CN105157838A - Interferometer fixed mirror dynamic self-correcting device - Google Patents
Interferometer fixed mirror dynamic self-correcting device Download PDFInfo
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- CN105157838A CN105157838A CN201510260556.9A CN201510260556A CN105157838A CN 105157838 A CN105157838 A CN 105157838A CN 201510260556 A CN201510260556 A CN 201510260556A CN 105157838 A CN105157838 A CN 105157838A
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Abstract
The invention discloses an interferometer fixed mirror dynamic self-correcting device, which comprises a laser, a laser beam expander and a Michelson interferometer. The Michelson interferometer includes a moving mirror, a fixed mirror and a beam splitter which are perpendicular to one another. The interferometer fixed mirror dynamic self-correcting device further comprises a detector located on an interference plane of the interferometer, a controller, a voice coil linear motor and four electromagnetic drives. The four electromagnetic drives are installed right behind the fixed mirror and are distributed vertically to one another in diagonal lines. The detector feeds back the detected phase errors to the four electromagnetic drives. The four electromagnetic drives respectively produce thrust and pulling force according to the received current signals to achieve driving control of the fixed mirror so that the fixed mirror can be rotated to correct an error angle of inclination of the moving mirror generated in the moving process and thus positions of the fixed mirror and the moving mirror can remain perpendicular. The invention provides the quick fixed mirror dynamic inclination self-correcting device of a simple structure, and no longer relies on high-precision mechanical bearings or requires repeated regular spectrometer calibration.
Description
Technical field
The invention belongs to optics and horizontal glass and correct field, specifically refer to and keep vertical correction between horizontal glass in Fourier transform spectrometer and index glass.
Background technology
FFIR (FTIR) instrument is owing to having high light flux, low noise, the advantages such as measuring speed is fast, and the advantage that can to carry out that real-time polycomponent detects simultaneously etc. unique, be all widely used in environmental monitoring, chemical analysis, medication components analysis etc.
The core optical component of Fourier transformation infrared spectrometer is classical Michelson interferometer, and classical Michelson interferometer requires index glass and horizontal glass exact vertical.But in actual working environment, because index glass very difficult guarantee in moving process is orthogonal with horizontal glass, makes light path produce the effects such as inclination, reduce interference modulations degree, add spectral noise, limit systematic difference field.
Usually, manually adjust different screw to correct index glass, make horizontal glass and index glass keep upright position, but this method is consuming time, and needs very high technical ability, correspondingly increase production cost and service fee.After Fourier transformation infrared spectrometer runs a period of time, also need to repeat to correct again.In addition, Fourier transformation infrared spectrometer has harsh requirement, if index glass angle of inclination error is less than 1 rad to physical construction, then require that machining accuracy reaches micron dimension, be difficult to reach by machining so merely, simultaneously, if use precision bearing, expense is also very expensive.
At present; the method solving index glass inclination has two kinds; one adopts corner reflector or cat's-eye reflector to form light beam autocollimation; and the system adopting angle mirror or opal mirror to carry out collimating can increase the complicacy of system light path and the load weight of linear electric motors usually, the accuracy requirement of angle mirror or opal mirror and temperature stability etc. require also stricter.Simultaneously, the collimation performance of angle mirror also has certain limit, also can bring certain impact to collimation, such as beam center lateral excursion etc., these impacts will reduce the performances such as the interference modulations degree of interferometer and signal to noise ratio (S/N ratio), and the spectral quality that derivative spectomstry instrument is measured declines.
The another kind of method adopting dynamic calibration, wherein there are two kinds of forms, a kind of form is that dynamic correcting system is arranged on index glass, advantage is that the other parts of interferometer are fixed, system motion parts are more concentrated, shortcoming has been installed dynamic correcting system due to index glass part and become complicated, simultaneously, corrective system can be moved along with the motion of index glass thereupon, vibrations are produced to corrective system, and then affect normal work and the correction accuracy of dynamic correcting system, therefore the dynamic correcting system that adopts of this form is relatively less.
Another kind of form is the method adopting horizontal glass dynamic calibration, and horizontal glass dynamic calibration makes horizontal glass with high-speed tilting mirror exactly, and the wavefront tilt errors according to detecting promptly compensates correction, reaches the object keeping collimation.If do not adopt dynamic correcting method, so require that index glass drive motor can only produce the error of rad magnitude, this, for too harsh drive motor, is almost difficult to accomplish.If adopt horizontal glass dynamic correcting system, index glass service requirement can be made to be loosened to somewhat, and this is very important to drive motor, also easily realizes.
