WO2012140797A1

WO2012140797A1 - Laser processing device and laser processing system

Info

Publication number: WO2012140797A1
Application number: PCT/JP2011/073707
Authority: WO
Inventors: 宮崎　孝喜
Original assignee: パナソニックデバイスＳｕｎｘ株式会社
Priority date: 2011-04-12
Filing date: 2011-10-14
Publication date: 2012-10-18
Also published as: JP2012222242A

Abstract

A laser light source unit (24) is provided with a laser oscillator (26), and a beam expander (27) integrally fitted in a state of being positionally adjusted with respect to the laser oscillator (26). The beam expander (27) is secured to an end surface of the laser oscillator (26) where the light emission port is positioned. An opening (33a) is provided to a casing (33) which houses a galvano scanner (36) in a location corresponding to the beam expander (27). The laser light source unit (24) and a scanner unit (25) are joined to each other via a packing (50) in a state in which the beam expander (27) is inserted into the casing (33) via the opening (33a). In other words, the laser light source unit (24) is configured so as to be attachable to and detachable from the scanner unit (25) in a state in which the beam expander (27) can be inserted into the casing.

Description

Laser processing apparatus and laser processing system

The present invention relates to a laser processing apparatus and a laser processing system for processing a workpiece by irradiating a laser beam.

As this type of laser processing system, for example, Patent Document 1 discloses a laser marking apparatus that prints characters such as letters and symbols by irradiating a workpiece with laser light. Usually, the laser processing apparatus includes a controller and a head unit controlled by a signal from the controller. The head unit performs processing by irradiating the processing target with laser light.

In the laser processing system described in Patent Document 1, parts replacement can be easily performed in units. In other words, a laser light source including an oscillator power supply and a laser oscillator is housed in a common housing and configured as a laser emission unit. Further, a galvano scanner that changes the traveling direction of the laser light from the laser emitting unit and scans the irradiation position of the laser light onto the object to be processed is housed in a separate housing to constitute a scanning unit. These units are interchangeable with the same type or different types.

Also, normally, a laser processing apparatus is provided with a beam expander between a laser oscillator and a galvano scanner. The laser light emitted from the laser oscillator is emitted to the galvano scanner after the beam diameter is expanded by the beam expander (see, for example, Patent Document 2).

JP 2004-351516 A JP 2006-239703 A

Incidentally, in the laser processing apparatus described in Patent Document 2, the laser oscillator and the beam expander are separate parts. For this reason, when a defect or failure occurs in the laser oscillator and the laser oscillator is replaced with a new one, it is necessary to adjust the position of the laser oscillator and the beam expander. If this position adjustment is slightly deviated, the laser irradiation position for finally irradiating the workpiece is greatly deviated. For this reason, this position adjustment operation needs to be performed with high accuracy, and is a very troublesome operation.

An object of the present invention is to provide a laser processing apparatus and a laser processing system capable of exchanging parts of a laser oscillator without complicated adjustment of the position between the laser oscillator and the beam expander.

In order to achieve the above object, according to one aspect of the present invention, a laser oscillator that emits laser light from a light exit, a beam expander that expands the diameter of the laser light emitted from the laser oscillator, and a beam expander There is provided a laser processing apparatus including a galvano scanner that reflects laser light that has passed through a panda by a mirror to change the traveling direction of the laser light, and a converging lens that converges the laser light from the galvano scanner. The laser processing apparatus is a laser light source unit that houses a laser oscillator and has a surface on which the light emission port of the laser oscillator is disposed, and the beam expander is assembled integrally with the surface on which the light emission port of the laser oscillator is positioned. And a scanner unit in which an opening facing the beam expander is formed in the casing. The laser light source unit is detachably attached to the housing of the scanner unit.

According to this configuration, the laser light source unit is detachably attached to the scanner unit in a state where the beam expander is inserted into the housing of the scanner unit. For this reason, when the laser oscillator fails, the laser light source unit in which the laser oscillator and the beam expander are assembled together can be replaced. Therefore, parts of the laser oscillator can be replaced without complicated adjustment of the position between the laser oscillator and the beam expander.

It is preferable that the laser light source unit is attached to the casing in a state where the beam expander is inserted into the casing through the opening of the casing.

According to this configuration, the laser light source unit is attached to the scanner unit casing in a state where the beam expander is inserted into the casing through the opening. The enlargement of the laser processing apparatus can be suppressed as much as possible.

