JP2006118962A - Magnetic encoder - Google Patents

Magnetic encoder Download PDF

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JP2006118962A
JP2006118962A JP2004306520A JP2004306520A JP2006118962A JP 2006118962 A JP2006118962 A JP 2006118962A JP 2004306520 A JP2004306520 A JP 2004306520A JP 2004306520 A JP2004306520 A JP 2004306520A JP 2006118962 A JP2006118962 A JP 2006118962A
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magnetic
scale
detection member
attached
moving
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Hiroshi Ogawa
洋 小川
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DIMAC CO Ltd
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DIMAC CO Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To keep the magnetic flux density of magnetic poles nearly constant to perform position detection for a mobile unit stably for a long term by preventing ambient magnetic powder such as iron powder from adhering to a magnetic scale by magnetically adsorbing it with magnetic adsorption members. <P>SOLUTION: Covers 13/15 covering the magnetic scale 9 are attached to either the magnetic scale 9 or a magnetic detection member 11 which constitute a magnetic encoder 1. The magnetic adsorption members 23/25 are attached to openings 19/21 formed between the magnetic detection member 11 and the covers 13/15. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、例えばロボットや工作機械等において直線移動する移動体の移動位置や移動量(以下、特に断りがない範囲で移動位置及び移動量を移動位置と称する。)を検出する磁気エンコーダ、詳しくは工場雰囲気中の鉄粉等の磁性体粉が磁気スケールに付着して移動体の移動位置検出精度が悪くなるのを防止する磁気エンコーダに関する。   The present invention relates to a magnetic encoder that detects a moving position and a moving amount of a moving body that moves linearly in, for example, a robot or a machine tool (hereinafter, the moving position and moving amount are referred to as a moving position unless otherwise specified). Relates to a magnetic encoder for preventing magnetic substance powder such as iron powder in a factory atmosphere from adhering to a magnetic scale and deteriorating the accuracy of detecting the moving position of the moving object.

例えば特許文献1に示すように工作機械の本体フレーム上にて直線移動する移動体の移動位置を検出するため、本体フレームに、所望の検出分解能幅からなる異なる磁極(N極及びS極)が交互に着磁された磁気スケールを移動体の移動方向に沿って取付けると共に移動体に、磁気スケールからの磁界変化を検出して電気信号を出力するホール素子等の磁気検出部材を取付け、移動体の移動に伴って磁気検出部材から出力される電気信号により移動体の移動位置を検出する磁気エンコーダが知られている。   For example, as shown in Patent Document 1, in order to detect a moving position of a moving body that moves linearly on a main body frame of a machine tool, different magnetic poles (N pole and S pole) having a desired detection resolution width are provided on the main body frame. The magnetic scale alternately magnetized is attached along the moving direction of the moving body, and the moving body is attached with a magnetic detection member such as a hall element that detects a magnetic field change from the magnetic scale and outputs an electric signal. There is known a magnetic encoder that detects a moving position of a moving body based on an electric signal output from a magnetic detection member along with the movement.

上記した磁気エンコーダは、LEDやレーザ光を使用した光学式エンコーダに比べて埃等による位置検出エラーが少なく、長期にわたって移動体の移動位置を高精度で、かつ安定的に検出できる特徴を有している。   The magnetic encoder described above has features that it can detect the moving position of a moving body with high accuracy and stability over a long period of time, with fewer position detection errors due to dust and the like than optical encoders using LEDs and laser light. ing.

しかし、鉄粉等の磁性体粉が多く発生する工場内に設置される工作機械等の磁気エンコーダにあっては、工場雰囲気中の鉄粉が磁気スケールに磁気吸着され易く、磁気スケールに磁性体粉が磁気吸着された場合にあっては、磁気スケールにおける各磁極の磁束密度が低くなり、磁気検出部材からは正常時に比べて低い電流値の電気信号が出力されることになる。このため、電気信号の電流値が位置検出信号を出力するために設定された所定の敷居値以下の場合には、位置検出信号を出力せずに位置検出が不能になり、また所定の敷居値以上の場合であっても、その時間幅が短くなって位置検出動作が不安定なるおそれがあった。
特開平2004−191261号公報
However, in a magnetic encoder such as a machine tool installed in a factory where a large amount of magnetic powder such as iron powder is generated, the iron powder in the factory atmosphere is likely to be magnetically attracted to the magnetic scale. When the powder is magnetically attracted, the magnetic flux density of each magnetic pole in the magnetic scale becomes low, and an electric signal having a lower current value than that in the normal state is output from the magnetic detection member. For this reason, when the current value of the electrical signal is equal to or less than the predetermined threshold value set for outputting the position detection signal, the position detection cannot be performed without outputting the position detection signal, and the predetermined threshold value is set. Even in the above case, the time width may be shortened and the position detection operation may become unstable.
Japanese Patent Laid-Open No. 2004-191261

