WO2011135943A1

WO2011135943A1 - Optical path correcting device, interferometer, and fourier-transform spectroscopic analyzer

Info

Publication number: WO2011135943A1
Application number: PCT/JP2011/056332
Authority: WO
Inventors: 明小坂; 悟広瀬; 吉宏原
Original assignee: コニカミノルタホールディングス株式会社
Priority date: 2010-04-28
Filing date: 2011-03-17
Publication date: 2011-11-03
Also published as: JP4888614B2; JPWO2011135943A1

Abstract

Disclosed is an optical path correcting device (31) which has a reflecting mirror, a rotating member (51), a piezoelectric element (52) as a displacement member, and a connecting member (56). The rotating member (51) has a supporting surface (51a₁) that supports the reflecting mirror, and the rotating member can rotate with the rotating center (P) at the center. The piezoelectric element (52) is provided on the side opposite to the reflecting mirror with respect to the rotating member (51), and the piezoelectric element can expand/contract in the direction wherein the distance between the rotating member (51) and the piezoelectric element changes. The connecting member (56) connects together an end surface (52S), which is perpendicular to the expanding/contracting direction of the piezoelectric element (52), and the rotating member (51). The connecting member (56) has, when viewed from the expanding/contracting direction, an operating region (56a), which transmits the expansion/contraction of the piezoelectric element (52) to the rotating member (51). The operating region (56a) is narrower than the end surface (52S) of the piezoelectric element (52), and the operating region corresponds to a partial region (52S₁) of the end surface (52S), said partial region being close to the rotating center (P) of the end surface.

Description

Optical path correction device, interferometer, and Fourier transform spectroscopic analysis device

The present invention relates to an optical path correction device that corrects an optical path of light reflected by a reflection mirror by rotating a rotation member that supports the reflection mirror, an interferometer including the optical path correction device, and an interferometer And a Fourier transform spectroscopic analyzer (also referred to as a Fourier transform spectrometer).

In the Michelson two-beam interferometer used for FTIR (Fourier Transform Infrared Spectroscopy), the infrared light emitted from the light source is divided into two directions, a fixed mirror and a moving mirror, by a beam splitter, and the fixed mirror and the moving mirror respectively. A configuration is adopted in which the light reflected and returned is combined into one optical path by the beam splitter. When the moving mirror is moved back and forth (in the direction of the optical axis of the incident light), the optical path difference between the two divided beams changes, so the intensity of the combined light changes according to the amount of movement of the moving mirror. Interference light (interferogram). A spectral distribution of incident light can be obtained by Fourier transforming the interferogram.

In order to exhibit high performance in such FTIR, it is desirable to maintain the best interference efficiency with the interferometer. For this purpose, it is necessary to keep the angular relationship between the fixed mirror and the movable mirror and the beam splitter, respectively. In other words, the spectral accuracy (resolution) of FTIR depends on the amount of movement of the moving mirror. The larger the amount of movement, the higher the resolution. However, the larger the amount of movement of the moving mirror, the higher the translation of the moving mirror. Since a relative inclination (angle difference) is generated between the reflected light from the movable mirror and the reflected light from the fixed mirror, the contrast of the interference fringes is reduced. It is necessary to correct the optical path.

Therefore, in Patent Document 1, for example, as shown in FIG. 15, the fixed mirror 101 is fixed to a fixing base (not shown) via the center leg 102, and the back surface of the fixed mirror 101 (on the side fixed by the center leg 102). 2), two sets of springs 103 and piezoelectric elements 104 are arranged at positions facing each other with the center leg 102 in between. The direction connecting the spring 103 and the piezoelectric element 104 is orthogonal to each other between the sets. In this configuration, when a voltage is applied to each piezoelectric element 104, each piezoelectric element 104 expands and contracts, so that the fixed mirror 101 swings (rotates) vertically and horizontally with the connection position with the center leg 102 as a fulcrum. As a result, the optical path of the light reflected by the fixed mirror 101 can be corrected.

JP-A-64-59019 (see page 2, upper right column, line 10 to lower left column, line 5, line 3, etc.)

By the way, in the interferometer, not only the slight inclination of the moving mirror during measurement (translation), but also the positional deviation of the optical element due to the environmental temperature change during use and the change over time are corrected. For this purpose, it is necessary that the rotation angle of the fixed mirror be increased. In addition, since downsizing of the interferometer is required due to the recent portability of equipment, it is necessary that the rotation angle of the fixed mirror can be increased with a small configuration.

However, in the configuration of Patent Document 1, the piezoelectric element 104 is located away from the center leg 102, and as shown in FIG. 16A, the rotation center P of the fixed mirror 101 and the piezoelectric element 104 are extended. The position Q of the apparent power point is separated. The apparent force point position Q is the position of the force point when the piezoelectric element 104 is considered to be equivalent to pressing the fixed mirror 101 at one point when the piezoelectric element 104 is extended. Is deviated from the center of the end surface (contact surface with the fixed mirror 101) of the piezoelectric element 104, but it can be considered as the center of the end surface for convenience. As the distance between the rotation center P and the apparent force point Q increases, the rotation angle of the fixed mirror 101 decreases with respect to a certain extension amount of the piezoelectric element 104. Therefore, in the positional relationship of FIG. It cannot be said that a large rotation angle of the fixed mirror 101 is secured.

Therefore, as shown in FIG. 16B, if the piezoelectric element 104 is arranged close to the center leg 102, the rotation center P of the fixed mirror 101 and the apparent force point position Q of the piezoelectric element 104 approach each other. It is considered that the fixed mirror 101 can be greatly rotated with respect to a certain extension amount of the piezoelectric element 104. However, in the configuration in which the entire end face of the piezoelectric element 104 is in contact with the fixed mirror 101 as in Patent Document 1, the apparent force point position Q cannot be brought closer to the rotation center P of the fixed mirror 101 any more. The optical path of the reflected light cannot be corrected over a wide angle range by further rotating the fixed mirror 101 with respect to a certain extension amount of the piezoelectric element 104.

If the piezoelectric element 104 is thinned to reduce the area of the end face of the piezoelectric element 104, the apparent force point position Q of the piezoelectric element 104 is made closer to the rotation center P than in the case of FIG. However, if the piezoelectric element 104 is thinned, it is difficult to ensure its strength. Therefore, even if the piezoelectric element 104 is not thinned (in a state where the strength of the piezoelectric element 104 is ensured), it is necessary to increase the rotation angle of the fixed mirror 101 to correct the optical path of the reflected light.

The present invention has been made to solve the above-described problems, and its purpose is to increase the rotation angle of the reflecting mirror while ensuring the strength of a displacement member such as a piezoelectric element with a small configuration. An object of the present invention is to provide an optical path correction apparatus capable of correcting the optical path of reflected light in a wide angle range, an interferometer including the optical path correction apparatus, and a Fourier transform spectroscopic analysis apparatus including the interferometer.

An optical path correction apparatus according to the present invention is an optical path correction apparatus that corrects an optical path of light, and includes a reflection mirror and a support surface that supports the reflection mirror, and is a rotation member that can rotate around a rotation center. A displacement member that is provided on the opposite side to the reflection mirror with respect to the rotation member, and that can be expanded and contracted in a direction in which the distance from the rotation member changes, and an end surface perpendicular to the expansion and contraction direction of the displacement member A connecting member that connects the rotating member, and the connecting member has an action region that transmits expansion / contraction of the displacement member to the turning member when viewed from the extension / contraction direction. Is characterized in that it is narrower than the end surface perpendicular to the direction of expansion and contraction of the displacement member and corresponds to a partial region near the center of rotation on the end surface.

