WO2012117786A1 - Photosensitive composition, photosensitive solder-resist composition, photosensitive solder-resist film, permanent pattern, method for forming same, and printed circuit board - Google Patents

Photosensitive composition, photosensitive solder-resist composition, photosensitive solder-resist film, permanent pattern, method for forming same, and printed circuit board Download PDF

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Publication number
WO2012117786A1
WO2012117786A1 PCT/JP2012/051878 JP2012051878W WO2012117786A1 WO 2012117786 A1 WO2012117786 A1 WO 2012117786A1 JP 2012051878 W JP2012051878 W JP 2012051878W WO 2012117786 A1 WO2012117786 A1 WO 2012117786A1
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Prior art keywords
group
photosensitive
compound
solder resist
photosensitive composition
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PCT/JP2012/051878
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French (fr)
Japanese (ja)
Inventor
有岡 大輔
冨澤 秀樹
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富士フイルム株式会社
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Publication of WO2012117786A1 publication Critical patent/WO2012117786A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/035Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/085Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

Definitions

  • the present invention is a photosensitive composition suitably used for a solder resist, a photosensitive solder resist composition using the photosensitive composition, a photosensitive solder resist film using the photosensitive solder resist composition, and
  • the present invention relates to a high-definition permanent pattern (a protective film, an interlayer insulating film, a solder resist, etc.), a formation method thereof, and a printed board.
  • such a build-up wiring board is formed by laminating a film made of a thermosetting resin on an insulating board made of glass fiber and epoxy resin, and thermosetting the film to form an insulating layer.
  • An opening is formed, and then the surface of the insulating layer is chemically roughened and a copper film is deposited using an electroless copper plating method and an electrolytic copper plating method, thereby forming a conductor layer in the opening and insulating.
  • the wiring conductor layer is formed on the surface of the layer, and the insulating layer and the wiring conductor layer are repeatedly formed.
  • solder resist layer having a thickness of 20 ⁇ m to 50 ⁇ m is deposited on the surface of the wiring board in order to prevent oxidation and corrosion of the wiring conductor layer and to protect the insulating layer from heat when mounting electronic components on the wiring board. Is formed.
  • This solder resist layer is generally composed of an alkali-soluble photocrosslinkable resin that has good adhesion to the wiring conductor layer and the insulating layer, and a flexible resin, and has a coefficient of thermal expansion that is the same as that of the insulating layer and the wiring conductor layer. In order to match the expansion coefficient, the inorganic filler is contained in an amount of 5 to 75% by mass.
  • this solder resist layer generally contains a hydroxyl group or a carboxyl group in order for the alkali-soluble photocrosslinkable resin to be contained to develop developability when an opening is formed in the solder resist layer by exposure and development.
  • the water absorption rate is high and the moisture in the air is gradually absorbed, and this moisture reduces the insulation resistance of the solder resist layer to 10 8 ⁇ or less, causing short circuit between the wiring conductor layers.
  • the conductor layer is corroded, and as a result, the electrical reliability of the wiring board is deteriorated.
  • a technique for containing a nitrogen-containing heterocyclic compound (imidazole compound, triazole compound, etc.) in the solder resist layer is known.
  • this technique although the heat resistance of the solder resist layer is increased, there is a problem that the plating resistance is lowered.
  • the smoothness of the side surface of the resist pattern is poor, a gap is formed between the solder and the side surface of the resist pattern when soldering, and the gap expands due to heating, causing problems such as peeling of the solder. Then, there exists a problem that the smoothness of the resist pattern side surface is not enough.
  • a technique using a triazole compound in a photosensitive composition it has a carboxyl group-containing polymer binder, an average of at least one ethylenically unsaturated double bond and an average of at least one triazole ring.
  • a photosensitive composition containing a compound, a photopolymerizable monomer, and a photopolymerization initiator has been proposed (see, for example, Patent Document 1). According to this proposed technique, a composition with good adhesion can be obtained by suppressing development residue, but with this proposed technique, the insulation, plating resistance, and smoothness of the resist pattern side surface required for the solder resist layer are obtained. There is a problem that sex is not obtained.
  • an object of the present invention is to provide a photosensitive composition that is excellent in insulation, plating resistance, and smoothness of the side surface of a resist pattern.
  • the photosensitive composition of the present invention includes a compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. It is characterized by containing.
  • the present invention it is possible to provide a photosensitive composition that can solve the above-mentioned problems and achieve the above-mentioned object, and that is excellent in insulation, plating resistance, and smoothness of the resist pattern side surface.
  • the photosensitive composition of the present invention comprises at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and thermal crosslinking.
  • An agent preferably a carboxyl group-containing polymer compound and, if necessary, other components.
  • the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring includes at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent, and triazole. If it is a compound which has at least a ring, there will be no restriction
  • Examples of the group capable of reacting with the radical include an acryloyloxy group, a methacryloyloxy group, a vinylphenyl group, and an allyl group.
  • Examples of the group capable of reacting with the thermal crosslinking agent include a carboxyl group, an amino group, and a mercapto group.
  • the triazole ring may be any of 1,2,3-triazole ring and 1,2,4-triazole ring.
  • 1,2,3-triazole and 1,2,4-triazole are compounds represented by the following structural formula.
  • the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring is, in other words, at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent.
  • the bonding position of the organic group to the triazole ring is not particularly limited and may be appropriately selected depending on the purpose, and may be bonded to a nitrogen atom of the triazole ring or bonded to a carbon atom. May be.
  • a compound represented by the following general formula (I) is preferable.
  • X represents a triazole ring.
  • Y represents an organic group having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent.
  • n represents an integer of 1 to 3. When n is 2 to 3, Y may be the same or different.
  • Y may be bonded to a nitrogen atom of the triazole ring which is X, or may be bonded to a carbon atom.
  • n is preferably 1 to 2, and more preferably 2. When n is 2, it is advantageous in terms of insulation.
  • Y in the general formula (I) is preferably a group represented by the following general formula (II).
  • Y 1 represents an m + 1 valent organic group having 2 to 25 carbon atoms.
  • Z 1 represents any of a carboxyl group, an acryloyloxy group, and a methacryloyloxy group.
  • m represents an integer of 1 to 2. When m is 2, Z 1 may be the same or different.
  • the m + 1 valent organic group having 2 to 25 carbon atoms is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least one of a urea bond, an amide bond, an ester bond, and a thiourea bond is selected. And an m + 1 valent organic group having 2 to 25 carbon atoms.
  • the carbon number of the organic group is preferably 2 to 20, and more preferably 2 to 15.
  • the molecular weight of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring is not particularly limited and may be appropriately selected depending on the intended purpose. 1,000 is preferable, and 100 to 800 is more preferable.
  • Specific examples of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring include compounds represented by the following formulas.
  • the content of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring in the photosensitive composition is not particularly limited and is appropriately selected depending on the purpose. 1.0 mass% to 20 mass% is preferable with respect to the solid content of the photosensitive composition, and 1.5 mass% to 10 mass% is more preferable. When the content is less than 1.0% by mass, sufficient insulating properties may not be exhibited. When the content exceeds 20% by mass, heat resistance may be deteriorated. When the content is within the more preferable range, it is advantageous in terms of both heat resistance and insulating properties.
  • numerator is preferable.
  • at least one selected from monomers having a (meth) acryl group is more preferable.
  • the polymerizable compound is a compound different from a compound having at least one of a group capable of reacting with the radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring.
  • polyethyleneglycol mono (meth) acrylate polypropylene glycol mono (meth) acrylate, phenoxyethyl (meth)
  • Monofunctional acrylates and monofunctional methacrylates such as acrylates; polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, trimethylolethane tri (meth) acrylate, trimethylolpropane tri (meth) acrylate, trimethylolpropanedi (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, Pentaerythritol hexa (meth) acrylate, dip
  • Urethane acrylates ; polyester acrylates described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490, etc .; epoxy resins and (meth) acrylic acid And polyfunctional acrylates and methacrylates such as epoxy acrylates, which are reaction products.
  • dicyclopentanyl dimethanol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate Is more preferable.
  • the content of the polymerizable compound in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 2% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 3% by mass to 40% by mass is more preferable, and 4% by mass to 35% by mass is particularly preferable.
  • the content of the polymerizable compound is less than 2% by mass, pattern formation may not be possible, and when it exceeds 50% by mass, crack resistance may be inferior.
  • the content of the polymerizable compound is within the particularly preferable range, it is advantageous in that the pattern formability and crack resistance are improved.
  • the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected according to the purpose.
  • a halogenated hydrocarbon derivative, phosphine oxide, hexa examples include arylbiimidazole, oxime derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, and the like.
  • halogenated hydrocarbon derivative examples include a halogenated hydrocarbon derivative having a triazine skeleton and a halogenated hydrocarbon derivative having an oxadiazole skeleton.
  • the halogenated hydrocarbon derivative having a triazine skeleton is not particularly limited and may be appropriately selected depending on the intended purpose. For example, Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), compounds described in British Patent No. 1388492, compounds described in JP-A-53-133428, German Patent No. 3337024 Compounds, F.I. C. J. Schaefer et al. Org. Chem.
  • halogenated hydrocarbon derivative having an oxadiazole skeleton examples include compounds described in US Pat. No. 4,221,976.
  • the oxime derivative is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0085” of JP-A-2007-2030.
  • the ketone compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0087” of JP-A-2007-2030.
  • examples of photopolymerization initiators other than the above include compounds described in paragraph “0086” of JP-A-2007-2030.
  • a sensitizer can be added for the purpose of adjusting the exposure sensitivity and the photosensitive wavelength in exposure to the photosensitive layer described later.
  • the sensitizer can be appropriately selected by a visible light, an ultraviolet laser, a visible light laser or the like as a light irradiation means described later.
  • the sensitizer is excited by active energy rays and interacts with other substances (for example, radical generator, acid generator, etc.) (for example, energy transfer, electron transfer, etc.), thereby generating radicals, acids, etc. It is possible to generate a useful group of
  • the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the compounds described in paragraph “0089” of JP2007-2030A.
  • the combination of the photopolymerization initiator and the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose.
  • an electron transfer type initiation system described in JP-A-2001-305734 [ (1) Electron donating initiator and sensitizing dye, (2) Electron accepting initiator and sensitizing dye, (3) Electron donating initiator, sensitizing dye and electron accepting initiator (ternary initiation system) ] Etc. are mentioned.
  • the content of the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05% by mass to 30% by mass with respect to the solid content of the photosensitive composition. 0.1 mass% to 20 mass% is more preferable, and 0.2 mass% to 10 mass% is particularly preferable. When the content of the sensitizer is less than 0.05% by mass, the sensitivity to active energy rays decreases, the exposure process takes time, and the productivity may decrease, exceeding 30% by mass. In some cases, the sensitizer may precipitate from the photosensitive layer during storage.
  • the said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
  • Particularly preferred examples of the photopolymerization initiator include phosphine oxides, ⁇ -aminoalkyl ketones, halogenated hydrocarbon compounds having a triazine skeleton, which are compatible with laser light having a wavelength of 405 nm in the later-described exposure.
  • Examples thereof include a composite photoinitiator combined with an amine compound as a sensitizer, a hexaarylbiimidazole compound, and titanocene.
  • -Content of photopolymerization initiator- There is no restriction
  • 0.5 mass% with respect to solid content of the said photosensitive composition Is preferably 20% by mass, more preferably 0.5% by mass to 15% by mass, and particularly preferably 1% by mass to 10% by mass.
  • the content of the photopolymerization initiator is less than 0.5% by mass, the exposed area tends to be eluted during development, and when it exceeds 20% by mass, the heat resistance may be lowered.
  • the content of the photopolymerization initiator is within the particularly preferable range, it is advantageous in that a good pattern can be formed and heat resistance is also improved.
  • the thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the intended purpose, but has at least one functional group selected from a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Compounds are preferred.
  • thermal crosslinking agent examples include a compound having a cyclic ether group, a compound having a blocked isocyanate group, a compound having an oxazolyl group, and a compound having an ethylene carbonate group.
  • Examples of the compound having a cyclic ether group include a compound having an oxirane group and a compound having an oxetanyl group.
  • Examples of the compound having an oxirane group include an epoxy compound having at least two oxirane groups in one molecule.
  • Examples of the compound having an oxetanyl group include an oxetane compound having at least two oxetanyl groups in one molecule.
  • epoxy compound there is no restriction
  • the oxetane compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a polyfunctional oxetane compound described in paragraph “0096” of JP-A-2007-2030.
  • the compound having a blocked isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds obtained by reacting an isocyanate group of polyisocyanate and its derivatives with a blocking agent. Examples of such a compound include blocked polyisocyanate described in paragraph “0023” of JP-A-5-9407.
  • the compound having an oxazolyl group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, it is obtained by polymerizing an unsaturated monomer having an oxazolyl group with another unsaturated monomer as necessary. Resin etc. are mentioned.
  • the unsaturated monomer having an oxazolyl group include vinyl oxazoline compounds such as 2-isopropenyl-2-oxazoline.
  • a commercial item can be used as a compound which has the said oxazolyl group.
  • Examples of the commercially available product include EPOCROS RPS-1005 manufactured by Nippon Shokubai Co., Ltd.
  • the compound having an ethylene carbonate group is not particularly limited and may be appropriately selected depending on the intended purpose.
  • examples thereof include an acrylic resin having an ethylene carbonate group.
  • examples of the acrylic resin having an ethylene carbonate group include carbonate group-containing copolymers described in JP-A-1-146968.
  • a compound having an oxirane group is preferable in terms of the smoothness of the pattern side surface and the insulating property.
  • the content of the thermal crosslinking agent in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is 1% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 2% by mass to 40% by mass is more preferable, and 3% by mass to 30% by mass is particularly preferable.
  • the content of the thermal crosslinking agent is less than 1% by mass, heat resistance may be deteriorated, and when it exceeds 50% by mass, developability and crack resistance may be deteriorated.
  • the content is within the particularly preferable range, a cured film can be produced with good sensitivity, and the formed cured film is advantageous in that both heat resistance and crack resistance can be achieved.
  • the carboxyl group-containing polymer compound is not particularly limited as long as it is a polymer compound having a carboxyl group, and can be appropriately selected according to the purpose.
  • an acid-modified ethylenically unsaturated group-containing polyurethane resin examples thereof include an acid-modified ethylenically unsaturated group-containing epoxy resin, an acrylic resin containing an ethylenically unsaturated group and a carboxyl group, and a polyimide precursor.
  • an acid-modified ethylenically unsaturated group-containing polyurethane resin is preferable in terms of excellent crack resistance.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited as long as it is a polyurethane resin having an acid group carboxyl group and an ethylenically unsaturated group, and can be appropriately selected according to the purpose.
  • a polyurethane resin having an ethylenically unsaturated group in the side chain (ii) a polyurethane obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule Resin etc. are mentioned.
  • polyurethane resin having an ethylenically unsaturated group in the side chain-- is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the side chain may be represented by the following general formulas (1) to (3). What has at least 1 among the functional groups represented is mentioned.
  • R 1 to R 3 each independently represents a hydrogen atom or a monovalent group.
  • R 1 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom and an alkyl group which may have a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
  • the R 2 and R 3 are not particularly limited and may be appropriately selected depending on the purpose. For example, each of R 2 and R 3 is independently a hydrogen atom, a halogen atom, an amino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group.
  • a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
  • X represents an oxygen atom, a sulfur atom, or —N (R 12 ) —
  • R 12 represents a hydrogen atom or a monovalent organic group.
  • R 12 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a hydrogen atom, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
  • the substituent that can be introduced is not particularly limited and may be appropriately selected depending on the intended purpose.
  • examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, and a halogen atom.
  • R 4 to R 8 each independently represents a hydrogen atom or a monovalent group.
  • R 4 to R 8 are not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom, a halogen atom, an amino group, a dialkylamino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group, Nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryloxy group which may have a substituent An alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like Can be mentioned. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbony
  • substituents that can be introduced include those similar to those of the general formula (1).
  • Y represents an oxygen atom, a sulfur atom, or —N (R 12 ) —.
  • R 12 has the same meaning as R 12 in the general formula (1), and preferred examples are also the same.
  • R 9 to R 11 each independently represents a hydrogen atom or a monovalent group.
  • R 9, is not particularly limited and may be appropriately selected depending on the purpose, for example, an alkyl group which may have a hydrogen atom or a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
  • R 10 and R 11 are not particularly limited and may be appropriately selected depending on the intended purpose.
  • Examples thereof include a hydrogen atom, a halogen atom, an amino group, a dialkylamino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group, Nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryloxy group which may have a substituent
  • An alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like Can be mentioned.
  • a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
  • Z represents an oxygen atom, a sulfur atom, —N (R 13 ) —, or an optionally substituted phenylene group.
  • R 13 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain includes at least one diisocyanate compound represented by the following general formula (4) and at least one diol compound represented by the following general formula (5):
  • At least one of the diisocyanate compound represented by the general formula (4) and the diol compound represented by the general formula (5) is a group represented by the general formulas (1) to (3). If at least one of them is present, a polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain as a reaction product of the diisocyanate compound and the diol compound is provided. Generated. According to the method, the polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain rather than replacing and / or introducing the desired side chain after the reaction of the polyurethane resin is produced. Can be easily manufactured.
  • the diisocyanate compound represented by the general formula (4) is not particularly limited and may be appropriately selected depending on the intended purpose.
  • a monofunctional alcohol or a monofunctional alcohol having a triisocyanate compound and an ethylenically unsaturated group may be used.
  • examples thereof include diisocyanate compounds that can be obtained by addition reaction with 1 equivalent of a functional amine compound.
  • the triisocyanate compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs “0034” to “0035” of JP-A-2005-250438. Is mentioned.
  • the monofunctional alcohol having an ethylenically unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the method for introducing an ethylenically unsaturated group into the side chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
  • a method using a diisocyanate compound containing a polymerizable unsaturated group is preferred.
  • limiting in particular as said diisocyanate compound According to the objective, it can select suitably, A triisocyanate compound and the monofunctional alcohol which has an ethylenically unsaturated group, or 1 equivalent of monofunctional amine compounds are made to react.
  • the diisocyanate compound that can be obtained by the method include compounds having an ethylenically unsaturated group in the side chain described in paragraphs “0042” to “0049” of JP-A-2005-250438.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain contains the ethylenically unsaturated group from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. It is also possible to copolymerize diisocyanate compounds other than the diisocyanate compound.
  • the diisocyanate compound to be copolymerized is not particularly limited and may be appropriately selected depending on the intended purpose.
  • examples thereof include a diisocyanate compound represented by the following general formula (6).
  • OCN-L 1 -NCO General formula (6) L 1 is a divalent aliphatic which may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group is preferable). Or represents an aromatic hydrocarbon group. If necessary, L 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group.
  • the diisocyanate compound represented by the general formula (6) is not particularly limited and may be appropriately selected depending on the intended purpose.
  • Aromatic diisocyanate compounds such as' -diisocyanate; aliphatic diisocyanate compounds such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer diisocyanate; isophorone diisocyanate, 4,4 -Alicyclic diisocyanate compounds such as methylenebis (cyclohexyl
  • diol compound represented by the said General formula (5) there is no restriction
  • high molecular diols such as a polyether diol compound, a polyester diol compound, and a polycarbonate diol compound
  • Low molecular diol compounds such as ethylene glycol and neopentyl glycol
  • diol compounds having an ethylenically unsaturated group diol compounds having a carboxylic acid group.
  • a diol compound containing an ethylenically unsaturated group in the side chain is used as a raw material for producing the polyurethane resin.
  • a method is also preferred.
  • the diol compound containing an ethylenically unsaturated group in the side chain may be a commercially available compound such as trimethylolpropane monoallyl ether, or a compound such as a halogenated diol compound, a triol compound, or an aminodiol compound.
  • the diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose.
  • paragraphs “0057” to “0060” of JP-A-2005-250438 can be used.
  • R 1 to R 3 each independently represents a hydrogen atom or a monovalent group
  • A represents a divalent organic residue
  • X represents an oxygen atom, a sulfur atom, or — N (R 12 ) —
  • R 12 represents a hydrogen atom or a monovalent organic group.
  • R 1 ⁇ R 3 and X in the general formula (G) said a general formula (1) the same meaning as R 1 ⁇ R 3 and X in preferred embodiments versa.
  • the effect of suppressing the excessive molecular movement of the polymer main chain caused by the secondary alcohol having a large steric hindrance can be reduced. It is thought that improvement can be achieved.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain is, for example, ethylenic in the side chain from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability.
  • a diol compound other than a diol compound containing an unsaturated group can be copolymerized.
  • the diol compound other than the diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a polyether diol compound, a polyester diol compound, a polycarbonate diol Compound etc. are mentioned.
  • the polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs “0068” to “0076” of JP-A-2005-250438. It is done.
  • the polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs “0077” to “0079” and paragraphs “0083” to “0085” of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like.
  • the polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs “0080” to “0081” and paragraph “0084” of JP-A-2005-250438, No. 9-No. 12 listed compounds.
  • the diol compound which has a substituent which does not react with an isocyanate group other than the diol compound mentioned above can also be used together.
  • the diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs “0087” to “0088” of JP-A-2005-250438 And the compounds described.
  • a diol compound having a carboxyl group can be used in combination with the diol compound described above.
  • the diol compound having a carboxyl group is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds represented by the following general formulas (8) to (10).
  • R 15 is a hydrogen atom, a substituent (for example, a cyano group, a ditro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 is an alkyl group having 1 to 10 carbon atoms, or 7 to 15 carbon atoms) Represents an aralkyl group.) Represents an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group which may have a group.
  • a substituent for example, a cyano group, a ditro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR 16 ,
  • L 9 , L 10 and L 11 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group).
  • a divalent aliphatic or aromatic hydrocarbon group optionally having a group, an alkoxy group, or a halogeno group).
  • an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable.
  • the above L 9 to L 11 may have another functional group that does not react with an isocyanate group, for example, a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, or an ether group. .
  • Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and may be appropriately selected according to the purpose.
  • An aromatic group having 6 to 15 carbon atoms is preferable.
  • the diol compound having a carboxyl group represented by the general formulas (8) to (10) is not particularly limited and may be appropriately selected depending on the intended purpose.
  • 3,5-dihydroxybenzoic acid, 2 2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, 2,2-bis (3-hydroxypropyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4- Hydroxyphenyl) acetic acid, 2,2-bis (hydroxymethyl) butyric acid, 4,4-bis (4-hydroxyphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) ) -3-carboxy-propionamide and the like.
  • the polyurethane resin can be provided with characteristics such as hydrogen bonding properties and alkali solubility. More specifically, the polyurethane resin having an ethylenically unsaturated group in the side chain is a resin further having a carboxyl group in the side chain, and more specifically, the ethylenically unsaturated group in the side chain is 0. 0.05 mmol / g to 3.0 mmol / g is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
  • the side chain has a carboxyl group
  • the acid value is preferably 20 mgKOH / g to 120 mgKOH / g, more preferably 30 mgKOH / g to 110 mgKOH / g, and 35 mgKOH / g to 100 mg KOH / g is particularly preferred.
  • the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain is synthesized by adding the above-mentioned diisocyanate compound and diol compound to an aprotic solvent by adding a known catalyst having an activity depending on the reactivity and heating. Is done.
  • the molar ratio (M a : M b ) of the diisocyanate and diol compound used in the synthesis is not particularly limited and can be appropriately selected according to the purpose, and is preferably 1: 1 to 1.2: 1.
  • a product having desired physical properties such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain those having an ethylenically unsaturated group in the polymer terminal and main chain are also preferably used.
  • By having an ethylenically unsaturated group at the polymer terminal and main chain it further has an ethylenically unsaturated group between the photosensitive composition and the polyurethane resin having an ethylenically unsaturated group in the side chain, or in the side chain.
  • Crosslinking reactivity is improved between polyurethane resins, and the strength of the photocured product is increased.
  • a material having excellent toughness can be provided.
  • Examples of the method for introducing an ethylenically unsaturated group at the polymer terminal include the following methods. That is, in the step of synthesizing a polyurethane resin having an ethylenically unsaturated group in the side chain as described above, in the step of treating with a residual isocyanate group at the polymer end and an alcohol or an amine, it has an ethylenically unsaturated group. Alcohols or amines may be used. Specific examples of such a compound include the same compounds as those exemplified above as the monofunctional alcohol or monofunctional amine compound having an ethylenically unsaturated group.
  • the ethylenically unsaturated group is preferably introduced into the polymer side chain rather than the polymer end from the viewpoint that the introduction amount can be easily controlled and the introduction amount can be increased, and the crosslinking reaction efficiency is improved. .
  • the ethylenically unsaturated group to be introduced is not particularly limited and may be appropriately selected according to the purpose.
  • an allyl group, a methacryloyl group, an acryloyl group, and a vinylphenyl group are preferable.
  • a methacryloyl group and an acryloyl group are more preferable, and a methacryloyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the raw storage stability.
  • the amount of methacryloyl group introduced is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the ethylenically unsaturated group equivalent is preferably 0.05 mmol / g to 3.0 mmol / g, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
  • a method of introducing an ethylenically unsaturated group into the main chain there is a method of using a diol compound having an ethylenically unsaturated group in the main chain direction for the synthesis of a polyurethane resin.
  • the diol compound having an ethylenically unsaturated group in the main chain direction is not particularly limited and may be appropriately selected depending on the intended purpose, such as cis-2-butene-1,4-diol, trans-2-butene 1,4-diol, polybutadiene diol and the like.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain can be used in combination with an alkali-soluble polymer containing a polyurethane resin having a structure different from that of the specific polyurethane resin.
  • the polyurethane resin having an ethylenically unsaturated group in the side chain can be used in combination with a polyurethane resin containing an aromatic group in the main chain and / or side chain.
  • polyurethane resin having an ethylenically unsaturated group in the side chain examples include, for example, P-1 to P— shown in paragraphs “0293” to “0310” of JP-A-2005-250438. And 31 polymers. Among these, polymers of P-27 and P-28 shown in paragraphs “0308” and “0309” are preferable.
  • a polyurethane resin obtained by reacting the carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule includes a carboxyl group-containing polyurethane having a diisocyanate and a carboxylic acid group-containing diol as essential components;
  • a low molecular diol having a weight average molecular weight of 300 or less or a low molecular diol having a weight average molecular weight of 500 or more may be added as a diol component as a copolymer component.
  • the polyurethane resin it is excellent in stable dispersibility with an inorganic filler, crack resistance and impact resistance, so that heat resistance, moist heat resistance, adhesion, mechanical properties, and electrical properties are improved.
  • the polyurethane resin includes a divalent aliphatic or aromatic hydrocarbon diisocyanate which may have a substituent, a COOH group and two OH groups via any one of a C atom and an N atom.
  • a reaction product comprising a carboxylic acid-containing diol as an essential component, and reacting the obtained reaction product with a compound having an epoxy group and an ethylenically unsaturated group in the molecule via a —COO— bond. It may be obtained.
  • the polyurethane resin includes at least one selected from diisocyanates represented by the following general formula (11) and carboxylic acid group-containing diols represented by the following general formulas (12-1) to (12-3): Is obtained by reacting a product having an essential component with a compound having an epoxy group and an ethylenically unsaturated group in the molecule represented by the following general formulas (13-1) to (13-16). May be.
  • R 1 may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group is preferable). Represents an aromatic or aromatic hydrocarbon.
  • R 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group.
  • R 2 represents a hydrogen atom, a substituent (for example, a cyano group, a ditro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , — COOR 6 , —OR 6 , —NHCONHR 6 , —NHCOOR 6 , —NHCOR 6 , —OCONHR 6 , —CONHR 6 (where R 6 is an alkyl group having 1 to 10 carbon atoms and aralkyl having 7 to 15 carbon atoms) Each group is included), which may have an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group.
  • R 3 , R 4 and R 5 may be the same or different from each other, and may be a single bond, a substituent (for example, , An alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group are preferable), and may represent a divalent aliphatic or aromatic hydrocarbon.
  • an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable.
  • any other functional group that does not react with an isocyanate group for example, a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, or an ether group. You may have. In addition, you may form a ring by 2 or 3 of said R ⁇ 2 >, R ⁇ 3 >, R ⁇ 4 > and R ⁇ 5 >.
  • Ar represents a trivalent aromatic hydrocarbon which may have a substituent, and is preferably an aromatic group having 6 to 15 carbon atoms.
  • R 14 represents a hydrogen atom or a methyl group
  • R 15 represents an alkylene group having 1 to 10 carbon atoms
  • R 16 represents a carbon atom. This represents a hydrocarbon group having a number of 1 to 10.
  • p represents 0 or an integer of 1 to 10.
  • polyurethane resin examples include at least one selected from diisocyanates represented by the general formula (11) and carboxylic acid group-containing diols represented by the general formulas (12-1) to (12-3).
  • the reaction product is further reacted with a compound having one epoxy group and at least one (meth) acryl group in the molecule represented by any one of the general formulas (13-1) to (13-16).
  • An alkali-soluble photo-crosslinkable polyurethane resin having an acid value of 20 mgKOH / g to 120 mgKOH / g is preferred.
  • These polymer compounds may be used alone or in combination of two or more.
  • the diisocyanate compound and the diol compound are synthesized in an aprotic solvent by adding a known catalyst having an activity corresponding to each reactivity and heating.
  • the molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. If an isocyanate group remains at the end of the polymer, the molar ratio can be reduced by treatment with alcohols or amines. It is synthesized in such a way that no isocyanate groups remain entangled.
  • the diisocyanate compound represented by the general formula (11) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, compounds described in paragraph “0021” of JP-A-2007-2030, etc. Is mentioned.
  • the diol compound having a carboxyl group represented by the general formulas (12-1) to (12-3) is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in paragraph “0047” of the publication No. 2030.
  • the carboxylic acid group-free low molecular weight diol is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0048” of JP-A-2007-2030. It is done.
  • the copolymerization amount of the carboxylic acid group-free diol is preferably 95 mol% or less, more preferably 80 mol% or less, and particularly preferably 50 mol% or less in the low molecular weight diol. When the copolymerization amount exceeds 95 mol%, a urethane resin having good developability may not be obtained.
  • polyurethane resin obtained by reacting the above (ii) carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraph “Japanese Patent Application Laid-Open No. 2007-2030”.
  • Glycidyl acrylate as an epoxy group and ethylenically unsaturated group-containing compound in the polymers of U1 to U13, U1 to U4 and U6 to U11 shown in "0314" to "0315” is converted into glycidyl methacrylate, 3,4-epoxycyclohexylmethyl.
  • Examples thereof include polymers in place of acrylate (trade name: Cyclomer A400 (manufactured by Daicel Chemical Industries)) and 3,4-epoxycyclohexylmethyl methacrylate (trade name: Cyclomer M400 (manufactured by Daicel Chemical Industries)).
  • the weight average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 2,000 to 60,000, and preferably 3,000 to 50 3,000 is more preferable, and 3,000 to 30,000 is particularly preferable.
  • the weight average molecular weight is less than 2,000, a sufficiently low elastic modulus at a high temperature of the cured film may not be obtained, and when it exceeds 60,000, coating suitability and developability may deteriorate. is there.
  • the photosensitive composition when used as a photosensitive solder resist when the weight average molecular weight is 2,000 to 60,000, it is excellent in crack resistance and heat resistance, and is non-image area by an alkaline developer. Excellent developability.
  • the weight average molecular weight is determined by using, for example, a high-speed GPC apparatus (HLC-802A manufactured by Toyo Soda Kogyo Co., Ltd.) and using a 0.5 mass% tetrahydrofuran (THF) solution as a sample solution, and the column is TSKgel HZM- Using one M, 200 ⁇ L of sample can be injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or a UV detector (detection wavelength 254 nm).
  • the acid value of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g, preferably 30 mgKOH / g to 110 mgKOH / g is more preferable, and 35 mgKOH / g to 100 mgKOH / g is particularly preferable.
  • the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
  • the ethylenically unsaturated group equivalent of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is 0.05 mmol / g to 3.0 mmol / g. Preferably, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
  • the heat resistance of the cured film may be inferior, and when it exceeds 3.0 mmol / g, the brittleness of the cured film may increase.
  • the said ethylenically unsaturated group equivalent can be calculated
  • the bromine number can be measured according to, for example, JIS K2605.
  • the acid-modified ethylenically unsaturated group-containing epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least two or more per molecule described in Japanese Patent No.
