WO2013128976A1 - Gap-adjusting film sheet and linear-encoder gap-adjustment method using same - Google Patents

Gap-adjusting film sheet and linear-encoder gap-adjustment method using same Download PDF

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Publication number
WO2013128976A1
WO2013128976A1 PCT/JP2013/051118 JP2013051118W WO2013128976A1 WO 2013128976 A1 WO2013128976 A1 WO 2013128976A1 JP 2013051118 W JP2013051118 W JP 2013051118W WO 2013128976 A1 WO2013128976 A1 WO 2013128976A1
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WIPO (PCT)
Prior art keywords
gap
film sheet
scale
sensor head
low friction
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PCT/JP2013/051118
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French (fr)
Japanese (ja)
Inventor
立石　一真
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三菱重工業株式会社
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Publication of WO2013128976A1 publication Critical patent/WO2013128976A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/30—Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G01D5/34753—Carriages; Driving or coupling means

Definitions

  • a linear scale (also referred to as a linear encoder) is used to detect the position of a movable part (linear axis) in equipment such as machine tools and industrial machines.
  • Linear scales include electromagnetic induction, optical, and magnetic types.
  • a scale having a position information pattern used for detecting the position of the movable part (linear axis) and a sensor head for detecting the position are separated and separately installed. Therefore, when any of these linear scales is installed in the device, it is necessary to appropriately adjust the gap between the sensor head and the scale of the linear scale (the distance between the sensor head and the scale).
  • Second gap adjustment method (method for measuring dimensions and machining) The physical dimension from the sensor head 2 to the scale 3, that is, the dimension of the gap G is measured, and the bracket 4 for mounting the sensor head 2 is machined to adjust the gap G to a target value.
  • Patent Document 1 As a prior art document describing the clearance adjustment of the linear scale, there is the following Patent Document 1.
  • the bracket 4 needs to be provided with an adjustment mechanism, so that the parts cost of the bracket 4 increases.
  • the film sheet for gap adjustment of the first invention that solves the above problems is sandwiched between a sensor head and a scale of a linear scale to adjust the gap between the sensor head and the scale, and the gap A film sheet for gap adjustment that is pulled out from the gap after adjustment,
  • the first low friction layer is formed on one surface, and the second low friction layer is formed on the other surface.
  • the gap adjusting film sheet of the fourth invention is the gap adjusting film sheet of the first or second invention,
  • the first low friction layer and the second low friction layer are silicon coat layers coated with silicon.
  • the gap adjusting film sheet of the fifth invention is the gap adjusting film sheet of the first or second invention.
  • the first low friction layer and the second low friction layer are nylon coat layers coated with nylon.
  • the gap adjusting film sheet of the seventh invention is the gap adjusting film sheet of any one of the first to sixth inventions,
  • the tensile strength is 1 kgf or more.
  • a linear scale gap adjusting method is a linear scale gap adjusting method using the gap adjusting film sheet according to any one of the first to seventh aspects of the invention, A first step of inserting the gap adjusting film sheet into a gap between the sensor head fixed to the bracket and the scale fixed to the fixing portion; By moving the sensor head together with the bracket in the direction of the scale and pressing the gap adjusting film sheet against the scale by the sensor head, the gap adjusting film sheet is sandwiched between the sensor head and the scale.
  • a second procedure for adjusting the gap A third step of fixing the bracket to the movable portion in a state in which the gap adjustment film sheet is sandwiched between the sensor head and the scale by pressing the gap adjustment film sheet against the scale by the sensor head; A fourth procedure for pulling out the gap adjusting film sheet from the gap; It is characterized by having.
  • the gap adjusting film sheet is characterized in that the first low friction layer is formed on one surface and the second low friction layer is formed on the other surface.
  • the gap adjustment film sheet is sandwiched between the sensor head and the scale by pressing the gap adjustment film sheet against the scale with the sensor head.
  • the film sheet for adjusting the gap can be easily pulled out from the gap between the sensor head and the scale. For this reason, the gap adjustment film sheet is pressed against the scale by the sensor head and the gap adjustment film sheet is sandwiched between the sensor head and the scale, so that the gap between the sensor head and the scale is reduced to the thickness of the gap adjustment film sheet. It is possible to adjust according to the above.
  • the inclination of the sensor head is also adjusted following the gap adjusting film sheet. Therefore, it is not necessary to confirm that the target gap or inclination is obtained, so that there is no variation in the mounting position of the sensor head by the worker, and the experience of the worker is unnecessary. Further, since it is not necessary to perform dimension measurement or machining, and it is not necessary to adjust with an adjustment mechanism, the time required for dimension measurement is not required, and the cost of bracket parts is reduced. Furthermore, since the gap adjusting film sheet is a film sheet, the sensor head and scale are not damaged.
  • the gap adjusting film sheet is attached to one surface of the intermediate film, one intermediate film or an intermediate film in which a plurality of films are bonded, and the other surface is bonded to the one surface.
  • 1 to 3 show the procedure of the linear scale gap adjusting method according to the embodiment of the present invention.
  • 1 and 2 show a state during the gap adjustment
  • FIG. 3 shows a state after the gap adjustment.
  • 4 to 7 show configuration examples of the gap adjusting film sheet according to the embodiment of the present invention.
  • the linear scale 11 illustrated in FIGS. 1 to 3 is of an electromagnetic induction type.
  • the present invention is not limited to this, and can also be applied to an optical or magnetic linear scale.
  • the linear scale 11 includes a scale 13 having a position information pattern used to detect the position of a movable part (linear axis) of a machine tool or industrial machine, and a sensor head 12 (slider) that detects the position.
  • the scale 13 and the sensor head 12 are separated and separately installed. If it adds, although illustration is abbreviate
  • an alternating current is passed through the coil pattern of the sensor head 12
  • an induced voltage is generated in the coil pattern of the scale 13 due to electromagnetic induction, and this induced voltage changes according to the movement position of the sensor head 12. Therefore, the movement position of the sensor head 12 can be detected based on this induced voltage.
  • the sensor head 12 When the linear scale 11 having such a configuration is installed in an apparatus such as a machine tool or an industrial machine, the sensor head 12 is fixed to a movable portion 15 (for example, a table of a machine tool) of the apparatus via a bracket 14, and the scale 13 is It is fixed to a fixing part 16 (for example, a bed of a machine tool) of the device.
  • the movable portion 15 is guided by a guide rail (not shown) provided on the fixed portion 16 and can move on the linear axis as indicated by an arrow D.
  • the bracket 14 has an L-shape in which a base plate 14A and a front plate 14B are connected by bolts 17.
  • the sensor head 12 is fixed to the inner side surface (surface on the scale 13 side) 14 a of the plate member 14 ⁇ / b> B on the tip end side of the bracket 14 with a bolt 18, and faces the scale 13.
  • the scale 13 is arranged such that its longitudinal direction is along the direction (arrow D direction) in which the movable portion 15 and the sensor head 12 move, and is fixed to the fixing portion 16 with bolts 19.
  • a pair of long holes 21 parallel to each other are formed in the plate member 14A on the base end side of the bracket 14.
  • the longitudinal direction of the long holes 21 is along the width direction of the gap G, that is, the direction in which the sensor head 12 and the scale 13 face each other (arrow E direction).
  • the bolt 22 has a shaft portion 22 a inserted through the elongated hole 21 and is fixed by being screwed into a bolt hole 15 a formed in the movable portion 15.
  • the scale 13 is fixed to the fixing portion 16 with bolts 19, while the sensor head 12 is fixed to the plate material 14 ⁇ / b> B on the tip side of the bracket 14 with bolts 18.
  • the bolt 22 is inserted into the elongated hole 21 through the shaft portion 22a and is loosely screwed into the bolt hole 15a by the hexagon wrench 41 inserted into the hexagonal hole 22c of the head portion 22b of the bolt 22.
  • the bracket 14 is temporarily fixed to the movable portion 15 so that the bracket 14 can move in the longitudinal direction of the long hole 21.
  • the gap adjusting film sheet 31 is inserted into the gap G between the sensor head 12 and the scale 13 as indicated by the arrow F.
  • the first procedure is performed.
  • the gap adjusting film sheet 31 before insertion is indicated by a solid line
  • the gap adjusting film sheet 31 after insertion is indicated by a one-dot chain line.
  • the sensor head 12 when the sensor head 12 is tilted with respect to the scale 13, the sensor head 12 follows the gap adjusting film sheet 31, so that the tilt is eliminated and the sensor head 12 becomes parallel to the scale 13. For this reason, the gap G becomes uniform.
  • the width of the elongated hole 21 is larger than the thickness (diameter) of the shaft portion 22a of the bolt 22, and there is a gap (backlash) between the shaft portion 22a of the bolt 22 and the elongated hole 21. Since the bracket 14 (base plate 14B on the base end side) can be tilted by this gap (backlash), the tilt of the sensor head 12 can be adjusted.
  • the sensor head 12 presses the gap adjusting film sheet 31 against the scale 13, and the sensor head 12 and the scale 13 sandwich the gap adjusting film sheet 31 with the hexagon wrench 41.
  • the bracket 14 base plate 14 ⁇ / b> B
  • the third procedure is performed.
  • the gap adjusting film sheet 31 is pulled out from the gap G as indicated by an arrow J.
  • the fourth procedure is performed.
  • the gap adjusting film sheet 31 before drawing is shown by a one-dot chain line
  • the gap adjusting film sheet 31 after drawing is shown by a solid line.
  • the gap adjusting film sheet 31 has a configuration in which a first low friction layer 33 is formed on one surface and a second low friction layer 34 is formed on the other surface. . That is, the gap adjusting film sheet 31 is characterized by having low friction layers 33 and 34 having good slippage on both surfaces.
  • FIG. 4A shows a state before bonding
  • FIG. 4B shows a state after bonding
  • the intermediate film 32 is a polyester film.
