TW201235781A - Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, permanent pattern, permanent pattern forming method and printed board - Google Patents

Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, permanent pattern, permanent pattern forming method and printed board Download PDF

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TW201235781A
TW201235781A TW101104621A TW101104621A TW201235781A TW 201235781 A TW201235781 A TW 201235781A TW 101104621 A TW101104621 A TW 101104621A TW 101104621 A TW101104621 A TW 101104621A TW 201235781 A TW201235781 A TW 201235781A
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group
compound
photosensitive
acid
photosensitive composition
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TW101104621A
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Chinese (zh)
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Daisuke Arioka
Hideki Tomizawa
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Fujifilm Corp
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/035Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/085Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

A photosensitive composition contains a compound having a triazole ring and at least one of a group capable of reacting with free radicals and a group capable of reacting with a thermal cross-linking agent, a polymerizable compound, a photopolymerization initiator, and a thermal cross-linking agent. The better one further contains a polymer compound having a carboxyl group. The polymer compound having a carboxyl group is better a polyurethane resin acid which is an acid denaturation and contains an ethylene characteristic unsaturated group.

Description

201235781 41436pif 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種可適宜地用於抗焊劑等中之感光 性組成物、使用該感光性組成物之感光性抗焊劑組成物及 使用該感光性抗焊劑組成物之感光性抗焊劑膜、以及高精 細之永久圖案(保護膜、層間絕緣膜、抗焊劑等)、其形成 方法及印刷基板。 【先前技術】 近年來’電子機器以行動通信機器為代表而要求小 型、薄型、輕量以及高性能、高功能、高品質、高可靠性, 於此種電子機器中所搭載之電子零件模組亦變得要求小 型、南雄、度化。對於此種要求,近年來用於電子零件模組 的基板正從陶瓷配線基板逐漸變成所謂之印刷基板,所述 陶瓷配線基板是以氧化鋁質燒結體等陶瓷為原材料,所述 印刷基板是在絕緣基板之表面上,使用作為低電阻金屬之 銅或金等,藉由薄膜形成法而形成有配線導體層,所述絕 緣^板包含能夠進一步實現輕量化、高密度化之玻璃纖維 與裱氧樹脂。而且,該印刷基板亦逐漸向更能實現高密度 配線化之增層(buildup)配線基板轉變。 此種增層配線基板例如可藉由如下方式而製作:於包 含玻璃纖維與環氧概之基板上層壓包含熱硬化性樹 脂之膜,進行熱硬化㈣成絕緣層,其後藉由二氧化碳雷 射於其上穿設開口’然後對絕緣層表面進行化學粗化,使 用無電鑛齡及電解触法而覆層形成輔,#此於開口 4 201235781 41435pit 内形成導體層且⑽緣層表_成崎料層,進而反覆 進行此種絕緣層與配線導體層之形成。 缝^且’為了配線導體層之氧化或腐餘以及保護絕 =免受於配線基板上封裝電子零件時之熱的影響,於配 線基板之表面覆層形成有厚度為2G μιη〜5() _之抗焊劑 =該抗焊劑層-般情況下包含與配線導體層及絕緣層之 雄接性良㈣,溶性光交雜_、具有可歸之樹 脂’為了使《彡脹係數倾緣層植料體層之^膨服係 之 機填充劑。 然而,作為該抗焊劑層’在—般情況下,所含有之驗 可/合!生光交聯性樹脂為了在以曝光及顯影而於抗焊劑層形 成開口時表現㈣雜而含有錄或絲,因此存在如下 之問題:吸水率高賴緩地吸收空氣中之水分,該水分使 抗焊劑層之絕緣f崎低至_以下岐配線導體層間 短路,另外該水分對配線導體層造成腐蝕,其結果使配線 基板之電氣可靠性劣化。 已知有使抗焊劑層含有含氮雜環化合物(咪唑化合 物一坐化合物4)之技術。若使用該技術,雖然抗焊劑 層之耐熱性變向,但存在耐鍍敷(plating)性降低之問題。 而且,若光阻圖案之側面的平滑性差,則於進行焊接 時,於焊料與光阻圖案侧面之間產生空隙,該空隙由於加 熱而膨脹,從而產生焊料剝落等異常,於上述技術中存在 光阻圖案㈣面之+滑性並不充分之問題。 而且’作為於感光性組成物中使用三唑化合物之技 5 201235781 414J5pif 術,提出了含有如下化合物之感紐組成物: 報) 南分子黏合劑、於分子巾具有平輕少—個二 雙鍵^平均至少-個三唾環之化合物、可找合之單^、口 ^光聚合起始劑⑷如參照日本專利特開平6_43⑽^公 藉由該提案之技術,雖然顯影殘留得到抑制 接性良好之組成物,但於該提案之技術中存在如 題:無法獲得抗焊則所要求之絕緣性、 阻圖案側面之平滑性。 秋丨王汉尤201235781 41436pif VI. [Technical Field] The present invention relates to a photosensitive composition which can be suitably used in a solder resist or the like, a photosensitive solder resist composition using the same, and use thereof A photosensitive solder resist film of the photosensitive solder resist composition, and a high-definition permanent pattern (protective film, interlayer insulating film, solder resist, etc.), a method for forming the same, and a printed substrate. [Prior Art] In recent years, electronic devices, which are represented by mobile communication devices, require small, thin, lightweight, high-performance, high-performance, high-quality, high-reliability electronic component modules mounted in such electronic devices. It has also become small, Nanxiong, and gradual. In response to such a request, in recent years, a substrate for an electronic component module has gradually changed from a ceramic wiring substrate to a so-called printed substrate, and the ceramic wiring substrate is made of a ceramic such as an alumina sintered body. On the surface of the insulating substrate, copper or gold, which is a low-resistance metal, is used, and a wiring conductor layer is formed by a thin film forming method, and the insulating sheet includes glass fibers and helium oxygen which can further reduce weight and density. Resin. Further, the printed circuit board is gradually transitioning to a buildup wiring substrate which is more capable of achieving high-density wiring. Such a build-up wiring board can be produced, for example, by laminating a film containing a thermosetting resin on a substrate including glass fibers and epoxy, thermally hardening (iv) an insulating layer, and then performing carbon dioxide laser irradiation. An opening is formed thereon, and then the surface of the insulating layer is chemically roughened, and the coating is formed by using the electroless age and the electrolytic contact method, and the conductor layer is formed in the opening 4 201235781 41435pit and the (10) edge layer table_成崎料The layer is further formed by repeating the formation of the insulating layer and the wiring conductor layer. The thickness of the surface of the wiring substrate is 2G μηη~5() _ for the oxidation or corrosion of the wiring layer and the protection from the heat of the packaged electronic components on the wiring substrate. Solder resist = the solder resist layer - generally contains good susceptibility to the wiring conductor layer and the insulating layer (4), soluble light hybrid _, with a recyclable resin 'in order to make the "swelling coefficient slant layer plant layer The machine is filled with filler. However, as the solder resist layer 'in the general case, it is included in the test. The raw photocrosslinkable resin exhibits (4) miscellaneous and contains a recording or silk in order to form an opening in the solder resist layer by exposure and development. Therefore, there is a problem that the water absorption rate absorbs moisture in the air with high absorption, and the moisture causes the insulation layer f of the solder resist layer to be as low as _ below, and the wiring conductor layer is short-circuited, and the moisture causes corrosion to the wiring conductor layer. As a result, the electrical reliability of the wiring substrate is deteriorated. There is known a technique in which a solder resist layer contains a nitrogen-containing heterocyclic compound (imidazole compound-sit compound 4). According to this technique, although the heat resistance of the solder resist layer is changed, there is a problem that plating resistance is lowered. Further, when the smoothness of the side surface of the photoresist pattern is poor, a gap is formed between the solder and the side surface of the photoresist pattern during soldering, and the void expands due to heating, thereby causing an abnormality such as solder peeling, and light is present in the above technique. The problem that the resistance of the pattern (4) surface is not sufficient. Moreover, as a technique for using a triazole compound in a photosensitive composition, 2012 20128181 414J5pif, a sensory composition containing the following compounds is proposed: (Reporter) South molecular binder, which has a lighter weight than a double bond in a molecular towel ^ An average of at least one compound of the three-salt ring, a singularity of the monomer, and a photopolymerization initiator (4), as described in Japanese Patent Laid-Open No. Hei 6-43(10), the technique of the proposal, although the development residue is improved in adhesion. The composition, but there is a problem in the technique of the proposal: the insulation required for the solder resist and the smoothness of the side of the resist pattern are not obtained. Qiu Wang Wang Youyu

因此’現狀是要求提供絕雜、鑛紐、及光阻 案側面之平滑性優異之感光性組成物。 【發明内容】 本發明之課題在於解決先前之所述諸問題,達成以下 之目的。亦即,本發明之目的在於提供絕緣性、耐鍛敷性、 及光阻圖案側面之平滑性優異之感光性組成物。 用以解決所述課題之方法如下所示。亦即,本發明之 感光性組成物之雜在於含有:具有可與自由基反應之基 及可與熱交聯劑反應之基的至少任一者與三唑環的化合 物、t合性化合物、光聚合起始劑、熱交聯劑。 [發明的效果] 藉由本發明可解決先前之所述諸問題,達成所述目 的’可提供絕緣性、耐㈣性、絲__面之平滑性 優異之感光性組成物。 【實施方式】 6 201235781 41436pif (感光性組成物) 本發明之感光性組成物至少含有具有可與自由基反應 之基及可與熱交聯劑反應之基的至少任一者與三唑環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑,較佳的 是含有含羧基之高分子化合物,進一步視需要而含有其他 成分。 <具有可與自由基反應之基及可與熱交聯劑反應之基 的至少任一者與三唑環的化合物> 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與三唑環的化合物,如果是具有可與 自由基反應之基及可與熱交聯劑反應之基之至少任一者與 二唾環的化合物,則並無特別限制,可視需要而適宜選擇。 所述可與自由基反應之基例如可列舉丙烯醯氧基、曱 基丙烯醯氧基(methacryloyloxy)、乙烯基苯基、烯丙基 (allyl)等。 所述可與熱父聯劑反應之基例如可列舉叛基、胺基、 酼基等。 1 所述三唑環可為1,2,3-三唑環及u,4_三唑環之任一 者。 1,2,3-三唑及^4-三唑是下述結構式所表示之化合 物。 201235781 41436pif [化1] 12,3-三唾 HI^N 1,2,4-三唑 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物,換言之,是具有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者之 有機基鍵結於二嗤環上的化合物。所述有機基於所述三唾 環上之鍵結位置並無特別限制,可視需要而適宜選擇,可 與所述三唑環之氮原子鍵結,亦可與碳原子鍵結。 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物較佳的是下述通式(工) 所表示之化合物。 [化2] rTherefore, the current state of the art is to provide a photosensitive composition excellent in smoothness on the side of the impurities, minerals, and photoresist. SUMMARY OF THE INVENTION An object of the present invention is to solve the problems described above and achieve the following objects. That is, an object of the present invention is to provide a photosensitive composition which is excellent in insulation, forge resistance, and smoothness of the side surface of a photoresist pattern. The method for solving the problem is as follows. That is, the photosensitive composition of the present invention contains a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a triazole ring compound, a t-combination compound, Photopolymerization initiator, thermal crosslinking agent. [Effects of the Invention] According to the present invention, it is possible to solve the problems described above, and to achieve the above-mentioned photosensitive composition which can provide insulation, resistance (four), and smoothness of the surface of the yarn. [Embodiment] 6 201235781 41436pif (Photosensitive composition) The photosensitive composition of the present invention contains at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a triazole ring. The compound, the polymerizable compound, the photopolymerization initiator, and the thermal crosslinking agent preferably contain a carboxyl group-containing polymer compound, and further contain other components as needed. <Compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring> as a base reactive with a radical and thermally crosslinkable At least one of the groups of the agent reaction and the compound of the triazole ring, if it is a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, There is no special restriction, and it is suitable for selection as needed. Examples of the group reactive with a radical include an acryloxy group, a methacryloyloxy group, a vinyl phenyl group, an allyl group, and the like. The group reactive with the hot parent agent may, for example, be a thiol group, an amine group, a thiol group or the like. 1 The triazole ring may be any of a 1,2,3-triazole ring and a u,4_triazole ring. 1,2,3-triazole and ^4-triazole are compounds represented by the following structural formulas. 201235781 41436pif [Chemical 1] 12,3-tris- HI^N 1,2,4-triazole The at least one and the third having a radical reactive group and a reactive crosslinking agent The compound of the azole ring, in other words, a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, is bonded to the dioxan ring. The bonding position of the organic group based on the tris-salt ring is not particularly limited, and may be appropriately selected as needed, and may be bonded to a nitrogen atom of the triazole ring or may be bonded to a carbon atom. The compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring is preferably a compound represented by the following formula (manufacture). [chemical 2] r

XfY L」η通式⑴ 其中,於所述通式(I)中,X表示三唑環。γ表示具 有可與自由基反應之基及可與熱交聯劑反應之基之至少任 8 201235781 4I4i〇pif 一者的有機基。n表示1〜3之整數。另外,於n為2〜3 時,Y可相同亦可不同。 另外’於所述通式(I)中,所述Y可與作為所述X 之三嗤環之氮原子鍵結,亦可與破原子鍵結。 所述通式(I)中之η較佳的是1〜2 ’更佳的是2。所 述η若為2,則於絕緣性方面有利。 所述通式(I)中之Υ較佳的是下述通式(H)所表示 之基。 [化3] 通式(Π) 其中,於所述通式(ID中,Yl表示碳數為2〜25之 m+1價有機基。&表示綾基、丙烯醯氧基及曱基丙烯醯氧 基之任-者。m表示卜2之整數。另外,於m為2時, A可相同亦可不同。 ,所述碳數為2〜25之m+1價有機基並無特別限制, 視需要而適宜選擇’例如可列舉具有麟、雜鍵、醋鍵、 及硫脲鍵之至少任_者的碳數為2〜25之㈣ 而且’所述有機基之碳數較佳的是2〜2G,更佳的是2=5。 戶述具有可與自由基反應之基及 基的至少任一者盥二4产的仆人& 、…反應之 ,,一坐%的化合物之分子量並無特別限 制’可視4㈣宜選擇,較麵 是100〜800。 , 文佳的 9 201235781 41436pif 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與三唑環的化合物之具體例,例如可 列舉下述式所表示之化合物等。 [化4]XfY L"η Formula (1) wherein, in the above formula (I), X represents a triazole ring. γ represents an organic group having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, which is a group of at least 8 201235781 4I4i〇pif. n represents an integer of 1 to 3. Further, when n is 2 to 3, Y may be the same or different. Further, in the above formula (I), the Y may be bonded to a nitrogen atom which is the triterpene ring of the X, or may be bonded to a broken atom. The η in the above formula (I) is preferably 1 to 2 Å and more preferably 2. If the η is 2, it is advantageous in terms of insulation. The oxime in the above formula (I) is preferably a group represented by the following formula (H). In the above formula (ID, Y1 represents an m+1 valent organic group having a carbon number of 2 to 25. & represents an anthracenyl group, an acryloxy group, and a mercapto propylene group. In the case of m, the A may be the same or different. The m+1 organic group having a carbon number of 2 to 25 is not particularly limited. It is preferable to select as needed, for example, the carbon number of at least any of the lining, the hetero bond, the vinegar bond, and the thiourea bond is 2 to 25 (4) and the carbon number of the organic group is preferably 2 ~2G, more preferably 2=5. The household has at least one of the radicals reactive with the radical and the base of the servant & responsive to, the reaction, the molecular weight of a compound There is no particular limitation 'visible 4 (four) should be selected, the face is 100~800. , Wen Jia's 9 201235781 41436pif as at least one of the bases capable of reacting with a radical and reacting with a thermal crosslinking agent Specific examples of the compound of the triazole ring include, for example, a compound represented by the following formula.

201235781 41430pit [化5]201235781 41430pit [Chemical 5]

-具有可與自由基反應之基及可與熱交聯劑反應之基 的至少任一者與三π坐環的化合物之含量- 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物於所述感光性組成物中 之含量並無特別限制,可視需要而適宜選擇,相對於所述 11 201235781 41436pif 感光性組成物之固形物而t,較佳的是1·〇 wt%〜20 wt/〇 ’更佳的是】5 wt%〜1〇加%。若所述含量不足1 〇 Wt/ο貝|J存在無法發揮充分之絕緣性之現象;若超過 Wt。/: ’則存在耐触降低之麟。若所述含量柄述更佳 之範圍内則於兼顧耐熱性與絕緣性之方面*言有利。 〈聚合性化合物&gt; 所述聚合性化合物並無特別限制,可視需要而適宜選 擇,較佳的是於分子巾具有至少1個可加絲合之基的化 合物。此種化合物更佳的是選自具有(曱基)丙烯基之單體 的至少1種。 另外’所述聚合性化合物是與所述具有可與自由基反 應之基及了與熱父聯劑反應之基的至少任一者與三哇環的 化合物不同的化合物。 、 所述具有(曱基)丙稀基之單體並無特別限制,可視需 要而適宜選擇,例如可列舉聚乙二醇單基㈣、 聚丙一醇單(曱基)丙稀酸酉旨、(甲基)丙稀酸苯氧基乙醋等單 官能丙稀_或單官能甲基丙烯酸酿;聚乙二醇二(甲基) 丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、三羥曱基乙烷三 (曱基)丙稀酸醋、三經甲基丙燒三(甲基)丙稀酸酉旨 、三羥甲 基丙烧二(甲基)丙烯酸醋、新戊二醇二(曱基)丙稀酸醋、季 戊四醇四(甲基)丙烯酸醋、季戊四醇三(曱基)丙婦酸醋、二 季戊四醇六(甲基旨、二季細醇五(甲基)丙婦酸 酯、己二醇二(甲基)丙烯酸酉旨、二3袁戊基二甲醇二(曱基) 丙稀_、三㈣基丙烧三(丙烯醯氧基丙基)醚、三(丙稀 12 201235781 41436pif 醯氧基乙基)異氰尿酸酯、三(丙烯醯氧基乙基)氰尿酸酯、 丙三醇三(甲基)丙烯酸酯、於三羥甲基丙烷或丙三醇、雙 酚等多官能醇上加成反應環氧乙烷或環氧丙烷之後進行 (甲基)丙烯酸酯化而成者、日本專利特公昭48_417〇8號公 報、曰本專利特公昭50-6034號公報、日本專利特開昭 51-37193號公報等各公報中所記載之丙烯酸胺基甲酸酯 類,曰本專利特開昭48-64183號公報、日本專利特公昭 49-43191號公報、日本專利特公昭52_3〇49〇號公報等之各 公報中所記載之聚酯丙烯酸酯類;作為環氧樹脂與(甲基) 丙烯酸之反應產物的環氧丙烯酸酯類等多官能丙烯酸酯或 甲基丙烯酸酯等。該些單體中更佳的是二環戊基二曱醇二 (曱基)丙烯酸酯、三羥曱基丙烷三(甲基)丙烯酸酯、季戊四 醇四(曱基)丙烯 g夂酉曰(pentaerythrit〇i tetra(meth) acrylate )、 一季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(曱基)丙烯酸 酯。 -聚合性化合物之含量_ 所述聚合性化合物於所述感光性組成物中之含量並無 特別限制’可視需要㈣宜選擇,相躲所述感光性組成 物之固形物而s,較佳的是2 wt%〜5〇 wt%,更佳的是3 wt/o〜40 wt%,特佳的是4 wt%〜35 wt%。所述聚合性化 合物之含量若从2 wt% ’則存在無法形賴案之現象; 右超過50 wt%,則存在抗龜裂性差之現象。另一方面,若 所返聚合性化合物之含量為所述躲之範_,則於圖案 形成性、抗龜裂性提高之方面而言有利。 13 201235781 41436pif 〈光聚合起始劑&gt; 所述光聚合起始劑只要具有使所述聚合性化合物取 合開始的能力,則並無特別限制,可視需要而適宜選 例如可列舉齒代烴衍生物、氧化膦、六芳基二咪唑、 生物、有機過氧化物、硫代化合物、酮化合物、 f妨 鹽、酮月亏喊等。 矢鑷 所述_代烴衍生物例如可列舉具有三嗪骨架之、 衍生物、具有噁二唑骨架之鹵代烴衍生物等。/、、代烴 顏有三♦骨架之鹵代烴衍生物並無_限制,可 。要而適宜選擇’例如可列舉若林等人著、 與: 會通報(Bull.Chem.Soc.Japan),42、2924 ( 1969)中予予 載之化合物、英國專利138觀號說明書中所記戶= =、曰本專利特開昭53]3期號公報 二 匆、德國專利33雇4號說明書中所記载之^匕合 似咖命等之有機化學雜諸⑽gChem);29=、 八二4)中所記載之化合物、日本專利特開昭62-58241 f卢 2 所記載之化合物、日本專利特開平5-281728 f卢八: 記物、日本專利特開平5·3492。號公‘;所 如可:ΪΞίΓΐ (°xadiazc&gt;le)骨架之錢烴衍生物例 等。舉國專利第4212976號說明書中所記載之化合物 所述肟(oxime)衍生物並無特 宜選擇’例如可列舉曰本專利特開 201235781 4J436pif 落「嶋」尹所記戴之化合物等。 例如;:=::=限制’可視需要而適宜選擇, 中所記载::;:,2·觸號公報之段落「, 上述以外之光聚合起始劑例如可列舉日太 侧號公報之段落 度或感光波:感光層進行曝光之曝光感光 劑。 了所4歧合賴_外,可添加增感 或紫劑:ί據後述之作為光照射手段之可見光線 卜;^射、可見光雷射等而適宜選擇。 並他過由於活性能量線而成為激發態,與 例如自由基產生劑、酸產生劑等)相互作用(例 動、、電子移鱗)而產生自由基紐等有用基。 感劑並無特別限制,可視需要而適宜選擇,例 二日本專利特開細7_2_號公報之段落「〇〇89」 中所§己載之化合物等。 斤述光聚合起始劑與所述增感劑之組合並無特別限 '可視為要而適宜選擇,例如可列舉日本專利特開 =305734说公報中所記載之電子移動型起始系[⑴供 ^型起始劑及増感色素、⑵吸電子㈣始劑及增感色 素、(3)供電子型起始劑、增感色素及吸電子型起始劑(三 兀起始系)]等組合。 15 201235781 41436pif 所述增感劑之含量並無特別限制,可視需要而適宜選 擇’相對於所述感光性組成物之固形物而言’較佳的是〇 wt%〜30 wt% ’更佳的是0.1 wt%〜20 wt%,特佳的是〇 2 wt%〜10 wt%。所述增感劑之含量若不足〇 〇5 wt%,則存 在對活性能量線之感光度降低,曝光製程耗費時間,生產 性降低之現象;若超過30 wt%,則存在於保存時所述增感 劑自所述感光層析出之現象。 所述光聚合起始劑可單獨使用1種,亦可併用2種以 上。 所述光聚合起始劑之特佳例可列舉:於後述之曝光中 可與波長為405 nm之雷射光對應之複合光起始劑、六芳 基一咪唑化合物、二茂鈦等,所述複合光起始劑是將氧化 膦類、α·胺基烧基峨、具有三嗪骨架之鹵代烴化合物與 作為增感劑之胺化合物組合而成。 -光聚合起始劑之含量_ 所述光聚合起始劑於所述感光性組成物中之含量並 ^別限制’可視需要而適宜選擇,相對於所述感光性組 之固^物而s,較佳的是〇5 〜如wt%,更佳的a content of a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triple π ring - the group reactive with a radical and thermally crosslinkable The content of at least one of the group of the agent reaction and the compound of the triazole ring in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the solid matter of the 11 201235781 41436pif photosensitive composition. And t, preferably 1·〇wt%~20 wt/〇' is more preferably 5 wt%~1〇 plus %. If the content is less than 1 〇 Wt/ο贝|J, there is a phenomenon that sufficient insulation cannot be exhibited; if it exceeds Wt. /: ‘There is a collar that is resistant to touch. If the content is in a better range, it is advantageous in terms of both heat resistance and insulation. <Polymerizable compound> The polymerizable compound is not particularly limited and may be appropriately selected as needed, and is preferably a compound having at least one filament-addable group in the molecular towel. More preferably, such a compound is at least one selected from the group consisting of a (fluorenyl)propenyl group. Further, the polymerizable compound is a compound different from the compound having at least one of a group reactive with a radical and a group reactive with a hot parent. The monomer having a (fluorenyl) acryl group is not particularly limited and may be appropriately selected as needed, and examples thereof include a polyethylene glycol mono group (IV) and a polypropanol mono(indenyl) acrylate. Monofunctional propylene or monofunctional methacrylic acid such as (meth)acrylic acid phenoxyacetic acid; polyethylene glycol di(meth) acrylate, polypropylene glycol di(meth) acrylate, trishydroxy Mercaptoethane tris(fluorenyl) acrylate vinegar, trimethyl methacrylic acid tris(methyl) acrylate acid, trimethylol propyl bis(meth) acrylate vinegar, neopentyl glycol (mercapto) acrylic acid vinegar, pentaerythritol tetrakis(meth)acrylic acid vinegar, pentaerythritol tris(mercapto)propyl vinegar vinegar, dipentaerythritol hexahydrate (methyl ketone, diquaternary pentoxide penta(methyl) propionate, Hexanediol di(meth)acrylic acid, 2, 3, pentyl dimethanol, di(indenyl) propylene, tris(tetra)propanyl tris(propylene oxypropyl)ether, tris (propylene 12 201235781) 41436pif oxiranyl ethyl) isocyanurate, tris(propylene methoxyethyl) cyanurate, glycerol tri(meth) acrylate, trimethylolpropane or propylene A polyfunctional alcohol such as an alcohol or a bisphenol is subjected to an addition reaction of ethylene oxide or propylene oxide, followed by (meth)acrylation, Japanese Patent Publication No. 48_417〇8, and Japanese Patent Publication No. 50- Japanese Patent Publication No. Sho. Polyester acrylates described in each of the publications of Japanese Patent Publication No. Sho 52_3〇49〇, and the like, and polyfunctional acrylates such as epoxy acrylates which are reaction products of epoxy resins and (meth)acrylic acid or More preferably, among these monomers, dicyclopentyl decyl diol di(mercapto) acrylate, trihydroxy hydrazine propane tri (meth) acrylate, pentaerythritol tetrakis (mercapto) propylene g Pent (pentaerythrit〇i tetra(meth) acrylate ), pentaerythritol hexa(meth) acrylate, dipentaerythritol penta (indenyl) acrylate. - content of polymerizable compound _ the polymerizable compound is sensitized Sexual composition There is no particular limitation on the content of the medium. (4) It is preferred to select the solid matter of the photosensitive composition, preferably 2 wt% to 5 wt%, more preferably 3 wt/o. 40 wt%, particularly preferably 4 wt% to 35 wt%. If the content of the polymerizable compound is from 2 wt% 'there is a phenomenon that cannot be deviated; when the right is more than 50 wt%, there is a poor resistance to cracking. On the other hand, when the content of the polymerizable compound to be returned is the above-mentioned hiding property, it is advantageous in terms of improvement in pattern formability and crack resistance. 13 201235781 41436pif <Photopolymerization initiator> The photopolymerization initiator is not particularly limited as long as it has the ability to start the polymerization of the polymerizable compound, and may be, for example, a toothed hydrocarbon derivative, a phosphine oxide or a hexaaryldiimidazole. , biological, organic peroxides, thio compounds, ketone compounds, f salt, ketones, etc. The hydrazine derivative may, for example, be a derivative having a triazine skeleton, a derivative having a oxadiazole skeleton, or the like. /,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, It is desirable to select 'for example, as quoted by Ruolin et al., and: Bulletin (Bull. Chem. Soc. Japan), 42, 2924 (1969), the compound contained in the British Patent 138. =, 曰 专利 专利 昭 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 53 The compound described in Japanese Patent Laid-Open No. Hei. No. 62-58241, the entire disclosure of which is incorporated herein by reference. No. **; such as: ΪΞίΓΐ (°xadiazc&gt;le) skeleton of hydrocarbon derivatives, etc. The compound described in the specification of the National Patent No. 4,212,976 is not particularly preferred as the oxime derivative. For example, the compound of the Japanese Patent Laid-Open No. 201235781 4J436pif 嶋 嶋 尹 尹 尹. For example: :=::=Restriction 'Selected as appropriate, as described in the paragraph::;, 2: The paragraph of the tactile bulletin ", the photopolymerization initiator other than the above may be exemplified by the Japanese side. Paragraph or photoreceptor: Exposure sensitizer for exposure of the photosensitive layer. Addition of sensitization or purple agent to the 4th ray _ _: According to the visible light line as a light irradiation method described later; It is suitable for selection by shooting, etc., and he becomes an excited state due to an active energy ray, and interacts with, for example, a radical generator, an acid generator, etc., to generate a free radical such as a radical. The sensitizer is not particularly limited, and may be appropriately selected as needed. For example, the compound contained in the paragraph "〇〇89" of the Japanese Patent Laid-Open Publication No. 7-2_ is exemplified. The combination of the photopolymerization initiator and the sensitizer is not particularly limited, and may be selected as appropriate. For example, the electron mobility type initiating system described in Japanese Patent Laid-Open No. 305734 Supplying initiator and sensitizing dye, (2) electron-withdrawing (four) initiator and sensitizing dye, (3) electron-donating initiator, sensitizing dye and electron-withdrawing initiator (Sancha starting system)] And so on. 15 201235781 41436pif The content of the sensitizer is not particularly limited, and it is preferable to select 'preferably 〇wt% to 30 wt%' relative to the solid matter of the photosensitive composition as needed. It is 0.1 wt% to 20 wt%, and particularly preferably 〇2 wt% to 10 wt%. If the content of the sensitizer is less than 5% by weight, the sensitivity to the active energy ray is lowered, the exposure process takes time, and the productivity is lowered; if it exceeds 30 wt%, it is present at the time of storage. The phenomenon that the sensitizer is extracted from the photosensitive light. The photopolymerization initiator may be used singly or in combination of two or more. Specific examples of the photopolymerization initiator include a composite photoinitiator, a hexaaryl-imidazole compound, a titanocene, etc., which are compatible with laser light having a wavelength of 405 nm in the exposure described later. The composite photoinitiator is a combination of a phosphine oxide, an α-aminoalkyl hydrazine, a halogenated hydrocarbon compound having a triazine skeleton, and an amine compound as a sensitizer. - the content of the photopolymerization initiator - the content of the photopolymerization initiator in the photosensitive composition and the limit is 'optional" as needed, relative to the solidity of the photosensitive group Preferably, 〇5~such as wt%, better

