JP6252424B2 - Laser processing head - Google Patents

Description

  The present invention relates to a laser processing head having a scanning unit and an optical encoder.

  Conventionally, as a laser marker provided with a laser processing head, for example, there is a technique described in Patent Document 1 below. In this technique, the laser light source unit and the scanner unit are configured to be detachable via packing. An angle detector is provided at the end of the galvano scanner opposite to the mirror.

JP 2012-222242 A

  The processing laser light is emitted from the laser marker through a window provided in the laser marker. Since the processing laser light is emitted while being scanned by the scanner unit, the window needs a large area to cover the scanning range of the processing laser. Further, since the laser marker has a large output of the processing laser beam, the intensity of the reflected light from the workpiece is also increased. As a result, relatively strong reflected light may pass through the window again and enter the scanner unit.

  Generally, in order to detect the scanning position of the galvano scanner, the laser marker is provided with an angle detector. When an optical encoder is used as the angle detector, the reflected light entering from the window may hit the optical encoder. Since the intensity of the reflected light is relatively strong, it becomes noise when the optical encoder detects the angle, and the accuracy of angle detection may deteriorate.

  Therefore, the present invention has been made in view of the above-described points, and an object thereof is to provide a laser processing head capable of preventing reflected light entering from a window from hitting an optical encoder.

The invention according to claim 1 made to solve this problem is a laser processing head provided in a laser marker, wherein a housing having an upper wall and a lower wall, and a laser light source incorporated in the housing; A scanning unit that is built in the casing and that two-dimensionally scans the light from the laser light source and reflects the light downward; and a light that is provided on the lower wall of the casing and is two-dimensionally scanned by the scanning unit. A transparent member that transmits light to the outside of the housing, a first shaft extending in the vertical direction, a first reflecting mirror attached to the lower end of the first shaft, and a first optical provided on the upper end side of the first shaft A first galvano scanner provided in the scanning unit, a light shielding plate provided between the first galvano scanner and the upper wall of the housing,
The light shielding plate is attached to a position opposite to the center of the transparent member of the first galvano scanner, and extends from the lower side of the first optical encoder to the upper side of the first optical encoder. An extension portion, and a second extension portion extending from the first extension portion toward the first galvano scanner and an upper wall of the housing are provided .

  Note that “extending in the vertical direction” is not limited to extending in the vertical direction. That is, “extending in the vertical direction” does not include the horizontal direction perpendicular to the vertical direction, but includes extending in the direction between the horizontal direction and the vertical direction. For example, it may extend in an oblique direction.

  The invention according to claim 2 is the laser processing head according to claim 1, characterized in that the galvano scanner is located above the transparent member.

  The invention according to a third aspect is the laser processing head according to the first or second aspect, wherein the light shielding plate is a predetermined distance from the center of the transparent member in the crossing direction intersecting the vertical direction. It extends from the 1st position spaced apart to the 2nd position nearer than the 1st position to the center of the transparent member in the crossing direction.

According to a fourth aspect of the present invention, there is provided the laser processing head according to any one of the first to third aspects , comprising a wiring from the first galvano scanner, and the second light shielding plate. A first cable clamp for holding wiring from the first galvano scanner is provided on the surface of the extended portion facing the upper wall of the housing.

Further, the invention relates to a laser processing head according to any one of claims 1 to 4, wherein the first optical scanner in terms of the first extending portion of the shielding plate according to claim 5 And a second cable clamp for holding the wiring from the first galvano scanner. The second cable clamp is provided on a surface located opposite to the first galvano scanner.

A sixth aspect of the present invention is the laser processing head according to any one of the first to fifth aspects, wherein the second shaft extends in a crossing direction that intersects the vertical direction, and the second shaft. And a second optical encoder provided on the opposite side of the second reflecting mirror in the intersecting direction and on the outer side in the intersecting direction with the transparent member. A second galvano scanner provided in the scanning unit is further provided.

