WO2013116963A1 - 基于双波长激光管相位测量的校准方法及其测距装置 - Google Patents

基于双波长激光管相位测量的校准方法及其测距装置 Download PDF

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Publication number
WO2013116963A1
WO2013116963A1 PCT/CN2012/000422 CN2012000422W WO2013116963A1 WO 2013116963 A1 WO2013116963 A1 WO 2013116963A1 CN 2012000422 W CN2012000422 W CN 2012000422W WO 2013116963 A1 WO2013116963 A1 WO 2013116963A1
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WO
WIPO (PCT)
Prior art keywords
light
phase
filter
optical
light wave
Prior art date
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PCT/CN2012/000422
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English (en)
French (fr)
Inventor
杜鑫
qiaobaiwen
査晓怡
Original Assignee
江苏徕兹光电科技有限公司
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Application filed by 江苏徕兹光电科技有限公司 filed Critical 江苏徕兹光电科技有限公司
Priority to US14/378,066 priority Critical patent/US20150088448A1/en
Priority to EP12867875.2A priority patent/EP2813862A4/en
Publication of WO2013116963A1 publication Critical patent/WO2013116963A1/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4911—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Definitions

  • the invention belongs to the field of photoelectric measurement, and particularly relates to a calibration method based on phase measurement of a dual-wavelength laser tube and a distance measuring device thereof.
  • Laser has always been a proud invention of human beings. It is characterized by accuracy, speed, ease of use, and strong anti-interference.
  • the laser technology developed by this technology solves many technical obstacles that cannot be solved by traditional technologies, and uses laser technology and
  • the laser range finder integrated with electronic technology has been paid more and more attention in the fields of civil, military and industrial industries in terms of length, height, distance, speed and shape. It has been widely used in the following fields abroad: major industrial and mining enterprises , power petrochemical, water conservancy, communication, environment, building, geology, policing, fire, blasting, nautical, railway, anti-terrorism/military, scientific research institutions, agriculture, forestry, real estate, leisure/outdoor sports...
  • the laser ranging device based on the principle of measuring phase difference illuminates the object to be measured with a modulated laser beam, and the beam is reflected back by the object to be measured, and the phase change generated by the beam reciprocating process is converted into the distance of the measured object, and is applied to the short object.
  • Distance measurement with high precision the accuracy and accuracy of measurement are affected by the characteristics of the internal components of the device.
  • the higher the accuracy requirements of the laser ranging instrument the greater the complexity of the circuit and the demand for precision components. Therefore, environmental factors such as temperature and device lifetime have an effect on device performance, resulting in phase drift caused by the device.
  • the prior art mostly utilizes the phase difference compensation principle of the internal and external optical paths to eliminate the additional phase shift of the circuit system, and ensures that the measurement data is not affected by external factors.
  • the principle of phase difference compensation for eliminating additional phase shift is briefly described as follows:
  • the phase difference of the distance measurement signal after the internal optical path and the external optical path travel are respectively within and outside, which is an additional phase shift generated by the electronic signal generated by the internal signal generating device of the instrument during circuit transmission and photoelectric conversion.
  • ⁇ ⁇ changes the working state with the instrument in different environments, which is a random phase shift. It cannot be solved by accurate calculation. Therefore, when measuring distance, the inner and outer optical paths are alternately used for phase measurement. In a short time, it can be considered that there is no change in the additional phase shift, so the difference between the inner and outer optical paths is taken as the measurement result, that is,
  • Single-issue single-receiving system that is, single-channel transmitting beam single-channel receiving optical path signal, switching between internal and external optical paths through a controllable mechanical device, phase-correcting by calculating phase values of internal and external optical paths before and after switching, eliminating the environment Uncertain phase interference. Due to the use of physical and mechanical switches, the mechanical response time is long.. (usually hundreds of milliseconds), not real-time calibration, and the structure is relatively complicated, it is easy to produce mechanical grinding. Damage and failure, short service life, not suitable for use as industrial precision instruments. .
  • the traditional flashing single-receiving system that is, two channels independently transmit the same wavelength beam and receive the inner and outer optical path signals respectively through the receiving device, and the two receiving signals are separately processed and the phase difference is calculated, thereby eliminating the environmental uncertain phase. interference.
  • the system uses two independent photoelectric generating devices to generate two optical signals of the same wavelength respectively, and because of the two photoelectric generating devices, especially the laser tube, the working time of the internal and external optical paths is different during operation, and the difference between the two laser performances is extremely easy. The generation of different temperature drifts cannot be eliminated by the above principle, resulting in drift of the measured distance.
  • the purpose of the embodiments of the present invention is to provide a calibration method for phase measurement.
  • a dual-wavelength laser tube with different wavelengths and integrated light-emitting chips is used, which aims to solve the two-way independent in the prior art.
  • Wavelength laser tubes do not fully calibrate the phase drift caused by temperature.
  • the embodiment of the present invention is implemented in this manner, and is a calibration method based on phase measurement of a dual-wavelength laser tube, comprising the steps of:
  • Step 1 is the formation of the external light path: the system light wave emitting device (1, 2) emits the first light wave through the first filter (3) to the object to be measured, and the light wave is reflected back by the object to be measured and then passed through the optical device ( 5, 6) focusing the external light path that is received by a receiving device (7) and measured as a system;
  • Step 2 is the formation of the internal light path: the second light wave emitted by the system light-emitting device (1, 2) is filtered by the first filter (3) and reflected by the filter (3) or received by other reflective sheets.
  • the device reflects and receives directly through the second filter (4) for the receiving device (7), wherein the light wave passing through the second filter (4) will serve as an internal light path referenced by the system phase measuring substrate;
  • Step 3 When step 1 and step 2 are operated, the first light wave and the second light wave of the light wave transmitting device (1, 2) are switched successively, so that the receiving device (7) will receive the inner and outer roads successively.
