WO2012124462A1 - Procédé permettant de produire un film de capteur électrostatique comprenant un film conducteur sur une surface - Google Patents

Procédé permettant de produire un film de capteur électrostatique comprenant un film conducteur sur une surface Download PDF

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Publication number
WO2012124462A1
WO2012124462A1 PCT/JP2012/054860 JP2012054860W WO2012124462A1 WO 2012124462 A1 WO2012124462 A1 WO 2012124462A1 JP 2012054860 W JP2012054860 W JP 2012054860W WO 2012124462 A1 WO2012124462 A1 WO 2012124462A1
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WIPO (PCT)
Prior art keywords
film
conductive film
light
electrostatic sensor
sided
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PCT/JP2012/054860
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English (en)
Japanese (ja)
Inventor
秀明 灘
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日本写真印刷株式会社
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Filing date
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Publication of WO2012124462A1 publication Critical patent/WO2012124462A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
    • B32B27/365—Layered products comprising a layer of synthetic resin comprising polyesters comprising polycarbonates
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/20—Inorganic coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B32B2307/734—Dimensional stability
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • the present invention relates to an electrostatic sensor incorporated in a PDA, a portable information terminal such as a handy terminal, an OA device such as a copy machine or a facsimile, a smart phone, a mobile phone, a portable game device, an electronic dictionary, a car navigation system, a small PC, and various home appliances. It is related with the manufacturing method of the film with a single-sided electrically conductive film used for manufacture.
  • Patent Document 1 a plurality of first electrodes extending in parallel to each other are provided on the surface of the film body, and the back surface of the film body is provided with respect to the first electrode group.
  • a plurality of parallel second electrodes extending in a direction perpendicular to each other and outputting a current value corresponding to the capacitance between the first electrode group and the second electrode group A sensor is disclosed.
  • the first electrode group and the second electrode group are not provided on the front and back surfaces of the film body alone, but are transmitted in advance on one surface of the base film having translucency.
  • the substrate films of the first and second electrode films also change in size, and the dimensions between the electrodes of the first electrode group and between the electrodes of the second electrode group are distorted. . Further, there is another problem that the bonding accuracy itself between the first electrode film and the second electrode film is extremely low.
  • Patent Document 2 the present applicant prepares a set of films with a single-sided conductive film in which a conductive film having a light-transmitting property is formed in advance on one surface of a base film having a light-transmitting property, After laminating the films with single-sided conductive films so that the conductive film is on the outside, the first conductive film is patterned by etching to form a first electrode group consisting of electrodes arranged in parallel. And a method of manufacturing a capacitance sensor comprising a plurality of electrodes arranged in parallel by patterning the other conductive film by etching and forming a second electrode group orthogonal to the first electrode group. Proposed.
  • the applicant of the present invention relates to the double-sided etching performed after the bonding, and when exposing and developing the resist layer provided on the surface on one side to form a pattern, the light beam of the exposure is on the other side.
  • a proposal as shown in Patent Document 3 is also proposed. That is, before the two single-sided conductive film films are bonded together, a light-shielding conductive film is laminated in advance on the light-transmitting conductive film, and a resist layer provided on one side surface is laminated. The light beam to be exposed is shielded before reaching the resist layer provided on the surfaces on the other side. Note that after the first and second electrode groups are formed by etching, the light-shielding conductive film is removed at least in the active area, so that the display on the back surface can be visually recognized.
  • a continuous film forming method is used by sputtering or other vacuum film forming methods.
  • a discharge gas sputtering gas
  • Ar a discharge gas
  • a negative voltage of 300 to 700 V is applied to the target
  • plasma is generated by the generated glow discharge
  • Ar ions in the plasma are generated. Is caused to collide with the target with high energy (several hundreds eV) corresponding to the applied voltage to perform sputtering (see FIG. 8).
  • Japanese Patent No. 3426847 JP 2009-70191 A Japanese Patent No. 4601710
  • the base film 102 when the film is formed with low power for the purpose of reducing damage to the base film 102, the base film 102 must be formed by reciprocating the sputtering chamber 34 many times, so-called multiple passes must be performed. In addition, there is a problem that the productivity of forming the conductive layer is lowered.
  • an object of the present invention is to solve the above-described problems, and an electrostatic sensor capable of obtaining a film with a single-sided conductive film for an electrostatic sensor that does not generate thermal wrinkles even when a conductive layer is formed at high power. It is providing the manufacturing method of the film with a single-sided electrically conductive film.
  • a base film having translucency and a thermal wrinkle prevention film are laminated via an adhesive, and the thermal wrinkle prevention film is temporarily bonded to one side of the base film.