  • Acid-modified ethylenically unsaturated group-containing epoxy resin which is a reaction product of acid (c) product (I) and polybasic acid anhydride (d), epoxy having at least two epoxy groups in one molecule
  • Compound (a) compound (b) having one reactive group other than a hydroxyl group that reacts with at least two hydroxyl groups and an epoxy group in one molecule, and an ethylenically unsaturated group-containing monomer
  • An acid-modified ethylenically unsaturated group-containing epoxy resin which is a product of a product (I) of a boric acid (c), a polybasic acid anhydride (d), and an ethylenically unsaturated
  • acid-modified ethylenically unsaturated group-containing epoxy resin examples include ZFR series, CCR series, and PCR series (manufactured by Nippon Kayaku Co., Ltd.).
  • -Acrylic resin containing ethylenically unsaturated groups and carboxyl groups There is no restriction
  • an acrylic resin for example, it is obtained from (meth) acrylic acid ester and a compound containing an ethylenically unsaturated group and having at least one acid group described in JP-A-2009-86376.
  • examples thereof include a modified copolymer obtained by adding glycidyl (meth) acrylate to a part of acid groups of the obtained copolymer.
  • a commercial item can be used for the acrylic resin containing the said ethylenically unsaturated group and a carboxyl group.
  • CyclomerP 200HM made by Daicel Chemical Industries
  • thermoplastic elastomers examples include thermoplastic elastomers, thermosetting accelerators, adhesion promoters, thermal polymerization inhibitors, inorganic fillers, colorants, organic solvents, thixotropic agents, antifoaming agents, and leveling agents.
  • thermosetting accelerators thermosetting accelerators
  • adhesion promoters thermal polymerization inhibitors
  • inorganic fillers colorants
  • organic solvents organic solvents
  • thixotropic agents antifoaming agents
  • leveling agents leveling agents.
  • thermoplastic elastomer By adding the thermoplastic elastomer to the photosensitive composition, heat resistance, flexibility and toughness can be imparted to the photosensitive composition.
  • thermoplastic elastomer There is no restriction
  • thermoplastic elastomers are composed of a hard segment component and a soft segment component.
  • the former contributes to heat resistance and strength, and the latter contributes to flexibility and toughness.
  • styrene elastomer examples include, for example, paragraph “ And the like described in “0087” to “0095”.
  • thermoplastic elastomer The content of the thermoplastic elastomer in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 1% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 2% by mass to 20% by mass is more preferable, and 3% by mass to 10% by mass is particularly preferable. If the content is less than 1% by mass, the crack resistance may be inferior, and if it exceeds 50% by mass, the unexposed part may not be eluted with the developer. On the other hand, when the content is within the particularly preferable range, it is advantageous in terms of improving developability and crack resistance.
  • thermosetting accelerator is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0101” of JP-A-2007-2030.
  • thermosetting accelerator- There is no restriction
  • the content of the thermosetting accelerator is less than 0.01% by mass, the toughness of the cured film may not be expressed.
  • the storage stability of the photosensitive composition may be reduced. May get worse.
  • the content of the thermosetting accelerator is within the particularly preferable range, it is advantageous in that the storage stability of the photosensitive composition and the physical properties of the cured film are improved.
  • the adhesion promoter is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0108” of JP-A-2007-2030.
  • the thermal polymerization inhibitor is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0113” of JP-A-2007-2030.
  • the inorganic filler is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably contains silica particles having an average particle diameter (d50) of 0.05 ⁇ m to 3.0 ⁇ m.
  • d50 average particle diameter
  • the inorganic filler contains silica particles, the heat resistance of the cured film is improved, the dispersibility with the carboxyl group-containing polymer compound is improved, and the viscosity of the photosensitive composition is maintained in a suitable range. And suitable coating aptitude is obtained.
  • silica in the said silica particle there is no restriction
  • the average particle diameter (d50) of the silica particles is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05 ⁇ m to 3.0 ⁇ m, more preferably 0.1 ⁇ m to 2.5 ⁇ m. 0.1 ⁇ m to 2.0 ⁇ m is particularly preferable.
  • the coating viscosity may increase, and when it exceeds 3.0 ⁇ m, smoothness may not be maintained.
  • the average particle diameter (d50) of the silica particles is within the particularly preferable range, it is advantageous in view of coating viscosity, smoothness of a cured film and heat resistance.
  • the average particle diameter of the silica particles (d50) is integrated intended to be defined by the integrated value of 50% particle size when expressed in (cumulative) weight percent, intended to be defined as such d50 (D 50) Yes, for example, using a dynamic light scattering photometer (trade name DLS7000, manufactured by Otsuka Electronics Co., Ltd.), the measurement principle is a dynamic light scattering method, and the size distribution analysis method is a cumulant method and / or a histogram method. be able to.
  • the content of the inorganic filler in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is 1% by mass to the solid content of the photosensitive composition. 60% by mass is preferable, 10% by mass to 60% by mass is more preferable, and 15% by mass to 60% by mass is particularly preferable.
  • content of the said inorganic filler is less than 1 mass%, heat resistance may be inferior, and when it exceeds 60 mass%, pattern formability may be inferior.
  • the content is within the particularly preferable range, it is advantageous in that the pattern formability and heat resistance are improved.
  • a coloring pigment and the dye suitably selected from well-known dye can be used.
  • the color pigment is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0106” of JP-A-2007-2030.
  • Organic solvent is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in “0121”.
  • the content of the organic solvent in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 1% by mass to 80% by mass with respect to the solid content of the photosensitive composition. %, Preferably 2% to 70% by weight, more preferably 3% to 60% by weight.
  • the content of the organic solvent is less than 1% by mass, the viscosity of the composition may be high and it may be difficult to form a coating film.
  • the content exceeds 80% by mass, it is difficult to control the desired film thickness. May be.
  • the content of the organic solvent is within the particularly preferable range, it is advantageous from the viewpoint of coating film production suitability.
  • the photosensitive solder resist composition of the present invention contains the photosensitive composition of the present invention. According to the photosensitive solder resist composition of the present invention, it is possible to obtain a solder resist excellent in insulation, smoothness of the pattern side surface, and plating resistance.
  • the photosensitive solder resist composition of the present invention can be used as a liquid resist by coating and drying on a substrate on which a conductor wiring is formed, but is particularly useful for the production of a photosensitive solder resist film.
  • the photosensitive solder resist film of the present invention comprises at least a support and a photosensitive layer, preferably a protective film, and further comprises a cushion layer, an oxygen barrier layer (hereinafter referred to as “PC”) as necessary. It may be abbreviated as “layer”).
  • PC oxygen barrier layer
  • Form Form in which the PC layer, the photosensitive layer, and the protective film are provided in this order on the support, and the cushion layer, the PC layer, the photosensitive layer, and the protective film on the support.
  • the photosensitive layer may be a single layer or a plurality of layers.
  • the support is not particularly limited and may be appropriately selected depending on the intended purpose. However, it is preferable that the photosensitive layer can be peeled off and the light transmittance is good, and further the surface smoothness Is more preferable.
  • a transparent synthetic resin film is mentioned.
  • the transparent synthetic resin film is not particularly limited and may be appropriately selected depending on the intended purpose.
  • plastic films such as polytetrafluoroethylene, polytrifluoroethylene, cellulose-based film, and nylon film.
  • the transparent synthetic resin film is preferably polyethylene terephthalate.
  • the support is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the thickness of the support is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 4 ⁇ m to 300 ⁇ m, and more preferably 5 ⁇ m to 175 ⁇ m.
  • the length of the long support is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10 m to 20,000 m.
  • the photosensitive layer is formed by the photosensitive solder resist composition of the present invention.
  • the photosensitive layer is formed by the photosensitive solder resist composition of the present invention.
  • the thickness of the photosensitive layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3 ⁇ m to 100 ⁇ m, and more preferably 5 ⁇ m to 70 ⁇ m.
  • a photosensitive solder resist composition solution is prepared by dissolving, emulsifying, or dispersing the photosensitive solder resist composition of the present invention in water or a solvent on the support, The method of laminating
  • the solvent for the photosensitive solder resist composition solution is not particularly limited and may be appropriately selected depending on the intended purpose.
  • alcohols include methanol, ethanol, n-propanol, isopropanol, n-butanol, sec-butanol, and n-hexanol.
  • ketones include acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, diisobutyl ketone and the like.
  • esters examples include ethyl acetate, butyl acetate, n-amyl acetate, methyl sulfate, ethyl propionate, dimethyl phthalate, ethyl benzoate, and methoxypropyl acetate.
  • aromatic hydrocarbons include toluene, xylene, benzene, ethylbenzene and the like.
  • halogenated hydrocarbons include carbon tetrachloride, trichloroethylene, chloroform, 1,1,1-trichloroethane, methylene chloride, and monochlorobenzene.
  • ethers examples include tetrahydrofuran, diethyl ether, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 1-methoxy-2-propanol, and the like. These may be used individually by 1 type and may use 2 or more types together.
  • the solid content concentration of the photosensitive solder resist composition solution is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10% by mass to 90% by mass, and more preferably 15% by mass to 50% by mass. More preferred.
  • the application method is not particularly limited and may be appropriately selected depending on the intended purpose. For example, using a spin coater, slit spin coater, roll coater, die coater, curtain coater, etc.
  • coating is mentioned.
  • the drying conditions are not particularly limited and may be appropriately selected depending on the purpose. The drying conditions vary depending on each component, the type of solvent, the use ratio, and the like, but are usually 60 ° C. to 110 ° C. for 30 seconds. About 15 minutes.
  • the protective film has a function of preventing and protecting the photosensitive layer from being stained and damaged.
  • the protective film include those used for the support, silicone paper, polyethylene, paper laminated with polypropylene, polyolefin sheets, polytetrafluoroethylene sheets, and the like.
  • the thickness of the protective film is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5 ⁇ m to 100 ⁇ m, and more preferably 8 ⁇ m to 30 ⁇ m.
  • the adhesive force A between the photosensitive layer and the support and the adhesive force B between the photosensitive layer and the protective film satisfy the relationship of adhesive force A> adhesive force B.
  • the combination of the support and the protective film include polyethylene terephthalate / polypropylene, polyethylene terephthalate / polyethylene, polyvinyl chloride / cellophane, polyimide / polypropylene, polyethylene terephthalate / polyethylene terephthalate, and the like. It is done.
  • the above-mentioned relationship of adhesive force can be satisfy
  • the surface treatment of the support may be performed in order to increase the adhesive force with the photosensitive layer.
  • coating of a primer layer corona discharge treatment, flame treatment, ultraviolet irradiation treatment, high frequency irradiation treatment, glow treatment Examples thereof include discharge irradiation treatment, active plasma irradiation treatment, and laser beam irradiation treatment.
  • the coefficient of static friction between the support and the protective film is preferably 0.3 to 1.4, more preferably 0.5 to 1.2.
  • the coefficient of static friction is less than 0.3, slipping is excessive, so that winding deviation may occur when the roll is formed, and when it exceeds 1.4, it is difficult to wind into a good roll.
  • the method for storing the photosensitive solder resist film is not particularly limited and can be appropriately selected according to the purpose.
  • the photosensitive solder resist film is wound around a cylindrical core and wound into a long roll.
  • the length of the long photosensitive solder resist film is not particularly limited, and can be appropriately selected from a range of 10 m to 20,000 m, for example.
  • slitting may be performed so that the user can use it easily, and a long body in the range of 100 m to 1,000 m may be rolled.
  • the support is wound up so as to be the outermost side.
  • a separator especially moisture-proof and desiccant-containing
  • a separator especially moisture-proof and desiccant-containing
  • the protective film may be surface-treated to adjust the adhesion between the protective film and the photosensitive layer.
  • an undercoat layer made of a polymer such as polyorganosiloxane or fluorinated polyolefin such as polyfluoroethylene or polyvinyl alcohol is formed on the surface of the protective film.
  • the undercoat layer is formed by applying the polymer coating solution to the surface of the protective film and then drying at 30 ° C. to 150 ° C. (especially 50 ° C. to 120 ° C.) for 1 minute to 30 minutes. be able to.
  • a cushion layer In addition to the photosensitive layer, the support, and the protective film, a cushion layer, an oxygen blocking layer (PC layer), a release layer, an adhesive layer, a light absorption layer, a surface protective layer, and the like may be included.
  • the cushion layer is a layer that has no tackiness at room temperature and melts and flows when laminated under vacuum and heating conditions.
  • the PC layer is usually a film having a thickness of about 1.5 ⁇ m formed mainly of polyvinyl alcohol.
  • the photosensitive solder resist film has a small surface tackiness, good laminating property and handleability, and is a photosensitive layered with a photosensitive solder resist composition excellent in insulation, plating resistance and pattern side smoothness. Having a layer. For this reason, it can be widely used for the formation of permanent patterns such as printed wiring boards, color filters, pillar materials, rib materials, spacers, partition walls and other display members, holograms, micromachines, proofs, etc. It can be suitably used for the forming method. In particular, since the photosensitive solder resist film of the present invention has a uniform thickness, it is more accurately laminated on a substrate when a permanent pattern is formed.
  • the permanent pattern of the present invention is obtained by the permanent pattern forming method of the present invention.
  • the permanent pattern is preferably at least one of a protective film, an interlayer insulating film, and a solder resist pattern.
  • the dynamic elastic modulus at 220 ° C. is preferably 20 to 100 MPa, more preferably 25 to 80 MPa, and particularly preferably 30 to 50 MPa. If the dynamic elastic modulus is less than 20 MPa, the heat resistance may be inferior, and if it exceeds 100 MPa, the thermal shock resistance may be inferior and cracks may occur in the cured film.
  • the photosensitive solder resist composition of the present invention is applied to the surface of a substrate, dried to form a photosensitive layer, and then exposed (exposure process).
  • Develop development process
  • the photosensitive solder resist film of the present invention is laminated on the surface of the substrate under at least one of heating and pressurization, and then exposed (exposure). Process) and development (development process).
  • the substrate is not particularly limited and may be appropriately selected depending on the intended purpose.
  • a printed wiring board forming substrate such as a copper-clad laminate, a glass plate such as a soda glass plate, or a synthetic resin film , Paper, metal plate and the like.
  • a printed wiring board forming substrate on which wiring is already formed is preferable in that high-density mounting of a semiconductor or the like on a multilayer wiring board or a build-up wiring board is possible.
  • the substrate is a laminate in which a photosensitive layer made of the photosensitive solder resist composition is formed on the substrate as the first aspect, or the photosensitive solder resist film as the second aspect. It is possible to use by forming a laminate in which the photosensitive layers are laminated so as to overlap each other. That is, by exposing the photosensitive layer in the laminated body to be described later, the exposed region can be cured, and a permanent pattern can be formed by development to be described later.
  • the said photosensitive soldering resist composition is apply
  • the method for coating and drying is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the photosensitive solder resist composition solution is spin coater, slit spin coater, roll coater, die coater, curtain. The method of apply
  • the heating temperature is not particularly limited and may be appropriately selected depending on the intended purpose. It is preferably 70 ° C to 130 ° C, and more preferably 80 ° C to 110 ° C.
  • the pressurizing pressure is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 MPa to 1.0 MPa, more preferably 0.05 MPa to 1.0 MPa.
  • An apparatus for performing at least one of the heating and pressurization is not particularly limited and may be appropriately selected depending on the intended purpose.
  • a heat press for example, VP-manufactured by Taisei Laminator Co., Ltd.) II
  • a vacuum laminator for example, MVLP500 manufactured by Meiki Seisakusho Co., Ltd.
  • suitable devices for example, a heat press, a heat roll laminator (for example, VP-manufactured by Taisei Laminator Co., Ltd.) II), a vacuum laminator (for example, MVLP500 manufactured by Meiki Seisakusho Co., Ltd.) and the like can be mentioned as suitable devices.
  • the exposure step is a step of performing pattern exposure on the photosensitive layer.
  • the subject of the exposure is not particularly limited as long as it is a material having a photosensitive layer, and can be appropriately selected according to the purpose.
  • the photosensitive solder resist composition or the photosensitive solder resist is formed on a substrate. It is preferable to be performed on the laminate formed with a film.
  • the photosensitive layer may be exposed through the cushion layer and the PC layer. After peeling the support and cushion layer, the photosensitive layer is exposed through the PC layer. Alternatively, the photosensitive layer may be exposed after the support, the cushion layer and the PC layer are peeled off.
  • the exposure is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include digital exposure and analog exposure. Among these, digital exposure is preferable.
  • the digital exposure is not particularly limited and can be appropriately selected depending on the purpose.
  • a control signal is generated based on pattern formation information to be formed, and light modulated in accordance with the control signal is generated. It is preferable to use.
  • the digital exposure means is not particularly limited and may be appropriately selected depending on the purpose.
  • light irradiation means for irradiating light light emitted from the light irradiation means based on pattern information to be formed
  • a light modulation means for modulating the light intensity for example, light irradiation means for irradiating light, light emitted from the light irradiation means based on pattern information to be formed
  • a light modulation means for modulating the light intensity.
  • the light modulation means is not particularly limited as long as it can modulate light, and can be appropriately selected according to the purpose, but preferably has n pixel portions.
  • the light modulation means having the n picture elements is not particularly limited and may be appropriately selected according to the purpose, but a spatial light modulation element is preferable.
  • the spatial light modulation element is not particularly limited and may be appropriately selected depending on the purpose.
  • a spatial light modulation element of a digital micromirror device (DMD) or MEMS (Micro Electro Mechanical Systems) type examples thereof include SLM (Special Light Modulator), an optical element (PLZT element) that modulates transmitted light by an electro-optic effect, and a liquid crystal light shutter (FLC).
  • SLM Specific Light Modulator
  • PZT element optical element
  • FLC liquid crystal light shutter
  • a digital micromirror device is preferable.
  • the light modulation means preferably includes pattern signal generation means for generating a control signal based on pattern information to be formed.
  • the light modulation unit modulates light according to the control signal generated by the pattern signal generation unit.
  • the control signal generated by the pattern signal generation unit.
  • the developing step is a step of forming a permanent pattern by exposing the photosensitive layer by the exposing step, curing the exposed region of the photosensitive layer, and then developing by removing the uncured region.
  • the method for removing the uncured region is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a method using a developer.
  • the developer is not particularly limited and may be appropriately selected depending on the intended purpose.
  • alkali metal or alkaline earth metal hydroxide or carbonate, hydrogen carbonate, aqueous ammonia, quaternary ammonium salt An aqueous solution of Among these, an aqueous sodium carbonate solution is preferable.
  • the developer may be used in combination with a surfactant, an antifoaming agent, an organic base, an organic solvent or the like for accelerating development.
  • the organic base is not particularly limited and may be appropriately selected depending on the intended purpose.
  • benzylamine, ethylenediamine, ethanolamine, tetramethylammonium hydroxide, diethylenetriamine, triethylenepentamine, morpholine, triethanol An amine etc. are mentioned.
  • the organic solvent is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include alcohols, ketones, esters, ethers, amides, and lactones.
  • the developer may be an aqueous developer obtained by mixing water or an alkaline aqueous solution and an organic solvent, or may be an organic solvent alone.
  • the permanent pattern forming method of the present invention preferably further includes a curing treatment step.
  • the curing treatment step is a step of performing a curing treatment on the photosensitive layer in the formed permanent pattern after the development step is performed.
  • the curing treatment is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include full exposure processing and full heat treatment.
  • the method for the entire surface exposure treatment is not particularly limited and may be appropriately selected depending on the purpose.
  • the entire surface exposure accelerates the curing of the resin in the photosensitive solder resist composition forming the photosensitive layer, and the surface of the permanent pattern is cured.
  • an apparatus which performs the said whole surface exposure According to the objective, it can select suitably, For example, UV exposure machines, such as a super-high pressure mercury lamp, etc. are mentioned.
  • the method for the entire surface heat treatment is not particularly limited and may be appropriately selected depending on the purpose. For example, a method for heating the entire surface of the laminate on which the permanent pattern is formed after the development step. Etc.
  • the entire surface heating increases the film strength of the surface of the permanent pattern.
  • the heating temperature for the entire surface heating is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 120 ° C. to 250 ° C., more preferably 120 ° C. to 200 ° C. When the heating temperature is less than 120 ° C., the film strength may not be improved by heat treatment. When the heating temperature exceeds 250 ° C., the resin in the photosensitive solder resist composition is decomposed and the film quality is weak. May become brittle.
  • the heating time in the entire surface heating is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10 minutes to 120 minutes, more preferably 15 minutes to 60 minutes.
  • an apparatus which performs the said whole surface heating According to the objective, it can select suitably, For example, a dry oven, a hot plate, IR heater etc. are mentioned.
  • the permanent pattern of the present invention can be formed on the printed wiring board, and soldering can be performed as follows. That is, the hardened layer which is the permanent pattern is formed by the developing process, and the metal layer is exposed on the surface of the printed wiring board. Gold plating is performed on the portion of the metal layer exposed on the surface of the printed wiring board, and then soldering is performed. Then, a semiconductor or a component is mounted on the soldered portion. At this time, the permanent pattern by the hardened layer exhibits a function as a protective film or an insulating film (interlayer insulating film), and prevents external impact and conduction between adjacent electrodes.
  • soldering can be performed as follows. That is, the hardened layer which is the permanent pattern is formed by the developing process, and the metal layer is exposed on the surface of the printed wiring board. Gold plating is performed on the portion of the metal layer exposed on the surface of the printed wiring board, and then soldering is performed. Then, a semiconductor or a component is mounted on the soldered portion. At this time,
  • the permanent pattern forming method of the present invention it is preferable to form at least one of a protective film and an interlayer insulating film.
  • the permanent pattern formed by the permanent pattern forming method is the protective film or the interlayer insulating film
  • the wiring can be protected from external impact and bending, particularly when the interlayer insulating film is the interlayer insulating film. Is useful for high-density mounting of semiconductors and components on, for example, multilayer wiring boards and build-up wiring boards.
  • the permanent pattern forming method of the present invention can be widely used for forming various patterns because the pattern can be formed at a high speed, and can be particularly suitably used for forming a wiring pattern.
  • the permanent pattern formed by the permanent pattern forming method of the present invention has excellent insulating properties, plating resistance, smoothness of the pattern side surface, etc., and is suitable as a protective film, interlayer insulating film, solder resist pattern, etc. Can be used.
  • the printed circuit board of the present invention comprises at least a base material and a permanent pattern formed by the permanent pattern forming method, and further has other configurations appropriately selected as necessary.
  • the printed circuit board of the present invention can select suitably, For example, the buildup board
  • reaction solution was poured into 1.2 L of ion-exchanged water with strong stirring to crystallize the desired product. Washing with isopropanol / hexane (2/8 (mass ratio)), filtration and drying gave 121.1 g of compound T-3 having the following structure.
  • the obtained carboxyl group-containing polymer compound B-4 solution had a solid content acid value of 68 mgKOH / g and a weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) of 6,500. Yes, the ethylenically unsaturated group equivalent was 1.83 mmol / g.
  • the acid value was measured according to JIS K0070. However, when the sample did not dissolve, dioxane or tetrahydrofuran was used as a solvent.
  • the weight average molecular weight is determined by using a high-speed GPC device (HLC-802A manufactured by Toyo Soda Industry Co., Ltd.), a 0.5% by mass THF solution as a sample solution, and a column using one TSKgel HZM-M.
  • a 200 ⁇ L sample was injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or a UV detector (detection wavelength 254 nm).
  • the said ethylenically unsaturated group equivalent was calculated
  • carboxyl group-containing polymer compound B-5 solution After cooling to room temperature, 214 g of a carboxyl group-containing polymer compound B-5 solution was obtained.
  • the obtained carboxyl group-containing polymer compound B-5 solution had a solid content acid value of 75 mgKOH / g and a weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) of 12,000. Yes, the ethylenically unsaturated group equivalent was 1.3 mmol / g.
  • Example 1 ⁇ Preparation of photosensitive composition coating solution 1> The following components were mixed to prepare photosensitive composition coating solution 1 (photosensitive solder resist composition coating solution).
  • photosensitive composition coating solution 1 photosensitive solder resist composition coating solution
  • ⁇ ZFR-1776 Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin: 65% by mass methoxypropyl acetate solution
  • B-1 32.3 parts by mass Compound T-1 0.8 parts by mass Coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF) 0.021 parts by mass Coloring pigment: Pariotol Yellow D0960 (BASF) 0.006 parts by mass Dispersant: Solsperse 24000GR (manufactured by Loop Resor) 0.22 parts by mass Polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by mass Initiator: Irgacure 907 (BASF)
  • ⁇ Preparation of photosensitive solder resist film 1> Using a polyethylene terephthalate film (PET) having a thickness of 25 ⁇ m as a support, the photosensitive composition coating solution 1 was applied onto the support with a bar coater so that the thickness of the photosensitive layer after drying was about 30 ⁇ m.
  • the photosensitive solder resist film 1 was produced by drying in a hot air circulating dryer at 80 ° C. for 30 minutes.
  • a copper-clad laminate (with no through holes and a printed wiring board with a copper thickness of 12 ⁇ m) on which a surface was chemically polished was used.
  • the copper-clad laminate is laminated using a vacuum laminator (MVLP500, manufactured by Meiki Seisakusho Co., Ltd.) so that the photosensitive layer of the photosensitive solder resist film 1 is in contact with the copper-clad laminate.
  • MVLP500 vacuum laminator
  • the pressure bonding conditions were a pressure bonding temperature of 90 ° C., a pressure bonding pressure of 0.4 MPa, and a laminating speed of 1 m / min.
  • the resist pattern was formed with the evaluation method shown below.
  • a predetermined pattern can be obtained with a laser beam of 405 nm from the polyethylene terephthalate film (support) side using the pattern forming apparatus by blue-violet laser exposure having a predetermined pattern with respect to the photosensitive layer in the prepared laminate. In this way, an energy amount of 40 mJ / cm 2 was irradiated for exposure, and a partial region of the photosensitive layer was cured.
  • the copper foil of the printed circuit board obtained by laminating a copper foil having a thickness of 12 ⁇ m on a glass epoxy substrate is etched, the line width / space width is 50 ⁇ m / 50 ⁇ m, the lines are not in contact with each other, and the same facing each other A comb electrode on the surface was obtained.
  • the photosensitive solder resist film 1 was laminated on the comb-shaped electrode of the substrate in the same manner as described in the method for preparing the laminate, and the exposure was performed at the optimum exposure amount (300 mJ / cm 2 to 1 J / cm 2 ). .
  • a photosensitive solder resist film 1 is laminated on a printed circuit board obtained by laminating a copper foil having a thickness of 12 ⁇ m on a glass epoxy substrate in the same manner as described in the method for preparing the laminate, and through a 2 mm square photomask, Oak Manufacturing Co., Ltd.
  • Using an HMW-201GX type exposure machine manufactured by the company exposure was performed with an optimum exposure amount (300 mJ / cm 2 to 1 J / cm 2 ) that can form a 2 mm square pattern.
  • spray development was performed for 60 seconds with a 1% by mass aqueous sodium carbonate solution at 30 ° C., followed by heating (drying) at 80 ° C.
  • the photosensitive layer was irradiated with ultraviolet rays with an energy amount of 1 J / cm 2 using an ultraviolet irradiation device manufactured by Oak Manufacturing. Further, the photosensitive layer was subjected to a heat treatment at 150 ° C. for 60 minutes to obtain a substrate for evaluation on which a 25 ⁇ m thick solder resist having a rectangular opening of 2 mm square was formed. The obtained substrate was exposed to an atmosphere of ⁇ 65 ° C. for 15 minutes, then exposed to an atmosphere of 150 ° C. for 15 minutes, and then exposed to the air of ⁇ 65 ° C. again for 1,000 times.
  • Example 2 In Example 1, ZFR-1176 (produced by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) was added to CyclerP 200HM (produced by Daicel Chemical Industries, Ltd., containing ethylenically unsaturated groups and carboxyl groups). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1, except that the acrylic resin was changed to (B-2) (the content in the solid content was the same). . The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 3 In Example 1, ZFR-1176 (Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) was added to UXE-3024 (Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing product). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the polyurethane resin (B-3) was replaced (the content in the solid content was the same). The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 4 In Example 1, a carboxyl group-containing polymer compound (acid-modified ethylenically unsaturated polymer) obtained by synthesizing ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) in Synthesis Example 5 was used. A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the saturated group-containing polyurethane resin (B-4) was replaced (the content in the solid content was the same). Produced. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 5 a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-2.
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 6 a photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-3.
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 7 a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 4 except that Compound T-1 was replaced with Compound T-4.
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 8 In Example 5, except that the blending amount of Compound T-2 was changed from 1.7% by mass to 3.0% by mass with respect to the solid content of the photosensitive composition coating solution, A photosensitive composition coating solution and a photosensitive solder resist film were prepared. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 9 In Example 5, Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as an thermal crosslinking agent was used as ETERNACOLL OXBP (manufactured by Ube Industries, Ltd., a compound having an oxetanyl group) A photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the above was replaced. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 10 Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as a thermal crosslinking agent was added to Sumidur BL3175 (manufactured by Sumika Bayer Urethane Co., Ltd., blocked isocyanate group).
  • a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 5 except that the compound was changed to (Compound with a).
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 11 In Example 5, Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as a thermal crosslinking agent was converted into YSLV-120TE (manufactured by Nippon Steel Chemical Co., Ltd., oxirane group A photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the compound was changed to (Compounds). The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 12 the carboxyl group-containing polymer compound (acid-modified ethylenically unsaturated polymer) synthesized in Synthesis Example 6 was prepared by synthesizing ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1).
  • a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the saturated group-containing polyurethane resin (B-5) was replaced (the content in the solid content was the same). Produced.
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 1 A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound and the thermal crosslinking agent were not blended in Example 1. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 2 In Example 1, a photosensitive composition coating liquid and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound was not blended. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 3 A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound was replaced with IXE6107 (inorganic ion exchanger manufactured by Toagosei Co., Ltd.) in Example 1. Produced. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 4 (Comparative Example 4) In Example 1, except that the T-1 compound was replaced with the compound TZ (1,2,4-triazole) having the following structure, the photosensitive composition coating liquid and the photosensitive composition were the same as in Example 1. A solder resist film was prepared. The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
  • Example 5 (Comparative Example 5)
  • a photosensitive composition coating liquid and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that no thermal crosslinking agent was added.
  • the obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. However, in Table 1, the content (mass%) of the triazole compound is the content with respect to the solid content of the photosensitive composition coating solution.
  • Examples 1 to 12 were excellent in insulation, plating resistance, smoothness of the pattern side surface, and crack resistance.
  • compound T-2 was used as the triazole compound, the insulation was very excellent.
  • B-4 that is, an acid-modified ethylenically unsaturated group-containing polyurethane resin was used as the carboxyl group-containing polymer compound, the crack resistance was excellent.
  • a compound having an oxirane group was used as the thermal crosslinking agent, the smoothness of the pattern side surface was excellent.
  • Comparative Example 1 all of insulating properties, plating resistance, pattern side surface smoothness, and crack resistance were much inferior to those of the Examples.
  • the comparative example 2 which does not contain a triazole compound, compared with the Example, insulation, the smoothness of the pattern side surface, and crack resistance were inferior.
  • Comparative Example 3 using an inorganic ion trapping agent, although the plating resistance was equal to that of the Example, the smoothness of the pattern side surface was inferior and the crack resistance was very inferior.
  • Comparative Example 4 using 1,2,4-triazole as the triazole compound, the smoothness of the pattern side surface and the plating resistance were inferior to those of the Examples.
  • the comparative example 5 which does not contain a thermal crosslinking agent, it resulted in inferior insulation, crack resistance, and plating resistance.
  • the improvement in the smoothness of the pattern side surface in Examples 1 to 12 is an effect that is not obtained in Comparative Examples 1 to 4, and an effect that is not known in the prior art using a triazole compound in the photosensitive composition. It is.
  • ⁇ 1> containing a compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. It is the photosensitive composition characterized.
  • ⁇ 2> The photosensitive composition according to ⁇ 1>, further including a carboxyl group-containing polymer compound.
  • ⁇ 3> The photosensitive composition according to ⁇ 2>, wherein the carboxyl group-containing polymer compound is an acid-modified ethylenically unsaturated group-containing polyurethane resin.
  • thermo crosslinking agent according to any one of ⁇ 1> to ⁇ 3>, wherein the thermal crosslinking agent is a compound having at least one functional group selected from a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group.
  • the compound having a triazole ring and at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent is a compound represented by the following general formula (I): > The photosensitive composition according to any one of the above. However, in said general formula (I), X represents a triazole ring.
