WO2012172902A1

WO2012172902A1 - Posture adjusting device, michelson interferometer, and fourier transform spectroscopic analysis device

Info

Publication number: WO2012172902A1
Application number: PCT/JP2012/062279
Authority: WO
Inventors: 小坂　明; 賢次水本
Original assignee: コニカミノルタホールディングス株式会社
Priority date: 2011-06-14
Filing date: 2012-05-14
Publication date: 2012-12-20

Abstract

When a posture adjusting device adjusts an optical element to a predetermined posture, a control unit sets a target voltage value (V1a) of a driving voltage (V111) to be applied to a piezoelectric element in response to a posture adjustment signal. In addition, the control unit controls a driving unit so that the driving voltage (V111) to be applied to the piezoelectric element is once set to the maximum voltage value (Vmax) or the minimum voltage value (Vmin) from a current voltage value (V10) and then set to the target voltage value (V1a). The posture adjusting device can accurately and simply adjust the optical element to a predetermined posture.

Description

Attitude adjustment device, Michelson interferometer, and Fourier transform spectrometer

The present invention relates to an attitude adjustment device, a Michelson interferometer, and a Fourier transform spectroscopic analyzer, and in particular, an attitude adjustment device that adjusts an optical element to a desired attitude, a Michelson interferometer including the attitude adjustment device, and the same The present invention relates to a Fourier transform spectroscopic analyzer equipped with a Michelson interferometer.

Japanese Patent Application Laid-Open No. 61-013212 (Patent Document 1) discloses an invention relating to a light beam polarizer. This light beam polarizer adjusts the posture of the reflecting mirror using expansion and contraction of the piezoelectric element.

Japanese Patent Laid-Open No. 01-059019 (Patent Document 2) discloses an invention relating to a Fourier transform spectroscopic analyzer. This Fourier transform spectroscopic analyzer adjusts the posture of the fixed mirror using expansion and contraction of a piezoelectric element.

Japanese Patent Laid-Open No. 61-013212 Japanese Patent Laid-Open No. 01-059019

As in the invention disclosed in the above document, in an attitude adjustment device that adjusts the attitude of an optical element such as a mirror, a lens, or a beam splitter using a piezoelectric element, the optical element is accurately set to a desired attitude. It is desirable to adjust.

The present invention relates to an attitude adjustment apparatus capable of accurately and simply adjusting an optical element to a desired attitude, a Michelson interferometer including the attitude adjustment apparatus, and a Fourier transform spectroscopic analysis including the Michelson interferometer. An object is to provide an apparatus.

An attitude adjustment apparatus according to an aspect of the present invention is an attitude adjustment apparatus that adjusts an optical element to a desired attitude, includes a first piezoelectric element, supports the optical element in a swingable manner, and performs the first adjustment. A support unit that changes a posture of the optical element by expansion and contraction of the piezoelectric element; a first drive unit that is connected to the first piezoelectric element and outputs a first drive voltage that expands and contracts the first piezoelectric element; and the optical element A posture adjustment signal output unit for outputting a posture adjustment signal for adjusting the posture to a desired posture, and the posture adjustment received from the posture adjustment signal output unit connected to the posture adjustment signal output unit and the first drive unit. A control unit that controls a voltage value of the first driving voltage output from the first driving unit in response to a signal, wherein the first piezoelectric element is applied to the first piezoelectric element. Maximum power of one drive voltage Having a hysteresis characteristic formed between a value and a minimum voltage value, and when the posture adjustment device adjusts the optical element to a desired posture, the control unit performs the above-described adjustment according to the posture adjustment signal. A first target voltage value of the first drive voltage to be applied to the first piezoelectric element is set, and the control unit further determines that the first drive voltage applied to the first piezoelectric element is a current voltage. The first drive unit is controlled so that the first target voltage value is set after the value is once set to the maximum voltage value or the minimum voltage value.

Preferably, the support portion includes a second piezoelectric element that is disposed to face the first piezoelectric element and has the same hysteresis characteristic as the hysteresis characteristic of the first piezoelectric element. Is connected to a second drive unit that outputs a second drive voltage for expanding and contracting the second piezoelectric element, and the control unit is connected to the second drive unit and receives the posture received from the posture adjustment signal output unit. In response to the adjustment signal, the voltage value of the second drive voltage output from the second drive unit is controlled, and when the posture adjustment device adjusts the optical element to a desired posture, the control unit includes: , Setting a second target voltage value of the second drive voltage to be applied to the second piezoelectric element in accordance with the attitude adjustment signal, and further, the control unit applies the second piezoelectric element to the second piezoelectric element The second drive voltage is the current power As it will be set to the second target voltage value is once set to the maximum voltage value or the minimum voltage value from the value, and controls the second driving unit.

Preferably, when the first target voltage value is V1a, the second target voltage value is V2a, the maximum voltage value is Vmax, and the minimum voltage value is Vmin,
(Formula 1) V2a = (Vmax + Vmin) −V1a
Is configured to satisfy
The controller is configured so that the first driving voltage applied to the first piezoelectric element is set to the first target voltage value after being temporarily set from the current voltage value to the maximum voltage value. The first control unit is controlled, and the control unit further sets the second target after the second drive voltage applied to the second piezoelectric element is temporarily set from the current voltage value to the minimum voltage value. The second driving unit is controlled so as to be set to a voltage value, the first driving voltage of the first target voltage value is applied to the first piezoelectric element, and the second driving element is applied to the second piezoelectric element. When the posture adjustment device adjusts the optical element to a desired posture in a state after the second drive voltage of the target voltage value is applied, the posture adjustment signal is received from the posture adjustment signal output unit. The control unit is applied to the first piezoelectric element. 1 such that the drive voltage and the second driving voltage applied to the second piezoelectric element and are opposite phases to each other, and controls the first driving section and the second drive unit, respectively.

Preferably, the first target voltage value, the second target voltage value, the maximum voltage value, and the minimum voltage value are:
(Formula 2) V1a = V2a = (Vmax + Vmin) / 2
It is configured to satisfy

Preferably, each of the first drive voltage applied to the first piezoelectric element and the second drive voltage applied to the second piezoelectric element so as to be in opposite phases is the first target voltage value and The voltage value is symmetric about the second target voltage value.

A Michelson interferometer according to the present invention includes the attitude adjustment device according to the present invention, a movable mirror, a fixed mirror as the optical element, a light source, and light that is emitted from the light source toward the fixed mirror. And a beam splitter that synthesizes the light reflected by each of the fixed mirror and the movable mirror and emits it as interference light, and a detector that detects the interference light. .

A Fourier transform spectroscopic analyzer based on the present invention includes the Michelson interferometer based on the present invention, a calculation unit that calculates the spectrum of the interference light detected by the detector, and the spectrum obtained by the calculation unit. And an output unit for outputting.

A posture adjusting device according to another aspect of the present invention is a posture adjusting device that adjusts an optical element to a desired posture, and is arranged to face the first piezoelectric element and the first piezoelectric element. A support portion that includes an element and supports the optical element in a swingable manner, and that changes a posture of the optical element by expansion and contraction of the first and second piezoelectric elements, and is connected to the first piezoelectric element. A first driving unit that outputs a first driving voltage for expanding and contracting the first piezoelectric element, and a second driving unit that is connected to the second piezoelectric element and outputs a second driving voltage for expanding and contracting the second piezoelectric element. And an attitude adjustment signal output unit that outputs an attitude adjustment signal for adjusting the optical element to a desired attitude, the attitude adjustment signal output unit, the first drive unit, and the second drive unit, Posture adjustment signal output Control for controlling the voltage value of the first drive voltage output from the first drive unit and the voltage value of the second drive voltage output from the second drive unit in accordance with the attitude adjustment signal received from And the first piezoelectric element and the second piezoelectric element are applied to the first piezoelectric element and the second piezoelectric element, respectively, and the maximum voltage value of the first driving voltage and the second driving voltage. When the attitude adjustment device adjusts the optical element to a desired attitude, the control unit controls the attitude adjustment. A target voltage value of the first drive voltage to be applied to the first piezoelectric element in response to a signal, and a target voltage of the second drive voltage to be applied to the second piezoelectric element in response to the attitude adjustment signal Set the value and Further, the control unit determines that the drive voltage applied to one of the first piezoelectric element and the second piezoelectric element is a current voltage according to a magnitude relationship between the first drive voltage and the second drive voltage. Is set to the target voltage value of one of the first piezoelectric element and the second piezoelectric element, and is set to the maximum voltage value from a value, and the first piezoelectric element and the second piezoelectric element The drive voltage applied to the other one is set from the current voltage value to the minimum voltage value, and then set to the other target voltage value of the first piezoelectric element and the second piezoelectric element. As described above, the first driving unit and the second driving unit are controlled.

