WO2013094236A1 - Rotation angle detector - Google Patents
Rotation angle detector Download PDFInfo
- Publication number
- WO2013094236A1 WO2013094236A1 PCT/JP2012/063421 JP2012063421W WO2013094236A1 WO 2013094236 A1 WO2013094236 A1 WO 2013094236A1 JP 2012063421 W JP2012063421 W JP 2012063421W WO 2013094236 A1 WO2013094236 A1 WO 2013094236A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detection unit
- magnetic detection
- magnetic
- arm
- bridge circuit
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
Definitions
- the present invention relates to a rotation angle detection device that detects a rotation angle of a rotation shaft or the like using a magnetoresistive effect element.
- a magnetoresistive element is known in addition to a Hall element as a magnetic field magnetoelectric conversion element that detects a magnetic field applied from the outside.
- Magnetoresistive elements include AMR (Anisotropic Magneto-Resistance) elements, GMR (Giant Magneto-Resistance) elements, and TMR (Tunnel Magneto-Resistance) elements. There are elements. In particular, GMR elements and TMR elements that can obtain a larger MR ratio than others are drawing attention.
- Patent Document 1 discloses a GMR element and a TMR element having a spin valve structure.
- a magnetoresistive effect element having a spin valve structure includes a ferromagnetic first thin film layer (free layer) and a second thin film layer (fixed layer) which are partitioned by a nonmagnetic thin film layer.
- the magnetization direction of the ferromagnetic second thin film layer is fixed.
- an antiferromagnetic thin film layer is attached to the ferromagnetic second thin film layer.
- the antiferromagnetic thin film layer may be a ferromagnetic layer having high coercivity and high electrical resistance.
- a magnet rotor equipped with a cylindrical magnet whose peripheral surface is multipolarized is rotated about an axis.
- the sensor device is arranged at a position away from the peripheral surface of the cylindrical magnet by a predetermined distance r. Regions A and B are provided in the sensor device at the same interval as the magnetization width ⁇ of the cylindrical magnet, the magnetoresistive elements RA1 and RA2 are arranged in the region A, and the magnetoresistive elements RB1 and RB2 are arranged in the region B.
- RA1, RA2, RB1, and RB2 are connected to form a bridge circuit.
- FIG. 37 the cylindrical magnet on the circumferential surface of the magnet rotor is schematically described in a straight line.
- the circumferential surface of the magnet rotor moves in the direction of the arrow with respect to the sensor device.
- phase angle ⁇ shown in FIG. 37 indicates the phase relationship between the region A and the magnetic poles of the magnet rotor 1.
- the phase angle ⁇ coincides with the angle of the magnetic field in the region A.
- the phase angle ⁇ ′ shown in FIG. 40 indicates the angle of the magnetic field in the region B when the phase relationship between the region A and the magnetic pole of the magnet rotor 1 is ⁇ .
- the resistance value changes in accordance with the angle of the magnetic field applied to the element.
- the resistance values of the magnetoresistive effect elements RA1, RA2 and RB1, RB2 change substantially sinusoidally with the rotation of the magnet rotor. Therefore, the midpoint potentials V1 and V2 and the bridge output Vout of the bridge circuit shown in FIG. 38 have waveforms as shown in FIG.
- FIG. 43 is an explanatory diagram showing in detail the angle of the magnetic field of the conventional rotation angle detection device.
- the magnetic fields generated by the magnet rotor in the radial direction (x-axis direction in FIG. 43) and in the rotation direction (y-axis direction in FIG. 43) change substantially sinusoidally with respect to the phase angle.
- the magnetic field amplitude differs between the rotational direction and the radial direction.
- the amplitude P of the magnetic field in the radial direction is generally 1 to 2 times the amplitude Q of the magnetic field in the rotation direction. Therefore, the x-axis component Hx and the y-axis component Hy of the magnetic field at the phase angle ⁇ can be expressed by the following equations (1) and (2). Therefore, tan ⁇ representing the direction of the magnetic field at the phase angle ⁇ and the direction ⁇ of the magnetic field can be represented by the following equations (3) and (4), respectively.
- FIG. 44 shows the relationship between the phase angle ⁇ and the magnetic field angle ⁇ sensed by the magnetoresistive effect element in the conventional rotation angle detection device when the ratio of the amplitudes of the magnetic field magnitudes in the radial direction and the rotation direction is different.
- Q / P 1 to 0.5.
- ⁇ ⁇ .
- FIG. 46 and 47 are waveform diagrams showing changes in the output voltage of the conventional rotation angle detection device when the amplitude ratio of the magnitude of the magnetic field in the radial direction is different from that in the rotation direction.
- FIG. 45 when the resistance value of the magnetoresistive element has a triangular waveform, a third-order harmonic component is added to the output voltage Vout of the bridge circuit, and the output waveform is distorted. The influence of the fifth and higher harmonics is small, and the third harmonic component is the main cause of distortion. If the output waveform is distorted and becomes a triangular wave as shown in FIG. 46 or a trapezoidal wave as shown in FIG. 47, accurate angle information cannot be obtained.
- a rotation angle detection device that can detect a rotation angle without distortion by multiplying a rotation direction detection signal by a correction coefficient k.
- An object of the present invention is to provide a rotation angle detection device capable of obtaining accurate angle information while reducing the circuit scale.
- Another embodiment of the present invention is a rotation angle detection device, in which a north pole and a south pole are alternately magnetized along a circumferential surface with a magnetization width ⁇ , and a magnetic field generated by the rotor First to fourth magnetic detectors for detecting the first magnetic detector, the first magnetic detector and the fourth magnetic detector are disposed at the first detection position, and the second magnetic detector and the third magnetic detector are The first magnetic detection unit and the second detection position are arranged at two detection positions, the first detection position and the second detection position are provided at a distance L, and are connected in series between the first reference potential and the second reference potential.
- the third magnetic detection unit, the second magnetic detection unit and the fourth magnetic detection unit connected in series are connected in parallel, and the first to fourth magnetic detection units constitute a bridge circuit, and the first magnetic detection unit and the first magnetic detection unit
- the 4 magnetic detector, the second magnetic detector, and the third magnetic detector are respectively arranged on the arms where the bridge circuit intersects, and the first magnet
- Another embodiment of the present invention is a rotation angle detection device, in which a north pole and a south pole are alternately magnetized along a circumferential surface with a magnetization width ⁇ , and a magnetic field generated by the rotor First to eighth magnetic detectors for detecting the first magnetic detector, the first magnetic detector and the fourth magnetic detector are disposed at the first detection position, and the second magnetic detector and the third magnetic detector are The fifth magnetic detection unit and the eighth magnetic detection unit are disposed at the third detection position, the sixth magnetic detection unit and the seventh magnetic detection unit are disposed at the fourth detection position, The first detection position and the second detection position are provided at a distance L12, the third detection position and the fourth detection position are provided at a distance L12, and the first detection position and the third detection position are separated by a distance L13.
