WO2013095522A1 - Electrostatic discharge compatible dicing tape with laser scribe capability - Google Patents
Electrostatic discharge compatible dicing tape with laser scribe capability Download PDFInfo
- Publication number
- WO2013095522A1 WO2013095522A1 PCT/US2011/066901 US2011066901W WO2013095522A1 WO 2013095522 A1 WO2013095522 A1 WO 2013095522A1 US 2011066901 W US2011066901 W US 2011066901W WO 2013095522 A1 WO2013095522 A1 WO 2013095522A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- adhesive tape
- base film
- adhesive
- static
- layer
- Prior art date
Links
- 239000002390 adhesive tape Substances 0.000 claims abstract description 58
- 239000012790 adhesive layer Substances 0.000 claims abstract description 45
- 239000010410 layer Substances 0.000 claims description 68
- 239000000463 material Substances 0.000 claims description 21
- 230000001681 protective effect Effects 0.000 claims description 21
- 239000002216 antistatic agent Substances 0.000 claims description 17
- 239000004094 surface-active agent Substances 0.000 claims description 6
- 239000002322 conducting polymer Substances 0.000 claims description 5
- 229920001940 conductive polymer Polymers 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 238000004377 microelectronic Methods 0.000 abstract description 68
- 238000000034 method Methods 0.000 abstract description 7
- 239000006096 absorbing agent Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 3
- 238000010348 incorporation Methods 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- -1 polypyrole Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- BHMLFPOTZYRDKA-IRXDYDNUSA-N (2s)-2-[(s)-(2-iodophenoxy)-phenylmethyl]morpholine Chemical compound IC1=CC=CC=C1O[C@@H](C=1C=CC=CC=1)[C@H]1OCCNC1 BHMLFPOTZYRDKA-IRXDYDNUSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 150000002334 glycols Chemical class 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 150000003014 phosphoric acid esters Chemical class 0.000 description 2
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 2
- 229920000767 polyaniline Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- FMRHJJZUHUTGKE-UHFFFAOYSA-N Ethylhexyl salicylate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1O FMRHJJZUHUTGKE-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 206010052904 Musculoskeletal stiffness Diseases 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002608 ionic liquid Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/29—Laminated material
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1471—Protective layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
Definitions
- Embodiments of the present description generally relate to the field of microelectronic device fabrication and, more part icularly, to the dicing of microelectronic device wafers into individual microelectronic dice.
- FIG. 1 i llustrates a microelectronic device substrate having a plurality of microelectronic dice on an active surface ihereof.
- F IG. 2 is a top plan close-up view of insert 2 of FIG. 1 showing the dicing street areas.
- FIG. 3 is a side cross-sectional view of the dicing street areas of a microelectronic device wafer along line 3-3 of FIG. 2;
- FIG. 4 is a top plan close-up view of the microelectronic device wafer after dicing
- FIG. 5 is a side cross-sectional view of the dicing street areas of a microelectronic device wafer along line 5-5 of FIG. 4;
- FIG. 6 illustrates a side cross-sectional view of an adhesive tape according to an embodiment of the present description.
- F IG. 7 i l lustrates a side cross-sectional view of an adhesive tape, according to an embodiment of the present description.
- FIG. 8 illustrates a side cross-sectional view of an adhesive tape, according to another embodiment of the present description.
- FIG. 9 illustrates a side cross-sectional view of an adhesive tape, according to yet another embodiment of the present description.
- F IG. 10 illustrates a side cross-sectional view of an adhesive tape, according to stil l another embodiment of the present description.
- FIG. 1 1 illustrates a side cross-sectional view of an adhesive tape, according to yet sti ll another embodiment of the present description.
- Embodiments of the present description relate to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage and may be compatible with a laser scribing process.
- a microelectronic device substrate such as a microelectronic wafer
- an adhesive tape which reduces the potential of electrostatic discharge damage and may be compatible with a laser scribing process.
- integrated circuitry may be formed in and/or on microelectronic device wafers. As shown in FIG . I , a single microelectronic device wafer
- a silicon, si licon-on-insulator, gallium arsenide, or a sil icon-germanium wafer may contain a plurality of substantial ly identical integrated circuits (not shown) forming a plurality of microelectronic dice 102, such as microprocessors, chipsets, graphics devices, wireless devices, memory devices, application specific integrated circuits, or the like, on an active surface arranged in rows and columns.
- microelectronic dice 102 such as microprocessors, chipsets, graphics devices, wireless devices, memory devices, application specific integrated circuits, or the like, on an active surface arranged in rows and columns.
- two sets of mutual ly paral lel dicing streets 106 may extend perpendicular to each other over substantially the entire microelectronic device wafer active surface 104 between each discrete microelectronic die 102.
