WO2013071925A3 - Verfahren zur herstellung einer solarzelle mit pecvd-kombinationsschicht und solarzelle mit pecvd-kombinationsschicht - Google Patents
Verfahren zur herstellung einer solarzelle mit pecvd-kombinationsschicht und solarzelle mit pecvd-kombinationsschicht Download PDFInfo
- Publication number
- WO2013071925A3 WO2013071925A3 PCT/DE2012/100347 DE2012100347W WO2013071925A3 WO 2013071925 A3 WO2013071925 A3 WO 2013071925A3 DE 2012100347 W DE2012100347 W DE 2012100347W WO 2013071925 A3 WO2013071925 A3 WO 2013071925A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- solar cell
- pecvd
- combination layer
- plasma
- amorphous
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 abstract 4
- 229910004205 SiNX Inorganic materials 0.000 abstract 2
- 229910020286 SiOxNy Inorganic materials 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 238000005121 nitriding Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 229910004012 SiCx Inorganic materials 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Sustainable Development (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Sustainable Energy (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Zur Passivierung des kristallinen Siliziumsubstrats (101, 201) einer Solarzelle (100, 200) mit Basis (102, 202) und Emitter (103, 203) wird eine Kombinationsschicht (105, 205) mit den folgenden Schritten gebildet : Durchführung einer Plasmanitrierung oder einer Plasmaoxinitrierung in einem Plasma aus NH3, N2O oder einer Mischung dieser Gase zur Erzeugung eines Basisfilms (105a, 205a) aus amorphem SiNx oder amorphem SiOxNy; und unverzügliche Durchführung eines unmittelbar an die Plasmanitrierung oder Plasmaoxinitrierung anschließenden PECVD-Prozesses unter Verwendung mindestens eines siliziumhaltigen Prozessgases zum Abscheiden einer Siliziumdeckschicht (105b, 205b) aus amorphem SiNx, amorphem SiCxNy oder amorphem SiOxNy.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011086351.6 | 2011-11-15 | ||
DE102011086351A DE102011086351A1 (de) | 2011-11-15 | 2011-11-15 | Verfahren zur Herstellung einer Solarzelle mit PECVD-Kombinationsschicht und Solarzelle mit PECVD-Kombinationsschicht |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2013071925A2 WO2013071925A2 (de) | 2013-05-23 |
WO2013071925A3 true WO2013071925A3 (de) | 2014-03-20 |
Family
ID=47429481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2012/100347 WO2013071925A2 (de) | 2011-11-15 | 2012-11-14 | Verfahren zur herstellung einer solarzelle mit pecvd-kombinationsschicht und solarzelle mit pecvd-kombinationsschicht |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102011086351A1 (de) |
WO (1) | WO2013071925A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106024979A (zh) * | 2016-06-21 | 2016-10-12 | 苏天平 | 一种减反射膜的制备方法 |
CN110085686A (zh) * | 2019-05-06 | 2019-08-02 | 苏州腾晖光伏技术有限公司 | 一种双面太阳能电池及其制备方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO341687B1 (no) * | 2013-11-19 | 2017-12-18 | Inst Energiteknik | Passiveringssabel på en solcelle av krystallinsk silisium |
KR101846444B1 (ko) * | 2017-01-13 | 2018-04-06 | 엘지전자 주식회사 | 태양 전지 |
DE102017116419A1 (de) * | 2017-07-20 | 2019-01-24 | International Solar Energy Research Center Konstanz E.V. | Verfahren zur Herstellung von PERT Solarzellen |
CN110931601A (zh) * | 2019-11-27 | 2020-03-27 | 通威太阳能(安徽)有限公司 | 一种改善晶体硅太阳能电池抗pid性能的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100029038A1 (en) * | 2006-11-22 | 2010-02-04 | Tokyo Electron Limited | Manufacturing method of solar cell and manufacturing apparatus of solar cell |
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2011
- 2011-11-15 DE DE102011086351A patent/DE102011086351A1/de not_active Withdrawn
-
2012
- 2012-11-14 WO PCT/DE2012/100347 patent/WO2013071925A2/de active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100029038A1 (en) * | 2006-11-22 | 2010-02-04 | Tokyo Electron Limited | Manufacturing method of solar cell and manufacturing apparatus of solar cell |
Non-Patent Citations (3)
Title |
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BOSE M ET AL: "Effect of ammonia plasma pretreatment on the plasma enhanced chemical vapor deposited silicon nitride films", MATERIALS LETTERS, vol. 48, no. 6, 1 May 2001 (2001-05-01), NORTH HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, pages 336 - 341, XP004256774, ISSN: 0167-577X, DOI: 10.1016/S0167-577X(00)00323-2 * |
PALOURA E ET AL: "SILICON NITRIDE FILMS GROWN ON SILICON BELOW 300 DEG C IN LOW POWER NITROGEN PLASMA", APPLIED PHYSICS LETTERS, vol. 49, no. 2, 14 July 1986 (1986-07-14), AMERICAN INSTITUTE OF PHYSICS, US, pages 97 - 99, XP000813692, ISSN: 0003-6951, DOI: 10.1063/1.97363 * |
TAKAKURA T ET AL: "Effect of plasma pretreatment on fixed charge at the silicon nitride/silicon interface", JOURNAL OF APPLIED SCIENCE, vol. 49, 20 April 2010 (2010-04-20), pages 046502-1 - 046502-5, XP002709729 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106024979A (zh) * | 2016-06-21 | 2016-10-12 | 苏天平 | 一种减反射膜的制备方法 |
CN110085686A (zh) * | 2019-05-06 | 2019-08-02 | 苏州腾晖光伏技术有限公司 | 一种双面太阳能电池及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2013071925A2 (de) | 2013-05-23 |
DE102011086351A1 (de) | 2013-05-16 |
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