- a first magnetic detection unit and a third magnetic detection unit which are provided and connected in series between the first reference potential and the second reference potential
- the second magnetic detection unit and the fourth magnetic detection unit connected in series are connected in parallel, and the first to fourth magnetic detection units constitute a bridge circuit, and the first magnetic detection unit and the fourth magnetic detection unit,
- the second magnetic detection unit and the third magnetic detection unit are respectively disposed on the intersecting arms of the bridge circuit, and are connected in series between the third reference potential and the fourth reference potential.
- Another embodiment of the present invention is a rotation angle detection device, in which a north pole and a south pole are alternately magnetized along a circumferential surface with a magnetization width ⁇ , and a magnetic field generated by the rotor First to eighth magnetic detectors for detecting the first magnetic detector, the first magnetic detector and the fourth magnetic detector are disposed at the first detection position, and the second magnetic detector and the third magnetic detector are The sixth magnetic detection unit and the seventh magnetic detection unit are arranged at the third detection position, the fifth magnetic detection unit and the eighth magnetic detection unit are arranged at the fourth detection position, The first detection position and the second detection position are provided at a distance L12, the third detection position and the fourth detection position are provided at a distance L12, and the first detection position and the third detection position are separated by a distance L13.
- the third magnetic detection unit and the seventh magnetic detection unit are connected in parallel with the second magnetic detection unit, the sixth magnetic detection unit, the fourth magnetic detection unit, and the eighth magnetic detection unit that are connected in series.
- the magnetic detection unit constitutes a bridge circuit.
- the first magnetic detection unit and the fifth magnetic detection unit are arranged on the first arm of the bridge circuit, and the second magnetic detection unit and the second magnetic detection unit are arranged on the second arm of the bridge circuit.
- a sixth magnetic detector is disposed, a third magnetic detector and a seventh magnetic detector are disposed on the third arm of the bridge circuit, and a fourth magnetic detector and an eighth are disposed on the fourth arm of the bridge circuit.
- Another embodiment of the present invention is a rotation angle detection device, in which a north pole and a south pole are alternately magnetized along a circumferential surface with a magnetization width ⁇ , and a magnetic field generated by the rotor 2p + 1 magnetic detection units, each having two magnetic detection units arranged at 2p detection positions, i-th detection position (i is an integer of 1 or more) and j-th detection position (j Is an integer greater than or equal to 1), Lij, and between the first reference potential and the second reference potential, 2p magnetic detection units connected in series and 2p pieces connected in series
- the magnetic detection units are connected in parallel, and the 2p + 1 magnetic detection units constitute a bridge circuit, and 2p-1 magnetic detection units are arranged on each arm of the bridge circuit.
- FIG. 3 is a layout diagram of regions provided in the sensor device according to the first embodiment of the present invention. It is a wiring diagram of the magnetoresistive effect element in the rotation angle detection apparatus by Embodiment 1 of this invention. It is a wave form diagram which shows the change of the resistance value of a magnetoresistive effect element of the rotation angle detection apparatus by Embodiment 1 of this invention. It is a wave form diagram which shows the change of the output electric potential of the rotation angle detection apparatus by Embodiment 1 of this invention about the case where the arrangement space
- FIG. 6 is a waveform diagram showing a difference between the output potential of FIG.
- FIG. 9 is a waveform diagram showing a difference between the output potential of FIG. 8 and a sine wave whose DC component, amplitude, frequency, and phase are adjusted.
- FIG. 13 is a waveform diagram showing a difference between the output voltage of FIG. 12 and a sine wave whose DC component, amplitude, frequency, and phase are adjusted.
- FIG. 19 is a waveform diagram showing changes in the resistance value, midpoint potential, and differential voltage of the magnetoresistive effect element included in the bridge circuit A in the rotation angle detection device according to the third embodiment of the present invention with respect to the arrangement in FIG. 18.
- FIG. 19 is a waveform diagram showing changes in the resistance value, midpoint potential, and differential voltage of the magnetoresistive effect element included in the bridge circuit B of the rotation angle detection device according to the third embodiment of the present invention with respect to the arrangement in FIG. 18.
- FIG. 21 It is a wave form diagram which shows the change of a differential voltage and an output voltage of the rotation angle detection apparatus by Embodiment 3 of this invention about the arrangement
- FIG. 25 is a waveform diagram showing changes in the resistance value, midpoint potential, and differential voltage of the magnetoresistive effect element included in the bridge A in the rotation angle detection device according to the third embodiment of the present invention with respect to the arrangement in FIG. 24.
- FIG. 25 is a waveform diagram showing changes in the resistance value, midpoint potential, and differential voltage of the magnetoresistive effect element included in the bridge B of the rotation angle detection device according to the third embodiment of the present invention with respect to the arrangement in FIG. 24.
- FIG. 27 is a waveform diagram showing the midpoint potential of FIG. 31 and the difference between the output voltage and a sine wave whose DC component, amplitude, frequency and phase are adjusted.
- the magnetoresistive effect element whose magnitude of resistance changes depending on the direction of an applied magnetic field is used as a magnetic detection unit for detecting a magnetic field that changes as the magnet rotor rotates. explain. However, the same effect can be obtained even when other magnetic detection units are used.
- the magnetoresistive effect element is simply referred to as “element”.
- FIG. 1 is a configuration diagram of a rotation angle detection device of the present invention.
- the rotation angle detection device 10 includes a magnet rotor 1 on which a cylindrical magnet 2 is mounted, and a sensor device 3 that senses a magnetic field generated by the cylindrical magnet 2.
- the cylindrical magnet 2 has 2 m poles (m is an integer of 1 or more) in which N and S poles are alternately magnetized with a magnetization width ⁇ along the circumferential surface.
- the sensor device 3 is arranged at a predetermined distance from the magnet rotor 1.
- FIG. 2 is a layout diagram of regions provided in the sensor device according to the first embodiment of the present invention.
- the sensor device 3 is provided with a region A and a region B with a distance L therebetween.
- the element RA is arranged in the region A
- the element RB is arranged in the region B
- the distance between the elements RA and RB is also set to L.
- the distance between regions is assumed to be equal to the distance between elements arranged in the region.
- FIG. 3 is a wiring diagram of the magnetoresistive effect element in the rotation angle detection apparatus according to the first embodiment of the present invention.
- elements RA and RB are connected in series between a DC power supply (VCC) and a ground (GND).
- VCC DC power supply
- GND ground
- the distance L is expressed by the following formula (5), where ⁇ is the magnetization width of the cylindrical magnet 2.
- ⁇ in FIG. 4 represents the phase angle of the magnet rotor 1, and is 360 ° for a magnetized single pole pair on the circumferential surface. The same applies to other drawings.
- FIG. 6 shows a difference signal between the waveform of the output potential Vout shown in FIG. 5 and a sine wave.
- the “sine wave” here is a sine wave in which the direct current component, amplitude, frequency, and phase are adjusted so that the difference from the output potential Vout is minimized.