According to the present invention, an attitude adjustment apparatus capable of accurately and simply adjusting an optical element to a desired attitude, a Michelson interferometer including the attitude adjustment apparatus, and a Fourier transform including the Michelson interferometer A spectroscopic analyzer can be obtained.

FIG. 3 is a cross-sectional view schematically showing the overall configuration of the attitude adjustment device in the first embodiment. FIG. 3 is a first diagram illustrating a relationship between a driving voltage applied to a piezoelectric element provided in the posture adjustment apparatus according to Embodiment 1 and a displacement amount of the piezoelectric element. FIG. 6 is a second diagram illustrating a relationship between a driving voltage applied to a piezoelectric element provided in the posture adjustment apparatus according to Embodiment 1 and a displacement amount of the piezoelectric element. FIG. 6 is a third diagram illustrating a relationship between a driving voltage applied to a piezoelectric element provided in the posture adjustment apparatus according to Embodiment 1 and a displacement amount of the piezoelectric element. FIG. 6 is a fourth diagram showing the relationship between the drive voltage applied to the piezoelectric element provided in the posture adjustment apparatus in Embodiment 1 and the displacement amount of the piezoelectric element. FIG. 6 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element provided in the posture adjustment apparatus in the modification of the first embodiment and a displacement amount of the piezoelectric element. FIG. 6 is a perspective view schematically showing an overall configuration of a posture adjusting apparatus in a second embodiment. FIG. 6 is a cross-sectional view schematically showing an overall configuration of a posture adjustment device in a second embodiment. FIG. 10 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element (second piezoelectric element) provided in the attitude adjustment device according to the second embodiment and a displacement amount of the piezoelectric element. FIG. 10 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element (second piezoelectric element) provided in an attitude adjustment device according to a modification of the second embodiment and a displacement amount of the piezoelectric element. FIG. 6 is a diagram schematically showing a Fourier transform spectroscopic analysis apparatus in a third embodiment. 6 is a front view showing a configuration of a reference detector used in a Michelson interferometer in Embodiment 3. FIG. (A) is a figure which shows the time-dependent change of the intensity | strength of a part of interference light which the reference detector used for the Michelson interferometer in Embodiment 3 detected. (B) is a figure which shows the time-dependent change of the intensity | strength of the remainder of the interference light which the reference detector used for the Michelson interferometer in Embodiment 3 detected. It is a perspective view which shows the state which the attitude | position adjustment apparatus in Embodiment 3 decomposed | disassembled. FIG. 10 is a plan view showing an attitude adjustment device in a third embodiment. FIG. 16 is a cross-sectional view taken along line XVI-XVI in FIG. 15. It is sectional drawing which shows a mode at the time of the attitude | position adjustment apparatus in Embodiment 3 adjusting the attitude | position of an optical element (fixed mirror). FIG. 10 is a diagram illustrating a relationship between a driving voltage applied to a piezoelectric element (first piezoelectric element) used in the attitude adjustment device according to Embodiment 3 and a displacement amount of the piezoelectric element. FIG. 10 is a diagram illustrating a relationship between a driving voltage applied to a piezoelectric element (first piezoelectric element) used in the attitude adjustment device in Embodiment 3 and time. FIG. 10 is a diagram showing a relationship between a drive voltage applied to a piezoelectric element (second piezoelectric element) used in the attitude adjustment device in Embodiment 3 and a displacement amount of the piezoelectric element. FIG. 10 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element (second piezoelectric element) used in the attitude adjustment device in Embodiment 3 and time. FIG. 10 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element (first piezoelectric element) used in an attitude adjustment device according to a modification of the third embodiment and a displacement amount of the piezoelectric element. FIG. 10 is a diagram illustrating a relationship between a drive voltage applied to a piezoelectric element (second piezoelectric element) used in an attitude adjustment device according to a modification of the third embodiment and a displacement amount of the piezoelectric element. FIG. 24 is a diagram in which the vicinity of a point P13 in FIG. 22 and a point P24 in FIG. 23 are enlarged and combined into one figure.

Embodiments according to the present invention will be described below with reference to the drawings. In the description of each embodiment, when referring to the number, amount, or the like, the scope of the present invention is not necessarily limited to the number, amount, or the like unless otherwise specified. In the description of each embodiment, the same parts and corresponding parts are denoted by the same reference numerals, and redundant description may not be repeated.

[Embodiment 1]
(Attitude adjustment device 1000)
With reference to FIG. 1, the structure of the attitude | position adjustment apparatus 1000 in this Embodiment is demonstrated. FIG. 1 is a cross-sectional view schematically showing the overall configuration of the posture adjustment apparatus 1000. The attitude adjustment device 1000 adjusts the optical element 200 to a desired attitude.

The posture adjusting device 1000 includes a support portion 150 that supports the optical element 200 so as to be swingable. The support unit 150 includes a piezoelectric element 110 (first piezoelectric element), an elastic support member 154, and a base member 152. One end in the longitudinal direction of each of the piezoelectric element 110 and the elastic support member 154 is fixed to the base member 152. The optical element 200 is supported by the other end of each of the piezoelectric element 110 and the elastic support member 154 in the longitudinal direction.

A drive unit 111 (first drive unit) is connected to the piezoelectric element 110. The drive unit 111 outputs a predetermined drive voltage V111 (first drive voltage) that causes the piezoelectric element 110 to expand and contract. The piezoelectric element 110 to which the drive voltage V111 is applied expands and contracts in the direction of the arrow AR110. By the expansion and contraction, the optical element 200 is swung in the direction of the arrow AR200 with the elastic support member 154 side as a fulcrum. The optical element 200 is changed to a predetermined posture by the expansion and contraction (displacement amount) of the piezoelectric element 110.

A control unit 160 that performs so-called servo control is connected to the drive unit 111 that outputs the drive voltage V111. An attitude adjustment signal output unit 170 is connected to the control unit 160. The posture adjustment signal output unit 170 is connected to, for example, an external device (not shown) that detects the posture of the optical element 200, and acquires information related to the posture of the optical element 200 from the device. The posture adjustment signal output unit 170 outputs a posture adjustment signal S170 for adjusting the optical element 200 to a desired posture according to the acquired information.

The control unit 160 controls the voltage value of the drive voltage V111 output from the drive unit 111 in accordance with the posture adjustment signal S170 received from the posture adjustment signal output unit 170. By converting the voltage value of the drive voltage V111 into the displacement amount of the piezoelectric element 110, a desired posture in the optical element 200 can be obtained. When the optical element 200 is used as a mirror, the angle of the surface 200S of the optical element 200 can be set to a desired value.

FIG. 2 is a diagram showing the relationship between the magnitude of the drive voltage V111 applied to the piezoelectric element 110 and the displacement amount X110 of the piezoelectric element 110. As shown in FIG. As shown in FIG. 2, the piezoelectric element 110 has a predetermined hysteresis characteristic.

Among the drive voltages V111 applied to the piezoelectric element 110, the largest voltage value is the maximum voltage value Vmax, and the smallest voltage value is the minimum voltage value Vmin. The maximum voltage value Vmax and the minimum voltage value Vmin are both determined by design and the like. When the maximum voltage value Vmax is applied to the piezoelectric element 110, the displacement amount Xmax is obtained in the piezoelectric element 110. When the minimum voltage value Vmin is applied to the piezoelectric element 110, the displacement amount Xmin is obtained in the piezoelectric element 110. The piezoelectric element 110 has a hysteresis characteristic H110 as shown in FIG. 2 between the maximum voltage value Vmax and the minimum voltage value Vmin.