解決しようとする問題点は、工場雰囲気中の鉄粉等の磁性体が磁気スケールに付着して各磁極の磁束密度が低くなることにより位置検出が不能になったり、位置検出精度が悪くなり、長期にわたって安定して移動体の位置検出ができない点にある。   The problem to be solved is that the magnetic substance such as iron powder in the factory atmosphere adheres to the magnetic scale and the magnetic flux density of each magnetic pole becomes low, so the position detection becomes impossible or the position detection accuracy deteriorates. The position of the moving body cannot be detected stably over a long period of time.

本発明は、磁気エンコーダを構成する磁気スケール及び磁気検出部材のいずれかには磁気スケールを覆うカバーを取付けると共に磁気検出部材とカバーとの間に形成される開口部に磁気吸着部材を取付けたことを最も主要な特徴とする。   In the present invention, a cover that covers the magnetic scale is attached to one of the magnetic scale and the magnetic detection member constituting the magnetic encoder, and a magnetic adsorption member is attached to an opening formed between the magnetic detection member and the cover. Is the most important feature.

本発明は、磁気吸着部材により雰囲気中の鉄粉等の磁性体粉を磁気吸着して磁気スケールに付着するのを防止することにより各磁極の磁束密度をほぼ一定に保ち、移動体の位置検出を長期にわたって安定的に行うことができる。   The present invention maintains the magnetic flux density of each magnetic pole substantially constant by magnetically adsorbing magnetic powder such as iron powder in the atmosphere by the magnetic adsorption member and preventing it from adhering to the magnetic scale, thereby detecting the position of the moving body. Can be stably performed over a long period of time.

本発明は、磁気スケールを覆うカバーと磁気検出部材との間に形成される開口部に磁気吸着部材を取付けた構成を最良の形態とする。   In the present invention, a configuration in which a magnetic adsorption member is attached to an opening formed between a cover that covers the magnetic scale and the magnetic detection member is the best mode.

以下に実施形態を示す図に従って本発明を説明する。
図1〜図3において、磁気エンコーダ1が取付けられる移動装置3は、例えば産業ロボットや工作機械等で、本体フレーム5上に移動体7を長手方向へ直線移動するように設けて構成される。そして本体フレーム5には磁気エンコーダ1の一部を構成する磁気スケール9が移動体7の移動方向と平行に取付けられる。
The present invention will be described below with reference to the drawings showing embodiments.
1 to 3, the moving device 3 to which the magnetic encoder 1 is attached is configured by, for example, an industrial robot or a machine tool so that the moving body 7 is linearly moved in the longitudinal direction on the main body frame 5. A magnetic scale 9 constituting a part of the magnetic encoder 1 is attached to the main body frame 5 in parallel with the moving direction of the moving body 7.

磁気スケール9は移動体7の移動距離に応じた長さで、長手方向に対して移動体7の移動位置検出分解能に応じた幅の異なる磁極(N極及びS極)が、長手方向に対して交互に着磁されている。尚、上記した移動体7は、例えばサーボモータ及びこれに連結した直線移動機構(図示せず)により本体フレーム5上を長手方向へ往復移動制御される。   The magnetic scale 9 has a length corresponding to the moving distance of the moving body 7, and magnetic poles (N pole and S pole) having different widths according to the moving position detection resolution of the moving body 7 with respect to the longitudinal direction are in the longitudinal direction. Are alternately magnetized. The moving body 7 is controlled to reciprocate in the longitudinal direction on the main body frame 5 by, for example, a servo motor and a linear moving mechanism (not shown) connected thereto.

移動体7には磁気エンコーダ1の一部を構成する磁気検出部材としての磁気センサ11が、磁気スケール9に対して磁界検出可能な微小間隙をおいて相対するように取付けブラケット12を介して取付けられている。該磁気センサ11は、例えば磁気誘電形磁気センサ、ホール素子、磁気ダイオード、磁気抵抗素子等により構成され、移動体7の移動に伴って変化する磁気スケール9における各磁極による磁界により、例えばN極から次のS極を360°とする正弦波の電気信号を出力して移動体7の移動位置を検出する。   A magnetic sensor 11 as a magnetic detection member constituting a part of the magnetic encoder 1 is attached to the moving body 7 via a mounting bracket 12 so as to be opposed to the magnetic scale 9 with a minute gap capable of detecting a magnetic field. It has been. The magnetic sensor 11 is composed of, for example, a magnetodielectric magnetic sensor, a Hall element, a magnetic diode, a magnetoresistive element, and the like. From this, a sine wave electrical signal for setting the next S pole to 360 ° is output to detect the moving position of the moving body 7.