- FIG. 7 shows resistance values of the elements RA and RB to which the fifth-order harmonic component is added.
- FIG. 9 shows a difference signal between the waveform of the output potential Vout and the sine wave shown in FIG.
- the elements RA and RB are arranged at a distance of 2 / n times the magnetization width ⁇ , and the elements are arranged and connected as shown in FIG. It was found that harmonic components can be suppressed.
- the cylindrical magnet 2 magnetized so as to generate a magnetic field that creates a magnetic flux density distribution in the circumferential direction is used.
- the sensor device 3 is disposed above or below the magnetic pole with the axial direction as the vertical direction. The same applies to the following embodiments.
- FIG. FIG. 10 is a wiring diagram of the magnetoresistive effect element in the rotation angle detecting device according to the second embodiment of the present invention.
- the rotation angle detection device according to the present embodiment is different from the configuration of the first embodiment in that two elements are arranged in the regions A and B, respectively, and a bridge circuit configured by four elements is provided. Further, a differential amplifier 4 is provided in the bridge circuit. Other configurations are the same as those of the first embodiment.
- two elements RA1 and RA2 are arranged in the area A of the sensor device 3, and two elements RB1 and RB2 are arranged in the area B, respectively.
- the elements RA1 and RA2 are arranged so as to sense from the cylindrical magnet 1 magnetic fields having the same size and direction. This also applies to the case where two elements are arranged in the same region.
- elements RA1, RB2, RB1, and RA2 are arranged in the first arm Arm1 to the fourth arm Arm4 of the bridge circuit, respectively.
- the bridge circuit has a configuration in which the first arm and the fourth arm intersect and the second arm and the third arm intersect. That is, the elements arranged in the same region are arranged on the intersecting arms of the bridge circuit.
- the first arm and the third arm are connected in series between the DC power supply (VCC) and the ground (GND), and the second arm and the fourth arm are similarly connected between the DC power supply (VCC) and the ground (GND). Connect the arm in series.
- the first arm and the third arm are connected in parallel with the second arm and the fourth arm.
- the midpoint potential of the first and third arms is V1
- the midpoint potential of the second and fourth arms is V2.
- the midpoint of the first arm and the third arm is connected to the inverting input terminal ( ⁇ ) of the differential amplifier 4
- the midpoint of the second arm and the fourth arm is connected to the non-inverting input terminal (+) of the differential amplifier 4.
- the signal processing unit 5 outputs the rotation angle of the magnet rotor 1 based on the output voltage Vout.
- the resistance values of the elements RA1 and RB1 are triangular as shown by thin lines in FIG. It changes in a wave shape.
- the elements RA1 and RA2 and the elements RB1 and RB2 are arranged so as to sense magnetic fields having the same magnitude and direction from the cylindrical magnet 1, so that the resistance values of the elements RA1 and RA2 are equal.
- the resistance values of RB1 and RB2 are equal.
- the midpoint potential V1 of the elements RA1 and RB1 corresponds to the midpoint potential Vout of the elements RA and RB of the first embodiment.
- the output voltage Vout indicated by a bold line in FIG. 5 has a shape close to a sine wave.
- the midpoint potential V2 has a shape close to a sine wave as shown by a thick line in FIG. The same applies to the midpoint potential V2 of the elements RA2 and RB2. Therefore, as shown in FIG.
- FIG. 14 shows resistance values of the elements RA1 and RA2 and the elements RB1 and RB2 to which a fifth-order harmonic component is added.
- FIG. 16 shows a difference signal between the waveform of the output voltage Vout shown in FIG. 15 and a sine wave.
- elements RA1 and RA2 and elements RB1 and RB2 that sense the same magnetic field are arranged on the intersecting arms to constitute a bridge circuit. Therefore, out of the harmonic components added to the intermediate potentials V1 and V2, even-order harmonics have phases reversed between V1 and V2. Since the output voltage Vout is a differential output of V1 and V2, even-order harmonics cancel each other. Thereby, only the odd order should be considered for the harmonic component of the output voltage Vout resulting from the difference in amplitude of the magnetic field magnitude between the rotational direction and the radial direction. Further, even when external noise is added to the output voltage Vout, noise corresponding to the second harmonic component can be suppressed.
- the regions A and B are arranged at a distance of 2/3 times the magnetization width ⁇ of the cylindrical magnet 2, thereby providing a third order. It was found that harmonic components are suppressed and the level of distortion can be reduced. Furthermore, since the bridge circuit is configured, second harmonic components such as external noise can be suppressed.
- FIG. 17 is a wiring diagram of the magnetoresistive effect element in the rotation angle detecting device according to the third embodiment of the present invention.
- the sensor device 3 is provided with four regions A to D, and two elements are arranged in each region.
- the rotation angle detection device according to the present embodiment is different from the configuration of the second embodiment in that it has two bridge circuits and uses three differential amplifiers 4A to 4C. Other configurations are the same as those of the second embodiment.
- the elements RA1 and RA2 are disposed in the region A of the sensor device 3, the elements RB1 and RB2 are disposed in the region B, the elements RC1 and RC2 are disposed in the region C, and the elements RD1 and RD2 are disposed in the region D.
- the elements RA1 and RA2 are disposed in the region A of the sensor device 3
- the elements RB1 and RB2 are disposed in the region B
- the elements RC1 and RC2 are disposed in the region C
- the elements RD1 and RD2 are disposed in the region D.
- the bridge circuit A shown in FIG. 10 is configured using four elements RA1, RB1, RA2, and RB2. Further, the bridge circuit B is configured in the same manner as the bridge circuit A using the four elements RC1, RD1, RC2, and RD2. As shown in FIG. 17, the elements arranged in the same region are arranged on the intersecting arms of the bridge circuit.
- the bridge circuit A is provided with a differential amplifier 4A
- the bridge circuit B is provided with a differential amplifier 4B.
- the differential amplifier 4A is connected to the inverting input terminal ( ⁇ ) of the differential amplifier 4C
- the differential amplifier 4B is connected to the non-inverting input terminal (+) of the differential amplifier 4C.
- the signal processing unit 5 outputs the rotation angle of the magnet rotor 1 based on the output voltage Vout.
- the arrangement of the regions is determined so that harmonic components of two kinds of orders n1 and n2 can be suppressed.
- L AB the distance between the region A and the region B is described as L AB .
- FIG. 18 is a layout diagram of regions provided in the sensor device of the rotation angle detection device according to the third embodiment of the present invention.
- FIG. 23 is an alternative view of the arrangement of regions provided in the sensor device of the rotation angle detection device according to the third embodiment of the present invention.
- the same effect as the arrangement can be obtained. That is, when the arrangement of the areas C and D is reversed, the distance between the areas is equal to (2 ⁇ 2 ⁇ / n1). Similarly, when the arrangement of the areas A and B is reversed, the distance between the areas is equal to (2 ⁇ 2 ⁇ / n1). Furthermore, when the arrangement of the areas A and C is reversed, the distance between the areas is equal to (2 ⁇ 2 ⁇ / n2).