Wt/° 15 Wt%,特佳的是1 wt%〜10 wt°/。。所述光聚· 含量若不足G,5 wt% ’則存在曝光部於顯影過 :=頃向,若超過2〇 wt%,則存在耐熱性降低之: 範圍内可合起始劑之含量若為所述特佳· 而言有利 成良贿、耐熱性亦好之方1 16 201235781 414J0plt &lt;熱交聯劑&gt; 所述熱交聯劑並無特別限制,可視需要而適宜選擇, 較佳的是具有選自環狀醚基、嵌段異氰酸酯基、噁唑基、 及碳酸乙二酯基之至少一種官能基的化合物。 所述熱交聯劑例如可列舉具有環狀醚基之化合物、具 有嵌段異氰酸酯基之化合物、具有噁唑基之化合物、具有 碳酸乙二酯基之化合物等。 所述具有環狀醚基之化合物例如可列舉具有環氧乙烷 基之化合物、具有環氧丙烷基之化合物等。 所述具有環氧乙烧基之化合物例如可列舉於1分子内 具有至少2個環氧乙烷(oxirane)基的環氧化合物等。 所述具有環氧丙烷(oxetane)基之化合物例如可列舉 於1分子㈣有至少2個環氧丙絲的環氧槐化合物等。 所述環氧化合物並無特別限制,可視需要而適宜選 $,例如可列舉聯二曱苯酚型或聯苯二酚型環氧樹脂 (YX4_ ;三菱化學公司製造」等)或該些之混合物、 具有異氰尿酸酯骨架等之雜環式環氧樹脂(「TEpic;曰產 3 i ί公!1製造」、「Araldite PT810;汽巴精化股份有限 t 5 ^4」等)、雙酚Α型環氧樹脂、酚醛清漆型環氧樹 义:型環氧樹脂(「EP〇t〇hto YDF-m、新曰鐵化學 ;:2造」等)、氫化雙酚A型環氧樹脂、縮水甘油胺; 、乙内醯脲型環氧樹脂、脂環族環⑽脂、三羥 環氧樹脂、㈣s型環氧樹脂、雙紛A祕 4风樹脂、四苯盼基乙烧型環氧樹脂、鄰苯二曱酸 17 201235781 41436pif 縮水甘油基酯樹脂、四縮水甘油基二曱苯酚乙烷樹脂、含 有萘基之環氧樹脂(「ESN-190、ESN-360 ;新日鐵化學公 司製造」、「HP-4032、EXA-4750、EXA-4700 ; DIC 公司製 造」等)、具有二環戊二烯骨架之環氧樹脂(rHp_72〇〇、 ΗΡ-7200Η ; DIC公司製造」等)、曱基丙烯酸縮水甘油酯 共聚系環氧樹脂(「CP-50S、CP-50M ;日油公司製造」等)、 裱己基馬來醯亞胺與曱基丙烯酸縮水甘油酯之共聚環氧樹 脂等。該些環氧化合物可單獨使用丨種,亦可併用2種以 上。 迹哀軋内炕化5物並無特別限制,可視需要而適宜 選擇,例如可列舉曰本專利特開2〇〇7_2〇3〇號公報之段落 「0096」中所記載之多官能環氧丙烷化合物等。 ,所述具有嵌段異氰酸醋基之化合物並無特別限制,可 ,需要,適宜選擇’例如可列舉使阻斷劑(bbek agent) 二聚異級g旨及其财物之錢酸祕反應而所得之化合 物^此種化合物例如可_日本專獅肝Μ術號公報 之&amp;洛’」中所記载之嵌段聚異氰酸醋等。 適宜=具:f唑基之化合物並無特別限制,可視需要而 與盆他不例j列舉使具有料基之不飽和單體視需要Wt / ° 15 Wt%, particularly good is 1 wt% ~ 10 wt ° /. . If the photopolymerization content is less than G, 5 wt%', the exposed portion is developed: = if it is more than 2% by weight, the heat resistance is lowered: the content of the initiator in the range is In the case of the above-mentioned special, it is advantageous for the bribe and the heat resistance. 1 16 201235781 414J0plt &lt;Hot crosslinking agent&gt; The thermal crosslinking agent is not particularly limited, and may be appropriately selected as needed, preferably. It is a compound having at least one functional group selected from the group consisting of a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Examples of the thermal crosslinking agent include a compound having a cyclic ether group, a compound having a blocked isocyanate group, a compound having an oxazolyl group, a compound having an ethylene carbonate group, and the like. Examples of the compound having a cyclic ether group include a compound having an oxirane group, a compound having an oxypropylene group, and the like. The compound having an ethylene oxide group may, for example, be an epoxy compound having at least two oxirane groups in one molecule. The compound having an oxetane group may, for example, be an epoxy oxime compound having at least 2 propylene oxide filaments in one molecule (d). The epoxy compound is not particularly limited, and may be appropriately selected as needed, and examples thereof include a dinonylphenol type or a biphenyldiol type epoxy resin (YX4_; manufactured by Mitsubishi Chemical Corporation) or the like, or a mixture thereof. Heterocyclic epoxy resin having an isocyanurate skeleton or the like ("TEpic; 曰 3 3 i 公 gong! 1 manufactured", "Araldite PT810; Ciba refined chemical limited t 5 ^ 4", etc.), bisphenol Epoxy resin, novolac type epoxy resin: epoxy resin ("EP〇t〇hto YDF-m, neodymium iron chemistry; 2"), hydrogenated bisphenol A epoxy resin, Glycidylamine; Ethyl ureia type epoxy resin, alicyclic ring (10) grease, trihydroxy epoxy resin, (iv) s type epoxy resin, double A secret 4 wind resin, tetraphenyl phenyl bromide epoxy Resin, phthalic acid 17 201235781 41436pif glycidyl ester resin, tetraglycidyl dinonyl phenol ethane resin, epoxy resin containing naphthyl group ("ESN-190, ESN-360; manufactured by Nippon Steel Chemical Co., Ltd. "HP-4032, EXA-4750, EXA-4700; manufactured by DIC", etc.), epoxy resin with dicyclopentadiene skeleton ( rHp_72〇〇, ΗΡ-7200Η; manufactured by DIC, etc.), glycidyl methacrylate copolymer epoxy resin (“CP-50S, CP-50M; manufactured by Nippon Oil Co., Ltd.”, etc.), 裱己基马莱醯亚Copolymer epoxy resin of amine and glycidyl methacrylate. These epoxy compounds may be used singly or in combination of two or more. There is no particular limitation on the content of the sputum in the smearing, and it may be appropriately selected as needed. For example, the polyfunctional propylene oxide described in the paragraph "0096" of the Japanese Patent Publication No. 2〇〇7_2〇3〇 can be cited. Compounds, etc. The compound having a blocked isocyanate group is not particularly limited, and may be appropriately selected. For example, a bleck agent may be exemplified by a dimerization of a bbek agent. Further, the compound obtained can be, for example, a block polyisocyanate or the like described in "The lion's liver sputum" &amp; Suitable = with compound: the compound of the oxazolyl group is not particularly limited, and may be exemplified by the use of a non-saturated monomer having a base as needed.

所述具有料基之化合物可使用市售品。 购00=如可列舉日本觸媒公51製造之EPOCROS 201235781 41436pif 所述具有碳酸乙二酯基之化合物並無特別限制,可視 需要而適宜選擇,例如可列舉具有碳酸乙二酯基之丙烯酸 樹脂等^所述具有碳酸乙二酯基之丙烯酸樹脂例如可列舉 曰本專利特開平1-146968號公報中所記載之含有碳酸酯 基之共聚物等。 該些化合物可單獨使用丨種,亦可併用2種以上。 該些化合物中,具有環氧乙烷基之化合物於圖案侧面 之平滑性及絕緣性之方面而言較佳。 -熱交聯劑之含量- 所述熱父聯劑於所述感光性組成物中之含量並無特別 限制,可視需要㈣宜選擇’相對於所述感級組成物之 固形物而言,較佳的是1 wt%〜5〇wt%,更佳的是2wt〇/〇 〜40 wt%,特佳的是3 wt%〜3〇 wt%。所述熱交聯劑之含 1若不足1 wt%,則存在耐熱性惡化之現象;若超過5〇 wt%,則存在顯影性或抗龜裂性惡化之現象。另一方面, 若所述含篁為所述特佳之範圍内,則可以良好之感光度製 作硬化膜,卿成之硬化膜於兼綱熱性與減裂性之方 面而言亦有利。 &lt;含有羧基之高分子化合物&gt; 所述含有羧基之高分子化合物若為具有缓基之高分子 化合物則並無制限制,可視需要而適宜選擇,例如可列 舉酸改貝含有乙触不飽和基之聚胺基m賴脂、酸改 質含有乙稀性不飽和基之環氧樹脂、含有乙稀性不飽和基 及羧基之丙烯酸樹脂、聚醯亞胺前驅物等。該些化合物中, 19 201235781 41436pif 酸改質含有乙漸4細基之聚胺基甲酸_脂於抗龜裂 性優異之方面而言較佳。 -酸改負含有乙稀性不飽和基之聚胺基曱酸自旨樹脂_ 作,所述酸改質含有乙稀性不飽和基之聚胺基甲酸醋 樹脂’若為具有作為酸基之羧基與乙烯性不飽和基的聚胺 基曱酸酯樹脂,則並無特別限制,可視需要而適宜選擇, 例如可列舉(1)於側鏈具有乙烯性不飽和基之聚胺基曱酸 酯樹脂、(11)含有羧基之聚胺基甲酸酯與於分子中具有環 氧基與乙烯性不飽和基之化合物反應而所得的聚胺基甲酸 酯樹脂等。 --(1)於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹 脂-- 所述於侧鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 並無特別限制,可視需要而適宜選擇,例如可列舉於其側 鏈具有下述通式(1)〜通式(3)所表示之官能基中之至 少1個的化合物。 [化6] Ο II—X—C、c=c / R1 R3 / 、R2 通式(1) R1〜R3分職域表示氫原子 於所述通式(〇中, 或1價之基。 20 201235781 ^ι^οριι j述R亚無特職制,可視需要而適宜選擇 ,例如可 二牛虱原子、亦可具有取代基找歸。於自由基反應性 南之方面*言’該些基中較佳的錢原子、甲基。 而且,所述R及R3並無特別限制,可視需要而適宜 選擇’分別獨立地列舉例如氫原子、鹵素原子、胺基、缓 基、烧氧紐基、績基m基、亦可具有取代基之 烧基、亦可具有取代基之綠、亦可具有取絲之烧氧基、 亦可具有取代基之芳氧基、亦可具有取代基找基胺基、 亦可具有取代基之綠胺基、村具有取代基之烧基石黃酸 基、亦可具有取絲之芳基俩鱗。於自由基反應性高 之方面而言,該些基巾較佳的是氫原子、羧基、烧氧基幾 基、亦可具有取代基之烧基、亦可具有取代基之芳基。 於所述通式(1)中,X表示氧原子、硫原子、或 _N(R )- ’所述Ri2表示氫原子、或】價有機基。所述 並無特別限制,可視需要而適宜選擇,例如可列舉亦可具 有取代基之燒基等。於自由基反應性高之方面而言,該些 基中較佳的是氫原子、曱基、乙基、異丙基。 — 此處,可導入之所述取代基並無特別限制,可視需要 而適宜選擇,例如可列舉烷基、烯基、炔基、芳基、烧氧 基、芳氧基、_素原子、胺基、烷基胺基、芳基胺基、羧 基、烷氧基羰基、磺基、硝基、氰基、醯胺基、烷基磺醯 基、芳基磺醯基等。 21 201235781 41436pif [化ηCommercially available products can be used as the compound having a base. 00 = 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 The acrylic resin having an ethylene carbonate group, for example, a copolymer containing a carbonate group described in JP-A-1-146968. These compounds may be used alone or in combination of two or more. Among these compounds, the compound having an oxiranyl group is preferred in terms of smoothness and insulation of the side surface of the pattern. - the content of the thermal crosslinking agent - the content of the hot parenting agent in the photosensitive composition is not particularly limited, and it may be desirable to select (in relation to the solid matter of the sensing composition) Preferably, it is 1 wt% to 5 wt%, more preferably 2 wt〇/〇~40 wt%, and particularly preferably 3 wt% to 3 wt%. When the content of the thermal crosslinking agent is less than 1% by weight, the heat resistance is deteriorated. When the content is more than 5% by weight, the developability or the crack resistance is deteriorated. On the other hand, if the cerium is in the above-mentioned range, the cured film can be formed with good sensitivity, and the cured film is also advantageous in terms of heat resistance and crack resistance. &lt;Polymer compound containing a carboxyl group&gt; The polymer compound having a carboxyl group is not limited as long as it is a polymer compound having a slow group, and may be appropriately selected as needed. For example, the acid-modified shell contains an ethylenically unsaturated group. The polyamine-based lysine, the acid-modified epoxy resin containing a ethylenically unsaturated group, an acrylic resin containing a ethylenically unsaturated group and a carboxyl group, a polyimide precursor, and the like. Among these compounds, 19 201235781 41436pif acid-modified polyaminocarbamic acid-containing acid having a 4-fold fine group is preferred in terms of excellent crack resistance. - the acid is modified to contain a polyunsaturated group of a polyamino phthalic acid from the resin, and the acid is modified to contain an ethylenically unsaturated group of a polyurethane carboxylic acid resin, if it has an acid group The polyamino phthalate resin having a carboxyl group and an ethylenically unsaturated group is not particularly limited and may be appropriately selected as necessary, and examples thereof include (1) polyamino phthalate having an ethylenically unsaturated group in a side chain. The resin, (11) a carboxyl group-containing polyurethane, and a polyurethane resin obtained by reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule. (1) Polyamine phthalate resin having an ethylenically unsaturated group in a side chain - the polyamino phthalate resin having an ethylenically unsaturated group in a side chain is not particularly limited, and may be optionally required For example, a compound having at least one of the functional groups represented by the following general formulae (1) to (3) in the side chain is exemplified. Ο II—X—C, c=c / R1 R3 / , R2 General formula (1) The R1 to R3 sub-domains represent a hydrogen atom in the formula (〇, or a monovalent group. 20 201235781 ^ι^οριι j said R Asia has no special system, which can be selected according to needs, such as two calves and atoms, or a substituent. In the aspect of free radical reactivity, it is better. Further, R and R3 are not particularly limited, and may be appropriately selected as needed. 'Individually, for example, a hydrogen atom, a halogen atom, an amine group, a slow group, a burnt oxygen nucleus, or a m a base, a base group which may have a substituent, a green which may have a substituent, an alkoxy group which may have a silk taken off, an aryloxy group which may have a substituent, or a substituent-based amine group, The green amine group which may have a substituent, the pyridyl acid group which has a substituent in the village, and the aryl group scale which has a silk take-up. In terms of high radical reactivity, the base papers are preferably a hydrogen atom, a carboxyl group, an alkoxy group, an alkyl group which may have a substituent, or an aryl group which may have a substituent. In the formula (1), X represents an oxygen atom, a sulfur atom, or _N(R)-', and Ri2 represents a hydrogen atom or a valence organic group. The above is not particularly limited and may be appropriately selected as needed, for example, Examples of the alkyl group which may have a substituent include a hydrogen atom, a mercapto group, an ethyl group, and an isopropyl group in terms of high radical reactivity. Here, it may be introduced. The substituent is not particularly limited and may be appropriately selected as needed, and examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, an atom, an amine group, and an alkylamino group. Arylamino, carboxyl, alkoxycarbonyl, sulfo, nitro, cyano, decylamino, alkylsulfonyl, arylsulfonyl, etc. 21 201235781 41436pif [化η

r8icir7 II 6 CIR 4 一 5 CCIC3— R 通式(2) 於所述通式(2)中,R4〜R8分別獨立地表示氫原子 或1價基。所述R4〜R8並無特別限制,可視需要而適宜選 擇,例如可列舉氫原子、鹵素原子、胺基、二烷基胺基、 叛基、烧氧基叛基、續基、硝基、氰基、亦可具有取代基 之烷基、亦可具有取代基之芳基、亦可具有取代基之烷氧 基、亦可具有取代基之芳氧基、亦可具有取代基之烷基胺 基、亦可具有取代基之芳基胺基、亦可具有取代基之烷基 石黃醯基、亦可具有取代基之芳基磺醯基等。於自由基反應 性高之方面而言,該些基中較佳的是氫原子、羧基、烷氧 基羰基、亦可具有取代基之烧基、亦可具有取代基之芳基。 可導入之取代基可列舉與所述通式(丨)相同者等。而 且,Y表示氧原子、硫原子、或-N (R12) _。所述R12與所 述通式(1)之R12之情形同義,較佳例亦相同。 [化8] ,11 _z_R8icir7 II 6 CIR 4 - 5 CCIC3 - R Formula (2) In the above formula (2), R4 to R8 each independently represent a hydrogen atom or a monovalent group. R4 to R8 are not particularly limited and may be appropriately selected as needed, and examples thereof include a hydrogen atom, a halogen atom, an amine group, a dialkylamino group, a thiol group, a decyl group, a thio group, a nitro group, and a cyano group. And an alkyl group which may have a substituent, an aryl group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, and an alkylamino group which may have a substituent Further, it may have an arylamino group having a substituent, an alkylphosphonium group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like. In terms of high radical reactivity, preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Examples of the substituent which can be introduced include the same as those of the above formula (丨). Further, Y represents an oxygen atom, a sulfur atom, or -N (R12) _. The R12 is synonymous with the case of R12 of the above formula (1), and the preferred examples are also the same. [化8], 11 _z_