  • Obtaining a laminated body Laminating a conductive film having translucency by physical vapor deposition on the base film side surface of the laminate; A step of laminating a light-shielding conductive film by a physical vapor deposition method on the light-transmitting conductive film; A step of peeling the thermal wrinkle prevention film from the laminate provided with the light-transmitting conductive film and the light-shielding conductive film, and a single-sided conductive layer for an electrostatic sensor Provided is a method for producing an attached film.
  • the method for producing a film with a single-sided conductive layer for an electrostatic sensor according to the first aspect, wherein the physical vapor deposition is sputtering.
  • a method for producing a film with a single-sided conductive layer for an electrostatic sensor according to the first aspect or the second aspect, wherein the translucent conductive film is an ITO film.
  • a fourth aspect of the present invention there is provided the method for producing a film with a single-sided conductive layer for an electrostatic sensor according to any one of the first to third aspects, wherein the light-shielding conductive film is a copper film.
  • a method for producing a film with a single-sided conductive layer for an electrostatic sensor according to any one of the first to fourth aspects, wherein the substrate film is a PC film having a thickness of 15 to 1000 ⁇ m.
  • thermo wrinkle prevention film is a PET film.
  • the electrostatic sensor single-sided surface according to any one of the first to sixth aspects, wherein a photosensitive layer is laminated on the light-shielding conductive film before the thermal wrinkle prevention film is peeled off.
  • a method for producing a film with a conductive layer is provided.
  • the method for producing a film with a single-sided conductive film for an electrostatic sensor according to the present invention is configured as described above. Therefore, even when a conductive layer is formed at a high power, the thermal wrinkle in which the shrinkage of the base film is temporarily adhered to the base film. Suppressed by the prevention film, no thermal wrinkles are generated. Further, since film formation with high power is possible, the film formation productivity of the conductive layer is improved.
  • FIG. 1 It is a top view of the electrostatic sensor manufactured using the film with the single-sided electrically conductive film for electrostatic sensors obtained by this invention. It is the elements on larger scale of the electrostatic sensor shown in FIG. It is sectional drawing of the electrostatic sensor shown in FIG. It is a figure which shows the process of manufacturing the electrostatic sensor of FIG. 1 using the film with the single-sided electrically conductive film for electrostatic sensors obtained by this invention. It is a figure which shows the process of manufacturing the electrostatic sensor of FIG. 1 using the film with the single-sided electrically conductive film for electrostatic sensors obtained by this invention. It is a figure which shows the process of manufacturing the electrostatic sensor of FIG. 1 using the film with the single-sided electrically conductive film for electrostatic sensors obtained by this invention.
  • FIG. 1 is a plan view of an electrostatic sensor manufactured using the film with a single-sided conductive film for an electrostatic sensor obtained by the present invention
  • FIG. 2 is a partially enlarged view of the electrostatic sensor shown in FIG. 1
  • FIG. 4A to 4I are diagrams showing a process of manufacturing the electrostatic sensor of FIG. 1 using the film with a single-side conductive film for electrostatic sensor obtained by the present invention.
  • connection wiring 469 and a plurality of rhombus electrodes 46 penetrating therethrough are taken as a set, and the set is repeatedly arranged in the horizontal direction (X direction) in the figure.
  • a plurality of rhombus electrodes 47 and connection wirings 479 penetrating them are provided on the surface of the base films 2 and 2 bonded together in the same manner.
  • the extending direction of the connection wiring 479 is different from that of the connection wiring 469 in the horizontal direction (X direction) in the drawing.
  • the direction in which a set of the connection wiring 479 and the plurality of rhombus electrodes 47 penetrating the connection wiring 479 is repeatedly arranged is the vertical direction (Y direction) in the figure.
  • the rhombus electrode 46 is disposed so as to fill the gaps between the plurality of connection wirings 479, while the rhombus electrode 47 is disposed so as to fill the gaps between the plurality of connection wirings 469. Is done.
  • the positional relationship between the diamond electrode 46 and the diamond electrode 47 is complementary. That is, the plurality of rhombus electrodes 47 are arranged so as to fill in the rhombus-shaped gaps that occur when the rhombus electrodes 46 are arranged in a matrix.
  • the X-direction electrode and the Y-direction electrode are arranged so as to form a lattice in plan view in this way, a user's finger or the like is placed at any position on the lattice via a cover glass that covers the electrostatic sensor 1.
  • a capacitor is formed between the finger and the X-direction electrode touched by the finger, and between the finger and the Y-direction electrode touched by the capacitor.
