WO2013125792A1

WO2013125792A1 - System for separating and reusing perfluorocarbon compound

Info

Publication number: WO2013125792A1
Application number: PCT/KR2013/000479
Authority: WO
Inventors: 노영석
Original assignee: (주) 파인텍
Priority date: 2012-02-23
Filing date: 2013-01-21
Publication date: 2013-08-29
Also published as: KR101410914B1; KR20130096877A

Abstract

The present invention relates to a system for separating and reusing a perfluorocarbon compound, developed so as to effectively separate, discard or reuse a perfluorocarbon compound comprising sulfur hexafluoride, the perfluorocarbon compound being generated primarily during manufacturing of semiconductors. The system, for separating and reusing a perfluorocarbon compound, which handles gas comprising dust generated by discharge gas-emitting installations using or generating perfluorocarbons, such as a dry-etching process and a CVD cleansing chamber, comprises a first dry pump, a pre-processing filter, a membrane separation filter, a nitrogen reuse supply unit, a sulfur hexafluoride reuse supply unit, and a control unit, and thus facilitates separation and removal of a variety of gases and dust comprising perfluorocarbons generated by the electronics industry, and allows reuse of sulfur hexafluoride by separating same from the discharge gas and reprocessing same, thereby raising the effectiveness of discharge gas separation.

Description

Perfluorinated Compound Separation and Recycling System

The present invention relates to a separation and recycling system of perfluorinated compounds, and more specifically, to develop a method for effectively separating and removing or recycling perfluorinated compounds including sulfur hexafluoride mainly generated in a semiconductor production process. The present invention relates to a separation and recycling system for purified perfluorinated compounds.

Recent changes in climate and ecosystem due to global warming have become more prominent, and interest in this has increased day by day, and interest in the regulation of greenhouse gas emission, which is the main cause, has also increased worldwide.

But for most people, greenhouse gases are carbon dioxide from fossil fuels.

) But only methane (

), Nitrous oxide (

) And hydrofluorocarbons (perfluoro compounds)

) And perfluorocarbon (

) And sulfur hexafluoride (

) Is also a major cause of global warming.

This means that the ratio of 12.2% of carbon dioxide is rapidly increasing, which means that a lot of emissions are generated. The proportion of perfluorinated compounds emitted in related fields is 4.4%, which can be said to be quite large.

In particular, in order to form a pattern on a substrate, sulfur hexafluoride is formed by using a plasma apparatus to produce F- ions, and the etching process reacts with an insulator and etches it.

) And silicon hexafluoride (

) And the like.

In addition, the CVD cleaning process (chamber cleaning) process using an insulator (plasma etching method)

To remove the coating layer coated with)

Gas, where dust,

,

And back.

Various gases including such dust are mixed with a large amount of nitrogen for protection of the pump and equipment, and then sucked into the dry pump and are sent to a post-treatment facility where most gas scrubbers are currently installed.

However, the current gas scrubber technology has a method of removing at a high temperature by electricity and fuel, a chemical treatment method, and a plasma treatment method, but each has problems such as high operating cost, large-capacity treatment, or low processing efficiency. It was a situation to have.

But non-carbon dioxide (

As the regulation of greenhouse gases in the series increases, regulations on facilities that emit specific gases are gradually strengthened in the country, and it is necessary to develop technologies to remove and recycle them more efficiently.

The present invention was developed to solve the above problems, the object of the perfluorinated compound separation and recycling system that can easily separate and remove various gases and dust including perfluorinated compounds generated in the electronics industry It's about developing.

In addition, it is to develop a perfluorinated compound separation and recycling system for separating and reprocessing sulfur hexafluoride and nitrogen in flue gas.

In addition, the present invention is to develop a perfluorinated compound separation and recycling system capable of increasing the separation efficiency of flue gas.

