WO2013003565A1 - Glass edge finishing method - Google Patents

Glass edge finishing method Download PDF

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Publication number
WO2013003565A1
WO2013003565A1 PCT/US2012/044599 US2012044599W WO2013003565A1 WO 2013003565 A1 WO2013003565 A1 WO 2013003565A1 US 2012044599 W US2012044599 W US 2012044599W WO 2013003565 A1 WO2013003565 A1 WO 2013003565A1
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WO
WIPO (PCT)
Prior art keywords
polishing
certain embodiments
grinding
anc
acl
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/US2012/044599
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French (fr)
Inventor
James William Brown
Siva Venkatachalam
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Corning Inc
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Corning Inc
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Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to JP2014519009A priority Critical patent/JP2014518169A/en
Priority to KR1020187032114A priority patent/KR20180123179A/en
Priority to CN201280032088.4A priority patent/CN103619537B/en
Priority to KR1020207009738A priority patent/KR102221590B1/en
Priority to KR1020147001855A priority patent/KR20140043797A/en
Publication of WO2013003565A1 publication Critical patent/WO2013003565A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets

Definitions

  • the present invention relates to edge finishing methods of glass materials.
  • the present invention relates to grinding and polishing of the edge of a thin glass sheet.
  • the present invention is useful, e.g., in finishing the edge of a glass sheet for use as a substrate for making a display device, such as LCD display.
  • Thin glass sheets have found use in many optical, electrical or optoeletrical devices, such as liquid crystal (LCD) displays, organic light-emitting diode (OLED) displays, solar cells, as semiconductor device substrates, color filter substrates, cover sheets, and the like.
  • the thin glass sheets having a thickness of from several micrometers to several millimeters, may be fabricated by a number of methods, such as float process, fusion down-draw process (a method pioneered by Corning Incorporated, Corning, New York, U.S.A.), slot down-draw process, and the like.
  • these glass substrates have high strength, so that they can withstand the mechanical impact that they may encounter during finishing, packaging, transporation, handling, and the like.
  • the atomic network of glass materials is intrinsically strong. However, defect in the surface of a glass sheet, including the major surface and edge surface, can propagate quickly into the network when subject to stress over a certain threshold. Because these substrates normally have relatively high main surface quality with low number of scratches and the like, their strength are largely determined by the edge quality. An edge with small amounts of defects is highly desired for high edge strength of a glass material.
  • the production of a glass sheet frequently includes a step of cutting by mechanical score-and-break, laser score-and-break or direct laser full-body cutting.
  • Those processes invariably result in a glass sheet having two major surfaces connected by an edge surface substantially perpendicular to the the major surfaces.
  • an edge surface substantially perpendicular to the the major surfaces.
  • the present invention meets this and other needs.
  • each aspect is illustrated by a number of embodiments, which, in turn, can include one or more specific embodiments. It is to be understood that the embodiments may or may not overlap with each other. Thus, part of one embodiment, or specific embodiments thereof, may or may not fall within the ambit of another embodiment, or specific embodiments thereof, and vice versa.
  • a first aspect of the present disclosure is related to a method for finishing an edge of a glass sheet having a thickness Th(gs), a first major surface, a second major surface, and a first pre-finishing edge surface connecting the first major surface with the second major surface, a first corner defined by the intersection between the first major surface and the first pre-finishing edge surface, and a second corner defined by the intersection between the second major surface and the first pre-finishing edge surface, comprising the follwong steps:
  • step (I) a grinding wheel comprising a plurality of grinding grits embedded in a grinding wheel matrix is used, and the grinding grits have an average particle size of from 10 ⁇ to 80 ⁇ , in certain embodiments from 20 ⁇ to 65 ⁇ , in certain embodiments from 20 ⁇ to 45 ⁇ , in certain embodiments from 20 ⁇ to 40 ⁇ .
  • the grinding grits comprise a material selected from diamond, SiC, AI2O 3 , SiN, CBN (cubic boron nitride), Ce02, and combinations thereof.
  • a grinding force F(g) is applied by the grinding wheel to the glass sheet, and F(g) ⁇ 30 newton, in certain embodiments F(g) ⁇ 25 newton, in certain embodiments F(g) ⁇ 20 newton, in certain embodiments F(g) ⁇ 15 newton, in certain embodiments F(g) ⁇ 10 newton, in certain embodiments F(g) ⁇ 8 newton, in certain embodiments F(g) ⁇ 6 newton, in certain embodiments F(g) ⁇ 4 newton.
  • step (II) a polishing wheel comprising a plurality of polishing grits embedded in a polishing wheel polymer matrix is used, and the polishing grits have an average particle size of from 5 ⁇ to 80 ⁇ , in certain embodiments from 6 ⁇ to 65 ⁇ , in certain embodiments from 7 ⁇ to 50 ⁇ , in certain embodiments from 8 /m to 40 ⁇ , in certain embodiments from 5 ⁇ to 20 ⁇ , in certain embodiments from 8 ⁇ to 20 ⁇ .
  • a polishing force F(p) is applied by the polishing wheel to the glass sheet, and F(p) ⁇ 30 newton, in certain embodiments F(p) ⁇ 25 newton, in certain embodiments F(p) ⁇ 20 newton, in certain embodiments F(p) ⁇ 15 newton, in certain embodiments F(p) ⁇ 10 newton, in certain embodiments F(p) ⁇ 8 newton, in certain embodiments F(p) ⁇ 6 newton, in certain embodiments F(p) ⁇ 4 newton, in certain embodiments F(p) ⁇ 3 newton, in certain embodiments F(p) ⁇ 2 newton, in certain embodiments F(p) ⁇ 1 newton.
  • step (I) a grinding force F(g) is applied by the grinding wheel to the glass sheet
  • step (II) a polishing force F(p) is applied by the polising wheel to the glass sheet
  • 1.2 ⁇ F(g)/F(p) ⁇ 4.0 in certain embodiments 1.3 ⁇ F(g)/F(p) ⁇ 3.0, in certain embodiments 1.5 ⁇ F(g)/F(p) ⁇ 2.5, in certain embodiments 1.5 ⁇ F(g)/F(p) ⁇ 2.0.
  • the polishing grits comprise a material selected from diamond, SiC, Ce02, and combinations thereof.
  • the polymer matrix is selected from a polyurethane resin, a epoxy, a posulfone, a polyetherketone, polyketone, polyimide, polyamide, polyolefins, and mixtures and combinations thereof.
  • the polishing grits comprise a combination of diamond polishing grits and CeC polishing grits.
  • the diamond polishing grits have an average particle size of from 5 ⁇ to 80 ⁇ , in certain embodiments from 6 ⁇ to 65 ⁇ , in certain embodiments from 7 ⁇ to 50 ⁇ , in certain embodiments from 8 /m to 40 ⁇ , in certain embodiments from 5 ⁇ to 20 ⁇ , in certain embodiments from 8 ⁇ to 20 ⁇ ; and the CeC polishing grits have an average particle size less than 5 ⁇ , in certain embodiments less than 3 ⁇ , in certain other embodiments less than 1 ⁇ .
  • the polishing wheel polymer matrix has a Shore D hardness of from 40 to 80, in certain embodiments from 45 to 70, in certain other embodiments from 50 to 60.
  • the polishing wheel polymer matrix comprises a material selected from a polyurethane, an epoxy, cellulose and derivatives thereof, a polyolefin, and mixtures and combinations thereof.
  • the grinding wheel comprises, on the polishing surface, a pre-formed grinding groove having a cross-section perpendicular to the extending directionof the grinding groove with a maximal width Wm(gwg), an average with Wa(gwg) and a depth Dp(gwg), where Wm(gwg) > Th(gs), and Dp(gwg) > 50 ⁇ , in certain embodiments Dp(gwg) > 100 ⁇ , in certain embodiments Dp(gwg) > 150 ⁇ , in certain embodiments Dp(gwg) > 200 ⁇ , in certain embodiments Dp(gwg) > 250 ⁇ , in certain embodiments Dp(gwg) > 350 ⁇ , in certain embodiments Dp(gwg) > 400 ⁇ , in certain embodiments Dp(gwg) > 450 ⁇ , in certain embodiments Dp(gwg) > 500 ⁇ , in certain embodiments
  • the polishing wheel comprises, on the polishing surface, a pre-formed polishing groove having a cross-section perpendicular to the extending direction fo the polishing groove with a maximal width Wm(pwg), an average width Wa(pwg) and a depth Dp(pwg), where Wm(pwg) > Th(gs), and Dp(pwg) > 50 ⁇ , in certain embodiments Dp(pwg) > 100 ⁇ , in certain embodiments Dp(pwg) > 150 ⁇ , in certain embodiments Dp(pwg) > 200 ⁇ , in certain embodiments Dp(pwg) > 250 ⁇ , in certain embodiments Dp(pwg) > 350 ⁇ , in certain embodiments Dp(pwg) > 400 ⁇ , in certain embodiments Dp(pwg) > 450 ⁇ , in certain embodiments Dp(pwg) > 500 ⁇ ,
  • the first pre-finishing edge surface travels at a linear velocity of at least 1 cm-s "1 , in certain embodiments at least 1 cm-s "1 , in certain embodiments at least 2 cm-s “1 , in certain embodiments at least 5 cm-s “1 , in certain embodiments at least 10 cm-s “ in certain embodiments at least 15 cm-s " , in certain embodiments at least 20 cm-s " in certain embodiments at least 25 cm-s " , in certain embodiments at least 30 cm-s " in certain embodiments at least 35 cm-s " , in certain embodiments at least 40 cm-s " in certain embodiments at least 45 cm-s " , in certain embodiments at least 50 cm-s " in certain embodiments at least 60 cm-s " , in certain embodiments at least 70 cm-s " in certain embodiments at least 80 cm-s " , in certain embodiments at least 90 cm-s " in
  • One or more embodiments of the present disclosure has one or more of the following advantages.
  • FIG. 1 is a schematic drawing showing the cross-section of a glass sheet with pre-finishing edges and post-finishing edges according to one embodiment of the present disclosure.
  • FIG. 2A is a schematic drawing showing a glass sheet being ground in a first grinding step according to one embodiment of the present disclosure.
  • FIG. 2B is a schematic drawing showing the glass sheet having been ground according to FIG. 2A being polished in a second polishing step according to the same embodiment of FIG. 2A.
  • FIG. 3 is a schematic drawing showing the surface and sub-surface damage of an edge surface of a glass sheet.
  • FIG. 4 is a schematic drawing showing the cross-section of a polishing wheel used in one embodiment of the present disclosure.
  • FIG. 5 is a schematic drawing showing a glass sheet being ground and polished in a single pass according to one embodiment of the present disclosure.
  • FIG. 6 is a diagram comparing the edge surface quality of as-ground surface, as-polished surface according to a comparison embodiment and as-polished surface according to an embodiment of the present disclosure.
  • FIG. 7 is a diagram comparing the strength of the edge of a glass sheet finished using a comparison process and that of a glass sheet finished using a process according to one embodiment of the present disclosure.
  • the method of the present disclosure is particularly advantageous for finishing glass sheets having a thickness of from about 10 um to about 1000 um, though it may be used for finishing glass sheets at other thickness, mutatis mutandis.
  • as-cut glass sheet typically have edge surfaces substantially perpendicular to the major surfaces, which comprise micometer- scale flaws such as sub-surface micro-cracks.
