CN105157838A - Interferometer fixed mirror dynamic self-correcting device - Google Patents
Interferometer fixed mirror dynamic self-correcting device Download PDFInfo
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Abstract
本发明公开了一种干涉仪定镜动态自校正的装置，包括激光器、激光扩束器以及迈克尔逊干涉仪，迈克尔逊干涉仪包括相互垂直的动镜、定镜以及分束器，还包括位于干涉仪干涉平面上的探测器、控制器、音圈直线电机以及四个电磁驱动器，四个电磁驱动器安装在定镜正后方，呈对角线相互垂直分布，探测器将其探测到的相位误差反馈到四个电磁驱动器，四个电磁驱动器根据接收到的电流信号，分别产生推力和拉力实现对定镜的驱动控制，使之旋转来校正动镜在运动过程中产生的倾斜误差角，使定镜和动镜位置保持相互垂直。本发明提供一个快速、结构简单的定镜动态自校正倾斜装置，消除了对高精度机械轴承的依赖和光谱仪定期重复校正的需要。
The invention discloses a device for dynamic self-correction of a fixed mirror of an interferometer, which includes a laser, a laser beam expander and a Michelson interferometer. The detector, controller, voice coil linear motor and four electromagnetic drivers on the interference plane of the interferometer, the four electromagnetic drivers are installed directly behind the fixed mirror, and are arranged diagonally perpendicular to each other, and the detector detects the phase error Feedback to the four electromagnetic drivers, the four electromagnetic drivers generate thrust and pull respectively according to the received current signals to realize the driving control of the fixed mirror, and make it rotate to correct the tilt error angle generated during the movement of the moving mirror, so that the fixed mirror The mirror and moving mirror positions are kept perpendicular to each other. The invention provides a fixed mirror dynamic self-correction tilting device with fast and simple structure, which eliminates the dependence on high-precision mechanical bearings and the need for periodic repeated calibration of spectrometers.
Description
技术领域technical field
本发明属于光学和定镜校正领域，具体是指傅立叶变换光谱仪中的定镜和动镜之间保持垂直的校正。The invention belongs to the field of optics and fixed mirror correction, and specifically refers to the vertical correction between a fixed mirror and a moving mirror in a Fourier transform spectrometer.
背景技术Background technique
傅立叶变换红外光谱(FTIR)仪由于具有高光通量，低噪声，测量速度快等优点，以及可进行实时的多组分同时探测等独特的优势，在环境监测、化学分析、药品成份分析等方面都有广泛的应用。Fourier Transform Infrared Spectroscopy (FTIR) instrument is widely used in environmental monitoring, chemical analysis, and drug composition analysis due to its advantages of high luminous flux, low noise, fast measurement speed, etc. There are a wide range of applications.
傅立叶变换红外光谱仪的核心光学部件是经典的迈克尔逊干涉仪，经典迈克尔逊干涉仪要求动镜和定镜严格垂直。但在实际工作环境中，由于动镜在移动过程中很难保证与定镜互相垂直，使得光路产生倾斜等效应，降低了干涉调制度，增加了光谱噪声，限制了系统的应用领域。The core optical component of the Fourier transform infrared spectrometer is the classic Michelson interferometer, which requires the moving mirror and the fixed mirror to be strictly perpendicular. However, in the actual working environment, it is difficult to ensure that the moving mirror is perpendicular to the fixed mirror during the movement process, which causes the optical path to tilt and other effects, which reduces the interference modulation degree and increases spectral noise, which limits the application field of the system.
通常，通过手动调整不同螺丝来校正动镜，使定镜和动镜保持垂直位置，但这种方法耗时，而且需要很高的技能，相应地增加了生产成本和服务费用。傅立叶变换红外光谱仪运行一段时间后，还需要重复再校正。另外，傅立叶变换红外光谱仪对机械结构有苛刻的要求，如果动镜倾斜角度误差小于1角秒，则要求机械加工精度达到微米量级，那么单纯靠机械加工很难达到，同时，如果使用精密轴承，费用也是非常昂贵的。Usually, the moving mirror is corrected by manually adjusting different screws to keep the fixed and moving mirrors in a vertical position, but this method is time-consuming and requires high skill, which increases production costs and service charges accordingly. After the Fourier transform infrared spectrometer has been running for a period of time, it needs to be recalibrated repeatedly. In addition, the Fourier transform infrared spectrometer has strict requirements on the mechanical structure. If the tilt angle error of the moving mirror is less than 1 arc second, the machining accuracy is required to reach the micron level, which is difficult to achieve by pure machining. At the same time, if precision bearings are used , and the cost is also very expensive.