- FIG. 24 is an alternative view of the arrangement of regions provided in the sensor device of the rotation angle detection device according to the third embodiment of the present invention.
- FIG. 29 is an alternative view of the arrangement of regions provided in the sensor device of the rotation angle detection device according to the third embodiment of the present invention.
- the same effect as the arrangement can be obtained. That is, when the arrangement of the areas A and B is reversed, the distance between the areas is equal to (2 ⁇ 2 ⁇ / n1). Similarly, when the arrangement of regions C and D is reversed, the distance between the regions is equal to (2 ⁇ 2 ⁇ / n1). Further, when the arrangement of the areas A and C is reversed, the distance between the areas is equal to (2 ⁇ 2 ⁇ / n2).
- FIG. 30 is a wiring diagram of magnetoresistive elements in the rotation angle detection device according to the fourth embodiment of the present invention.
- the number of regions provided in the sensor device 3 is increased to increase the number p of harmonic components that can be suppressed (p is an integer of 1 or more).
- the rotation angle detection device according to the present embodiment is different from the second embodiment in that it has one bridge circuit and a plurality of elements are arranged in each arm of the bridge circuit. Other configurations of the present embodiment are the same as those of the second embodiment.
- the sensor device 3 is provided with four regions A to D, and two elements are arranged in each region. Elements RA1 and RA2 are arranged in area A of sensor device 3, elements RB1 and RB2 are arranged in area B, elements RC1 and RC2 are arranged in area C, and elements RD1 and RD2 are arranged in area D, respectively.
- elements RA1 and RD1 are provided in the first arm of the bridge circuit
- elements RB2 and RC2 are provided in the second arm
- elements RB1 and RC1 are provided in the third arm
- elements RA2 and RD2 are provided in the fourth arm.
- the bridge circuit has a configuration in which the first arm and the fourth arm intersect and the second arm and the third arm intersect. That is, the elements arranged in the same region are arranged on the intersecting arms of the bridge circuit.
- the first arm and the third arm are connected in series between the DC power supply (VCC) and the ground (GND), and the second arm and the fourth arm are similarly connected between the DC power supply (VCC) and the ground (GND).
- Each arm is connected in series.
- the first arm and the third arm are connected in parallel with the second arm and the fourth arm. In addition, as long as it exists in the same arm, you may replace the order which connects an element.
- the midpoint potential of the first and third arms is V1
- the midpoint potential of the second and fourth arms is V2.
- the midpoint of the first arm and the third arm is connected to the inverting input terminal ( ⁇ ) of the differential amplifier 4
- the midpoint of the second arm and the fourth arm is connected to the non-inverting input terminal (+) of the differential amplifier 4.
- the signal processing unit 5 outputs the rotation angle of the magnet rotor 1 based on the output voltage Vout.
- FIG. 32 shows the difference between the output voltages Vout and Vout of the differential amplifier 4 and the sine wave. It can be seen that the output voltage Vout has a waveform substantially similar to a sine wave.
- the configuration of this embodiment can suppress two types of harmonic components. Furthermore, there is an advantage that the number of differential amplifiers can be reduced as compared with the third embodiment.
- FIG. 33 is an alternative view of the arrangement of regions provided in the sensor device of the rotation angle detection device according to the fourth embodiment of the present invention.
- eight elements are arranged. By using twice as many as 16 elements, harmonic components of three kinds of orders can be suppressed.
- the sensor device 3 is provided with eight regions A to H.
- L AE 2 ⁇ / n 3 (n 3 is (Integer of 2 or more).
- FIG. 34 is a wiring diagram of the magnetoresistive effect element in the rotation angle detection device according to the fourth embodiment of the present invention. Elements are arranged on the first to fourth arms of the bridge circuit as shown in FIG. In addition, as long as it exists in the same arm, you may replace the order which connects an element.
- FIG. 35 is a table showing an example of the arrangement interval of each region and the wiring of each magnetoresistive element that can suppress p types of harmonic components in the rotation angle detection device according to the fourth embodiment of the present invention. According to this rule, harmonic components of four or more orders can be suppressed. In addition, as long as it exists in the same arm, you may replace the order which connects an element.
- the arrangement interval and the wiring are only examples, and the p-type harmonic wave components can be suppressed by other configurations.
- Regions (1) to (2 p ) are provided on the sensor device 3. Further, according to the rules of FIG. 35, the region (2 k m- (2 k -1 )) and region (2 k m- (2 k -1 ) +2 k-1), is disposed at a distance L k (K and m are integers of 1 or more). In the region (j), two elements R (j) 1 and element R (j) 2 are arranged (j is an integer of 1 or more). The distance L k is expressed by the following formula (6).
- the elements R (1) 1 to R (2 p ) 1 and elements R (1) 2 to R (2 p ) 2 constitute a bridge circuit.
- the bridge circuit has a configuration in which the first arm and the fourth arm intersect and the second arm and the third arm intersect.
- the elements R (1) 1 to R (16) 1 correspond to the elements RA1 to RP1
- the elements R (1) 2 to R (16) 2 correspond to the elements RA2 to RP2, respectively.
- eight elements RA1, RD1, RF1, RG1, RJ1, RK1, RM1, RP1 connected in series are arranged.
- Eight elements RB2, RC2, RE2, RH2, RI2, RL2, RN2, and RO2 are arranged on the second arm.
- Eight elements RB1, RC1, RE1, RH1, RI1, RL1, RN1, and RO1 are arranged on the third arm.
- Eight elements RA2, RD2, RF2, RG2, RJ2, RK2, RM2, RP2 are arranged on the fourth arm.
- each arm has 2 p-1 elements.
- the elements arranged in the same region are arranged on the intersecting arms of the bridge circuit.
Abstract
Description
の形態において、同様の構成要素については同一の符号を付している。 Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In addition, in each following embodiment, the same code | symbol is attached | subjected about the same component.
図1は、本発明の回転角度検出装置の構成図である。回転角度検出装置10は、円筒磁石2を搭載した磁石回転子1と、円筒磁石2により生じる磁界を感知するセンサデバイス3とを備える。円筒磁石2は、N極及びS極が周面に沿って着磁幅λで交互に着磁された2m極(mは1以上の整数)を有する。図1は、m=5とした場合の構成図を示している。センサデバイス3は、磁石回転子1から所定の距離を隔てて配置している。
FIG. 1 is a configuration diagram of a rotation angle detection device of the present invention. The rotation angle detection device 10 includes a
図1において、磁石回転子1が矢印の方向に回転すると、図2に示すように、センサデバイス3に対して磁極が矢印の方向へ移動する。磁極の移動に伴い、素子RA,RBが感知する磁界の方向が変化し、それに伴って素子RA,RBの抵抗値も図4に示すように変化する。 (When n = 3)
In FIG. 1, when the
図7には、5次の高調波成分を付加した素子RA,RBの抵抗値が示されている。素子RA,RBの抵抗値は、図7に示すように、72°(=180°×2/5)の位相差を有する。素子RA,RBの抵抗値は5次の高調波成分が付加され歪んでいるが、出力電位Voutは正弦波に近いものとなっていることがわかる。 (When n = 5)
FIG. 7 shows resistance values of the elements RA and RB to which the fifth-order harmonic component is added. The resistance values of the elements RA and RB have a phase difference of 72 ° (= 180 ° × 2/5) as shown in FIG. It can be seen that the resistance values of the elements RA and RB are distorted by adding a fifth-order harmonic component, but the output potential Vout is close to a sine wave.