  • the sharp edges are quite vulnerable to mechanical impact and can easily chip to form surface-contaminating glass chips. If the glass sheet is subjected to a stress, the cracks may further propagate causing the glass sheet breakage. To reduce chipping and breakage, it is highly desired to contour the edges and obtain a high smoothness thereof.
  • edge flaw size (' ⁇ ') of a glass sheet is related to the stress (' ⁇ ') and fracture toughness (a material property, Ki c ) of the glass material by the following relationship:
  • a first aspect of the present disclosure relates to a method for finishing an edge of a glass sheet having a thickness Th(gs), a first major surface, a second major surface, and a first pre-finishing edge surface connecting the first major surface with the second major surface, a first corner defined by the intersection between the first major surface and the first pre-finishing edge surface, and a second corner defined by the intersection between the second major surface and the first pre-finishing edge surface, comprising the follwing steps:
  • the finishing method of the present disclose is a two-step process involving a first grinding step and a subsequent polishing step.
  • the combination of these two steps results in an optimal combination of high throughput and high final edge quality.
  • the first grinding step results in fast removal of the majority of the glass material in the whole finishing step, effectively removing a great majority of the large sub-surfaces defects formed during an upstream glass sheet cutting process.
  • the first grinding step results in the obtaining of a curved first ground edge surface with substantlly the desired surface curvature by eliminating the sharp corners. Nonetheless, some of the pre-finishing edge defects may still remain, with the same or lower depth, at the end of the grinding step.
  • the grinding step can result in a edge surface roughness not meeting the need of certain subsequent process requirements.
  • a polishing step after a grinding step by including a polishing step after a grinding step, remaining sub-surface defects are further reduced and/or removed, and the edge quality and strength are brought to a new level.
  • FIG. 1 schematically illustrates the process according to one embodiment of the present disclosure.
  • an as-cut glass sheet 101 having a thickness Th(gs) obtained from a cutting step having a first major surface 103, a second major surface 105, a first pre- finishing edge surface 107 and a second pre- finishing edge surface 109 connecting the first major surface 103 with the second major surface 105.
  • Both the pre- finishing edge sufaces 107 and 109 are substantially perpendicular to the major surfaces 103 and 105.
  • sharp corners 1 11, 113, 115 and 1 17 are defined at the intersection between the major surfaces and the pre-finishing edge surfaces.
  • FIG. 2A schematically illustrates a grinding step according to an embodiment of the present disclosure.
  • an as-cut glass sheet 201 having a first major surface 205 and a second major surface 207 as well as a substantially vertical pre- finishing edge surface 209 is subjected to grinding by a grinding wheel 212 having a preformed grinding wheel groove 213, which rotates around a spindle.
  • a grinding wheel 212 having a preformed grinding wheel groove 213, which rotates around a spindle.
  • both corners of the cross-sections of the first and second major surfaces 205 and 207 are being ground simultaneously by the grinding wheel groove 213 while the first edge surface 209 travels in a direction substantially perpendicular to the surface of cross- section of the glass sheet illustrated in this figure.
  • a grinding force F(g) is applied by the griding wheel 212 to the glass sheet 203, which allows for the removal of the glass material from the corners and the edge surface of the glass sheet. While the use of a single grinding wheel 212 is advantageous in certain embodiments, one skilled in the art, upon reading the present disclosure, can understand that the present invention maybe applied in embodiments where multiple grinding wheels are used, each for grinding a separate corner region only.
  • FIG. 2 A shows the grinding of the first pre- finishing edge surface 209 only. In practice, one may grind the opposing second pre- finihsing edge surface 208 simultaneously (not shown) or in a separate grinding operation.
  • FIG. 2B schematically illustrates a polishing step according to the same embodiment associated with the grinding step illustrated in FIG. 2A.
  • the as-ground glass sheet 201 with the first pre-finishing edge 209 ground to a curved first as-ground edge surface 215 is further subjected to polishng by a polishing wheel 216 having a pre-formed polishing wheel groove 217, which rotates around a spindle.
  • the entire as-ground first edge surface 215 is being polished by the polishing wheel groove 217 while the first as-ground edge surface 215 travels in a direction substantially perpendicular to the cross-section of the glass sheet illustrated in this figure.
  • a polishing force F(p) is applied by the polishing wheet 216 to the glass sheet 203, which allows for the further removal of glass material from the as-ground edge surface 215.
  • FIG. 2B shows the polishing of the first as-ground edge surface 215 only. In practice, one may polish the opposing second as-ground edge surface 214 simultaneously (not shown) or in a separate polishing operation.
  • the grinding step of the first pre-finishing edge surface 209 shown in FIG. 2A and the polishing step of the first as-ground edge surface 215 shown in FIG. 2B are carried out substantially simulataneously in a single finishing operation, with the ground wheel 212 located slight upstream to the polishing wheel 216, such that the first pre-finishing edge surface 209 can be processed into an as-polished surface 215 at the end of a single pass through the edge-finishing machine.
  • any real surface exhibits certain roughness. This is true for the pre-finishing edge surface, the as-ground edge surface and the as-polished edge surface.
  • FIG. 3 schematically illustrates surface features of one of such surfaces 301, including surface peak-to-valley undulaltions called surface roughness (shown as SR) and sub-surface defects (shown as SSD) 303, 305 and 307 with various depth of reach.
  • the sub-surface damages, when they are large, may be visible under an optical micro-scope. However, for the majority of them, which have merely sub-micron gap, they are typically not directly detectable under an optical microscope. Thus, to characterize and quantify the presence, frequency and depth of the sub-surface
  • microcracks also known as sub-surface damage, SSD
  • SSD sub-surface damage
  • An edge finished large glass sheet is cut to approximately l "xl" (2.54 cm by 2.54 cm) squares by scoring followed by bending-separation. Care is taken to ensure that the scoring of large glass sheet is performed from the side opposite to the finished edge to be measured, thus the profile of the measured edge does not have any score marks which may interfere with inspection and measurement.
  • the square samples are then etched using the following process: (i) immersing the whole square samples in a 5% HF + 5% HCl solution for 30 seconds without agitation; (ii) taking the square samples out of the acid; and then (iii) rinsing ad cleaning with process water. Care is taken to ensure that no acid remains on the square sample surface.
  • the square samples are then inspected under an optical microscope.
  • the samples are placed under the microscope such that the profile (cross section) of edge is visible.
  • the magnification is changed from 100 times to 500 times to inspect flaws (subsurface damages, SSDs) on the edge of the profile. For smaller cracks, higher
  • magnification is used, and vice versa. Also 200x optical images of the profiles are captured and then analyzed.
  • the measurements are performed by drawing two parallel lines in the images on the computer screen at the two ends of the SSD
  • SSD frequency i.e., normalized average number of cracks, is defined as the total number of SSDs per unit length along the curve profile of the cross-section of the edge.
  • MCL(p)/MCL(g) ⁇ 1/2, ACL(p)/ACL(g) ⁇ 1/2, and ANC(p)/ANC(g) ⁇ l/2.
  • MCL(p)/MCL(g) ⁇ 1/3, ACL(p)/ACL(g) ⁇ 1/3, and
  • MCL(p)/ANC(g) ⁇ 1/3 In certain other particularly advantageous embodiments, MCL(g) ⁇ 40 ⁇ , ACL(g) ⁇ 10 ⁇ , and ANC(p) ⁇ 40 mm "1 . In certain other particularly advantageous embodiments, MCL(g) ⁇ 20 ⁇ , ACL(g) ⁇ 5 ⁇ , and ANC(p) ⁇ 20.
  • the grinding wheel used in step (I) may advantageously comprise a number of grinding grits embedded in a grinding wheel matrix.
  • the grinding grits normally have a hardness at least as high as that of the glass material to be ground.
  • Examples of grinding grits in the grinding wheel include, but are not limited to, diamond, SiC, SiN, and combinations thereof.
  • the matrix holds the grinding grits together.
  • Examples of the material for the matrix include, but are not limited to, iron, stainless steel, ceramic, glass, and the like. Because significant amount of glass material is removed in step (I), it is highly desired that the grinding wheel matrix materials is relatively hard and rigid.
  • the griding grits protrude above the surface of the matrix material, and during grinding, direct contact between the matrix material and the glass sheet to be ground is avoided. During grinding, the friction between the grinding grits and the glass material causes the removal of the glass material from the corners and the edge surfaces. Overtime, both the matrix and the grinding grits may be consumed.
  • the grinding wheel and the glass edge surface subjected to grinding are advantageously cooled by a fluid, more advantageously a liquid such as water.
  • a fluid more advantageously a liquid such as water.
  • Water is particularly advantageous due to the low cost, its ability to lubricate the process, carry away the glass particles generated, while cooling the wheel and the glass sheet.
  • the grinding grits have an average particle size of from 10 ⁇ to 80 ⁇ , in certain embodiments from 20 ⁇ to 65 ⁇ , in certain embodiments from 20 ⁇ to 45 ⁇ , in certain embodiments from 20 ⁇ to 40 ⁇ .
  • a grinding force applied by the grinding wheel to the glass sheet being ground determines the friction force between the grinding wheel and the glass material, hence the material removal speed, and amount and severity of the sub-surface damage (SSD).
  • the grinding force F(g) ⁇ 30 newton in certain embodiments F(g) ⁇ 25 newton, in certain embodiments F(g) ⁇ 20 newton, in certain embodiments F(g) ⁇ 15 newton, in certain embodiments F(g) ⁇ 10 newton, in certain embodiments F(g) ⁇ 8 newton, in certain embodiments F(g) ⁇ 6 newton, in certain embodiments F(g) ⁇ 4 newton.
  • the polishing wheel used in step (II) may advantageously comprise a number of polishing grits embedded in a polishing wheel polymer matrix. At least some of the polishing grits normally have a hardness at least as high as that of the glass material to be polished. Examples of polishing grits in the polishing wheel include, but are not limited to, diamond, SiC, SiN, AI2O 3 , BN, CeC ⁇ , and combinations thereof.
  • the polishing grits have an average particle size of from 5 ⁇ to 80 ⁇ , in certain embodiments from 6 ⁇ to 65 ⁇ , in certain embodiments from 7 ⁇ to 50 ⁇ , in certain embodiments from 8 /m to 40 ⁇ , in certain embodiments from 5 ⁇ to 20 ⁇ , in certain embodiments from 8 ⁇ to 20 ⁇ .
  • the polishing grits desirably have at leaset one of: (i) a lower hardness, (ii) smaller grit particle size, (iii) lower density of grit particles in terms of number of grit particles per unit volume of the polymer matrix, in order to obtain a lower material removal speed and lower SSD as a result of the polishing step (II).
  • the polishing grits comprise a combination of diamond polishing grits and CeC polishing grits.
  • the diamond polishing grits having a high hardness, provides the effectiveness of material removal, while the CeC ⁇ polishing grits, at a lower hardness than diamond particles, provide the polishing function and more gentle material removal ability, resulting in an optimized combination of material removal speed and polishing function for step (II).