目前，解决动镜倾斜的方法有两种，一种是采用角反射镜或猫眼反射镜形成光束自动准直，而采用角镜或猫眼镜进行准直的系统通常会增加系统光路的复杂性和直线电机的负载重量，角镜或猫眼镜的精度要求以及温度稳定性等要求也更加严格。同时，角镜的准直性能也是有一定限度的，也会给准直性带来一定的影响，例如光束中心横向偏移等，这些影响将会降低干涉仪的干涉调制度和信噪比等性能，导致光谱仪测量的光谱质量下降。At present, there are two ways to solve the tilting of the moving mirror. One is to use a corner mirror or a cat's eye mirror to form an automatic beam collimation, and a system that uses a corner mirror or a cat's eye for collimation usually increases the complexity and complexity of the system's optical path. The load weight of linear motors, the accuracy requirements of angle mirrors or cat glasses, and the temperature stability requirements are also more stringent. At the same time, the collimation performance of the corner mirror also has a certain limit, and it will also have a certain impact on the collimation, such as the lateral shift of the beam center, etc., and these effects will reduce the interference modulation and signal-to-noise ratio of the interferometer. performance, leading to a decrease in the quality of the spectra measured by the spectrometer.
另一种采用动态校正的方法，其中有两种形式，一种形式是动态校正系统安装在动镜上，优点是干涉仪的其它部分固定，系统运动部件比较集中，缺点是由于动镜部分安装了动态校正系统而变得复杂，同时，校正系统会随着动镜的运动而随之运动，对校正系统产生震动，进而影响动态校正系统的正常工作和校正精度，因此这种形式所采用的动态校正系统相对较少。Another method using dynamic correction, which has two forms, one form is that the dynamic correction system is installed on the moving mirror, the advantage is that other parts of the interferometer are fixed, and the moving parts of the system are relatively concentrated, the disadvantage is that the moving mirror part is installed The dynamic correction system becomes complicated. At the same time, the correction system will move with the movement of the moving mirror, which will vibrate the correction system, which will affect the normal operation and correction accuracy of the dynamic correction system. Therefore, the method used in this form Dynamic correction systems are relatively rare.
另一种形式是采用定镜动态校正的方法，定镜动态校正就是用高速倾斜镜作定镜，根据检测到的波前倾斜误差迅速地进行补偿校正，达到保持准直的目的。如果不采用动态校正方法，那么要求动镜驱动电机只能产生角秒量级的误差，这对于驱动电机来说太苛刻了，几乎很难做到。如果采用定镜动态校正系统，可以使动镜运行要求放宽到几分，这对驱动电机是非常重要的，也容易实现。Another form is to use the fixed mirror dynamic correction method. The fixed mirror dynamic correction is to use a high-speed tilting mirror as the fixed mirror, and quickly perform compensation and correction according to the detected wavefront tilt error to achieve the purpose of maintaining collimation. If the dynamic correction method is not used, then the moving mirror driving motor is required to only produce an error of the order of arc seconds, which is too harsh for the driving motor, and it is almost difficult to achieve. If the fixed mirror dynamic correction system is used, the moving mirror operation requirements can be relaxed to a certain extent, which is very important for driving the motor and is easy to implement.
发明内容Contents of the invention
本发明提出一种干涉仪定镜动态自校正的装置，动镜在运动过程时，激光干涉条纹在激光探测器上作快速变化。通过比较每个探测器所记录的强度、频率、相位和调制度等信息，准确得到两反射镜相对倾斜误差大小和方向，将倾斜误差值转化为控制电信号值转化给定镜控制系统，实现实时动态校正。The invention proposes a dynamic self-correcting device for a fixed mirror of an interferometer. When the moving mirror is moving, the laser interference fringes change rapidly on the laser detector. By comparing the intensity, frequency, phase and modulation information recorded by each detector, the magnitude and direction of the relative tilt error of the two mirrors can be accurately obtained, and the tilt error value is converted into a control electrical signal value and converted into a given mirror control system to realize Real-time dynamic correction.