The laser light source unit is preferably attached to the housing of the scanner unit via an annular seal member arranged around the opening.

According to this configuration, the laser light source unit is attached to the scanner unit housing via the annular seal member disposed around the opening, so that dust can be prevented from entering the scanner unit housing. it can.

A protective cover for covering the beam expander is further provided, the opening of the housing has a size capable of receiving the protective cover, the beam expander has an adjusting operation means for adjusting the centering of the beam, It is preferable to have a hole or notch at a position facing the beam expander adjustment operation means.

According to this configuration, the beam expander can be protected by the protective cover in a state where the operation of the beam expander adjusting operation means, for example, the optical axis centering adjustment and the focus adjustment can be performed through the hole or notch. In addition, it is possible to avoid the situation in which the adjustment operation means comes into contact with other members and the adjustment of the beam expander is shifted by the protective cover.

The laser processing apparatus has a casing including a base plate. The laser source unit and the scanner unit are assembled together on the base plate, and the scanner unit is positioned on the base plate with respect to the optical axis of the beam expander. Preferably, at least one positioning pin is provided.

According to this configuration, the laser light source unit and the scanner unit are both assembled to the base plate constituting the housing of the laser processing apparatus. At this time, the scanner unit can be positioned with respect to the optical axis of the beam expander by a positioning pin provided on the base plate.

The laser light source unit and the scanner unit are housed in a housing, and the housing is fixed to the base member so as to cover the laser light source unit and the scanner unit, and a base member in which the laser light source unit and the scanner unit are assembled in common. And a housing cover.

According to this configuration, the laser light source unit and the scanner unit can be protected by the housing cover.

The converging lens has an incident side lens surface on which the laser light from the galvano scanner is incident and an exit side lens surface that emits the condensed laser light, and the incident side lens surface is inside the housing. It is preferable that the converging lens is assembled to the housing so that the lens surface on the emission side faces the outside of the housing.

According to this configuration, since the lens surface on the incident side of the converging lens is accommodated in the housing, dust hardly adheres to the lens surface on the incident side. Moreover, since the dust adhering to the lens surface on the exit side of the converging lens faces the outside of the housing, it can be wiped off.

It is preferable to further include shutter means that is accommodated in the housing and selectively switches between passing and blocking of the laser beam from the beam expander to the galvano scanner.

According to this configuration, the passage and blocking of the laser beam can be selectively controlled by the shutter means.

According to another aspect of the present invention, there is provided a processing system including the laser processing apparatus and a controller that outputs power and a control signal to the laser processing apparatus through a cable. According to this processing system, the same effect as the laser processing apparatus can be obtained.

According to the present invention, it is possible to replace parts of the laser oscillator without complicated adjustment of the position between the laser oscillator and the beam expander.

1 is a perspective view showing a schematic configuration of a laser marking device according to an embodiment of the present invention. The block diagram which shows schematic structure of the laser marking apparatus of FIG. The disassembled perspective view which shows the head unit of the laser marking apparatus of FIG. FIG. 4 is an exploded perspective view showing a laser light source unit and a scanner unit of the head unit of FIG. 3.

Hereinafter, a laser marking apparatus according to an embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 1, a laser marking device 1 as a laser processing system includes a head unit (marker head) 2 as a laser processing device that emits laser light L, and a head unit via a power cable 3 and a signal cable 4. 2 and a controller 5 connected to 2. A console 7 is connected to the controller 5 via an electric cable 6. The head unit 2 includes a main body 11 having a substantially rectangular parallelepiped shape. A window 8 for emitting the laser beam L is formed on the lower surface of the main body 11. The head unit 2 is installed so that the window 8 faces the machining surface (marking surface) Wa of the workpiece W.

For example, the laser marking device 1 irradiates the processing surface Wa of the processing object W conveyed by the conveying belt 9 with the laser light L, and thereby the desired character on the processing surface Wa by the energy of the irradiated laser light, Mark characters such as figures and symbols. In FIG. 1, a square area indicated by a two-dot chain line represents a maximum range Amax in which printing with the laser beam L is possible, that is, a laser beam irradiation possible range.

The console 7 includes a display unit 7a and is used to input setting information including processing conditions and to select print data. The controller 5 supplies power corresponding to the power setting value in the setting information input from the console 7 to the head unit 2 through the power cable 3. In addition, the controller 5 transmits various control signals based on the setting information and XY coordinate data generated based on the selected print data to the head unit 2 through the signal cable 4. The head unit 2 performs printing by laser processing on the processing surface Wa of the processing target W by scanning the position where the processing surface Wa of the processing target W is irradiated with the laser light L in the X direction and the Y direction.