  • the diamond polishing grits have an average particle size of from 5 ⁇ to 80 ⁇ , in certain embodiments from 6 ⁇ to 65 ⁇ , in certain embodiments from 7 ⁇ to 50 ⁇ , in certain embodiments from 8 /m to 40 ⁇ , in certain embodiments from 5 ⁇ to 20 ⁇ , in certain embodiments from 8 ⁇ to 20 ⁇ ; and the CeC polishing grits have an average particle size less than 5 ⁇ , in certain embodiments less than 3 ⁇ , in certain other embodiments less than 1 ⁇ .
  • the polymer matrix holds the polishing grits together.
  • the material for the polymer matrix include, but are not limited to, polyurethanes, epoxies, polyester, polyethers, polyetherketones, polyamides, polyimides, polyolefins,
  • the polymer matrix material of the polishing wheel has a higher flexibility than the grinding wheel matrix material.
  • the friction between the polishing grits and the glass material causes the removal of the glass material from the as-ground surfaces. Overtime, both the polymer matrix and the polishing grits may be consumed.
  • the polishing wheel and the glass edge surface subjected to polishing are advantageously cooled by a fluid, more advantageously a liquid such as water.
  • a fluid more advantageously a liquid such as water.
  • Water is particularly advantageous due to the low cost, its ability to lubricate the process, carry away the glass particles generated, while cooling the wheel and the glass sheet.
  • polishing grits particularly size, geometry, packing density in the wheel, and material hardness, impact the polishing effectiveness, material removal speed, surface roughness and sub-surface damage at the end of the polishing step (II).
  • a polishing force applied by the polishing wheel to the glass sheet being ground determines the friction force between the polishing wheel and the glass material, hence the material removal speed, and amount and severity of the sub-surface damage (SSD).
  • the polishing force F(p) is applied by the polishing wheel to the glass sheet, and F(p) ⁇ 30 newton, in certain embodiments F(p) ⁇ 25 newton, in certain embodiments F(p) ⁇ 20 newton, in certain embodiments F(p) ⁇ 15 newton, in certain embodiments F(p) ⁇ 10 newton, in certain embodiments F(p) ⁇ 8 newton, in certain embodiments F(p) ⁇ 6 newton, in certain embodiments F(p) ⁇ 4 newton.
  • the hardness of the polymer matrix material of the polishing wheel has impact on the glass material removel rate and the polished surface quality as well. This is because a low hardness, highly flexible polymer matrix can effectively result in a significantly lower force applied by the polishing grit particles to the glass material than a harder polymer matrix would. Thus, in certain embodiments, it is desirable that the polishing wheel polymer matrix has a Shore D hardness of from 40 to 80, in certain embodiments from 45 to 70, in certain other embodiments from 50 to 60.
  • a pre-formed grinding wheel surface groove having a cross-section in the radial direction of the wheel with a maximal width Wm(gwg), an average with Wa(gwg) and a depth Dp(gwg), where Wm(gwg) > Th(gs), and Dp(gwg) > 50 ⁇ in certain embodiments Dp(gwg) > 100 ⁇ , in certain embodiments Dp(gwg) > 150 ⁇ , in certain embodiments Dp(gwg) > 200 ⁇ , in certain embodiments Dp(gwg) > 250 ⁇ , in certain embodiments Dp(gwg) > 350 ⁇ , in certain embodiments Dp(gwg) > 400 ⁇ , in certain embodiments Dp(gwg) > 450 ⁇ , in certain embodiments Dp(gwg) > 500 ⁇ , in certain embodiments Dp(gwg) > 1000 ⁇ , in certain embodiments Dp(gwg) > 1500 ⁇ .
  • the grinding groove receives the pre-finishing edge before grinding starts, and ensures a proper, consistent amount of material removal in all grinding operations, from the beginning of the service life of the grinding wheel to the end thereof, so that a consistent edge surface geometry and dimension is obtained among glass sheets finished by using the same grinding wheel.
  • 1.2-Th(gs) ⁇ Wm(gwg) ⁇ 3.0-Th(gs) in certain embodiments 1.5 -Th(gs) ⁇ Wm(gwg) ⁇ 2.5-Th(gs), in certain embodiments 1.5-Th(gs) ⁇ Wm(gwg) ⁇ 2.0-Th(gs).
  • the polishing wheel 401 having an overall wheel width W(pw) comprises a pre-formed polishing wheel surface groove 403 having a cross-section in the radial direction of the wheel with a maximal width Wm(pwg), an average width Wa(pwg) and a depth Dp(pwg), where Wm(pwg) > Th(gs), and Dp(pwg) > 50 ⁇ , in certain embodiments Dp(pwg) > 100 ⁇ , in certain embodiments Dp(pwg) > 150 ⁇ , in certain embodiments Dp(pwg) > 200 ⁇ , in certain embodiments Dp(pwg) > 250 ⁇ , in certain embodiments Dp(pwg) > 350 ⁇ , in certain embodiments Dp(pwg) > 400 ⁇ , in certain embodiments Dp(pwg) > 450 ⁇ , in certain embodiments Dp(pwg) > 500 ⁇ , in certain embodiments Dp(pwg)
  • the polishing groove receives the as- ground edge before polishing starts, and ensures a proper, consistent amount of material removal in all polishing operations, from the beginning of the service life of the polishing wheel to the end thereof, so that a consistent as-polished edge surface geometry and dimension is obtained among glass sheets finished by using the same polishing wheel.
  • 1.2-Th(gs) ⁇ Wm(pwg) ⁇ 3.0-Th(gs) in certain embodiments 1.5 -Th(gs) ⁇ Wm(pwg) ⁇ 2.5 -Th(gs), in certain embodiments 1.5 -Th(gs) ⁇ Wm(pwg) ⁇ 2.0-Th(gs).
  • a pre- finishing edge surface of a glass sheet is subjected to the grinding step (I) and the polishing step (II) in a single finishing step, wherein the edge surface travels at a linear velocity with respect to the center of the grinding wheel and the center of the polishing wheel.
  • FIG. 5 schematically illustrates this embodiment, where an edge surface 501 of a glass sheet is received by a grinding groove 507 of a grinding wheel 503, subjected to grinding first, and then travels to the downstream polishing location, where it is received by the polishing groove 509 of a polishing wheel 505.
  • the velocity of the edge surface 501 with respect to the center of the grinding wheel 503 and the center of the polishing wheel 505 is V.
  • V is at least 1 cm- s "1 , in certain embodiments at least 2 cm-s 1 , in certain embodiments at least 5 cm-s “1 , in certain embodiments at least 10 cm- s “1 , in certain embodiments at least 15 cm- s "1 , in certain embodiments at least 20 cm- s “1 , in certain embodiments at least 25 cm- s "1 , in certain embodiments at least 30 cm- s "1 , in certain embodiments at least 35 cm- s "1 , in certain embodiments at least 40 cm- s "1 , in certain embodiments at least 45 cm- s "1 , in certain embodiments at least 50 cm- s "1 , in certain embodiments at least 60 cm- s "1 , in certain embodiments at least 70 cm- s "1 , in certain embodiments at least 80 cm- s "1 , in certain embodiments at least 90 cm- s "1 , in certain embodiments at most 100 cm- s 1
  • a series of grinding wheels from the first to the last in the order of contacting a specific point on the glass sheet edge, the grinding grits may become increasingly smaller to provide increasingly more gentle grinding function.
  • polishing grits may become increasingly smaller to provide increasing more gentle polishing function.
  • increasingly softer polymer matrix material may be used, to achieve the intended final polishing function and low SSDs.
  • the method of the present disclosure by utilizing the proper grinding process parameters and the polishgn process parameters, achieves a high glass sheet velocity, hence a high finishing throughput, in combination with high as-polished edge surface quality, especially in terms of SSDs.
  • the method used for making surface groove 403 on the polishing wheel 401 is as follows: A tool with the inverse profile of the groove shape is created by machining a metal (for example, stainless steel) which serves as the core. The core is then plated (with metals such as nickel, copper or bronze etc.) so that a layer of abrasive grains (such as diamond) can be bonded on to the steel core.
  • a tool commonly referred to as an electroplated tool, is used to grind the profile in to the periphery of the wheel. The process can be dry or wet and depending on the tolerances could be a two step process with rough and fine grinding.
  • the wheel run-out (out-of-roundness) is checked before a groove is machined. If the run-out is higher than a given tolerance, then the wheel is first trued before the groove is machined. If necessary, the diamond grains in the groove are exposed by dressing the groove using aluminum oxide (alumina).
  • Aluminoborosilicate glass sheets having a thickness of 700 ⁇ were ground at an edge by using a grinding wheel.
  • the as-ground surface was then measured for SSD according to the measurement protocol described supra.
  • the as-ground surfaces of multiple sheets were then polished using two different polishing wheels, one according to the present disclosure and one according to a comparative example.
  • the as-polished surfaces were then measured for SSDs according to the same protocol.
  • test results are plotted into a chart shown in FIG. 6.
  • bars El indicate as-ground surface
  • bars E2 indicate as-polished surface in the comparative example
  • bars E3 indicate as-polished surface in the example according to the present disclosure
  • bars 601 indicate measured maximal SSD ( ⁇ )
  • bars 602 indicate measured average SSD ( ⁇ )
  • bars 603 indicate SSD frequency (i.e., normalized average number of cracks).

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Abstract

A method for finishing an edge of a glass sheet comprising a first grinding step and a second polishing step using different abrasive wheels. The method results in consistent finished edge quality and improved edge quality in term of sub-surface damage (SSD). The method can be advantageously utilized to finish the edges of a thin glass substrate for use as substrates of display devices, such as LCD displays and the like.

Description

GLASS EDGE FINISHING METHOD
[0001] This application claims the benefit of priority to 35 U.S.C. § 120 of U.S. Appliction Serial No. 13/170728 filed June 28, 201 1 the content of which is relief upon and incorporated herein by refrence in its entirety.
TECHNICAL FIELD
[0002] The present invention relates to edge finishing methods of glass materials. In particular, the present invention relates to grinding and polishing of the edge of a thin glass sheet. The present invention is useful, e.g., in finishing the edge of a glass sheet for use as a substrate for making a display device, such as LCD display.
BACKGROUND
[0003] Thin glass sheets have found use in many optical, electrical or optoeletrical devices, such as liquid crystal (LCD) displays, organic light-emitting diode (OLED) displays, solar cells, as semiconductor device substrates, color filter substrates, cover sheets, and the like. The thin glass sheets, having a thickness of from several micrometers to several millimeters, may be fabricated by a number of methods, such as float process, fusion down-draw process (a method pioneered by Corning Incorporated, Corning, New York, U.S.A.), slot down-draw process, and the like. It is highly desired that these glass substrates have high strength, so that they can withstand the mechanical impact that they may encounter during finishing, packaging, transporation, handling, and the like. The atomic network of glass materials is intrinsically strong. However, defect in the surface of a glass sheet, including the major surface and edge surface, can propagate quickly into the network when subject to stress over a certain threshold. Because these substrates normally have relatively high main surface quality with low number of scratches and the like, their strength are largely determined by the edge quality. An edge with small amounts of defects is highly desired for high edge strength of a glass material.
[0004] The production of a glass sheet frequently includes a step of cutting by mechanical score-and-break, laser score-and-break or direct laser full-body cutting. Those processes invariably result in a glass sheet having two major surfaces connected by an edge surface substantially perpendicular to the the major surfaces. Thus, at the intersection regions between the major surfaces and the edge surface, one may observe sharp, 90° corners. When under a microscope, one can observe a large number of defects such as cracks in the corners, especially where mechanical scoring is used. These corners, when impacted during packaging, handling and use, can easily break, leading to chipping, crack propagration and even sheet rupture, none of which is desirable.