According to the present invention, even when the displacement member itself is arranged at a position close to the center of rotation while the displacement member is configured to be thick so as to ensure strength, the connecting member is interposed via the action region when the displacement member is extended. Thus, the rotating member can be largely rotated. Accordingly, the rotation angle of the rotating member can be increased without increasing the extension amount using a large displacement member, and a large correction range of the optical path of the light reflected by the reflecting mirror can be ensured. As a result, the optical path of the reflected light can be corrected in a wide angle range while having a small configuration. In addition, since the above effect can be obtained with the displacement member configured to be thick, the optical path of the reflected light can be corrected while ensuring the strength of the displacement member.

It is explanatory drawing which shows typically the structure of the outline of the Fourier-transform spectroscopy analyzer of one Embodiment of this invention. (A) is sectional drawing which shows the schematic structure of the drive mechanism which drives the movable mirror of the interferometer of the said Fourier-transform spectroscopy analyzer, (b) and (c) expand the drive part of the said drive mechanism. It is sectional drawing shown. It is a top view which shows the structure of the outline of the reference detector of the said interferometer. It is explanatory drawing which shows the phase signal output based on the detection result in the said reference detector. (A) is a top view which shows the schematic structure of the optical path correction apparatus of Example 1, (b) is a side view of the said optical path correction apparatus. It is a bottom view from the piezoelectric element side of the rotation member of the said optical path correction apparatus. (A) is explanatory drawing which shows the electrical connection relationship of the piezoelectric element of the said optical path correction apparatus, and a voltage application part, (b) is explanatory drawing which shows the waveform of the voltage applied to two piezoelectric elements. It is. It is a side view which shows the attitude | position of the rotation member of the said optical path correction apparatus. It is a top view which shows the schematic structure of the optical path correction apparatus of a comparative example. It is a side view which shows the attitude | position of the rotation member of the said optical path correction apparatus. 6 is a plan view illustrating a schematic configuration of an optical path correction apparatus according to Embodiment 2. FIG. (A) is a side view which shows the attitude | position of the rotation member before the voltage application to each piezoelectric element of the said optical path correction apparatus, (b) is after the voltage application to each piezoelectric element of the said optical path correction apparatus. It is a side view which shows the attitude | position of a rotation member. It is a bottom view from the piezoelectric element side of the rotating member. (A) is a top view which shows the other example of arrangement | positioning of a piezoelectric element, (b) is explanatory drawing which shows the waveform of the voltage applied to the said piezoelectric element. It is a bottom view which shows the structure of the outline of the conventional optical path correction apparatus. (A) is a side view of the said optical path correction apparatus, (b) is a side view which shows the other example of the said optical path correction apparatus.

An embodiment of the present invention will be described below with reference to the drawings.

[Configuration of Fourier transform spectrometer]
FIG. 1 is an explanatory diagram schematically showing a schematic configuration of a Fourier transform spectroscopic analyzer. This apparatus includes an interferometer 1, a calculation unit 2, and an output unit 3. The interferometer 1 is composed of a two-optical path branching Michelson interferometer, the details of which will be described later. The computing unit 2 performs sampling, A / D conversion, and Fourier transform of the signal output from the interferometer 1 to generate a spectrum indicating the light intensity for each wave number (1 / wavelength). The output unit 3 outputs (for example, displays) the spectrum generated by the calculation unit 2. Hereinafter, details of the interferometer 1 will be described.

The interferometer 1 has a spectroscopic optical system 11, a reference optical system 21, and an optical path correction device 31. The optical path correction device 31 corrects the optical path of the light reflected by the reflection mirror based on the inclination of the light between the two optical paths detected by the signal processing unit 26 described later of the reference optical system 21. However, the detailed configuration will be described later.

The spectroscopic optical system 11 includes a spectroscopic light source 12, a collimating optical system 13, a BS (beam splitter) 14, a fixed mirror 15, a moving mirror 16, a condensing optical system 17, a spectroscopic detector 18, and a driving mechanism. 19. Note that the positional relationship between the fixed mirror 15 and the movable mirror 16 with respect to the BS 14 may be reversed.

The spectral light source 12 is a spectral light source, and emits infrared light, for example. The collimating optical system 13 converts the light from the spectral light source 12 into parallel light and guides it to the BS 14. The BS 14 separates incident light, that is, light emitted from the spectral light source 12 into two lights, which are guided to the fixed mirror 15 and the movable mirror 16 and reflected by the fixed mirror 15 and the movable mirror 16, respectively. Each light is combined and emitted as interference light, and is composed of, for example, a half mirror. The condensing optical system 17 condenses the light synthesized and emitted by the BS 14 and guides it to the spectroscopic detector 18. The spectroscopic detector 18 receives the interference light incident from the BS 14 via the condensing optical system 17 and detects an interferogram (interference pattern, interference fringe).

The drive mechanism 19 translates the movable mirror 16 so that the difference (optical path length difference) between the optical path of the light reflected by the fixed mirror 15 and the optical path of the light reflected by the movable mirror 16 changes. For example, a parallel leaf spring type drive mechanism.

2A is a cross-sectional view illustrating a schematic configuration of the drive mechanism 19, and FIGS. 2B and 2C are cross-sectional views illustrating the drive unit 45 of the drive mechanism 19 in an enlarged manner. FIG. The drive mechanism 19 arranges the

leaf springs

41 and 42 in parallel, and arranges two

rigid bodies

43 and 44 between the two

leaf springs

41 and 42 so as to be separated from each other. The movable mirror 16 is formed on the surface on the 43 side, and the drive unit 45 is arranged on the surface on the rigid body 44 side.

The driving unit 45 is constituted by a piezoelectric element, for example. This piezoelectric element has a structure in which a piezoelectric material PZT (lead zirconate titanate) 46 is sandwiched between

electrodes

47 and 48. For example, when the PZT 46 is extended by applying a voltage to the

electrodes

47 and 48, the leaf spring portion 41 is deformed so as to protrude upward (see FIG. 2B). In this case, the movable mirror 16 is displaced downward together with the rigid body 43 (see FIG. 2A). On the other hand, when the PZT 46 is contracted by applying a voltage having a reverse polarity to the

electrodes

47 and 48, the leaf spring portion 41 is deformed so as to protrude downward (see FIG. 2C). In this case, the movable mirror 16 is displaced upward together with the rigid body 43 (see FIG. 2A). In this way, by applying a positive or negative voltage to the

electrodes

47 and 48 and causing the PZT 46 to expand and contract in the horizontal direction, the leaf spring portion 41 can be bent and deformed, and the movable mirror 16 together with the rigid body 43 has a vibration amplitude W. Can be displaced (vibration, resonance). That is, the movable mirror 16 can be translated (translated).

The drive mechanism 19 may be configured not only with the parallel leaf spring type drive mechanism described above but also with an electromagnetic drive mechanism using, for example, a VCM (voice coil motor).