The invention according to claim 7 is the laser processing head according to claim 6 , wherein the light shielding plate is provided only in the first galvano scanner.
According to an eighth aspect of the present invention, there is provided a laser processing head provided in a laser marker, a housing having an upper wall and a lower wall, a laser light source built in the housing, and a housing built in the housing. A scanning unit that two-dimensionally scans the light from the laser light source and reflects the light downward, and is provided on the lower wall of the casing, and transmits the light two-dimensionally scanned by the scanning unit to the outside of the casing A transparent member, a first shaft extending in the vertical direction, a first reflecting mirror attached to a lower end of the first shaft, a first optical encoder provided on an upper end side of the first shaft, and the scanning unit A first galvano scanner, a light shielding plate provided between the first galvano scanner and the upper wall of the housing, a second shaft extending in an intersecting direction intersecting with the vertical direction, and the second shaft of A second reflection mirror attached to an end; a second optical encoder provided on the opposite side of the second reflection mirror in the intersecting direction and on the outer side of the transparent member in the intersecting direction; and the scanning unit The second galvano scanner is provided, and the light shielding plate is provided only in the first galvano scanner.

  In the laser processing head according to the first aspect of the present invention, the laser light source and the scanning unit are built in the casing. A transparent member is provided on the lower wall of the housing. Light from the laser light source is two-dimensionally scanned by the scanning unit and reflected downward. The light that is two-dimensionally scanned by the scanning unit passes through the transparent member and is emitted to the outside of the housing. A part of the light emitted to the outside of the housing is reflected upward by the workpiece. If the reflected light enters the inside of the casing through the transparent member, it is considered that the reflected light is reflected on the upper wall of the casing.

On the other hand, the first galvano scanner is provided in the scanning unit built in the housing. The first galvano scanner includes a first shaft extending in the vertical direction, a first reflection mirror attached to the lower end of the first shaft, and a first optical encoder provided at the upper end of the first shaft. For this reason, if the reflected light is reflected by the upper wall of the housing, the reflected light may hit the first optical encoder. However, in the laser processing head according to the first aspect of the present invention, the light shielding plate is provided between the first galvano scanner and the upper wall of the housing. With such a configuration, even if light is reflected by the upper wall of the housing, the reflected light can be prevented from hitting the first optical encoder by the light shielding plate.
In the laser processing head according to the first aspect of the present invention, the light shielding plate includes a first extending portion and a second extending portion. The first extending portion extends from the lower side of the first optical encoder to the upper side of the first optical encoder. The second extension portion extends from the first extension portion between the first galvano scanner and the upper wall of the housing. Since the first galvano scanner is attached at a position opposite to the center of the transparent member, the first extending portion does not block the optical path that the light from the laser light source travels to the transparent member through the scanning unit.

  In the laser processing head according to the second aspect of the present invention, the galvano scanner is located above the transparent member. In order to reduce the size of the laser processing head, it is advantageous to dispose the galvano scanner above the transparent member. However, when the reflected light reflected upward enters the housing through the transparent member, there is a possibility that the light is reflected downward by the upper wall of the housing. for that reason. When the galvano scanner is positioned above the transparent member, there is a high possibility that reflected light will hit the first optical encoder. However, since there is a light shielding plate, it is possible to reduce the size of the laser processing head and prevent the reflected light from hitting the first optical encoder.

  In the laser processing head according to the third aspect of the present invention, the light shielding plate is first from the first position separated from the center of the transparent member by a predetermined distance in the intersecting direction to the center of the transparent member in the intersecting direction. It extends to a second position closer to the position. With such a configuration, it is possible to more reliably prevent light reflected by the upper wall of the casing from hitting the first optical encoder, as compared with the case where the light shielding plate is disposed only above the first optical encoder. .