[0005] Traditionally, the pre-finishing edges of a glass sheet has been ground and optionally polished. However, the existing finishing methods suffered from one of the more of the following drawbacks: (i) insufficient resultant edge quality; (ii) low throughput; and (iii) low consistency of finished edge quality. Besides, as the glass sheets used for the displays are becoming thinner and thinner, existing finishing methods acceptable for glass sheets with large thickness were found inadequate.
[0006] Thus, there is a geuine need of an improved glass sheet edge finishing method.
The present invention meets this and other needs.
SUMMARY
[0007] Several aspects of the present invention are disclosed herein. It is to be understood that these aspects may or may not overlap with one another. Thus, part of one aspect may fall within the scope of another aspect, and vice versa.
[0008] Each aspect is illustrated by a number of embodiments, which, in turn, can include one or more specific embodiments. It is to be understood that the embodiments may or may not overlap with each other. Thus, part of one embodiment, or specific embodiments thereof, may or may not fall within the ambit of another embodiment, or specific embodiments thereof, and vice versa.
[0009] Thus, a first aspect of the present disclosure is related to a method for finishing an edge of a glass sheet having a thickness Th(gs), a first major surface, a second major surface, and a first pre-finishing edge surface connecting the first major surface with the second major surface, a first corner defined by the intersection between the first major surface and the first pre-finishing edge surface, and a second corner defined by the intersection between the second major surface and the first pre-finishing edge surface, comprising the follwong steps:
[0010] (I) grinding the first edge surface, the first corner and the second corner to obtain a curved first ground edge surface with substantially no sharp corner having an as- ground maximal crack length MCL(g), an as-ground average crack length ACL(g), and an as-ground normalized average number of cracks ANC(g); and subsequently
[0011] (II) polishing the first ground edge surface to obtain a first polished edge surface having an as-polished maximal crack length MCL(p), an as-polished average crack length ACL(p), and an as-polished normalized average number of cracks ANC(p); wherein MCL(p)/MCL(g) < ¾, ACL(p)/ACL(g) < 3/4, and ANC(p)/ANC(g) < ¾.
[0012] In certain embodiments of the method according to the first aspect of the present disclosure, MCL(p)/MCL(g) < 2/3, ACL(p)/ACL(g) < 2/3, and ANC(p)/ANC(g) < 2/3.
[0013] In certain embodiments of the method according to the first aspect of the present disclosure, MCL(p)/MCL(g) < 1/2, ACL(p)/ACL(g) < 1/2, and ANC(p)/ANC(g) <\I2.
[0014] In certain embodiments of the method according to the first aspect of the present disclosure, MCL(p)/MCL(g) < 1/3, ACL(p)/ACL(g) < 1/3, and ANC(p)/ANC(g) < 1/3.
[0015] In certain embodiments of the method according to the first aspect of the present disclosure, MCL(g) < 40 μπι, ACL(g) < 10 μπι, and ANC(p) < 40 mm"1.
[0016] In certain embodiments of the method according to the first aspect of the present disclosure, in step (I), a grinding wheel comprising a plurality of grinding grits embedded in a grinding wheel matrix is used, and the grinding grits have an average particle size of from 10 μπι to 80 μπι, in certain embodiments from 20 μπι to 65 μπι, in certain embodiments from 20 μπι to 45 μπι, in certain embodiments from 20 μπι to 40 μπι.
[0017] In certain embodiments of the method according to the first aspect of the present disclosure, the grinding grits comprise a material selected from diamond, SiC, AI2O3, SiN, CBN (cubic boron nitride), Ce02, and combinations thereof.
[0018] In certain embodiments of the method according to the first aspect of the present disclosure, in step (I), a grinding force F(g) is applied by the grinding wheel to the glass sheet, and F(g) < 30 newton, in certain embodiments F(g) < 25 newton, in certain embodiments F(g) < 20 newton, in certain embodiments F(g) < 15 newton, in certain embodiments F(g) < 10 newton, in certain embodiments F(g) < 8 newton, in certain embodiments F(g) < 6 newton, in certain embodiments F(g) < 4 newton.
[0019] In certain embodiments of the method according to the first aspect of the present disclosure, in step (II), a polishing wheel comprising a plurality of polishing grits embedded in a polishing wheel polymer matrix is used, and the polishing grits have an average particle size of from 5 μπι to 80 μπι, in certain embodiments from 6 μπι to 65μπι, in certain embodiments from 7 μπι to 50 μπι, in certain embodiments from 8 /m to 40 μπι, in certain embodiments from 5 μνα to 20 μνα, in certain embodiments from 8 μνα to 20 μνα.
[0020] In certain embodiments of the method according to the first aspect of the present disclosure, in step (II), a polishing force F(p) is applied by the polishing wheel to the glass sheet, and F(p) < 30 newton, in certain embodiments F(p) < 25 newton, in certain embodiments F(p) < 20 newton, in certain embodiments F(p) < 15 newton, in certain embodiments F(p) < 10 newton, in certain embodiments F(p) < 8 newton, in certain embodiments F(p) < 6 newton, in certain embodiments F(p) < 4 newton, in certain embodiments F(p) < 3 newton, in certain embodiments F(p) < 2 newton, in certain embodiments F(p) < 1 newton.
[0021] In certain embodiments of the method according to the first aspect of the present disclosure, in step (I), a grinding force F(g) is applied by the grinding wheel to the glass sheet, in step (II), a polishing force F(p) is applied by the polising wheel to the glass sheet, and 1.2 < F(g)/F(p) < 4.0, in certain embodiments 1.3 < F(g)/F(p) < 3.0, in certain embodiments 1.5 < F(g)/F(p) < 2.5, in certain embodiments 1.5 < F(g)/F(p) < 2.0.
[0022] In certain embodiments of the method according to the first aspect of the present disclosure, the polishing grits comprise a material selected from diamond, SiC, Ce02, and combinations thereof.
[0023] In certain embodiments of the method according to the first aspect of the present disclosure, the polymer matrix is selected from a polyurethane resin, a epoxy, a posulfone, a polyetherketone, polyketone, polyimide, polyamide, polyolefins, and mixtures and combinations thereof.
[0024] In certain embodiments of the method according to the first aspect of the present disclosure, the polishing grits comprise a combination of diamond polishing grits and CeC polishing grits.
[0025] In certain embodiments of the method according to the first aspect of the present disclosure, the diamond polishing grits have an average particle size of from 5 μνα to 80 μπι, in certain embodiments from 6 μπι to 65μπι, in certain embodiments from 7 μπι to 50 μπι, in certain embodiments from 8 /m to 40 μπι, in certain embodiments from 5 μπι to 20 μπι, in certain embodiments from 8 μπι to 20 μπι; and the CeC polishing grits have an average particle size less than 5 μπι, in certain embodiments less than 3 μπι, in certain other embodiments less than 1 μπι. [0026] In certain embodiments of the method according to the first aspect of the present disclosure, the polishing wheel polymer matrix has a Shore D hardness of from 40 to 80, in certain embodiments from 45 to 70, in certain other embodiments from 50 to 60.
[0027] In certain embodiments of the method according to the first aspect of the present disclosure, the polishing wheel polymer matrix comprises a material selected from a polyurethane, an epoxy, cellulose and derivatives thereof, a polyolefin, and mixtures and combinations thereof.
[0028] In certain embodiments of the method according to the first aspect of the present disclosure, in step (I), the grinding wheel comprises, on the polishing surface, a pre-formed grinding groove having a cross-section perpendicular to the extending directionof the grinding groove with a maximal width Wm(gwg), an average with Wa(gwg) and a depth Dp(gwg), where Wm(gwg) > Th(gs), and Dp(gwg) > 50 μνα, in certain embodiments Dp(gwg) > 100 μνα, in certain embodiments Dp(gwg) > 150 μνα, in certain embodiments Dp(gwg) > 200 μνα, in certain embodiments Dp(gwg) > 250 μνα, in certain embodiments Dp(gwg) > 350 μνα, in certain embodiments Dp(gwg) > 400 μνα, in certain embodiments Dp(gwg) > 450 μνα, in certain embodiments Dp(gwg) > 500 μνα, in certain embodiments Dp(gwg) > 1000 μνα, in certain embodiments Dp(gwg) > 1500 μνα.
[0029] In certain embodiments of the method according to the first aspect of the present disclosure, 1.2 -Th(gs) <Wm(gwg) < 3.0-Th(gs), in certain embodiments
1.5 -Th(gs) <Wm(gwg) < 2.5-Th(gs), in certain embodiments 1.5-Th(gs) <Wm(gwg) < 2.0-Th(gs).
[0030] In certain embodiments of the method according to the first aspect of the present disclosure, in step (II), the polishing wheel comprises, on the polishing surface, a pre-formed polishing groove having a cross-section perpendicular to the extending direction fo the polishing groove with a maximal width Wm(pwg), an average width Wa(pwg) and a depth Dp(pwg), where Wm(pwg) > Th(gs), and Dp(pwg) > 50 μνα, in certain embodiments Dp(pwg) > 100 μνα, in certain embodiments Dp(pwg) > 150 μνα, in certain embodiments Dp(pwg) > 200 μνα, in certain embodiments Dp(pwg) > 250 μνα, in certain embodiments Dp(pwg) > 350 μνα, in certain embodiments Dp(pwg) > 400 μνα, in certain embodiments Dp(pwg) > 450 μνα, in certain embodiments Dp(pwg) > 500 μνα, in certain embodiments Dp(pwg) > 1000 μνα, in certain embodiments Dp(pwg) > 1500 μνα.
[0031] In certain embodiments of the method according to the first aspect of the present disclosure, 1.2 -Th(gs) <Wm(pwg) < 3.0-Th(gs), in certain embodiments 1.5 -Th(gs) <Wm(pwg) < 2.5 -Th(gs), in certain embodiments 1.5-Th(gs) <Wm(pwg) < 2.0-Th(gs).
[0032] In certain embodiments of the method according to the first aspect of the present disclosure, in steps (I) and (II), the first pre-finishing edge surface travels at a linear velocity of at least 1 cm-s"1, in certain embodiments at least 1 cm-s"1, in certain embodiments at least 2 cm-s"1, in certain embodiments at least 5 cm-s"1, in certain embodiments at least 10 cm-s" in certain embodiments at least 15 cm-s" , in certain embodiments at least 20 cm-s" in certain embodiments at least 25 cm-s" , in certain embodiments at least 30 cm-s" in certain embodiments at least 35 cm-s" , in certain embodiments at least 40 cm-s" in certain embodiments at least 45 cm-s" , in certain embodiments at least 50 cm-s" in certain embodiments at least 60 cm-s" , in certain embodiments at least 70 cm-s" in certain embodiments at least 80 cm-s" , in certain embodiments at least 90 cm-s" in certain embodiments at most 100 cm-s"1, in certain embodiments at most 80 cm-s in certain other embodiments at most 70 cm-s"1, in certain other embodiments at most 60 cm- s"1, in certain other embodiments at most 50 cm-s"1.