In the above configuration, the light emitted from the spectral light source 12 is converted into parallel light by the collimating optical system 13 and then separated into two light beams by transmission and reflection at the BS 14. One of the separated light beams is reflected by the movable mirror 16, and the other light beam is reflected by the fixed mirror 15. Each of the separated light beams returns to the original optical path and is superposed by the BS 14, and the sample S is irradiated as interference light. At this time, the sample S is irradiated with light while the moving mirror 16 is continuously moved by the drive mechanism 19, and the difference in optical path length from the BS 14 to each mirror (moving mirror 16, fixed mirror 15) is an integer of the wavelength. When it is doubled, the intensity of the superimposed light becomes maximum. On the other hand, when there is a difference between the two optical path lengths due to the movement of the movable mirror 16, the intensity of the superimposed light changes. The light transmitted through the sample S is collected by the condensing optical system 17 and enters the spectroscopic detector 18 where it is detected as an interferogram.

In the calculation unit 2, an interferogram obtained by sampling the detection signal from the spectroscopic detector 18 is A / D converted and Fourier transformed to generate a spectrum indicating the light intensity for each wave number. The above spectrum is output (for example, displayed) by the output unit 3, and the characteristics (material, structure, component amount, etc.) of the sample S can be analyzed based on this spectrum.

Next, the reference optical system 21 will be described. The reference optical system 21 shares part of the configuration with the above-described spectroscopic optical system 11, and in addition to the collimating optical system 13, the BS 14, the fixed mirror 15, the movable mirror 16, and the condensing optical system 17 described above. The reference light source 22, the optical path synthesis mirror 23, the optical path separation mirror 24, the reference detector 25, and the signal processing unit 26 are included.

The reference light source 22 is a light source for detecting the position of the movable mirror 16 and generating a timing signal for sampling in the arithmetic unit 2, and is composed of, for example, a semiconductor laser that emits red light. The optical path combining mirror 23 transmits the light from the spectral light source 12 and reflects the light from the reference light source 22, thereby combining the optical paths of these lights into the same optical path. On the other hand, the optical path separation mirror 24 transmits the light emitted from the spectroscopic light source 11 and incident via the BS 14, and reflects the light emitted from the reference light source 22 and incident via the BS 14. Separate the light path.

The reference detector 25 detects light (interference light) emitted from the reference light source 22 and incident on the optical path separation mirror 24 via the BS 14 and reflected there. The reference detector 25 includes, for example, a quadrant sensor. .

The signal processing unit 26 generates a signal indicating the sampling timing in the calculation unit 2 based on the intensity of the interference light detected by the reference detector 25. Since the generation of this signal can be performed by a known method, the description thereof is omitted here.

Further, the signal processing unit 26 determines the inclination of the light between the two optical paths (the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16 based on the intensity of the interference light detected by the reference detector 25. Relative slope) is detected. For example, as shown in FIG. 3, the four light receiving areas of the reference detector 25 are assumed to be E1 to E4 counterclockwise, and the light spot D of the interference light is located at the center of the entire light receiving area. When the sum of the light intensities detected in the light receiving areas E1 and E2 is A1, and the sum of the light intensities detected in the light receiving areas E3 and E4 is A2, the change in the intensity A1 and A2 over time is shown. Assuming that the signals shown in FIG. 4 are obtained as phase signals, it is possible to detect the light inclination (relative inclination direction and amount of inclination) between the two optical paths based on these signals. In this example, the light is inclined between the two optical paths by an angle corresponding to the phase difference Δ in the direction in which the light receiving regions E1 and E2 and the light receiving regions E3 and E4 are aligned (vertical direction in FIG. 3). . In addition, the intensity | strength of the vertical axis | shaft of FIG. 4 is shown by the relative value.

In the above configuration, the light emitted from the reference light source 22 is reflected by the optical path combining mirror 23, is incident on the BS 14 via the collimating optical system 13, and is split into two light beams there. One light beam separated by the BS 14 is reflected by the movable mirror 16, and the other light beam is reflected by the fixed mirror 15. Each light beam returns to the original optical path and is superimposed on the BS 14, and is irradiated to the sample S as interference light. The The light transmitted through the sample S enters the optical path separation mirror 24 through the condensing optical system 17, is reflected there, and enters the reference detector 25. The signal processing unit 26 detects the inclination of light between the two optical paths based on the intensity of the interference light detected by the reference detector 25. Based on the detection result of the signal processing unit 26, the optical path correction device 31 adjusts the attitude of the fixed mirror 15 (the angle with respect to the BS 14) so as to eliminate the inclination of the light between the two optical paths. The optical path of the reflected light is corrected.

[Details of optical path correction device]
Next, details of the optical path correction device 31 will be described. Here, the optical path correction device 31 will be described with reference to a comparative example while giving two examples.

Example 1
FIG. 5A is a plan view illustrating a schematic configuration of the optical path correction device 31 according to the first embodiment, and FIG. 5B is a side view of the optical path correction device 31. In FIG. 5A, the fixed mirror 15 is not shown for convenience. The optical path correction device 31 includes a fixed mirror 15 as a reflection mirror, a rotating member 51, a piezoelectric element 52, and a connecting member 56.

Rotating member 51 is composed of a first cylindrical portion 51a having a circular end surface as a supporting surface 51a ₁ for supporting the fixed mirror 15, rotatable in the A-A 'direction about the rotational center P Is provided. The first cylindrical portion 51 a is made of, for example, metal (stainless steel or the like), and the diameter thereof is substantially the same as the diameter of the fixed mirror 15.

The piezoelectric element 52 is a displacement member that expands and contracts in the direction BB ′ in which the distance from the rotation member 51 changes in a direction corresponding to the direction AA ′ in which the rotation member 51 rotates by voltage application. The rotating member 51 is provided on the opposite side of the fixed mirror 15. The piezoelectric element 52 is stretchable direction only in some areas 52S ₁ of the perpendicular end surface 52S, and is connected to the second cylindrical portion 57 to be described later of adhesive 53 (see FIG. 8) connected through a member 56 . Thus, the region of the rotating member 51 that faces the end surface 52S of the piezoelectric element 52 is divided into a _first region 51R _{1 that} is closer to the rotation center P and a second region 51R ₂ that is farther from the rotation center P. In this case, the piezoelectric element 52 presses the first region 51R ₁ of the rotating member 51 via the connecting member 56 in the partial region 52S ₁ of the end surface 52S during expansion due to voltage application, thereby rotating the rotating member. 51 can be rotated.

Here, FIG. 6 is a bottom view of the rotating member 51 from the piezoelectric element 52 side. The first region 51R ₁ and the second region 51R ₂ will be described in more detail. At the pivot member 51, when the end surface 52S facing the region of the

piezoelectric element

52 and 51R, the first region 51R ₁ is of the areas 51R, is connected to the end face of the connecting member 56 (second cylindrical portion 57) 6 (the hatched portion in FIG. 6), which is closer to the rotation center P of the rotation member 51 (see FIG. 5B) than the center axis C along the expansion / contraction direction passing through the center of the end face 52S of the piezoelectric element 52. It is a close area. On the other hand, the second region 51R ₂ is a remaining region of the region 51R (a region obtained by subtracting the _first region 51R ₁ ). In this way, the region 51R is divided into a _first region 51R ₁ closer to the rotation center P and a second region 51R ₂ farther from the rotation center P.