According to a fourth aspect of the present invention, there is provided a laser processing head comprising a wiring from the first galvano scanner and a first cable clamp. The first cable clamp is provided on a surface facing the upper wall of the housing on the surface of the second extending portion of the light shielding plate, and holds the wiring from the first galvano scanner. With such a configuration, the wiring from the first galvano scanner can be removed from the range in which light is scanned by the first galvano scanner.

The laser processing head of the invention according to claim 5 includes a second cable clamp. The second cable clamp is provided on the surface of the first extending portion of the light shielding plate located on the opposite side of the first galvano scanner, and holds the wiring from the first galvano scanner. With such a configuration, the wiring from the first galvano scanner can be further removed from the range in which light is scanned by the first galvano scanner.

In the laser processing head according to the sixth aspect of the present invention, the scanning unit incorporated in the housing is provided with the second galvano scanner. The second galvano scanner includes a second shaft extending in a crossing direction that intersects the vertical direction, a second reflecting mirror attached to one end of the second shaft, and a transparent member on the opposite side in the crossing direction. And a second optical encoder provided outside in the crossing direction. With such a configuration, the light reflected from the outside of the housing and traveling toward the second optical encoder can be blocked by the outer periphery of the transparent member.

In the laser processing head according to the seventh aspect of the invention, the light shielding plate is provided only in the first galvano scanner. As described above, the light reflected from the outside of the housing and directed to the second galvano scanner is blocked by the outer periphery of the transparent member. Therefore, it is not necessary to provide the light shielding plate in the second galvano scanner, and a laser processing head that can prevent reflected light from hitting the first optical encoder with a simple configuration can be obtained.

It is a perspective view showing the laser processing head 1 concerning one embodiment of the present invention. 2 is a perspective view showing the laser processing head 1. FIG. 2 is a plan view showing the laser processing head 1. FIG. 3 is a plan view showing the laser processing head 1 with a top cover 11B of the housing 11 removed from a base 11A of the housing 11. FIG. FIG. 4 is a view showing the laser processing head 1 in a cross section cut along a line AA in FIG. 3. 3 is a plan view showing a scanning unit 25. FIG. It is the front view showing the scanning unit 25, Comprising: It is the figure seen from the right side with the coordinate axis of FIG. It is the front view showing the scanning unit 25, Comprising: It is the figure seen from the rear side with the coordinate axis of FIG. It is the front view showing the scanning unit 25, Comprising: It is the figure seen from the front side with the coordinate axis of FIG. 3 is a perspective view showing a scanning unit 25. FIG. 3 is a perspective view showing a scanning unit 25. FIG. 3 is a perspective view showing a scanning unit 25. FIG. 3 is a perspective view showing a scanning unit 25. FIG.

  DETAILED DESCRIPTION Hereinafter, a laser processing head according to an embodiment of the present invention will be described in detail with reference to the drawings based on an embodiment. In the drawings, there are drawings in which a vertical direction, a horizontal direction, or a front-rear direction is represented. The up and down direction and the left and right direction are not up and down and left and right when the gravity direction is defined as down, but are up and down and left and right defined for the laser processing head.

[1. Outline of the present invention]
As shown in the perspective views of FIGS. 1 and 2, the plan views of FIGS. 3 and 4, and the cross-sectional view of FIG. 5, the laser processing head 1 according to this embodiment is provided in a laser marker. The laser processing head 1 according to this embodiment includes a housing 11 having a base 11A and a top cover 11B. The upper surface portion 12 (see FIG. 5) of the top cover 11B corresponds to the “upper wall” of the housing 11. 1 and 2 and the plan view of FIG. 4, the top cover 11B is removed from the base 11A.

  In the laser processing head 1 according to this embodiment, a laser light source 22, a beam expander 23, two mirrors 24, and a scanning unit 25 are provided on a base plate 21. That is, the laser light source 22, the beam expander 23, the two mirrors 24, and the scanning unit 25 are built in the housing 11. The base plate 21 corresponds to the “lower wall” of the housing 11.