[0033] One or more embodiments of the present disclosure has one or more of the following advantages. First, the use of a combination of a grinding wheel and a polishing wheel results in a combination of high throughput enabled by the high material removal in the grinding step and a high as-polished surface quality enabled by the gentle nature of the polishing wheel. Second, by using a grinding wheel and/or a polishing wheel with pre-formed groove, one can achieve consistent edge finishing speed and quality during the operational life of the wheel. Third, by choosing a polishing wheel having hard polishing grits and soft polishing grits embedded in a relatively soft and flexible polymer matrix material, one can reduce the SSDs formed as a result of the grinding step, and achieve a high surface quality of the as-polished edge surface in term of SSDs.
[0034] Additional features and advantages of the invention will be set forth in the detailed description which follows, and in part will be readily apparent to those skilled in the art from the description or recognized by practicing the invention as described in the written description and claims hereof, as well as the appended drawings.
[0035] It is to be understood that the foregoing general description and the following detailed description are merely exemplary of the invention, and are intended to provide an overview or framework to understanding the nature and character of the invention as it is claimed.
[0036] The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification.
BRIEF DESCRIPTION OF THE DRAWINGS
[0037] In the accompanying drawings:
[0038] FIG. 1 is a schematic drawing showing the cross-section of a glass sheet with pre-finishing edges and post-finishing edges according to one embodiment of the present disclosure.
[0039] FIG. 2A is a schematic drawing showing a glass sheet being ground in a first grinding step according to one embodiment of the present disclosure.
[0040] FIG. 2B is a schematic drawing showing the glass sheet having been ground according to FIG. 2A being polished in a second polishing step according to the same embodiment of FIG. 2A.
[0041] FIG. 3 is a schematic drawing showing the surface and sub-surface damage of an edge surface of a glass sheet.
[0042] FIG. 4 is a schematic drawing showing the cross-section of a polishing wheel used in one embodiment of the present disclosure.
[0043] FIG. 5 is a schematic drawing showing a glass sheet being ground and polished in a single pass according to one embodiment of the present disclosure.
[0044] FIG. 6 is a diagram comparing the edge surface quality of as-ground surface, as-polished surface according to a comparison embodiment and as-polished surface according to an embodiment of the present disclosure.
[0045] FIG. 7 is a diagram comparing the strength of the edge of a glass sheet finished using a comparison process and that of a glass sheet finished using a process according to one embodiment of the present disclosure.
DETAILED DESCRIPTION
[0046] The method of the present disclosure is particularly advantageous for finishing glass sheets having a thickness of from about 10 um to about 1000 um, though it may be used for finishing glass sheets at other thickness, mutatis mutandis.
[0047] As mentioned supra in the background, as-cut glass sheet typically have edge surfaces substantially perpendicular to the major surfaces, which comprise micometer- scale flaws such as sub-surface micro-cracks. The sharp edges are quite vulnerable to mechanical impact and can easily chip to form surface-contaminating glass chips. If the glass sheet is subjected to a stress, the cracks may further propagate causing the glass sheet breakage. To reduce chipping and breakage, it is highly desired to contour the edges and obtain a high smoothness thereof.
[0048] Without intending to be bound by a particular theory, it was indicated that the edge flaw size ('α') of a glass sheet is related to the stress ('σ') and fracture toughness (a material property, Kic) of the glass material by the following relationship:
Figure imgf000009_0001
[0049] Thus, it is clear that the best edge strength is obtained by minimizing the critical flaw size as they are inversely related.
[0050] Thus, a first aspect of the present disclosure relates to a method for finishing an edge of a glass sheet having a thickness Th(gs), a first major surface, a second major surface, and a first pre-finishing edge surface connecting the first major surface with the second major surface, a first corner defined by the intersection between the first major surface and the first pre-finishing edge surface, and a second corner defined by the intersection between the second major surface and the first pre-finishing edge surface, comprising the follwing steps:
(I) grinding the first edge surface, the first corner and the second corner to obtain a curved first ground edge surface with substantially no sharp corner having an as- ground maximal crack length MCL(g), an as-ground average crack length ACL(g), and an as-ground normalized average number of cracks ANC(g); and subsequently
(II) polishing the first ground edge surface to obtain a first polished edge surface having an as-polished maximal crack length MCL(p), an as-polished average crack length ACL(p), and an as-polished normalized average number of cracks ANC(p); wherein MCL(p)/MCL(g) < ¾, ACL(p)/ACL(g) < 3/4, and ANC(p)/ANC(g) < ¾.
[0051] Thus the finishing method of the present disclose is a two-step process involving a first grinding step and a subsequent polishing step. The combination of these two steps results in an optimal combination of high throughput and high final edge quality. The first grinding step results in fast removal of the majority of the glass material in the whole finishing step, effectively removing a great majority of the large sub-surfaces defects formed during an upstream glass sheet cutting process. In addition, the first grinding step results in the obtaining of a curved first ground edge surface with substantlly the desired surface curvature by eliminating the sharp corners. Nonetheless, some of the pre-finishing edge defects may still remain, with the same or lower depth, at the end of the grinding step. Furthermore, due to the aggressive material removal measure of the grinding step, some sub-surface cracks may have been created in the process. In addition, the grinding step can result in a edge surface roughness not meeting the need of certain subsequent process requirements. In the method of the present disclosure, by including a polishing step after a grinding step, remaining sub-surface defects are further reduced and/or removed, and the edge quality and strength are brought to a new level. All three ratios, MCL(p)/MCL(g) < ¾, ACL(p)/ACL(g) < 3/4, and ANC(p)/ANC(g) < ¾, indicate significant improvement in terms of severity and frequency of sub-surface defects as a result of the method of the present disclosure compared to a process involving a single step of grinding process only. The larger the ratios of MCL(p)/MCL(g), ACL(p)/ACL(g), and ANC(p)/ANC(g), the more materials would need to be removed by the polishing step (II), assuming step (I) is held constant.
[0052] FIG. 1 schematically illustrates the process according to one embodiment of the present disclosure. In this figure, an as-cut glass sheet 101 having a thickness Th(gs) obtained from a cutting step having a first major surface 103, a second major surface 105, a first pre- finishing edge surface 107 and a second pre- finishing edge surface 109 connecting the first major surface 103 with the second major surface 105. Both the pre- finishing edge sufaces 107 and 109 are substantially perpendicular to the major surfaces 103 and 105. As such, sharp corners 1 11, 113, 115 and 1 17 are defined at the intersection between the major surfaces and the pre-finishing edge surfaces. After the grinding and polishing steps according to the present disclosure, all four corners 1 11 , 1 13, 1 15 and 117, in combination with part of the glass materials immediately below the edge surfaces 107 and 109, were removed, to form a curved first as-polished edge surface 108 and a curved second as-polished edge surface 110.
[0053] FIG. 2A schematically illustrates a grinding step according to an embodiment of the present disclosure. In this embodiment, an as-cut glass sheet 201 having a first major surface 205 and a second major surface 207 as well as a substantially vertical pre- finishing edge surface 209 is subjected to grinding by a grinding wheel 212 having a preformed grinding wheel groove 213, which rotates around a spindle. In this grinding step, both corners of the cross-sections of the first and second major surfaces 205 and 207 are being ground simultaneously by the grinding wheel groove 213 while the first edge surface 209 travels in a direction substantially perpendicular to the surface of cross- section of the glass sheet illustrated in this figure. During grinding, a grinding force F(g) is applied by the griding wheel 212 to the glass sheet 203, which allows for the removal of the glass material from the corners and the edge surface of the glass sheet. While the use of a single grinding wheel 212 is advantageous in certain embodiments, one skilled in the art, upon reading the present disclosure, can understand that the present invention maybe applied in embodiments where multiple grinding wheels are used, each for grinding a separate corner region only. FIG. 2 A shows the grinding of the first pre- finishing edge surface 209 only. In practice, one may grind the opposing second pre- finihsing edge surface 208 simultaneously (not shown) or in a separate grinding operation.
[0054] FIG. 2B schematically illustrates a polishing step according to the same embodiment associated with the grinding step illustrated in FIG. 2A. in this embodiment, the as-ground glass sheet 201 with the first pre-finishing edge 209 ground to a curved first as-ground edge surface 215 is further subjected to polishng by a polishing wheel 216 having a pre-formed polishing wheel groove 217, which rotates around a spindle. In this embodiment, the entire as-ground first edge surface 215 is being polished by the polishing wheel groove 217 while the first as-ground edge surface 215 travels in a direction substantially perpendicular to the cross-section of the glass sheet illustrated in this figure. During polishing, a polishing force F(p) is applied by the polishing wheet 216 to the glass sheet 203, which allows for the further removal of glass material from the as-ground edge surface 215. While the embodiment shown in this figure using a single polishing wheel can be advantageous in certain embodiments, one skilled in the art, with the benefit of the disclosure herein, should undertand that the present invention maybe applied to embodiments where multiple polishing wheel is used, each for polishing a given area of the as-ground edge surface. FIG. 2B shows the polishing of the first as-ground edge surface 215 only. In practice, one may polish the opposing second as-ground edge surface 214 simultaneously (not shown) or in a separate polishing operation. In a particularly advantageous embodiment, the grinding step of the first pre-finishing edge surface 209 shown in FIG. 2A and the polishing step of the first as-ground edge surface 215 shown in FIG. 2B are carried out substantially simulataneously in a single finishing operation, with the ground wheel 212 located slight upstream to the polishing wheel 216, such that the first pre-finishing edge surface 209 can be processed into an as-polished surface 215 at the end of a single pass through the edge-finishing machine. [0055] When viewed at a sufficiently high resolution, any real surface exhibits certain roughness. This is true for the pre-finishing edge surface, the as-ground edge surface and the as-polished edge surface. FIG. 3 schematically illustrates surface features of one of such surfaces 301, including surface peak-to-valley undulaltions called surface roughness (shown as SR) and sub-surface defects (shown as SSD) 303, 305 and 307 with various depth of reach. The sub-surface damages, when they are large, may be visible under an optical micro-scope. However, for the majority of them, which have merely sub-micron gap, they are typically not directly detectable under an optical microscope. Thus, to characterize and quantify the presence, frequency and depth of the sub-surface
microcracks (also known as sub-surface damage, SSD), one would need a method to reveal the microcracks to make them observable. An approach developed by the present inventors, which are used in measuring all the cracks to be described infra, is as follows.
[0056] An edge finished large glass sheet is cut to approximately l "xl" (2.54 cm by 2.54 cm) squares by scoring followed by bending-separation. Care is taken to ensure that the scoring of large glass sheet is performed from the side opposite to the finished edge to be measured, thus the profile of the measured edge does not have any score marks which may interfere with inspection and measurement.
[0057] The square samples are then etched using the following process: (i) immersing the whole square samples in a 5% HF + 5% HCl solution for 30 seconds without agitation; (ii) taking the square samples out of the acid; and then (iii) rinsing ad cleaning with process water. Care is taken to ensure that no acid remains on the square sample surface.
[0058] The square samples are then inspected under an optical microscope. The samples are placed under the microscope such that the profile (cross section) of edge is visible. The magnification is changed from 100 times to 500 times to inspect flaws (subsurface damages, SSDs) on the edge of the profile. For smaller cracks, higher
magnification is used, and vice versa. Also 200x optical images of the profiles are captured and then analyzed.