In addition, a plurality of (four in this embodiment) piezoelectric elements 52 are provided as described above in order to press different regions of the rotating member 51. The expansion / contraction direction of each of the piezoelectric elements 52a to 52d corresponds to the rotation direction of the rotation member 51. In FIG. 5B, for example, the expansion / contraction direction (BB ′) of the

piezoelectric elements

52a and 52c. Direction) and the rotation direction (AA ′ direction) of the rotation member 51 correspond to each other. The piezoelectric element 52 a and the piezoelectric element 52 c, and the piezoelectric element 52 b and the piezoelectric element 52 d are disposed opposite to an axis passing through the rotation center P of the rotation member 51. Each piezoelectric element 52 is fixed to a fixed base 54 made of a metal such as stainless steel via an epoxy adhesive on the entire end surface opposite to the rotating member 51.

The manner of pressing the rotating member 51 by the expansion and contraction of the piezoelectric element 52 described above can be said to be common to all the piezoelectric elements 52a to 52d. Accordingly, the first region 51R ₁ and the second region 51R ₂ of the rotating member 51 described above are provided corresponding to the piezoelectric elements 52a to 52d, and the piezoelectric elements 52a to 52d are connected to the connecting member when extended. The rotating member 51 is rotated by pressing the corresponding first region 51R ₁ via 56.

Further, the above-described piezoelectric element 52 is connected to the voltage application unit 55. Here, FIG. 7A shows an electrical connection relationship between the piezoelectric element 52 and the voltage application unit 55. The piezoelectric elements 52a to 52d are connected to the voltage application units 55a to 55d through power supply lead wires, respectively. Accordingly, it is possible to control the voltage application for each of the piezoelectric elements 52a to 52d, and thereby it is possible to individually expand and contract each of the piezoelectric elements 52a to 52d.

The connecting member 56 connects the end surface 52S of the piezoelectric element 52 (part of the region 52S ₁ here) and the rotating member 51, and includes a second cylindrical portion 57 and an adhesive 53. Yes. The second cylindrical portion 57 is made of, for example, metal (stainless steel or the like), has a smaller diameter than the first cylindrical portion 51a as the rotating member 51, and is coaxial with the first cylindrical portion 51a on an axis passing through the rotation center P. It is connected to. Four square columnar piezoelectric elements 52 (52a to 52d) arranged in a bundle with a minute gap are fixed to the end surface of the second cylindrical portion 57 opposite to the rotating member 51. . The radius of the second cylindrical portion 57 is set to approximately half the length of one side of the cross section of the piezoelectric element 52.

The adhesive 53 connects a partial region 52S ₁ of the end surface 52S of the piezoelectric element 52 and the second cylindrical portion 57. The connection part (connection part) by the adhesive 53 is an important part in determining the characteristics of the optical path correction device 31, and in this embodiment, the adhesive has an epoxy adhesive having a relatively high Young's modulus and an appropriate elasticity. Epoxy / modified silicone adhesives having the above are appropriately selected according to specifications. Further, since the thickness of the adhesive 53 is also important, it is desirable that spherical plastic beads having a uniform diameter are mixed with the adhesive 53. In this embodiment, as the adhesive 53, an epoxy adhesive mixed with plastic beads having a diameter of 30 μm was used.

Next, the operation of the optical path correction device 31 will be described.
The fixed mirror 15 is rotated by applying a voltage having an opposite phase to the opposing piezoelectric element 52. That is, when the fixed mirror 15 is rotated about the y-axis in FIG. 7A, a voltage whose phase is shifted by 180 ° is applied to the piezoelectric element 52a and the piezoelectric element 52c by the voltage application unit 55a and the voltage application unit 55c. To do. FIG. 7B shows a waveform (52a (s)) of the voltage applied to the piezoelectric element 52a and a waveform (52c (s)) of the voltage applied to the piezoelectric element 52c, respectively. For example, at time T1, it can be seen that a voltage of + v (V) is applied to the piezoelectric element 52a and a voltage of −v (V) is applied to the piezoelectric element 52c.

FIG. 8 is a side view of the optical path correction device 31 and is a side view showing the posture of the rotating member 51 at time T0 (when no voltage is applied) and at time T1. In FIG. 8, the illustration of the piezoelectric element 52b is omitted for convenience. Since a voltage of + v (V) is applied to the piezoelectric element 52a, the piezoelectric element 52a extends by d (mm) (displacement of d (+)). On the other hand, since a voltage of −v (V) is applied to the piezoelectric element 52c, the piezoelectric element 52c contracts by d (mm) (displacement of d (−)). As a result, the piezoelectric element 52a presses the rotating member 51 via the connecting member 56, and the rotating member 51 as a whole rotates around the rotation center P with the rotation angle around the y axis while supporting the fixed mirror 15. It rotates by θ (°). Note that the rotation center P when the rotation member 51 rotates is determined by the mechanical relationship of the constituent members.

On the other hand, when the fixed mirror 15 is rotated around the x axis, a voltage whose phase is shifted by 180 ° may be applied to the piezoelectric element 52b and the piezoelectric element 52d. Accordingly, the rotation member 51 can be rotated about the rotation center P around the rotation axis P with the rotation member 51 supporting the fixed mirror 15 based on the same principle as the rotation about the y-axis.

In the above, the case where the fixed mirror 15 and the rotation member 51 are rotated about the y axis and the x axis has been shown. However, by combining these rotations about the y axis and the x axis, any swing motion can be performed. It is possible to realize.

In this example, + v (V) and -v (V) voltages are applied to each piezoelectric element with GND as a boundary. Alternatively, V ₀ (V) is applied as an offset voltage in a steady state. A voltage larger than the voltage V ₀ (for example, +2 (V)) and a voltage smaller than the voltage V ₀ (for example, 0 (V)) are applied to each piezoelectric element with the voltage V ₀ as a boundary. You may do it.

(Comparative example)
FIG. 9 is a plan view showing a schematic configuration of an optical path correction apparatus of a comparative example. FIG. 10 is a side view of the optical path correction device of the comparative example. When the same voltage as that in FIG. 7B is applied to the

piezoelectric elements

52a and 52c, time T0 (when no voltage is applied) and time It is a side view which shows the attitude | position of the rotation member 51 in T1. In FIG. 10, the piezoelectric element 52b is not shown for convenience.

In the optical path correction device of the comparative example, the diameter of the connecting member 56 (second cylindrical portion 57) is set to be equal to or larger than the diameter of the opening of the cylindrical member containing the bundled four piezoelectric elements 52a to 52d. The piezoelectric element 52 is bonded to the second cylindrical portion 57 via the adhesive 53 over the entire end surface 52S perpendicular to the expansion / contraction direction. Other than this, the configuration is the same as that of the first embodiment.

As in the first embodiment, when the fixed mirror is rotated about the y-axis, a voltage whose phase is shifted by 180 ° may be applied to the piezoelectric element 52a and the piezoelectric element 52c. When the same voltage as that in FIG. 7B is applied to the

piezoelectric elements

52a and 52c, the piezoelectric element 52a extends by d ′ (mm) (displacement of d ′ (+)), and the piezoelectric element 52c has d ′ (mm). Shrinks only (displacement of d ′ (−)). However, d ′ (+) <d (+) and d ′ (−) <d (−), and the rotation angle θ ′ of the rotation member 51 in the comparative example is the same as that in the first embodiment. It becomes smaller than the rotation angle θ of the moving member 51. This is considered to be due to the following reasons.