For example, it is assumed that the voltage applied to the piezoelectric element 110 is boosted from the minimum voltage value Vmin to the maximum voltage value Vmax. In this case, the displacement amount X110 of the piezoelectric element 110 changes from the displacement amount Xmin (point Pmin in FIG. 2) to the displacement amount Xmax (point Pmax in FIG. 2) so as to draw a hysteresis curve indicated by the line L10. .

Suppose that the voltage applied to the piezoelectric element 110 is stepped down from the maximum voltage value Vmax to the minimum voltage value Vmin. In this case, the displacement amount X110 of the piezoelectric element 110 changes from the displacement amount Xmax (point Pmax in FIG. 2) to the displacement amount Xmin (point Pmin in FIG. 2) so as to draw a hysteresis curve indicated by the line L11. .

Referring to FIG. 3, it is assumed that the drive voltage V111 applied to the piezoelectric element 110 at a certain time is a voltage value V10. As described above, since the piezoelectric element 110 has the hysteresis characteristic H110, when the voltage value V10 is applied to the piezoelectric element 110 in the boosting direction (line L10), the piezoelectric element 110 has a displacement amount X10. Is obtained (point P10 in FIG. 3). On the other hand, when the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction (line L11), the displacement amount X11 is obtained in the piezoelectric element 110 (point P11 in FIG. 3).

Suppose that the posture adjustment device 1000 (see FIG. 1) starts to operate when the posture adjustment signal S170 is input from the posture adjustment signal output unit 170 (see FIG. 1) to the control unit 160. In this case, whether the voltage value V10 is applied to the piezoelectric element 110 in the step-up direction or whether the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction is controlled. It is assumed that it is not stored in the unit 160 or the like.

Control unit 160 (see FIG. 1) instructs drive unit 111 to output, for example, voltage value V1a (first target voltage value) in accordance with posture adjustment signal S170 received from posture adjustment signal output unit 170. .

Referring to FIG. 4, when voltage value V10 is applied to piezoelectric element 110 in the boosting direction, displacement amount X110 of piezoelectric element 110 is displaced from displacement amount X10 (point P10 in FIG. 3). It changes so that the hysteresis curve shown by line L12a may be drawn to quantity X12a (point P12a in FIG. 3).

On the other hand, when the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction, the displacement amount X110 of the piezoelectric element 110 is changed from the displacement amount X11 (point P11 in FIG. 3) to the displacement amount X12b (FIG. 3). It changes so that the hysteresis curve shown by the line L12b is drawn to the middle point P12b).

The displacement amount X12a and the displacement amount X12b are different values. Even when the drive voltage V111 having the same voltage value V1a is applied to the piezoelectric element 110, the displacement amount of the piezoelectric element 110 obtained after the drive voltage is applied according to the hysteresis (history) of the piezoelectric element 110. X110 will be different.

Therefore, the controller 160 determines whether the voltage value V10 is applied to the piezoelectric element 110 in the step-up direction or whether the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction. For example, it is difficult to obtain a desired displacement amount X110 in the piezoelectric element 110.

(Attitude adjustment method by attitude adjustment device 1000)
On the other hand, when the posture adjustment apparatus 1000 according to the present embodiment adjusts the optical element 200 to a desired posture, the posture adjustment apparatus 1000 operates as follows.

Referring to FIG. 5 (and FIG. 1), control unit 160 that has received posture adjustment signal S170 from posture adjustment signal output unit 170 has drive voltage V111 to be applied to piezoelectric element 110 in accordance with posture adjustment signal S170. A voltage value V1a (first target voltage value) is set.

Further, the control unit 160 that receives the posture adjustment signal S170 from the posture adjustment signal output unit 170 sets the voltage after the drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the maximum voltage value Vmax. The drive unit 111 is controlled to be set to the value V1a (first target voltage value). Hereinafter, this operation will be described.

As shown in FIG. 5, it is assumed that the drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the maximum voltage value Vmax.

When the voltage value V10 is applied to the piezoelectric element 110 in the boosting direction, the displacement amount X110 of the piezoelectric element 110 is changed from the displacement amount X10 (point P10 in FIG. 5) to the displacement amount Xmax (in FIG. 5). It changes so as to draw a hysteresis curve shown by the line L13a until the point Pmax).

Thereafter, it is assumed that the drive voltage V111 applied to the piezoelectric element 110 is set from the maximum voltage value Vmax to the voltage value V1a (first target voltage value). The displacement amount X110 of the piezoelectric element 110 changes from the displacement amount Xmax (point Pmax in FIG. 5) to the displacement amount X13 (point P13 in FIG. 5) so as to draw a hysteresis curve indicated by a line L13c.

On the other hand, when the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction, the displacement amount X110 of the piezoelectric element 110 is changed from the displacement amount X11 (point P11 in FIG. 5) to the displacement amount Xmax (FIG. 5). It changes so as to draw a hysteresis curve shown by the line L13b until the middle point Pmax).

As described above, in the attitude adjustment device 1000, the drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the maximum voltage value Vmax, and then the voltage value V1a (first target voltage value). Set to Regardless of whether the voltage value V10 is applied to the piezoelectric element 110 in the step-up direction or whether the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction. The displacement amount X110 of the obtained piezoelectric element 110 is the displacement amount X13 (point P13 in FIG. 5).

Since the displacement amount X110 of the piezoelectric element 110 at the voltage value V1a can be uniquely determined, the posture adjustment apparatus 1000 (see FIG. 1) can accurately adjust the optical element 200 to a desired posture. It becomes possible. In addition, since there is no need to perform feedback control or the like, according to the posture adjustment apparatus 1000 in the present embodiment, the optical element 200 can be accurately and easily adjusted to a desired posture.

[Modification of Embodiment 1]
Referring to FIG. 6 (and FIG. 1), when posture adjustment apparatus 1000 adjusts optical element 200 to a desired posture, control unit 160 that receives posture adjustment signal S170 from posture adjustment signal output unit 170 The drive unit 111 is controlled such that the drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the minimum voltage value Vmin and then set to the voltage value V1a (first target voltage value). May be.

As shown in FIG. 6, it is assumed that the drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the minimum voltage value Vmin.

When the voltage value V10 is applied to the piezoelectric element 110 in the boosting direction, the displacement amount X110 of the piezoelectric element 110 is changed from the displacement amount X10 (point P10 in FIG. 6) to the displacement amount Xmin (in FIG. 6). It changes so that the hysteresis curve shown by the line L14a may be drawn to the point Pmin).

Thereafter, it is assumed that the drive voltage V111 applied to the piezoelectric element 110 is set from the minimum voltage value Vmin to the voltage value V1a (first target voltage value). The displacement amount X110 of the piezoelectric element 110 changes from the displacement amount Xmin (point Pmin in FIG. 6) to the displacement amount X14 (point P14 in FIG. 6) so as to draw a hysteresis curve indicated by a line L14c.

On the other hand, when the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction, the displacement amount X110 of the piezoelectric element 110 is changed from the displacement amount X11 (point P11 in FIG. 6) to the displacement amount Xmin (FIG. 6). It changes so that the hysteresis curve shown by line L14b may be drawn to the middle point Pmin).

The drive voltage V111 applied to the piezoelectric element 110 is once set from the current voltage value V10 to the minimum voltage value Vmin, and then set to the voltage value V1a (first target voltage value). Regardless of whether the voltage value V10 is applied to the piezoelectric element 110 in the step-up direction or whether the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction. The displacement amount X110 of the obtained piezoelectric element 110 is the displacement amount X14 (point P14 in FIG. 6).