[0059] During image analysis, the measurements are performed by drawing two parallel lines in the images on the computer screen at the two ends of the SSD
substantially perpendicular to the direction of the SSD, and computing the distance between the lines, which is recorded as the length of the SSD. All visible SSD under the microscope are measured and the maximum and average length are computed. SSD frequency, i.e., normalized average number of cracks, is defined as the total number of SSDs per unit length along the curve profile of the cross-section of the edge.
[0060] In certain particularly advantageous embodiments, MCL(p)/MCL(g) < 1/2, ACL(p)/ACL(g) < 1/2, and ANC(p)/ANC(g) <l/2. In certain other particularly advantageous embodiments, MCL(p)/MCL(g) < 1/3, ACL(p)/ACL(g) < 1/3, and
ANC(p)/ANC(g) < 1/3. In certain other particularly advantageous embodiments, MCL(g) < 40 μιη, ACL(g) < 10 μιη, and ANC(p) < 40 mm"1. In certain other particularly advantageous embodiments, MCL(g) < 20 μιη, ACL(g) < 5 μιη, and ANC(p) < 20.
[0061] The grinding wheel used in step (I) may advantageously comprise a number of grinding grits embedded in a grinding wheel matrix. The grinding grits normally have a hardness at least as high as that of the glass material to be ground. Examples of grinding grits in the grinding wheel include, but are not limited to, diamond, SiC, SiN, and combinations thereof. The matrix holds the grinding grits together. Examples of the material for the matrix include, but are not limited to, iron, stainless steel, ceramic, glass, and the like. Because significant amount of glass material is removed in step (I), it is highly desired that the grinding wheel matrix materials is relatively hard and rigid. In addition, to avoid abrasion of the matrix it is desired that the griding grits protrude above the surface of the matrix material, and during grinding, direct contact between the matrix material and the glass sheet to be ground is avoided. During grinding, the friction between the grinding grits and the glass material causes the removal of the glass material from the corners and the edge surfaces. Overtime, both the matrix and the grinding grits may be consumed.
[0062] During the grinding step (I), the grinding wheel and the glass edge surface subjected to grinding are advantageously cooled by a fluid, more advantageously a liquid such as water. Water is particularly advantageous due to the low cost, its ability to lubricate the process, carry away the glass particles generated, while cooling the wheel and the glass sheet.
[0063] The parameters of the grinding grits, particularly size, geometry, packing density in the wheel, distribution of the grinding grits on the wheel surface, and material hardness, impact the grinding effectiveness, material removal speed, surface roughness and sub-surface damage at the end of the grinding step (I). Thus, in certain advantageous embodiments, in step (I), the grinding grits have an average particle size of from 10 μπι to 80 μνα, in certain embodiments from 20 μνα to 65 μνα, in certain embodiments from 20 μπι to 45 μπι, in certain embodiments from 20 μπι to 40 μπι.
[0064] A grinding force applied by the grinding wheel to the glass sheet being ground determines the friction force between the grinding wheel and the glass material, hence the material removal speed, and amount and severity of the sub-surface damage (SSD). When grinding a glass sheet having a thickness of at most 1000 μιη, it is desirable that the grinding force F(g) < 30 newton, in certain embodiments F(g) < 25 newton, in certain embodiments F(g) < 20 newton, in certain embodiments F(g) < 15 newton, in certain embodiments F(g) < 10 newton, in certain embodiments F(g) < 8 newton, in certain embodiments F(g) < 6 newton, in certain embodiments F(g) < 4 newton.
[0065] The polishing wheel used in step (II) may advantageously comprise a number of polishing grits embedded in a polishing wheel polymer matrix. At least some of the polishing grits normally have a hardness at least as high as that of the glass material to be polished. Examples of polishing grits in the polishing wheel include, but are not limited to, diamond, SiC, SiN, AI2O3, BN, CeC^, and combinations thereof. Thus, in certain advantageous embodiments, in step (II), the polishing grits have an average particle size of from 5 μπι to 80 μπι, in certain embodiments from 6 μπι to 65μπι, in certain embodiments from 7 μπι to 50 μπι, in certain embodiments from 8 /m to 40 μπι, in certain embodiments from 5 μπι to 20 μπι, in certain embodiments from 8 μπι to 20 μπι. Compared to the grinding grits in the grinding wheel, the polishing grits desirably have at leaset one of: (i) a lower hardness, (ii) smaller grit particle size, (iii) lower density of grit particles in terms of number of grit particles per unit volume of the polymer matrix, in order to obtain a lower material removal speed and lower SSD as a result of the polishing step (II).
[0066] In a particularly advantageous embodiment, the polishing grits comprise a combination of diamond polishing grits and CeC polishing grits. Without intending to be bound by a particular theory, it is believed that the diamond polishing grits, having a high hardness, provides the effectiveness of material removal, while the CeC^ polishing grits, at a lower hardness than diamond particles, provide the polishing function and more gentle material removal ability, resulting in an optimized combination of material removal speed and polishing function for step (II). In such embodiments, it is desirable that the diamond polishing grits have an average particle size of from 5 μπι to 80 μπι, in certain embodiments from 6 μπι to 65μπι, in certain embodiments from 7 μπι to 50 μπι, in certain embodiments from 8 /m to 40 μνα, in certain embodiments from 5 μνα to 20 μνα, in certain embodiments from 8 μνα to 20 μπι; and the CeC polishing grits have an average particle size less than 5 μπι, in certain embodiments less than 3 μπι, in certain other embodiments less than 1 μπι.
[0067] The polymer matrix holds the polishing grits together. Examples of the material for the polymer matrix include, but are not limited to, polyurethanes, epoxies, polyester, polyethers, polyetherketones, polyamides, polyimides, polyolefins,
polysaccharides, polysulfones, and the like. It is highly desired that the polymer matrix material of the polishing wheel has a higher flexibility than the grinding wheel matrix material. During polishing, the friction between the polishing grits and the glass material causes the removal of the glass material from the as-ground surfaces. Overtime, both the polymer matrix and the polishing grits may be consumed.
[0068] During the polishing step (II), the polishing wheel and the glass edge surface subjected to polishing are advantageously cooled by a fluid, more advantageously a liquid such as water. Water is particularly advantageous due to the low cost, its ability to lubricate the process, carry away the glass particles generated, while cooling the wheel and the glass sheet.
[0069] The parameters of the polishing grits, particularly size, geometry, packing density in the wheel, and material hardness, impact the polishing effectiveness, material removal speed, surface roughness and sub-surface damage at the end of the polishing step (II).
[0070] A polishing force applied by the polishing wheel to the glass sheet being ground determines the friction force between the polishing wheel and the glass material, hence the material removal speed, and amount and severity of the sub-surface damage (SSD). When polishing a glass sheet having a thickness of at amost 1000 μιη, it is desirable that the polishing force F(p) is applied by the polishing wheel to the glass sheet, and F(p) < 30 newton, in certain embodiments F(p) < 25 newton, in certain embodiments F(p) < 20 newton, in certain embodiments F(p) < 15 newton, in certain embodiments F(p) < 10 newton, in certain embodiments F(p) < 8 newton, in certain embodiments F(p) < 6 newton, in certain embodiments F(p) < 4 newton. Depending on the choice of the polishing material, especially the polishing grit material, it may be highly desirable in certain embodiments that F(p) < F(g), in certain embodiments F(p) < ¾-F(g), in certain embodiments F(p) < ½· F(g), in certain embodiments F(p) < 1/3 -F(g), in certain embodiments F(p) < ¼-F(g).
[0071] The hardness of the polymer matrix material of the polishing wheel has impact on the glass material removel rate and the polished surface quality as well. This is because a low hardness, highly flexible polymer matrix can effectively result in a significantly lower force applied by the polishing grit particles to the glass material than a harder polymer matrix would. Thus, in certain embodiments, it is desirable that the polishing wheel polymer matrix has a Shore D hardness of from 40 to 80, in certain embodiments from 45 to 70, in certain other embodiments from 50 to 60.
[0072] In a particularly advantageous embodiment, a pre-formed grinding wheel surface groove having a cross-section in the radial direction of the wheel with a maximal width Wm(gwg), an average with Wa(gwg) and a depth Dp(gwg), where Wm(gwg) > Th(gs), and Dp(gwg) > 50 μιη, in certain embodiments Dp(gwg) > 100 μιη, in certain embodiments Dp(gwg) > 150 μιη, in certain embodiments Dp(gwg) > 200 μιη, in certain embodiments Dp(gwg) > 250 μιη, in certain embodiments Dp(gwg) > 350 μιη, in certain embodiments Dp(gwg) > 400 μιη, in certain embodiments Dp(gwg) > 450 μιη, in certain embodiments Dp(gwg) > 500 μιη, in certain embodiments Dp(gwg) > 1000 μιη, in certain embodiments Dp(gwg) > 1500 μιη. The grinding groove receives the pre-finishing edge before grinding starts, and ensures a proper, consistent amount of material removal in all grinding operations, from the beginning of the service life of the grinding wheel to the end thereof, so that a consistent edge surface geometry and dimension is obtained among glass sheets finished by using the same grinding wheel. In certain particularly advantageous embodiments, 1.2-Th(gs) <Wm(gwg) < 3.0-Th(gs), in certain embodiments 1.5 -Th(gs) <Wm(gwg) < 2.5-Th(gs), in certain embodiments 1.5-Th(gs) <Wm(gwg) < 2.0-Th(gs).
[0073] In a particularly advantageous embodiment, illustrated in FIG. 4, the polishing wheel 401 having an overall wheel width W(pw) comprises a pre-formed polishing wheel surface groove 403 having a cross-section in the radial direction of the wheel with a maximal width Wm(pwg), an average width Wa(pwg) and a depth Dp(pwg), where Wm(pwg) > Th(gs), and Dp(pwg) > 50 μιη, in certain embodiments Dp(pwg) > 100 μιη, in certain embodiments Dp(pwg) > 150 μιη, in certain embodiments Dp(pwg) > 200 μιη, in certain embodiments Dp(pwg) > 250 μιη, in certain embodiments Dp(pwg) > 350 μιη, in certain embodiments Dp(pwg) > 400 μιη, in certain embodiments Dp(pwg) > 450 μιη, in certain embodiments Dp(pwg) > 500 μιη, in certain embodiments Dp(pwg) > 1000 μιη, in certain embodiments Dp(pwg) > 1500 μm. The polishing groove receives the as- ground edge before polishing starts, and ensures a proper, consistent amount of material removal in all polishing operations, from the beginning of the service life of the polishing wheel to the end thereof, so that a consistent as-polished edge surface geometry and dimension is obtained among glass sheets finished by using the same polishing wheel. In certain particularly advantageous embodiments, 1.2-Th(gs) <Wm(pwg) < 3.0-Th(gs), in certain embodiments 1.5 -Th(gs) <Wm(pwg) < 2.5 -Th(gs), in certain embodiments 1.5 -Th(gs) <Wm(pwg) < 2.0-Th(gs).
