WO2013047916A1

WO2013047916A1 - Camera

Info

Publication number: WO2013047916A1
Application number: PCT/KR2011/007065
Authority: WO
Inventors: 성낙훈; 김정식
Original assignee: (주)엔엔피
Priority date: 2011-09-26
Filing date: 2011-09-26
Publication date: 2013-04-04

Abstract

The present invention relates to lenticular lithography equipment which comprises: a light source; a film irradiated with light emitted from the light source; a plate which receives the irradiated light through the film and on which a photoresist is applied; and a lenticular lens closely adhered to the film. Accordingly, by using a light-collecting function of the lenticular lens in the lithography equipment, clear exposure is possible even though the thickness of the photoresist is tens of microns to hundreds of microns. In addition, a clear and distinct configuration of a circuit is possible without any defects, even though the pitch of the circuit is 10 microns to 20 microns.

Description

Camera

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lenticular exposure apparatus for constructing a semiconductor circuit or a microcircuit. More particularly, the present invention relates to a photographing apparatus capable of clear exposure of a photosensitive agent by using a condenser function of lenticular.

In general, an exposure apparatus is a device that transfers a desired pattern to a photosensitive agent by placing a film having a desired pattern on a substrate, a wafer, a glass, or the like coated with a material that reacts to light (Photo-resist: PR). Say.

The conventional exposure machine includes a light source, a flat plate coated with a photosensitive agent and disposed to face the light source, and a film in close contact with an upper surface of the flat plate and composed of a transparent portion and an opaque portion.

That is, when light is irradiated from the light source to the film, the transparent part transmits the light and the opaque part blocks the light. Therefore, when the light is exposed through the light source, only the photosensitive agent in the portion where light is transmitted through the transparent portion of the film in the photosensitive agent applied to the flat plate is cured.

After the exposure operation using such an exposure machine, the uncured portion of the photosensitive agent is removed with water or a developer to form a circuit pattern on the flat plate.

Such a conventional exposure machine is often unclear or impossible in the exposure state of the photosensitive agent even if a parallel light exposure machine is used when the thickness of the photosensitive agent applied to the plate becomes thick (for example, 50 microns or more).

In addition, when the pitch of the circuit is 10 to 20 microns, it caused a high failure rate.

The present invention has been made to solve the above problems, by using the lenticular condensing function of the exposure machine, even if the thickness of the photosensitive agent is several tens of microns to hundreds of microns, it is possible to clean exposure, the pitch of the circuit 10 ~ 20 microns Even if it is, the objective is to provide the lenticular exposure machine which is clean, and does not have a defect, and is possible to comprise a clear circuit.

The present invention for achieving the above object, a light source; A film to which light of the light source is irradiated; An exposure apparatus including a flat plate coated with a photosensitive agent that receives light irradiated through the film, characterized in that the lenticular is configured to be in close contact with the film.

In addition, the lenticular, the film, and the plate coated with the photosensitive agent is characterized in that the pressing means is in close contact.

In addition, the pressing means is characterized by using a vacuum pressure.

In addition, the light source is characterized in that the movement in the horizontal direction.

In addition, the lenticular is characterized by changing the angle of the inclined surface corresponding to the transfer of the light source.

As another embodiment, the lenticular is in close contact with the film is characterized in that the transfer movement in the horizontal direction relative to the film.

As described above, the lenticular exposure apparatus according to the present invention uses the light condensing function of the lenticular to the exposure machine, so that even if the thickness of the photosensitive agent is several tens of microns to several hundred microns, clean exposure is possible, even if the circuit pitch is 10 to 20 microns. Clean exposure makes no defects and is clear, making it possible to construct a clean circuit.

1 is a view showing the structure of a lenticular exposure apparatus according to an embodiment of the present invention

2 is a perspective view illustrating a lenticular of a lenticular exposure apparatus according to an exemplary embodiment of the present invention.

3 is a view showing a state in which light passes through the lenticular to expose the photosensitive agent when the light source is stopped.