Since the displacement amount X110 of the piezoelectric element 110 at the voltage value V1a can be uniquely determined, the posture adjustment apparatus 1000 of the present modification can also accurately adjust the optical element 200 to a desired posture. It becomes. Further, since it is not necessary to perform feedback control or the like, the optical element 200 can be accurately and simply adjusted to a desired posture.

[Embodiment 2]
With reference to FIGS. 7 and 8, the configuration of posture adjustment apparatus 2000 in the present embodiment will be described. FIG. 7 is a perspective view schematically showing the overall configuration of the attitude adjustment device 2000. As shown in FIG. FIG. 8 is a cross-sectional view schematically showing the overall configuration of the attitude adjustment device 2000. The attitude adjustment device 2000 adjusts the optical element 200 to a desired adjustment in the same manner as the attitude adjustment device 1000 (see FIG. 1). This will be specifically described below.

The posture adjusting device 2000 includes a support portion 150 that supports the optical element 200 so as to be swingable. Support portion 150 in the present embodiment includes piezoelectric element 110 (first piezoelectric element), piezoelectric element 120 (second piezoelectric element), and base member 152. One end of each of the

piezoelectric elements

110 and 120 in the longitudinal direction is fixed to the base member 152. The optical element 200 is supported by the other end of each of the

piezoelectric elements

110 and 120 in the longitudinal direction.

The piezoelectric element 110 is configured similarly to the piezoelectric element 110 (see FIG. 1) in the first embodiment described above. The piezoelectric element 120 is arranged side by side so as to face the piezoelectric element 110. The piezoelectric element 120 has substantially the same hysteresis characteristic H120 (see FIG. 9) as the hysteresis characteristic H110 (see FIG. 2) of the piezoelectric element 110.

A drive unit 121 (second drive unit) is connected to the piezoelectric element 120. The drive unit 121 outputs a predetermined drive voltage V121 (second drive voltage) that causes the piezoelectric element 120 to expand and contract. The piezoelectric element 120 to which the drive voltage V121 is applied expands and contracts in the direction of the arrow AR120 (see FIG. 8).

When the piezoelectric element 110 expands and contracts in the direction of the arrow AR110 and the piezoelectric element 120 expands and contracts in the direction of the arrow AR120, the optical element 200 is swung in the direction of the arrow AR200. The optical element 200 is changed to a predetermined posture by expansion and contraction (displacement amount) of the piezoelectric element 110 and the piezoelectric element 120.

Here, the drive unit 121 that outputs the drive voltage V121 is connected to the control unit 160 in the same manner as the drive unit 111 that outputs the drive voltage V111. The control unit 160 responds to the posture adjustment signal S170 received from the posture adjustment signal output unit 170, and the voltage value of the drive voltage V111 output from the drive unit 111 and the voltage of the drive voltage V121 output from the drive unit 121. Control each value.

The voltage value of the drive voltage V111 is converted into a displacement amount of the piezoelectric element 110. The voltage value of the drive voltage V121 is converted into a displacement amount of the piezoelectric element 120. By converting the voltage values of the drive voltages V111 and V121 into the displacement amounts of the

piezoelectric elements

110 and 120, a desired posture in the optical element 200 can be obtained.

FIG. 9 shows the relationship between the magnitude of the drive voltage V121 applied to the piezoelectric element 120 and the displacement amount X120 of the piezoelectric element 120. As described above, the piezoelectric element 120 has substantially the same hysteresis characteristic H120 as that of the piezoelectric element 110 (see FIG. 2).

The piezoelectric element 120 is also operated in the same manner as the piezoelectric element 110 described above (see FIG. 5). Specifically, referring to FIG. 9 (and FIG. 8), control unit 160 that has received posture adjustment signal S170 from posture adjustment signal output unit 170 is applied to piezoelectric element 120 in accordance with posture adjustment signal S170. A voltage value V2a (second target voltage value) of the power drive voltage V121 is set.

Further, the control unit 160 that receives the posture adjustment signal S170 from the posture adjustment signal output unit 170 sets the voltage after the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the maximum voltage value Vmax. The drive unit 121 is controlled to be set to the value V2a (second target voltage value).

As shown in FIG. 9, it is assumed that the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the maximum voltage value Vmax.

When the voltage value V20 is applied to the piezoelectric element 120 in the boosting direction, the displacement amount X120 of the piezoelectric element 120 is changed from the displacement amount X20 (point P20 in FIG. 9) to the displacement amount Xmax (in FIG. 9). It changes so as to draw a hysteresis curve shown by the line L23a until the point Pmax).

Thereafter, it is assumed that the drive voltage V121 applied to the piezoelectric element 120 is set from the maximum voltage value Vmax to the voltage value V2a (second target voltage value). The displacement amount X120 of the piezoelectric element 120 changes from the displacement amount Xmax (point Pmax in FIG. 9) to the displacement amount X23 (point P23 in FIG. 9) so as to draw a hysteresis curve indicated by a line L23c.

On the other hand, when the voltage value V20 is applied to the piezoelectric element 120 in the step-down direction, the displacement amount X120 of the piezoelectric element 120 is changed from the displacement amount X21 (point P21 in FIG. 9) to the displacement amount Xmax (FIG. 9). It changes so as to draw the hysteresis curve shown by the line L23b until the middle point Pmax).

As described above, the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the maximum voltage value Vmax, and then set to the voltage value V2a (second target voltage value). Regardless of whether the voltage value V20 is applied to the piezoelectric element 120 in the step-up direction or whether the voltage value V20 is applied to the piezoelectric element 120 in the step-down direction. The displacement amount X120 of the obtained piezoelectric element 120 is the displacement amount X23 (point P23 in FIG. 9).

As described above (see FIG. 5), the voltage value V10 is applied to the piezoelectric element 110 in the step-up direction, or the voltage value V10 is applied to the piezoelectric element 110 in the step-down direction. Regardless of whether or not there is, the finally obtained displacement amount X110 of the piezoelectric element 110 is uniquely determined.

Therefore, in the attitude adjustment device 2000 (see FIG. 8), the displacement amount X110 of the piezoelectric element 110 at the voltage value V1a is uniquely determined, and the displacement amount X120 of the piezoelectric element 120 at the voltage value V2a is uniquely determined. It becomes possible. In the attitude adjustment device 2000, the optical element 200 can be accurately adjusted to a desired attitude. In addition, since there is no need to perform feedback control or the like, according to the posture adjustment apparatus 2000 in the present embodiment, it is possible to accurately and easily adjust the optical element 200 to a desired posture.

[Modification of Embodiment 2]
Referring to FIG. 10 (and FIG. 8), when posture adjustment apparatus 2000 adjusts optical element 200 to a desired posture, control unit 160 that has received posture adjustment signal S170 from posture adjustment signal output unit 170 The drive unit 121 is controlled such that the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the minimum voltage value Vmin and then set to the voltage value V2a (second target voltage value). May be.

As shown in FIG. 10, it is assumed that the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the minimum voltage value Vmin.

When the voltage value V20 is applied to the piezoelectric element 120 in the boosting direction, the displacement amount X120 of the piezoelectric element 120 is changed from the displacement amount X20 (point P20 in FIG. 10) to the displacement amount Xmin (in FIG. 10). It changes so that the hysteresis curve shown by the line L24a may be drawn to the point Pmin).

Thereafter, it is assumed that the drive voltage V121 applied to the piezoelectric element 120 is set from the minimum voltage value Vmin to the voltage value V2a (second target voltage value). The displacement amount X120 of the piezoelectric element 120 changes from the displacement amount Xmin (point Pmin in FIG. 10) to the displacement amount X24 (point P24 in FIG. 10) so as to draw a hysteresis curve indicated by a line L24c.

On the other hand, when the voltage value V20 is applied to the piezoelectric element 120 in the step-down direction, the displacement amount X120 of the piezoelectric element 120 is changed from the displacement amount X21 (point P21 in FIG. 10) to the displacement amount Xmin (FIG. 10). It changes so that the hysteresis curve shown by the line L24b is drawn to the middle point Pmin).