  • Y represents an organic group having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent.
  • n represents an integer of 1 to 3. When n is 2 to 3, Y may be the same or different.
  • Y in the general formula (I) is a group represented by the following general formula (II).
  • Y 1 represents an m + 1 valent organic group having 2 to 25 carbon atoms.
  • Z 1 represents any of a carboxyl group, an acryloyloxy group, and a methacryloyloxy group.
  • m represents an integer of 1 to 2. When m is 2, Z 1 may be the same or different.
  • ⁇ 7> The photosensitive composition according to any one of ⁇ 1> to ⁇ 6>, wherein the thermal crosslinking agent is a compound having an oxirane group.
  • a photosensitive solder resist composition comprising the photosensitive composition according to any one of ⁇ 1> to ⁇ 7>.
  • ⁇ 9> A photosensitive solder resist film comprising: a support; and a photosensitive layer obtained by laminating the photosensitive solder resist composition according to ⁇ 8> on the support.
  • the photosensitive solder resist composition according to ⁇ 8> is applied to the surface of a substrate, dried to form a laminate by forming a photosensitive layer, and then exposed and developed. This is a permanent pattern forming method.
  • ⁇ 11> A permanent pattern formed by the method for forming a permanent pattern according to ⁇ 10>.
  • ⁇ 12> A printed circuit board wherein a permanent pattern is formed by the method for forming a permanent pattern according to ⁇ 10>.
  • the photosensitive solder resist film of the present invention is a protective film, interlayer insulating film, various pattern formation such as a permanent pattern such as a solder resist pattern, manufacture of liquid crystal structural members such as color filters, pillar materials, rib materials, spacers, partition walls, It can be suitably used for the production of holograms, micromachines, proofs, etc., and can be particularly suitably used for forming a permanent pattern on a printed circuit board.
  • the pattern forming method of the present invention uses the photosensitive composition, it is for forming various patterns such as a protective film, an interlayer insulating film, a permanent pattern such as a solder resist pattern, a color filter, a pillar material, a rib material, a spacer, a partition wall. It can be suitably used for the production of liquid crystal structural members such as holograms, micromachines, and proofs, and can be suitably used for the formation of permanent patterns on printed boards.

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Abstract

A photosensitive composition containing a polymerizable compound, a photopolymerization initiator, a thermal cross-linker, and a compound that has a triazole ring and also has: a group that can react with a radical; and/or a group that can react with a thermal cross-linker. Said composition preferably also contains a carboxyl-group-containing macromolecular compound, which is preferably a polyurethane resin containing an acid-modified ethylene unsaturated group.

Description

感光性組成物、感光性ソルダーレジスト組成物及び感光性ソルダーレジストフィルム、並びに、永久パターン、その形成方法及びプリント基板Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, permanent pattern, method for forming the same, and printed circuit board
 本発明は、ソルダーレジストなどに好適に用いられる感光性組成物、該感光性組成物を用いた感光性ソルダーレジスト組成物及び該感光性ソルダーレジスト組成物を用いた感光性ソルダーレジストフィルム、並びに、高精細な永久パターン(保護膜、層間絶縁膜、ソルダーレジストなど)、その形成方法及びプリント基板に関する。 The present invention is a photosensitive composition suitably used for a solder resist, a photosensitive solder resist composition using the photosensitive composition, a photosensitive solder resist film using the photosensitive solder resist composition, and The present invention relates to a high-definition permanent pattern (a protective film, an interlayer insulating film, a solder resist, etc.), a formation method thereof, and a printed board.
 近年、電子機器は、移動体通信機器に代表されるように小型、薄型、軽量と共に、高性能、高機能、高品質、高信頼性が要求されるようになってきており、このような電子機器に搭載される電子部品モジュールも小型、高密度化が要求されるようになってきている。このような要求に対して、近年、酸化アルミニウム質焼結体等のセラミックスを素材とするセラミック配線基板から、より軽量化、高密度化が可能なガラス繊維とエポキシ樹脂とからなる絶縁基板の表面に低抵抗金属である銅や金等を用いて薄膜形成法により配線導体層を形成した、いわゆるプリント基板が電子部品モジュールに用いられるようになってきている。また、このプリント基板も、より高密度配線化が可能なビルドアップ配線基板へ変わりつつある。 In recent years, electronic devices have been required to have high performance, high functionality, high quality, and high reliability as well as small size, thinness, and light weight as represented by mobile communication devices. Electronic component modules mounted on devices are also required to be small and high in density. In response to such demands, in recent years, the surface of an insulating substrate made of a glass fiber and an epoxy resin that can be made lighter and densified from a ceramic wiring substrate made of ceramics such as an aluminum oxide sintered body. In addition, a so-called printed circuit board in which a wiring conductor layer is formed by a thin film forming method using copper, gold or the like which is a low resistance metal has been used for an electronic component module. In addition, this printed board is also changing to a build-up wiring board capable of higher density wiring.
 このようなビルドアップ配線基板は、例えば、ガラス繊維とエポキシ樹脂とからなる絶縁基板上に、熱硬化性樹脂からなるフィルムをラミネートし熱硬化して絶縁層を形成した後にこれに炭酸ガスレーザーで開口を穿設し、しかる後、絶縁層表面を化学粗化して無電解銅メッキ法及び電解銅メッキ法を用いて銅膜を被着形成することにより、開口内に導体層を形成するとともに絶縁層表面に配線導体層を形成し、更に、このような絶縁層と配線導体層の形成を繰返すことにより製作される。 For example, such a build-up wiring board is formed by laminating a film made of a thermosetting resin on an insulating board made of glass fiber and epoxy resin, and thermosetting the film to form an insulating layer. An opening is formed, and then the surface of the insulating layer is chemically roughened and a copper film is deposited using an electroless copper plating method and an electrolytic copper plating method, thereby forming a conductor layer in the opening and insulating. The wiring conductor layer is formed on the surface of the layer, and the insulating layer and the wiring conductor layer are repeatedly formed.
 また、配線基板の表面には、配線導体層の酸化や腐蝕の防止及び配線基板に電子部品を実装する際の熱から絶縁層を保護するために厚みが20μm~50μmのソルダーレジスト層が被着形成されている。このソルダーレジスト層は、一般に配線導体層及び絶縁層との密着性が良好なアルカリ可溶性光架橋性樹脂と、可撓性を有する樹脂とからなり、熱膨張係数を絶縁層や配線導体層の熱膨張係数と整合させるために無機充填剤を5質量%~75質量%含有している。 Further, a solder resist layer having a thickness of 20 μm to 50 μm is deposited on the surface of the wiring board in order to prevent oxidation and corrosion of the wiring conductor layer and to protect the insulating layer from heat when mounting electronic components on the wiring board. Is formed. This solder resist layer is generally composed of an alkali-soluble photocrosslinkable resin that has good adhesion to the wiring conductor layer and the insulating layer, and a flexible resin, and has a coefficient of thermal expansion that is the same as that of the insulating layer and the wiring conductor layer. In order to match the expansion coefficient, the inorganic filler is contained in an amount of 5 to 75% by mass.
 しかしながら、このソルダーレジスト層は、一般に、含有するアルカリ可溶性光架橋性樹脂がソルダーレジスト層に露光及び現像により開口を形成する際の現像性を発現させるために水酸基やカルボキシル基を含有することから、吸水率が高く空気中の水分を徐々に吸収して、この水分がソルダーレジスト層の絶縁抵抗を10Ω以下にまで低下させてしまい配線導体層間を短絡させたり、更には、この水分が配線導体層を腐食させてしまい、その結果、配線基板の電気信頼性を劣化させてしまうという問題を有していた。 However, this solder resist layer generally contains a hydroxyl group or a carboxyl group in order for the alkali-soluble photocrosslinkable resin to be contained to develop developability when an opening is formed in the solder resist layer by exposure and development. The water absorption rate is high and the moisture in the air is gradually absorbed, and this moisture reduces the insulation resistance of the solder resist layer to 10 8 Ω or less, causing short circuit between the wiring conductor layers. There is a problem that the conductor layer is corroded, and as a result, the electrical reliability of the wiring board is deteriorated.
 ソルダーレジスト層に含窒素ヘテロ環化合物(イミダゾール化合物、トリアゾール化合物など)を含有させる技術が知られている。この技術を用いると、ソルダーレジスト層の耐熱性は高くなるものの、耐メッキ性が低下するという問題がある。
 また、レジストパターンの側面の平滑性が悪いと、ハンダを行う際にハンダとレジストパターン側面の間に空隙ができ、その空隙が加熱により膨張してハンダ剥がれなどの不具合が生じるが、上記の技術では、レジストパターン側面の平滑性が十分ではないという問題がある。
A technique for containing a nitrogen-containing heterocyclic compound (imidazole compound, triazole compound, etc.) in the solder resist layer is known. When this technique is used, although the heat resistance of the solder resist layer is increased, there is a problem that the plating resistance is lowered.
In addition, if the smoothness of the side surface of the resist pattern is poor, a gap is formed between the solder and the side surface of the resist pattern when soldering, and the gap expands due to heating, causing problems such as peeling of the solder. Then, there exists a problem that the smoothness of the resist pattern side surface is not enough.
 また、感光性組成物にトリアゾール化合物を用いる技術として、カルボキシル基含有高分子結合剤と、分子中に平均して少なくとも一つのエチレン性不飽和二重結合及び平均して少なくとも一つのトリアゾール環を有する化合物と、光重合可能なモノマー、及び光重合開始剤とを含有する感光性組成物が提案されている(例えば、特許文献1参照)。
 この提案の技術によれば、現像残りを抑制し、密着性のよい組成物が得られるものの、この提案の技術では、ソルダーレジスト層に求められる絶縁性、耐メッキ性、及びレジストパターン側面の平滑性が得られていないという問題がある。
Further, as a technique using a triazole compound in a photosensitive composition, it has a carboxyl group-containing polymer binder, an average of at least one ethylenically unsaturated double bond and an average of at least one triazole ring. A photosensitive composition containing a compound, a photopolymerizable monomer, and a photopolymerization initiator has been proposed (see, for example, Patent Document 1).
According to this proposed technique, a composition with good adhesion can be obtained by suppressing development residue, but with this proposed technique, the insulation, plating resistance, and smoothness of the resist pattern side surface required for the solder resist layer are obtained. There is a problem that sex is not obtained.
 したがって、絶縁性、耐メッキ性、及びレジストパターン側面の平滑性に優れる感光性組成物の提供が求められているのが現状である。 Therefore, at present, there is a demand for providing a photosensitive composition that is excellent in insulation, plating resistance, and smoothness on the side of the resist pattern.
特開平6-43638号公報JP-A-6-43638
 本発明は、従来における前記諸問題を解決し、以下の目的を達成することを課題とする。即ち、本発明は、絶縁性、耐メッキ性、及びレジストパターン側面の平滑性に優れる感光性組成物を提供することを目的とする。 This invention makes it a subject to solve the said various problems in the past and to achieve the following objectives. That is, an object of the present invention is to provide a photosensitive composition that is excellent in insulation, plating resistance, and smoothness of the side surface of a resist pattern.
 前記課題を解決するための手段としては、以下の通りである。即ち、
 本発明の感光性組成物は、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物と、重合性化合物と、光重合開始剤と、熱架橋剤とを含有することを特徴とする。
Means for solving the problems are as follows. That is,
The photosensitive composition of the present invention includes a compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. It is characterized by containing.
 本発明によると、従来における前記諸問題を解決し、前記目的を達成することができ、絶縁性、耐メッキ性、及びレジストパターン側面の平滑性に優れる感光性組成物を提供することができる。 According to the present invention, it is possible to provide a photosensitive composition that can solve the above-mentioned problems and achieve the above-mentioned object, and that is excellent in insulation, plating resistance, and smoothness of the resist pattern side surface.
(感光性組成物)
 本発明の感光性組成物は、少なくともラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物と、重合性化合物と、光重合開始剤と、熱架橋剤とを含有し、好ましくはカルボキシル基含有高分子化合物、更に必要に応じて、その他の成分を含有する。
(Photosensitive composition)
The photosensitive composition of the present invention comprises at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and thermal crosslinking. An agent, preferably a carboxyl group-containing polymer compound and, if necessary, other components.
<ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物>
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物としては、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかと、トリアゾール環と、を少なくとも有する化合物であれば、特に制限はなく、目的に応じて適宜選択することができる。
<Compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring>
The compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring includes at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent, and triazole. If it is a compound which has at least a ring, there will be no restriction | limiting in particular, According to the objective, it can select suitably.
 前記ラジカルと反応可能な基としては、例えば、アクリロイルオキシ基、メタクリロイルオキシ基、ビニルフェニル基、アリル基などが挙げられる。 Examples of the group capable of reacting with the radical include an acryloyloxy group, a methacryloyloxy group, a vinylphenyl group, and an allyl group.
 前記熱架橋剤と反応可能な基としては、例えば、カルボキシル基、アミノ基、メルカプト基などが挙げられる。 Examples of the group capable of reacting with the thermal crosslinking agent include a carboxyl group, an amino group, and a mercapto group.
 前記トリアゾール環としては、1,2,3-トリアゾール環、及び1,2,4-トリアゾール環のいずれであってもよい。
 1,2,3-トリアゾール、及び1,2,4-トリアゾールは下記構造式で表される化合物である。
Figure JPOXMLDOC01-appb-C000003
The triazole ring may be any of 1,2,3-triazole ring and 1,2,4-triazole ring.
1,2,3-triazole and 1,2,4-triazole are compounds represented by the following structural formula.
Figure JPOXMLDOC01-appb-C000003
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物は、言い換えれば、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかを有する有機基がトリアゾール環に結合した化合物である。前記有機基の前記トリアゾール環への結合位置としては、特に制限はなく、目的に応じて適宜選択することができ、前記トリアゾール環の窒素原子と結合していてもよく、炭素原子と結合していてもよい。 The compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring is, in other words, at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent. Is a compound in which an organic group having a bond to a triazole ring. The bonding position of the organic group to the triazole ring is not particularly limited and may be appropriately selected depending on the purpose, and may be bonded to a nitrogen atom of the triazole ring or bonded to a carbon atom. May be.
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物としては、下記一般式(I)で表される化合物が好ましい。
Figure JPOXMLDOC01-appb-C000004
 ただし、前記一般式(I)中、Xは、トリアゾール環を表す。Yは、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかを有する有機基を表す。nは、1~3の整数を表す。なお、nが2~3の時には、Yは、同一であってもよく、異なっていてもよい。
As the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a compound represented by the following general formula (I) is preferable.
Figure JPOXMLDOC01-appb-C000004
However, in said general formula (I), X represents a triazole ring. Y represents an organic group having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent. n represents an integer of 1 to 3. When n is 2 to 3, Y may be the same or different.
 なお、前記一般式(I)において、前記Yは、前記Xであるトリアゾール環の窒素原子と結合していてもよく、炭素原子と結合していてもよい。 In the general formula (I), Y may be bonded to a nitrogen atom of the triazole ring which is X, or may be bonded to a carbon atom.
 前記一般式(I)におけるnとしては、1~2が好ましく、2がより好ましい。前記nが、2であると、絶縁性の点で有利である。 In the general formula (I), n is preferably 1 to 2, and more preferably 2. When n is 2, it is advantageous in terms of insulation.
 前記一般式(I)におけるYとしては、下記一般式(II)で表される基であることが好ましい。
Figure JPOXMLDOC01-appb-C000005
 ただし、前記一般式(II)中、Yは、炭素数2~25のm+1価の有機基を表す。Zは、カルボキシル基、アクリロイルオキシ基、及びメタクリロイルオキシ基のいずれかを表す。mは、1~2の整数を表す。なお、mが2の時には、Zは、同一であってもよく、異なっていてもよい。
Y in the general formula (I) is preferably a group represented by the following general formula (II).
Figure JPOXMLDOC01-appb-C000005
In the general formula (II), Y 1 represents an m + 1 valent organic group having 2 to 25 carbon atoms. Z 1 represents any of a carboxyl group, an acryloyloxy group, and a methacryloyloxy group. m represents an integer of 1 to 2. When m is 2, Z 1 may be the same or different.
 前記炭素数2~25のm+1価の有機基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ウレア結合、アミド結合、エステル結合、及びチオウレア結合の少なくともいずれかを有する炭素数2~25のm+1価の有機基が挙げられる。また、前記有機基の炭素数は、2~20が好ましく、2~15がより好ましい。 The m + 1 valent organic group having 2 to 25 carbon atoms is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least one of a urea bond, an amide bond, an ester bond, and a thiourea bond is selected. And an m + 1 valent organic group having 2 to 25 carbon atoms. The carbon number of the organic group is preferably 2 to 20, and more preferably 2 to 15.
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物の分子量としては、特に制限はなく、目的に応じて適宜選択することができるが、90~1,000が好ましく、100~800がより好ましい。 The molecular weight of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring is not particularly limited and may be appropriately selected depending on the intended purpose. 1,000 is preferable, and 100 to 800 is more preferable.
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物の具体例としては、例えば、下記式で表される化合物などが挙げられる。
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000007
Specific examples of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring include compounds represented by the following formulas.
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000007
-ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物の含有量-
 前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができ、前記感光性組成物の固形分に対して、1.0質量%~20質量%が好ましく、1.5質量%~10質量%がより好ましい。前記含有量が、1.0質量%未満であると、充分な絶縁性が発揮できないことがあり、20質量%を超えると、耐熱性が低下することがある。前記含有量が、前記より好ましい範囲内であると、耐熱性と絶縁性の両立の点で有利である。
-Content of a compound having a triazole ring and at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent-
The content of the compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring in the photosensitive composition is not particularly limited and is appropriately selected depending on the purpose. 1.0 mass% to 20 mass% is preferable with respect to the solid content of the photosensitive composition, and 1.5 mass% to 10 mass% is more preferable. When the content is less than 1.0% by mass, sufficient insulating properties may not be exhibited. When the content exceeds 20% by mass, heat resistance may be deteriorated. When the content is within the more preferable range, it is advantageous in terms of both heat resistance and insulating properties.
<重合性化合物>
 前記重合性化合物としては、特に制限はなく、目的に応じて適宜選択することができるが、分子中に少なくとも1個の付加重合可能な基を有する化合物が好ましい。このような化合物としては、(メタ)アクリル基を有するモノマーから選択される少なくとも1種がより好ましい。
 なお、前記重合性化合物は、前記ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物とは異なる化合物である。
<Polymerizable compound>
There is no restriction | limiting in particular as said polymeric compound, Although it can select suitably according to the objective, The compound which has at least 1 addition polymerizable group in a molecule | numerator is preferable. As such a compound, at least one selected from monomers having a (meth) acryl group is more preferable.
The polymerizable compound is a compound different from a compound having at least one of a group capable of reacting with the radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring.
 前記(メタ)アクリル基を有するモノマーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエチレングリコールモノ(メタ)アクリレート、ポリプロピレングリコールモノ(メタ)アクリレート、フェノキシエチル(メタ)アクリレートなどの単官能アクリレートや単官能メタクリレート;ポリエチレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ペンタエリトリトールトリ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレート、ヘキサンジオールジ(メタ)アクリレート、ジシクロペンタニルジメタノールジ(メタ)アクリレート、トリメチロールプロパントリ(アクリロイルオキシプロピル)エーテル、トリ(アクリロイルオキシエチル)イソシアヌレート、トリ(アクリロイルオキシエチル)シアヌレート、グリセリントリ(メタ)アクリレート、トリメチロールプロパンやグリセリン、ビスフェノールなどの多官能アルコールに、エチレンオキサイドやプロピレンオキサイドを付加反応した後で(メタ)アクリレート化したもの、特公昭48-41708号公報、特公昭50-6034号公報、特開昭51-37193号公報などの各公報に記載されているウレタンアクリレート類;特開昭48-64183号公報、特公昭49-43191号公報、特公昭52-30490号公報などの各公報に記載されているポリエステルアクリレート類;エポキシ樹脂と(メタ)アクリル酸の反応生成物であるエポキシアクリレート類などの多官能アクリレートやメタクリレートなどが挙げられる。これらの中でも、ジシクロペンタニルジメタノールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレートがより好ましい。 There is no restriction | limiting in particular as a monomer which has the said (meth) acryl group, According to the objective, it can select suitably, For example, polyethyleneglycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, phenoxyethyl (meth) ) Monofunctional acrylates and monofunctional methacrylates such as acrylates; polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, trimethylolethane tri (meth) acrylate, trimethylolpropane tri (meth) acrylate, trimethylolpropanedi (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, Pentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, hexanediol di (meth) acrylate, dicyclopentanyldimethanol di (meth) acrylate, trimethylolpropane tri (acryloyloxypropyl) ether, tri ( After addition reaction of ethylene oxide or propylene oxide to polyfunctional alcohols such as (acryloyloxyethyl) isocyanurate, tri (acryloyloxyethyl) cyanurate, glycerin tri (meth) acrylate, trimethylolpropane, glycerin, bisphenol (meth) Acrylate, described in JP-B-48-41708, JP-B-50-6034, JP-A-51-37193, etc. Urethane acrylates; polyester acrylates described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490, etc .; epoxy resins and (meth) acrylic acid And polyfunctional acrylates and methacrylates such as epoxy acrylates, which are reaction products. Among these, dicyclopentanyl dimethanol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate Is more preferable.
-重合性化合物の含有量-
 前記重合性化合物の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、2質量%~50質量%が好ましく、3質量%~40質量%がより好ましく、4質量%~35質量%が特に好ましい。前記重合性化合物の含有量が、2質量%未満であると、パターン形成ができないことがあり、50質量%を超えると、耐クラック性が劣ることがある。一方、前記重合性化合物の含有量が、前記特に好ましい範囲内であると、パターン形成性、耐クラック性が向上する点で有利である。
-Content of polymerizable compound-
The content of the polymerizable compound in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 2% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 3% by mass to 40% by mass is more preferable, and 4% by mass to 35% by mass is particularly preferable. When the content of the polymerizable compound is less than 2% by mass, pattern formation may not be possible, and when it exceeds 50% by mass, crack resistance may be inferior. On the other hand, when the content of the polymerizable compound is within the particularly preferable range, it is advantageous in that the pattern formability and crack resistance are improved.
<光重合開始剤>
 前記光重合開始剤としては、前記重合性化合物の重合を開始する能力を有する限り、特に制限はなく、目的に応じて適宜選択することができ、例えば、ハロゲン化炭化水素誘導体、ホスフィンオキサイド、ヘキサアリールビイミダゾール、オキシム誘導体、有機過酸化物、チオ化合物、ケトン化合物、芳香族オニウム塩、ケトオキシムエーテルなどが挙げられる。
<Photopolymerization initiator>
The photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected according to the purpose. For example, a halogenated hydrocarbon derivative, phosphine oxide, hexa Examples include arylbiimidazole, oxime derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, and the like.
 前記ハロゲン化炭化水素誘導体としては、例えば、トリアジン骨格を有するハロゲン化炭化水素誘導体、オキサジアゾール骨格を有するハロゲン化炭化水素誘導体などが挙げられる。
 前記トリアジン骨格を有するハロゲン化炭化水素誘導体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、若林ら著、Bull.Chem.Soc.Japan,42、2924(1969)に記載された化合物、英国特許1388492号明細書に記載された化合物、特開昭53-133428号公報に記載された化合物、独国特許3337024号明細書に記載された化合物、F.C.SchaeferなどによるJ.Org.Chem.;29、1527(1964)に記載された化合物、特開昭62-58241号公報に記載された化合物、特開平5-281728号公報に記載された化合物、特開平5-34920号公報に記載された化合物などが挙げられる。
 前記オキサジアゾール骨格を有するハロゲン化炭化水素誘導体としては、例えば、米国特許第4212976号明細書に記載された化合物などが挙げられる。
Examples of the halogenated hydrocarbon derivative include a halogenated hydrocarbon derivative having a triazine skeleton and a halogenated hydrocarbon derivative having an oxadiazole skeleton.
The halogenated hydrocarbon derivative having a triazine skeleton is not particularly limited and may be appropriately selected depending on the intended purpose. For example, Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), compounds described in British Patent No. 1388492, compounds described in JP-A-53-133428, German Patent No. 3337024 Compounds, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), a compound described in JP-A-62-258241, a compound described in JP-A-5-281728, and a compound described in JP-A-5-34920 And the like.
Examples of the halogenated hydrocarbon derivative having an oxadiazole skeleton include compounds described in US Pat. No. 4,221,976.
 前記オキシム誘導体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0085」に記載された化合物などが挙げられる。 The oxime derivative is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0085” of JP-A-2007-2030.
 前記ケトン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0087」に記載された化合物などが挙げられる。 The ketone compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0087” of JP-A-2007-2030.
 また、上記以外の光重合開始剤としては、例えば、特開2007-2030号公報の段落「0086」に記載された化合物などが挙げられる。 In addition, examples of photopolymerization initiators other than the above include compounds described in paragraph “0086” of JP-A-2007-2030.
 また、後述する感光層への露光における露光感度や感光波長を調整する目的で、前記光重合開始剤に加えて、増感剤を添加することが可能である。
 前記増感剤は、後述する光照射手段としての可視光線や紫外光レーザ、可視光レーザなどにより適宜選択することができる。
 前記増感剤は、活性エネルギー線により励起状態となり、他の物質(例えば、ラジカル発生剤、酸発生剤など)と相互作用(例えば、エネルギー移動、電子移動など)することにより、ラジカルや酸などの有用基を発生することが可能である。
In addition to the photopolymerization initiator, a sensitizer can be added for the purpose of adjusting the exposure sensitivity and the photosensitive wavelength in exposure to the photosensitive layer described later.
The sensitizer can be appropriately selected by a visible light, an ultraviolet laser, a visible light laser or the like as a light irradiation means described later.
The sensitizer is excited by active energy rays and interacts with other substances (for example, radical generator, acid generator, etc.) (for example, energy transfer, electron transfer, etc.), thereby generating radicals, acids, etc. It is possible to generate a useful group of
 前記増感剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0089」に記載された化合物などが挙げられる。 The sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the compounds described in paragraph “0089” of JP2007-2030A.
 前記光重合開始剤と前記増感剤との組合せとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2001-305734号公報に記載の電子移動型開始系[(1)電子供与型開始剤及び増感色素、(2)電子受容型開始剤及び増感色素、(3)電子供与型開始剤、増感色素及び電子受容型開始剤(三元開始系)]などの組合せが挙げられる。 The combination of the photopolymerization initiator and the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, an electron transfer type initiation system described in JP-A-2001-305734 [ (1) Electron donating initiator and sensitizing dye, (2) Electron accepting initiator and sensitizing dye, (3) Electron donating initiator, sensitizing dye and electron accepting initiator (ternary initiation system) ] Etc. are mentioned.
 前記増感剤の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、0.05質量%~30質量%が好ましく、0.1質量%~20質量%がより好ましく、0.2質量%~10質量%が特に好ましい。前記増感剤の含有量が、0.05質量%未満であると、活性エネルギー線への感度が低下し、露光プロセスに時間がかかり、生産性が低下することがあり、30質量%を超えると、保存時に前記感光層から前記増感剤が析出することがある。 The content of the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05% by mass to 30% by mass with respect to the solid content of the photosensitive composition. 0.1 mass% to 20 mass% is more preferable, and 0.2 mass% to 10 mass% is particularly preferable. When the content of the sensitizer is less than 0.05% by mass, the sensitivity to active energy rays decreases, the exposure process takes time, and the productivity may decrease, exceeding 30% by mass. In some cases, the sensitizer may precipitate from the photosensitive layer during storage.
 前記光重合開始剤は、1種単独で使用してもよく、2種以上を併用してもよい。
 前記光重合開始剤の特に好ましい例としては、後述する露光において、波長が405nmのレーザ光に対応可能である、ホスフィンオキサイド類、α-アミノアルキルケトン類、トリアジン骨格を有するハロゲン化炭化水素化合物と増感剤としてのアミン化合物とを組合せた複合光開始剤、ヘキサアリールビイミダゾール化合物、チタノセンなどが挙げられる。
The said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
Particularly preferred examples of the photopolymerization initiator include phosphine oxides, α-aminoalkyl ketones, halogenated hydrocarbon compounds having a triazine skeleton, which are compatible with laser light having a wavelength of 405 nm in the later-described exposure. Examples thereof include a composite photoinitiator combined with an amine compound as a sensitizer, a hexaarylbiimidazole compound, and titanocene.
-光重合開始剤の含有量-
 前記光重合開始剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して0.5質量%~20質量%が好ましく、0.5質量%~15質量%がより好ましく、1質量%~10質量%が特に好ましい。前記光重合開始剤の含有量が、0.5質量%未満であると、露光部が現像中に溶出する傾向があり、20質量%を超えると、耐熱性が低下することがある。一方、前記光重合開始剤の含有量が、前記特に好ましい範囲内であると、良好なパターン形成ができ、耐熱性も良好になる点で有利である。
-Content of photopolymerization initiator-
There is no restriction | limiting in particular as content in the said photosensitive composition of the said photoinitiator, Although it can select suitably according to the objective, 0.5 mass% with respect to solid content of the said photosensitive composition Is preferably 20% by mass, more preferably 0.5% by mass to 15% by mass, and particularly preferably 1% by mass to 10% by mass. When the content of the photopolymerization initiator is less than 0.5% by mass, the exposed area tends to be eluted during development, and when it exceeds 20% by mass, the heat resistance may be lowered. On the other hand, when the content of the photopolymerization initiator is within the particularly preferable range, it is advantageous in that a good pattern can be formed and heat resistance is also improved.
<熱架橋剤>
 前記熱架橋剤としては、特に制限はなく、目的に応じて適宜選択することができるが、環状エーテル基、ブロックイソシアネート基、オキサゾリル基、及びエチレンカーボネート基から選択される少なくとも一種の官能基を有する化合物が好ましい。
<Thermal crosslinking agent>
The thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the intended purpose, but has at least one functional group selected from a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Compounds are preferred.
 前記熱架橋剤としては、例えば、環状エーテル基を有する化合物、ブロックイソシアネート基を有する化合物、オキサゾリル基を有する化合物、エチレンカーボネート基を有する化合物などが挙げられる。 Examples of the thermal crosslinking agent include a compound having a cyclic ether group, a compound having a blocked isocyanate group, a compound having an oxazolyl group, and a compound having an ethylene carbonate group.
 前記環状エーテル基を有する化合物としては、例えば、オキシラン基を有する化合物、オキセタニル基を有する化合物などが挙げられる。
 前記オキシラン基を有する化合物としては、例えば、1分子内に少なくとも2つのオキシラン基を有するエポキシ化合物などが挙げられる。
 前記オキセタニル基を有する化合物としては、例えば、1分子内に少なくとも2つのオキセタニル基を有するオキセタン化合物などが挙げられる。
Examples of the compound having a cyclic ether group include a compound having an oxirane group and a compound having an oxetanyl group.
Examples of the compound having an oxirane group include an epoxy compound having at least two oxirane groups in one molecule.
Examples of the compound having an oxetanyl group include an oxetane compound having at least two oxetanyl groups in one molecule.