尚、上記説明は、磁気スケール9における各磁極幅を移動体7の移動位置検出分解能に応じた幅としたが、各磁極に応じて出力される電気信号を所望の数で分周することにより移動体7の移動位置検出分解能を高精度化することができる。   In the above description, each magnetic pole width in the magnetic scale 9 is set to a width corresponding to the moving position detection resolution of the moving body 7. However, by dividing the electric signal output according to each magnetic pole by a desired number, The moving position detection resolution of the moving body 7 can be improved.

本体フレーム5にはカバー13・15が磁気スケール9の全体を覆い、かつ移動体7の移動を許容するように取付けられている。一方のカバー13は、一端部が磁気スケール9の上方にて本体フレーム5に固定され、他端部が移動体7に取付けられた磁気センサ11側へ延出した後に取付けブラケット12の一面(図示する右面)に沿い、かつ移動体7の移動を許容するための間隙19を有して垂下するように構成される。   Covers 13 and 15 are attached to the main body frame 5 so as to cover the entire magnetic scale 9 and allow the moving body 7 to move. One cover 13 has one end fixed to the main body frame 5 above the magnetic scale 9 and the other end extending to the side of the magnetic sensor 11 attached to the moving body 7 and then being attached to one surface of the mounting bracket 12 (illustrated). And a gap 19 for allowing the moving body 7 to move.

また、他方のカバー15は一端部が磁気スケール9の下方にて本体フレーム5に固定され、他端部が取付けブラケット12の他面(図示する左面)に対して移動体7の移動を許容する間隙21を有するように構成される。そして取付けブラケット12のそれぞれの面に相対するカバー13・15における他端部には磁気吸着部材23・25が、カバー13・15の長手方向全体にわたる長さで、移動体7に対して非接触の状態で取付けられている。各磁気吸着部材23・25としては棒状の永久磁石、永久磁石粉が混入された合成樹脂磁気シート、または磁気ゴムシート等のいずれであってもよいが、磁気スケール9における各磁極の磁束密度に影響しない程度の磁界強度であればよい。尚、カバー13・15の長手方向両端の開口は閉鎖板14により閉鎖されている。 One end of the other cover 15 is fixed to the main body frame 5 below the magnetic scale 9, and the other end allows the moving body 7 to move with respect to the other surface (the left surface in the drawing) of the mounting bracket 12. It is configured to have a gap 21. Then, the magnetic attracting members 23 and 25 are disposed at the other ends of the covers 13 and 15 facing the respective surfaces of the mounting bracket 12 and are not in contact with the moving body 7 with a length extending over the entire length of the covers 13 and 15. It is installed in the state of. Each of the magnetic attracting members 23 and 25 may be a rod-like permanent magnet, a synthetic resin magnetic sheet mixed with permanent magnet powder, or a magnetic rubber sheet. Any magnetic field strength that does not affect is sufficient. The openings at both ends in the longitudinal direction of the covers 13 and 15 are closed by a closing plate 14.

次に、上記した磁気エンコーダ1の作用を説明する。
先ず、移動体7の移動位置(移動量)検出作用の概略を説明すると、本体フレーム5に対する移動体7が直線移動されると、磁気センサ11は磁気スケール9のおける各磁極からの磁界を検出して図4に示す正弦波の電気信号を出力する。位置検出制御回路(図示せず)は電気信号の電流値が予め設定された敷居値以上の時に位置検出信号を出力し、この位置検出信号に基づいてカウンタ回路(図示せず)を順にインクリメントすることにより移動体7の移動位置を検出する。
Next, the operation of the magnetic encoder 1 will be described.
First, the outline of the movement position (movement amount) detection operation of the moving body 7 will be described. When the moving body 7 is linearly moved with respect to the main body frame 5, the magnetic sensor 11 detects the magnetic field from each magnetic pole in the magnetic scale 9. Then, a sine wave electrical signal shown in FIG. 4 is output. A position detection control circuit (not shown) outputs a position detection signal when the current value of the electric signal is equal to or greater than a preset threshold value, and sequentially increments a counter circuit (not shown) based on the position detection signal. Thus, the moving position of the moving body 7 is detected.