In order to achieve the above object, the present invention uses a perfluorinated compound, such as a dry etching process and a CVD cleaning chamber, or separates and recycles a perfluorinated compound for treating a gas including dust generated in a flue gas generating facility. To;

A first dry pump for sucking exhaust gas generated in at least one flue gas generating facility;

The first chamber, the water filled in the lower portion of the first chamber, the exhaust gas inlet through which the exhaust gas sucked from the first dry pump flows directly above the water surface, and the exhaust gas introduced into the exhaust gas inlet rises to pass therethrough. An alkaline adsorbent layer, a plurality of water spray nozzles into which a portion of the water filled in the lower part flows, and spraying water to the upper portion of the alkaline adsorbent layer, a water adsorption filter formed on the water spray nozzles, and the water adsorption filter A pretreatment filter composed of an exhaust gas discharge part formed at an upper portion of the exhaust gas;

A plurality of separation holes having a diameter of 3 to 4 angstroms is formed in the second chamber and at least one inside of the second chamber, and the exhaust gas passing through the pretreatment filter is introduced so that nitrogen is separated into the separation holes. A membrane separation filter which passes through and is discharged to the nitrogen discharge unit and does not pass through the sulfur hexafluoride to discharge to the sulfur hexafluoride discharge unit for combustion;

A second dry pump for sucking nitrogen discharged to the nitrogen discharge unit, a nitrogen discharge pipe for discharging nitrogen into the atmosphere, a nitrogen tank filled with nitrogen, and a resupply supplying nitrogen to the tank from the second dry pump A nitrogen recycling supply unit comprising a pipe and a nitrogen supply pipe for supplying nitrogen from the nitrogen tank to the first dry pump;

A sulfur hexafluoride recycling supply unit including a sulfur hexafluoride tank filled with sulfur hexafluoride discharged to the sulfur hexafluoride discharge unit, and a sulfur hexafluoride supply pipe for supplying sulfur hexafluoride to at least one flue gas generating facility;

A first flow rate sensor for detecting a flow rate of sulfur hexafluoride gas supplied to the flue gas generating facility, a second flow rate sensor for detecting a flow rate of flue gas before reaching the first dry pump, and a flow rate of the nitrogen supply pipe A third flow rate sensor for sensing, a fourth flow rate sensor for sensing the flow rate discharged to the exhaust gas discharge part, a fifth flow rate sensor for detecting the flow rate of the nitrogen discharge part, and a sixth level for detecting the flow rate of the sulfur hexafluoride discharge part A first branch pipe connected to the exhaust gas inlet of the pretreatment filter by a first branch valve after passing the flow rate sensor, the fourth flow sensor, and branched by the second branch valve after passing the fifth flow sensor. And a second branch line for reflowing into the membrane separation filter, and a third branch line for branching by the third branch valve after the sixth flow sensor and reentering the membrane separation filter. It characterized by consisting of a control unit for.

In addition, the control unit has a flow rate of the fourth flow sensor is the second flow sensor, the fifth flow sensor is the third flow sensor, the sixth flow sensor compared to the first flow sensor when the latter is 90% or more of the former, respectively The first to third branch valves are configured to open the first to third branch pipes, respectively.

As described above, the present invention makes it possible to easily remove various dusts and other gases as well as greenhouse gases, which are the main culprit of greenhouse gases, in stages by a pretreatment filter and a membrane separation filter, thereby drastically reducing the amount of air pollution and greenhouse gas emissions. It can be effective.

In addition, the sulfur hexafluoride is separated by nitrogen and the membrane separation filter and then reused in the exhaust gas generating facility to reduce the operating cost and to recycle the raw materials.

In addition, when the separation rate is low by the controller, the filtering may be filtered again to maximize processing efficiency.

1 is a conceptual diagram according to an embodiment of the present invention

2 is a conceptual diagram illustrating a configuration of a controller according to an embodiment of the present invention.

3 is a conceptual diagram illustrating a membrane separation filter according to an embodiment of the present invention.

4 is a conceptual view illustrating the opening of a first branch valve according to an embodiment of the present invention.

5 is a conceptual view showing the opening of the second branch valve according to an embodiment of the present invention.

6 is a conceptual view illustrating the opening of a third branch valve according to an embodiment of the present invention.

Accordingly, the configuration of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily understand and reproduce.

1 is a conceptual diagram according to an embodiment of the present invention, Figure 2 is a conceptual diagram showing the configuration of a control unit according to an embodiment of the present invention, Figure 3 is a conceptual diagram showing a membrane separation filter according to an embodiment of the present invention A system for separating and recycling a perfluorinated compound for treating a gas containing dust generated in an off-gas generating facility (1) generated or using a perfluorinated compound such as a dry etching process and a CVD cleaning chamber;

The present application includes a first dry pump 2 for sucking exhaust gas generated in one or more flue gas generating facilities 1.