  • the first outer film 35 is a polyester film, one surface 35a is bonded to one surface 32a of the intermediate film 32 with an adhesive, and the first low friction layer 33 is formed on the other surface 35b.
  • the second outer film 36 is a polyester film, one surface 36a is adhered to the other surface 32b of the intermediate film 32 with an adhesive, and the second low friction layer 34 is formed on the other surface 36b. .
  • the low friction layers 33 and 34 are silicon coating layers coated with silicon.
  • the gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured.
  • the thickness, friction coefficient, tensile strength, hardness, material, and other configuration examples related to the gap adjusting film sheet 31 will be described below.
  • a polyester film intermediate film 32, outer films 35, 36
  • the adjustment error of the gap G caused by the gap adjustment film sheet 31 is a variation of the thickness t.
  • Friction coefficient The friction coefficient of the low friction layers 33 and 34 is determined by pressing the gap adjustment film sheet 31 against the scale 13 by the sensor head 12 and sandwiching the gap adjustment film sheet 31 between the sensor head 12 and the scale 12.
  • the friction coefficient needs to be such that the gap adjusting film sheet 31 can be pulled out from the gap G.
  • the tensile strength of the gap adjusting film sheet 31 may be 1 kgf or more in consideration of the pulling force about twice the pulling force (0.5 kgf) described above.
  • the sensor head 12 and the scale 13 are made of metal or the like, whereas the gap adjusting film sheet 31 has a Mohs hardness of about 2, so that the sensor head 12 and the scale are adjusted by the gap adjusting film sheet 31. 13 is not scratched.
  • the Mohs hardness is 2 for nylon, 5 for metal, and 7 for glass.
  • the material of the low friction layers 33 and 34 is not necessarily limited to a silicon-based material. If the above-mentioned practical friction coefficient requirement value (0.2 or less) can be satisfied, non- A silicon-based material may be used. Among the materials having a friction coefficient of 0.2 or less, practical materials used as the low friction layer of the gap adjusting film sheet include fluororesins such as tetrafluoroethylene resin (Teflon: registered trademark) and nylon. is there.
  • the gap adjusting film sheet 31 is not necessarily limited to the configuration shown in FIG. 4, and may have a configuration as shown in FIGS.
  • the gap adjusting film sheet 31 shown in FIG. 5 to FIG. 7 is also basically formed with a first low friction layer 33 on one surface in the same manner as the gap adjusting film sheet 31 shown in FIG. Further, the second low friction layer 34 is formed.
  • the gap adjusting film sheet 31 shown in FIGS. 5 (a) and 5 (b) is the first to the intermediate film 32 in which a plurality of (two in the illustrated example) films 32A are bonded.
  • the outer film 33 and the second outer film 34 are bonded together.
  • FIG. 5A shows a state before bonding
  • FIG. 5B shows a state after bonding.
  • the intermediate film 32 (films 32A and 32B) is a polyester film.
  • the first outer film 35 is a polyester film, and one surface 35a is adhered to one surface 32a of the intermediate film 32 (film 32A) with an adhesive, and the first low friction layer 33 is formed on the other surface 35b. Is formed.
  • the second outer film 36 is a polyester film, one surface 36a is adhered to the other surface 32b of the intermediate film 32 with an adhesive, and the second low friction layer 34 is formed on the other surface 36b. .
  • the low friction layers 33 and 34 are silicon coating layers coated with silicon.
  • a gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured by changing the number of the films 32A forming the intermediate film 32. To do.
  • the gap adjusting film sheet 31 shown in FIGS. 7A and 7B uses a single film 39, and the first low friction layer 33 is provided on one surface 39 a of the film 39.
  • the second low friction layer 34 is formed on the other surface 39b.
  • the low friction layers 33 and 34 are silicon coating layers coated with silicon. In this case, by changing the thickness of the film 39, the gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured.
  • the thickness, friction coefficient, tensile strength, hardness, and material of the gap adjusting film sheet 31 are the same as those of the gap adjusting film sheet 31 shown in FIG. It is.
  • the gap adjusting film sheet 31 has the first low friction layer 33 formed on one surface and the second low friction layer 34 formed on the other surface. Since the gap adjustment film sheet 31 is used to adjust the gap between the sensor head 12 and the scale 13, the gap adjustment film sheet 31 is attached to the scale 13 by the sensor head 12. Even when the gap adjusting film sheet 31 is sandwiched between the sensor head 12 and the scale 13 by pressing, the gap adjusting film sheet 31 can be easily pulled out from the gap G between the sensor head 12 and the scale 13. Therefore, the gap adjustment film sheet 31 is pressed against the scale 13 by the sensor head 12 and the gap adjustment film sheet 31 is sandwiched between the sensor head 12 and the scale 13, whereby the gap G between the sensor head 12 and the scale 13.
  • the inclination of the sensor head 12 is also adjusted following the gap adjusting film sheet 31. Therefore, it is not necessary to confirm that the target gap or inclination is obtained, so that there is no variation in the mounting position of the sensor head by the worker, and the experience of the worker is unnecessary. Further, since it is not necessary to perform dimension measurement or machining, and it is not necessary to adjust with an adjustment mechanism, the time required for dimension measurement is not required, and the cost of bracket parts is reduced. Furthermore, since the gap adjusting film sheet 31 is a film sheet, the sensor head 12 and the scale 13 are not damaged.
  • the gap adjusting film sheet 31 is attached to one surface 32a of the intermediate film 32, and the intermediate film 32 in which one intermediate film 32 or a plurality of films 32A are bonded together.
  • the first outer film 35 having the first low friction layer 33 formed on the other surface 35b and one surface 36a are attached to the other surface 32b of the intermediate film 32, and the first surface 36b is attached to the other surface 36b.
  • the thickness of one intermediate film 32 is changed or the number of films 32A to be bonded is changed. By changing the thickness of the intermediate film 32 by changing, the gap adjusting film sheet 31 having an arbitrary thickness can be easily manufactured.
  • the present invention relates to a gap adjusting film sheet for adjusting a gap between a sensor head of a linear scale and the scale, and a linear scale gap adjusting method using the same, and it is possible to easily and reliably reduce the cost of the sensor head. This is useful when adjusting the gap between the scales and adjusting the tilt of the sensor head.

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  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The purpose of the present invention is to provide the following: a low-cost gap-adjusting film sheet that can easily and reliably adjust the gap between a sensor head and a scale and adjust the orientation of said sensor head; and a linear-encoder gap-adjustment method using said gap-adjusting film sheet. In order to do so, a gap-adjusting film sheet (31) with a low-friction layer formed on each side thereof is used. This gap-adjustment method comprises the following procedures: a first procedure in which the gap-adjusting film sheet is inserted into a gap (G) between a sensor head (12) and a scale (13); a second procedure in which the sensor head and a bracket (14) are moved in the direction of the scale and the sensor head is used to press the gap-adjusting film sheet up against the scale, thereby adjusting the gap by sandwiching the gap-adjusting film sheet between the sensor head and the scale; a third procedure in which, in the above state, the bracket is affixed to a movable unit (15); and a fourth procedure in which the gap-adjusting film sheet is pulled out of the gap.

Description

隙間調整用フイルムシート及びこれを用いたリニアスケール隙間調整方法Gap adjusting film sheet and linear scale gap adjusting method using the same
　本発明はリニアスケールのセンサーヘッドとスケールとの間の隙間を調整するための隙間調整用フイルムシート及びこれを用いたリニアスケール隙間調整方法に関する。 The present invention relates to a gap adjusting film sheet for adjusting a gap between a linear scale sensor head and a scale, and a linear scale gap adjusting method using the same.
　リニアスケール（リニアエンコーダとも称される）は、工作機械や産業機械などの機器において可動部（直線軸）の位置検出を行うために用いられるものである。リニアスケールには電磁誘導式、光学式、磁気式などがある。
　これらのリニアスケールは前記可動部（直線軸）の位置検出に使用する位置情報パターンを有するスケールと、位置を検出するセンサーヘッドとが分離及び別設置式となっている。従って、これらのリニアスケールの何れかを前記機器に設置する際には、当該リニアスケールのセンサーヘッドとスケールとの間の隙間（センサーヘッドとスケールの間隔）を適切に調整する必要がある。 A linear scale (also referred to as a linear encoder) is used to detect the position of a movable part (linear axis) in equipment such as machine tools and industrial machines. Linear scales include electromagnetic induction, optical, and magnetic types.
In these linear scales, a scale having a position information pattern used for detecting the position of the movable part (linear axis) and a sensor head for detecting the position are separated and separately installed. Therefore, when any of these linear scales is installed in the device, it is necessary to appropriately adjust the gap between the sensor head and the scale of the linear scale (the distance between the sensor head and the scale).
　図８（ａ）及び図８（ｂ）に示すように、電磁誘導式などのリニアスケール１を工作機械や産業機械などの機器に設置する場合、リニアスケール１のセンサーヘッド２はＬ字状のブラケット４を介して前記機器の可動部５に固定され、リニアスケール１のスケール３は前記機器の固定部６に固定される。可動部５は、固定部６に設けられたガイドレール６aに案内されて直線軸上を移動可能になっている。 As shown in FIGS. 8A and 8B, when the linear scale 1 such as an electromagnetic induction type is installed in a machine tool or an industrial machine, the sensor head 2 of the linear scale 1 is L-shaped. The scale 3 of the linear scale 1 is fixed to the fixed part 6 of the device. The movable portion 5 is guided by a guide rail 6a provided on the fixed portion 6 and can move on a linear axis.
　そして、このリニアスケール１の隙間調整作業は、従来、次のような方法によって実施されていた。 And the clearance adjustment work of this linear scale 1 has been conventionally performed by the following method.