4 is a view illustrating a state in which light passes through the lenticular to expose a photosensitive agent when the light source is moved;

5 is a view showing an operating state of the lenticular exposure apparatus according to an embodiment of the present invention;

* Description of the sign *

10: case 20: light source

30: transfer means 31: rail portion

33: drive portion 40: flat plate

41: photosensitive agent 50: film

51: transparent part 53: opaque part

60: lenticular 61: convex lens

63: boundary 70: pressing means

71: clear glass 73: bellows

75: air outlet hole 80: angle conversion unit

81: support plate 83,89: cylinder portion

91,85: cylinder body 87,93: cylinder rod

100: auxiliary transport means

EMBODIMENT OF THE INVENTION Hereinafter, although the Example of this invention is described in detail, this invention is not limited to a following example, unless the summary is exceeded.

1 is a view showing the structure of a lenticular exposure apparatus according to an embodiment of the present invention, Figure 2 is a perspective view showing a lenticular of the lenticular exposure apparatus according to an embodiment of the present invention.

As shown in FIGS. 1 and 2, the lenticular exposure apparatus according to an embodiment of the present invention has a case 10, a light source 20 provided on an upper portion of the case 10, and left and right sides of the light source 20. A conveying means 30 for conveying in the direction, a flat plate 40 which is disposed to face the light source 20, on which the photosensitive agent 41 is applied, a film 50 in close contact with the upper surface of the flat plate 40, and a film. The lenticular 60 in close contact with the upper surface of the 50, the pressing means 70 for pressing the film 50 and the lenticular 60 laminated on the flat plate 40 to be in close contact with each other, and the flat plate 40 It supports and includes an angle conversion unit 80 for changing the inclination angle of the lenticular 60.

The case 10 constitutes an exterior of the lenticular exposure machine, and includes a light source 20, a transfer means 30, a flat plate 40, a film 50, a lenticular 60, a press means 70, and an angle conversion unit. Wrap 80.

The light source 20 is positioned above the flat plate 40 to irradiate light to the film 50 and the lenticular 60 stacked on the flat plate 40. The light source 20 is moved by the conveying means 30 in the left and right direction and is irradiated with light evenly to the film 50 and the lenticular 60.

The transfer means 30 is a means for transferring the light source 20 to the left and right directions, is provided on the upper portion of the case 10 and supports the light source 20 so as to be movable, and the light source is a rail unit ( It consists of a drive unit 33 for conveying along.

Here, the driving unit 33 is built in the light source 20 or attached to the outside, and consists of a drive motor having a drive gear. In addition, a rail gear may be formed in the rail part 31 to which the driving gear is engaged. Therefore, the drive gear meshed with the rail gear of the rail by the operation of the drive motor can be rotated to move the light source along the length direction of the rail.

The flat plate 40 is a substrate on which a circuit pattern is formed, and a photosensitive agent 41 is coated on the upper surface for an exposure process for generating a circuit pattern. The flat plate 40 is disposed under the light source 20 so that light is irradiated onto the upper surface on which the photosensitive agent 41 is applied.

The film 50 is in close contact with the upper surface of the flat plate 40 to which the photosensitive agent 41 is applied. The film 50 includes a transparent part 51 and an opaque part 53. That is, when light is irradiated from the light source 20 to the film 50, the transparent part 51 transmits the light and the opaque part 53 blocks the light. Therefore, when the exposure is performed through the light source 20, only the photosensitive agent 41 in the portion where light is transmitted through the transparent portion 51 of the film 50 is cured. After the exposure operation, an unexposed portion of the photosensitive agent 41, that is, an uncured portion, is removed with water or a developer to form a circuit pattern on the flat plate 40.

The lenticular 60 is a transparent plate having a plurality of convex lenses 61 formed in one direction on a surface thereof and is in close contact with the upper surface of the film 50.