図10は、本発明の実施の形態2による回転角度検出装置における、磁気抵抗効果素子の配線図である。本実施形態による回転角度検出装置は、領域A,Bにそれぞれ2つの素子を配置し、4つの素子で構成したブリッジ回路を有する点で実施形態1の構成と異なる。また、ブリッジ回路に差動増幅器4を設ける。その他の構成は、実施形態1と同様である。
FIG. 10 is a wiring diagram of the magnetoresistive effect element in the rotation angle detecting device according to the second embodiment of the present invention. The rotation angle detection device according to the present embodiment is different from the configuration of the first embodiment in that two elements are arranged in the regions A and B, respectively, and a bridge circuit configured by four elements is provided. Further, a
回転方向の磁界の大きさの振幅Pが半径方向の該振幅Qより小さい場合、例えばQ/P=0.7の場合、図11に細線で示すように、素子RA1,RB1の抵抗値は三角波状に変化する。本実施形態において、素子RA1,RA2、素子RB1,RB2は、それぞれ大きさ、向きが同じ磁界を円筒磁石1から感知するように配置しているので、素子RA1とRA2の抵抗値は等しく、素子RB1とRB2の抵抗値は等しい。 (When n = 3)
When the amplitude P of the magnitude of the magnetic field in the rotational direction is smaller than the amplitude Q in the radial direction, for example, Q / P = 0.7, the resistance values of the elements RA1 and RB1 are triangular as shown by thin lines in FIG. It changes in a wave shape. In the present embodiment, the elements RA1 and RA2 and the elements RB1 and RB2 are arranged so as to sense magnetic fields having the same magnitude and direction from the
図14に、5次の高調波成分を付加した、素子RA1,RA2及び素子RB1,RB2の抵抗値を示す。素子RA1,RA2及びRB1,RB2の抵抗値は、n=3の場合と同様に、5次の高調波成分が付加され歪んでいるが、中点電位V1,V2は正弦波に近いものとなっていることがわかる。 (When n = 5)
FIG. 14 shows resistance values of the elements RA1 and RA2 and the elements RB1 and RB2 to which a fifth-order harmonic component is added. The resistance values of the elements RA1, RA2 and RB1, RB2 are distorted by adding fifth-order harmonic components as in the case of n = 3, but the midpoint potentials V1, V2 are close to sine waves. You can see that
図17は、本発明の実施の形態3による回転角度検出装置における、磁気抵抗効果素子の配線図である。本実施形態においては、例えば図18に示すように、センサデバイス3にA~Dの4つの領域を設け、各領域には、それぞれ2つの素子を配置する。本実施形態による回転角度検出装置は、2系統のブリッジ回路を有し、3つの差動増幅器4A~4Cを使用する点で実施形態2の構成と異なる。その他の構成は、実施形態2と同様である。
FIG. 17 is a wiring diagram of the magnetoresistive effect element in the rotation angle detecting device according to the third embodiment of the present invention. In the present embodiment, for example, as shown in FIG. 18, the
図18は、本発明の実施の形態3による回転角度検出装置の、センサデバイスに設けた領域の配置図である。本配置例において、領域A~領域Dは、LAB=LCD=2λ/n1(n1=3)、LAC=2λ/n2(n2=2)を満たすように配置する。これにより、2次及び3次の高調波成分を抑制することができる。 (Arrangement example 3-1)
FIG. 18 is a layout diagram of regions provided in the sensor device of the rotation angle detection device according to the third embodiment of the present invention. In this arrangement example, the areas A to D are arranged so as to satisfy L AB = L CD = 2λ / n1 (n1 = 3) and L AC = 2λ / n2 (n2 = 2). Thereby, the secondary and tertiary harmonic components can be suppressed.
上記では、n1>n2として、2次及び3次の高調波成分を抑制する場合について説明した。逆に、n1<n2の場合も、同様の効果が得られる。以下、n1=2、n2=3として、2次及び3次の高調波成分を抑制する場合について説明する。 (Arrangement Example 3-2)
In the above description, a case where n1> n2 and second-order and third-order harmonic components are suppressed has been described. Conversely, the same effect can be obtained when n1 <n2. Hereinafter, the case where the second-order and third-order harmonic components are suppressed with n1 = 2 and n2 = 3 will be described.
図30は、本発明の実施の形態4による回転角度検出装置における、磁気抵抗効果素子の配線図である。本実施形態では、センサデバイス3に設ける領域の数を増加させて、抑制可能な高調波成分の数p(pは1以上の整数)を増加させる。図30に示すように、本実施形態による回転角度検出装置は、ブリッジ回路を1つ有し、ブリッジ回路の各アームに複数の素子を配置する点で実施形態2と異なる。本実施形態のその他の構成は、実施形態2と同様である。
FIG. 30 is a wiring diagram of magnetoresistive elements in the rotation angle detection device according to the fourth embodiment of the present invention. In the present embodiment, the number of regions provided in the
実施形態3と同様に、センサデバイス3にA~Dの4つの領域を設け、各領域には、それぞれ2つの素子を配置する。センサデバイス3の領域Aに素子RA1,RA2を、領域Bに素子RB1,RB2を、領域Cに素子RC1,RC2を、領域Dに素子RD1,RD2をそれぞれ配置する。 (When p = 2)
Similar to the third embodiment, the
図33は、本発明の実施の形態4による回転角度検出装置の、センサデバイスに設けた領域の配置の代替図である。図30では8つの素子を配置した。その2倍の16個の素子を使用することにより、3種類の次数の高調波成分を抑制することができる。図33に示すように、センサデバイス3にA~Hの8つの領域を設ける。センサデバイス3の領域Aに素子RA1,RA2を、領域Bに素子RB1,RB2を、領域Cに素子RC1,RC2を、領域Dに素子RD1,RD2を、領域Eに素子RE1,RE2を、領域Fに素子RF1,RF2を、領域Gに素子RG1,RG2を、領域Hに素子RH1,RH2をそれぞれ配置する。 (When p = 3)
FIG. 33 is an alternative view of the arrangement of regions provided in the sensor device of the rotation angle detection device according to the fourth embodiment of the present invention. In FIG. 30, eight elements are arranged. By using twice as many as 16 elements, harmonic components of three kinds of orders can be suppressed. As shown in FIG. 33, the
図35は、本発明の実施の形態4による回転角度検出装置の、p種類の高調波成分を抑制可能な、各領域の配置間隔及び各磁気抵抗効果素子の配線の例を示す表である。この規則に従えば、4種類以上の次数の高調波成分も抑制可能である。尚、同一アーム内であれば、素子を接続する順序は入れ替えてもよい。配置間隔及び配線は一例にすぎず、他の構成によっても、p種類の好調波成分を抑制可能である。 (When p ≧ 4)
FIG. 35 is a table showing an example of the arrangement interval of each region and the wiring of each magnetoresistive element that can suppress p types of harmonic components in the rotation angle detection device according to the fourth embodiment of the present invention. According to this rule, harmonic components of four or more orders can be suppressed. In addition, as long as it exists in the same arm, you may replace the order which connects an element. The arrangement interval and the wiring are only examples, and the p-type harmonic wave components can be suppressed by other configurations.