  The laser light source 22 is, for example, a passive Q switch laser. The laser light source 22 includes a medium that functions as a passive Q switch. The medium has a predetermined energy level structure capable of achieving an inversion distribution and can output a pulsed laser as a passive Q switch (for example, yttrium aluminum garnet (Cr: YAG) crystal doped with chromium, , Cr: YAG crystal and neodymium-doped YAG (Nd: YAG) crystal). The laser light source 22 is excited by, for example, a continuous laser incident from the outside of the laser processing head 1 via an optical fiber (not shown), and emits laser light for processing at a predetermined pulse interval.

  The beam expander 23 extends from the laser light source 22 toward the laser light source 22 toward one of the two mirrors 24. The beam expander 23 is an optical system that spreads the laser light from the laser light source 22 into a parallel light beam having a constant magnification.

  The two mirrors 24 are mechanisms that adjust the optical axis of the laser light emitted from the beam expander 23. The two mirrors 24 include a reflection surface that reflects the laser light and a holder that attaches the reflection surface to the base plate 21.

  The scanning unit 25 two-dimensionally scans the laser beam emitted from the beam expander 23 and reflects it downward. Details of the scanning unit 25 will be described later.

  Further, an fθ lens 26 is provided on the base plate 21. The fθ lens 26 transmits the laser light two-dimensionally scanned by the scanning unit 25 to the outside of the base 11 </ b> A of the housing 11. The fθ lens 26 has a circular shape in plan view. A frame that does not transmit laser light is provided on the outer periphery of the fθ lens 26. The fθ lens 26 is formed of a transparent optical material such as synthetic quartz, for example. The fθ lens 26 is an optical system that corrects the image surface of the laser light scanned by the scanning unit 25 to a flat surface.

  As described above, the optical path L of the laser light emitted from the beam expander 23 is formed by the two mirrors 24, the scanning unit 25, or the fθ lens 26.

  A control unit (not shown) that controls the operation of the laser processing head 1 according to the present embodiment is provided in the housing 11. A control unit (not shown) receives print data and a print command from a control box (not shown) provided separately from the laser processing head 1. When receiving a print command, a control unit (not shown) causes the laser light source 22 to emit a laser beam for processing based on the received print data. A control unit (not shown) operates the following motors 35 and 45 of the scanning unit 25 based on the received print data, thereby two-dimensionally scanning the emitted laser light. The two-dimensionally scanned laser light is condensed on a processing surface of a processing target (not shown) by the fθ lens 26, and a desired print pattern is laser processed on the processing surface of the processing target (not shown).

[2. Configuration of scanning unit]
The configuration of the scanning unit 25 will be described with reference to FIGS. The scanning unit 25 includes a Y-axis galvano scanner 30 and an X-axis galvano scanner 40.

  The Y-axis galvano scanner 30 (FIGS. 5 to 13) includes a Y-axis shaft 31 (FIGS. 7, 9, 12, and 13) and a Y-axis reflection mirror 32 (FIGS. 7, 9, 10, 12, and 12). 13, Y-axis optical encoder 33 (FIGS. 5, 7, 9, 10, 12, and 13), wiring 34 (see FIGS. 5 to 13), and Y-axis motor 35 (FIG. 5). 7, 9, 10, 12, and 13). The Y-axis shaft 31 is provided in a state extending in the up and down diagonal directions. The Y-axis reflection mirror 32 is attached to the lower end 31 </ b> A of the Y-axis shaft 31. The Y-axis optical encoder 33 is provided on the upper end 31 </ b> B side of the Y-axis shaft 31. The upper end 31B side of the Y-axis shaft 31 is farther from the fθ lens 26 disposed below the Y-axis galvano scanner 30 than the lower end 31A side of the Y-axis shaft 31. The Y-axis optical encoder 33 is located above the fθ lens 26 (see FIG. 5). The Y axis motor 35 rotates the Y axis shaft 31 and the Y axis reflection mirror 32. The rotation amounts of the Y-axis shaft 31 and the Y-axis reflection mirror 32 are measured by the Y-axis optical encoder 33. Drive currents and control signals for the Y-axis optical encoder 33 and the Y-axis motor 35 are supplied from a control unit (not shown) that controls the operation of the laser processing head 1 provided in the housing 11 via the wiring 34. Is done. The Y-axis optical encoder 33 is, for example, an optical rotary encoder. For example, a lattice disk in which a predetermined slit is formed is attached to the upper end of a drive shaft (not shown) of a Y-axis motor 35 that is continuous with the Y-axis shaft 31. A slit plate having a plurality of slits is provided inside the Y-axis optical encoder 33 so as to face the lattice disk. Inside the Y-axis optical encoder 33, a light receiving element and a light emitting element are provided so as to sandwich the lattice disk and the slit plate.

