JP2018005201A - Actuator device and actuator system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator device capable of accurately controlling an amplitude angle of a mirror part with a simple configuration.SOLUTION: An actuator device 13 comprises: a mirror part 101 having a first reflection part 14 and rotatably moving around predetermined rotation axes Oand O; first drive parts 110a and 110b moving the mirror part 101 around the first axis O; a support part 120 for supporting the first drive parts 110a and 110b; second drive parts 130a and 130b moving the support part 120 around the second axis O; and a current path 151 connected to the first drive parts 110a and 110b and formed at least in a part of the support part 120 and the second drive parts 130a and 130b. At least on a part of the current path 151, a second reflection part 152 reflecting a light beam L' is provided.SELECTED DRAWING: Figure 10

Description

  The present invention relates to an actuator device and an actuator system using the actuator device.

An actuator device such as a piezoelectric actuator using micromachine technology has a high speed and a large movable range, and has a large influence on a scanning angle due to a small difference in amplitude angle.
Therefore, a technique for accurately monitoring the amplitude angle of the movable part of the actuator device is required.

In order to solve such a problem, a method of detecting an amplitude angle using an electrical signal such as a capacitance or a potential difference of a piezoelectric film has been proposed (see, for example, Patent Documents 1 to 5).
However, it is necessary to add a new component on the actuator device for detection, and the current situation is that the point of downsizing and simplification of the movable part of the actuator device has not been solved.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an actuator device that can accurately control the amplitude angle of a movable portion with a simple configuration.

  In order to solve the above-described problems, an actuator device according to the present invention includes a first reflection portion, a mirror portion that can rotate with respect to a predetermined rotation axis, and the mirror portion that is movable about a first axis. A first drive unit; a support unit that supports the first drive unit; a second drive unit that moves the support unit about a second axis; and the support unit connected to the first drive unit. And a current path formed in at least a part of at least one of the second drive parts, and a second reflection part that reflects light rays at least at a part of the current path.

  According to the actuator device of the present invention, it is possible to accurately control the amplitude angle of the mirror portion with a simple configuration.

It is the schematic of an example of an optical scanning system. It is a hardware block diagram of an example of an optical scanning system. It is a functional block diagram of an example of a drive device. It is a flowchart of an example of the process which concerns on an optical scanning system. It is the schematic of an example of the motor vehicle carrying a head up display apparatus. It is a schematic diagram of an example of a head up display device. It is the schematic of an example of the motor vehicle carrying a laser radar apparatus. It is the schematic of an example of a laser radar apparatus. It is the schematic of an example of the packaged optical deflector. It is a top view which shows an example of a structure of an optical deflector. It is P-P 'sectional drawing of the optical deflector shown in FIG. It is Q-Q 'sectional drawing of the optical deflector shown in FIG. It is the schematic diagram which represented typically the deformation | transformation of the 2nd drive part of an optical deflector. It is a graph which shows an example of the waveform of the applied voltage at the time of operation | movement of an optical deflector. It is a figure which shows typically the vibration component which rides on the applied voltage at the time of operation | movement of an optical deflector. It is a perspective view which shows an example of a structure of an optical deflector. It is a figure which shows an example of the method of detecting the displacement angle of an optical deflector. It is a figure which shows an example of a structure of 2nd Embodiment of an optical deflector. It is a figure which shows an example of a structure of 3rd Embodiment of an optical deflector. It is a figure which shows an example of a structure of 4th Embodiment of an optical deflector.