Next, the detailed configuration of the laser marking device 1 will be described.

As shown in FIG. 2, the display unit 7 a of the console 7 displays a character (character string “ABCD” in the example of FIG. 2) based on the print data stored in the memory 19 in the controller 5 in the display area 16. Can do. The display unit 7a is, for example, a touch panel type. In the display unit 7a, various operation buttons 17 displayed on the screen are operated to select the print data, set the character print size and print position, and the process including the scan speed and the power set value. Conditions can be set. The controller 5 includes a control unit 18 and the memory 19 described above, and temporarily stores setting information and print data selection information input from the console 7 in the memory 19. After the setting is completed, when the user operates the operation button 17 to give an instruction to start printing, the controller 5 starts a printing operation based on the set setting information and the selected print data.

The control unit 18 includes a computer that executes a program stored in the memory 19 in advance. The control unit 18 controls a power control circuit (not shown) and supplies power corresponding to the power setting value to the head unit 2. Further, the control unit 18 reads out the control signal corresponding to the setting information and the print data selected by the operator for printing from the memory 19. The control unit 18 converts the read print data into coordinate data, and transmits the coordinate data to the head unit 2 at time intervals, that is, cycles according to the scanning speed. A power input connector C2 (not shown in FIG. 2) for connecting the connector C1 of the power cable 3 and a connector C3 of the signal cable 4 are connected to the rear end surface of the head unit 2, that is, the right end surface in FIG. A signal input connector C4 is provided.

Next, the schematic configuration of the head unit 2 will be described. In FIG. 2, the left side is defined as the front side of the head unit 2, and the right side is defined as the rear side of the head unit 2.

As shown in FIG. 2, the housing 21 that forms the casing of the head unit 2 includes a rectangular plate-shaped base plate 22 and a rectangular parallelepiped box-shaped housing cover 23 (hereinafter simply referred to as “cover 23”). ing. A hole 22a for the window 8 is formed in the base plate 22. The bottom of the cover 23 has substantially the same shape and size as the upper surface of the base plate 22 and is open. The housing 21 accommodates a laser light source unit 24 arranged at a position rearward from the window 8 (right side in FIG. 2) and a scanner unit 25 arranged at the subsequent stage (left side in FIG. 2).

The laser light source unit 24 is a unit component in which a laser oscillator 26 and a beam expander 27 are assembled together. Specifically, the laser light source unit 24 includes a rectangular parallelepiped laser oscillator 26 and a beam expander 27. The beam expander 27 is fixed so as to protrude from the end face where the light emission port 26a of the laser oscillator 26 is disposed, that is, the left end face in FIG. The laser oscillator 26 is disposed in the housing 21 so that its optical axis is parallel to the longitudinal direction of the housing 21. The laser oscillator 26 is of any type including a gas gas laser such as a gas carbon dioxide laser, a solid state laser such as a YAG laser, a semiconductor laser, a fiber laser, a metal laser, or a dye laser.

As shown in FIG. 2, a storage box 28 is disposed on the upper surface of the laser oscillator 26. The storage box 28 stores a control circuit 29, specifically, a circuit board. The control circuit 29 is electrically connected to the connectors C2 and C4. The control circuit 29 converts the electric power input from the connector C2 into a necessary electric power value corresponding to each electric system component in the head unit 2 and supplies it to the electric system component. In addition, the control circuit 29 controls electric parts in the head unit 2 based on the control signal and coordinate data input from the connector C4. For example, the control circuit 29 supplies power corresponding to the power set value to the laser oscillator 26.

The laser oscillator 26 incorporates a laser oscillation tube including, for example, an excitation light source, a laser medium, and an optical resonator (optical amplifier). When electric power is supplied to the laser oscillation tube from the control circuit 29, the excitation light source is turned on, and the laser medium is excited by excitation light of a specific wavelength among the light that is turned on to generate stimulated emission light. The stimulated emission light is partly reflected between the total reflection mirror and the output mirror (partial transmission mirror) constituting the optical resonator and oscillates to cause a part of the laser light to go outside the output mirror. Is emitted from the light exit port 26a.