  • the light waves are phase-compared, and the output cancels the phase signal of the base reference.
  • the inner and outer optical paths are all transmitted by the same optical wave emitting device (1, 2), and the wavelengths of the first wavelength and the second wavelength are different.
  • the other reflective sheet comprises a reflective prism, a full mirror and other optically reflective components, as well as optical fibers, light pipes and other materials having optical light guiding functions.
  • Another object of the present embodiment is to provide a calibration device for phase measurement, the device comprising:
  • An optical wave emitting device for transmitting a dual-wavelength optical path signal having a stable frequency, phase, and degree, the optical wave 1 attacking a dual-wavelength laser tube having different emission wavelengths or the like
  • a photoelectric conversion device configured to respectively receive the external light path that is reflected back by the object to be measured and the internal light path signal through the second filter;
  • the optical filter is an optical glass coating, an optical plastic coating or the like Optical element
  • the phase detector is configured to respectively receive the signals output by the photoelectric conversion device, and respectively perform phase comparison output of the two signals to eliminate the phase signal of the base reference.
  • the mixer is configured to mix and amplify the two signals outputted by the photoelectric conversion device with the same mixed signal, and then output the result to the phase detector.
  • the photoelectric conversion device and the mixer are included in a receiving device, which is a photodiode, a phototransistor, an avalanche diode or a photomultiplier tube.
  • An oscillator configured to generate and output the high frequency oscillating signal and the mixed signal, wherein the oscillator is a crystal oscillator, a phase locked loop, a frequency multiplier, a frequency division II or a direct digital frequency synthesizer;
  • an amplifying device configured to receive an output signal of the photoelectric conversion device for amplification and output.
  • Embodiments of the present invention are directed to providing a calibration apparatus using the above-described phase measurement.
  • Embodiments of the present invention provide a calibration method for dual-shot single-receiving dual optical path phase measurement based on a dual-wavelength laser tube, which adopts two-way
  • the integrated light wave transmitting device generates internal and external optical path signals through different filters, and then receives the return signals of the internal optical path signal and the external optical path signal through a signal receiving device, and then the two signals are phase-compared to obtain a phase difference to realize phase compensation.
  • the purpose of calibration and avoiding environmental changes introduces uncertain phase noise into the circuit, improves the measurement accuracy of laser ranging, increases the system's 3 ⁇ 4 ⁇ giant stability, and reduces the influence of environmental factors on the measurement error.
  • the system's performance requirements for components reduce the cost of the system and enhance the application of laser ranging in various industries.
  • the two-wavelength laser tube adopts an integrated method to bond two laser tube emitting chips with different wavelengths in one laser tube, so the two laser emitting chips have the same heat conduction and dispersion characteristics. Therefore, the temperature drift caused by the heating of the ring ⁇ ⁇ 3 ⁇ 4 is common mode;
  • the same wavelength optical path transmitting system and filter set effectively separate the internal and external optical paths, and the laser tubes of the same wavelength are respectively placed at different positions or angles in the structure according to the conventional double-issue single-receiving scheme, thereby improving the compactness of the system and reducing the scattered emission.
  • RF crosstalk and interference issues are provided to bond two laser tube emitting chips with different wavelengths in one laser tube, so the two laser emitting chips have the same heat conduction and dispersion characteristics. Therefore, the temperature drift caused by the heating of the ring ⁇ ⁇ 3 ⁇ 4 is common mode;
  • the same wavelength optical path transmitting system and filter set effectively separate the internal and external optical paths, and the laser tubes of the same wavelength are respectively placed at different positions or angles in
  • FIG. 1 is a flowchart of an implementation of a calibration method for phase measurement according to an embodiment of the present invention
  • FIG. 2 is a system frame diagram of a phase measurement and calibration device using a dual-wavelength laser tube according to an embodiment of the present invention
  • FIG. 3 is a system frame diagram of a calibration device for phase measurement according to a first embodiment of the present invention
  • FIG. 4 is a system frame diagram of a calibration device for phase measurement according to a second embodiment of the present invention
  • FIG. 5 is a structural diagram of a calibration device for phase measurement according to an embodiment of the present invention.
  • a dual-wavelength single-receiving dual-optical path phase measurement calibration method is adopted, and a light wave emitting device sequentially emits two wavelengths of different light waves respectively to generate internal and external optical path signals through corresponding filters, and then The signal receiving device receives the return signals of the internal optical path signal and the external optical path signal respectively, and performs phase comparison on the return apostrophes of the internal optical path and the external optical path, thereby eliminating phase shift and achieving phase error compensation and calibration.
  • the traditional method is used to avoid the problem of temperature drift during the period of independent optical path of the same wavelength laser tube, and the structure of the distance measuring device is optimized, and the stability and reliability of the product are improved.
  • FIG. 1 is a flowchart showing an implementation process of a phase measurement calibration method according to an embodiment of the present invention, which is described in detail as follows:
  • a light wave transmitting device transmits a first wavelength light wave through the first filter to the object to be measured, and the light wave is folded back by the target A to be received by a receiving device, where the first wave ⁇ Frequency 3 ⁇ 4 ⁇ per modulation 4:
  • the light wave transmitting device emits a second wavelength light wave through the second filter to the receiving device, wherein the inner light path signal of the second light wave as a base reference is modulated by the high frequency oscillation signal;
  • step S103 the receiving device compares the two channels of the received light waves in sequence, and outputs a signal for canceling the base.
  • the two optical waves for phase comparison may be the optical waves mixed with the mixed signal, wherein the mixed signal mixed with the two optical waves may be the same high frequency oscillating signal, or Two high-frequency oscillating signals of the same frequency, the same phase or with a fixed phase difference.
  • the two optical waves are all laser beams and have different wavelengths.
  • the receiving device may receive the first light wave first, and then receive the second light wave; or receive the second light wave first, and then receive the first light wave.
  • the receiving device may be a device having a photoelectric conversion function such as a photodiode, a phototransistor, an APD, a photomultiplier tube, or the like.