Hereinafter, embodiments of the present invention will be described in detail.
[Optical scanning system]
First, an optical scanning system to which a driving apparatus according to an embodiment of the present invention is applied will be described in detail with reference to FIGS.
FIG. 1 shows a schematic diagram of an example of an optical scanning system.
As shown in FIG. 1, the optical scanning system 10 optically scans the surface to be scanned 15 by deflecting the light emitted from the light source device 12 according to the control of the driving device 11 by the reflecting surface 14 of the optical deflector 13. It is.
The optical scanning system 10 includes a driving device 11, a light source device 12, and an optical deflector 13 having a reflecting surface 14.
The drive device 11 is an electronic circuit unit including, for example, a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The optical deflector 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflective surface 14 and capable of moving the reflective surface 14. The light source device 12 is, for example, a laser device that irradiates a laser. The scanned surface 15 is, for example, a screen.
The drive device 11 generates a control command for the light source device 12 and the optical deflector 13 based on the acquired optical scanning information, and outputs a drive signal to the light source device 12 and the optical deflector 13 based on the control command.
The light source device 12 irradiates the light source based on the input drive signal. The optical deflector 13 moves the reflecting surface 14 in at least one of the uniaxial direction and the biaxial direction based on the input drive signal.
Thus, for example, the control of the driving device 11 based on the image information which is an example of the optical scanning information causes the reflecting surface 14 of the optical deflector 13 to reciprocate in a biaxial direction within a predetermined range and enter the reflecting surface 14. An arbitrary image can be projected on the scanned surface 15 by deflecting the light emitted from the light source device 12 and performing optical scanning.
Details of the optical deflector and details of control by the driving device of the present embodiment will be described later.
Next, an exemplary hardware configuration of the optical scanning system 10 will be described with reference to FIG.
FIG. 2 is a hardware configuration diagram of an example of the optical scanning system 10.
As shown in FIG. 2, the optical scanning system 10 includes a driving device 11, a light source device 12, and an optical deflector 13, and each is electrically connected.
[Driver]
Among these, the drive device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I / F 24, a light source device driver 25, and an optical deflector driver 26.
The CPU 20 is an arithmetic device that reads out programs and data from a storage device such as the ROM 22 onto the RAM 21 and executes processing to realize the overall control and functions of the drive device 11.
The RAM 21 is a volatile storage device that temporarily stores programs and data.
The ROM 22 is a nonvolatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10. Yes.
The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the optical deflector driver 26 in accordance with the processing of the CPU 20.
The external I / F 24 is an interface with, for example, an external device or a network. The external device includes, for example, a host device such as a PC (Personal Computer), a storage device such as a USB memory, an SD card, a CD, a DVD, an HDD, and an SSD. The network is, for example, a car CAN (Controller Area Network), a LAN (Local Area Network), the Internet, or the like. The external I / F 24 may be configured to enable connection or communication with an external device, and the external I / F 24 may be prepared for each external device.
The light source device triver is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 in accordance with an input control signal.
The optical deflector driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the optical deflector 13 in accordance with the input control signal.
In the driving device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I / F 24. The CPU 20 may be configured so that the optical scanning information can be acquired. The optical scanning information may be stored in the ROM 22 or the FPGA 23 in the driving device 11, or a new SSD or the like may be included in the driving device 11. A storage device may be provided, and the optical scanning information may be stored in the storage device.
Here, the optical scanning information is information indicating how the scanned surface 15 is optically scanned. For example, when an image is displayed by optical scanning, the optical scanning information is image data. For example, when optical writing is performed by optical scanning, the optical scanning information is writing data indicating the writing order and writing location. In addition, for example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range for irradiating light for object recognition.
The drive device 11 according to the present embodiment can realize the functional configuration described below by the instruction of the CPU 20 and the hardware configuration shown in FIG.
[Functional configuration of drive unit]
Next, a functional configuration of the driving device 11 of the optical scanning system 10 will be described with reference to FIG. FIG. 3 is a functional block diagram of an example of a driving device of the optical scanning system.
As shown in FIG. 3, the drive device 11 includes a control unit 30 and a drive signal output unit 31 as functions.
The control unit 30 is realized by, for example, the CPU 20, the FPGA 23, and the like, acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs the control signal to the drive signal output unit 31. For example, the control unit 30 constitutes a control unit, acquires image data as optical scanning information from an external device or the like, generates a control signal from the image data by a predetermined process, and outputs the control signal to the drive signal output unit 31.
The drive signal output unit 31 constitutes application means, and is realized by the light source device driver 25, the optical deflector driver 26, and the like, and outputs a drive signal to the light source device 12 or the optical deflector 13 based on the input control signal. . The drive signal output unit 31 (applying unit) may be provided for each target that outputs a drive signal, for example.
The drive signal is a signal for controlling driving of the light source device 12 or the optical deflector 13. For example, in the light source device 12, the driving voltage is used to control the irradiation timing and irradiation intensity of the light source. Further, for example, in the optical deflector 13, the driving voltage is used to control the timing and movable range for moving the reflecting surface 14 of the optical deflector 13. The driving device may acquire the irradiation timing and the light receiving timing of the light source from an external device such as the light source device 12 and the light receiving device, and synchronize these with the driving of the optical deflector 13.
[Optical scanning processing]
Next, a process in which the optical scanning system 10 optically scans the scanned surface 15 will be described with reference to FIG. FIG. 4 is a flowchart of an example of processing according to the optical scanning system.
In step S11, the control unit 30 acquires optical scanning information from an external device or the like.
In step S <b> 12, the control unit 30 generates a control signal from the acquired optical scanning information, and outputs the control signal to the drive signal output unit 31.
In step S <b> 13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the optical deflector 13 based on the input control signal.
In step S <b> 14, the light source device 12 performs light irradiation based on the input drive signal. The optical deflector 13 moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the optical deflector 13, light is deflected in an arbitrary direction and optically scanned.
In the optical scanning system 10, one driving device 11 has a device and a function for controlling the light source device 12 and the optical deflector 13, but the driving device for the light source device and the driving device for the optical deflector Alternatively, it may be provided separately.
In the optical scanning system 10, the function of the control unit 30 and the function of the drive signal output unit 31 of the light source device 12 and the optical deflector 13 are provided in one drive device 11, but these functions are separately provided. For example, a drive signal output device having a drive signal output unit 31 may be provided in addition to the drive device 11 having the control unit 30. In the optical scanning system 10, an optical deflection system that performs optical deflection may be configured by the optical deflector 13 having the reflecting surface 14 and the driving device 11.
[Image projection device]
Next, with reference to FIG. 5 and FIG. 6, an image projection apparatus to which the drive device of this embodiment is applied will be described in detail.
FIG. 5 is a schematic diagram according to an embodiment of an automobile 400 equipped with a head-up display device 500 which is an example of an image projection device. FIG. 6 is a schematic diagram of an example of the head-up display device 500.
The image projection device is a device that projects an image by optical scanning, for example, a head-up display device.
As shown in FIG. 5, the head-up display device 500 is installed, for example, in the vicinity of a windshield (a windshield 401 or the like) of the automobile 400. The projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and travels toward the observer (driver 402) who is the user.
Accordingly, the driver 402 can visually recognize an image or the like projected by the head-up display device 500 as a virtual image. In addition, you may make it the structure which installs a combiner in the inner wall face of a windshield, and makes a user visually recognize a virtual image with the projection light reflected by a combiner.
As shown in FIG. 6, the head-up display device 500 emits laser light from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incident optical system composed of collimator lenses 502, 503, and 504 provided for each laser light source, two dichroic mirrors 505 and 506, and a light amount adjusting unit 507. The light is deflected by an optical deflector 13 having a reflecting surface 14.
The deflected laser light is projected onto a screen through a projection optical system including a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511.
In the head-up display device 500, the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504 and the dichroic mirrors 505 and 506 are unitized as an optical housing by an optical housing.
The head-up display device 500 projects the intermediate image displayed on the intermediate screen 510 onto the windshield 401 of the automobile 400 so that the driver 402 can visually recognize the intermediate image as a virtual image.
The respective color laser beams emitted from the laser light sources 501R, 501G, and 501B are substantially collimated by the collimator lenses 502, 503, and 504, and are combined by the two dichroic mirrors 505 and 506. The combined laser light is two-dimensionally scanned by the optical deflector 13 having the reflecting surface 14 after the light amount is adjusted by the light amount adjusting unit 507. The projection light L that has been two-dimensionally scanned by the optical deflector 13 is reflected by the free-form surface mirror 509, corrected for distortion, and then condensed on the intermediate screen 510 to display an intermediate image. The intermediate screen 510 includes a microlens array in which microlenses are two-dimensionally arranged, and enlarges the projection light L incident on the intermediate screen 510 in units of microlenses.
The optical deflector 13 reciprocally moves the reflecting surface 14 in the biaxial direction, and two-dimensionally scans the projection light L incident on the reflecting surface 14. The drive control of the optical deflector 13 is performed in synchronization with the light emission timings of the laser light sources 501R, 501G, and 501B.
The head-up display device 500 as an example of the image projection device has been described above. However, the image projection device is any device that projects an image by performing optical scanning with the optical deflector 13 having the reflective surface 14. Good.
For example, it is mounted on a projector that is placed on a desk or the like and projects an image on a display screen, or a mounting member that is mounted on an observer's head or the like, and is projected on a reflective transmission screen that the mounting member has, or an eyeball as a screen The present invention can be similarly applied to a head-mounted display device that projects an image.
The image projection apparatus is not only a vehicle or a mounting member, but also, for example, a moving body such as an aircraft, a ship, or a mobile robot, or a work robot that operates a driving target such as a manipulator without moving from the spot. It may be mounted on a non-moving body.
[Object recognition device]
Next, with reference to FIG. 7 and FIG. 8, an object recognition apparatus to which the driving apparatus of the present embodiment is applied will be described in detail.
FIG. 7 is a schematic diagram of an automobile equipped with a laser radar device which is an example of an object recognition device. FIG. 8 is a schematic diagram of an example of a laser radar device.
The object recognition device is a device that recognizes an object in a target direction, for example, a laser radar device.
As shown in FIG. 7, the laser radar device 700 is mounted on, for example, an automobile 701, optically scans the target direction, and receives reflected light from the target object 702 existing in the target direction. 702 is recognized.
As shown in FIG. 8, the laser light emitted from the light source device 12 is reflected through an incident optical system composed of a collimating lens 703 that is an optical system that makes diverging light substantially parallel light, and a plane mirror 704. Scanning is performed in one or two axial directions by an optical deflector 13 having a surface 14.
Then, the object 702 in front of the apparatus is irradiated through a projection lens 705 or the like that is a projection optical system. Driving of the light source device 12 and the optical deflector 13 is controlled by the driving device 11. The reflected light reflected by the object 702 is detected by the photodetector 709.
That is, the reflected light is received by the image sensor 707 via the condenser lens 706 that is a light receiving optical system, and the image sensor 707 outputs a detection signal to the signal processing circuit 708. The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal, and outputs the result to the distance measurement circuit 710.
The distance measuring circuit 710 determines whether the light source device 12 emits the laser beam and the timing at which the photodetector 709 receives the laser beam, or the phase difference for each pixel of the received image sensor 707. The presence / absence of 702 is recognized, and further distance information with respect to the object 702 is calculated.
Since the optical deflector 13 having the reflecting surface 14 is less likely to be damaged than a polygonal mirror and is small in size, it is possible to provide a small and highly durable radar device.
Such a radar radar apparatus is attached to, for example, a vehicle, an aircraft, a ship, a robot, and the like, and can optically scan a predetermined range to recognize the presence or absence of an obstacle and the distance to the obstacle.
In the object recognition apparatus, the laser radar apparatus 700 as an example has been described. However, the object recognition apparatus performs optical scanning by controlling the optical deflector 13 having the reflecting surface 14 with the driving device 11 to detect light. Any device that recognizes the object 702 by receiving reflected light with a vessel may be used, and is not limited to the above-described embodiment.
For example, object information such as shape is calculated from distance information obtained by optically scanning the hand or face, and biometric authentication that recognizes the target object by referring to the record, or recognizes an intruder by optical scanning of the target range The present invention can be similarly applied to a security sensor, a three-dimensional scanner component that calculates and recognizes object information such as a shape from distance information obtained by optical scanning, and outputs it as three-dimensional data.
[Packaging]
Next, with reference to FIG. 9, the packaging of the optical deflector which is an actuator device controlled by the drive device of this embodiment will be described.
FIG. 9 is a schematic diagram of an example of a packaged optical deflector.
As shown in FIG. 9, the optical deflector 13 is attached to an attachment member 801 disposed inside a package member 802 that is a casing, and a part of the package member 802 is covered with a transmission member 803 and hermetically sealed. To be packaged.
Further, an inert gas such as nitrogen is sealed in the package. As a result, deterioration of the optical deflector 13 due to oxidation is suppressed, and durability against changes in the environment such as temperature is improved.
Next, details of the optical deflector used in the above-described optical deflection system, optical scanning system, image projection apparatus, optical writing apparatus, and object recognition apparatus and details of control by the driving apparatus of the present embodiment will be described. .

