WO2013058005A1 - Dispositif de purification d'air local - Google Patents

Dispositif de purification d'air local Download PDF

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Publication number
WO2013058005A1
WO2013058005A1 PCT/JP2012/070072 JP2012070072W WO2013058005A1 WO 2013058005 A1 WO2013058005 A1 WO 2013058005A1 JP 2012070072 W JP2012070072 W JP 2012070072W WO 2013058005 A1 WO2013058005 A1 WO 2013058005A1
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WO
WIPO (PCT)
Prior art keywords
air
air flow
opening surface
flow opening
push hood
Prior art date
Application number
PCT/JP2012/070072
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English (en)
Japanese (ja)
Inventor
裕仁 久保田
盛雄 友成
Original Assignee
興研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 興研株式会社 filed Critical 興研株式会社
Publication of WO2013058005A1 publication Critical patent/WO2013058005A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
    • B01D45/08—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
    • B01D50/20—Combinations of devices covered by groups B01D45/00 and B01D46/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
    • F24F2013/0608—Perforated ducts

Definitions

  • the present invention relates to a local air cleaning device.
  • a clean bench is often used as a device for improving the air cleanliness of a local work space.
  • a general clean bench only the front surface of the work table is a work opening, and the other surfaces are enclosed to maintain cleanliness.
  • a clean air outlet is arranged in the enclosure, and an operator works by putting his hand through the opening for work in front.
  • the present invention has been made in view of the above problems, and an object thereof is to provide a local air cleaning device having a simple structure.
  • the local air cleaning device of the present invention comprises: A push hood having an air flow opening surface for blowing a cleaned uniform air flow;
  • the push hood is arranged so that the purified uniform air flow blown out from the air flow opening surface collides with an air collision surface on the downstream side of the air flow opening surface,
  • an open area is formed between the air flow opening surface of the push hood and the air collision surface,
  • the cleaned uniform air flow blown out from the air flow opening surface collides with the air collision surface and flows out of the open region, thereby comparing the inside of the open region with other regions. It is characterized by high cleanliness.
  • the push hood is formed by connecting a plurality of push hoods, for example.
  • the flow rate of the purified uniform air flow blown out from the air flow opening surface is preferably 0.2 to 0.5 m / s.
  • the width of the air flow opening surface of the push hood is 2 m or more and less than 10 m,
  • the distance between the air flow opening surface of the push hood and the air collision surface is a distance that the uniform air flow blown from the air flow opening surface collides with the air collision surface within 4 seconds. preferable.
  • the width of the air flow opening surface of the push hood is 1 m or more and less than 2 m, The distance between the air flow opening surface of the push hood and the air collision surface is a distance that the uniform air flow blown from the air flow opening surface collides with the air collision surface within 3 seconds. preferable.
  • the width of the air flow opening surface of the push hood is 0.2 m or more and less than 1 m, The distance between the air flow opening surface of the push hood and the air collision surface is a distance that the uniform air flow blown from the air flow opening surface collides with the air collision surface within 2 seconds. preferable.
  • the air collision surface has a bent portion that is bent toward the push hood in the vicinity of a position facing the end of the air flow opening surface of the push hood.
  • the width of the air flow opening surface of the push hood is 2 m or more and less than 10 m,
  • the distance between the air flow opening surface of the push hood and the air collision surface is a distance at which the uniform air flow blown from the air flow opening surface collides with the air collision surface within 6 seconds. preferable.
  • the width of the air flow opening surface of the push hood is 1 m or more and less than 2 m,
  • the distance between the air flow opening surface of the push hood and the air collision surface is a distance at which the uniform air flow blown from the air flow opening surface collides with the air collision surface within 5 seconds.
  • the width of the air flow opening surface of the push hood is 0.2 m or more and less than 1 m,
  • the distance between the air flow opening surface of the push hood and the air collision surface is a distance that the uniform air flow blown from the air flow opening surface collides with the air collision surface within 3 seconds. preferable.
  • a local air cleaning device having a simple structure can be provided.
  • FIG. 3 is a diagram illustrating measurement positions in Example 1.
  • FIG. 1 is a diagram illustrating an example of a local air cleaning device according to an embodiment of the present invention.
  • the local air cleaning device 1 of the present invention includes a push hood 2 disposed so as to face an air collision surface W such as a wall or a partition.