本发明采用的技术方案是：The technical scheme adopted in the present invention is:
一种干涉仪定镜动态自校正的装置，包括激光器、激光扩束器以及迈克尔逊干涉仪，所述迈克尔逊干涉仪包括相互垂直的动镜、定镜以及动镜和定镜的角平分线上的分束器，其特征在于：还包括位于干涉仪干涉平面上的四象限探测器，控制器，控制动镜直线运动的音圈直线电机以及控制定镜方向的四个电磁驱动器，所述四个电磁驱动器安装在定镜正后方，呈对角线相互垂直的X轴和Y轴分布，X轴对角线上有电磁驱动器一和电磁驱动器三，Y轴对角线上有电磁驱动器二和电磁驱动器四，所述四象限探测器将其探测到的相位误差反馈到控制器，进而反馈到四个电磁驱动器，四个电磁驱动器根据接收到的电流信号，分别产生推力和拉力对定镜驱动，使之旋转来校正动镜在运动过程中产生的倾斜误差角，使定镜和动镜位置保持相互垂直。A device for dynamic self-correction of a fixed mirror of an interferometer, comprising a laser, a laser beam expander, and a Michelson interferometer, wherein the Michelson interferometer includes a moving mirror perpendicular to each other, a fixed mirror, and an angle bisector of the moving mirror and the fixed mirror The beam splitter above is characterized in that it also includes a four-quadrant detector located on the interference plane of the interferometer, a controller, a voice coil linear motor for controlling the linear motion of the moving mirror, and four electromagnetic drivers for controlling the direction of the fixed mirror. The four electromagnetic drivers are installed directly behind the fixed mirror, and are distributed along the X-axis and Y-axis whose diagonals are perpendicular to each other. There are electromagnetic driver 1 and electromagnetic driver 3 on the diagonal of the X-axis, and electromagnetic driver 2 on the diagonal of the Y-axis. and four electromagnetic drivers, the four-quadrant detector feeds back the phase error detected by it to the controller, and then feeds back to four electromagnetic drivers, and the four electromagnetic drivers generate thrust and pull respectively on the fixed mirror according to the received current signal Drive to make it rotate to correct the tilt error angle generated during the movement of the moving mirror, so that the positions of the fixed mirror and the moving mirror are kept perpendicular to each other.
所述四象限探测器包括X探测单元、R探测单元、Y探测单元，所述X探测单元、R探测单元、Y探测单元在探测平面内按象限分布，每个探测单元分布一个象限，所述R探测单元为探测参考单元分布在第一象限内，所述X探测单元、Y探测单元分别分布在第二象限和第四象限内。The four-quadrant detector includes an X detection unit, an R detection unit, and a Y detection unit. The X detection unit, the R detection unit, and the Y detection unit are distributed in quadrants in the detection plane, and each detection unit is distributed in a quadrant. The R detection units are detection reference units distributed in the first quadrant, and the X detection units and Y detection units are respectively distributed in the second quadrant and the fourth quadrant.
本发明的工作原理如下：The working principle of the present invention is as follows:
由于所述动镜在所述音圈直线电机驱动下，很难保证所述动镜在运动过程中不发生倾斜。由于所述动镜发生倾斜，根据相位探测原理，X探测单元、Y探测单元与R探测单元间的干涉相位差与动镜和定镜间倾斜误差角α满足关系：Since the moving mirror is driven by the voice coil linear motor, it is difficult to ensure that the moving mirror does not tilt during movement. Due to the tilt of the moving mirror, according to the principle of phase detection, the interference phase difference between the X detection unit, the Y detection unit and the R detection unit Satisfies the relationship with the tilt error angle α between the moving mirror and the fixed mirror:
当倾斜角误差为α很小时该公式可以近似为公式：When the inclination angle error is small, the formula can be approximated as the formula:
式中X1，X2分别表示R探测单元、X(或Y)探测单元位置坐标。因此，可以认为两探测器间的相位差与倾斜误差角成线性关系。当两探测器间距一定时，倾斜角度的最大值决定了相位差是否处于可测量的±π范围。In the formula, X 1 and X 2 represent the position coordinates of the R detection unit and the X (or Y) detection unit respectively. Therefore, it can be considered that the phase difference between the two detectors has a linear relationship with the tilt error angle. When the distance between the two detectors is constant, the maximum value of the tilt angle determines whether the phase difference is in the measurable ±π range.