  • Fig. 2 is a system block diagram showing a calibration apparatus for phase measurement using a dual-wavelength laser tube in accordance with an embodiment of the present invention. For convenience of explanation, only parts related to the embodiment of the present invention are shown.
  • An optical wave transmitting device 201 generates a modulated first wavelength light wave according to the received first high frequency oscillation signal, and transmits the light wave to the object to be measured through the first filter 202 as an external light path signal; and the light wave Is reflected by the first filter and blocked by the second filter 203; then the light wave generating device 201 emits the first wavelength light wave through the second filter 203 to the photoelectric conversion device 204 as the internal light path signal, and the second wavelength light wave is A filter 202 is turned off.
  • the photoelectric conversion device 204 photoelectrically converts and outputs the internal optical path signal and the external optical path signal, respectively.
  • the final phase detector 205 receives the signals output by the photoelectric conversion device, and compares the two signals to output a phase difference signal of the substrate.
  • the light wave emitting device 201 includes a clock generator, a modulation driving circuit, and a light emitting device, wherein the light emitting device emits light waves under the driving of the driver, and the light emitting device may be a laser diode (LD) and a light emitting diode. (Lighi Emittiftg Diode, LED) or other light-emitting device.
  • the light wave emitting device 201 may be a laser wave
  • the first filter 202 and the second filter 203 are optical devices, and the purpose is to distinguish, turn on or off the first wavelength light wave and the second wavelength light wave, and construct the inner and outer device of the distance measuring device.
  • the filter may be an optical glass coating, an optical plastic coating or other colored optical component having the above functions.
  • the first filter 202 and the second filter 203 are aligned with the photoelectric conversion device 204, so that the light wave is directly incident into the photoelectric conversion device 204; or the second filter 203 may be A photoelectric mirror is disposed between the photoelectric conversion device 204 to change the optical path to facilitate the photoelectric conversion device 204 to receive; and an optical signal transmission line may be connected between the second filter 203 and the photoelectric conversion device 204, and the transmission line may be an optical fiber or a guide.
  • Light pipe is disposed between the photoelectric conversion device 204 to change the optical path to facilitate the photoelectric conversion device 204 to receive.
  • the photoelectric conversion device 204 may be a photoelectric conversion device such as a photodiode, a phototransistor, an APD, or a photomultiplier tube.
  • the photoelectric conversion device 204 may first receive the external light path light wave, and then receive the internal light path light wave, or first receive the internal light path light wave, and then receive the external light path light wave.
  • the calibration apparatus includes an oscillation. 301, light wave transmitting device 302, first filter 303, second filter 304, photoelectric conversion device 305, and high frequency amplifying device 306, mixer 307, low frequency amplifying device 308 and phase detector 309 for signal Conditioning and phase acquisition.
  • the first high frequency oscillation signal and the second high frequency oscillation signal of the same frequency and the same frequency are generated by the oscillator 301, and the light wave transmitting device 302 receives the first high frequency oscillation signal from the oscillator 301, and modulates the first and second wavelength light waves. And transmitting as the optical path signal; the first wavelength light wave passes through the first filter 303 to be viewed by the object to be reflected back, and the photoelectric conversion device 305 receives the returned external light path signal, and performs photoelectric conversion to output an electrical signal.
  • the output electrical signal is a high frequency electrical signal which is further amplified and output by the high frequency amplifying means 306.
  • the mixer 307 receives the signal from the amplifying means 306 and mixes with the third high frequency signal outputted by the oscillator 301.
  • the mixed signal is output, and the mixed signal is put into the phase 309 by the low frequency discharge device.
  • the second wavelength light wave is filtered by the second filter
  • the light reflected light of the light sheet passes through the second filter 304 as a light wave of the internal light path signal.
  • the external light path signal flow, and finally the inner light path and the outer light path are respectively phase-detected by the phase detector and output a phase difference signal.
  • the oscillator 301 may be a crystal oscillator, a quartz oscillator, a PLL (Phase Locked Loop), a DDS (Direct Digital Synthesizer), or other frequency generating devices and circuits.
  • PLL Phase Locked Loop
  • DDS Direct Digital Synthesizer
  • the mixer 307 can be an analog multiplier, a downconverting mixer or other electronic mixer and a photodiode, a phototransistor, an APD (avalanche diode), a photomultiplier tube, and the like having a mixing function.
  • Photoelectric mixing device a photoelectric mixing device.
  • the photoelectric conversion device 305 and the mixer 307 may be replaced by a receiving device which can simultaneously realize the functions of the photoelectric conversion device 305 and the mixer 307.
  • the receiving device may be a device having a photoelectric conversion function such as a photodiode, a phototransistor, an APD, a PMT (photomultiplier tube).
  • the high frequency amplifying device 306 amplifies the received high frequency electrical signal, which is expensive, and the low frequency amplifying device 308 amplifies the mixed low frequency electrical signal, and the price is relatively low, if other devices of the circuit The performance is good, and the high frequency amplifying device 306 and the low frequency amplifying device 308 may be omitted or omitted. If a receiving device is used instead of the photoelectric conversion device 305 and the mixer 307, the high frequency amplifying device 306 can be omitted, and then the low frequency electric amplifying device 308 can be directly connected after the receiving device 305, which is low in cost.
  • the calibration apparatus includes an oscillator 401.
  • the photoelectric mixing device 405 is configured to respectively receive the optical path of the internal optical path and the optical path of the external optical path that is reflected back by the measured object, perform photoelectric conversion, and respectively mix the mixed signal, and output the mixed signal separately .
  • FIG. 5 is a structural diagram of a dual-wavelength laser tube phase measuring and calibrating apparatus according to the first and second embodiments of the present invention.
  • the phase locked loop 501 and the driving circuit 502 drive the dual-wavelength lightwave transmitting device 503 to emit according to the high-frequency oscillating signal.