The beam expander 27 is assembled to the front end face where the light exit 26a of the laser oscillator 26 is positioned in a position-adjusted state. The beam expander 27 has a function of expanding the beam diameter of the laser light from the laser oscillator 26. Specifically, the beam expander 27 includes a cylindrical lens barrel 30, and a magnifying lens 31 and a converging lens (collimator lens) 32 arranged in the lens barrel 30 at a predetermined distance in the optical axis direction. . The magnifying lens 31 enlarges the beam diameter of the laser light L, and the converging lens 32 makes the enlarged laser light L parallel light. Here, the state in which the beam expander 27 is adjusted with respect to the laser oscillator 26 means that the center surfaces of the

lenses

31 and 32 are arranged perpendicular to the optical axis of the laser light L and the

lenses

31 and 32 This means that the optical axis is assembled with the optical axis of the laser light. However, since the beam expander 27 includes a laser beam centering adjustment mechanism, a slight deviation of the optical axes of the

lenses

31 and 32 from the optical axis of the laser light L is allowed.

The scanner unit 25 is positioned after the laser light source unit 24, that is, on the left side of FIG. The scanner unit 25 has a function of scanning the laser light emitted from the window 8 in the X direction and the Y direction by deflecting the laser light from the beam expander 27. The scanner unit 25 has a rectangular box-shaped casing (housing) 33 as its housing. The casing 33 has an opening 33 a at a position facing the beam expander 27 protruding from the front end surface of the laser light source unit 24. The casing 33 is assembled on the base plate 22 in a state where most of the beam expander 27 is accommodated in the casing 33 through the opening 33a.

In the casing 33, along the optical path of the laser light L, a shutter 35, a galvano scanner 36, and a condenser lens (converging lens) 37 are disposed in order from the right in FIG. The shutter 35 is mechanically opened / closed via an opening / closing mechanism 38 by an operation of an operation unit (not shown). That is, when the operation unit is closed, the opening / closing mechanism 38 places the shutter 35 in a closed position where the laser beam L can be blocked by the operation force. When the operation unit is opened, the opening / closing mechanism 38 arranges the shutter 35 at an open position that allows the laser light L to pass. The laser light L that has passed without being blocked by the shutter 35 enters the galvano scanner 36.

The galvano scanner 36 is a biaxial galvano scanner, and includes a first scanner 41 for controlling the scanning position in the X direction and a second scanner 42 for controlling the scanning position in the Y direction. The first scanner 41 includes a first galvanometer motor (galvanometer) 43 and a first galvanometer mirror (X-axis mirror) 43 a fixed to the rotating shaft of the first galvanometer motor 43. The second scanner 42 includes a second galvanometer motor (galvanometer) 44 and a second galvanometer mirror (Y-axis mirror) 44 a fixed to the rotation shaft of the second galvanometer motor 44. An angle detector 45 that detects the rotation angle of the first galvanometer mirror 43 a is provided at the end of the first galvanometer motor 43, and the rotation angle of the second galvanometer mirror 44 a is detected at the end of the second galvanometer motor 44. An angle detector 46 is provided. As the

angle detectors

45 and 46, for example, a rotary encoder is used.

The control circuit 29 controls the first galvano motor 43 based on the X coordinate data, and controls the second galvano motor 44 based on the Y coordinate data. At this time, the control circuit 29 feedback-controls the first and

second galvano motors

43 and 44 based on the angle detection signals of the

angle detectors

45 and 46, respectively. Specifically, the control circuit 29 servo-controls the first and

second galvano motors

43 and 44.

Each of the first and

second galvano motors

43 and 44 includes, for example, a movable magnet provided on the rotating shaft, a fixed magnet provided on the motor casing, and a drive coil provided on the movable magnet or the fixed magnet (both are (Not shown). Due to the magnetic force between the movable magnet and the fixed magnet, the first and second galvanometer mirrors 43a and 44a are held at the initial position, that is, the origin, in the power supply off state. When electric power is supplied to the first and

second galvano motors

43 and 44, the first and second galvano mirrors 43a and 44a rotate within a predetermined rotation range clockwise and counterclockwise about the origin, respectively. Move. At this time, the first and second galvanometer mirrors 43a and 44a are rotated at angles according to the magnitude and direction of the current flowing through the drive coils in the first and

second galvanometer motors

43 and 44, respectively.

The laser light L from the beam expander 27 is reflected by the second galvanometer mirror 44 a, then reflected by the first galvanometer mirror 43 a, and is incident on the condenser lens 37. The condensing lens 37 is composed of, for example, an fθ lens. The laser beam L that has passed through the condenser lens 37 is condensed and irradiated onto the processing surface Wa of the workpiece W with a small spot diameter.