根据公式(2)，在已知激光波长下，结合X探测单元、Y探测单元和R探测单元的位置坐标，以及X探测单元、Y探测单元与R探测单元探测到的干涉条纹的强度、频率、相位和调制度，计算出倾斜误差角α的大小和方向。According to the formula (2), under the known laser wavelength, combine the position coordinates of the X detection unit, Y detection unit and R detection unit, and the intensity and frequency of the interference fringes detected by the X detection unit, Y detection unit and R detection unit , phase and modulation degree, calculate the size and direction of the tilt error angle α.
本发明在工作时，当所述动镜在运动过程中产生X轴方向的倾斜误差方向时，X轴上的电磁驱动器一和电磁驱动器三产生推力和拉力使定镜沿着Y轴旋转，来校正X轴方向的倾斜误差。同样，当所述动镜在运动过程中产生Y轴方向的倾斜误差时，Y轴上的电磁驱动器二和电磁驱动器四产生推力和拉力以使定镜沿着X轴旋转，来校正Y轴方向的倾斜误差。最终，所述四象限探测器检测到的相位差和所述四个电磁驱动器产生的倾斜一致对应。所以，只要通过调整四个电磁驱动器对应的驱动单元，就可以使定镜产生抵消动镜在运动过程中的倾斜，使所述四象限探测器中的X探测单元，Y探测单元和R探测单元探测的相位一致，从而实现动态自校正。When the present invention is working, when the moving mirror produces a tilt error direction in the X-axis direction during the movement, the electromagnetic driver 1 and the electromagnetic driver 3 on the X-axis generate thrust and pulling force to make the fixed mirror rotate along the Y-axis, thereby Correct the tilt error in the X-axis direction. Similarly, when the moving mirror produces a tilt error in the Y-axis direction during the movement, the electromagnetic driver 2 and the electromagnetic driver 4 on the Y-axis generate thrust and pulling force to make the fixed mirror rotate along the X-axis to correct the Y-axis direction tilt error. Finally, the phase difference detected by the four-quadrant detector corresponds consistently to the tilts generated by the four electromagnetic drivers. Therefore, as long as the drive units corresponding to the four electromagnetic drivers are adjusted, the fixed mirror can be generated to offset the inclination of the moving mirror during the movement, so that the X detection unit, the Y detection unit and the R detection unit in the four-quadrant detector The detected phases are consistent, thus realizing dynamic self-correction.
本发明的优点：采用定镜动态校正系统可以保证光谱仪的工作性能在一定范围内得到改善，可以使某些动镜运行要求放宽，对电机机械系统的精度要求从零点几微米放宽到几十微米，还有助于克服机械震动、大气扰动和温度变化等带来的影响，能够为光谱仪在一定的不良条件下工作提供了可能性。The advantages of the present invention: the use of the fixed mirror dynamic correction system can ensure that the working performance of the spectrometer is improved within a certain range, and the requirements for the operation of certain moving mirrors can be relaxed, and the precision requirements for the motor mechanical system can be relaxed from a few tenths of a micron to tens of microns , also helps to overcome the influence of mechanical vibration, atmospheric disturbance and temperature change, etc., and can provide the possibility for the spectrometer to work under certain adverse conditions.
附图说明Description of drawings
图1是本发明的定镜自校正装置图。Fig. 1 is a diagram of the fixed mirror self-correcting device of the present invention.
图2是本发明的四象限探测器图。Fig. 2 is a diagram of a four-quadrant detector of the present invention.
图3是本发明的四象限探测器探测的相位图。Fig. 3 is a phase diagram detected by the four-quadrant detector of the present invention.
图4是本发明的电磁驱动器。Fig. 4 is the electromagnetic driver of the present invention.
其中：1、激光器和激光扩束器；2、音圈直线电机；3、动镜；4、分束器；5、四象限探测器；6、定镜；7、电磁驱动器一；8、电磁驱动器二；9、电磁驱动器三；10、电磁驱动器四；11、控制器。Among them: 1. Laser and laser beam expander; 2. Voice coil linear motor; 3. Moving mirror; 4. Beam splitter; 5. Four-quadrant detector; 6. Fixed mirror; 7. Electromagnetic driver 1; 8. Electromagnetic Driver two; 9, electromagnetic driver three; 10, electromagnetic driver four; 11, controller.
