TiAlN(5:5)/CrN | 28 | 24 | 0.38 | 42 |
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 35.4 | 31.5 | 0.49 | 49 |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 35.8 | 33 | 0.5 | 48 |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 31.1 | 32.1 | 0.41 | 44 |
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 36.4 | 33 | 0.52 | 49 |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 36.1 | 34.2 | 0.5 | 51 |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 34 | 33.8 | 0.45 | 48 |
실시예No. | 나노 다층구조(타겟조성비) | 절삭수명(가공거리, m) | 수명 종료원인 |
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 18 | 정상마모 |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 18.5 | 정상마모 |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 16.4 | 정상마모 |
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 19.5 | 정상마모 |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 20 | 정상마모 |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 17 | 정상마모 |
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 18.5 | 정상마모 |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 18.5 | 정상마모 |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 17 | 정상마모 |
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 21 | 정상마모 |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 21.5 | 정상마모 |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 19 | 정상마모 |
비교예No. | 나노 다층구조(타겟조성비) | 절삭수명(가공거리, m) | 수명 종료원인 |
1 | TiAlN(5:5)/AlCrN(7:3) | 7 | 과대마모 |
2 | AlTiN(67:33)/AlCrN(7:3) | 7.5 | 과대마모 |
3 | TiAlN(5:5)/AlCrN(5:5) | 7 | 과대마모 |
4 | AlTiN(67:33)/AlCrN(5:5) | 7.2 | 과대마모 |
5 | TiAlN(5:5)/NbN | 8.4 | 파손 |
6 | TiAlN(5:5)/VN | 9.2 | 파손 |
7 | TiAlN(5:5)/CrN | 5 | 과대마모 |
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 15.1 | 과대마모 |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 15.3 | 과대마모 |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 11 | 과대마모 |
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 12 | 정상마모 |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 13.5 | 정상마모 |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 11.5 | 과대마모 |
실시예No. | 나노 다층구조(타겟조성비) | 절삭수명(가공거리, m) |
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 8.9 |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 9.5 |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 10 |
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 8.5 |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 8.5 |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 9 |
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 8.5 |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 8.7 |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 10 |
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 8.5 |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 8.5 |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 10 |
비교예No. | 나노 다층구조(타겟조성비) | 절삭수명(가공거리, m) |
1 | TiAlN(5:5)/AlCrN(7:3) | 6.1 |
2 | AlTiN(67:33)/AlCrN(7:3) | 6.5 |
3 | TiAlN(5:5)/AlCrN(5:5) | 6.5 |
4 | AlTiN(67:33)/AlCrN(5:5) | 6.5 |
5 | TiAlN(5:5)/NbN | 7.2 |
6 | TiAlN(5:5)/VN | 7 |
7 | TiAlN(5:5)/CrN | 6.5 |