In this embodiment, the laser light source unit 24 and the scanner unit 25 are accommodated in the housing 21 in a state where the laser light source unit 24 and the scanner unit 25 are joined via a packing 50 as a seal member. An opening 33 a for inserting the beam expander 27 fixed to the laser light source unit 24 into the casing 33 of the scanner unit 25 is provided in the scanner unit 25. Since both the

units

24 and 25 are closely joined via the packing 50, the intrusion of dust into the scanner unit 25 and the adhesion of dust to the lens 32 of the beam expander 27 are avoided.

Next, the detailed configuration of the head unit 2 will be described. FIG. 3 is an exploded perspective view of the head unit 2.

As shown in FIG. 3, the laser light source unit 24 is arranged at a position near the rear of the base plate 22 in a posture in which the optical axis thereof coincides with the longitudinal direction of the base plate 22. The laser light source unit 24 is fixed to the base plate 22 by fastening a plurality of screws 55. Specifically, the bottom surface of the main body 56 of the laser oscillator 26 is fixed to a bottom plate 57 that is fixed. Two mounting portions 57a (only two on one side are shown) extend on each side of the bottom plate 57. The laser light source unit 24 is fixed to the base plate 22 at a plurality of locations (four locations in the present embodiment) by fastening the screws 55 inserted into the holes of the mounting portions 57a to the base plate 22. Further, the laser oscillator 26 has a large number of heat radiation fins 56a on both sides of the main body 56, and the heat of the laser oscillator 26 can be efficiently radiated by the heat radiation fins 56a.

3, a cover 59 having an inverted U-shaped cross section shown between the housing cover 23 and the laser light source unit 24 is disposed so as to cover both sides and the upper side of the laser oscillator 26. Two fan units 60 (only two are shown in FIG. 3) are attached to the side surface of the cover 59 so as to cover an opening for ventilation (not shown). In the assembled state of the head unit 2, each fan unit 60 is disposed so as to be opposed to the heat radiating fins 56a. Further, on both sides of the housing cover 23, a large number of air holes (not shown) are formed in areas facing the corresponding fan units 60. When the fan unit 60 is driven, air is introduced from the outside into the cover 59 through the vent hole. As a result, the air flow hits the radiation fins 56a of the laser oscillator 26 and flows along the radiation fins 56a, so that the laser oscillator 26 is efficiently radiated.

The storage box 28 is fixed to the upper surface of the cover 59. The control circuit 29 arranged in the storage box 28 is formed of a circuit board on which a plurality of electronic components 61 are mounted as shown in FIG. Connectors C1 and C2 (only the connector C2 is shown in FIG. 3) are assembled to the rear end of the storage box 28. In the assembled state of the head unit 2, the connectors C <b> 1 and C <b> 2 are exposed at the rear end opening of the housing cover 23.

Further, as shown in FIG. 3, the scanner unit 25 is fixed to the base plate 22 by fastening a plurality of screws 63. Specifically, the scanner unit 25 is fastened by fastening screws 63 inserted through holes of attachment portions 64a (only two are shown) extending from the bottom plate 64 (see FIG. 4) of the casing 33 to both sides. Are fixed to the base plate 22 at a plurality of locations (four locations in the present embodiment).

The cover 59 is assembled so as to cover both sides and the upper side of the laser oscillator 26 by being fixed to the base plate 22 at a plurality of locations with small screws (not shown). With the cover 59 assembled, the housing cover 23 is assembled to the base plate 22, the casing 33, and the cover 59 with a small screw (not shown).

Next, the detailed configuration of the scanner unit 25 will be described.

As shown in FIG. 4, the casing 33 constituting the scanner unit 25 includes the above-described bottom plate 64, top plate 65, U-shaped curved side plate 66, and flat plate-like side plate 67. The top plate 65 is a flat plate having substantially the same shape and size as the bottom plate 64. The side plate 66 covers the side between the bottom plate 64 and the top plate 65. The side plate 67 is disposed at a position facing the laser light source unit 24. The casing 33 is formed in a box shape by fastening a small screw (not shown) in a state where the bottom plate 64, the top plate 65, the side plate 66, and the side plate 67 are assembled. Further, in the casing 33, a quadrangular columnar column 68 is erected on the upper surface of the end portion of the bottom plate 64. The first galvano motor 43 and the second galvano motor 44 are supported by the support column 68 in a state of being arranged in a predetermined posture.

