WO2012169788A3 - 단결정 실리콘 웨이퍼 및 그 제조방법 - Google Patents

단결정 실리콘 웨이퍼 및 그 제조방법 Download PDF

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Publication number
WO2012169788A3
WO2012169788A3 PCT/KR2012/004479 KR2012004479W WO2012169788A3 WO 2012169788 A3 WO2012169788 A3 WO 2012169788A3 KR 2012004479 W KR2012004479 W KR 2012004479W WO 2012169788 A3 WO2012169788 A3 WO 2012169788A3
Authority
WO
WIPO (PCT)
Prior art keywords
silicon wafer
fabrication method
single crystal
crystal silicon
crystalline silicon
Prior art date
Application number
PCT/KR2012/004479
Other languages
English (en)
French (fr)
Other versions
WO2012169788A2 (ko
Inventor
이재연
박면규
홍형표
진영준
Original Assignee
동우화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020120059142A external-priority patent/KR20120135870A/ko
Application filed by 동우화인켐 주식회사 filed Critical 동우화인켐 주식회사
Priority to CN201280024299.3A priority Critical patent/CN103563093B/zh
Publication of WO2012169788A2 publication Critical patent/WO2012169788A2/ko
Publication of WO2012169788A3 publication Critical patent/WO2012169788A3/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

본 발명은 단결정 실리콘 웨이퍼 및 그 제조방법에 관한 것으로서, 보다 상세하게는 한 정점으로부터 바닥면에 이르는 측면이 곡면인 다수의 피라미드로 이루어진 표면을 갖도록 구성됨으로써 태양광의 흡수량을 극대화시키고 광 반사율을 크게 낮춰 광효율을 더욱 높일 수 있는 결정성 실리콘 웨이퍼 및 그 제조방법에 관한 것이다.
PCT/KR2012/004479 2011-06-07 2012-06-07 단결정 실리콘 웨이퍼 및 그 제조방법 WO2012169788A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201280024299.3A CN103563093B (zh) 2011-06-07 2012-06-07 单晶硅片及其制备方法

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR10-2011-0054569 2011-06-07
KR20110054569 2011-06-07
KR10-2012-0059142 2012-06-01
KR1020120059142A KR20120135870A (ko) 2011-06-07 2012-06-01 단결정 실리콘 웨이퍼 및 그 제조방법
KR10-2012-0059966 2012-06-04
KR1020120059966A KR101896619B1 (ko) 2011-06-07 2012-06-04 단결정 실리콘 웨이퍼 및 그 제조방법

Publications (2)

Publication Number Publication Date
WO2012169788A2 WO2012169788A2 (ko) 2012-12-13
WO2012169788A3 true WO2012169788A3 (ko) 2013-03-07

Family

ID=47296592

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/004479 WO2012169788A2 (ko) 2011-06-07 2012-06-07 단결정 실리콘 웨이퍼 및 그 제조방법

Country Status (1)

Country Link
WO (1) WO2012169788A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103346209B (zh) * 2013-06-24 2016-02-17 陕西师范大学 用于增强太阳光利用率的表面修饰基材的修饰方法
CN104393104B (zh) * 2014-10-17 2016-08-31 深圳华中科技大学研究院 一种用于hit太阳电池织构的处理技术
WO2019220440A1 (en) * 2018-05-15 2019-11-21 B.G. Negev Technologies And Applications Ltd., At Ben-Gurion University Surface structure for optical absorption in light absorption devices

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010123759A (ja) * 2008-11-19 2010-06-03 Mitsubishi Electric Corp 太陽電池用基板の粗面化方法および太陽電池セルの製造方法
KR20100125448A (ko) * 2008-03-25 2010-11-30 어플라이드 머티어리얼스, 인코포레이티드 결정성 태양 전지들을 위한 표면 세정 및 텍스처링 프로세스
EP2302701A2 (en) * 2009-09-24 2011-03-30 Rohm and Haas Electronic Materials, L.L.C. Texturing semiconductor substrates

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100125448A (ko) * 2008-03-25 2010-11-30 어플라이드 머티어리얼스, 인코포레이티드 결정성 태양 전지들을 위한 표면 세정 및 텍스처링 프로세스
JP2010123759A (ja) * 2008-11-19 2010-06-03 Mitsubishi Electric Corp 太陽電池用基板の粗面化方法および太陽電池セルの製造方法
EP2302701A2 (en) * 2009-09-24 2011-03-30 Rohm and Haas Electronic Materials, L.L.C. Texturing semiconductor substrates

Also Published As

Publication number Publication date
WO2012169788A2 (ko) 2012-12-13

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