 前記エポキシ化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ビキシレノール型若しくはビフェノール型エポキシ樹脂(「YX4000;三菱化学社製」等)又はこれらの混合物、イソシアヌレート骨格等を有する複素環式エポキシ樹脂(「TEPIC;日産化学工業社製」、「アラルダイトPT810;チバ・スペシャルティ・ケミカルズ社製」等)、ビスフェノールA型エポキシ樹脂、ノボラック型エポキシ樹脂、ビスフェノールF型エポキシ樹脂(「エポトートYDF-170、新日鐵化学社製」等)、水添ビスフェノールA型エポキシ樹脂、グリシジルアミン型エポキシ樹脂、ヒダントイン型エポキシ樹脂、脂環式エポキシ樹脂、トリヒドロキシフェニルメタン型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、テトラフェニロールエタン型エポキシ樹脂、グリシジルフタレート樹脂、テトラグリシジルキシレノイルエタン樹脂、ナフタレン基含有エポキシ樹脂(「ESN-190,ESN-360;新日鐵化学社製」、「HP-4032,EXA-4750,EXA-4700;DIC社製」等)、ジシクロペンタジエン骨格を有するエポキシ樹脂(「HP-7200,HP-7200H;DIC社製」等)、グリシジルメタアクリレート共重合系エポキシ樹脂(「CP-50S,CP-50M;日油社製」等)、シクロヘキシルマレイミドとグリシジルメタアクリレートとの共重合エポキシ樹脂などが挙げられる。これらのエポキシ化合物は、1種単独で使用してもよいし、2種以上を併用してもよい。 There is no restriction | limiting in particular as said epoxy compound, According to the objective, it can select suitably, For example, a bixylenol type or biphenol type epoxy resin ("YX4000; Mitsubishi Chemical Corporation" etc.) or these mixtures, isocyanurate Heterocyclic epoxy resins having a skeleton ("TEPIC; manufactured by Nissan Chemical Industries", "Araldite PT810; manufactured by Ciba Specialty Chemicals"), bisphenol A type epoxy resin, novolak type epoxy resin, bisphenol F type epoxy Resin ("Epototo YDF-170, manufactured by Nippon Steel Chemical Co., Ltd."), hydrogenated bisphenol A type epoxy resin, glycidylamine type epoxy resin, hydantoin type epoxy resin, alicyclic epoxy resin, trihydroxyphenylmethane type epoxy resin , Bisphenol Type epoxy resin, bisphenol A novolac type epoxy resin, tetraphenylolethane type epoxy resin, glycidyl phthalate resin, tetraglycidyl xylenoyl ethane resin, naphthalene group-containing epoxy resin (“ESN-190, ESN-360; Nippon Steel Chemical Co., Ltd.) ”,“ HP-4032, EXA-4750, EXA-4700; manufactured by DIC ”, etc.), epoxy resins having a dicyclopentadiene skeleton (“ HP-7200, HP-7200H; manufactured by DIC ”, etc.), glycidyl Examples thereof include a methacrylate copolymer epoxy resin (“CP-50S, CP-50M; manufactured by NOF Corporation”), a copolymer epoxy resin of cyclohexylmaleimide and glycidyl methacrylate, and the like. These epoxy compounds may be used individually by 1 type, and may use 2 or more types together.
 前記オキセタン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0096」に記載された多官能オキセタン化合物などが挙げられる。 The oxetane compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a polyfunctional oxetane compound described in paragraph “0096” of JP-A-2007-2030.
 前記ブロックイソシアネート基を有する化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリイソシアネート及びその誘導体のイソシアネート基にブロック剤を反応させて得られる化合物が挙げられる。このような化合物としては、例えば、特開平5-9407号公報の段落「0023」に記載されたブロックトポリイソシアネートなどが挙げられる。 The compound having a blocked isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds obtained by reacting an isocyanate group of polyisocyanate and its derivatives with a blocking agent. Examples of such a compound include blocked polyisocyanate described in paragraph “0023” of JP-A-5-9407.
 前記オキサゾリル基を有する化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、オキサゾリル基を有する不飽和モノマーを必要に応じて他の不飽和モノマーと重合して得られる樹脂などが挙げられる。前記オキサゾリル基を有する不飽和モノマーとしては、例えば、2-イソプロペニル-2-オキサゾリン等のビニルオキサゾリン化合物が挙げられる。前記オキサゾリル基を有する化合物としては、市販品を用いることができる。前記市販品としては、例えば、日本触媒社製のエポクロスRPS-1005などが挙げられる。 The compound having an oxazolyl group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, it is obtained by polymerizing an unsaturated monomer having an oxazolyl group with another unsaturated monomer as necessary. Resin etc. are mentioned. Examples of the unsaturated monomer having an oxazolyl group include vinyl oxazoline compounds such as 2-isopropenyl-2-oxazoline. A commercial item can be used as a compound which has the said oxazolyl group. Examples of the commercially available product include EPOCROS RPS-1005 manufactured by Nippon Shokubai Co., Ltd.
 前記エチレンカーボネート基を有する化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、エチレンカーボネート基を有するアクリル樹脂などが挙げられる。前記エチレンカーボネート基を有するアクリル樹脂としては、例えば、特開平1-146968号公報に記載されたカーボネート基含有共重合体などが挙げられる。 The compound having an ethylene carbonate group is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an acrylic resin having an ethylene carbonate group. Examples of the acrylic resin having an ethylene carbonate group include carbonate group-containing copolymers described in JP-A-1-146968.
 これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
 これらの中でも、オキシラン基を有する化合物が、パターン側面の平滑性、及び絶縁性の点で好ましい。
These may be used individually by 1 type and may use 2 or more types together.
Among these, a compound having an oxirane group is preferable in terms of the smoothness of the pattern side surface and the insulating property.
-熱架橋剤の含有量-
 前記熱架橋剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、1質量%~50質量%が好ましく、2質量%~40質量%がより好ましく、3質量%~30質量%が特に好ましい。前記熱架橋剤の含有量が、1質量%未満であると、耐熱性が悪化することがあり、50質量%を超えると、現像性や耐クラック性が悪化することがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好な感度で硬化膜が作製でき、形成された硬化膜も、耐熱性と耐クラック性とを両立できる点で有利である。
-Content of thermal crosslinking agent-
The content of the thermal crosslinking agent in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is 1% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 2% by mass to 40% by mass is more preferable, and 3% by mass to 30% by mass is particularly preferable. When the content of the thermal crosslinking agent is less than 1% by mass, heat resistance may be deteriorated, and when it exceeds 50% by mass, developability and crack resistance may be deteriorated. On the other hand, when the content is within the particularly preferable range, a cured film can be produced with good sensitivity, and the formed cured film is advantageous in that both heat resistance and crack resistance can be achieved.
<カルボキシル基含有高分子化合物>
 前記カルボキシル基含有高分子化合物としては、カルボキシル基を有する高分子化合物であれば、特に制限はなく、目的に応じて適宜選択することができ、例えば、酸変性エチレン性不飽和基含有ポリウレタン樹脂、酸変性エチレン性不飽和基含有エポキシ樹脂、エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂、ポリイミド前駆体などが挙げられる。これらの中でも、酸変性エチレン性不飽和基含有ポリウレタン樹脂が耐クラック性に優れる点で好ましい。
<Carboxyl group-containing polymer compound>
The carboxyl group-containing polymer compound is not particularly limited as long as it is a polymer compound having a carboxyl group, and can be appropriately selected according to the purpose. For example, an acid-modified ethylenically unsaturated group-containing polyurethane resin, Examples thereof include an acid-modified ethylenically unsaturated group-containing epoxy resin, an acrylic resin containing an ethylenically unsaturated group and a carboxyl group, and a polyimide precursor. Among these, an acid-modified ethylenically unsaturated group-containing polyurethane resin is preferable in terms of excellent crack resistance.
-酸変性エチレン性不飽和基含有ポリウレタン樹脂-
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂としては、酸基であるカルボキシル基とエチレン性不飽和基とを有するポリウレタン樹脂であれば、特に制限はなく、目的に応じて適宜選択することができ、例えば、(i)側鎖にエチレン性不飽和基を有するポリウレタン樹脂、(ii)カルボキシル基含有ポリウレタンと、分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂などが挙げられる。
-Acid-modified ethylenically unsaturated group-containing polyurethane resin-
The acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited as long as it is a polyurethane resin having an acid group carboxyl group and an ethylenically unsaturated group, and can be appropriately selected according to the purpose. For example, (i) a polyurethane resin having an ethylenically unsaturated group in the side chain, (ii) a polyurethane obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule Resin etc. are mentioned.
--(i)側鎖にエチレン性不飽和基を有するポリウレタン樹脂--
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、その側鎖に、下記一般式(1)~(3)で表される官能基のうち少なくとも1つを有するものが挙げられる。
-(I) Polyurethane resin having an ethylenically unsaturated group in the side chain--
The polyurethane resin having an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose. For example, the side chain may be represented by the following general formulas (1) to (3). What has at least 1 among the functional groups represented is mentioned.
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
 前記一般式(1)中、R~Rは、それぞれ独立に水素原子又は1価の基を表す。
 前記Rとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、水素原子、置換基を有してもよいアルキル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基が好ましい。
 また、前記R及びRとしては、特に制限はなく、目的に応じて適宜選択することができ、それぞれ独立に、例えば、水素原子、ハロゲン原子、アミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。
In the general formula (1), R 1 to R 3 each independently represents a hydrogen atom or a monovalent group.
R 1 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom and an alkyl group which may have a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
The R 2 and R 3 are not particularly limited and may be appropriately selected depending on the purpose. For example, each of R 2 and R 3 is independently a hydrogen atom, a halogen atom, an amino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group. Group, nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryl which may have a substituent An oxy group, an alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent Etc. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
 前記一般式(1)中、Xは、酸素原子、硫黄原子、又は-N(R12)-を表し、前記R12は、水素原子、又は1価の有機基を表す。前記R12としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、置換基を有してもよいアルキル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基、エチル基、イソプロピル基が好ましい。 In the general formula (1), X represents an oxygen atom, a sulfur atom, or —N (R 12 ) —, and R 12 represents a hydrogen atom or a monovalent organic group. R 12 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a hydrogen atom, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
 ここで、導入し得る前記置換基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、アルキル基、アルケニル基、アルキニル基、アリール基、アルコキシ基、アリーロキシ基、ハロゲン原子、アミノ基、アルキルアミノ基、アリールアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、アミド基、アルキルスルホニル基、アリールスルホニル基などが挙げられる。 Here, the substituent that can be introduced is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, and a halogen atom. Amino group, alkylamino group, arylamino group, carboxyl group, alkoxycarbonyl group, sulfo group, nitro group, cyano group, amide group, alkylsulfonyl group, arylsulfonyl group and the like.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
 前記一般式(2)中、R~Rは、それぞれ独立に水素原子又は1価の基を表す。前記R~Rとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、水素原子、ハロゲン原子、アミノ基、ジアルキルアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。 In the general formula (2), R 4 to R 8 each independently represents a hydrogen atom or a monovalent group. R 4 to R 8 are not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom, a halogen atom, an amino group, a dialkylamino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group, Nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryloxy group which may have a substituent An alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like Can be mentioned. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
 導入し得る置換基としては、前記一般式(1)と同様のものなどが挙げられる。また、Yは、酸素原子、硫黄原子、又は-N(R12)-を表す。前記R12は、前記一般式(1)のR12の場合と同義であり、好ましい例も同様である。 Examples of the substituent that can be introduced include those similar to those of the general formula (1). Y represents an oxygen atom, a sulfur atom, or —N (R 12 ) —. Wherein R 12 has the same meaning as R 12 in the general formula (1), and preferred examples are also the same.
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
 前記一般式(3)中、R~R11は、それぞれ独立に水素原子又は1価の基を表す。
 前記Rとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、水素原子又は置換基を有してもよいアルキル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基が好ましい。
 前記R10及びR11としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、水素原子、ハロゲン原子、アミノ基、ジアルキルアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。
In the general formula (3), R 9 to R 11 each independently represents a hydrogen atom or a monovalent group.
Examples of R 9, is not particularly limited and may be appropriately selected depending on the purpose, for example, an alkyl group which may have a hydrogen atom or a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
R 10 and R 11 are not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom, a halogen atom, an amino group, a dialkylamino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group, Nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryloxy group which may have a substituent An alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like Can be mentioned. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
 ここで、導入し得る置換基としては、前記一般式(1)と同様のものなどが例示される。また、前記一般式(3)中、Zは、酸素原子、硫黄原子、-N(R13)-、又は置換基を有してもよいフェニレン基を表す。前記R13としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、置換基を有してもよいアルキル基などが挙げられる。これらの中でも、ラジカル反応性が高い点で、メチル基、エチル基、イソプロピル基が好ましい。 Here, examples of the substituent that can be introduced include those similar to those in the general formula (1). In the general formula (3), Z represents an oxygen atom, a sulfur atom, —N (R 13 ) —, or an optionally substituted phenylene group. R 13 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、下記一般式(4)で表されるジイソシアネート化合物の少なくとも1種と、下記一般式(5)で表されるジオール化合物の少なくとも1種と、の反応生成物で表される構造単位を基本骨格とするポリウレタン樹脂である。 The polyurethane resin having an ethylenically unsaturated group in the side chain includes at least one diisocyanate compound represented by the following general formula (4) and at least one diol compound represented by the following general formula (5): A polyurethane resin having a structural unit represented by the reaction product as a basic skeleton.
 OCN-X-NCO ・・・一般式(4)
 HO-Y-OH   ・・・一般式(5)
 前記一般式(4)及び前記一般式(5)中、X、Yは、それぞれ独立に2価の有機残基を表す。
OCN-X 0 -NCO General formula (4)
HO—Y 0 —OH —General formula (5)
In the general formula (4) and the general formula (5), X 0 and Y 0 each independently represent a divalent organic residue.
 前記一般式(4)で表されるジイソシアネート化合物、又は、前記一般式(5)で表されるジオール化合物の少なくともどちらか一方が、前記一般式(1)~(3)で表される基のうち少なくとも1つを有していれば、該ジイソシアネート化合物と該ジオール化合物との反応生成物として、側鎖に前記一般式(1)~(3)で表される基が導入されたポリウレタン樹脂が生成される。前記方法によれば、ポリウレタン樹脂の反応生成後に所望の側鎖を置換及び/又は導入するよりも、側鎖に前記一般式(1)~(3)で表される基が導入されたポリウレタン樹脂を容易に製造することができる。 At least one of the diisocyanate compound represented by the general formula (4) and the diol compound represented by the general formula (5) is a group represented by the general formulas (1) to (3). If at least one of them is present, a polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain as a reaction product of the diisocyanate compound and the diol compound is provided. Generated. According to the method, the polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain rather than replacing and / or introducing the desired side chain after the reaction of the polyurethane resin is produced. Can be easily manufactured.
 前記一般式(4)で表されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、トリイソシアネート化合物とエチレン性不飽和基を有する単官能のアルコール又は単官能のアミン化合物1当量とを付加反応させることにより得ることできるジイソシアネート化合物などが挙げられる。 The diisocyanate compound represented by the general formula (4) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a monofunctional alcohol or a monofunctional alcohol having a triisocyanate compound and an ethylenically unsaturated group may be used. Examples thereof include diisocyanate compounds that can be obtained by addition reaction with 1 equivalent of a functional amine compound.
 前記トリイソシアネート化合物としては、特に制限されるものではなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0034」~「0035」に記載された化合物などが挙げられる。 The triisocyanate compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs “0034” to “0035” of JP-A-2005-250438. Is mentioned.
 前記エチレン性不飽和基を有する単官能のアルコール又は前記単官能のアミン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0037」~「0040」に記載された化合物などが挙げられる。 The monofunctional alcohol having an ethylenically unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraph “Japanese Patent Laid-Open No. 2005-250438” And compounds described in “0037” to “0040”.
 ここで、前記ポリウレタン樹脂の側鎖にエチレン性不飽和基を導入する方法としては、特に制限はなく、目的に応じて適宜選択することができるが、ポリウレタン樹脂製造の原料として、側鎖にエチレン性不飽和基を含有するジイソシアネート化合物を用いる方法が好ましい。前記ジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、トリイソシアネート化合物とエチレン性不飽和基を有する単官能のアルコール又は単官能のアミン化合物1当量とを付加反応させることにより得ることできるジイソシアネート化合物であって、例えば、特開2005-250438号公報の段落「0042」~「0049」に記載された側鎖にエチレン性不飽和基を有する化合物などが挙げられる。 Here, the method for introducing an ethylenically unsaturated group into the side chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. A method using a diisocyanate compound containing a polymerizable unsaturated group is preferred. There is no restriction | limiting in particular as said diisocyanate compound, According to the objective, it can select suitably, A triisocyanate compound and the monofunctional alcohol which has an ethylenically unsaturated group, or 1 equivalent of monofunctional amine compounds are made to react. Examples of the diisocyanate compound that can be obtained by the method include compounds having an ethylenically unsaturated group in the side chain described in paragraphs “0042” to “0049” of JP-A-2005-250438.
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、感光性組成物中の他の成分との相溶性を向上させ、保存安定性を向上させるといった観点から、前記エチレン性不飽和基を含有するジイソシアネート化合物以外のジイソシアネート化合物を共重合させることもできる。 The polyurethane resin having an ethylenically unsaturated group in the side chain contains the ethylenically unsaturated group from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. It is also possible to copolymerize diisocyanate compounds other than the diisocyanate compound.
 前記共重合させるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することでき、例えば、下記一般式(6)で表されるジイソシアネート化合物などが挙げられる。
 OCN-L-NCO ・・・一般式(6)
 前記一般式(6)中、Lは、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲノ基のいずれかが好ましい。)を有していてもよい2価の脂肪族又は芳香族炭化水素基を表す。必要に応じて、Lは、イソシアネート基と反応しない他の官能基、例えば、エステル基、ウレタン基、アミド基、ウレイド基のいずれかを有していてもよい。
The diisocyanate compound to be copolymerized is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a diisocyanate compound represented by the following general formula (6).
OCN-L 1 -NCO General formula (6)
In the general formula (6), L 1 is a divalent aliphatic which may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group is preferable). Or represents an aromatic hydrocarbon group. If necessary, L 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group.
 前記一般式(6)で表されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することでき、例えば、2,4-トリレンジイソシアネート、2,4-トリレンジイソシアネートの二量体、2,6-トリレンジレンジイソシアネート、p-キシリレンジイソシアネート、m-キシリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、1,5-ナフチレンジイソシアネート、3,3’-ジメチルビフェニル-4,4’-ジイソシアネート等のような芳香族ジイソシアネート化合物;ヘキサメチレンジイソシアネート、トリメチルヘキサメチレンジイソシアネート、リジンジイソシアネート、ダイマー酸ジイソシアネート等の脂肪族ジイソシアネート化合物;イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、メチルシクロヘキサン-2,4(又は2,6)ジイソシアネート、1,3-(イソシアネートメチル)シクロヘキサン等の脂環族ジイソシアネート化合物;1,3-ブチレングリコール1モルとトリレンジイソシアネート2モルとの付加体等のジオールとジイソシアネートとの反応物であるジイソシアネート化合物などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。 The diisocyanate compound represented by the general formula (6) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, dimer of 2,4-tolylene diisocyanate and 2,4-tolylene diisocyanate 2,6-tolylene diisocyanate, p-xylylene diisocyanate, m-xylylene diisocyanate, 4,4'-diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate, 3,3'-dimethylbiphenyl-4,4 Aromatic diisocyanate compounds such as' -diisocyanate; aliphatic diisocyanate compounds such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer diisocyanate; isophorone diisocyanate, 4,4 -Alicyclic diisocyanate compounds such as methylenebis (cyclohexyl isocyanate), methylcyclohexane-2,4 (or 2,6) diisocyanate, 1,3- (isocyanatomethyl) cyclohexane; 1 mol of 1,3-butylene glycol and tolylene diisocyanate A diisocyanate compound which is a reaction product of a diol and a diisocyanate such as an adduct of 2 moles can be used. These may be used individually by 1 type and may use 2 or more types together.
 前記一般式(5)で表されるジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物等の高分子ジオール化合物;エチレングリコール、ネオペンチルグリコール等の低分子ジオール化合物;エチレン性不飽和基を有するジオール化合物;カルボン酸基を有するジオール化合物などが挙げられる。 There is no restriction | limiting in particular as a diol compound represented by the said General formula (5), According to the objective, it can select suitably, For example, high molecular diols, such as a polyether diol compound, a polyester diol compound, and a polycarbonate diol compound Compounds: Low molecular diol compounds such as ethylene glycol and neopentyl glycol; diol compounds having an ethylenically unsaturated group; diol compounds having a carboxylic acid group.
 ここで、ポリウレタン樹脂の側鎖にエチレン性不飽和基を導入する方法としては、前述の方法の他に、ポリウレタン樹脂製造の原料として、側鎖にエチレン性不飽和基を含有するジオール化合物を用いる方法も好ましい。前記側鎖にエチレン性不飽和基を含有するジオール化合物は、例えば、トリメチロールプロパンモノアリルエーテルのように市販されているものでもよいし、ハロゲン化ジオール化合物、トリオール化合物、アミノジオール化合物等の化合物と、エチレン性不飽和基を含有する、カルボン酸、酸塩化物、イソシアネート、アルコール、アミン、チオール、ハロゲン化アルキル化合物等の化合物との反応により容易に製造される化合物などが挙げられる。 Here, as a method for introducing an ethylenically unsaturated group into the side chain of the polyurethane resin, in addition to the above-described method, a diol compound containing an ethylenically unsaturated group in the side chain is used as a raw material for producing the polyurethane resin. A method is also preferred. The diol compound containing an ethylenically unsaturated group in the side chain may be a commercially available compound such as trimethylolpropane monoallyl ether, or a compound such as a halogenated diol compound, a triol compound, or an aminodiol compound. And compounds that are easily produced by reaction with a compound containing an ethylenically unsaturated group, such as a carboxylic acid, an acid chloride, an isocyanate, an alcohol, an amine, a thiol, or a halogenated alkyl compound.
 前記側鎖にエチレン性不飽和基を含有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0057」~「0060」に記載された化合物、特開2005-250438号公報の段落「0095」~「0101」に記載されたテトラカルボン酸二無水物をジオール化合物で開環させた化合物、下記一般式(G)で表される特開2005-250438号公報の段落「0064」~「0066」に記載された化合物などが挙げられる。これらの中でも、下記一般式(G)で表される特開2005-250438号公報の段落「0064」~「0066」に記載された化合物が好ましい。
Figure JPOXMLDOC01-appb-C000011
 前記一般式(G)中、R~Rは、それぞれ独立に水素原子又は1価の基を表し、Aは2価の有機残基を表し、Xは、酸素原子、硫黄原子、又は-N(R12)-を表し、前記R12は、水素原子、又は1価の有機基を表す。
 なお、前記一般式(G)におけるR~R及びXは、前記一般式(1)におけるR~R及びXと同義であり、好ましい態様もまた同様である。
 前記一般式(G)で表されるジオール化合物に由来するポリウレタン樹脂を用いることにより、立体障害の大きい2級アルコールに起因するポリマー主鎖の過剰な分子運動を抑制効果により、層の被膜強度の向上が達成できるものと考えられる。
The diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraphs “0057” to “0060” of JP-A-2005-250438 can be used. , Compounds obtained by ring-opening a tetracarboxylic dianhydride described in paragraphs “0095” to “0101” of JP-A-2005-250438 with a diol compound, represented by the following general formula (G) Examples thereof include compounds described in paragraphs “0064” to “0066” of JP-A-2005-250438. Among these, compounds described in paragraphs “0064” to “0066” of JP-A-2005-250438 represented by the following general formula (G) are preferable.
Figure JPOXMLDOC01-appb-C000011
In the general formula (G), R 1 to R 3 each independently represents a hydrogen atom or a monovalent group, A represents a divalent organic residue, X represents an oxygen atom, a sulfur atom, or — N (R 12 ) —, wherein R 12 represents a hydrogen atom or a monovalent organic group.
Incidentally, R 1 ~ R 3 and X in the general formula (G), said a general formula (1) the same meaning as R 1 ~ R 3 and X in preferred embodiments versa.
By using the polyurethane resin derived from the diol compound represented by the general formula (G), the effect of suppressing the excessive molecular movement of the polymer main chain caused by the secondary alcohol having a large steric hindrance can be reduced. It is thought that improvement can be achieved.
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、例えば、感光性組成物中の他の成分との相溶性を向上させ、保存安定性を向上させるといった観点から、前記側鎖にエチレン性不飽和基を含有するジオール化合物以外のジオール化合物を共重合させることができる。
 前記側鎖にエチレン性不飽和基を含有するジオール化合物以外のジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物などが挙げられる。
The polyurethane resin having an ethylenically unsaturated group in the side chain is, for example, ethylenic in the side chain from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. A diol compound other than a diol compound containing an unsaturated group can be copolymerized.
The diol compound other than the diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a polyether diol compound, a polyester diol compound, a polycarbonate diol Compound etc. are mentioned.
 前記ポリエーテルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0068」~「0076」に記載された化合物などが挙げられる。 The polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs “0068” to “0076” of JP-A-2005-250438. It is done.
 前記ポリエステルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0077」~「0079」、段落「0083」~「0085」におけるNo.1~No.8及びNo.13~No.18に記載された化合物などが挙げられる。 The polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs “0077” to “0079” and paragraphs “0083” to “0085” of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like.
 前記ポリカーボネートジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0080」~「0081」及び段落「0084」におけるNo.9~No.12記載された化合物などが挙げられる。 The polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs “0080” to “0081” and paragraph “0084” of JP-A-2005-250438, No. 9-No. 12 listed compounds.
 また、前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂の合成には、上述したジオール化合物の他に、イソシアネート基と反応しない置換基を有するジオール化合物を併用することもできる。
 前記イソシアネート基と反応しない置換基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落「0087」~「0088」に記載された化合物などが挙げられる。
Moreover, in the synthesis | combination of the polyurethane resin which has an ethylenically unsaturated group in the said side chain, the diol compound which has a substituent which does not react with an isocyanate group other than the diol compound mentioned above can also be used together.
The diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs “0087” to “0088” of JP-A-2005-250438 And the compounds described.
 更に、前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂の合成には、上述したジオール化合物の他に、カルボキシル基を有するジオール化合物を併用することもできる。前記カルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、下記一般式(8)~(10)で表される化合物などが挙げられる。 Furthermore, in the synthesis of the polyurethane resin having an ethylenically unsaturated group in the side chain, a diol compound having a carboxyl group can be used in combination with the diol compound described above. The diol compound having a carboxyl group is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds represented by the following general formulas (8) to (10).
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
 前記一般式(8)~(10)中、R15としては、水素原子、置換基(例えば、シアノ基、二トロ基、ハロゲン原子(-F、-Cl、-Br、-I)、-CONH、-COOR16、-OR16、-NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16(ここで、前記R16は、炭素数1~10のアルキル基、又は炭素数7~15のアラルキル基を表す。)などの各基が含まれる。)を有していてもよいアルキル基、アラルキル基、アリール基、アルコキシ基、アリーロキシ基を表す。これらの中でも、水素原子、炭素数1~8個のアルキル基、炭素数6~15個のアリール基が好ましい。
 前記一般式(8)~(10)中、L、L10、L11は、それぞれ同一でもよいし、相違していてもよく、単結合、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲノ基の各基が好ましい)を有していてもよい2価の脂肪族又は芳香族炭化水素基を表す。これらの中でも、炭素数1~20個のアルキレン基、炭素数6~15個のアリーレン基が好ましく、炭素数1~8個のアルキレン基がより好ましい。また、必要に応じ、前記L~L11中にイソシアネート基と反応しない他の官能基、例えば、カルボニル基、エステル基、ウレタン基、アミド基、ウレイド基、エーテル基を有していてもよい。なお、前記R15、L、L、Lのうちの2個又は3個で環を形成してもよい。
 前記一般式(9)中、Arとしては、置換基を有していてもよい3価の芳香族炭化水素基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、炭素数6~15個の芳香族基が好ましい。
In the general formulas (8) to (10), R 15 is a hydrogen atom, a substituent (for example, a cyano group, a ditro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 is an alkyl group having 1 to 10 carbon atoms, or 7 to 15 carbon atoms) Represents an aralkyl group.) Represents an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group which may have a group. Among these, a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, and an aryl group having 6 to 15 carbon atoms are preferable.
In the general formulas (8) to (10), L 9 , L 10 and L 11 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group). A divalent aliphatic or aromatic hydrocarbon group optionally having a group, an alkoxy group, or a halogeno group). Among these, an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable. Further, if necessary, the above L 9 to L 11 may have another functional group that does not react with an isocyanate group, for example, a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, or an ether group. . In addition, you may form a ring by two or three of said R < 15 >, L < 7 >, L < 8 >, L < 9 >.
In the general formula (9), Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and may be appropriately selected according to the purpose. An aromatic group having 6 to 15 carbon atoms is preferable.
 前記一般式(8)~(10)で表されるカルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、3,5-ジヒドロキシ安息香酸、2,2-ビス(ヒドロキシメチル)プロピオン酸、2,2-ビス(2-ヒドロキシエチル)プロピオン酸、2,2-ビス(3-ヒドロキシプロピル)プロピオン酸、ビス(ヒドロキシメチル)酢酸、ビス(4-ヒドロキシフェニル)酢酸、2,2-ビス(ヒドロキシメチル)酪酸、4,4-ビス(4-ヒドロキシフェニル)ペンタン酸、酒石酸、N,N-ジヒドロキシエチルグリシン、N,N―ビス(2-ヒドロキシエチル)-3-カルボキシ-プロピオンアミドなどが挙げられる。 The diol compound having a carboxyl group represented by the general formulas (8) to (10) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 3,5-dihydroxybenzoic acid, 2 , 2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, 2,2-bis (3-hydroxypropyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4- Hydroxyphenyl) acetic acid, 2,2-bis (hydroxymethyl) butyric acid, 4,4-bis (4-hydroxyphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) ) -3-carboxy-propionamide and the like.
 このようなカルボキシル基の存在により、ポリウレタン樹脂に水素結合性とアルカリ可溶性といった特性を付与できる点で好ましい。より具体的には、前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂が、更に側鎖にカルボキシル基を有する樹脂であり、より具体的には、側鎖のエチレン性不飽和基が、0.05mmol/g~3.0mmol/gであることが好ましく、0.5mmol/g~2.7mmol/gであることがより好ましく、0.75mmol/g~2.4mmol/gであることが特に好ましく、且つ、側鎖にカルボキシル基を有することが好ましく、酸価が、20mgKOH/g~120mgKOH/gであることが好ましく、30mgKOH/g~110mgKOH/gであることがより好ましく、35mgKOH/g~100mgKOH/gが特に好ましい。
 なお、前記酸価は、例えば、JIS K0070に準拠して測定することができる。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用する。
The presence of such a carboxyl group is preferable in that the polyurethane resin can be provided with characteristics such as hydrogen bonding properties and alkali solubility. More specifically, the polyurethane resin having an ethylenically unsaturated group in the side chain is a resin further having a carboxyl group in the side chain, and more specifically, the ethylenically unsaturated group in the side chain is 0. 0.05 mmol / g to 3.0 mmol / g is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable. Preferably, the side chain has a carboxyl group, and the acid value is preferably 20 mgKOH / g to 120 mgKOH / g, more preferably 30 mgKOH / g to 110 mgKOH / g, and 35 mgKOH / g to 100 mg KOH / g is particularly preferred.
In addition, the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、上記ジイソシアネート化合物及びジオール化合物を、非プロトン性溶媒中、それぞれの反応性に応じた活性の公知の触媒を添加し、加熱することにより合成される。合成に使用されるジイソシアネート及びジオール化合物のモル比(M:M)としては、特に制限はなく、目的に応じて適宜選択することができ、1:1~1.2:1が好ましく、アルコール類又はアミン類等で処理することにより、分子量あるいは粘度といった所望の物性の生成物が、最終的にイソシアネート基が残存しない形で合成される。 The polyurethane resin having an ethylenically unsaturated group in the side chain is synthesized by adding the above-mentioned diisocyanate compound and diol compound to an aprotic solvent by adding a known catalyst having an activity depending on the reactivity and heating. Is done. The molar ratio (M a : M b ) of the diisocyanate and diol compound used in the synthesis is not particularly limited and can be appropriately selected according to the purpose, and is preferably 1: 1 to 1.2: 1. By treating with alcohols or amines, a product having desired physical properties such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
 また、前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂としては、ポリマー末端、主鎖にエチレン性不飽和基を有するものも好適に使用される。ポリマー末端、主鎖にエチレン性不飽和基を有することにより、更に、感光性組成物と側鎖にエチレン性不飽和基を有するポリウレタン樹脂との間、又は側鎖にエチレン性不飽和基を有するポリウレタン樹脂間で架橋反応性が向上し、光硬化物強度が増す。その結果、側鎖にエチレン性不飽和基を有するポリウレタン樹脂を平版印刷版等に使用した際、強靭性に優れる材料を与えることができる。 Further, as the polyurethane resin having an ethylenically unsaturated group in the side chain, those having an ethylenically unsaturated group in the polymer terminal and main chain are also preferably used. By having an ethylenically unsaturated group at the polymer terminal and main chain, it further has an ethylenically unsaturated group between the photosensitive composition and the polyurethane resin having an ethylenically unsaturated group in the side chain, or in the side chain. Crosslinking reactivity is improved between polyurethane resins, and the strength of the photocured product is increased. As a result, when a polyurethane resin having an ethylenically unsaturated group in the side chain is used for a lithographic printing plate, a material having excellent toughness can be provided.