In the configuration of the comparative example, the piezoelectric element 52 is bonded to the second cylindrical portion 57 of the connecting member 56 over the entire end surface S1, and since the bonding area is larger than that of the first embodiment, the load applied to the piezoelectric element 52 when extended. As a result, the displacement amount of the piezoelectric element 52 is reduced, and the rotation angle is reduced. Further, in the configuration of the comparative example, the distance from the rotation center P to the apparent force point position Q when the piezoelectric element 52 applies a force to the rotation member 51 is larger than that in the first embodiment. The ratio (efficiency) for converting the displacement of the element 52 into the inclination of the rotation member 51 is reduced, and the rotation angle is reduced. The apparent force point position Q is the force point when the piezoelectric element 52 is considered to be equivalent to pressing the second cylindrical portion 57 at one point via the adhesive 53 when the piezoelectric element 52 is extended. Although it is a position and, strictly speaking, it is deviated from the center of the contact surface of the adhesive 53 with the second cylindrical portion 57, it can be considered to be the center of the contact surface for convenience. In the comparative example and the first example, the simulation was performed under the same conditions except for the bonding area between the piezoelectric element 52 and the second cylindrical portion 57. As a result, in the first example, the rotation was about twice that of the comparative example. A corner was obtained.

It should be noted that the use of thin piezoelectric elements in which the total area of the entire end faces 52S of the four piezoelectric elements 52 has the same area as the adhesion area between the piezoelectric elements 52 and the second cylindrical portion 57 in the first embodiment is theoretical. It is considered that the amount of rotation close to that in Example 1 can be obtained. However, such a case is not preferable because insufficient strength due to a decrease in the element area, insufficient force to generate a pressing force, or problems in manufacturing a piezoelectric element (such as a relative increase in processing variation) may occur.

As described above, in this embodiment, the piezoelectric element 52 presses the second cylindrical portion 57 via the adhesive 53 in the partial region 52S ₁ close to the rotation center P, not the entire end surface 52S. The second cylindrical portion 57 presses the rotating member 51. Thereby, even when the piezoelectric element 52 itself is arranged at a position close to the rotation center P, the apparent force point position Q can be made closer to the rotation center P side than the center of the end surface 52S of the piezoelectric element 52. it can. That is, the apparent force point position Q can be made closer to the rotation center P side than the position of FIG. As a result, the second cylindrical portion 57 can press the first region 51R ₁ on the rotation center P side of the rotation member 51, and the rotation member 51 can be largely rotated.

Further, as shown in FIGS. 5B, 6, and 8, in the second cylindrical portion 57, the expansion / contraction of the piezoelectric element 52 is transmitted to the rotating member 51 when viewed from the expansion / contraction direction of the piezoelectric element 52. The region is referred to as an action region 56a. Active area 56a at this time is narrower than the end surface 52S of the piezoelectric element 52, and, located in the corresponding positional relationship between the partial regions 52S ₁ near the rotation center P of the end face 52S, the second cylindrical portion 57 times The end surface that contacts the moving member 51 (the end surface connected to the first cylindrical portion 51 a) is closer to the rotation center P than the center axis C. Accordingly, when extension of the piezoelectric element 52, that is, when the piezoelectric element 52 presses the second cylindrical portion 57 at the end face 52S _1, second cylindrical portion 57, the rotational center P side of the rotating member 51 by the action region 56a it is possible to press the first region 51R ₁ is a region, thereby, it can be said that it is possible to largely rotate the rotating member 51.

Therefore, the rotation angle of the rotation member 51 is increased without increasing the extension amount by using a large piezoelectric element, and the correction range (reflection angle adjustment range) of the optical path of the reflected light at the fixed mirror 15 is increased. It can be secured greatly. As a result, the optical path of the reflected light can be corrected in a wide angle range while having a small configuration. Further, the apparent force point position Q can be brought closer to the rotation center P without making the piezoelectric element 52 thinner, so that the optical path of the reflected light can be corrected while ensuring the strength of the piezoelectric element 52. it can.

Therefore, in the Fourier transform spectroscopic analyzer shown in FIG. 1, even if the translation of the movable mirror 16 is lost when the movement amount of the movable mirror 16 is increased, the spectral detector is obtained by the optical path correction in the optical path correction device 31. It is possible to prevent the contrast of the interference fringes of the interference light detected at 18 from decreasing. Therefore, the spectroscopic analysis based on the spectrum obtained by the Fourier transform in the calculation unit 2 can be performed with high accuracy, and the resolution can be improved by increasing the amount of movement of the movable mirror 16.

In particular, the first region 51R ₁ of the rotation member 51 is a region closer to the rotation center P than the central axis C passing through the center of the end surface 52S of the piezoelectric element 52, and therefore the piezoelectric element 52 is interposed via the connecting member 56. By pressing the first region 51R ₁ of the rotation member 51, the rotation angle of the rotation member 51 can be reliably increased.

In addition, since the rotating member 51 and the piezoelectric element 52 are connected by an adhesive 53 having elasticity, when the piezoelectric element 52 is extended, the rotating member 51 is pressed and rotated using the elasticity of the adhesive 53. The rotating member 51 can be efficiently rotated.

Further, a plurality of piezoelectric elements 52 are provided, and the above-described action area 56 a of the connecting member 56 transmits the respective expansion and contraction of the plurality of piezoelectric elements 52 to the rotating member 51. As a result, it is possible to realize an arbitrary swing motion by expanding and contracting the arbitrary piezoelectric element 52, and the optical path of the reflected light at the fixed mirror 15 can be reliably changed.

Further, when the voltage application unit 55 applies a voltage having an opposite phase to the piezoelectric elements 52 and 52 (for example, the

piezoelectric elements

52a and 52c) arranged to face each other, the rotating member 51 due to the extension of the one piezoelectric element 52a. The rotation of the rotation member 51 is facilitated by the release of the pressure due to the contraction of the other piezoelectric element 52 c, so that the rotation of the rotation member 51 is compared with the configuration in which the rotation member 51 is rotated only by extension of one piezoelectric element 52. The moving angle can be doubled.

In the first embodiment, the example in which the piezoelectric element 52 is used as the displacement member has been described. However, the present invention is not limited to this example. For example, the displacement member is configured by a magnetostrictive element that expands and contracts or elastically deforms by the action of a magnetic force. May be.

In the first embodiment, the four piezoelectric elements 52 are used as the displacement members. However, only one piezoelectric element 52 may be used and the rotation member 51 may be rotated only in one direction. For example, in the configuration shown in FIG. 5A, instead of the four piezoelectric elements 52, one piezoelectric element 52 and three supports (things that do not expand and contract like a piezoelectric element) rotate. It is good also as a structure which rotates the member 51. FIG.

(Example 2)
FIG. 11 is a plan view illustrating a schematic configuration of the optical path correction device 31 according to the second embodiment. FIG. 12A is a side view of the optical path correction device 31 according to the second embodiment, and is a side view showing the posture of the rotating member 51 before voltage application to the

piezoelectric elements

52a and 52c. FIG. 12B is a side view of the optical path correction device 31 according to the second embodiment, and is a side view showing the posture of the rotating member 51 after voltage application to the

piezoelectric elements

52a and 52c. FIG. 12B shows a case where the piezoelectric element 52a is expanded by applying a voltage while the piezoelectric element 52c is contracted.

In the optical path correction device 31 of the present embodiment, the rotating member 51 is configured by a mirror support base that supports the fixed mirror 15. 12A and 12B, the size of the fixed mirror 15 is larger than the size of the rotating member 51, but may be smaller than the size of the rotating member 51.