  • the light wave, the emitted first wavelength light wave is transmitted by the first filter 504 as an external light path signal; then the second wavelength light wave emitted by the dual wavelength light wave emitting device 503 is reflected by the first filter 504 and then passes through the second filter.
  • the slice 505 serves as an internal light path signal.
  • the inner and outer optical paths are respectively received by the receiving device 507 and photoelectrically converted and mixed by the bias circuit 506 and the high frequency mixing signal output from the phase locked loop 501, and amplified by the low frequency amplifier 508 and output to the phase detector 509.
  • the phase detector 509 compares the two received signals to a phase and finally outputs a phase that eliminates the reference of the base.
  • the dual-wavelength lightwave transmitting device 503 emits light waves through the "-filter 504 and is aligned with the receiving device 507, so that the light waves are directly incident into the receiving device 507; or in the second filter 505.
  • a mirror or mirror group 510 is disposed between the receiving device 507 to change the optical path to facilitate the receiving device 507 to receive; and an optical signal transmission line is further disposed between the second filter 505 and the receiving device 507 to complete the optical path optical signal transmission.
  • the transmission line can be an optical fiber, a light pipe, or other optical light-passing element.
  • the first filter 504 may be disposed on the returning external optical path signal, and the dual-wavelength lightwave transmitting device 503, which is the external optical path signal, transmits the optical wave to the receiving device 507 after passing the first optical filter 504.
  • the light wave is directly incident into the receiving device 507; a mirror or a mirror group 510 may be disposed between the second filter 505 and the receiving device 507 to change the optical path to facilitate receiving by the receiving device 507;
  • the optical signal transmission line is installed between the filter 505 and the receiving device 507 to complete the transmission of the optical path optical signal, which may be an optical fiber, a light pipe or other optical light-transmitting element.
  • the control circuit can be used to control the opening or switching of the outer paint. Avoid mechanical switch control and control circuit control The response time is fast, the interval between receiving the internal and external optical path signals is small, and the switching interval is in the millisecond level. It can be considered that the surrounding environment during the circuit switching is unchanged, the circuit is not affected, and the measurement accuracy is not affected.
  • a light wave transmitting device is used to generate one light wave, and the splitting lens is required to simultaneously generate two internal and external light waves. Therefore, a dual APD (avalanche diode) receiving device is required to receive the simultaneously transmitted light wave, because the APD wastes circuit space and costs are relatively low. This program is more than 20% higher.