[Details of optical deflector]
First, the optical deflector will be described in detail with reference to FIGS.

FIG. 10 is a plan view of an optical deflector that can deflect light in two axial directions, ie, an X direction that is a main scanning direction and a Y direction that is a sub-scanning direction. 13 is a cross-sectional view taken along the line PP ′ of FIG. 12 is a cross-sectional view taken along the line QQ ′ of FIG.
In the following description, when the reflecting surface 14 is driven around the first axis O _{1 as} will be described later, the direction in which the light beam L reflected by the reflecting surface 14 moves is defined as the main scanning direction and driven around the second axis O _2. The direction in which the light beam L moves is the sub-scanning direction. Note that the present invention is not limited to this configuration, and the main scanning direction and the sub-scanning direction may be changed as appropriate according to the configuration.

Optical deflector 13 includes a first reflecting part serving mirror portion 101 which reflects the light beam L incident, first connected to the mirror unit 101, and drives the mirror unit 101 to the first shaft O ₁ around parallel to the Y axis 1 Drive units 110a and 110b.
The optical deflector 13 also has a first support part 120 that supports the mirror part 101 and the first drive parts 110a and 110b.
Optical deflector 13 is also connected to the first support part 120, second driving unit 130a to drive the mirror unit 101 and the first support portion 120 to the second axis _{O 2} around parallel to the X axis, and 130b, first 2 has a second support part 140 that is a frame body part that supports the drive parts 130a and 130b.
The first driving portion 110a in the present embodiment, and 110b, a mirror unit 101, and the first supporting portion 120 constitute a movable portion rotates about a second axis _{O 2.} The second driving units 130 a and 130 b support the movable unit with respect to the second support unit 140.
The optical deflector 13 includes the first drive units 110a and 110b, the second drive units 130a and 130b, and the electrode connection unit 150 electrically connected to the drive device, and from the electrode connection unit 150 to the first drive units 110a and 110b. And an extended energization path 151.
The optical deflector 13 is formed on a part of the energizing path 151, in this embodiment, on the surface on the + Z direction side of the first drive units 110 a and 110 b, and is for detection as a second reflection unit that reflects the incident light beam L ′. And a reflection part 152.