- die integrated circuitry of each microelectronic die 102 may be any circuit components, electrical connections, or combinations thereof, including but not limited to transistors, resistors, capacitors, conductive traces, and the l ike, which may form a microprocessor, a chipset, a memory device, an ASIC, and the like. As shown in FIGs.
- the microelectronic device wafer 100 may have at least one interconnect guard ring I OS, each of which substantially surrounds each microelectronic die 1 2, thereby isolating the integrated circuit (not shown) of each microelectronic die 102 from the dicing streets 106.
- the microelectronic device wafer 100 may comprise an interconnect layer 1 10 disposed on a first surface 1 12 and may be mounted by a second surface 1 14 thereof to a sticky, flexible adhesive tape 1 0.
- the interconnect layer 1 10 may provide routes for electrical communication between integrated circuit components within the microelectronic dice 102. as wel l as to exiernal interconnects (not shown), as wi l l be understood by those skilled in the art.
- the interconnect layer 1 10 is generally alternating layers 1 16 of dielectric material, including but not limited to silicon dioxide, silicon nitride, epoxy resin, polyimide, bisbenzocyclobutene, fluorinated silicon dioxide, carbon-doped si licon dioxide, silicon carbide, various polymeric dielectric materials, and the like, and patterned electrically conductive material, including copper, aluminum, silver, titanium, alloys thereof, and the like.
- the methods and processes for fabricating the interconnect layer 1 10 as well as the minor constituent materials in the various layer thereof wi ll be evident to those skilled in the art.
- the interconnect guard ring 1 08 may be formed layer by layer as the interconnect layer 1 1 0 is formed and may be formed of stacked metal layers.
- the interconnect guard ring 108 may assist in preventing external contamination encroaching into the microelectronic dice 102 through delamination and/or cracks caused by the subsequent dicing of the microelectronic device wafer 100.
- the microelectronic device wafer 100 may comprise at least one through-silicon via 1 18 extending from microelectronic device wafer first surface 1 12 to microelectronic device wafer second surface 1 14.
- Through-silicon vias 1 18 are conductive paths that may be used for signal transmission between stacked individual m icroelectronic dice 1 02 in the formation of microelectronic packages (not shown).
- the through-sil icon vias 1 1 8 may be fabricated by forming an opening through the microelectronic device wafer 100, such as by etching, laser drilling, ion drilling, and the like, and disposing an electrically conductive material, such as copper, aluminum, silver, titanium, alloys thereof, and the like, therein, such as by plating, deposition, and the like.
- test structures (not shown) that are composed of the same materials as the other parts of the interconnect layer I 1 0.
- test structures in the dicing street 106 and the interconnect guard ring 108 may be a region or regions composed entirely of dielectric material with no conductive material between the layers 1 1 .
- the microelectronic device wafer 100 may be diced (cut apart), so that each area of functioning microelectronic die 102 becomes a microelectronic die (not shown) that can be used to form a packaged microelectronic device (not shown).
- the microelectronic device wafer 1 0 may be mounted onto the sticky, flexible adhesive tape 150 by its second surface 1 14.
- the adhesive tape 1 0 may be attached to a ridge frame (not shown). The adhesive tape 1 0 may continue to hold the diced (singulated) microelectronic die 102 after the dicing operation and during transport to the subsequent assembly steps.
- channels 122 may be cut down perpendicular sets of the dicing streets 106 lying between each of the rows and columns (see FIG. I ), through the interconnect layer 1 10 and the microelectronic device wafer 100.
- the channels 122 may be cut using a laser (referred to as laser scribing), with a saw (not shown), such as a circular diamond-impregnated dicing saw. or combinations of laser scribing and sawing.
- the dicing streets 106 are sized to allow for the formation of the channels 1 22 between ad jacent microelectronic dice 1 02 without causing damage to the microelectronic dice 102.
- the adhesive tape 1 50 may be supplied as a base fi lm 152 having an adhesive layer 1 4 disposed thereon with a protective liner layer 156 laminated on the adhesive layer 154.
- the protective liner layer 1 56 is peeled away to exposed the adhesive layer 1 54 and the microelectronic device wafer second surface 1 14 (see FIG. 3) is attached to the base film 1 52 with the adhesive layer 154.
- peeling of the protective liner layer 156 may generate an electrostatic charge within the adhesive tape 1 50, as high as 2-5 kilovolts.
- the process of removing the individual microelectronic dice 102 from the adhesive tape 1 50 may also generate an electrostatic charge within the adhesive tape 1 50, as high as 1000 volts. If this electrostatic charge discharges through the microelectronic device wafer 100, the discharge can damage the i ntegrated circuits and/or interconnect layer 108 of their respective microelectronic dice 1 02 (see FIG. 1 ), as will be understood those ski lled in the art. This discharge damage may be exacerbated by the presence of the through-silicon vias 1 18 extending through the
- microelectronic device wafer 1 0.