 ポリマー末端にエチレン性不飽和基を導入する方法としては、以下に示す方法がある。即ち、上述した側鎖にエチレン性不飽和基を有するポリウレタン樹脂の合成の工程での、ポリマー末端の残存イソシアネート基と、アルコール類又はアミン類等で処理する工程において、エチレン性不飽和基を有するアルコール類又はアミン類等を用いればよい。
 このような化合物としては、具体的には、先に、エチレン性不飽和基を有する単官能のアルコール又は単官能のアミン化合物として挙げられた例示化合物と同様のものを挙げることができる。
 なお、エチレン性不飽和基は、導入量の制御が容易で導入量を増やすことができ、また、架橋反応効率が向上するといった観点から、ポリマー末端よりもポリマー側鎖に導入されることが好ましい。
Examples of the method for introducing an ethylenically unsaturated group at the polymer terminal include the following methods. That is, in the step of synthesizing a polyurethane resin having an ethylenically unsaturated group in the side chain as described above, in the step of treating with a residual isocyanate group at the polymer end and an alcohol or an amine, it has an ethylenically unsaturated group. Alcohols or amines may be used.
Specific examples of such a compound include the same compounds as those exemplified above as the monofunctional alcohol or monofunctional amine compound having an ethylenically unsaturated group.
The ethylenically unsaturated group is preferably introduced into the polymer side chain rather than the polymer end from the viewpoint that the introduction amount can be easily controlled and the introduction amount can be increased, and the crosslinking reaction efficiency is improved. .
 導入されるエチレン性不飽和基としては、特に制限はなく、目的に応じて適宜選択することができるが、架橋硬化膜形成性の点で、アリル基、メタクリロイル基、アクリロイル基、ビニルフェニル基が好ましく、メタクリロイル基、アクリロイル基がより好ましく、架橋硬化膜の形成性と生保存性との両立の点で、メタクリロイル基が特に好ましい。
 また、メタクリロイル基の導入量としては、特に制限はなく、目的に応じて適宜選択することができるが、エチレン性不飽和基当量としては、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.4mmol/gが特に好ましい。
The ethylenically unsaturated group to be introduced is not particularly limited and may be appropriately selected according to the purpose. However, in terms of the formation of a crosslinked cured film, an allyl group, a methacryloyl group, an acryloyl group, and a vinylphenyl group are preferable. Preferably, a methacryloyl group and an acryloyl group are more preferable, and a methacryloyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the raw storage stability.
The amount of methacryloyl group introduced is not particularly limited and may be appropriately selected depending on the intended purpose. The ethylenically unsaturated group equivalent is preferably 0.05 mmol / g to 3.0 mmol / g, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
 主鎖にエチレン性不飽和基を導入する方法としては、主鎖方向にエチレン性不飽和基を有するジオール化合物をポリウレタン樹脂の合成に用いる方法がある。前記主鎖方向にエチレン性不飽和基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、cis-2-ブテン-1,4-ジオール、trans-2-ブテン-1,4-ジオール、ポリブタジエンジオールなどが挙げられる。 As a method of introducing an ethylenically unsaturated group into the main chain, there is a method of using a diol compound having an ethylenically unsaturated group in the main chain direction for the synthesis of a polyurethane resin. The diol compound having an ethylenically unsaturated group in the main chain direction is not particularly limited and may be appropriately selected depending on the intended purpose, such as cis-2-butene-1,4-diol, trans-2-butene 1,4-diol, polybutadiene diol and the like.
 前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、該特定ポリウレタン樹脂とは異なる構造を有するポリウレタン樹脂を含むアルカリ可溶性高分子を併用することも可能である。例えば、前記側鎖にエチレン性不飽和基を有するポリウレタン樹脂は、主鎖及び/又は側鎖に芳香族基を含有したポリウレタン樹脂を併用することが可能である。 The polyurethane resin having an ethylenically unsaturated group in the side chain can be used in combination with an alkali-soluble polymer containing a polyurethane resin having a structure different from that of the specific polyurethane resin. For example, the polyurethane resin having an ethylenically unsaturated group in the side chain can be used in combination with a polyurethane resin containing an aromatic group in the main chain and / or side chain.
 前記(i)側鎖にエチレン性不飽和基を有するポリウレタン樹脂の具体例としては、例えば、特開2005-250438号公報の段落「0293」~「0310」に示されたP-1~P-31のポリマーなどが挙げられる。これらの中でも、段落「0308」及び「0309」に示されたP-27及びP-28のポリマーが好ましい。 Specific examples of the (i) polyurethane resin having an ethylenically unsaturated group in the side chain include, for example, P-1 to P— shown in paragraphs “0293” to “0310” of JP-A-2005-250438. And 31 polymers. Among these, polymers of P-27 and P-28 shown in paragraphs “0308” and “0309” are preferable.
--(ii)カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂--
 前記カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂は、ジイソシアネートと、カルボン酸基含有ジオールとを必須成分とするカルボキシル基含有ポリウレタンと、分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂である。目的に応じて、ジオール成分として、重量平均分子量300以下の低分子ジオールや重量平均分子量500以上の低分子ジオールを共重合成分として加えてもよい。
 前記ポリウレタン樹脂を用いることにより、無機充填剤との安定した分散性や耐クラック性や耐衝撃性に優れることから、耐熱性、耐湿熱性、密着性、機械特性、電気特性が向上する。
-(Ii) Polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule--
A polyurethane resin obtained by reacting the carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule includes a carboxyl group-containing polyurethane having a diisocyanate and a carboxylic acid group-containing diol as essential components; A polyurethane resin obtained by reacting an epoxy group and a compound having an ethylenically unsaturated group in the molecule. Depending on the purpose, a low molecular diol having a weight average molecular weight of 300 or less or a low molecular diol having a weight average molecular weight of 500 or more may be added as a diol component as a copolymer component.
By using the polyurethane resin, it is excellent in stable dispersibility with an inorganic filler, crack resistance and impact resistance, so that heat resistance, moist heat resistance, adhesion, mechanical properties, and electrical properties are improved.
 また、前記ポリウレタン樹脂としては、置換基を有していてもよい二価の脂肪族及び芳香族炭化水素のジイソシアネートと、C原子及びN原子のいずれかを介してCOOH基と2つのOH基を有するカルボン酸含有ジオールとを必須成分とした反応物であって、得られた反応物と、-COO-結合を介して分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるものであってもよい。 The polyurethane resin includes a divalent aliphatic or aromatic hydrocarbon diisocyanate which may have a substituent, a COOH group and two OH groups via any one of a C atom and an N atom. A reaction product comprising a carboxylic acid-containing diol as an essential component, and reacting the obtained reaction product with a compound having an epoxy group and an ethylenically unsaturated group in the molecule via a —COO— bond. It may be obtained.
 また、前記ポリウレタン樹脂としては、下記一般式(11)で示されるジイソシアネートと、下記一般式(12-1)~(12-3)で示されるカルボン酸基含有ジオールから選ばれた少なくとも1種とを必須成分とした生成物と、下記一般式(13-1)~(13-16)で示される分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるものであってもよい。
Figure JPOXMLDOC01-appb-C000013
 ただし、前記一般式(11)中、Rは、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲノ基のいずれかが好ましい)を有していてもよい二価の脂肪族又は芳香族炭化水素を表す。必要に応じ、前記Rは、イソシアネート基と反応しない他の官能基、例えば、エステル基、ウレタン基、アミド基、ウレイド基のいずれかを有していてもよい。前記一般式(12-1)中、Rは、水素原子、置換基(例えば、シアノ基、二トロ基、ハロゲン原子(-F、-Cl、-Br、-I)、-CONH、-COOR、-OR、-NHCONHR、-NHCOOR、-NHCOR、-OCONHR、-CONHR(ここで、Rは、炭素数1~10のアルキル基、炭素数7~15のアラルキル基のいずれかを表す)、などの各基が含まれる)を有していてもよいアルキル基、アラルキル基、アリール基、アルコキシ基、又はアリーロキシ基を表す。これらの中でも、水素原子、炭素数1個~3個のアルキル基、炭素数6個~15個のアリール基が好ましい。前記一般式(12-1)、(12-2)及び(12-3)中、R、R及びRは、それぞれ同一でも相異していてもよく、単結合、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲノ基の各基が好ましい)を有していてもよい二価の脂肪族又は芳香族炭化水素を表す。これらの中でも、炭素数1~20個のアルキレン基、炭素数6~15個のアリーレン基が好ましく、炭素数1~8個のアルキレン基が更に好ましい。また、必要に応じ、前記R、R及びR中にイソシアネート基と反応しない他の官能基、例えば、カルボニル基、エステル基、ウレタン基、アミド基、ウレイド基、エーテル基のいずれかを有していてもよい。なお、前記R、R、R及びRのうちの2個又は3個で環を形成してもよい。Arは置換基を有していてもよい三価の芳香族炭化水素を表し、炭素数6個~15個の芳香族基が好ましい。
Further, the polyurethane resin includes at least one selected from diisocyanates represented by the following general formula (11) and carboxylic acid group-containing diols represented by the following general formulas (12-1) to (12-3): Is obtained by reacting a product having an essential component with a compound having an epoxy group and an ethylenically unsaturated group in the molecule represented by the following general formulas (13-1) to (13-16). May be.
Figure JPOXMLDOC01-appb-C000013
However, in the general formula (11), R 1 may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group is preferable). Represents an aromatic or aromatic hydrocarbon. If necessary, R 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group. In the general formula (12-1), R 2 represents a hydrogen atom, a substituent (for example, a cyano group, a ditro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , — COOR 6 , —OR 6 , —NHCONHR 6 , —NHCOOR 6 , —NHCOR 6 , —OCONHR 6 , —CONHR 6 (where R 6 is an alkyl group having 1 to 10 carbon atoms and aralkyl having 7 to 15 carbon atoms) Each group is included), which may have an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group. Among these, a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, and an aryl group having 6 to 15 carbon atoms are preferable. In the general formulas (12-1), (12-2) and (12-3), R 3 , R 4 and R 5 may be the same or different from each other, and may be a single bond, a substituent (for example, , An alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogeno group are preferable), and may represent a divalent aliphatic or aromatic hydrocarbon. Among these, an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable. Further, if necessary, in R 3 , R 4 and R 5 , any other functional group that does not react with an isocyanate group, for example, a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, or an ether group. You may have. In addition, you may form a ring by 2 or 3 of said R < 2 >, R < 3 >, R < 4 > and R < 5 >. Ar represents a trivalent aromatic hydrocarbon which may have a substituent, and is preferably an aromatic group having 6 to 15 carbon atoms.
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000015
 ただし、前記一般式(13-1)~(13-16)中、R14は、水素原子又はメチル基を表し、R15は、炭素数1~10のアルキレン基を表し、R16は、炭素数1~10の炭化水素基を表す。pは、0又は1~10の整数を表す。
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000015
In the general formulas (13-1) to (13-16), R 14 represents a hydrogen atom or a methyl group, R 15 represents an alkylene group having 1 to 10 carbon atoms, and R 16 represents a carbon atom. This represents a hydrocarbon group having a number of 1 to 10. p represents 0 or an integer of 1 to 10.
 前記ポリウレタン樹脂としては、特に、前記一般式(11)で示されるジイソシアネートと、前記一般式(12-1)~(12-3)で示されるカルボン酸基含有ジオールから選ばれた少なくとも1種との反応物に、更に前記一般式(13-1)~(13-16)のいずれかで示される分子中に1個のエポキシ基と少なくとも1個の(メタ)アクリル基を有する化合物を反応して得られる、酸価が20mgKOH/g~120mgKOH/gであるアルカリ可溶性光架橋性ポリウレタン樹脂が好適である。 Examples of the polyurethane resin include at least one selected from diisocyanates represented by the general formula (11) and carboxylic acid group-containing diols represented by the general formulas (12-1) to (12-3). The reaction product is further reacted with a compound having one epoxy group and at least one (meth) acryl group in the molecule represented by any one of the general formulas (13-1) to (13-16). An alkali-soluble photo-crosslinkable polyurethane resin having an acid value of 20 mgKOH / g to 120 mgKOH / g is preferred.
 これらの高分子化合物は、単独で用いてもよいし、2種以上を併用してもよい。 These polymer compounds may be used alone or in combination of two or more.
---カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂の合成法---
 前記ポリウレタン樹脂の合成方法としては、上記ジイソシアネート化合物及びジオール化合物を非プロトン性溶媒中、それぞれの反応性に応じた活性の公知な触媒を添加し、加熱することにより合成される。使用するジイソシアネート及びジオール化合物のモル比は好ましくは、0.8:1~1.2:1であり、ポリマー末端にイソシアネート基が残存した場合、アルコール類又はアミン類等で処理することにより、最絡的にイソシアネート基が残存しない形で合成される。
--- Synthesis of polyurethane resin obtained by reacting carboxyl group-containing polyurethane with compound having epoxy group and ethylenically unsaturated group in the molecule ---
As a method for synthesizing the polyurethane resin, the diisocyanate compound and the diol compound are synthesized in an aprotic solvent by adding a known catalyst having an activity corresponding to each reactivity and heating. The molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. If an isocyanate group remains at the end of the polymer, the molar ratio can be reduced by treatment with alcohols or amines. It is synthesized in such a way that no isocyanate groups remain entangled.
----ジイソシアネート----
 前記一般式(11)で示されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0021」に記載された化合物などが挙げられる。
---- Diisocyanate ----
The diisocyanate compound represented by the general formula (11) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, compounds described in paragraph “0021” of JP-A-2007-2030, etc. Is mentioned.
----カルボン酸基含有ジオール----
 また、前記一般式(12-1)~(12-3)で表されるカルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0047」に記載された化合物などが挙げられる。
--Diol containing carboxylic acid group ----
The diol compound having a carboxyl group represented by the general formulas (12-1) to (12-3) is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in paragraph “0047” of the publication No. 2030.
----カルボン酸基非含有低分子量ジオール----
 前記カルボン酸基非含有低分子量ジオールとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0048」に記載された化合物などが挙げられる。
 前記カルボン酸基非含有ジオールの共重合量としては、低分子量ジオール中の95モル%以下が好ましく、80モル%以下がより好ましく、50モル%以下が特に好ましい。前記共重合量が、95モル%を超えると現像性のよいウレタン樹脂が得られないことがある。
---- Low molecular weight diol containing no carboxylic acid groups ----
The carboxylic acid group-free low molecular weight diol is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0048” of JP-A-2007-2030. It is done.
The copolymerization amount of the carboxylic acid group-free diol is preferably 95 mol% or less, more preferably 80 mol% or less, and particularly preferably 50 mol% or less in the low molecular weight diol. When the copolymerization amount exceeds 95 mol%, a urethane resin having good developability may not be obtained.
 前記(ii)カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂の具体例としては、例えば、特開2007-2030号公報の段落「0314」~「0315」に示されたU1~U13、U1~U4、U6~U11のポリマーにおけるエポキシ基及びエチレン性不飽和基含有化合物としてのグリシジルアクリレートを、グリシジルメタクリレート、3,4-エポキシシクロヘキシルメチルアクリレート(商品名:サイクロマーA400(ダイセル化学社製))、3,4-エポキシシクロヘキシルメチルメタクリレート(商品名:サイクロマーM400(ダイセル化学社製))に代えたポリマーなどが挙げられる。 Specific examples of the polyurethane resin obtained by reacting the above (ii) carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraph “Japanese Patent Application Laid-Open No. 2007-2030”. Glycidyl acrylate as an epoxy group and ethylenically unsaturated group-containing compound in the polymers of U1 to U13, U1 to U4 and U6 to U11 shown in "0314" to "0315" is converted into glycidyl methacrylate, 3,4-epoxycyclohexylmethyl. Examples thereof include polymers in place of acrylate (trade name: Cyclomer A400 (manufactured by Daicel Chemical Industries)) and 3,4-epoxycyclohexylmethyl methacrylate (trade name: Cyclomer M400 (manufactured by Daicel Chemical Industries)).
--酸変性エチレン性不飽和基含有ポリウレタン樹脂の重量平均分子量--
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂の重量平均分子量としては、特に制限はなく、目的に応じて適宜選択することができるが、2,000~60,000が好ましく、3,000~50,000がより好ましく、3,000~30,000が特に好ましい。前記重量平均分子量が、2,000未満であると、硬化膜の高温時の十分な低弾性率が得られないことがあり、60,000を超えると、塗布適性及び現像性が悪化することがある。一方、重量平均分子量が、2,000~60,000であると、前記感光性組成物を感光性ソルダーレジストに用いた場合には、クラック耐性、耐熱性に優れ、アルカリ性現像液による非画像部の現像性に優れる。
 なお、前記重量平均分子量は、例えば、高速GPC装置(東洋曹達工業株式会社製HLC-802A)を使用して、0.5質量%のテトラヒドロフラン(THF)溶液を試料溶液とし、カラムはTSKgel HZM-M 1本を使用し、200μLの試料を注入し、前記THF溶液で溶離して、25℃で屈折率検出器あるいはUV検出器(検出波長254nm)により測定することができる。
-Weight average molecular weight of acid-modified ethylenically unsaturated group-containing polyurethane resin-
The weight average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 2,000 to 60,000, and preferably 3,000 to 50 3,000 is more preferable, and 3,000 to 30,000 is particularly preferable. When the weight average molecular weight is less than 2,000, a sufficiently low elastic modulus at a high temperature of the cured film may not be obtained, and when it exceeds 60,000, coating suitability and developability may deteriorate. is there. On the other hand, when the photosensitive composition is used as a photosensitive solder resist when the weight average molecular weight is 2,000 to 60,000, it is excellent in crack resistance and heat resistance, and is non-image area by an alkaline developer. Excellent developability.
The weight average molecular weight is determined by using, for example, a high-speed GPC apparatus (HLC-802A manufactured by Toyo Soda Kogyo Co., Ltd.) and using a 0.5 mass% tetrahydrofuran (THF) solution as a sample solution, and the column is TSKgel HZM- Using one M, 200 μL of sample can be injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or a UV detector (detection wavelength 254 nm).
--酸変性エチレン性不飽和基含有ポリウレタン樹脂の酸価--
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂の酸価としては、特に制限はなく、目的に応じて適宜選択することができるが、20mgKOH/g~120mgKOH/gが好ましく、30mgKOH/g~110mgKOH/gがより好ましく、35mgKOH/g~100mgKOH/gが特に好ましい。前記酸価が、20mgKOH/g未満であると現像性が不十分となることがあり、120mgKOH/gを超えると、現像速度が高すぎるため現像のコントロールが難しくなることがある。
 なお、前記酸価は、例えば、JIS K0070に準拠して測定することができる。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用する。
-Acid value of acid-modified ethylenically unsaturated group-containing polyurethane resin-
The acid value of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g, preferably 30 mgKOH / g to 110 mgKOH / g is more preferable, and 35 mgKOH / g to 100 mgKOH / g is particularly preferable. If the acid value is less than 20 mg KOH / g, the developability may be insufficient, and if it exceeds 120 mg KOH / g, the development speed may be too high, and development control may be difficult.
In addition, the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
--酸変性エチレン性不飽和基含有ポリウレタン樹脂のエチレン性不飽和基当量--
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂のエチレン性不飽和基当量としては、特に制限はなく、目的に応じて適宜選択することができるが、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.4mmol/gが特に好ましい。前記エチレン性不飽和基当量が、0.05mmol/g未満であると、硬化膜の耐熱性が劣ることがあり、3.0mmol/gを超えると、硬化膜の脆性が上がることがある。
 前記エチレン性不飽和基当量は、例えば、臭素価を測定することにより求めることができる。なお、前記臭素価は、例えば、JIS K2605に準拠して測定することができる。
--Equivalent ethylenically unsaturated group of acid-modified ethylenically unsaturated group-containing polyurethane resin--
The ethylenically unsaturated group equivalent of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is 0.05 mmol / g to 3.0 mmol / g. Preferably, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable. When the ethylenically unsaturated group equivalent is less than 0.05 mmol / g, the heat resistance of the cured film may be inferior, and when it exceeds 3.0 mmol / g, the brittleness of the cured film may increase.
The said ethylenically unsaturated group equivalent can be calculated | required by measuring a bromine number, for example. The bromine number can be measured according to, for example, JIS K2605.
-酸変性エチレン性不飽和基含有エポキシ樹脂-
 前記酸変性エチレン性不飽和基含有エポキシ樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特許第2877659号公報に記載された、1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個以上の水酸基とエポキシ基と反応する水酸基以外の1個の反応基を有する化合物(b)とエチレン性不飽和基含有モノカルボン酸(c)の生成物(I)と多塩基酸無水物(d)との反応物である酸変性エチレン性不飽和基含有エポキシ樹脂、1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個以上の水酸基とエポキシ基と反応する水酸基以外の1個の反応基を有する化合物(b)とエチレン性不飽和基含有モノカルボン酸(c)の生成物(I)と多塩基酸無水物(d)とエチレン性不飽和基含有モノイソシアネート(e)との生成物である酸変性エチレン性不飽和基含有エポキシ樹脂などが挙げられる。
-Acid-modified ethylenically unsaturated group-containing epoxy resin-
The acid-modified ethylenically unsaturated group-containing epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least two or more per molecule described in Japanese Patent No. 2877659 An epoxy compound (a) having an epoxy group, a compound (b) having one reactive group other than a hydroxyl group that reacts with at least two hydroxyl groups and an epoxy group in one molecule, and an ethylenically unsaturated group-containing monocarboxylic acid Acid-modified ethylenically unsaturated group-containing epoxy resin which is a reaction product of acid (c) product (I) and polybasic acid anhydride (d), epoxy having at least two epoxy groups in one molecule Compound (a), compound (b) having one reactive group other than a hydroxyl group that reacts with at least two hydroxyl groups and an epoxy group in one molecule, and an ethylenically unsaturated group-containing monomer An acid-modified ethylenically unsaturated group-containing epoxy resin, which is a product of a product (I) of a boric acid (c), a polybasic acid anhydride (d), and an ethylenically unsaturated group-containing monoisocyanate (e) Can be mentioned.
 前記酸変性エチレン性不飽和基含有エポキシ樹脂は市販品を用いることができる。前記酸変性エチレン性不飽和基含有エポキシ樹脂の市販品としては、例えば、ZFRシリーズ、CCRシリーズ、PCRシリーズ(日本化薬社製)などが挙げられる。 Commercially available products can be used as the acid-modified ethylenically unsaturated group-containing epoxy resin. Examples of commercially available acid-modified ethylenically unsaturated group-containing epoxy resins include ZFR series, CCR series, and PCR series (manufactured by Nippon Kayaku Co., Ltd.).
-エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂-
 前記エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、(メタ)アクリル酸エステルとエチレン性不飽和基を含有し且つ少なくとも1個の酸基を有する化合物とから得られた共重合体の一部の酸基にエポキシ基を有する(メタ)アクリレートを付加させたアクリル樹脂が挙げられる。
 このようなアクリル樹脂としては、例えば、特開2009-86376号公報に記載された、(メタ)アクリル酸エステルとエチレン性不飽和基を含有し且つ少なくとも1個の酸基を有する化合物とから得られた共重合体の一部の酸基にグリシジル(メタ)アクリレートを付加させた変性共重合体などが挙げられる。
 前記エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂は市販品を用いることができる。前記エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂の市販品としては、例えば、CyclomerP 200HM(ダイセル化学社製)などが挙げられる。
-Acrylic resin containing ethylenically unsaturated groups and carboxyl groups-
There is no restriction | limiting in particular as an acrylic resin containing the said ethylenically unsaturated group and a carboxyl group, According to the objective, it can select suitably, For example, it contains a (meth) acrylic acid ester and an ethylenically unsaturated group. An acrylic resin obtained by adding a (meth) acrylate having an epoxy group to a part of acid groups of a copolymer obtained from a compound having at least one acid group.
As such an acrylic resin, for example, it is obtained from (meth) acrylic acid ester and a compound containing an ethylenically unsaturated group and having at least one acid group described in JP-A-2009-86376. Examples thereof include a modified copolymer obtained by adding glycidyl (meth) acrylate to a part of acid groups of the obtained copolymer.
A commercial item can be used for the acrylic resin containing the said ethylenically unsaturated group and a carboxyl group. As a commercial item of the acrylic resin containing the said ethylenically unsaturated group and a carboxyl group, CyclomerP 200HM (made by Daicel Chemical Industries) etc. are mentioned, for example.
-ポリイミド前駆体-
 前記ポリイミド前駆体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2010-6946号公報に記載されたものなどが挙げられる。
-Polyimide precursor-
There is no restriction | limiting in particular as said polyimide precursor, According to the objective, it can select suitably, For example, what was described in Unexamined-Japanese-Patent No. 2010-6946 etc. is mentioned.
--カルボキシル基含有高分子化合物の含有量--
 前記カルボキシル基含有高分子化合物の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、5質量%~80質量%が好ましく、20質量%~75質量%がより好ましく、30質量%~70質量%が特に好ましい。
 前記含有量が、5質量%未満であると、耐クラック性が良好に保つことができないことがあり、80質量%を超えると、耐熱性が低下することがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好な耐クラック性と耐熱性の両立の点で有利である。
--Content of carboxyl group-containing polymer compound--
There is no restriction | limiting in particular as content in the said photosensitive composition of the said carboxyl group-containing high molecular compound, Although it can select suitably according to the objective, 5 mass with respect to solid content of the said photosensitive composition % To 80% by mass is preferable, 20% to 75% by mass is more preferable, and 30% to 70% by mass is particularly preferable.
If the content is less than 5% by mass, the crack resistance may not be kept good, and if it exceeds 80% by mass, the heat resistance may be lowered. On the other hand, when the content is within the particularly preferable range, it is advantageous in terms of both good crack resistance and heat resistance.
<その他の成分>
 前記その他の成分としては、例えば、熱可塑性エラストマー、熱硬化促進剤、密着促進剤、熱重合禁止剤、無機充填剤、着色剤、有機溶剤、チキソ性付与剤、消泡剤、レベリング剤などが挙げられる。
<Other ingredients>
Examples of the other components include thermoplastic elastomers, thermosetting accelerators, adhesion promoters, thermal polymerization inhibitors, inorganic fillers, colorants, organic solvents, thixotropic agents, antifoaming agents, and leveling agents. Can be mentioned.
-熱可塑性エラストマー-
 前記感光性組成物に前記熱可塑性エラストマーを添加することで、前記感光性組成物に耐熱性、柔軟性及び強靭性を付与することができる。
 前記熱可塑性エラストマーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、スチレン系エラストマー、オレフィン系エラストマー、ウレタン系エラストマー、ポリエステル系エラストマー、ポリアミド系エラストマー、アクリル系エラストマー、シリコーン系エラストマー、ゴム変性したエポキシ樹脂などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
 これらの熱可塑性エラストマーは、ハードセグメント成分とソフトセグメント成分から成り立っており、一般に前者が耐熱性、及び強度に、後者が柔軟性、及び強靭性に寄与している。また、前記エラストマーの性質としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、現像工程の生産効率性などの点で、アルカリ可溶性又は膨潤性があることが好ましい。
 前記スチレン系エラストマー、オレフィン系エラストマー、ウレタン系エラストマー、ポリエステル系エラストマー、ポリアミド系エラストマー、アクリル系エラストマー、シリコーン系エラストマー、及びゴム変性したエポキシ樹脂としては、例えば、特開2009-014745号公報の段落「0087」~「0095」に記載のものなどが挙げられる。
-Thermoplastic elastomer-
By adding the thermoplastic elastomer to the photosensitive composition, heat resistance, flexibility and toughness can be imparted to the photosensitive composition.
There is no restriction | limiting in particular as said thermoplastic elastomer, According to the objective, it can select suitably, For example, styrene-type elastomer, olefin-type elastomer, urethane-type elastomer, polyester-type elastomer, polyamide-type elastomer, acrylic-type elastomer, silicone And elastomers and rubber-modified epoxy resins. These may be used individually by 1 type and may use 2 or more types together.
These thermoplastic elastomers are composed of a hard segment component and a soft segment component. In general, the former contributes to heat resistance and strength, and the latter contributes to flexibility and toughness. Moreover, there is no restriction | limiting in particular as a characteristic of the said elastomer, According to the objective, it can select suitably, For example, it is preferable that it is alkali-soluble or swellable in terms of the production efficiency of a image development process.
Examples of the styrene elastomer, olefin elastomer, urethane elastomer, polyester elastomer, polyamide elastomer, acrylic elastomer, silicone elastomer and rubber-modified epoxy resin include, for example, paragraph “ And the like described in “0087” to “0095”.
--熱可塑性エラストマーの含有量--
 前記熱可塑性エラストマーの前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、1質量%~50質量%が好ましく、2質量%~20質量%がより好ましく、3質量%~10質量%が特に好ましい。前記含有量が、1質量%未満であると、耐クラック性が劣ることあり、50質量%を超えると、未露光部が現像液で溶出しないことがある。一方、前記含有量が、前記特に好ましい範囲内であると、現像性や耐クラック性が向上する点で有利である。
-Content of thermoplastic elastomer-
The content of the thermoplastic elastomer in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 1% by mass to 50% with respect to the solid content of the photosensitive composition. % By mass is preferable, 2% by mass to 20% by mass is more preferable, and 3% by mass to 10% by mass is particularly preferable. If the content is less than 1% by mass, the crack resistance may be inferior, and if it exceeds 50% by mass, the unexposed part may not be eluted with the developer. On the other hand, when the content is within the particularly preferable range, it is advantageous in terms of improving developability and crack resistance.
-熱硬化促進剤-
 前記熱硬化促進剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0101」に記載された化合物などが挙げられる。
-Thermosetting accelerator-
The thermosetting accelerator is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0101” of JP-A-2007-2030.
--熱硬化促進剤の含有量--
 前記熱硬化促進剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、0.01質量%~20質量%が好ましく、0.05質量%~15質量%がより好ましく、0.1質量%~10質量%が特に好ましい。前記熱硬化促進剤の含有量が、0.01質量%未満であると、硬化膜の強靭性を発現することができないことがあり、20質量%を超えると、感光性組成物の保存安定性が悪化することがある。一方、前記熱硬化促進剤の含有量が、前記特に好ましい範囲内であると、感光性組成物の保存安定性、及び硬化膜物性が向上する点で有利である。
-Content of thermosetting accelerator-
There is no restriction | limiting in particular as content in the said photosensitive composition of the said thermosetting accelerator, Although it can select suitably according to the objective, 0.01 mass with respect to solid content of the said photosensitive composition % To 20% by mass is preferable, 0.05% to 15% by mass is more preferable, and 0.1% to 10% by mass is particularly preferable. When the content of the thermosetting accelerator is less than 0.01% by mass, the toughness of the cured film may not be expressed. When the content exceeds 20% by mass, the storage stability of the photosensitive composition may be reduced. May get worse. On the other hand, when the content of the thermosetting accelerator is within the particularly preferable range, it is advantageous in that the storage stability of the photosensitive composition and the physical properties of the cured film are improved.
-密着促進剤-
 前記密着促進剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0108」に記載された化合物などが挙げられる。
-Adhesion promoter-
The adhesion promoter is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0108” of JP-A-2007-2030.
--密着促進剤の含有量--
 前記密着促進剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、0.01質量%~20質量%が好ましく、0.05質量%~15質量%がより好ましく、0.1質量%~10質量%が特に好ましい。前記密着促進剤の含有量が、0.01質量%未満であると、硬化膜の強靭性を発現することができないことがあり、20質量%を超えると、感光性組成物の保存性が悪化することがある。一方、前記含有量が、前記特に好ましい範囲内であると、感光性組成物の保存安定性、及び硬化膜物性が向上する点で有利である。
-Content of adhesion promoter-
There is no restriction | limiting in particular as content in the said photosensitive composition of the said adhesion promoter, Although it can select suitably according to the objective, 0.01 mass% with respect to solid content of the said photosensitive composition Is preferably 20% by mass, more preferably 0.05% by mass to 15% by mass, and particularly preferably 0.1% by mass to 10% by mass. When the content of the adhesion promoter is less than 0.01% by mass, the toughness of the cured film may not be expressed. When the content exceeds 20% by mass, the preservability of the photosensitive composition is deteriorated. There are things to do. On the other hand, when the content is within the particularly preferable range, it is advantageous in that the storage stability of the photosensitive composition and the physical properties of the cured film are improved.
-熱重合禁止剤-
 前記熱重合禁止剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0113」に記載された化合物などが挙げられる。
-Thermal polymerization inhibitor-
The thermal polymerization inhibitor is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0113” of JP-A-2007-2030.