具体实施方式Detailed ways
如图1所示，一种干涉仪定镜动态自校正的装置，包括激光器、激光扩束器以及迈克尔逊干涉仪，所述迈克尔逊干涉仪包括相互垂直的动镜3、定镜6以及动镜3和定镜6的角平分线上的分束器4，其特征在于：还包括位于干涉仪干涉平面上的四象限探测器5，所述激光器和激光扩束器1使激光光束扩大，使光斑覆盖整个四象限探测器5的面元上，还包括控制器11、控制动镜3直线运动的音圈直线电机2以及控制定镜6方向的四个电磁驱动器7-10，所述四个电磁驱动器7-10安装在定镜6正后方，呈对角线相互垂直的X轴和Y轴分布，X轴对角线上有电磁驱动器一7和电磁驱动器三9，Y轴对角线上有电磁驱动器二8和电磁驱动器四10，所述四象限探测器5为激光探测器，激光探测器将其探测到的干涉激光相位误差反馈到控制器11，进而反馈到四个电磁驱动器7-10，四个电磁驱动器7-10根据接收到的电流信号，分别产生推力和拉力实现对定镜6的驱动控制，使之旋转来校正动镜3在运动过程中产生的倾斜误差角，使定镜6和动镜3位置保持相互垂直。As shown in Figure 1, a device for dynamic self-correction of a fixed mirror of an interferometer includes a laser, a laser beam expander and a Michelson interferometer, and the Michelson interferometer includes a moving mirror 3, a fixed mirror 6 and a moving mirror perpendicular to each other. The beam splitter 4 on the angle bisector of the mirror 3 and the fixed mirror 6 is characterized in that: it also includes a four-quadrant detector 5 positioned on the interferometer interference plane, and the laser and the laser beam expander 1 expand the laser beam, Make the light spot cover on the face element of whole four-quadrant detector 5, also comprise controller 11, the voice coil linear motor 2 that controls moving mirror 3 linear motions and four electromagnetic drivers 7-10 that control the direction of fixed mirror 6, described four Two electromagnetic drivers 7-10 are installed directly behind the fixed mirror 6, and are distributed along the X-axis and Y-axis whose diagonals are perpendicular to each other. On the diagonal of the X-axis, there are electromagnetic driver 1 7 and electromagnetic driver 3 9, and on the diagonal of the Y-axis There are electromagnetic driver 2 8 and electromagnetic driver 4 10, the four-quadrant detector 5 is a laser detector, and the laser detector feeds back the detected interfering laser phase error to the controller 11, and then feeds back to the four electromagnetic drivers 7 -10, the four electromagnetic drivers 7-10 generate thrust and pull respectively according to the received current signal to realize the driving control of the fixed mirror 6, and make it rotate to correct the inclination error angle generated by the moving mirror 3 during the movement, so that The positions of the fixed mirror 6 and the moving mirror 3 are kept perpendicular to each other.
如图2所示，所述四象限探测器5包括X探测单元、R探测单元、Y探测单元，所述X探测单元、R探测单元、Y探测单元在探测平面内按象限分布，每个探测单元分布一个象限，所述R探测单元为探测参考单元分布在第一象限内，所述X探测单元、Y探测单元分别分布在第二象限和第四象限内，X探测单元、Y探测单元与R探测单元探测到的激光干涉条纹相位差，如图3所示。As shown in Figure 2, the four-quadrant detector 5 includes an X detection unit, an R detection unit, and a Y detection unit, and the X detection unit, the R detection unit, and the Y detection unit are distributed in quadrants in the detection plane, and each detection The units are distributed in one quadrant, the R detection unit is distributed in the first quadrant as the detection reference unit, the X detection unit and the Y detection unit are respectively distributed in the second quadrant and the fourth quadrant, and the X detection unit, the Y detection unit and the The phase difference of the laser interference fringes detected by the R detection unit is shown in Figure 3.