I -c=c 通式(3) R9 R10 22 201235781 41436pif 於所述通式⑴+,R9〜Rll分別獨立地表示氫原子 或1價基。 所述R並無特別限制,可視需要而適宜選擇,例如可 歹JJ舉氫原子或亦可具有取代基之絲等。於自由基反應性 同之方面而言,該些基中較佳的是氳原子、曱基。 所述RQ及R11並無特別限制,可視需要而適宜選擇, 例,可列舉氫原子、㈣原子、胺基、二烧基胺基 、羧基、 燒氧基祕、續基、;肖基、氰基、亦可具有取代基之烧基、 亦可具有取代基之芳基、亦可具有取代基之錄基、亦可 具有取代基之芳氧基、亦可具有取代基之絲胺基、亦可 具有取代基之芳基胺基、亦可具有取代基之烷基磺醯基、 亦可具有取代基之芳基磺醯基等。於自由基反應性高之方 面而言,該些基中較佳的是氫原子、羧基、烷氧基羰基、 亦可具有取代基之烷基、亦可具有取代基之芳基。 此處’可導入之取代基可例示與所述通式(1 )相同老 等。,且,於所述通式(3)中,z表示氧原子、硫原子、 N(R )_、或亦可具有取代基之伸苯基(phenylene)。所述 R13並無特別限制,可視需要而適宜選擇,例如可列舉亦町 具有取代基之烷基等。於自由基反應性高之方面而言,該 些基中較佳的是曱基、乙基、異丙基。 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 是以如下之化合物的反應產物所表示之結構單元為基本骨 架的聚胺基曱酸@旨樹脂:下述通式(4)所表示之二異氰酸 酉旨化合物之至少1種與下述通式(5)所表示之二醇化合物 23 201235781 41436pif 之至少1種。 OCN-X°-NCO ...通式(4) HO-Y°-〇H . ··通式(5 ) 於所述通式(4)及所述通式(5)中,X0、Υ0分別獨 立地表示2價有機殘基(organic residue )。 如果所述通式(4)所表示之二異氰酸酯化合物、或所 述通式(5)所表示之二醇化合物之至少任意一方具有所述 通式(1)〜通式(3)所表示之基中之至少1個,則生成 於側鏈導入有所述通式(1)〜通式(3)所表示之基的聚 胺基曱酸醋樹脂作為該二異氰酸酯化合物與該二醇化合物 之反應產物。藉由所述方法,可較於聚胺基甲酸酯樹脂之 反應生成後對所期望之側鏈進行取代及/或導入而言更容 易地製造於側鏈導人有所述通式⑴〜通式⑶所表示 之基的聚胺基曱酸酯樹脂。 制 ,表示之二異氛酸醋化合物並無特別限 酷化如可列舉可藉由使三異氮酸 广化合物二具成=== 述3氰酸§旨化合物並無特別限制,可視需要 宜選擇,例如可列』饥而要 澤日本專利特開2GG5-25G438號公幸 24 201235781 41436pif 段落「0034」〜段落「0035」十所記載之化合物等。 所述具有乙烯性不飽和基之單官能醇或所述單官能胺 化合物並無特別限制,可視需要而適宜選擇,例如可列舉 曰本專利特開2005-250438號公報之段落「〇〇37」〜段落 「0040」中所記載之化合物等。 〆 此處,於所述聚胺基甲酸酯樹脂之側鏈導入乙烯性不 飽和基的方法並無特別限制,可視需要而適宜選擇,較佳 的是使用於側鏈含有乙烯性不飽和基的二異氰酸酯化合物 作為製造聚胺基曱酸酯樹脂之原料的方法。所述二異氰酸 酯化合物並無特別限制,可視需要而適宜選擇,可列舉可 藉=使三異氰酸酯化合物與丨當量之具有乙烯性不飽和基 之單g能醇或單官能胺化合物進行加成反應而所得之二異 氰酸酯化合物,例如日本專利特開2〇〇5_25〇438號公報之 段落「0042」〜段落「〇〇49」中所記載之於側鏈具有乙烯 性不飽和基之化合物等。 作為所述於侧鏈具有乙烯性不飽和基之聚胺基曱酸酯 樹脂,自使與感光性組成物中之其他成分的相溶性提高、 使保存穩定性提高等觀點考慮,亦可共聚所述含有乙烯性 不飽和基之二異氰酸酯化合物以外的二異氰酸酯化合物。 所述共t之一異氰酸醋化合物並無特別限制,可視需 要而適宜選擇,例如可列舉下述通式所表示之二異氰 酸酯化合物等。 ~ OCN-L -NCO ·’’通式(6) 25 201235781 41435plf 於所述通式(6)中,U表示亦可具有取 較佳的是院基、芳炫基、芳基、燒氧基、函基之ς—者 0 脂:族或芳香族烴基。Li亦可視需要而具有並不盥 異亂^旨基反應之其他官能基,例如s旨基、胺基曱酸酉旨基、、 醯胺基、脲基之任一者。 土 所述通式⑷所表示之二異氰酸醋化合物並無 制,可視需要而適宜選擇,例如可列舉如2,4_甲笨二: 酸酯、2,4-甲苯二異氰酸酯之二聚體、2,6-卜U k y夕^氘 〜vw才、一卜、對苯二亞甲基二異氰酸酯、間‘二二 f基二異氛酸S旨、4,4,·二苯基m二異驗自旨],5 _其了 氛酸醋、3,3’-二甲基聯苯_4,4,_二異氰酸醋等這樣的 二異氰酸·合物;六亞甲基二異氰酸酯、三甲基 矢 基二異氰酸醋、離胺酸二異氰酸酯、二聚酸二異^ : 脂肪族二異氰酸酯化合物;異佛爾酮二異氰酸酯、4曰 甲基雙(環己基異氰㈣)、甲基環己炫_2,4(或2,6)’—、亞 氰酸酯、1,3·(異氰酸酯基甲基)環己烧等脂環族二異 = 化合物;1莫耳1,3·丁二醇與2莫耳甲苯二異氰酸久略 成物等作為二醇與二異氰酸酯之反應物之二異氰酸酯力σ 物等。該些化合物可單獨使用〗種,亦可併用2種以上σ 所述通式(5)所表示之二醇化合物並無特別限制, 視需要而適宜選擇,例如可列舉聚醚二醇化合物、负、可 醇化合物、聚碳酸酯二醇化合物等高分子二醇化合物®曰〜 二醇、新戊二醇等低分子二醇化合物;具有乙烯性不飽 26 201235781 基之二醇化合物;具有羧酸基之二醇化合物等。 此處’作為於聚胺基曱酸酯樹脂之側鏈導入乙烯性不 飽和基的方法’除了前述方法以外,使用於側鏈含有乙烯 性不飽和基之二醇化合物作為製造胺基甲酸酯樹脂之原料 的方法亦較佳。所述於側鏈含有乙烯性不飽和基之二醇化 合物例如可為如三羥甲基丙烷單烯丙基醚這樣的市售之化 合物L亦可列舉可藉由鹵化二醇化合物、三醇化合物、胺 ,一醇化合物等化合物與含有乙烯性不飽和基之羧酸、醯 氯、異氰酸醋、醇、胺、硫醇、鹵化烧基化合物等化合物 之反應而容易地製造之化合物等。 所述於側鏈含有乙烯性不飽和基之二醇化合物並無特 別限制,可視需要而適宜選擇,例如可列舉曰本專利特開 如〇5-250438號公報之段落「〇〇57」〜段落「〇〇6〇」中所 記載之化合物、日本專利特開2〇〇5_25〇438號公報之段落 ,「_5」〜段落「議1」中所記載之藉由二醇化合物使四 繞酸二酐開環而成之化合物、下述赋⑹所表示之日 ,專利特開2.25G438號公報之段落「顯」〜段落 〇〇66」中所記載之化合物等。該些化合物中較佳的是下 述通式(G)所表示之日本專利特開2〇〇5_25〇438號公 之段落「0064」〜段落「0066」中所記載之化合物。 27 201235781 41436plf [化9]I - c = c General formula (3) R9 R10 22 201235781 41436pif In the above formula (1) +, R9 to R11 each independently represent a hydrogen atom or a monovalent group. The R is not particularly limited and may be appropriately selected as needed. For example, it may be a hydrogen atom or a filament which may have a substituent. In terms of radical reactivity, among these groups, a ruthenium atom or a ruthenium group is preferred. The RQ and R11 are not particularly limited and may be appropriately selected as needed, and examples thereof include a hydrogen atom, a (tetra) atom, an amine group, a dialkylamino group, a carboxyl group, an alkoxy group, a thiol group, a Schottky group, and a cyanogen group. a base group, an alkyl group which may have a substituent, an aryl group which may have a substituent, a substituent group which may have a substituent, an aryloxy group which may have a substituent, a silk amine group which may have a substituent, An arylamine group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like. In the case of high radical reactivity, preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Here, the substituent which can be introduced can be exemplified as the same as the above formula (1). Further, in the above formula (3), z represents an oxygen atom, a sulfur atom, N(R)_, or a phenylene group which may have a substituent. The R13 is not particularly limited, and may be appropriately selected as needed. For example, an alkyl group having a substituent may be mentioned. Preferred among these groups are a mercapto group, an ethyl group, and an isopropyl group in terms of high radical reactivity. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain is a polyamino phthalic acid which is a basic skeleton represented by a reaction product of the following compound: a resin: a general formula ( 4) At least one of the diisocyanate compound represented by the formula and at least one of the diol compound 23 201235781 41436pif represented by the following formula (5). OCN-X°-NCO Formula (4) HO-Y°-〇H. ·· (5) In the above formula (4) and the formula (5), X0, Υ0 The divalent organic residue is independently represented. At least one of the diisocyanate compound represented by the above formula (4) or the diol compound represented by the formula (5) has the formula (1) to the formula (3). In the case where at least one of the groups is formed, a polyamino phthalic acid resin in which a group represented by the above formula (1) to formula (3) is introduced as a side chain is formed as the diisocyanate compound and the diol compound. reaction product. By the method, the substitution of the desired side chain and the introduction of the desired side chain after the reaction of the polyurethane resin can be more easily produced in the side chain, and the general formula (1) is A polyamino phthalate resin represented by the formula (3). The method of the present invention is not particularly limited, as shown in the following. Selection, for example, can be listed as "Hungry", Japanese Patent Special Open 2GG5-25G438 No. 24 201235781 41436pif Paragraph "0034" ~ Paragraph "0035" Ten compounds and the like. The monofunctional alcohol or the monofunctional amine compound having an ethylenically unsaturated group is not particularly limited and may be appropriately selected as needed, and for example, the paragraph "〇〇37" of the Japanese Patent Laid-Open Publication No. 2005-250438 ~ The compound described in paragraph "0040". Here, the method of introducing the ethylenically unsaturated group into the side chain of the polyurethane resin is not particularly limited, and may be appropriately selected as needed, and it is preferably used in the side chain to contain an ethylenically unsaturated group. A diisocyanate compound is used as a raw material for producing a polyamino phthalate resin. The diisocyanate compound is not particularly limited and may be appropriately selected as needed, and may be an addition reaction of a triisocyanate compound and a fluorene-equivalent mono-g-alcohol or a mono-functional amine compound having an ethylenically unsaturated group. The obtained diisocyanate compound is, for example, a compound having an ethylenically unsaturated group in a side chain as described in paragraph "0042" to paragraph "〇〇49" of the Japanese Patent Publication No. 2-5_25. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain may be copolymerized from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. A diisocyanate compound other than the diisocyanate compound containing an ethylenically unsaturated group. The isocyanate compound is not particularly limited and may be appropriately selected, and examples thereof include a diisocyanate compound represented by the following formula. ~ OCN-L -NCO · '' General formula (6) 25 201235781 41435plf In the above formula (6), U represents that it may have a preferred group, an aromatic group, an aryl group, an alkoxy group. , the letter of the base - 0 grease: family or aromatic hydrocarbon group. Li may also have any other functional group which does not interfere with the reaction, such as an s group, an amino ruthenate group, an anthranyl group or a ureido group, as needed. The diisocyanate compound represented by the above formula (4) is not prepared, and may be appropriately selected as needed, and examples thereof include dimerization of 2, 4-methyl 2: acid ester and 2, 4-toluene diisocyanate. Body, 2,6-Bu U ky 夕 ^氘~vw, 卜, p-xylylene diisocyanate, m-di-di-f-diiso-acid S, 4,4, · diphenyl m The second is the same as the purpose], 5 _ which is a diisocyanate compound such as sulphuric acid vinegar, 3,3'-dimethylbiphenyl _4,4, _ diisocyanate vinegar; Diisocyanate, trimethylylidene diisocyanate, leucine diisocyanate, dimer acid diisocyanate : aliphatic diisocyanate compound; isophorone diisocyanate, 4 曰 methyl bis (cyclohexyliso) An alicyclic diiso-compound such as cyanide (tetra)), methylcyclohexan-2,4 (or 2,6)'-, cyanocyanate, 1,3·(isocyanatemethyl)cyclohexene; A diisocyanate force such as a reaction product of a diol and a diisocyanate, such as a molar 1,3·butanediol and a 2 mol of toluene diisocyanate. These compounds may be used alone or in combination of two or more kinds of σ. The diol compound represented by the above formula (5) is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a polyether diol compound and a negative a high molecular weight diol compound such as a phenol compound or a polycarbonate diol compound, a low molecular diol compound such as a diol or a neopentyl glycol; a diol compound having an ethylenic unsaturated 26 201235781 group; a diol compound or the like. Here, 'the method of introducing an ethylenically unsaturated group to the side chain of the polyamino phthalate resin' is used for producing a urethane in addition to the above-mentioned method, using a diol compound having an ethylenically unsaturated group in a side chain. The method of the raw material of the resin is also preferred. The diol compound having an ethylenically unsaturated group in the side chain may be, for example, a commercially available compound L such as trimethylolpropane monoallyl ether, and may also be exemplified by a halogenated diol compound or a triol compound. A compound which can be easily produced by reacting a compound such as an amine or a monool compound with a compound containing an ethylenically unsaturated group such as a carboxylic acid, an oxime chloride, an isocyanate, an alcohol, an amine, a thiol or a halogenated alkyl compound. The diol compound having an ethylenically unsaturated group in the side chain is not particularly limited, and may be appropriately selected as needed. For example, the paragraph "〇〇57" of the Japanese Patent Laid-Open Publication No. 5-250438- The compound described in "〇〇6〇", the paragraph of the Japanese Patent Laid-Open Publication No. 2〇〇5_25〇438, the "_5" to the paragraph "1", the tetracarboxylic acid by the diol compound A compound obtained by ring-opening an anhydride, a compound represented by the following paragraph (6), and a compound described in the paragraph "display" to paragraph 66 of the Japanese Patent Laid-Open Publication No. 2.25G438. Preferred among these compounds are the compounds described in the paragraph "0064" to "0066" of the Japanese Patent Laid-Open Publication No. Hei 2-5_25 438, which is represented by the following formula (G). 27 201235781 41436plf [Chemistry 9]

通式⑹ 於所述通式(G)中,R1〜R3分別獨立地表示氫原子 或1價基’ A表示2價有機殘基,X表示氧原子、硫原子、 或-N(R12)-,所述Ri2表示氫原子、或1價有機基。 另外,所述通式(G)中之R1〜R3及X與所述通式(1) 中之R1〜R3及X同義,較佳之態樣亦相同。 藉由使用源自所述通式(G)所表示之二醇化合物之 聚胺基甲酸酯樹脂,藉由空間障礙大的2級醇所產生之抑 制聚合物主鏈之過剩之分子運動的效果,可達成層的覆膜 強度提高。 作為所述於侧鏈具有乙烯性不飽和基之聚胺基甲酸醋 樹脂,例如自使與感光性組成物中之其他成分的相溶性提 高、使保存穩定性提高等觀點考慮,可共聚所述於側鏈含 有乙烯性不飽和基之二醇化合物以外的二醇化合物。 所述於側鏈含有乙烯性不飽和基之二醇化合物以外的 二醇化合物並無特觀制’可視需要㈣宜麟,例如可 列舉聚醚二醇化合物、聚酯二醇化合物、聚碳酸酯二醇化 28 201235781 合物等。 選擇所制,可視需要而適宜 落「=;?「_」===報之段 所达H醇化合物並無特 , « ^ 2〇〇5,5〇T3:;t:;: ^「〇〇77^段落「0079」、段落「_3」〜段落「〇〇85」 中之㈤〜^及胤13〜No.18中所記載之化合物等。 所«石反酸醋二醇化合物並無特別限制,可視需要而 適宜選擇’例如可列舉日本專利特開2〇〇5_25〇438號公報 之段落「0080」〜段落「〇081」及段落「〇〇84」中之^^^ 〜Νο·12中所記載之化合物等。 而且,於所述於側鏈具有乙烯性不飽和基之聚胺基曱 酸酯樹脂之合成中’除了上述二醇化合物以外,亦可併用 具有並不與異氰酸酯基反應之取代基之二醇化合物。 所述具有並不與異氰酸酯基反應之取代基之二醇化合 物並無特別限制,可視需要而適宜選擇,例如可列舉曰本 專利特開2005-250438號公報之段落「0087」〜段落「〇〇88」 中所記載之化合物等。 另外,於所述於侧鏈具有乙烯性不飽和基之聚胺基曱 酸酯樹脂之合成中,除了上述二醇化合物以外,亦可併用 具有叛基之二醇化合物。所述具有幾·基之二醇化合物並無 特別限制,可視需要而適宜選擇’例如可列舉下述通式(8) 〜通式(10)所表示之化合物等。 29 ,15 201235781 41436pif [化 10] ho-l9-c-l10-oh 通式(8) L11In the above formula (G), R1 to R3 each independently represent a hydrogen atom or a monovalent group 'A represents a divalent organic residue, and X represents an oxygen atom, a sulfur atom, or -N(R12)- The Ri2 represents a hydrogen atom or a monovalent organic group. Further, R1 to R3 and X in the above formula (G) are synonymous with R1 to R3 and X in the above formula (1), and preferred embodiments are also the same. By using a polyurethane resin derived from the diol compound represented by the general formula (G), the excessive molecular motion of the polymer main chain is inhibited by the sterically hindered second-order alcohol. The effect is that the film strength of the layer can be improved. The polyamino formate resin having an ethylenically unsaturated group in the side chain may be copolymerized, for example, from the viewpoint of improving compatibility with other components in the photosensitive composition and improving storage stability. A diol compound other than a diol compound containing an ethylenically unsaturated group in a side chain. The diol compound other than the diol compound containing an ethylenically unsaturated group in the side chain is not specifically required. [IV] Yilin, for example, a polyether diol compound, a polyester diol compound, and a polycarbonate may be mentioned. Glycolation 28 201235781 Compound, etc. Select the system, and it is appropriate to fall as needed. "=;?"_"=== The H-alcohol compound in the paragraph is not special, « ^ 2〇〇5,5〇T3:;t:;: ^"〇化合物 77^ Paragraph "0079", paragraph "_3" - paragraph "〇〇85" (5) ~ ^ and 胤 13 ~ No. 18 compounds and the like. The "stea vinegar diol compound is not particularly limited and may be appropriately selected as needed", for example, paragraph "0080" to paragraph "〇081" and paragraph "〇" of Japanese Patent Laid-Open Publication No. 2_5_25〇438 The compound described in ^^^~Νο·12 in 〇84". Further, in the synthesis of the polyamino phthalate resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a substituent which does not react with an isocyanate group may be used in combination. . The diol compound having a substituent which does not react with an isocyanate group is not particularly limited and may be appropriately selected as needed, and for example, the paragraph "0087" to the paragraph "〇〇" of the Japanese Patent Laid-Open Publication No. 2005-250438 The compound described in 88". Further, in the synthesis of the polyamino phthalate resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a thiol group may be used in combination. The diol compound having a hydrazine group is not particularly limited, and may be appropriately selected as needed. For example, a compound represented by the following formula (8) to formula (10) may, for example, be mentioned. 29 , 15 201235781 41436pif [化 10] ho-l9-c-l10-oh General formula (8) L11

COOHCOOH

H〇-L9-Ar~L10-〇H 通式(9)H〇-L9-Ar~L10-〇H General formula (9)