  • a capacitor is formed.
  • the position detector of the external circuit detects the amount of change in capacitance that occurs in such a case, or even the X-direction electrode and Y-direction electrode having the maximum capacitance, and touches anywhere in the central window 3. Can be acquired as a set of an X coordinate value and a Y coordinate value as a specific value.
  • a light-transmitting conductive film 7 and a light-shielding conductive film 8 are sequentially laminated on one surface of the light-transmitting base film 2 in sequence.
  • a set of the single-sided conductive film 9 is prepared, and the single-sided conductive film 9 is bonded to each other so that the light-shielding conductive film 8 is on the outside (see FIG. 4A).
  • First photosensitive layers 10 are respectively formed by coating a photosensitive material using (see FIG. 4B), and then masks 11 and 12 having different patterns are disposed on both first photosensitive layers 10 and 10, respectively. Both first photosensitive layers 10 and 10 are exposed simultaneously (see FIG.
  • a thermal wrinkle prevention film 16 has an adhesive 17 on one side of a base film 2 having translucency as a base material for producing a film 9 with a single-sided conductive film for electrostatic sensors. Then, the laminated body 18 laminated and temporarily bonded is produced. In addition, the obtained laminated body 18 is web shape, and is wound up by a roll.
  • the base film 2 having translucency a PC film is used because it is excellent in optical isotropy. In the case of a PC film, thermal wrinkles are particularly likely to occur without the thermal wrinkle prevention film 16.
  • the thickness of the base film 2 is 15 to 1000 ⁇ m. It is difficult to produce a film having a thickness of less than 15 ⁇ m, and conversely, if the thickness exceeds 1000 ⁇ m, the translucency is lowered, and when wound on a roll, the winding diameter is increased and the cost is increased.
  • the adhesive 17 is formed by spraying or coating an acrylic adhesive or the like on either the base film 2 or the heat wrinkle prevention film 16 having translucency. In the example shown in FIG. 5, the adhesive 17 is provided on the thermal wrinkle prevention film 16 side before laminating.
  • the thermal wrinkle prevention film 16 a PET film or other resin film having heat resistance during sputtering is used.
  • the thickness of the thermal wrinkle prevention film 16 should just be the thickness from which the heat resistance at the time of film-forming of the electrically conductive film 7 which has translucency in the material, and the electrically conductive film 8 which has light-shielding property, etc. are obtained.
  • the surface of the thermal wrinkle prevention film 16 that is in contact with the adhesive 17 is preferably subjected to a release treatment by spraying or coating a silicon resin, a fluorine resin, or the like. As described above, when the thermal wrinkle prevention film 16 that has been subjected to the release treatment in advance is used, the thermal wrinkle prevention film 16 described later can be easily peeled off from the adhesive 17.
  • the pretreatment for improving the adhesiveness with the electrically conductive film 7 which has translucency may be given previously to the surface (film-forming surface) of the laminated body 18 at the base film 2 side.
  • this pretreatment include physicochemical treatment such as plasma treatment and chemical treatment such as chemical treatment, but plasma treatment that can be performed continuously with formation of the light-transmitting conductive film 7 under vacuum. Is preferred.
  • a light-shielding conductive film 8 is further formed on the light-transmitting conductive film 7 by sputtering.
  • the light-shielding conductive film 8 is a layer having a light-shielding property to light used for exposure of the first photosensitive layer 10 described above, that is, a layer having a property of not transmitting the exposure light. Therefore, the light from the exposure light source that has passed through the first photosensitive layer 10 on one side in the double-sided exposure step described above reaches the first photosensitive layer 10 on the other side by the conductive film 8 having a light shielding property. Absent.
  • FIG. 8 is a schematic view showing an example of the configuration of a film forming apparatus for a film with a single-sided conductive film for an electrostatic sensor.
  • the illustrated film forming apparatus 30 includes an unwinding unit 32 that continuously feeds a laminate 18 of a roll-shaped base film 2 and a thermal wrinkle prevention film 16 into a vacuum chamber 31 that is maintained at a predetermined degree of vacuum. And a winding unit 33 that winds up the laminated body 18 fed out from the unwinding unit 32.
  • the laminated body 18 fed out from the unwinding section 32 is guided to the sputtering chamber 34, and in the sputtering chamber 34, the substrate 18 is wound around the peripheral surface of the main roller 35 with the base film 2 side facing outward.
  • the conductive film 7 having the above-described translucency and the conductive film 8 having a light-shielding property are sequentially formed on the surface of the base film 2 having the light property.