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 7.7 |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 8 |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 8.1 |
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 8.2 |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 8.4 |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 8 |
실시예No. | 나노 다층구조(타겟조성비) | 절삭수명(hole: 20Ф-90mm) | 수명 종료원인 |
1 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/NbN | 256 | 정상마모 |
2 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/VN | 256 | 정상마모 |
3 | TiAlN(5:5)/AlCrN(5:5)/TiAlN(5:5)/CrN | 256 | 정상마모 |
4 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/NbN | 256 | 정상마모 |
5 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/VN | 256 | 정상마모 |
6 | AlTiN(67:33)/AlCrN(5:5)/AlTiN(67:33)/CrN | 256 | 정상마모 |
7 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/NbN | 256 | 정상마모 |
8 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/VN | 256 | 정상마모 |
9 | TiAlN(5:5)/AlCrN(7:3)/TiAlN(5:5)/CrN | 250 | 정상마모 |
10 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/NbN | 256 | 정상마모 |
11 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/VN | 256 | 정상마모 |
12 | AlTiN(67:33)/AlCrN(7:3)/AlTiN(67:33)/CrN | 256 | 정상마모 |
비교예No. | 나노 다층구조(타겟조성비) | 절삭수명(hole: 20Ф-90mm) | 수명 종료원인 |
1 | TiAlN(5:5)/AlCrN(7:3) | 52 | 과대마모 |
2 | AlTiN(67:33)/AlCrN(7:3) | 52 | 과대마모 |
3 | TiAlN(5:5)/AlCrN(5:5) | 52 | 과대마모 |
4 | AlTiN(67:33)/AlCrN(5:5) | 52 | 과대마모 |
5 | TiAlN(5:5)/NbN | 52 | 용착 |
6 | TiAlN(5:5)/VN | 52 | 용착 |
7 | TiAlN(5:5)/CrN | 26 | 과대마모 |
8 | TiAlN(5:5)/AlCrN(7:3)/NbN | 156 | 치핑 |
9 | TiAlN(5:5)/AlCrN(7:3)/VN | 156 | 용착 |
10 | TiAlN(5:5)/AlCrN(7:3)/CrN | 156 | 과대마모 |
11 | AlTiN(67:33)/AlCrN(5:5)/NbN | 256 | 과대마모 |
12 | AlTiN(67:33)/AlCrN(5:5)/VN | 256 | 과대마모 |
13 | AlTiN(67:33)/AlCrN(5:5)/CrN | 208 | 과대마모 |
Claims (5)
- 모재의 표면에 형성되는 경질피막으로서,상기 경질피막은 박층A, 박층B 및 박층C가 상기 모재로부터 박층A-B-A-C 순으로 적층되어 이루어지는 나노 다층구조 또는 이 나노 다층구조가 2회 이상 반복 적층되는 구조로 이루어지되,상기 박층A는 Ti1-xAlxN(0.3≤x≤0.7)으로 이루어지고,상기 박층B는 Al1-yCryN(0.3≤y≤0.7)으로 이루어지며,상기 박층C는 MeN(Me는 Nb, V, Cr 중 어느 하나)으로 이루어지는 것을 특징으로 하는 절삭공구용 경질피막.
- 제1항에 있어서,상기 박층A, 박층B 및 박층C는,평균두께가 각각 3 ~ 50nm로 구비되는 것을 특징으로 하는 절삭공구용 경질피막.
- 제1항에 있어서,상기 박층A, 박층B 및 박층C는,평균두께가 각각 20 ~ 40nm로 구비되는 것을 특징으로 하는 절삭공구용 경질피막.
- 제1항에 있어서,상기 절삭공구용 경질피막은,평균두께가 1 ~ 20㎛로 구비되는 것을 특징으로 하는 절삭공구용 경질피막.
- 제1항에 있어서,상기 절삭공구용 경질피막은,900℃에서 30분간 열화 처리된 열화경도가 35GPa 이상인 것을 특징으로 하는 절삭공구용 경질피막.
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KR102112084B1 (ko) * | 2018-11-30 | 2020-05-18 | 한국야금 주식회사 | 절삭공구용 경질피막 |
JP7165594B2 (ja) * | 2019-02-07 | 2022-11-04 | 京セラ株式会社 | 被覆工具及びこれを備えた切削工具 |
CN111235526A (zh) * | 2020-03-04 | 2020-06-05 | 赣州澳克泰工具技术有限公司 | 一种包含纳米多层涂层的切削刀具、制造方法及其应用 |
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Also Published As
Publication number | Publication date |
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DE112013002302B4 (de) | 2020-01-23 |
CN104271792A (zh) | 2015-01-07 |
KR20130123239A (ko) | 2013-11-12 |
KR101351843B1 (ko) | 2014-01-16 |
US9394601B2 (en) | 2016-07-19 |
DE112013002302T5 (de) | 2015-02-19 |
US20150125678A1 (en) | 2015-05-07 |
CN104271792B (zh) | 2016-06-01 |
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