Summary of the invention
The present invention proposes the dynamic self-tuning device of a kind of interferometer horizontal glass, and index glass is when motion process, and laser interferencefringes makes Rapid Variable Design on laser detector.The information such as the intensity recorded by more each detector, frequency, phase place and degree of modulation, accurately obtain two catoptron relative tilt error size and directions, droop error value is converted into control value of electrical signals to transform to horizontal glass control system, realizes real-time dynamic correcting.
The technical solution used in the present invention is:
The dynamic self-tuning device of a kind of interferometer horizontal glass, comprise laser instrument, laser beam expander and Michelson interferometer, described Michelson interferometer comprises orthogonal index glass, beam splitter on the angular bisector of horizontal glass and index glass and horizontal glass, it is characterized in that: also comprise the 4 quadrant detector be positioned on interferometer interference plane, controller, control the voice coil motor of movable reflector straight-line motion and control four electromagnetic drivers in horizontal glass direction, described four electromagnetic drivers are arranged on horizontal glass dead astern, orthogonal X-axis and Y-axis distribution in diagonal line, X-axis diagonal line there are electromagnetic driver one and electromagnetic driver three, Y-axis diagonal line there are electromagnetic driver two and electromagnetic driver four, the phase error feedback that described 4 quadrant detector is detected is to controller, and then feed back to four electromagnetic drivers, four electromagnetic drivers are according to the current signal received, generation thrust and pulling force drive horizontal glass respectively, make it to rotate to correct the droop error angle that index glass produces in motion process, horizontal glass and index glass position is made to keep mutually vertical.
Described 4 quadrant detector comprises X probe unit, R probe unit, Y probe unit, described X probe unit, R probe unit, Y probe unit press quadrant distribution in detection plane, each probe unit distributes a quadrant, described R probe unit is for detection reference cell distribution is in first quartile, and described X probe unit, Y probe unit are distributed in the second quadrant and fourth quadrant respectively.
Principle of work of the present invention is as follows:
Because described index glass is under described voice coil motor drives, be difficult to ensure the not run-off the straight in motion process of described index glass.Due to described index glass run-off the straight, according to phase detection principle, X probe unit, interference phase difference between Y probe unit and R probe unit
and droop error angle α meets relation between index glass and horizontal glass:
When inclination angle error be α very little time this formula can be approximated to be formula:
X in formula
1, X
2represent R probe unit, X (or Y) probe unit position coordinates respectively.Therefore, can think phase differential between two detectors and droop error angle linear.When two detector pitch one timings, the maximal value at angle of inclination determines phase differential and whether is in measurable ± π scope.
According to formula (2), under known laser wavelength, in conjunction with the position coordinates of X probe unit, Y probe unit and R probe unit, and the intensity of the interference fringe that detects of X probe unit, Y probe unit and R probe unit, frequency, phase place and degree of modulation, calculate the size and Orientation of droop error angle α.
Operationally, when described index glass produces the droop error direction of X-direction in motion process, the electromagnetic driver one in X-axis and electromagnetic driver three produce thrust and pulling force makes horizontal glass rotate along Y-axis, carrys out the axial droop error of corrected X in the present invention.Equally, when described index glass produces the droop error of Y direction in motion process, the electromagnetic driver two in Y-axis and electromagnetic driver four produce thrust and pulling force rotates along X-axis to make horizontal glass, corrects the droop error of Y direction.Finally, the inclination that produces of the phase differential that detects of described 4 quadrant detector and described four electromagnetic drivers is consistent corresponding.So, as long as by the driver element that adjustment four electromagnetic drivers are corresponding, horizontal glass just can be made to produce and to offset the inclination of index glass in motion process, make the X probe unit in described 4 quadrant detector, Y probe unit is consistent with the phase place that R probe unit detects, thus realizes dynamic self-correcting.
Advantage of the present invention: adopt horizontal glass dynamic correcting system can ensure that the serviceability of spectrometer improves within the specific limits, some index glass service requirement can be made to relax, from zero point several microns, tens microns are loosened to the accuracy requirement of electromechanics system, also contribute to overcoming the impact that mechanical shock, atmospheric disturbance and temperature variation etc. are brought, possibility can be provided for spectrometer works under certain bad condition.