As shown in FIG. 11, the optical deflector 13 forms a single SOI (Silicon On Insulator) substrate by an etching process or the like, and on the formed substrate, the reflecting surface 14, the first piezoelectric driving units 112a and 112b, the first Two piezoelectric drive parts 131a to 131f, 132a to 132f, an electrode connection part 150 and the like are integrally formed.
Note that each of the above-described components may be formed after the SOI substrate is formed or during the formation of the SOI substrate.

  As shown in FIGS. 11 and 12, the SOI substrate includes a silicon support layer 161 as a first silicon layer made of, for example, single crystal silicon (Si), a silicon oxide layer 162 formed on the silicon support layer 161, and And a silicon active layer 163 which is a second silicon layer formed on the silicon oxide layer 162.

Since the silicon active layer 163 has a smaller thickness in the Z-axis direction with respect to the X-axis direction or the Y-axis direction, the member formed of the silicon active layer 163 has a function as an elastic part having elasticity.
For example, in the present embodiment, as shown in FIG. 11, the second driving units 130a and 130b and the first driving units 110a and 110b all have the silicon active layer 163 as a base material and serve as an elastic unit. It has the function of

In addition, in the optical deflector 13 in the present embodiment, at least the second support part 140 that is the frame body part and the first support part 120 preferably have the silicon support layer 161.
As described above, since the first support part 120 and the second support part 140 have the silicon support layer 161, the thickness in the Z direction is increased. Therefore, the elasticity of the first support part 120 and the second support part 140 is increased. The accuracy of operation is improved by suppressing deformation.
The detection reflecting portion 152 is a rectangular reflecting portion that is provided in a part of the energizing path 151 and has a width x ₁₅₂ wider than the energizing path 151. In the present embodiment, the energization path 151 is provided in the vicinity of the connection portion between the first support portion 120 and the first drive portions 110a and 110b, but is not limited to this position.
Thus, by widening the width x ₁₅₂ , the reflection area can be increased and the later-described measurement of the displacement angle θ can be performed with higher accuracy, and the electrical resistance can be reduced to reduce the risk of damage due to heat generation. . In addition, it is not limited to this structure, The width _x152 may be the same as the width | variety of the electricity supply path 151. FIG.
In particular, if the detection reflecting portion 152 is formed in the innermost first piezoelectric driving portions 112a and 112b as in the present embodiment, the sub-scanning signal line is unnecessary in the innermost portion. The thickness of unnecessary wiring can be ensured, and the reflection part 152 for detection can be formed more efficiently.
The surface on the + Z side of the detection reflecting portion 152 may be mirror-finished so as to easily reflect light.
Alternatively, the surface of the energization path 151 may be used as it is.

  Note that the SOI substrate is not necessarily flat and may have a curvature or the like. In addition, the member used for forming the optical deflector 13 is not limited to the SOI substrate as long as it is a substrate that can be integrally formed by etching or the like and can be partially elastic.

The mirror unit 101 includes, for example, a disk-shaped mirror unit base 102 and a reflection surface 14 formed on the + Z side surface of the mirror unit base. The mirror part base | substrate 102 is comprised using the silicon | silicone active layer 163, for example.
The reflecting surface 14 is made of a metal thin film containing, for example, aluminum, gold, silver or the like. Further, the mirror portion 101 may have a mirror portion reinforcing rib formed on the surface of the mirror portion base 102 on the −Z side.
The rib is configured using, for example, a silicon support layer 161 and a silicon oxide layer 162, and can suppress distortion of the reflecting surface 14 caused by the operation of the mirror unit 101.

  The first drive units 110a and 110b are connected at one end to the mirror unit base 102, extend in the first axial direction, and movably support the mirror unit 101, and one end to the torsion bar. The first piezoelectric drive units 112a and 112b are connected and the other ends are connected to the inner periphery of the first support unit.

As shown in FIG. 13, the torsion bars 111 a and 111 b are configured using a silicon active layer 163. The first piezoelectric driving units 112 a and 112 b are configured by forming the lower electrode 201, the piezoelectric unit 202, and the upper electrode 203 in this order on the + Z side surface of the silicon active layer 163.
The upper electrode 203 and the lower electrode 201 are configured using, for example, gold (Au) or platinum (Pt). The piezoelectric part 202 is configured using, for example, PZT (lead zirconate titanate) which is a piezoelectric material.

  The first support 120 is a rectangular support that is configured using the silicon support layer 161, the silicon oxide layer 162, and the silicon active layer 163 and is formed so as to surround the mirror unit 101.

The second drive units 130a and 130b have a plurality of second piezoelectric drive units 131a to 131f and 132a to 132f connected so as to be folded back.
One end of each of the second driving units 130 a and 130 b is connected to the outer peripheral part of the first support part 120, and the other end is connected to the inner peripheral part of the second support part 140.
At this time, the connection location between the second drive unit 130a and the first support unit 120, the connection site between the second drive unit 130b and the first support unit 120, the connection site between the second drive unit 130a and the second support unit 140, and the It is desirable that the connection portion between the second driving unit 130 b and the second support unit 140 is point-symmetric with respect to the center of the reflecting surface 14.

  As shown in FIG. 12, the second piezoelectric driving units 130 a and 130 b are configured by forming a lower electrode 201, a piezoelectric unit 202, and an upper electrode 203 in this order on the surface of the silicon active layer 163 on the + Z side. The upper electrode 203 and the lower electrode 201 are configured using, for example, gold (Au) or platinum (Pt). For the piezoelectric part 202, for example, PZT (lead zirconate titanate) which is a piezoelectric material is used.

  The second support unit 140 is configured using, for example, a silicon support layer 161, a silicon oxide layer 162, and a silicon active layer 163, and includes the mirror unit 101, the first drive units 110a and 110b, the first support unit 120, and the second drive. It is a rectangular support formed so as to surround the portions 130a and 130b.

The electrode connection part 150 is formed on the surface on the + Z side of the second support part 140, for example, and the upper electrodes 203 and the lower electrodes 201 of the first piezoelectric driving parts 112a and 112b and the second piezoelectric driving parts 131a to 131f. And it is electrically connected to the drive apparatus 11 shown in FIG. 1 through electrode wirings, such as aluminum (Al).
Each of the upper electrode 203 or the lower electrode 201 may be directly connected to the electrode connecting portion 150 or may be indirectly connected by connecting the electrodes to each other.