（１）　第１の隙間調整方法（シクネスゲージや紙を用いる方法）
　シクネスゲージ７又は厚さの分かっている紙を、センサーヘッド２とスケール３の間の隙間（センサーヘッド２とスケール３の間隔）Ｇに挿入して、この隙間Ｇが目標値になっているか、センサーヘッド２が矢印Ａ，Ｂのように傾いていないかを確認しながら、可動部５へのブラケット４の取り付け位置を調整する。 (1) First gap adjustment method (method using a thickness gauge or paper)
Insert a thickness gauge 7 or paper of known thickness into the gap G between the sensor head 2 and the scale 3 (the distance between the sensor head 2 and the scale 3), and check whether the gap G is the target value. While confirming whether the head 2 is tilted as indicated by arrows A and B, the mounting position of the bracket 4 to the movable portion 5 is adjusted.
（２）　第２の隙間調整方法（寸法測定・機械加工を行う方法）
　センサーヘッド２からスケール３までの物理的な寸法、即ち隙間Ｇの寸法を測定し、センサーヘッド２を取り付けるブラケット４を機械加工して、隙間Ｇが目標値となるように調整する。 (2) Second gap adjustment method (method for measuring dimensions and machining)
The physical dimension from the sensor head 2 to the scale 3, that is, the dimension of the gap G is measured, and the bracket 4 for mounting the sensor head 2 is machined to adjust the gap G to a target value.
（３）　第３の隙間調整方法（調整機構を用いる方法）
　センサーヘッド２を取り付けるブラケット４に隙間Ｇとセンサーヘッド２の傾きを調整する調整機構（ガイド機構や調整セットビス）を設け、シクネスゲージ７や紙で隙間Ｇを確認しながら、調整機構によって隙間Ｇやセンサーヘッド２の傾きを調整する。 (3) Third gap adjustment method (method using an adjustment mechanism)
An adjustment mechanism (guide mechanism and adjustment set screw) that adjusts the gap G and the inclination of the sensor head 2 is provided in the bracket 4 to which the sensor head 2 is attached, and the gap G or The inclination of the sensor head 2 is adjusted.
　なお、リニアスケールの隙間調整について記載されている先行技術文献としては、下記の特許文献１がある。 In addition, as a prior art document describing the clearance adjustment of the linear scale, there is the following Patent Document 1.
特開２００７－１２７５３０号公報JP 2007-127530 A
　第１の隙間調整方法では、シクネスゲージ７や紙をセンサーヘッド２とスケール３とで挟み込んだ状態で隙間Ｇの調整を行うと、隙間Ｇを調整後にシクネスゲージ７や紙が隙間Ｇから引き抜けなくなる。シクネスゲージ７や紙が引き抜けなくなったときには、ブラケット４の取り付け位置を再調整する必要がある。
　また、隙間Ｇやセンサーヘッド２の傾き調整がずれていた場合には、シクネスゲージ７や紙を隙間Ｇに挿入して隙間Ｇやセンサーヘッド２の傾きを確認しながら、何度もブラケット４の取り付け位置を調整する必要がある。
　また、隙間Ｇの確認は、作業員がシクネスゲージ７や紙を隙間Ｇに挿入したときの感覚で行うため、作業員によってセンサーヘッド２の取り付け位置にバラツキが生じる。このようなバラツキを無くすため、作業員にはある程度の隙間調整作業の経験が必要となる。 In the first gap adjustment method, if the gap G is adjusted in a state where the thickness gauge 7 and paper are sandwiched between the sensor head 2 and the scale 3, the gap gauge 7 and paper cannot be pulled out from the gap G after the gap G is adjusted. When the thickness gauge 7 or the paper cannot be pulled out, it is necessary to readjust the mounting position of the bracket 4.
If the gap G or the tilt adjustment of the sensor head 2 is misaligned, the bracket 4 is attached many times while inserting the thickness gauge 7 or paper into the gap G and checking the tilt of the gap G or the sensor head 2. It is necessary to adjust the position.
In addition, since the operator confirms the gap G as if the worker inserted the thickness gauge 7 or paper into the gap G, the worker has variations in the mounting position of the sensor head 2. In order to eliminate such variations, the worker needs some experience in gap adjustment work.
　第２の隙間調整方法では、隙間Ｇの寸法測定やブラケット４の機械加工に時間が掛かる。しかも、ブラケット４の機械加工が必要であるため、ブラケット４の部品代が高くなる。 In the second gap adjustment method, it takes time to measure the dimension of the gap G and to machine the bracket 4. In addition, since machining of the bracket 4 is necessary, the parts cost of the bracket 4 increases.
　第３の隙間調整方法では、ブラケット４に調整機構を設ける必要があるため、ブラケット４の部品代が高くなる。 In the third gap adjustment method, the bracket 4 needs to be provided with an adjustment mechanism, so that the parts cost of the bracket 4 increases.
　従って本発明は上記の事情に鑑み、低コストで容易且つ確実にセンサーヘッドとスケールの間の隙間調整やセンサーヘッドの傾き調整を行うことができる隙間調整用フイルムシート及びこれを用いたリニアスケール隙間調整方法を提供することを課題とする。 Accordingly, in view of the above circumstances, the present invention provides a gap adjusting film sheet that can easily and reliably adjust the gap between the sensor head and the scale and the inclination of the sensor head at a low cost, and a linear scale gap using the same. It is an object to provide an adjustment method.
　上記課題を解決する第１発明の隙間調整用フイルムシートは、リニアスケールのセンサーヘッドとスケールとの間に挟み込まれて前記センサーヘッドと前記スケールとの間の隙間を調整し、且つ、前記隙間を調整後に前記隙間から引き抜かれる隙間調整用フイルムシートであって、
　一方の表面に第１の低摩擦層が形成され、他方の表面に第２の低摩擦層が形成された構成であることを特徴とする。 The film sheet for gap adjustment of the first invention that solves the above problems is sandwiched between a sensor head and a scale of a linear scale to adjust the gap between the sensor head and the scale, and the gap A film sheet for gap adjustment that is pulled out from the gap after adjustment,
The first low friction layer is formed on one surface, and the second low friction layer is formed on the other surface.
　また、第２発明の隙間調整用フイルムシートは、第１発明の隙間調整用フイルムシートにおいて、
　１枚の中間フイルム、又は、複数枚のフイルムを貼り合せた中間フイルムと、
　一方の面が前記中間フイルムの一方の面に貼り付けられ、他方の面に前記第１の低摩擦層が形成されている第１の外側フイルムと、
　一方の面が前記中間フイルムの他方の面に貼り付けられ、他方の面に前記第２の低摩擦層が形成されている第２の外側フイルムと、
を有する構成であることを特徴とする。 Further, the gap adjusting film sheet of the second invention is the gap adjusting film sheet of the first invention,
One intermediate film or an intermediate film in which a plurality of films are bonded together;
A first outer film having one surface attached to one surface of the intermediate film and the first low friction layer formed on the other surface;
A second outer film having one surface affixed to the other surface of the intermediate film and the second low friction layer formed on the other surface;
It is the structure which has these.
　また、第３発明の隙間調整用フイルムシートは、第１又は第２発明の隙間調整用フイルムシートにおいて、
　前記第１の低摩擦層及び前記第１の低摩擦層は、摩擦係数が０．２以下であることを特徴とする。 Further, the gap adjusting film sheet of the third invention is the gap adjusting film sheet of the first or second invention,
The first low friction layer and the first low friction layer have a friction coefficient of 0.2 or less.
　また、第４発明の隙間調整用フイルムシートは、第１又は第２発明の隙間調整用フイルムシートにおいて、
　前記第１の低摩擦層及び前記第２の低摩擦層は、シリコンをコーティングしたシリコンコート層であることを特徴とする。 The gap adjusting film sheet of the fourth invention is the gap adjusting film sheet of the first or second invention,
The first low friction layer and the second low friction layer are silicon coat layers coated with silicon.
　また、第５発明の隙間調整用フイルムシートは、第１又は第２発明の隙間調整用フイルムシートにおいて、
　前記第１の低摩擦層及び前記第２の低摩擦層は、ナイロンをコーティングしたナイロンコート層であることを特徴とする。 The gap adjusting film sheet of the fifth invention is the gap adjusting film sheet of the first or second invention.
The first low friction layer and the second low friction layer are nylon coat layers coated with nylon.
　また、第６発明の隙間調整用フイルムシートは、第１又は第２発明の隙間調整用フイルムシートにおいて、
　前記第１の低摩擦層及び前記第２の低摩擦層は、フッ素樹脂をコーティングしたフッ素樹脂コート層であることを特徴とする。 Further, the gap adjusting film sheet of the sixth invention is the gap adjusting film sheet of the first or second invention,
The first low friction layer and the second low friction layer are fluororesin coat layers coated with a fluororesin.
　また、第７発明の隙間調整用フイルムシートは、第１～第６発明の何れか１つの隙間調整用フイルムシートにおいて、
　引張り強度が１ｋｇｆ以上であることを特徴とする。 The gap adjusting film sheet of the seventh invention is the gap adjusting film sheet of any one of the first to sixth inventions,
The tensile strength is 1 kgf or more.
