WO2013043818A1 - Plate-forme d'imagerie à superrésolution à base de superlentille microsphérique - Google Patents

Plate-forme d'imagerie à superrésolution à base de superlentille microsphérique Download PDF

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Publication number
WO2013043818A1
WO2013043818A1 PCT/US2012/056252 US2012056252W WO2013043818A1 WO 2013043818 A1 WO2013043818 A1 WO 2013043818A1 US 2012056252 W US2012056252 W US 2012056252W WO 2013043818 A1 WO2013043818 A1 WO 2013043818A1
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WO
WIPO (PCT)
Prior art keywords
microsphere
microsphere lens
light
lens
cantilever
Prior art date
Application number
PCT/US2012/056252
Other languages
English (en)
Inventor
Jung-Chi LIAO
Bhavik NATHWANI
Tony Yang
Original Assignee
The Trustees Of Columbia University In The City Of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Trustees Of Columbia University In The City Of New York filed Critical The Trustees Of Columbia University In The City Of New York
Publication of WO2013043818A1 publication Critical patent/WO2013043818A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
    • G01N2201/0639—Sphere lens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]

Definitions

  • the disclosed subject matter relates to a platform for super-resolution imaging of a surface using a microsphere lens.
  • imaging resolution is limited to the diffraction limit, ⁇ /2( « *sin(0)), where ⁇ is the illuminating light wavelength, n is the refractive index, and ⁇ is the collection angle of the imaging optics.
  • the diffraction limit can be approximately half of the illuminating light's wavelength, or, e.g., approximately 200 nm in the visible spectrum.
  • imaging techniques to resolve and inspect elements smaller than the diffraction limit can be useful for inspection or other purposes.
  • imaging for the biological sciences, such as imaging cell structures or certain proteins can require imaging below the diffraction limit.
  • Certain techniques for imaging below the diffraction limit include scanning electron microscopy (SEM), stimulated emission depletion (STED) microscopy, near field optical microscopy (NSOM), and others.
  • SEM scanning electron microscopy
  • STED stimulated emission depletion
  • NOM near field optical microscopy
  • these techniques can include complex and/or cumbersome equipment and can require significant processing time.
  • some techniques can require the use of narrow spectrum light sources, fluorescent samples, expensive optical detection equipment, and intensive data processing techniques.
  • the system includes a nano-positioning device having a cantilever and an optically transparent microsphere lens coupled to the distal end of the cantilever.
  • the system can also include an optical component to focus light on at least a portion of a surface to be imaged through the microsphere lens, and focus light reflected from the surface through the microsphere lens.
  • a control unit can be communicatively coupled with the nano-positioning device and configured to position the microsphere lens at a predetermined distance above the surface.
  • the nano-positioning device can be an atomic force microscopy apparatus.
  • the nano-positioning device can be a near field scanning optical microscope apparatus.
  • the nano-positioning device can be an apparatus capable of scanning a surface with a high position precision.
  • the microsphere superiens can be attached to the tip of a cantilever associated with the nano-positioning device.
  • the microsphere superiens can be a SiOa microsphere having a volume of between 3 to 5 ⁇ 2 .
  • the nano-positioning device can be configured to both translate the microsphere superiens about the surface and to position the microsphere superiens at a predetermined distance above the surface at each location, which can be, for example, between 2 nm and 20 nm.
  • the optical component can include one or more objective lenses for focusing a virtual image created by the microsphere superiens.
  • conventional optical microscopy techniques can be employed to focus an image created by the microsphere superiens.
  • the system can further include a camera adapted to receive light through the objective lens to generate an image.
  • a method can include positioning an optically transparent microsphere superiens at a predetermined distance above the surface.
  • the surface can be illuminated, whereby light reflected from the surface passes through the microsphere lens and is focused through an optical component. The light can then be detected to form an image of the surface.
  • the method can include identifying a surface defect of a substrate using the microsphere superiens.
  • the microsphere superiens can be attached to the tip of a cantilever of an atomic force microscopy device.
  • the microsphere superlens can then be positioned above the surface of the substrate at one or more substrate locations using the atomic force microscopy device.
  • the substrate can be, for example, a heat assisted magnetic recording head.
  • the distance of the microsphere superlens above the surface can be measured using the atomic force microscopy device.
  • the device can be controlled to move the microsphere lens at a predetermined distance above the surface.
  • the surface can then be imaged using an objective and the microsphere lens.
  • the image of the surface can be processed to determine whether the substrate location includes a surface defect.
  • Fig. 1 is a schematic diagram of a system for superresolution imaging in accordance with an embodiment of the disclosed subject matter.
  • Fig. 2 is a flow diagram of a method for superresolution imaging in accordance with an embodiment of the disclosed subject matter.
  • microsphere lenses are disclosed herein.
  • microsphere lenses can be used for far-field superresolution imaging below the diffraction limit in the visible spectrum.