-無機充填剤-
 前記無機充填剤としては、特に制限はなく、目的に応じて適宜選択することができるが、平均粒径(d50)が0.05μm~3.0μmであるシリカ粒子を含有することが好ましい。前記無機充填剤がシリカ粒子を含有することにより、硬化膜の耐熱性を向上させるとともに、カルボキシル基含有高分子化合物との分散性が良好となり、感光性組成物の粘度を好適な範囲に維持することができ、好適な塗布適性が得られる。
-Inorganic filler-
The inorganic filler is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably contains silica particles having an average particle diameter (d50) of 0.05 μm to 3.0 μm. When the inorganic filler contains silica particles, the heat resistance of the cured film is improved, the dispersibility with the carboxyl group-containing polymer compound is improved, and the viscosity of the photosensitive composition is maintained in a suitable range. And suitable coating aptitude is obtained.
 前記シリカ粒子におけるシリカとしては、特に制限はなく、目的に応じて適宜選択でき、例えば、気相法シリカ、結晶性シリカ、溶融シリカなどが挙げられる。
 前記シリカ粒子の平均粒径(d50)としては、特に制限はなく、目的に応じて適宜選択することができるが、0.05μm~3.0μmが好ましく、0.1μm~2.5μmがより好ましく、0.1μm~2.0μmが特に好ましい。
There is no restriction | limiting in particular as a silica in the said silica particle, According to the objective, it can select suitably, For example, vapor phase method silica, crystalline silica, fused silica etc. are mentioned.
The average particle diameter (d50) of the silica particles is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05 μm to 3.0 μm, more preferably 0.1 μm to 2.5 μm. 0.1 μm to 2.0 μm is particularly preferable.
 前記シリカ粒子の平均粒径(d50)が、0.05μm未満であると、塗布粘度が高くなることがあり、3.0μmを超えると、平滑性を維持することができないことがある。一方、前記シリカ粒子の平均粒径(d50)が、前記特に好ましい範囲内であると、塗布粘度と硬化膜の平滑性や耐熱性の点で有利である。
 なお、前記シリカ粒子の平均粒径(d50)は、積算(累積)質量百分率で表したときの積算値50%の粒度で定義されるもので、d50(D50)などと定義されるものであり、例えば、ダイナミック光散乱光度計(商品名DLS7000、大塚電子株式会社製)を用いて、測定原理を動的光散乱法とし、サイズ分布解析手法をキュムラント法及び/又はヒストグラム法として、測定することができる。
When the average particle diameter (d50) of the silica particles is less than 0.05 μm, the coating viscosity may increase, and when it exceeds 3.0 μm, smoothness may not be maintained. On the other hand, when the average particle diameter (d50) of the silica particles is within the particularly preferable range, it is advantageous in view of coating viscosity, smoothness of a cured film and heat resistance.
The average particle diameter of the silica particles (d50) is integrated intended to be defined by the integrated value of 50% particle size when expressed in (cumulative) weight percent, intended to be defined as such d50 (D 50) Yes, for example, using a dynamic light scattering photometer (trade name DLS7000, manufactured by Otsuka Electronics Co., Ltd.), the measurement principle is a dynamic light scattering method, and the size distribution analysis method is a cumulant method and / or a histogram method. be able to.
--無機充填剤の含有量--
 前記無機充填剤子の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、1質量%~60質量%が好ましく、10質量%~60質量%がより好ましく、15質量%~60質量%が特に好ましい。前記無機充填剤の含有量が、1質量%未満であると、耐熱性が劣ることがあり、60質量%を超えると、パターン形成性が劣ることがある。一方、前記含有量が、前記特に好ましい範囲内であると、パターン形成性と耐熱性が向上する点で有利である。
-Content of inorganic filler-
The content of the inorganic filler in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is 1% by mass to the solid content of the photosensitive composition. 60% by mass is preferable, 10% by mass to 60% by mass is more preferable, and 15% by mass to 60% by mass is particularly preferable. When content of the said inorganic filler is less than 1 mass%, heat resistance may be inferior, and when it exceeds 60 mass%, pattern formability may be inferior. On the other hand, when the content is within the particularly preferable range, it is advantageous in that the pattern formability and heat resistance are improved.
-着色剤-
 前記着色剤としては、特に制限はなく、目的に応じて適宜選択することができ、着色顔料や、公知の染料の中から適宜選択した染料を使用することができる。
 前記着色顔料としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落「0106」に記載された化合物などが挙げられる。
 前記着色剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができる。
-Colorant-
There is no restriction | limiting in particular as said coloring agent, According to the objective, it can select suitably, A coloring pigment and the dye suitably selected from well-known dye can be used.
The color pigment is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph “0106” of JP-A-2007-2030.
There is no restriction | limiting in particular as content in the said photosensitive composition of the said coloring agent, According to the objective, it can select suitably.
-有機溶剤-
 前記有機溶剤は、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開平11-240930号公報の段落「0043」に記載された化合物、特開2007-2030号公報の段落「0121」に記載された化合物などが挙げられる。
-Organic solvent-
The organic solvent is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in “0121”.
--有機溶剤の含有量--
 前記有機溶剤の前記感光性組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光性組成物の固形分に対して、1質量%~80質量%が好ましく、2質量%~70質量%がより好ましく、3質量%~60質量%が特に好ましい。前記有機溶剤の含有量が、1質量%未満であると、組成物の粘度が高く塗膜の形成が困難になることがあり、80質量%を超えると、所望の膜厚の制御が困難になることがある。一方、前記有機溶剤の含有量が、前記特に好ましい範囲内であると、塗膜製造適性の点で有利である。
-Content of organic solvent-
The content of the organic solvent in the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. It is 1% by mass to 80% by mass with respect to the solid content of the photosensitive composition. %, Preferably 2% to 70% by weight, more preferably 3% to 60% by weight. When the content of the organic solvent is less than 1% by mass, the viscosity of the composition may be high and it may be difficult to form a coating film. When the content exceeds 80% by mass, it is difficult to control the desired film thickness. May be. On the other hand, when the content of the organic solvent is within the particularly preferable range, it is advantageous from the viewpoint of coating film production suitability.
(感光性ソルダーレジスト組成物)
 本発明の感光性ソルダーレジスト組成物は、前記本発明の感光性組成物を含有するものである。
 本発明の感光性ソルダーレジスト組成物によれば、絶縁性、パターン側面の平滑性、耐メッキ性に優れたソルダーレジストを得ることができる。
(Photosensitive solder resist composition)
The photosensitive solder resist composition of the present invention contains the photosensitive composition of the present invention.
According to the photosensitive solder resist composition of the present invention, it is possible to obtain a solder resist excellent in insulation, smoothness of the pattern side surface, and plating resistance.
(感光性ソルダーレジストフィルム)
 本発明の感光性ソルダーレジスト組成物は、導体配線の形成された基板上に塗布乾燥することにより液状レジストとしても使用可能であるが、感光性ソルダーレジストフィルムの製造に特に有用である。
 本発明の感光性ソルダーレジストフィルムは、少なくとも支持体と、感光層とを有してなり、好ましくは保護フィルムを有してなり、更に必要に応じて、クッション層、酸素遮断層(以下「PC層」と省略することがある。)などのその他の層を有してなる。
 前記感光性ソルダーレジストフィルムの形態としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記支持体上に、前記感光層、前記保護膜フィルムをこの順に有してなる形態、前記支持体上に、前記PC層、前記感光性層、前記保護フィルムをこの順に有してなる形態、前記支持体上に、前記クッション層、前記PC層、前記感光層、前記保護フィルムをこの順に有してなる形態などが挙げられる。なお、前記感光層は、単層であってもよいし、複数層であってもよい。
(Photosensitive solder resist film)
The photosensitive solder resist composition of the present invention can be used as a liquid resist by coating and drying on a substrate on which a conductor wiring is formed, but is particularly useful for the production of a photosensitive solder resist film.
The photosensitive solder resist film of the present invention comprises at least a support and a photosensitive layer, preferably a protective film, and further comprises a cushion layer, an oxygen barrier layer (hereinafter referred to as “PC”) as necessary. It may be abbreviated as “layer”).
There is no restriction | limiting in particular as a form of the said photosensitive soldering resist film, According to the objective, it can select suitably, For example, it has the said photosensitive layer and the said protective film in this order on the said support body. Form: Form in which the PC layer, the photosensitive layer, and the protective film are provided in this order on the support, and the cushion layer, the PC layer, the photosensitive layer, and the protective film on the support. In this order. The photosensitive layer may be a single layer or a plurality of layers.
<支持体>
 前記支持体としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光層を剥離可能であり、かつ光の透過性が良好であるのが好ましく、更に表面の平滑性が良好であるのがより好ましい。
<Support>
The support is not particularly limited and may be appropriately selected depending on the intended purpose. However, it is preferable that the photosensitive layer can be peeled off and the light transmittance is good, and further the surface smoothness Is more preferable.
 前記支持体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、透明な合成樹脂製フィルムが挙げられる。
 前記透明な合成樹脂製フィルムとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエチレンテレフタレート、ポリエチレンナフタレート、ポリプロピレン、ポリエチレン、三酢酸セルロース、二酢酸セルロース、ポリ(メタ)アクリル酸アルキルエステル、ポリ(メタ)アクリル酸エステル共重合体、ポリ塩化ビニル、ポリビニルアルコール、ポリカーボネート、ポリスチレン、セロファン、ポリ塩化ビニリデン共重合体、ポリアミド、ポリイミド、塩化ビニル・酢酸ビニル共重合体、ポリテトラフロロエチレン、ポリトリフロロエチレン、セルロース系フィルム、ナイロンフィルム等の各種のプラスチックフィルムなどが挙げられる。これらは、1種単独で使用してもよく、2種以上を併用してもよい。これらの中でも、前記透明な合成樹脂製フィルムは、ポリエチレンテレフタレートが好ましい。
 前記支持体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開平4-208940号公報、特開平5-80503号公報、特開平5-173320号公報、特開平5-72724号公報などに記載の支持体などが挙げられる。
There is no restriction | limiting in particular as said support body, According to the objective, it can select suitably, For example, a transparent synthetic resin film is mentioned.
The transparent synthetic resin film is not particularly limited and may be appropriately selected depending on the intended purpose. For example, polyethylene terephthalate, polyethylene naphthalate, polypropylene, polyethylene, cellulose triacetate, cellulose diacetate, poly (meta ) Acrylic acid alkyl ester, poly (meth) acrylic acid ester copolymer, polyvinyl chloride, polyvinyl alcohol, polycarbonate, polystyrene, cellophane, polyvinylidene chloride copolymer, polyamide, polyimide, vinyl chloride / vinyl acetate copolymer, Examples include various plastic films such as polytetrafluoroethylene, polytrifluoroethylene, cellulose-based film, and nylon film. These may be used alone or in combination of two or more. Among these, the transparent synthetic resin film is preferably polyethylene terephthalate.
The support is not particularly limited and may be appropriately selected depending on the intended purpose. For example, JP-A-4-208940, JP-A-5-80503, JP-A-5-173320, JP-A-5-173320 Examples thereof include a support described in JP-A-5-72724.
 前記支持体の厚みとしては、特に制限はなく、目的に応じて適宜選択することができるが、4μm~300μmが好ましく、5μm~175μmがより好ましい。
 前記支持体の形状としては、特に制限はなく、目的に応じて適宜選択することができるが、長尺状が好ましい。前記長尺状の支持体の長さとしては、特に制限はなく、目的に応じて適宜選択することができるが、10m~20,000mが好ましい。
The thickness of the support is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 4 μm to 300 μm, and more preferably 5 μm to 175 μm.
There is no restriction | limiting in particular as a shape of the said support body, Although it can select suitably according to the objective, A long shape is preferable. The length of the long support is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10 m to 20,000 m.
<感光層>
 前記感光層は、本発明の前記感光性ソルダーレジスト組成物により形成される。
 前記感光層の前記感光性ソルダーレジストフィルムにおいて設けられる箇所としては、特に制限はなく、目的に応じて適宜選択することができるが、通常、前記支持体上に積層される。
<Photosensitive layer>
The photosensitive layer is formed by the photosensitive solder resist composition of the present invention.
There is no restriction | limiting in particular as a location provided in the said photosensitive soldering resist film of the said photosensitive layer, Although it can select suitably according to the objective, Usually, it laminates | stacks on the said support body.
 前記感光層の厚みとしては、特に制限はなく、目的に応じて適宜選択することができるが、3μm~100μmが好ましく、5μm~70μmがより好ましい。 The thickness of the photosensitive layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3 μm to 100 μm, and more preferably 5 μm to 70 μm.
 前記感光層の形成方法としては、前記支持体の上に、本発明の前記感光性ソルダーレジスト組成物を、水又は溶剤に溶解、乳化又は分散させて感光性ソルダーレジスト組成物溶液を調製し、該溶液を直接塗布し、乾燥させることにより積層する方法が挙げられる。 As the method for forming the photosensitive layer, a photosensitive solder resist composition solution is prepared by dissolving, emulsifying, or dispersing the photosensitive solder resist composition of the present invention in water or a solvent on the support, The method of laminating | stacking by applying this solution directly and making it dry is mentioned.
 前記感光性ソルダーレジスト組成物溶液の溶剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、アルコール類、ケトン類、エステル類、芳香族炭化水素類、ハロゲン化炭化水素類、エーテル類、ジメチルホルムアミド、ジメチルアセトアミド、ジメチルスルホオキサイド、スルホランなどが挙げられる。
 前記アルコール類としては、例えば、メタノール、エタノール、n-プロパノール、イソプロパノール、n-ブタノール、sec-ブタノール、n-ヘキサノールなどが挙げられる。
 前記ケトン類としては、例えば、アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロヘキサノン、ジイソブチルケトンなどが挙げられる。
 前記エステル類としては、例えば、酢酸エチル、酢酸ブチル、酢酸-n-アミル、硫酸メチル、プロピオン酸エチル、フタル酸ジメチル、安息香酸エチル、メトキシプロピルアセテートなどが挙げられる。
 前記芳香族炭化水素類としては、例えば、トルエン、キシレン、ベンゼン、エチルベンゼンなどが挙げられる。
 前記ハロゲン化炭化水素類としては、例えば、四塩化炭素、トリクロロエチレン、クロロホルム、1,1,1-トリクロロエタン、塩化メチレン、モノクロロベンゼンなどが挙げられる。
 前記エーテル類としては、例えば、テトラヒドロフラン、ジエチルエーテル、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、1-メトキシ-2-プロパノールなどが挙げられる。
 これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
The solvent for the photosensitive solder resist composition solution is not particularly limited and may be appropriately selected depending on the intended purpose. For example, alcohols, ketones, esters, aromatic hydrocarbons, halogenated hydrocarbons , Ethers, dimethylformamide, dimethylacetamide, dimethylsulfoxide, sulfolane and the like.
Examples of the alcohols include methanol, ethanol, n-propanol, isopropanol, n-butanol, sec-butanol, and n-hexanol.
Examples of the ketones include acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, diisobutyl ketone and the like.
Examples of the esters include ethyl acetate, butyl acetate, n-amyl acetate, methyl sulfate, ethyl propionate, dimethyl phthalate, ethyl benzoate, and methoxypropyl acetate.
Examples of the aromatic hydrocarbons include toluene, xylene, benzene, ethylbenzene and the like.
Examples of the halogenated hydrocarbons include carbon tetrachloride, trichloroethylene, chloroform, 1,1,1-trichloroethane, methylene chloride, and monochlorobenzene.
Examples of the ethers include tetrahydrofuran, diethyl ether, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 1-methoxy-2-propanol, and the like.
These may be used individually by 1 type and may use 2 or more types together.
 前記感光性ソルダーレジスト組成物溶液の固形分濃度としては、特に制限はなく、目的に応じて適宜選択することができるが、10質量%~90質量%が好ましく、15質量%~50質量%がより好ましい。 The solid content concentration of the photosensitive solder resist composition solution is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10% by mass to 90% by mass, and more preferably 15% by mass to 50% by mass. More preferred.
 前記塗布の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、スピンコーター、スリットスピンコーター、ロールコーター、ダイコーター、カーテンコーターなどを用いて、前記支持体に直接塗布する方法が挙げられる。
 前記乾燥の条件としては、特に制限はなく、目的に応じて適宜選択することができ、各成分、溶媒の種類、使用割合などによっても異なるが、通常、60℃~110℃の温度で30秒間~15分間程度である。
The application method is not particularly limited and may be appropriately selected depending on the intended purpose. For example, using a spin coater, slit spin coater, roll coater, die coater, curtain coater, etc. The method of apply | coating is mentioned.
The drying conditions are not particularly limited and may be appropriately selected depending on the purpose. The drying conditions vary depending on each component, the type of solvent, the use ratio, and the like, but are usually 60 ° C. to 110 ° C. for 30 seconds. About 15 minutes.
<保護フィルム>
 前記保護フィルムは、前記感光層の汚れや損傷を防止し、保護する機能を有する。
 前記保護フィルムの前記感光性ソルダーレジストフィルムにおいて設けられる箇所としては、特に制限はなく、目的に応じて適宜選択することができるが、通常、前記感光層上に設けられる。
 前記保護フィルムとしては、例えば、前記支持体に使用されるもの、シリコーン紙、ポリエチレン、ポリプロピレンがラミネートされた紙、ポリオレフィンシート、ポリテトラフルオルエチレンシートなどが挙げられる。
 前記保護フィルムの厚みとしては、特に制限はなく、目的に応じて適宜選択することができるが、5μm~100μmが好ましく、8μm~30μmがより好ましい。
<Protective film>
The protective film has a function of preventing and protecting the photosensitive layer from being stained and damaged.
There is no restriction | limiting in particular as a location provided in the said photosensitive soldering resist film of the said protective film, Although it can select suitably according to the objective, Usually, it is provided on the said photosensitive layer.
Examples of the protective film include those used for the support, silicone paper, polyethylene, paper laminated with polypropylene, polyolefin sheets, polytetrafluoroethylene sheets, and the like.
The thickness of the protective film is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5 μm to 100 μm, and more preferably 8 μm to 30 μm.
 前記保護フィルムを用いる場合、前記感光層及び前記支持体の接着力Aと、前記感光層及び保護フィルムの接着力Bとが、接着力A>接着力Bの関係であることが好ましい。
 前記支持体と前記保護フィルムとの組合せ(支持体/保護フィルム)としては、例えば、ポリエチレンテレフタレート/ポリプロピレン、ポリエチレンテレフタレート/ポリエチレン、ポリ塩化ビニル/セロファン、ポリイミド/ポリプロピレン、ポリエチレンテレフタレート/ポリエチレンテレフタレートなどが挙げられる。
 また、支持体及び保護フィルムの少なくともいずれかを表面処理することにより、上述のような接着力の関係を満たすことができる。前記支持体の表面処理は、前記感光層との接着力を高めるために施されてもよく、例えば、下塗層の塗設、コロナ放電処理、火炎処理、紫外線照射処理、高周波照射処理、グロー放電照射処理、活性プラズマ照射処理、レーザ光線照射処理などを挙げることができる。
When the protective film is used, it is preferable that the adhesive force A between the photosensitive layer and the support and the adhesive force B between the photosensitive layer and the protective film satisfy the relationship of adhesive force A> adhesive force B.
Examples of the combination of the support and the protective film (support / protective film) include polyethylene terephthalate / polypropylene, polyethylene terephthalate / polyethylene, polyvinyl chloride / cellophane, polyimide / polypropylene, polyethylene terephthalate / polyethylene terephthalate, and the like. It is done.
Moreover, the above-mentioned relationship of adhesive force can be satisfy | filled by surface-treating at least any one of a support body and a protective film. The surface treatment of the support may be performed in order to increase the adhesive force with the photosensitive layer. For example, coating of a primer layer, corona discharge treatment, flame treatment, ultraviolet irradiation treatment, high frequency irradiation treatment, glow treatment Examples thereof include discharge irradiation treatment, active plasma irradiation treatment, and laser beam irradiation treatment.
 また、前記支持体と前記保護フィルムとの静摩擦係数としては、0.3~1.4が好ましく、0.5~1.2がより好ましい。前記静摩擦係数が、0.3未満であると、滑り過ぎるため、ロール状にした場合に巻ズレが発生することがあり、1.4を超えると、良好なロール状に巻くことが困難となることがある。 The coefficient of static friction between the support and the protective film is preferably 0.3 to 1.4, more preferably 0.5 to 1.2. When the coefficient of static friction is less than 0.3, slipping is excessive, so that winding deviation may occur when the roll is formed, and when it exceeds 1.4, it is difficult to wind into a good roll. Sometimes.
 前記感光性ソルダーレジストフィルムの保管方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、円筒状の巻芯に巻き取って、長尺状でロール状に巻かれて保管されることが好ましい。
 前記長尺状の感光性ソルダーレジストフィルムの長さとしては、特に制限はなく、例えば、10m~20,000mの範囲から適宜選択することができる。また、ユーザーが使いやすいようにスリット加工し、100m~1,000mの範囲の長尺体をロール状にしてもよい。なお、この場合には、前記支持体が一番外側になるように巻き取られることが好ましい。また、前記ロール状の感光性フィルムをシート状にスリットしてもよい。保管の際、端面の保護、エッジフュージョンを防止する観点から、端面にはセパレーター(特に防湿性のもの、乾燥剤入りのもの)を設置することが好ましく、また梱包も透湿性の低い素材を用いることが好ましい。
The method for storing the photosensitive solder resist film is not particularly limited and can be appropriately selected according to the purpose. For example, the photosensitive solder resist film is wound around a cylindrical core and wound into a long roll. Preferably it is stored.
The length of the long photosensitive solder resist film is not particularly limited, and can be appropriately selected from a range of 10 m to 20,000 m, for example. Further, slitting may be performed so that the user can use it easily, and a long body in the range of 100 m to 1,000 m may be rolled. In this case, it is preferable that the support is wound up so as to be the outermost side. Moreover, you may slit the said roll-shaped photosensitive film in a sheet form. From the viewpoint of protecting the end face and preventing edge fusion during storage, it is preferable to install a separator (especially moisture-proof and desiccant-containing) on the end face, and use a low moisture-permeable material for packaging. It is preferable.
 前記保護フィルムは、前記保護フィルムと前記感光層との接着性を調整するために表面処理してもよい。前記表面処理は、例えば、前記保護フィルムの表面に、ポリオルガノシロキサン、ポリフルオロエチレン等の弗素化ポリオレフィン、ポリビニルアルコールなどのポリマーからなる下塗層を形成させる。該下塗層の形成は、前記ポリマーの塗布液を前記保護フィルムの表面に塗布した後、30℃~150℃(特に、50℃~120℃)で1分間~30分間乾燥させることにより形成させることができる。
 また、前記感光層、前記支持体、前記保護フィルムの他に、クッション層、酸素遮断層(PC層)、剥離層、接着層、光吸収層、表面保護層などの層を有してもよい。
 前記クッション層は、常温ではタック性が無く、真空及び加熱条件で積層した場合に溶融し、流動する層である。
 前記PC層は、通常ポリビニルアルコールを主成分として形成された1.5μm程度の被膜である。
The protective film may be surface-treated to adjust the adhesion between the protective film and the photosensitive layer. In the surface treatment, for example, an undercoat layer made of a polymer such as polyorganosiloxane or fluorinated polyolefin such as polyfluoroethylene or polyvinyl alcohol is formed on the surface of the protective film. The undercoat layer is formed by applying the polymer coating solution to the surface of the protective film and then drying at 30 ° C. to 150 ° C. (especially 50 ° C. to 120 ° C.) for 1 minute to 30 minutes. be able to.
In addition to the photosensitive layer, the support, and the protective film, a cushion layer, an oxygen blocking layer (PC layer), a release layer, an adhesive layer, a light absorption layer, a surface protective layer, and the like may be included. .
The cushion layer is a layer that has no tackiness at room temperature and melts and flows when laminated under vacuum and heating conditions.
The PC layer is usually a film having a thickness of about 1.5 μm formed mainly of polyvinyl alcohol.
 前記感光性ソルダーレジストフィルムは、表面のタック性が小さく、ラミネート性及び取扱い性が良好で、絶縁性、耐メッキ性、パターン側面の平滑性に優れた感光性ソルダーレジスト組成物が積層された感光層を有してなる。このため、プリント配線板、カラーフィルタや柱材、リブ材、スペーサー、隔壁などのディスプレイ用部材、ホログラム、マイクロマシン、プルーフなどの永久パターン形成用として広く用いることができ、本発明の永久パターン及びその形成方法に好適に用いることができる。
 特に、本発明の感光性ソルダーレジストフィルムは、該フィルムの厚みが均一であるため、永久パターンの形成に際し、基材への積層がより精細に行われる。
The photosensitive solder resist film has a small surface tackiness, good laminating property and handleability, and is a photosensitive layered with a photosensitive solder resist composition excellent in insulation, plating resistance and pattern side smoothness. Having a layer. For this reason, it can be widely used for the formation of permanent patterns such as printed wiring boards, color filters, pillar materials, rib materials, spacers, partition walls and other display members, holograms, micromachines, proofs, etc. It can be suitably used for the forming method.
In particular, since the photosensitive solder resist film of the present invention has a uniform thickness, it is more accurately laminated on a substrate when a permanent pattern is formed.
(永久パターン及び永久パターン形成方法)
 本発明の永久パターンは、本発明の永久パターン形成方法により得られる。
 前記永久パターンとしては、保護膜、層間絶縁膜及びソルダーレジストパターンの少なくともいずれかであるのが好ましい。
 前記永久パターンがソルダーレジストパターンの場合は、220℃における動的弾性率が、20MPa~100MPaが好ましく、25MPa~80MPaがより好ましく、30MPa~50MPaが特に好ましい。該動的弾性率が、20MPa未満であると耐熱性が劣ることがあり、100MPa超であると、耐熱衝撃性に劣り、硬化膜にクラックを生じることがある。
(Permanent pattern and permanent pattern forming method)
The permanent pattern of the present invention is obtained by the permanent pattern forming method of the present invention.
The permanent pattern is preferably at least one of a protective film, an interlayer insulating film, and a solder resist pattern.
When the permanent pattern is a solder resist pattern, the dynamic elastic modulus at 220 ° C. is preferably 20 to 100 MPa, more preferably 25 to 80 MPa, and particularly preferably 30 to 50 MPa. If the dynamic elastic modulus is less than 20 MPa, the heat resistance may be inferior, and if it exceeds 100 MPa, the thermal shock resistance may be inferior and cracks may occur in the cured film.
 本発明の永久パターン形成方法は、第1の態様として、本発明の感光性ソルダーレジスト組成物を、基材の表面に塗布し、乾燥して感光層を形成した後、露光(露光工程)し、現像(現像工程)する。
 また、本発明の永久パターン形成方法は、第2の態様として、本発明の感光性ソルダーレジストフィルムを、加熱及び加圧の少なくともいずれかの下において基材の表面に積層した後、露光(露光工程)し、現像(現像工程)する。
 以下、本発明の永久パターン形成方法の説明を通じて、本発明の永久パターンの詳細も明らかにする。
In the method for forming a permanent pattern of the present invention, as a first aspect, the photosensitive solder resist composition of the present invention is applied to the surface of a substrate, dried to form a photosensitive layer, and then exposed (exposure process). Develop (development process).
Moreover, in the permanent pattern formation method of the present invention, as a second aspect, the photosensitive solder resist film of the present invention is laminated on the surface of the substrate under at least one of heating and pressurization, and then exposed (exposure). Process) and development (development process).
Hereinafter, the details of the permanent pattern of the present invention will be clarified through the description of the method for forming a permanent pattern of the present invention.
<基材>
 前記基材としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、銅張積層板等のプリント配線板形成用基板、ソーダガラス板等のガラス板、合成樹脂性のフィルム、紙、金属板などが挙げられる。
 これらの中でも、多層配線基板やビルドアップ配線基板などへの半導体等の高密度実装化が可能となる点で、配線形成済みのプリント配線板形成用基板が好ましい。
<Base material>
The substrate is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a printed wiring board forming substrate such as a copper-clad laminate, a glass plate such as a soda glass plate, or a synthetic resin film , Paper, metal plate and the like.
Among these, a printed wiring board forming substrate on which wiring is already formed is preferable in that high-density mounting of a semiconductor or the like on a multilayer wiring board or a build-up wiring board is possible.
 前記基材は、前記第1の態様として、該基材上に前記感光性ソルダーレジスト組成物による感光層が形成されてなる積層体、又は前記第2の態様として、前記感光性ソルダーレジストフィルムにおける感光層が重なるようにして積層されてなる積層体を形成して用いることができる。即ち、前記積層体における前記感光層に対して後述する露光することにより、露光した領域を硬化させ、後述する現像により永久パターンを形成することができる。 The substrate is a laminate in which a photosensitive layer made of the photosensitive solder resist composition is formed on the substrate as the first aspect, or the photosensitive solder resist film as the second aspect. It is possible to use by forming a laminate in which the photosensitive layers are laminated so as to overlap each other. That is, by exposing the photosensitive layer in the laminated body to be described later, the exposed region can be cured, and a permanent pattern can be formed by development to be described later.
<積層体>
 前記第1の態様の積層体の形成方法としては、特に制限はなく、目的に応じて適宜選択することができるが、前記基材上に、前記感光性ソルダーレジスト組成物を塗布及び乾燥して形成した感光層を積層するのが好ましい。
 前記塗布及び乾燥の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記感光性ソルダーレジスト組成物溶液をスピンコーター、スリットスピンコーター、ロールコーター、ダイコーター、カーテンコーターなどを用いて塗布する方法が挙げられる。
<Laminated body>
There is no restriction | limiting in particular as a formation method of the laminated body of a said 1st aspect, Although it can select suitably according to the objective, The said photosensitive soldering resist composition is apply | coated and dried on the said base material. It is preferable to laminate the formed photosensitive layer.
The method for coating and drying is not particularly limited and may be appropriately selected depending on the intended purpose. For example, the photosensitive solder resist composition solution is spin coater, slit spin coater, roll coater, die coater, curtain. The method of apply | coating using a coater etc. is mentioned.
 前記第2の態様の積層体の形成方法としては、特に制限はなく、目的に応じて適宜選択することができるが、前記基材上に前記感光性フィルムを加熱及び加圧の少なくともいずれかを行いながら積層する方法が好ましい。なお、前記感光性ソルダーレジストフィルムが前記保護フィルムを有する場合には、該保護フィルムを剥離し、前記基材に前記感光層が重なるようにして積層するのが好ましい。
 前記加熱の温度としては、特に制限はなく、目的に応じて適宜選択することができるが、70℃~130℃が好ましく、80℃~110℃がより好ましい。
 前記加圧の圧力としては、特に制限はなく、目的に応じて適宜選択することができるが、0.01MPa~1.0MPaが好ましく、0.05MPa~1.0MPaがより好ましい。
There is no restriction | limiting in particular as a formation method of the laminated body of the said 2nd aspect, Although it can select suitably according to the objective, At least any one of a heating and pressurization of the said photosensitive film on the said base material is carried out. A method of laminating while performing is preferable. In addition, when the said photosensitive soldering resist film has the said protective film, it is preferable to peel this protective film and to laminate | stack so that the said photosensitive layer may overlap with the said base material.
The heating temperature is not particularly limited and may be appropriately selected depending on the intended purpose. It is preferably 70 ° C to 130 ° C, and more preferably 80 ° C to 110 ° C.
The pressurizing pressure is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 MPa to 1.0 MPa, more preferably 0.05 MPa to 1.0 MPa.
 前記加熱及び加圧の少なくともいずれかを行う装置としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ヒートプレス、ヒートロールラミネータ(例えば、大成ラミネータ株式会社製、VP-II)、真空ラミネータ(例えば、株式会社名機製作所製、MVLP500)などが好適な装置として挙げられる。 An apparatus for performing at least one of the heating and pressurization is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a heat press, a heat roll laminator (for example, VP-manufactured by Taisei Laminator Co., Ltd.) II), a vacuum laminator (for example, MVLP500 manufactured by Meiki Seisakusho Co., Ltd.) and the like can be mentioned as suitable devices.
<露光工程>
 前記露光工程は、前記感光層に対し、パターン露光を行う工程である。
<Exposure process>
The exposure step is a step of performing pattern exposure on the photosensitive layer.