  In the present embodiment, the case where the piezoelectric portion 202 is formed only on one surface (the surface on the + Z side) of the silicon active layer 163 that is an elastic portion has been described as an example. May be provided on both the one side and the other side of the elastic portion.

  In addition, as long as the mirror unit 101 can be driven around the first axis or the second axis, the shape of each component is not limited to the shape of the embodiment. For example, the torsion bars 111a and 111b and the first piezoelectric drive units 112a and 112b may have a curved shape.

[Details of control of drive unit]
Next, details of control of the driving device 11 that drives the first driving units 110a and 110b and the second driving units 130a and 130b of the optical deflector will be described.

The piezoelectric unit 202 included in the first driving unit 110a, 110b and the second driving unit 130a, 130b undergoes deformation (for example, expansion and contraction) proportional to the potential of the applied voltage when a positive or negative voltage is applied in the polarization direction. The so-called reverse piezoelectric effect is exhibited.
The first driving units 110a and 110b and the second driving units 130a and 130b move the mirror unit 101 using the above-described inverse piezoelectric effect.

  At this time, the angle at which the light beam incident on the reflecting surface 14 of the mirror unit 101 is deflected is called a deflection angle. When the voltage is not applied to the piezoelectric portion, the deflection angle is set to zero. When the deflection angle is larger than the angle, the deflection angle is positive. When the deflection angle is smaller, the deflection angle is negative.

First, control of the drive device that drives the first drive unit will be described.
In the first driving units 110a and 110b, when a driving voltage is applied in parallel to the piezoelectric units 202 included in the first piezoelectric driving units 112a and 112b via the upper electrode 203 and the lower electrode 201, the respective piezoelectric units 202 are connected. Deform. Due to the action of the deformation of the piezoelectric portion 202, the first piezoelectric driving portions 112a and 112b are bent and deformed.
As a result, the two torsion bars 111a, the driving force about the first axis acts on the mirror portion 101 through a torsion of 111b, the mirror unit 101 is movable in the first axis _{O 1} around. The driving voltage applied to the first driving units 110 a and 110 b is controlled by the driving device 11.

By the driving device 11, the first driving unit 110a, a first piezoelectric driving section 112a which 110b has, by applying in parallel the drive voltage of a predetermined sine waveform 112b, a mirror unit 101, the first shaft _{O 1} around Can be moved at a period of a drive voltage having a predetermined sine waveform.

  In particular, for example, when the frequency of the sinusoidal waveform voltage is set to about 20 kHz, which is about the same as the resonance frequency of the torsion bars 111a and 111b, utilizing the mechanical resonance caused by the torsion of the torsion bars 111a and 111b, The mirror unit 101 can be resonantly oscillated at about 20 kHz.

  Next, control of the drive device 11 that drives the second drive unit will be described with reference to FIGS.

  FIG. 13 is a schematic diagram schematically illustrating driving of the second drive unit 130b of the optical deflector. A region represented by diagonal lines is the mirror unit 101 or the like.

Among the plurality of second piezoelectric drive units 131a to 131f included in the second drive unit 130a, the even-numbered second piezoelectric drive unit counted from the second piezoelectric drive unit (131a) closest to the mirror unit, that is, the second piezoelectric drive unit. The piezoelectric drive units 131b, 131d, and 131f are referred to as a piezoelectric drive unit group A.
Further, among the plurality of second piezoelectric drive units 132a to 132f included in the second drive unit 130b, odd-numbered second piezoelectric drive units counted from the second piezoelectric drive unit (132a) closest to the mirror unit, That is, the second piezoelectric drive units 132a, 132c, and 132e are similarly referred to as a piezoelectric drive unit group A. When the drive voltage is applied in parallel, the piezoelectric drive unit group A is bent so that the piezoelectric drive unit group A is bent and deformed in the same direction as shown in FIG. 101 moves around the second axis.

Of the plurality of second piezoelectric drive units 131a to 131f of the second drive unit 130a, the odd-numbered second piezoelectric drive units counted from the second piezoelectric drive unit (131a) closest to the mirror unit, that is, The second piezoelectric drive units 131a, 131c, and 131e are referred to as a piezoelectric drive unit group B.
Further, among the plurality of second piezoelectric driving units 132a to 132f included in the second driving unit 130b, the even-numbered second piezoelectric driving unit counted from the second piezoelectric driving unit (132a) closest to the mirror unit, That is, 132b, 132d, and 132f are similarly set as the piezoelectric drive unit group B. When the drive voltage is applied in parallel, the piezoelectric drive unit group B bends and deforms in the same direction as shown in FIG. 13B, and the mirror unit so that the negative deflection angle is obtained. 101 movable to the second axis _{O 2} around.

  As shown in FIGS. 13A and 13B, in the second driving unit 130a or 130b, the plurality of piezoelectric units 202 included in the piezoelectric driving unit group A or the plurality of piezoelectric units 202 included in the piezoelectric driving unit group B are bent. By deforming, the movable amount due to the bending deformation can be accumulated, and the deflection angle around the second axis of the mirror unit 101 can be increased.

  For example, as shown in FIG. 10, the second drive units 130 a and 130 b are connected to the first support unit in a point-symmetric manner with respect to the center point of the first support unit. Therefore, when a driving voltage is applied to the piezoelectric driving unit group A, the second driving unit 130a generates a driving force that moves in the + Z direction at the connecting portion between the first support unit and the second driving unit 130a, and the second driving unit 130b has the second driving unit 130b. A driving force that moves in the −Z direction is generated at the connection portion between the first support portion and the second driving portion 130b, and the amount of movement can be accumulated to increase the deflection angle of the mirror portion 101 around the second axis.

  Further, when no voltage is applied, or when the movable amount of the mirror unit 101 by the piezoelectric drive unit group A by voltage application is balanced with the movable amount of the mirror unit 101 by the piezoelectric drive group B by voltage application, the deflection angle Becomes zero.

  As shown in FIG. 16, the drive voltage is applied to the second piezoelectric drive unit so that the mirror unit is driven around the second axis so that FIGS. 13A to 13B are continuously repeated. Can do.