  • the microsphere superlens can be placed within a nanometer scale distance to the surface of a sample so as to enhance evanescent waves in the near filed to compensate for their exponential decay into the far-field. That is, the microsphere superlens can project a near-field image including high spatial frequency information from evanescent waves into the far-field, which can then be imaged with conventional optics.
  • the term “superresolution” can refer to optics in which resolution below the diffraction limit is attainable.
  • the term “superlens” can refer to a lens which, with proper configuration, is capable of resolving an image below the diffraction limit.
  • an optically transparent microsphere 110 can be positioned (210) at a predetermined distance above the surface of a sample 105.
  • the microsphere 110 can be positioned several nanometers above the surface by precision control of the height of the microsphere 110, for purposes of example and not limitation, to facilitate smooth scanning, as described in more detail below, without colliding the surface of the sample 105.
  • the working distance between the surface and the microsphere 110 can be as small as possible to increase the near- field signal capturing before the evanescent decay.
  • placing the microsphere 110 on the surface of the sample 105 can create scanning problems, for example because a surface topography, or other foreign bodies on the surface such as dust, can result in collisions which can result in scratches or other damage to the microsphere 110 or the surface of the sample 105.
  • the distance of the microsphere 110 suspension above the surface can thus determined by considering the resolution, the scanning rate, and the response ti me in controlling the height change of the microsphere 110 with respect to the surface roughness. For example, a faster scanning rate can correspond to an increased distance above the surface of the sample 105.
  • the optically transparent microsphere lens 110 can be fabricated from a number of suitable materials and can have a number of suitable size and other characteristics to achieve superresolution foci.
  • the size and refractive index of the microsphere, as well as the medium in which the sphere is located can impact the focal length, and therefore the resolution achieved by the microsphere lens.
  • the microsphere lens 110 can be formed from Si0 2 , with a refractive index of approximately 1.46 over a range of visible light, and a diameter of between approximately 2 pm to approximately 9 ⁇ .
  • the "strength" of the lens can be arbitrarily given as the difference between the focus spot size of the lens and the diffraction limit divided by the radius, a.
  • the lens can be considered a superlens.
  • the relationship between strength, size parameter, and index of refraction can be evaluated, for example, using Mie theory.
  • n 1.46
  • superresolution foci for the visible spectrum can exist for size parameters of below approximately 70, which can correspond to a diameter of approximately 2 ⁇ to approximately 9 ⁇ .
  • n 1.8
  • super-resolution foci can exist for size parameters below approximately 250, which can correspond to particles as big as 30 ⁇ .
  • increases index of refraction n corresponds to an increased maximum size parameter to achieve superresolution; however, this does not hold true for n > 1.8.
  • the microsphere lens 110 can be positioned (210) at certain locations above the surface of a sample 105 with the use of a nano-positioning device 120.
  • a suitable nano-positioning device can be employed.
  • the nano-positioning device 120 can include an atomic force microscopy (AFM) device.
  • AFM devices are commercially available, and can include a cantilever 121 with a cantilever tip 122.
  • the AFM device 120 can be operably connected to a control unit 129, which can be programmed or configured to cause the AFM device 120 to position the cantilever 121 relative to the sample.
  • a piezostage with nanometer precision in both x- and y-axes can be used to direct the AFM tip to the point of interest.
  • Line encoding can also be included to add the feedback control to the system.
  • the control unit 129 can include one or more processors, one or more memories, which can be adapted to store executable code, which when executed can control the AFM device 120.
  • the AFM device 120 can measure the position of the cantilever 121 with the use of a light source 125 and detector 126.
  • the light source 125 can reflect light 127 off of the cantilever 121, and the detector 126 can detect the angle of the reflected light 128, and deduce the position of the cantilever in. three dimensional space with a high degree of accuracy and precision.
  • the position of the cantilever can be fed back into the control unit 129 for further positioning by the AFM device 120.
  • the microsphere lens 110 can be physically coupled to a distal end of the cantilever 121.
  • the microsphere lens 110 can be attached to proximate that tip 122.
  • the microsphere lens 110 can be attached, for example, with a drop of epoxy.
  • the microsphere lens 110 can be attached with PDMS.
  • PDMS can be heated until it becomes viscous.
  • the microsphere lens 110 and the cantilever tip 122 can be immersed in the viscous PDMS, contacted, and then cooled.
  • SU-8, benzocyclobuten, and anodic bonding can be used to mount the microsphere lens to the cantilever.
  • the microsphere lens 110 can be attached to a near-field scanning optical microscope (NSOM) device.
  • NSM near-field scanning optical microscope
  • the microsphere can be attached as described above with reference to the cantilever of an AFM device.
  • the microsphere can be attached to the bottom of the probe tip of an NSOM device, where the light can still pass through the aperture of the probe tip.
  • An optical system 130 can be integrated with the AFM device 120 and the microsphere lens 120,
  • the optical system 130 can be a conventional optical system.
  • the optical system 130 can include, for example, a light source 160 and an objective 135, along with additional optics for focusing, magnifying, or otherwise manipulating images.
  • the optical system 130 can be arranged above the microsphere lens 110, such that light 137 from the light source 160 can be directed (220) through an objective 135, through the microsphere lens 110 and onto the surface of the sample 105.