The piezoelectric element 52 rotates the rotating member 51 by pressing the rotating member 51 via the connecting member 58 when extended. More specifically, when the region of the rotation member 51 facing the end surface 52S is divided into a _first region 51R ₁ closer to the rotation center P and a second region 51R ₂ farther from the rotation center P, The piezoelectric element 52 rotates the rotating member 51 by pressing the first region 51R ₁ of the rotating member 51 via the connecting member 58 when the piezoelectric element 52 is extended by applying a voltage. The first area 51R ₁ is the same as the first embodiment in that the first area 51R ₁ is an area closer to the rotation center P than the center axis C passing through the center of the end face 52S of the piezoelectric element 52. The method of pressing the rotating member 51 as described above is common to all the piezoelectric elements 52.

FIG. 13 is a bottom view of the rotating member 51 from the piezoelectric element 52a side. FIG. 13 shows the positional relationship between the first region 51R ₁ , the second region 51R ₂ , and the central axis C in the region 51R, where the region of the rotating member 51 facing the end surface 52S of the piezoelectric element 52a is 51R. Street. In the present embodiment, the piezoelectric element 52 presses a part of the first region 51R ₁ via the connecting member 58. However, the entire _first region 51R ₁ may be pressed.

Here, the connecting member 58 includes a pedestal portion 59 and a pressing member 60. The pedestal portion 59 is fixed to at least a part of the end surface 52S of the piezoelectric element 52 via an epoxy adhesive. That is, the pedestal portion 59 may be fixed to the entire end surface 52S of the piezoelectric element 52, or may be fixed to a part of the end surface 52S. In the present embodiment, the pedestal portion 59 is a fan-shaped plate-like member in which the shape of the rotating member 51 is projected onto the end face 52S of the piezoelectric element 52. The pressing member 60 is connected to the pedestal portion 59 to transmit the pressing force from the pedestal portion 59 and has elasticity. The pressing member 60 is located closer to the rotation center P of the rotation member 51 than the center of the pedestal portion 59 and is connected to the rotation member 51. In this embodiment, a plurality of (for example, four) piezoelectric elements 52 are provided, and a connecting member 58 is provided corresponding to each piezoelectric element 52 (52a to 52d).

The rotating member 51 and the connecting member 58 can be formed as an integrally molded product of resin, for example. This integrally molded product is a member in which four pressing members 60 extend like a leg from a disk-shaped rotating member 51, and a fan-shaped pedestal portion 59 is provided at each of the tips of the pressing members 60. Since the cross-sectional area of the pressing member 60 is small, elasticity necessary for deformation can be provided.

In the above configuration, when the piezoelectric element 52a is extended by applying a voltage, the piezoelectric element 52a presses and rotates the rotating member 51 via the connecting member 58. At the same time, the piezoelectric element 52c disposed opposite to the piezoelectric element 52a is contracted by voltage application, so that the pressing of the rotating member 51 by the piezoelectric element 52c is released. The rotation is promoted, and the rotation member 51 rotates more greatly.

When the connecting member 58 is configured by the pedestal portion 59 and the pressing member 60 as in the present embodiment, the pressing member 60 is positioned closer to the rotation center P of the rotation member 51 than the center of the pedestal portion 59. Therefore, the position Q of the apparent force point acting on the rotating member 51 via the pedestal 59 and the pressing member 60 when the piezoelectric element 52 is extended is surely located on the rotating center P side. Can be approached. Therefore, even in the configuration of the present embodiment, the rotation angle of the fixed mirror 15 supported by the rotation member 51 can be increased, and the optical path correction of the reflected light can be performed in a wide angle range.

Further, as shown in FIGS. 11 and 12A, in the pressing member 60, an area for transmitting expansion / contraction of the piezoelectric element 52 to the rotating member 51 when viewed from the expansion / contraction direction of the piezoelectric element 52 is an action area 60 a. And Since the pressing member 60 in the present embodiment has a shape obtained by dividing a cylinder into four equal parts along its axial direction, the action region 60a has a fan-shaped cross section. If the thickness of the pressing member 60 changes midway, the action region 60a corresponds to the thinnest cross section (the cross section having the smallest area when viewed from the expansion / contraction direction of the piezoelectric element 52). Will do.

Active area 60a is narrower than the end surface 52S of the piezoelectric element 52, and located at corresponding positions related partial regions 52S ₁ and close to the rotation center P of the end face 52S, the end surface in contact with the rotating member 51, It is at a position closer to the rotation center P than the central axis C. Therefore, when the piezoelectric element 52 is extended, the pressing member 60 can press the first region 51R ₁ that is the region on the rotation center P side of the rotating member 51 by the action region 60a. The member 51 can be greatly rotated. Therefore, it can be said that the optical path of the reflected light can be corrected in a wide angle range by increasing the rotation angle of the fixed mirror 15 supported by the rotation member 51.

In the first embodiment, a partial region 52S ₁ of the end surface 52S of the piezoelectric element 52 corresponds to a contact region with the connecting member 56 (adhesive 53), whereas in the second embodiment, one region 52S1 The region 52S ₁ of the part does not correspond to the contact region with the connecting member 58 (pedestal part 59). That is, the partial region 52S ₁ may be a partial region that is narrower than the end surface 52S and close to the rotation center P on the end surface 52S, and whether or not it corresponds to the contact region with the connecting member 58. Unrelated.

[Other arrangement examples of piezoelectric elements]
FIG. 14A is a plan view showing another arrangement example of the piezoelectric elements 52 as displacement members. As described above, three piezoelectric elements 52 may be used. In this case, the three

piezoelectric elements

52a, 52b, and 52c are arranged so as to be positioned on the vertices of an equilateral triangle, and each piezoelectric element 52 is expanded and contracted, whereby the rotating member and the x-axis direction and the y-direction are The fixed mirror can be rotated.

That is, FIG. 14B shows the waveforms (52a (s), 52b (S), 52c (s)) of the voltages applied to the three

piezoelectric elements

52a, 52b, and 52c by the voltage application unit 55, respectively. Yes. In the case of the arrangement shown in FIG. 14A, a voltage having the same phase is applied to the two

piezoelectric elements

52a and 52b, and a voltage having an opposite phase to the above is applied to the remaining one piezoelectric element 52c. The moving member can be rotated around the x-axis in FIG. In the example of FIG. 14B, at time T1, a voltage of + v (V) is applied to the

piezoelectric elements

52a and 52b, and a voltage of −v (V) is applied to the piezoelectric element 52c. Therefore, it can be seen that voltages having opposite phases are applied to each other between the piezoelectric element 52a and the piezoelectric element 52c, and between the piezoelectric element 52b and the piezoelectric element 52c.

Further, although not shown in the drawing, the rotating member is applied to the y-axis of FIG. 14A by applying voltages having opposite phases to the

piezoelectric elements

52a and 52b but not applying a voltage to the piezoelectric element 52c. It can be rotated around. Furthermore, by adjusting the phase of the voltage applied to the three

piezoelectric elements

52a, 52b, and 52c and combining the rotation around the x axis and the y axis, it becomes possible to realize an arbitrary swing motion, It becomes possible to rotate the rotating member and the fixed mirror in an arbitrary direction.