Claims (5)
- N極及びS極が、着磁幅λで周面に沿って交互に着磁された回転体と、
回転体が発生する磁界を感知する第1磁気検出部及び第2磁気検出部とを備え、
第1磁気検出部と第2磁気検出部とは距離L隔てて配置され、
第1基準電位と第2基準電位との間に、直列接続された第1磁気検出部及び第2磁気検出部が配置され、
第1磁気検出部と第2磁気検出部の中点電位を基に、回転体の回転角度に対応した信号を出力し、
A first magnetic detection unit and a second magnetic detection unit for sensing a magnetic field generated by the rotating body;
The first magnetic detection unit and the second magnetic detection unit are disposed at a distance L,
Between the first reference potential and the second reference potential, a first magnetic detection unit and a second magnetic detection unit connected in series are arranged,
Based on the midpoint potential of the first magnetic detection unit and the second magnetic detection unit, a signal corresponding to the rotation angle of the rotating body is output,
- N極及びS極が、着磁幅λで周面に沿って交互に着磁された回転体と、
回転体が発生する磁界を感知する第1~第4磁気検出部とを備え、
第1磁気検出部及び第4磁気検出部は、第1検出位置に配置され、
第2磁気検出部及び第3磁気検出部は、第2検出位置に配置され、
第1検出位置と第2検出位置とは距離L隔てて設けられ、
第1基準電位と第2基準電位との間に、直列接続された第1磁気検出部及び第3磁気検出部と、直列接続された第2磁気検出部及び第4磁気検出部とが並列接続され、
第1~第4磁気検出部は、ブリッジ回路を構成し、
第1磁気検出部と第4磁気検出部、第2磁気検出部と第3磁気検出部とが、それぞれブリッジ回路の交差するアームに配置され、
第1磁気検出部と第3磁気検出部の中点電位V1と、第2磁気検出部と第4磁気検出部の中点電位V2との差Vout(=V2-V1)を基に、回転体の回転角度に対応した信号を出力し、
Comprising first to fourth magnetic detection units for sensing a magnetic field generated by a rotating body,
The first magnetic detection unit and the fourth magnetic detection unit are arranged at the first detection position,
The second magnetic detection unit and the third magnetic detection unit are disposed at the second detection position,
The first detection position and the second detection position are provided at a distance L,
Between the first reference potential and the second reference potential, the first magnetic detection unit and the third magnetic detection unit connected in series, and the second magnetic detection unit and the fourth magnetic detection unit connected in series are connected in parallel. And
The first to fourth magnetic detection units constitute a bridge circuit,
The first magnetic detection unit and the fourth magnetic detection unit, the second magnetic detection unit and the third magnetic detection unit are respectively disposed on the arms where the bridge circuit intersects,
A first magnetic detection portion and the middle point potential V 1 of the third magnetic detection portion, the second magnetic detection portion and the difference between Vout (= V 2 -V 1) a group of the middle point potential V 2 of the fourth magnetic detection unit To output a signal corresponding to the rotation angle of the rotating body,
- N極及びS極が、着磁幅λで周面に沿って交互に着磁された回転体と、
回転体が発生する磁界を感知する第1~第8磁気検出部とを備え、
第1磁気検出部及び第4磁気検出部は、第1検出位置に配置され、
第2磁気検出部及び第3磁気検出部は、第2検出位置に配置され、
第5磁気検出部及び第8磁気検出部は、第3検出位置に配置され、
第6磁気検出部及び第7磁気検出部は、第4検出位置に配置され、
第1検出位置と第2検出位置とは距離L12隔てて設けられ、
第3検出位置と第4検出位置とは距離L12隔てて設けられ、
第1検出位置と第3検出位置とは距離L13隔てて設けられ、
第1基準電位と第2基準電位との間に、直列接続された第1磁気検出部及び第3磁気検出部と、直列接続された第2磁気検出部及び第4磁気検出部とが並列接続され、
第1~第4磁気検出部は、ブリッジ回路を構成し、
第1磁気検出部と第4磁気検出部、第2磁気検出部と第3磁気検出部とが、それぞれブリッジ回路の交差するアームに配置され、
第3基準電位と第4基準電位との間に、直列接続された第5磁気検出部及び第7磁気検出部と、直列接続された第6磁気検出部及び第8磁気検出部とが配置され、
第5~第8磁気検出部は、ブリッジ回路を構成し、
第5磁気検出部と第8磁気検出部、第6磁気検出部と第7磁気検出部とが、それぞれブリッジ回路の交差するアームに配置され、
第1磁気検出部と第3磁気検出部の中点電位V1と、第2磁気検出部と第4磁気検出部の中点電位V2との差V12(=V2-V1)と、第5磁気検出部と第7磁気検出部の中点電位V3と、第6磁気検出部と第8磁気検出部の中点電位V4との差V34(=V4-V3)との差Vout(=V34-V12)を基に、回転体の回転角度に対応した信号を出力し、
Comprising first to eighth magnetic detectors for sensing a magnetic field generated by a rotating body,
The first magnetic detection unit and the fourth magnetic detection unit are arranged at the first detection position,
The second magnetic detection unit and the third magnetic detection unit are disposed at the second detection position,
The fifth magnetic detection unit and the eighth magnetic detection unit are disposed at the third detection position,
The sixth magnetic detection unit and the seventh magnetic detection unit are arranged at the fourth detection position,
The first detection position and a second detection position provided apart distance L 12,
And the third detection position and a fourth detection position provided apart distance L 12,
The first detection position and the third detection position provided apart distance L 13,
Between the first reference potential and the second reference potential, the first magnetic detection unit and the third magnetic detection unit connected in series, and the second magnetic detection unit and the fourth magnetic detection unit connected in series are connected in parallel. And
The first to fourth magnetic detection units constitute a bridge circuit,
The first magnetic detection unit and the fourth magnetic detection unit, the second magnetic detection unit and the third magnetic detection unit are respectively disposed on the arms where the bridge circuit intersects,