  • the push hood 2 only needs to have a mechanism for blowing out a purified uniform air flow.
  • the push hood 2 that has been used in a push-pull type ventilator has a basic structure and a cleaning filter is provided inside. A structure can be adopted.
  • the uniform air flow and the uniform flow here are synonymous with the uniform flow described in “Factory ventilation” written by Taro Hayashi (Japan Society for Air Conditioning and Hygiene Engineering, published in 1982). It means the flow of light wind speed that does not occur.
  • the present invention is not intended to provide an air blowing device that strictly defines the flow velocity and velocity distribution of air.
  • the uniform air flow preferably has, for example, a variation in velocity distribution with no obstacles within ⁇ 50%, more preferably within ⁇ 30% of the average value.
  • Fig. 2 shows the structure of the push hood 2.
  • the housing 21 of the push hood 2 is formed in a substantially rectangular parallelepiped shape, and an air flow suction surface 22 is formed on one surface thereof.
  • the air flow suction surface 22 includes a surface in which a plurality of holes are formed on the entire surface of the housing 21.
  • outside air or room air that is ambient air outside the push hood 2 is taken in from this hole.
  • An air blowing surface (air flow opening surface) 23 is formed on the other surface of the housing 21 that faces the air flow suction surface 22.
  • the air flow opening surface 23 includes a surface in which a plurality of holes are formed on the entire surface of the housing 21.
  • size of the airflow opening surface 23 of the push hood 2 is not specifically limited, For example, it is 1050 mm x 850 mm.
  • the push hood 2 is disposed such that the air flow opening surface 23 faces the air collision surface W such as a wall with a distance X therebetween.
  • the fact that the air flow opening surface 23 faces the air collision surface W is not limited to the state in which the air flow opening surface 23 of the push hood 2 and the air collision surface W face each other.
  • the push hood 2 in which the air flow opening surface 23 and the air collision surface W are slightly inclined is also included.
  • the inclination of the air flow opening surface 23 and the air collision surface W of the push hood 2 is preferably within the range of about 30 ° formed by the air flow opening surface 23 and the air collision surface W.
  • a blower mechanism 24, a high-performance filter 25, and a rectifying mechanism 26 are disposed in the housing 21.
  • the air blowing mechanism 24 is disposed on the air flow suction surface 22 side in the housing 21.
  • the blower mechanism 24 includes a fan for blowing air.
  • the blower mechanism 24 takes in outside air and room air that are ambient air of the push hood 2 from the airflow suction surface 22 and blows out an airflow from the airflow opening surface 23.
  • the blower mechanism 24 is formed so that the flow velocity of the airflow blown out from the airflow opening surface 23 can be varied by controlling the blowing force of the fan.
  • the high performance filter 25 is disposed between the air blowing mechanism 24 and the rectifying mechanism 26.
  • the high performance filter 25 is composed of a high performance filter according to the cleaning level such as a HEPA filter (High (Efficiency Particulate Air Filter) and a ULPA filter (Ultra Low Penetration Air Filter) for filtering the ambient air taken in. .
  • the high performance filter 25 cleans the ambient air taken in by the blower mechanism 24 to clean air having a desired cleaning level.
  • the clean air cleaned to a desired cleaning level by the high-performance filter 25 is sent to the rectifying mechanism 26 by the blower mechanism 24.
  • the rectifying mechanism 26 is disposed between the high-performance filter 25 and the air flow opening surface 23.
  • the rectifying mechanism 26 includes an air resistor (not shown), which is formed of a punching plate, a net member, or the like.
  • the rectifying mechanism 26 is blown from the high-performance filter 25 and blown air that is biased in the air flow rate with respect to the entire air flow opening surface 23 is made uniform with no air flow rate bias in the entire air flow opening surface 23. Correct (rectify) the air flow (uniform air flow).
  • the rectified uniform air flow is blown out of the push hood 2 from the entire air flow opening surface 23 by the blower mechanism 24.
  • the push hood 2 is preferably provided with a pre-filter 27 between the air flow suction surface 22 in the housing 21 and the air blowing mechanism 24.
  • An example of the prefilter 27 is a medium performance filter.