　また、第８発明のリニアスケール隙間調整方法は、第１～第７発明の何れか１つの隙間調整用フイルムシートを用いるリニアスケール隙間調整方法であって、
　ブラケットに固定された前記センサーヘッドと、固定部に固定された前記スケールとの間の隙間に前記隙間調整用フイルムシートを挿入する第１の手順と、
　前記ブラケットとともに前記センサーヘッドを前記スケールの方向へ移動させ、前記センサーヘッドによって前記隙間調整用フイルムシートを前記スケールに押し付けることにより、前記センサーヘッドと前記スケールとで前記隙間調整用フイルムシートを挟み込んで前記隙間を調整する第２の手順と、
　前記センサーヘッドによって前記隙間調整用フイルムシートを前記スケールに押し付けて前記センサーヘッドと前記スケールとで前記隙間調整用フイルムシートを挟み込んだ状態で、前記ブラケットを可動部に固定する第３の手順と、
　前記隙間調整用フイルムシートを前記隙間から引き抜く第４の手順と、
を有することを特徴とする。 A linear scale gap adjusting method according to an eighth aspect of the present invention is a linear scale gap adjusting method using the gap adjusting film sheet according to any one of the first to seventh aspects of the invention,
A first step of inserting the gap adjusting film sheet into a gap between the sensor head fixed to the bracket and the scale fixed to the fixing portion;
By moving the sensor head together with the bracket in the direction of the scale and pressing the gap adjusting film sheet against the scale by the sensor head, the gap adjusting film sheet is sandwiched between the sensor head and the scale. A second procedure for adjusting the gap;
A third step of fixing the bracket to the movable portion in a state in which the gap adjustment film sheet is sandwiched between the sensor head and the scale by pressing the gap adjustment film sheet against the scale by the sensor head;
A fourth procedure for pulling out the gap adjusting film sheet from the gap;
It is characterized by having.
　本発明によれば、隙間調整用フイルムシートは一方の表面に第１の低摩擦層が形成され、他方の表面に第２の低摩擦層が形成された構成であることを特徴としており、この隙間調整用フイルムシートを用いてセンサーヘッドとスケールとの間の隙間調整を行うため、センサーヘッドによって隙間調整用フイルムシートをスケールに押し付けてセンサーヘッドとスケールとで隙間調整用フイルムシートを挟み込んだ状態でも、隙間調整用フイルムシートをセンサーヘッドとスケールとの間の隙間から容易に引き抜くことができる。
　このため、センサーヘッドによって隙間調整用フイルムシートをスケールに押し付けてセンサーヘッドとスケールとで隙間調整用フイルムシートを挟み込むことにより、センサーヘッドとスケールとの間の隙間を、隙間調整用フイルムシートの厚さに倣って調整することができる。また、このとき同時に隙間調整用フイルムシートに倣ってセンサーヘッドの傾きも調整される。
　このことから、目標の隙間や傾きになっていることを確認する必要がなくなるため、作業員によってセンサーヘッドの取り付け位置にバラツキが生じることがなく、作業員の経験は不要となる。また、寸法測定や機械加工を行う必要がなく、調整機構で調整する必要もないため、寸法測定に要していた時間が不要となり、ブラケットの部品代が安くなる。更には、隙間調整用フイルムシートは、フイルムシートであるため、センサーヘッドやスケールを傷つけることがない。 According to the present invention, the gap adjusting film sheet is characterized in that the first low friction layer is formed on one surface and the second low friction layer is formed on the other surface. In order to adjust the gap between the sensor head and the scale using the gap adjustment film sheet, the gap adjustment film sheet is sandwiched between the sensor head and the scale by pressing the gap adjustment film sheet against the scale with the sensor head. However, the film sheet for adjusting the gap can be easily pulled out from the gap between the sensor head and the scale.
For this reason, the gap adjustment film sheet is pressed against the scale by the sensor head and the gap adjustment film sheet is sandwiched between the sensor head and the scale, so that the gap between the sensor head and the scale is reduced to the thickness of the gap adjustment film sheet. It is possible to adjust according to the above. At the same time, the inclination of the sensor head is also adjusted following the gap adjusting film sheet.
Therefore, it is not necessary to confirm that the target gap or inclination is obtained, so that there is no variation in the mounting position of the sensor head by the worker, and the experience of the worker is unnecessary. Further, since it is not necessary to perform dimension measurement or machining, and it is not necessary to adjust with an adjustment mechanism, the time required for dimension measurement is not required, and the cost of bracket parts is reduced. Furthermore, since the gap adjusting film sheet is a film sheet, the sensor head and scale are not damaged.
　また、隙間調整用フイルムシートを、１枚の中間フイルム、又は、複数枚のフイルムを貼り合せた中間フイルムと、一方の面が前記中間フイルムの一方の面に貼り付けられ、他方の面に前記第１の低摩擦層が形成されている第１の外側フイルムと、一方の面が前記中間フイルムの他方の面に貼り付けられ、他方の面に前記第２の低摩擦層が形成されている第２の外側フイルムとを有する構成とした場合には、１枚の中間フイルムの厚さを変更すること、又は、貼り合せるフイルムの枚数を変更して中間フイルムの厚さを変更することによって容易に任意の厚さの隙間調整用フイルムシートを製作することができる。 Further, the gap adjusting film sheet is attached to one surface of the intermediate film, one intermediate film or an intermediate film in which a plurality of films are bonded, and the other surface is bonded to the one surface. A first outer film on which a first low friction layer is formed, one surface is attached to the other surface of the intermediate film, and the second low friction layer is formed on the other surface. In the case of the configuration having the second outer film, it is easy to change the thickness of one intermediate film or change the thickness of the intermediate film by changing the number of films to be bonded. In addition, it is possible to manufacture a gap adjusting film sheet having an arbitrary thickness.
本発明の実施の形態例に係るリニアスケールの隙間調整方法を示す図である。It is a figure which shows the clearance gap adjustment method of the linear scale which concerns on the embodiment of this invention. 本発明の実施の形態例に係るリニアスケールの隙間調整方法を示す図である。It is a figure which shows the clearance gap adjustment method of the linear scale which concerns on the embodiment of this invention. 本発明の実施の形態例に係るリニアスケールの隙間調整方法を示す図である。It is a figure which shows the clearance gap adjustment method of the linear scale which concerns on the embodiment of this invention. （ａ）は本発明の実施の形態例に係る隙間調整用フイルムシートの貼り合せ前の状態を示す図、（ｂ）は前記隙間調整用フイルムシートの構成を示す図である。(A) is a figure which shows the state before bonding of the gap adjustment film sheet which concerns on the embodiment of this invention, (b) is a figure which shows the structure of the said gap adjustment film sheet. （ａ）は本発明の実施の形態例に係る他の例の隙間調整用フイルムシートの貼り合せ前の状態を示す図、（ｂ）は前記隙間調整用フイルムシートの構成を示す図である。(A) is a figure which shows the state before bonding of the gap adjustment film sheet of the other example which concerns on the embodiment of this invention, (b) is a figure which shows the structure of the said gap adjustment film sheet. （ａ）は本発明の実施の形態例に係る他の例の隙間調整用フイルムシートの貼り合せ前の状態を示す図、（ｂ）は前記隙間調整用フイルムシートの構成を示す図である。(A) is a figure which shows the state before bonding of the gap adjustment film sheet of the other example which concerns on the embodiment of this invention, (b) is a figure which shows the structure of the said gap adjustment film sheet. 本発明の実施の形態例に係る他の例の隙間調整用フイルムシートの構成を示す図である。It is a figure which shows the structure of the film sheet for gap adjustment of the other example which concerns on the embodiment of this invention. （ａ）は従来のリニアスケールの隙間調整方法を示す図、（ｂ）は（ａ）のＣ方向矢視図である。(A) is a figure which shows the clearance gap adjustment method of the conventional linear scale, (b) is a C direction arrow line view of (a).
　以下、本発明の実施の形態例を図面に基づいて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　図１～図３には本発明の実施の形態例に係るリニアスケール隙間調整方法の手順を示している。図１及び図２は隙間調整途中の状態であり、図３は隙間調整後の状態である。また、図４～図７には本発明の実施の形態例に係る隙間調整用フイルムシートの構成例を示している。 1 to 3 show the procedure of the linear scale gap adjusting method according to the embodiment of the present invention. 1 and 2 show a state during the gap adjustment, and FIG. 3 shows a state after the gap adjustment. 4 to 7 show configuration examples of the gap adjusting film sheet according to the embodiment of the present invention.
　図１～図３に例示するリニアスケール１１は電磁誘導式のものである。これに限らず、本発明は光学式や磁気式のリニアスケールにも適用することができる。 The linear scale 11 illustrated in FIGS. 1 to 3 is of an electromagnetic induction type. However, the present invention is not limited to this, and can also be applied to an optical or magnetic linear scale.
　まず、図３に基づき、リニアスケール１１の取り付け状態（隙間調整後の状態）などについて説明する。 First, the mounting state (the state after the gap adjustment) of the linear scale 11 will be described with reference to FIG.
　図３に示すように、リニアスケール１１は、工作機械や産業機械など機器の可動部（直線軸）の位置検出に使用する位置情報パターンを有するスケール１３と、位置を検出するセンサーヘッド１２（スライダとも称される）とを有し、これらのスケール１３とセンサーヘッド１２が分離及び別設置式のものである。
　付言すると、図示は省略するが、センサーヘッド１２とスケール１３にはジグザグ状のコイルパターンが形成さている。センサーヘッド１２のコイルパターンに交流電流を流すと、電磁誘導作用によってスケール１３のコイルパターンに誘起電圧が発生し、この誘起電圧がセンサーヘッド１２の移動位置に応じて変化する。従って、この誘起電圧に基づいてセンサーヘッド１２の移動位置を検出することができる。 As shown in FIG. 3, the linear scale 11 includes a scale 13 having a position information pattern used to detect the position of a movable part (linear axis) of a machine tool or industrial machine, and a sensor head 12 (slider) that detects the position. The scale 13 and the sensor head 12 are separated and separately installed.
If it adds, although illustration is abbreviate | omitted, the sensor head 12 and the scale 13 are formed with the zigzag coil pattern. When an alternating current is passed through the coil pattern of the sensor head 12, an induced voltage is generated in the coil pattern of the scale 13 due to electromagnetic induction, and this induced voltage changes according to the movement position of the sensor head 12. Therefore, the movement position of the sensor head 12 can be detected based on this induced voltage.