如图4所示，所述四个电磁驱动器7-10在所述定镜6上呈对角线相互垂直的X轴和Y轴分布，所述X轴对角线上有电磁驱动器一7和电磁驱动器三9，所述Y轴对角线上有电磁驱动器二8和电磁驱动器四10。As shown in Figure 4, the four electromagnetic drivers 7-10 are distributed on the fixed mirror 6 with diagonal lines perpendicular to each other on the X-axis and Y-axis, and there are electromagnetic driver-7 and Y-axis on the diagonal of the X-axis. Electromagnetic driver 3 9, electromagnetic driver 2 8 and electromagnetic driver 4 10 on the Y-axis diagonal.
本发明在工作时，当所述动镜3在运动过程中产生X轴方向的倾斜误差方向时，X轴上的电磁驱动器一7和电磁驱动器三9产生推力和拉力使定镜沿着Y轴旋转，来校正X轴方向的倾斜误差。同样，当所述动镜3在运动过程中产生Y轴方向的倾斜误差时，Y轴上的电磁驱动器二8和电磁驱动器四10产生推力和拉力使定镜沿着X轴旋转，来校正Y轴方向的倾斜误差。最终，所述四象限探测器5检测到的相位差和所述四个电磁驱动器7-10产生的倾斜一致对应。所以，只要通过调整所述四个电磁驱动器7-10对应的驱动单元，就可以使所述定镜6产生抵消所述动镜3在运动过程中的倾斜，使所述四象限探测器5中的X探测单元、Y探测单元与R探测单元探测的相位一致，从而实现动态自校正。When the present invention is working, when the moving mirror 3 produces a tilt error direction in the X-axis direction during the movement, the electromagnetic driver 1 7 and electromagnetic driver 3 9 on the X-axis generate thrust and pulling force to make the fixed mirror move along the Y-axis Rotate to correct the tilt error in the X-axis direction. Similarly, when the moving mirror 3 produces a tilt error in the Y-axis direction during the movement, the electromagnetic driver 2 8 and the electromagnetic driver 4 10 on the Y-axis generate thrust and pull to make the fixed mirror rotate along the X-axis to correct the Y The tilt error in the axis direction. Finally, the phase difference detected by the four-quadrant detector 5 corresponds to the tilt generated by the four electromagnetic drivers 7-10. Therefore, as long as the drive units corresponding to the four electromagnetic drivers 7-10 are adjusted, the fixed mirror 6 can be made to offset the inclination of the moving mirror 3 during the movement, so that the four-quadrant detector 5 The phases detected by the X detection unit, Y detection unit and R detection unit are consistent, so as to realize dynamic self-correction.
本发明提供了一种干涉仪定镜动态自校正的装置，本装置结构和方法简单，也比较容易实现，同时，电磁驱动器的响应速度也较快，对于动镜倾斜的校正已经足够。由于本发明采用定镜动态自校正方法，增加了系统的稳定性，提高了抗干扰能力。而且，与其它傅立叶变换红外光谱仪相比，本发明价值之处在于，动态校正系统还可以应用到其它光谱仪的倾斜校正中。The invention provides a device for dynamic self-correction of fixed mirror of interferometer. The device has simple structure and method, and is relatively easy to realize. At the same time, the response speed of the electromagnetic driver is also fast, which is enough for the correction of the tilt of the moving mirror. Because the present invention adopts the fixed mirror dynamic self-correction method, the stability of the system is increased and the anti-interference ability is improved. Moreover, compared with other Fourier transform infrared spectrometers, the value of the present invention lies in that the dynamic correction system can also be applied to the tilt correction of other spectrometers.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806481A (en) * | 2016-03-23 | 2016-07-27 | 复旦大学 | Automatic maladjustment calibration system and method for Michelson spectrometer |
| CN111521267A (en) * | 2020-04-30 | 2020-08-11 | 上海师范大学 | Fourier transform spectrum system and method for calibrating submillimeter wave receiver |
| CN111521267B (en) * | 2020-04-30 | 2022-12-16 | 上海师范大学 | Fourier transform spectrum system and method for calibration of submillimeter wave receiver |
| CN113008132A (en) * | 2021-02-23 | 2021-06-22 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN113008132B (en) * | 2021-02-23 | 2022-05-17 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN114397017A (en) * | 2021-12-17 | 2022-04-26 | 光子集成(温州)创新研究院 | Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer |
| CN114397017B (en) * | 2021-12-17 | 2024-05-03 | 光子集成(温州)创新研究院 | Moving mirror scanning device, michelson interferometer and Fourier infrared spectrometer |
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