[0074] As mentioned supra, in a particularly advantageous embodiment, a pre- finishing edge surface of a glass sheet is subjected to the grinding step (I) and the polishing step (II) in a single finishing step, wherein the edge surface travels at a linear velocity with respect to the center of the grinding wheel and the center of the polishing wheel. FIG. 5 schematically illustrates this embodiment, where an edge surface 501 of a glass sheet is received by a grinding groove 507 of a grinding wheel 503, subjected to grinding first, and then travels to the downstream polishing location, where it is received by the polishing groove 509 of a polishing wheel 505. The velocity of the edge surface 501 with respect to the center of the grinding wheel 503 and the center of the polishing wheel 505 is V. in certain embodiments it is desired that V is at least 1 cm- s"1, in certain embodiments at least 2 cm-s 1, in certain embodiments at least 5 cm-s"1, in certain embodiments at least 10 cm- s"1, in certain embodiments at least 15 cm- s"1, in certain embodiments at least 20 cm- s"1, in certain embodiments at least 25 cm- s"1, in certain embodiments at least 30 cm- s"1, in certain embodiments at least 35 cm- s"1, in certain embodiments at least 40 cm- s"1, in certain embodiments at least 45 cm- s"1, in certain embodiments at least 50 cm- s"1, in certain embodiments at least 60 cm- s"1, in certain embodiments at least 70 cm- s"1, in certain embodiments at least 80 cm- s"1, in certain embodiments at least 90 cm- s"1, in certain embodiments at most 100 cm- s 1, in certain embodiments at most 80 cm- s"1 in certain other embodiments at most 70 cm- s"1, in certain other embodiments at most 60 cm- s"1, in certain other embodiments at most 50 cm- s"1. While only one grinding wheel and one polishing wheel are shown in FIG. 5, it is possible to use a series of grinding wheels, same or different, to perform the grinding function, followed by a series of polishing wheels, same or different, to perform the polishing function to the intended degree, in a single pass finishing process. For example, in one embodiment where a series of grinding wheels are used, from the first to the last in the order of contacting a specific point on the glass sheet edge, the grinding grits may become increasingly smaller to provide increasingly more gentle grinding function.
Likewise, in one embodiment where a series of polishing wheels are used, from the first to the last in the order of contacting a specific point on the glass sheet edge, the polishing grits may become increasingly smaller to provide increasing more gentle polishing function. Still in another embodiment where a series of polishing wheels are used, from the first to the last wheel, increasingly softer polymer matrix material may be used, to achieve the intended final polishing function and low SSDs.
[0075] The method of the present disclosure, by utilizing the proper grinding process parameters and the polishgn process parameters, achieves a high glass sheet velocity, hence a high finishing throughput, in combination with high as-polished edge surface quality, especially in terms of SSDs.
[0076] In one embodiment, the method used for making surface groove 403 on the polishing wheel 401 is as follows: A tool with the inverse profile of the groove shape is created by machining a metal (for example, stainless steel) which serves as the core. The core is then plated (with metals such as nickel, copper or bronze etc.) so that a layer of abrasive grains (such as diamond) can be bonded on to the steel core. Such as tool, commonly referred to as an electroplated tool, is used to grind the profile in to the periphery of the wheel. The process can be dry or wet and depending on the tolerances could be a two step process with rough and fine grinding. In certain particularly advantageous embodiments, the wheel run-out (out-of-roundness) is checked before a groove is machined. If the run-out is higher than a given tolerance, then the wheel is first trued before the groove is machined. If necessary, the diamond grains in the groove are exposed by dressing the groove using aluminum oxide (alumina).
[0077] The present invention is further illustrated by the following non-limiting examples.
EXAMPLES
[0078] Aluminoborosilicate glass sheets having a thickness of 700 μνα were ground at an edge by using a grinding wheel. The as-ground surface was then measured for SSD according to the measurement protocol described supra. The as-ground surfaces of multiple sheets were then polished using two different polishing wheels, one according to the present disclosure and one according to a comparative example. The as-polished surfaces were then measured for SSDs according to the same protocol.
[0079] The test results are plotted into a chart shown in FIG. 6. In this figure, bars El indicate as-ground surface, bars E2 indicate as-polished surface in the comparative example, and bars E3 indicate as-polished surface in the example according to the present disclosure, bars 601 indicate measured maximal SSD (μνα), bars 602 indicate measured average SSD (μνα), and bars 603 indicate SSD frequency (i.e., normalized average number of cracks).
[0080] From FIG. 6, it is clear that the method of the present invention results in a much smaller maximal SSD, average SSD and SSD frequency.
[0081] The edges of the glass sheets as polished in the above two examples were then measured for strength using a vertical 4-point bending test. The results are shown in FIG. 7. The round data points and the linear fitting curve 701 are for the glass sheets polished in the comparative example, and the square data points and the linear fitting curve 703 are for the glass sheets polished in the example according to the present disclosure.
Comparison of curves 701 and 703 clearly indicates that the method of the present disclosure resulted in significantly improved edge strength.
[0082] It will be apparent to those skilled in the art that various modifications and alterations can be made to the present invention without departing from the scope and spirit of the invention. Thus, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

Claims

What is claimed is:
1. A method for finishing an edge of a glass sheet having a thickness Th(gs) a first major surface, a second major surface, and a first pre-finishing edge surface connecting teh first major surface with the second major surface, a first corner defined by the intersection between the first major surface and the first pre- finishing edge surface, and a second corner defined by the intersection between the second major surface and the first pre- finishing edge surface, comprising the follwong steps:
(I) grinding the first edge surface, the first corner and the second corner to obtain a curved first ground edge surface with substantially no sharp corner having an as-ground maximal crack length MCL(g), an as-ground average crack length ACL(g), and an as-ground normalized average number of cracks ANC(g); and subsequently
(II) polishing the first ground edge surface to obtain a first polished edge surface having an as-polished maximal crack length MCL(p), an as-polished average crack length ACL(p), and an as-polished normalized average number of cracks ANC(p); wherein MCL(p)/MCL(g) < ¾, ACL(p)/ACL(g) < 3/4, and ANC(p)/ANC(g) < ¾.
2. A method according to claim 1, wherein MCL(p)/MCL(g) < 2/3, ACL(p)/ACL(g) < 2/3, and ANC(p)/ANC(g) < 2/3.
3. A method according to claim 1, wherein MCL(p)/MCL(g) < 1/2, ACL(p)/ACL(g) < 1/2, and ANC(p)/ANC(g) <l/2.
4. A method according to claim 1, wherein MCL(p)/MCL(g) < 1/3, ACL(p)/ACL(g) < 1/3, and ANC(p)/ANC(g) < 1/3.
5. A method according to claim 1, wherein MCL(g) < 40 μνα, ACL(g) < 10 μνα, and ANC(p) < 40 mm"1.
6. A method according to claim 1, wherein in step (I), a grinding wheel comprising a plurality of grinding grits embedded in a grinding wheel matrix is used, and the grinding grits have an average particle size of from 10 μνα to 80 μνα.
7. A method according to claim 6, wherein the grinding grits comprise a material selected from diamond, SiC, AI2O3, SiN, BN, and combinations thereof.
8. A method according to claim 6, wherein in step (I), a grinding force F(g) is applied by the grinding wheel to the glass sheet, and F(g) < 30 newton.
9. A method according to claim 1, wherein in step (II), a polishing wheel comprising a plurality of polishing grits embedded in a polishing wheel polymer matrix is used, and the polishing grits have an average particle size of from 5 μνα to 80 μνα.
10. A method according to claim 9, wherein in step (II), a polishing force F(p) is applied by the polishing wheel to the glass sheet, and F(p) < 30 newton.
11. A method according to claim 1 , wherein in step (I), a grinding force F(g) is applied by the grinding wheel to the glass sheet, in step (II), a polishing force F(p) is applied by the polising wheel to the glass sheet, and 1.2 < F(g)/F(p) < 4.0.
12. A method according to claim 9, wherein the polishing grits comprise a material selected from diamond, SiC, CeC , and combinations thereof.
13. A method according to claim 9, wherein the polymer matrix is selected from a polyurethane resin, a epoxy, a posulfone, a polyetherketone, polyketone, polyimide, polyamide, polyolefins, and mixtures and combinations thereof.
14. A method according to claim 9, wherein the polishing grits comprise a combination of diamond polishing grits and CeC^ polishing grits.
15. A method according to claim 12, wherein the diamond polishing grits have an average particle size of from 5 μπι to 80 μπι.
16. A method according to claim 9, wherein the polishing wheel polymer matrix has a Shore D hardness of from 40 to 80.
17. A method according to claim 16, wherein 1.2-Th(gs) <Wm(gwg) < 3.0-Th(gs).
18. A method according to claim 1 , wherein in step (II), the polishing wheel comprises, on the polishing surface, a pre-formed polishing groove having a cross-section perpendicular to the extending direction fo the polishing groove with a maximal width Wm(pwg), an avagre width Wa(pwg) and a depth Dp(pwg), where Wm(pwg) > Th(gs), and Dp(pwg) > 50 μνα.