  • the ambient air in the vicinity of the air flow suction surface 22 taken in by the blower mechanism 24 of the push hood 2 is cleaned by the pre-filter 27 and the high-performance filter 25 to a desired cleaning level. Cleaned with clean air. Then, the cleaned clean air is rectified into a uniform air flow by the rectifying mechanism 26, and the cleaned uniform air flow is blown out from the entire air flow opening surface 23 to the air collision surface W. The air flow blown out from the air flow opening surface 23 collides with the air collision surface W. As shown in FIG. 4, when the air flow opening surface 23 is directly opposed to the air collision surface W, the uniform air flow exhibits a behavior that changes the flow direction substantially perpendicularly when it collides with the air collision surface W.
  • the flow rate of the purified uniform air flow blown out from the air flow opening surface 23 is preferably 0.3 to 0.5 m / s. If you want to reduce the wind speed to ⁇ 0.3m / s or if the local air cleaning device 1 is contaminated and you want to clean it quickly, increase the wind speed to 0.5 ⁇ 0.7m / s, or select as appropriate. It is also possible to do.
  • the flow rate is slowed, the rotational speed of the fan of the blower mechanism can be suppressed, so that the noise value and power consumption can be suppressed. Accordingly, the amount of air blown is reduced, so that the amount of dust accumulated on the pre-filter 27 and the high-performance filter 25 can be reduced.
  • the flow rate of the uniform air flow is set to about 0.5 m / s.
  • the flow velocity of the uniform air flow is set to 0.2 m / s.
  • the wind speed of the uniform air flow blown out from the air flow opening surface 23 is increased too much, a vortex portion is generated, causing turbulent flow when the uniform air flow blows out from the air flow opening surface 23, and the air flow opening surface.
  • the wind speed of the uniform air flow blown out from the air flow opening surface 23 is a wind speed that does not cause a vortex.
  • the distance between the air flow opening surface 23 and the air collision surface W is within a distance of 4 times the flow velocity when the width of the air flow opening surface 23 is 2 m or more and less than 10 m (the air flow opening surface 23 is blown out.
  • the distance at which the uniform air flow collides with the air collision surface W within 4 seconds is preferable.
  • the width of the air flow opening surface 23 is 1 m or more and less than 2 m, the distance within three times the flow velocity (the uniform air flow blown from the air flow opening surface 23 collides with the air collision surface W within 3 seconds. Within a distance).
  • the air collision surface W is within a distance twice the flow velocity (the uniform air flow blown from the air flow opening surface 23 is within 2 seconds. It is preferable to set the distance to collide with. This is because the open area between the air flow opening surface 23 and the air collision surface W can be made highly clean by setting such a distance.
  • the width (L) of the air flow opening surface 23 refers to the diameter of the circle when the air flow opening surface 23 is circular, as shown in FIG.
  • the width (L) of the air flow opening surface 23 is the diameter of the largest inscribed circle, that is, the length of the short side, as shown in FIG. Say.
  • the width (L) of the air flow opening surface 23 is the maximum diameter of the inscribed circle as shown in FIGS. 5C to 5G when the air flow opening surface 23 is elliptical or polygonal.
  • the width (L) of the air flow opening surface 23 is the diameter of a circle inscribed at the position where the distance between the facing sides is the shortest, as shown in FIG. Say.
  • the width (L) of the air flow opening surface 23 is inscribed at a position where the distance between the side having the recess and the side facing the side is the shortest as shown in FIG. 5I when the opening surface is concave.
  • the diameter of a circle is shown in FIG. 5I when the opening surface is concave.
  • the push hood 2 is disposed so as to face the air collision surface W, whereby the air flow opening surface 23, the air collision surface W, and the like.
  • the open area between the two can be higher in cleanliness than the area outside the local air cleaning device 1.
  • the present invention can provide the local air cleaning device 1 having a simple structure.
  • the push hood 2 can be easily moved.
  • the open area of the present embodiment there are no doors for putting in and out workers, parts, and manufacturing equipment necessary for a general clean room, and cleaning in the clean space area by opening these doors. There is no decrease in the degree, and it is possible to go in and out from the open area at any time, or to put in and out the parts.
  • a general clean room when the inside of the clean room is contaminated, the contaminated air in the clean room is diluted by the clean air supplied to the clean room, and this is exhausted to gradually clean the inside of the clean room. Therefore, when the inside of the clean room is contaminated, it takes several hours to be cleaned.
  • the purified uniform air flow blown out from the air flow opening surface 23 flows so as to push out the contaminated air, so that it is cleaned in a very short time. It is possible.