The lenticular 60 allows the photosensitive agent 41 applied to the flat plate 40 to be exposed cleanly. That is, when the exposure is made through the light source 20 transferred in the horizontal direction by the transfer means 30, the photosensitive agent 41 is condensed evenly by the convex lens 61 of the lenticular 60, the photosensitive agent 41 Can be exposed cleanly.

Referring to the operation of the lenticular applied to the present invention.

3 is a view illustrating a state in which light passes through the lenticular to expose the photosensitive agent when the light source is stopped, and FIG. 4 illustrates a state in which light passes through the lenticular to expose the photosensitive agent.

As shown in FIG. 3, when exposure is made through the light source 20 while the light source 20 and the lenticular 60 are stopped, the convex lens is formed by the convex lens 61 formed on the lenticular 60. The focus area of 61 consists of the exposure area 43.

At this time, the degree to which the photosensitive agent 41 is focused can be adjusted according to the change of the thickness a between the convex lens 61 and the photosensitive agent 41 of the lenticular 60.

That is, by providing a plurality of lenticular 60 having different thicknesses a and selectively using the plurality of lenticulars 60, the degree to which the photosensitive agent 41 is focused can be adjusted.

As shown in FIG. 4, when the light source 20 moves from the left side to the right side of the lenticular 60, the exposure of the photosensitive agent 41 is uniformly performed as the light source 20 moves. That is, as the light source 20 moves, the focal region of each convex lens 61 of the lenticular 60 is changed to evenly expose the photosensitive agent 41.

In this case, a plurality of lenticulars 60 having different thicknesses a may be provided and selectively used to adjust the degree of concentration of light on the photosensitive agent 41.

On the other hand, the pressing means 70 serves to closely contact the lenticular 60, the film 50, and the flat plate 40 to which the photosensitive agent 41 is applied. The pressing means 70 is formed so as to cover the film 50 and the lenticular 60 laminated on the flat plate 40, the portion facing the upper surface of the lenticular 60 is formed of a transparent glass 71 It is. Therefore, the light irradiated from the light source 20 passes through the transparent glass 71 and is irradiated to the lenticular 60.

Furthermore, the shape of the jar bar portion 73 is formed on the edge of the pressing means 70, the air discharge hole 75 for discharging the air inside the pressing means 70 is formed at one side of the pressing means 70. It is.

In such a configuration, the pressurizing means 70 covers and presses the upper portion of the film 50 and the lenticular 60 laminated on the flat plate 40, thereby the lenticular 60, the film 50, and the photosensitive agent 41. ) Can be applied to the flat plate 40 is in close contact with each other, and after the air is drawn out through the air discharge hole 75 to close the air discharge hole 75 to maintain the interior of the pressurizing means 70 in a vacuum state. Can be.

At this time, the pressing means 70 may be fixed to the support plate 81 for supporting the flat plate 40 using a vacuum pressure.

In addition, the pressing means 70 can be fixed to the support plate 81 for supporting the flat plate 40 using an attachment means such as a tape.

The angle conversion unit 80 supports the plate 40 and serves to change the inclination angle of the lenticular 60.

The angle conversion unit 80 is provided with a pair of support plates 81 for supporting the flat plate 40 and a pair of both sides of the support plate 81, respectively, and

cylinder portions

83 and 89 for changing the inclination angle of the support plate 81. Consists of

Here, the

cylinders

83 and 89 are lifted by the pneumatic or hydraulic pressure from the cylinder body (85,91) and the cylinder body (85,91) supported on the bottom of the case 10, and both sides of the support plate 81 It consists of

cylinder rods

87 and 93 respectively supporting.

With this configuration, when the cylinder rod 87 of the left cylinder portion 83 is lowered and the cylinder rod 93 of the right cylinder portion 89 is raised, the support plate 81 is inclined in the left direction, and conversely, the left cylinder portion is When the cylinder rod 87 of 83 rises and the cylinder rod 93 of the right cylinder part 89 descends, the support plate 81 inclines to the right direction. Therefore, the inclination angle of the lenticular 60 is changed as the support plate 81 is inclined.