 前記露光の対象としては、感光層を有する材料である限り、特に制限はなく、目的に応じて適宜選択することができるが、基材上に前記感光性ソルダーレジスト組成物又は前記感光性ソルダーレジストフィルムが形成されてなる前記積層体に対して行われることが好ましい。 The subject of the exposure is not particularly limited as long as it is a material having a photosensitive layer, and can be appropriately selected according to the purpose. However, the photosensitive solder resist composition or the photosensitive solder resist is formed on a substrate. It is preferable to be performed on the laminate formed with a film.
 前記積層体への露光としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記支持体、クッション層及びPC層を介して前記感光層を露光してもよく、前記支持体を剥離した後、前記クッション層及びPC層を介して前記感光層を露光してもよく、前記支持体及びクッション層を剥離した後、前記PC層を介して前記感光層を露光してもよく、前記支持体、クッション層及びPC層を剥離した後、前記感光層を露光してもよい。 There is no restriction | limiting in particular as exposure to the said laminated body, According to the objective, it can select suitably, For example, you may expose the said photosensitive layer through the said support body, cushion layer, and PC layer, After peeling the support, the photosensitive layer may be exposed through the cushion layer and the PC layer. After peeling the support and cushion layer, the photosensitive layer is exposed through the PC layer. Alternatively, the photosensitive layer may be exposed after the support, the cushion layer and the PC layer are peeled off.
 前記露光としては、特に制限はなく、目的に応じて適宜選択することができ、デジタル露光、アナログ露光などが挙げられる。これらの中でも、デジタル露光が好ましい。 The exposure is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include digital exposure and analog exposure. Among these, digital exposure is preferable.
 前記デジタル露光としては、特に制限はなく、目的に応じて適宜選択することができるが、例えば、形成するパターン形成情報に基づいて制御信号を生成し、該制御信号に応じて変調させた光を用いて行うのが好ましい。 The digital exposure is not particularly limited and can be appropriately selected depending on the purpose.For example, a control signal is generated based on pattern formation information to be formed, and light modulated in accordance with the control signal is generated. It is preferable to use.
 前記デジタル露光の手段としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、光を照射する光照射手段、形成するパターン情報に基づいて該光照射手段から照射される光を変調させる光変調手段などが挙げられる。 The digital exposure means is not particularly limited and may be appropriately selected depending on the purpose. For example, light irradiation means for irradiating light, light emitted from the light irradiation means based on pattern information to be formed And a light modulation means for modulating the light intensity.
<<光変調手段>>
 前記光変調手段としては、光を変調することができる限り、特に制限はなく、目的に応じて適宜選択することができるが、n個の描素部を有するものが好ましい。
 前記n個の描素部を有する光変調手段としては、特に制限はなく、目的に応じて適宜選択することができるが、空間光変調素子が好ましい。
<< light modulation means >>
The light modulation means is not particularly limited as long as it can modulate light, and can be appropriately selected according to the purpose, but preferably has n pixel portions.
The light modulation means having the n picture elements is not particularly limited and may be appropriately selected according to the purpose, but a spatial light modulation element is preferable.
 前記空間光変調素子としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、デジタル・マイクロミラー・デバイス(DMD)、MEMS(Micro Electro Mechanical Systems)タイプの空間光変調素子(SLM;Special Light Modulator)、電気光学効果により透過光を変調する光学素子(PLZT素子)、液晶光シャッタ(FLC)などが挙げられる。
 これらの中でも、デジタル・マイクロミラー・デバイス(DMD)が好ましい。
The spatial light modulation element is not particularly limited and may be appropriately selected depending on the purpose. For example, a spatial light modulation element of a digital micromirror device (DMD) or MEMS (Micro Electro Mechanical Systems) type ( Examples thereof include SLM (Special Light Modulator), an optical element (PLZT element) that modulates transmitted light by an electro-optic effect, and a liquid crystal light shutter (FLC).
Among these, a digital micromirror device (DMD) is preferable.
 また、前記光変調手段は、形成するパターン情報に基づいて制御信号を生成するパターン信号生成手段を有するのが好ましい。この場合、前記光変調手段は、前記パターン信号生成手段が生成した制御信号に応じて光を変調させる。
 前記制御信号としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、デジタル信号が挙げられる。
The light modulation means preferably includes pattern signal generation means for generating a control signal based on pattern information to be formed. In this case, the light modulation unit modulates light according to the control signal generated by the pattern signal generation unit.
There is no restriction | limiting in particular as said control signal, According to the objective, it can select suitably, For example, a digital signal is mentioned.
<現像工程>
 前記現像工程は、前記露光工程により前記感光層を露光し、該感光層の露光した領域を硬化させた後、未硬化領域を除去することにより現像し、永久パターンを形成する工程である。
<Development process>
The developing step is a step of forming a permanent pattern by exposing the photosensitive layer by the exposing step, curing the exposed region of the photosensitive layer, and then developing by removing the uncured region.
 前記未硬化領域の除去方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、現像液を用いて除去する方法などが挙げられる。 The method for removing the uncured region is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a method using a developer.
 前記現像液としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、アルカリ金属又はアルカリ土類金属の水酸化物若しくは炭酸塩、炭酸水素塩、アンモニア水、4級アンモニウム塩の水溶液などが挙げられる。これらの中でも、炭酸ナトリウム水溶液が好ましい。 The developer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, alkali metal or alkaline earth metal hydroxide or carbonate, hydrogen carbonate, aqueous ammonia, quaternary ammonium salt An aqueous solution of Among these, an aqueous sodium carbonate solution is preferable.
 前記現像液は、界面活性剤、消泡剤、有機塩基や、現像を促進させるため有機溶剤などと併用してもよい。
 前記有機塩基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ベンジルアミン、エチレンジアミン、エタノールアミン、テトラメチルアンモニウムハイドロキサイド、ジエチレントリアミン、トリエチレンペンタミン、モルホリン、トリエタノールアミンなどが挙げられる。
 前記有機溶剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、アルコール類、ケトン類、エステル類、エーテル類、アミド類、ラクトン類などが挙げられる。
 また、前記現像液は、水又はアルカリ水溶液と有機溶剤を混合した水系現像液であってもよいし、有機溶剤単独であってもよい。
The developer may be used in combination with a surfactant, an antifoaming agent, an organic base, an organic solvent or the like for accelerating development.
The organic base is not particularly limited and may be appropriately selected depending on the intended purpose. For example, benzylamine, ethylenediamine, ethanolamine, tetramethylammonium hydroxide, diethylenetriamine, triethylenepentamine, morpholine, triethanol An amine etc. are mentioned.
The organic solvent is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include alcohols, ketones, esters, ethers, amides, and lactones.
The developer may be an aqueous developer obtained by mixing water or an alkaline aqueous solution and an organic solvent, or may be an organic solvent alone.
<硬化処理工程>
 本発明の永久パターン形成方法は、更に、硬化処理工程を含むことが好ましい。
 前記硬化処理工程は、前記現像工程が行われた後、形成された永久パターンにおける感光層に対して硬化処理を行う工程である。
<Curing process>
The permanent pattern forming method of the present invention preferably further includes a curing treatment step.
The curing treatment step is a step of performing a curing treatment on the photosensitive layer in the formed permanent pattern after the development step is performed.
 前記硬化処理としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、全面露光処理、全面加熱処理などが挙げられる。 The curing treatment is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include full exposure processing and full heat treatment.
 前記全面露光処理の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記現像工程の後に、前記永久パターンが形成された前記積層体上の全面を露光する方法などが挙げられる。該全面露光により、前記感光層を形成する感光性ソルダーレジスト組成物中の樹脂の硬化が促進され、前記永久パターンの表面が硬化される。
 前記全面露光を行う装置としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、超高圧水銀灯などのUV露光機などが挙げられる。
The method for the entire surface exposure treatment is not particularly limited and may be appropriately selected depending on the purpose. For example, a method for exposing the entire surface of the laminate on which the permanent pattern is formed after the development step. Etc. The entire surface exposure accelerates the curing of the resin in the photosensitive solder resist composition forming the photosensitive layer, and the surface of the permanent pattern is cured.
There is no restriction | limiting in particular as an apparatus which performs the said whole surface exposure, According to the objective, it can select suitably, For example, UV exposure machines, such as a super-high pressure mercury lamp, etc. are mentioned.
 前記全面加熱処理の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記現像工程の後に、前記永久パターンが形成された前記積層体上の全面を加熱する方法などが挙げられる。該全面加熱により、前記永久パターンの表面の膜強度が高められる。
 前記全面加熱における加熱温度としては、特に制限はなく、目的に応じて適宜選択することができるが、120℃~250℃が好ましく、120℃~200℃がより好ましい。前記加熱温度が120℃未満であると、加熱処理による膜強度の向上が得られないことがあり、250℃を超えると、前記感光性ソルダーレジスト組成物中の樹脂の分解が生じ、膜質が弱く脆くなることがある。
 前記全面加熱における加熱時間としては、特に制限はなく、目的に応じて適宜選択することができるが、10分間~120分間が好ましく、15分間~60分間がより好ましい。
 前記全面加熱を行う装置としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ドライオーブン、ホットプレート、IRヒーターなどが挙げられる。
The method for the entire surface heat treatment is not particularly limited and may be appropriately selected depending on the purpose. For example, a method for heating the entire surface of the laminate on which the permanent pattern is formed after the development step. Etc. The entire surface heating increases the film strength of the surface of the permanent pattern.
The heating temperature for the entire surface heating is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 120 ° C. to 250 ° C., more preferably 120 ° C. to 200 ° C. When the heating temperature is less than 120 ° C., the film strength may not be improved by heat treatment. When the heating temperature exceeds 250 ° C., the resin in the photosensitive solder resist composition is decomposed and the film quality is weak. May become brittle.
The heating time in the entire surface heating is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 10 minutes to 120 minutes, more preferably 15 minutes to 60 minutes.
There is no restriction | limiting in particular as an apparatus which performs the said whole surface heating, According to the objective, it can select suitably, For example, a dry oven, a hot plate, IR heater etc. are mentioned.
 なお、前記基材が多層配線基板などのプリント配線板である場合には、該プリント配線板上に本発明の永久パターンを形成し、更に、以下のように半田付けを行うことができる。
 即ち、前記現像工程により、前記永久パターンである硬化層が形成され、前記プリント配線板の表面に金属層が露出される。該プリント配線板の表面に露出した金属層の部位に対して金メッキを行った後、半田付けを行う。そして、半田付けを行った部位に、半導体や部品などを実装する。このとき、前記硬化層による永久パターンが、保護膜あるいは絶縁膜(層間絶縁膜)としての機能を発揮し、外部からの衝撃や隣同士の電極の導通が防止される。
When the substrate is a printed wiring board such as a multilayer wiring board, the permanent pattern of the present invention can be formed on the printed wiring board, and soldering can be performed as follows.
That is, the hardened layer which is the permanent pattern is formed by the developing process, and the metal layer is exposed on the surface of the printed wiring board. Gold plating is performed on the portion of the metal layer exposed on the surface of the printed wiring board, and then soldering is performed. Then, a semiconductor or a component is mounted on the soldered portion. At this time, the permanent pattern by the hardened layer exhibits a function as a protective film or an insulating film (interlayer insulating film), and prevents external impact and conduction between adjacent electrodes.
 本発明の永久パターン形成方法においては、保護膜及び層間絶縁膜の少なくともいずれかを形成するのが好ましい。前記永久パターン形成方法により形成される永久パターンが、前記保護膜又は前記層間絶縁膜であると、配線を外部からの衝撃や曲げから保護することができ、特に、前記層間絶縁膜である場合には、例えば、多層配線基板やビルドアップ配線基板などへの半導体や部品の高密度実装に有用である。 In the permanent pattern forming method of the present invention, it is preferable to form at least one of a protective film and an interlayer insulating film. When the permanent pattern formed by the permanent pattern forming method is the protective film or the interlayer insulating film, the wiring can be protected from external impact and bending, particularly when the interlayer insulating film is the interlayer insulating film. Is useful for high-density mounting of semiconductors and components on, for example, multilayer wiring boards and build-up wiring boards.
 本発明の永久パターン形成方法は、高速でパターン形成が可能であるため、各種パターンの形成に広く用いることができ、特に、配線パターンの形成に好適に使用することができる。
 また、本発明の永久パターン形成方法により形成される永久パターンは、優れた絶縁性、耐メッキ性、パターン側面の平滑性などを有し、保護膜、層間絶縁膜、ソルダーレジストパターン、として好適に使用することができる。
The permanent pattern forming method of the present invention can be widely used for forming various patterns because the pattern can be formed at a high speed, and can be particularly suitably used for forming a wiring pattern.
In addition, the permanent pattern formed by the permanent pattern forming method of the present invention has excellent insulating properties, plating resistance, smoothness of the pattern side surface, etc., and is suitable as a protective film, interlayer insulating film, solder resist pattern, etc. Can be used.
(プリント基板)
 本発明のプリント基板は、少なくとも基材と、前記永久パターン形成方法により形成された永久パターンと、を有してなり、更に、必要に応じて適宜選択した、その他の構成を有する。
 その他の構成としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、基材と前記永久パターン間に、更に絶縁層が設けられたビルドアップ基板などが挙げられる。
(Printed board)
The printed circuit board of the present invention comprises at least a base material and a permanent pattern formed by the permanent pattern forming method, and further has other configurations appropriately selected as necessary.
There is no restriction | limiting in particular as another structure, According to the objective, it can select suitably, For example, the buildup board | substrate etc. in which the insulating layer was further provided between the base material and the said permanent pattern are mentioned.
 以下、実施例を挙げて本発明をより具体的に説明するが、本発明は、これらの実施例に何ら制限されるものではない。 Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.
(合成例1)
<化合物T-1の合成>
 還流管、及び温度計を備えた2,000mLの3口フラスコに、テトラヒドロフラン150g、N-メチルピロリドン100g、及び3-アミノ-1,2,4-トリアゾール84.1g(メルク社製)を加えた。攪拌下、テトラヒドロフラン100g、及び2-イソシアナトエチルメタクリレート155.2g(カレンズMOI、昭和電工社製)を30分間かけて滴下した。その後、40℃で1時間攪拌後、70℃で4時間反応させた。室温に冷却後、反応液を強攪拌下のイオン交換水2L中に投入し、目的物を晶析させた。メタノールで洗浄し濾取、乾燥することで下記構造の化合物T-1を222g得た。
Figure JPOXMLDOC01-appb-C000016
(Synthesis Example 1)
<Synthesis of Compound T-1>
To a 2,000 mL three-necked flask equipped with a reflux tube and a thermometer, 150 g of tetrahydrofuran, 100 g of N-methylpyrrolidone, and 84.1 g of 3-amino-1,2,4-triazole (manufactured by Merck) were added. . Under stirring, 100 g of tetrahydrofuran and 155.2 g of 2-isocyanatoethyl methacrylate (Karenz MOI, Showa Denko) were added dropwise over 30 minutes. Thereafter, the mixture was stirred at 40 ° C. for 1 hour and then reacted at 70 ° C. for 4 hours. After cooling to room temperature, the reaction solution was poured into 2 L of ion-exchanged water under strong stirring to crystallize the target product. By washing with methanol, filtering and drying, 222 g of compound T-1 having the following structure was obtained.
Figure JPOXMLDOC01-appb-C000016
(合成例2)
<化合物T-2の合成>
 還流管、及び温度計を備えた2,000mLの3口フラスコに、テトラヒドロフラン120g、N-メチルピロリドン70g、3,5-ジアミノ-1,2,4-トリアゾール49.5g(デグサ社製)、及び2,4-ジ-t-ブチル-4-メチルフェノール1.8g(PN-01、大内新興化学工業社製)を加えた。攪拌下、テトラヒドロフラン80g、及び2-イソシアナトエチルアクリレート141.1g(カレンズAOI、昭和電工社製)を2時間かけて滴下した。その後、40℃で20時間反応させた。室温に冷却後、反応液を強攪拌下のイオン交換水2L中に投入し、目的物を晶析させた。メタノールで洗浄し濾取、乾燥することで下記構造の化合物T-2を165.1g得た。
Figure JPOXMLDOC01-appb-C000017
(Synthesis Example 2)
<Synthesis of Compound T-2>
In a 2,000 mL three-necked flask equipped with a reflux tube and a thermometer, 120 g of tetrahydrofuran, 70 g of N-methylpyrrolidone, 49.5 g of 3,5-diamino-1,2,4-triazole (manufactured by Degussa), and 1.8 g of 2,4-di-tert-butyl-4-methylphenol (PN-01, manufactured by Ouchi Shinsei Chemical Co., Ltd.) was added. Under stirring, 80 g of tetrahydrofuran and 141.1 g of 2-isocyanatoethyl acrylate (Karenz AOI, manufactured by Showa Denko KK) were added dropwise over 2 hours. Then, it was made to react at 40 degreeC for 20 hours. After cooling to room temperature, the reaction solution was poured into 2 L of ion-exchanged water under strong stirring to crystallize the target product. By washing with methanol, filtering and drying, 165.1 g of compound T-2 having the following structure was obtained.
Figure JPOXMLDOC01-appb-C000017
(合成例3)
<化合物T-3の合成>
 還流管、及び温度計を備えた2,000mLの3口フラスコに、N-メチルピロリドン250g、及び3,5-ジアミノ-1,2,4-トリアゾール49.5g(デグサ社製)を加えた。攪拌下、N-エチルピロリドン80g、及びテトラヒドロフタル酸無水物152.2g(リカジッドTH、新日本理化社製)を2時間かけて滴下した。その後、40℃で1時間攪拌後、100℃で12時間反応させた。室温に冷却後、反応液を強攪拌下のイオン交換水1.2L中に投入し、目的物を晶析させた。イソプロパノール/ヘキサン(2/8(質量比))で洗浄し濾取、乾燥することで下記構造の化合物T-3を121.1g得た。
Figure JPOXMLDOC01-appb-C000018
(Synthesis Example 3)
<Synthesis of Compound T-3>
To a 2,000 mL 3-neck flask equipped with a reflux tube and a thermometer, 250 g of N-methylpyrrolidone and 49.5 g of 3,5-diamino-1,2,4-triazole (manufactured by Degussa) were added. Under stirring, 80 g of N-ethylpyrrolidone and 152.2 g of tetrahydrophthalic anhydride (Rikazide TH, manufactured by Shin Nippon Chemical Co., Ltd.) were added dropwise over 2 hours. Thereafter, the mixture was stirred at 40 ° C. for 1 hour and then reacted at 100 ° C. for 12 hours. After cooling to room temperature, the reaction solution was poured into 1.2 L of ion-exchanged water with strong stirring to crystallize the desired product. Washing with isopropanol / hexane (2/8 (mass ratio)), filtration and drying gave 121.1 g of compound T-3 having the following structure.
Figure JPOXMLDOC01-appb-C000018
(合成例4)
<化合物T-4の合成>
 還流管、及び温度計を備えた1,000mLの3口フラスコに、t-ブチルメチルケトン250g、1,2,4-トリアゾール34.5g(純正化学工業社製)、ジシクロペンタニルジメタノールジアクリレート145.7g(A-DCP、新中村化学工業社製)、及び2,4-ジ-t-ブチル-4-メチルフェノール1.9g(PN-01、大内新興化学工業社製)を加えた。40℃で1時間攪拌後、80℃で52時間反応させた。室温に冷却後、有機溶媒を減圧濃縮により除去することで下記構造の化合物T-4を178g得た。
Figure JPOXMLDOC01-appb-C000019
(Synthesis Example 4)
<Synthesis of Compound T-4>
In a 1,000 mL three-necked flask equipped with a reflux tube and a thermometer, 250 g of t-butyl methyl ketone, 34.5 g of 1,2,4-triazole (manufactured by Junsei Chemical Co., Ltd.), dicyclopentanyl dimethanol dimer Add 145.7 g of acrylate (A-DCP, Shin-Nakamura Chemical Co., Ltd.) and 1.9 g of 2,4-di-t-butyl-4-methylphenol (PN-01, Ouchi Shinsei Chemical Co., Ltd.) It was. After stirring at 40 ° C. for 1 hour, the reaction was carried out at 80 ° C. for 52 hours. After cooling to room temperature, the organic solvent was removed by concentration under reduced pressure to obtain 178 g of compound T-4 having the following structure.
Figure JPOXMLDOC01-appb-C000019
(合成例5)
<カルボキシル基含有高分子化合物B-4(酸変性エチレン性不飽和基含有ポリウレタン樹脂)の合成>
 コンデンサー、及び撹拌機を備えた500mLの3つ口丸底フラスコ内に、リンゴ酸2.41g(0.018モル)、2,2-ビス(ヒドロキシメチル)プロピオン酸(DMPA)5.23g(0.039モル)、及びグリセロールモノメタクリレート17.78g(0.111モル)をシクロヘキサノン74mLに溶解した。これに、4,4-ジフェニルメタンジイソシアネート(MDI)30.03g(0.12モル)、ヘキサメチレンジイソシアネート(HMDI)5.05g(0.03モル)、2,6-ジ-t-ブチルヒドロキシトルエン0.1g、及び触媒として、商品名:ネオスタンU-600(日東化成社製)0.2gを添加し、75℃にて、5時間加熱撹拌した。その後、メチルアルコール9.61mLにて希釈して30分間撹拌し、165gのカルボキシル基含有高分子化合物B-4溶液(固形分45質量%)を得た。
 得られたカルボキシル基含有高分子化合物B-4溶液は、固形分酸価が68mgKOH/gであり、ゲルパーミエーションクロマトグラフィー(GPC)にて測定した重量平均分子量(ポリスチレン標準)が6,500であり、エチレン性不飽和基当量が1.83mmol/gであった。
 前記酸価は、JIS K0070に準拠して測定した。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用した。
 前記重量平均分子量は、高速GPC装置(東洋曹達工業株式会社製HLC-802A)を使用して、0.5質量%のTHF溶液を試料溶液とし、カラムはTSKgel HZM-M 1本を使用し、200μLの試料を注入し、前記THF溶液で溶離して、25℃で屈折率検出器あるいはUV検出器(検出波長254nm)により測定した。
 前記エチレン性不飽和基当量は、臭素価をJIS K2605に準拠して測定することにより求めた。
(Synthesis Example 5)
<Synthesis of carboxyl group-containing polymer compound B-4 (acid-modified ethylenically unsaturated group-containing polyurethane resin)>
In a 500 mL three-necked round bottom flask equipped with a condenser and a stirrer, 2.41 g (0.018 mol) of malic acid, 5.23 g of 2,2-bis (hydroxymethyl) propionic acid (DMPA) (0 0.039 mol) and 17.78 g (0.111 mol) of glycerol monomethacrylate were dissolved in 74 mL of cyclohexanone. To this, 30.03 g (0.12 mol) of 4,4-diphenylmethane diisocyanate (MDI), 5.05 g (0.03 mol) of hexamethylene diisocyanate (HMDI), 2,6-di-t-butylhydroxytoluene 0 0.1 g and 0.2 g of Neostan U-600 (manufactured by Nitto Kasei Co., Ltd.) as a catalyst were added and stirred at 75 ° C. for 5 hours. Thereafter, the mixture was diluted with 9.61 mL of methyl alcohol and stirred for 30 minutes to obtain 165 g of a carboxyl group-containing polymer compound B-4 solution (solid content: 45 mass%).
The obtained carboxyl group-containing polymer compound B-4 solution had a solid content acid value of 68 mgKOH / g and a weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) of 6,500. Yes, the ethylenically unsaturated group equivalent was 1.83 mmol / g.
The acid value was measured according to JIS K0070. However, when the sample did not dissolve, dioxane or tetrahydrofuran was used as a solvent.
The weight average molecular weight is determined by using a high-speed GPC device (HLC-802A manufactured by Toyo Soda Industry Co., Ltd.), a 0.5% by mass THF solution as a sample solution, and a column using one TSKgel HZM-M. A 200 μL sample was injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or a UV detector (detection wavelength 254 nm).
The said ethylenically unsaturated group equivalent was calculated | required by measuring a bromine number based on JISK2605.
(合成例6)
<カルボキシル基含有高分子化合物B-5(酸変性エチレン性不飽和基含有ポリウレタン樹脂)の合成>
 コンデンサー、及び撹拌機を備えた500mLの3つ口丸底フラスコに、2,2-ビス(ヒドロキシメチル)プロピオン酸(DMBA)32.00g(0.216モル)と、ポリプロピレングリコール(分子量1,000)(PPG1000)9.00g(0.009モル)をプロピレングリコールモノメチルエーテルモノアセテート118mLに溶解した。これに、4,4-ジフェニルメタンジイソシアネート(MDI)37.54g(0.15モル)、2,6-ジ-t-ブチルヒドロキシトルエン0.1g、及びネオスタンU-600(日東化成社製)0.2gを添加し、75℃で5時間撹拌した後、メチルアルコール9.61g添加した。その後、エチレン性不飽和基含有エポキシ化合物としてのグリシジルメタクリレート(GMA)17.91g(0.126)と触媒としてのトリフェニルフォスフィン5,000ppmとを更に添加し、110℃で5時間撹拌した後、室温まで冷却し、214gのカルボキシル基含有高分子化合物B-5溶液を得た。
 得られたカルボキシル基含有高分子化合物B-5溶液は、固形分酸価が75mgKOH/gであり、ゲルパーミエーションクロマトグラフィー(GPC)にて測定した重量平均分子量(ポリスチレン標準)が12,000であり、エチレン性不飽和基当量が1.3mmol/gであった。
(Synthesis Example 6)
<Synthesis of carboxyl group-containing polymer compound B-5 (acid-modified ethylenically unsaturated group-containing polyurethane resin)>
A 500 mL three-necked round bottom flask equipped with a condenser and a stirrer was charged with 32.00 g (0.216 mol) of 2,2-bis (hydroxymethyl) propionic acid (DMBA) and polypropylene glycol (molecular weight 1,000). ) (PPG1000) 9.00 g (0.009 mol) was dissolved in 118 mL of propylene glycol monomethyl ether monoacetate. To this, 37.54 g (0.15 mol) of 4,4-diphenylmethane diisocyanate (MDI), 0.1 g of 2,6-di-t-butylhydroxytoluene, and Neostan U-600 (manufactured by Nitto Kasei Co., Ltd.) After adding 2 g and stirring at 75 ° C. for 5 hours, 9.61 g of methyl alcohol was added. Thereafter, 17.91 g (0.126) of glycidyl methacrylate (GMA) as an epoxy compound containing an ethylenically unsaturated group and 5,000 ppm of triphenylphosphine as a catalyst were further added and stirred at 110 ° C. for 5 hours. After cooling to room temperature, 214 g of a carboxyl group-containing polymer compound B-5 solution was obtained.
The obtained carboxyl group-containing polymer compound B-5 solution had a solid content acid value of 75 mgKOH / g and a weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) of 12,000. Yes, the ethylenically unsaturated group equivalent was 1.3 mmol / g.
(実施例1)
<感光性組成物塗布液1の調製>
 下記の各成分を混合し、感光性組成物塗布液1(感光性ソルダーレジスト組成物塗布液)を調製した。
―――――――――――――――――――――――――――――――――――――――
・ZFR-1776(日本化薬社製、酸変性エチレン性不飽和基含有エポキシ樹脂:65質量%メトキシプロピルアセテート溶液)(B-1)         32.3質量部
・化合物T-1                                 0.8質量部
・着色顔料:HELIOGEN BLUE D7086(BASF社製)
                                      0.021質量部
・着色顔料:Pariotol Yellow D0960(BASF社製)
                                      0.006質量部
・分散剤:ソルスパース24000GR(ループリゾール社製)          0.22質量部
・重合性化合物:DCP-A(共栄社化学社製)                   5.3質量部
・開始剤:イルガキュア907(BASF社製)                   0.6質量部
・増感剤:DETX-S(日本化薬株式会社製)                 0.005質量部
・反応助剤:EAB-F(保土ヶ谷化学社製)                  0.019質量部
・硬化剤:メラミン(和光純薬社製)                       0.16質量部
・熱架橋剤:エポトートYDF-170                       2.9質量部
 (新日鐵化学社製、オキシラン基を有する化合物(ビスフェノールF型エポキシ樹脂))
・フィラー:SO-C2(アドマテックス社製)                   8.0質量部
・イオントラップ剤:IXE-6107(東亞合成社製)              0.82質量部
・塗布助剤:メガファックF-780F                       0.2質量部
 (DIC社製:30質量%メチルエチルケトン溶液)
・エラストマー:エスぺル1612                         2.7質量部
・シクロヘキサノン(溶媒)                           38.7質量部
Example 1
<Preparation of photosensitive composition coating solution 1>
The following components were mixed to prepare photosensitive composition coating solution 1 (photosensitive solder resist composition coating solution).
―――――――――――――――――――――――――――――――――――――――
ZFR-1776 (Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin: 65% by mass methoxypropyl acetate solution) (B-1) 32.3 parts by mass Compound T-1 0.8 parts by mass Coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF)
0.021 parts by mass Coloring pigment: Pariotol Yellow D0960 (BASF)
0.006 parts by mass Dispersant: Solsperse 24000GR (manufactured by Loop Resor) 0.22 parts by mass Polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by mass Initiator: Irgacure 907 (BASF) 0.6 parts by mass, sensitizer: DETX-S (manufactured by Nippon Kayaku Co., Ltd.) 0.005 parts by mass, reaction aid: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 0.019 parts by mass, curing agent : Melamine (manufactured by Wako Pure Chemical Industries, Ltd.) 0.16 parts by mass Thermal crosslinking agent: Epototo YDF-170 2.9 parts by mass (manufactured by Nippon Steel Chemical Co., Ltd., compound having an oxirane group (bisphenol F type epoxy resin))
Filler: SO-C2 (manufactured by Admatechs) 8.0 parts by mass Ion trap agent: IXE-6107 (manufactured by Toagosei Co., Ltd.) 0.82 parts by mass Application aid: Megafac F-780F 0.2 mass Parts (manufactured by DIC: 30 mass% methyl ethyl ketone solution)
-Elastomer: Esper 1612 2.7 parts by mass-Cyclohexanone (solvent) 38.7 parts by mass
<感光性ソルダーレジストフィルム1の作製>
 支持体として、厚み25μmのポリエチレンテレフタレートフィルム(PET)を用い、該支持体上に前記感光性組成物塗布液1をバーコーターにより、乾燥後の感光層の厚みが約30μmになるように塗布し、80℃、30分間熱風循環式乾燥機中で乾燥させ、感光性ソルダーレジストフィルム1を作製した。
<Preparation of photosensitive solder resist film 1>
Using a polyethylene terephthalate film (PET) having a thickness of 25 μm as a support, the photosensitive composition coating solution 1 was applied onto the support with a bar coater so that the thickness of the photosensitive layer after drying was about 30 μm. The photosensitive solder resist film 1 was produced by drying in a hot air circulating dryer at 80 ° C. for 30 minutes.
<永久パターンの形成>
-積層体の調製-
 基材として、表面に化学研磨処理を施した配線形成済みの銅張積層板(スルーホールなし、銅厚み12μmのプリント配線板)を用いた。該銅張積層板上に、前記感光性ソルダーレジストフィルム1の感光層が前記銅張積層板に接するようにして、真空ラミネータ(株式会社名機製作所製、MVLP500)を用いて積層させ、前記銅張積層板と、前記感光層と、前記ポリエチレンテレフタレートフィルム(支持体)とがこの順に積層された積層体を調製した。
 圧着条件は、圧着温度90℃、圧着圧力0.4MPa、ラミネート速度1m/分間とした。
 前記得られた積層体について、以下に示す評価方法で、レジストパターンを形成した。
<Formation of permanent pattern>
-Preparation of laminate-
As a base material, a copper-clad laminate (with no through holes and a printed wiring board with a copper thickness of 12 μm) on which a surface was chemically polished was used. The copper-clad laminate is laminated using a vacuum laminator (MVLP500, manufactured by Meiki Seisakusho Co., Ltd.) so that the photosensitive layer of the photosensitive solder resist film 1 is in contact with the copper-clad laminate. A laminate in which a tension laminate, the photosensitive layer, and the polyethylene terephthalate film (support) were laminated in this order was prepared.
The pressure bonding conditions were a pressure bonding temperature of 90 ° C., a pressure bonding pressure of 0.4 MPa, and a laminating speed of 1 m / min.
About the obtained laminated body, the resist pattern was formed with the evaluation method shown below.