  • the scheme adopts the traditional double-issue single-receiving method, that is, two independent LDs (laser tubes) generate two optical wave signals to form internal and external optical paths and respectively receive the signals through APD (avalanche diode) to eliminate the phase of the base signal.
  • two independent LDs laser tubes
  • APD avalanche diode
  • the working states of the two LDs are different, and the substrate signal cannot be completely eliminated.
  • different tubes due to the large dispersion of the LD devices, different tubes The difference between them also directly causes a large error.
  • the embodiment of the present invention adopts a dual-core packaged single-chip dual-wavelength laser tube, and completely eliminates the common mode effect of the APD and the LD by the internal and external optical path switching and the correction of the two wavelength lasers.
  • the dual APD and dual LD schemes have higher precision.
  • the embodiment of the present invention provides a dual-wavelength single-channel receiving calibration method based on a dual-wavelength laser tube, which uses two different wavelengths and corresponding two filters to respectively switch the inner and outer optical path signals.
  • a signal receiving device receives the return signals of the internal optical path signal and the external optical path signal respectively, and the return signals of the internal optical path and the external optical path are photoelectrically converted, mixed, amplified, and phase-detected, and the output cancels the signal of the substrate to avoid environmental changes.
  • Uncertain phase noise is introduced into the circuit, and the control circuit controls the internal and external optical path switching to achieve high-speed phase error compensation and calibration. It reduces the influence of environmental factors on the ranging error and improves the measurement of laser ranging. Accuracy increases the stability of the system's ranging, reduces the system's performance requirements for components, thereby reducing the cost of the system and enhancing the application of laser ranging in various industries.

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Abstract

一种基于双波长激光管相位测量的校准方法和装置。该方法包括：步骤1，外光路的形成，光波发射装置发射第一波长光波通过第一滤光片至被测目标，所述光波被被测目标反射折回后被一接收装置接收，其中，所述第一波长光波作为外光路信号由高频振荡信号调制生成（S101）；步骤2，内光路的形成，所述光波发射装置发射第二波长光波通过第二滤光片至所述接收装置，其中，所述第二光波作为基底参考的内光路信号由所述高频振荡信号生成（S102）；步骤3：所述接收装置将先后接收到的两路光波进行相位比较，输出消除基底参考信号的相位信号（S103）。

Description

基于双波长激光管相位测量的校准方法及其测距装置 技术领域
本发明属于光电测症领域， 尤其涉及基于双波长激光管相位测量的校准方 法及其测距装置。
背景技术
激光一直是人类引以骄傲的发明， 它具有精确、 快捷、 使用方便、 抗干扰 性强等特点， 由此发展的激光技术更是解决了许多传统技术无法解决的技术障 碍， 而利用激光技术和电子技术集合而成的激光测距仪， 在长度、 高度、 距离、 速度、 外形等领域愈发受到民用、 军用和工业等行业的重视, 在国外已经被广 泛应用于以下领域： 各大工矿企业， 电力石化， 水利， 通讯， 环境， 建筑， 地 质， 警务， 消防， 爆破， 航海， 铁路， 反恐 /军事， 科研机构， 农业， 林业， 房 地产， 休闲 /户外运动 ......。
基于测相位差原理的激光测距装置是用调制的激光光束照射被测目标， 光 束经被测目标反射后折回， 将光束往返过程产生的相位变化， 换算成被测目标 的距离， 应用于短距离高精度的距离剁量， 其测量的准确性和精度受装置内部 零部件特性的影响。 激光测距仪器的精度要求越高， 其电路的复杂度与精密器 件的需求量就大大提高。 因此环境因素， 例如温度以及器件使用寿命对器件性 能的影响， 导致器件产生的相位漂移不可忽视。 现有技术多利用内外光路的相 位差补偿原理消除电路系统的附加相移， 确保测量数据不受外界^境因素的影 响。 消除附加相移的相位差补偿原理， 简述如下:
设测距信号先后经内光路和外光路行程所迟后的相位差各为 Ψ内和 Ψ外, 为仪器内部信号发生器件产生的电子信号在电路传送和光电转换过程中所产生 的附加相移， 则内、 外光路测距信号 e内和 g外在鉴相器中对比相结果为 0 内 = 内 +
0 外 = Ψ外 + Δ Ψ
上式中， ί ^随仪器在不同环境而而产生工作状态的变化， 为随机相移.， 无 法通过精确计算求解， 所以在测距时， 交替使用内、 外光路进行测相， 在交替 过程的短时间内， 可以认为附加相移没有变化， 于是取内、 外光路比相结果的 差值作为测量结果， 即
Φ = Φ 外 - 0 内 = ^外 - 内
以上结果 Φ已经消除了附加相移不稳定的影响， 从而保证了测距的精度。 现有技术采用如下的校准方法：
( 1 )单发单收系统， 即单路发送光束单路接收光路信号， 通过一个可控制 的机械装置实现内外光路的切换， 通过计算切换前后内外光路的相位值进行相 . 位校正， 消除环境不确定相位干扰。 由于采用物理机械开关， 机械响应时间长 .. (一般为数百毫秒级别） ， 不可实时校准， 且结构相对复杂， 容易产生机械磨. 损和故障， 使用寿命短， 不适合作为工业精密仪器使用。
( 2 )单发双收系统，即单路发射光束并通过双路分别接收内、外光路信号， 两路接收信号分别进行处理并计算其相位差， 从而消除环境不确定相位干扰。 该系统采用两个雪崩二极管（ Avalanche Photd Diode, APD )分别接收内外光路 信号， 由于 APD价格昂贵（目前， 一般为 10美金以上） ， 使用两个 APD不仅 成本高， 而且双路放大电路容易产生同频干扰。
( 3 )传统欢发单收系统， 即双路独立发射同一波长光束并通过接收装置分 别先后接收内、 外光路信号， 两路接收信号分别进行处理并计算其相位差， 从 而消除环境不确定相位干扰。 该系统采用两个独立的光电发生装置分别发生两 路相同波长的光波信号， 而由于两路光电发生装置， 特别是激光管， 在工作时 由于内外光路工作时间不同且两个激光性能差异极容易产生不同温度漂移无法 用上述原理进行消除, 从而产生测量距离的漂移。
综土所述， 以上三种解决方案在实际应用中均存在缺陷。 发明内容
本发明实施例的目的在于提供一种相位测量的校准方法， 基于传统双发单 收系统， 采用了不同波长且发光芯片于一体的双波长激光管， 旨在解决现有技 术中双路独立同波长激光管无法完全校准温度带来的相位漂移的问题。
本发明实施例是这样实现的， 一种基于双波长激光管相位测量的校准方 法、 ， 包括步骤：
步骤 1为外光路的形成： 将系统光波发射装置（ 1 、 2 )发射第一光波通 过第一滤光片 （ 3 )至被测目标， 所述光波被被测目标反射折回后通过光学装 置 （5、 6 )聚焦被一接收装置接收（ 7 )并作为系统测量的外光路;
所述光波在通过第一滤光片 （ 3 )的同时， 部分光波能量被该滤光片 （ 3 ) 或其他反射片向接收装置反射并被第二滤光片 （ 4 )滤除；
步骤 2为内光路的形成： 将系统光 射装置（ 1 、 2 )发射的第二光波 为第一滤光片 （3 )滤除并被该滤光片 （ 3 )反射或其他反射片向接收装置反射 并通过第二滤光片 （ 4 )直接为所述接收装置（ 7 )接收， 其中通过第二滤光 片 （ 4 )光波将作为系统相位测量基底参考的内光路；
步骤 3: 将步骤 1 .和步骤 2工作时将先后切换光波发射装置 （ 1 、 2 )第 一光波和第二光波， 使所述接收装置（ 7 )将先后接收到的内、 外两路所述光 波进行相位比较， 输出消除基底参考的相位信号。
本发明的另一方面， 所述内外光路光波均为同一光波发射装置（ 1 、 2 ) 发射， 所述第一波长和第二波长的波长不同。
本发明的另一方面， 所述其他反射片包括反射棱镜， 全反镜和其他具备光 学反射功能的零件， 以及光纤， 光导管和其他具备光学导光功能的材料。
本发 实施例的另一目的在千提供一种相位测量的校准装置， 所述装置包 括:
一光波发射装置，用于发射双波长光路信号，此光波信号具有稳定的频率、 相位和 ^度， 所述光波 1射袭蠡为发射波长不同的双波长激光管或其他具备二 个或以上波长的光波发射装置；
光电转换装置， 用于分别接收所述由被测目标反射折回的所述外光路和经 第二滤光片所述内光路信号；
滤光片， 用于导通和截止所述外光路和内光路的光路信号， 同时能反射外 光路光波至内光路， 所述滤光片为光学玻璃镀膜、 光学塑料镀膜或其他具备上 述功能有色光学元件；
鉴相器， 用于分别接收所述光电转换装置输出的信号， 并将分别先后将两 路信号进行相位比较输出消除基底参考的相位信号。
混频器， 用于将所述光电转换装置输出的两路信号分别先后与同一混频信 号进行混频并放大后输出至所述鉴相器。 所述光电转换装置和所述混频器包含 于一接收装置内， 所述接收装置为光电二极管、 光电三极管、 雪崩二极管或光 电倍增管。
振荡器， 用于产生并输出所述高频振荡信号和所述混频信号， 所述振荡器 为晶振、 锁相环、 倍频器、 分频 II或直接数字频率合成器；
放大装置， 用于接收所述光电转换装置的输出信号进行放大并输出。
本发明实施例的另" -目的在于提供一种采用上述相位测量的校准装置。 本发明实施例提供了一种基于双波长激光管的双发单收双光路相位测量的 校准方法， 采用双路集成的光波发射装置分别通过不同滤光片产生内、 外光路 信号，再通过一个信号接收装置分别接收内光路信号和外光路信号的返回信号， 然后两信号进行相位比较得到相位差以实现相位补偿和校准的目的， 避免了环 境变化在电路中引入不确定的相位噪音， 提高了激光测距的测量精度， 增加了 系统的 ¾^巨稳定度， 减少了环境因素对测 ^误差的影响 r降低 系统对元器件 的性能要求， 从而减低了系统的成本, 加强了激光测距在各行业的应用。
与传统双发单收系统不同， 双波长激光管采用集成方式将两种波长不同的 激光管发射芯片邦定在一颗激光管内， 所以两个激光发射芯片具备相同的热传 导和散 ^特徑， 所以环燒温廋^ ¾发热产生的温度漂移为共模的； 同时釆用不 同波长的光路发射系统和滤光片组有效分离了内外光路， 较传统双发单收方案 在结构上不同位置或角度分别放置同一波长的激光管提高了系统的紧凑性且减 少分散发射带来的射频串扰和干扰问题。
附图说明
图 1是本发明实施例提供的相位测量的校准方法的实现流程图； 图 2是本发明实施例提供的采用双波长激光管相位测量和校准装置的系统 框架图；
图 3是本发明第一实施例提供的相位测量的校准装置的系统框架图;
图 4是本发明第二实施例提供的相位测量的校准装置的系统框架图； 图 5是本发明实施例提供的相位测量的校准装置的结构图。
具体实施方式
为了使本发明的目的、 技术方案及优点更加清楚明白， 以下结合附图及实 施例， 对本发明进行进一步详细说明。 应当理解， 此处所描述的具体实施例仅 仅用以解释本发明， 并木用于限定本发明。