  • a first sputter chamber 34A, a second sputter chamber 34B, a third sputter chamber 34C, a fourth sputter chamber 34D, and a fifth sputter chamber 34E are formed in this order so as to surround the main roller 35.
  • a first target 36a, a second target 36b, a third target 36c, a fourth target 36d, and a fifth target 36e are arranged.
  • the first target 36a is composed of a target for forming the light-transmitting conductive film 7
  • the second to fifth targets 36b to 36e are composed of targets for forming the light-shielding conductive film 8.
  • the second to fifth targets 36b to 36e are selected according to the type of constituent metal of the above-described conductive film 8 having a light shielding property.
  • a copper target is used in the case of a copper film.
  • an ITO film having a predetermined thickness is formed in the first sputtering chamber 34A. Then, continuous film formation of copper of a predetermined thickness is performed in the next second to fifth sputtering chambers 34B to 34E.
  • the laminate 18 wound around the winding portion 33 of the film forming apparatus 30 is then peeled off from the thermal wrinkle prevention film 16.
  • the film 9 with a single-sided conductive film for electrostatic sensors is removed (see FIG. 9).
  • the adhesive force of temporary adhesion of the thermal wrinkle prevention film 16 to the base film 2 is 7 to 9 N / 25 mm. If the adhesive force of temporary adhesion is less than 7 N / 25 mm, the thermal wrinkle prevention film 16 is easily peeled off before or during the formation of the light-transmitting conductive film 7 and the light-shielding conductive film 8. The effect of can not be obtained. Moreover, when the adhesive force of temporary adhesion exceeds 9 N / 25 mm, it becomes difficult to peel off the thermal wrinkle prevention film 16 after the film formation of the light-transmitting conductive film 7 and the light-shielding conductive film 8.
  • the surface of the laminate 18 opposite to the surface on which the conductive film 7 having a light-transmitting property and the conductive film 8 having a light-shielding property are formed is provided with a thermal wrinkle.
  • the adhesive 17 used to temporarily bond the prevention film 16 remains. This adhesive 17 is used to bond the films 9 with single-sided conductive film 9 together when the obtained films 9 with single-sided conductive film are bonded together so that the light-shielding conductive film 8 is on the outside. Reused.
  • the present invention is not limited to the first embodiment, and can be implemented in various other modes.
  • sputtering is used to form the light-transmitting conductive film 7 and the light-shielding conductive film 8, but other than sputtering, a vacuum deposition method, an ion plating method, etc.
  • PVD physical vapor deposition
  • the laminating roll 21 and the laminating nip roll 22 are nipped while being heated at the time of laminating. However, if smoothness after application of the adhesive 17 can be obtained, the nipping is performed without heating. But you can.
  • the thermal wrinkle prevention film 16 is peeled and removed immediately after the formation of the light-transmitting conductive film 7 and the light-shielding conductive film 8 by sputtering.
  • a photosensitive layer 10 (corresponding to the first photosensitive layer 10 shown in FIG. 4B) may be laminated on the light-shielding conductive film 8 (see FIG. 10). In this case, it is not necessary to laminate the first photosensitive layer 10 after the films 9 with single-sided conductive films are bonded together so that the light-shielding conductive film 8 is on the outside.
  • the photosensitive layer 10 is made of an acrylic photoresist material having a thickness of 10 to 20 ⁇ m, which can be developed with an alkaline solution or the like by exposure with a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a laser beam or a metal halide lamp.
  • Examples of the method for forming the photosensitive layer 10 include general-purpose printing methods such as gravure, screen, and offset, methods using various coaters, methods such as painting and dipping, and various methods such as a dry film resist (DFR) method.
  • the light-transmitting conductive film 7 it is preferable to crystallize by a method such as heat treatment after the sputter film formation. This is because crystallization improves the etching resistance and makes it easier to etch only the conductive film 8 having a light shielding property more selectively.
  • the base film 2 temporarily bonded to the thermal wrinkle prevention film 16 may be provided with various functional layers on one side or both sides in advance.
  • a hard coat layer can be provided on one side or both sides for protecting the base film 2.
  • an optical adjustment layer can be provided on the surface of the base film 2 on which the conductive film 7 having translucency is formed.
  • the surface of the thermal wrinkle prevention film 16 that contacts the adhesive 17 is subjected to mold release treatment, but conversely, the surface of the base film 2 that contacts the adhesive 17 is released from the mold. You may peel the adhesive agent 17 with the heat wrinkle prevention film 16 by giving a process.