As described above, the drive voltage V121 applied to the piezoelectric element 120 is once set from the current voltage value V20 to the minimum voltage value Vmin, and then set to the voltage value V2a (second target voltage value). Regardless of whether the voltage value V20 is applied to the piezoelectric element 120 in the step-up direction or whether the voltage value V20 is applied to the piezoelectric element 120 in the step-down direction. The displacement amount X120 of the obtained piezoelectric element 120 is the displacement amount X24 (point P24 in FIG. 10).

Therefore, similarly to the second embodiment, the displacement amount X110 of the piezoelectric element 110 at the voltage value V1a is uniquely determined, and the displacement amount X120 of the piezoelectric element 120 at the voltage value V2a is uniquely determined. It becomes possible. Also by the attitude adjustment device 2000 in this modification, the optical element 200 can be accurately and simply adjusted to a desired attitude. When the drive voltages V111 and V121 applied to the

piezoelectric elements

110 and 120 are set from the current voltage value to the target voltage value, the current voltage value is temporarily set from the current voltage value to the maximum voltage value and then set to the target voltage value. The selection of whether the current voltage value is once set to the minimum voltage value and then set to the target voltage value depends on the magnitude relationship of the drive voltages V111 and V121 applied to the

piezoelectric elements

110 and 120. It is good to be decided accordingly.

[Embodiment 3]
The third embodiment will be described with reference to FIGS. FIG. 11 is a diagram schematically illustrating Fourier transform spectroscopic analysis apparatus 100 in the third embodiment.

(Fourier transform spectrometer 100 Michelson interferometer 1)
With reference to FIG. 11, first, the Fourier transform spectroscopic analyzer 100 will be described. The Fourier transform spectroscopic analyzer 100 includes a Michelson interferometer 1, a calculation unit 2, and an output unit 3. The Michelson interferometer 1 includes a spectroscopic optical system 11, a reference optical system 21, and an attitude adjustment device 30.

(Spectral optical system 11)
The spectroscopic optical system 11 includes a light source 12, a collimating optical system 13, a beam splitter 14, a fixed mirror 15 (optical element), a moving mirror 16, a condensing optical system 17, a detector 18, and a driving mechanism 60.

The light source 12 includes a light emitting element such as a lamp, and emits light such as infrared light. The light emitted from the light source 12 is introduced into an optical path combining mirror 23 in the reference optical system 21 (details will be described later), and is synthesized with the light emitted from the reference light source 22 (details will be described later). The combined light is emitted from the optical path combining mirror 23, converted into parallel light by the collimating optical system 13, and then introduced into the beam splitter 14. The beam splitter 14 is composed of a half mirror or the like.
The light (incident light) introduced into the beam splitter 14 is divided into two light beams.

One side of the divided light is irradiated to the fixed mirror 15. The light reflected on the surface of the fixed mirror 15 (reflected light) passes through substantially the same optical path as before reflection and is irradiated again on the beam splitter 14. The other of the divided lights is irradiated to the movable mirror 16. The light (reflected light) reflected on the surface of the movable mirror 16 passes through substantially the same optical path as before reflection and is irradiated again on the beam splitter 14. The reflected light from the fixed mirror 15 and the reflected light from the moving mirror 16 are combined (superposed) by the beam splitter 14.

Here, when the other part of the divided light is reflected on the surface of the movable mirror 16, the movable mirror 16 is reciprocated in the direction of the arrow AR while being kept parallel by the drive mechanism 60. Due to the reciprocating movement of the movable mirror 16, a difference in optical path length occurs between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16. The reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16 are combined with the beam splitter 14 to form interference light.

The difference in optical path length changes continuously according to the position of the movable mirror 16. The intensity of light as interference light also changes continuously according to the difference in optical path length. When the difference in optical path length is, for example, an integral multiple of the wavelength of light irradiated from the collimating optical system 13 to the beam splitter 14, the intensity of light as interference light is maximized.

The sample S is irradiated with the light forming the interference light. The light transmitted through the sample S is condensed on the condensing optical system 17. The condensed light is introduced into the optical path separation mirror 24 in the reference optical system 21 (details will be described later). The detector 18 detects the light emitted from the optical path separation mirror 24 as an interference pattern (interferogram). This interference pattern is sent to the calculation unit 2 including a CPU (Central Processing Unit) and the like. The computing unit 2 converts the collected (sampled) interference pattern from an analog format to a digital format, and further performs Fourier transform on the converted data.

The spectral distribution indicating the light intensity for each wave number (= 1 / wavelength) of the light (interference light) transmitted through the sample S is calculated by Fourier transform. The data after the Fourier transform is output to another device through the output unit 3 or displayed on a display or the like. Based on this spectral distribution, the characteristics (eg, material, structure, or amount of components) of the sample S are analyzed.

(Reference optical system 21)
The reference optical system 21 includes a collimating optical system 13, a beam splitter 14, a fixed mirror 15, a moving mirror 16, a condensing optical system 17, a reference light source 22, an optical path synthesis mirror 23, an optical path separation mirror 24, a reference detector 25, and a signal. A processing unit 26 is included. The collimating optical system 13, the beam splitter 14, the fixed mirror 15, the moving mirror 16, and the condensing optical system 17 are common to both the spectroscopic optical system 11 and the reference optical system 21.

The reference light source 22 is composed of a light emitting element such as a semiconductor laser, and emits light such as red light. As described above, the light emitted from the reference light source 22 is introduced into the optical path combining mirror 23. The optical path combining mirror 23 is composed of a half mirror or the like. The light from the light source 12 passes through the optical path combining mirror 23. Light from the reference light source 22 is reflected by the optical path combining mirror 23.

The light from the light source 12 and the light from the reference light source 22 are emitted from the optical path combining mirror 23 onto the same optical path in a state where they are combined by the optical path combining mirror 23. The light emitted from the optical path combining mirror 23 is converted into parallel light by the collimating optical system 13 and then introduced into the beam splitter 14 and split into two light beams.

As described above, one of the divided lights is irradiated on the fixed mirror 15 and again irradiated on the beam splitter 14 as reflected light. The other of the divided lights is applied to the movable mirror 16 and is applied again to the beam splitter 14 as reflected light. The reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16 are combined with the beam splitter 14 to form interference light.

As described above, the sample S is irradiated with the light forming the interference light. The light transmitted through the sample S is condensed on the condensing optical system 17. The condensed light is introduced into the optical path separation mirror 24 in the reference optical system 21. The optical path separation mirror 24 is composed of a half mirror or the like, and the light (incident light) introduced into the optical path separation mirror 24 is divided into two light beams.

The light emitted from the light source 12 and introduced into the optical path separation mirror 24 through the optical path synthesis mirror 23, the collimating optical system 13, the beam splitter 14, the fixed mirror 15, the movable mirror 16, the sample S, and the condensing optical system 17 The light passes through the separation mirror 24. As described above, this light (interference light) transmitted through the optical path separation mirror 24 is detected by the detector 18.

On the other hand, light emitted from the reference light source 22 and introduced into the optical path separation mirror 24 through the optical path synthesis mirror 23, the collimating optical system 13, the beam splitter 14, the fixed mirror 15, the movable mirror 16, the sample S, and the condensing optical system 17. Is reflected by the optical path separation mirror 24. Reflected light (interference light) from the optical path separation mirror 24 is detected as an interference pattern by a reference detector 25 constituted by a quadrant sensor or the like.

The interference pattern of the interference light is sent to a signal processing unit 26 including a CPU and the like. The signal processing unit 26 calculates the intensity of the reflected light from the optical path separation mirror 24 based on the collected interference pattern. Based on the intensity of the reflected light from the optical path separation mirror 24, the signal processing unit 26 can generate a signal indicating the sampling timing in the calculation unit 2. A signal indicating the sampling timing in the calculation unit 2 can be generated by a known means.

Based on the intensity of the reflected light from the optical path separation mirror 24, the signal processing unit 26 tilts the light between the two optical paths (relative tilt between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16). Can also be calculated. For example, the inclination of light between the two optical paths is calculated as follows.