At this time, the exhaust gas refers to the discharged gas, and particularly in the dry etching process, sulfur hexafluoride (

), Promethium (PM) and silicon tetrafluoride (

) And oxygen (

)and,

And various dusts are discharged.

Since various gases and dusts containing such perfluorinated compounds have a property of rapidly corroding each part of the first dry pump 2, nitrogen is mixed by the nitrogen recycling supply unit 5 described below to prevent damage to the apparatus. Configuration is essential.

The nitrogen-mixed exhaust gas is filled in the first chamber 31, the water 32 filled in the lower portion of the first chamber 31, and the first dry pump 2 directly above the water surface of the water 32. The exhaust gas inlet 33 through which the sucked exhaust gas is introduced, the alkaline adsorbent layer 34 allowing the exhaust gas introduced into the exhaust gas inlet 33 to rise, and a portion of the water filled in the lower portion are introduced into the alkaline property. A plurality of water spray nozzles 35 for spraying water 32 onto the adsorbent layer 34, a water adsorption filter 36 and the water adsorption filter 36 formed on the water spray nozzles 35. Pass through the pre-treatment filter (3) consisting of the exhaust gas discharge portion 37 formed in the upper portion of the).

The pretreatment filter 3 is a wet filter as nitrogen (

) And sulfur hexafluoride (

Promethium (PM) and silicon tetrafluoride (

) And oxygen (

)and,

And the first flue gas is acidic by adsorbing various dusts, and after purifying them, the final moisture adsorption filter 36 finally adsorbs the fine dust together with the moisture, and finally nitrogen (

) And sulfur hexafluoride (

) Will remain.

Such nitrogen (

) And sulfur hexafluoride (

) Is formed in the second chamber 41 and at least one inside the second chamber 41 to form a plurality of separation holes 42 having a diameter of 3 to 4 angstroms. 3) After passing through the exhaust gas, the nitrogen passes through the separation hole 42 and is discharged to the nitrogen discharge part 43, and the sulfur hexafluoride does not pass and discharges to the sulfur hexafluoride discharge part 44 to burn. Pass through the separation filter (4).

The membrane separation filter (4) is a filter using the size of the particles in the case of nitrogen particle size 3 ohms (Å) and in the case of sulfur hexafluoride (5 ohms) to exit the separation hole 42 only nitrogen It is a structure to make it possible.

Omstrom (Å) refers to the length of 0.1 nanometers.

When the discharged sulfur hexafluoride is burned by a high-efficiency Burn-WET scrubber or burn scrubber using the combustion property, the removal efficiency is greatly improved as the concentration of the sulfur hexafluoride introduced is high.

In addition, in the case of separated nitrogen, a second dry pump 51 for sucking nitrogen discharged to the nitrogen discharge part 43, a nitrogen discharge pipe 52 for discharging nitrogen into the atmosphere, and a nitrogen tank filled with nitrogen ( 53, a resupply pipe 54 for supplying nitrogen from the second dry pump 51 to the tank 53, and nitrogen from the nitrogen tank 53 to the first dry pump 2 Nitrogen recycling supply unit 5 consisting of a nitrogen supply pipe (55) to recycle and circulate, and nitrogen can be selectively discharged or recycled because it is a gas that does not matter at all in the atmosphere.

In addition, the sulfur hexafluoride supply pipe (62) for supplying sulfur hexafluoride to the sulfur hexafluoride tank 61 is filled with the sulfur hexafluoride discharged to the sulfur hexafluoride discharge unit 44 and the one or more flue gas generating facilities (62) The structure of the sulfur hexafluoride recycling supply unit (6) consisting of) is connected to a system for separating perfluoro compounds from sulfur hexafluoride gas mainly used in the nicking process to store and recycle high-purity sulfur hexafluoride gas. The solution is presented.

At this time, the sulfur hexafluoride tank (61) is shown in the form of being directly connected to the sulfur hexafluoride supply pipe (62), but this may be supplied by direct piping and supplied to each industrial site in a separate storage facility using a vehicle or the like. It is presented a flow.

