TW201235781A - Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, permanent pattern, permanent pattern forming method and printed board - Google Patents
Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, permanent pattern, permanent pattern forming method and printed board Download PDFInfo
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- TW201235781A TW201235781A TW101104621A TW101104621A TW201235781A TW 201235781 A TW201235781 A TW 201235781A TW 101104621 A TW101104621 A TW 101104621A TW 101104621 A TW101104621 A TW 101104621A TW 201235781 A TW201235781 A TW 201235781A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/035—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
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- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
201235781 41436pif 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種可適宜地用於抗焊劑等中之感光 性組成物、使用該感光性組成物之感光性抗焊劑組成物及 使用該感光性抗焊劑組成物之感光性抗焊劑膜、以及高精 細之永久圖案(保護膜、層間絕緣膜、抗焊劑等)、其形成 方法及印刷基板。 【先前技術】 近年來’電子機器以行動通信機器為代表而要求小 型、薄型、輕量以及高性能、高功能、高品質、高可靠性, 於此種電子機器中所搭載之電子零件模組亦變得要求小 型、南雄、度化。對於此種要求,近年來用於電子零件模組 的基板正從陶瓷配線基板逐漸變成所謂之印刷基板,所述 陶瓷配線基板是以氧化鋁質燒結體等陶瓷為原材料,所述 印刷基板是在絕緣基板之表面上,使用作為低電阻金屬之 銅或金等,藉由薄膜形成法而形成有配線導體層,所述絕 緣^板包含能夠進一步實現輕量化、高密度化之玻璃纖維 與裱氧樹脂。而且,該印刷基板亦逐漸向更能實現高密度 配線化之增層(buildup)配線基板轉變。 此種增層配線基板例如可藉由如下方式而製作:於包 含玻璃纖維與環氧概之基板上層壓包含熱硬化性樹 脂之膜,進行熱硬化㈣成絕緣層,其後藉由二氧化碳雷 射於其上穿設開口’然後對絕緣層表面進行化學粗化,使 用無電鑛齡及電解触法而覆層形成輔,#此於開口 4 201235781 41435pit 内形成導體層且⑽緣層表_成崎料層,進而反覆 進行此種絕緣層與配線導體層之形成。 缝^且’為了配線導體層之氧化或腐餘以及保護絕 =免受於配線基板上封裝電子零件時之熱的影響,於配 線基板之表面覆層形成有厚度為2G μιη〜5() _之抗焊劑 =該抗焊劑層-般情況下包含與配線導體層及絕緣層之 雄接性良㈣,溶性光交雜_、具有可歸之樹 脂’為了使《彡脹係數倾緣層植料體層之^膨服係 之 機填充劑。 然而,作為該抗焊劑層’在—般情況下,所含有之驗 可/合!生光交聯性樹脂為了在以曝光及顯影而於抗焊劑層形 成開口時表現㈣雜而含有錄或絲,因此存在如下 之問題:吸水率高賴緩地吸收空氣中之水分,該水分使 抗焊劑層之絕緣f崎低至_以下岐配線導體層間 短路,另外該水分對配線導體層造成腐蝕,其結果使配線 基板之電氣可靠性劣化。 已知有使抗焊劑層含有含氮雜環化合物(咪唑化合 物一坐化合物4)之技術。若使用該技術,雖然抗焊劑 層之耐熱性變向,但存在耐鍍敷(plating)性降低之問題。 而且,若光阻圖案之側面的平滑性差,則於進行焊接 時,於焊料與光阻圖案侧面之間產生空隙,該空隙由於加 熱而膨脹,從而產生焊料剝落等異常,於上述技術中存在 光阻圖案㈣面之+滑性並不充分之問題。 而且’作為於感光性組成物中使用三唑化合物之技 5 201235781 414J5pif 術,提出了含有如下化合物之感紐組成物: 報) 南分子黏合劑、於分子巾具有平輕少—個二 雙鍵^平均至少-個三唾環之化合物、可找合之單^、口 ^光聚合起始劑⑷如參照日本專利特開平6_43⑽^公 藉由該提案之技術,雖然顯影殘留得到抑制 接性良好之組成物,但於該提案之技術中存在如 題:無法獲得抗焊則所要求之絕緣性、 阻圖案側面之平滑性。 秋丨王汉尤201235781 41436pif VI. [Technical Field] The present invention relates to a photosensitive composition which can be suitably used in a solder resist or the like, a photosensitive solder resist composition using the same, and use thereof A photosensitive solder resist film of the photosensitive solder resist composition, and a high-definition permanent pattern (protective film, interlayer insulating film, solder resist, etc.), a method for forming the same, and a printed substrate. [Prior Art] In recent years, electronic devices, which are represented by mobile communication devices, require small, thin, lightweight, high-performance, high-performance, high-quality, high-reliability electronic component modules mounted in such electronic devices. It has also become small, Nanxiong, and gradual. In response to such a request, in recent years, a substrate for an electronic component module has gradually changed from a ceramic wiring substrate to a so-called printed substrate, and the ceramic wiring substrate is made of a ceramic such as an alumina sintered body. On the surface of the insulating substrate, copper or gold, which is a low-resistance metal, is used, and a wiring conductor layer is formed by a thin film forming method, and the insulating sheet includes glass fibers and helium oxygen which can further reduce weight and density. Resin. Further, the printed circuit board is gradually transitioning to a buildup wiring substrate which is more capable of achieving high-density wiring. Such a build-up wiring board can be produced, for example, by laminating a film containing a thermosetting resin on a substrate including glass fibers and epoxy, thermally hardening (iv) an insulating layer, and then performing carbon dioxide laser irradiation. An opening is formed thereon, and then the surface of the insulating layer is chemically roughened, and the coating is formed by using the electroless age and the electrolytic contact method, and the conductor layer is formed in the opening 4 201235781 41435pit and the (10) edge layer table_成崎料The layer is further formed by repeating the formation of the insulating layer and the wiring conductor layer. The thickness of the surface of the wiring substrate is 2G μηη~5() _ for the oxidation or corrosion of the wiring layer and the protection from the heat of the packaged electronic components on the wiring substrate. Solder resist = the solder resist layer - generally contains good susceptibility to the wiring conductor layer and the insulating layer (4), soluble light hybrid _, with a recyclable resin 'in order to make the "swelling coefficient slant layer plant layer The machine is filled with filler. However, as the solder resist layer 'in the general case, it is included in the test. The raw photocrosslinkable resin exhibits (4) miscellaneous and contains a recording or silk in order to form an opening in the solder resist layer by exposure and development. Therefore, there is a problem that the water absorption rate absorbs moisture in the air with high absorption, and the moisture causes the insulation layer f of the solder resist layer to be as low as _ below, and the wiring conductor layer is short-circuited, and the moisture causes corrosion to the wiring conductor layer. As a result, the electrical reliability of the wiring substrate is deteriorated. There is known a technique in which a solder resist layer contains a nitrogen-containing heterocyclic compound (imidazole compound-sit compound 4). According to this technique, although the heat resistance of the solder resist layer is changed, there is a problem that plating resistance is lowered. Further, when the smoothness of the side surface of the photoresist pattern is poor, a gap is formed between the solder and the side surface of the photoresist pattern during soldering, and the void expands due to heating, thereby causing an abnormality such as solder peeling, and light is present in the above technique. The problem that the resistance of the pattern (4) surface is not sufficient. Moreover, as a technique for using a triazole compound in a photosensitive composition, 2012 20128181 414J5pif, a sensory composition containing the following compounds is proposed: (Reporter) South molecular binder, which has a lighter weight than a double bond in a molecular towel ^ An average of at least one compound of the three-salt ring, a singularity of the monomer, and a photopolymerization initiator (4), as described in Japanese Patent Laid-Open No. Hei 6-43(10), the technique of the proposal, although the development residue is improved in adhesion. The composition, but there is a problem in the technique of the proposal: the insulation required for the solder resist and the smoothness of the side of the resist pattern are not obtained. Qiu Wang Wang Youyu
因此’現狀是要求提供絕雜、鑛紐、及光阻 案側面之平滑性優異之感光性組成物。 【發明内容】 本發明之課題在於解決先前之所述諸問題,達成以下 之目的。亦即,本發明之目的在於提供絕緣性、耐鍛敷性、 及光阻圖案側面之平滑性優異之感光性組成物。 用以解決所述課題之方法如下所示。亦即,本發明之 感光性組成物之雜在於含有:具有可與自由基反應之基 及可與熱交聯劑反應之基的至少任一者與三唑環的化合 物、t合性化合物、光聚合起始劑、熱交聯劑。 [發明的效果] 藉由本發明可解決先前之所述諸問題,達成所述目 的’可提供絕緣性、耐㈣性、絲__面之平滑性 優異之感光性組成物。 【實施方式】 6 201235781 41436pif (感光性組成物) 本發明之感光性組成物至少含有具有可與自由基反應 之基及可與熱交聯劑反應之基的至少任一者與三唑環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑,較佳的 是含有含羧基之高分子化合物,進一步視需要而含有其他 成分。 <具有可與自由基反應之基及可與熱交聯劑反應之基 的至少任一者與三唑環的化合物> 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與三唑環的化合物,如果是具有可與 自由基反應之基及可與熱交聯劑反應之基之至少任一者與 二唾環的化合物,則並無特別限制,可視需要而適宜選擇。 所述可與自由基反應之基例如可列舉丙烯醯氧基、曱 基丙烯醯氧基(methacryloyloxy)、乙烯基苯基、烯丙基 (allyl)等。 所述可與熱父聯劑反應之基例如可列舉叛基、胺基、 酼基等。 1 所述三唑環可為1,2,3-三唑環及u,4_三唑環之任一 者。 1,2,3-三唑及^4-三唑是下述結構式所表示之化合 物。 201235781 41436pif [化1] 12,3-三唾 HI^N 1,2,4-三唑 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物,換言之,是具有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者之 有機基鍵結於二嗤環上的化合物。所述有機基於所述三唾 環上之鍵結位置並無特別限制,可視需要而適宜選擇,可 與所述三唑環之氮原子鍵結,亦可與碳原子鍵結。 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物較佳的是下述通式(工) 所表示之化合物。 [化2] rTherefore, the current state of the art is to provide a photosensitive composition excellent in smoothness on the side of the impurities, minerals, and photoresist. SUMMARY OF THE INVENTION An object of the present invention is to solve the problems described above and achieve the following objects. That is, an object of the present invention is to provide a photosensitive composition which is excellent in insulation, forge resistance, and smoothness of the side surface of a photoresist pattern. The method for solving the problem is as follows. That is, the photosensitive composition of the present invention contains a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a triazole ring compound, a t-combination compound, Photopolymerization initiator, thermal crosslinking agent. [Effects of the Invention] According to the present invention, it is possible to solve the problems described above, and to achieve the above-mentioned photosensitive composition which can provide insulation, resistance (four), and smoothness of the surface of the yarn. [Embodiment] 6 201235781 41436pif (Photosensitive composition) The photosensitive composition of the present invention contains at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a triazole ring. The compound, the polymerizable compound, the photopolymerization initiator, and the thermal crosslinking agent preferably contain a carboxyl group-containing polymer compound, and further contain other components as needed. <Compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring> as a base reactive with a radical and thermally crosslinkable At least one of the groups of the agent reaction and the compound of the triazole ring, if it is a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, There is no special restriction, and it is suitable for selection as needed. Examples of the group reactive with a radical include an acryloxy group, a methacryloyloxy group, a vinyl phenyl group, an allyl group, and the like. The group reactive with the hot parent agent may, for example, be a thiol group, an amine group, a thiol group or the like. 1 The triazole ring may be any of a 1,2,3-triazole ring and a u,4_triazole ring. 1,2,3-triazole and ^4-triazole are compounds represented by the following structural formulas. 201235781 41436pif [Chemical 1] 12,3-tris- HI^N 1,2,4-triazole The at least one and the third having a radical reactive group and a reactive crosslinking agent The compound of the azole ring, in other words, a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, is bonded to the dioxan ring. The bonding position of the organic group based on the tris-salt ring is not particularly limited, and may be appropriately selected as needed, and may be bonded to a nitrogen atom of the triazole ring or may be bonded to a carbon atom. The compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring is preferably a compound represented by the following formula (manufacture). [chemical 2] r
XfY L」η通式⑴ 其中,於所述通式(I)中,X表示三唑環。γ表示具 有可與自由基反應之基及可與熱交聯劑反應之基之至少任 8 201235781 4I4i〇pif 一者的有機基。n表示1〜3之整數。另外,於n為2〜3 時,Y可相同亦可不同。 另外’於所述通式(I)中,所述Y可與作為所述X 之三嗤環之氮原子鍵結,亦可與破原子鍵結。 所述通式(I)中之η較佳的是1〜2 ’更佳的是2。所 述η若為2,則於絕緣性方面有利。 所述通式(I)中之Υ較佳的是下述通式(H)所表示 之基。 [化3] 通式(Π) 其中,於所述通式(ID中,Yl表示碳數為2〜25之 m+1價有機基。&表示綾基、丙烯醯氧基及曱基丙烯醯氧 基之任-者。m表示卜2之整數。另外,於m為2時, A可相同亦可不同。 ,所述碳數為2〜25之m+1價有機基並無特別限制, 視需要而適宜選擇’例如可列舉具有麟、雜鍵、醋鍵、 及硫脲鍵之至少任_者的碳數為2〜25之㈣ 而且’所述有機基之碳數較佳的是2〜2G,更佳的是2=5。 戶述具有可與自由基反應之基及 基的至少任一者盥二4产的仆人& 、…反應之 ,,一坐%的化合物之分子量並無特別限 制’可視4㈣宜選擇,較麵 是100〜800。 , 文佳的 9 201235781 41436pif 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與三唑環的化合物之具體例,例如可 列舉下述式所表示之化合物等。 [化4]XfY L"η Formula (1) wherein, in the above formula (I), X represents a triazole ring. γ represents an organic group having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, which is a group of at least 8 201235781 4I4i〇pif. n represents an integer of 1 to 3. Further, when n is 2 to 3, Y may be the same or different. Further, in the above formula (I), the Y may be bonded to a nitrogen atom which is the triterpene ring of the X, or may be bonded to a broken atom. The η in the above formula (I) is preferably 1 to 2 Å and more preferably 2. If the η is 2, it is advantageous in terms of insulation. The oxime in the above formula (I) is preferably a group represented by the following formula (H). In the above formula (ID, Y1 represents an m+1 valent organic group having a carbon number of 2 to 25. & represents an anthracenyl group, an acryloxy group, and a mercapto propylene group. In the case of m, the A may be the same or different. The m+1 organic group having a carbon number of 2 to 25 is not particularly limited. It is preferable to select as needed, for example, the carbon number of at least any of the lining, the hetero bond, the vinegar bond, and the thiourea bond is 2 to 25 (4) and the carbon number of the organic group is preferably 2 ~2G, more preferably 2=5. The household has at least one of the radicals reactive with the radical and the base of the servant & responsive to, the reaction, the molecular weight of a compound There is no particular limitation 'visible 4 (four) should be selected, the face is 100~800. , Wen Jia's 9 201235781 41436pif as at least one of the bases capable of reacting with a radical and reacting with a thermal crosslinking agent Specific examples of the compound of the triazole ring include, for example, a compound represented by the following formula.
201235781 41430pit [化5]201235781 41430pit [Chemical 5]
-具有可與自由基反應之基及可與熱交聯劑反應之基 的至少任一者與三π坐環的化合物之含量- 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物於所述感光性組成物中 之含量並無特別限制,可視需要而適宜選擇,相對於所述 11 201235781 41436pif 感光性組成物之固形物而t,較佳的是1·〇 wt%〜20 wt/〇 ’更佳的是】5 wt%〜1〇加%。若所述含量不足1 〇 Wt/ο貝|J存在無法發揮充分之絕緣性之現象;若超過 Wt。/: ’則存在耐触降低之麟。若所述含量柄述更佳 之範圍内則於兼顧耐熱性與絕緣性之方面*言有利。 〈聚合性化合物> 所述聚合性化合物並無特別限制,可視需要而適宜選 擇,較佳的是於分子巾具有至少1個可加絲合之基的化 合物。此種化合物更佳的是選自具有(曱基)丙烯基之單體 的至少1種。 另外’所述聚合性化合物是與所述具有可與自由基反 應之基及了與熱父聯劑反應之基的至少任一者與三哇環的 化合物不同的化合物。 、 所述具有(曱基)丙稀基之單體並無特別限制,可視需 要而適宜選擇,例如可列舉聚乙二醇單基㈣、 聚丙一醇單(曱基)丙稀酸酉旨、(甲基)丙稀酸苯氧基乙醋等單 官能丙稀_或單官能甲基丙烯酸酿;聚乙二醇二(甲基) 丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、三羥曱基乙烷三 (曱基)丙稀酸醋、三經甲基丙燒三(甲基)丙稀酸酉旨 、三羥甲 基丙烧二(甲基)丙烯酸醋、新戊二醇二(曱基)丙稀酸醋、季 戊四醇四(甲基)丙烯酸醋、季戊四醇三(曱基)丙婦酸醋、二 季戊四醇六(甲基旨、二季細醇五(甲基)丙婦酸 酯、己二醇二(甲基)丙烯酸酉旨、二3袁戊基二甲醇二(曱基) 丙稀_、三㈣基丙烧三(丙烯醯氧基丙基)醚、三(丙稀 12 201235781 41436pif 醯氧基乙基)異氰尿酸酯、三(丙烯醯氧基乙基)氰尿酸酯、 丙三醇三(甲基)丙烯酸酯、於三羥甲基丙烷或丙三醇、雙 酚等多官能醇上加成反應環氧乙烷或環氧丙烷之後進行 (甲基)丙烯酸酯化而成者、日本專利特公昭48_417〇8號公 報、曰本專利特公昭50-6034號公報、日本專利特開昭 51-37193號公報等各公報中所記載之丙烯酸胺基甲酸酯 類,曰本專利特開昭48-64183號公報、日本專利特公昭 49-43191號公報、日本專利特公昭52_3〇49〇號公報等之各 公報中所記載之聚酯丙烯酸酯類;作為環氧樹脂與(甲基) 丙烯酸之反應產物的環氧丙烯酸酯類等多官能丙烯酸酯或 甲基丙烯酸酯等。該些單體中更佳的是二環戊基二曱醇二 (曱基)丙烯酸酯、三羥曱基丙烷三(甲基)丙烯酸酯、季戊四 醇四(曱基)丙烯 g夂酉曰(pentaerythrit〇i tetra(meth) acrylate )、 一季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(曱基)丙烯酸 酯。 -聚合性化合物之含量_ 所述聚合性化合物於所述感光性組成物中之含量並無 特別限制’可視需要㈣宜選擇,相躲所述感光性組成 物之固形物而s,較佳的是2 wt%〜5〇 wt%,更佳的是3 wt/o〜40 wt%,特佳的是4 wt%〜35 wt%。所述聚合性化 合物之含量若从2 wt% ’則存在無法形賴案之現象; 右超過50 wt%,則存在抗龜裂性差之現象。另一方面,若 所返聚合性化合物之含量為所述躲之範_,則於圖案 形成性、抗龜裂性提高之方面而言有利。 13 201235781 41436pif 〈光聚合起始劑> 所述光聚合起始劑只要具有使所述聚合性化合物取 合開始的能力,則並無特別限制,可視需要而適宜選 例如可列舉齒代烴衍生物、氧化膦、六芳基二咪唑、 生物、有機過氧化物、硫代化合物、酮化合物、 f妨 鹽、酮月亏喊等。 矢鑷 所述_代烴衍生物例如可列舉具有三嗪骨架之、 衍生物、具有噁二唑骨架之鹵代烴衍生物等。/、、代烴 顏有三♦骨架之鹵代烴衍生物並無_限制,可 。要而適宜選擇’例如可列舉若林等人著、 與: 會通報(Bull.Chem.Soc.Japan),42、2924 ( 1969)中予予 載之化合物、英國專利138觀號說明書中所記戶= =、曰本專利特開昭53]3期號公報 二 匆、德國專利33雇4號說明書中所記载之^匕合 似咖命等之有機化學雜諸⑽gChem);29=、 八二4)中所記載之化合物、日本專利特開昭62-58241 f卢 2 所記載之化合物、日本專利特開平5-281728 f卢八: 記物、日本專利特開平5·3492。號公‘;所 如可:ΪΞίΓΐ (°xadiazc>le)骨架之錢烴衍生物例 等。舉國專利第4212976號說明書中所記載之化合物 所述肟(oxime)衍生物並無特 宜選擇’例如可列舉曰本專利特開 201235781 4J436pif 落「嶋」尹所記戴之化合物等。 例如;:=::=限制’可視需要而適宜選擇, 中所記载::;:,2·觸號公報之段落「, 上述以外之光聚合起始劑例如可列舉日太 侧號公報之段落 度或感光波:感光層進行曝光之曝光感光 劑。 了所4歧合賴_外,可添加增感 或紫劑:ί據後述之作為光照射手段之可見光線 卜;^射、可見光雷射等而適宜選擇。 並他過由於活性能量線而成為激發態,與 例如自由基產生劑、酸產生劑等)相互作用(例 動、、電子移鱗)而產生自由基紐等有用基。 感劑並無特別限制,可視需要而適宜選擇,例 二日本專利特開細7_2_號公報之段落「〇〇89」 中所§己載之化合物等。 斤述光聚合起始劑與所述增感劑之組合並無特別限 '可視為要而適宜選擇,例如可列舉日本專利特開 =305734说公報中所記載之電子移動型起始系[⑴供 ^型起始劑及増感色素、⑵吸電子㈣始劑及增感色 素、(3)供電子型起始劑、增感色素及吸電子型起始劑(三 兀起始系)]等組合。 15 201235781 41436pif 所述增感劑之含量並無特別限制,可視需要而適宜選 擇’相對於所述感光性組成物之固形物而言’較佳的是〇 wt%〜30 wt% ’更佳的是0.1 wt%〜20 wt%,特佳的是〇 2 wt%〜10 wt%。所述增感劑之含量若不足〇 〇5 wt%,則存 在對活性能量線之感光度降低,曝光製程耗費時間,生產 性降低之現象;若超過30 wt%,則存在於保存時所述增感 劑自所述感光層析出之現象。 所述光聚合起始劑可單獨使用1種,亦可併用2種以 上。 所述光聚合起始劑之特佳例可列舉:於後述之曝光中 可與波長為405 nm之雷射光對應之複合光起始劑、六芳 基一咪唑化合物、二茂鈦等,所述複合光起始劑是將氧化 膦類、α·胺基烧基峨、具有三嗪骨架之鹵代烴化合物與 作為增感劑之胺化合物組合而成。 -光聚合起始劑之含量_ 所述光聚合起始劑於所述感光性組成物中之含量並 ^別限制’可視需要而適宜選擇,相對於所述感光性組 之固^物而s,較佳的是〇5 〜如wt%,更佳的a content of a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triple π ring - the group reactive with a radical and thermally crosslinkable The content of at least one of the group of the agent reaction and the compound of the triazole ring in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the solid matter of the 11 201235781 41436pif photosensitive composition. And t, preferably 1·〇wt%~20 wt/〇' is more preferably 5 wt%~1〇 plus %. If the content is less than 1 〇 Wt/ο贝|J, there is a phenomenon that sufficient insulation cannot be exhibited; if it exceeds Wt. /: ‘There is a collar that is resistant to touch. If the content is in a better range, it is advantageous in terms of both heat resistance and insulation. <Polymerizable compound> The polymerizable compound is not particularly limited and may be appropriately selected as needed, and is preferably a compound having at least one filament-addable group in the molecular towel. More preferably, such a compound is at least one selected from the group consisting of a (fluorenyl)propenyl group. Further, the polymerizable compound is a compound different from the compound having at least one of a group reactive with a radical and a group reactive with a hot parent. The monomer having a (fluorenyl) acryl group is not particularly limited and may be appropriately selected as needed, and examples thereof include a polyethylene glycol mono group (IV) and a polypropanol mono(indenyl) acrylate. Monofunctional propylene or monofunctional methacrylic acid such as (meth)acrylic acid phenoxyacetic acid; polyethylene glycol di(meth) acrylate, polypropylene glycol di(meth) acrylate, trishydroxy Mercaptoethane tris(fluorenyl) acrylate vinegar, trimethyl methacrylic acid tris(methyl) acrylate acid, trimethylol propyl bis(meth) acrylate vinegar, neopentyl glycol (mercapto) acrylic acid vinegar, pentaerythritol tetrakis(meth)acrylic acid vinegar, pentaerythritol tris(mercapto)propyl vinegar vinegar, dipentaerythritol hexahydrate (methyl ketone, diquaternary pentoxide penta(methyl) propionate, Hexanediol di(meth)acrylic acid, 2, 3, pentyl dimethanol, di(indenyl) propylene, tris(tetra)propanyl tris(propylene oxypropyl)ether, tris (propylene 12 201235781) 41436pif oxiranyl ethyl) isocyanurate, tris(propylene methoxyethyl) cyanurate, glycerol tri(meth) acrylate, trimethylolpropane or propylene A polyfunctional alcohol such as an alcohol or a bisphenol is subjected to an addition reaction of ethylene oxide or propylene oxide, followed by (meth)acrylation, Japanese Patent Publication No. 48_417〇8, and Japanese Patent Publication No. 50- Japanese Patent Publication No. Sho. Polyester acrylates described in each of the publications of Japanese Patent Publication No. Sho 52_3〇49〇, and the like, and polyfunctional acrylates such as epoxy acrylates which are reaction products of epoxy resins and (meth)acrylic acid or More preferably, among these monomers, dicyclopentyl decyl diol di(mercapto) acrylate, trihydroxy hydrazine propane tri (meth) acrylate, pentaerythritol tetrakis (mercapto) propylene g Pent (pentaerythrit〇i tetra(meth) acrylate ), pentaerythritol hexa(meth) acrylate, dipentaerythritol penta (indenyl) acrylate. - content of polymerizable compound _ the polymerizable compound is sensitized Sexual composition There is no particular limitation on the content of the medium. (4) It is preferred to select the solid matter of the photosensitive composition, preferably 2 wt% to 5 wt%, more preferably 3 wt/o. 40 wt%, particularly preferably 4 wt% to 35 wt%. If the content of the polymerizable compound is from 2 wt% 'there is a phenomenon that cannot be deviated; when the right is more than 50 wt%, there is a poor resistance to cracking. On the other hand, when the content of the polymerizable compound to be returned is the above-mentioned hiding property, it is advantageous in terms of improvement in pattern formability and crack resistance. 13 201235781 41436pif <Photopolymerization initiator> The photopolymerization initiator is not particularly limited as long as it has the ability to start the polymerization of the polymerizable compound, and may be, for example, a toothed hydrocarbon derivative, a phosphine oxide or a hexaaryldiimidazole. , biological, organic peroxides, thio compounds, ketone compounds, f salt, ketones, etc. The hydrazine derivative may, for example, be a derivative having a triazine skeleton, a derivative having a oxadiazole skeleton, or the like. /,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, It is desirable to select 'for example, as quoted by Ruolin et al., and: Bulletin (Bull. Chem. Soc. Japan), 42, 2924 (1969), the compound contained in the British Patent 138. =, 曰 专利 专利 昭 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 The compound described in Japanese Patent Laid-Open No. Hei. No. 62-58241, the entire disclosure of which is incorporated herein by reference. No. **; such as: ΪΞίΓΐ (°xadiazc>le) skeleton of hydrocarbon derivatives, etc. The compound described in the specification of the National Patent No. 4,212,976 is not particularly preferred as the oxime derivative. For example, the compound of the Japanese Patent Laid-Open No. 201235781 4J436pif 嶋 嶋 尹 尹 尹. For example: :=::=Restriction 'Selected as appropriate, as described in the paragraph::;, 2: The paragraph of the tactile bulletin ", the photopolymerization initiator other than the above may be exemplified by the Japanese side. Paragraph or photoreceptor: Exposure sensitizer for exposure of the photosensitive layer. Addition of sensitization or purple agent to the 4th ray _ _: According to the visible light line as a light irradiation method described later; It is suitable for selection by shooting, etc., and he becomes an excited state due to an active energy ray, and interacts with, for example, a radical generator, an acid generator, etc., to generate a free radical such as a radical. The sensitizer is not particularly limited, and may be appropriately selected as needed. For example, the compound contained in the paragraph "〇〇89" of the Japanese Patent Laid-Open Publication No. 7-2_ is exemplified. The combination of the photopolymerization initiator and the sensitizer is not particularly limited, and may be selected as appropriate. For example, the electron mobility type initiating system described in Japanese Patent Laid-Open No. 305734 Supplying initiator and sensitizing dye, (2) electron-withdrawing (four) initiator and sensitizing dye, (3) electron-donating initiator, sensitizing dye and electron-withdrawing initiator (Sancha starting system)] And so on. 15 201235781 41436pif The content of the sensitizer is not particularly limited, and it is preferable to select 'preferably 〇wt% to 30 wt%' relative to the solid matter of the photosensitive composition as needed. It is 0.1 wt% to 20 wt%, and particularly preferably 〇2 wt% to 10 wt%. If the content of the sensitizer is less than 5% by weight, the sensitivity to the active energy ray is lowered, the exposure process takes time, and the productivity is lowered; if it exceeds 30 wt%, it is present at the time of storage. The phenomenon that the sensitizer is extracted from the photosensitive light. The photopolymerization initiator may be used singly or in combination of two or more. Specific examples of the photopolymerization initiator include a composite photoinitiator, a hexaaryl-imidazole compound, a titanocene, etc., which are compatible with laser light having a wavelength of 405 nm in the exposure described later. The composite photoinitiator is a combination of a phosphine oxide, an α-aminoalkyl hydrazine, a halogenated hydrocarbon compound having a triazine skeleton, and an amine compound as a sensitizer. - the content of the photopolymerization initiator - the content of the photopolymerization initiator in the photosensitive composition and the limit is 'optional" as needed, relative to the solidity of the photosensitive group Preferably, 〇5~such as wt%, better