Referring to FIG. 12, the reference detector 25 composed of a four-divided sensor has four light receiving areas E1 to E4. The light receiving areas E1 to E4 are adjacent to each other in the counterclockwise direction. Reflected light from the optical path separation mirror 24 is irradiated to the area constituted by the light receiving areas E1 to E4. The center of the area constituted by the light receiving areas E1 to E4 and the center of the spot D of the reflected light from the optical path separation mirror 24 are substantially coincident.

The light receiving areas E1 to E4 detect the intensity of the reflected light applied to each area from the optical path separation mirror 24. The intensity of the reflected light from the optical path separation mirror 24 is detected as a phase signal that changes with time, for example, as shown in FIGS. 13 (A) and 13 (B).

Each horizontal axis of FIG. 13 (A) and FIG. 13 (B) indicates the passage of time (unit: second). The vertical axis in FIG. 13A indicates the sum of the light intensity detected by the light receiving area E1 and the light intensity detected by the light receiving area E2 as intensity A1 (relative value). The vertical axis in FIG. 13B indicates the sum of the light intensity detected by the light receiving area E3 and the light intensity detected by the light receiving area E4 as intensity A2 (relative value).

As shown in FIGS. 13A and 13B, it is assumed that there is a phase difference Δ between the intensity A1 and the intensity A2. Based on the phase difference Δ, the inclination of the light between the two optical paths (the relative inclination between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16) is calculated. Other phase differences Δ can be obtained by other combinations of the light receiving areas E1 to E4 (for example, combinations of the light receiving areas E1 and E4 and the light receiving areas E2 and E3). Based on the above phase difference Δ and other phase differences Δ, the direction (vector) of the inclination of light between the two optical paths can also be calculated.

(Attitude adjustment device 30)
Referring to FIG. 11 again, the attitude adjustment device 30 is based on the detection result in the signal processing unit 26 (relative inclination between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16). 15 (the angle of the surface of the fixed mirror 15 with respect to the beam splitter 14) is adjusted. By this adjustment, the optical path of the reflected light at the fixed mirror 15 is corrected, and the inclination of the light between the two optical paths can be eliminated (or reduced). By providing the attitude adjustment device 30 in the Michelson interferometer 1, it becomes possible to generate interference light with higher accuracy.

With reference to FIGS. 14 to 16, the configuration of the attitude adjustment device 30 in the present embodiment will be described in detail. FIG. 14 is a perspective view showing a disassembled state of the attitude adjustment device 30. FIG. FIG. 15 is a plan view showing the attitude adjustment device 30. 16 is a cross-sectional view taken along the line XVI-XVI in FIG. The attitude adjustment device 30 adjusts the attitude of the fixed mirror 15 to a desired attitude. This will be specifically described below.

Referring to FIG. 14, the posture adjustment device 30 includes a support portion 150 that supports the fixed mirror 15 in a swingable manner. Support portion 150 in the present embodiment includes piezoelectric element 110 (first piezoelectric element), piezoelectric element 120 (second piezoelectric element), piezoelectric element 130, piezoelectric element 140, base member 152, and pedestal 156.

The

piezoelectric elements

110, 120, 130, and 140 have substantially the same hysteresis characteristics, and are arranged in a square shape in plan view (see FIG. 15) so as to face each other.

14 to 16, the pedestal 156 includes a disk-shaped large-diameter portion 156a and a disk-shaped small-diameter portion 156b. One end in the longitudinal direction of each of the

piezoelectric elements

110, 120, 130, and 140 is fixed to the base member 152. On the other end in the longitudinal direction of each of the

piezoelectric elements

110, 120, 130, and 140, a small diameter portion 156 b of the pedestal 156 is provided.

As shown in FIG. 16, an adhesive 158 is provided between the other end in the longitudinal direction of each of the

piezoelectric elements

110, 120, 130, and 140 and the small diameter portion 156b of the pedestal 156. The fixed mirror 15 is fixed on the large-diameter portion 156a of the base 156.

As in the case of the second embodiment, the piezoelectric element 110 is connected to the driving unit 111 (first driving unit). The drive unit 111 outputs a predetermined drive voltage V111 (first drive voltage) that causes the piezoelectric element 110 to expand and contract. The piezoelectric element 110 to which the drive voltage V111 is applied expands and contracts in the direction of the arrow AR110.

A drive unit 121 (second drive unit) is connected to the piezoelectric element 120. The drive unit 121 outputs a predetermined drive voltage V121 (second drive voltage) that causes the piezoelectric element 120 to expand and contract. The piezoelectric element 120 to which the driving voltage V121 is applied expands and contracts in the direction of the arrow AR120.

The

piezoelectric elements

130 and 140 are configured in the same manner as the

piezoelectric elements

110 and 120. The

piezoelectric elements

130 and 140 function in the same manner as the

piezoelectric elements

110 and 120. Only the

piezoelectric elements

110 and 120 will be described below.

The stationary mirror 15 is swung by the expansion and contraction of the piezoelectric element 110 and the expansion and contraction of the piezoelectric element 120. The fixed mirror 15 is changed to a predetermined posture by the expansion and contraction (displacement amount) of the

piezoelectric elements

110 and 120.

As in the case of the second embodiment described above, the control unit 160 is connected to the drive unit 111 that outputs the drive voltage V111. The controller 160 is also connected to the drive unit 121 that outputs the drive voltage V121. An attitude adjustment signal output unit 170 is connected to the control unit 160. The posture adjustment signal output unit 170 is connected to the signal processing unit 26 in FIG. 11 and acquires information related to the posture of the fixed mirror 15 from the signal processing unit 26. The posture adjustment signal output unit 170 outputs a posture adjustment signal S170 for adjusting the fixed mirror 15 to a desired posture according to the acquired information.

The control unit 160 responds to the attitude adjustment signal S170 received from the attitude adjustment signal output unit 170, and the voltage value of the drive voltage V111 output from the drive unit 111 and the voltage value of the drive voltage V121 output from the drive unit 121. And control each.

piezoelectric elements

110 and 120, it is possible to obtain a desired posture in the fixed mirror 15.

Here, the control unit 160 in the present embodiment is configured so that the drive voltage V111 applied to the piezoelectric element 110 and the drive voltage V121 applied to the piezoelectric element 120 are in opposite phases to each other. 121 is controlled.

Referring to FIG. 17, when drive voltage V111 applied to piezoelectric element 110 and drive voltage V121 applied to piezoelectric element 120 are in opposite phases, for example, when piezoelectric element 110 is extended, The piezoelectric element 120 contracts (see the white arrow in FIG. 17). Thereby, the fixed mirror 15 is inclined in the direction of the arrow AR15. When the fixed mirror 15 is adjusted to a desired posture, the drive voltage V111 applied to the piezoelectric element 110 and the drive voltage V121 applied to the piezoelectric element 120 are in opposite phases, whereby the fixed mirror 15 is moved to the desired posture. It becomes possible to adjust easily.

(Attitude adjustment operation)
For example, it is assumed that Fourier transform spectroscopic analysis apparatus 100 (see FIG. 11) in the present embodiment transitions from a startup state or a standby state to an analysis start state. At this time, the posture adjustment device 30 is used to start adjusting the posture of the fixed mirror 15. In the Fourier transform spectroscopic analysis apparatus 100, first, coarse adjustment is performed on the fixed mirror 15, and then fine adjustment is performed on the fixed mirror 15 by so-called servo control. Hereinafter, the rough adjustment and the fine adjustment will be described in order.

(Coarse adjustment)
Referring to FIG. 18 and FIG. 19, it is assumed that drive voltage V111 having voltage value V10 is applied to piezoelectric element 110 at the time when drive of Fourier transform spectroscopic analyzer 100 is started (current as the drive start time). (Time T0 in FIG. 19).

The controller 160 sets the voltage value V1a (first target voltage value) of the drive voltage V111 to be applied to the piezoelectric element 110. The voltage value V1a may be a preset value (design value), or may be a value calculated according to the attitude adjustment signal S170 received from the attitude adjustment signal output unit 170.