- an adhesive tape 200 may be comprised of a base film 202, a first anti-static layer 206 on a first surface 204 of the base film 202, and an adhesive layer 208 on the first anti-static layer 206.
- a protective liner material 21 2 may be placed against the adhesive layer 208.
- the adhesive layer 208 may be any appropriate material, including but not limited ⁇ , ultraviolet curable materials.
- an ultraviolet light curable adhesive layer 208 may help in microelectronic device wafer 1 00 handling during microelectronic die 102 fabrications processes, where the ultraviolet light curable adhesive layer 208 may have high adhesion strength before ultraviolet light curing which is required during laser scribing, sawing, and the like, and may have low adhesion strength after ultraviolet light exposure/curing which may be required during subsequent processing.
- the base fi lm 202 may be optically transparent to allow for the inspection of the microelectronic device wafer second surface 1 14.
- the base film 202 may further have appropriate elastic properties such as balanced sti ffness and elongation of stability during dicing and the removal of the diced microelectronic dice 102 from the adhesive tape 200.
- the first anti-static layer 206 may comprise an electrically conductive material, including but not limited to conducting polymers (such as polyaniline, polypyrole, polythiophene, polyacetylene, polyphenylene vinylene, poly 3,4,-ethylenedioxythiophene, polyphenylene sulfide, and the like) and conductive metal oxides (such as indium tin oxide and the like), as a mechanism for electrostatic discharge.
- conducting polymers such as polyaniline, polypyrole, polythiophene, polyacetylene, polyphenylene vinylene, poly 3,4,-ethylenedioxythiophene, polyphenylene sulfide, and the like
- conductive metal oxides such as indium tin oxide and the like
- the electrically conductive element may be grounded such that any electrostatic charge that may be bui lt-up during the atiachmeni of the adhesive tape 200 to the microelectronic device wafer 100 and/or during the removing the individual microelectronic dice 102 from the adhesive tape 200 may be discharged.
- the first anti-static layer 206 may comprise a thin layer of antistatic material, including but not limited to interfacial active agents or surfactants, such as ammonium or phosphate salts, quaternary ammonium salts, phosphate esters, polyethylene glycol esters, and the like, as a mechanism to render the adhesive tape 200 substantially statically dissipalive.
- the anti-static material may reduce surface resistance values between about I O 5 and 1 () 10 ⁇ .
- the anti-static layer 206 may substantially reduce or substantially prevent to generation of an electrostatic charge during the attachment of the adhesive tape 200 to the microelectronic device wafer 100 and/or during the removing the individual microelectronic dice 102 from the adhesive tape 200.
- the anti-static layer 206 may also al low for rapid discharge for any electrostatic charge which may build-up.
- an adhesive tape 21 may be comprised of the base film 202, the first anti-static layer 206 on the base film first surface 204, a second anti-static layer 2 1 on an opposing second surface 214 of the base film 202, and the adhesive layer 208 on the first antistatic layer 206.
- the protective l iner material 2 12 may be placed against the adhesive layer 208.
- an adhesive tape 220 may be comprised of the base film 202 and the adhesive layer 208, wherein the adhesive layer 208 contains an anti-static agent (illustrated as black circles, elements 222) dispersed therein.
- the anti-static agent may comprise any appropriate anti-static agent for a mechanism to render the adhesive tape 220 substantially statical ly dissipative.
- the anti-static agent may be a conducting polymer, including but not limited to polyaniline, polypyrole,
- the anti-static agent may be a surfactants, including but not limited to ammonium salts, phosphate sails, quaternary ammonium salts, phosphate esters, polyethylene glycol esters , long-chain aliphatic amines (optionlly elhoxylated), and the like), and ionic liquids.
- the anti-static agent may comprise conductive fil lers, including but not limited to metal coated glass, aluminum doped zinc oxide, nickel-coated graphite, indium tin oxide, silver particles, tin particles, and the like.
- the proleclive liner material 21 2 may be placed against the adhesive layer 208.
- an adhesive tape 230 may be comprised of the base film 202, the first anti-static layer 206 on ihe base film first surface 204, the second anti-static layer 2 16 on the base film second surface 214, and the adhesive layer 208 on the first antistatic layer 206, wherein the adhesive layer 208 may contain the anti-static agent 222.
- the protective liner material 212 may be placed against the adhesive layer 208 wherein a third anti-static layer 226 may deposed between the protective liner material 212 and the adhesive layer 208 and wherein a fourth anti-static layer 236 may be disposed on an exterior surface 224 (opposite the third anti-static layer 226) of the protective liner material 2 12.
- a third anti-static layer 226 may deposed between the protective liner material 212 and the adhesive layer 208 and wherein a fourth anti-static layer 236 may be disposed on an exterior surface 224 (opposite the third anti-static layer 226) of the protective liner material 2 12.