Wt/° 15 Wt%,特佳的是1 wt%〜10 wt°/。。所述光聚· 含量若不足G,5 wt% ’則存在曝光部於顯影過 :=頃向,若超過2〇 wt%,則存在耐熱性降低之: 範圍内可合起始劑之含量若為所述特佳· 而言有利 成良贿、耐熱性亦好之方1 16 201235781 414J0plt <熱交聯劑> 所述熱交聯劑並無特別限制,可視需要而適宜選擇, 較佳的是具有選自環狀醚基、嵌段異氰酸酯基、噁唑基、 及碳酸乙二酯基之至少一種官能基的化合物。 所述熱交聯劑例如可列舉具有環狀醚基之化合物、具 有嵌段異氰酸酯基之化合物、具有噁唑基之化合物、具有 碳酸乙二酯基之化合物等。 所述具有環狀醚基之化合物例如可列舉具有環氧乙烷 基之化合物、具有環氧丙烷基之化合物等。 所述具有環氧乙烧基之化合物例如可列舉於1分子内 具有至少2個環氧乙烷(oxirane)基的環氧化合物等。 所述具有環氧丙烷(oxetane)基之化合物例如可列舉 於1分子㈣有至少2個環氧丙絲的環氧槐化合物等。 所述環氧化合物並無特別限制,可視需要而適宜選 $,例如可列舉聯二曱苯酚型或聯苯二酚型環氧樹脂 (YX4_ ;三菱化學公司製造」等)或該些之混合物、 具有異氰尿酸酯骨架等之雜環式環氧樹脂(「TEpic;曰產 3 i ί公!1製造」、「Araldite PT810;汽巴精化股份有限 t 5 ^4」等)、雙酚Α型環氧樹脂、酚醛清漆型環氧樹 义:型環氧樹脂(「EP〇t〇hto YDF-m、新曰鐵化學 ;:2造」等)、氫化雙酚A型環氧樹脂、縮水甘油胺; 、乙内醯脲型環氧樹脂、脂環族環⑽脂、三羥 環氧樹脂、㈣s型環氧樹脂、雙紛A祕 4风樹脂、四苯盼基乙烧型環氧樹脂、鄰苯二曱酸 17 201235781 41436pif 縮水甘油基酯樹脂、四縮水甘油基二曱苯酚乙烷樹脂、含 有萘基之環氧樹脂(「ESN-190、ESN-360 ;新日鐵化學公 司製造」、「HP-4032、EXA-4750、EXA-4700 ; DIC 公司製 造」等)、具有二環戊二烯骨架之環氧樹脂(rHp_72〇〇、 ΗΡ-7200Η ; DIC公司製造」等)、曱基丙烯酸縮水甘油酯 共聚系環氧樹脂(「CP-50S、CP-50M ;日油公司製造」等)、 裱己基馬來醯亞胺與曱基丙烯酸縮水甘油酯之共聚環氧樹 脂等。該些環氧化合物可單獨使用丨種,亦可併用2種以 上。 迹哀軋内炕化5物並無特別限制,可視需要而適宜 選擇,例如可列舉曰本專利特開2〇〇7_2〇3〇號公報之段落 「0096」中所記載之多官能環氧丙烷化合物等。 ,所述具有嵌段異氰酸醋基之化合物並無特別限制,可 ,需要,適宜選擇’例如可列舉使阻斷劑(bbek agent) 二聚異級g旨及其财物之錢酸祕反應而所得之化合 物^此種化合物例如可_日本專獅肝Μ術號公報 之&洛’」中所記载之嵌段聚異氰酸醋等。 適宜=具:f唑基之化合物並無特別限制,可視需要而 與盆他不例j列舉使具有料基之不飽和單體視需要Wt / ° 15 Wt%, particularly good is 1 wt% ~ 10 wt ° /. . If the photopolymerization content is less than G, 5 wt%', the exposed portion is developed: = if it is more than 2% by weight, the heat resistance is lowered: the content of the initiator in the range is In the case of the above-mentioned special, it is advantageous for the bribe and the heat resistance. 1 16 201235781 414J0plt <Hot crosslinking agent> The thermal crosslinking agent is not particularly limited, and may be appropriately selected as needed, preferably. It is a compound having at least one functional group selected from the group consisting of a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Examples of the thermal crosslinking agent include a compound having a cyclic ether group, a compound having a blocked isocyanate group, a compound having an oxazolyl group, a compound having an ethylene carbonate group, and the like. Examples of the compound having a cyclic ether group include a compound having an oxirane group, a compound having an oxypropylene group, and the like. The compound having an ethylene oxide group may, for example, be an epoxy compound having at least two oxirane groups in one molecule. The compound having an oxetane group may, for example, be an epoxy oxime compound having at least 2 propylene oxide filaments in one molecule (d). The epoxy compound is not particularly limited, and may be appropriately selected as needed, and examples thereof include a dinonylphenol type or a biphenyldiol type epoxy resin (YX4_; manufactured by Mitsubishi Chemical Corporation) or the like, or a mixture thereof. Heterocyclic epoxy resin having an isocyanurate skeleton or the like ("TEpic; 曰 3 3 i 公 gong! 1 manufactured", "Araldite PT810; Ciba refined chemical limited t 5 ^ 4", etc.), bisphenol Epoxy resin, novolac type epoxy resin: epoxy resin ("EP〇t〇hto YDF-m, neodymium iron chemistry; 2"), hydrogenated bisphenol A epoxy resin, Glycidylamine; Ethyl ureia type epoxy resin, alicyclic ring (10) grease, trihydroxy epoxy resin, (iv) s type epoxy resin, double A secret 4 wind resin, tetraphenyl phenyl bromide epoxy Resin, phthalic acid 17 201235781 41436pif glycidyl ester resin, tetraglycidyl dinonyl phenol ethane resin, epoxy resin containing naphthyl group ("ESN-190, ESN-360; manufactured by Nippon Steel Chemical Co., Ltd. "HP-4032, EXA-4750, EXA-4700; manufactured by DIC", etc.), epoxy resin with dicyclopentadiene skeleton ( rHp_72〇〇, ΗΡ-7200Η; manufactured by DIC, etc.), glycidyl methacrylate copolymer epoxy resin (“CP-50S, CP-50M; manufactured by Nippon Oil Co., Ltd.”, etc.), 裱己基马莱醯亚Copolymer epoxy resin of amine and glycidyl methacrylate. These epoxy compounds may be used singly or in combination of two or more. There is no particular limitation on the content of the sputum in the smearing, and it may be appropriately selected as needed. For example, the polyfunctional propylene oxide described in the paragraph "0096" of the Japanese Patent Publication No. 2〇〇7_2〇3〇 can be cited. Compounds, etc. The compound having a blocked isocyanate group is not particularly limited, and may be appropriately selected. For example, a bleck agent may be exemplified by a dimerization of a bbek agent. Further, the compound obtained can be, for example, a block polyisocyanate or the like described in "The lion's liver sputum" & Suitable = with compound: the compound of the oxazolyl group is not particularly limited, and may be exemplified by the use of a non-saturated monomer having a base as needed.
所述具有料基之化合物可使用市售品。 购00=如可列舉日本觸媒公51製造之EPOCROS 201235781 41436pif 所述具有碳酸乙二酯基之化合物並無特別限制,可視 需要而適宜選擇,例如可列舉具有碳酸乙二酯基之丙烯酸 樹脂等^所述具有碳酸乙二酯基之丙烯酸樹脂例如可列舉 曰本專利特開平1-146968號公報中所記載之含有碳酸酯 基之共聚物等。 該些化合物可單獨使用丨種,亦可併用2種以上。 該些化合物中,具有環氧乙烷基之化合物於圖案侧面 之平滑性及絕緣性之方面而言較佳。 -熱交聯劑之含量- 所述熱父聯劑於所述感光性組成物中之含量並無特別 限制,可視需要㈣宜選擇’相對於所述感級組成物之 固形物而言,較佳的是1 wt%〜5〇wt%,更佳的是2wt〇/〇 〜40 wt%,特佳的是3 wt%〜3〇 wt%。所述熱交聯劑之含 1若不足1 wt%,則存在耐熱性惡化之現象;若超過5〇 wt%,則存在顯影性或抗龜裂性惡化之現象。另一方面, 若所述含篁為所述特佳之範圍内,則可以良好之感光度製 作硬化膜,卿成之硬化膜於兼綱熱性與減裂性之方 面而言亦有利。 <含有羧基之高分子化合物> 所述含有羧基之高分子化合物若為具有缓基之高分子 化合物則並無制限制,可視需要而適宜選擇,例如可列 舉酸改貝含有乙触不飽和基之聚胺基m賴脂、酸改 質含有乙稀性不飽和基之環氧樹脂、含有乙稀性不飽和基 及羧基之丙烯酸樹脂、聚醯亞胺前驅物等。該些化合物中, 19 201235781 41436pif 酸改質含有乙漸4細基之聚胺基甲酸_脂於抗龜裂 性優異之方面而言較佳。 -酸改負含有乙稀性不飽和基之聚胺基曱酸自旨樹脂_ 作,所述酸改質含有乙稀性不飽和基之聚胺基甲酸醋 樹脂’若為具有作為酸基之羧基與乙烯性不飽和基的聚胺 基曱酸酯樹脂,則並無特別限制,可視需要而適宜選擇, 例如可列舉(1)於側鏈具有乙烯性不飽和基之聚胺基曱酸 酯樹脂、(11)含有羧基之聚胺基甲酸酯與於分子中具有環 氧基與乙烯性不飽和基之化合物反應而所得的聚胺基甲酸 酯樹脂等。 --(1)於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹 脂-- 所述於侧鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 並無特別限制,可視需要而適宜選擇,例如可列舉於其側 鏈具有下述通式(1)〜通式(3)所表示之官能基中之至 少1個的化合物。 [化6] Ο II—X—C、c=c / R1 R3 / 、R2 通式(1) R1〜R3分職域表示氫原子 於所述通式(〇中, 或1價之基。 20 201235781 ^ι^οριι j述R亚無特職制,可視需要而適宜選擇 ,例如可 二牛虱原子、亦可具有取代基找歸。於自由基反應性 南之方面*言’該些基中較佳的錢原子、甲基。 而且,所述R及R3並無特別限制,可視需要而適宜 選擇’分別獨立地列舉例如氫原子、鹵素原子、胺基、缓 基、烧氧紐基、績基m基、亦可具有取代基之 烧基、亦可具有取代基之綠、亦可具有取絲之烧氧基、 亦可具有取代基之芳氧基、亦可具有取代基找基胺基、 亦可具有取代基之綠胺基、村具有取代基之烧基石黃酸 基、亦可具有取絲之芳基俩鱗。於自由基反應性高 之方面而言,該些基巾較佳的是氫原子、羧基、烧氧基幾 基、亦可具有取代基之烧基、亦可具有取代基之芳基。 於所述通式(1)中,X表示氧原子、硫原子、或 _N(R )- ’所述Ri2表示氫原子、或】價有機基。所述 並無特別限制,可視需要而適宜選擇,例如可列舉亦可具 有取代基之燒基等。於自由基反應性高之方面而言,該些 基中較佳的是氫原子、曱基、乙基、異丙基。 — 此處,可導入之所述取代基並無特別限制,可視需要 而適宜選擇,例如可列舉烷基、烯基、炔基、芳基、烧氧 基、芳氧基、_素原子、胺基、烷基胺基、芳基胺基、羧 基、烷氧基羰基、磺基、硝基、氰基、醯胺基、烷基磺醯 基、芳基磺醯基等。 21 201235781 41436pif [化ηCommercially available products can be used as the compound having a base. 00 = 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 The acrylic resin having an ethylene carbonate group, for example, a copolymer containing a carbonate group described in JP-A-1-146968. These compounds may be used alone or in combination of two or more. Among these compounds, the compound having an oxiranyl group is preferred in terms of smoothness and insulation of the side surface of the pattern. - the content of the thermal crosslinking agent - the content of the hot parenting agent in the photosensitive composition is not particularly limited, and it may be desirable to select (in relation to the solid matter of the sensing composition) Preferably, it is 1 wt% to 5 wt%, more preferably 2 wt〇/〇~40 wt%, and particularly preferably 3 wt% to 3 wt%. When the content of the thermal crosslinking agent is less than 1% by weight, the heat resistance is deteriorated. When the content is more than 5% by weight, the developability or the crack resistance is deteriorated. On the other hand, if the cerium is in the above-mentioned range, the cured film can be formed with good sensitivity, and the cured film is also advantageous in terms of heat resistance and crack resistance. <Polymer compound containing a carboxyl group> The polymer compound having a carboxyl group is not limited as long as it is a polymer compound having a slow group, and may be appropriately selected as needed. For example, the acid-modified shell contains an ethylenically unsaturated group. The polyamine-based lysine, the acid-modified epoxy resin containing a ethylenically unsaturated group, an acrylic resin containing a ethylenically unsaturated group and a carboxyl group, a polyimide precursor, and the like. Among these compounds, 19 201235781 41436pif acid-modified polyaminocarbamic acid-containing acid having a 4-fold fine group is preferred in terms of excellent crack resistance. - the acid is modified to contain a polyunsaturated group of a polyamino phthalic acid from the resin, and the acid is modified to contain an ethylenically unsaturated group of a polyurethane carboxylic acid resin, if it has an acid group The polyamino phthalate resin having a carboxyl group and an ethylenically unsaturated group is not particularly limited and may be appropriately selected as necessary, and examples thereof include (1) polyamino phthalate having an ethylenically unsaturated group in a side chain. The resin, (11) a carboxyl group-containing polyurethane, and a polyurethane resin obtained by reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule. (1) Polyamine phthalate resin having an ethylenically unsaturated group in a side chain - the polyamino phthalate resin having an ethylenically unsaturated group in a side chain is not particularly limited, and may be optionally required For example, a compound having at least one of the functional groups represented by the following general formulae (1) to (3) in the side chain is exemplified. Ο II—X—C, c=c / R1 R3 / , R2 General formula (1) The R1 to R3 sub-domains represent a hydrogen atom in the formula (〇, or a monovalent group. 20 201235781 ^ι^οριι j said R Asia has no special system, which can be selected according to needs, such as two calves and atoms, or a substituent. In the aspect of free radical reactivity, it is better. Further, R and R3 are not particularly limited, and may be appropriately selected as needed. 'Individually, for example, a hydrogen atom, a halogen atom, an amine group, a slow group, a burnt oxygen nucleus, or a m a base, a base group which may have a substituent, a green which may have a substituent, an alkoxy group which may have a silk taken off, an aryloxy group which may have a substituent, or a substituent-based amine group, The green amine group which may have a substituent, the pyridyl acid group which has a substituent in the village, and the aryl group scale which has a silk take-up. In terms of high radical reactivity, the base papers are preferably a hydrogen atom, a carboxyl group, an alkoxy group, an alkyl group which may have a substituent, or an aryl group which may have a substituent. In the formula (1), X represents an oxygen atom, a sulfur atom, or _N(R)-', and Ri2 represents a hydrogen atom or a valence organic group. The above is not particularly limited and may be appropriately selected as needed, for example, Examples of the alkyl group which may have a substituent include a hydrogen atom, a mercapto group, an ethyl group, and an isopropyl group in terms of high radical reactivity. Here, it may be introduced. The substituent is not particularly limited and may be appropriately selected as needed, and examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, an atom, an amine group, and an alkylamino group. Arylamino, carboxyl, alkoxycarbonyl, sulfo, nitro, cyano, decylamino, alkylsulfonyl, arylsulfonyl, etc. 21 201235781 41436pif [化η
r8icir7 II 6 CIR 4 一 5 CCIC3— R 通式(2) 於所述通式(2)中,R4〜R8分別獨立地表示氫原子 或1價基。所述R4〜R8並無特別限制,可視需要而適宜選 擇,例如可列舉氫原子、鹵素原子、胺基、二烷基胺基、 叛基、烧氧基叛基、續基、硝基、氰基、亦可具有取代基 之烷基、亦可具有取代基之芳基、亦可具有取代基之烷氧 基、亦可具有取代基之芳氧基、亦可具有取代基之烷基胺 基、亦可具有取代基之芳基胺基、亦可具有取代基之烷基 石黃醯基、亦可具有取代基之芳基磺醯基等。於自由基反應 性高之方面而言,該些基中較佳的是氫原子、羧基、烷氧 基羰基、亦可具有取代基之烧基、亦可具有取代基之芳基。 可導入之取代基可列舉與所述通式(丨)相同者等。而 且,Y表示氧原子、硫原子、或-N (R12) _。所述R12與所 述通式(1)之R12之情形同義,較佳例亦相同。 [化8] ,11 _z_R8icir7 II 6 CIR 4 - 5 CCIC3 - R Formula (2) In the above formula (2), R4 to R8 each independently represent a hydrogen atom or a monovalent group. R4 to R8 are not particularly limited and may be appropriately selected as needed, and examples thereof include a hydrogen atom, a halogen atom, an amine group, a dialkylamino group, a thiol group, a decyl group, a thio group, a nitro group, and a cyano group. And an alkyl group which may have a substituent, an aryl group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, and an alkylamino group which may have a substituent Further, it may have an arylamino group having a substituent, an alkylphosphonium group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like. In terms of high radical reactivity, preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Examples of the substituent which can be introduced include the same as those of the above formula (丨). Further, Y represents an oxygen atom, a sulfur atom, or -N (R12) _. The R12 is synonymous with the case of R12 of the above formula (1), and the preferred examples are also the same. [化8], 11 _z_
I -c=c 通式(3) R9 R10 22 201235781 41436pif 於所述通式⑴+,R9〜Rll分別獨立地表示氫原子 或1價基。 所述R並無特別限制,可視需要而適宜選擇,例如可 歹JJ舉氫原子或亦可具有取代基之絲等。於自由基反應性 同之方面而言,該些基中較佳的是氳原子、曱基。 所述RQ及R11並無特別限制,可視需要而適宜選擇, 例,可列舉氫原子、㈣原子、胺基、二烧基胺基 、羧基、 燒氧基祕、續基、;肖基、氰基、亦可具有取代基之烧基、 亦可具有取代基之芳基、亦可具有取代基之錄基、亦可 具有取代基之芳氧基、亦可具有取代基之絲胺基、亦可 具有取代基之芳基胺基、亦可具有取代基之烷基磺醯基、 亦可具有取代基之芳基磺醯基等。於自由基反應性高之方 面而言,該些基中較佳的是氫原子、羧基、烷氧基羰基、 亦可具有取代基之烷基、亦可具有取代基之芳基。 此處’可導入之取代基可例示與所述通式(1 )相同老 等。,且,於所述通式(3)中,z表示氧原子、硫原子、 N(R )_、或亦可具有取代基之伸苯基(phenylene)。所述 R13並無特別限制,可視需要而適宜選擇,例如可列舉亦町 具有取代基之烷基等。於自由基反應性高之方面而言,該 些基中較佳的是曱基、乙基、異丙基。 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 是以如下之化合物的反應產物所表示之結構單元為基本骨 架的聚胺基曱酸@旨樹脂:下述通式(4)所表示之二異氰酸 酉旨化合物之至少1種與下述通式(5)所表示之二醇化合物 23 201235781 41436pif 之至少1種。 OCN-X°-NCO ...通式(4) HO-Y°-〇H . ··通式(5 ) 於所述通式(4)及所述通式(5)中,X0、Υ0分別獨 立地表示2價有機殘基(organic residue )。 如果所述通式(4)所表示之二異氰酸酯化合物、或所 述通式(5)所表示之二醇化合物之至少任意一方具有所述 通式(1)〜通式(3)所表示之基中之至少1個,則生成 於側鏈導入有所述通式(1)〜通式(3)所表示之基的聚 胺基曱酸醋樹脂作為該二異氰酸酯化合物與該二醇化合物 之反應產物。藉由所述方法,可較於聚胺基甲酸酯樹脂之 反應生成後對所期望之側鏈進行取代及/或導入而言更容 易地製造於側鏈導人有所述通式⑴〜通式⑶所表示 之基的聚胺基曱酸酯樹脂。 制 ,表示之二異氛酸醋化合物並無特別限 酷化如可列舉可藉由使三異氮酸 广化合物二具成=== 述3氰酸§旨化合物並無特別限制,可視需要 宜選擇,例如可列』饥而要 澤日本專利特開2GG5-25G438號公幸 24 201235781 41436pif 段落「0034」〜段落「0035」十所記載之化合物等。 所述具有乙烯性不飽和基之單官能醇或所述單官能胺 化合物並無特別限制,可視需要而適宜選擇,例如可列舉 曰本專利特開2005-250438號公報之段落「〇〇37」〜段落 「0040」中所記載之化合物等。 〆 此處,於所述聚胺基甲酸酯樹脂之側鏈導入乙烯性不 飽和基的方法並無特別限制,可視需要而適宜選擇,較佳 的是使用於側鏈含有乙烯性不飽和基的二異氰酸酯化合物 作為製造聚胺基曱酸酯樹脂之原料的方法。所述二異氰酸 酯化合物並無特別限制,可視需要而適宜選擇,可列舉可 藉=使三異氰酸酯化合物與丨當量之具有乙烯性不飽和基 之單g能醇或單官能胺化合物進行加成反應而所得之二異 氰酸酯化合物,例如日本專利特開2〇〇5_25〇438號公報之 段落「0042」〜段落「〇〇49」中所記載之於側鏈具有乙烯 性不飽和基之化合物等。 作為所述於侧鏈具有乙烯性不飽和基之聚胺基曱酸酯 樹脂,自使與感光性組成物中之其他成分的相溶性提高、 使保存穩定性提高等觀點考慮,亦可共聚所述含有乙烯性 不飽和基之二異氰酸酯化合物以外的二異氰酸酯化合物。 所述共t之一異氰酸醋化合物並無特別限制,可視需 要而適宜選擇,例如可列舉下述通式所表示之二異氰 酸酯化合物等。 ~ OCN-L -NCO ·’’通式(6) 25 201235781 41435plf 於所述通式(6)中,U表示亦可具有取 較佳的是院基、芳炫基、芳基、燒氧基、函基之ς—者 0 脂:族或芳香族烴基。Li亦可視需要而具有並不盥 異亂^旨基反應之其他官能基,例如s旨基、胺基曱酸酉旨基、、 醯胺基、脲基之任一者。 土 所述通式⑷所表示之二異氰酸醋化合物並無 制,可視需要而適宜選擇,例如可列舉如2,4_甲笨二: 酸酯、2,4-甲苯二異氰酸酯之二聚體、2,6-卜U k y夕^氘 〜vw才、一卜、對苯二亞甲基二異氰酸酯、間‘二二 f基二異氛酸S旨、4,4,·二苯基m二異驗自旨],5 _其了 氛酸醋、3,3’-二甲基聯苯_4,4,_二異氰酸醋等這樣的 二異氰酸·合物;六亞甲基二異氰酸酯、三甲基 矢 基二異氰酸醋、離胺酸二異氰酸酯、二聚酸二異^ : 脂肪族二異氰酸酯化合物;異佛爾酮二異氰酸酯、4曰 甲基雙(環己基異氰㈣)、甲基環己炫_2,4(或2,6)’—、亞 氰酸酯、1,3·(異氰酸酯基甲基)環己烧等脂環族二異 = 化合物;1莫耳1,3·丁二醇與2莫耳甲苯二異氰酸久略 成物等作為二醇與二異氰酸酯之反應物之二異氰酸酯力σ 物等。該些化合物可單獨使用〗種,亦可併用2種以上σ 所述通式(5)所表示之二醇化合物並無特別限制, 視需要而適宜選擇,例如可列舉聚醚二醇化合物、负、可 醇化合物、聚碳酸酯二醇化合物等高分子二醇化合物®曰〜 二醇、新戊二醇等低分子二醇化合物;具有乙烯性不飽 26 201235781 基之二醇化合物;具有羧酸基之二醇化合物等。 此處’作為於聚胺基曱酸酯樹脂之側鏈導入乙烯性不 飽和基的方法’除了前述方法以外,使用於側鏈含有乙烯 性不飽和基之二醇化合物作為製造胺基甲酸酯樹脂之原料 的方法亦較佳。所述於側鏈含有乙烯性不飽和基之二醇化 合物例如可為如三羥甲基丙烷單烯丙基醚這樣的市售之化 合物L亦可列舉可藉由鹵化二醇化合物、三醇化合物、胺 ,一醇化合物等化合物與含有乙烯性不飽和基之羧酸、醯 氯、異氰酸醋、醇、胺、硫醇、鹵化烧基化合物等化合物 之反應而容易地製造之化合物等。 所述於側鏈含有乙烯性不飽和基之二醇化合物並無特 別限制,可視需要而適宜選擇,例如可列舉曰本專利特開 如〇5-250438號公報之段落「〇〇57」〜段落「〇〇6〇」中所 記載之化合物、日本專利特開2〇〇5_25〇438號公報之段落 ,「_5」〜段落「議1」中所記載之藉由二醇化合物使四 繞酸二酐開環而成之化合物、下述赋⑹所表示之日 ,專利特開2.25G438號公報之段落「顯」〜段落 〇〇66」中所記載之化合物等。該些化合物中較佳的是下 述通式(G)所表示之日本專利特開2〇〇5_25〇438號公 之段落「0064」〜段落「0066」中所記載之化合物。 27 201235781 41436plf [化9]I - c = c General formula (3) R9 R10 22 201235781 41436pif In the above formula (1) +, R9 to R11 each independently represent a hydrogen atom or a monovalent group. The R is not particularly limited and may be appropriately selected as needed. For example, it may be a hydrogen atom or a filament which may have a substituent. In terms of radical reactivity, among these groups, a ruthenium atom or a ruthenium group is preferred. The RQ and R11 are not particularly limited and may be appropriately selected as needed, and examples thereof include a hydrogen atom, a (tetra) atom, an amine group, a dialkylamino group, a carboxyl group, an alkoxy group, a thiol group, a Schottky group, and a cyanogen group. a base group, an alkyl group which may have a substituent, an aryl group which may have a substituent, a substituent group which may have a substituent, an aryloxy group which may have a substituent, a silk amine group which may have a substituent, An arylamine group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like. In the case of high radical reactivity, preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Here, the substituent which can be introduced can be exemplified as the same as the above formula (1). Further, in the above formula (3), z represents an oxygen atom, a sulfur atom, N(R)_, or a phenylene group which may have a substituent. The R13 is not particularly limited, and may be appropriately selected as needed. For example, an alkyl group having a substituent may be mentioned. Preferred among these groups are a mercapto group, an ethyl group, and an isopropyl group in terms of high radical reactivity. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain is a polyamino phthalic acid which is a basic skeleton represented by a reaction product of the following compound: a resin: a general formula ( 4) At least one of the diisocyanate compound represented by the formula and at least one of the diol compound 23 201235781 41436pif represented by the following formula (5). OCN-X°-NCO Formula (4) HO-Y°-〇H. ·· (5) In the above formula (4) and the formula (5), X0, Υ0 The divalent organic residue is independently represented. At least one of the diisocyanate compound represented by the above formula (4) or the diol compound represented by the formula (5) has the formula (1) to the formula (3). In the case where at least one of the groups is formed, a polyamino phthalic acid resin in which a group represented by the above formula (1) to formula (3) is introduced as a side chain is formed as the diisocyanate compound and the diol compound. reaction product. By the method, the substitution of the desired side chain and the introduction of the desired side chain after the reaction of the polyurethane resin can be more easily produced in the side chain, and the general formula (1) is A polyamino phthalate resin represented by the formula (3). The method of the present invention is not particularly limited, as shown in the following. Selection, for example, can be listed as "Hungry", Japanese Patent Special Open 2GG5-25G438 No. 24 201235781 41436pif Paragraph "0034" ~ Paragraph "0035" Ten compounds and the like. The monofunctional alcohol or the monofunctional amine compound having an ethylenically unsaturated group is not particularly limited and may be appropriately selected as needed, and for example, the paragraph "〇〇37" of the Japanese Patent Laid-Open Publication No. 2005-250438 ~ The compound described in paragraph "0040". Here, the method of introducing the ethylenically unsaturated group into the side chain of the polyurethane resin is not particularly limited, and may be appropriately selected as needed, and it is preferably used in the side chain to contain an ethylenically unsaturated group. A diisocyanate compound is used as a raw material for producing a polyamino phthalate resin. The diisocyanate compound is not particularly limited and may be appropriately selected as needed, and may be an addition reaction of a triisocyanate compound and a fluorene-equivalent mono-g-alcohol or a mono-functional amine compound having an ethylenically unsaturated group. The obtained diisocyanate compound is, for example, a compound having an ethylenically unsaturated group in a side chain as described in paragraph "0042" to paragraph "〇〇49" of the Japanese Patent Publication No. 2-5_25. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain may be copolymerized from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. A diisocyanate compound other than the diisocyanate compound containing an ethylenically unsaturated group. The isocyanate compound is not particularly limited and may be appropriately selected, and examples thereof include a diisocyanate compound represented by the following formula. ~ OCN-L -NCO · '' General formula (6) 25 201235781 41435plf In the above formula (6), U represents that it may have a preferred group, an aromatic group, an aryl group, an alkoxy group. , the letter of the base - 0 grease: family or aromatic hydrocarbon group. Li may also have any other functional group which does not interfere with the reaction, such as an s group, an amino ruthenate group, an anthranyl group or a ureido group, as needed. The diisocyanate compound represented by the above formula (4) is not prepared, and may be appropriately selected as needed, and examples thereof include dimerization of 2, 4-methyl 2: acid ester and 2, 4-toluene diisocyanate. Body, 2,6-Bu U ky 夕 ^氘~vw, 卜, p-xylylene diisocyanate, m-di-di-f-diiso-acid S, 4,4, · diphenyl m The second is the same as the purpose], 5 _ which is a diisocyanate compound such as sulphuric acid vinegar, 3,3'-dimethylbiphenyl _4,4, _ diisocyanate vinegar; Diisocyanate, trimethylylidene diisocyanate, leucine diisocyanate, dimer acid diisocyanate : aliphatic diisocyanate compound; isophorone diisocyanate, 4 曰 methyl bis (cyclohexyliso) An alicyclic diiso-compound such as cyanide (tetra)), methylcyclohexan-2,4 (or 2,6)'-, cyanocyanate, 1,3·(isocyanatemethyl)cyclohexene; A diisocyanate force such as a reaction product of a diol and a diisocyanate, such as a molar 1,3·butanediol and a 2 mol of toluene diisocyanate. These compounds may be used alone or in combination of two or more kinds of σ. The diol compound represented by the above formula (5) is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a polyether diol compound and a negative a high molecular weight diol compound such as a phenol compound or a polycarbonate diol compound, a low molecular diol compound such as a diol or a neopentyl glycol; a diol compound having an ethylenic unsaturated 26 201235781 group; a diol compound or the like. Here, 'the method of introducing an ethylenically unsaturated group to the side chain of the polyamino phthalate resin' is used for producing a urethane in addition to the above-mentioned method, using a diol compound having an ethylenically unsaturated group in a side chain. The method of the raw material of the resin is also preferred. The diol compound having an ethylenically unsaturated group in the side chain may be, for example, a commercially available compound L such as trimethylolpropane monoallyl ether, and may also be exemplified by a halogenated diol compound or a triol compound. A compound which can be easily produced by reacting a compound such as an amine or a monool compound with a compound containing an ethylenically unsaturated group such as a carboxylic acid, an oxime chloride, an isocyanate, an alcohol, an amine, a thiol or a halogenated alkyl compound. The diol compound having an ethylenically unsaturated group in the side chain is not particularly limited, and may be appropriately selected as needed. For example, the paragraph "〇〇57" of the Japanese Patent Laid-Open Publication No. 5-250438- The compound described in "〇〇6〇", the paragraph of the Japanese Patent Laid-Open Publication No. 2〇〇5_25〇438, the "_5" to the paragraph "1", the tetracarboxylic acid by the diol compound A compound obtained by ring-opening an anhydride, a compound represented by the following paragraph (6), and a compound described in the paragraph "display" to paragraph 66 of the Japanese Patent Laid-Open Publication No. 2.25G438. Preferred among these compounds are the compounds described in the paragraph "0064" to "0066" of the Japanese Patent Laid-Open Publication No. Hei 2-5_25 438, which is represented by the following formula (G). 27 201235781 41436plf [Chemistry 9]
通式⑹ 於所述通式(G)中,R1〜R3分別獨立地表示氫原子 或1價基’ A表示2價有機殘基,X表示氧原子、硫原子、 或-N(R12)-,所述Ri2表示氫原子、或1價有機基。 另外,所述通式(G)中之R1〜R3及X與所述通式(1) 中之R1〜R3及X同義,較佳之態樣亦相同。 藉由使用源自所述通式(G)所表示之二醇化合物之 聚胺基甲酸酯樹脂,藉由空間障礙大的2級醇所產生之抑 制聚合物主鏈之過剩之分子運動的效果,可達成層的覆膜 強度提高。 作為所述於侧鏈具有乙烯性不飽和基之聚胺基甲酸醋 樹脂,例如自使與感光性組成物中之其他成分的相溶性提 高、使保存穩定性提高等觀點考慮,可共聚所述於側鏈含 有乙烯性不飽和基之二醇化合物以外的二醇化合物。 所述於側鏈含有乙烯性不飽和基之二醇化合物以外的 二醇化合物並無特觀制’可視需要㈣宜麟,例如可 列舉聚醚二醇化合物、聚酯二醇化合物、聚碳酸酯二醇化 28 201235781 合物等。 選擇所制,可視需要而適宜 落「=;?「_」===報之段 所达H醇化合物並無特 , « ^ 2〇〇5,5〇T3:;t:;: ^「〇〇77^段落「0079」、段落「_3」〜段落「〇〇85」 中之㈤〜^及胤13〜No.18中所記載之化合物等。 所«石反酸醋二醇化合物並無特別限制,可視需要而 適宜選擇’例如可列舉日本專利特開2〇〇5_25〇438號公報 之段落「0080」〜段落「〇081」及段落「〇〇84」中之^^^ 〜Νο·12中所記載之化合物等。 而且,於所述於側鏈具有乙烯性不飽和基之聚胺基曱 酸酯樹脂之合成中’除了上述二醇化合物以外,亦可併用 具有並不與異氰酸酯基反應之取代基之二醇化合物。 所述具有並不與異氰酸酯基反應之取代基之二醇化合 物並無特別限制,可視需要而適宜選擇,例如可列舉曰本 專利特開2005-250438號公報之段落「0087」〜段落「〇〇88」 中所記載之化合物等。 另外,於所述於侧鏈具有乙烯性不飽和基之聚胺基曱 酸酯樹脂之合成中,除了上述二醇化合物以外,亦可併用 具有叛基之二醇化合物。所述具有幾·基之二醇化合物並無 特別限制,可視需要而適宜選擇’例如可列舉下述通式(8) 〜通式(10)所表示之化合物等。 29 ,15 201235781 41436pif [化 10] ho-l9-c-l10-oh 通式(8) L11In the above formula (G), R1 to R3 each independently represent a hydrogen atom or a monovalent group 'A represents a divalent organic residue, and X represents an oxygen atom, a sulfur atom, or -N(R12)- The Ri2 represents a hydrogen atom or a monovalent organic group. Further, R1 to R3 and X in the above formula (G) are synonymous with R1 to R3 and X in the above formula (1), and preferred embodiments are also the same. By using a polyurethane resin derived from the diol compound represented by the general formula (G), the excessive molecular motion of the polymer main chain is inhibited by the sterically hindered second-order alcohol. The effect is that the film strength of the layer can be improved. The polyamino formate resin having an ethylenically unsaturated group in the side chain may be copolymerized, for example, from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. A diol compound other than a diol compound containing an ethylenically unsaturated group in a side chain. The diol compound other than the diol compound containing an ethylenically unsaturated group in the side chain is not specifically required. [IV] Yilin, for example, a polyether diol compound, a polyester diol compound, and a polycarbonate may be mentioned. Glycolation 28 201235781 Compound, etc. Select the system, and it is appropriate to fall as needed. "=;?"_"=== The H-alcohol compound in the paragraph is not special, « ^ 2〇〇5,5〇T3:;t:;: ^"〇化合物 77^ Paragraph "0079", paragraph "_3" - paragraph "〇〇85" (5) ~ ^ and 胤 13 ~ No. 18 compounds and the like. The "stea vinegar diol compound is not particularly limited and may be appropriately selected as needed", for example, paragraph "0080" to paragraph "〇081" and paragraph "〇" of Japanese Patent Laid-Open Publication No. 2_5_25〇438 The compound described in ^^^~Νο·12 in 〇84". Further, in the synthesis of the polyamino phthalate resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a substituent which does not react with an isocyanate group may be used in combination. . The diol compound having a substituent which does not react with an isocyanate group is not particularly limited and may be appropriately selected as needed, and for example, the paragraph "0087" to the paragraph "〇〇" of the Japanese Patent Laid-Open Publication No. 2005-250438 The compound described in 88". Further, in the synthesis of the polyamino phthalate resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a thiol group may be used in combination. The diol compound having a hydrazine group is not particularly limited, and may be appropriately selected as needed. For example, a compound represented by the following formula (8) to formula (10) may, for example, be mentioned. 29 , 15 201235781 41436pif [化 10] ho-l9-c-l10-oh General formula (8) L11
COOHCOOH
H〇-L9-Ar~L10-〇H 通式(9)H〇-L9-Ar~L10-〇H General formula (9)
COOHCOOH
HO-L9—N-L10-〇HHO-L9-N-L10-〇H
COOH 通式(10) 於所述通式(8)〜通式(10)中,R15表示氫原子、 亦可具有取代基(例如包括氰基、二卜口基(nitro group)、 鹵素原子(-F、-C卜-Br、-I)、-CONH2、-COOR16、-OR16、 -NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16 (此 處,所述R16表示碳數為1〜l〇之烷基、或碳數為7〜l5 之芳烧基)等各基)之烷基、芳烷基、芳基、烧氧基、芳 氧基。該些基中較佳的是氫原子、碳數為丨個〜8個之烷 基、碳數為6個〜15個之芳基。 於所述通式(8)〜通式(1〇)中,乙9、[10、l11可八 =目=可不同,表示單鍵、亦可具有取代基(例如較^ ,”基、芳基、烧氣基、-基之各基)之2價 之月日肪族或芳香族烴基。該些基 β山 、 20摘夕柚岭甘中車又佳的疋碳數為1個〜 之伸烧基、讀為6個〜15個之伸芳基,更佳的是碳 201235781 414i0plt 數為1個〜8個之伸烧基。而且,於所述L9〜Lll中亦可視 需要而具有並不與異氰酸醋基反應之其他官能基,例如^ 基、S曰基、胺基曱酸g旨基、醯胺基、腺基、趟基。另外, ,亦可由所述R15、L' L8、L9中之2個或3個而形成環。 於所述通式(9)中,Ar只要是表示亦可具有取代基 之3價芳香族烴基者,則並無特別限制,可視需要而適^ 選擇’較佳的是碳數為6個〜15個之芳香族基。 所述通式(8)〜通式(10)所表示之具有緩基之二醇 化合物並無特別限制,可視需要而適宜選擇,例如可列舉 3,5-二羥基苯曱酸、2,2-雙(羥基曱基)丙酸、2,2_雙(2_經^ 乙基)丙酸、2,2-雙(3-羥基丙基)丙酸、雙(羥基曱基)乙酸、 雙(4-羥基苯基)乙酸、2,2-雙(羥基甲基)丁酸、4,4_雙(4_声 基苯基)戊酸、酒石酸、Ν,Ν-二羥基乙基甘胺酸、 經基乙基)-3-叛基-丙醯胺等。 由於此種叛基之存在,可賦予聚胺基曱酸酯樹脂氫鍵 結性與鹼可溶性等特性,於此方面而言較佳。更具體而言, 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂是進 一步於侧鏈具有羧基之樹脂,更具體而言,側鏈之乙烯性 不飽和基較佳的是〇.〇5 mmol/g〜3.0 mmol/g,更佳的是〇 5 mmol/g 〜2.7 mmol/g,特佳的是 0.75 mm〇l/g 〜2.4 mmol/g,且較佳的是於側鏈具有羧基,酸值較佳的是2〇 mgKOH/g〜120 mgKOH/g ’ 更佳的是 30 mgKOH/g〜110 mgKOH/g ’ 特佳的是 35 mgKOH/g〜1〇〇 mgKOH/g。 另外,所述酸值例如可依據JIS K0070而測定。其中, 31 201235781 41436pif 於樣品並不溶解之情形時,使用二噁烷或四氫呋喃等作為 溶劑。 所述於側鏈具有乙烯性不飽和基之聚胺基甲酸酯樹脂 可藉由如下方式而合成:將上述二異氰_旨化合物及二醇 化合物,於非質子性溶射添加與各自之反應性對應之活 性之公知觸而進行加熱。合成巾所使狀二異氰酸醋以 及二醇化合物之莫耳比(Ma : Mb)並無制關,可視需 要而適宜選擇,較佳的是!:卜12 :卜藉由以醇類或胺 類等進行處理’以最終並不殘存異氛義基之形態合成具 有分子量或黏度等所期望之物性的產物。 〃 而且’所述於側鏈具有乙烯性不飽和基之聚胺基甲酸 醋樹脂亦可適宜制於聚合物末端、主鏈具有乙触不飽 和基之聚胺基甲酸賴脂。藉由於聚合物末端、主鍵 乙婦性不飽和基,可進-步使感光性組成物與於側鍵^ 乙烯性不飽和基之聚胺基曱酸軸脂之間、或__有 乙烯性不飽和基之聚胺基fs《s旨樹脂 可 高,使光硬化物強度增加。其結果,於平版印= 用於側鏈具有乙雜不飽和基之純㈣ 提供強韌性優異之材料。 辦細吟 下 於聚合物末端導人叫料飽和基之 所示之方法。亦即,使用上述之於側鏈具有乙 基之聚胺基甲咖職之合成步驟巾的聚合物末端之° 異氰酸錄,與於藉由醇類或胺類等進行處理之 ^ 使用具有乙烯性不飽和基之醇類或胺類等即可。/ 32 201235781 414i〇pit 作為此種化合物,具體而言首先可列舉與作為具有乙 烯性不飽和基之單官能醇或單官能胺化合物而列舉之例示 化合物相同之化合物。 另外,自導入量之控制容易且可使導入量增加,而且 使交聯反應效率提高等觀點考慮,較佳的是與聚合物末端 相比而言更向聚合物側鏈導入乙烯性不飽和基。 所導入之乙炸性不飽和基並無特別限制,可視需要而 適宜選擇,於交聯硬化膜形成性之方面而言,較佳的是稀 丙基、甲基丙烯醯基、丙烯醯基、乙烯基苯基,更佳的是 甲基丙烯醯基、丙烯醯基,於兼顧交聯硬化膜之形成性與 原始保存性之方面而言,特佳的是甲基丙烯醯基。 而且,甲基丙烯醯基之導入量並無特別限制,可視需 要而適宜選擇,以乙烯性不飽和基當量計而言較佳的: 0.05 mm〇1/g〜3.〇 mm〇1/g,更佳的是 〇5 職 疋 mm〇1/g ’ 特佳的是 〇.75 mm〇1/g〜2 4 。 · 於主鏈導入乙烯性不飽和基之方法,存 方向具有乙烯性錢和基 =研於主鏈 樹脂之合成中的方法二==聚胺基曱酸醋 基之二醇化合物並無特別限制,=要=性不飽和 列舉順-2-丁締从二醇^ 要而適宜選擇,可 醇等。 丁烯-1,4-一醇、聚丁二烯二 亦可和基之聚胺基甲_樹脂 含具有與該特定聚胺基甲二 33 201235781 41436pif 酸醋樹脂。例如’所述於側鏈具有乙烯性 基甲酸_脂可併线及/_鏈含 ^ ^ 胺基曱酸酯樹脂。 方香鉍基之聚 作為所述⑴於側鏈具有乙烯性不飽和基之聚胺其甲 酸酷樹脂之具體例,例如可列舉日本專利特開細5_25二38 號公報之段落「0293」〜段落「0310」中所示之ρ ι〜ρ 3ΐ 之聚合物等。該些化合物中較佳的是段落「〇3〇8」及段落 「0309」中所示之P-27及P-28之聚合物。 --(ii) g有緩基之聚胺基曱酸g旨與於分子中具有環氧 基及乙烯性不飽和基之化合物反絲所得之聚胺基甲酸醋 樹脂- 所述含有羧基之聚胺基曱酸酯與於分子中具有環氧基 及乙烯性不飽和基之化合物反應而所得之聚胺基曱酸酯樹 脂是以二異氰酸酯與含有羧酸基之二醇為必需成分的含有 羧基之聚胺基曱酸酯、與於分子中具有環氧基及乙烯性不 飽和基之化合物反應而所得之聚胺基甲酸酯樹脂。亦可視 需要而添加作為二醇成分之重量平均分子量為3〇〇以下之 低分子二醇或重量平均分子量為500以上之低分子二醇作 為共聚成分。 藉由使用所述聚胺基曱酸醋樹脂,與無機填充劑之穩 定之分散性或抗龜裂性或耐衝擊性優異,因此耐熱性、耐 濕熱性、密接性、機械特性、電氣特性提高。COOH Formula (10) In the above formula (8) to formula (10), R15 represents a hydrogen atom, and may have a substituent (for example, including a cyano group, a nitro group, a halogen atom ( -F, -Cb-Br, -I), -CONH2, -COOR16, -OR16, -NHCONHR16, -NHCOOR16, -NHCOR16, -OCONHR16 (here, R16 represents an alkane having a carbon number of 1 to 10 Å) An alkyl group, an aralkyl group, an aryl group, an alkoxy group or an aryloxy group of each group such as a group or a aryl group having a carbon number of 7 to 15; Preferred among these groups are a hydrogen atom, an alkyl group having a carbon number of ~8, and an aryl group having 6 to 15 carbon atoms. In the above formula (8) to formula (1〇), B9, [10, l11 may be eight = mesh = may be different, and may represent a single bond, and may also have a substituent (for example, ^, ke, fang) The base of the base, the gas-burning base, the base of the base, the divalent month of the aliphatic or aromatic hydrocarbon group. The bases of the β-mountain, the 20th pick-up idyllic gansu car have a good carbon number of one ~ The stretching base is read as 6 to 15 aryl groups, and more preferably, the carbon 201235781 414i0plt number is 1 to 8 stretching bases. Moreover, in the L9 to L11, it is also possible to have Other functional groups which do not react with isocyanate groups, such as, for example, a sulfhydryl group, an amino decanoic acid group, an amidino group, a gland group, a fluorenyl group. Alternatively, the R15, L' may also be used. In the above formula (9), Ar is not particularly limited as long as it is a trivalent aromatic hydrocarbon group which may have a substituent, and may be optionally used. The diol compound having a carbon number of 6 to 15 is preferably selected. The diol compound having a slow group represented by the above formula (8) to formula (10) is not particularly limited and can be visualized. Need and appropriate choice, examples Examples thereof include 3,5-dihydroxybenzoic acid, 2,2-bis(hydroxyindenyl)propionic acid, 2,2-bis(2-hydroxyethyl)propionic acid, and 2,2-bis(3-hydroxyl). Propyl) propionic acid, bis(hydroxyindenyl)acetic acid, bis(4-hydroxyphenyl)acetic acid, 2,2-bis(hydroxymethyl)butyric acid, 4,4-bis(4-ylphenyl) Valeric acid, tartaric acid, hydrazine, hydrazine-dihydroxyethylglycine, transylethyl)-3-refenyl-propionamide, etc. Due to the existence of such a ruthenium, a polyamine phthalate resin can be imparted. The characteristics such as hydrogen bonding property and alkali solubility are preferable in this respect. More specifically, the polyamino phthalate resin having an ethylenically unsaturated group in a side chain further has a carboxyl group in a side chain. The resin, more specifically, the ethylenically unsaturated group of the side chain is preferably 〇. 5 mmol/g to 3.0 mmol/g, more preferably 〇5 mmol/g to 2.7 mmol/g, particularly preferred. It is 0.75 mm 〇l / g to 2.4 mmol / g, and preferably has a carboxyl group in the side chain, and the acid value is preferably 2 〇 mg KOH / g to 120 mg KOH / g ' More preferably 30 mg KOH / g ~ 110 mgKOH/g ' is particularly preferably 35 mgKOH/g to 1 〇〇mgKOH/g. Further, the acid value can be, for example, according to JIS K0070 Whereas, 31 201235781 41436pif When the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The polyurethane resin having an ethylenically unsaturated group in the side chain can be as follows Synthetic method: The above-mentioned diisocyanate compound and the diol compound are heated by a known contact with an activity corresponding to the reactivity of each aprotic solvent. The molar ratio of the isocyanuric acid vinegar and the diol compound (Ma: Mb) of the synthetic towel is not controlled, and may be appropriately selected as needed, preferably! :Bu 12: By treating with an alcohol or an amine or the like, a product having a desired physical property such as molecular weight or viscosity is synthesized in such a manner that the heterogeneous group is not left at all. Further, the polyamino carboxylic acid resin having an ethylenically unsaturated group in the side chain may be suitably prepared from a polyamido lysate having a terminal unsaturated group and a B-unsaturated group in the main chain. By virtue of the polymer terminal and the primary bond ethylenically unsaturated group, the photosensitive composition can be further advanced between the polyamino phthalic acid oleic acid ester having a side bond and an ethylenically unsaturated group, or __ethylidene The polyamine group fs of the unsaturated group can be high in resin, and the intensity of the photocured material is increased. As a result, in the lithographic printing = pure for the side chain having an ethylenically unsaturated group (IV), it provides a material excellent in toughness. The method of introducing a saturated base at the end of the polymer is described. That is, the isocyanate of the polymer end of the synthetic step towel having the above-mentioned polyaminocarbamate having an ethyl group in the side chain is used, and is treated with an alcohol or an amine or the like. The alcohol or the amine of the ethylenically unsaturated group may be used. / 32 201235781 414i〇pit As the compound, specifically, the same compound as the exemplified compound exemplified as the monofunctional alcohol or the monofunctional amine compound having an ethylenically unsaturated group can be mentioned. Further, from the viewpoints of easy control of the amount of introduction, increase in the amount of introduction, and improvement in the efficiency of crosslinking reaction, it is preferred to introduce an ethylenically unsaturated group into the polymer side chain as compared with the polymer terminal. . The ethylenically unsaturated group to be introduced is not particularly limited, and may be appropriately selected as needed. From the viewpoint of the formability of the crosslinked cured film, a propyl group, a methacryl fluorenyl group, an acryl fluorenyl group, The vinyl phenyl group is more preferably a methacryl fluorenyl group or an acryl fluorenyl group, and a methacryl fluorenyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the original preservability. Further, the amount of the methacrylonitrile group introduced is not particularly limited, and may be appropriately selected as needed, and is preferably in terms of ethylenically unsaturated group equivalent: 0.05 mm 〇 1 /g 〜3. 〇mm 〇 1 / g More preferably, 〇5 jobs 疋mm〇1/g ' Particularly good is 〇.75 mm〇1/g~2 4 . · A method of introducing an ethylenically unsaturated group into a main chain, and having a vinyl group and a base = a method of synthesizing in the synthesis of a main chain resin; a diol compound of a polyamino phthalic acid ketone group is not particularly limited , = = = Sexually unsaturated, cis-2-butane is selected from the diol, and may be selected as an alcohol. Butene-1,4-monool, polybutadiene di- and poly-amino-methyl-resin are contained with the specific polyaminocarbamate 33 201235781 41436 pif acid vinegar resin. For example, the side chain has an ethylenic acid-ester which may be conjugated and/or a chain containing an amine phthalate resin. As a specific example of the above-mentioned (1) polyamine having an ethylenically unsaturated group in the side chain, the formic acid resin is exemplified, for example, the paragraph "0293" of the Japanese Patent Laid-Open Publication No. Hei. A polymer such as ρ ι ρ 3 所示 shown in "0310". Preferred among these compounds are the polymers of P-27 and P-28 shown in the paragraph "〇3〇8" and paragraph "0309". -- (ii) a polyamino phthalic acid having a slow-setting group, and a polyamino carboxylic acid resin obtained by inversely reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule - the carboxyl group-containing poly The polyamino phthalate resin obtained by reacting an amino phthalic acid ester with a compound having an epoxy group and an ethylenically unsaturated group in the molecule is a carboxyl group containing a diisocyanate and a diol having a carboxylic acid group as an essential component. A polyurethane resin obtained by reacting a polyamino phthalate with a compound having an epoxy group and an ethylenically unsaturated group in the molecule. A low molecular weight diol having a weight average molecular weight of 3 Å or less or a low molecular weight diol having a weight average molecular weight of 500 or more as a diol component may be added as a copolymerization component. By using the polyamino phthalic acid vinegar resin, it is excellent in stable dispersibility, crack resistance or impact resistance with an inorganic filler, and thus heat resistance, moist heat resistance, adhesion, mechanical properties, and electrical properties are improved. .