  • the obtained film 9 with a single-sided conductive film are the ones from which the adhesive 17 has been peeled off, it is necessary to newly apply an adhesive to bond the single-sided conductive film 9 with each other. is there.
  • the adhesive 17 remaining on the other film 9 with a single-sided conductive film is attached with a single-sided conductive film. It is reused for bonding the films 9 together.
  • the hard coat layer can also function as a release treatment.
  • Example 2 A thermal wrinkle prevention film made of a PET film (125 ⁇ m) obtained by applying a silicone resin to a base film made of a PC film (100 ⁇ m) and being subjected to a release treatment is laminated with an acrylic adhesive temporarily. Using the bonded laminate 18, an ITO film (20 nm) was formed by sputtering on the surface of the laminate 18 on the base film side, and a copper film (300 nm) was continuously formed thereon by sputtering. . Thereafter, the thermal wrinkle prevention film was peeled off to obtain a film with a single-sided conductive film for electrostatic sensors.
  • the temporary adhesion of the thermal wrinkle prevention film prevents the generation of thermal wrinkles at high power compared to the case without the thermal wrinkle prevention film (conventional example). Yes. Further, since the film can be formed with high power by temporary adhesion (the present invention) of the thermal wrinkle prevention film, the film formation productivity of the conductive layer is excellent.
  • the invention of the present application is the manufacture of electrostatic sensors incorporated in PDAs, handheld terminals and other portable information terminals, copiers, OA equipment such as facsimiles, smartphones, mobile phones, portable game devices, electronic dictionaries, car navigation systems, small PCs, various home appliances, etc.
  • the present invention relates to a method for producing a film with a single-sided conductive film used in the above.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

L'invention concerne un procédé permettant de produire un film de capteur électrostatique comprenant un film conducteur sur une surface, qui permet d'obtenir un film de capteur électrostatique comprenant un film conducteur sur une surface sans plissement thermique, même lorsque le film conducteur est formé à une puissance élevée. Pour ce faire, ce procédé permettant de produire un film de capteur électrostatique comprenant un film conducteur sur une surface consiste à : obtenir un laminé, un film de substrat perméable à la lumière et un film permettant d'empêcher un plissement thermique étant laminés au moyen d'un agent adhésif afin de lier provisoirement le film pour empêcher le plissement thermique sur une surface du film de substrat; laminer un film conducteur perméable à la lumière par adsorption physique sur la surface du côté du film de substrat du laminé; obtenir un film conducteur bloquant la lumière par évaporation physique sur le film conducteur perméable à la lumière; et peler le film pour empêcher le pelage thermique du laminé comprenant le film conducteur perméable à la lumière et le film conducteur bloquant la lumière.
PCT/JP2012/054860 2011-03-15 2012-02-28 Procédé permettant de produire un film de capteur électrostatique comprenant un film conducteur sur une surface WO2012124462A1 (fr)

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JP2011-056508 2011-03-15
JP2011056508A JP2012194644A (ja) 2011-03-15 2011-03-15 静電センサ用片面導電膜付フィルムの製造方法

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WO2012124462A1 true WO2012124462A1 (fr) 2012-09-20

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JP2014203421A (ja) * 2013-04-10 2014-10-27 株式会社タッチパネル研究所 静電容量式タッチパネル
CN104978058B (zh) * 2014-04-04 2019-05-07 宝宸（厦门）光学科技有限公司 电路元件及其制造方法
JP6720481B2 (ja) 2014-07-29 2020-07-08 大日本印刷株式会社 積層体、導電性積層体及びタッチパネル
JP6027633B2 (ja) * 2015-01-13 2016-11-16 日本写真印刷株式会社 タッチ入力センサの製造方法及び感光性導電フィルム
TWI732892B (zh) 2016-07-26 2021-07-11 日商松下知識產權經營股份有限公司 透視型電極用積層板、透視型電極素材、組件及透視型電極用積層板之製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009057637A1 (fr) * 2007-10-31 2009-05-07 Sumitomo Metal Mining Co., Ltd. Film conducteur transparent flexible et dispositif fonctionnel flexible l'utilisant
JP4601710B1 (ja) * 2009-09-11 2010-12-22 日本写真印刷株式会社 狭額縁タッチ入力シートとその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009057637A1 (fr) * 2007-10-31 2009-05-07 Sumitomo Metal Mining Co., Ltd. Film conducteur transparent flexible et dispositif fonctionnel flexible l'utilisant
JP4601710B1 (ja) * 2009-09-11 2010-12-22 日本写真印刷株式会社 狭額縁タッチ入力シートとその製造方法

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