  • the clean air supplied to the clean room is discharged from an exhaust port provided in the clean room or a slight gap formed between the wall surface and the floor surface of the clean room.
  • the clearance is positively reduced and the inside of the clean room is set to a positive pressure to prevent the entry of contaminated air from the outside.
  • the present invention does not require a wall surface like the clean room, can form an open region, and can clean the formed space. For this reason, it is highly convenient to use this open area as a cleaned area for the entrance and exit as described above.
  • the number of push hoods which comprise the push hood 2 may be plural.
  • the push hood 2 may be connected to nine push hoods (3 vertical ⁇ 3 horizontal) by a connecting tool.
  • the push hood 2 may be connected to four (two vertical ⁇ two horizontal) push hoods by a connector.
  • the side surfaces of the push hoods, the upper and lower surfaces or both surfaces of the push hoods are connected in an airtight state, or between the side surfaces, the upper and lower surfaces or both surfaces of the adjacent push hoods. It is preferable to be connected in an airtight state through a sealing material such as packing. Also in these cases, the open area between the air flow opening surface 23 and the air collision surface W can be made higher in cleanliness than the area outside the local air cleaning device 1.
  • the present invention has been described by taking the case where the air collision surface W has a flat plate shape such as a wall or a partition, but the air collision surface W is not limited to a flat plate shape.
  • the air collision surface W is in the vicinity of the position facing the end of the air flow opening surface 23 of the push hood 2, for example, the end of the air collision surface W, for example, as shown in FIG. It is preferable to have a bent portion W1 that is bent toward the push hood 2 side. Further, the air collision surface W may have a bent portion W1 in which all of the upper portion, the lower portion, and the side portion thereof are bent toward the air flow opening surface 23 side.
  • the bent portion W1 may be rounded (with a rounded shape) so as to have a gentle curved surface. Since the air collision surface W has the bent portion W1 in this way, air from outside the open region (outside the local air cleaning device 1) formed between the air flow opening surface 23 and the air collision surface W is obtained. It becomes easy to prevent inflow. For this reason, the region between the air flow opening surface 23 and the air collision surface W can be made higher in cleanliness than the region outside the local air cleaning device 1, and the local air cleaning device 1 having a simple structure can be obtained. Can be provided.
  • the distance between the air flow opening surface 23 and the air collision surface W is the flow velocity when the width of the air flow opening surface 23 is 2 m or more and less than 10 m. It is preferable to be within a distance of 6 times (a distance at which the uniform air flow blown from the air flow opening surface 23 collides with the air collision surface W within 6 seconds). Further, when the width of the air flow opening surface 23 is 1 m or more and less than 2 m, the distance within 5 times the flow velocity (the uniform air flow blown from the air flow opening surface 23 collides with the air collision surface W within 5 seconds. Within a distance).
  • the air collision surface W is within a distance of three times the flow velocity (the uniform air flow blown from the air flow opening surface 23 is within 3 seconds. It is preferable to set the distance to collide with. This is because the open area between the air flow opening surface 23 and the air collision surface W can be made highly clean by setting such a distance.
  • the push hood 2 may have a structure in which casters are attached to the bottom surface. In this case, the push hood 2 can be easily moved. In this case, the construction is easy and the movement can be easily performed.
  • FIG. 8A several push hoods 2 may be arranged in parallel toward the wall surface (air collision surface W).
  • the wall surface (air collision surface W) since a clean space is formed between the push hood 2 and the wall (air collision surface W), it is possible to easily form a clean passage.
  • FIGS. 8B to 8D by forming the wall surface (air collision surface W) in an L shape, the present invention can be applied even when the passage has an L shape. Therefore, it is possible to easily form an unusual clean space.
  • Example 1 Using the local air cleaning device 1 shown in FIG. 1, the cleanliness was measured at measurement positions 1 to 18 shown in FIG.
  • FIG. 9 is a top view of the local air cleaning device 1.
  • KC-18 a particle counter manufactured by Lion
  • the degree of cleanliness was evaluated as high cleanliness when the number was 300 or less.
  • the push hood 2 is a push hood having a width of 600 mm and a length of 600 mm.
  • the measurement height at the measurement positions 1 to 18 was 300 mm, which is a half of the height of the push hood 2.