本发明实施例利用双波长激光管的双发单收双光路相位测量的校准方法， 采用一个光波发射装置先后发出两个波长不同光波通过相对应的滤光片分别产 生内、 外光路信号, 再通过一个信号接收装置分别接收内光路信号和外光路信 号的返回信号， 并对内光路与外光路的返回佶号进行相位比较， 从而在消除附 加相移， 实现相位误差的补偿和校准的目的的同时避免传统方法采用相同波长 激光管独立光路带来的期间温度漂移不" -致和电磁干扰串扰等问题， 优化了测 距装置的结构， 提高了产品的稳定性和可靠性。
图 1示出了本发明实施例提供的相位测量的校准方法的实现流程， 详述如 下：
在步骤 S101中，一光波发射装置发射第一波长光波通过第一滤光片至被测 目标， 所述光波被被测目标 A射折回后被一接收装置接收， 其中,' 所述第一波
Figure imgf000007_0001
^频愈¾^每调制 4 : 在步骤 S102中 ,所述光波发射装置发射第二波长光波通过第二滤光片至所 述接收装置， 其中所述第二光波作为基底参考的内光路信号由所述高频振荡信 号调制生成；
在步骤 S103 中， 所述接收装置将先后接收到的两路所述光波进行相位比 较， 输出消除基底的信号。
在本发明实施例中， 进行相位比较的两路光波可以为与混频信号进行混频 后的光波， 其中与两路光波进行混频的混频信号可以为同一高频振荡信号, 也 可为频率相同， 相位相同或具有固定相位差的两路高频振荡信号。
在本发明实施例中， 上述两路光波均为激光且波长不同。
在本发明实施例中， 接收装置可以先接收第一光波, 再接收第二光波； 或 先接收第二光波， 再接收第一光波。 作为本发明的一个实施例， 接收装置可以 为光电二极管、 光电三极管、 APD、 光电倍增管等具有光电转换功能的装置。
图 2示出了本发明实施例提供的采用双波长激光管欢发单收的相位测量的 校准装置的系统框架图， 为了便于说明， 仅示出与本发明实施例相关的部分。
一光波发射装置 201根据接收到的第一高频振荡信号调制生成一调制第一 波长光波，并将所述光波通过第一滤光片 202作为外光路信号发射至被测目标; 同时所述光波被第一滤光片反射并被第二滤光片 203截止； 然后光波发生装置 201发射第 波长光波通过第二滤光片 203至光电转换装置 204作为内光路信 号， 同时第二波长光波被第一滤光片 202截止。 光电转换装置 204对所述内光 路信号和外光路信号分别进行光电转换并输出。 最后鉴相器 205分別接收光电 转换装置输出的信号，并将两路信号进行相位比较输出消除基底的相位差信号。
在本发明实施例中， 光波发射装置 201包括时钟发生器、 调制驱动电路、 发光装置， 其中发光装置在驱动器的驱动下发射光波， 该发光装置可以为激光 二极管 （leaser Diode, LD ) 、 发光二极管 （ Lighi Emittiftg Diode, LED )或其 他的发光器件。 作为本发明的一个实施例， 光波发射装置 201可以为激光波发 在本发明实施例中， 第一滤光片 202与第二滤光片 203均为光学器件， 目 的在于区分、 导通或截止第一波长光波和第二波长光波， 构建测距装置的内外 装覃。 该滤光片可以为光学玻璃镀膜、 光学塑料镀膜或其他具备上述功能有色 光学元件。
在本发明实施例中，第一滤光片 202与第二滤光片 203与光电转换装置 204 对准， 使光波直接入射到该光电转换装置 204中； 也可以在第二滤光片 203与 光电转换装置 204之间设有反光镜以改变光路， 便于光电转换装置 204接收; 还可以在第二滤光片 203与光电转换装置 204之间连接有光信号传输线， 该传 输线可以为光纤、 导光管。
在本发明实施例中， 光电转换装置 204可以为光电二极管、 光电三极管、 APD、 光电倍增管等光电转换装置。
在本发明实施例中， 光电转换装置 204可以先接收外光路光波， 再接收内 光路光波, 或先接收内光路光波， 再接收外光路光波。
图 3示出了本发明第一实施例提供的相位测量的校准装置的系统框架图， 为了便于说明， 仅示出与本发明实施例相关的部分， 与图 2相比， 本校准装置 包括振荡器 301、 光波发射装置 302 第一滤光片 303、 第二滤光片 304、 光电 转换装置 305， 以及高频放大装置 306、 混频器 307， 低频放大装置 308和鉴相 器 309用于信号调理和相位获取。
由振荡器 301 产生同频率同相位的第一高频振荡信号和第二高频振荡信 号， 光波发射装置 302接收来自振荡器 301的第一高频振荡信号、 调制第一和 第二波长光波， 并发射作为光路信号； 所述第一波长光波通过第一滤光片 303 至被¾目栎， 被被测目标反射 折回， 光电转换装置 305接收返回的外光路信 号， 进行光电转换后输出电信号， 输出的电信号为高频的电信号再由高频放大 装置 306进疔放大并输出， 混频器 307接收来自放大装置 306的信号与振荡器 301 输出的第三高频 ¾信号进行混频， 输出混频后的信号， 所述混频信号被 低频放是装盍 308放^ 进入 相器 309。 然后， 所述第二波长光波被第二滤 光片反射光波通过第二滤光片 304作为内光路信号的光波， 如所述外光路信号 流程， 最后内光路和外光路分别被鉴相器鉴相并输出相位差信号。
在本发明实施例中，振荡器 301可以为晶振、石英振荡器、 PLL (锁相环）、 DDS (直接数字频率合成器）或其他频率发生器件和电路。
在本发明实施例中， 混频器 307可以为模拟乘法器、 下变频混频器或其他 电子混频器和光电二极管、 光电三极管、 APD (雪崩二极管） 、 光电倍增管等 具有混频功能的光电混频装置。
在本发明实施例中, 光电转换装置 305和混频器 307可以由一个接收装置 代替， 该接收装置可同时实现光电转换装置 305和混频器 307的功能。 作为本 发明的一个实施例，接收装置可以为光电二极管、光电三极管、 APD、 PMT (光 电倍增管）等具有光电转换功能的装置。
在本发明实施例中， 高频放大装置 306将接收的高频电信号进行放大, 价 格昂贵， 低频放大装置 308将混频后的低频电信号进行放大， 价格相对较低， 如果电路的其他器件性能良好， 高频放大装置 306和低频放大装置 308均可省 略，或者省略其一。如果采用一个接收装置代替光电转换装置 305和混频器 307, 那么高频放大装置 306可以省略, 然后可以在接收装置 305之后直接连接低频 电放大装置 308， 成本较低。
图 4是本发明第二实施例提供的相位测量的校准装置的系统框架图， 为了 便于说明， 仅示出与本发明实施例相关的部分， 与图 3比较， 本校准装置包括 振荡器 401、 光波发射装置 402、 第 滤光片 403、 第 滤光片 404、 低频放大 装置 406、 鉴相器 407, 以及：
光电混频装置 405 , 用于分别接收所述内光路光波和由被测目标反射折回 的所述外光路光波进行光电转换， 并分别与混频信号进行混频， 并分别输出混 频后的信号。