  • the light 137 can include white light (e.g., a combination of wavelengths in the visible spectrum), or a particular spectrum of light.
  • the light source can be a light bulb, a laser, an LED, or any other suitable light producing element.
  • the optical system 130 can be configured, for example, such that the objective 135 is adapted to focus a virtual image produced via the microsphere lens 110.
  • the virtual image created by the microsphere lens 110 can include enhanced evanescent wave information from the near-field.
  • a camera 150 or other optical detection device can be provided to detect (230) light focused through the optical system 130.
  • a camera 150 can be configured to generate an image of the surface of the sample 105 focused with the objective 135.
  • the camera 150 can be any suitable camera, such as a CCD camera, electron multiplying CCD (emCCD) camera, CMOS camera, or other suitable imaging array.
  • imaging processing can be applied (230) to one or more images generated with the camera 150 to detect a surface characteristic.
  • a clustering or grouping algorithm can be applied to the image to determine if the surface contains a particular characteristic, such as a surface defect, fracture, dislocation, or the like.
  • a K-mean algorithm or Voronoi iteration algorithm can be used for clustering and grouping.
  • an image processing algorithm can be applied to determine if there is a foreign object on the surface of the sample 105.
  • the nano-positioning device e.g., AFM device 120
  • the nano-positioning device can be configured to position the microsphere lens 110 between approximately 2 run and approximately 20 rrm above a first location on the surface of the sample 105.
  • the microsphere lens 110 can be positioned between approximately 5 nm and 15 nm above the first location on the surface of the sample 105.
  • the microsphere 110 can be positioned at a first location above the sample 105 with the AFM device 120.
  • the distance above the surface of the sample 105 at the first location can be measured, e.g., by reflecting light off of the cantilever 121 processing the position of the detected light 128.
  • the AFM device 120 can then be controlled to move the cantilever tip and attached microsphere 110 to a desired distance above the surface. That is, a feedback loop can be established to position the microsphere 110 at a desired distance above the surface.
  • an image of the surface of the sample 105 can be generated with the camera 150.
  • the AFM device 120 can then position (e.g., by translating the microsphere lens 110 above the surface) the microsphere lens 110 at a second location above the sample 105, and the feedback mechanism can again position the microsphere lens 110 at an appropriate distance above the surface at the second location.
  • a second image of the surface of the sample 105 can be generated. This process can be repeated over a set of locations on the sample.
  • HAMR heat assisted magnetic recording
  • HAMR can be used, for example, in connection with magnetic data storage.
  • NFT near-Field transducer
  • a near-Field transducer can efficiently couple light with surface Plasmon resonance and concentrate optical energy in a spot as small as 25 x 25 nm 2 , thereby facilitating the magnetic switching of individual tracks within the magnetic storage media by temporarily reducing the anisotropy within the material
  • the size of an NFT and surrounding components can be between approximately 20 to 300 nm, and therefore presents a challenge for inspection during the manufacturing process.
  • the platform and techniques disclosed herein can be used for inspection of HAMR head elements with resolution suitable to resolve and identify surface defects that are below the diffraction limit for the visible spectrum.
  • the techniques disclosed herein can enable imaging a HAMR head with sub- 50 nm resolution and above 1 ⁇ per snapshot, yielding rapid inspection.
  • the platform and techniques disclosed herein can be employed in serial fashion, thereby enabling high throughput, and can be integrated with low cost conventional optics.
  • a HAMR head can be placed on a stage integrated with an AFM device, as demonstrated in Fig. 1.
  • the AFM device can be, for example, a PSIO EX- 100 upright AFM device.
  • a microsphere superlens can be attached to the tip of the cantilever of the AFM device, as described above.
  • the AFM device can be programmed to position the microsphere superlens attached to the cantilever tip a predetermined distance above the HAMR head.
  • the predetermined distance can correspond to a field of view (FOV) of the microsphere superlens.
  • a set of scanning parameters including scanning speed and scanning step size, can be determined based on the FOV and the AFM device can be configured to
  • a camera can take a snapshot of the HAMR head focused through the microsphere superlens and an objective (i.e., the objective can focus a virtual image created by the microsphere superlens).
  • the scanning parameters can be determined such that the usable area of each snapshot does not substantially overlap, thereby allowing for superresolution imaging over the entire area of the HAMR heard.
  • the scanning parameters can be determined such that the usable area of each snapshot does not substantially overlap, thereby allowing for superresolution imaging over the entire area of the HAMR heard.
  • microsphere superlens can be repositioned to a predetermined distance above the surface of the HAMR head (i.e., along the axis normal to the surface of the HAMR head). In this manner, a HAMR head with a varying surface topography can be imaged.
  • a control unit 129 is provided to control the AFM device 120.
  • the control unit 129 plays a significant role in permitting precise control of the position of the cantilever tip and attached microsphere superlens.
  • the presence of the control unit 129 provides the ability to position the microsphere superlens with nanometer precision.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