Here, the present application detects the flow rate of the exhaust gas before reaching the first dry pump 2 and the first flow sensor 71 for detecting the flow rate of sulfur hexafluoride gas supplied to the exhaust gas generating facility (1) The second flow rate sensor 72, the third flow rate sensor 73 for detecting the flow rate of the nitrogen supply pipe 55, and the fourth flow rate sensor 74 for detecting the flow rate discharged to the exhaust gas discharge portion 37 ), A fifth flow rate sensor 75 that detects the flow rate of the nitrogen discharge part 43, a sixth flow rate sensor 76 that detects the flow rate of the sulfur hexafluoride discharge part 44, and the fourth flow rate sensor 76. After passing through the flow sensor 74, the first branch pipe 77 is branched to the exhaust gas inlet 33 of the pretreatment filter 3 by the first branch valve (77a) and the fifth flow sensor ( After passing through the second branch valve (78a) and the second branch pipe 78 and the sixth flow sensor 76 through the sixth flow sensor 76 after passing through the membrane separation filter (4) minute A control unit 7 including a third branch conduit 79 for branching by the valve 79a to be re-introduced into the membrane separation filter 4 is configured to control components separated at each step to maximize efficiency. It was made.

A detailed description of the operation of the control unit 7 will be described later in detail.

4 is a conceptual diagram illustrating the opening of a first branch valve according to an embodiment of the present invention, wherein the controller 7 has a flow rate of the fourth flow rate sensor 74 compared to the second flow rate sensor 72. An embodiment in which the first branch valve 77a is opened to the first branch pipe 77 when each of the electrons is 90% or more is presented.

In the above embodiment, 90% means promethium (PM) and silicon tetrafluoride (PM) in the pretreatment filter (3).

) And oxygen (

)and,

And at the same time that various dusts have been removed below 10%, the exhaust gas flowing into the membrane separation filter 4 is nitrogen (

) And sulfur hexafluoride (

), But also means that it contains many other substances.

Therefore, high purity nitrogen (

) And sulfur hexafluoride (

Exhaust gas consisting of) is introduced into the membrane separation filter 4 to increase the treatment efficiency, and the first branch valve 77a is a three-phase valve.

5 is a conceptual view illustrating the opening of a first branch valve according to an exemplary embodiment of the present invention, wherein the controller 7 is the fifth flow rate sensor 75 compared with the third flow rate sensor 73. An embodiment in which the second branch valve 77a is configured to open the second branch pipe 77 when it is 90% or more is shown.

In consideration of the amount of nitrogen supplied from the third flow sensor 73, when 90% or more is detected by the fifth flow sensor 75, it is determined that sulfur hexafluoride is included, and then passes through the membrane separation filter 4 again. In an exemplary embodiment, the second branch valve 78a may be a four-phase valve if a three-phase valve or a pipeline for discharging the air is formed.

6 is a conceptual diagram illustrating the opening of a first branch valve according to an embodiment of the present invention, wherein the controller 7 includes the sixth flow sensor 76 compared with the first flow sensor 71. An embodiment configured to open the third branch conduit 79 from the third branch valve 79a when 90% or more is shown.

In consideration of the amount of sulfur hexafluoride supplied from the fourth flow sensor 74, when 90% or more is detected by the sixth flow sensor 76, it is determined that nitrogen is included, and then passes through the membrane separation filter 4 again. According to an embodiment, the third branch valve 79a may be a four-phase valve if a three-phase valve or a pipe for incineration sulfur hexafluoride is formed in an incinerator.