- any of the various anti-static agents within the adhesive layer and/or anti-static layers may be included or excluded.
- the base film 202 may be damaged i f the laser strikes it directly during a laser scribing process. This situation is becoming more likely as microelectronic dice 102 are formed closer to an edge 130 (see FIG. 1 ) of the microelectronic device wafer 100 in order to increase the number of microelectronic dice 102 formed per microelectronic device wafer 100.
- the window of allowable undertravel of the scribing laser becomes narrow and the risk of overtravel increases. Overtravel can result in the laser punching through t he base film 202, which increases the risk of chuck table damage and the risk of delamination from the adhesive tape (such as elements 1 50, 200, 210, and 230).
- an ultraviolet light absorbing agent 232 may be dispersed within the adhesive layer 208.
- the ultraviolet light absorbing agent 232 may comprise any appropriate ultraviolet light absorbing agent 232, including but not limited to Uvinul ® (available from BASF Corporation, 100 Campus Drive Florham Park, New Jersey, USA), benzophenone, titanium dioxide, p- aminoben/. solo. and the l i ke. H is understood that the ultraviolet light absorbing agent 232 may be incorporated into the adhesive layer 208 as a part of any of the various combinations of anli- static agenls within the adhesive layer and/or antistatic layers. As shown in FIG.
- an adhesive tape 240 may be comprised of the base film 202, the first anti-static layer 206 on the base film first surface 204, the second anti-static layer 216 on an opposing second surface 2 14 of the base film 202, and the adhesive layer 208 on the first antistatic layer 206, wherein the adhesive layer 208 contains the anti-static agent 222 and/or the ultraviolet light absorbing agent 232.
- the protective liner material 2 12 may be placed against the adhesive layer 208 wherein the third anli- sialic layer 226 may deposed between the proieclive liner material 2 1 2 and ihe adhesive layer 208 and wherein ihe fourth anti-static layer 236 may be disposed on the proieclive l iner material ex erior surface 224.
- the various anti-static agents within the adhesive layer and/or anti-static layers may be included or excluded.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Dicing (AREA)
Abstract
The present disclosure relates to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage by the incorporation of anti-static, and may be compatible with a laser scribing process by the incorporation of ultraviolet light absorbing agents into an adhesive layer of the adhesive tape.
Description
ELECTROSTATIC DISCHARGE COMPATIBLE DICING TAPE
WITH LASER SCRIBE CAPABILITY
BACKGROUN D
Embodiments of the present description generally relate to the field of microelectronic device fabrication and, more part icularly, to the dicing of microelectronic device wafers into individual microelectronic dice.
BRIEF DESCRIPTION OF TH E DRAWINGS
The subject matter of the present disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The foregoing and other features of the present disclosure will become more ful ly apparent from the following description and appended claims, taken in conjunction with the accompanying drawings. It is understood that the accompanying drawings depict only several embodiments in accordance with the present disclosure and are, therefore, not to be considered limiting of its scope. The disclosure wil l be described with additional specificity and detail through use of the accompanying drawings, such that the advantages of the present disclosure can be more readily ascertained, in which:
FIG. 1 i llustrates a microelectronic device substrate having a plurality of microelectronic dice on an active surface ihereof.
F IG. 2 is a top plan close-up view of insert 2 of FIG. 1 showing the dicing street areas.
FIG. 3 is a side cross-sectional view of the dicing street areas of a microelectronic device wafer along line 3-3 of FIG. 2;
FIG. 4 is a top plan close-up view of the microelectronic device wafer after dicing;
FIG. 5 is a side cross-sectional view of the dicing street areas of a microelectronic device wafer along line 5-5 of FIG. 4;
FIG. 6 illustrates a side cross-sectional view of an adhesive tape according to an embodiment of the present description.
F IG. 7 i l lustrates a side cross-sectional view of an adhesive tape, according to an embodiment of the present description.
FIG. 8 illustrates a side cross-sectional view of an adhesive tape, according to another embodiment of the present description.
FIG. 9 illustrates a side cross-sectional view of an adhesive tape, according to yet another embodiment of the present description.
F IG. 10 illustrates a side cross-sectional view of an adhesive tape, according to stil l another embodiment of the present description.
FIG. 1 1 illustrates a side cross-sectional view of an adhesive tape, according to yet sti ll another embodiment of the present description.