Therefore, the piezoelectric elements 52 to which voltages having phases opposite to each other are applied to each other with respect to an axis passing through the rotation center P of the rotation member, that is, an axis perpendicular to the x axis and the y axis in FIG. It can be said that it does not need to be opposed. Then, as shown in FIG. 14B, when a voltage having an opposite phase is applied to at least two piezoelectric elements 52 (for example, the

piezoelectric elements

52a and 52c), one piezoelectric element 52 (for example, the piezoelectric element 52c) By the contraction, a force in a direction that prevents the rotation due to the extension of the other piezoelectric element 52 (for example, the piezoelectric element 52a) is removed, and the rotation can be promoted. As a result, the rotation range (rotation angle) of the rotation member can be increased and the rotation direction (reflection) compared to a configuration in which the rotation member is rotated only by extension of one piezoelectric element 52. The surface on which the light is deflected) can be increased.

[About deformation (deflection) of members]
When the piezoelectric element generates force, the elastic member, that is, the adhesive 53 of Example 1 and the pressing member 60 of Example 2 are all deformed, but the amount of deformation is basically “bending of the beam, It is determined according to the formulas of “twist” and “column tension / compression”, and is mainly determined by the shape and Young's modulus of the member.

For example, if the member to be deformed is a “column”, the amount of deformation (compression, tension) increases in the following cases.
(1) The length of the member along the direction of the applied force is long.
(2) The area of the member cross section orthogonal to the direction of the applied force is small.
(3) The Young's modulus of the member is small.

If the member to be deformed is a “beam”, the amount of deformation (bending) increases in the following cases.
(4) The area of the member cross section along the direction of the applied force is small.
(5) The distance from the fulcrum to the power point is long.
(6) The Young's modulus of the member is small.

In the case of Example 1, due to the effects of (2) and (3), the adhesive 53 is largely deformed relative to other members. In the case of Example 2, the effects of (1) and (2) Due to the effect, the pressing member 60 is largely deformed relative to other members. When the piezoelectric element is extended, these members are deformed, whereby the force in the extending direction of the piezoelectric element can be efficiently converted into the force in the rotating direction of the rotating member, and the rotating member can be rotated.

As described above, the optical path correction device, the interferometer, and the Fourier transform spectroscopic analysis device described in the present embodiment can be expressed as follows, thereby producing the following effects.

The optical path correction apparatus according to the present embodiment is an optical path correction apparatus that corrects an optical path of light, and includes a reflection mirror and a support surface that supports the reflection mirror, and is capable of rotating about a rotation center. A member, a displaceable member provided on the opposite side of the rotating member with respect to the rotating member and capable of expanding and contracting in a direction in which a distance between the rotating member and the rotating member changes, and an end surface perpendicular to the expanding and contracting direction of the moving member And a connecting member that connects the rotating member, and the connecting member has an action region that transmits expansion / contraction of the displacement member to the rotating member when viewed from the expansion / contraction direction. The region is configured to be narrower than an end surface perpendicular to the expansion / contraction direction of the displacement member and correspond to a partial region near the rotation center on the end surface.

According to the above configuration, when the displacement member (for example, a piezoelectric element or a magnetostrictive element) is extended, the rotation member is rotated by pressing the rotation member via the connecting member. Thereby, the reflection mirror (for example, a fixed mirror of the interferometer) supported by the rotation member rotates, and the optical path of the light reflected by the reflection mirror is corrected.

Here, the connecting member has an action region for transmitting expansion / contraction of the displacement member to the rotating member. This action area corresponds to a partial area that is narrower than the end face perpendicular to the expansion and contraction direction of the displacement member and close to the center of rotation on the end face. As a result, even when the displacement member itself is arranged thicker to ensure strength and the displacement member itself is arranged at a position close to the rotation center, the connecting member rotates through the action region when the displacement member is extended. By pressing the member, the rotating member can be largely rotated.

Accordingly, the correction range (reflection angle adjustment range) of the optical path of the light reflected by the reflection mirror is increased by increasing the rotation angle of the rotation member without increasing the extension amount using a large displacement member. Can be secured. As a result, the optical path of the reflected light can be corrected in a wide angle range while having a small configuration. Further, since the rotating member can be largely rotated while the displacement member is configured to be thick, the optical path of the reflected light can be corrected while ensuring the strength of the displacement member.

In the optical path correction device according to the present embodiment, an area of the rotating member that faces an end surface perpendicular to the expansion / contraction direction of the displacement member is a first area closer to the rotation center of the rotation member and the rotation center. When divided into a second region farther from the second region, the connecting member may press the first region of the rotating member by the action region when the displacement member is extended.

The connecting member presses the first area close to the rotation center of the rotation member by the action area when the displacement member is extended, so that the effect of largely rotating the rotation member can be obtained with certainty.

In the optical path correction device according to the present embodiment, the action region has an end surface contacting the rotating member of the connecting member, and a central axis along an expansion / contraction direction passing through a center of an end surface perpendicular to the expansion / contraction direction of the displacement member. Alternatively, it may be at a position close to the rotation center.

In this configuration, when the displacement member is extended, the action area of the connecting member can press the area (for example, the first area) close to the rotation center of the rotation member, thereby increasing the rotation member. It can be rotated.

In the optical path correction apparatus according to the present embodiment, the rotating member has a first cylindrical portion having a circular end surface as the support surface, and the connecting member has a smaller diameter than the first cylindrical portion, A second cylindrical portion connected coaxially with the first cylindrical portion along an axis passing through the rotation center, the partial region on the end surface perpendicular to the expansion and contraction direction of the displacement member, and the second cylindrical portion are connected. The second columnar part may have the action region on an end face connected to the first columnar part.

The cylindrical part (first cylindrical part) of the rotating member and the cylindrical part (second cylindrical part) of the connecting member are connected coaxially, and the above-described partial region of the displacement member and the second cylindrical part are bonded with an adhesive. In the connected configuration, the second columnar part can press and rotate the first columnar part via the action region of the end surface connected to the first columnar part.

In the optical path correction device of this embodiment, the adhesive may have elasticity.

In this configuration, since the adhesive is elastically deformed when the displacement member is extended, the force in the extending direction of the displacement member is efficiently converted into the force in the direction of rotating the rotating member to rotate the rotating member. be able to.

In the optical path correction device according to the present embodiment, the connecting member is positioned on a side closer to the rotation center than the center of the pedestal portion, a pedestal portion fixed to at least a part of an end surface perpendicular to the expansion / contraction direction of the displacement member. The pedestal portion and the rotating member are connected to each other, and a pressing member to which a pressing force from the pedestal portion is transmitted when the displacement member is extended is provided. You may have the said action | operation area | region in the end surface connected with a member.

In the configuration in which the connecting member has the pedestal portion and the pressing member, the pressing member has an action area on the end surface connected to the turning member, and therefore the pressing member presses the turning member through the action area. Accordingly, the rotating member can be largely rotated regardless of the size of the pedestal portion.

In the optical path correction device of this embodiment, the pressing member may have elasticity.

In this case, when the displacement member is extended, the pressing member is pressed and elastically deformed through the pedestal portion, so that the force in the extending direction of the displacement member is efficiently converted into the force in the direction of rotating the rotating member, The rotating member can be rotated.

In the optical path correction device of the present embodiment, a plurality of the displacement members may be provided, and the action region of the connection member may transmit the respective expansion and contraction of the plurality of displacement members to the rotation member.

The action area of the connecting member transmits individual expansion / contraction of the plurality of displacement members to the rotation member, whereby the rotation member can be rotated in a direction corresponding to the expansion / contraction of each displacement member. That is, the rotation direction of the rotation member can be changed according to the expansion and contraction of each displacement member, and the optical path (reflection direction) of the reflected light at the reflection mirror can be changed reliably.