Furthermore, the control unit 160 controls the drive unit 111 so that the drive voltage V111 applied to the piezoelectric element 110 is temporarily set from the current voltage value V10 to the maximum voltage value Vmax (time T0 in FIG. 19). ~ T1). A drive voltage V111 having a maximum voltage value Vmax is applied to the piezoelectric element 110 for a predetermined time (time T1 to T2 in FIG. 19). Thereafter, the control unit 160 controls the drive unit 111 so that the drive voltage V111 applied to the piezoelectric element 110 is set to the voltage value V1a (time T2 to T3 in FIG. 19).

As in the first embodiment (see FIG. 5), the voltage value V10 is applied to the piezoelectric element 110 in the boosting direction, or the voltage value V10 is applied to the piezoelectric element 110. Regardless of whether the voltage is applied in the step-down direction, the finally obtained displacement amount X110 of the piezoelectric element 110 is the displacement amount X13 (point P13 in FIG. 18). The rough adjustment indicated by the region RR1 in FIG. 19 is completed. Although details will be described later, fine adjustment indicated by a region RR2 in FIG. 19 is performed on the fixed mirror 15 thereafter.

On the other hand, referring to FIG. 20 and FIG. 21, at the time when driving of Fourier transform spectroscopic analyzer 100 is started (current as the driving start time), drive voltage V121 of voltage value V20 is applied to piezoelectric element 120. (Time T0 in FIG. 21).

The controller 160 sets a voltage value V2a (second target voltage value) of the drive voltage V121 to be applied to the piezoelectric element 120. In the present embodiment, this voltage value V2a is
(Formula 1) V2a = (Vmax + Vmin) −V1a
It is configured to satisfy

Furthermore, the control unit 160 controls the drive unit 121 so that the drive voltage V121 applied to the piezoelectric element 120 is temporarily set from the current voltage value V20 to the minimum voltage value Vmin (from time T0 to time T0 in FIG. 21). T1). A drive voltage V121 having a minimum voltage value Vmin is applied to the piezoelectric element 120 for a predetermined time (time T1 to T2 in FIG. 21). Thereafter, the control unit 160 controls the drive unit 121 so that the drive voltage V121 applied to the piezoelectric element 120 is set to the voltage value V2a (time T2 to T3 in FIG. 21).

Similarly to the above-described modification of the second embodiment (see FIG. 10), the voltage value V20 is applied to the piezoelectric element 120 in the boosting direction, or the voltage value V20 is the piezoelectric element 120. Regardless of whether the voltage is applied in the step-down direction, the finally obtained displacement amount X120 of the piezoelectric element 120 is the displacement amount X24 (point P24 in FIG. 20).

The displacement amount X110 of the piezoelectric element 110 becomes the displacement amount X13 (point P13 in FIG. 18), and the displacement amount X120 of the piezoelectric element 120 becomes the displacement amount X24 (point P24 in FIG. 20). The posture is changed (rough adjustment is completed).

The piezoelectric element 110 and the piezoelectric element 120 enable the fixed mirror 15 to be roughly (uniquely) roughly adjusted to a desired posture.

(Tweak)
As described above, when the coarse adjustment is completed, the displacement amount X110 of the piezoelectric element 110 becomes the displacement amount X13 (point P13 in FIG. 18), and the displacement amount X120 of the piezoelectric element 120 becomes the displacement amount X24 (in FIG. 19). Point P24).

In this state, the signal processing unit 26 that calculates the inclination of the light between the two optical paths based on the intensity of the reflected light from the optical path separation mirror 24 (see FIG. 11) calculates the inclination to the attitude adjustment signal output unit 170. A predetermined signal according to the value is sent. The posture adjustment signal output unit 170 sends a posture adjustment signal S170 to the control unit 160.

The piezoelectric element 110 receives the drive voltage V111 from the drive unit 111 controlled by the control unit 160, and is continuously driven so that the inclination of the fixed mirror 15 becomes a desired posture. The piezoelectric element 120 receives the drive voltage V121 from the drive unit 121 controlled by the control unit 160, and is continuously driven so that the inclination of the fixed mirror 15 becomes a desired posture. The same applies to the piezoelectric elements 130 and 140 (see FIG. 14).

The posture adjustment device 30 adjusts the fixed mirror 15 to a desired posture based on the detection result in the signal processing unit 26 (relative inclination between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16). The Interference light can be generated with higher accuracy.

[Modification of Embodiment 3]
In the above-described third embodiment, the voltage value V1a (first target voltage value) of the drive voltage V111 to be applied to the piezoelectric element 110 and the voltage value V2a (second value) of the drive voltage V121 to be applied to the piezoelectric element 120 are described. Target voltage value) is the maximum voltage value Vmax and the minimum voltage value Vmin.
(Formula 2) V1a = V2a = (Vmax + Vmin) / 2
It is good to be configured to satisfy According to this configuration, the following effects can be obtained during fine adjustment.

Referring to FIG. 22, when the above expression is satisfied, the displacement amount X110 of the piezoelectric element 110 becomes the displacement amount X13 in the state after the piezoelectric element 110 is roughly adjusted (point P13 in FIG. 22). ).

Referring to FIG. 23, when the above equation is satisfied, the displacement amount X120 of the piezoelectric element 120 becomes the displacement amount X24 in the state after the piezoelectric element 120 is roughly adjusted (point P24 in FIG. 23). ).

FIG. 24 is a diagram showing a point P13 in FIG. 22 and a point P24 in FIG. As shown in FIG. 24, when the piezoelectric element 110 and the piezoelectric element 120 are servo-controlled between the voltage value V3a and the voltage value V3b around the voltage values V1a and V2a, the above formula is satisfied, The slope of the line LA including both turning points of the hysteresis curve of the piezoelectric element 110 and the slope of the line LB including both turning points of the hysteresis curve of the piezoelectric element 120 are the same. Since the displacement amount (expansion / contraction amount) with respect to the applied voltage is substantially the same in the piezoelectric element 110 and the piezoelectric element 120, the posture of the fixed mirror 15 can be stably adjusted.

Further, each of the drive voltage V111 and the drive voltage V121 applied so as to be in opposite phases to each other is preferably a symmetric voltage value around the voltage values V1a and V2a. In other words, between the voltage value (VA) applied to the piezoelectric element 110 as the drive voltage V111, the voltage value (VB) applied to the piezoelectric element 120 as the drive voltage V121, and the voltage values V1a and V2a, It is preferable that the relationship of (VA + VB) / 2 = voltage value V1a = voltage value V2a always holds.

According to this configuration, the oscillating shaft of the fixed mirror 15 is formed just between the piezoelectric element 110 and the piezoelectric element 120. The piezoelectric element 110 and the piezoelectric element 120 perform a so-called push-pull operation with respect to the fixed mirror 15. The posture of the fixed mirror 15 can be adjusted according to the displacement amount of the piezoelectric element 110 and the displacement amount of the piezoelectric element 120 around the above-described swing axis. As a result, the posture of the fixed mirror 15 can be adjusted more stably.

As mentioned above, although each embodiment based on this invention was described, each embodiment disclosed this time is an illustration and restrictive at no points. The technical scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1 Michelson interferometer, 2 computing unit, 3 output unit, 11 spectroscopic optical system, 12 light source, 13 collimating optical system, 14 beam splitter, 15 fixed mirror (optical element), 16 moving mirror, 17 condensing optical system, 18 Detector, 21 reference optical system, 22 reference light source, 23 optical path synthesis mirror, 24 optical path separation mirror, 25 reference detector, 26 signal processing unit, 30, 1000, 2000 attitude adjustment device, 60 drive mechanism, 100 Fourier transform spectroscopic analysis Device, 110 piezoelectric element (first piezoelectric element), 120 piezoelectric element (second piezoelectric element), 130, 140 piezoelectric element, 111 driving part (first driving part), 121 driving part (second driving part), 150 support Part, 152 base member, 154 elastic support member, 156 pedestal, 156a large diameter part, 156b small diameter part, 158 Adhesive, 160 control unit, 170 attitude adjustment signal output unit, 200 optical element, 200S surface, A1, A2 intensity, D spot, E1, E2, E3, E4 light receiving area, H110, H120 hysteresis characteristics, L10, L11, L12a , L12b, L13a, L13b, L13c, L14a, L14b, L14c, L23a, L23b, L23c, L24a, L24b, L24c line, LA, LB line, P10, P11, P12a, P12b, P13, P14, P20, P21, P23 , P24, Pmin, Pmax points, RR1, RR2 region, S sample, S170 attitude adjustment signal, T0, T1, T2, T3 time, V1a voltage value (first target voltage value), V2a voltage value (second target voltage value) ), V3a, V3b, V10, V20 Value, V111 drive voltage (first drive voltage), V121 drive voltage (second drive voltage), Vmix minimum voltage value, Vmax maximum voltage value, X10, X11, X12a, X12b, X13, X14, X20, X21, X23, X24, X110, X120, Xmin, Xmax displacement.