　かかる構成のリニアスケール１１を工作機械や産業機械などの機器に設置する場合、センサーヘッド１２はブラケット１４を介して前記機器の可動部１５（例えば工作機械のテーブルなど）に固定され、スケール１３は前記機器の固定部１６（例えば工作機械のベッドなど）に固定される。可動部１５は、固定部１６に設けられたガイドレール（図示省略）に案内されて直線軸上を矢印Ｄの如く移動可能になっている。 When the linear scale 11 having such a configuration is installed in an apparatus such as a machine tool or an industrial machine, the sensor head 12 is fixed to a movable portion 15 (for example, a table of a machine tool) of the apparatus via a bracket 14, and the scale 13 is It is fixed to a fixing part 16 (for example, a bed of a machine tool) of the device. The movable portion 15 is guided by a guide rail (not shown) provided on the fixed portion 16 and can move on the linear axis as indicated by an arrow D.
　ブラケット１４は、基端側の板材１４Ａと先端側の板材１４Ｂとがボルト１７で接続されて、Ｌ字状になっている。センサーヘッド１２は、ブラケット１４の先端側の板材１４Ｂの内側面（スケール１３側の面）１４ａにボルト１８で固定されており、スケール１３と対向している。スケール１３は、その長手方向が可動部１５及びセンサーヘッド１２が移動する方向（矢印Ｄ方向）に沿うように配置され、固定部１６にボルト１９で固定されている。 The bracket 14 has an L-shape in which a base plate 14A and a front plate 14B are connected by bolts 17. The sensor head 12 is fixed to the inner side surface (surface on the scale 13 side) 14 a of the plate member 14 </ b> B on the tip end side of the bracket 14 with a bolt 18, and faces the scale 13. The scale 13 is arranged such that its longitudinal direction is along the direction (arrow D direction) in which the movable portion 15 and the sensor head 12 move, and is fixed to the fixing portion 16 with bolts 19.
　ブラケット１４の基端側の板材１４Ａには、互いに平行な一対の長穴２１が形成されている。これらの長穴２１の長手方向は、隙間Ｇの幅方向、即ちセンサーヘッド１２とスケール１３とが対向する方向（矢印Ｅ方向）に沿っている。ボルト２２は、その軸部２２ａが長穴２１に挿通され、可動部１５に形成されたボルト孔１５ａに螺合されて固定されている。 A pair of long holes 21 parallel to each other are formed in the plate member 14A on the base end side of the bracket 14. The longitudinal direction of the long holes 21 is along the width direction of the gap G, that is, the direction in which the sensor head 12 and the scale 13 face each other (arrow E direction). The bolt 22 has a shaft portion 22 a inserted through the elongated hole 21 and is fixed by being screwed into a bolt hole 15 a formed in the movable portion 15.
　次に、リニアスケール１１の隙間調整方法を図１～図３に基づいて説明する。なお、下記の隙間調整作業は作業員の手作業によって実施される。 Next, a method for adjusting the clearance of the linear scale 11 will be described with reference to FIGS. In addition, the following clearance adjustment work is implemented by a worker's manual work.
　まず、図１に示すように、スケール１３は固定部１６にボルト１９で固定する一方、センサーヘッド１２はブラケット１４の先端側の板材１４Ｂにボルト１８で固定する。ボルト２２は、その軸部２２ａを長穴２１に挿通し、ボルト２２の頭部２２ｂの六角穴２２ｃに挿入した六角レンチ４１によってボルト孔１５ａに緩く螺合させる。このことによって、ブラケット１４を可動部１５に仮止めし、ブラケット１４が長穴２１の長手方向に移動できるようにしておく。 First, as shown in FIG. 1, the scale 13 is fixed to the fixing portion 16 with bolts 19, while the sensor head 12 is fixed to the plate material 14 </ b> B on the tip side of the bracket 14 with bolts 18. The bolt 22 is inserted into the elongated hole 21 through the shaft portion 22a and is loosely screwed into the bolt hole 15a by the hexagon wrench 41 inserted into the hexagonal hole 22c of the head portion 22b of the bolt 22. Thus, the bracket 14 is temporarily fixed to the movable portion 15 so that the bracket 14 can move in the longitudinal direction of the long hole 21.
　かかる状態において、隙間調整用フイルムシート３１を、矢印Ｆの如く、センサーヘッド１２とスケール１３との間の隙間Ｇに挿入する。かくして第１の手順が実施される。なお、図１では挿入前の隙間調整用フイルムシート３１を実線で示し、挿入後の隙間調整用フイルムシート３１を一点鎖線で示している。 In this state, the gap adjusting film sheet 31 is inserted into the gap G between the sensor head 12 and the scale 13 as indicated by the arrow F. Thus, the first procedure is performed. In FIG. 1, the gap adjusting film sheet 31 before insertion is indicated by a solid line, and the gap adjusting film sheet 31 after insertion is indicated by a one-dot chain line.
　続いて、図２に示すように、ブラケット１４とともにセンサーヘッド１２を矢印Ｈの如くスケール１３の方向（即ちセンサーヘッド１２をスケール１３に近づけて隙間Ｇを狭める方向）へ移動させることにより、センサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けて、センサーヘッド１２とスケール１３とで隙間調整用フイルムシート３１を挟み込む。その結果、隙間Ｇが、隙間調整用フイルムシート３１の厚さに倣って調整される。かくして第２の手順が実施される。
　また、このとき同時に隙間調整用フイルムシート３１に倣ってセンサーヘッド１２の傾きも調整される。即ち、スケール１３に対してセンサーヘッド１２が傾いていた場合、当該センサーヘッド１２は、隙間調整用フイルムシート３１に倣うことにより、傾きが解消されてスケール１３と平行になる。このため隙間Ｇが均一になる。なお、ボルト２２の軸部２２ａの太さ（直径）に比べて長穴２１の幅の方が大きく、ボルト２２の軸部２２ａと長穴２１との間には隙間（ガタ）があることから、この隙間（ガタ）分だけブラケット１４（基端側の板材１４Ｂ）を傾かせることができるため、センサーヘッド１２の傾きを調整することができる。 Subsequently, as shown in FIG. 2, the sensor head 12 is moved together with the bracket 14 in the direction of the scale 13 as shown by an arrow H (that is, the direction in which the sensor head 12 is brought closer to the scale 13 and the gap G is narrowed). 12, the gap adjusting film sheet 31 is pressed against the scale 13, and the sensor head 12 and the scale 13 sandwich the gap adjusting film sheet 31. As a result, the gap G is adjusted following the thickness of the gap adjusting film sheet 31. Thus, the second procedure is performed.
At the same time, the inclination of the sensor head 12 is also adjusted following the gap adjusting film sheet 31. That is, when the sensor head 12 is tilted with respect to the scale 13, the sensor head 12 follows the gap adjusting film sheet 31, so that the tilt is eliminated and the sensor head 12 becomes parallel to the scale 13. For this reason, the gap G becomes uniform. The width of the elongated hole 21 is larger than the thickness (diameter) of the shaft portion 22a of the bolt 22, and there is a gap (backlash) between the shaft portion 22a of the bolt 22 and the elongated hole 21. Since the bracket 14 (base plate 14B on the base end side) can be tilted by this gap (backlash), the tilt of the sensor head 12 can be adjusted.
　なお、隙間Ｇの目標値は、リニアスケール１１の機種によって例えば０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍの４種類がある。この場合、隙間調整用フイルムシート３１も、０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍの４種類の厚さのものが用意され、目標の隙間Ｇに応じた厚さのものが選択される。 Note that there are four types of target values for the gap G, such as 0.15 mm, 0.25 mm, 0.3 mm, and 0.4 mm, depending on the model of the linear scale 11. In this case, the gap adjusting film sheet 31 is also prepared in four types of thicknesses of 0.15 mm, 0.25 mm, 0.3 mm, and 0.4 mm, and the thickness according to the target gap G is prepared. Selected.
　上記第２の手順を実施後、センサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けてセンサーヘッド１２とスケール１３とで隙間調整用フイルムシート３１を挟み込んだ状態のまま、六角レンチ４１によってボルト２２を強く締め付けることにより、ブラケット１４（基端側の板材１４Ｂ）を可動部１５に固定する。かくして第３の手順が実施される。 After performing the second procedure, the sensor head 12 presses the gap adjusting film sheet 31 against the scale 13, and the sensor head 12 and the scale 13 sandwich the gap adjusting film sheet 31 with the hexagon wrench 41. By firmly tightening the bolts 22, the bracket 14 (base plate 14 </ b> B) is fixed to the movable portion 15. Thus, the third procedure is performed.
　そして、図３に示すように、隙間調整用フイルムシート３１を矢印Ｊの如く隙間Ｇから引き抜く。かくして第４の手順が実施される。なお、図３では引き抜き前の隙間調整用フイルムシート３１を一点鎖線で示し、引き抜き後の隙間調整用フイルムシート３１を実線で示している。 Then, as shown in FIG. 3, the gap adjusting film sheet 31 is pulled out from the gap G as indicated by an arrow J. Thus, the fourth procedure is performed. In FIG. 3, the gap adjusting film sheet 31 before drawing is shown by a one-dot chain line, and the gap adjusting film sheet 31 after drawing is shown by a solid line.
　次に、図４に基づき、上記の隙間調整方法で用いた隙間調整用フイルムシート３１の構成について説明する。 Next, the configuration of the gap adjusting film sheet 31 used in the gap adjusting method will be described with reference to FIG.
　図４に示すように、隙間調整用フイルムシート３１は、一方の表面に第１の低摩擦層３３が形成され、他方の表面に第２の低摩擦層３４が形成された構成のものである。即ち、隙間調整用フイルムシート３１は、両面に滑りのよい低摩擦層３３，３４を有していることを特徴としている。 As shown in FIG. 4, the gap adjusting film sheet 31 has a configuration in which a first low friction layer 33 is formed on one surface and a second low friction layer 34 is formed on the other surface. . That is, the gap adjusting film sheet 31 is characterized by having low friction layers 33 and 34 having good slippage on both surfaces.