而且’所述聚胺基甲酸酯樹脂是以亦可具有取代基之 二價脂肪族以及芳香族烴之二異氰酸酯、與C原子以及N 34 201235781 41436pif 原子之任一者介隔而具有COOH基與2個〇11基之含有羧 酸之二醇為必而成分的反應物,且亦可為所得之反應物盥 介隔-COO-鍵而於分子中具有環氧基與乙烯性不飽和基^ 化合物反應而所得之化合物。 而且,所述聚胺基曱酸酯樹脂亦可為以下述通式(u) 所表示之二異氰酸酯與選自下述通式(12_n〜通式(12_3) 所示之含有羧酸基之二醇的至少1種為必需成分之產物、 與下述通式(m)〜通式⑴叫所示之於分子中具有 環氧基及乙烯性不飽和基之化合物進行反應而所得之化合 物。 [化 11] OCN-Ri-NCO 通式(11 ) l2 HO— R3 — C—R4 —OH ψ 通式(12-1) COOH HO—R3—Ar— R4-〇h i5 COOH 通式(12-2) HO—R3—N— r4——〇H COOH 通式(12-3) (例如較佳的是絲,基、芳R基表具ί 35 201235781 41436pif 一者)之二價之脂肪族或芳香族煙。所述Rl亦可視需要而 具有並不與異氰酸酯基反應之其他官能基,例如酯基、胺 基甲酸酯基、醯胺基、脲基之任一者。於所述通式(12-1 ) 中,R2表示氫原子、亦可具有取代基(例如包括氰基、二 卜口基、鹵素原子(-F ' -Cl、-Br、-I)、-CONH2、-COOR6、 ,0R6、-NHCONHR6、-NHC00R6、-NHCOR6、-OCONHR6、 -CONHR6 (此處’ R6表示碳數為丨〜川之烷基、碳數為7 〜D之方烷基之任一者)等各基)之烷基、芳烷基、芳基 烷氧基、或芳氧基。該些基中較佳的是氫原子、碳數為 個〜3個之烷基、碳數為6個〜15個之芳基。於所述通^ (12-1)、通式(12_2)及通式(12 3)中,^、^及 r 了分別相同亦可不同,表示單鍵、亦可具有取代基(例女 較^的是絲、芳燒基、芳基、烧氧基、i基之各基)^ -價之脂肪族或芳香族烴。該些基巾較佳的是碳數 〜2〇個之伸烷基、碳數為ό個〜15個之伸芳基,更佳的θ 2為個之伸烷基。而且,㈣述R3、H 其“具有並不與異氰_基反叙其他官爾 i之==基、賴基、胺基甲酸醋基、醯胺基、脲基、函 ^ 者。另外’亦可由所述R2、R3、中之‘ 烴:較佳表示亦可具有取代基之三價芳彻 孕乂佳的疋奴數為6個〜15個之芳香族基。 36 201235781 414i0plt [化 12] CH2=CRi4-COO-QH2=CRi4COO— Ri5- CH2==CR^4COO~ ΌFurther, the polyurethane resin has a COOH group interposed between a divalent aliphatic group having a substituent and a diisocyanate of an aromatic hydrocarbon, and a C atom and any one of N 34 201235781 41436 pif atoms. And a reaction product of two 〇11-based carboxylic acid-containing diols, which may be a necessary component, and may also have an epoxy group and an ethylenically unsaturated group in the molecule by the resulting reactant 盥--COO-bond. ^ A compound obtained by reacting a compound. Further, the polyamino phthalate resin may be a diisocyanate represented by the following formula (u) and a carboxylic acid group selected from the group consisting of the following formula (12_n to formula (12-3)). At least one of the alcohols is a product of an essential component, and a compound obtained by reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule represented by the following formula (m) to formula (1). 11] OCN-Ri-NCO General formula (11) l2 HO— R3 — C—R 4 —OH ψ General formula (12-1) COOH HO—R 3 —Ar— R 4 —〇 h i5 COOH General formula (12-2 HO—R3—N—r4—〇H COOH A divalent aliphatic or aromatic compound of the formula (12-3) (for example, preferably a silk, a base, an aromatic R-based watch, ί 35 201235781 41436pif) The R1 may also have any other functional group which does not react with the isocyanate group, such as an ester group, a urethane group, a guanamine group or a ureido group, as needed. In the formula -1), R2 represents a hydrogen atom, and may have a substituent (for example, including a cyano group, a di-branched group, a halogen atom (-F '-Cl, -Br, -I), -CONH2, -COOR6, , 0R6 -NHCONHR6, -NHC00R6, -NHCOR6, -OCONHR6, -CONHR6 (wherein "R6 represents a carbon number of 丨~chuan alkyl group, and a carbon number of 7 to D of a square alkyl group") An alkyl group, an aralkyl group, an aryl alkoxy group or an aryloxy group. Preferred among these groups are a hydrogen atom, an alkyl group having a carbon number of ~3, and a carbon number of 6 to 15 In the above-mentioned (12-1), the general formula (12-2), and the general formula (12 3), ^, ^, and r are the same or different, and each represents a single bond, and may have a substituent ( The females are the aliphatic or aromatic hydrocarbons of the silk, the aryl group, the aryl group, the alkoxy group, and the i group. The base papers preferably have a carbon number of ~2〇. The alkyl group has a carbon number of 〜15 aryl groups, and more preferably θ 2 is an alkyl group. Moreover, (4) R3, H have "have not reacted with isocyanine-based other官尔 i == base, lysyl, amino carboxylic acid acetate, decylamino, ureido, and the other. Also 'from the R2, R3, of the 'hydrocarbon: preferably expressed or substituted The number of 疋 slaves of the trivalent fangs is 6 to 15 aromatic groups. 36 20123 5781 414i0plt [Chemical 12] CH2=CRi4-COO-QH2=CRi4COO— Ri5- CH2==CR^4COO~ Ό
OO
OO
0 通式(13-1) 通式(13-2) 通式(13-3) 通式(13-4) 通式(13-5) 通式(13-6) 通式(13-7) 通式(13-8) 37 201235781 41436pif [化 13]0 General formula (13-1) General formula (13-2) General formula (13-3) General formula (13-4) General formula (13-5) General formula (13-6) General formula (13-7) General formula (13-8) 37 201235781 41436pif [Chem. 13]
Rl4 01^2== CR-|4 CON—R15 CH OHRl4 01^2== CR-|4 CON—R15 CH OH
O 通式(13-9)O general formula (13-9)
Ch^^CRwCOORis HOCh^^CRwCOORis HO
CH2〇CO t>° 通式(13-10)CH2〇CO t>° General formula (13-10)
CH 严 CR14COOR15 HOCH Yan CR14COOR15 HO
ο ^16 CH== CRtj- C〇Ris〇*')p —CON RlS -〇-0000^-〇.0 通式(13-ΐυ 通式(13-12) 通式(13-13) 通式(13-14) oο ^16 CH== CRtj- C〇Ris〇*')p —CON RlS -〇-0000^-〇.0 General formula (13-ΐυ General formula (13-12) General formula (13-13) General formula (13-14) o
R15-0-(-C0R150->p—CONR16 通式(13-15) ^16 通式(13-16)R15-0-(-C0R150->p-CONR16 Formula (13-15) ^16 Formula (13-16)
CH2=CR1i,CCX5-R15-0(C0R150-)---€0NCH2=CR1i, CCX5-R15-0(C0R150-)---€0N
P I R15 o:P I R15 o:
R15-Of cor15〇^一^CONR16 P 其中,於所述通式(13-1)〜通式(13-16)中,R14 表示氫原子或曱基,R15表示碳數為1〜10之伸烷基,r16 表示碳數為1〜10之烴基。P表示0或1〜10之整數。 38 201235781 4i4j〇pir 所述聚胺基甲酸酯樹脂特別適宜的是使所述通式(il) 所表示之二異氰酸酯與選自所述通式(12_丨)〜通式(12_3) 所表示之含有羧酸基之二醇之至少!種的反應物,進一步 與所述通式⑴-υ〜通式⑴·16)之任—者所表示之於 分子中具有1個環氧基與至少丨個(甲基)丙雜的化合物 反應而所得之酸值為20 mgKOH/g〜120 mgK〇H/g之驗可 溶性光交聯性聚胺基甲酸酯樹脂。 該些高分子化合物可單獨使用,亦可併用2種以上。 …含有羧基之聚胺基甲酸酯與於分子中具有環氧基 及乙烯性不飽和基之化合物反應而所得之聚胺基甲酸酯樹 脂之合成法… 作為所述聚胺基曱酸酯樹脂之合成方法,可藉由如下 方式而合成:將上述二異氰酸酯化合物以及二醇化合物, 於非質子性溶劑中添加與各自之反應性對應之活性之公知 觸媒而進行加熱。所使用之二異氰酸酯以及二醇化合物之 莫耳比較佳的是0_8 : 1〜1_2 : 1,於聚合物末端殘存異氰 酸酯基之情形時,藉由醇類或胺類等進行處理而以最絡的 (C並不殘存異氰酸酯基之形態而合成。 —二異氰酸醋---· 所述通式(11)所表示之二異氰酸酯化合物並無特別 限制,可視需要而適宜選擇,例如可列舉日本專利特 2007-2030號公報之段落「〇〇21」中所記載之化合物等^ •…含有叛酸基之二醇…· 而且,所述通式(12-1)〜通式(12-3)所表示之具 39 201235781 41436pif 有叛基之二醇化合物並無特別限制,可視需要而適 擇’例如可列舉日本專利特開細_細 「〇〇47」中所記載之化合物等。 報之奴洛 -…不含羧酸基之低分子量二醇_·— 所述不含賴基之低分子量二醇並無特別限制,可視 需要而適宜選擇’例如可列舉日本專利特開2⑽7·雇號 公報之段落「0048」中所記載之化合物等。 > 曰作為所_含紐基之二醇之共聚量,較佳的是低分 子量二醇中之95 m〇l%以下,更佳的是8〇 m〇1%以下特 佳的是50 mol%以下。所述共聚量若超過% m〇i%,則存 在不能獲得顯影性良好之胺基甲酸酯樹脂之現象。 作為所述(ii)含有羧基之聚胺基甲酸酯與於分子中 具有環氧基及乙稀性不飽和基之化合物反應而所得之聚胺 基甲酸酯樹脂之具體例,例如可列舉將日本專利特開 2007-2030號公報之段落「0314」〜「〇315」中所示之_^ 〜U13、U1〜U4、U6〜U11之聚合物中的作為含有環氧基 及乙稀性不飽和基之化合物的丙稀酸縮水甘油酯,替換為 甲基丙烯酸縮水甘油酯、丙烯酸_3,4_環氧環己基甲基酯(商 品名:Cycl〇merA400 (大赛璐化學工業公司製造))、甲基 丙婦酸-3,4-環氧環己基甲酯(商品名:Cyd〇merM4〇〇(大 赛璐化學工業公司製造))而所得之聚合物等。 •-酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂之 重量平均分子量-- 所述酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂 201235781 4143(>pit* 之重星平均分子量並無特別限制,可視需要而適宜選擇, 較f的是2,〇00〜60,_,更佳的是3,_〜5〇,_,特佳 的是3,000〜30,000。若所述重量平均分子量不足2,〇〇〇, 則存在無法獲得硬化膜於高溫時之充分之低彈性模數之現 象;若超過60,〇〇〇,則存在塗佈適合性及顯影性惡化之現 象。另一方面,若重量平均分子量為2,〇〇〇〜6〇〇〇〇,則於 將所述感光性組成物用於感光性抗焊劑中之情形時,抗龜 裂性、耐熱性優異,利用鹼性顯影液之非影像部之顯影性 優異。 另外’所述重量平均分子量例如可使用高速GpC裝置 (東洋曹達工業股份有限公司製造之HLC_8〇2A),以〇 5 wt%之四氫呋喃(THF)溶液為試樣溶液,管柱使用1根 TSKgel HZM-M ’注入200 pL之試樣,藉由所述THF溶 液進行溶離’於25。(:下利用折射率檢測器或uv檢測器(檢 測波長為254 nm )而測定。 --酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂之 酸值 所述酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂 之酸值並無特別限制,可視需要而適宜選擇,較佳的是2〇 mgKOH/g〜120 mgKOH/g,更佳的是 30 mgKOH/g〜11〇 mgKOH/g,特佳的是 35 mgKOH/g〜1〇〇 mgK〇H/g。所述 酸值若不足20 mgKOH/g,則存在顯影性變得不充分之現 象’若超過120 mgKOH/g’則存在顯影速度過高而變得難 以控制顯影之現象。 41 201235781 41436pif 另外,所述酸值例如可依據JIS K〇〇7〇而進行測定。 其中,於樣品並不溶解之情形時,使用二噁烷或四 等作為溶劑。 -酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂之 乙烯性不飽和基當量-- 所述酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂 之乙稀性不飽和基當量並無制限制,可視f要而適宜選 擇,較佳的是0.05 mm〇l/g〜3 〇 mm〇1/g,更佳的是〇5 mmol/g 〜2.7 mmol/g,特佳的是 〇 75 mm〇1/g 〜2 * mmol/g。若所述乙烯性不飽和基當量不足〇 〇5 ,則 存在硬化膜之耐熱性差之現象;若超過3 〇 mm〇1/g,則存 在硬化膜之脆性提高之現象。 所述乙烯性不飽和基當量例如可藉由測定溴值而求 出。另外,所述溴值例如可依據JISK26〇5而測定。 -酸改質含有乙烯性不飽和基之環氧樹脂_ 所述酸改質含有乙烯性不飽和基之環氧樹脂並益特別 限制,可視需要而適宜選擇,例如可列舉:於日本^利第 28m59號公報中所記載之作為產物⑴與多元酸肝⑷ 之反應物的酸改質含有乙稀性不飽和基之環氧樹脂,所述 產物(I)是於1分子中具有至少2個以上環氧基的環氧化 合物(a)與於1分子中具有至少2個以上誠以及與環氧 基反應的除羥基以外之1個反應基的化合物(b)與含有乙 烯性不飽和基之單魏(e)之產物;作為產物(^)與多 元酸針(d)與含有乙稀性不飽和基之單異氰酸g旨⑷之 42 201235781 41436pif 產物的酸改質含有乙烯性不飽和基之環氧樹脂等,所述產 物(I)是於1分子中具有至少2個以上環氧基的環氧^合 物(a)與於1分子中具有至少2個以上羥基以及與環氧^ 反應的除羥基以外之1個反應基的化合物(b)與含有乙稀 性不飽和基之單羧酸(c)之產物。 所述酸改質含有乙烯性不飽和基之環氧樹脂可使用市 售品。所述酸改質含有乙烯性不飽和基之環氧樹脂之市售 品例如可列舉ZFR系列、CCR系列、pCr系列(曰本化 藥公司製造)等。 _含有乙細性不飽和基及叛基之丙稀酸樹脂_ 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂並無特 別限制,可視需要而適宜選擇,例如可列舉於由(甲基)丙 烯酸酯與含有乙烯性不飽和基且具有至少丨個酸基之化合 物而所得之共聚物之一部分酸基上,加成具有環氧基之(甲 基)丙浠酸酯而成的丙浠酸樹脂。 此種丙烯酸樹脂例如可列舉日本專利特開2009-86376 號公報中所記載之於由(曱基)丙烯酸酯與含有乙烯性不飽 和基且具有至少1個酸基之化合物而所得之共聚物之一部 分酸基上,加成(甲基)丙烯酸縮水甘油酯而成的改質共聚 物等。 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂可使用 市售品。所述含有乙烯性不飽和基及羧基之丙烯酸樹脂的 市售品例如可列舉Cyclomer P 200HM (大賽璐化學工業公 司製造)等。 43 201235781 41436pif -聚醯亞胺前驅物- 所述聚醯亞胺前驅物並無特別限制,可視需要而適宜 選擇’例如可列舉日本專利特開2010-6946號公報中所記 載之聚醯亞胺前驅物等。 --含有叛基之兩分子化合物之含量― 所述含有羧基之高分子化合物於所述感光性組成物中 之含直並無特別限制,可視需要而適宜選擇,相對於所述 感光性組成物之固形物而言,較佳的是5 wt%〜8〇 wt%, 更佳的疋20 wt°/〇〜75 wt°/〇,特佳的是3〇 wt%〜7〇 wt〇/〇。 若所述含量不足5 wt%,則存在無法良好地保持抗龜 裂性之現象;若超過80 wt%,則存在耐熱性降低之現象。 另-方面’若所述含量為所述特佳之範_,則於兼顧良 好之抗龜裂性與耐熱性之方面而言有利。 <其他成分> 所述其他成分例如可列舉熱塑性彈性體、熱硬化促進 劑、密接促進劑、熱聚合抑制劑、無機填充劑、著色劑、 有機溶劑、觸變性賦予劑、消泡劑、均化劑等。 -熱塑性彈性體(elastomer) -〇藉由於所述感光性組成物中添加所述熱塑性彈性體, 可職予所贼紐組成物耐熱性、錄性及強勤性。 所述熱塑性彈性體並無特別限制,可視需要而適宜選 t例如可列舉苯乙_彈性體、烯烴系彈性體、胺基甲 :彈性體、聚醋系彈性體、聚酿胺系彈性體、丙稀酸 糸無性體、聚魏系彈性體、樹膠改質之環氧樹脂等。該 44 201235781 41436ριί 二化°物可單獨使用1種,亦可併用2種以上。 般情:Ϊ熱包含硬=成分與軟鏈段成分,- 及_性有;^耐熱性及魏㈣幫助,後者對柔軟性 μ驚助。而且,所述彈性體之付暂廿卜& 制,可視需H“ 丨狀&質並無特別限 装宜選擇,例如於顯影步驟之生產效率性 專方面她的是具機可雜或膨雜。政料 所述苯乙婦系彈性體、烯烴系彈性體 彈性體、聚酿系彈性體、倾胺车_ 曰糸 麵、轉性體、丙稀酸系彈性 n_體、韻料環氧難例如可列舉 ^專利特開勒彻45號公報之段落「_7」〜「了〇〇歹f 中所記載者等。 」UU95」 --熱塑性彈性體之含量__ 所述熱塑性彈性體於所述感光性組成物中之含量並無 特別限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而言’較佳的是1 Wt%〜50 Wt%,更佳的是2 wt/〇 20 wt/o ’特佳的是3 wt%〜1〇 wt〇/。。若所述含量不 足1 Wt/°,則存在抗龜裂性差之現象;若超過50 wt°/〇,則 存在未曝光#並不由於顯景彡液而溶出之現象。另一方面, 右所述含罝為所述特佳之範圍内,則於提高顯影性或抗龜 裂性方面而言有利。 -熱硬化促進劑_ 所述熱硬化促進劑並無特別限制,可視需要而適宜選 擇,例如可列舉日本專利特開2007-2030號公報之段落 「0101」中所記载之化合物等。 45 201235781 41436pif -熱硬化促進劑之含量__ 所述熱硬化促進劑於所述感光性組成物中之含量並無 特另j限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而言,較佳的是〇 〇1 wt%〜2〇加%,更佳的是 〇·05 wt%〜15 wt%,特佳的是〇Λ wt%〜1〇 wt%。若所述 熱硬化促進劑之含量不足0.01 wt% ,則存在無法表現硬化 膜之強勃性之現象;若超過20 wt%,則存在感光性組成物 之保存穩定性惡化之現象。另一方面,若所述熱硬化促進 劑之含量為所述特佳之範圍内,則於提高感光性組成物之 保存穩定性及硬化膜物性之方面而言有利。 -密接促進劑- 所述密接促進劑並無特別限制,可視需要而適宜選 擇’例如可列舉日本專利特開2007-2030號公報之段落 「0108」中所記載之化合物等。 --密接促進劑之含量— 所述密接促進劑於所述感光性組成物中之含量並無特 別限制,可視需要而適宜選擇,相對於所述感光性組成物 之固形物而言’較佳的是0.01 Wt%〜20 wt%,更佳的是0.05 wt%〜15 wt% ’特佳的是〇.1 wt%〜10 wt%。若所述密接 促進劑之含量不足0.01 wt%,則存在無法表現出硬化膜之 強細性之現象,若超過20 wt%,則存在感光性組成物之保 存性惡化之現象。另一方面’若所述含量為所述特佳之範 圍内,則於提高感光性組成物之保存穩定性及硬化膜物性 之方面而言有利。 46 201235781 41436pit -熱χΚ合抑制劑-所述熱聚合_継無 擇,例如可列舉日本I 了視為要而適宜選 「0113」中所記载之化合物等。 4公報之段落 -無機填充劑- 所述無機填充劑並無特別 擇:_較佳的是含有平均粒徑_為⑼5=3而〇適宜選 -乳化雜子。藉由使所述無機填充劑含有二氧化 子,可使硬化獻耐難提高,且與含錢叙高1 合物之分散性變良好,可將感光性組成物n k 佳之範圍内,從而獲得較佳之塗佈適合性。 '‘、''軚 所述一氧化矽粒子中之二氧化矽並無特別限制,可視 需要而適宜選擇,例如可列舉氣相法二氧化矽、結晶性二 氧化矽、熔融二氧化矽等。 一 所述二氧化矽粒子之平均粒徑(d50)並無特別限制, 可視需要而適宜選擇’較佳的是0.05 μιη〜3·0 μηι,更佳的 是 0.1 μπ1 〜2.5 ’ 特佳的是 〇 1 gm〜2.〇 μη。 若所述二氧化矽粒子之平均粒徑(d50)不足〇.〇5 μιη , 則存在塗怖黏度變南之現象;若超過3.0 Μ·111,則存在無法 維持平滑性之現象。另一方面,若所述二氧化妙粒子之平 均粒徑(d50)為所述特佳之範圍内,則於塗佈黏度與硬化 膜之平清性或而ί熱性方面而言有利。 另外,所述'一氣化秒粒子之平均粒徑(d50 )是以累計 (累積)重量百分率而表示時之累計值50%之粒度而定義 47 201235781 41436pif 者,疋義為d50(D50)等,例如使用動態光散射光度計(商 品名DLS7000、大塚電子股份有限公司製造),將測定原 理设為動態光散射法,將尺寸分布解析手法設為累積法及/ 或分布圖法而進行測定。 -無機填充劑之含量― 所述無機填充劑子於所述感光性組成物中之含量並無 特別限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而吕’較佳的是【wt%〜6〇 ,更佳的是1〇R15-Of cor15〇^一^CONR16 P wherein, in the above formula (13-1) to formula (13-16), R14 represents a hydrogen atom or a fluorenyl group, and R15 represents a carbon number of 1 to 10 The alkyl group, r16 represents a hydrocarbon group having a carbon number of 1 to 10. P represents an integer of 0 or 1 to 10. 38 201235781 4i4j〇pir The polyurethane resin is particularly suitable for the diisocyanate represented by the formula (il) and the compound of the formula (12_丨) to (12_3) At least the diol containing a carboxylic acid group is indicated! The reactants of the species are further reacted with a compound having one epoxy group and at least one (meth)propene in the molecule, as represented by the formula (1)-υ~(1).16). The obtained acid value is from 20 mgKOH/g to 120 mgK〇H/g of the soluble photocrosslinkable polyurethane resin. These polymer compounds may be used singly or in combination of two or more. a method for synthesizing a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule... as the polyamino phthalate The method for synthesizing the resin can be carried out by heating the above-mentioned diisocyanate compound and diol compound by adding a known catalyst having an activity corresponding to each reactivity to an aprotic solvent. Preferably, the diisocyanate and the diol compound used are 0-8: 1 to 1_2: 1. When an isocyanate group remains at the polymer terminal, it is treated by an alcohol or an amine. (C is not synthesized in the form of an isocyanate group. - Diisocyanate---- The diisocyanate compound represented by the above formula (11) is not particularly limited, and may be appropriately selected as needed, and for example, Japan The compound described in the paragraph "〇〇21" of the Japanese Patent Publication No. 2007-2030, etc., contains a diol having a tickic acid group... Moreover, the above formula (12-1) to the formula (12-3) (a) The diol compound to be repelled is not particularly limited, and may be appropriately selected as needed. For example, the compound described in Japanese Patent Laid-Open No. 〇〇47 can be cited. Nuro-... Low molecular weight diol having no carboxylic acid group _· The low molecular weight diol having no lysine group is not particularly limited, and may be appropriately selected as needed. For example, Japanese Patent Laid-Open No. 2 (10) 7 As stated in the paragraph "0048" of the Gazette And the copolymerization amount of the diol containing the ketone is preferably 95 m〇l% or less in the low molecular weight diol, more preferably 8 〇m〇1% or less. 50 mol% or less. If the copolymerization amount exceeds % m〇i%, there is a phenomenon that a urethane resin having good developability cannot be obtained. As the (ii) carboxyl group-containing polyaminocarboxylic acid Specific examples of the polyurethane resin obtained by reacting an ester with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraph "0314" of JP-A-2007-2030. ~ ~ U U 」 」 U U U U U U U U U U U U U U U U U U U U U U U U U 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 It is glycidyl methacrylate, _3,4_epoxycyclohexylmethyl acrylate (trade name: Cycl〇mer A400 (manufactured by Daicel Chemical Industries, Ltd.)), methyl acetoacetate-3,4-epoxy a polymer obtained by using cyclohexylmethyl ester (trade name: Cyd〇mer M4 (manufactured by Daicel Chemical Industries, Ltd.)) • Acid-modified weight average molecular weight of a polyurethane resin containing an ethylenically unsaturated group - the acid modified polyurethane resin containing an ethylenically unsaturated group 201235781 4143 (>pit * The average molecular weight of the heavy star is not particularly limited. It can be selected as needed. It is 2, 〇00~60, _, more preferably 3, _~5〇, _, especially 3,000~30,000. If the weight average molecular weight is less than 2, 〇〇〇, there is a phenomenon that a sufficient low modulus of elasticity of the cured film at a high temperature cannot be obtained; if it exceeds 60, 涂布, there is coating suitability and developability. The phenomenon of deterioration. On the other hand, when the weight average molecular weight is 2 and 〇〇〇6〇〇〇〇, when the photosensitive composition is used in a photosensitive solder resist, it is excellent in crack resistance and heat resistance. The non-image portion of the alkaline developer is excellent in developability. Further, the weight average molecular weight may be, for example, a high-speed GpC apparatus (HLC_8〇2A manufactured by Toyo Soda Industrial Co., Ltd.), a wt5 wt% tetrahydrofuran (THF) solution as a sample solution, and one TSKgel HZM column for the column. -M 'Injected into a 200 pL sample, dissolved by the THF solution '25. (: measured by a refractive index detector or a uv detector (detection wavelength of 254 nm). - Acid-modified acid value of a polyurethane resin containing an ethylenically unsaturated group. The acid modification contains The acid value of the ethylenically unsaturated group-containing polyamino phthalate resin is not particularly limited and may be appropriately selected as needed, and is preferably 2 〇 mgKOH/g to 120 mgKOH/g, more preferably 30 mgKOH/g. ~11〇mgKOH/g, particularly preferably 35 mgKOH/g to 1〇〇mgK〇H/g. If the acid value is less than 20 mgKOH/g, the developability may be insufficient. In the case of mgKOH/g', the development speed is too high and it becomes difficult to control development. 41 201235781 41436pif Further, the acid value can be measured, for example, in accordance with JIS K〇〇7〇, wherein the sample is not dissolved. In the case of using dioxane or tetracene as a solvent. - Acid-modified ethylenically unsaturated group equivalent of polyamino phthalate resin containing ethylenically unsaturated group - said acid modification contains ethylenically unsaturated group There is no restriction on the ethylenically unsaturated base equivalent of the polyamino phthalate resin. Preferably, it is preferably 0.05 mm 〇 l / g 〜 3 〇 mm 〇 1 / g, more preferably 〇 5 mmol / g ~ 2.7 mmol / g, particularly preferably 〇 75 mm 〇 1 / g ~ 2 * mmol/g. If the ethylenically unsaturated group equivalent is less than 〇〇5, the heat resistance of the cured film may be poor; if it exceeds 3 〇mm〇1/g, the brittleness of the cured film may be improved. The ethylenically unsaturated group equivalent can be determined, for example, by measuring the bromine number. The bromine number can be measured, for example, according to JIS K26〇5. - Acid-modified epoxy resin containing an ethylenically unsaturated group. The acid-modified epoxy resin containing an ethylenically unsaturated group is particularly limited, and may be appropriately selected as needed. For example, the reaction of the product (1) with the polyacid liver (4) described in Japanese Patent No. 28m59 can be cited. An acid-modified epoxy resin containing an ethylenically unsaturated group, the product (I) being an epoxy compound having at least two epoxy groups in one molecule (a) and having at least one molecule Two or more compounds (b) which contain one reactive group other than a hydroxyl group which reacts with an epoxy group and contain B The product of monounsole (e) of the unsaturated group; the acid modification of the product (^) and the polyacid needle (d) and the monoisocyanate containing the ethylenically unsaturated group (42) 42 201235781 41436pif product An epoxy resin containing an ethylenically unsaturated group, wherein the product (I) is an epoxy compound (a) having at least two epoxy groups in one molecule and at least two or more in one molecule. A product of a hydroxyl group and a compound (b) which reacts with an epoxy group and which has a reactive group other than a hydroxyl group, and a monocarboxylic acid (c) which contains an ethylenically unsaturated group. Commercially available products can be used as the epoxy resin containing an ethylenically unsaturated group. The commercial product of the acid-modified epoxy resin containing an ethylenically unsaturated group may, for example, be a ZFR series, a CCR series or a pCr series (manufactured by Sakamoto Chemical Co., Ltd.). _Acrylic acid resin containing an ethylenically unsaturated group and a thiol group _ The acrylic resin containing an ethylenically unsaturated group and a carboxyl group is not particularly limited, and may be appropriately selected as needed, for example, by (meth) a propionic acid obtained by adding a (meth)propionate having an epoxy group to a partial acid group of a copolymer obtained from an acrylate and a compound having an ethylenically unsaturated group and having at least an acid group Resin. Examples of such an acrylic resin include a copolymer obtained from a (fluorenyl) acrylate and a compound having an ethylenically unsaturated group and having at least one acid group, as described in JP-A-2009-86376. A modified copolymer obtained by adding glycidyl (meth)acrylate to a part of the acid group. A commercially available product can be used as the acrylic resin containing an ethylenically unsaturated group and a carboxyl group. The commercially available product of the acrylic resin containing an ethylenically unsaturated group and a carboxyl group is exemplified by Cyclomer P 200HM (manufactured by Daicel Chemical Industries, Ltd.). 