WO2013058557A3 - 기판정렬장치 - Google Patents

기판정렬장치 Download PDF

Info

Publication number
WO2013058557A3
WO2013058557A3 PCT/KR2012/008504 KR2012008504W WO2013058557A3 WO 2013058557 A3 WO2013058557 A3 WO 2013058557A3 KR 2012008504 W KR2012008504 W KR 2012008504W WO 2013058557 A3 WO2013058557 A3 WO 2013058557A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
alignment device
substrate alignment
support pins
loaded
Prior art date
Application number
PCT/KR2012/008504
Other languages
English (en)
French (fr)
Other versions
WO2013058557A2 (ko
Inventor
이은호
오홍록
고진영
Original Assignee
주식회사 테라세미콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 테라세미콘 filed Critical 주식회사 테라세미콘
Publication of WO2013058557A2 publication Critical patent/WO2013058557A2/ko
Publication of WO2013058557A3 publication Critical patent/WO2013058557A3/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)

Abstract

기판정렬장치가 개시된다. 본 발명에 따른 기판정렬장치는, 기판이 본체에 투입되어 지지핀에 탑재 지지되었을 때, 기판의 테두리부측 부위가 지지핀에 탑재 지지되었는가를 감지하는 수단이 마련되므로, 기판을 이동시켜 정렬할 때, 기판 또는 지지핀이 손상되는 것을 방지할 수 있는 효과가 있다.
PCT/KR2012/008504 2011-10-18 2012-10-18 기판정렬장치 WO2013058557A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110106296A KR101355213B1 (ko) 2011-10-18 2011-10-18 기판 정렬 장치
KR10-2011-0106296 2011-10-18

Publications (2)

Publication Number Publication Date
WO2013058557A2 WO2013058557A2 (ko) 2013-04-25
WO2013058557A3 true WO2013058557A3 (ko) 2013-06-13

Family

ID=48141538

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/008504 WO2013058557A2 (ko) 2011-10-18 2012-10-18 기판정렬장치

Country Status (3)

Country Link
KR (1) KR101355213B1 (ko)
TW (1) TW201324671A (ko)
WO (1) WO2013058557A2 (ko)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002154648A (ja) * 2000-11-15 2002-05-28 Fuji Photo Film Co Ltd 基板カセット
KR200298915Y1 (ko) * 2002-09-17 2003-01-03 아남반도체 주식회사 Ｃｍｐ 장비의 웨트 스테이션
JP3977481B2 (ja) * 1997-04-11 2007-09-19 淀川ヒューテック株式会社 基板用トレイカセット
KR20080066558A (ko) * 2007-01-12 2008-07-16 가부시키가이샤 다이후쿠 물품 반송 장치와 물품 위치 오차 검출 방법
KR20090115002A (ko) * 2008-04-30 2009-11-04 주식회사 테라세미콘 홀더 스테이지

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977481B2 (ja) * 1997-04-11 2007-09-19 淀川ヒューテック株式会社 基板用トレイカセット
JP2002154648A (ja) * 2000-11-15 2002-05-28 Fuji Photo Film Co Ltd 基板カセット
KR200298915Y1 (ko) * 2002-09-17 2003-01-03 아남반도체 주식회사 Ｃｍｐ 장비의 웨트 스테이션
KR20080066558A (ko) * 2007-01-12 2008-07-16 가부시키가이샤 다이후쿠 물품 반송 장치와 물품 위치 오차 검출 방법
KR20090115002A (ko) * 2008-04-30 2009-11-04 주식회사 테라세미콘 홀더 스테이지

Also Published As

Publication number Publication date
KR20130042156A (ko) 2013-04-26
KR101355213B1 (ko) 2014-01-28
WO2013058557A2 (ko) 2013-04-25
TW201324671A (zh) 2013-06-16

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