　詳述すると、図４（ａ）及び図４（ｂ）に示す隙間調整用フイルムシート３１は、１枚の中間フイルム３２に対して第１の外側フイルム３３と第２の外側フイルム３４とを貼り付けものである。図４（ａ）には貼り合せ前の状態を示し、図４（ｂ）には貼り合せ後の状態を示す。
　中間フイルム３２はポリエステルフイルムである。第１の外側フイルム３５はポリエステルフイルムであり、一方の面３５ａが中間フイルム３２の一方の面３２ａに接着剤で貼り付けられ、他方の面３５ｂに第１の低摩擦層３３が形成されている。第２の外側フイルム３６はポリエステルフイルムであり、一方の面３６ａが中間フイルム３２の他方の面３２ｂに接着剤で貼り付けられ、他方の面３６ｂに第２の低摩擦層３４が形成されている。低摩擦層３３，３４はシリコンをコーティングしたシリコンコート層である。
　この場合、中間フイルム３２の厚さを変更することによって、任意の厚さ（例えば０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍ）の隙間調整用フイルムシート３１を製作する。 More specifically, in the gap adjusting film sheet 31 shown in FIGS. 4A and 4B, the first outer film 33 and the second outer film 34 are attached to one intermediate film 32. It is an adjunct. FIG. 4A shows a state before bonding, and FIG. 4B shows a state after bonding.
The intermediate film 32 is a polyester film. The first outer film 35 is a polyester film, one surface 35a is bonded to one surface 32a of the intermediate film 32 with an adhesive, and the first low friction layer 33 is formed on the other surface 35b. . The second outer film 36 is a polyester film, one surface 36a is adhered to the other surface 32b of the intermediate film 32 with an adhesive, and the second low friction layer 34 is formed on the other surface 36b. . The low friction layers 33 and 34 are silicon coating layers coated with silicon.
In this case, by changing the thickness of the intermediate film 32, the gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured.
　ここで隙間調整用フイルムシート３１に関する厚さ、摩擦係数、引張り強度、硬さ、材質、他の構成例について以下に示す。 Here, the thickness, friction coefficient, tensile strength, hardness, material, and other configuration examples related to the gap adjusting film sheet 31 will be described below.
（１）　厚さ
　中間フイルム３２や外側フイルム３５，３６として用いるポリエステルフイルムの厚さｔのバラツキはｔ±５％以内であり、ｔ＝０．２５ｍｍ程度とすると、０．２５±０．０１２５ｍｍ以内のバラツキでポリエステルフイルム（中間フイルム３２、外側フイルム３５，３６）を製作することができる。従って、隙間調整用フイルムシート３１による隙間Ｇの調整誤差は、この厚さｔのバラツキ分となる。 (1) Thickness The variation of the thickness t of the polyester film used as the intermediate film 32 or the outer film 35, 36 is within t ± 5%, and when t = about 0.25 mm, it is within 0.25 ± 0.0125 mm. Thus, a polyester film (intermediate film 32, outer films 35, 36) can be manufactured. Therefore, the adjustment error of the gap G caused by the gap adjustment film sheet 31 is a variation of the thickness t.
（２）　摩擦係数
　低摩擦層３３，３４の摩擦係数は、センサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けてセンサーヘッド１２とスケール１２とで隙間調整用フイルムシート３１を挟み込んだ状態でも、隙間Ｇから隙間調整用フイルムシート３１を引き抜くことができる程度の摩擦係数である必要がある。
　例えば、作業員がセンサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けたときの押し付け力（垂直力）Ｎを約５ｋｇｆとし、この約５ｋｇｆの押し付け力が作用している状態の隙間調整用フイルムシート３１を、作業員が約０．５ｋｇｆの引き抜き力Ｆで隙間Ｇから引き抜いたとすると、摩擦係数μは、μ＝Ｆ／Ｎ＝０．５／５＝０．１となる。
　従って、この場合の低摩擦層３３，３４の摩擦係数は０．１程度であることが要求される。これに対して低摩擦層３３，３４はシリコンコート層であり、このシリコンコート層の摩擦係数は０．１程度であるため、上記の要求を満たしている。
　実用的には、隙間調整用フイルムシート３１を容易に引く抜くことができるようにするため、低摩擦層３３，３４の摩擦係数は０．２以下とすればよい。 (2) Friction coefficient The friction coefficient of the low friction layers 33 and 34 is determined by pressing the gap adjustment film sheet 31 against the scale 13 by the sensor head 12 and sandwiching the gap adjustment film sheet 31 between the sensor head 12 and the scale 12. However, the friction coefficient needs to be such that the gap adjusting film sheet 31 can be pulled out from the gap G.
For example, the pressing force (vertical force) N when an operator presses the gap adjusting film sheet 31 against the scale 13 by the sensor head 12 is about 5 kgf, and the gap adjustment in a state where the pressing force of about 5 kgf is applied. If the operator pulls out the film sheet 31 from the gap G with a pulling force F of about 0.5 kgf, the friction coefficient μ is μ = F / N = 0.5 / 5 = 0.1.
Therefore, the friction coefficient of the low friction layers 33 and 34 in this case is required to be about 0.1. On the other hand, the low friction layers 33 and 34 are silicon coat layers, and the friction coefficient of the silicon coat layers is about 0.1, which satisfies the above requirement.
Practically, the friction coefficient of the low friction layers 33 and 34 should be 0.2 or less so that the gap adjusting film sheet 31 can be easily pulled out.
（３）　引張り強度
　ポリエステルフイルムの引張り強度（ＪＩＳＣ２１５１）は約１５０ＭＰａ（＝１５３０ｋｇｆ／ｃｍ2）である。即ち、ポリエステルフイルムは、１ｃｍ2当たり１５３０ｋｇｆ／ｃｍ2以上の引張り力（引き抜き力）が作用すると破断する。
　中間フイルム３２や外側フイルム３５，３６として用いたポリエステルフイルムの幅を３ｃｍ、厚さを０．０２５ｃｍとすると、当該ポリエステルフイルムの断面積は３×０．０２５＝０．０７５ｃｍ2である。従って、この場合のポリエステルフイルム（中間フイルム３２と外側フイルム３５，３６を貼り合せたもの）は、引張り強度が１５３０×０．０７５＝１１４．７５ｋｇｆであり、前述の引き抜き力（０．５ｋｇｆ）に十分に耐えられるものである。
　実用的には、隙間調整用フイルムシート３１の引張り強度は、前述の引き抜き力（０．５ｋｇｆ）の２倍程度の引き抜き力を考慮して、１ｋｇｆ以上であればよい。 (3) Tensile strength The tensile strength (JISC2151) of the polyester film is about 150 MPa (= 1530 kgf / cm 2 ). That is, the polyester film is, 1 cm 2 per 1530kgf / cm 2 or more tensile force (pulling force) is broken to act.
If the width of the polyester film used as the intermediate film 32 and the outer films 35 and 36 is 3 cm and the thickness is 0.025 cm, the cross-sectional area of the polyester film is 3 × 0.025 = 0.075 cm 2 . Accordingly, the polyester film in this case (the intermediate film 32 and the outer films 35 and 36 bonded together) has a tensile strength of 1530 × 0.075 = 114.75 kgf, and the above-described pulling force (0.5 kgf). It can withstand enough.
Practically, the tensile strength of the gap adjusting film sheet 31 may be 1 kgf or more in consideration of the pulling force about twice the pulling force (0.5 kgf) described above.
（４）　硬さ
　一般にセンサーヘッド１２及びスケール１３は金属等であるのに対して、隙間調整用フイルムシート３１はモース硬度で２程度であるため、隙間調整用フイルムシート３１によってセンサーヘッド１２及びスケール１３に傷が付くことはない。因みにモース硬度でナイロンは２、金属は５、ガラスは７である。 (4) Hardness Generally, the sensor head 12 and the scale 13 are made of metal or the like, whereas the gap adjusting film sheet 31 has a Mohs hardness of about 2, so that the sensor head 12 and the scale are adjusted by the gap adjusting film sheet 31. 13 is not scratched. Incidentally, the Mohs hardness is 2 for nylon, 5 for metal, and 7 for glass.
（５）　材質
　低摩擦層３３，３４の材料としては、必ずしもシリコン系の材料に限定するものでなく、前述の実用的な摩擦係数の要求値（０．２以下）を満たすことができれば、非シリコン系の材料であってもよい。摩擦係数が０．２以下の材料のなかで隙間調整用フイルムシートの低摩擦層として用いる現実的なものとしては、四ふっ化エチレン樹脂（テフロン：登録商標）などのフッ素樹脂や、ナイロンなどがある。 (5) Material The material of the low friction layers 33 and 34 is not necessarily limited to a silicon-based material. If the above-mentioned practical friction coefficient requirement value (0.2 or less) can be satisfied, non- A silicon-based material may be used. Among the materials having a friction coefficient of 0.2 or less, practical materials used as the low friction layer of the gap adjusting film sheet include fluororesins such as tetrafluoroethylene resin (Teflon: registered trademark) and nylon. is there.
（６）　他の構成例
　隙間調整用フイルムシート３１は、必ずしも図４に示す構成に限定するものでなく、図５～図７に示すような構成であってもよい。
　　図５～図７に示す隙間調整用フイルムシート３１も、基本的には図４に示す隙間調整用フイルムシート３１と同様に一方の表面に第１の低摩擦層３３が形成され、他方の表面に第２の低摩擦層３４が形成された構成のものである。 (6) Other Configuration Examples The gap adjusting film sheet 31 is not necessarily limited to the configuration shown in FIG. 4, and may have a configuration as shown in FIGS.