DETAILED DESCRIPTION
In the following detailed description, reference is made to the accompanying drawings that show, by way of illustration, speci fic embodiments in which the claimed subject matter may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the subject matter. It is to be understood that the various embodiments, although different, are not necessarily mutually exclusive. For example, a particular feature, structure, or characteristic described herein, in connection with one embodiment, may be implemented within other embodiments without departing from the spirit and scope of the claimed subject matter. References within this specification to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one implementation encompassed within the present invention. Therefore, the use of the phrase "one embodiment" or "in an embodiment" does not necessarily refer to the same embodiment. In addition, it is to be understood that the location or arrangement of individual elements within each disclosed embodiment may be modified without departing from the spirit and scope of the claimed subject matter. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the subject mailer is defined only by the appended claims, appropriately inteipreted, along with the ful l range of equivalents to which the appended claims are entitled. In the drawings, like numerals refer to the same or similar elements or functionality throughout the several views, and that elements depicted therein are not necessari ly to scale with one another, rather individual elements may be enlarged or reduced in order lo more easily comprehend the elements in the context of the present description.
Embodiments of the present description relate to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage and may be compatible with a laser scribing process.
In the production of microelectronic devices, integrated circuitry may be formed in and/or on microelectronic device wafers. As shown in FIG . I , a single microelectronic device wafer
1 00, such as a silicon, si licon-on-insulator, gallium arsenide, or a sil icon-germanium wafer, may contain a plurality of substantial ly identical integrated circuits (not shown) forming a plurality of microelectronic dice 102, such as microprocessors, chipsets, graphics devices, wireless devices, memory devices, application specific integrated circuits, or the like, on an active surface
arranged in rows and columns. It is, of course, understood that the use of the term "wafer" does not only include an entire wafer, but also includes portions thereof.
In general, two sets of mutual ly paral lel dicing streets 106 may extend perpendicular to each other over substantially the entire microelectronic device wafer active surface 104 between each discrete microelectronic die 102. It is understood that die integrated circuitry of each microelectronic die 102 may be any circuit components, electrical connections, or combinations thereof, including but not limited to transistors, resistors, capacitors, conductive traces, and the l ike, which may form a microprocessor, a chipset, a memory device, an ASIC, and the like. As shown in FIGs. 1 and 2, the microelectronic device wafer 100 may have at least one interconnect guard ring I OS, each of which substantially surrounds each microelectronic die 1 2, thereby isolating the integrated circuit (not shown) of each microelectronic die 102 from the dicing streets 106.
As shown in FIG. 3,' the microelectronic device wafer 100 may comprise an interconnect layer 1 10 disposed on a first surface 1 12 and may be mounted by a second surface 1 14 thereof to a sticky, flexible adhesive tape 1 0. The interconnect layer 1 10 may provide routes for electrical communication between integrated circuit components within the microelectronic dice 102. as wel l as to exiernal interconnects ( not shown), as wi l l be understood by those skilled in the art. The interconnect layer 1 10 is generally alternating layers 1 16 of dielectric material, including but not limited to silicon dioxide, silicon nitride, epoxy resin, polyimide, bisbenzocyclobutene, fluorinated silicon dioxide, carbon-doped si licon dioxide, silicon carbide, various polymeric dielectric materials, and the like, and patterned electrically conductive material, including copper, aluminum, silver, titanium, alloys thereof, and the like. The methods and processes for fabricating the interconnect layer 1 10 as well as the minor constituent materials in the various layer thereof wi ll be evident to those skilled in the art. The interconnect guard ring 1 08 may be formed layer by layer as the interconnect layer 1 1 0 is formed and may be formed of stacked metal layers. The interconnect guard ring 108 may assist in preventing external contamination encroaching into the microelectronic dice 102 through delamination and/or cracks caused by the subsequent dicing of the microelectronic device wafer 100.
As also shown in FIG. 3, the microelectronic device wafer 100 may comprise at least one through-silicon via 1 18 extending from microelectronic device wafer first surface 1 12 to microelectronic device wafer second surface 1 14. Through-silicon vias 1 18 are conductive paths that may be used for signal transmission between stacked individual m icroelectronic dice 1 02 in the formation of microelectronic packages (not shown). The through-sil icon vias 1 1 8 may be
fabricated by forming an opening through the microelectronic device wafer 100, such as by etching, laser drilling, ion drilling, and the like, and disposing an electrically conductive material, such as copper, aluminum, silver, titanium, alloys thereof, and the like, therein, such as by plating, deposition, and the like.
Within the dicing streets 106, there may be test structures (not shown) that are composed of the same materials as the other parts of the interconnect layer I 1 0. Between these test structures in the dicing street 106 and the interconnect guard ring 108 may be a region or regions composed entirely of dielectric material with no conductive material between the layers 1 1 .