COOHCOOH

HO-L9—N-L10-〇HHO-L9-N-L10-〇H

COOH 通式(10) 於所述通式(8)〜通式(10)中,R15表示氫原子、 亦可具有取代基(例如包括氰基、二卜口基(nitro group)、 鹵素原子(-F、-C卜-Br、-I)、-CONH2、-COOR16、-OR16、 -NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16 (此 處,所述R16表示碳數為1〜l〇之烷基、或碳數為7〜l5 之芳烧基)等各基)之烷基、芳烷基、芳基、烧氧基、芳 氧基。該些基中較佳的是氫原子、碳數為丨個〜8個之烷 基、碳數為6個〜15個之芳基。 於所述通式(8)〜通式(1〇)中,乙9、[10、l11可八 =目=可不同,表示單鍵、亦可具有取代基(例如較^ ,”基、芳基、烧氣基、-基之各基)之2價 之月日肪族或芳香族烴基。該些基 β山 、 20摘夕柚岭甘中車又佳的疋碳數為1個〜 之伸烧基、讀為6個〜15個之伸芳基,更佳的是碳 201235781 414i0plt 數為1個〜8個之伸烧基。而且,於所述L9〜Lll中亦可視 需要而具有並不與異氰酸醋基反應之其他官能基,例如^ 基、S曰基、胺基曱酸g旨基、醯胺基、腺基、趟基。另外, ,亦可由所述R15、L' L8、L9中之2個或3個而形成環。 於所述通式(9)中,Ar只要是表示亦可具有取代基 之3價芳香族烴基者,則並無特別限制,可視需要而適^ 選擇’較佳的是碳數為6個〜15個之芳香族基。 所述通式(8)〜通式(10)所表示之具有緩基之二醇 化合物並無特別限制,可視需要而適宜選擇,例如可列舉 3,5-二羥基苯曱酸、2,2-雙(羥基曱基)丙酸、2,2_雙(2_經^ 乙基)丙酸、2,2-雙(3-羥基丙基)丙酸、雙(羥基曱基)乙酸、 雙(4-羥基苯基)乙酸、2,2-雙(羥基甲基)丁酸、4,4_雙(4_声 基苯基)戊酸、酒石酸、Ν,Ν-二羥基乙基甘胺酸、 經基乙基)-3-叛基-丙醯胺等。 由於此種叛基之存在,可賦予聚胺基曱酸酯樹脂氫鍵 結性與鹼可溶性等特性,於此方面而言較佳。更具體而言, 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂是進 一步於侧鏈具有羧基之樹脂,更具體而言,側鏈之乙烯性 不飽和基較佳的是〇.〇5 mmol/g〜3.0 mmol/g,更佳的是〇 5 mmol/g 〜2.7 mmol/g,特佳的是 0.75 mm〇l/g 〜2.4 mmol/g,且較佳的是於側鏈具有羧基,酸值較佳的是2〇 mgKOH/g〜120 mgKOH/g ’ 更佳的是 30 mgKOH/g〜110 mgKOH/g ’ 特佳的是 35 mgKOH/g〜1〇〇 mgKOH/g。 另外,所述酸值例如可依據JIS K0070而測定。其中, 31 201235781 41436pif 於樣品並不溶解之情形時,使用二噁烷或四氫呋喃等作為 溶劑。 所述於側鏈具有乙烯性不飽和基之聚胺基甲酸酯樹脂 可藉由如下方式而合成:將上述二異氰_旨化合物及二醇 化合物,於非質子性溶射添加與各自之反應性對應之活 性之公知觸而進行加熱。合成巾所使狀二異氰酸醋以 及二醇化合物之莫耳比(Ma : Mb)並無制關,可視需 要而適宜選擇,較佳的是!:卜12 :卜藉由以醇類或胺 類等進行處理’以最終並不殘存異氛義基之形態合成具 有分子量或黏度等所期望之物性的產物。 〃 而且’所述於側鏈具有乙烯性不飽和基之聚胺基甲酸 醋樹脂亦可適宜制於聚合物末端、主鏈具有乙触不飽 和基之聚胺基甲酸賴脂。藉由於聚合物末端、主鍵 乙婦性不飽和基,可進-步使感光性組成物與於側鍵^ 乙烯性不飽和基之聚胺基曱酸軸脂之間、或__有 乙烯性不飽和基之聚胺基fs《s旨樹脂 可 高,使光硬化物強度增加。其結果,於平版印= 用於側鏈具有乙雜不飽和基之純㈣ 提供強韌性優異之材料。 辦細吟 下 於聚合物末端導人叫料飽和基之 所示之方法。亦即,使用上述之於側鏈具有乙 基之聚胺基甲咖職之合成步驟巾的聚合物末端之° 異氰酸錄,與於藉由醇類或胺類等進行處理之 ^ 使用具有乙烯性不飽和基之醇類或胺類等即可。/ 32 201235781 414i〇pit 作為此種化合物,具體而言首先可列舉與作為具有乙 烯性不飽和基之單官能醇或單官能胺化合物而列舉之例示 化合物相同之化合物。 另外,自導入量之控制容易且可使導入量增加,而且 使交聯反應效率提高等觀點考慮,較佳的是與聚合物末端 相比而言更向聚合物側鏈導入乙烯性不飽和基。 所導入之乙炸性不飽和基並無特別限制,可視需要而 適宜選擇,於交聯硬化膜形成性之方面而言,較佳的是稀 丙基、甲基丙烯醯基、丙烯醯基、乙烯基苯基,更佳的是 甲基丙烯醯基、丙烯醯基,於兼顧交聯硬化膜之形成性與 原始保存性之方面而言,特佳的是甲基丙烯醯基。 而且,甲基丙烯醯基之導入量並無特別限制,可視需 要而適宜選擇,以乙烯性不飽和基當量計而言較佳的: 0.05 mm〇1/g〜3.〇 mm〇1/g,更佳的是 〇5 職 疋 mm〇1/g ’ 特佳的是 〇.75 mm〇1/g〜2 4 。 · 於主鏈導入乙烯性不飽和基之方法,存 方向具有乙烯性錢和基 =研於主鏈 樹脂之合成中的方法二==聚胺基曱酸醋 基之二醇化合物並無特別限制,=要=性不飽和 列舉順-2-丁締从二醇^ 要而適宜選擇,可 醇等。 丁烯-1,4-一醇、聚丁二烯二 亦可和基之聚胺基甲_樹脂 含具有與該特定聚胺基甲二 33 201235781 41436pif 酸醋樹脂。例如’所述於側鏈具有乙烯性 基甲酸_脂可併线及/_鏈含 ^ ^ 胺基曱酸酯樹脂。 方香鉍基之聚 作為所述⑴於側鏈具有乙烯性不飽和基之聚胺其甲 酸酷樹脂之具體例,例如可列舉日本專利特開細5_25二38 號公報之段落「0293」〜段落「0310」中所示之ρ ι〜ρ 3ΐ 之聚合物等。該些化合物中較佳的是段落「〇3〇8」及段落 「0309」中所示之P-27及P-28之聚合物。 --(ii) g有緩基之聚胺基曱酸g旨與於分子中具有環氧 基及乙烯性不飽和基之化合物反絲所得之聚胺基甲酸醋 樹脂- 所述含有羧基之聚胺基曱酸酯與於分子中具有環氧基 及乙烯性不飽和基之化合物反應而所得之聚胺基曱酸酯樹 脂是以二異氰酸酯與含有羧酸基之二醇為必需成分的含有 羧基之聚胺基曱酸酯、與於分子中具有環氧基及乙烯性不 飽和基之化合物反應而所得之聚胺基甲酸酯樹脂。亦可視 需要而添加作為二醇成分之重量平均分子量為3〇〇以下之 低分子二醇或重量平均分子量為500以上之低分子二醇作 為共聚成分。 藉由使用所述聚胺基曱酸醋樹脂,與無機填充劑之穩 定之分散性或抗龜裂性或耐衝擊性優異,因此耐熱性、耐 濕熱性、密接性、機械特性、電氣特性提高。COOH Formula (10) In the above formula (8) to formula (10), R15 represents a hydrogen atom, and may have a substituent (for example, including a cyano group, a nitro group, a halogen atom ( -F, -Cb-Br, -I), -CONH2, -COOR16, -OR16, -NHCONHR16, -NHCOOR16, -NHCOR16, -OCONHR16 (here, R16 represents an alkane having a carbon number of 1 to 10 Å) An alkyl group, an aralkyl group, an aryl group, an alkoxy group or an aryloxy group of each group such as a group or a aryl group having a carbon number of 7 to 15; Preferred among these groups are a hydrogen atom, an alkyl group having a carbon number of ~8, and an aryl group having 6 to 15 carbon atoms. In the above formula (8) to formula (1〇), B9, [10, l11 may be eight = mesh = may be different, and may represent a single bond, and may also have a substituent (for example, ^, ke, fang) The base of the base, the gas-burning base, the base of the base, the divalent month of the aliphatic or aromatic hydrocarbon group. The bases of the β-mountain, the 20th pick-up idyllic gansu car have a good carbon number of one ~ The stretching base is read as 6 to 15 aryl groups, and more preferably, the carbon 201235781 414i0plt number is 1 to 8 stretching bases. Moreover, in the L9 to L11, it is also possible to have Other functional groups which do not react with isocyanate groups, such as, for example, a sulfhydryl group, an amino decanoic acid group, an amidino group, a gland group, a fluorenyl group. Alternatively, the R15, L' may also be used. In the above formula (9), Ar is not particularly limited as long as it is a trivalent aromatic hydrocarbon group which may have a substituent, and may be optionally used. The diol compound having a carbon number of 6 to 15 is preferably selected. The diol compound having a slow group represented by the above formula (8) to formula (10) is not particularly limited and can be visualized. Need and appropriate choice, examples Examples thereof include 3,5-dihydroxybenzoic acid, 2,2-bis(hydroxyindenyl)propionic acid, 2,2-bis(2-hydroxyethyl)propionic acid, and 2,2-bis(3-hydroxyl). Propyl) propionic acid, bis(hydroxyindenyl)acetic acid, bis(4-hydroxyphenyl)acetic acid, 2,2-bis(hydroxymethyl)butyric acid, 4,4-bis(4-ylphenyl) Valeric acid, tartaric acid, hydrazine, hydrazine-dihydroxyethylglycine, transylethyl)-3-refenyl-propionamide, etc. Due to the existence of such a ruthenium, a polyamine phthalate resin can be imparted. The characteristics such as hydrogen bonding property and alkali solubility are preferable in this respect. More specifically, the polyamino phthalate resin having an ethylenically unsaturated group in a side chain further has a carboxyl group in a side chain. The resin, more specifically, the ethylenically unsaturated group of the side chain is preferably 〇. 5 mmol/g to 3.0 mmol/g, more preferably 〇5 mmol/g to 2.7 mmol/g, particularly preferred. It is 0.75 mm 〇l / g to 2.4 mmol / g, and preferably has a carboxyl group in the side chain, and the acid value is preferably 2 〇 mg KOH / g to 120 mg KOH / g ' More preferably 30 mg KOH / g ~ 110 mgKOH/g ' is particularly preferably 35 mgKOH/g to 1 〇〇mgKOH/g. Further, the acid value can be, for example, according to JIS K0070 Whereas, 31 201235781 41436pif When the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The polyurethane resin having an ethylenically unsaturated group in the side chain can be as follows Synthetic method: The above-mentioned diisocyanate compound and the diol compound are heated by a known contact with an activity corresponding to the reactivity of each aprotic solvent. The molar ratio of the isocyanuric acid vinegar and the diol compound (Ma: Mb) of the synthetic towel is not controlled, and may be appropriately selected as needed, preferably! :Bu 12: By treating with an alcohol or an amine or the like, a product having a desired physical property such as molecular weight or viscosity is synthesized in such a manner that the heterogeneous group is not left at all. Further, the polyamino carboxylic acid resin having an ethylenically unsaturated group in the side chain may be suitably prepared from a polyamido lysate having a terminal unsaturated group and a B-unsaturated group in the main chain. By virtue of the polymer terminal and the primary bond ethylenically unsaturated group, the photosensitive composition can be further advanced between the polyamino phthalic acid oleic acid ester having a side bond and an ethylenically unsaturated group, or __ethylidene The polyamine group fs of the unsaturated group can be high in resin, and the intensity of the photocured material is increased. As a result, in the lithographic printing = pure for the side chain having an ethylenically unsaturated group (IV), it provides a material excellent in toughness. The method of introducing a saturated base at the end of the polymer is described. That is, the isocyanate of the polymer end of the synthetic step towel having the above-mentioned polyaminocarbamate having an ethyl group in the side chain is used, and is treated with an alcohol or an amine or the like. The alcohol or the amine of the ethylenically unsaturated group may be used. / 32 201235781 414i〇pit As the compound, specifically, the same compound as the exemplified compound exemplified as the monofunctional alcohol or the monofunctional amine compound having an ethylenically unsaturated group can be mentioned. Further, from the viewpoints of easy control of the amount of introduction, increase in the amount of introduction, and improvement in the efficiency of crosslinking reaction, it is preferred to introduce an ethylenically unsaturated group into the polymer side chain as compared with the polymer terminal. . The ethylenically unsaturated group to be introduced is not particularly limited, and may be appropriately selected as needed. From the viewpoint of the formability of the crosslinked cured film, a propyl group, a methacryl fluorenyl group, an acryl fluorenyl group, The vinyl phenyl group is more preferably a methacryl fluorenyl group or an acryl fluorenyl group, and a methacryl fluorenyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the original preservability. Further, the amount of the methacrylonitrile group introduced is not particularly limited, and may be appropriately selected as needed, and is preferably in terms of ethylenically unsaturated group equivalent: 0.05 mm 〇 1 /g 〜3. 〇mm 〇 1 / g More preferably, 〇5 jobs 疋mm〇1/g ' Particularly good is 〇.75 mm〇1/g~2 4 . · A method of introducing an ethylenically unsaturated group into a main chain, and having a vinyl group and a base = a method of synthesizing in the synthesis of a main chain resin; a diol compound of a polyamino phthalic acid ketone group is not particularly limited , = = = Sexually unsaturated, cis-2-butane is selected from the diol, and may be selected as an alcohol. Butene-1,4-monool, polybutadiene di- and poly-amino-methyl-resin are contained with the specific polyaminocarbamate 33 201235781 41436 pif acid vinegar resin. For example, the side chain has an ethylenic acid-ester which may be conjugated and/or a chain containing an amine phthalate resin. As a specific example of the above-mentioned (1) polyamine having an ethylenically unsaturated group in the side chain, the formic acid resin is exemplified, for example, the paragraph "0293" of the Japanese Patent Laid-Open Publication No. Hei. A polymer such as ρ ι ρ 3 所示 shown in "0310". Preferred among these compounds are the polymers of P-27 and P-28 shown in the paragraph "〇3〇8" and paragraph "0309". -- (ii) a polyamino phthalic acid having a slow-setting group, and a polyamino carboxylic acid resin obtained by inversely reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule - the carboxyl group-containing poly The polyamino phthalate resin obtained by reacting an amino phthalic acid ester with a compound having an epoxy group and an ethylenically unsaturated group in the molecule is a carboxyl group containing a diisocyanate and a diol having a carboxylic acid group as an essential component. A polyurethane resin obtained by reacting a polyamino phthalate with a compound having an epoxy group and an ethylenically unsaturated group in the molecule. A low molecular weight diol having a weight average molecular weight of 3 Å or less or a low molecular weight diol having a weight average molecular weight of 500 or more as a diol component may be added as a copolymerization component. By using the polyamino phthalic acid vinegar resin, it is excellent in stable dispersibility, crack resistance or impact resistance with an inorganic filler, and thus heat resistance, moist heat resistance, adhesion, mechanical properties, and electrical properties are improved. .

而且’所述聚胺基甲酸酯樹脂是以亦可具有取代基之 二價脂肪族以及芳香族烴之二異氰酸酯、與C原子以及N 34 201235781 41436pif 原子之任一者介隔而具有COOH基與2個〇11基之含有羧 酸之二醇為必而成分的反應物,且亦可為所得之反應物盥 介隔-COO-鍵而於分子中具有環氧基與乙烯性不飽和基^ 化合物反應而所得之化合物。 而且,所述聚胺基曱酸酯樹脂亦可為以下述通式(u) 所表示之二異氰酸酯與選自下述通式(12_n〜通式(12_3) 所示之含有羧酸基之二醇的至少1種為必需成分之產物、 與下述通式(m)〜通式⑴叫所示之於分子中具有 環氧基及乙烯性不飽和基之化合物進行反應而所得之化合 物。 [化 11] OCN-Ri-NCO 通式(11 ) l2 HO— R3 — C—R4 —OH ψ 通式(12-1) COOH HO—R3—Ar— R4-〇h i5 COOH 通式(12-2) HO—R3—N— r4——〇H COOH 通式(12-3) (例如較佳的是絲,基、芳R基表具ί 35 201235781 41436pif 一者)之二價之脂肪族或芳香族煙。所述Rl亦可視需要而 具有並不與異氰酸酯基反應之其他官能基,例如酯基、胺 基甲酸酯基、醯胺基、脲基之任一者。於所述通式(12-1 ) 中,R2表示氫原子、亦可具有取代基(例如包括氰基、二 卜口基、鹵素原子(-F ' -Cl、-Br、-I)、-CONH2、-COOR6、 ,0R6、-NHCONHR6、-NHC00R6、-NHCOR6、-OCONHR6、 -CONHR6 (此處’ R6表示碳數為丨〜川之烷基、碳數為7 〜D之方烷基之任一者)等各基)之烷基、芳烷基、芳基 烷氧基、或芳氧基。該些基中較佳的是氫原子、碳數為 個〜3個之烷基、碳數為6個〜15個之芳基。於所述通^ (12-1)、通式(12_2)及通式(12 3)中,^、^及 r 了分別相同亦可不同,表示單鍵、亦可具有取代基(例女 較^的是絲、芳燒基、芳基、烧氧基、i基之各基)^ -價之脂肪族或芳香族烴。該些基巾較佳的是碳數 〜2〇個之伸烷基、碳數為ό個〜15個之伸芳基,更佳的θ 2為個之伸烷基。而且,㈣述R3、H 其“具有並不與異氰_基反叙其他官爾 i之==基、賴基、胺基甲酸醋基、醯胺基、脲基、函 ^ 者。另外’亦可由所述R2、R3、中之‘ 烴:較佳表示亦可具有取代基之三價芳彻 孕乂佳的疋奴數為6個〜15個之芳香族基。 36 201235781 414i0plt [化 12] CH2=CRi4-COO-QH2=CRi4COO— Ri5- CH2==CR^4COO~ ΌFurther, the polyurethane resin has a COOH group interposed between a divalent aliphatic group having a substituent and a diisocyanate of an aromatic hydrocarbon, and a C atom and any one of N 34 201235781 41436 pif atoms. And a reaction product of two 〇11-based carboxylic acid-containing diols, which may be a necessary component, and may also have an epoxy group and an ethylenically unsaturated group in the molecule by the resulting reactant 盥--COO-bond. ^ A compound obtained by reacting a compound. Further, the polyamino phthalate resin may be a diisocyanate represented by the following formula (u) and a carboxylic acid group selected from the group consisting of the following formula (12_n to formula (12-3)). At least one of the alcohols is a product of an essential component, and a compound obtained by reacting a compound having an epoxy group and an ethylenically unsaturated group in the molecule represented by the following formula (m) to formula (1). 11] OCN-Ri-NCO General formula (11) l2 HO— R3 — C—R 4 —OH ψ General formula (12-1) COOH HO—R 3 —Ar— R 4 —〇 h i5 COOH General formula (12-2 HO—R3—N—r4—〇H COOH A divalent aliphatic or aromatic compound of the formula (12-3) (for example, preferably a silk, a base, an aromatic R-based watch, ί 35 201235781 41436pif) The R1 may also have any other functional group which does not react with the isocyanate group, such as an ester group, a urethane group, a guanamine group or a ureido group, as needed. In the formula -1), R2 represents a hydrogen atom, and may have a substituent (for example, including a cyano group, a di-branched group, a halogen atom (-F '-Cl, -Br, -I), -CONH2, -COOR6, , 0R6 -NHCONHR6, -NHC00R6, -NHCOR6, -OCONHR6, -CONHR6 (wherein "R6 represents a carbon number of 丨~chuan alkyl group, and a carbon number of 7 to D of a square alkyl group") An alkyl group, an aralkyl group, an aryl alkoxy group or an aryloxy group. Preferred among these groups are a hydrogen atom, an alkyl group having a carbon number of ~3, and a carbon number of 6 to 15 In the above-mentioned (12-1), the general formula (12-2), and the general formula (12 3), ^, ^, and r are the same or different, and each represents a single bond, and may have a substituent ( The females are the aliphatic or aromatic hydrocarbons of the silk, the aryl group, the aryl group, the alkoxy group, and the i group. The base papers preferably have a carbon number of ~2〇. The alkyl group has a carbon number of 〜15 aryl groups, and more preferably θ 2 is an alkyl group. Moreover, (4) R3, H have "have not reacted with isocyanine-based other官尔 i == base, lysyl, amino carboxylic acid acetate, decylamino, ureido, and the other. Also 'from the R2, R3, of the 'hydrocarbon: preferably expressed or substituted The number of 疋 slaves of the trivalent fangs is 6 to 15 aromatic groups. 36 20123 5781 414i0plt [Chemical 12] CH2=CRi4-COO-QH2=CRi4COO— Ri5- CH2==CR^4COO~ Ό

OO

OO

0 通式(13-1) 通式(13-2) 通式(13-3) 通式(13-4) 通式(13-5) 通式(13-6) 通式(13-7) 通式(13-8) 37 201235781 41436pif [化 13]0 General formula (13-1) General formula (13-2) General formula (13-3) General formula (13-4) General formula (13-5) General formula (13-6) General formula (13-7) General formula (13-8) 37 201235781 41436pif [Chem. 13]

Rl4 01^2== CR-|4 CON—R15 CH OHRl4 01^2== CR-|4 CON—R15 CH OH

O 通式(13-9)O general formula (13-9)

Ch^^CRwCOORis HOCh^^CRwCOORis HO

CH2〇CO t&gt;° 通式(13-10)CH2〇CO t&gt;° General formula (13-10)

CH 严 CR14COOR15 HOCH Yan CR14COOR15 HO

ο ^16 CH== CRtj- C〇Ris〇*')p —CON RlS -〇-0000^-〇.0 通式(13-ΐυ 通式(13-12) 通式(13-13) 通式(13-14) oο ^16 CH== CRtj- C〇Ris〇*')p —CON RlS -〇-0000^-〇.0 General formula (13-ΐυ General formula (13-12) General formula (13-13) General formula (13-14) o

R15-0-(-C0R150-&gt;p—CONR16 通式(13-15) ^16 通式(13-16)R15-0-(-C0R150-&gt;p-CONR16 Formula (13-15) ^16 Formula (13-16)

CH2=CR1i,CCX5-R15-0(C0R150-)---€0NCH2=CR1i, CCX5-R15-0(C0R150-)---€0N

P I R15 o:P I R15 o:

R15-Of cor15〇^一^CONR16 P 其中,於所述通式(13-1)〜通式(13-16)中,R14 表示氫原子或曱基,R15表示碳數為1〜10之伸烷基,r16 表示碳數為1〜10之烴基。P表示0或1〜10之整數。 38 201235781 4i4j〇pir 所述聚胺基甲酸酯樹脂特別適宜的是使所述通式(il) 所表示之二異氰酸酯與選自所述通式(12_丨)〜通式(12_3) 所表示之含有羧酸基之二醇之至少!種的反應物,進一步 與所述通式⑴-υ〜通式⑴·16)之任—者所表示之於 分子中具有1個環氧基與至少丨個(甲基)丙雜的化合物 反應而所得之酸值為20 mgKOH/g〜120 mgK〇H/g之驗可 溶性光交聯性聚胺基甲酸酯樹脂。 該些高分子化合物可單獨使用,亦可併用2種以上。 …含有羧基之聚胺基甲酸酯與於分子中具有環氧基 及乙烯性不飽和基之化合物反應而所得之聚胺基甲酸酯樹 脂之合成法… 作為所述聚胺基曱酸酯樹脂之合成方法,可藉由如下 方式而合成:將上述二異氰酸酯化合物以及二醇化合物, 於非質子性溶劑中添加與各自之反應性對應之活性之公知 觸媒而進行加熱。所使用之二異氰酸酯以及二醇化合物之 莫耳比較佳的是0_8 : 1〜1_2 : 1,於聚合物末端殘存異氰 酸酯基之情形時,藉由醇類或胺類等進行處理而以最絡的 (C並不殘存異氰酸酯基之形態而合成。 —二異氰酸醋---· 所述通式(11)所表示之二異氰酸酯化合物並無特別 限制,可視需要而適宜選擇,例如可列舉日本專利特 2007-2030號公報之段落「〇〇21」中所記載之化合物等^ •…含有叛酸基之二醇…· 而且,所述通式(12-1)〜通式(12-3)所表示之具 39 201235781 41436pif 有叛基之二醇化合物並無特別限制,可視需要而適 擇’例如可列舉日本專利特開細_細 「〇〇47」中所記載之化合物等。 報之奴洛 -…不含羧酸基之低分子量二醇_·— 所述不含賴基之低分子量二醇並無特別限制,可視 需要而適宜選擇’例如可列舉日本專利特開2⑽7·雇號 公報之段落「0048」中所記載之化合物等。 &gt; 曰作為所_含紐基之二醇之共聚量,較佳的是低分 子量二醇中之95 m〇l%以下,更佳的是8〇 m〇1%以下特 佳的是50 mol%以下。所述共聚量若超過% m〇i%,則存 在不能獲得顯影性良好之胺基甲酸酯樹脂之現象。 作為所述(ii)含有羧基之聚胺基甲酸酯與於分子中 具有環氧基及乙稀性不飽和基之化合物反應而所得之聚胺 基甲酸酯樹脂之具體例,例如可列舉將日本專利特開 2007-2030號公報之段落「0314」〜「〇315」中所示之_^ 〜U13、U1〜U4、U6〜U11之聚合物中的作為含有環氧基 及乙稀性不飽和基之化合物的丙稀酸縮水甘油酯,替換為 甲基丙烯酸縮水甘油酯、丙烯酸_3,4_環氧環己基甲基酯(商 品名:Cycl〇merA400 (大赛璐化學工業公司製造))、甲基 丙婦酸-3,4-環氧環己基甲酯(商品名:Cyd〇merM4〇〇(大 赛璐化學工業公司製造))而所得之聚合物等。 •-酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂之 重量平均分子量-- 所述酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂 201235781 4143(&gt;pit* 之重星平均分子量並無特別限制,可視需要而適宜選擇, 較f的是2,〇00〜60,_,更佳的是3,_〜5〇,_,特佳 的是3,000〜30,000。若所述重量平均分子量不足2,〇〇〇, 則存在無法獲得硬化膜於高溫時之充分之低彈性模數之現 象;若超過60,〇〇〇,則存在塗佈適合性及顯影性惡化之現 象。另一方面,若重量平均分子量為2,〇〇〇〜6〇〇〇〇,則於 將所述感光性組成物用於感光性抗焊劑中之情形時,抗龜 裂性、耐熱性優異,利用鹼性顯影液之非影像部之顯影性 優異。 另外’所述重量平均分子量例如可使用高速GpC裝置 (東洋曹達工業股份有限公司製造之HLC_8〇2A),以〇 5 wt%之四氫呋喃(THF)溶液為試樣溶液,管柱使用1根 TSKgel HZM-M ’注入200 pL之試樣,藉由所述THF溶 液進行溶離’於25。(:下利用折射率檢測器或uv檢測器(檢 測波長為254 nm )而測定。 --酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂之 酸值 所述酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂 之酸值並無特別限制,可視需要而適宜選擇,較佳的是2〇 mgKOH/g〜120 mgKOH/g,更佳的是 30 mgKOH/g〜11〇 mgKOH/g,特佳的是 35 mgKOH/g〜1〇〇 mgK〇H/g。所述 酸值若不足20 mgKOH/g,則存在顯影性變得不充分之現 象’若超過120 mgKOH/g’則存在顯影速度過高而變得難 以控制顯影之現象。 41 201235781 41436pif 另外,所述酸值例如可依據JIS K〇〇7〇而進行測定。 其中,於樣品並不溶解之情形時,使用二噁烷或四 等作為溶劑。 -酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂之 乙烯性不飽和基當量-- 所述酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂 之乙稀性不飽和基當量並無制限制,可視f要而適宜選 擇,較佳的是0.05 mm〇l/g〜3 〇 mm〇1/g,更佳的是〇5 mmol/g 〜2.7 mmol/g,特佳的是 〇 75 mm〇1/g 〜2 * mmol/g。若所述乙烯性不飽和基當量不足〇 〇5 ,則 存在硬化膜之耐熱性差之現象;若超過3 〇 mm〇1/g,則存 在硬化膜之脆性提高之現象。 所述乙烯性不飽和基當量例如可藉由測定溴值而求 出。另外,所述溴值例如可依據JISK26〇5而測定。 -酸改質含有乙烯性不飽和基之環氧樹脂_ 所述酸改質含有乙烯性不飽和基之環氧樹脂並益特別 限制,可視需要而適宜選擇,例如可列舉:於日本^利第 28m59號公報中所記載之作為產物⑴與多元酸肝⑷ 之反應物的酸改質含有乙稀性不飽和基之環氧樹脂,所述 產物(I)是於1分子中具有至少2個以上環氧基的環氧化 合物(a)與於1分子中具有至少2個以上誠以及與環氧 基反應的除羥基以外之1個反應基的化合物(b)與含有乙 烯性不飽和基之單魏(e)之產物;作為產物(^)與多 元酸針(d)與含有乙稀性不飽和基之單異氰酸g旨⑷之 42 201235781 41436pif 產物的酸改質含有乙烯性不飽和基之環氧樹脂等,所述產 物(I)是於1分子中具有至少2個以上環氧基的環氧^合 物(a)與於1分子中具有至少2個以上羥基以及與環氧^ 反應的除羥基以外之1個反應基的化合物(b)與含有乙稀 性不飽和基之單羧酸(c)之產物。 所述酸改質含有乙烯性不飽和基之環氧樹脂可使用市 售品。所述酸改質含有乙烯性不飽和基之環氧樹脂之市售 品例如可列舉ZFR系列、CCR系列、pCr系列(曰本化 藥公司製造)等。 _含有乙細性不飽和基及叛基之丙稀酸樹脂_ 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂並無特 別限制,可視需要而適宜選擇,例如可列舉於由(甲基)丙 烯酸酯與含有乙烯性不飽和基且具有至少丨個酸基之化合 物而所得之共聚物之一部分酸基上,加成具有環氧基之(甲 基)丙浠酸酯而成的丙浠酸樹脂。 此種丙烯酸樹脂例如可列舉日本專利特開2009-86376 號公報中所記載之於由(曱基)丙烯酸酯與含有乙烯性不飽 和基且具有至少1個酸基之化合物而所得之共聚物之一部 分酸基上,加成(甲基)丙烯酸縮水甘油酯而成的改質共聚 物等。 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂可使用 市售品。所述含有乙烯性不飽和基及羧基之丙烯酸樹脂的 市售品例如可列舉Cyclomer P 200HM (大賽璐化學工業公 司製造)等。 43 201235781 41436pif -聚醯亞胺前驅物- 所述聚醯亞胺前驅物並無特別限制,可視需要而適宜 選擇’例如可列舉日本專利特開2010-6946號公報中所記 載之聚醯亞胺前驅物等。 --含有叛基之兩分子化合物之含量― 所述含有羧基之高分子化合物於所述感光性組成物中 之含直並無特別限制,可視需要而適宜選擇,相對於所述 感光性組成物之固形物而言,較佳的是5 wt%〜8〇 wt%, 更佳的疋20 wt°/〇〜75 wt°/〇,特佳的是3〇 wt%〜7〇 wt〇/〇。 若所述含量不足5 wt%,則存在無法良好地保持抗龜 裂性之現象;若超過80 wt%,則存在耐熱性降低之現象。 另-方面’若所述含量為所述特佳之範_,則於兼顧良 好之抗龜裂性與耐熱性之方面而言有利。 &lt;其他成分&gt; 所述其他成分例如可列舉熱塑性彈性體、熱硬化促進 劑、密接促進劑、熱聚合抑制劑、無機填充劑、著色劑、 有機溶劑、觸變性賦予劑、消泡劑、均化劑等。 -熱塑性彈性體(elastomer) -〇藉由於所述感光性組成物中添加所述熱塑性彈性體, 可職予所贼紐組成物耐熱性、錄性及強勤性。 所述熱塑性彈性體並無特別限制,可視需要而適宜選 t例如可列舉苯乙_彈性體、烯烴系彈性體、胺基甲 :彈性體、聚醋系彈性體、聚酿胺系彈性體、丙稀酸 糸無性體、聚魏系彈性體、樹膠改質之環氧樹脂等。該 44 201235781 41436ριί 二化°物可單獨使用1種,亦可併用2種以上。 般情:Ϊ熱包含硬=成分與軟鏈段成分,- 及_性有;^耐熱性及魏㈣幫助,後者對柔軟性 μ驚助。而且,所述彈性體之付暂廿卜&amp; 制,可視需H“ 丨狀&amp;質並無特別限 装宜選擇,例如於顯影步驟之生產效率性 專方面她的是具機可雜或膨雜。政料 所述苯乙婦系彈性體、烯烴系彈性體 彈性體、聚酿系彈性體、倾胺车_ 曰糸 麵、轉性體、丙稀酸系彈性 n_體、韻料環氧難例如可列舉 ^專利特開勒彻45號公報之段落「_7」〜「了〇〇歹f 中所記載者等。 」UU95」 --熱塑性彈性體之含量__ 所述熱塑性彈性體於所述感光性組成物中之含量並無 特別限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而言’較佳的是1 Wt%〜50 Wt%,更佳的是2 wt/〇 20 wt/o ’特佳的是3 wt%〜1〇 wt〇/。。若所述含量不 足1 Wt/°,則存在抗龜裂性差之現象;若超過50 wt°/〇,則 存在未曝光#並不由於顯景彡液而溶出之現象。另一方面, 右所述含罝為所述特佳之範圍内,則於提高顯影性或抗龜 裂性方面而言有利。 -熱硬化促進劑_ 所述熱硬化促進劑並無特別限制,可視需要而適宜選 擇,例如可列舉日本專利特開2007-2030號公報之段落 「0101」中所記载之化合物等。 45 201235781 41436pif -熱硬化促進劑之含量__ 所述熱硬化促進劑於所述感光性組成物中之含量並無 特另j限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而言,較佳的是〇 〇1 wt%〜2〇加%,更佳的是 〇·05 wt%〜15 wt%,特佳的是〇Λ wt%〜1〇 wt%。若所述 熱硬化促進劑之含量不足0.01 wt% ,則存在無法表現硬化 膜之強勃性之現象;若超過20 wt%,則存在感光性組成物 之保存穩定性惡化之現象。另一方面,若所述熱硬化促進 劑之含量為所述特佳之範圍内,則於提高感光性組成物之 保存穩定性及硬化膜物性之方面而言有利。 -密接促進劑- 所述密接促進劑並無特別限制,可視需要而適宜選 擇’例如可列舉日本專利特開2007-2030號公報之段落 「0108」中所記載之化合物等。 --密接促進劑之含量— 所述密接促進劑於所述感光性組成物中之含量並無特 別限制,可視需要而適宜選擇,相對於所述感光性組成物 之固形物而言’較佳的是0.01 Wt%〜20 wt%,更佳的是0.05 wt%〜15 wt% ’特佳的是〇.1 wt%〜10 wt%。若所述密接 促進劑之含量不足0.01 wt%,則存在無法表現出硬化膜之 強細性之現象,若超過20 wt%,則存在感光性組成物之保 存性惡化之現象。另一方面’若所述含量為所述特佳之範 圍内,則於提高感光性組成物之保存穩定性及硬化膜物性 之方面而言有利。 46 201235781 41436pit -熱χΚ合抑制劑-所述熱聚合_継無 擇,例如可列舉日本I 了視為要而適宜選 「0113」中所記载之化合物等。 4公報之段落 -無機填充劑- 所述無機填充劑並無特別 擇:_較佳的是含有平均粒徑_為⑼5=3而〇適宜選 -乳化雜子。藉由使所述無機填充劑含有二氧化 子,可使硬化獻耐難提高,且與含錢叙高1 合物之分散性變良好,可將感光性組成物n k 佳之範圍内,從而獲得較佳之塗佈適合性。 '‘、''軚 所述一氧化矽粒子中之二氧化矽並無特別限制,可視 需要而適宜選擇,例如可列舉氣相法二氧化矽、結晶性二 氧化矽、熔融二氧化矽等。 一 所述二氧化矽粒子之平均粒徑(d50)並無特別限制, 可視需要而適宜選擇’較佳的是0.05 μιη〜3·0 μηι,更佳的 是 0.1 μπ1 〜2.5 ’ 特佳的是 〇 1 gm〜2.〇 μη。 若所述二氧化矽粒子之平均粒徑(d50)不足〇.〇5 μιη , 則存在塗怖黏度變南之現象;若超過3.0 Μ·111,則存在無法 維持平滑性之現象。另一方面,若所述二氧化妙粒子之平 均粒徑(d50)為所述特佳之範圍内,則於塗佈黏度與硬化 膜之平清性或而ί熱性方面而言有利。 另外,所述'一氣化秒粒子之平均粒徑(d50 )是以累計 (累積)重量百分率而表示時之累計值50%之粒度而定義 47 201235781 41436pif 者,疋義為d50(D50)等,例如使用動態光散射光度計(商 品名DLS7000、大塚電子股份有限公司製造),將測定原 理设為動態光散射法,將尺寸分布解析手法設為累積法及/ 或分布圖法而進行測定。 -無機填充劑之含量― 所述無機填充劑子於所述感光性組成物中之含量並無 特別限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而吕’較佳的是【wt%〜6〇 ,更佳的是1〇R15-Of cor15〇^一^CONR16 P wherein, in the above formula (13-1) to formula (13-16), R14 represents a hydrogen atom or a fluorenyl group, and R15 represents a carbon number of 1 to 10 The alkyl group, r16 represents a hydrocarbon group having a carbon number of 1 to 10. P represents an integer of 0 or 1 to 10. 38 201235781 4i4j〇pir The polyurethane resin is particularly suitable for the diisocyanate represented by the formula (il) and the compound of the formula (12_丨) to (12_3) At least the diol containing a carboxylic acid group is indicated! The reactants of the species are further reacted with a compound having one epoxy group and at least one (meth)propene in the molecule, as represented by the formula (1)-υ~(1).16). The obtained acid value is from 20 mgKOH/g to 120 mgK〇H/g of the soluble photocrosslinkable polyurethane resin. These polymer compounds may be used singly or in combination of two or more. a method for synthesizing a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule... as the polyamino phthalate The method for synthesizing the resin can be carried out by heating the above-mentioned diisocyanate compound and diol compound by adding a known catalyst having an activity corresponding to each reactivity to an aprotic solvent. Preferably, the diisocyanate and the diol compound used are 0-8: 1 to 1_2: 1. When an isocyanate group remains at the polymer terminal, it is treated by an alcohol or an amine. (C is not synthesized in the form of an isocyanate group. - Diisocyanate---- The diisocyanate compound represented by the above formula (11) is not particularly limited, and may be appropriately selected as needed, and for example, Japan The compound described in the paragraph "〇〇21" of the Japanese Patent Publication No. 2007-2030, etc., contains a diol having a tickic acid group... Moreover, the above formula (12-1) to the formula (12-3) (a) The diol compound to be repelled is not particularly limited, and may be appropriately selected as needed. For example, the compound described in Japanese Patent Laid-Open No. 〇〇47 can be cited. Nuro-... Low molecular weight diol having no carboxylic acid group _· The low molecular weight diol having no lysine group is not particularly limited, and may be appropriately selected as needed. For example, Japanese Patent Laid-Open No. 2 (10) 7 As stated in the paragraph "0048" of the Gazette And the copolymerization amount of the diol containing the ketone is preferably 95 m〇l% or less in the low molecular weight diol, more preferably 8 〇m〇1% or less. 50 mol% or less. If the copolymerization amount exceeds % m〇i%, there is a phenomenon that a urethane resin having good developability cannot be obtained. As the (ii) carboxyl group-containing polyaminocarboxylic acid Specific examples of the polyurethane resin obtained by reacting an ester with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraph "0314" of JP-A-2007-2030. ~ ~ U U 」 」 U U U U U U U U U U U U U U U U U U U U U U U U U 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 It is glycidyl methacrylate, _3,4_epoxycyclohexylmethyl acrylate (trade name: Cycl〇mer A400 (manufactured by Daicel Chemical Industries, Ltd.)), methyl acetoacetate-3,4-epoxy a polymer obtained by using cyclohexylmethyl ester (trade name: Cyd〇mer M4 (manufactured by Daicel Chemical Industries, Ltd.)) • Acid-modified weight average molecular weight of a polyurethane resin containing an ethylenically unsaturated group - the acid modified polyurethane resin containing an ethylenically unsaturated group 201235781 4143 (&gt;pit * The average molecular weight of the heavy star is not particularly limited. It can be selected as needed. It is 2, 〇00~60, _, more preferably 3, _~5〇, _, especially 3,000~30,000. If the weight average molecular weight is less than 2, 〇〇〇, there is a phenomenon that a sufficient low modulus of elasticity of the cured film at a high temperature cannot be obtained; if it exceeds 60, 涂布, there is coating suitability and developability. The phenomenon of deterioration. On the other hand, when the weight average molecular weight is 2 and 〇〇〇6〇〇〇〇, when the photosensitive composition is used in a photosensitive solder resist, it is excellent in crack resistance and heat resistance. The non-image portion of the alkaline developer is excellent in developability. Further, the weight average molecular weight may be, for example, a high-speed GpC apparatus (HLC_8〇2A manufactured by Toyo Soda Industrial Co., Ltd.), a wt5 wt% tetrahydrofuran (THF) solution as a sample solution, and one TSKgel HZM column for the column. -M 'Injected into a 200 pL sample, dissolved by the THF solution '25. (: measured by a refractive index detector or a uv detector (detection wavelength of 254 nm). - Acid-modified acid value of a polyurethane resin containing an ethylenically unsaturated group. The acid modification contains The acid value of the ethylenically unsaturated group-containing polyamino phthalate resin is not particularly limited and may be appropriately selected as needed, and is preferably 2 〇 mgKOH/g to 120 mgKOH/g, more preferably 30 mgKOH/g. ~11〇mgKOH/g, particularly preferably 35 mgKOH/g to 1〇〇mgK〇H/g. If the acid value is less than 20 mgKOH/g, the developability may be insufficient. In the case of mgKOH/g', the development speed is too high and it becomes difficult to control development. 41 201235781 41436pif Further, the acid value can be measured, for example, in accordance with JIS K〇〇7〇, wherein the sample is not dissolved. In the case of using dioxane or tetracene as a solvent. - Acid-modified ethylenically unsaturated group equivalent of polyamino phthalate resin containing ethylenically unsaturated group - said acid modification contains ethylenically unsaturated group There is no restriction on the ethylenically unsaturated base equivalent of the polyamino phthalate resin. Preferably, it is preferably 0.05 mm 〇 l / g 〜 3 〇 mm 〇 1 / g, more preferably 〇 5 mmol / g ~ 2.7 mmol / g, particularly preferably 〇 75 mm 〇 1 / g ~ 2 * mmol/g. If the ethylenically unsaturated group equivalent is less than 〇〇5, the heat resistance of the cured film may be poor; if it exceeds 3 〇mm〇1/g, the brittleness of the cured film may be improved. The ethylenically unsaturated group equivalent can be determined, for example, by measuring the bromine number. The bromine number can be measured, for example, according to JIS K26〇5. - Acid-modified epoxy resin containing an ethylenically unsaturated group. The acid-modified epoxy resin containing an ethylenically unsaturated group is particularly limited, and may be appropriately selected as needed. For example, the reaction of the product (1) with the polyacid liver (4) described in Japanese Patent No. 28m59 can be cited. An acid-modified epoxy resin containing an ethylenically unsaturated group, the product (I) being an epoxy compound having at least two epoxy groups in one molecule (a) and having at least one molecule Two or more compounds (b) which contain one reactive group other than a hydroxyl group which reacts with an epoxy group and contain B The product of monounsole (e) of the unsaturated group; the acid modification of the product (^) and the polyacid needle (d) and the monoisocyanate containing the ethylenically unsaturated group (42) 42 201235781 41436pif product An epoxy resin containing an ethylenically unsaturated group, wherein the product (I) is an epoxy compound (a) having at least two epoxy groups in one molecule and at least two or more in one molecule. A product of a hydroxyl group and a compound (b) which reacts with an epoxy group and which has a reactive group other than a hydroxyl group, and a monocarboxylic acid (c) which contains an ethylenically unsaturated group. Commercially available products can be used as the epoxy resin containing an ethylenically unsaturated group. The commercial product of the acid-modified epoxy resin containing an ethylenically unsaturated group may, for example, be a ZFR series, a CCR series or a pCr series (manufactured by Sakamoto Chemical Co., Ltd.). _Acrylic acid resin containing an ethylenically unsaturated group and a thiol group _ The acrylic resin containing an ethylenically unsaturated group and a carboxyl group is not particularly limited, and may be appropriately selected as needed, for example, by (meth) a propionic acid obtained by adding a (meth)propionate having an epoxy group to a partial acid group of a copolymer obtained from an acrylate and a compound having an ethylenically unsaturated group and having at least an acid group Resin. Examples of such an acrylic resin include a copolymer obtained from a (fluorenyl) acrylate and a compound having an ethylenically unsaturated group and having at least one acid group, as described in JP-A-2009-86376. A modified copolymer obtained by adding glycidyl (meth)acrylate to a part of the acid group. A commercially available product can be used as the acrylic resin containing an ethylenically unsaturated group and a carboxyl group. The commercially available product of the acrylic resin containing an ethylenically unsaturated group and a carboxyl group is exemplified by Cyclomer P 200HM (manufactured by Daicel Chemical Industries, Ltd.). 43 201235781 41436pif - Polyimine precursor - The polyimine precursor is not particularly limited, and may be appropriately selected as needed. For example, the polyimine described in JP-A-2010-6946 can be cited. Precursors, etc. - content of a compound containing a thiol group - the content of the polymer compound containing a carboxyl group in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the photosensitive composition The solid content is preferably 5 wt% to 8 wt%, more preferably 20 wt ° / 〇 〜 75 wt ° / 〇, particularly preferably 3 〇 wt % 〜 7 〇 wt 〇 / 〇 . When the content is less than 5 wt%, the crack resistance may not be satisfactorily maintained; if it exceeds 80 wt%, the heat resistance may be lowered. On the other hand, if the content is the above-mentioned excellent method, it is advantageous in terms of both good crack resistance and heat resistance. &lt;Other components&gt; Examples of the other components include a thermoplastic elastomer, a thermosetting accelerator, an adhesion promoter, a thermal polymerization inhibitor, an inorganic filler, a colorant, an organic solvent, a thixotropic imparting agent, and an antifoaming agent. Homogenizer, etc. - A thermoplastic elastomer (elastomer) - By adding the thermoplastic elastomer to the photosensitive composition, it is possible to impart heat resistance, visibility and strength to the composition of the thief. The thermoplastic elastomer is not particularly limited, and may be, for example, a styrene-elastomer, an olefin-based elastomer, an amine-based elastomer, an elastomer-based elastomer, a polyamine-based elastomer, or a polyamine-based elastomer. A bismuth acrylate bismuth, a poly-wei elastomer, a resin modified epoxy resin, and the like. The 44 201235781 41436ριί dimorphizer may be used alone or in combination of two or more. The general situation: the heat contains hard = ingredients and soft segment components, - and _ sex; ^ heat resistance and Wei (four) help, the latter on the softness μ help. Moreover, the preparation of the elastomer is required to be "H", and the quality of the elastomer is not particularly limited. For example, in the production efficiency of the development step, she is machine-specific or The styrene-based elastomer, the olefin-based elastomer elastomer, the poly-branched elastomer, the tilting amine car 曰糸 、 、, transgenic body, acrylic acid elastic n_ body, rhyme For the epoxy, for example, the paragraph "_7" of the Patent Publication No. 45 of the Patent Publication No. 45 - "The one described in 〇〇歹f." UU95" - the content of the thermoplastic elastomer __ the thermoplastic elastomer The content in the photosensitive composition is not particularly limited. It is suitably selected as needed, and is preferably from 1 Wt% to 50 Wt%, more preferably relative to the solid content of the photosensitive composition. It is 2 wt/〇20 wt/o 'extra good is 3 wt%~1〇wt〇/. . If the content is less than 1 Wt/°, there is a phenomenon that the crack resistance is poor; if it exceeds 50 wt °/〇, there is a phenomenon that the unexposed # is not dissolved by the sputum sputum. On the other hand, it is advantageous in terms of improving developability or crack resistance in the case where the ruthenium containing the right side is within the above-mentioned range. - The thermosetting accelerator _ The thermosetting accelerator is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a compound described in paragraph "0101" of JP-A-2007-2030. 45 201235781 41436pif - content of thermosetting accelerator __ The content of the thermosetting accelerator in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the photosensitive composition In the case of a solid, it is preferably wt1 wt% 〜2〇%, more preferably 〇·05 wt% 〜15 wt%, and particularly preferably 〇Λ wt% 〜1 〇 wt%. When the content of the thermosetting accelerator is less than 0.01% by weight, the phenomenon of strong sturdiness of the cured film may not be exhibited. When it exceeds 20% by weight, the storage stability of the photosensitive composition may be deteriorated. On the other hand, when the content of the thermosetting accelerator is within the above-described range, it is advantageous in terms of improving the storage stability of the photosensitive composition and the physical properties of the cured film. - the adhesion promoter - the adhesion promoter is not particularly limited, and may be appropriately selected as needed. For example, a compound described in paragraph "0108" of JP-A-2007-2030 may be mentioned. The content of the adhesion promoter - the content of the adhesion promoter in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, and is preferably 'relative to the solid matter of the photosensitive composition. It is 0.01 Wt%~20 wt%, more preferably 0.05 wt%~15 wt% 'extra good is 〇.1 wt%~10 wt%. When the content of the adhesion promoter is less than 0.01% by weight, the film may not exhibit the fineness of the cured film. When it exceeds 20% by weight, the storage property of the photosensitive composition may deteriorate. On the other hand, when the content is within the above-described range, it is advantageous in terms of improving the storage stability of the photosensitive composition and the physical properties of the cured film. For example, the compound described in "0113" is preferably selected from Japan I. Paragraph 4 of the publication - Inorganic filler - The inorganic filler is not particularly preferred: _ preferably having an average particle diameter of (9) 5 = 3 and optionally emulsified hetero. When the inorganic filler contains a dioxygen group, the hardening resistance can be improved, and the dispersibility with the money-containing high-content compound becomes good, and the photosensitive composition nk can be better in the range. Good coating suitability. '','' The cerium oxide in the cerium oxide particles is not particularly limited and may be appropriately selected as needed, and examples thereof include gas phase cerium oxide, crystalline cerium oxide, and molten cerium oxide. The average particle diameter (d50) of the cerium oxide particles is not particularly limited, and may be appropriately selected as needed. Preferably, 0.05 μm to 3·0 μηι, more preferably 0.1 μπ1 to 2.5 ' is particularly preferable. 〇1 gm~2.〇μη. If the average particle diameter (d50) of the cerium oxide particles is less than 〇.5 μιη, the coating viscosity becomes south; if it exceeds 3.0 Μ·111, the smoothness cannot be maintained. On the other hand, if the average particle diameter (d50) of the oxidized particles is within the above-mentioned range, it is advantageous in terms of coating viscosity and flatness of the cured film or heat. Further, the average particle diameter (d50) of the 'one gasification second particle is defined by the particle size of 50% of the cumulative value expressed as a cumulative (accumulated) weight percentage, and is defined as 47 201235781 41436pif, which is d50 (D50), etc. For example, a dynamic light scattering photometer (trade name: DLS7000, manufactured by Otsuka Electronics Co., Ltd.) is used, and the measurement principle is a dynamic light scattering method, and the size distribution analysis method is performed by an accumulation method and/or a profile method. - the content of the inorganic filler - the content of the inorganic filler in the photosensitive composition is not particularly limited 'optional as needed, and is preferably relative to the solid matter of the photosensitive composition It is [wt%~6〇, more preferably 1〇