The gap adjusting film sheet 31 shown in FIG. 5 to FIG. 7 is also basically formed with a first low friction layer 33 on one surface in the same manner as the gap adjusting film sheet 31 shown in FIG. Further, the second low friction layer 34 is formed.
　詳述すると、図５（ａ）及び図５（ｂ）に示す隙間調整用フイルムシート３１は、複数枚（図示例では２枚）のフイルム３２Ａを貼り合せた中間フイルム３２に対して第１の外側フイルム３３と第２の外側フイルム３４とを貼り合せたものである。図５（ａ）には貼り合せ前の状態を示し、図５（ｂ）には貼り合せ後の状態を示す。
　中間フイルム３２（フイルム３２Ａ，３２Ｂ）はポリエステルフイルムである。第１の外側フイルム３５はポリエステルフイルムであり、一方の面３５ａが中間フイルム３２（フイルム３２Ａ）の一方の面３２ａに接着剤で貼り付けられ、他方の面３５ｂに第１の低摩擦層３３が形成されている。第２の外側フイルム３６はポリエステルフイルムであり、一方の面３６ａが中間フイルム３２の他方の面３２ｂに接着剤で貼り付けられ、他方の面３６ｂに第２の低摩擦層３４が形成されている。低摩擦層３３，３４はシリコンをコーティングしたシリコンコート層である。
　この場合、中間フイルム３２を形成するフイルム３２Ａの枚数を変更することよって、任意の厚さ（例えば０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍ）の隙間調整用フイルムシート３１を製作する。 More specifically, the gap adjusting film sheet 31 shown in FIGS. 5 (a) and 5 (b) is the first to the intermediate film 32 in which a plurality of (two in the illustrated example) films 32A are bonded. The outer film 33 and the second outer film 34 are bonded together. FIG. 5A shows a state before bonding, and FIG. 5B shows a state after bonding.
The intermediate film 32 (films 32A and 32B) is a polyester film. The first outer film 35 is a polyester film, and one surface 35a is adhered to one surface 32a of the intermediate film 32 (film 32A) with an adhesive, and the first low friction layer 33 is formed on the other surface 35b. Is formed. The second outer film 36 is a polyester film, one surface 36a is adhered to the other surface 32b of the intermediate film 32 with an adhesive, and the second low friction layer 34 is formed on the other surface 36b. . The low friction layers 33 and 34 are silicon coating layers coated with silicon.
In this case, a gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured by changing the number of the films 32A forming the intermediate film 32. To do.
　図６（ａ）及び図６（ｂ）に示す隙間調整用フイルムシート３１は、第１のフイルム３７と第２のフイルム３８とを貼り合せたものである。図６（ａ）には貼り合せ前の状態を示し、図６（ｂ）には貼り合せ後の状態を示す。
　これらのフイルム３７，３８はポリエステルフイルムである。第１のフイルム３７の一方の面３７ａと第２のフイルム３８の一方の面３８ａが接着剤で貼り合わされており、第１のフイルム３７の他方の面３７ｂに第１の低摩擦層３３が形成され、第２のフイルム３８の他方の面３８ｂに第２の低摩擦層３４が形成されている。低摩擦層３３，３４はシリコンをコーティングしたシリコンコート層である。
　この場合、フイルム３７，３８の厚さを変更することよって、任意の厚さ（例えば０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍ）の隙間調整用フイルムシート３１を製作する。 The gap adjusting film sheet 31 shown in FIGS. 6A and 6B is obtained by bonding a first film 37 and a second film 38 together. FIG. 6A shows a state before bonding, and FIG. 6B shows a state after bonding.
These films 37 and 38 are polyester films. One surface 37a of the first film 37 and one surface 38a of the second film 38 are bonded together with an adhesive, and the first low friction layer 33 is formed on the other surface 37b of the first film 37. The second low friction layer 34 is formed on the other surface 38b of the second film 38. The low friction layers 33 and 34 are silicon coating layers coated with silicon.
In this case, by changing the thickness of the films 37 and 38, the gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, and 0.4 mm) is manufactured.
　図７（ａ）及び図７（ｂ）に示す隙間調整用フイルムシート３１は、１枚のフイルム３９を用いたものであり、このフイルム３９の一方の面３９ａに第１の低摩擦層３３が形成され、他方の面３９ｂに第２の低摩擦層３４が形成されている。低摩擦層３３，３４はシリコンをコーティングしたシリコンコート層である。
　この場合、フイルム３９の厚さを変更することよって、任意の厚さ（例えば０．１５ｍｍ、０．２５ｍｍ、０．３ｍｍ、０．４ｍｍ）の隙間調整用フイルムシート３１を製作する。 The gap adjusting film sheet 31 shown in FIGS. 7A and 7B uses a single film 39, and the first low friction layer 33 is provided on one surface 39 a of the film 39. The second low friction layer 34 is formed on the other surface 39b. The low friction layers 33 and 34 are silicon coating layers coated with silicon.
In this case, by changing the thickness of the film 39, the gap adjusting film sheet 31 having an arbitrary thickness (for example, 0.15 mm, 0.25 mm, 0.3 mm, 0.4 mm) is manufactured.
　なお、図５～図７の隙間調整用フイルムシート３１に関しても、厚さ、摩擦係数、引張り強度、硬さ、材質については、上記のとおり、図４の隙間調整用フイルムシート３１の場合と同様である。 5 to 7, the thickness, friction coefficient, tensile strength, hardness, and material of the gap adjusting film sheet 31 are the same as those of the gap adjusting film sheet 31 shown in FIG. It is.
　以上のように、本実施の形態例によれば、隙間調整用フイルムシート３１は一方の表面に第１の低摩擦層３３が形成され、他方の表面に第２の低摩擦層３４が形成された構成であることを特徴としており、この隙間調整用フイルムシート３１を用いてセンサーヘッド１２とスケール１３との間の隙間調整を行うため、センサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けてセンサーヘッド１２とスケール１３とで隙間調整用フイルムシート３１を挟み込んだ状態でも、隙間調整用フイルムシート３１をセンサーヘッド１２とスケール１３との間の隙間Ｇから容易に引き抜くことができる。
　このため、センサーヘッド１２によって隙間調整用フイルムシート３１をスケール１３に押し付けてセンサーヘッド１２とスケール１３とで隙間調整用フイルムシート３１を挟み込むことにより、センサーヘッド１２とスケール１３との間の隙間Ｇを、隙間調整用フイルムシート３１の厚さに倣って調整することができる。また、このとき同時に隙間調整用フイルムシート３１に倣ってセンサーヘッド１２の傾きも調整される。
　このことから、目標の隙間や傾きになっていることを確認する必要がなくなるため、作業員によってセンサーヘッドの取り付け位置にバラツキが生じることがなく、作業員の経験は不要となる。また、寸法測定や機械加工を行う必要がなく、調整機構で調整する必要もないため、寸法測定に要していた時間が不要となり、ブラケットの部品代が安くなる。更には、隙間調整用フイルムシート３１は、フイルムシートであるため、センサーヘッド１２やスケール１３を傷つけることがない。 As described above, according to the present embodiment, the gap adjusting film sheet 31 has the first low friction layer 33 formed on one surface and the second low friction layer 34 formed on the other surface. Since the gap adjustment film sheet 31 is used to adjust the gap between the sensor head 12 and the scale 13, the gap adjustment film sheet 31 is attached to the scale 13 by the sensor head 12. Even when the gap adjusting film sheet 31 is sandwiched between the sensor head 12 and the scale 13 by pressing, the gap adjusting film sheet 31 can be easily pulled out from the gap G between the sensor head 12 and the scale 13.
Therefore, the gap adjustment film sheet 31 is pressed against the scale 13 by the sensor head 12 and the gap adjustment film sheet 31 is sandwiched between the sensor head 12 and the scale 13, whereby the gap G between the sensor head 12 and the scale 13. Can be adjusted in accordance with the thickness of the gap adjusting film sheet 31. At the same time, the inclination of the sensor head 12 is also adjusted following the gap adjusting film sheet 31.
Therefore, it is not necessary to confirm that the target gap or inclination is obtained, so that there is no variation in the mounting position of the sensor head by the worker, and the experience of the worker is unnecessary. Further, since it is not necessary to perform dimension measurement or machining, and it is not necessary to adjust with an adjustment mechanism, the time required for dimension measurement is not required, and the cost of bracket parts is reduced. Furthermore, since the gap adjusting film sheet 31 is a film sheet, the sensor head 12 and the scale 13 are not damaged.
　また、隙間調整用フイルムシート３１を、１枚の中間フイルム３２、又は、複数枚のフイルム３２Ａを貼り合せた中間フイルム３２と、一方の面３５ａが中間フイルム３２の一方の面３２ａに貼り付けられ、他方の面３５ｂに第１の低摩擦層３３が形成されている第１の外側フイルム３５と、一方の面３６ａが中間フイルム３２の他方の面３２ｂに貼り付けられ、他方の面３６ｂに第２の低摩擦層３４が形成されている第２の外側フイルム３６とを有する構成とした場合には、１枚の中間フイルム３２の厚さを変更すること、又は、貼り合せるフイルム３２Ａの枚数を変更して中間フイルム３２の厚さを変更することによって容易に任意の厚さの隙間調整用フイルムシート３１を製作することができる。 Further, the gap adjusting film sheet 31 is attached to one surface 32a of the intermediate film 32, and the intermediate film 32 in which one intermediate film 32 or a plurality of films 32A are bonded together. The first outer film 35 having the first low friction layer 33 formed on the other surface 35b and one surface 36a are attached to the other surface 32b of the intermediate film 32, and the first surface 36b is attached to the other surface 36b. In the case of the configuration including the second outer film 36 on which the two low friction layers 34 are formed, the thickness of one intermediate film 32 is changed or the number of films 32A to be bonded is changed. By changing the thickness of the intermediate film 32 by changing, the gap adjusting film sheet 31 having an arbitrary thickness can be easily manufactured.