今、移動装置3が設置された場所の雰囲気中に鉄粉等の磁性体粉が多く浮遊する環境下においては、雰囲気中の鉄粉が磁気スケール9の各磁極に磁気吸着されることになる。磁気スケール9に鉄粉が磁気吸着されると、磁気スケール9における各磁極の磁束密度が低くなり、磁気スケール9に沿って移動する移動体7の磁気センサ11から出力される電気信号の電流値が、正常時に比べて低くなる。 Now, in an environment where a large amount of magnetic powder such as iron powder floats in the atmosphere where the moving device 3 is installed, the iron powder in the atmosphere is magnetically attracted to each magnetic pole of the magnetic scale 9. . When iron powder is magnetically attracted to the magnetic scale 9, the magnetic flux density of each magnetic pole in the magnetic scale 9 becomes low, and the current value of the electric signal output from the magnetic sensor 11 of the moving body 7 that moves along the magnetic scale 9. However, it is lower than normal.

この結果、図4に一点鎖線で示すように磁気センサ11から出力される電気信号の電流値が位置検出信号を出力するための所定の敷居値より低い場合には、位置検出信号を出力することができずに位置検出不能になる。また、図4に二点鎖線で示すように電気信号の電流値が敷居値以上であっても、その時間幅が短くなって位置検出信号の出力状態が不安定になる結果、移動体7の移動位置を確実に検出できなくなったり、位置検出精度が悪くなるおそれがある。 As a result, when the current value of the electrical signal output from the magnetic sensor 11 is lower than a predetermined threshold value for outputting the position detection signal, as shown by the one-dot chain line in FIG. 4, the position detection signal is output. Cannot detect the position. Further, as shown by a two-dot chain line in FIG. 4, even if the current value of the electric signal is equal to or greater than the threshold value, the time width becomes short and the output state of the position detection signal becomes unstable. There is a possibility that the moving position cannot be reliably detected or the position detection accuracy is deteriorated.

本実施例は、これを防止するため、移動体7の移動を許容して磁気スケール9の全体を覆うカバー13・15と取付けブラケット12との間に形成される間隙19・21の箇所に磁気吸着部材23・25を取付け、これら磁気吸着部材23・25によりカバー13・15で覆われた空間内に進入しようとする鉄粉を磁気吸着して内部に進入するのを規制して鉄粉が磁気スケール9に付着するのを防止する。これにより磁気スケール9における各磁極の磁束密度をほぼ一定に保って磁気センサ11が出力される電気信号を安定化し、磁気センサ11による移動体7の移動位置検出を長期にわたって安定的に行うことを可能にする。 In the present embodiment, in order to prevent this, the moving body 7 is allowed to move, and the magnets 19 and 21 are formed in the gaps 19 and 21 formed between the covers 13 and 15 and the mounting bracket 12 that cover the entire magnetic scale 9. The adsorbing members 23 and 25 are attached, and the magnetic adsorbing members 23 and 25 magnetically adsorb the iron powder to enter the space covered with the covers 13 and 15 to restrict the adhering to the inside. This prevents adhesion to the magnetic scale 9. This stabilizes the electric signal output from the magnetic sensor 11 while keeping the magnetic flux density of each magnetic pole in the magnetic scale 9 substantially constant, and makes it possible to stably detect the moving position of the moving body 7 by the magnetic sensor 11 over a long period of time. enable.

上記説明は、本体フレーム5に対して磁気スケール9を固定的に取付けると共に移動する移動体7に磁気センサ11を取付けて磁気スケール9と磁気センサ11とを相対移動させる構成としたが、本体フレーム5に対して磁気センサ11を固定的に取付けると共に移動する移動体7に磁気スケール9を取付けて両者を相対移動させる構成であってもよい。この場合にあっては、図5に示すように移動体7に取付けられたブラケット61に長手方向に延出する取付け板63を取付け、本体フレーム5に取付けられた磁気センサ11に相対する取付け板63の面に長尺状の磁気スケール9を取付ける。また、磁気スケール9上部及び下部に応じた取付け板63にカバー65・67を、磁気スケール9の全体を覆うように取付け、本体フレーム5に相対するカバー65・67の面に磁気吸着部材69・71を非接触状態で取付けた構成にすればよい。 In the above description, the magnetic scale 9 is fixedly attached to the main body frame 5 and the magnetic sensor 11 is attached to the moving body 7 that moves, and the magnetic scale 9 and the magnetic sensor 11 are relatively moved. 5 may be configured such that the magnetic sensor 11 is fixedly attached to 5 and the magnetic scale 9 is attached to the moving body 7 that moves and the two are relatively moved. In this case, as shown in FIG. 5, a mounting plate 63 extending in the longitudinal direction is mounted on a bracket 61 mounted on the moving body 7, and a mounting plate facing the magnetic sensor 11 mounted on the main body frame 5. A long magnetic scale 9 is attached to the surface 63. Further, covers 65 and 67 are attached to attachment plates 63 corresponding to the upper and lower portions of the magnetic scale 9 so as to cover the entire magnetic scale 9, and the magnetic attracting members 69 and 67 are attached to the surfaces of the covers 65 and 67 facing the main body frame 5. What is necessary is just to make it the structure which attached 71 in the non-contact state.