43 201235781 41436pif - Polyimine precursor - The polyimine precursor is not particularly limited, and may be appropriately selected as needed. For example, the polyimine described in JP-A-2010-6946 can be cited. Precursors, etc. - content of a compound containing a thiol group - the content of the polymer compound containing a carboxyl group in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the photosensitive composition The solid content is preferably 5 wt% to 8 wt%, more preferably 20 wt ° / 〇 〜 75 wt ° / 〇, particularly preferably 3 〇 wt % 〜 7 〇 wt 〇 / 〇 . When the content is less than 5 wt%, the crack resistance may not be satisfactorily maintained; if it exceeds 80 wt%, the heat resistance may be lowered. On the other hand, if the content is the above-mentioned excellent method, it is advantageous in terms of both good crack resistance and heat resistance. <Other components> Examples of the other components include a thermoplastic elastomer, a thermosetting accelerator, an adhesion promoter, a thermal polymerization inhibitor, an inorganic filler, a colorant, an organic solvent, a thixotropic imparting agent, and an antifoaming agent. Homogenizer, etc. - A thermoplastic elastomer (elastomer) - By adding the thermoplastic elastomer to the photosensitive composition, it is possible to impart heat resistance, visibility and strength to the composition of the thief. The thermoplastic elastomer is not particularly limited, and may be, for example, a styrene-elastomer, an olefin-based elastomer, an amine-based elastomer, an elastomer-based elastomer, a polyamine-based elastomer, or a polyamine-based elastomer. A bismuth acrylate bismuth, a poly-wei elastomer, a resin modified epoxy resin, and the like. The 44 201235781 41436ριί dimorphizer may be used alone or in combination of two or more. The general situation: the heat contains hard = ingredients and soft segment components, - and _ sex; ^ heat resistance and Wei (four) help, the latter on the softness μ help. Moreover, the preparation of the elastomer is required to be "H", and the quality of the elastomer is not particularly limited. For example, in the production efficiency of the development step, she is machine-specific or The styrene-based elastomer, the olefin-based elastomer elastomer, the poly-branched elastomer, the tilting amine car 曰糸 、 、, transgenic body, acrylic acid elastic n_ body, rhyme For the epoxy, for example, the paragraph "_7" of the Patent Publication No. 45 of the Patent Publication No. 45 - "The one described in 〇〇歹f." UU95" - the content of the thermoplastic elastomer __ the thermoplastic elastomer The content in the photosensitive composition is not particularly limited. It is suitably selected as needed, and is preferably from 1 Wt% to 50 Wt%, more preferably relative to the solid content of the photosensitive composition. It is 2 wt/〇20 wt/o 'extra good is 3 wt%~1〇wt〇/. . If the content is less than 1 Wt/°, there is a phenomenon that the crack resistance is poor; if it exceeds 50 wt °/〇, there is a phenomenon that the unexposed # is not dissolved by the sputum sputum. On the other hand, it is advantageous in terms of improving developability or crack resistance in the case where the ruthenium containing the right side is within the above-mentioned range. - The thermosetting accelerator _ The thermosetting accelerator is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a compound described in paragraph "0101" of JP-A-2007-2030. 45 201235781 41436pif - content of thermosetting accelerator __ The content of the thermosetting accelerator in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the photosensitive composition In the case of a solid, it is preferably wt1 wt% 〜2〇%, more preferably 〇·05 wt% 〜15 wt%, and particularly preferably 〇Λ wt% 〜1 〇 wt%. When the content of the thermosetting accelerator is less than 0.01% by weight, the phenomenon of strong sturdiness of the cured film may not be exhibited. When it exceeds 20% by weight, the storage stability of the photosensitive composition may be deteriorated. On the other hand, when the content of the thermosetting accelerator is within the above-described range, it is advantageous in terms of improving the storage stability of the photosensitive composition and the physical properties of the cured film. - the adhesion promoter - the adhesion promoter is not particularly limited, and may be appropriately selected as needed. For example, a compound described in paragraph "0108" of JP-A-2007-2030 may be mentioned. The content of the adhesion promoter - the content of the adhesion promoter in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, and is preferably 'relative to the solid matter of the photosensitive composition. It is 0.01 Wt%~20 wt%, more preferably 0.05 wt%~15 wt% 'extra good is 〇.1 wt%~10 wt%. When the content of the adhesion promoter is less than 0.01% by weight, the film may not exhibit the fineness of the cured film. When it exceeds 20% by weight, the storage property of the photosensitive composition may deteriorate. On the other hand, when the content is within the above-described range, it is advantageous in terms of improving the storage stability of the photosensitive composition and the physical properties of the cured film. For example, the compound described in "0113" is preferably selected from Japan I. Paragraph 4 of the publication - Inorganic filler - The inorganic filler is not particularly preferred: _ preferably having an average particle diameter of (9) 5 = 3 and optionally emulsified hetero. When the inorganic filler contains a dioxygen group, the hardening resistance can be improved, and the dispersibility with the money-containing high-content compound becomes good, and the photosensitive composition nk can be better in the range. Good coating suitability. '','' The cerium oxide in the cerium oxide particles is not particularly limited and may be appropriately selected as needed, and examples thereof include gas phase cerium oxide, crystalline cerium oxide, and molten cerium oxide. The average particle diameter (d50) of the cerium oxide particles is not particularly limited, and may be appropriately selected as needed. Preferably, 0.05 μm to 3·0 μηι, more preferably 0.1 μπ1 to 2.5 ' is particularly preferable. 〇1 gm~2.〇μη. If the average particle diameter (d50) of the cerium oxide particles is less than 〇.5 μιη, the coating viscosity becomes south; if it exceeds 3.0 Μ·111, the smoothness cannot be maintained. On the other hand, if the average particle diameter (d50) of the oxidized particles is within the above-mentioned range, it is advantageous in terms of coating viscosity and flatness of the cured film or heat. Further, the average particle diameter (d50) of the 'one gasification second particle is defined by the particle size of 50% of the cumulative value expressed as a cumulative (accumulated) weight percentage, and is defined as 47 201235781 41436pif, which is d50 (D50), etc. For example, a dynamic light scattering photometer (trade name: DLS7000, manufactured by Otsuka Electronics Co., Ltd.) is used, and the measurement principle is a dynamic light scattering method, and the size distribution analysis method is performed by an accumulation method and/or a profile method. - the content of the inorganic filler - the content of the inorganic filler in the photosensitive composition is not particularly limited 'optional as needed, and is preferably relative to the solid matter of the photosensitive composition It is [wt%~6〇, more preferably 1〇
Wt%〜60 Wt%,特佳的是15 wt%〜60 wt%。若所述無機填 充知'1之含里不足1 wt% ’則存在耐熱性差之現象;若超過 6〇 ’則存在圖案形成性差之現象。另一方面,若所述 含量為所述特佳之範_,則於提高圖案形成性與耐熱性 方面而言有利。 -著色劑- ,述著色劑並無特別_,可視需要而適宜選擇,, 使用者色彥貞料或自公知之轉中適宜選擇之染料。 斤述著色顏料並無特別限制,可視需要而適宜選擇 舉日本專利特開2_2_號公報之段落「刪 中所§己載之化合物等。 制,劑於所述感光性組成物中之含量並無細 制,可視需要而適宜選擇。 -有機溶劑- 所述有機溶劑並無特別限制,可視需要而適 , 例如可列舉日本專 ^擇 寻利特開平11-240930號公報之段兹 48 201235781 41430pit 「〇〇43」中所記載之化合物、曰本專利特開2007-2030號 公報之段落「0121」中所記載之化合物等。 --有機溶劑之含量— 所述有機溶劑於所述感光性組成物中之含量並無特別 限制,可視需要而適宜選擇,相對於所述感光性組成物之 固形物而έ,較佳的是1 wt〇/0〜8〇 wt%,更佳的是2 wt% 〜70 wt%,特佳的是3 wt%〜6〇 wt%。若所述有機溶劑之 含里不足1 wt%,則存在組成物之黏度高且塗膜之形成變 困難之現象;若超過80 wt〇/〇 ’則所期望之膜厚之控制變困 難。另一方面,若所述有機溶劑之含量為所述特佳之範圍 内,則於塗膜製造適合性方面而言有利。 (感光性抗焊劑組成物) 本發明之感光性抗焊劑組成物含有所述本發明之感光 性組成物。 藉由本發明之感紐抗㈣組成物,可獲得絕緣性、 圖案側面之平滑性、耐鑛敷性優異之抗焊劑。 (感光性抗焊劑膜) 本發明之感光性抗焊劑組成物亦可藉由塗佈於形成有 導體配線之基板上加以乾燥而作為液狀光阻使用,對於 造感光性抗焊劑膜特別有用。 、 本發明之感光性抗焊劑膜至少包含 包含^膜’進—步視需要包含塾(eush=層 阻氧層、(以下有時簡稱為「pc層」)等其他層。 所述感光!·生抗焊劑膜之形態並無特別限制,可視需要 49 201235781 41436pif 而適宜選擇’例如可列舉:於所述支撐體上順次具有所述 感光層、所述保護膜7 A之形態,於所述支撐體上順 次具有所述pC層、所述感光性層、所述保護膜之形態, 於所述支撐體上順次具有所述墊層、所述PC層、所述感 光層、所述保護膜之形態等。另外,所述感光層可為單層 亦可為多層。 <支撐體> 所述支撐體並無特別限制,可視需要而適宜選擇,較 佳的是可剝離所述感光層且光之透過性良好,更佳的是表 面之平滑性進一步良好。 所述支撐體並無特別限制,可視需要而適宜選擇,例 如可列舉透明之合成樹脂製膜。 所述透明之合成樹脂製膜並無特別限制,可視需要而 適宜選擇,例如可列舉聚對笨m、聚萘 =二醋、聚丙烯、聚乙稀、三乙酸纖維素、二乙酸纖維素、 =(甲基)丙稀酸烧絲、聚(甲基)丙烯㈣共聚物聚氯乙 乙Γ醇、聚碳酸醋、聚苯乙稀、賽路凡、聚偏二氣 醯胺2醯亞胺、氣乙烯-乙酸乙烯醋共聚 、聚四H乙婦、聚二氟乙埽、纖維素系膜、尼龍膜 種塑膠膜等。該些支频可單獨錢 用^ 以上。於該些支撐體中,所诚、…人丌J併用2種 是聚對苯二甲酸乙二§旨。相之合成繼製膜較佳的 所述支=並無特別限 如可列舉日本專利特開平4、2 I且、擇例 2〇8940唬公報、日本專利特開 50 201235781 平5_8〇5〇3號公報'日本專利特開平⑷咖號公 本專利特開平5-72724號公報等中所記載之支撐 所述支賴之厚度並祕職制,可視f ^適 擇,較佳的是4 μιη〜300 _,更佳的是5卿〜⑺、 ^述支频之形錢無特·制,可視需要而適宜選 擇,較佳的是長條狀。所述長條狀支撐體之 限制,可視需要而適宜選擇,較佳狀lGm〜2G,_t。 <感光層> =述感光層可藉由本發明之所述感紐抗焊劑 而幵〉成。 縣κ I ^感光層於所述感紐抗焊舰中所設之位置並益 ^別限制’可視需要而適宜選擇,通常積層於所述支揮體 ,述感光層之厚度並無制限制,可視需要 擇,較佳的是3_〜—更佳的是5啤〜7一。 所边感光層之形成方法可列舉如下之方法:使本發明 性抗焊劑組成物溶解、乳化或分散於水或溶劑 所、f 焊劑組成物溶液,將該溶液直接塗佈於 所述支撐體上,使其乾燥而進行積層。 =述感光性抗_組成物溶液之溶劑並無特別限制, :斤品要而適且選擇,例如可列舉醇類、酉同類、醋類、芳 2族烴,夕代煙類、_、二甲基甲_、二甲基乙酸 妝一曱基亞颯、環丁石風等。 所述醇類例如可列舉甲醇、乙醇、正丙醇、異丙醇、 51 201235781 41436pif 正丁醇、弟一,-r ‘匕時寻 所述嗣類例如可列舉丙@同、丁鋼、甲基異丁基嗣 己酮、二異丁酮等。 所述醋類例如可列舉乙酸乙醋、乙酸丁酷、乙酸正戊 酿、硫酸曱醋、丙酸乙酿、鄰笨二甲酸二曱 酯、乙酸曱氧基丙酯等。 所述芳香族烴類例如可列舉曱苯、二甲笨、苯、乙美 笨等。 土 烴類,可列舉四氣化碳、三氣乙烯、氣仿、 ,,1-一氯乙燒、一乳曱烧、單氣苯等。 所述醚類例如可列舉四氣⑽、: 轉、乙二醇單乙㈣4甲氧基_2•丙醇等。乙一知早甲 該些,合物可單獨使们種,亦可_ 2種以上。 所述感光性抗焊劑組成物溶液 :制’:視需要而適宜選擇,較佳的是==別 更佳的是 15 wt°/〇〜50 wt%。 t/〇 ’ 所述塗佈之方法並無特別限制, 擇,例如可列舉使用旋塗機、狹縫旋 適宜選 所述乾烤之條杜廿益Ϊ佈所述支撑體上之方法。 擇,雖然因各成分、溶劑之種類 二I要而適宜選 常情況下是於听〜酿之溫 ^而異’但通 右。 卜進仃30秒〜15分鐘左 <保護膜> 52 201235781 41436pif 所述感:層有防止所述感光層之污垢或損傷而保護 特別ρρ Γ丨保°蔓膜於所述感光性抗焊劑臈中所設之位置並無 光層二1,可視需要而適宜選擇’通常情況下設於所述感 ^保護膜例如可列舉於所述支撐體中所使用者,聚 翁$成-層麗有聚乙稀、聚丙烯之紙、聚烯烴薄片、聚四 齓乙烯溥片等。 =保護膜之厚度並無特別限制,可視需要選 擇=佳的是5卿〜100μιη,更佳的是8μιη〜30μϊη。 所述去所述?護膜之情形時’較佳的是所述感光層及 9接接著力Α與所述感光層絲護膜之接著力Β 疋接者力Α>接著力Β之關係。 々可所f支撐體與所祕翻之組合(支撐體/保護膜)例 酉:二歹’ ' 聚對5二甲酸乙二酉旨/聚丙婦、聚對苯二甲酸乙二 :甲上歸、聚氣乙烯胸凡、聚醯亞胺,聚_、聚對苯 一甲酸乙二酯/聚對苯二甲酸乙二酯等。 處理而Ϊ、=對支撐體及保護膜之至少任-者進行表面 Γ 所述之接著力之關係。作為所述支擇體 面处理,可為了提高與所述感光詹之接著 =哪下塗層之塗設、電晕放電處理= 高;波照射處理、輝光放電照射處理、活 注電水知射處理、雷射光線照射處理等。 而且’所述支撐體與所述保護膜之靜摩擦係數較佳的 53 201235781 41436pif 二0更佳的疋G 5〜1,2。^所述靜摩擦係數不足 :ΓΐΓ過滑而於製錢狀之情形時產生捲繞偏移 =象;右超過Μ ’則存在變得難轉為良好之報狀之 現象。 所,感光性抗焊劑膜之保管方法並無特別限制,可視 而要而適宜選擇,例如難的是捲繞於 以長條狀而捲為輥狀而進行保管。 之捲心上, 所述長條狀之感光性抗焊劑膜之長 例如可自ig m,_ m之範圍中適宜選擇。m可 為:便於使用者錢而進行切割加工,將 之軌圍之絲鮮缝狀。糾,於崎科,較佳 讀體成為最外側之方式進行捲繞。而且,亦可Ϊ 所述親狀感光性膜切割為薄片狀。於保管時, 將 防^邊緣融合之觀財慮,較佳的是於端面設置物:蔓胜 之間隔物、放入有乾燥劑之間隔物),而且: 的疋包裝亦使用透濕性低之原材料。 权佳 光声保賴,亦可為了調整所述保護膜與所述减 先層之接者性而進行表面處理。所述表面處如^ ,保護膜之表面形成包含聚有_氧烧 Γ煙:聚乙稀醇等聚合物之下塗層。作為 =由於賴《合物之塗佈液塗佈_ ^ 表面之後,於3〇。(:〜i贼(特別是5()ΐ〜 $ 1分鐘〜30分鐘之乾燥而形成。 進行 而且’除了所述感光層、所述支撐體、所述保護膜以 54 201235781 41436pif 外,亦可包含塾層、阻氧層(pc層)、剝離層、接著層、 光吸收層、表面保護層等層。 ^所述墊層是於常溫下無黏性,於真空及加熱條件下進 行積層之情形時炫融、流動之層。 所述PC >1通常是以聚乙稀醇為主成分而形成之 μιη左右之覆膜。 所述感光性抗焊劑膜具有表面之黏性小,層壓性及使 用性良好,絕緣性、耐鍍敷性、圖案側面之平滑性優異之 積層有感光性抗焊劑組成物之感光層。因此,可廣泛用作 印刷線路板、彩色遽光片或柱材、肋材、間隔物、隔板等 顯示器用部件’全像片、微機器、打樣機等永久圖案形成 用途,且可^宜地驗本發明之永久随及其軸方法中。 特另j疋本發明之感光性抗焊劑膜,由於該膜之厚度均 一’因此於形成永久圖案時,可更精細地積層於基材上。 (永久圖案及永久圖案形成方法) 本心明之永久圖案可藉由本發明之永久圖案形 而獲得。 作為所述永久圖案’較佳的是保護膜、層間絕緣膜及 4几焊圖案之至少任一者。 所述永久圖案為抗焊圖案之情形時,22〇t下之動彈性 係數較佳的是20 MPa〜則MPa,更麵是25顺〜8〇 MPa,特㈣是3G MPa〜5Q廳。若軸雜係數不足 20 MPa ’則存在耐熱性差之現象;若超過咖廳 在耐熱衝擊性差,於硬化膜上產生龜裂之現象。 55 201235781 41436pif 本發明之永久圖案形成方法之 感光性抗_組成物塗佈於基材表减讀本發明之 感光層後,進彳博光(料倾)、_彡’ 而形成 熱及免是於加 於基:Ϊ表3本進,光(曝光步驟 發明二==圖案形成方法之說明亦使本 <基材> 所述基材並無特別限制,可視需要而適宜選擇,例如 可列舉覆銅積層板等印刷線路板形成用基板、鈉玻璃板等 玻璃板、合成樹脂性之膜、紙、金屬板等。 該些基材中,於可實現半導體等於多層配線基板或增 層配線基板等上之高密度封裝化之方面而言,較佳的是已 形成有配線之印刷線路板形成用基板。 所述基材可形成如下之積層體而使用:作為所述第i 態樣之於該基材上形成所述感光性抗焊劑組成物之感光層 的積層體’或者作為所述第2態樣之以所述感光性抗焊劑 膜中之感光層重疊之方式進行積層而成之積層體。亦即, 可對所述積層體中之所述感光層進行後述之曝光,藉此使 曝光之區域硬化,然後藉由後述之顯影而形成永久圖案。 <積層體> 所述第1態樣之積層體之形成方法並無特別限制,可 視需要而適宜選擇,較佳的是於所述基材上積層塗佈所述 56 201235781 41436pit 感光性抗焊劑組成物並加以乾燥而形成之感光層。 所述塗佈及乾燥之方法並無特別限制,可^需要而適 宜選擇,例如可列舉使用旋塗機、狹縫旋塗機、輥塗機、 模塗佈機、簾幕式塗佈機等而塗佈所述感光性抗焊劑組成 物溶液之方法。 所述第2態樣之積層體之形成方法並無特別限制,可 視需要而適宜選擇,較佳的是—面對所述感光性膜進行加 熱及加壓之至少任一者一面將其積層於所述基材上之方 法。另外,於所述感光性抗焊劑膜具有所述保護膜之情形 時,較佳的是將該保護膜剝離,以所述感光層重疊於所述 基材上之方式而進行積層。 所述加熱之溫度並無特別限制,可視需要而適宜選 擇,較佳的是70〇C〜13(TC,更佳的是8〇〇c〜u〇t:。 所述加壓之壓力並無特別限制,可視需要而適宜選 擇’較佳的是0.01 MPa〜1.0 MPa,更佳的是0.05 MPa〜 1.0 MPa。 進行所述加熱及加壓之至少任一者的裝置並盔 =,可視需要而適宜選擇,例如可列舉熱壓機、熱== 八(例如 Taisei Laminator Co·, Ltd.製造之 VP-II)、真空貼 。機(例如名機製作所股份有限公司製造之MVLp5〇 作為較佳之裝置。 <曝光步驟> 所述曝光步驟是對所述感光層進行圖案曝光之步驟。 作為所述曝光之對象,只要是具有感光層之材料則並 57 201235781 41436pif 無特別限制,可視需要而適宜選擇,較佳的是對在基材上 形成有所述感光性抗烊劑組成物或所述感光性抗焊劑膜之 所述積層體進行。 所述對積層體之曝光並無特別限制,可視需要而適宜 選擇,例如可介隔所述支撐體、墊層及PC層而對所述感 光層進行曝光;亦可將所述支撐體剝離後,介隔所述墊層 及pc層而對所述感光層進行曝光;亦可將所述支撐體及 墊層剥離後,介隔所述PC層而對所述感光層進行曝光; 亦可將所述支撐體、墊層及PC層剝離之後,對所述感光 層進行曝光。 所述曝光並無特別限制,可視需要而適宜選擇,可列 舉數位曝光、模擬曝光等。該些中較佳的是數位曝光。 所述數位曝光並無特別限制,可視需要而適宜選擇, =如較佳的是基於所形成之圖_成信息而生成控制訊 〜使用與s玄控制訊號對應地調變之光而進行。 所述數位曝光之機構並無特別限制,可視需要而適宜 =擇,例如可列舉照射光之光照射機#、基於所形成之圖 =息而使自該光照射機構所照射之光調變的光調變機構 «光調變機構》 ’則並無 η個描素 作為所述光調變機構,只要可對光進行調變 特別限制,可視需要而適宜選擇,較佳的是具有 部之光調變機構。 八 所述具有η個描素部之光調變機構並無特別限制,可 58 201235781 414JOplt 視需要而適宜選擇’較佳的是空間光調變元件。 所述空間光調變元件並無特別限制,可視需要而適宜 選擇’例如可列舉數位微鏡裝置(Digital Micro-mirror Device ’ DMD)、微機電系統(Micr〇 Electr〇 Mechanical Systems,MEMS )類之空間光調變元件(SLM; Spedal LightWt%~60 Wt%, particularly preferably 15 wt%~60 wt%. If the content of the inorganic filler is less than 1 wt%, the heat resistance is poor, and if it exceeds 6 Å, the pattern formation property is poor. On the other hand, if the content is the above-mentioned excellent method, it is advantageous in terms of improving pattern formability and heat resistance. - Coloring agent - The coloring agent is not particularly _, and may be appropriately selected as needed, and may be selected from a user's color or a suitable dye from a known transfer. The coloring pigment is not particularly limited, and may be selected as appropriate in the paragraph of the Japanese Patent Laid-Open Publication No. 2-2_, the contents of the compound contained in the photosensitive composition. The organic solvent is not particularly limited, and may be appropriately selected as needed. For example, the Japanese Patent Application No. Hei 11-240930 may be cited as a paragraph 48 201235781 41430pit. The compound described in "〇〇43", the compound described in the paragraph "0121" of JP-A-2007-2030, and the like. - content of the organic solvent - the content of the organic solvent in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, and is preferably relative to the solid matter of the photosensitive composition. 1 wt 〇 / 0 〜 8 〇 wt%, more preferably 2 wt% ~ 70 wt%, particularly preferably 3 wt% ~ 6 〇 wt%. When the content of the organic solvent is less than 1% by weight, the viscosity of the composition is high and the formation of the coating film becomes difficult. If it exceeds 80 wt〇/〇, the control of the desired film thickness becomes difficult. On the other hand, when the content of the organic solvent is within the above-described range, it is advantageous in terms of suitability for coating film production. (Photosensitive solder resist composition) The photosensitive solder resist composition of the present invention contains the photosensitive composition of the present invention. According to the sensitizing (four) composition of the present invention, it is possible to obtain a solder resist having excellent insulating properties, smoothness of the side of the pattern, and excellent mineral resistance. (Photosensitive solder resist film) The photosensitive solder resist composition of the present invention can be used as a liquid photoresist by being applied to a substrate on which a conductor wiring is formed and dried, and is particularly useful for producing a photosensitive resist film. The photosensitive solder resist film of the present invention includes at least another layer including a ruthenium (eush = layer oxygen barrier layer (hereinafter sometimes abbreviated as "pc layer") as needed. The form of the raw solder resist film is not particularly limited, and may be appropriately selected as needed in the case of 49 201235781 41436pif. For example, the photosensitive layer and the protective film 7 A may be sequentially provided on the support. Forming the form of the pC layer, the photosensitive layer, and the protective film in this order, and sequentially having the underlayer, the PC layer, the photosensitive layer, and the protective film on the support In addition, the photosensitive layer may be a single layer or a plurality of layers. <Support> The support is not particularly limited, and may be appropriately selected as needed, and it is preferred that the photosensitive layer be peeled off and The light transmittance is further improved, and the smoothness of the surface is further preferably further improved. The support is not particularly limited and may be appropriately selected as needed, and examples thereof include a transparent synthetic resin film. No special The restriction may be appropriately selected as needed, and examples thereof include poly-p-m, poly-naphthalene=diacetate, polypropylene, polyethylene, cellulose triacetate, cellulose diacetate, and =(meth)acrylic acid. Poly(meth)propene (tetra) copolymer polyvinyl chloride, polycarbonate, polystyrene, sirfan, polydimethylamine 2 quinone imine, ethylene-vinyl acetate copolymer, polytetra H female, polydifluoroacetic acid, cellulose film, nylon film plastic film, etc. These frequency can be used alone for more than ^. In these supports, the honest, ... people 丌 J and use 2 kinds It is a polyethylene terephthalate §. The synthesis of the phase is preferably the same as that of the film formation, and is not particularly limited, as described in Japanese Patent Laid-Open No. 4, No. 2, and No. 2, 8940, and Japan. Japanese Patent Laid-Open No. 50 201235781, No. 5_8〇5〇3, 'Japanese Patent Laid-Open (4), No. 5-72724, and the like, which support the thickness of the support and the secret system, can be seen as f ^ Suitable choice, preferably 4 μιη~300 _, more preferably 5 Qing ~ (7), ^ said the frequency of the shape of the money without special system, suitable for the needs Preferably, the strip-shaped support is limited, and may be appropriately selected as needed, preferably in the form of 1Gm~2G, _t. <Photosensitive layer> = The photosensitive layer can be used by the present invention The sensible sensitizer is 幵 成 成 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县The thickness of the photosensitive layer is not limited, and may be selected as desired, preferably 3_~-more preferably 5 beer-7. The method for forming the photosensitive layer may be as follows: the composition of the present invention is made of a solder resist The solution is dissolved, emulsified or dispersed in water or a solvent, f flux composition solution, and the solution is directly applied onto the support, dried, and laminated. The solvent of the photosensitive anti-composition solution is not particularly limited, and the product may be selected and selected, for example, alcohols, terpenoids, vinegars, aromatic 2 hydrocarbons, kiyoshi, _, and Methyl ketone, dimethylacetic acid makeup, 曱 飒 飒 飒, ring stone wind and so on. Examples of the alcohols include methanol, ethanol, n-propanol, isopropanol, 51 201235781 41436pif n-butanol, and di-anthracene. Isobutyl ketone, diisobutyl ketone, and the like. Examples of the vinegar include ethyl acetate, butyl acetate, acetic acid, sulphuric acid vinegar, ethyl propionate, dinonyl phthalate, and decyl acetate. Examples of the aromatic hydrocarbons include anthracene, dimethyl, benzene, and acetaminophen. Examples of the hydrocarbons include four gasified carbons, three gas ethylene, gas imitation, , 1-chloroethane, a decocted sulphur, and a single benzene. Examples of the ethers include tetragas (10), trans, ethylene glycol monoethyl(tetra)tetramethoxy-2-propanol, and the like. B. I know that the early ones, the compounds can be used alone, or _ 2 or more. The photosensitive solder resist composition solution:: is suitably selected as needed, preferably == not more preferably 15 wt ° / 〇 50 50% by weight. The method of coating is not particularly limited. For example, a method of using a spin coater or a slit to suitably select the support of the dry-baked strip of rhododendron is used. Choice, although it is appropriate to choose according to the type of each component and solvent, it is usually the case that it is heard and the temperature is different.