After the microelectronic die 102 on the microelectronic device wafer 100 have been subjected to preliminary testing for functionality (wafer sort), the microelectronic device wafer 100 may be diced (cut apart), so that each area of functioning microelectronic die 102 becomes a microelectronic die (not shown) that can be used to form a packaged microelectronic device (not shown). As previously discussed, prior to dicing, the microelectronic device wafer 1 0 may be mounted onto the sticky, flexible adhesive tape 150 by its second surface 1 14. The adhesive tape 1 0 may be attached to a ridge frame (not shown). The adhesive tape 1 0 may continue to hold the diced (singulated) microelectronic die 102 after the dicing operation and during transport to the subsequent assembly steps.
As shown in FIGs. 4 and 5, channels 122 may be cut down perpendicular sets of the dicing streets 106 lying between each of the rows and columns (see FIG. I ), through the interconnect layer 1 10 and the microelectronic device wafer 100. The channels 122 may be cut using a laser (referred to as laser scribing), with a saw (not shown), such as a circular diamond-impregnated dicing saw. or combinations of laser scribing and sawing. Of course, the dicing streets 106 are sized to allow for the formation of the channels 1 22 between ad jacent microelectronic dice 1 02 without causing damage to the microelectronic dice 102. Once the dicing of the microelectronic device wafer 1 0 is complete, the individual microelectronic dice 102 are removed from the adhesive tape 150.
As shown in FIG. 6, the adhesive tape 1 50 may be supplied as a base fi lm 152 having an adhesive layer 1 4 disposed thereon with a protective liner layer 156 laminated on the adhesive layer 154. During a tape lamination process, the protective liner layer 1 56 is peeled away to exposed the adhesive layer 1 54 and the microelectronic device wafer second surface 1 14 (see FIG. 3) is attached to the base film 1 52 with the adhesive layer 154. However, peeling of the protective liner layer 156 may generate an electrostatic charge within the adhesive tape 1 50, as high as 2-5 kilovolts. Furthermore, the process of removing the individual microelectronic dice 102 from the adhesive tape 1 50, generally using a collet and an ejector, may also generate an
electrostatic charge within the adhesive tape 1 50, as high as 1000 volts. If this electrostatic charge discharges through the microelectronic device wafer 100, the discharge can damage the i ntegrated circuits and/or interconnect layer 108 of their respective microelectronic dice 1 02 (see FIG. 1 ), as will be understood those ski lled in the art. This discharge damage may be exacerbated by the presence of the through-silicon vias 1 18 extending through the
microelectronic device wafer 1 0.
In an embodiment of the present disclosure of FIG. 7, an adhesive tape 200 may be comprised of a base film 202, a first anti-static layer 206 on a first surface 204 of the base film 202, and an adhesive layer 208 on the first anti-static layer 206. A protective liner material 21 2 may be placed against the adhesive layer 208. The adhesive layer 208 may be any appropriate material, including but not limited ιο, ultraviolet curable materials. For relatively thin microelectronic device wafers 100 using an ultraviolet light curable adhesive layer 208 may help in microelectronic device wafer 1 00 handling during microelectronic die 102 fabrications processes, where the ultraviolet light curable adhesive layer 208 may have high adhesion strength before ultraviolet light curing which is required during laser scribing, sawing, and the like, and may have low adhesion strength after ultraviolet light exposure/curing which may be required during subsequent processing. In one embodiment, the base fi lm 202 may be optically transparent to allow for the inspection of the microelectronic device wafer second surface 1 14. The base film 202 may further have appropriate elastic properties such as balanced sti ffness and elongation of stability during dicing and the removal of the diced microelectronic dice 102 from the adhesive tape 200.
In one embodiment, the first anti-static layer 206 may comprise an electrically conductive material, including but not limited to conducting polymers (such as polyaniline, polypyrole, polythiophene, polyacetylene, polyphenylene vinylene, poly 3,4,-ethylenedioxythiophene, polyphenylene sulfide, and the like) and conductive metal oxides (such as indium tin oxide and the like), as a mechanism for electrostatic discharge. As will be understood to those skilled in the art, the electrically conductive element may be grounded such that any electrostatic charge that may be bui lt-up during the atiachmeni of the adhesive tape 200 to the microelectronic device wafer 100 and/or during the removing the individual microelectronic dice 102 from the adhesive tape 200 may be discharged.
In another embodiment, the first anti-static layer 206 may comprise a thin layer of antistatic material, including but not limited to interfacial active agents or surfactants, such as ammonium or phosphate salts, quaternary ammonium salts, phosphate esters, polyethylene glycol esters, and the like, as a mechanism to render the adhesive tape 200 substantially statically
dissipalive. In one embodiment, the anti-static material may reduce surface resistance values between about I O5 and 1 () 10 Ω. As will be understood to those skilled in the art, the anti-static layer 206 may substantially reduce or substantially prevent to generation of an electrostatic charge during the attachment of the adhesive tape 200 to the microelectronic device wafer 100 and/or during the removing the individual microelectronic dice 102 from the adhesive tape 200. The anti-static layer 206 may also al low for rapid discharge for any electrostatic charge which may build-up.