  The X-axis galvano scanner 40 (FIGS. 6 to 9, 11 to 13) includes an X-axis shaft 41 (FIGS. 6, 9, 12, and 13) and an X-axis reflecting mirror 42 (FIGS. 6, 7, and 13). 9, 10, 12, and 13), the X-axis optical encoder 43 (FIGS. 6 to 9, 11 to 13), the wiring 44 (see FIGS. 5 to 13), and the X-axis motor 45 ( 6, 7, 9, 12, and 13). The X-axis shaft 41 is provided in a state extending in a crossing direction (for example, the left-right direction) intersecting with the vertical direction (see FIG. 9). The X-axis reflection mirror 42 is attached to one end 41 </ b> A of the X-axis shaft 41. The X-axis optical encoder 43 is provided on the opposite side in the left-right direction with respect to the X-axis reflection mirror 42 (see FIG. 9), and in the left-right direction with respect to the fθ lens 26 disposed below in FIGS. Provided outside. The X axis motor 45 rotates the X axis shaft 41 and the X axis reflection mirror 42. The rotation amounts of the X-axis shaft 41 and the X-axis reflection mirror 42 are measured by the X-axis optical encoder 43. Drive currents and control signals for the X-axis optical encoder 43 and the X-axis motor 45 are supplied from a control unit (not shown) that controls the operation of the laser processing head 1 provided in the housing 11 via the wiring 44. Is done. The X-axis optical encoder 43 is, for example, an optical rotary encoder. For example, a lattice disk in which a predetermined slit is formed is attached to the upper end of a drive shaft (not shown) of the X-axis motor 45 that is continuous with the X-axis shaft 41. A slit plate having a plurality of slits is provided in the X-axis optical encoder 43 so as to face the lattice disk. Inside the X-axis optical encoder 43, a light receiving element and a light emitting element are provided so as to sandwich the lattice disk and the slit plate.

[3. Shading plate configuration]
The configuration of the light shielding plate 50 will be described with reference to FIGS. The light shielding plate 50 is made of, for example, a metal such as aluminum or stainless steel or a resin material. The light shielding plate 50 is painted black to prevent light reflection. The light shielding plate 50 is fixed to the Y-axis galvano scanner 30 with screws B (see FIG. 5). The light shielding plate 50 extends from a first position Q1 that is separated by a predetermined distance from the center P of the fθ lens 26 to a second position Q2 that is closer to the center P of the fθ lens 26 than the first position Q1 ( (See FIG. 5).

  The light shielding plate 50 includes a first extension portion 51 and a second extension portion 52. The first extending portion 51 is attached to a position opposite to the center P of the fθ lens 26 of the Y-axis galvano scanner 30 and extends from the lower side of the Y-axis optical encoder 33 to the upper side of the Y-axis optical encoder 33 ( (See FIG. 5). The second extending portion 52 is in the crossing direction (for example, the front-rear direction) intersecting with the up-down direction and separated from the center P of the fθ lens 26 by a predetermined distance from the first position Q1 in the front-rear direction. It extends to a second position Q2 that is closer to the center P than the first position Q1 (see FIG. 5). The second extending portion 52 extends from the first extending portion 51 between the Y-axis galvano scanner 30 and the upper surface portion 12 of the top cover 11B of the housing 11 (see FIG. 5). That is, the light shielding plate 50 is bent substantially vertically, whereby the first extending portion 51 and the second extending portion 52 are formed.