卜进仃30 seconds~15 minutes left <protective film> 52 201235781 41436pif The sensation: the layer has protection against the dirt or damage of the photosensitive layer to protect the photosensitive film. There is no light layer 2 in the position set in the crucible, and it is suitable to be selected as needed. 'In general, the protective film is provided in the support body, for example, the user can be listed in the support body. There are polyethylene, polypropylene paper, polyolefin sheet, polytetrafluoroethylene sheet and so on. The thickness of the protective film is not particularly limited, and may be selected from the range of 5 to 100 μm, and more preferably 8 μm to 30 μϊ. What to do? In the case of a film, it is preferable that the photosensitive layer and the bonding force of the photosensitive layer and the photosensitive layer of the photosensitive layer are in contact with each other. The combination of support and secrets (support/protective film): 歹 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' , gas-gathered vinyl chestnut, polyimine, poly-, polyethylene terephthalate / polyethylene terephthalate. The treatment is carried out, and the relationship between the adhesion force and the surface of the support body and the protective film is performed. As the selective decent surface treatment, in order to improve the coating with the sensitization = which coating is applied, the corona discharge treatment = high; the wave irradiation treatment, the glow discharge treatment, the live electric water treatment , laser light treatment, etc. Moreover, the static friction coefficient of the support body and the protective film is preferably 53 201235781 41436pif 20 疋 G 5~1, 2. ^ The static friction coefficient is insufficient: when the slip is too slippery, the winding offset is generated in the case of the money-making shape = the image; if the right exceeds Μ ’, there is a phenomenon that it becomes difficult to turn into a good report. The method of storing the photosensitive solder resist film is not particularly limited, and may be appropriately selected depending on, for example, it is difficult to wind it in a long shape and roll it into a roll shape for storage. The length of the long-length photosensitive solder resist film can be suitably selected from the range of ig m, _ m, for example. m can be: easy to cut for the user's money, and the wire around the rail is fresh. Correction, Yusaki, better reading the body into the outermost way to wind. Further, the affinity photoreceptor film may be cut into a sheet shape. In the case of storage, it is preferable to combine the protection of the edge with the edge, and it is preferable to use the end face setting: the spacer of the vine, the spacer with the desiccant, and the 疋 package of the 疋 package is also low in moisture permeability. Raw materials. Quanjia Guangshengbao can also perform surface treatment in order to adjust the interface between the protective film and the reducing layer. The surface of the protective film is formed such that the surface of the protective film is coated with a polymer having a poly-oxygenated smog: polyethylene glycol. As = due to the coating of the coating of the compound _ ^ after the surface, at 3 〇. (: ~ i thief (especially 5 () ΐ ~ $ 1 minute ~ 30 minutes of drying to form. Perform and 'except the photosensitive layer, the support, the protective film with 54 201235781 41436pif, can also The layer includes a ruthenium layer, an oxygen barrier layer (pc layer), a release layer, an adhesive layer, a light absorbing layer, a surface protective layer, etc. ^ The underlayer is non-viscous at normal temperature, and is laminated under vacuum and heating conditions. In the case of a layer that melts and flows, the PC >1 is usually a film of about μηη formed mainly of polyethylene glycol. The photosensitive solder resist film has a small surface stickiness and is laminated. It is excellent in properties and usability, and is excellent in insulation, plating resistance, and smoothness of the side of the pattern. It is a photosensitive layer of a photosensitive solder resist composition. Therefore, it can be widely used as a printed wiring board, a color light-emitting sheet or a column. , such as ribs, spacers, partitions and other components for display, such as full-image film, micro-machine, proofing machine, etc., and can be used to test the permanent method of the present invention. The photosensitive solder resist film of the present invention is thick due to the film Uniformly, therefore, when a permanent pattern is formed, it can be more finely laminated on the substrate. (Permanent Pattern and Permanent Pattern Forming Method) The permanent pattern of the present invention can be obtained by the permanent pattern shape of the present invention. Preferably, at least one of the protective film, the interlayer insulating film, and the four solder patterns. When the permanent pattern is a solder resist pattern, the dynamic elastic coefficient at 22 〇t is preferably 20 MPa to MPa. The face is 25 s ~ 8 MPa MPa, the special (four) is 3G MPa ~ 5Q hall. If the shaft coefficient is less than 20 MPa 'there is poor heat resistance; if the heat resistance is worse than the coffee shop, the turtle is produced on the hardened film. The phenomenon of cracking. 55 201235781 41436pif The photosensitive anti-composition of the permanent pattern forming method of the present invention is applied to the substrate table to reduce the photosensitive layer of the present invention, and then the heat is formed by the sputum (pour), _彡' It is added to the base: Ϊ Table 3, the light (exposure step invention 2 == the description of the pattern forming method also makes the <substrate> the substrate is not particularly limited, and may be appropriately selected as needed. For example, a copper clad product can be cited. a substrate for forming a printed wiring board such as a laminate, a glass plate such as a soda glass plate, a synthetic resin film, paper, a metal plate, etc. Among the substrates, a semiconductor can be equal to a multilayer wiring substrate or a build-up wiring substrate. In terms of high-density encapsulation, a substrate for forming a printed wiring board having wiring is preferably used. The substrate may be formed by forming a laminate as the i-th aspect to the base. A laminate in which a photosensitive layer of the photosensitive resist composition is formed on the material or a laminate in which the photosensitive layer in the photosensitive resist film is laminated as the second aspect. That is, the photosensitive layer in the laminate may be exposed to light as described later, whereby the exposed region is cured, and then a permanent pattern is formed by development as will be described later. <Laminate> The method for forming the laminate of the first aspect is not particularly limited, and may be appropriately selected as needed, and it is preferred to apply the coating on the substrate at the surface of the coating. 56 201235781 41436pit Photosensitive The solder composition is formed and dried to form a photosensitive layer. The method of coating and drying is not particularly limited, and may be appropriately selected as needed, and examples thereof include a spin coater, a slit spin coater, a roll coater, a die coater, a curtain coater, and the like. And a method of applying the photosensitive resist composition solution. The method for forming the laminate of the second aspect is not particularly limited, and may be appropriately selected as needed. Preferably, at least one of heating and pressurizing the photosensitive film is laminated on the photosensitive film. a method on the substrate. Further, in the case where the photosensitive resist film has the protective film, it is preferred that the protective film is peeled off and laminated so that the photosensitive layer is superposed on the substrate. The temperature of the heating is not particularly limited and may be appropriately selected as needed. Preferably, it is 70 〇C to 13 (TC, more preferably 8 〇〇c~u〇t: the pressure of the pressurization is not It is particularly limited, and may be appropriately selected as needed. Preferably, it is 0.01 MPa to 1.0 MPa, more preferably 0.05 MPa to 1.0 MPa. The apparatus for performing at least either of the heating and pressurization and the helmet = if necessary Suitable examples include, for example, a hot press, heat == eight (for example, VP-II manufactured by Taisei Laminator Co., Ltd.), and a vacuum paste machine (for example, MVLp5 manufactured by Nimko Seisakusho Co., Ltd. as a preferred device). <Exposure Step> The exposure step is a step of pattern exposure of the photosensitive layer. As the object of the exposure, as long as it is a material having a photosensitive layer, 57 201235781 41436pif is not particularly limited, and may be appropriately selected as needed Preferably, it is preferably carried out on the laminate in which the photosensitive anti-caries composition or the photosensitive resist film is formed on a substrate. The exposure to the laminate is not particularly limited, and is visible. Need and suitable For example, the photosensitive layer may be exposed by interposing the support, the underlayer and the PC layer; after the support is peeled off, the photosensitive layer may be interposed by interposing the underlayer and the pc layer. Exposing; after the support and the underlayer are peeled off, the photosensitive layer is exposed through the PC layer; after the support, the underlayer and the PC layer are peeled off, the photosensitive layer may be exposed The exposure is not particularly limited, and may be appropriately selected as needed, and may be, for example, digital exposure, analog exposure, etc. Among these, digital exposure is preferred. The digital exposure is not particularly limited and may be appropriately selected as needed. Selecting, = preferably, generating a control signal based on the formed image_information - using the light modulated by the sin control signal. The digital exposure mechanism is not particularly limited, and may be needed For example, the light-modulating mechanism «light-modulating mechanism" that changes the light irradiated from the light-irradiating mechanism based on the formed image is not included. η morphograms as the light modulation The mechanism is particularly limited as long as it can adjust the light, and may be appropriately selected as needed, and preferably has a light modulation mechanism of the portion. The light modulation mechanism having the n moiré portions is not particularly limited. 58 201235781 414JOplt It is preferable to select a space light modulation element as needed. The spatial light modulation element is not particularly limited and may be appropriately selected as needed. For example, a digital micro-mirror device may be cited. 'DMD), MEMS (Micr〇Electr〇Mechanical Systems, MEMS) spatial light modulation components (SLM; Spedal Light
Modulator)、利用電光效應對透射光進行調變之光學元件 (PLZT元件)、液晶光閘(FLc)等。 3亥些中較佳的疋數位微鏡裳置(〇丨妍31 Micr〇_mjrr〇r Device,DMD)。 而且,較佳的是所述光調變機構具有基於所形成之圖 案信息而生成控制訊號之圖案訊號生成機構。於此情形 時,所述細變機構根·訊號生成機構所生成之 控制訊號而對光進行調變。 所述控制訊號並無特別限制,可視需要而適宜選擇, 例如可列舉數位訊號。 <顯影步驟> 所述顯W步驟是於藉由所述曝光步驟對所述感光層進 本使該感光層之曝光之區域硬化後,藉由將未硬化 ^域除去而進行顯影,形成永久圖案之步驟。 而嘀戶!硬化區域之除去方法並無特別限制,可視需要 而適且選擇,例如可列舉使用顯影液而除去之方法等。 如可無特別限制’可視需要而適宜選擇’例 ^ m驗土金屬之氫氧化物或碳酸鹽、碳 -乳水、四級銨鹽之水溶液等。該些中較佳的是碳酸納 59 201235781 41436pif 水溶液。 消泡劑、有機鹼或用 以界面活性劑 促進顯衫之有機溶劑等併用。 所述有機鹼並無特別限制 如可列舉苯甲胺、乙1 ^ 了視而要而適且選擇,例 乙三胺、二r极〇、 醇胺、四曱基氫氧化銨、二 醇胺等。—胺(tnethylene Pentamine )、嗎啉、三乙 例如二合劑並無特別限制,可視需要而適宜選擇, σσ 1舉醇類、酮類、g旨類、賴、軸類、内醋類等 人,述顯影液可為水或驗性水溶液與有機溶. 。而成之水㈣影液’亦可單獨為有機關。 " <硬化處理步驟〉 處理^的是本發明之永久騎形成綠進—步包含^ 、所述硬化處理步驟是於進行所述顯影步驟後, 成之永久圖案中之感光層進行硬化處理的步驟。 元 所述硬化處理並無特別限制,可視需要而適宜選 例如可列舉整個面曝光處理、整個面加熱處理等。 , 所述整個面曝光處理之方法並無特別限制,可視咖 而適宜選擇’例如可列舉於所述顯影步驟後,對形成=要 述永久圖案之所述積層體上的整個面進行曝光之方法等所 藉由該整個面曝光,促進形成所述感光層之感光性抗焊劑 組成物中之樹脂之硬化,所述永久圖案之表面硬化二评 進行所述整個面曝光之裝置並無特別限制,可視需要 201235781 41436pit 而適宜選擇,例如可列舉超高壓水銀燈等1;乂曝光機等。 所述整個面加熱處理之方法並無特別限制,可視 而適宜選擇,例如可列舉於所述顯影步驟後,對形成^ 述永久圖案之所述積層體上之整個面進行加熱之方法等。 藉由該整個面加熱,可提高所述永久圖案之表面之膜強度。 所述整個面加熱之加熱溫度並無特別限制,可視: 而適宜選擇,較佳的是12〇t:〜25(rc,更佳的是12 20代。若所述加熱溫度不足靴,則存在無法獲得純 處理所帶來之膜強度提高之現象;若超過2抑,則存^ 所述感光性抗焊劑組成物中之樹脂產生分解,膜質變弱織 脆之現象。 t 所述整個面加熱中之加熱時間並無特別限制 要而適宜選擇,較佳的是1〇分鐘〜12〇分鐘,更佳 而 分鐘〜60分鐘。 疋) 進行所述整個面加熱之裝置並無特別限制,可視 選擇,例如可列舉烘箱、加熱板、紅外線(IR)加 另外,於所述基材為多層配線基板等印刷線路板之 形時,可於該印刷線路板上形成本發明之永久圖案 步以如下方式進行嬋接。 、 亦即’藉由所述顯影步驟,形成所述永久圖案之硬化 曰’於所述印刷線路板之表面露出金屬層。對該印刷線路 板之表面所露出之金屬層之部位精鍍金後,進行 其次’於進行焊接之部位封料導體或零件等。此時,所 61 201235781Modulator), an optical element (PLZT element) that modulates transmitted light by an electro-optical effect, a liquid crystal shutter (FLc), and the like. The better digital micromirror is placed in 3 hai (〇丨妍31 Micr〇_mjrr〇r Device, DMD). Moreover, it is preferable that the optical modulation means has a pattern signal generating means for generating a control signal based on the formed pattern information. In this case, the light is modulated by the control signal generated by the fine-tuning mechanism root signal generating means. The control signal is not particularly limited and may be appropriately selected as needed, and for example, a digital signal may be cited. <Developing Step> The step of developing the W is performed by curing the region of the photosensitive layer exposed by the exposure step by the exposure step, and then developing by removing the uncured region to form The steps of the permanent pattern. The method of removing the hardened region of the Seto! is not particularly limited, and may be appropriately selected as needed, and examples thereof include a method of removing it by using a developing solution. If it is not particularly limited, it may be selected as appropriate, and an aqueous solution of a metal hydroxide or carbonate, a carbon-milk, a quaternary ammonium salt, or the like may be used. Preferred among these are sodium carbonate 59 201235781 41436 pif aqueous solution. An antifoaming agent, an organic base or an organic solvent which promotes the shirt with a surfactant can be used in combination. The organic base is not particularly limited, and may be exemplified by benzylamine and ethyl bromide. Examples include ethylenetriamine, dir-rhodium hydride, alkanolamine, tetradecylammonium hydroxide, and diolamine. Wait. - amine (tnethylene Pentamine), morpholine, triethyl, for example, a dihesive agent is not particularly limited, and may be appropriately selected as needed, and σσ 1 is an alcohol, a ketone, a g-type, a lysine, a shaft, an internal vinegar, and the like. The developer may be water or an aqueous solution and organic solvent. The water (4) Shadow Liquid can also be used separately. <<hardening treatment step> The treatment is a permanent ride forming green step of the present invention. The hardening treatment step is performed after the development step, and the photosensitive layer in the permanent pattern is hardened. A step of. The hardening treatment is not particularly limited, and may be appropriately selected as necessary. Examples thereof include the entire surface exposure treatment and the entire surface heat treatment. The method for exposing the entire surface is not particularly limited, and may be appropriately selected by a coffee maker. For example, the method of exposing the entire surface on the laminated body forming the permanent pattern to be described after the development step may be mentioned. And the exposure of the entire surface promotes hardening of the resin in the photosensitive solder resist composition of the photosensitive layer, and the surface hardening of the permanent pattern is not particularly limited. It is suitable for the selection of 201235781 41436pit, and examples thereof include an ultrahigh pressure mercury lamp and the like; a 乂 exposure machine. The method of heat treatment of the entire surface is not particularly limited and may be appropriately selected. For example, a method of heating the entire surface of the laminate in which the permanent pattern is formed after the development step may be mentioned. By heating the entire surface, the film strength of the surface of the permanent pattern can be increased. The heating temperature of the whole surface heating is not particularly limited, and may be selected as appropriate: 12 〇t: 〜25 (rc, more preferably 12 20 generations. If the heating temperature is insufficient, the shoe exists. The phenomenon that the film strength is improved by the pure treatment cannot be obtained; if it exceeds 2, the resin in the photosensitive solder resist composition is decomposed, and the film quality is weakened and woven. The heating time is not particularly limited and is preferably selected, and is preferably from 1 minute to 12 minutes, more preferably from minute to 60 minutes. 疋) The apparatus for performing the entire surface heating is not particularly limited, and is visually selectable. For example, an oven, a hot plate, and an infrared ray (IR) may be used. When the substrate is in the form of a printed wiring board such as a multilayer wiring board, the permanent pattern step of the present invention may be formed on the printed wiring board in the following manner. Make a connection. That is, by the developing step, the hardened 曰' of the permanent pattern is formed to expose a metal layer on the surface of the printed wiring board. After the gold layer is exposed to the surface of the printed wiring board, the portion of the metal layer is subjected to soldering, and the conductor or the component is sealed. At this time, the department 61 201235781
Wbpif 述硬化層之永久圖案發揮作為保護膜或絕緣膜(層間絕緣 膜)之功能,防止來自外部之衝擊或者彼此相鄰之電極之 導通。 於本發明之永久圖案形成方法中,較佳的是形成保護 膜及層間絕緣膜之至少任一者。由所述永久圖案形成方法 而形成之永久圖案若為所述保護膜或所述層間絕緣膜,則 可保護配線免受外部之衝擊或彎曲的影響,特別是於其為 所述層間絕緣膜之情形時,例如可用以將半導體或零件高 後、度地封裝於多層配線基板或增層配線基板等上。 本發明之永久圖案形成方法可高速地形成圖案,因此 可廣泛地用於各種圖案之形成中,特別是可適宜地用於配 線圖案之形成中。 而且利用本發明之永久圖案形成方法而形成之永久 圖案具有優異之絕緣性、耐鍍敷性、圖案側面之平滑性等, 可適宜地用作保護膜、層間絕緣膜、抗焊圖案。 (印刷基板) ,、本發明之印刷基板至少包含基材、藉由所述永久圖案 形成方法而形成之永久圖案,進一步視需要而包含適宜選 擇之其他構成。 其他構成並無特別限制,可視需要而適宜選擇,例如 可列舉於基材與所述永久圖案之間進一步設有絕緣層之增 層基板等。 [實例] 以下,列舉實例對本發明加以更具體之說明,但本發 62 201235781 41436pif 明並不受該些實例任何限制。 (合成例1) <化合物T-1之合成> 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫吱喃150 g、N-曱基0比洛〇定酮100 g、及3-胺基-1,2,4-三唑84.1 g (默克股份有限公司製造)。於攪拌下以30分 鐘滴加四氫呋喃l〇〇g、及甲基丙烯酸-2-異氰酸基乙基酯 155.2g(karenzMOI、昭和電工公司製造)。其後,於40°C 下攪拌1小時後,於70°C下進行4小時之反應。冷卻至室 溫後,將反應液投入至強烈攪拌下的離子交換水2 L中, 析出目標物晶體。藉由曱醇進行清洗而濾取析出物,使其 乾燥而獲得下述結構之化合物T-1 222 g。 [化 14]Wbpif The permanent pattern of the hardened layer functions as a protective film or an insulating film (interlayer insulating film) to prevent external impact or conduction between adjacent electrodes. In the permanent pattern forming method of the present invention, it is preferred to form at least one of a protective film and an interlayer insulating film. If the permanent pattern formed by the permanent pattern forming method is the protective film or the interlayer insulating film, the wiring can be protected from external impact or bending, in particular, it is the interlayer insulating film. In this case, for example, it is possible to package the semiconductor or the component in a high-degree and high-degree manner on a multilayer wiring substrate, a build-up wiring substrate, or the like. The permanent pattern forming method of the present invention can form a pattern at a high speed, and thus can be widely used in the formation of various patterns, and particularly can be suitably used in the formation of a wiring pattern. Further, the permanent pattern formed by the permanent pattern forming method of the present invention has excellent insulating properties, plating resistance, smoothness of the side surface of the pattern, and the like, and can be suitably used as a protective film, an interlayer insulating film, and a solder resist pattern. (Printed substrate) The printed circuit board of the present invention comprises at least a base material, a permanent pattern formed by the permanent pattern forming method, and further includes other structures which are appropriately selected as needed. The other configuration is not particularly limited, and may be appropriately selected as needed. For example, a build-up substrate in which an insulating layer is further provided between the substrate and the permanent pattern may be mentioned. [Examples] Hereinafter, the present invention will be more specifically described by way of examples, but the present invention is not limited by these examples. (Synthesis Example 1) <Synthesis of Compound T-1> Into a 2,000-mL 3-necked flask equipped with a reflux tube and a thermometer, 150 g of tetrahydrofuran, 100 g of N-mercapto 0, and 100 g of lozendine were added. And 3-amino-1,2,4-triazole 84.1 g (manufactured by Merck & Co., Ltd.). Under stirring, tetrahydrofuran l〇〇g and ethyl 2-isocyanatoethyl methacrylate 155.2 g (manufactured by Karenz MOI, Showa Denko Co., Ltd.) were added dropwise. Thereafter, the mixture was stirred at 40 ° C for 1 hour, and then reacted at 70 ° C for 4 hours. After cooling to room temperature, the reaction liquid was poured into 2 L of ion-exchanged water under vigorous stirring to precipitate a target crystal. The precipitate was collected by washing with decyl alcohol, and dried to give the compound T-1 222 g of the following structure. [Chem. 14]