Wt%〜60 Wt%,特佳的是15 wt%〜60 wt%。若所述無機填 充知'1之含里不足1 wt% ’則存在耐熱性差之現象;若超過 6〇 ’則存在圖案形成性差之現象。另一方面,若所述 含量為所述特佳之範_,則於提高圖案形成性與耐熱性 方面而言有利。 -著色劑- ,述著色劑並無特別_,可視需要而適宜選擇,, 使用者色彥貞料或自公知之轉中適宜選擇之染料。 斤述著色顏料並無特別限制,可視需要而適宜選擇 舉日本專利特開2_2_號公報之段落「刪 中所§己載之化合物等。 制,劑於所述感光性組成物中之含量並無細 制,可視需要而適宜選擇。 -有機溶劑- 所述有機溶劑並無特別限制,可視需要而適 , 例如可列舉日本專 ^擇 寻利特開平11-240930號公報之段兹 48 201235781 41430pit 「〇〇43」中所記載之化合物、曰本專利特開2007-2030號 公報之段落「0121」中所記載之化合物等。 --有機溶劑之含量— 所述有機溶劑於所述感光性組成物中之含量並無特別 限制,可視需要而適宜選擇,相對於所述感光性組成物之 固形物而έ,較佳的是1 wt〇/0〜8〇 wt%,更佳的是2 wt% 〜70 wt%,特佳的是3 wt%〜6〇 wt%。若所述有機溶劑之 含里不足1 wt%,則存在組成物之黏度高且塗膜之形成變 困難之現象;若超過80 wt〇/〇 ’則所期望之膜厚之控制變困 難。另一方面,若所述有機溶劑之含量為所述特佳之範圍 内,則於塗膜製造適合性方面而言有利。 (感光性抗焊劑組成物) 本發明之感光性抗焊劑組成物含有所述本發明之感光 性組成物。 藉由本發明之感紐抗㈣組成物,可獲得絕緣性、 圖案側面之平滑性、耐鑛敷性優異之抗焊劑。 (感光性抗焊劑膜) 本發明之感光性抗焊劑組成物亦可藉由塗佈於形成有 導體配線之基板上加以乾燥而作為液狀光阻使用,對於 造感光性抗焊劑膜特別有用。 、 本發明之感光性抗焊劑膜至少包含 包含^膜’進—步視需要包含塾(eush=層 阻氧層、(以下有時簡稱為「pc層」)等其他層。 所述感光!·生抗焊劑膜之形態並無特別限制,可視需要 49 201235781 41436pif 而適宜選擇’例如可列舉:於所述支撐體上順次具有所述 感光層、所述保護膜7 A之形態,於所述支撐體上順 次具有所述pC層、所述感光性層、所述保護膜之形態, 於所述支撐體上順次具有所述墊層、所述PC層、所述感 光層、所述保護膜之形態等。另外,所述感光層可為單層 亦可為多層。 &lt;支撐體&gt; 所述支撐體並無特別限制,可視需要而適宜選擇,較 佳的是可剝離所述感光層且光之透過性良好,更佳的是表 面之平滑性進一步良好。 所述支撐體並無特別限制,可視需要而適宜選擇,例 如可列舉透明之合成樹脂製膜。 所述透明之合成樹脂製膜並無特別限制,可視需要而 適宜選擇,例如可列舉聚對笨m、聚萘 =二醋、聚丙烯、聚乙稀、三乙酸纖維素、二乙酸纖維素、 =(甲基)丙稀酸烧絲、聚(甲基)丙烯㈣共聚物聚氯乙 乙Γ醇、聚碳酸醋、聚苯乙稀、賽路凡、聚偏二氣 醯胺2醯亞胺、氣乙烯-乙酸乙烯醋共聚 、聚四H乙婦、聚二氟乙埽、纖維素系膜、尼龍膜 種塑膠膜等。該些支频可單獨錢 用^ 以上。於該些支撐體中,所诚、…人丌J併用2種 是聚對苯二甲酸乙二§旨。相之合成繼製膜較佳的 所述支=並無特別限 如可列舉日本專利特開平4、2 I且、擇例 2〇8940唬公報、日本專利特開 50 201235781 平5_8〇5〇3號公報'日本專利特開平⑷咖號公 本專利特開平5-72724號公報等中所記載之支撐 所述支賴之厚度並祕職制,可視f ^適 擇,較佳的是4 μιη〜300 _,更佳的是5卿〜⑺、 ^述支频之形錢無特·制,可視需要而適宜選 擇,較佳的是長條狀。所述長條狀支撐體之 限制,可視需要而適宜選擇,較佳狀lGm〜2G,_t。 &lt;感光層&gt; =述感光層可藉由本發明之所述感紐抗焊劑 而幵〉成。 縣κ I ^感光層於所述感紐抗焊舰中所設之位置並益 ^別限制’可視需要而適宜選擇,通常積層於所述支揮體 ,述感光層之厚度並無制限制,可視需要 擇,較佳的是3_〜—更佳的是5啤〜7一。 所边感光層之形成方法可列舉如下之方法:使本發明 性抗焊劑組成物溶解、乳化或分散於水或溶劑 所、f 焊劑組成物溶液,將該溶液直接塗佈於 所述支撐體上,使其乾燥而進行積層。 =述感光性抗_組成物溶液之溶劑並無特別限制, :斤品要而適且選擇,例如可列舉醇類、酉同類、醋類、芳 2族烴,夕代煙類、_、二甲基甲_、二甲基乙酸 妝一曱基亞颯、環丁石風等。 所述醇類例如可列舉甲醇、乙醇、正丙醇、異丙醇、 51 201235781 41436pif 正丁醇、弟一,-r ‘匕時寻 所述嗣類例如可列舉丙@同、丁鋼、甲基異丁基嗣 己酮、二異丁酮等。 所述醋類例如可列舉乙酸乙醋、乙酸丁酷、乙酸正戊 酿、硫酸曱醋、丙酸乙酿、鄰笨二甲酸二曱 酯、乙酸曱氧基丙酯等。 所述芳香族烴類例如可列舉曱苯、二甲笨、苯、乙美 笨等。 土 烴類,可列舉四氣化碳、三氣乙烯、氣仿、 ,,1-一氯乙燒、一乳曱烧、單氣苯等。 所述醚類例如可列舉四氣⑽、: 轉、乙二醇單乙㈣4甲氧基_2•丙醇等。乙一知早甲 該些,合物可單獨使们種,亦可_ 2種以上。 所述感光性抗焊劑組成物溶液 :制’:視需要而適宜選擇,較佳的是==別 更佳的是 15 wt°/〇〜50 wt%。 t/〇 ’ 所述塗佈之方法並無特別限制, 擇,例如可列舉使用旋塗機、狹縫旋 適宜選 所述乾烤之條杜廿益Ϊ佈所述支撑體上之方法。 擇,雖然因各成分、溶劑之種類 二I要而適宜選 常情況下是於听〜酿之溫 ^而異’但通 右。 卜進仃30秒〜15分鐘左 &lt;保護膜&gt; 52 201235781 41436pif 所述感:層有防止所述感光層之污垢或損傷而保護 特別ρρ Γ丨保°蔓膜於所述感光性抗焊劑臈中所設之位置並無 光層二1,可視需要而適宜選擇’通常情況下設於所述感 ^保護膜例如可列舉於所述支撐體中所使用者,聚 翁$成-層麗有聚乙稀、聚丙烯之紙、聚烯烴薄片、聚四 齓乙烯溥片等。 =保護膜之厚度並無特別限制,可視需要選 擇=佳的是5卿〜100μιη,更佳的是8μιη〜30μϊη。 所述去所述?護膜之情形時’較佳的是所述感光層及 9接接著力Α與所述感光層絲護膜之接著力Β 疋接者力Α&gt;接著力Β之關係。 々可所f支撐體與所祕翻之組合(支撐體/保護膜)例 酉:二歹’ ' 聚對5二甲酸乙二酉旨/聚丙婦、聚對苯二甲酸乙二 :甲上歸、聚氣乙烯胸凡、聚醯亞胺,聚_、聚對苯 一甲酸乙二酯/聚對苯二甲酸乙二酯等。 處理而Ϊ、=對支撐體及保護膜之至少任-者進行表面 Γ 所述之接著力之關係。作為所述支擇體 面处理,可為了提高與所述感光詹之接著 =哪下塗層之塗設、電晕放電處理= 高;波照射處理、輝光放電照射處理、活 注電水知射處理、雷射光線照射處理等。 而且’所述支撐體與所述保護膜之靜摩擦係數較佳的 53 201235781 41436pif 二0更佳的疋G 5〜1,2。^所述靜摩擦係數不足 :ΓΐΓ過滑而於製錢狀之情形時產生捲繞偏移 =象;右超過Μ ’則存在變得難轉為良好之報狀之 現象。 所,感光性抗焊劑膜之保管方法並無特別限制,可視 而要而適宜選擇,例如難的是捲繞於 以長條狀而捲為輥狀而進行保管。 之捲心上, 所述長條狀之感光性抗焊劑膜之長 例如可自ig m,_ m之範圍中適宜選擇。m可 為:便於使用者錢而進行切割加工,將 之軌圍之絲鮮缝狀。糾,於崎科,較佳 讀體成為最外側之方式進行捲繞。而且,亦可Ϊ 所述親狀感光性膜切割為薄片狀。於保管時, 將 防^邊緣融合之觀財慮,較佳的是於端面設置物:蔓胜 之間隔物、放入有乾燥劑之間隔物),而且: 的疋包裝亦使用透濕性低之原材料。 权佳 光声保賴,亦可為了調整所述保護膜與所述减 先層之接者性而進行表面處理。所述表面處如^ ,保護膜之表面形成包含聚有_氧烧 Γ煙:聚乙稀醇等聚合物之下塗層。作為 =由於賴《合物之塗佈液塗佈_ ^ 表面之後,於3〇。(:〜i贼(特別是5()ΐ〜 $ 1分鐘〜30分鐘之乾燥而形成。 進行 而且’除了所述感光層、所述支撐體、所述保護膜以 54 201235781 41436pif 外,亦可包含塾層、阻氧層(pc層)、剝離層、接著層、 光吸收層、表面保護層等層。 ^所述墊層是於常溫下無黏性,於真空及加熱條件下進 行積層之情形時炫融、流動之層。 所述PC &gt;1通常是以聚乙稀醇為主成分而形成之 μιη左右之覆膜。 所述感光性抗焊劑膜具有表面之黏性小,層壓性及使 用性良好,絕緣性、耐鍍敷性、圖案側面之平滑性優異之 積層有感光性抗焊劑組成物之感光層。因此,可廣泛用作 印刷線路板、彩色遽光片或柱材、肋材、間隔物、隔板等 顯示器用部件’全像片、微機器、打樣機等永久圖案形成 用途,且可^宜地驗本發明之永久随及其軸方法中。 特另j疋本發明之感光性抗焊劑膜,由於該膜之厚度均 一’因此於形成永久圖案時,可更精細地積層於基材上。 (永久圖案及永久圖案形成方法) 本心明之永久圖案可藉由本發明之永久圖案形 而獲得。 作為所述永久圖案’較佳的是保護膜、層間絕緣膜及 4几焊圖案之至少任一者。 所述永久圖案為抗焊圖案之情形時,22〇t下之動彈性 係數較佳的是20 MPa〜則MPa,更麵是25顺〜8〇 MPa,特㈣是3G MPa〜5Q廳。若軸雜係數不足 20 MPa ’則存在耐熱性差之現象;若超過咖廳 在耐熱衝擊性差,於硬化膜上產生龜裂之現象。 55 201235781 41436pif 本發明之永久圖案形成方法之 感光性抗_組成物塗佈於基材表减讀本發明之 感光層後,進彳博光(料倾)、_彡’ 而形成 熱及免是於加 於基:Ϊ表3本進,光(曝光步驟 發明二==圖案形成方法之說明亦使本 &lt;基材&gt; 所述基材並無特別限制,可視需要而適宜選擇,例如 可列舉覆銅積層板等印刷線路板形成用基板、鈉玻璃板等 玻璃板、合成樹脂性之膜、紙、金屬板等。 該些基材中,於可實現半導體等於多層配線基板或增 層配線基板等上之高密度封裝化之方面而言,較佳的是已 形成有配線之印刷線路板形成用基板。 所述基材可形成如下之積層體而使用:作為所述第i 態樣之於該基材上形成所述感光性抗焊劑組成物之感光層 的積層體’或者作為所述第2態樣之以所述感光性抗焊劑 膜中之感光層重疊之方式進行積層而成之積層體。亦即, 可對所述積層體中之所述感光層進行後述之曝光,藉此使 曝光之區域硬化,然後藉由後述之顯影而形成永久圖案。 &lt;積層體&gt; 所述第1態樣之積層體之形成方法並無特別限制,可 視需要而適宜選擇,較佳的是於所述基材上積層塗佈所述 56 201235781 41436pit 感光性抗焊劑組成物並加以乾燥而形成之感光層。 所述塗佈及乾燥之方法並無特別限制,可^需要而適 宜選擇,例如可列舉使用旋塗機、狹縫旋塗機、輥塗機、 模塗佈機、簾幕式塗佈機等而塗佈所述感光性抗焊劑組成 物溶液之方法。 所述第2態樣之積層體之形成方法並無特別限制,可 視需要而適宜選擇,較佳的是—面對所述感光性膜進行加 熱及加壓之至少任一者一面將其積層於所述基材上之方 法。另外,於所述感光性抗焊劑膜具有所述保護膜之情形 時,較佳的是將該保護膜剝離,以所述感光層重疊於所述 基材上之方式而進行積層。 所述加熱之溫度並無特別限制,可視需要而適宜選 擇,較佳的是70〇C〜13(TC,更佳的是8〇〇c〜u〇t:。 所述加壓之壓力並無特別限制,可視需要而適宜選 擇’較佳的是0.01 MPa〜1.0 MPa,更佳的是0.05 MPa〜 1.0 MPa。 進行所述加熱及加壓之至少任一者的裝置並盔 =,可視需要而適宜選擇,例如可列舉熱壓機、熱== 八(例如 Taisei Laminator Co·, Ltd.製造之 VP-II)、真空貼 。機(例如名機製作所股份有限公司製造之MVLp5〇 作為較佳之裝置。 &lt;曝光步驟&gt; 所述曝光步驟是對所述感光層進行圖案曝光之步驟。 作為所述曝光之對象,只要是具有感光層之材料則並 57 201235781 41436pif 無特別限制,可視需要而適宜選擇,較佳的是對在基材上 形成有所述感光性抗烊劑組成物或所述感光性抗焊劑膜之 所述積層體進行。 所述對積層體之曝光並無特別限制,可視需要而適宜 選擇,例如可介隔所述支撐體、墊層及PC層而對所述感 光層進行曝光;亦可將所述支撐體剝離後,介隔所述墊層 及pc層而對所述感光層進行曝光;亦可將所述支撐體及 墊層剥離後,介隔所述PC層而對所述感光層進行曝光; 亦可將所述支撐體、墊層及PC層剝離之後,對所述感光 層進行曝光。 所述曝光並無特別限制,可視需要而適宜選擇,可列 舉數位曝光、模擬曝光等。該些中較佳的是數位曝光。 所述數位曝光並無特別限制,可視需要而適宜選擇, =如較佳的是基於所形成之圖_成信息而生成控制訊 〜使用與s玄控制訊號對應地調變之光而進行。 所述數位曝光之機構並無特別限制,可視需要而適宜 =擇,例如可列舉照射光之光照射機#、基於所形成之圖 =息而使自該光照射機構所照射之光調變的光調變機構 «光調變機構》 ’則並無 η個描素 作為所述光調變機構,只要可對光進行調變 特別限制,可視需要而適宜選擇,較佳的是具有 部之光調變機構。 八 所述具有η個描素部之光調變機構並無特別限制,可 58 201235781 414JOplt 視需要而適宜選擇’較佳的是空間光調變元件。 所述空間光調變元件並無特別限制,可視需要而適宜 選擇’例如可列舉數位微鏡裝置(Digital Micro-mirror Device ’ DMD)、微機電系統(Micr〇 Electr〇 Mechanical Systems,MEMS )類之空間光調變元件(SLM; Spedal LightWt%~60 Wt%, particularly preferably 15 wt%~60 wt%. If the content of the inorganic filler is less than 1 wt%, the heat resistance is poor, and if it exceeds 6 Å, the pattern formation property is poor. On the other hand, if the content is the above-mentioned excellent method, it is advantageous in terms of improving pattern formability and heat resistance. - Coloring agent - The coloring agent is not particularly _, and may be appropriately selected as needed, and may be selected from a user's color or a suitable dye from a known transfer. The coloring pigment is not particularly limited, and may be selected as appropriate in the paragraph of the Japanese Patent Laid-Open Publication No. 2-2_, the contents of the compound contained in the photosensitive composition. The organic solvent is not particularly limited, and may be appropriately selected as needed. For example, the Japanese Patent Application No. Hei 11-240930 may be cited as a paragraph 48 201235781 41430pit. The compound described in "〇〇43", the compound described in the paragraph "0121" of JP-A-2007-2030, and the like. - content of the organic solvent - the content of the organic solvent in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, and is preferably relative to the solid matter of the photosensitive composition. 1 wt 〇 / 0 〜 8 〇 wt%, more preferably 2 wt% ~ 70 wt%, particularly preferably 3 wt% ~ 6 〇 wt%. When the content of the organic solvent is less than 1% by weight, the viscosity of the composition is high and the formation of the coating film becomes difficult. If it exceeds 80 wt〇/〇, the control of the desired film thickness becomes difficult. On the other hand, when the content of the organic solvent is within the above-described range, it is advantageous in terms of suitability for coating film production. (Photosensitive solder resist composition) The photosensitive solder resist composition of the present invention contains the photosensitive composition of the present invention. According to the sensitizing (four) composition of the present invention, it is possible to obtain a solder resist having excellent insulating properties, smoothness of the side of the pattern, and excellent mineral resistance. (Photosensitive solder resist film) The photosensitive solder resist composition of the present invention can be used as a liquid photoresist by being applied to a substrate on which a conductor wiring is formed and dried, and is particularly useful for producing a photosensitive resist film. The photosensitive solder resist film of the present invention includes at least another layer including a ruthenium (eush = layer oxygen barrier layer (hereinafter sometimes abbreviated as "pc layer") as needed. The form of the raw solder resist film is not particularly limited, and may be appropriately selected as needed in the case of 49 201235781 41436pif. For example, the photosensitive layer and the protective film 7 A may be sequentially provided on the support. Forming the form of the pC layer, the photosensitive layer, and the protective film in this order, and sequentially having the underlayer, the PC layer, the photosensitive layer, and the protective film on the support In addition, the photosensitive layer may be a single layer or a plurality of layers. <Support> The support is not particularly limited, and may be appropriately selected as needed, and it is preferred that the photosensitive layer be peeled off and The light transmittance is further improved, and the smoothness of the surface is further preferably further improved. The support is not particularly limited and may be appropriately selected as needed, and examples thereof include a transparent synthetic resin film. No special The restriction may be appropriately selected as needed, and examples thereof include poly-p-m, poly-naphthalene=diacetate, polypropylene, polyethylene, cellulose triacetate, cellulose diacetate, and =(meth)acrylic acid. Poly(meth)propene (tetra) copolymer polyvinyl chloride, polycarbonate, polystyrene, sirfan, polydimethylamine 2 quinone imine, ethylene-vinyl acetate copolymer, polytetra H female, polydifluoroacetic acid, cellulose film, nylon film plastic film, etc. These frequency can be used alone for more than ^. In these supports, the honest, ... people 丌 J and use 2 kinds It is a polyethylene terephthalate §. The synthesis of the phase is preferably the same as that of the film formation, and is not particularly limited, as described in Japanese Patent Laid-Open No. 4, No. 2, and No. 2, 8940, and Japan. Japanese Patent Laid-Open No. 50 201235781, No. 5_8〇5〇3, 'Japanese Patent Laid-Open (4), No. 5-72724, and the like, which support the thickness of the support and the secret system, can be seen as f ^ Suitable choice, preferably 4 μιη~300 _, more preferably 5 Qing ~ (7), ^ said the frequency of the shape of the money without special system, suitable for the needs Preferably, the strip-shaped support is limited, and may be appropriately selected as needed, preferably in the form of 1Gm~2G, _t. &lt;Photosensitive layer&gt; = The photosensitive layer can be used by the present invention The sensible sensitizer is 幵 成 成 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县The thickness of the photosensitive layer is not limited, and may be selected as desired, preferably 3_~-more preferably 5 beer-7. The method for forming the photosensitive layer may be as follows: the composition of the present invention is made of a solder resist The solution is dissolved, emulsified or dispersed in water or a solvent, f flux composition solution, and the solution is directly applied onto the support, dried, and laminated. The solvent of the photosensitive anti-composition solution is not particularly limited, and the product may be selected and selected, for example, alcohols, terpenoids, vinegars, aromatic 2 hydrocarbons, kiyoshi, _, and Methyl ketone, dimethylacetic acid makeup, 曱 飒 飒 飒, ring stone wind and so on. Examples of the alcohols include methanol, ethanol, n-propanol, isopropanol, 51 201235781 41436pif n-butanol, and di-anthracene. Isobutyl ketone, diisobutyl ketone, and the like. Examples of the vinegar include ethyl acetate, butyl acetate, acetic acid, sulphuric acid vinegar, ethyl propionate, dinonyl phthalate, and decyl acetate. Examples of the aromatic hydrocarbons include anthracene, dimethyl, benzene, and acetaminophen. Examples of the hydrocarbons include four gasified carbons, three gas ethylene, gas imitation, , 1-chloroethane, a decocted sulphur, and a single benzene. Examples of the ethers include tetragas (10), trans, ethylene glycol monoethyl(tetra)tetramethoxy-2-propanol, and the like. B. I know that the early ones, the compounds can be used alone, or _ 2 or more. The photosensitive solder resist composition solution:: is suitably selected as needed, preferably == not more preferably 15 wt ° / 〇 50 50% by weight. The method of coating is not particularly limited. For example, a method of using a spin coater or a slit to suitably select the support of the dry-baked strip of rhododendron is used. Choice, although it is appropriate to choose according to the type of each component and solvent, it is usually the case that it is heard and the temperature is different.卜进仃30 seconds~15 minutes left &lt;protective film&gt; 52 201235781 41436pif The sensation: the layer has protection against the dirt or damage of the photosensitive layer to protect the photosensitive film. There is no light layer 2 in the position set in the crucible, and it is suitable to be selected as needed. 'In general, the protective film is provided in the support body, for example, the user can be listed in the support body. There are polyethylene, polypropylene paper, polyolefin sheet, polytetrafluoroethylene sheet and so on. The thickness of the protective film is not particularly limited, and may be selected from the range of 5 to 100 μm, and more preferably 8 μm to 30 μϊ. What to do? In the case of a film, it is preferable that the photosensitive layer and the bonding force of the photosensitive layer and the photosensitive layer of the photosensitive layer are in contact with each other. The combination of support and secrets (support/protective film): 歹 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' , gas-gathered vinyl chestnut, polyimine, poly-, polyethylene terephthalate / polyethylene terephthalate. The treatment is carried out, and the relationship between the adhesion force and the surface of the support body and the protective film is performed. As the selective decent surface treatment, in order to improve the coating with the sensitization = which coating is applied, the corona discharge treatment = high; the wave irradiation treatment, the glow discharge treatment, the live electric water treatment , laser light treatment, etc. Moreover, the static friction coefficient of the support body and the protective film is preferably 53 201235781 41436pif 20 疋 G 5~1, 2. ^ The static friction coefficient is insufficient: when the slip is too slippery, the winding offset is generated in the case of the money-making shape = the image; if the right exceeds Μ ’, there is a phenomenon that it becomes difficult to turn into a good report. The method of storing the photosensitive solder resist film is not particularly limited, and may be appropriately selected depending on, for example, it is difficult to wind it in a long shape and roll it into a roll shape for storage. The length of the long-length photosensitive solder resist film can be suitably selected from the range of ig m, _ m, for example. m can be: easy to cut for the user's money, and the wire around the rail is fresh. Correction, Yusaki, better reading the body into the outermost way to wind. Further, the affinity photoreceptor film may be cut into a sheet shape. In the case of storage, it is preferable to combine the protection of the edge with the edge, and it is preferable to use the end face setting: the spacer of the vine, the spacer with the desiccant, and the 疋 package of the 疋 package is also low in moisture permeability. Raw materials. Quanjia Guangshengbao can also perform surface treatment in order to adjust the interface between the protective film and the reducing layer. The surface of the protective film is formed such that the surface of the protective film is coated with a polymer having a poly-oxygenated smog: polyethylene glycol. As = due to the coating of the coating of the compound _ ^ after the surface, at 3 〇. (: ~ i thief (especially 5 () ΐ ~ $ 1 minute ~ 30 minutes of drying to form. Perform and 'except the photosensitive layer, the support, the protective film with 54 201235781 41436pif, can also The layer includes a ruthenium layer, an oxygen barrier layer (pc layer), a release layer, an adhesive layer, a light absorbing layer, a surface protective layer, etc. ^ The underlayer is non-viscous at normal temperature, and is laminated under vacuum and heating conditions. In the case of a layer that melts and flows, the PC &gt;1 is usually a film of about μηη formed mainly of polyethylene glycol. The photosensitive solder resist film has a small surface stickiness and is laminated. It is excellent in properties and usability, and is excellent in insulation, plating resistance, and smoothness of the side of the pattern. It is a photosensitive layer of a photosensitive solder resist composition. Therefore, it can be widely used as a printed wiring board, a color light-emitting sheet or a column. , such as ribs, spacers, partitions and other components for display, such as full-image film, micro-machine, proofing machine, etc., and can be used to test the permanent method of the present invention. The photosensitive solder resist film of the present invention is thick due to the film Uniformly, therefore, when a permanent pattern is formed, it can be more finely laminated on the substrate. (Permanent Pattern and Permanent Pattern Forming Method) The permanent pattern of the present invention can be obtained by the permanent pattern shape of the present invention. Preferably, at least one of the protective film, the interlayer insulating film, and the four solder patterns. When the permanent pattern is a solder resist pattern, the dynamic elastic coefficient at 22 〇t is preferably 20 MPa to MPa. The face is 25 s ~ 8 MPa MPa, the special (four) is 3G MPa ~ 5Q hall. If the shaft coefficient is less than 20 MPa 'there is poor heat resistance; if the heat resistance is worse than the coffee shop, the turtle is produced on the hardened film. The phenomenon of cracking. 55 201235781 41436pif The photosensitive anti-composition of the permanent pattern forming method of the present invention is applied to the substrate table to reduce the photosensitive layer of the present invention, and then the heat is formed by the sputum (pour), _彡' It is added to the base: Ϊ Table 3, the light (exposure step invention 2 == the description of the pattern forming method also makes the &lt;substrate&gt; the substrate is not particularly limited, and may be appropriately selected as needed. For example, a copper clad product can be cited. a substrate for forming a printed wiring board such as a laminate, a glass plate such as a soda glass plate, a synthetic resin film, paper, a metal plate, etc. Among the substrates, a semiconductor can be equal to a multilayer wiring substrate or a build-up wiring substrate. In terms of high-density encapsulation, a substrate for forming a printed wiring board having wiring is preferably used. The substrate may be formed by forming a laminate as the i-th aspect to the base. A laminate in which a photosensitive layer of the photosensitive resist composition is formed on the material or a laminate in which the photosensitive layer in the photosensitive resist film is laminated as the second aspect. That is, the photosensitive layer in the laminate may be exposed to light as described later, whereby the exposed region is cured, and then a permanent pattern is formed by development as will be described later. &lt;Laminate&gt; The method for forming the laminate of the first aspect is not particularly limited, and may be appropriately selected as needed, and it is preferred to apply the coating on the substrate at the surface of the coating. 56 201235781 41436pit Photosensitive The solder composition is formed and dried to form a photosensitive layer. The method of coating and drying is not particularly limited, and may be appropriately selected as needed, and examples thereof include a spin coater, a slit spin coater, a roll coater, a die coater, a curtain coater, and the like. And a method of applying the photosensitive resist composition solution. The method for forming the laminate of the second aspect is not particularly limited, and may be appropriately selected as needed. Preferably, at least one of heating and pressurizing the photosensitive film is laminated on the photosensitive film. a method on the substrate. Further, in the case where the photosensitive resist film has the protective film, it is preferred that the protective film is peeled off and laminated so that the photosensitive layer is superposed on the substrate. The temperature of the heating is not particularly limited and may be appropriately selected as needed. Preferably, it is 70 〇C to 13 (TC, more preferably 8 〇〇c~u〇t: the pressure of the pressurization is not It is particularly limited, and may be appropriately selected as needed. Preferably, it is 0.01 MPa to 1.0 MPa, more preferably 0.05 MPa to 1.0 MPa. The apparatus for performing at least either of the heating and pressurization and the helmet = if necessary Suitable examples include, for example, a hot press, heat == eight (for example, VP-II manufactured by Taisei Laminator Co., Ltd.), and a vacuum paste machine (for example, MVLp5 manufactured by Nimko Seisakusho Co., Ltd. as a preferred device). &lt;Exposure Step&gt; The exposure step is a step of pattern exposure of the photosensitive layer. As the object of the exposure, as long as it is a material having a photosensitive layer, 57 201235781 41436pif is not particularly limited, and may be appropriately selected as needed Preferably, it is preferably carried out on the laminate in which the photosensitive anti-caries composition or the photosensitive resist film is formed on a substrate. The exposure to the laminate is not particularly limited, and is visible. Need and suitable For example, the photosensitive layer may be exposed by interposing the support, the underlayer and the PC layer; after the support is peeled off, the photosensitive layer may be interposed by interposing the underlayer and the pc layer. Exposing; after the support and the underlayer are peeled off, the photosensitive layer is exposed through the PC layer; after the support, the underlayer and the PC layer are peeled off, the photosensitive layer may be exposed The exposure is not particularly limited, and may be appropriately selected as needed, and may be, for example, digital exposure, analog exposure, etc. Among these, digital exposure is preferred. The digital exposure is not particularly limited and may be appropriately selected as needed. Selecting, = preferably, generating a control signal based on the formed image_information - using the light modulated by the sin control signal. The digital exposure mechanism is not particularly limited, and may be needed For example, the light-modulating mechanism «light-modulating mechanism" that changes the light irradiated from the light-irradiating mechanism based on the formed image is not included. η morphograms as the light modulation The mechanism is particularly limited as long as it can adjust the light, and may be appropriately selected as needed, and preferably has a light modulation mechanism of the portion. The light modulation mechanism having the n moiré portions is not particularly limited. 58 201235781 414JOplt It is preferable to select a space light modulation element as needed. The spatial light modulation element is not particularly limited and may be appropriately selected as needed. For example, a digital micro-mirror device may be cited. 'DMD), MEMS (Micr〇Electr〇Mechanical Systems, MEMS) spatial light modulation components (SLM; Spedal Light