  The light shielding plate 50 is provided with a first cable clamp 60 and a second cable clamp 70. The first cable clamp 60 is provided on the surface 52 </ b> A of the second extending portion 52 of the light shielding plate 50. The surface 52A is a surface facing the upper surface portion 12 of the top cover 11B of the housing 11. The first cable clamp 60 holds the wiring 34 from the Y-axis galvano scanner 30 and the wiring 44 from the X-axis galvano scanner 40. The second cable clamp 70 is provided on the surface 51 </ b> A of the first extension portion 51 of the light shielding plate 50. The surface 51A is a surface located on the opposite side to the Y-axis galvano scanner 30. The second cable clamp 70 holds the wiring 34 from the Y-axis galvano scanner 30 and the wiring 44 from the X-axis galvano scanner 40.

[4. Summary]
That is, in the laser processing head 1 according to this embodiment, the laser light source 22 and the scanning unit 25 are built in the housing 11. An fθ lens 26 is provided on the base plate 21 of the housing 11. Laser light from the laser light source 22 is two-dimensionally scanned by the scanning unit 25 and reflected downward. The laser light that is two-dimensionally scanned by the scanning unit 25 passes through the fθ lens 26 and is emitted to the outside of the housing 11. A part of the laser light emitted to the outside of the housing 11 is reflected upward by a workpiece (not shown). If the reflected light enters the inside of the housing 11 through the fθ lens 26, it is considered that the reflected light is reflected by the upper surface portion 12 of the top cover 11B of the housing 11.

  On the other hand, the scanning unit 25 built in the housing 11 is provided with a Y-axis galvano scanner 30. The Y-axis galvano scanner 30 includes a Y-axis shaft 31 extending in the vertical direction, a Y-axis reflecting mirror 32 attached to a lower end 31A of the Y-axis shaft 31, and a Y-axis optical type provided on an upper end 31B of the Y-axis shaft 31. And an encoder 33. Therefore, if the reflected light is reflected by the upper surface portion 12 of the housing 11, the reflected light may strike the Y-axis optical encoder 33. However, in the laser processing head 1 according to the present embodiment, the second extending portion 52 of the light shielding plate 50 is provided between the Y-axis galvano scanner 30 and the upper surface portion 12 of the housing 11. With such a configuration, even if light is reflected by the upper surface portion 12 of the housing 11, it is possible to prevent the reflected light from hitting the Y-axis optical encoder 33 by the second extending portion 52 of the light shielding plate 50.

  In the laser processing head 1 according to this embodiment, the Y-axis galvano scanner 30 is located above the fθ lens 26. In order to reduce the size of the laser processing head 1 according to this embodiment, it is advantageous to dispose the Y-axis galvano scanner 30 above the fθ lens 26. However, when the reflected light reflected upward enters the housing 11 through the fθ lens 26, there is a possibility that the upper surface portion 12 of the housing 11 may reflect the light downward. for that reason. When the Y-axis galvano scanner 30 is positioned above the fθ lens 26, the possibility that the reflected light strikes the Y-axis optical encoder 33 increases. However, since the light shielding plate 50 is provided, it is possible to simultaneously reduce the size of the laser processing head 1 according to this embodiment and prevent the reflected light from hitting the Y-axis optical encoder 33.

  Further, in the laser processing head 1 according to the present embodiment, the light shielding plate 50 is located at the center P of the fθ lens 26 in the front-rear direction from the first position Q1 that is a predetermined distance away from the center P of the fθ lens 26 in the front-rear direction. However, it extends to the second position Q2 closer to the first position Q1. With this configuration, the laser light reflected by the upper surface portion 12 of the top cover 11B of the housing 11 is compared with the case where the light shielding plate 50 is disposed only above the Y-axis optical encoder 33. It is possible to more reliably prevent hitting 33.