(合成例2) <化合物T-2之合成> 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫吱喃120 g、N-甲基0比洛唆酮70 g、3,5-二胺基-1,2,4· 三唑49.5§(〇6§1^&公司製造)及2,4-二-第三丁基-4-曱 基苯酚1.8g(PN-01、大内新興化學工業公司製造)。於攪 拌下,以2小時滴加四氫呋喃80 g、及丙烯酸-2-異氰酸基 63 201235781 41436pif 乙酉曰141.1 g ( Karenz ΑΟΙ、昭和電工公司製造)。其後, 於4〇C下使其反應20小時。冷卻至室溫後,將反應液投 入至強烈擾拌下的離子交換水2 L中,析出目標物晶體。 藉由曱醇進行清洗而濾取析出物,使其乾燥而獲得卞述妹 構之化合物T-2 165.1 g。 [化 15](Synthesis Example 2) <Synthesis of Compound T-2> In a 2,000 mL 3-necked flask equipped with a reflux tube and a thermometer, tetrahydrofuran 120 g, N-methyl 0-poicone 70 g, 3 were added. , 5-diamino-1,2,4·triazole 49.5§(〇6§1^&Company) and 2,4-di-tert-butyl-4-nonylphenol 1.8g (PN- 01, manufactured by Ou Nei Emerging Chemical Industry Co., Ltd.). Under stirring, 80 g of tetrahydrofuran and 2-ethyl isocyanate 63 201235781 41436pif acetonitrile 141.1 g (manufactured by Karenz ΑΟΙ, Showa Denko Co., Ltd.) were added dropwise thereto over 2 hours. Thereafter, the reaction was allowed to proceed at 4 ° C for 20 hours. After cooling to room temperature, the reaction solution was poured into 2 L of ion-exchanged water which was strongly disturbed to precipitate a target crystal. The precipitate was collected by washing with methanol, and dried to give a compound T-2 165.1 g. [化15]
(合成例3) <化合物T-3之合成> 中炉 於具有回流管及溫度計之2,000mL之3 口燒瓶 N-甲基吡咯啶酮250 g、及3,5-二胺基-1,2,4-三唑49’ . (Degussa公司製造)。於攪拌下,以2小時滴加N·*心 > 卜. 咯顿80 g、及四氫鄰苯二甲咖g (丨〇 TH、新日本理化公司製造)。其後,於4〇°C下進行1 , ,柝出 清洗 之攪拌後,於100°c下使其反應丨2小時。冷卻至家 將反應液投入至強烈攪拌下之離子交換水L2 L中 目標物晶體。藉由異丙醇/己烷(2/8 (重量比))進打 而濾取析出物,使其乾燥而獲得下述結構之化舍物 121.1 g。 64 201235781 41436pif [化 16](Synthesis Example 3) <Synthesis of Compound T-3> The furnace was placed in a 2,000 mL 3-neck flask with a reflux tube and a thermometer, N-methylpyrrolidone 250 g, and 3,5-diamino-1 , 2,4-triazole 49' (manufactured by Degussa). Under stirring, N·* heart > 卜. 咯 80 80 g, and tetrahydrophthalic acid g (丨〇 TH, manufactured by Nippon Chemical and Chemical Co., Ltd.). Thereafter, the mixture was stirred at 4 ° C for 1 hour, and the mixture was stirred and washed, and then allowed to react at 100 ° C for 2 hours. Cooling home The reaction solution is poured into the target crystals in ion-exchanged water L2 L under vigorous stirring. The precipitate was collected by isopropyl alcohol/hexane (2/8 (by weight)), and dried to obtain 121.1 g of the following structure. 64 201235781 41436pif [Chem. 16]
T-3 (合成例4 ) <化合物Τ-4之合成> 於具有回流管及溫度計之1 ,〇〇〇 mL之3 口燒瓶中加入 第三丁基曱基酮250 g、1,2,4-三唑34.5 g (純正化學工業 公司製造)、二環戊基二曱醇二丙烯酸酯145.7g(A-DCP、 新中村化學工業公司製造)、及2,4-二-第三丁基-4-曱基苯 酚1.9 g (PN-01、大内新興化學工業公司製造)。於40°C 下攪拌1小時後,於80°C下使其反應52小時。冷卻至室 溫後,藉由減壓濃縮而除去有機溶劑,由此而獲得下述結 構之化合物T-4 178 g。 [化Π] ΟT-3 (Synthesis Example 4) <Synthesis of Compound Τ-4> In a 3-neck flask having a reflux tube and a thermometer of 1, 〇〇〇mL, a t-butyl decyl ketone 250 g, 1, 2 was added. , 4-triazole 34.5 g (manufactured by Junsei Chemical Industry Co., Ltd.), dicyclopentyl decyl diacrylate diacrylate 145.7 g (A-DCP, manufactured by Shin-Nakamura Chemical Co., Ltd.), and 2,4-di-third曱-4-mercaptophenol 1.9 g (PN-01, manufactured by Ouchi Shinko Chemical Industry Co., Ltd.). After stirring at 40 ° C for 1 hour, the mixture was reacted at 80 ° C for 52 hours. After cooling to room temperature, the organic solvent was removed by concentration under reduced pressure, whereby Compound T-4 178 g of the following structure was obtained. [Π化] Ο
(合成例5) <含有羧基之高分子化合物B-4(酸改質含有乙烯性不 飽和基之聚胺基曱酸酯樹脂)之合成> 65 201235781 41436pif 於具有冷凝器及攪拌機之5〇〇乱之三口圓底燒瓶 内’使痛果酸2,41 g (〇莫耳)、2>雙(經基曱基)丙酸 (DMPA) 5.23 g (G·莫耳)、及丙三醇單甲基丙稀酸醋 17.78 g (0.111莫耳)溶解於環己酮% mL中。於其中添 加4,4-二苯基曱烷二異氰酸酯(Mm)3〇 〇3 g(〇 12莫耳)、 六亞曱基二異氰酸酯(HMDI) 5 〇5 g (〇 〇3莫耳)、2 6_ 二-第三丁基羥基甲笨〇1 g、及作為觸媒之商品名: NEOSTANN U-_ (日東化成公司製造”化於饥下 進行5小時之加熱攪拌。其後,藉由曱醇961 mL加以稀 釋而搜拌30分鐘,獲得165 g之含有缓基之高分子化合物 B-4溶液(固形物為45 wt% )。 所得之含有叛基之高分子化合物β·4溶液之固形物酸 值為68 mgKOH/g ’藉由凝膠滲透層析法(Gpc)而測定 之重量平均分子量(聚苯乙烯標準)為6 5〇〇,乙烯性不 飽和基當量為1.83 mmol/g。 所述酸值是依據JiS K0070而測定。其中,於樣品並 不溶解之情形時,使用二噁烷或四氫呋喃等作為溶劑。 所述重量平均分子量是使用高速GPC裝置(東洋曹達 工業股份有限公司製造之HLC_8〇2A),以〇.5 wt%之四氫 °夫喃(THF )溶液為試樣溶液,管枉使用1根 HZM-M,注入200 μί之試樣,藉由所述THF溶液進行溶 離,於25°C下利用折射率檢測器或υν檢測器(檢測波長 為254 nm )而測定。 所述乙烯性不飽和基當量可藉由依據JIS K2605測定 66 201235781 41436pif 臭值而求出。 (合成例6 ) <含有羧基之高分子化合物B-5(酸改質含有乙烯性不 飽和基之聚胺基曱酸酯樹脂)之合成> 於具有冷凝器及擾拌機之500 mL之三口圓底燒瓶 中’使2,2-雙(羥基甲基)丙酸(DMBA) 32.00 g (0.216莫 耳)、聚丙二醇(分子量為 1 000) (PPG1〇〇0)9.〇〇g(〇.〇〇9 莫耳)溶解於丙二醇單曱醚單乙酸酯118 mL中。於其中 添加4,4-二苯基曱烷二異氰酸酯(MDI) 37.54 g (0.15莫 耳)、2,6_二-第三丁基羥基曱苯0.1 g、及NEOSTANN U-600 (曰東化成公司製造)〇.2 g,於75〇C下攪拌5小時後,添 加曱醇9.61 g。其後,進一步添加作為含有乙烯性不飽和 基之環氧化合物的曱基丙烯酸縮水甘油酯(GMA) 17.91 g (0.126)與作為觸媒之三苯基膦5,000 ppm,於11〇°Ct 攪拌5小時後,冷卻至室溫,獲得214 g之含有羧基之高 分子化合物B-5溶液。 所得之含有羧基之高分子化合物B-5溶液之固形物酸 值為75 mgKOH/g ’藉由凝膠滲透層析法(GPC)而測定 之重量平均分子量(聚苯乙烯標準)為12,〇〇〇,乙烯性不 飽和基當量為1.3 mmol/g。 (實例1) <感光性組成物塗佈液1之調製> 將下述各成分加以混合,調製感光性組成物塗佈液1 (感光性抗焊劑組成物塗佈液)。 67 201235781 41436pif ZFR-1776 (日本化藥公司製造、酸改質含有乙烯性不 飽和基之環氧樹脂之6 5 w t %乙酸甲氧基丙酯溶液)(B -1 ) 32.3重量份 化合物T-1 0.8重量份 著色顏料:HELIOGEN BLUE D7086 (BASF 公司製 造) 0.021重量份 著色顏料:Pariotol Yellow D0960 ( BASF 公司製造) 0.006重量份 分散劑:Solsperse24000GR (路博潤公司製造) 0.22重量份 聚合性化合物:DCP-A (共榮社化學公司製造) 5.3重量份 起始劑:Irgacure9〇7 (BASF公司製造) 0.6重量份 增感劑:DETX-S (曰本化藥股份有限公司製造) 0.005重量份 反應助劑:EAB-F (保土谷化學公司製造) 0.019重量份 硬化劑:三聚氰胺(和光純藥公司製造) 0.16重量份 熱交聯劑:Epotohto YDF-170 2.9重量份 (新日鐵化學公司製造、具有環氧乙烷基之化合物(雙 酚F型環氧樹脂)) 68 201235781 41436ριί 填料.SO-C2 (AdmatechsCo. Ltd·製造) 8 0重量份 離子捕捉劑:IXE_6107 (東亞合成公司製造) 0·82重量份 塗佈助劑:Megafac F-780F 0.2重量份 (DIC公司製造,30 wt%丁酮溶液) 彈性體:Espel 1612 2.7重量份 環己酮(溶劑) 38.7重量份 <感光性抗焊劑膜1之製作> 使用厚度為25 μιη之聚對苯二曱酸乙二酯膜(pET) 作為支,體’藉由棒式塗佈機賴贼綠組成物塗佈液 1以乾燥後之感光層之厚度成為約30叫之方式塗佈於該 支樓體上,於贼、熱職環狀雜巾使其乾燥30分 鐘’製作感光性抗焊劑膜1。 <永久圖案之形成> -積層體之調製- 使用於表面實施了化學研磨處理之已形成有配線之覆 銅積層板(無通孔、鋼厚之印刷線路板)作為基材。 使用真空貼合機(名機製作所股份有限公司製造、 MVLP500)’以所述感光性抗焊劑膜1之感光層與所述覆 銅積層板相接之方式而使其積層於該覆銅積層板上,調製 順次積層有所述覆銅積層板、所述感光層、所述聚對苯二 曱酸乙二酯膜(支擇體)之積層體。 壓接條件疋壓接溫度為、壓接壓力為0.4 MPa、 69 201235781 41436pif 層壓速度為1 m/min。 關於上述所得之積層體,藉由以下所示之評價方法而 形成光阻圖案。 -曝光步驟- 對於所述調製之積層體中之感光層,使用具有規定圖 案之利用藍紫光雷射曝光之圖案形成裝置,自聚對笨二曱 酸乙二酯膜(支撐體)側,以獲得規定圖案之方式以40 mJ/cm2之能量之量照射4〇5 nm之雷射光而進行曝光,使 所述感光層之一部分區域硬化。 -顯影步驟- 於室溫下靜置10分鐘後,自所述積層體上剝下聚對苯 二曱酸乙二酯膜(支撐體),使用1 wt%碳酸鈉水溶液作為 驗性顯影液,於30eC下以0.18 MPa ( 1.8 kgf/cm2)之壓力 對覆銅積層板上之感光層之整個面進行喷射顯影60秒,將 未曝光之區域溶解除去。其後,進行水洗,使其乾燥而形 成永久圖案。 -硬化處理步驟- 對形成有所述永久圖案之積層體之整個面’於150。〇 下實施1小時之加熱處理’使永久圖案之表面硬化,提高 膜強度而製作試板。 <評價方法> 藉由以下所示之評價方法’對圖案侧面之平滑性、絕 緣性、财熱衝擊性(抗龜裂性)、及财鏟敷性進行評價。將 結果示於表1中。 201235781 414Jbpif _圖案側面之平滑性-用掃描式電子顯微鏡(SEM) 成之水久圖案之侧面進行攝$,— 述頌影步驟中所形 案側面之平滑性進行評價。~ 下之評價基準對圖 [評價基準] ο:圖案側面平滑,圖案形狀優異。 於圖案側面觀察到稍許之凹凸 但為良好之圖 〇△ 案形狀 △:於圖案側面存在凹凸’圖案形狀稍差 X.於圖案側面發現凝聚物,圖案形狀差。 絕緣性- ^=氧玻璃基材上積層有12 _厚銅的印刷基板 :銅;r蝕刻’獲得線寬/間隙寬為50 _50 μιη、線相 =之間並不接觸之相互對向之同—面上的梳型電極。與所 述積層體之調製方法中所記載之方法同樣地將感光性抗焊 劑膜1積層於該基板之梳型電極上,藉由最佳曝光量(3〇〇 mJ/cm〜1 J/cm )進行曝光。其次,於常溫下靜置】小時 後,藉由30C之1 wt%碳酸鈉水溶液進行6〇秒之噴射顯 影,進一步於80°C下進行1〇分鐘之加熱(乾燥)。繼而利 用ORC MANUFACTURING c〇., LTD.製造之紫外線照射 裝置而藉由1 J/cm2之能量之量進行對感光層之紫外線照 射。進一步於150°C下對感光層進行6〇分鐘之加熱處理, 藉此獲得形成有厚度為25 μιη之抗焊劑的評價用基板。 以對加熱後之評價用積層體之梳型電極間施加電壓之 71 201235781 41436pif 2雪;!由Sn/Pb焊錫將聚四氟乙烯製遮蔽線連接於該些 檢型電極上之後,於對評價用積層體印可5V之電壓f •,下:將該評價用積層體於13(TC、85%RH之超 =(Synthesis Example 5) <Synthesis of a polymer compound B-4 containing a carboxyl group (a polyamine phthalate resin having an acid-modified ethylenically unsaturated group)> 65 201235781 41436pif 5 with a condenser and a stirrer In a three-neck round bottom flask, '2,41 g (〇莫耳), 2> bis(pyridinyl)propionic acid (DMPA) 5.23 g (G·mole), and C3 Alcohol monomethyl acrylate vinegar 17.78 g (0.111 mol) was dissolved in cyclohexanone % mL. Adding 4,4-diphenyldecane diisocyanate (Mm) 3〇〇3 g (〇12 mol), hexamethylene diisocyanate (HMDI) 5 〇5 g (〇〇3 mol), 2 6_ di-t-butylhydroxymethyl alum 1 g, and the trade name of the catalyst: NEOSTANN U-_ (made by Nitto Chemical Co., Ltd.) for 5 hours of heating and stirring under hunger. Thereafter, by 曱The alcohol was diluted with 961 mL and mixed for 30 minutes to obtain 165 g of a polymer compound B-4 solution containing a slow base (solid content: 45 wt%). The solid form of the obtained polymer compound β·4 solution containing a ruthenium group was obtained. The acid value of the acid was 68 mgKOH/g. The weight average molecular weight (polystyrene standard) determined by gel permeation chromatography (Gpc) was 65 Å, and the ethylenically unsaturated group equivalent was 1.83 mmol/g. The acid value is determined in accordance with JiS K0070. In the case where the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The weight average molecular weight is a high-speed GPC device (manufactured by Toyo Soda Industrial Co., Ltd.). HLC_8〇2A), with a solution of 55 wt% tetrahydrofuran (THF) For the solution, one HZM-M was used, and a 200 μί sample was injected, and the solution was dissolved by the THF solution, and the refractive index detector or the υν detector (detection wavelength: 254 nm) was measured at 25 ° C. The ethylenically unsaturated group equivalent can be determined by measuring the odor value of 66 201235781 41436pif according to JIS K2605. (Synthesis Example 6) <Polymer-containing polymer compound B-5 (acid-modified contains ethylenic unsaturation) Synthesis of polyamino phthalate resin) > 2,2-bis(hydroxymethyl)propionic acid (DMBA) 32.00 g in a 500 mL three-neck round bottom flask equipped with a condenser and a scrambler (0.216 mol), polypropylene glycol (molecular weight 1 000) (PPG1〇〇0) 9. 〇〇g (〇.〇〇9 Moer) dissolved in propylene glycol monoterpene ether monoacetate 118 mL. Add 4,4-diphenyldecane diisocyanate (MDI) 37.54 g (0.15 mol), 2,6-di-t-butylhydroxyindole 0.1 g, and NEOSTANN U-600 (manufactured by Mindong Chemical Co., Ltd.) 2 g, after stirring at 75 ° C for 5 hours, 9.61 g of decyl alcohol was added. Thereafter, further added as an epoxide containing an ethylenically unsaturated group Glycidyl methacrylate (GMA) 17.91 g (0.126) and 5,000 ppm of triphenylphosphine as a catalyst, stirred at 11 ° C for 5 hours, then cooled to room temperature to obtain 214 g of carboxyl group Molecular compound B-5 solution. The solid acid value of the obtained carboxyl group-containing polymer compound B-5 solution was 75 mgKOH/g. The weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) was 12, 〇 The oxime has an ethylenically unsaturated group equivalent of 1.3 mmol/g. (Example 1) <Preparation of photosensitive composition coating liquid 1> Each of the following components was mixed to prepare a photosensitive composition coating liquid 1 (photosensitive solder composition coating liquid). 67 201235781 41436pif ZFR-1776 (65 wt% methoxypropyl acetate solution of epoxy resin modified with ethylenically unsaturated group, manufactured by Nippon Kagaku Co., Ltd.) (B -1 ) 32.3 parts by weight of compound T- 1 0.8 parts by weight of a coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF Corporation) 0.021 parts by weight of a coloring pigment: Pariotol Yellow D0960 (manufactured by BASF Corporation) 0.006 parts by weight of a dispersing agent: Solsperse 24000GR (manufactured by Lubrizol Corporation) 0.22 parts by weight of a polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by weight of initiator: Irgacure 9〇7 (manufactured by BASF Corporation) 0.6 parts by weight of sensitizer: DETX-S (manufactured by Sakamoto Chemical Co., Ltd.) 0.005 parts by weight of reaction Auxiliary: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 0.019 parts by weight of hardener: melamine (manufactured by Wako Pure Chemical Industries, Ltd.) 0.16 parts by weight of thermal crosslinking agent: Epotohto YDF-170 2.9 parts by weight (manufactured by Nippon Steel Chemical Co., Ltd. Compound having an oxirane group (bisphenol F type epoxy resin)) 68 201235781 41436ριί Filler. SO-C2 (manufactured by Admatechs Co. Ltd.) 80 parts by weight ion trapping :IXE_6107 (manufactured by Toagosei Co., Ltd.) 0·82 parts by weight of coating aid: Megafac F-780F 0.2 parts by weight (manufactured by DIC Corporation, 30 wt% of methyl ethyl ketone solution) Elastomer: Espel 1612 2.7 parts by weight of cyclohexanone (solvent) 38.7 parts by weight <Preparation of photosensitive solder resist film 1> A polyethylene terephthalate film (pET) having a thickness of 25 μm was used as a support, and the body was treated with a bar coater. The composition coating liquid 1 is applied to the support body by the thickness of the photosensitive layer after drying, and is dried for 30 minutes in a thief and hot-grade annular napkin to prepare a photosensitive solder resist film. 1. <Formation of permanent pattern> - Modulation of laminated body - A copper-clad laminate (a printed wiring board having no through-hole or steel-thickness) on which a wiring has been subjected to chemical polishing treatment is used as a substrate. Using a vacuum laminator (manufactured by Nago Seisakusho Co., Ltd., MVLP500), the photosensitive layer of the photosensitive resist film 1 is laminated on the copper clad laminate so as to be in contact with the copper clad laminate. In the above, a laminate of the copper clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support) is sequentially laminated. The crimping conditions are 疋 crimping temperature, crimping pressure is 0.4 MPa, 69 201235781 41436pif lamination speed is 1 m/min. With respect to the laminate obtained above, a photoresist pattern was formed by the evaluation method shown below. - Exposure step - for the photosensitive layer in the laminated body of the modulation, using a pattern forming device using a blue-violet laser exposure with a predetermined pattern, self-polymerizing on the side of the ethylene phthalate film (support) A predetermined pattern was obtained by irradiating 4 〇 5 nm of laser light with an amount of energy of 40 mJ/cm 2 to expose a partial region of the photosensitive layer. - development step - after standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the laminate, and a 1 wt% aqueous solution of sodium carbonate was used as an experimental developer. The entire surface of the photosensitive layer on the copper clad laminate was spray-developed at 30 ° C under a pressure of 0.18 MPa (1.8 kgf/cm 2 ) for 60 seconds to dissolve and remove the unexposed areas. Thereafter, it was washed with water and dried to form a permanent pattern. - Hardening treatment step - the entire face of the laminated body in which the permanent pattern is formed is at 150. The heat treatment was carried out for 1 hour, and the surface of the permanent pattern was hardened to increase the film strength to prepare a test plate. <Evaluation Method> The smoothness, insulation, thermal shock resistance (crack resistance), and scraping property of the side surface of the pattern were evaluated by the evaluation method described below. The results are shown in Table 1. 201235781 414Jbpif _ Smoothness of the side of the pattern - The side of the pattern was formed by scanning electron microscopy (SEM), and the smoothness of the side of the pattern in the shadowing step was evaluated. ~ Evaluation benchmark pair chart [Evaluation criteria] ο: The pattern side is smooth and the pattern shape is excellent. A slight unevenness was observed on the side of the pattern, but it was a good figure. 〇 △ Case shape △: There were irregularities on the side of the pattern. The pattern shape was slightly inferior. X. Cohesives were found on the side of the pattern, and the pattern shape was poor. Insulation - ^ = printed substrate with 12 thick copper on the oxygen glass substrate: copper; r etching 'obtained line width / gap width 50 _50 μιη, line phase = no contact between each other The comb electrode on the surface. The photosensitive solder resist film 1 is laminated on the comb-shaped electrode of the substrate in the same manner as the method described in the method for preparing the laminate, and the optimum exposure amount (3 〇〇 mJ/cm 1 J/cm) ) for exposure. Next, after standing at room temperature for an hour, a 6-second spray of 30 wt% sodium carbonate aqueous solution was developed, and further heating (drying) was carried out at 80 ° C for 1 minute. Then, the ultraviolet ray irradiation device manufactured by ORC MANUFACTURING c., LTD. was used to irradiate the photosensitive layer with ultraviolet light by an amount of energy of 1 J/cm 2 . Further, the photosensitive layer was subjected to heat treatment at 150 ° C for 6 minutes to obtain a substrate for evaluation in which a solder resist having a thickness of 25 μm was formed. In the case of applying a voltage between the comb-shaped electrodes of the laminated body for evaluation after heating, 2012 201281 81 41436pif 2 snow; and the shielding wire of polytetrafluoroethylene is connected to the test electrodes by Sn/Pb solder, and then evaluated. Use a laminate to print a voltage of 5V f •, Bottom: Use this laminate for 13 (TC, 85% RH super =
尚濕哥命試驗(HAST)槽内靜置200小時。藉由1〇:: 之金相顯微鏡而觀察其後之評積層體的抗i劑之、卷^ 之產生程度,藉由以下之評價基準而進行評價。 LThe still wet test (HAST) was allowed to stand for 200 hours. The degree of occurrence of the anti-reagent of the subsequent evaluation layer was observed by a metallographic microscope of 1〇::, and the evaluation was performed by the following evaluation criteria. L