[Drive voltage]
The drive voltage applied to the second drive unit is controlled by the drive device.
With reference to FIG. 14, the drive voltage applied to the piezoelectric drive unit group A (hereinafter referred to as drive voltage A) and the drive voltage applied to the piezoelectric drive unit group B (hereinafter referred to as drive voltage B) will be described. In addition, an application unit that applies the drive voltage A (first drive voltage) is a first application unit, and an application unit that applies the drive voltage B (second drive voltage) is a second application unit.

  FIG. 14A shows an example of the waveform of the drive voltage A applied to the piezoelectric drive unit group A of the optical deflector. FIG. 14B is an example of a waveform B of the drive voltage applied to the piezoelectric drive unit group B of the optical deflector. FIG. 14C is a diagram in which the waveform of the drive voltage A and the waveform of the drive voltage B are superimposed.

As shown in FIG. 14A, the waveform of the drive voltage A applied to the piezoelectric drive unit group A is, for example, a sawtooth waveform, and the frequency is, for example, 60 Hz.
Further, the waveform of the drive voltage A has a rising time period TrA in which the voltage value increases from the minimum value to the next maximum value, and a falling period in which the voltage value decreases from the maximum value to the next minimum value. For example, a ratio of TrA: TfA = 9: 1 is set in advance. At this time, the ratio of TrA to one cycle is referred to as symmetry of drive voltage A.

As shown in FIG. 14B, the waveform of the drive voltage B applied to the piezoelectric drive unit group B is, for example, a sawtooth waveform, and the frequency is, for example, 60 Hz.
In addition, the waveform of the drive voltage B indicates that the time width of the rising period in which the voltage value increases from the minimum value to the next maximum value is TrB, and the falling period in which the voltage value decreases from the maximum value to the next minimum value. For example, a ratio of TfB: TrB = 9: 1 is set in advance. At this time, the ratio of TfB to one cycle is referred to as symmetry of the drive voltage B.
As shown in FIG. 14C, for example, the period TA of the waveform of the drive voltage A and the period TB of the waveform of the drive voltage B are set to be the same.

The sawtooth waveform of the drive voltage A and the drive voltage B is generated, for example, by superimposing sine waves.
In the present embodiment, the drive voltages A and B use a sawtooth waveform drive voltage. However, the present invention is not limited to this, and a drive voltage having a sawtooth waveform with a rounded apex or a sawtooth waveform. It is also possible to change the waveform according to the device characteristics of the optical deflector, such as a drive voltage having a waveform with the straight line region as a curve. In this case, the symmetry is the ratio of the rise time to one cycle or the ratio of the fall time to one cycle. At this time, it may be arbitrarily set whether the rise time or the fall time is used as a reference.
Further, as will be described later, the drive device 11 may store a relationship of displacement between the mirror unit 101 and the detection reflection unit 152 in an initial state such as at the time of factory shipment.
Furthermore, the drive device 11 may calculate a correction value based on the relationship of the displacement, and correct the waveform of the voltage applied to the first drive units 110a and 110b and the second drive units 130a and 130b.
With this configuration, it is possible to correct a minute vibration deviation that occurs between the mirror unit 101 as the first reflection unit and the detection reflection unit 152 as the second reflection unit, which may exist at the time of shipment from the factory.

Such an optical deflector 13 has a high speed, a large movable range, and a large influence on the scanning angle due to a small difference in amplitude angle. Therefore, a technique for accurately controlling the movable portion is required. .
However, in order to reduce the size of the optical deflector 13, it is difficult to add a new detector or the like in order to detect fluctuations in the amplitude angle, for example.
In particular, high-speed vibration due to resonance is often performed particularly in the main scanning direction, and if any member is added to the movable part, the resonance frequency may change.

On the other hand, the vibration in the sub-scanning direction is ideally determined by applying a driving voltage with a sawtooth triangular wave as shown by a broken line in FIG. 15 and moving the light beam L at a predetermined angular velocity. In addition, although the change of the applied voltage shown to Fig.14 (a) was illustrated as a reference example here like FIG. 15, it is not limited to such a waveform.
However, a fluctuation component as shown by a solid line in FIG. 15 may be mounted due to the influence of temperature change, aging change, vibration, and the like, and in that case, it is required to appropriately adjust the drive voltage applied to the amplitude. It has been.

In order to solve such a problem, in this embodiment, as shown in FIG. 16, the optical deflector 13 includes a detection light source 170 that is an irradiation unit that emits vibration detection light L ′ that is a light beam, and an energization path 151. And a detection reflecting portion 152 as a part.
The optical deflector 13 also includes a detection sensor 171 that detects the vibration of the first support unit 120 when the vibration detection light L ′ reflected by the detection reflection unit 152 is incident thereon.

This point will be described in detail.
In the prior art, in order to prevent the light beam L from being reflected by the part other than the mirror part 101 and becoming stray light, the first driving part 110a, 110b on the surface on the + Z side of the upper electrode 203, the first Silicon oxide (SiO 2) is used as an insulating layer on at least one of the + Z side surface of the support portion, the + Z side surface of the upper electrode 203 of the second driving portions 130a and 130b, and the + Z side surface of the second support portion. ₂ ) A film is often formed.
Such a silicon oxide film layer is an insulating layer and is adjusted so that the film thickness becomes an integral multiple of a quarter wavelength so as to be an antireflection film at the wavelength of the light flux L.

  At this time, an electrode wiring is provided on the insulating layer, and the insulating layer is not partially removed or formed as an opening at a connection spot where the upper electrode 203 or the lower electrode 201 and the electrode wiring are connected. This increases the degree of freedom in designing the first drive units 110a and 110b, the second drive units 130a and 130b, and the electrode wiring, and can further suppress a short circuit due to contact between the electrodes. The insulating layer may be any member having an insulating property, and may have a function as an antireflection material.

In the present embodiment, as illustrated in FIG. 12, the energization path 151 is formed on the + Z direction side of the insulating layer 153.
In addition, as shown in FIG. 16, at least a part of the energization path 151 has a detection reflecting portion 152 that reflects the vibration detection light L ′.
With this configuration, the incident vibration detection light L ′ is reflected by the detection reflector 152 formed in a part of the energization path 151 and is incident on the detection sensor 171 attached to the package member 802. 1 The vibration state of the support part 120 is detected.