Further, a condensing lens unit 70 in which the condensing lens 37 is housed in the lens barrel 69 is disposed at a position directly below the first and second galvanometer mirrors 43 a and 44 a on the bottom plate 64 in the casing 33. In the bottom plate 64, a circular hole 64b (see FIG. 2) having substantially the same diameter as the condenser lens 37 is formed at a position directly below the first and second galvanometer mirrors 43a and 44a. The condenser lens unit 70 is assembled to the bottom plate 64 with the condenser lens 37 facing the circular hole 64b. For this reason, the laser light L from the galvano scanner 36 can be emitted to the outside of the bottom plate 64 through the condenser lens 37. In the assembled state of the condenser lens unit 70, the inner side and the outer side of the casing 33 are separated by the condenser lens 37 and the lens barrel 69. The lens surface on the incident side of the condenser lens 37 that receives the laser light L from the galvano scanner 36 faces the casing 33, and the lens surface on the emission side of the condenser lens 37 that emits the laser light L is outside the casing 33. Facing. Therefore, the lens surface on the incident side of the condenser lens 37 is protected by the casing 33 so that dust does not easily adhere to it, and the dust attached to the lens surface on the exit side of the condenser lens 37 can be wiped through the window 8. It is possible.

As shown in FIG. 4, the base plate 22 is formed with a rectangular hole 22 a serving as the window 8 at a location facing the condenser lens unit 70. In a state where both the laser light source unit 24 and the scanner unit 25 are assembled on the base plate 22, the condensing lens 37 is opposed to the hole 22a, and the laser light L passing through the condensing lens 37 is outside (through the hole 22a). (Downward). The beam expander 27 enlarges the beam diameter of the laser light L, so that the spot diameter of the laser light emitted from the condenser lens 37 and irradiated onto the workpiece W can be further reduced.

Further, a pair of positioning pins 22b are provided on the upper surface of the base plate 22 so as to protrude from both sides of the hole 22a in the longitudinal direction. By positioning positioning recesses (not shown) formed on the bottom surface of the casing 33 (specifically, the bottom plate 64) with the positioning pins 22b, positioning on the upper surface of the base plate 22 of the scanner unit 25 becomes possible. Yes. By this positioning, the scanner unit 25 can be arranged so that the galvanometer mirrors 43 a and 44 a are in an appropriate positional relationship with respect to the optical axis of the beam expander 27.

The first galvanometer mirror 43a and the second galvanometer mirror 44a sequentially reflect the laser light L from the beam expander 27 and change its emission direction. Specifically, the first galvanometer mirror 43a is rotated within a predetermined angle range, so that the position at which the laser beam L is irradiated onto the processing surface Wa of the workpiece W is set in one direction (X direction, see FIG. 1). Scan along. Further, the second galvanometer mirror 44a is rotated within a predetermined angle range, so that the position at which the laser beam L is irradiated onto the processing surface Wa of the workpiece W is a direction orthogonal to the X direction (Y direction, see FIG. 1). ). Therefore, the laser beam L irradiated toward the workpiece W is scanned in the X direction and the Y direction with respect to the machining surface Wa of the workpiece W by the first galvanometer mirror 43a and the second galvanometer mirror 44a. .

Next, the configuration of the beam expander 27 and the assembly structure of the beam expander 27 to the laser oscillator 26 will be described. As shown in FIG. 4, a square annular ring plate 71 is fixed to the front end surface of the laser oscillator 26, that is, the left end surface of FIG. On the end surface of the ring plate 71, a square annular packing 50 having the same shape as the ring plate 71 and having a slightly smaller outer size than the ring plate 71 is disposed.

As shown in FIG. 4, the beam expander 27 is assembled inside the ring plate 71 on the front end face of the laser oscillator 26. Specifically, a stage 72 extending substantially parallel to the optical axis is fixed to the front end surface of the laser oscillator 26 below the lens barrel 30 constituting the beam expander 27.

Block members

73 and 74 are fixed to the upper surface of the stage 72 so as to surround the base portion of the lens barrel 30 on the side and upper side. An adjustment screw 75 that contacts the base of the lens barrel 30 is exposed from a hole (not shown) of one block member 73. By rotating the adjustment screw 75, the beam centering adjustment of the beam expander 27 can be performed. The adjustment screw 75 functions as an adjustment operation unit of the beam expander 27.