As such, when the inclination angle of the lenticular 60 is changed, the light irradiated through the light source 20 transferred by the transfer means 30 passes through the lenticular 60 and the film 50 to allow the photosensitive agent 41 to pass through. ) Evenly. That is, the light transmitted through the convex lens 61 of the lenticular 60 is condensed evenly on the photosensitive agent 41, so that the photosensitive agent 41 can be exposed to be clean, and between the convex lens 61 and the convex lens 61. Evenly exposed exposure is made to the boundary portion 63 of.

On the other hand, the support plate 81 may be provided with an auxiliary transfer means 100 for transferring the lenticular 60. The auxiliary transfer means 100 serves to transfer the lenticular 60 in close contact with the film 50 in the left and right directions with respect to the film 50.

That is, the auxiliary transport means 100 may be formed of a motor or a cylinder, and the lenticular 60 is pulled or pushed with respect to the film 50 to move from side to side.

The auxiliary transport means 100 has the same role as the transport means 30 for transporting the light source 20, the user selectively operates the transport means 30 or the auxiliary transport means 100 to the photosensitive agent 41 The exposure is performed.

Next, an operating state of the lenticular exposure apparatus according to an exemplary embodiment of the present invention configured as described above will be described.

5 is a view showing an operating state of the lenticular exposure apparatus according to an embodiment of the present invention.

In the state where the light source 20 is located on the right side of the rail part 31, the cylinder rod 87 of the left cylinder part 83 descends, the cylinder rod 93 of the right cylinder part 89 rises, and the support plate ( 81 is inclined to the left side, the flat plate 40, the film 50, the lenticular 60 provided on the support plate 81 is inclined to the left.

At this time, the pressing means 70 is fixed to the support plate 81 while pressing the flat plate 40, the film 50, and the lenticular 60, the flat plate 40, the film 50, the lenticular 60 To the support plate 81.

Subsequently, when the light source 20 located on the right side moves to the center of the rail unit 20 along the rail unit 20, the cylinder of the cylinder rod 87 of the left cylinder unit 83 and the cylinder of the right cylinder unit 89 are formed. The rod 93 has the same length and supports the support plate 81. That is, the support plate 81 is supported to be parallel to the bottom surface of the case 10.

Then, when the light source 20 located in the center moves to the right side of the rail part 31 along the rail part 31, the cylinder rod 87 of the left cylinder part 83 will raise and the right cylinder part 89 ), The cylinder rod 93 is lowered so that the support plate 81 is inclined in the right direction so that the flat plate 40, the film 50, and the lenticular 60 provided on the support plate 81 are inclined to the right.

In this operation of FIG. 5, the light irradiated by the moving light source 20 passes through the lenticular 60 whose tilt angle is changed by the pair of

cylinders

83 and 89, thereby providing the lenticular 60. The light transmitted through the convex lens 61 (see FIG. 1) of the light is condensed evenly by the photosensitive agent 41, so that the photosensitive agent 41 can be exposed to a clear state. In addition, the convex lens 61 (see FIG. 1) and the convex lens 61 ( Evenly exposed exposure is also made at the boundary portion 63 (see FIG. 1).

As those skilled in the art to which the present invention pertains, the present invention may be modified in various ways without departing from the spirit of the present invention. .

Claims

A light source; A film to which light of the light source is irradiated; In the exposure machine including a flat plate coated with a photosensitive agent that receives light irradiated through the film,

The lenticular is configured to be in close contact with the film.
The method of claim 1,

And the lenticular, the film, and the flat plate coated with the photosensitive agent are in close contact with each other by pressing means.
The method of claim 2,

And the pressurizing means uses a vacuum pressure.
The method according to any one of claims 1 to 3,

The light source is a camera, characterized in that the movement in the horizontal direction.
The method of claim 4, wherein

And the lenticular changes an angle of an inclined surface in response to the transfer of the light source.
The method according to any one of claims 1 to 3,

And the lenticular in close contact with the film moves in a lateral direction with respect to the film.