In the present embodiment, as illustrated in FIG. 17, the detection sensor 171 includes a calculation unit 165.
The calculation unit 165 uses the displacement angle θ of the first support unit 120, the distance Z ₁ between the detection sensor 171 and the optical deflector 13, and the incident position x ₁ of the vibration detection light L ′ to the detection sensor 171. Thus, the value of the displacement angle θ is detected by θ = 1/2 · tan ⁻¹ (x ₁ / Z ₁ ).
Note that, although the detection sensor 171 was having a calculation unit 165, is not limited to such a configuration, based on the information of the incident position x ₁ transmitted from the sensor 171, the external device such as a personal computer It may be used to calculate the displacement angle θ.
FIG. 17B schematically shows that the displacement angle θ of the first support 120 is half of the sum of the incident angle and the reflection angle of the vibration detection light L ′.

Moreover, the reflection part 152 for a detection may be formed in 2nd drive part 131a, 132a arrange | positioned at the 1st support part 120 side most among 2nd drive part 130a, 130b.
With this configuration, since the displacement angle θ in the second drive units 131a and 132a closest to the first support unit 120 is obtained, the value of the displacement angle θ can be accurately calculated by the detection sensor 171.

In the present embodiment, the detection reflector 152 has a width x ₁₅₂ wider than the portion of the energization path 151 excluding the detection reflector 152.
With this configuration, the area of the detection reflecting portion 152 can be increased, and the value of the displacement angle θ can be calculated with high accuracy.

The detection reflecting portion 152 is formed on the outermost layer of the second driving portions 130a and 130b.
With this configuration, the value of the displacement angle θ can be accurately calculated by the detection sensor 171 without being affected by an antireflection film or the like.

In this embodiment, sensor 171 includes a calculation unit 165 which vibration detection light L 'detects the reflection position x ₁ of calculating the displacement of the first supporting portion 120 based on the reflection position x ₁ .
With this configuration, the detection sensor 171 calculates the displacement angle θ by measuring the vibration detection light L ′.

  As a second embodiment of the present invention, as shown in FIG. 18, an example is shown in which the position of the detection reflecting portion 152 is formed between the first support portion 120 and the second drive portions 130a and 130b. .

A beam-shaped connecting portion 133 is formed between the first support portion 120 and the second driving portions 130a and 130b, and another surface is connected to the surface on the most + Z direction side of the connecting portion 133, that is, the outermost surface. A rectangular detection reflecting portion 152 that is wider than the electric path 151 is formed.
In the present embodiment, the same reference numerals are given to the portions common to the first embodiment, and the description thereof is omitted.

In this embodiment, it has the connection part 133 formed between the 2nd drive parts 130a and 130b and the 1st support part 120. FIG. Further, the detection reflection part 152 is formed in the connection part 133.
With this configuration, the displacement angle θ at the position closest to the first support portion 120 is obtained, so that the value of the displacement angle θ can be accurately calculated by the detection sensor 171.

  Further, as a third embodiment of the present embodiment, FIG. 19A shows an optical deflection apparatus 300 that is an actuator system in which the optical deflector 13 shown in the first and second embodiments is packaged.

In the present embodiment, the light deflection apparatus 300 uses the detection light source 170 that is an irradiation unit that irradiates the vibration detection light L ′ toward the detection reflection unit 152 and the reflected light of the vibration detection light L ′ in the detection reflection unit 152. And a detection sensor 171 for detection.
With this configuration, since the detection light source and the detection sensor are fixed as an integrated package, the value of the displacement angle θ can be accurately calculated using the vibration detection light beam L ′.

Further, as a modification of the third embodiment, as shown in FIG. 19B, the light source device 12 may be used as a detection light source without providing the detection light source 170. In such a configuration, the light source device 12 functions as an irradiation unit that irradiates the second reflection unit with the vibration detection light L ′.
In this modification, the optical deflection apparatus 300 includes a package member 802 that surrounds the optical deflector 13 and a transmission member 803 that is disposed on the opening side of the package member 802, that is, on the incident side of the light flux L.
The transmissive member 803 has a function as a splitter that deflects a part of the light beam L toward the reflection part 152 for detection when the light beam L is incident.
With this configuration, a part of the light beam L can be used as the vibration detection light L ′, and it is not necessary to separately make a light source for the vibration detection light L ′. Therefore, the value of the displacement angle θ can be calculated with a simpler configuration. be able to.

By the way, the behavior of the optical deflecting device 300 may show a behavior such as translation or undulation with respect to the amplitude angle per unit voltage or the rotation axis due to a change in usage environment.
In such a case, by merely detecting the reflection of one of the vibration detection light L 'as reflected light, in order to distance Z ₁ between the optical deflector 13 and the detection sensor 171 becomes different, correct The displacement angle θ may not be obtained.
Therefore, as shown in FIG. 19C, a plurality of detection reflection units 152 and detection light sources 170 may be provided, and a plurality of vibration detection lights L ′ may be irradiated to a plurality of different positions.
With this configuration, it is possible to measure not only the rotation amplitude but also a displacement that is caused by a combination of movements of a large number of second drive units 131a to 131f and 132a to 131f, such as so-called translation and undulation.
Therefore, the displacement angle θ of the first support part 120 can be detected with higher accuracy.

As a fourth embodiment, as shown in FIG. 20, an example of an inspection system 350 that performs an inspection after manufacturing the optical deflector 13 is shown.
The inspection system 350 includes an inspection light source 351 that is a light source unit for irradiating the mirror unit 101 with the light beam L, and an inspection optical sensor 352 for detecting the light beam L reflected by the optical deflector 13. ing.
The inspection optical sensor 352 is a PD array in which a plurality of photodiodes (PD) as light receiving portions are arranged in an array so that the position where the light beam L is incident can be seen. The operating state of the mirror unit 101 is detected.

The optical deflector 13 detects the vibration of the first support part 120 when the detection light source 170 disposed inside the package member 802 and the vibration detection light L ′ reflected by the detection reflection part 152 are incident. Sensor 171.
In the present embodiment, the transmissive member 803 is provided with a reflecting surface in a range that does not hinder the projection of the light beam L so as to transmit the light beam L and reflect the vibration detection light L ′.
The transmission member 803 is not limited to such a configuration. For example, the transmission member 803 is processed by reflecting only a part of the light by utilizing the position where the vibration detection light L ′ and the light flux L are in contact with each other. Alternatively, the configuration may be such that only the light beam L is transmitted by utilizing the fact that the wavelengths are different.
With this configuration, the vibration detection light L ′ is reflected by the transmission member 803 and the detection reflection unit 152 and enters the detection sensor 171. Note that a reflective diffraction grating can be used as the reflecting surface, and according to such a configuration, since the light beam can be divided according to the wavelength, the value of the displacement angle θ can be calculated with a simpler configuration.