Further, the stage 72 is provided with a notch 72a at a position corresponding to the focusing barrel 76 of the beam expander 27 constituted by a part of the lens barrel 30. The user can adjust the distance between the

lenses

31 and 32 by operating the focusing barrel 76 using the space of the notch 72a. Further, a square cylindrical protective cover 77 surrounding the side and upper side of the beam expander 27 is attached to the front end face of the laser oscillator 26. The protective cover 77 extends to cover the entire length of the beam expander 27 in the optical axis direction. A hole 77a is formed in the protective cover 77 at a position corresponding to the adjustment screw 75, and the adjustment screw 75 can be operated through the hole 77a.

Next, the operation when the laser oscillator 26 is replaced in the head unit 2 configured as described above will be described. In the head unit 2, when the laser oscillator 26 is replaced due to a failure or failure of the laser oscillator 26, the laser light source unit 24 assembled with the beam expander 27 is replaced. For this reason, since it is not necessary to adjust the position of the beam expander 27 with respect to the laser oscillator 26, the parts replacement work of the laser oscillator 26 can be simplified.

As described in detail above, according to this embodiment, the following effects can be obtained.

(1) The laser oscillator 26 and the beam expander 27 are assembled as a unit component called a laser light source unit 24 by assembling them together with the laser oscillator 26 and the beam expander 27 adjusted in position. The laser light source unit 24 is configured to be detachable in a state in which the beam expander 27 can be inserted into the casing 33 of the scanner unit 25 through the opening 33a. For this reason, when the laser oscillator 26 is defective or defective and needs to be replaced, the entire laser light source unit 24 is replaced. Therefore, it is not necessary to perform a troublesome position adjustment operation between the laser oscillator 26 and the beam expander 27.

(2) An opening 33 a is provided at a location facing the beam expander 27 in the casing 33 of the scanner unit 25. The beam expander 27 is configured to be inserted into the casing 33 through the opening 33a. For this reason, compared with the structure which does not insert the beam expander 27 in the casing 33, the arrangement space of the laser light source unit 24 and the scanner unit 25 in the longitudinal direction of the head unit 2 can be shortened relatively. Therefore, the longitudinal size of the head unit 2 can be relatively shortened to prevent the head unit 2 from becoming large, or the head unit 2 can be made as small as possible.

(3) The front end surface where the light exit 26a of the laser oscillator 26 is located and the side portion 67 in the vicinity of the beam expander 27 of the scanner unit 25 are in close contact with each other via a packing 50 disposed along the outer periphery of the opening 33a. Thus, both

units

24 and 25 are assembled on the base plate 22. For this reason, even if the opening 33a is provided in the casing 33 in order to insert the beam expander 27 into the casing 33, the casing 33 in which optical components such as the

lenses

32 and 37 and the galvanometer mirrors 43a and 44a are accommodated. It is possible to effectively prevent the dust from entering through the opening 33a. Therefore, it is possible to avoid a situation in which the amount of laser light L emitted from the window 8 of the head unit 2 is reduced due to dust adhering to the optical system parts, and sufficient energy for processing cannot be obtained and processing accuracy is lowered. can do.

(4) Since the positioning pin 22b for positioning the scanner unit 25 is provided on the base plate 22, the scanner unit 25 is assembled relatively easily at an appropriate position with respect to the optical axis of the beam expander 27. Can do.

(5) The beam expander 27 is provided with a protective cover 77 surrounding the entire length in the optical axis direction. For this reason, when the beam expander 27 is inserted into the casing 33 from the opening 33a, the beam expander 27 is not directly hit against the casing 33 because it is protected by the protective cover 77.

(6) The protective cover 77 is provided with a hole 77a at a position corresponding to the adjustment screw 75, and the adjustment screw 75 can be operated through the hole 77a. Therefore, it is not necessary to remove the protective cover 77 every time the adjustment work with the adjustment screw 75 is performed. Furthermore, when the beam expander 27 is inserted into the casing 33 from the opening 33a, the adjustment cover 75 is prevented from contacting other members such as the casing 33 by being protected by the protective cover 77. For this reason, it is possible to avoid a situation in which the beam centering position of the beam expander 27 adjusted in advance is slightly shifted due to the adjustment screw 75 coming into contact with another member such as the casing 33.