La présente invention concerne des systèmes et des procédés servant à obtenir des images d'une surface, notamment un dispositif à nano-positionnement comprenant un cantilever dont l'extrémité distale est couplée à une lentille microsphérique optiquement transparente. Un composant optique peut focaliser la lumière sur au moins une partie de la surface par l'intermédiaire de la lentille microsphérique, et la lumière focalisée, si elle existe, est réfléchie par la surface à travers la lentille microsphérique. Une unité de commande en communication avec le dispositif à nano-positionnement peut être conçue pour positionner la lentille microsphérique à une distance prédéterminée au-dessus de la surface.
PCT/US2012/056252 2011-09-23 2012-09-20 Plate-forme d'imagerie à superrésolution à base de superlentille microsphérique WO2013043818A1 (fr)

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US201161538654P 2011-09-23 2011-09-23
US61/538,654 2011-09-23

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017098079A1 (fr) 2015-12-11 2017-06-15 University Of Helsinki Propriétés de structures de surface et subsurface avec interférométrie en lumière blanche utilisant des jets photoniques
US9726874B2 (en) 2012-06-07 2017-08-08 The University Of North Carolina At Charlotte Methods and systems for super-resolution optical imaging using high-index of refraction microspheres and microcylinders
CN107402443A (zh) * 2017-08-08 2017-11-28 苏州显纳精密仪器有限公司 一种基于倒置显微镜和微球透镜的光学超分辨率成像系统及采用该系统的动态成像方法
EP3388779A1 (fr) 2017-04-11 2018-10-17 Université de Strasbourg Systeme et procede de metrologie optique en super resolution a l'echelle nanometrique en champ lointain
CN110543003A (zh) * 2019-09-05 2019-12-06 苏州大学 微球透镜探针组件及微球透镜显微成像系统
CN111766692A (zh) * 2020-06-18 2020-10-13 苏州大学 自动补液微球超分辨显微成像系统

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US5624845A (en) * 1995-03-16 1997-04-29 International Business Machines Corporation Assembly and a method suitable for identifying a code
US20020021139A1 (en) * 2000-06-16 2002-02-21 The Penn State Research Foundation Molecular probe station
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726874B2 (en) 2012-06-07 2017-08-08 The University Of North Carolina At Charlotte Methods and systems for super-resolution optical imaging using high-index of refraction microspheres and microcylinders
US10386620B2 (en) 2012-06-07 2019-08-20 University Of North Carolina At Charlotte Methods and systems for super-resolution optical imaging using high-index of refraction microspheres and microcylinders
WO2017098079A1 (fr) 2015-12-11 2017-06-15 University Of Helsinki Propriétés de structures de surface et subsurface avec interférométrie en lumière blanche utilisant des jets photoniques
EP3388779A1 (fr) 2017-04-11 2018-10-17 Université de Strasbourg Systeme et procede de metrologie optique en super resolution a l'echelle nanometrique en champ lointain
WO2018189250A1 (fr) 2017-04-11 2018-10-18 Universite De Strasbourg Systeme et procede de metrologie optique plein champ en super resolution a l'echelle nanometrique en champ lointain
CN110770534A (zh) * 2017-04-11 2020-02-07 斯特拉斯堡大学 远场纳米级超分辨全场光学计量系统和方法
CN107402443A (zh) * 2017-08-08 2017-11-28 苏州显纳精密仪器有限公司 一种基于倒置显微镜和微球透镜的光学超分辨率成像系统及采用该系统的动态成像方法
CN110543003A (zh) * 2019-09-05 2019-12-06 苏州大学 微球透镜探针组件及微球透镜显微成像系统
CN111766692A (zh) * 2020-06-18 2020-10-13 苏州大学 自动补液微球超分辨显微成像系统
CN111766692B (zh) * 2020-06-18 2022-07-19 苏州大学 自动补液微球超分辨显微成像系统

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