In another embodiment of the present disclosure of FIG. 8, an adhesive tape 21 may be comprised of the base film 202, the first anti-static layer 206 on the base film first surface 204, a second anti-static layer 2 1 on an opposing second surface 214 of the base film 202, and the adhesive layer 208 on the first antistatic layer 206. The protective l iner material 2 12 may be placed against the adhesive layer 208.
In still another embodiment of the present disclosure of FIG. 9, an adhesive tape 220 may be comprised of the base film 202 and the adhesive layer 208, wherein the adhesive layer 208 contains an anti-static agent (illustrated as black circles, elements 222) dispersed therein. The anti-static agent may comprise any appropriate anti-static agent for a mechanism to render the adhesive tape 220 substantially statical ly dissipative. In one embodiment, the anti-static agent may be a conducting polymer, including but not limited to polyaniline, polypyrole,
polylhiophene, polyacelylene, polyphenylene vinylene, and the like. In another embodiment, the anti-static agent may be a surfactants, including but not limited to ammonium salts, phosphate sails, quaternary ammonium salts, phosphate esters, polyethylene glycol esters , long-chain aliphatic amines (optionlly elhoxylated), and the like), and ionic liquids. In still another embodiment, the anti-static agent may comprise conductive fil lers, including but not limited to metal coated glass, aluminum doped zinc oxide, nickel-coated graphite, indium tin oxide, silver particles, tin particles, and the like. The proleclive liner material 21 2 may be placed against the adhesive layer 208.
It is understood that further embodiments of the present disclosure may include various combination of anti-static agents within the adhesive layer and/or antistatic layers. As shown in FIG. 10. an adhesive tape 230 may be comprised of the base film 202, the first anti-static layer 206 on ihe base film first surface 204, the second anti-static layer 2 16 on the base film second surface 214, and the adhesive layer 208 on the first antistatic layer 206, wherein the adhesive layer 208 may contain the anti-static agent 222. The protective liner material 212 may be placed against the adhesive layer 208 wherein a third anti-static layer 226 may deposed between the protective liner material 212 and the adhesive layer 208 and wherein a fourth anti-static layer
236 may be disposed on an exterior surface 224 (opposite the third anti-static layer 226) of the protective liner material 2 12. Of course any of the various anti-static agents within the adhesive layer and/or anti-static layers may be included or excluded.
In the use of lasers, the base film 202 may be damaged i f the laser strikes it directly during a laser scribing process. This situation is becoming more likely as microelectronic dice 102 are formed closer to an edge 130 (see FIG. 1 ) of the microelectronic device wafer 100 in order to increase the number of microelectronic dice 102 formed per microelectronic device wafer 100. As wil l be understood, the window of allowable undertravel of the scribing laser becomes narrow and the risk of overtravel increases. Overtravel can result in the laser punching through t he base film 202, which increases the risk of chuck table damage and the risk of delamination from the adhesive tape (such as elements 1 50, 200, 210, and 230).
In one embodiment of the present description illustrated in FIG. 1 1 , an ultraviolet light absorbing agent 232 (shown as white circles) may be dispersed within the adhesive layer 208. The ultraviolet light absorbing agent 232 may comprise any appropriate ultraviolet light absorbing agent 232, including but not limited to Uvinul® (available from BASF Corporation, 100 Campus Drive Florham Park, New Jersey, USA), benzophenone, titanium dioxide, p- aminoben/.oaie. and the l i ke. H is understood that the ultraviolet light absorbing agent 232 may be incorporated into the adhesive layer 208 as a part of any of the various combinations of anli- static agenls within the adhesive layer and/or antistatic layers. As shown in FIG. 1 1 , an adhesive tape 240 may be comprised of the base film 202, the first anti-static layer 206 on the base film first surface 204, the second anti-static layer 216 on an opposing second surface 2 14 of the base film 202, and the adhesive layer 208 on the first antistatic layer 206, wherein the adhesive layer 208 contains the anti-static agent 222 and/or the ultraviolet light absorbing agent 232. The protective liner material 2 12 may be placed against the adhesive layer 208 wherein the third anli- sialic layer 226 may deposed between the proieclive liner material 2 1 2 and ihe adhesive layer 208 and wherein ihe fourth anti-static layer 236 may be disposed on the proieclive l iner material ex erior surface 224. Of course, any o f the various anti-static agents within the adhesive layer and/or anti-static layers may be included or excluded.
It is understood that the subject matter of the present description is not necessarily limited to specific applications illustrated in FIGs. 1 - 1 The subject matter may be applied to other microelectronic device fabrication applications, as will be understood to those skilled in the art. Furthermore, the subject matter may also be used in any appropriate application outside of the microelectronic device fabrication field.