(7) The protective cover 77 is provided with a notch 72a at a position corresponding to the focusing barrel 76, and the user can operate the focusing barrel 76 using the space of the notch 72a. Therefore, it is not necessary to remove the protective cover 77 one by one when performing adjustment work using the focusing barrel 76. Further, when the beam expander 27 is inserted into the casing 33 from the opening 33a, the focusing barrel 76 is prevented from contacting other members such as the casing 33 by being protected by the protective cover 77. For this reason, it is possible to avoid a situation in which the distance between the

lenses

31 and 32 adjusted in advance is slightly shifted due to the focusing barrel 76 coming into contact with another member such as the casing 33.

This embodiment is not limited to the above configuration, and may be modified as follows, for example.

The beam expander 27 may be configured to be detachable from the casing 33 of the scanner unit 25 without inserting the beam expander 27 into the casing 33. In this case, the packing 50 is disposed so as to surround the opening 33 a, and both

units

24 and 25 are joined via the packing 50. Thus, it is desirable to prevent dust from entering the casing 33 from the opening 33a.

・ In place of the 2-axis galvano scanner, a 3-axis galvano scanner may be employed. In this case, a Z scanner that controls the processing spot position of the laser beam in the Z direction orthogonal to the X and Y directions is also accommodated in the casing 33.

・ The packing 50 may be omitted. The laser light source unit 24 may be detachably assembled to the casing 33 of the scanner unit 25 without using the packing 50.

· The positioning pin 22b may be omitted.

· The protective cover 77 may be omitted.

· A notch may be formed instead of the hole 77a, or a hole may be formed instead of the notch 72a.

· Only one of the adjustment screw 75 and the focusing barrel 76 may be adopted as the adjustment operation means.

・ Beam expander 27 may be Kepler type instead of Galileo type.

The present invention may be embodied as a laser processing apparatus in which the head unit and the controller are integrated by incorporating the controller components in the head unit.

The present invention is embodied in a laser marking device, but is not limited to this, and may be embodied in other laser processing devices such as a laser welding machine, a laser drilling machine, and a laser cutting machine.

Claims

A laser oscillator that emits laser light from a light exit; and
A beam expander for enlarging the diameter of the laser beam emitted from the laser oscillator;
A galvano scanner that changes the traveling direction of the laser light by reflecting the laser light that has passed through the beam expander with a mirror;
A laser processing apparatus comprising a converging lens for converging laser light from the galvano scanner,
A laser light source unit that houses the laser oscillator and has a surface on which the light emission port of the laser oscillator is disposed, wherein the beam expander is integrated with the surface of the laser oscillator on which the light emission port is positioned. An assembled laser light source unit;
A housing in which the galvano scanner is accommodated, and the housing includes a scanner unit in which an opening facing the beam expander is formed;
The laser processing apparatus, wherein the laser light source unit is detachably attached to the housing of the scanner unit.
The laser processing according to claim 1, wherein the laser light source unit is attached to the casing in a state where the beam expander is inserted into the casing through the opening of the casing. apparatus.
3. The laser processing according to claim 1, wherein the laser light source unit is attached to the housing of the scanner unit via an annular seal member disposed around the opening. 4. apparatus.
A protective cover for covering the beam expander; the opening of the housing has a size capable of receiving the protective cover; and the beam expander includes an adjustment operation means for adjusting the alignment of the beam. The laser processing apparatus according to claim 1, wherein the protective cover has a hole or a notch at a position facing the adjustment operation unit of the beam expander.
The laser processing apparatus has a housing including a base plate, the laser light source unit and the scanner unit are assembled together on the base plate, and the scanner unit is attached to the base plate of the beam expander. The laser processing apparatus according to claim 1, wherein at least one positioning pin for positioning with respect to the optical axis is provided.
The laser light source unit and the scanner unit are accommodated in a housing, and the housing covers a base member on which the laser light source unit and the scanner unit are assembled in common, and the laser light source unit and the scanner unit. The laser processing apparatus according to claim 1, further comprising a housing cover fixed to the base member.
The converging lens has an incident-side lens surface on which the laser light from the galvano scanner is incident and an exit-side lens surface that emits the condensed laser light, and the incident-side lens surface is The converging lens is assembled to the casing so that the lens surface on the inside faces the casing and the lens surface on the emission side faces the outside of the casing. Laser processing equipment.
3. The laser processing apparatus according to claim 1, further comprising a shutter unit that is housed in the housing and selectively switches between passage and blocking of laser light from the beam expander to the galvano scanner. 4. .
The laser processing apparatus according to claim 1 or 2,
A laser processing system comprising: a controller that outputs electric power and a control signal to the laser processing apparatus through a cable.