[Description of the code]

1: flue gas generator

2: first dry pump

3: pretreatment filter

31: first chamber 32: water

33: exhaust gas inlet 34: alkaline adsorbent layer

35 water spray nozzle 36 water adsorption filter

37: exhaust gas discharge unit

4: membrane separation filter

41: second chamber 42: separation hole

43: nitrogen outlet 44: sulfur hexafluoride outlet

5: nitrogen recycling supply unit

51: second dry pump 52: nitrogen discharge pipe

53: nitrogen tank 54: resupply piping

55: nitrogen supply piping

6: sulfur hexafluoride recycling supply unit

61: sulfur hexafluoride tank 62: sulfur hexafluoride supply piping

7: control unit

71: first flow valve 72: second flow valve

73: third flow valve 74: fourth flow valve

75: fifth flow valve 76: sixth flow valve

77a: first branch valve 77: first branch pipe

78a: second branch valve 78: second branch pipe

79a: third branch valve 79: third branch pipe

Claims

A system for separating and recycling a perfluorinated compound for treating a gas containing dust generated by a flue gas generating facility (1) using or using a perfluorinated compound such as a dry etching process and a CVD cleaning chamber;

A first dry pump 2 for sucking exhaust gas generated in at least one exhaust gas generating facility 1;

Exhaust gas into which the first chamber 31, the water 32 filled in the lower portion of the first chamber 31, and the exhaust gas sucked by the first dry pump 2 directly above the water surface of the water 32 are introduced. An inlet part 33, an alkaline adsorbent layer 34 for allowing the exhaust gas introduced to the exhaust gas inlet part 33 to rise and pass, and a portion of the water filled in the lower part are introduced to the upper portion of the alkaline adsorbent layer 34. A plurality of water spray nozzles 35 for injecting water 32 into the furnace, a water adsorption filter 36 formed on the water spray nozzle 35, and an exhaust gas formed on the water adsorption filter 36. A pretreatment filter 3 composed of a discharge part 37;

A plurality of separation holes 42 having a diameter of 3 to 4 angstroms are formed in the second chamber 41 and at least one inside the second chamber 41, and the pretreatment filter 3 is formed. The exhaust gas is passed through the nitrogen is passed through the separation hole 42 is discharged to the nitrogen discharge portion 43, the sulfur hexafluoride does not pass through the membrane separation filter to discharge to burn the sulfur hexafluoride discharge portion 44 (4);

A second dry pump 51 for sucking nitrogen discharged to the nitrogen discharge part 43, a nitrogen discharge pipe 52 for discharging nitrogen into the atmosphere, a nitrogen tank 53 filled with nitrogen, and the 2 a resupply pipe 54 for supplying nitrogen from the dry pump 51 to the tank 53, and a nitrogen supply pipe 55 for supplying nitrogen from the nitrogen tank 53 to the first dry pump 2; A nitrogen recycling supply unit (5) consisting of;

The sulfur hexafluoride tank 61 filled with sulfur hexafluoride discharged to the sulfur hexafluoride discharge unit 44 and the sulfur hexafluoride supply pipe 62 for supplying sulfur hexafluoride to one or more flue gas generating facilities 1. Sulfur hexafluoride recycling supply unit 6 is configured;

First flow sensor 71 for sensing the flow rate of sulfur hexafluoride gas supplied to the exhaust gas generating facility (1), and second flow sensor for sensing the flow rate of the exhaust gas before reaching the first dry pump (2) (72), a third flow rate sensor (73) for detecting the flow rate of the nitrogen supply pipe (55), a fourth flow rate sensor (74) for detecting the flow rate discharged to the exhaust gas discharge portion (37), and A fifth flow rate sensor 75 for detecting the flow rate of the nitrogen discharge portion 43, the sixth flow sensor 76 for detecting the flow rate of the sulfur hexafluoride discharge portion 44, and the fourth flow sensor 74 After passing through the first branch pipe 77 and the fifth flow sensor 75 is branched to the exhaust gas inlet 33 of the pretreatment filter 3 by the first branch valve (77a). After the second branch pipe (78a) branched by the second branch valve (78a) to be re-introduced into the membrane separation filter (4), and the sixth flow sensor 76, the third branch valve (79a) Of) And a control unit (7) comprising a third branch line (79) for branching and reflowing into the membrane separation filter (4).
The method of claim 1,

The control unit 7 has a flow rate of the fourth flow sensor 74 is the second flow sensor 72, the fifth flow sensor 75 is the third flow sensor 73, the sixth flow sensor 76 Compared to the first flow sensor 71, when the latter is 90% or more of the former, the first to third branch valves 77a, 78a and 79a respectively open the first to third branch pipes 77, 78 and 79, respectively. Separation and recycling system for perfluorinated compound, characterized in that it is configured to open.