19. A method according to claim 18, wherein 1.2-Th(gs) <Wm(pwg) < 3.0-Th(gs).
20. A method according to claim 1 , wherein in steps (I) and (II), the first pre-finishing edge surface travels at a linear velocity of at least 1 cm-s"1.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10906156B2 (en) 2015-09-08 2021-02-02 3M Innovative Properties Company Flexible abrasive rotary tool
US11040429B2 (en) 2015-09-08 2021-06-22 3M Innovative Properties Company Abrasive rotary tool with abrasive agglomerates

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8986072B2 (en) * 2011-05-26 2015-03-24 Corning Incorporated Methods of finishing an edge of a glass sheet
TWI592382B (en) * 2012-05-30 2017-07-21 宸鴻科技控股有限公司 Rigid substrate, touch panel, and processing method of rigid substrate
US9028296B2 (en) * 2012-08-30 2015-05-12 Corning Incorporated Glass sheets and methods of shaping glass sheets
EP2957102A4 (en) 2013-02-18 2016-11-02 Kateeva Inc QUALITY ASSESSMENT OF OLED STACK FILMS
WO2014176202A1 (en) 2013-04-25 2014-10-30 Saint-Gobain Abrasives, Inc. Grinding and polishing tool
KR101511593B1 (en) * 2013-09-16 2015-04-13 (주)에스에이티 Glass For Cellular Phone, Grinding Wheel And Apparatus For Grinding That Glass
US10442719B2 (en) * 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
EP3102408B1 (en) * 2014-02-07 2019-07-10 Corning Incorporated Method of forming laminated glass structures
US10232488B2 (en) * 2014-09-22 2019-03-19 Corning Incorporated Abrasive machining apparatus for processing edges of glass articles
CN104551920B (en) * 2015-01-23 2017-01-18 上海光鸢光电科技有限公司 glass positioning chamfering mechanism
JP2017047502A (en) * 2015-09-02 2017-03-09 株式会社ディスコ Cutting wheel
CN106541310B (en) * 2015-09-23 2019-09-17 上海和辉光电有限公司 The cutting method of display panel
CN105437013A (en) * 2015-11-29 2016-03-30 林晓生 Glass machining protection device with automatic clamping thickness adjusting function
CN105437016A (en) * 2015-12-02 2016-03-30 江苏福坤玻璃有限公司 Intelligent edge grinding set scheme
US20170232571A1 (en) * 2016-02-11 2017-08-17 Corning Incorporated Edge finishing apparatus and methods for laminate production
DE102016102768A1 (en) * 2016-02-17 2017-08-17 Schott Ag Method for processing edges of glass elements and glass element processed according to the method
KR102525521B1 (en) 2016-03-18 2023-04-25 삼성디스플레이 주식회사 Display device and manufacturing method of displaying device
DE102016107535A1 (en) * 2016-04-22 2017-10-26 Schott Ag Flat glass product with increased edge strength and method for its production
KR102803725B1 (en) * 2016-09-30 2025-05-07 엘지디스플레이 주식회사 Apparatus for processing a substrate and display device having the same
JP6830614B2 (en) * 2017-01-30 2021-02-17 日本電気硝子株式会社 Flat glass manufacturing method, flat glass manufacturing equipment
CN106926084A (en) * 2017-04-28 2017-07-07 京东方科技集团股份有限公司 Glass edge milling apparatus
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0826459A1 (en) * 1996-08-27 1998-03-04 Shin-Etsu Handotai Company Limited Apparatus and method for chamfering wafer with loose abrasive grains
US20030054736A1 (en) * 2001-09-17 2003-03-20 International Business Machines Corporation Edge finishing process for glass or ceramic disks used in disk drive data storage devices
US20060128154A1 (en) * 2004-12-15 2006-06-15 Asahi Glass Company, Limited Glass substrate for magnetic disk and its production process
US20100266874A1 (en) * 2007-05-30 2010-10-21 Yoshio Uchiyama Method of surface-finishing glass substrate for magnetic disks and glass substrate for magnetic disks

Family Cites Families (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2022530A (en) 1935-01-19 1935-11-26 Libbey Owens Ford Glass Co Treatment of abrasive tools
US3111790A (en) 1960-12-12 1963-11-26 Vego Inc Contact lens polishing apparatus
JPS51117390A (en) * 1975-04-07 1976-10-15 Asahi Daiyamondo Kogyo Kk Diamond grindstone for polishing glass
US4128972A (en) 1975-04-14 1978-12-12 The Osborn Manufacturing Corporation Flexible polishing wheel and method for producing same
US4054010A (en) * 1976-01-20 1977-10-18 Headway Research, Inc. Apparatus for grinding edges of planar workpieces
US4060938A (en) * 1976-04-20 1977-12-06 Barron Sr Lee H Glass beveling machine
US4467168A (en) 1981-04-01 1984-08-21 Creative Glassworks International Method of cutting glass with a laser and an article made therewith
DE3218009A1 (en) * 1982-05-13 1983-11-17 Bayerische Motoren Werke AG, 8000 München Working tool for achieving as smooth a coating as possible of a workpiece surface
DE3231895C2 (en) * 1982-08-27 1985-05-15 Benteler-Werke AG, 4790 Paderborn Machine for chamfering glass plate edges
JPS5890466A (en) * 1982-11-04 1983-05-30 Toshiba Corp Grinding wheel
JPS6062464A (en) * 1983-09-10 1985-04-10 Kawasaki Steel Corp Side end grinding attachment for metallic belt by rotary grinding wheel
JPS61103778A (en) * 1984-10-26 1986-05-22 Tohoku Kako Kk Polishing stone
DE8503914U1 (en) 1985-02-13 1985-07-11 Benteler-Werke Ag Werk Neuhaus, 4790 Paderborn Edge sanding machine
JPS6284977A (en) * 1985-10-05 1987-04-18 Canon Inc Grinding pellets
JPS63102860A (en) 1986-10-17 1988-05-07 Sumitomo Electric Ind Ltd Chamfering method for semiconductor wafer
US4908996A (en) 1987-09-22 1990-03-20 Abraxas, Incorporated Method for machine polishing ophthalmic lenses to a translucent finish
JPH0698563B2 (en) * 1989-11-30 1994-12-07 坂東機工株式会社 Glass plate grinding machine
DE3941277C2 (en) 1989-12-14 1997-03-13 Ver Glaswerke Gmbh Device for carrying out a method for processing glass panes within a processing line comprising several successive processing stations
US5185959A (en) 1990-03-29 1993-02-16 Tamglass Oy Apparatus for grinding the edge of a glass sheet
JP2859389B2 (en) 1990-07-09 1999-02-17 坂東機工 株式会社 Method for grinding peripheral edge of glass sheet and numerically controlled grinding machine for glass sheet implementing this method
US5410843B1 (en) * 1991-05-16 1998-06-09 Wernicke & Co Gmbh Process for finishing the edge of corrective lenses made of plastic
JP2719855B2 (en) * 1991-05-24 1998-02-25 信越半導体株式会社 Mirror chamfering device around wafer
US5128281A (en) * 1991-06-05 1992-07-07 Texas Instruments Incorporated Method for polishing semiconductor wafer edges
US5148632A (en) 1991-06-14 1992-09-22 Corning Incorporated Cavity forming in plastic body
US5456735A (en) 1991-07-12 1995-10-10 Norton Company Method of abrading with boron suboxide (BxO) and the boron suboxide (BxO) articles and composition used
US5366526A (en) 1991-07-12 1994-11-22 Norton Company Method of abrading with boron suboxide (BxO) and the boron suboxide (BxO) articles and composition used
US5273558A (en) 1991-08-30 1993-12-28 Minnesota Mining And Manufacturing Company Abrasive composition and articles incorporating same
KR0185234B1 (en) * 1991-11-28 1999-04-15 가부시키 가이샤 토쿄 세이미쯔 Method of chamfering semiconductor wafer
GB2264102B (en) 1992-02-15 1996-09-04 Mckechnie Uk Ltd Container
CA2084247A1 (en) 1992-03-18 1993-09-19 Francis Paul Fehlner Lcd panel production
US5538463A (en) 1992-11-26 1996-07-23 Shin-Etsu Handotai Co., Ltd. Apparatus for bevelling wafer-edge
US5306319A (en) 1993-05-12 1994-04-26 Minnesota Mining And Manufacturing Company Surface treating articles and methods of making same
DE4320934C2 (en) * 1993-06-24 1995-04-20 Wernicke & Co Gmbh Spectacle lens edge grinding machine
JPH0760626A (en) * 1993-08-27 1995-03-07 Bando Kiko Kk Glass plate processing equipment
US5423717A (en) 1993-10-04 1995-06-13 Ford Motor Company Grinding wheel assembly
JPH081493A (en) * 1994-06-17 1996-01-09 Shin Etsu Handotai Co Ltd Mirror finished surface polishing method for wafer chamfering part and mirror finished surface polishing device
US5622540A (en) 1994-09-19 1997-04-22 Corning Incorporated Method for breaking a glass sheet
JP3010572B2 (en) * 1994-09-29 2000-02-21 株式会社東京精密 Wafer edge processing equipment
US5545277A (en) * 1994-10-03 1996-08-13 Ford Motor Company Plate glass edge strength
MY125707A (en) * 1994-10-26 2006-08-30 Nippon Sheet Glass Co Ltd Method of finishing edge of sheet glass, heat-tempered sheet grass using the method, and fire-resistant construction material using the heat-tempered sheet grass
JPH08243891A (en) 1995-03-07 1996-09-24 Kao Corp Substrate chamfer processing equipment
US5674110A (en) 1995-05-08 1997-10-07 Onix S.R.L. Machine and a process for sizing and squaring slabs of materials such as a glass, stone and marble, ceramic tile and the like
US5655956A (en) 1995-05-23 1997-08-12 University Of Illinois At Urbana-Champaign Rotary ultrasonic grinding apparatus and process
US5816897A (en) * 1996-09-16 1998-10-06 Corning Incorporated Method and apparatus for edge finishing glass
US5928070A (en) * 1997-05-30 1999-07-27 Minnesota Mining & Manufacturing Company Abrasive article comprising mullite
JPH11151647A (en) 1997-11-18 1999-06-08 Sharp Corp Display panel corner chamfering device
JPH11151646A (en) 1997-11-20 1999-06-08 Rohm Co Ltd Chamfering and polishing device for substrate for electronic part
JP3197253B2 (en) * 1998-04-13 2001-08-13 株式会社日平トヤマ Wafer chamfering method
JP3078257B2 (en) 1998-04-15 2000-08-21 ティーディーケイ株式会社 Organic EL display device and manufacturing method thereof
US6099385A (en) 1999-03-24 2000-08-08 Ford Global Technologies, Inc. Method for removing edge areas of a laminated panel
CH694580A5 (en) * 1999-04-29 2005-04-15 Ip Vitro Vidrio Y Cristal Ltd Device for machining the edge of a glass sheet.
US6325704B1 (en) 1999-06-14 2001-12-04 Corning Incorporated Method for finishing edges of glass sheets
US6428390B1 (en) 1999-06-29 2002-08-06 Corning Incorporated Method and apparatus for edge finishing glass sheets
JP2001259978A (en) * 2000-03-07 2001-09-25 Three M Innovative Properties Co Chamfering method for end part of glass plate
JP4588863B2 (en) * 2000-11-21 2010-12-01 旭硝子株式会社 Edge glass edge polishing method
KR100841623B1 (en) 2002-03-21 2008-06-27 엘지디스플레이 주식회사 Polishing device for liquid crystal panel
JP2004261942A (en) * 2003-03-04 2004-09-24 Nippon Tokushu Kento Kk Polishing grinding wheel
US7018272B2 (en) 2003-07-29 2006-03-28 Corning Incorporated Pressure feed grinding of AMLCD substrate edges
JP4748968B2 (en) * 2004-10-27 2011-08-17 信越半導体株式会社 Manufacturing method of semiconductor wafer
JP4249722B2 (en) * 2005-04-13 2009-04-08 シロキ工業株式会社 Sheet glass processing method
JP4406752B2 (en) * 2005-05-27 2010-02-03 日本電気硝子株式会社 Glass substrate end face processing apparatus and end face processing method
US7235002B1 (en) * 2006-01-23 2007-06-26 Guardian Industries Corp. Method and system for making glass sheets including grinding lateral edge(s) thereof
JP5305214B2 (en) * 2006-10-06 2013-10-02 日本電気硝子株式会社 End face processing method of plate glass
JP2009003744A (en) * 2007-06-22 2009-01-08 Hitachi Electronics Service Co Ltd Case retrieval system and case retrieval method
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
EP2213415A1 (en) * 2009-01-29 2010-08-04 S.O.I. TEC Silicon Device for polishing the edge of a semiconductor substrate
CN101819163A (en) * 2010-06-03 2010-09-01 成都精密光学工程研究中心 Detection device of subsurface defect of optical element and method thereof
JP5031087B2 (en) * 2010-12-29 2012-09-19 AvanStrate株式会社 Manufacturing method of glass substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0826459A1 (en) * 1996-08-27 1998-03-04 Shin-Etsu Handotai Company Limited Apparatus and method for chamfering wafer with loose abrasive grains
US20030054736A1 (en) * 2001-09-17 2003-03-20 International Business Machines Corporation Edge finishing process for glass or ceramic disks used in disk drive data storage devices
US20060128154A1 (en) * 2004-12-15 2006-06-15 Asahi Glass Company, Limited Glass substrate for magnetic disk and its production process
US20100266874A1 (en) * 2007-05-30 2010-10-21 Yoshio Uchiyama Method of surface-finishing glass substrate for magnetic disks and glass substrate for magnetic disks

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10906156B2 (en) 2015-09-08 2021-02-02 3M Innovative Properties Company Flexible abrasive rotary tool
US11040429B2 (en) 2015-09-08 2021-06-22 3M Innovative Properties Company Abrasive rotary tool with abrasive agglomerates

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