Between the third reference potential and the fourth reference potential, a fifth magnetic detection unit and a seventh magnetic detection unit connected in series, and a sixth magnetic detection unit and an eighth magnetic detection unit connected in series are arranged. ,
The fifth to eighth magnetic detectors constitute a bridge circuit,
The fifth magnetic detection unit and the eighth magnetic detection unit, the sixth magnetic detection unit and the seventh magnetic detection unit are respectively arranged on the arms where the bridge circuit intersects,
A first magnetic detection portion and the middle point potential V 1 of the third magnetic detection unit, the difference V 12 (= V 2 -V 1 ) of the second magnetic detection portion and the midpoint potential V 2 of the fourth magnetic detection unit and a fifth magnetic detection portion and the seventh magnetic detectors midpoint potential V 3 of the difference V 34 (= V 4 -V 3 ) the sixth magnetic detection portion and the midpoint potential V 4 of the 8 magnetic detection unit And a signal corresponding to the rotation angle of the rotating body based on the difference Vout (= V 34 −V 12 )
- N極及びS極が、着磁幅λで周面に沿って交互に着磁された回転体と、
回転体が発生する磁界を感知する第1~第8磁気検出部とを備え、
第1磁気検出部及び第4磁気検出部は、第1検出位置に配置され、
第2磁気検出部及び第3磁気検出部は、第2検出位置に配置され、
第6磁気検出部及び第7磁気検出部は、第3検出位置に配置され、
第5磁気検出部及び第8磁気検出部は、第4検出位置に配置され、
第1検出位置と第2検出位置とは距離L12隔てて設けられ、
第3検出位置と第4検出位置とは距離L12隔てて設けられ、
第1検出位置と第3検出位置とは距離L13隔てて設けられ、
第1基準電位と第2基準電位との間に、直列接続された第1磁気検出部、第5磁気検出部、第3磁気検出部及び第7磁気検出部と、直列接続された第2磁気検出部、第6磁気検出部、第4磁気検出部及び第8磁気検出部とが並列接続され、
第1~第8磁気検出部は、ブリッジ回路を構成し、
ブリッジ回路の第1アームには、第1磁気検出部及び第5磁気検出部が配置され、
ブリッジ回路の第2アームには、第2磁気検出部及び第6磁気検出部が配置され、
ブリッジ回路の第3アームには、第3磁気検出部及び第7磁気検出部が配置され、
ブリッジ回路の第4アームには、第4磁気検出部及び第8磁気検出部が配置され、
第1アームと第4アームとが、ブリッジ回路の交差する位置に配置され、第2アームと第3アームとが、ブリッジ回路の交差する位置に配置され、
第1アームと第3アームの中点電位V1と、第2アームと第4アームの中点電位V2との差Vout(=V2-V1)を基に、回転体の回転角度に対応した信号を出力し、
Comprising first to eighth magnetic detectors for sensing a magnetic field generated by a rotating body,
The first magnetic detection unit and the fourth magnetic detection unit are arranged at the first detection position,
The second magnetic detection unit and the third magnetic detection unit are disposed at the second detection position,
The sixth magnetic detection unit and the seventh magnetic detection unit are disposed at the third detection position,
The fifth magnetic detection unit and the eighth magnetic detection unit are disposed at the fourth detection position,
The first detection position and a second detection position provided apart distance L 12,
And the third detection position and a fourth detection position provided apart distance L 12,
The first detection position and the third detection position provided apart distance L 13,
Between the first reference potential and the second reference potential, the first magnetic detection unit, the fifth magnetic detection unit, the third magnetic detection unit, and the seventh magnetic detection unit connected in series, and the second magnetism connected in series The detection unit, the sixth magnetic detection unit, the fourth magnetic detection unit, and the eighth magnetic detection unit are connected in parallel.
The first to eighth magnetic detection units constitute a bridge circuit,
The first arm of the bridge circuit is provided with a first magnetic detector and a fifth magnetic detector,
The second arm of the bridge circuit has a second magnetic detector and a sixth magnetic detector,
A third magnetic detection unit and a seventh magnetic detection unit are arranged on the third arm of the bridge circuit,
The fourth arm of the bridge circuit has a fourth magnetic detector and an eighth magnetic detector,
The first arm and the fourth arm are arranged at a position where the bridge circuit intersects, and the second arm and the third arm are arranged at a position where the bridge circuit intersects,
Based the midpoint potential V 1 of the first arm and the third arm, the second arm and the difference between Vout of the midpoint potential V 2 of the fourth arm (= V 2 -V 1), the angle of rotation of the rotor The corresponding signal is output,
- N極及びS極が、着磁幅λで周面に沿って交互に着磁された回転体と、
回転体が発生する磁界を感知する2p+1個の磁気検出部とを備え、
磁気検出部は、2p個の検出位置にそれぞれ2つずつ配置され、
第i検出位置(iは1以上の整数)と第j検出位置(jは1以上の整数)との間の距離はLijであって、
第1基準電位と第2基準電位との間に、直列接続された2p個の磁気検出部と、直列接続された2p個の磁気検出部とが並列接続され、
2p+1個の磁気検出部は、ブリッジ回路を構成し、
ブリッジ回路の各アームには、2p-1個の磁気検出部がそれぞれ配置され、
第1アームと第4アームとが、ブリッジ回路の交差する位置に配置され、第2アームと第3アームとが、ブリッジ回路の交差する位置に配置され、
同じ検出位置に配置された磁気検出部は、ブリッジ回路の交差するアームに配置され、
第1アームと第3アームの中点電位V1と、第2アームと第4アームの中点電位V2との差Vout(=V2-V1)を基に、回転体の回転角度に対応した信号を出力し、
2 p + 1 magnetic detectors for sensing the magnetic field generated by the rotating body,
Two magnetic detection units are arranged at 2 p detection positions, respectively.
