WO2012124974A3 - 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 - Google Patents

그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 Download PDF

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Publication number
WO2012124974A3
WO2012124974A3 PCT/KR2012/001829 KR2012001829W WO2012124974A3 WO 2012124974 A3 WO2012124974 A3 WO 2012124974A3 KR 2012001829 W KR2012001829 W KR 2012001829W WO 2012124974 A3 WO2012124974 A3 WO 2012124974A3
Authority
WO
WIPO (PCT)
Prior art keywords
raw material
gas
manufacturing
graphene film
fluid raw
Prior art date
Application number
PCT/KR2012/001829
Other languages
English (en)
French (fr)
Other versions
WO2012124974A2 (ko
Inventor
윤종혁
Original Assignee
삼성테크윈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020120024453A external-priority patent/KR101806916B1/ko
Application filed by 삼성테크윈 filed Critical 삼성테크윈
Priority to CN201280024034.3A priority Critical patent/CN103534206B/zh
Priority to US14/005,670 priority patent/US20140023783A1/en
Publication of WO2012124974A2 publication Critical patent/WO2012124974A2/ko
Publication of WO2012124974A3 publication Critical patent/WO2012124974A3/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18—Stationary reactors having moving elements inside
    • B01J19/1887—Stationary reactors having moving elements inside forming a thin film
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18—Stationary reactors having moving elements inside
    • B01J19/22—Stationary reactors having moving elements inside in the form of endless belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/186—Preparation by chemical vapour deposition [CVD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/4557—Heated nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

본 발명은 탄소를 함유하는 원료 유체를 공급하는 원료 유체 공급부, 상기 원료 유체 공급부로부터 상기 원료 유체를 공급 받아 상기 원료 유체를 열 분해하여 분출하는 기체 분출부, 상기 기체 분출부로부터 분출된 기체와 접하도록 배치된 촉매 기판 및 적어도 상기 분출된 기체와 접하는 촉매 기판의 영역을 국부적으로 가열하도록 배치된 가열 장치를 포함하는 그래핀 필름 제조 장치를 제공한다.
PCT/KR2012/001829 2011-03-17 2012-03-14 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 WO2012124974A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280024034.3A CN103534206B (zh) 2011-03-17 2012-03-14 石墨烯薄膜制造装置及石墨烯薄膜制造方法
US14/005,670 US20140023783A1 (en) 2011-03-17 2012-03-14 Apparatus for manufacturing graphene film and method for manufacturing graphene film

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0023828 2011-03-17
KR20110023828 2011-03-17
KR10-2012-0024453 2012-03-09
KR1020120024453A KR101806916B1 (ko) 2011-03-17 2012-03-09 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법

Publications (2)

Publication Number Publication Date
WO2012124974A2 WO2012124974A2 (ko) 2012-09-20
WO2012124974A3 true WO2012124974A3 (ko) 2012-11-08

Family

ID=46831206

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/001829 WO2012124974A2 (ko) 2011-03-17 2012-03-14 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법

Country Status (1)

Country Link
WO (1) WO2012124974A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020187896A1 (en) * 2019-03-18 2020-09-24 The 280 Company System and process for manufacturing a graphene layer on a substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060052662A (ko) * 2003-03-24 2006-05-19 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 카본 나노 구조물의 고효율 합성 방법, 장치 및 카본 나노구조물
JP2009091174A (ja) * 2007-10-04 2009-04-30 Univ Of Fukui グラフェンシートの製造方法
KR20090043418A (ko) * 2007-10-29 2009-05-06 삼성전자주식회사 그라펜 시트 및 그의 제조방법
JP2010269944A (ja) * 2009-05-19 2010-12-02 Nippon Telegr & Teleph Corp <Ntt> グラファイト薄膜の製造方法および製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060052662A (ko) * 2003-03-24 2006-05-19 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 카본 나노 구조물의 고효율 합성 방법, 장치 및 카본 나노구조물
JP2009091174A (ja) * 2007-10-04 2009-04-30 Univ Of Fukui グラフェンシートの製造方法
KR20090043418A (ko) * 2007-10-29 2009-05-06 삼성전자주식회사 그라펜 시트 및 그의 제조방법
JP2010269944A (ja) * 2009-05-19 2010-12-02 Nippon Telegr & Teleph Corp <Ntt> グラファイト薄膜の製造方法および製造装置

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WO2012124974A2 (ko) 2012-09-20

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