  In the laser processing head 1 according to the present embodiment, the light shielding plate 50 includes a first extending portion 51 and a second extending portion 52. The first extending portion 51 extends from the lower side of the Y-axis optical encoder 33 to the upper side of the Y-axis optical encoder 33. The second extending portion 52 extends from the first extending portion 51 between the Y-axis galvano scanner 30 and the upper surface portion 12 of the top cover 11B of the housing 11. Since the Y-axis galvano scanner 30 is attached at a position opposite to the center P of the fθ lens 26, the first light path L travels the optical path L from the laser light source 22 to the fθ lens 26 via the scanning unit 25. The protruding portion 51 is not blocked.

  Further, the laser processing head according to the present embodiment includes the wiring 34 from the Y-axis galvano scanner 30 and the first cable clamp 60. The first cable clamp 60 is provided on a surface 52 </ b> A that faces the upper surface portion 12 of the top cover 11 </ b> B of the housing 11 at the surface 52 </ b> A of the second extending portion 52 of the light shielding plate 50, and the wiring 34 from the Y-axis galvano scanner 30. Hold. With such a configuration, the wiring 34 from the Y-axis galvano scanner 30 can be removed from the range in which the laser light is scanned by the Y-axis galvano scanner 30.

  Further, the laser processing head 1 according to this embodiment includes a second cable clamp 70. The second cable clamp 70 is provided on a surface 51A located on the opposite side of the Y-axis galvano scanner 30 on the surface 51A of the first extending portion 51 of the light shielding plate 50, and holds the wiring 34 from the Y-axis galvano scanner 30. To do. With such a configuration, the wiring 34 from the Y-axis galvano scanner 30 can be further removed from the range in which the laser light is scanned by the Y-axis galvano scanner 30.

  In the laser processing head 1 according to this embodiment, the scanning unit 25 built in the housing 11 is provided with an X-axis galvano scanner 40. The X-axis galvano scanner 40 includes an X-axis shaft 41 extending in the left-right direction, an X-axis reflection mirror 42 attached to one end 41A of the X-axis shaft 41, and the X-axis reflection mirror 42 on the opposite side in the left-right direction and fθ. The lens 26 includes an X-axis optical encoder 43 provided outside in the left-right direction. With such a configuration, the laser beam reflected from the outside of the housing 11 and directed to the X-axis optical encoder 43 can be blocked by the frame provided on the outer periphery of the fθ lens 26.

  In the laser processing head 1 according to the present embodiment, the light shielding plate 50 is provided only in the Y-axis galvano scanner 30. As described above, the laser light reflected from the outside of the housing 11 and directed to the X-axis galvano scanner 40 is blocked by the frame provided on the outer periphery of the fθ lens 26. Therefore, it is not necessary to provide the light shielding plate 50 in the X-axis galvano scanner 40, and the laser processing head 1 according to this embodiment that can prevent the reflected light from hitting the X-axis optical encoder 43 with a simple configuration is obtained.

[5. Others]
In addition, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning.
For example, the fθ lens 26 may be an arbitrary shape instead of a circular shape in plan view. In this case, the definition of the center P of the fθ lens 26 such as a geometric center, a center of gravity, or a rotation center may be used.