Having thus described in detail embodiments of the present invention, it is understood that the invention defined by the appended claims is not.lo be limited by particular details set forth in the above description, as many apparent variations thereof are possible without departing from the spirit or scope thereof.
Claims
1 . An adhesive tape comprising:
a base film;
an adhesive layer disposed proximate a first surface of the base film; and
at least one anti-static layer proximate the base film.
2. The adhesive tape of claim I , wherein the at least one anti-static layer is selected from the group consisting of conducting polymers, surfactants, and conductive metal oxides.
3. The adhesive tape of claim I , wherein the at least one anti-static layer comprises an antistatic layer disposed between the base film and the adhesive layer.
4. The adhesive tape of claim 3, further including an anti-static layer disposed on a second surface of the base film.
5. The adhesive tape of claim I , wherein the base film is optical ly transparent.
6. The adhesive tape of claim 1 , further including a protective liner layer disposed on the adhesive layer.
7. The adhesive tape of claim 6, further include an anti-static layer disposed between the adhesive layer and the protective liner material.
8. The adhesive tape of claim 6. further including an anti-static layer disposed on an external surface of the protective liner material.
9. An adhesive tape comprising:
a base film;
an adhesive layer disposed proximate a first surface of the base film; and
an anti-static agent dispersed within the adhesive layer.
1 0. The adhesive tape of claim 9, wherein the anti-static layer is selected from the group consisting of conducting polymers, surfactants, and conductive metal-oxides.
1 1 . The adhesive tape of claim 9, further include at least one anti-static layer disposed on at least one of the base film first surface and a second surface of the base film.
1 2. The adhesive tape of claim 9, wherein the base film is optically transparent.
1 3. The adhesive tape of clai m 9, further including a protective liner layer disposed on the adhesive layer.
14. The adhesive tape of claim 13, further including an anti-static layer disposed between the adhesive layer and the protective liner material.
1 5. The adhesive tape of claim 1 3, further including an anti-static layer disposed on an external surface of the protective liner material.
16. An adhesive tape comprising:
a base film;
an adhesive layer disposed proximate a first surface of the base film including an antistatic agent dispersed therein; and
at least one anti-static layer proximate the base film.
1 7. The adhesive tape of claim 1 6, wherein the at least one anti-static layer is selected from the group consisting of conducti ng polymers, surfactants, and conductive metal oxides.
1 8. The adhesive tape of claim 16, wherein the at least one anti-static layer comprises an anti-static layer disposed between the base film and the adhesive layer.
1 . The adhesive tape of claim 1 8, further including an anti-static layer disposed on a second surface of the base film.
20. The adhesive tape of clai m 16, wherein the base film is optically transparent.
2 1 . The adhesive tape of claim 1 , further including a protective liner layer disposed on the adhesive layer.
22. The adhesive lape of claim 2 1 , further include an anti-static layer disposed between the adhesive layer and the protective liner material.
23. The adhesive tape of claim 2 1 , further including an anti-static layer disposed on an external surface of the protective liner material.
24. An adhesive tape comprising:
a base film;
an adhesive layer disposed proximate a first surface of the base film; and
an anti-static agent dispersed within the adhesive layer,
at least one anti-static layer.
25. The adhesive tape of claim 24, wherein the anti-static agent is selected from the group consisting of conducting polymers, surfactants, and conductive metal oxides.
26. The adhesive tape of claim 24, further include at least one anti-static layer disposed on at least one of the base film first surface and a second surface of the base film.
27. The adhesive tape of claim 24, wherein the base film is optically transparent.
28. The adhesive tape of claim 24, further including a protective liner layer disposed on the adhesive layer.
29. The adhesive lape of claim 28, further including an anti-static layer disposed between the adhesive layer and the protective liner material.
30. The adhesive lape of claim 28, further including an anti-static layer d isposed on an external surface of the protective liner material.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/993,336 US20140120293A1 (en) | 2011-12-22 | 2011-12-22 | Electrostatic discharge compatible dicing tape with laser scribe capability |
PCT/US2011/066901 WO2013095522A1 (en) | 2011-12-22 | 2011-12-22 | Electrostatic discharge compatible dicing tape with laser scribe capability |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2011/066901 WO2013095522A1 (en) | 2011-12-22 | 2011-12-22 | Electrostatic discharge compatible dicing tape with laser scribe capability |
Publications (1)
Publication Number | Publication Date |
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WO2013095522A1 true WO2013095522A1 (en) | 2013-06-27 |
Family
ID=48669163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US2011/066901 WO2013095522A1 (en) | 2011-12-22 | 2011-12-22 | Electrostatic discharge compatible dicing tape with laser scribe capability |
Country Status (2)
Country | Link |
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US (1) | US20140120293A1 (en) |
WO (1) | WO2013095522A1 (en) |
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