The detection sensor 171 is a PD array provided so that a change in the incident position of the reflected vibration detection light L ′ can be seen.
In the present embodiment, the drive device 11 stores the vibration detection light L ′, which is a signal received by the detection sensor 171, and the light beam L, which is the signal received by the inspection optical sensor 352, in association with each other. The relationship of movement between the driving units 110a and 110b and the second driving units 130a and 130b is calculated.
With this configuration, even when performing a rotational movement about the first axis _{O 1} and / or the second axis _{O 2,} the first driving portion 110a of the optical deflector 13 is a product, 110b and a second driving unit 130a, The relationship of movement with 130b is calculated as a correction value.
The drive device 11 adjusts the waveform of the voltage applied to the first drive units 110a and 110b and the second drive units 130a and 130b based on the correction value. With this configuration, the operation state of the optical deflector 13 that rotates independently in the biaxial direction can be controlled with higher accuracy.

As mentioned above, although embodiment of this invention and its modification were demonstrated, embodiment mentioned above and its modification show one example of application of this invention. The present invention is not limited to the above-described embodiment and its modifications, and can be embodied by adding various modifications and changes without departing from the scope of the invention.
For example, in the above-described embodiment and its modification, the drive device 11 always applies a drive voltage having a waveform having a positive voltage value to the piezoelectric part. However, the drive voltage is applied to the piezoelectric part and the piezoelectric part is deformed. If it is the structure which arises, it will not be restricted to this. As an example, the driving device 11 may apply a driving voltage having a waveform having a negative voltage value to the piezoelectric unit, or may apply a positive voltage value and a negative voltage value alternately.

  In the above embodiment and its modification, as shown in FIG. 12, the optical deflector 13 is a cantilever type optical deflector in which the first piezoelectric drive units 112a and 112b extend from the torsion bars 111a and 111b in the + X direction. Although it is used, the present invention is not limited to this as long as the reflecting surface 14 is movable by a piezoelectric part to which a voltage is applied.

  In the embodiment and the modification thereof, only the light deflecting device 300 using the single light source device 12 has been described. However, a light deflecting device that performs scanning with a plurality of colors using a plurality of light source devices may be used.

  In the above-described embodiment and its modifications, the first driving unit 110a, 110b and the second driving unit 130a, 130b have been described only in the case of using a piezoelectric driving method using a piezoelectric element. It may be an electromagnetic driving method or an electrostatic driving method using an electrostatic force.

  DESCRIPTION OF SYMBOLS 10 ... Optical scanning system, 11 ... Driving device, 12 ... Light source device, 13 ... Actuator device (optical deflector), 14 ... Reflecting surface, 15 ... Scanned surface, 30 ... Control part (an example of control means), 31 ... Drive signal output unit (an example of an application unit), 101 ... movable unit (mirror unit), 102 ... mirror base, 110a, 110b ... first drive units a, b, 111a, b ... torsion bars a, b, 112a, 112b ... 1st piezoelectric drive part, 120 ... Support body part (1st support part), 130a, 130b ... 2nd drive part, 131a-131f ... 2nd piezoelectric drive part a, 132a-132f ... 2nd piezoelectric drive part b, 140: Frame body (second support part), 150: Electrode connection part, 151 ... Current path, 152 ... Second reflection part (reflection part for detection), 161 ... Silicon support layer, 162 ... Silicon oxide layer, 163 ... Silicon active layer, 65 ... calculation unit, 170 ... irradiation unit (detection light source), 171 ... reflected light detection unit (detection sensor), 201 ... lower electrode, 202 ... piezoelectric unit, 203 ... upper electrode, 300 ... actuator system (light deflection device), 400 ... car, 500 ... head up display device (image projection device), 600 ... optical writing device, 650 ... laser printer (image forming device), 700 ... laser radar device (object recognition device), 802 ... casing ( Package), 803 ... transmission member, L ... light beam, L '... light (vibration detection light)

JP 2012-118125 A Japanese Patent No. 4810354 JP 2008-051904 A JP 2004-245890 A

Claims (10)

A mirror portion having a first reflecting portion and capable of rotating with respect to a predetermined rotation axis;
A first drive unit configured to move the mirror unit about a first axis;
A support member that supports the first drive unit;
A second drive section for moving the support section about the second axis;
An energization path connected to the first drive unit and formed in a part of at least one of the support unit and the second drive unit;
Have
An actuator device having a second reflecting portion that reflects a light beam to at least a part of the energization path.   2. The actuator device according to claim 1, wherein the second reflecting portion is formed on the second driving portion that is disposed closest to the support portion among the second driving portions.   3. The actuator device according to claim 1, wherein the second reflecting portion is formed on an outermost layer of the first driving portion or the second driving portion. A connecting portion formed between the second driving portion and the support portion;
4. The actuator device according to claim 1, wherein the second reflecting portion is formed in the connection portion. 5.   5. The actuator device according to claim 1, wherein the second reflecting portion is wider than a portion of the energizing path excluding the second reflecting portion. The actuator device according to any one of claims 1 to 5,
A housing portion surrounding the actuator device;
And an transmissive member disposed on the incident side of the light flux of the casing. The actuator device according to claim 6,
The transmissive member deflects a part of the light beam toward the second reflecting portion when the light beam is incident. The actuator device according to any one of claims 1 to 7,
An irradiating unit configured to irradiate the light beam toward the second reflecting unit;
A reflected light detection unit for detecting reflected light of the light beam in the second reflection unit;
An actuator system comprising:   The actuator system according to claim 8, wherein the actuator system includes a plurality of the second reflection units, and irradiates a plurality of light beams on the plurality of second reflection units.   The actuator system according to claim 8, wherein the reflected light detection unit includes a calculation unit that detects a reflection position of the light beam and calculates a displacement of the movable unit based on the reflection position.

Images