  • the measurement positions 1 to 6 are the center of the width of the push hood 2 and are positioned 200 mm downstream from the air flow opening surface 23 of the push hood 2. However, the measurement position 6 was a position 100 mm downstream of the measurement position 5.
  • the measurement positions 7 to 12 were the same positions as the measurement positions 1 to 6 except that the measurement positions 13 to 18 were 200 mm from the center of the push hood 2 width, and the measurement positions 13 to 18 were 250 mm from the center of the push hood 2 width.
  • the distance X between the air flow opening surface 23 of the push hood 2 and the air collision surface W was 1200 mm, and the flow rate of the cleaned uniform air flow was 0.5 m / s. The results are shown in Table 1.
  • the open area between the air flow opening surface 23 and the air collision surface W is defined as a local air cleaning device 1. It was confirmed that the degree of cleanliness can be higher than that in the outside region. For this reason, it was confirmed that the local air cleaning apparatus 1 having a simpler structure can be provided. Further, as shown in Table 1 and Table 3, by disposing the push hood 2 so as to face the air collision surface W, an open area between the air flow opening surface 23 and the air collision surface W is pushed. It was confirmed that the degree of cleanliness can be made higher than the area outside the local air cleaning device 1 like the local air cleaning device 1 of Patent Document 1 in which the hood is opposed.
  • the local air cleaning apparatus 1 of a simple structure could be provided.
  • the open area between the air flow opening surface 23 and the air collision surface W is made larger than the area outside the local air cleaning device 1. It was confirmed that high cleanliness can be achieved.
  • the present invention is useful for air cleaning of a local work space.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

La présente invention concerne un dispositif de purification d'air local (1) doté d'un capuchon de poussée (2) comprenant une surface d'ouverture d'écoulement d'air (23) qui évacue un écoulement d'air uniforme purifié. Le capuchon de poussée (2) est disposé de sorte que l'écoulement d'air uniforme évacué depuis la surface d'ouverture d'écoulement d'air (23) arrive sur une surface d'arrivée d'air (W) au niveau du côté aval de la surface d'ouverture d'écoulement d'air (23). Le capuchon de poussée (2) forme une région ouverte entre la surface d'arrivée d'air (W) et la surface d'ouverture d'écoulement d'air (23) du capuchon de poussée (2) en amenant la surface d'ouverture d'écoulement d'air (23) à faire face à la surface d'arrivée d'air (W) tout en étant séparée de celle-ci. L'écoulement d'air uniforme purifié provenant de la surface d'ouverture d'écoulement d'air (23) permet à l'intérieur de la région ouverte de présenter un haut niveau de propreté par rapport à d'autres régions grâce à son arrivée sur la surface d'arrivée d'air (W) et de son écoulement en dehors de la région ouverte.
PCT/JP2012/070072 2011-10-17 2012-08-07 Dispositif de purification d'air local WO2013058005A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-228285 2011-10-17
JP2011228285A JP2013088012A (ja) 2011-10-17 2011-10-17 局所空気清浄化装置

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WO2013058005A1 true WO2013058005A1 (fr) 2013-04-25

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023472A (en) * 1974-06-04 1977-05-17 Ciba-Geigy Corporation Apparatus for producing a laminar flow
JPS63176943A (ja) * 1987-01-16 1988-07-21 Clean Air Syst:Kk 一様空気流吹出装置
JPH0380951A (ja) * 1989-08-23 1991-04-05 Hitachi Ltd 無重力用クリーンルーム
US6113486A (en) * 1996-04-25 2000-09-05 U.N.I.R. Ultra Propre Nutrition Industrie Recherche Fabric sheath for ventilation and laminar flow hood
JP2008275266A (ja) * 2007-05-01 2008-11-13 Koken Ltd 局所空気清浄化装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023472A (en) * 1974-06-04 1977-05-17 Ciba-Geigy Corporation Apparatus for producing a laminar flow
JPS63176943A (ja) * 1987-01-16 1988-07-21 Clean Air Syst:Kk 一様空気流吹出装置
JPH0380951A (ja) * 1989-08-23 1991-04-05 Hitachi Ltd 無重力用クリーンルーム
US6113486A (en) * 1996-04-25 2000-09-05 U.N.I.R. Ultra Propre Nutrition Industrie Recherche Fabric sheath for ventilation and laminar flow hood
JP2008275266A (ja) * 2007-05-01 2008-11-13 Koken Ltd 局所空気清浄化装置

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