Claims

A posture adjusting device (1000, 2000, 30) for adjusting the optical element (200) to a desired posture,
A support portion (150) that includes a first piezoelectric element (110), supports the optical element in a swingable manner, and changes the posture of the optical element by expansion and contraction of the first piezoelectric element;
A first drive unit (111) connected to the first piezoelectric element and outputting a first drive voltage (V111) for expanding and contracting the first piezoelectric element;
An attitude adjustment signal output unit (170) for outputting an attitude adjustment signal (S170) for adjusting the optical element to a desired attitude;
A voltage value of the first drive voltage that is connected to the posture adjustment signal output unit and the first drive unit and that is output from the first drive unit in response to the posture adjustment signal received from the posture adjustment signal output unit. A control unit (160) for controlling
The first piezoelectric element has a hysteresis characteristic (H110) formed between a maximum voltage value (Vmax) and a minimum voltage value (Vmin) of the first drive voltage applied to the first piezoelectric element. ,
When the posture adjustment device (1000, 2000, 30) adjusts the optical element (200) to a desired posture,
The controller (160) sets a first target voltage value (V1a) of the first drive voltage to be applied to the first piezoelectric element according to the attitude adjustment signal,
Further, the control unit (160) may be configured such that the first driving voltage applied to the first piezoelectric element is temporarily set from the current voltage value (V10) to the maximum voltage value or the minimum voltage value. Controlling the first drive unit to be set to a first target voltage value;
Attitude adjustment device.
The support portion (150) includes a second piezoelectric element (120) that is disposed to face the first piezoelectric element and has the same hysteresis characteristic (H120) as the hysteresis characteristic of the first piezoelectric element,
A second drive unit (121) that outputs a second drive voltage (V121) for expanding and contracting the second piezoelectric element is connected to the second piezoelectric element,
The control unit (160) is connected to the second drive unit, and the voltage of the second drive voltage output from the second drive unit according to the posture adjustment signal received from the posture adjustment signal output unit. Control the value,
When the posture adjustment device (2000, 30) adjusts the optical element (200) to a desired posture,
The controller (160) sets a second target voltage value (V2a) of the second drive voltage to be applied to the second piezoelectric element according to the attitude adjustment signal,
Further, the control unit (160) may be configured such that the second driving voltage applied to the second piezoelectric element is temporarily set from the current voltage value (V20) to the maximum voltage value or the minimum voltage value. Controlling the second drive unit to be set to a second target voltage value;
The posture adjusting apparatus according to claim 1.
When the first target voltage value is V1a, the second target voltage value is V2a, the maximum voltage value is Vmax, and the minimum voltage value is Vmin,
(Formula 1) V2a = (Vmax + Vmin) −V1a
Is configured to satisfy
The controller (160) may set the first drive voltage applied to the first piezoelectric element to the first target voltage value after being temporarily set from the current voltage value to the maximum voltage value. And controlling the first driving unit (111),
Further, the control unit (160) sets the second drive voltage applied to the second piezoelectric element from the current voltage value to the minimum voltage value and then sets the second target voltage value to the second target voltage value. Controlling the second driving part (121),
In a state after the first driving voltage of the first target voltage value is applied to the first piezoelectric element and the second driving voltage of the second target voltage value is applied to the second piezoelectric element, When the posture adjustment device adjusts the optical element (200) to a desired posture,
The control unit that has received the posture adjustment signal from the posture adjustment signal output unit has the first drive voltage applied to the first piezoelectric element and the second drive voltage applied to the second piezoelectric element. Controlling each of the first drive unit (111) and the second drive unit (121) so as to be in opposite phases to each other;
The posture adjusting apparatus according to claim 2.
The first target voltage value, the second target voltage value, the maximum voltage value, and the minimum voltage value are:
(Formula 2) V1a = V2a = (Vmax + Vmin) / 2
Configured to satisfy
The posture adjustment apparatus according to claim 3.
Each of the first drive voltage (V111) applied to the first piezoelectric element and the second drive voltage (V121) applied to the second piezoelectric element so as to be in opposite phases to each other is set to the first target. A voltage value symmetrical about the voltage value (V1a) and the second target voltage value (V2a),
The posture adjustment apparatus according to claim 4.
A posture adjusting device according to any one of claims 1 to 5;
A moving mirror,
A fixed mirror as the optical element (200);
A light source;
A beam splitter that divides the light emitted from the light source into light directed toward the fixed mirror and light directed toward the movable mirror, and combines the light reflected on each of the fixed mirror and the movable mirror to emit as interference light; ,
A detector for detecting the interference light,
Michelson interferometer.
Michelson interferometer (1) according to claim 6,
A calculation unit (2) for calculating a spectrum of the interference light detected by the detector;
An output unit (3) for outputting the spectrum obtained by the arithmetic unit,
Fourier transform spectroscopic analyzer.
A posture adjusting device (2000, 30) for adjusting the optical element (200) to a desired posture,
A first piezoelectric element (110) and a second piezoelectric element (120) disposed so as to face the first piezoelectric element, and supports the optical element in a swingable manner; A support part (150) for changing the posture of the optical element by expansion and contraction of the second piezoelectric element;
A first drive unit (111) connected to the first piezoelectric element and outputting a first drive voltage (V111) for expanding and contracting the first piezoelectric element;
A second drive unit (121) connected to the second piezoelectric element and outputting a second drive voltage (V121) for expanding and contracting the second piezoelectric element;
An attitude adjustment signal output unit (170) for outputting an attitude adjustment signal (S170) for adjusting the optical element to a desired attitude;
The first drive unit connected to the posture adjustment signal output unit, the first drive unit, and the second drive unit, and output from the first drive unit according to the posture adjustment signal received from the posture adjustment signal output unit. A control unit (160) for controlling a voltage value of one driving voltage and a voltage value of the second driving voltage output from the second driving unit,
The first piezoelectric element and the second piezoelectric element are the first driving voltage and the maximum voltage value (Vmax) and the minimum voltage of the second driving voltage applied to the first piezoelectric element and the second piezoelectric element, respectively. The hysteresis characteristics (H110, H120) formed between the values (Vmin) are substantially the same,
When the posture adjustment device (2000, 30) adjusts the optical element (200) to a desired posture,
The control unit (160) is configured to apply a target voltage value (V1a) of the first drive voltage to be applied to the first piezoelectric element according to the posture adjustment signal and the second piezoelectric according to the posture adjustment signal. Setting a target voltage value (V2a) of the second drive voltage to be applied to the element;
Further, the control unit (160) may determine whether the drive voltage applied to one of the first piezoelectric element and the second piezoelectric element is in accordance with the magnitude relationship between the first drive voltage and the second drive voltage. After the current voltage value is once set to the maximum voltage value, the target voltage value is set to the one of the first piezoelectric element and the second piezoelectric element, and the first piezoelectric element and the second voltage value are set. After the drive voltage applied to the other of the piezoelectric elements is once set from the current voltage value to the minimum voltage value, the drive voltage applied to the other target voltage value of the first piezoelectric element and the second piezoelectric element is set. Controlling the first drive unit and the second drive unit to be set;
Attitude adjustment device.