DESCRIPTION OF SYMBOLS 1 Laser processing head 11 Case 11A Base 11B Top cover 12 Top cover upper surface part 21 Base plate 22 Laser light source 25 Scan unit 26 fθ lens 30 Y-axis galvano scanner 31 Y-axis shaft 31A Lower end 31B of Y-axis shaft Upper end 32 Y-axis reflection mirror 33 Y-axis optical encoder 34 Wiring 40 from Y-axis galvano scanner X-axis galvano scanner 41 X-axis shaft 41A X-axis shaft one end 42 X-axis reflection mirror 43 X-axis optical encoder 50 Light shielding plate 51 First extending portion 51A A surface 52 on the opposite side of the Y-axis galvano scanner on the surface of the first extending portion 52 Second extending portion 52A On the upper surface portion of the top cover of the housing on the surface of the second extending portion Opposing surface 60 First cable clamp 70 Second cable clamp P fθ lens center Q1 first Location Q2 second position

Claims (8)

A laser processing head provided in a laser marker,
A housing having an upper wall and a lower wall;
A laser light source built in the housing;
A scanning unit that is built in the housing and reflects light downward by two-dimensionally scanning light from the laser light source;
A transparent member that is provided on the lower wall of the casing and transmits light two-dimensionally scanned by the scanning unit to the outside of the casing;
A first shaft extending in the vertical direction;
A first reflecting mirror attached to the lower end of the first shaft;
A first optical encoder provided on an upper end side of the first shaft, and a first galvano scanner provided in the scanning unit;
A light shielding plate provided between the first galvano scanner and the upper wall of the housing;
Equipped with a,
The shading plate is
A first extension portion attached to a position opposite to the center of the transparent member of the first galvano scanner, and extending from a lower side than the first optical encoder to an upper side than the first optical encoder;
A laser processing head, comprising: a second extension portion extending from the first extension portion toward the first galvano scanner and an upper wall of the housing . The laser processing head according to claim 1,
The laser processing head, wherein the galvano scanner is located above the transparent member. The laser processing head according to claim 1 or 2,
The light shielding plate is closer to the center of the transparent member in the intersecting direction than the first position from a first position that is separated from the center of the transparent member by a predetermined distance in the intersecting direction intersecting the vertical direction. A laser processing head characterized by extending to a second position. A laser processing head according to any one of claims 1 to 3 ,
Comprising wiring from the first galvo scanner;
A first cable clamp for holding wiring from the first galvano scanner is provided on a surface facing the upper wall of the housing at the surface of the second extending portion of the light shielding plate. Laser processing head. A laser processing head according to any one of claims 1 to 4,
A second cable clamp for holding a wiring from the first galvano scanner, provided on a surface of the light shielding plate on a side opposite to the first galvano scanner on the surface of the first extension portion; Laser processing head characterized by A laser processing head according to any one of claims 1 to 5 ,
A second shaft extending in the intersecting direction intersecting the vertical direction;
A second reflecting mirror attached to one end of the second shaft;
A second optical encoder provided on the scanning unit, the second optical encoder provided on the opposite side in the intersecting direction with the second reflecting mirror and on the outer side in the intersecting direction with the transparent member. A laser processing head characterized by further comprising: The laser processing head according to claim 6 ,
The laser processing head, wherein the light shielding plate is provided only in the first galvano scanner. A laser processing head provided in a laser marker,
A housing having an upper wall and a lower wall;
A laser light source built in the housing;
A scanning unit that is built in the housing and reflects light downward by two-dimensionally scanning light from the laser light source;
A transparent member that is provided on the lower wall of the casing and transmits light two-dimensionally scanned by the scanning unit to the outside of the casing;
A first shaft extending in the vertical direction;
A first reflecting mirror attached to the lower end of the first shaft;
A first optical encoder provided on an upper end side of the first shaft;
A first galvano scanner provided in the scanning unit;
A light shielding plate provided between the first galvano scanner and the upper wall of the housing;
A second shaft extending in the intersecting direction intersecting the vertical direction;
A second reflecting mirror attached to one end of the second shaft;
A second optical encoder provided on the opposite side in the intersecting direction with the second reflecting mirror and on the outside in the intersecting direction with the transparent member;
A second galvano scanner provided in the scanning unit;
The laser processing head, wherein the light shielding plate is provided only in the first galvano scanner.

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