上記説明は、1個の磁気センサ9により移動体7の移動位置を検出する構成を実施例としたが、本発明は2個の磁気検出部材により移動体の移動位置と共に移動方向を検出する構成であってもよいことは勿論である。 In the above description, the configuration in which the moving position of the moving body 7 is detected by one magnetic sensor 9 is described as an example. Of course, it may be.

磁気エンコーダが取付けられる移動装置の概略を示す説明図である。It is explanatory drawing which shows the outline of the moving apparatus to which a magnetic encoder is attached. 磁気エンコーダ箇所を拡大して示す説明図である。It is explanatory drawing which expands and shows a magnetic encoder location. 図2のA−A線縦断面図である。FIG. 3 is a longitudinal sectional view taken along line AA in FIG. 2. 磁気センサから出力される電気信号の波形図である。It is a wave form diagram of the electric signal output from a magnetic sensor. 本発明の変更実施例を示す説明図である。It is explanatory drawing which shows the modified Example of this invention.

符号の説明Explanation of symbols

1 磁気エンコーダ
7 移動体
9 磁気スケール
11 磁気検出部材としての磁気センサ
13・15 カバー
19・21 間隙
23・25 磁気吸着部材
DESCRIPTION OF SYMBOLS 1 Magnetic encoder 7 Moving body 9 Magnetic scale 11 Magnetic sensor 13 * 15 as a magnetic detection member Covers 19 * 21 Gap 23 * 25 Magnetic adsorption member

Claims (5)

長手方向に対して異なる磁極を交互に配列した磁気スケール及び磁気スケールに対して所望のギャップを設けて相対するように配置し、磁界の変化に基づいて電気信号を出力する磁気検出部材を備え、磁気スケール及び磁気検出部材の相対移動に伴って移動体の移動位置を検出する磁気エンコーダにおいて、磁気スケール及び磁気検出部材のいずれかには磁気スケールを覆うカバーを取付けると共に磁気検出部材とカバーとの間に形成される開口部に磁気吸着部材を取付けた磁気エンコーダ。 A magnetic scale in which different magnetic poles are alternately arranged with respect to the longitudinal direction and a magnetic detection member that is arranged so as to face the magnetic scale with a desired gap and outputs an electric signal based on a change in the magnetic field, In the magnetic encoder for detecting the moving position of the moving body in accordance with the relative movement of the magnetic scale and the magnetic detection member, a cover that covers the magnetic scale is attached to either the magnetic scale or the magnetic detection member, and the magnetic detection member and the cover A magnetic encoder having a magnetic attracting member attached to an opening formed therebetween. 請求項1のカバーは、磁気スケール側に対し、磁気検出部材と非干渉状態となるように固定した磁気エンコーダ。 2. The magnetic encoder according to claim 1, wherein the cover is fixed to the magnetic scale side so as not to interfere with the magnetic detection member. 請求項1のカバーは、磁気検出部材側に対し、磁気スケールと非干渉状態となるように固定した磁気エンコーダ。 2. The magnetic encoder according to claim 1, wherein the cover is fixed to the magnetic detection member side so as not to interfere with the magnetic scale. 請求項1の磁気吸着部材は、相対する磁気スケール又は磁気検出部材に対して微小間隙を設けて非接触状態となるように取付けた磁気エンコーダ。 The magnetic attraction member according to claim 1 is a magnetic encoder attached so as to be in a non-contact state by providing a minute gap with respect to an opposing magnetic scale or magnetic detection member. 請求項1の磁気吸着部材は、磁気シートとした磁気エンコーダ。 2. The magnetic encoder according to claim 1, wherein the magnetic adsorption member is a magnetic sheet.
JP2004306520A 2004-10-21 2004-10-21 Magnetic encoder Pending JP2006118962A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013181757A (en) * 2012-02-29 2013-09-12 Mitsubishi Heavy Ind Ltd Film sheet for gap adjustment and linear scale gap adjustment method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013181757A (en) * 2012-02-29 2013-09-12 Mitsubishi Heavy Ind Ltd Film sheet for gap adjustment and linear scale gap adjustment method using the same

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