The distance between the i th detection position (i is an integer of 1 or more) and the j th detection position (j is an integer of 1 or more) is L ij ,
Between the first reference potential and second reference potential, and 2 p pieces of the magnetic detector connected in series, and a 2 p pieces of the magnetic detector connected in series are connected in parallel,
2 p + 1 magnetic detection units constitute a bridge circuit,
Each arm of the bridge circuit is provided with 2 p-1 magnetic detectors,
The first arm and the fourth arm are arranged at a position where the bridge circuit intersects, and the second arm and the third arm are arranged at a position where the bridge circuit intersects,
Magnetic detection units arranged at the same detection position are arranged on the intersecting arms of the bridge circuit,
Based the midpoint potential V 1 of the first arm and the third arm, the second arm and the difference between Vout of the midpoint potential V 2 of the fourth arm (= V 2 -V 1), the angle of rotation of the rotor The corresponding signal is output,
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112012005322.2T DE112012005322B4 (en) | 2011-12-20 | 2012-05-25 | rotation angle detecting device |
JP2013550143A JP5762567B2 (en) | 2011-12-20 | 2012-05-25 | Rotation angle detector |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011277803 | 2011-12-20 | ||
JP2011-277803 | 2011-12-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013094236A1 true WO2013094236A1 (en) | 2013-06-27 |
Family
ID=48668145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2012/063421 WO2013094236A1 (en) | 2011-12-20 | 2012-05-25 | Rotation angle detector |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5762567B2 (en) |
DE (1) | DE112012005322B4 (en) |
WO (1) | WO2013094236A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015008439A1 (en) * | 2013-07-17 | 2015-01-22 | 株式会社デンソー | Rotation sensor |
JP2018503803A (en) * | 2014-11-24 | 2018-02-08 | ゼンジテック ゲゼルシャフト ミット ベシュレンクテル ハフツングSensitec GmbH | Magnetoresistive Wheatstone bridge and angle sensor having at least two bridges |
EP3385680A1 (en) * | 2014-03-10 | 2018-10-10 | DMG Mori Seiki Co. Ltd. | Position detecting device |
CN111693909A (en) * | 2019-03-12 | 2020-09-22 | Ntn-Snr轴承股份有限公司 | System for determining at least one rotation parameter of a rotating member |
JP2022082687A (en) * | 2017-11-15 | 2022-06-02 | 株式会社デンソー | Rotation detector |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004507725A (en) * | 2000-08-22 | 2004-03-11 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | A magnetoresistive sensor that scans a magnetic multipole wheel |
JP2006145220A (en) * | 2004-11-16 | 2006-06-08 | Shicoh Eng Co Ltd | Magnetic position detector |
WO2008130002A1 (en) * | 2007-04-20 | 2008-10-30 | Mitsubishi Electric Corporation | Magnetic rotating angle detector |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62204118A (en) | 1986-03-05 | 1987-09-08 | Hitachi Ltd | Magnetically detecting device for position or speed |
JPS63279101A (en) | 1987-05-11 | 1988-11-16 | Nippon Denso Co Ltd | Non-contact displacement detector |
US4893071A (en) | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
JPH0690046B2 (en) | 1989-01-23 | 1994-11-14 | エスエムシー株式会社 | Displacement detection device |
US5206590A (en) | 1990-12-11 | 1993-04-27 | International Business Machines Corporation | Magnetoresistive sensor based on the spin valve effect |
DE4203073C2 (en) | 1992-02-04 | 1994-12-15 | Heidenhain Gmbh Dr Johannes | Position measuring device |
JP2001012967A (en) * | 1999-04-28 | 2001-01-19 | Asahi Optical Co Ltd | Encoder and surveying instrument carrying magnetic encoder |
US6600308B2 (en) | 2001-02-05 | 2003-07-29 | Pentax Corporation | Magnetic encoder and method for reducing harmonic distortion thereof |
DE102007029819B4 (en) | 2007-06-28 | 2012-02-02 | Infineon Technologies Ag | Sensor and sensor arrangement |
WO2009099054A1 (en) | 2008-02-07 | 2009-08-13 | Hitachi Metals, Ltd. | Rotation angle detection device, rotary machine, and rotation angle detection method |
JP2009210550A (en) | 2008-02-29 | 2009-09-17 | Ribekkusu:Kk | Chain position-speed detector |
-
2012
- 2012-05-25 WO PCT/JP2012/063421 patent/WO2013094236A1/en active Application Filing
- 2012-05-25 JP JP2013550143A patent/JP5762567B2/en active Active
- 2012-05-25 DE DE112012005322.2T patent/DE112012005322B4/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004507725A (en) * | 2000-08-22 | 2004-03-11 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | A magnetoresistive sensor that scans a magnetic multipole wheel |
JP2006145220A (en) * | 2004-11-16 | 2006-06-08 | Shicoh Eng Co Ltd | Magnetic position detector |
WO2008130002A1 (en) * | 2007-04-20 | 2008-10-30 | Mitsubishi Electric Corporation | Magnetic rotating angle detector |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015008439A1 (en) * | 2013-07-17 | 2015-01-22 | 株式会社デンソー | Rotation sensor |
JP2015021795A (en) * | 2013-07-17 | 2015-02-02 | 株式会社デンソー | Rotation sensor |
DE112014003316B4 (en) | 2013-07-17 | 2019-07-11 | Denso Corporation | rotation sensor |
EP3385680A1 (en) * | 2014-03-10 | 2018-10-10 | DMG Mori Seiki Co. Ltd. | Position detecting device |
JP2018503803A (en) * | 2014-11-24 | 2018-02-08 | ゼンジテック ゲゼルシャフト ミット ベシュレンクテル ハフツングSensitec GmbH | Magnetoresistive Wheatstone bridge and angle sensor having at least two bridges |
JP2022082687A (en) * | 2017-11-15 | 2022-06-02 | 株式会社デンソー | Rotation detector |
JP7226624B2 (en) | 2017-11-15 | 2023-02-21 | 株式会社デンソー | Rotation detector |
CN111693909A (en) * | 2019-03-12 | 2020-09-22 | Ntn-Snr轴承股份有限公司 | System for determining at least one rotation parameter of a rotating member |
Also Published As
Publication number | Publication date |
---|---|
DE112012005322T5 (en) | 2014-10-02 |
JP5762567B2 (en) | 2015-08-12 |
DE112012005322B4 (en) | 2022-02-10 |
JPWO2013094236A1 (en) | 2015-12-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5752322B2 (en) | Magnetic position detector | |
JP5064492B2 (en) | Magnetic rotation angle detector | |
US8193805B2 (en) | Magnetic sensor | |
JP5062450B2 (en) | Rotating magnetic field sensor | |
JP5105200B2 (en) | Angle detection apparatus and angle detection method | |
JP4324813B2 (en) | Rotation angle detector and rotating machine | |
JP5105201B2 (en) | Angle detection apparatus and angle detection method | |
JP5013146B2 (en) | Magnetic position detector | |
US10690515B2 (en) | Dual Z-axis magnetoresistive angle sensor | |
JP5762567B2 (en) | Rotation angle detector | |
JP6969581B2 (en) | Rotation angle detector | |
JP2014020888A (en) | Magnetic sensor system | |
JP5201493B2 (en) | Position detection device and linear drive device | |
JP4900838B2 (en) | Position detection device and linear drive device | |
JP7463593B2 (en) | Magnetic sensor system and lens position detection device | |
JP2012230021A (en) | Rotation angle measuring device | |
JP5566871B2 (en) | Rotation detector | |
JP2015049046A (en) | Angle detector | |
JP7156249B2 (en) | Position detector | |
JP2020016438A (en) | Angle sensor correction device and angle sensor | |
JP2019190873A (en) | Encoder | |
JP5013135B2 (en) | Magnetic position detector | |
WO2012153554A1 (en) | Torque detection device | |
JP2014010033A (en) | Angle detection device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12859368 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2013550143 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112012005322 Country of ref document: DE Ref document number: 1120120053222 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 12859368 Country of ref document: EP Kind code of ref document: A1 |