在本发明实施例中， 接收装皇 405替代图 3中的光电转换装置 305和混频 器 30δ。 图 5示出了本发明第一、 二实施例提供的基于双波长激光管相位测量和校 准装置的结构图， 锁相环 501和驱动电路 502根据高频振荡信号驱动双波长光 波发射装置 503发射光波， 所发射的第一波长光波被第一滤光片 504透射作为 外光路信号； 然后双波长光波发射装置 503所发射的第二波长光波被第一滤光 片 504反射后通过第二滤光片 505作为内光路信号。 内外光路分别被接收装置 507接收并通过偏置电路 506和从所述锁相环 501输出的高频混频信号进行光 电转换、 混频， 并经低频放大器 508放大后输出到鉴相器 509。 所述鉴相器 509 将两次接收到的信号进行相位比较最后输出得到消除基底参考的相位。
在本发明实施例中，双波长光波发射装置 503发射光波通过第 "-滤光片 504 后与接收装置 507对准， 使光波直接入射到接收装置 507中； 也可以在第二滤 光片 505与接收装置 507之间设置反射镜或反射镜组 510以改变光路， 便于接 收装置 507接收; 还可以在第二滤光片 505与接收装置 507之间安装光信号传 输线完成内光路光信号传输， 该传输线可以为光纤、 光导管或其他光学通光元 件。
作为在本发明实施例， 第一滤光片 504可以设置在返回的外光路信号后， 作为切换外光路信号的双波长光波发射装置 503发射光波通过第一滤光片 504 后与接收装置 507对准， 使光波直接入射到接收装置 507中； 也可以在第二滤 光片 505与接收装置 507之间设置反射镜或反射镜组 510以改变光路， 便于接 收装置 507接收； 还可以在第二滤光片 505与接收装置 507之间安装光信号传 输线完成内光路光信号传输， 该传输线可以为光纤、 光导管或其他光学通光元 件。
现有技术中采用" -个光波发射装置产生一路光波， 需要利用光束转换装置 改变光路， 得到内、 外两路光， 光束转换装置的多次转换会产生机械负荷， 机 才 磨损不可 免， 且电路响应时间长， 另外带有光束转换装置必然导致电路复 杂， 体积大， 成本高； 对比于现有技术， 在本发明实施例中， 可以采用控制电 路控制内'外 漆的升关或切换， 避免使用机械开关控制， 且采用控制电路控制 的响应时间快，接收内外光路信号的间隔时间间小，切换间隔时间为毫秒级别， 可认为电路切换期间的周围环境不变， 电路未受影响， 不影响测量精度。
现有技术采用一个光波发射装置产生一路光波， 需要由分光透镜同时产生 内外两路光波， 因此需釆用双 APD (雪崩二极管）接收装置接收同时传输的光 波， 由于 APD浪费电路空间、 且成本较本方案高 20%以上。
此外还有方案采用传统双发单收方式， 即两个独立 LD (激光管）发生两 路光波信号形成内外光路并通过 APD (雪崩二极管）分别接收所述信号达到消 除基底信号的相位。 所述方案在实施过程中， 由于双独立 LD在工作工程中， 工作时间和工作环境不同而导致两个 LD的工作状态不同而无法完全消除基底 信号； 此外由于 LD器件离散性较大， 不同管子之间的差异也直接造成较大误 差。 相对比上述双 APD与双 LD方案， 本发明实施例采用双核封装的单芯片双 波长激光管，通过内外光路切换和两个波长激光的校正完全消除 APD和 LD自 身的共模影响， 达到较所述双 APD与双 LD方案更高的精度。
综上所述， 本发明实施例提供了一种基于双波长激光管的双发射单光路接 收的校准方法， 采用两个不同波长和相对应的两个滤光片分别切换内、 外光路 信号，再通过一个信号接收装置分别接收内光路信号和外光路信号的返回信号， 内光路与外光路的返回信号进行光电转换、 混频、 放大和鉴相， 输出消除基底 的信号从而避免了环境变化在电路中引入不确定的相位噪音， 且由控制电路控 制内、 外光路切换从而稳定高速的实现相位误差补偿和校准的目的， 减少了环 境因素对测距误差的影响， 提高了激光测距的测量精度， 增加了系统的测距稳 定度， 降低了系统对元器件的性能要求， 从而减低了系统的成本， 加强了激光 测距在各行业的应用。
以上所述仅为本发明的较佳实施例而已， 并不用以限制本发明， 凡在本发 明的精神和原则之内所作的任何修改、 等同替换和改进等， 均应包含在本发明 的保护范围乏内。

Claims

权利要求书
1、 一种基于欢波长激光管相位测量的校准方法， 其特征在于， 所述方法包 括步骤：
步驟 1为外光路的形成： 将系统光波发射装置（ 1 、 2 )发射第一光波通 过第一滤光片 （ 3 )至被测目标， 所述光波被被测目标反射折回后通过光学装 置（5、 6 )聚焦被一接收装置接收（ 7 )并作为系统测量的外光路；
所述光波在通过第一滤光片 （ 3 )的同时， 部分光波能量被该滤光片 （ 3 ) 或其他反射片向接收装置反射并被第二滤光片 （ 4 )滤除；
步骤 2为内光路的形成： 将系统光波发射装置 （ 1 、 2 )发射的第二光波 为第一滤光片 （3 )滤除并被该滤光片 （ 3 )反射或其他反射片向接收装置反射 并通过第二滤光片 （ 4 )直接为所述接收装置 （ Ί )接收， 其中通过第二滤光 片 （ 4 )光波将作为系统相位测量基底参考的内光路;
步骤 3: 将步骤 1和步骤 2工作时将先后切换光波发射装置（ 1 、 2 )第 一光波和第二光波， 使所述接收装置（ 7 )将先后接收到的内、 外两路所述光 波进行相位比较， 输出消除基底参考的相位信号。
2、如权利要求 1所述的方法, 其特征在于， 所述内外光路光波均为同一光 波发射装置（ 1 、 2 )发射， 所述第一波长和第二波长的波长不同。
3、如权利要求 1所述的方法，其特征在于，所述其他反射片包括反射棱镜， 全反镜和其他具备光学反射功能的零件， 以及光纤， 光导管和其他具备光学导 光功能的材料。
4、 如权利要求 1所述的方法， 其特征在于， 在所述接收装置（ 7 )将先后 接收到的内外两路所述光波进行相位比较， 输出消除基底参考的相位信号。
5、如权利要求 1至 4任一所述的方 ， 其特征在于， 两路所述光波均为激 光。
6、 二种 桎测量的校准 ¾ 其特征在于， 所述装置包括： 相位和幅度， 所述光波发射装置为发射波长不同的双波长激光管或其他具备二 个或以上波长的光波发射装置；
光电转换装置， 用于分别接收所述由被测目标反射折回的所述外光路和经 第二滤光片所述内光路信号；
滤光片， 用于导通和截止所述外光路和内光路的光路信号， 同时能反射外 光路光波至内光路， 所述滤光片为光学玻璃镀膜、 光学塑料镀膜或其他具备上 述功能有色光学元件;
鉴相器， 用于分别接收所述光电转换装置输出的信号， 并将分别先后将两 路信号进行相位比较输出消除基底参考的相位信号。
7、 如权利要求 6所述的装置， 其特征在于， 所述装置进一步包括： . 混频器， 用于将所述光电转换装置输出的内、 外光路信号分别先后与同 混频信号进行混频并放大后输出至所述鉴相器。
8、如权利要求 7所述的装置， 其特征在于, 所述光电转换装置和所述混频 器包含于一接收装置内， 所述接收装置为光电二极管、 光电三极管、 雪崩二极 管或光电倍增管。
9、 如权利要求 6所述的装置， 其特征在于， 所述装置进一步包括： 振荡器， 用于产生并输出所述高频振荡信号和所述混频信号， 所述振荡器 为晶振、 锁相不、' 倍频器、 分频器或直接数字频率合成器；
放大装置， 用于接收所述光电转换装置的输出信号进行放大并输出。
10、 一种包含如权利要求 5至 9任一^所述的测距装置。
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