[評價基準] ◎ •未確認到遷移之產生’絕緣性優異 〇 :僅僅於銅上確認到遷移之產生,絕緣性良好 〇△.於SR (抗焊劑)中確認到稍許遷移,絕緣性稍 好 △.確認到遷移之產生,絕緣性稍差 x :電極間短路,絕緣性差 _抗龜裂性- 與所述積層體之調製方法中所記載之方法同樣地將感 光性抗焊劑膜1積層於在環氧玻璃基材上積層有^卜⑺厚 銅4的印刷基板上,介隔2 mm見方之光罩,使用〇RC MANUFACTURING CO.,LTD.製造之 HMW_201GX 型曝 光機,藉由可形成2 mm見方之圖案的最佳曝光量(3〇〇 mJ/cm2〜1 J/cm2)而進行曝光。其次,於常溫下靜置卜】、 時後,藉由30°C之1 wt°/。碳酸鈉水溶液進行6〇秒之喷射 顯影,進一步於8(TC下進行1 〇分鐘之加熱(乾燥)。繼而, 使用ORC MANUFACTURING CO.,LTD.製造之紫外線照 射裝置而藉由1 J/cm2之能量之量進行對感光層之紫外線 72 201235781 41436pit 照射。進一步於150°C下對感光層進行60分鐘之加熱處 理’藉此獲得具有2 mm見方之矩形間口部的形成有厚度 為25 μιη之抗焊劑的評價用基板。 反覆進行1,〇〇〇次如下之熱循環:將所得之基板於 -65°C之大氣中暴露15分鐘後’其次於i5〇°c之大氣中暴 露15分鐘,然後再次暴露於-65°C之大氣中。藉由光學顯 微鏡觀察通過熱循環之評價用基板的抗焊劑上的裂痕及剝 離程度,藉由下述評價基準而進行評價。 [評價基準] ◎ •於抗焊劑上無裂痕、剝落、變形,強勃性優異 〇 :於抗焊劑上存在稍許變形,但強韌性良好 :於抗焊劑上存在稍許裂痕,但強韌性稍好 A.於抗焊劑上存在猶許裂痕、剝落,強動性稍差 X:於抗焊劑上明顯存在裂痕、剝落,強韌性差 -耐鑛敷性- 對所述永久圖案進行脫脂而進行表面之粗化後,添加 硫酸銳而進行卿加成。其次,將永久圖案於赃之硫酸 鎳/稀硫酸溶液中浸潰40分鐘而進行鍍敷處 2而觀察永久圖案中之硬化膜之捲縮 基準而進行耐鍍敷性之評價。 [評價基準] ◎ •於硬化财並無捲縮、剝落,顺敷性極其優異 耐物色,但峨物上之問題, 73 201235781 41436pif △.於硬化膜中存在捲縮現象,耐鑛敷性差 X :於硬化膜中觀察到隆起(剝落),耐鍍敷性極差 (實例2) 於實例1中’將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1 )替換為 CyclomerP200HM (大赛璐化學工業公司製造、含有乙烯 性不飽和基及羧基之丙烯酸樹脂)(B-2)(於固形物中之 含量相同)’除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例3) 於實例1中,將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1 )替換為 UXE-3024 (日本化藥公司製造、酸改質含有乙烯性不飽和 基之聚胺基曱酸酯樹脂)(B-3)(於固形物中之含量相 同),除此以外與實例1同樣地進行而製作感光性組成物塗 佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例4) 於實例1中,將ZFR-1176 (曰本化藥公司製造、酸改 質含有乙婦性不飽和基之壞氧樹脂)(B-1)替換為合成例 5中所合成之含有羧基之高分子化合物(酸改質含有乙烯 201235781 41436pit 性=飽和基之聚胺基曱酸酯樹脂)(B_4)(於固形物中之 含量相同)’除此以外與實例丨同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 —關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例5 ) 於實例4中,將化合物T-1替換為化合物T-2,除此以 外與貫例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例6 ) 於實例4中,將化合物T-1替換為化合物T-3,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例7) 於實例4中’將化合物T-1替換為化合物T-4,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例8) 75 201235781 41436pif 於實例5中,將化合物T_2之調配量自相對於感光性 組成物塗佈液之固形物而言為i 7 wt%變更為3 〇 wt%,除 此以外與貫例5同樣地進行而製作感光性組成物塗佈液及 感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表丨中。 (實例9) 於貝例5中’將作為熱交聯劑之Ep〇t〇hto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧樹脂))替換為ETERNACOLL OXBP (宇部興產公司 製造、具有環氧丙烧基之化合物),除此以外與實例5同樣 地進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與貫例1同樣地進行評價。將結果示於表1中。 (實例10) 於實例5中,將作為熱交聯劑之Epotohto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 王衣氧树月曰))替換為Sumidur BL3175 (Sumika Bayer Urethane公司製造、具有嵌段異氰酸酯基之化合物),除此 以外一實例5同樣地進行而製作感光性組成物塗佈液及感 光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與貫例1同樣地進行評價。將結果示於表1中。 (實例11) 76 201235781 41436pif 於實例5中,將作為熱交聯劑之Epotohto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧樹脂))替換為YSLV-120TE (新日鐵化學公司製造、 具有環氧乙烷基之化合物)’除此以外與實例5同樣地進行 而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例12) 於貫例1中’將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-丨)替換為合成例 6中所合成之含有羧基之高分子化合物(酸改質含有乙烯 性不飽和基之聚胺基曱酸酯樹脂)(B-5)(於固形物中之 含量相同),除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例1) 於實例1中,並未調配τ_ 1化合物及熱交聯劑,除此 以外與實例1同樣地進行而製作感光性組成物塗佈液及感 光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例2 ) 於貫例1中,並未調配Τ-1化合物,除此以外與實例 77 201235781 41436pif 膜 @ #地•進行而製作感光性組成物塗佈液及感光性抗焊 劑 _關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例3 ) 於實例1中,將T-1化合物替換為IXE6107 (東亞合 成公司製造、無機離子交換體),除此以外與實例1同樣地 進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例4) 於實例1中,將T-1化合物替換為下述結構之化合物 T:Z(1,2,4-三唾)’除此以外與實例1同樣地進行而製作感 光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價》將結果示於表1中。 [化 18] Τ-Ζ[Evaluation Criteria] ◎ • The occurrence of migration was not confirmed. 'Insulation is excellent. 迁移: The migration was confirmed only on copper, and the insulation was good. △. A slight migration was observed in SR (solder resist), and the insulation was slightly better. It was confirmed that the migration occurred, and the insulation was slightly inferior x: short-circuit between the electrodes, and the insulation was poor. - Crack resistance - The photosensitive resist film 1 was laminated in the same manner as the method described in the method for preparing a laminate. On a printed circuit board with a thick copper layer 4 on the epoxy glass substrate, a 2 mm square mask was used, and a HMW_201GX type exposure machine manufactured by 〇RC MANUFACTURING CO., LTD. was used to form 2 mm. The exposure was performed by the optimum exposure amount of the square pattern (3 〇〇 mJ/cm 2 to 1 J/cm 2 ). Secondly, it is allowed to stand at room temperature, and then by 1 wt ° at 30 ° C. The sodium carbonate aqueous solution was subjected to jet development for 6 seconds, and further heated (dried) at 8 (TC for 1 minute). Then, an ultraviolet irradiation device manufactured by ORC MANUFACTURING CO., LTD. was used, and 1 J/cm 2 was used. The amount of energy was irradiated to the ultraviolet ray 72 201235781 41436pit of the photosensitive layer. The photosensitive layer was further heat-treated at 150 ° C for 60 minutes, thereby obtaining a rectangular thickness of 25 μm formed with a rectangular portion having a square of 2 mm square. Substrate for evaluation of flux. Repeatedly, the thermal cycle was as follows: the obtained substrate was exposed to the atmosphere at -65 ° C for 15 minutes, and then exposed to the atmosphere of i5 ° ° C for 15 minutes, then The film was again exposed to an atmosphere of -65 ° C. The degree of cracking and peeling on the solder resist of the substrate for evaluation by thermal cycling was observed by an optical microscope, and evaluated by the following evaluation criteria. [Evaluation Criteria] ◎ • No cracks, flaking, deformation and excellent sturdiness on the solder resist 〇: There is a slight deformation on the solder resist, but the toughness is good: there is a slight crack on the solder resist, but the toughness is slightly better. There are cracks and flaking on the solder resist, and the kinetic properties are slightly worse. X: There are obvious cracks and flaking on the solder resist, and the toughness is poor - the mineral-resistant property - the permanent pattern is degreased and the surface is rough. After the addition, the sulfuric acid was added to carry out the addition of the sulfuric acid. Secondly, the permanent pattern was immersed in the nickel sulfate/dilute sulfuric acid solution of the crucible for 40 minutes to carry out the plating 2 and the crimping standard of the cured film in the permanent pattern was observed. [Evaluation of plating resistance] [Evaluation criteria] ◎ • There is no curling or peeling in the hardening property, and it is extremely excellent in resistance to material color, but the problem on the object, 73 201235781 41436pif △. Shrinkage phenomenon, poor mineral resistance X: bulging (peeling) was observed in the cured film, and plating resistance was extremely poor (Example 2) In Example 1, 'ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified) (Epoxy Unsaturated Epoxy Resin) (B-1) is replaced by Cyclomer P200HM (Acetone Chemical Industry Co., Ltd., Acrylic Resin Containing Ethylene Unsaturated Group and Carboxyl Group) (B-2) (Content in Solids) Same) 'Other than the same as Example 1 The photosensitive composition coating liquid and the photosensitive solder resist film were produced in the same manner as in Example 1. The obtained photosensitive composition coating liquid and photosensitive resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 3) In Example 1, ZFR-1176 (manufactured by Nippon Kagaku Co., Ltd., acid modified epoxy resin containing ethylenically unsaturated group) (B-1) was replaced with UXE-3024 (Japanese chemical) Photosensitive composition was carried out in the same manner as in Example 1 except that the polyamino phthalate resin (B-3) having an ethylenically unsaturated group was produced by acid reduction (the same content in the solid content). Coating solution and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 4) In Example 1, ZFR-1176 (manufactured by Sakamoto Chemical Co., Ltd., acid modified to contain an ethylenically unsaturated group of bad oxygen resin) (B-1) was replaced with that synthesized in Synthesis Example 5. A polymer compound having a carboxyl group (acid modified with ethylene 201235781 41436 pit = saturated polyamino phthalate resin) (B_4) (the same content in the solid content) was carried out in the same manner as in Example 而A photosensitive composition coating liquid and a photosensitive solder resist film were produced. The photosensitive composition coating liquid and the photosensitive solder resist film obtained were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 5) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-2. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 6) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-3. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 7) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-4 in Example 4. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 8) 75 201235781 41436pif In Example 5, the compounding amount of the compound T_2 was changed from i 7 wt% to 3 〇 wt% with respect to the solid matter of the photosensitive composition coating liquid, and otherwise In the same manner as in Example 5, a photosensitive composition coating liquid and a photosensitive solder resist film were produced. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in the table. (Example 9) Ep〇t〇hto YDF-170 (a compound of bismuth F-type epoxy resin manufactured by Xinyi Iron Chemical Co., Ltd.) which is a thermal crosslinking agent in Shell 5 A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that it was replaced with ETERNACOLL OXBP (manufactured by Ube Industries, Ltd., having a propylene-based group). The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 10) In Example 5, Epotohto YDF-170 (manufactured by Xinyi Iron Chemical Co., Ltd., having an oxirane group (bisphenol F type Wangyi oxygen tree) was replaced by a thermal crosslinking agent) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that Sumidur BL3175 (a compound having a blocked isocyanate group manufactured by Sumika Bayer Urethane Co., Ltd.) was used. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 11) 76 201235781 41436pif In Example 5, Epotohto YDF-170 (manufactured by Xinyi Iron Chemical Co., Ltd., compound having oxirane group (bisphenol F type epoxy resin)) was replaced as a thermal crosslinking agent. A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that YSLV-120TE (manufactured by Nippon Steel Chemical Co., Ltd., having an oxirane group) was used. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 12) In Example 1, 'ZFR-1176 (epoxy resin modified by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group) (B-丨) was replaced with the content synthesized in Synthesis Example 6. A polymer compound of a carboxyl group (a polyamine phthalate resin containing an ethylenically unsaturated group as an acid-modified) (B-5) (the same content in a solid content) was produced in the same manner as in Example 1. Photosensitive composition coating liquid and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 1) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 1 except that the τ-1 compound and the thermal crosslinking agent were not prepared. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 2) The photosensitive composition coating liquid and the photosensitive solder resist were prepared in the same manner as in Example 77, except that the ruthenium-1 compound was not prepared in the same manner as in Example 77, 201235781 41436 pif film @#地• The photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 3) A photosensitive composition coating liquid and a photosensitive material were produced in the same manner as in Example 1 except that the T-1 compound was replaced with IXE6107 (manufactured by Toagosei Co., Ltd., an inorganic ion exchanger). A solder mask film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 4) A photosensitive composition was produced in the same manner as in Example 1 except that the T-1 compound was replaced with the compound T:Z (1,2,4-tris) of the following structure. Coating solution and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. [化 18] Τ-Ζ
HN今N Κι=/ (比較例5 ) 於實例1中,並未調配熱交聯劑,除此以外與實 同樣地進行而製作感光性組成物塗佈液及感光性' 抗焊劑 78 201235781 41436pifHN N N Κ = = (Comparative Example 5) In the same manner as in Example 1, except that the thermal crosslinking agent was not prepared, a photosensitive composition coating liquid and a photosensitive 'solder resistant agent' were prepared.
關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 [表1]The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. [Table 1]
三唾化合物 含有敵基之局 分子化合物 熱交聯劑 圖案側面 之平滑性 絕緣性 抗龜裂性 耐鍍敷性 種類 含量 (wt%) .實例1 Τ-1 1.7 Β·1 YDF-170 ο 〇Δ 〇Δ ο 實例2 Τ-1 1.7 Β-2 YDF-170 ο ◎ 〇Δ ◎ 貫例3 Τ-1 1.7 Β-3 YDF-170 ο ο ο ο 實例4 Τ-1 1.7 Β-4 YDF-170 0 ο ◎ ◎ 實例5 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ 實例6 Τ-3 1.7 Β-4 YDF-170 0 ο ◎ ◎ .實例7 Τ-4 1.7 Β-4 YDF-170 ο ο ο ◎ 實例8 Τ-2 3.0 Β-4 YDF-170 ο ◎ ◎ ◎ 實喊?~1 Τ-2 1.7 Β-4 OXBP 〇Α ο 〇Δ ◎ 實例10 Τ-2 1.7 BA BL3175 〇Δ 〇△ ◎ ◎ _實例11 Τ-2 1.7 Β-4 YSLV-120TE 〇 ◎ ο ◎ 實例12 Τ-1 1.7 Β-5 YDF-170 ο ο 〇 〇 比較例1 - - Β-1 • Δ X X X 比較例2 - - Β-1 YDF-170 Δ Δ Δ ο —比較例—3 - - Β-1 YDF-170 Δ 〇Δ X 〇 此牧例4 Τ-Ζ 1.7 Β-1 YDF-170 Δ 〇Δ ο Δ 十匕投例5 1.7 Β-1 - 〇Δ Δ X X 其中,於表1中,三唑化合物之含量(wt%)是相對 於感光性組成物塗佈液之固形物的含量。 、實例1〜實例12成為絕緣性、耐鍍敷性、圖案侧面之 性、及抗龜裂性優異之結果。於使用化合物τ_2作為 —唑化合物之情形時,成為絕緣性非常優異之結果。而且, 於使用Β-4、亦即酸改質含有乙烯性不飽和基之聚胺基曱 酸酉旨樹脂作為含魏基之高分子化合物之情形時,成為抗 79 201235781 41436pif 龜裂性優異之結果。而且,於 =為熱交聯劑之.叫成為圖案::== 於比較例1中,與實例相比 圖荦側面之孚、、典a ° 、、€緣性、耐鍍敷性、 於不含三魏合物之比較例2中,與二=… 絕緣性、圖案側面之平滑性、及抗龜裂性差。 σ -離子捕捉劑之比較例3中,與實例相比而 吕’雖然耐職性為同等程度,但圖案側 抗龜裂性非常差。 卞生左 —於使用1,2,4-三唑作為三嗤化合物之比較例4中,與 貫例相比而言,圖案側面之平滑性、耐鍍敷性差。 於不含熱交聯劑之比較例5中,成為絕緣性、抗龜裂 性、耐鍍敷性差之結果。 於實例1〜實例12中圖案側面之平滑性提高,這是比 較例1〜比較例4中無法獲得之效果,且是於感光性組成 物中使用三唑化合物之先前技術中亦未知之效果。 本發明之態樣例如可列舉以下之態樣。 <1> 一種感光性組成物,其特徵在於含有:具有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者與 三嗤環的化合物、聚合性化合物、光聚合起始劑、熱交聯 劑。 <2>如上述<1>所述之感光性組成物,其進一步含有 含羧基之高分子化合物。 201235781 <3>如上述<2>所述之感光性組成物’其中,含有羧 基之高分子化合物是酸改質含有乙烯性不飽和基之聚胺基 甲酸酯樹脂。 <4>如上述<1>至<3>中任一項所述之感光性組成 物’其中’熱交聯劑是具有選自環狀醚基、嵌段異氰酸酯 基、噁唑基、及碳酸乙二酯基之至少一種官能基的化合物。 <5>如上述<1>至<4>中任一項所述之感光性組成 物’其中’具有可與自由基反應之基及可與熱交聯劑反應 之基的至少任一者與三唑環的化合物是下述通式(〗)所表 示之化合物; [化 19] r 1The tri-salt compound contains the surface of the thermal crosslinking agent pattern of the molecular compound of the enemy group. The insulating insulating crack resistance plating resistance content (wt%). Example 1 Τ-1 1.7 Β·1 YDF-170 ο 〇 Δ 〇Δ ο Example 2 Τ-1 1.7 Β-2 YDF-170 ο ◎ 〇Δ ◎ Example 3 Τ-1 1.7 Β-3 YDF-170 ο ο ο ο Example 4 Τ-1 1.7 Β-4 YDF-170 0 ο ◎ ◎ Example 5 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ Example 6 Τ-3 1.7 Β-4 YDF-170 0 ο ◎ ◎ . Example 7 Τ-4 1.7 Β-4 YDF-170 ο ο ο ◎ Example 8 Τ-2 3.0 Β-4 YDF-170 ο ◎ ◎ ◎ 实 叫?~1 Τ-2 1.7 Β-4 OXBP 〇Α ο 〇Δ ◎ Example 10 Τ-2 1.7 BA BL3175 〇Δ 〇△ ◎ ◎ _ Example 11 Τ-2 1.7 Β-4 YSLV-120TE 〇◎ ο ◎ Example 12 Τ-1 1.7 Β-5 YDF-170 ο ο 〇〇Comparative Example 1 - - Β-1 • Δ XXX Comparative Example 2 - - Β-1 YDF-170 Δ Δ Δ ο - Comparative Example - 3 - - Β-1 YDF-170 Δ 〇 Δ X 〇 This burial example 4 Τ-Ζ 1.7 Β-1 YDF-170 Δ 〇Δ ο Δ Example 5 1.7 Β-1 - 〇Δ Δ XX wherein, in Table 1, the content (wt%) of the triazole compound is relative to photosensitivity The content of the solid matter of the composition coating liquid. Examples 1 to 12 were excellent in insulation properties, plating resistance, pattern side properties, and crack resistance. When the compound τ_2 is used as the azole compound, it is a very excellent insulating property. Further, when yt-4, that is, an acid-modified polyamino phthalic acid-containing resin containing an ethylenically unsaturated group, is used as a polymer compound containing a Wei group, it is excellent in anti-79 201235781 41436pif cracking property. result. Moreover, in = is a thermal crosslinking agent. It is called a pattern::== In Comparative Example 1, compared with the example, the side of the figure, the a °, the a, the plating, the plating resistance, In Comparative Example 2 containing no triad, the insulation properties, the smoothness of the side of the pattern, and the crack resistance were inferior. In Comparative Example 3 of the σ-ion trapping agent, compared with the example, although the workability was the same, the pattern side crack resistance was very poor. In the comparative example 4 in which 1,2,4-triazole was used as the triterpene compound, the smoothness and plating resistance of the pattern side surface were inferior compared with the conventional example. In Comparative Example 5 containing no thermal crosslinking agent, it was found to be inferior in insulation, crack resistance, and plating resistance. The smoothness of the side surface of the pattern in Examples 1 to 12 was improved, which was an effect which could not be obtained in Comparative Examples 1 to 4, and was not known in the prior art in which a triazole compound was used in the photosensitive composition. Examples of the aspect of the invention include the following aspects. <1> A photosensitive composition comprising at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, a compound of a triterpene ring, a polymerizable compound, and light Polymerization initiator, thermal crosslinking agent. The photosensitive composition according to the above <1>, which further contains a carboxyl group-containing polymer compound. The photosensitive composition of the above-mentioned <2>, wherein the polymer compound containing a carboxyl group is an acid-modified polyurethane resin containing an ethylenically unsaturated group. The photosensitive composition of any one of the above-mentioned <1> to <3> wherein the thermal crosslinking agent is selected from the group consisting of a cyclic ether group, a blocked isocyanate group, and an oxazolyl group. And a compound of at least one functional group of an ethylene carbonate group. The photosensitive composition 'in any one of the above-mentioned <1> to <4>, which has a group reactive with a radical and a group reactive with a thermal crosslinking agent, is at least any one of the above-mentioned <1> to <4> The compound of one and the triazole ring is a compound represented by the following formula (〖); [Chem. 19] r 1
X+Y L」η通式⑴ 其中,於所述通式(I)中,X表示三吐環;Υ表示具 有可與自由基反應之基及可與熱交聯劑反應之基的至少任 一者之有機基;η表示1〜3之整數;另外,於η為2〜3 時’ Υ可相同亦可不同。 <6>如上述〈5>所述之感光性組成物,其中,通式(〇 中之Υ是下述通式(II)所表示之基; [化 20] Y】f Ζ! mr、 、J 通式(II) 81 201235781 «mjopif 其中’於所述通式(II)中,Yi表示碳數為2〜25之 m+1價有機基;2!表示羧基·、丙烯醯氧基、及曱基丙烯醯 氧基之任一者;m表示1〜2之整數;另外,於m為2時, Ζι可相同亦可不同。 <7>如上述<1>至<6>中任一項所述之感光性組成 物,其中,熱交聯劑是具有環氧乙烷基之化合物。 <8> —種感光性抗焊劑組成物,其特徵在於含有如上 述<1>至<7>中任一項所述之感光性組成物。 <9> 一種感光性抗焊劑膜,其特徵在於包含:支撐 體,感光層,於該支撐體上積層如上述<8>所述之感光性 抗焊劑組成物而成。 <10> —種永久圖案形成方法,其特徵在於將如上述 <8>所述之感光性抗焊劑組成物塗佈於基體之表面上,加 以乾燥而積層感光層而形成積層體之後,進行曝光後進行 顯影。 <11> 一種永久圖案,其特徵在於其是藉由如上述 <10>所述之永久圖案形成方法而形成。 <12> 一種印刷基板,其特徵在於藉由如上述<10>所 述之永久圖案形成方法而形成有永久圖案。 [產業上之可利用性] 本發明之感光性組成物可獲得絕緣性、耐鍍敷性、圖 案侧面之平滑性優異之高性能之硬倾,®此可適宜地用 於抗焊劑中。 本發明之感光性抗焊劑膜可適宜地用於保護膜、層間 82 201235781 414iOpii 絕緣膜、抗焊圖案等永久圖案等之各種圖案形成’彩色濾 光片、柱材、肋材、間隔物、隔板等液晶結構部件之製造, 全像片、微機器、打樣機之製造等中,特別是讦適宜地用 於印刷基板之永久圖案形成用途中。 本發明之圖案形成方法使用了所述感光性組成物,因 此可適宜地用於保護膜、層間絕緣膜、抗焊圖案等永久圖 案等之各種圖案形成用途,彩色濾光片、柱材、肋材、間 隔物、隔板等液晶結構部件之製造,全像片、微機器、打 樣機之製造等中,特別是矸適宜地用於印刷基板之永久圖 案形成中。 【圖式簡單說明】 益。 【主要元件符號說明】 益。X+YL"η Formula (1) wherein, in the above formula (I), X represents a three-oxime ring; Υ represents at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent. The organic group; η represents an integer of 1 to 3; and when η is 2 to 3, 'Υ may be the same or different. <6> The photosensitive composition according to the above <5>, wherein the formula (the oxime in the oxime is a group represented by the following formula (II); [Chem. 20] Y] f Ζ! mr, J Formula (II) 81 201235781 «mjopif where 'in the above formula (II), Yi represents an m+1 valent organic group having a carbon number of 2 to 25; 2! represents a carboxyl group, a propylene fluorenyl group, And any one of a mercapto acryloxy group; m represents an integer of 1 to 2; and when m is 2, Ζι may be the same or different. <7><1> to <6> The photosensitive composition according to any one of the invention, wherein the thermal crosslinking agent is a compound having an oxirane group. <8> A photosensitive resist composition which is characterized by containing the above <1> The photosensitive composition according to any one of <7>. <9> A photosensitive solder resist film comprising: a support, a photosensitive layer, and a layer deposited on the support as described above < The photosensitive resist composition of the above-mentioned <10>, which is characterized in that the photosensitive resist group according to the above <8> The object is applied onto the surface of the substrate, dried, and the photosensitive layer is laminated to form a layered body, and then exposed and developed. <11> A permanent pattern characterized by being as described above in <10> The printed circuit board is characterized in that a permanent pattern is formed by the permanent pattern forming method according to the above <10> [Industrial Applicability] The present invention is formed. The photosensitive composition can obtain a high-performance hard tilt which is excellent in insulation property, plating resistance, and smoothness of the side surface of the pattern, and can be suitably used in a solder resist. The photosensitive solder resist film of the present invention can be suitably used. Various patterns such as protective film and interlayer 82 201235781 414iOpii insulating film and permanent pattern such as solder resist pattern are used to form liquid crystal structural components such as color filters, pillars, ribs, spacers, and spacers. In the manufacture of micromachines, proofing machines, and the like, in particular, it is suitably used for permanent pattern forming applications of printed boards. The pattern forming method of the present invention uses the photosensitivity. Therefore, it can be suitably used for various pattern forming applications such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, and a liquid crystal structural member such as a color filter, a pillar, a rib, a spacer, or a spacer. Manufacturing, hologram, micro-machine, proofing machine manufacturing, etc., in particular, is suitable for permanent pattern formation of printed substrates. [Simplified description of the drawing] Benefits. [Main component symbol description] Benefit.
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CN107382719B (en) * | 2017-06-23 | 2020-07-14 | 武汉长盈鑫科技有限公司 | Preparation method of anhydride modified biphenyl oxetane acrylate prepolymer |
CN114524807A (en) * | 2022-03-03 | 2022-05-24 | 波米科技有限公司 | Triazole-based cross-linking agent, and preparation method and application thereof |
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