Accompanying drawing explanation
Fig. 1 is horizontal glass self-correcting installation drawing of the present invention.
Fig. 2 is 4 quadrant detector figure of the present invention.
Fig. 3 is the phase diagram of 4 quadrant detector of the present invention detection.
Fig. 4 is electromagnetic driver of the present invention.
Wherein: 1, laser instrument and laser beam expander; 2, voice coil motor; 3, index glass; 4, beam splitter; 5,4 quadrant detector; 6, horizontal glass; 7, electromagnetic driver one; 8, electromagnetic driver two; 9, electromagnetic driver three; 10, electromagnetic driver four; 11, controller.
Embodiment
As shown in Figure 1, the dynamic self-tuning device of a kind of interferometer horizontal glass, comprise laser instrument, laser beam expander and Michelson interferometer, described Michelson interferometer comprises orthogonal index glass 3, beam splitter 4 on the angular bisector of horizontal glass 6 and index glass 3 and horizontal glass 6, it is characterized in that: also comprise the 4 quadrant detector 5 be positioned on interferometer interference plane, described laser instrument and laser beam expander 1 make laser beam expand, hot spot is made to cover on the bin of whole 4 quadrant detector 5, also comprise controller 11, control the voice coil motor 2 of index glass 3 rectilinear motion and control four electromagnetic driver 7-10 in horizontal glass 6 direction, described four electromagnetic driver 7-10 are arranged on horizontal glass 6 dead astern, orthogonal X-axis and Y-axis distribution in diagonal line, X-axis diagonal line there are electromagnetic driver 1 and electromagnetic driver 39, Y-axis diagonal line there are electromagnetic driver 28 and electromagnetic driver 4 10, described 4 quadrant detector 5 is laser detector, the interference laser phase Error Feedback that laser detector is detected is to controller 11, and then feed back to four electromagnetic driver 7-10, four electromagnetic driver 7-10 are according to the current signal received, produce thrust and the drived control of pulling force realization to horizontal glass 6 respectively, make it to rotate to correct the droop error angle that index glass 3 produces in motion process, horizontal glass 6 and index glass 3 position is made to keep mutually vertical.
As shown in Figure 2, described 4 quadrant detector 5 comprises X probe unit, R probe unit, Y probe unit, described X probe unit, R probe unit, Y probe unit press quadrant distribution in detection plane, each probe unit distributes a quadrant, described R probe unit is for detection reference cell distribution is in first quartile, described X probe unit, Y probe unit are distributed in the second quadrant and fourth quadrant respectively, the laser interferencefringes phase differential that X probe unit, Y probe unit and R probe unit detect, as shown in Figure 3.
As shown in Figure 4, described four electromagnetic driver 7-10 are the orthogonal X-axis of diagonal line and Y-axis distribution on described horizontal glass 6, described X-axis diagonal line there are electromagnetic driver 1 and electromagnetic driver 39, described Y-axis diagonal line have electromagnetic driver 28 and electromagnetic driver 4 10.
Operationally, when described index glass 3 produces the droop error direction of X-direction in motion process, the electromagnetic driver 1 in X-axis and electromagnetic driver 39 produce thrust and pulling force makes horizontal glass rotate along Y-axis, carrys out the axial droop error of corrected X in the present invention.Equally, when described index glass 3 produces the droop error of Y direction in motion process, the electromagnetic driver 28 in Y-axis and electromagnetic driver 4 10 produce thrust and pulling force makes horizontal glass rotate along X-axis, corrects the droop error of Y direction.Finally, the inclination that produces of the phase differential that detects of described 4 quadrant detector 5 and described four electromagnetic driver 7-10 is consistent corresponding.So, as long as by the driver element that described four the electromagnetic driver 7-10 of adjustment are corresponding, described horizontal glass 6 just can be made to produce and to offset the inclination of described index glass 3 in motion process, make the X probe unit in described 4 quadrant detector 5, Y probe unit consistent with the phase place that R probe unit detects, thus realize dynamic self-correcting.
The invention provides the dynamic self-tuning device of a kind of interferometer horizontal glass, this apparatus structure and method simply, also realize than being easier to, and meanwhile, the response speed of electromagnetic driver is also very fast, and the correction of tilting for index glass is enough.Because the present invention adopts the dynamic automatic correcting method of horizontal glass, add the stability of system, improve antijamming capability.And compared with other Fourier transformation infrared spectrometer, the present invention is worth part and is, dynamic correcting system can also be applied in the slant correction of other spectrometer.