　なお、先にも述べたとおり、本発明は電磁誘導式のリニアスケールにおけるスケールとセンサーヘッドの間の隙間調整に限定するものではなく、工作機械や産業機械などの機器の可動部（直線軸）の位置検出に使用する位置情報パターンを有するスケールと、位置を検出するセンサーヘッドとが分離及び別設置式の光学式リニアスケールや磁気式リニアスケールにおけるスケールとセンサーヘッドの間の隙間調整にも適用することができる。 As described above, the present invention is not limited to the adjustment of the gap between the scale and the sensor head in the electromagnetic induction type linear scale, but the movable part (linear axis) of a machine tool, an industrial machine or the like. The scale having the position information pattern used for detecting the position of the sensor and the sensor head for detecting the position are separated and applied to the adjustment of the gap between the scale and the sensor head in a separately installed optical linear scale or magnetic linear scale. can do.
　本発明はリニアスケールのセンサーヘッドとスケールとの間の隙間を調整するための隙間調整用フイルムシート及びこれを用いたリニアスケール隙間調整方法に関するものであり、低コストで容易且つ確実にセンサーヘッドとスケールの間の隙間調整やセンサーヘッドの傾き調整を行う場合に適用して有用なものである。 The present invention relates to a gap adjusting film sheet for adjusting a gap between a sensor head of a linear scale and the scale, and a linear scale gap adjusting method using the same, and it is possible to easily and reliably reduce the cost of the sensor head. This is useful when adjusting the gap between the scales and adjusting the tilt of the sensor head.
　１１　リニアスケール、　１２　センサーヘッド、　１３　スケール、　１４　ブラケット、　１４Ａ　ブラケットの基端側の板材、　１４Ｂ　ブラケットの先端側の板材、　１４ａ　ブラケット（先端側の板材）の内側面、　１５　可動部、　１５ａ　可動部のボルト孔、　１６　固定部、　１７，１８，１９　ボルト、　２１　ブラケット（基端側の板材）の長穴、　２２　ボルト、　２２ａ　ボルトの軸部、　２２ｂ　ボルトの頭部、　２２ｃ　ボルトの六角穴、　３１　隙間調整用フイルムシート、　３２　中間フイルム、　３２ａ　中間フイルムの一方の面、　３２ｂ　中間フイルムの他方の面、　３２Ａ　フイルム、　３３　第１の低摩擦層、　３４　第２の低摩擦層、　３５　第１の外側フイルム、　３５ａ　第１の外側フイルムの一方の面、　３５ｂ　第１の外側フイルムの他方の面、　３６　第２の外側フイルム、　３６ａ　第２の外側フイルムの一方の面、　３６ｂ　第２の外側フイルムの他方の面、　３７　第１のフイルム、　３７ａ　第１のフイルムの一方の面、　３７ｂ　第１のフイルムの他方の面、　３８　第２のフイルム、　３８ａ　第２のフイルムの一方の面、　３８ｂ　第２のフイルムの他方の面、　３９　フイルム、　３９ａ　フイルムの一方の面、　３９ｂ　フイルムの他方の面、　４１　六角レンチ 11 linear scale, 12 sensor head, 13 scale, 14 bracket, 14A bracket base plate, 14B bracket tip plate, 14a bracket (tip plate) inner surface, 15 movable part, 15a movable part Bolt holes, 16 fixing parts, 17, 18, 19 bolts, 21 brackets (base end side plate) long holes, 22 bolts, 22a bolt shafts, 22b bolt heads, 22c bolt hexagonal holes, 31 Gap adjustment film sheet, 32 intermediate film, 32a one side of intermediate film, 32b other side of intermediate film, 32A film, 33 first low friction layer, 34 second low friction layer, 35 first outer side Film, 35a first outer film One surface of the film, 35b, the other surface of the first outer film, 36, the second outer film, 36a, one surface of the second outer film, 36b, the other surface of the second outer film, 37, the first surface Film, 37a, one side of the first film, 37b, the other side of the first film, 38, the second film, 38a, one side of the second film, 38b, the other side of the second film, 39 film 39a, one side of the film, 39b, the other side of the film, 41 hex wrench

Claims (8)

  1. 　リニアスケールのセンサーヘッドとスケールとの間に挟み込まれて前記センサーヘッドと前記スケールとの間の隙間を調整し、且つ、前記隙間を調整後に前記隙間から引き抜かれる隙間調整用フイルムシートであって、
    　一方の表面に第１の低摩擦層が形成され、他方の表面に第２の低摩擦層が形成された構成であることを特徴とする隙間調整用フイルムシート。     A gap adjusting film sheet that is sandwiched between a sensor head and a scale of a linear scale to adjust a gap between the sensor head and the scale, and that is pulled out from the gap after adjusting the gap,
    A gap adjusting film sheet, characterized in that a first low friction layer is formed on one surface and a second low friction layer is formed on the other surface.
  2. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　１枚の中間フイルム、又は、複数枚のフイルムを貼り合せた中間フイルムと、
    　一方の面が前記中間フイルムの一方の面に貼り付けられ、他方の面に前記第１の低摩擦層が形成されている第１の外側フイルムと、
    　一方の面が前記中間フイルムの他方の面に貼り付けられ、他方の面に前記第２の低摩擦層が形成されている第２の外側フイルムと、
    を有する構成であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    One intermediate film or an intermediate film in which a plurality of films are bonded together;
    A first outer film having one surface attached to one surface of the intermediate film and the first low friction layer formed on the other surface;
    A second outer film having one surface affixed to the other surface of the intermediate film and the second low friction layer formed on the other surface;
    The film sheet for gap adjustment characterized by having the structure which has.
  3. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　前記第１の低摩擦層及び前記第２の低摩擦層は、摩擦係数が０．２以下であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    The gap adjusting film sheet, wherein the first low friction layer and the second low friction layer have a friction coefficient of 0.2 or less.
  4. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　前記第１の低摩擦層及び前記第２の低摩擦層は、シリコンをコーティングしたシリコンコート層であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    The gap adjusting film sheet, wherein the first low friction layer and the second low friction layer are silicon coated layers coated with silicon.
  5. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　前記第１の低摩擦層及び前記第２の低摩擦層は、ナイロンをコーティングしたナイロンコート層であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    The gap adjusting film sheet, wherein the first low friction layer and the second low friction layer are nylon coat layers coated with nylon.
  6. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　前記第１の低摩擦層及び前記第２の低摩擦層は、フッ素樹脂をコーティングしたフッ素樹脂コート層であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    The gap adjusting film sheet, wherein the first low friction layer and the second low friction layer are fluororesin coat layers coated with fluororesin.
  7. 　請求項１に記載の隙間調整用フイルムシートにおいて、
    　引張り強度が１ｋｇｆ以上であることを特徴とする隙間調整用フイルムシート。     In the gap adjustment film sheet according to claim 1,
    A gap adjusting film sheet having a tensile strength of 1 kgf or more.
  8. 　請求項１に記載の隙間調整用フイルムシートを用いるリニアスケール隙間調整方法であって、
    　ブラケットに固定された前記センサーヘッドと、固定部に固定された前記スケールとの間の隙間に前記隙間調整用フイルムシートを挿入する第１の手順と、
    　前記ブラケットとともに前記センサーヘッドを前記スケールの方向へ移動させ、前記センサーヘッドによって前記隙間調整用フイルムシートを前記スケールに押し付けることにより、前記センサーヘッドと前記スケールとで前記隙間調整用フイルムシートを挟み込んで前記隙間を調整する第２の手順と、
    　前記センサーヘッドによって前記隙間調整用フイルムシートを前記スケールに押し付けて前記センサーヘッドと前記スケールとで前記隙間調整用フイルムシートを挟み込んだ状態で、前記ブラケットを可動部に固定する第３の手順と、
    　前記隙間調整用フイルムシートを前記隙間から引き抜く第４の手順と、
    を有することを特徴とするリニアスケール隙間調整方法。     A linear scale gap adjustment method using the gap adjustment film sheet according to claim 1,
    A first step of inserting the gap adjusting film sheet into a gap between the sensor head fixed to the bracket and the scale fixed to the fixing portion;
    By moving the sensor head together with the bracket in the direction of the scale and pressing the gap adjusting film sheet against the scale by the sensor head, the gap adjusting film sheet is sandwiched between the sensor head and the scale. A second procedure for adjusting the gap;
    A third step of fixing the bracket to the movable portion in a state in which the gap adjustment film sheet is sandwiched between the sensor head and the scale by pressing the gap adjustment film sheet against the scale by the sensor head;
    A fourth procedure for pulling out the gap adjusting film sheet from the gap;
    A linear scale gap adjusting method characterized by comprising:
PCT/JP2013/051118 2012-02-29 2013-01-22 Gap-adjusting film sheet and linear-encoder gap-adjustment method using same WO2013128976A1 (en)

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JPH1038617A (en) * 1996-07-22 1998-02-13 Omron Corp Rotary encoder, its manufacture, and optical member-holding tool
JP2004245644A (en) * 2003-02-12 2004-09-02 Sony Precision Technology Inc Position detection device
JP2010078410A (en) * 2008-09-25 2010-04-08 Mitsubishi Electric Corp Method and apparatus for manufacturing magnetic type rotary encoder

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JP2006118962A (en) * 2004-10-21 2006-05-11 Dimac Co Ltd Magnetic encoder

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JPH1038617A (en) * 1996-07-22 1998-02-13 Omron Corp Rotary encoder, its manufacture, and optical member-holding tool
JP2004245644A (en) * 2003-02-12 2004-09-02 Sony Precision Technology Inc Position detection device
JP2010078410A (en) * 2008-09-25 2010-04-08 Mitsubishi Electric Corp Method and apparatus for manufacturing magnetic type rotary encoder

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