Modulator)、利用電光效應對透射光進行調變之光學元件 (PLZT元件)、液晶光閘(FLc)等。 3亥些中較佳的疋數位微鏡裳置(〇丨妍31 Micr〇_mjrr〇r Device,DMD)。 而且,較佳的是所述光調變機構具有基於所形成之圖 案信息而生成控制訊號之圖案訊號生成機構。於此情形 時,所述細變機構根·訊號生成機構所生成之 控制訊號而對光進行調變。 所述控制訊號並無特別限制,可視需要而適宜選擇, 例如可列舉數位訊號。 &lt;顯影步驟&gt; 所述顯W步驟是於藉由所述曝光步驟對所述感光層進 本使該感光層之曝光之區域硬化後,藉由將未硬化 ^域除去而進行顯影,形成永久圖案之步驟。 而嘀戶!硬化區域之除去方法並無特別限制,可視需要 而適且選擇,例如可列舉使用顯影液而除去之方法等。 如可無特別限制’可視需要而適宜選擇’例 ^ m驗土金屬之氫氧化物或碳酸鹽、碳 -乳水、四級銨鹽之水溶液等。該些中較佳的是碳酸納 59 201235781 41436pif 水溶液。 消泡劑、有機鹼或用 以界面活性劑 促進顯衫之有機溶劑等併用。 所述有機鹼並無特別限制 如可列舉苯甲胺、乙1 ^ 了視而要而適且選擇,例 乙三胺、二r极〇、 醇胺、四曱基氫氧化銨、二 醇胺等。—胺(tnethylene Pentamine )、嗎啉、三乙 例如二合劑並無特別限制,可視需要而適宜選擇, σσ 1舉醇類、酮類、g旨類、賴、軸類、内醋類等 人,述顯影液可為水或驗性水溶液與有機溶. 。而成之水㈣影液’亦可單獨為有機關。 &quot; &lt;硬化處理步驟〉 處理^的是本發明之永久騎形成綠進—步包含^ 、所述硬化處理步驟是於進行所述顯影步驟後, 成之永久圖案中之感光層進行硬化處理的步驟。 元 所述硬化處理並無特別限制,可視需要而適宜選 例如可列舉整個面曝光處理、整個面加熱處理等。 , 所述整個面曝光處理之方法並無特別限制,可視咖 而適宜選擇’例如可列舉於所述顯影步驟後,對形成=要 述永久圖案之所述積層體上的整個面進行曝光之方法等所 藉由該整個面曝光,促進形成所述感光層之感光性抗焊劑 組成物中之樹脂之硬化,所述永久圖案之表面硬化二评 進行所述整個面曝光之裝置並無特別限制,可視需要 201235781 41436pit 而適宜選擇,例如可列舉超高壓水銀燈等1;乂曝光機等。 所述整個面加熱處理之方法並無特別限制,可視 而適宜選擇,例如可列舉於所述顯影步驟後,對形成^ 述永久圖案之所述積層體上之整個面進行加熱之方法等。 藉由該整個面加熱,可提高所述永久圖案之表面之膜強度。 所述整個面加熱之加熱溫度並無特別限制,可視: 而適宜選擇,較佳的是12〇t:〜25(rc,更佳的是12 20代。若所述加熱溫度不足靴,則存在無法獲得純 處理所帶來之膜強度提高之現象;若超過2抑,則存^ 所述感光性抗焊劑組成物中之樹脂產生分解,膜質變弱織 脆之現象。 t 所述整個面加熱中之加熱時間並無特別限制 要而適宜選擇,較佳的是1〇分鐘〜12〇分鐘,更佳 而 分鐘〜60分鐘。 疋) 進行所述整個面加熱之裝置並無特別限制,可視 選擇,例如可列舉烘箱、加熱板、紅外線(IR)加 另外,於所述基材為多層配線基板等印刷線路板之 形時,可於該印刷線路板上形成本發明之永久圖案 步以如下方式進行嬋接。 、 亦即’藉由所述顯影步驟,形成所述永久圖案之硬化 曰’於所述印刷線路板之表面露出金屬層。對該印刷線路 板之表面所露出之金屬層之部位精鍍金後,進行 其次’於進行焊接之部位封料導體或零件等。此時,所 61 201235781Modulator), an optical element (PLZT element) that modulates transmitted light by an electro-optical effect, a liquid crystal shutter (FLc), and the like. The better digital micromirror is placed in 3 hai (〇丨妍31 Micr〇_mjrr〇r Device, DMD). Moreover, it is preferable that the optical modulation means has a pattern signal generating means for generating a control signal based on the formed pattern information. In this case, the light is modulated by the control signal generated by the fine-tuning mechanism root signal generating means. The control signal is not particularly limited and may be appropriately selected as needed, and for example, a digital signal may be cited. &lt;Developing Step&gt; The step of developing the W is performed by curing the region of the photosensitive layer exposed by the exposure step by the exposure step, and then developing by removing the uncured region to form The steps of the permanent pattern. The method of removing the hardened region of the Seto! is not particularly limited, and may be appropriately selected as needed, and examples thereof include a method of removing it by using a developing solution. If it is not particularly limited, it may be selected as appropriate, and an aqueous solution of a metal hydroxide or carbonate, a carbon-milk, a quaternary ammonium salt, or the like may be used. Preferred among these are sodium carbonate 59 201235781 41436 pif aqueous solution. An antifoaming agent, an organic base or an organic solvent which promotes the shirt with a surfactant can be used in combination. The organic base is not particularly limited, and may be exemplified by benzylamine and ethyl bromide. Examples include ethylenetriamine, dir-rhodium hydride, alkanolamine, tetradecylammonium hydroxide, and diolamine. Wait. - amine (tnethylene Pentamine), morpholine, triethyl, for example, a dihesive agent is not particularly limited, and may be appropriately selected as needed, and σσ 1 is an alcohol, a ketone, a g-type, a lysine, a shaft, an internal vinegar, and the like. The developer may be water or an aqueous solution and organic solvent. The water (4) Shadow Liquid can also be used separately. &lt;&lt;hardening treatment step&gt; The treatment is a permanent ride forming green step of the present invention. The hardening treatment step is performed after the development step, and the photosensitive layer in the permanent pattern is hardened. A step of. The hardening treatment is not particularly limited, and may be appropriately selected as necessary. Examples thereof include the entire surface exposure treatment and the entire surface heat treatment. The method for exposing the entire surface is not particularly limited, and may be appropriately selected by a coffee maker. For example, the method of exposing the entire surface on the laminated body forming the permanent pattern to be described after the development step may be mentioned. And the exposure of the entire surface promotes hardening of the resin in the photosensitive solder resist composition of the photosensitive layer, and the surface hardening of the permanent pattern is not particularly limited. It is suitable for the selection of 201235781 41436pit, and examples thereof include an ultrahigh pressure mercury lamp and the like; a 乂 exposure machine. The method of heat treatment of the entire surface is not particularly limited and may be appropriately selected. For example, a method of heating the entire surface of the laminate in which the permanent pattern is formed after the development step may be mentioned. By heating the entire surface, the film strength of the surface of the permanent pattern can be increased. The heating temperature of the whole surface heating is not particularly limited, and may be selected as appropriate: 12 〇t: 〜25 (rc, more preferably 12 20 generations. If the heating temperature is insufficient, the shoe exists. The phenomenon that the film strength is improved by the pure treatment cannot be obtained; if it exceeds 2, the resin in the photosensitive solder resist composition is decomposed, and the film quality is weakened and woven. The heating time is not particularly limited and is preferably selected, and is preferably from 1 minute to 12 minutes, more preferably from minute to 60 minutes. 疋) The apparatus for performing the entire surface heating is not particularly limited, and is visually selectable. For example, an oven, a hot plate, and an infrared ray (IR) may be used. When the substrate is in the form of a printed wiring board such as a multilayer wiring board, the permanent pattern step of the present invention may be formed on the printed wiring board in the following manner. Make a connection. That is, by the developing step, the hardened 曰' of the permanent pattern is formed to expose a metal layer on the surface of the printed wiring board. After the gold layer is exposed to the surface of the printed wiring board, the portion of the metal layer is subjected to soldering, and the conductor or the component is sealed. At this time, the department 61 201235781

Wbpif 述硬化層之永久圖案發揮作為保護膜或絕緣膜(層間絕緣 膜)之功能,防止來自外部之衝擊或者彼此相鄰之電極之 導通。 於本發明之永久圖案形成方法中,較佳的是形成保護 膜及層間絕緣膜之至少任一者。由所述永久圖案形成方法 而形成之永久圖案若為所述保護膜或所述層間絕緣膜,則 可保護配線免受外部之衝擊或彎曲的影響,特別是於其為 所述層間絕緣膜之情形時,例如可用以將半導體或零件高 後、度地封裝於多層配線基板或增層配線基板等上。 本發明之永久圖案形成方法可高速地形成圖案,因此 可廣泛地用於各種圖案之形成中,特別是可適宜地用於配 線圖案之形成中。 而且利用本發明之永久圖案形成方法而形成之永久 圖案具有優異之絕緣性、耐鍍敷性、圖案側面之平滑性等, 可適宜地用作保護膜、層間絕緣膜、抗焊圖案。 (印刷基板) ,、本發明之印刷基板至少包含基材、藉由所述永久圖案 形成方法而形成之永久圖案,進一步視需要而包含適宜選 擇之其他構成。 其他構成並無特別限制,可視需要而適宜選擇,例如 可列舉於基材與所述永久圖案之間進一步設有絕緣層之增 層基板等。 [實例] 以下,列舉實例對本發明加以更具體之說明,但本發 62 201235781 41436pif 明並不受該些實例任何限制。 (合成例1) &lt;化合物T-1之合成&gt; 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫吱喃150 g、N-曱基0比洛〇定酮100 g、及3-胺基-1,2,4-三唑84.1 g (默克股份有限公司製造)。於攪拌下以30分 鐘滴加四氫呋喃l〇〇g、及甲基丙烯酸-2-異氰酸基乙基酯 155.2g(karenzMOI、昭和電工公司製造)。其後,於40°C 下攪拌1小時後,於70°C下進行4小時之反應。冷卻至室 溫後,將反應液投入至強烈攪拌下的離子交換水2 L中, 析出目標物晶體。藉由曱醇進行清洗而濾取析出物,使其 乾燥而獲得下述結構之化合物T-1 222 g。 [化 14]Wbpif The permanent pattern of the hardened layer functions as a protective film or an insulating film (interlayer insulating film) to prevent external impact or conduction between adjacent electrodes. In the permanent pattern forming method of the present invention, it is preferred to form at least one of a protective film and an interlayer insulating film. If the permanent pattern formed by the permanent pattern forming method is the protective film or the interlayer insulating film, the wiring can be protected from external impact or bending, in particular, it is the interlayer insulating film. In this case, for example, it is possible to package the semiconductor or the component in a high-degree and high-degree manner on a multilayer wiring substrate, a build-up wiring substrate, or the like. The permanent pattern forming method of the present invention can form a pattern at a high speed, and thus can be widely used in the formation of various patterns, and particularly can be suitably used in the formation of a wiring pattern. Further, the permanent pattern formed by the permanent pattern forming method of the present invention has excellent insulating properties, plating resistance, smoothness of the side surface of the pattern, and the like, and can be suitably used as a protective film, an interlayer insulating film, and a solder resist pattern. (Printed substrate) The printed circuit board of the present invention comprises at least a base material, a permanent pattern formed by the permanent pattern forming method, and further includes other structures which are appropriately selected as needed. The other configuration is not particularly limited, and may be appropriately selected as needed. For example, a build-up substrate in which an insulating layer is further provided between the substrate and the permanent pattern may be mentioned. [Examples] Hereinafter, the present invention will be more specifically described by way of examples, but the present invention is not limited by these examples. (Synthesis Example 1) &lt;Synthesis of Compound T-1&gt; Into a 2,000-mL 3-necked flask equipped with a reflux tube and a thermometer, 150 g of tetrahydrofuran, 100 g of N-mercapto 0, and 100 g of lozendine were added. And 3-amino-1,2,4-triazole 84.1 g (manufactured by Merck & Co., Ltd.). Under stirring, tetrahydrofuran l〇〇g and ethyl 2-isocyanatoethyl methacrylate 155.2 g (manufactured by Karenz MOI, Showa Denko Co., Ltd.) were added dropwise. Thereafter, the mixture was stirred at 40 ° C for 1 hour, and then reacted at 70 ° C for 4 hours. After cooling to room temperature, the reaction liquid was poured into 2 L of ion-exchanged water under vigorous stirring to precipitate a target crystal. The precipitate was collected by washing with decyl alcohol, and dried to give the compound T-1 222 g of the following structure. [Chem. 14]

(合成例2) &lt;化合物T-2之合成&gt; 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫吱喃120 g、N-甲基0比洛唆酮70 g、3,5-二胺基-1,2,4· 三唑49.5§(〇6§1^&amp;公司製造)及2,4-二-第三丁基-4-曱 基苯酚1.8g(PN-01、大内新興化學工業公司製造)。於攪 拌下,以2小時滴加四氫呋喃80 g、及丙烯酸-2-異氰酸基 63 201235781 41436pif 乙酉曰141.1 g ( Karenz ΑΟΙ、昭和電工公司製造)。其後, 於4〇C下使其反應20小時。冷卻至室溫後,將反應液投 入至強烈擾拌下的離子交換水2 L中,析出目標物晶體。 藉由曱醇進行清洗而濾取析出物,使其乾燥而獲得卞述妹 構之化合物T-2 165.1 g。 [化 15](Synthesis Example 2) &lt;Synthesis of Compound T-2&gt; In a 2,000 mL 3-necked flask equipped with a reflux tube and a thermometer, tetrahydrofuran 120 g, N-methyl 0-poicone 70 g, 3 were added. , 5-diamino-1,2,4·triazole 49.5§(〇6§1^&amp;Company) and 2,4-di-tert-butyl-4-nonylphenol 1.8g (PN- 01, manufactured by Ou Nei Emerging Chemical Industry Co., Ltd.). Under stirring, 80 g of tetrahydrofuran and 2-ethyl isocyanate 63 201235781 41436pif acetonitrile 141.1 g (manufactured by Karenz ΑΟΙ, Showa Denko Co., Ltd.) were added dropwise thereto over 2 hours. Thereafter, the reaction was allowed to proceed at 4 ° C for 20 hours. After cooling to room temperature, the reaction solution was poured into 2 L of ion-exchanged water which was strongly disturbed to precipitate a target crystal. The precipitate was collected by washing with methanol, and dried to give a compound T-2 165.1 g. [化15]

(合成例3) &lt;化合物T-3之合成&gt; 中炉 於具有回流管及溫度計之2,000mL之3 口燒瓶 N-甲基吡咯啶酮250 g、及3,5-二胺基-1,2,4-三唑49’ . (Degussa公司製造)。於攪拌下,以2小時滴加N·*心 &gt; 卜. 咯顿80 g、及四氫鄰苯二甲咖g (丨〇 TH、新日本理化公司製造)。其後,於4〇°C下進行1 , ,柝出 清洗 之攪拌後,於100°c下使其反應丨2小時。冷卻至家 將反應液投入至強烈攪拌下之離子交換水L2 L中 目標物晶體。藉由異丙醇/己烷(2/8 (重量比))進打 而濾取析出物,使其乾燥而獲得下述結構之化舍物 121.1 g。 64 201235781 41436pif [化 16](Synthesis Example 3) &lt;Synthesis of Compound T-3&gt; The furnace was placed in a 2,000 mL 3-neck flask with a reflux tube and a thermometer, N-methylpyrrolidone 250 g, and 3,5-diamino-1 , 2,4-triazole 49' (manufactured by Degussa). Under stirring, N·* heart &gt; 卜. 咯 80 80 g, and tetrahydrophthalic acid g (丨〇 TH, manufactured by Nippon Chemical and Chemical Co., Ltd.). Thereafter, the mixture was stirred at 4 ° C for 1 hour, and the mixture was stirred and washed, and then allowed to react at 100 ° C for 2 hours. Cooling home The reaction solution is poured into the target crystals in ion-exchanged water L2 L under vigorous stirring. The precipitate was collected by isopropyl alcohol/hexane (2/8 (by weight)), and dried to obtain 121.1 g of the following structure. 64 201235781 41436pif [Chem. 16]