In the optical path correction apparatus according to the present embodiment, each of the plurality of displacement members is composed of a piezoelectric element that expands and contracts by applying a voltage, and a voltage applying unit that applies voltages having phases opposite to each other to at least two piezoelectric elements. It may be provided.

When voltages having opposite phases are applied to the two piezoelectric elements, one piezoelectric element presses the rotating member via the connecting member due to its extension, while the other piezoelectric element passes through the connecting member due to its contraction. Release the pressing of all the rotating members. Accordingly, it is possible to promote the rotation by removing the force in the direction that prevents the rotation due to the extension of one of the piezoelectric elements. As a result, the rotation range (rotation angle) of the rotation member can be expanded and the rotation direction (reflected light) compared to a configuration in which the rotation member is rotated only by extension of one piezoelectric element. Can be increased.

In the optical path correction device according to the present embodiment, the two piezoelectric elements to which voltages having phases opposite to each other are applied by the voltage application unit may be disposed opposite to an axis passing through the rotation center of the rotation member. .

In this case, rotation of one piezoelectric element is facilitated by contraction of the other piezoelectric element in the same direction as the rotation of the rotating member due to extension of one of the opposingly arranged piezoelectric elements. As compared with the configuration in which the rotating member is rotated, the rotation range of the rotating member can be doubled.

The interferometer of this embodiment separates the light from the light source and guides it to the movable mirror and the fixed mirror, combines the light reflected by the movable mirror and the fixed mirror, and guides it to the detector as interference light The reflection mirror provided with the optical path correction device of the present embodiment described above and supported by the rotating member of the optical path correction device may be the fixed mirror.

Even when the amount of movement of the movable mirror is increased, the translational property of the movable mirror is lost, and even when a relative inclination occurs in each light that travels along the two optical paths and enters the detector, the optical path correction device of the present invention The fixed mirror rotates and the optical path of the light reflected by the fixed mirror is corrected. Thereby, it can suppress that the contrast of the interference fringe of the interference light detected with a detector falls.

The Fourier transform spectroscopic analyzer of this embodiment may include the above-described interferometer of this embodiment and a calculation unit that Fourier transforms an interferogram obtained by the detector of the interferometer.

According to the interferometer of this embodiment, even if the translation of the moving mirror is lost when the moving amount of the moving mirror is increased, the interference of the interference light detected by the detector is corrected by the optical path correction in the optical path correction device. It can suppress that the contrast of a fringe falls. Therefore, it is possible to accurately perform spectroscopic analysis based on the spectrum obtained by the Fourier transform in the calculation unit. That is, it is possible to improve the resolution by increasing the amount of movement of the movable mirror.

The optical path correction apparatus of the present invention is used for an apparatus that needs to correct the optical path of reflected light at a reflection mirror, such as a laser apparatus or an optical scanning apparatus having a reflection optical system, in addition to an interferometer and a Fourier transform spectroscopic analysis apparatus. Is possible.

DESCRIPTION OF SYMBOLS 1 Interferometer 2 Calculation part 12 Spectral light source 15 Fixed mirror (reflection mirror)
16 Moving mirror 18 Spectral detector 31 Optical path correction device 51 Rotating member 51a First cylindrical portion (rotating member)
51R 1st area | region 51R ₁ 1st area | region 51R ₂ 2nd area | region 52 Piezoelectric element (displacement member)
52a Piezoelectric element (displacement member)
52b Piezoelectric element (displacement member)
52c Piezoelectric element (displacement member)
52d Piezoelectric element (displacement member)
52S End face 52S ₁ area 53 Adhesive (connecting member)
55 voltage application part 55a voltage application part 55b voltage application part 55c voltage application part 55d voltage application part 56 connection member 56a action area 57 second cylindrical part (connection member)
58 connecting member 59 pedestal (connecting member)
60 Pressing member (connecting member)
60a Action area C Center axis P Center of rotation

Claims

An optical path correction device for correcting an optical path of light,
A reflective mirror,
A rotation member having a support surface for supporting the reflection mirror and rotatable about a rotation center;
A displacement member that is provided on the opposite side to the reflecting mirror with respect to the rotating member, and that can be expanded and contracted in a direction in which the interval with the rotating member changes;
A connecting member for connecting the end surface perpendicular to the expansion and contraction direction of the displacement member and the rotating member;
The connecting member has an action region that transmits expansion / contraction of the displacement member to the rotating member when viewed from the expansion / contraction direction;
The optical path correction device according to claim 1, wherein the action area is narrower than an end face perpendicular to an expansion / contraction direction of the displacement member and corresponds to a partial area near the rotation center on the end face.
The region of the rotating member facing the end surface perpendicular to the expansion / contraction direction of the displacement member is divided into a first region closer to the rotation center of the rotation member and a second region farther from the rotation center. When divided,
The optical path correction device according to claim 1, wherein the connecting member presses the first region of the rotating member by the action region when the displacement member is extended.
The action area is closer to the rotation center than the center axis along the expansion / contraction direction passing through the center of the end surface perpendicular to the expansion / contraction direction of the displacement member at the end surface of the connecting member that contacts the rotation member. The optical path correction apparatus according to claim 1, wherein the optical path correction apparatus is provided.
The rotating member has a first cylindrical portion having a circular end surface as the support surface,
The connecting member is
A second cylindrical part having a smaller diameter than the first cylindrical part and connected coaxially with the first cylindrical part at an axis passing through the rotation center;
An adhesive that connects the partial region on the end surface perpendicular to the expansion and contraction direction of the displacement member and the second cylindrical portion;
4. The optical path correction device according to claim 1, wherein the second cylindrical portion has the action region on an end face connected to the first cylindrical portion. 5.
The optical path correction device according to claim 4, wherein the adhesive has elasticity.
The connecting member is
A pedestal portion fixed to at least a part of an end surface perpendicular to the expansion and contraction direction of the displacement member;
A pressing member that is positioned closer to the rotation center than the center of the pedestal, connects the pedestal and the rotation member, and transmits a pressing force from the pedestal when the displacement member is extended; Have
4. The optical path correction device according to claim 1, wherein the pressing member has the action area on an end surface connected to the rotating member. 5.
The optical path correction device according to claim 6, wherein the pressing member has elasticity.
A plurality of the displacement members are provided,
The optical path correction device according to claim 1, wherein the action region of the connecting member transmits individual expansion and contraction of the plurality of displacement members to the rotating member.
Each of the plurality of displacement members is composed of a piezoelectric element that expands and contracts by voltage application,
9. The optical path correction device according to claim 8, further comprising a voltage application unit that applies voltages having opposite phases to at least two piezoelectric elements.
The two piezoelectric elements to which voltages having phases opposite to each other are applied by the voltage application unit are arranged to face each other with respect to an axis passing through a rotation center of the rotation member. Optical path correction device.
An interferometer that separates light from a light source and guides it to a movable mirror and a fixed mirror, combines each light reflected by the movable mirror and the fixed mirror, and guides it to a detector as interference light,
An optical path correction device according to any one of claims 1 to 10,
The interferometer, wherein the reflection mirror supported by the rotating member of the optical path correction device is the fixed mirror.
An interferometer according to claim 11;
A Fourier transform spectroscopic analyzer, comprising: an arithmetic unit that performs Fourier transform on an interferogram obtained by the detector of the interferometer.