-露光工程-
 前記調製した積層体における感光層に対し、ポリエチレンテレフタレートフィルム(支持体)側から、所定のパターンを有する青紫色レーザ露光によるパターン形成装置を用いて、405nmのレーザ光を、所定のパターンが得られるようにエネルギー量40mJ/cmを照射し露光し、前記感光層の一部の領域を硬化させた。
-Exposure process-
A predetermined pattern can be obtained with a laser beam of 405 nm from the polyethylene terephthalate film (support) side using the pattern forming apparatus by blue-violet laser exposure having a predetermined pattern with respect to the photosensitive layer in the prepared laminate. In this way, an energy amount of 40 mJ / cm 2 was irradiated for exposure, and a partial region of the photosensitive layer was cured.
-現像工程-
 室温にて10分間静置した後、前記積層体からポリエチレンテレフタレートフィルム(支持体)を剥がし取り、銅張積層板上の感光層の全面に、アルカリ現像液として、1質量%炭酸ナトリウム水溶液を用い、30℃にて60秒間、0.18MPa(1.8kgf/cm)の圧力でスプレー現像し、未露光の領域を溶解除去した。その後、水洗し、乾燥させ、永久パターンを形成した。
-Development process-
After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) is peeled off from the laminate, and a 1% by mass aqueous sodium carbonate solution is used as an alkaline developer on the entire surface of the photosensitive layer on the copper clad laminate. Spray development was performed at 30 ° C. for 60 seconds at a pressure of 0.18 MPa (1.8 kgf / cm 2 ) to dissolve and remove unexposed areas. Thereafter, it was washed with water and dried to form a permanent pattern.
-硬化処理工程-
 前記永久パターンが形成された積層体の全面に対して、150℃で1時間、加熱処理を施し、永久パターンの表面を硬化し、膜強度を高め、試験板を作製した。
-Curing process-
The entire surface of the laminate on which the permanent pattern was formed was subjected to heat treatment at 150 ° C. for 1 hour to cure the surface of the permanent pattern, increase the film strength, and prepare a test plate.
<評価方法>
 以下に示す評価方法で、パターン側面の平滑性、絶縁性、耐熱衝撃性(耐クラック性)、及び耐メッキ性を評価した。結果を表1に示す。
<Evaluation method>
The smoothness, insulation, thermal shock resistance (crack resistance), and plating resistance of the side surface of the pattern were evaluated by the following evaluation methods. The results are shown in Table 1.
-パターン側面の平滑性-
 前記現像工程において形成した永久パターンの側面を走査型電子顕微鏡(SEM)により撮影し、パターン側面の平滑性を以下の評価基準により評価した。
[評価基準]
 ○ :パターン側面が平滑であり、パターン形状に優れる。
 ○△:パターン側面にやや凹凸が観察されるが、良好なパターン形状である。
 △ :パターン側面に凹凸があり、パターン形状にやや劣る。
 × :パターン側面に凝集物が見られ、パターン形状に劣る。
-Smoothness of pattern side surface-
The side surface of the permanent pattern formed in the developing step was photographed with a scanning electron microscope (SEM), and the smoothness of the pattern side surface was evaluated according to the following evaluation criteria.
[Evaluation criteria]
○: The pattern side surface is smooth and the pattern shape is excellent.
○ Δ: Slight irregularities are observed on the side surface of the pattern, but the pattern shape is good.
Δ: There are irregularities on the side surface of the pattern, and the pattern shape is slightly inferior.
X: Aggregates are observed on the side of the pattern, and the pattern shape is inferior.
-絶縁性-
 厚み12μmの銅箔をガラスエポキシ基材に積層したプリント基板の銅箔にエッチングを施して、ライン幅/スペース幅が50μm/50μmであり、互いのラインが接触しておらず、互いに対向した同一面上の櫛形電極を得た。この基板の櫛形電極上に感光性ソルダーレジストフィルム1を前記積層体の調製方法に記載の方法と同様にして積層し、最適露光量(300mJ/cm~1J/cm)で露光を行った。次いで、常温で1時間静置した後、30℃の1質量%炭酸ナトリウム水溶液にて60秒間スプレー現像を行い、更に80℃で10分間加熱(乾燥)した。続いて、株式会社オーク製作所製の紫外線照射装置を使用して1J/cmのエネルギー量で感光層に対する紫外線照射を行った。更に感光層を150℃で60分間加熱処理を行うことにより、厚み25μmのソルダーレジストを形成した評価用基板を得た。
 加熱後の評価用積層体の櫛形電極間に電圧が印加されるように、ポリテトラフルオロエチレン製のシールド線をSn/Pbはんだによりそれらの櫛形電極に接続した後、評価用積層体に5Vの電圧を印可した状態で、該評価用積層体を130℃、85%RHの超加速高温高湿寿命試験(HAST)槽内に200時間静置した。その後の評価用積層体のソルダーレジストのマイグレーションの発生程度を100倍の金属顕微鏡により観察し、以下の評価基準により評価した。
[評価基準]
 ◎ :マイグレーションの発生が確認できず、絶縁性に優れる
 ○ :マイグレーションの発生が銅上僅かに確認されるが、絶縁性は良好である
 ○△:マイグレーションがSR(ソルダーレジスト)中に僅かに確認されるが、絶縁性はやや良好である
 △ :マイグレーションの発生が確認され、絶縁性にやや劣る
 × :電極間が短絡し、絶縁性に劣る
-Insulation-
The copper foil of the printed circuit board obtained by laminating a copper foil having a thickness of 12 μm on a glass epoxy substrate is etched, the line width / space width is 50 μm / 50 μm, the lines are not in contact with each other, and the same facing each other A comb electrode on the surface was obtained. The photosensitive solder resist film 1 was laminated on the comb-shaped electrode of the substrate in the same manner as described in the method for preparing the laminate, and the exposure was performed at the optimum exposure amount (300 mJ / cm 2 to 1 J / cm 2 ). . Next, after standing at room temperature for 1 hour, spray development was performed for 60 seconds with a 1% by mass aqueous sodium carbonate solution at 30 ° C., followed by heating (drying) at 80 ° C. for 10 minutes. Subsequently, the photosensitive layer was irradiated with ultraviolet rays with an energy amount of 1 J / cm 2 using an ultraviolet irradiation device manufactured by Oak Manufacturing Co., Ltd. Further, the photosensitive layer was heat-treated at 150 ° C. for 60 minutes to obtain an evaluation substrate on which a 25 μm thick solder resist was formed.
After connecting the polytetrafluoroethylene shield wires to the comb electrodes with Sn / Pb solder so that a voltage is applied between the comb electrodes of the evaluation laminate after heating, 5 V is applied to the evaluation laminate. With the voltage applied, the laminate for evaluation was allowed to stand for 200 hours in a super accelerated high temperature high humidity life test (HAST) bath at 130 ° C. and 85% RH. The degree of migration of the solder resist in the subsequent evaluation laminate was observed with a 100-fold metal microscope and evaluated according to the following evaluation criteria.
[Evaluation criteria]
◎: The occurrence of migration is not confirmed and the insulation is excellent. ○: The occurrence of migration is slightly confirmed on copper, but the insulation is good. ○ △: Migration is slightly confirmed in SR (solder resist). However, the insulation is slightly good. △: Migration is confirmed and the insulation is slightly inferior. X: The electrodes are short-circuited and the insulation is inferior.
-耐クラック性-
 厚み12μmの銅箔をガラスエポキシ基材に積層したプリント基板上に感光性ソルダーレジストフィルム1を前記積層体の調製方法に記載の方法と同様にして積層し、2mm角フォトマスクを介し、オーク製作所社製HMW-201GX型露光機を使用して、2mm角パターンが形成できる最適露光量(300mJ/cm~1J/cm)で露光を行った。次いで、常温で1時間静置した後、30℃の1質量%炭酸ナトリウム水溶液にて60秒間スプレー現像を行い、更に80℃で10分間加熱(乾燥)した。続いて、オーク製作所製紫外線照射装置を使用して1J/cmのエネルギー量で感光層に対する紫外線照射を行った。更に感光層を150℃で60分間加熱処理を行うことにより、2mm角の矩形開口部を有する厚み25μmのソルダーレジストを形成した評価用基板を得た。
 得られた基板を-65℃の大気中に15分間晒した後、次いで150℃の大気中に15分間晒した後、再度-65℃の大気中に晒す熱サイクルを1,000回繰り返した。熱サイクルを通した評価用基板のソルダーレジスト上のひび及び剥離程度を光学顕微鏡により観察し、下記評価基準により評価した。
[評価基準]
 ◎ :ソルダーレジストにひび、剥れ、歪みがなく、強靭性に優れる
 ○ :ソルダーレジストに僅かに歪みがあるものの、強靭性は良好である
 ○△:ソルダーレジストに僅かにひびがあるものの、強靭性はやや良好である
 △ :ソルダーレジストに僅かにひび、剥れがあり、強靭性にやや劣る
 × :ソルダーレジストに明らかなひび、剥れがあり、強靭性が劣る
-Crack resistance-
A photosensitive solder resist film 1 is laminated on a printed circuit board obtained by laminating a copper foil having a thickness of 12 μm on a glass epoxy substrate in the same manner as described in the method for preparing the laminate, and through a 2 mm square photomask, Oak Manufacturing Co., Ltd. Using an HMW-201GX type exposure machine manufactured by the company, exposure was performed with an optimum exposure amount (300 mJ / cm 2 to 1 J / cm 2 ) that can form a 2 mm square pattern. Next, after standing at room temperature for 1 hour, spray development was performed for 60 seconds with a 1% by mass aqueous sodium carbonate solution at 30 ° C., followed by heating (drying) at 80 ° C. for 10 minutes. Subsequently, the photosensitive layer was irradiated with ultraviolet rays with an energy amount of 1 J / cm 2 using an ultraviolet irradiation device manufactured by Oak Manufacturing. Further, the photosensitive layer was subjected to a heat treatment at 150 ° C. for 60 minutes to obtain a substrate for evaluation on which a 25 μm thick solder resist having a rectangular opening of 2 mm square was formed.
The obtained substrate was exposed to an atmosphere of −65 ° C. for 15 minutes, then exposed to an atmosphere of 150 ° C. for 15 minutes, and then exposed to the air of −65 ° C. again for 1,000 times. The crack and peeling degree on the solder resist of the evaluation substrate through the thermal cycle were observed with an optical microscope and evaluated according to the following evaluation criteria.
[Evaluation criteria]
◎: Solder resist is free from cracks, peeling and distortion, and excellent toughness ○: Solder resist is slightly distorted, but toughness is good ○ △: Solder resist is slightly cracked, but tough △: Slightly cracked and peeled in solder resist, slightly inferior in toughness ×: Clearly cracked and peeled in solder resist, inferior in toughness
-耐メッキ性-
 前記永久パターンを脱脂し表面の粗化を行った後、硫酸パラジウムを添加して触媒付加を行った。次に、永久パターンを、70℃の硫酸ニッケル/希硫酸溶液中に40分間浸漬してメッキ処理を行った後、目視により永久パターンにおける硬化膜のめくれ、剥がれを観察し、下記基準に基づいて、耐メッキ性の評価を行った。
[評価基準]
 ◎:硬化膜にめくれ、剥がれがなく、耐メッキ性に極めて優れる
 ○:硬化膜の一部に変色があるが、実用上問題とならず、耐メッキ性に優れる
 △:硬化膜にめくれがあり、耐メッキ性に劣る
 ×:硬化膜に浮き(剥がれ)が観られ、耐メッキ性に極めて劣る
-Plating resistance-
After degreasing the permanent pattern and roughening the surface, palladium sulfate was added to perform catalyst addition. Next, after immersing the permanent pattern in a nickel sulfate / dilute sulfuric acid solution at 70 ° C. for 40 minutes to perform plating, the cured film in the permanent pattern was visually turned up and peeled off, based on the following criteria: The plating resistance was evaluated.
[Evaluation criteria]
◎: Turned over to the cured film, no peeling, extremely excellent plating resistance ○: Discolored part of the cured film, but no problem in practical use, excellent in plating resistance △: Turned over the cured film Inferior in plating resistance ×: Floating (peeling) is observed in the cured film, and inferior in plating resistance
(実施例2)
 実施例1において、ZFR-1176(日本化薬社製、酸変性エチレン性不飽和基含有エポキシ樹脂)(B-1)をCyclomerP 200HM(ダイセル化学社製、エチレン性不飽和基及びカルボキシル基を含有するアクリル樹脂)(B-2)に代えた(固形分における含有量を同じにした)以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 2)
In Example 1, ZFR-1176 (produced by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) was added to CyclerP 200HM (produced by Daicel Chemical Industries, Ltd., containing ethylenically unsaturated groups and carboxyl groups). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1, except that the acrylic resin was changed to (B-2) (the content in the solid content was the same). .
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例3)
 実施例1において、ZFR-1176(日本化薬社製、酸変性エチレン性不飽和基含有エポキシ樹脂)(B-1)をUXE-3024(日本化薬社製、酸変性エチレン性不飽和基含有ポリウレタン樹脂)(B-3)に代えた(固形分における含有量を同じにした)以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 3)
In Example 1, ZFR-1176 (Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) was added to UXE-3024 (Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing product). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the polyurethane resin (B-3) was replaced (the content in the solid content was the same).
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例4)
 実施例1において、ZFR-1176(日本化薬社製、酸変性エチレン性不飽和基含有エポキシ樹脂)(B-1)を合成例5で合成したカルボキシル基含有高分子化合物(酸変性エチレン性不飽和基含有ポリウレタン樹脂)(B-4)に代えた(固形分における含有量を同じにした)以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
Example 4
In Example 1, a carboxyl group-containing polymer compound (acid-modified ethylenically unsaturated polymer) obtained by synthesizing ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1) in Synthesis Example 5 was used. A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the saturated group-containing polyurethane resin (B-4) was replaced (the content in the solid content was the same). Produced.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例5)
 実施例4において、化合物T-1を化合物T-2に代えた以外は、実施例4と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 5)
In Example 4, a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-2.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例6)
 実施例4において、化合物T-1を化合物T-3に代えた以外は、実施例4と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 6)
In Example 4, a photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-3.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例7)
 実施例4において、化合物T-1を化合物T-4に代えた以外は、実施例4と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 7)
In Example 4, a photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 4 except that Compound T-1 was replaced with Compound T-4.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例8)
 実施例5において、化合物T-2の配合量を感光性組成物塗布液の固形分に対して1.7質量%から3.0質量%に変えた以外は、実施例5と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 8)
In Example 5, except that the blending amount of Compound T-2 was changed from 1.7% by mass to 3.0% by mass with respect to the solid content of the photosensitive composition coating solution, A photosensitive composition coating solution and a photosensitive solder resist film were prepared.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例9)
 実施例5において、熱架橋剤としてのエポトートYDF-170(新日鐵化学社製、オキシラン基を有する化合物(ビスフェノールF型エポキシ樹脂))をETERNACOLL OXBP(宇部興産社製、オキセタニル基を有する化合物)に代えた以外は、実施例5と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
Example 9
In Example 5, Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as an thermal crosslinking agent was used as ETERNACOLL OXBP (manufactured by Ube Industries, Ltd., a compound having an oxetanyl group) A photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the above was replaced.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例10)
 実施例5において、熱架橋剤としてのエポトートYDF-170(新日鐵化学社製、オキシラン基を有する化合物(ビスフェノールF型エポキシ樹脂))をスミジュールBL3175(住化バイエルウレタン社製、ブロックイソシアネート基を有する化合物)に代えた以外は、実施例5と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 10)
In Example 5, Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as a thermal crosslinking agent was added to Sumidur BL3175 (manufactured by Sumika Bayer Urethane Co., Ltd., blocked isocyanate group). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 5 except that the compound was changed to (Compound with a).
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例11)
 実施例5において、熱架橋剤としてのエポトートYDF-170(新日鐵化学社製、オキシラン基を有する化合物(ビスフェノールF型エポキシ樹脂))をYSLV-120TE(新日鐵化学社製、オキシラン基を有する化合物)に代えた以外は、実施例5と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 11)
In Example 5, Epototo YDF-170 (manufactured by Nippon Steel Chemical Co., Ltd., a compound having an oxirane group (bisphenol F type epoxy resin)) as a thermal crosslinking agent was converted into YSLV-120TE (manufactured by Nippon Steel Chemical Co., Ltd., oxirane group A photosensitive composition coating solution and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the compound was changed to (Compounds).
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(実施例12)
 実施例1において、ZFR-1176(日本化薬社製、酸変性エチレン性不飽和基含有エポキシ樹脂)(B-1)を合成例6で合成したカルボキシル基含有高分子化合物(酸変性エチレン性不飽和基含有ポリウレタン樹脂)(B-5)に代えた(固形分における含有量を同じにした)以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Example 12)
In Example 1, the carboxyl group-containing polymer compound (acid-modified ethylenically unsaturated polymer) synthesized in Synthesis Example 6 was prepared by synthesizing ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group-containing epoxy resin) (B-1). A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the saturated group-containing polyurethane resin (B-5) was replaced (the content in the solid content was the same). Produced.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(比較例1)
 実施例1において、T-1化合物、及び熱架橋剤を配合しなかった以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Comparative Example 1)
A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound and the thermal crosslinking agent were not blended in Example 1.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(比較例2)
 実施例1において、T-1化合物を配合しなかった以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Comparative Example 2)
In Example 1, a photosensitive composition coating liquid and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound was not blended.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(比較例3)
 実施例1において、T-1化合物をIXE6107(東亞合成社製、無機イオン交換体)に代えた以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
(Comparative Example 3)
A photosensitive composition coating solution and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that the T-1 compound was replaced with IXE6107 (inorganic ion exchanger manufactured by Toagosei Co., Ltd.) in Example 1. Produced.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(比較例4)
 実施例1において、T-1化合物を下記構造の化合物T-Z(1,2,4-トリアゾール)に代えた以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
Figure JPOXMLDOC01-appb-C000020
(Comparative Example 4)
In Example 1, except that the T-1 compound was replaced with the compound TZ (1,2,4-triazole) having the following structure, the photosensitive composition coating liquid and the photosensitive composition were the same as in Example 1. A solder resist film was prepared.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
Figure JPOXMLDOC01-appb-C000020
(比較例5)
 実施例1において、熱架橋剤を配合しない以外は、実施例1と同様にして、感光性組成物塗布液、及び感光性ソルダーレジストフィルムを作製した。
 得られた感光性組成物塗布液、及び感光性ソルダーレジストフィルムについて、実施例1と同様にして評価を行った。結果を表1に示す。
Figure JPOXMLDOC01-appb-T000021
 ただし、表1中、トリアゾール化合物の含有量(質量%)は、感光性組成物塗布液の固形分に対する含有量である。
(Comparative Example 5)
In Example 1, a photosensitive composition coating liquid and a photosensitive solder resist film were prepared in the same manner as in Example 1 except that no thermal crosslinking agent was added.
The obtained photosensitive composition coating liquid and photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1.
Figure JPOXMLDOC01-appb-T000021
However, in Table 1, the content (mass%) of the triazole compound is the content with respect to the solid content of the photosensitive composition coating solution.
 実施例1~12は、絶縁性、耐メッキ性、パターン側面の平滑性、及び耐クラック性に優れる結果となった。トリアゾール化合物として化合物T-2を用いた場合には、絶縁性が非常に優れる結果となった。また、カルボキシル基含有高分子化合物として、B-4、即ち、酸変性エチレン性不飽和基含有ポリウレタン樹脂を用いた場合には、耐クラック性が優れる結果となった。また、熱架橋剤として、オキシラン基を有する化合物を用いた場合には、パターン側面の平滑性が優れる結果となった。 Examples 1 to 12 were excellent in insulation, plating resistance, smoothness of the pattern side surface, and crack resistance. When compound T-2 was used as the triazole compound, the insulation was very excellent. Further, when B-4, that is, an acid-modified ethylenically unsaturated group-containing polyurethane resin was used as the carboxyl group-containing polymer compound, the crack resistance was excellent. In addition, when a compound having an oxirane group was used as the thermal crosslinking agent, the smoothness of the pattern side surface was excellent.
 比較例1では、絶縁性、耐メッキ性、パターン側面の平滑性、及び耐クラック性のいずれもが、実施例よりも非常に劣っていた。
 トリアゾール化合物を含有しない比較例2では、実施例に比べ、絶縁性、パターン側面の平滑性、及び耐クラック性が劣っていた。
 無機イオントラップ剤を用いた比較例3では、実施例に比べ、耐メッキ性は同等であるものの、パターン側面の平滑性は劣っており、耐クラック性は非常に劣っていた。
 トリアゾール化合物として1,2,4-トリアゾールを用いた比較例4では、実施例と比べ、パターン側面の平滑性、耐メッキ性が劣っていた。
 熱架橋剤を含有しない比較例5では、絶縁性、耐クラック性、耐メッキ性が劣っている結果となった。
In Comparative Example 1, all of insulating properties, plating resistance, pattern side surface smoothness, and crack resistance were much inferior to those of the Examples.
In the comparative example 2 which does not contain a triazole compound, compared with the Example, insulation, the smoothness of the pattern side surface, and crack resistance were inferior.
In Comparative Example 3 using an inorganic ion trapping agent, although the plating resistance was equal to that of the Example, the smoothness of the pattern side surface was inferior and the crack resistance was very inferior.
In Comparative Example 4 using 1,2,4-triazole as the triazole compound, the smoothness of the pattern side surface and the plating resistance were inferior to those of the Examples.
In the comparative example 5 which does not contain a thermal crosslinking agent, it resulted in inferior insulation, crack resistance, and plating resistance.
 実施例1~12においてパターン側面の平滑性が向上することは、比較例1~4では得られていない効果であり、かつ感光性組成物にトリアゾール化合物を用いる従来技術においても知られていない効果である。 The improvement in the smoothness of the pattern side surface in Examples 1 to 12 is an effect that is not obtained in Comparative Examples 1 to 4, and an effect that is not known in the prior art using a triazole compound in the photosensitive composition. It is.
 本発明の態様としては、例えば、以下の態様が挙げられる。
 <1> ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物と、重合性化合物と、光重合開始剤と、熱架橋剤とを含有することを特徴とする感光性組成物である。
 <2> 更にカルボキシル基含有高分子化合物を含有する前記<1>に記載の感光性組成物である。
 <3> カルボキシル基含有高分子化合物が、酸変性エチレン性不飽和基含有ポリウレタン樹脂である前記<2>に記載の感光性組成物である。
 <4> 熱架橋剤が、環状エーテル基、ブロックイソシアネート基、オキサゾリル基、及びエチレンカーボネート基から選択される少なくとも一種の官能基を有する化合物である前記<1>から<3>のいずれかに記載の感光性組成物である。
 <5> ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物が、下記一般式(I)で表される化合物である前記<1>から<4>のいずれかに記載の感光性組成物である。
Figure JPOXMLDOC01-appb-C000022
 ただし、前記一般式(I)中、Xは、トリアゾール環を表す。Yは、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかを有する有機基を表す。nは、1~3の整数を表す。なお、nが2~3の時には、Yは、同一であってもよく、異なっていてもよい。
 <6> 一般式(I)におけるYが、下記一般式(II)で表される基である前記<5>に記載の感光性組成物である。
Figure JPOXMLDOC01-appb-C000023
 ただし、前記一般式(II)中、Yは、炭素数2~25のm+1価の有機基を表す。Zは、カルボキシル基、アクリロイルオキシ基、及びメタクリロイルオキシ基のいずれかを表す。mは、1~2の整数を表す。なお、mが2の時には、Zは、同一であってもよく、異なっていてもよい。
 <7> 熱架橋剤が、オキシラン基を有する化合物である前記<1>から<6>のいずれかに記載の感光性組成物である。
 <8> 前記<1>から<7>のいずれかに記載の感光性組成物を含有することを特徴とする感光性ソルダーレジスト組成物である。
 <9> 支持体と、該支持体上に、前記<8>に記載の感光性ソルダーレジスト組成物が積層されてなる感光層と、を有することを特徴とする感光性ソルダーレジストフィルムである。
 <10> 前記<8>に記載の感光性ソルダーレジスト組成物を、基体の表面に塗布し、乾燥して感光層を積層して積層体を形成した後、露光し、現像することを特徴とする永久パターン形成方法である。
 <11> 前記<10>に記載の永久パターン形成方法により形成されることを特徴とする永久パターンである。
 <12> 前記<10>に記載の永久パターン形成方法により永久パターンが形成されることを特徴とするプリント基板である。
As an aspect of this invention, the following aspects are mentioned, for example.
<1> containing a compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. It is the photosensitive composition characterized.
<2> The photosensitive composition according to <1>, further including a carboxyl group-containing polymer compound.
<3> The photosensitive composition according to <2>, wherein the carboxyl group-containing polymer compound is an acid-modified ethylenically unsaturated group-containing polyurethane resin.
<4> The thermal crosslinking agent according to any one of <1> to <3>, wherein the thermal crosslinking agent is a compound having at least one functional group selected from a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Of the photosensitive composition.
<5> The above <1> to <4, wherein the compound having a triazole ring and at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent is a compound represented by the following general formula (I): > The photosensitive composition according to any one of the above.
Figure JPOXMLDOC01-appb-C000022
However, in said general formula (I), X represents a triazole ring. Y represents an organic group having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent. n represents an integer of 1 to 3. When n is 2 to 3, Y may be the same or different.
<6> The photosensitive composition according to <5>, wherein Y in the general formula (I) is a group represented by the following general formula (II).
Figure JPOXMLDOC01-appb-C000023
In the general formula (II), Y 1 represents an m + 1 valent organic group having 2 to 25 carbon atoms. Z 1 represents any of a carboxyl group, an acryloyloxy group, and a methacryloyloxy group. m represents an integer of 1 to 2. When m is 2, Z 1 may be the same or different.
<7> The photosensitive composition according to any one of <1> to <6>, wherein the thermal crosslinking agent is a compound having an oxirane group.
<8> A photosensitive solder resist composition comprising the photosensitive composition according to any one of <1> to <7>.
<9> A photosensitive solder resist film comprising: a support; and a photosensitive layer obtained by laminating the photosensitive solder resist composition according to <8> on the support.
<10> The photosensitive solder resist composition according to <8> is applied to the surface of a substrate, dried to form a laminate by forming a photosensitive layer, and then exposed and developed. This is a permanent pattern forming method.
<11> A permanent pattern formed by the method for forming a permanent pattern according to <10>.
<12> A printed circuit board wherein a permanent pattern is formed by the method for forming a permanent pattern according to <10>.
 本発明の感光性組成物は、絶縁性、耐メッキ性、パターン側面の平滑性に優れた高性能な硬化膜を得ることができるため、ソルダーレジストに好適に用いることができる。
 本発明の感光性ソルダーレジストフィルムは、保護膜、層間絶縁膜、ソルダーレジストパターン等の永久パターン等の各種パターン形成、カラーフィルタ、柱材、リブ材、スペーサー、隔壁等の液晶構造部材の製造、ホログラム、マイクロマシン、プルーフの製造などに好適に用いることができ、特にプリント基板の永久パターン形成用に好適に用いることができる。
 本発明のパターン形成方法は、前記感光性組成物を用いるため、保護膜、層間絶縁膜、ソルダーレジストパターン等の永久パターン等の各種パターン形成用、カラーフィルタ、柱材、リブ材、スペーサー、隔壁等の液晶構造部材の製造、ホログラム、マイクロマシン、プルーフの製造などに好適に用いることができ、特にプリント基板の永久パターン形成に好適に用いることができる。
Since the photosensitive composition of this invention can obtain the high performance cured film excellent in insulation, plating resistance, and the smoothness of a pattern side surface, it can be used suitably for a soldering resist.
The photosensitive solder resist film of the present invention is a protective film, interlayer insulating film, various pattern formation such as a permanent pattern such as a solder resist pattern, manufacture of liquid crystal structural members such as color filters, pillar materials, rib materials, spacers, partition walls, It can be suitably used for the production of holograms, micromachines, proofs, etc., and can be particularly suitably used for forming a permanent pattern on a printed circuit board.
Since the pattern forming method of the present invention uses the photosensitive composition, it is for forming various patterns such as a protective film, an interlayer insulating film, a permanent pattern such as a solder resist pattern, a color filter, a pillar material, a rib material, a spacer, a partition wall. It can be suitably used for the production of liquid crystal structural members such as holograms, micromachines, and proofs, and can be suitably used for the formation of permanent patterns on printed boards.

Claims (12)

  1.  ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物と、重合性化合物と、光重合開始剤と、熱架橋剤とを含有することを特徴とする感光性組成物。 It contains at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. Photosensitive composition.
  2.  更にカルボキシル基含有高分子化合物を含有する請求項1に記載の感光性組成物。 The photosensitive composition according to claim 1, further comprising a carboxyl group-containing polymer compound.
  3.  カルボキシル基含有高分子化合物が、酸変性エチレン性不飽和基含有ポリウレタン樹脂である請求項2に記載の感光性組成物。 The photosensitive composition according to claim 2, wherein the carboxyl group-containing polymer compound is an acid-modified ethylenically unsaturated group-containing polyurethane resin.
  4.  熱架橋剤が、環状エーテル基、ブロックイソシアネート基、オキサゾリル基、及びエチレンカーボネート基から選択される少なくとも一種の官能基を有する化合物である請求項1から3のいずれかに記載の感光性組成物。 The photosensitive composition according to any one of claims 1 to 3, wherein the thermal crosslinking agent is a compound having at least one functional group selected from a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group.
  5.  ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかとトリアゾール環とを有する化合物が、下記一般式(I)で表される化合物である請求項1から4のいずれかに記載の感光性組成物。
    Figure JPOXMLDOC01-appb-C000001
     ただし、前記一般式(I)中、Xは、トリアゾール環を表す。Yは、ラジカルと反応可能な基及び熱架橋剤と反応可能な基の少なくともいずれかを有する有機基を表す。nは、1~3の整数を表す。なお、nが2~3の時には、Yは、同一であってもよく、異なっていてもよい。
    The compound having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent and a triazole ring is a compound represented by the following general formula (I). Photosensitive composition.
    Figure JPOXMLDOC01-appb-C000001
    However, in said general formula (I), X represents a triazole ring. Y represents an organic group having at least one of a group capable of reacting with a radical and a group capable of reacting with a thermal crosslinking agent. n represents an integer of 1 to 3. When n is 2 to 3, Y may be the same or different.
  6.  一般式(I)におけるYが、下記一般式(II)で表される基である請求項5に記載の感光性組成物。
    Figure JPOXMLDOC01-appb-C000002
     ただし、前記一般式(II)中、Yは、炭素数2~25のm+1価の有機基を表す。Zは、カルボキシル基、アクリロイルオキシ基、及びメタクリロイルオキシ基のいずれかを表す。mは、1~2の整数を表す。なお、mが2の時には、Zは、同一であってもよく、異なっていてもよい。
    6. The photosensitive composition according to claim 5, wherein Y in the general formula (I) is a group represented by the following general formula (II).
    Figure JPOXMLDOC01-appb-C000002
    In the general formula (II), Y 1 represents an m + 1 valent organic group having 2 to 25 carbon atoms. Z 1 represents any of a carboxyl group, an acryloyloxy group, and a methacryloyloxy group. m represents an integer of 1 to 2. When m is 2, Z 1 may be the same or different.
  7.  熱架橋剤が、オキシラン基を有する化合物である請求項1から6のいずれかに記載の感光性組成物。 The photosensitive composition according to claim 1, wherein the thermal crosslinking agent is a compound having an oxirane group.
  8.  請求項1から7のいずれかに記載の感光性組成物を含有することを特徴とする感光性ソルダーレジスト組成物。 A photosensitive solder resist composition comprising the photosensitive composition according to claim 1.
  9.  支持体と、該支持体上に、請求項8に記載の感光性ソルダーレジスト組成物が積層されてなる感光層と、を有することを特徴とする感光性ソルダーレジストフィルム。 A photosensitive solder resist film comprising: a support; and a photosensitive layer obtained by laminating the photosensitive solder resist composition according to claim 8 on the support.
  10.  請求項8に記載の感光性ソルダーレジスト組成物を、基体の表面に塗布し、乾燥して感光層を積層して積層体を形成した後、露光し、現像することを特徴とする永久パターン形成方法。 A photosensitive solder resist composition according to claim 8 is applied to the surface of a substrate, dried to form a laminate by laminating a photosensitive layer, and then exposed and developed to form a permanent pattern. Method.
  11.  請求項10に記載の永久パターン形成方法により形成されることを特徴とする永久パターン。 A permanent pattern formed by the method for forming a permanent pattern according to claim 10.
  12.  請求項10に記載の永久パターン形成方法により永久パターンが形成されることを特徴とするプリント基板。 A printed circuit board, wherein a permanent pattern is formed by the method for forming a permanent pattern according to claim 10.
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