Claims (3)
1. the dynamic self-tuning device of interferometer horizontal glass, comprise laser instrument, laser beam expander and Michelson interferometer, described Michelson interferometer comprises orthogonal index glass, beam splitter on the angular bisector of horizontal glass and index glass and horizontal glass, it is characterized in that: also comprise the 4 quadrant detector be positioned on interferometer interference plane, controller, control the voice coil motor of movable reflector straight-line motion and control four electromagnetic drivers in horizontal glass direction, described four electromagnetic drivers are arranged on horizontal glass dead astern, orthogonal X-axis and Y-axis distribution in diagonal line, X-axis diagonal line there are electromagnetic driver one and electromagnetic driver three, Y-axis diagonal line there are electromagnetic driver two and electromagnetic driver four, the phase error feedback that described 4 quadrant detector is detected is to controller, and then feed back to four electromagnetic drivers, four electromagnetic drivers are according to the current signal received, generation thrust and pulling force drive horizontal glass respectively, make it to rotate to correct the droop error angle that index glass produces in motion process, horizontal glass and index glass position is made to keep mutually vertical.
2. the dynamic self-tuning device of a kind of interferometer horizontal glass according to claim 1, it is characterized in that: described 4 quadrant detector comprises X probe unit, R probe unit, Y probe unit, described X probe unit, R probe unit, Y probe unit press quadrant distribution in detection plane, each probe unit distributes a quadrant, described R probe unit is for detection reference cell distribution is in first quartile, and described X probe unit, Y probe unit are distributed in the second quadrant and fourth quadrant respectively.
3. the dynamic self-tuning device of a kind of interferometer horizontal glass according to claim 2, is characterized in that: described X probe unit, interference phase difference between Y probe unit and R probe unit
and the droop error angle α between index glass and horizontal glass meets relation:
X in formula
1, X
2represent R probe unit, X (or Y) probe unit position coordinates respectively.
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| CN201510260556.9A CN105157838A (en) | 2015-05-21 | 2015-05-21 | Interferometer fixed mirror dynamic self-correcting device |
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| CN201510260556.9A CN105157838A (en) | 2015-05-21 | 2015-05-21 | Interferometer fixed mirror dynamic self-correcting device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806481A (en) * | 2016-03-23 | 2016-07-27 | 复旦大学 | Automatic maladjustment calibration system and method for Michelson spectrometer |
| CN111521267A (en) * | 2020-04-30 | 2020-08-11 | 上海师范大学 | Fourier transform spectrum system and method for calibrating submillimeter wave receiver |
| CN113008132A (en) * | 2021-02-23 | 2021-06-22 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN114397017A (en) * | 2021-12-17 | 2022-04-26 | 光子集成(温州)创新研究院 | Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103344609A (en) * | 2013-06-26 | 2013-10-09 | 无锡微奥科技有限公司 | Micro Fourier transform spectrometer |
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2015
- 2015-05-21 CN CN201510260556.9A patent/CN105157838A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103344609A (en) * | 2013-06-26 | 2013-10-09 | 无锡微奥科技有限公司 | Micro Fourier transform spectrometer |
Non-Patent Citations (2)
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| 于立民等: "相位检测法定镜自适应校正技术", 《光学精密工程》 * |
| 杨琨等: "FTIR光谱仪定镜准直误差分析及动态校正", 《华中科技大学学报》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806481A (en) * | 2016-03-23 | 2016-07-27 | 复旦大学 | Automatic maladjustment calibration system and method for Michelson spectrometer |
| CN111521267A (en) * | 2020-04-30 | 2020-08-11 | 上海师范大学 | Fourier transform spectrum system and method for calibrating submillimeter wave receiver |
| CN111521267B (en) * | 2020-04-30 | 2022-12-16 | 上海师范大学 | Fourier transform spectrum system and method for calibration of submillimeter wave receiver |
| CN113008132A (en) * | 2021-02-23 | 2021-06-22 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN113008132B (en) * | 2021-02-23 | 2022-05-17 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN114397017A (en) * | 2021-12-17 | 2022-04-26 | 光子集成(温州)创新研究院 | Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer |
| CN114397017B (en) * | 2021-12-17 | 2024-05-03 | 光子集成(温州)创新研究院 | Moving mirror scanning device, michelson interferometer and Fourier infrared spectrometer |
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