T-3 (合成例4 ) &lt;化合物Τ-4之合成&gt; 於具有回流管及溫度計之1 ,〇〇〇 mL之3 口燒瓶中加入 第三丁基曱基酮250 g、1,2,4-三唑34.5 g (純正化學工業 公司製造)、二環戊基二曱醇二丙烯酸酯145.7g(A-DCP、 新中村化學工業公司製造)、及2,4-二-第三丁基-4-曱基苯 酚1.9 g (PN-01、大内新興化學工業公司製造)。於40°C 下攪拌1小時後,於80°C下使其反應52小時。冷卻至室 溫後,藉由減壓濃縮而除去有機溶劑,由此而獲得下述結 構之化合物T-4 178 g。 [化Π] ΟT-3 (Synthesis Example 4) &lt;Synthesis of Compound Τ-4&gt; In a 3-neck flask having a reflux tube and a thermometer of 1, 〇〇〇mL, a t-butyl decyl ketone 250 g, 1, 2 was added. , 4-triazole 34.5 g (manufactured by Junsei Chemical Industry Co., Ltd.), dicyclopentyl decyl diacrylate diacrylate 145.7 g (A-DCP, manufactured by Shin-Nakamura Chemical Co., Ltd.), and 2,4-di-third曱-4-mercaptophenol 1.9 g (PN-01, manufactured by Ouchi Shinko Chemical Industry Co., Ltd.). After stirring at 40 ° C for 1 hour, the mixture was reacted at 80 ° C for 52 hours. After cooling to room temperature, the organic solvent was removed by concentration under reduced pressure, whereby Compound T-4 178 g of the following structure was obtained. [Π化] Ο

(合成例5) &lt;含有羧基之高分子化合物B-4(酸改質含有乙烯性不 飽和基之聚胺基曱酸酯樹脂)之合成&gt; 65 201235781 41436pif 於具有冷凝器及攪拌機之5〇〇乱之三口圓底燒瓶 内’使痛果酸2,41 g (〇莫耳)、2&gt;雙(經基曱基)丙酸 (DMPA) 5.23 g (G·莫耳)、及丙三醇單甲基丙稀酸醋 17.78 g (0.111莫耳)溶解於環己酮% mL中。於其中添 加4,4-二苯基曱烷二異氰酸酯(Mm)3〇 〇3 g(〇 12莫耳)、 六亞曱基二異氰酸酯(HMDI) 5 〇5 g (〇 〇3莫耳)、2 6_ 二-第三丁基羥基甲笨〇1 g、及作為觸媒之商品名: NEOSTANN U-_ (日東化成公司製造”化於饥下 進行5小時之加熱攪拌。其後,藉由曱醇961 mL加以稀 釋而搜拌30分鐘,獲得165 g之含有缓基之高分子化合物 B-4溶液(固形物為45 wt% )。 所得之含有叛基之高分子化合物β·4溶液之固形物酸 值為68 mgKOH/g ’藉由凝膠滲透層析法(Gpc)而測定 之重量平均分子量(聚苯乙烯標準)為6 5〇〇,乙烯性不 飽和基當量為1.83 mmol/g。 所述酸值是依據JiS K0070而測定。其中,於樣品並 不溶解之情形時,使用二噁烷或四氫呋喃等作為溶劑。 所述重量平均分子量是使用高速GPC裝置(東洋曹達 工業股份有限公司製造之HLC_8〇2A),以〇.5 wt%之四氫 °夫喃(THF )溶液為試樣溶液,管枉使用1根 HZM-M,注入200 μί之試樣,藉由所述THF溶液進行溶 離,於25°C下利用折射率檢測器或υν檢測器(檢測波長 為254 nm )而測定。 所述乙烯性不飽和基當量可藉由依據JIS K2605測定 66 201235781 41436pif 臭值而求出。 (合成例6 ) &lt;含有羧基之高分子化合物B-5(酸改質含有乙烯性不 飽和基之聚胺基曱酸酯樹脂)之合成&gt; 於具有冷凝器及擾拌機之500 mL之三口圓底燒瓶 中’使2,2-雙(羥基甲基)丙酸(DMBA) 32.00 g (0.216莫 耳)、聚丙二醇(分子量為 1 000) (PPG1〇〇0)9.〇〇g(〇.〇〇9 莫耳)溶解於丙二醇單曱醚單乙酸酯118 mL中。於其中 添加4,4-二苯基曱烷二異氰酸酯(MDI) 37.54 g (0.15莫 耳)、2,6_二-第三丁基羥基曱苯0.1 g、及NEOSTANN U-600 (曰東化成公司製造)〇.2 g,於75〇C下攪拌5小時後,添 加曱醇9.61 g。其後,進一步添加作為含有乙烯性不飽和 基之環氧化合物的曱基丙烯酸縮水甘油酯(GMA) 17.91 g (0.126)與作為觸媒之三苯基膦5,000 ppm,於11〇°Ct 攪拌5小時後,冷卻至室溫,獲得214 g之含有羧基之高 分子化合物B-5溶液。 所得之含有羧基之高分子化合物B-5溶液之固形物酸 值為75 mgKOH/g ’藉由凝膠滲透層析法(GPC)而測定 之重量平均分子量(聚苯乙烯標準)為12,〇〇〇,乙烯性不 飽和基當量為1.3 mmol/g。 (實例1) &lt;感光性組成物塗佈液1之調製&gt; 將下述各成分加以混合,調製感光性組成物塗佈液1 (感光性抗焊劑組成物塗佈液)。 67 201235781 41436pif ZFR-1776 (日本化藥公司製造、酸改質含有乙烯性不 飽和基之環氧樹脂之6 5 w t %乙酸甲氧基丙酯溶液)(B -1 ) 32.3重量份 化合物T-1 0.8重量份 著色顏料:HELIOGEN BLUE D7086 (BASF 公司製 造) 0.021重量份 著色顏料:Pariotol Yellow D0960 ( BASF 公司製造) 0.006重量份 分散劑:Solsperse24000GR (路博潤公司製造) 0.22重量份 聚合性化合物:DCP-A (共榮社化學公司製造) 5.3重量份 起始劑:Irgacure9〇7 (BASF公司製造) 0.6重量份 增感劑:DETX-S (曰本化藥股份有限公司製造) 0.005重量份 反應助劑:EAB-F (保土谷化學公司製造) 0.019重量份 硬化劑:三聚氰胺(和光純藥公司製造) 0.16重量份 熱交聯劑:Epotohto YDF-170 2.9重量份 (新日鐵化學公司製造、具有環氧乙烷基之化合物(雙 酚F型環氧樹脂)) 68 201235781 41436ριί 填料.SO-C2 (AdmatechsCo. Ltd·製造) 8 0重量份 離子捕捉劑:IXE_6107 (東亞合成公司製造) 0·82重量份 塗佈助劑:Megafac F-780F 0.2重量份 (DIC公司製造,30 wt%丁酮溶液) 彈性體:Espel 1612 2.7重量份 環己酮(溶劑) 38.7重量份 &lt;感光性抗焊劑膜1之製作&gt; 使用厚度為25 μιη之聚對苯二曱酸乙二酯膜(pET) 作為支,體’藉由棒式塗佈機賴贼綠組成物塗佈液 1以乾燥後之感光層之厚度成為約30叫之方式塗佈於該 支樓體上,於贼、熱職環狀雜巾使其乾燥30分 鐘’製作感光性抗焊劑膜1。 &lt;永久圖案之形成&gt; -積層體之調製- 使用於表面實施了化學研磨處理之已形成有配線之覆 銅積層板(無通孔、鋼厚之印刷線路板)作為基材。 使用真空貼合機(名機製作所股份有限公司製造、 MVLP500)’以所述感光性抗焊劑膜1之感光層與所述覆 銅積層板相接之方式而使其積層於該覆銅積層板上,調製 順次積層有所述覆銅積層板、所述感光層、所述聚對苯二 曱酸乙二酯膜(支擇體)之積層體。 壓接條件疋壓接溫度為、壓接壓力為0.4 MPa、 69 201235781 41436pif 層壓速度為1 m/min。 關於上述所得之積層體,藉由以下所示之評價方法而 形成光阻圖案。 -曝光步驟- 對於所述調製之積層體中之感光層,使用具有規定圖 案之利用藍紫光雷射曝光之圖案形成裝置,自聚對笨二曱 酸乙二酯膜(支撐體)側,以獲得規定圖案之方式以40 mJ/cm2之能量之量照射4〇5 nm之雷射光而進行曝光,使 所述感光層之一部分區域硬化。 -顯影步驟- 於室溫下靜置10分鐘後,自所述積層體上剝下聚對苯 二曱酸乙二酯膜(支撐體),使用1 wt%碳酸鈉水溶液作為 驗性顯影液,於30eC下以0.18 MPa ( 1.8 kgf/cm2)之壓力 對覆銅積層板上之感光層之整個面進行喷射顯影60秒,將 未曝光之區域溶解除去。其後,進行水洗,使其乾燥而形 成永久圖案。 -硬化處理步驟- 對形成有所述永久圖案之積層體之整個面’於150。〇 下實施1小時之加熱處理’使永久圖案之表面硬化,提高 膜強度而製作試板。 &lt;評價方法&gt; 藉由以下所示之評價方法’對圖案侧面之平滑性、絕 緣性、财熱衝擊性(抗龜裂性)、及财鏟敷性進行評價。將 結果示於表1中。 201235781 414Jbpif _圖案側面之平滑性-用掃描式電子顯微鏡(SEM) 成之水久圖案之侧面進行攝$,— 述頌影步驟中所形 案側面之平滑性進行評價。~ 下之評價基準對圖 [評價基準] ο:圖案側面平滑,圖案形狀優異。 於圖案側面觀察到稍許之凹凸 但為良好之圖 〇△ 案形狀 △:於圖案側面存在凹凸’圖案形狀稍差 X.於圖案側面發現凝聚物,圖案形狀差。 絕緣性- ^=氧玻璃基材上積層有12 _厚銅的印刷基板 :銅;r蝕刻’獲得線寬/間隙寬為50 _50 μιη、線相 =之間並不接觸之相互對向之同—面上的梳型電極。與所 述積層體之調製方法中所記載之方法同樣地將感光性抗焊 劑膜1積層於該基板之梳型電極上,藉由最佳曝光量(3〇〇 mJ/cm〜1 J/cm )進行曝光。其次,於常溫下靜置】小時 後,藉由30C之1 wt%碳酸鈉水溶液進行6〇秒之噴射顯 影,進一步於80°C下進行1〇分鐘之加熱(乾燥)。繼而利 用ORC MANUFACTURING c〇., LTD.製造之紫外線照射 裝置而藉由1 J/cm2之能量之量進行對感光層之紫外線照 射。進一步於150°C下對感光層進行6〇分鐘之加熱處理, 藉此獲得形成有厚度為25 μιη之抗焊劑的評價用基板。 以對加熱後之評價用積層體之梳型電極間施加電壓之 71 201235781 41436pif 2雪;!由Sn/Pb焊錫將聚四氟乙烯製遮蔽線連接於該些 檢型電極上之後,於對評價用積層體印可5V之電壓f •,下:將該評價用積層體於13(TC、85%RH之超 =(Synthesis Example 5) &lt;Synthesis of a polymer compound B-4 containing a carboxyl group (a polyamine phthalate resin having an acid-modified ethylenically unsaturated group)&gt; 65 201235781 41436pif 5 with a condenser and a stirrer In a three-neck round bottom flask, '2,41 g (〇莫耳), 2&gt; bis(pyridinyl)propionic acid (DMPA) 5.23 g (G·mole), and C3 Alcohol monomethyl acrylate vinegar 17.78 g (0.111 mol) was dissolved in cyclohexanone % mL. Adding 4,4-diphenyldecane diisocyanate (Mm) 3〇〇3 g (〇12 mol), hexamethylene diisocyanate (HMDI) 5 〇5 g (〇〇3 mol), 2 6_ di-t-butylhydroxymethyl alum 1 g, and the trade name of the catalyst: NEOSTANN U-_ (made by Nitto Chemical Co., Ltd.) for 5 hours of heating and stirring under hunger. Thereafter, by 曱The alcohol was diluted with 961 mL and mixed for 30 minutes to obtain 165 g of a polymer compound B-4 solution containing a slow base (solid content: 45 wt%). The solid form of the obtained polymer compound β·4 solution containing a ruthenium group was obtained. The acid value of the acid was 68 mgKOH/g. The weight average molecular weight (polystyrene standard) determined by gel permeation chromatography (Gpc) was 65 Å, and the ethylenically unsaturated group equivalent was 1.83 mmol/g. The acid value is determined in accordance with JiS K0070. In the case where the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The weight average molecular weight is a high-speed GPC device (manufactured by Toyo Soda Industrial Co., Ltd.). HLC_8〇2A), with a solution of 55 wt% tetrahydrofuran (THF) For the solution, one HZM-M was used, and a 200 μί sample was injected, and the solution was dissolved by the THF solution, and the refractive index detector or the υν detector (detection wavelength: 254 nm) was measured at 25 ° C. The ethylenically unsaturated group equivalent can be determined by measuring the odor value of 66 201235781 41436pif according to JIS K2605. (Synthesis Example 6) &lt;Polymer-containing polymer compound B-5 (acid-modified contains ethylenic unsaturation) Synthesis of polyamino phthalate resin) &gt; 2,2-bis(hydroxymethyl)propionic acid (DMBA) 32.00 g in a 500 mL three-neck round bottom flask equipped with a condenser and a scrambler (0.216 mol), polypropylene glycol (molecular weight 1 000) (PPG1〇〇0) 9. 〇〇g (〇.〇〇9 Moer) dissolved in propylene glycol monoterpene ether monoacetate 118 mL. Add 4,4-diphenyldecane diisocyanate (MDI) 37.54 g (0.15 mol), 2,6-di-t-butylhydroxyindole 0.1 g, and NEOSTANN U-600 (manufactured by Mindong Chemical Co., Ltd.) 2 g, after stirring at 75 ° C for 5 hours, 9.61 g of decyl alcohol was added. Thereafter, further added as an epoxide containing an ethylenically unsaturated group Glycidyl methacrylate (GMA) 17.91 g (0.126) and 5,000 ppm of triphenylphosphine as a catalyst, stirred at 11 ° C for 5 hours, then cooled to room temperature to obtain 214 g of carboxyl group Molecular compound B-5 solution. The solid acid value of the obtained carboxyl group-containing polymer compound B-5 solution was 75 mgKOH/g. The weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) was 12, 〇 The oxime has an ethylenically unsaturated group equivalent of 1.3 mmol/g. (Example 1) &lt;Preparation of photosensitive composition coating liquid 1&gt; Each of the following components was mixed to prepare a photosensitive composition coating liquid 1 (photosensitive solder composition coating liquid). 67 201235781 41436pif ZFR-1776 (65 wt% methoxypropyl acetate solution of epoxy resin modified with ethylenically unsaturated group, manufactured by Nippon Kagaku Co., Ltd.) (B -1 ) 32.3 parts by weight of compound T- 1 0.8 parts by weight of a coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF Corporation) 0.021 parts by weight of a coloring pigment: Pariotol Yellow D0960 (manufactured by BASF Corporation) 0.006 parts by weight of a dispersing agent: Solsperse 24000GR (manufactured by Lubrizol Corporation) 0.22 parts by weight of a polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by weight of initiator: Irgacure 9〇7 (manufactured by BASF Corporation) 0.6 parts by weight of sensitizer: DETX-S (manufactured by Sakamoto Chemical Co., Ltd.) 0.005 parts by weight of reaction Auxiliary: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 0.019 parts by weight of hardener: melamine (manufactured by Wako Pure Chemical Industries, Ltd.) 0.16 parts by weight of thermal crosslinking agent: Epotohto YDF-170 2.9 parts by weight (manufactured by Nippon Steel Chemical Co., Ltd. Compound having an oxirane group (bisphenol F type epoxy resin)) 68 201235781 41436ριί Filler. SO-C2 (manufactured by Admatechs Co. Ltd.) 80 parts by weight ion trapping :IXE_6107 (manufactured by Toagosei Co., Ltd.) 0·82 parts by weight of coating aid: Megafac F-780F 0.2 parts by weight (manufactured by DIC Corporation, 30 wt% of methyl ethyl ketone solution) Elastomer: Espel 1612 2.7 parts by weight of cyclohexanone (solvent) 38.7 parts by weight &lt;Preparation of photosensitive solder resist film 1&gt; A polyethylene terephthalate film (pET) having a thickness of 25 μm was used as a support, and the body was treated with a bar coater. The composition coating liquid 1 is applied to the support body by the thickness of the photosensitive layer after drying, and is dried for 30 minutes in a thief and hot-grade annular napkin to prepare a photosensitive solder resist film. 1. &lt;Formation of permanent pattern&gt; - Modulation of laminated body - A copper-clad laminate (a printed wiring board having no through-hole or steel-thickness) on which a wiring has been subjected to chemical polishing treatment is used as a substrate. Using a vacuum laminator (manufactured by Nago Seisakusho Co., Ltd., MVLP500), the photosensitive layer of the photosensitive resist film 1 is laminated on the copper clad laminate so as to be in contact with the copper clad laminate. In the above, a laminate of the copper clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support) is sequentially laminated. The crimping conditions are 疋 crimping temperature, crimping pressure is 0.4 MPa, 69 201235781 41436pif lamination speed is 1 m/min. With respect to the laminate obtained above, a photoresist pattern was formed by the evaluation method shown below. - Exposure step - for the photosensitive layer in the laminated body of the modulation, using a pattern forming device using a blue-violet laser exposure with a predetermined pattern, self-polymerizing on the side of the ethylene phthalate film (support) A predetermined pattern was obtained by irradiating 4 〇 5 nm of laser light with an amount of energy of 40 mJ/cm 2 to expose a partial region of the photosensitive layer. - development step - after standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the laminate, and a 1 wt% aqueous solution of sodium carbonate was used as an experimental developer. The entire surface of the photosensitive layer on the copper clad laminate was spray-developed at 30 ° C under a pressure of 0.18 MPa (1.8 kgf/cm 2 ) for 60 seconds to dissolve and remove the unexposed areas. Thereafter, it was washed with water and dried to form a permanent pattern. - Hardening treatment step - the entire face of the laminated body in which the permanent pattern is formed is at 150. The heat treatment was carried out for 1 hour, and the surface of the permanent pattern was hardened to increase the film strength to prepare a test plate. &lt;Evaluation Method&gt; The smoothness, insulation, thermal shock resistance (crack resistance), and scraping property of the side surface of the pattern were evaluated by the evaluation method described below. The results are shown in Table 1. 201235781 414Jbpif _ Smoothness of the side of the pattern - The side of the pattern was formed by scanning electron microscopy (SEM), and the smoothness of the side of the pattern in the shadowing step was evaluated. ~ Evaluation benchmark pair chart [Evaluation criteria] ο: The pattern side is smooth and the pattern shape is excellent. A slight unevenness was observed on the side of the pattern, but it was a good figure. 〇 △ Case shape △: There were irregularities on the side of the pattern. The pattern shape was slightly inferior. X. Cohesives were found on the side of the pattern, and the pattern shape was poor. Insulation - ^ = printed substrate with 12 thick copper on the oxygen glass substrate: copper; r etching 'obtained line width / gap width 50 _50 μιη, line phase = no contact between each other The comb electrode on the surface. The photosensitive solder resist film 1 is laminated on the comb-shaped electrode of the substrate in the same manner as the method described in the method for preparing the laminate, and the optimum exposure amount (3 〇〇 mJ/cm 1 J/cm) ) for exposure. Next, after standing at room temperature for an hour, a 6-second spray of 30 wt% sodium carbonate aqueous solution was developed, and further heating (drying) was carried out at 80 ° C for 1 minute. Then, the ultraviolet ray irradiation device manufactured by ORC MANUFACTURING c., LTD. was used to irradiate the photosensitive layer with ultraviolet light by an amount of energy of 1 J/cm 2 . Further, the photosensitive layer was subjected to heat treatment at 150 ° C for 6 minutes to obtain a substrate for evaluation in which a solder resist having a thickness of 25 μm was formed. In the case of applying a voltage between the comb-shaped electrodes of the laminated body for evaluation after heating, 2012 201281 81 41436pif 2 snow; and the shielding wire of polytetrafluoroethylene is connected to the test electrodes by Sn/Pb solder, and then evaluated. Use a laminate to print a voltage of 5V f •, Bottom: Use this laminate for 13 (TC, 85% RH super =

尚濕哥命試驗(HAST)槽内靜置200小時。藉由1〇:: 之金相顯微鏡而觀察其後之評積層體的抗i劑之、卷^ 之產生程度,藉由以下之評價基準而進行評價。 LThe still wet test (HAST) was allowed to stand for 200 hours. The degree of occurrence of the anti-reagent of the subsequent evaluation layer was observed by a metallographic microscope of 1〇::, and the evaluation was performed by the following evaluation criteria. L

[評價基準] ◎ •未確認到遷移之產生’絕緣性優異 〇 :僅僅於銅上確認到遷移之產生,絕緣性良好 〇△.於SR (抗焊劑)中確認到稍許遷移,絕緣性稍 好 △.確認到遷移之產生,絕緣性稍差 x :電極間短路,絕緣性差 _抗龜裂性- 與所述積層體之調製方法中所記載之方法同樣地將感 光性抗焊劑膜1積層於在環氧玻璃基材上積層有^卜⑺厚 銅4的印刷基板上,介隔2 mm見方之光罩,使用〇RC MANUFACTURING CO.,LTD.製造之 HMW_201GX 型曝 光機,藉由可形成2 mm見方之圖案的最佳曝光量(3〇〇 mJ/cm2〜1 J/cm2)而進行曝光。其次,於常溫下靜置卜】、 時後,藉由30°C之1 wt°/。碳酸鈉水溶液進行6〇秒之喷射 顯影,進一步於8(TC下進行1 〇分鐘之加熱(乾燥)。繼而, 使用ORC MANUFACTURING CO.,LTD.製造之紫外線照 射裝置而藉由1 J/cm2之能量之量進行對感光層之紫外線 72 201235781 41436pit 照射。進一步於150°C下對感光層進行60分鐘之加熱處 理’藉此獲得具有2 mm見方之矩形間口部的形成有厚度 為25 μιη之抗焊劑的評價用基板。 反覆進行1,〇〇〇次如下之熱循環:將所得之基板於 -65°C之大氣中暴露15分鐘後’其次於i5〇°c之大氣中暴 露15分鐘,然後再次暴露於-65°C之大氣中。藉由光學顯 微鏡觀察通過熱循環之評價用基板的抗焊劑上的裂痕及剝 離程度,藉由下述評價基準而進行評價。 [評價基準] ◎ •於抗焊劑上無裂痕、剝落、變形,強勃性優異 〇 :於抗焊劑上存在稍許變形,但強韌性良好 :於抗焊劑上存在稍許裂痕,但強韌性稍好 A.於抗焊劑上存在猶許裂痕、剝落,強動性稍差 X:於抗焊劑上明顯存在裂痕、剝落,強韌性差 -耐鑛敷性- 對所述永久圖案進行脫脂而進行表面之粗化後,添加 硫酸銳而進行卿加成。其次,將永久圖案於赃之硫酸 鎳/稀硫酸溶液中浸潰40分鐘而進行鍍敷處 2而觀察永久圖案中之硬化膜之捲縮 基準而進行耐鍍敷性之評價。 [評價基準] ◎ •於硬化财並無捲縮、剝落,顺敷性極其優異 耐物色,但峨物上之問題, 73 201235781 41436pif △.於硬化膜中存在捲縮現象,耐鑛敷性差 X :於硬化膜中觀察到隆起(剝落),耐鍍敷性極差 (實例2) 於實例1中’將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1 )替換為 CyclomerP200HM (大赛璐化學工業公司製造、含有乙烯 性不飽和基及羧基之丙烯酸樹脂)(B-2)(於固形物中之 含量相同)’除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例3) 於實例1中,將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1 )替換為 UXE-3024 (日本化藥公司製造、酸改質含有乙烯性不飽和 基之聚胺基曱酸酯樹脂)(B-3)(於固形物中之含量相 同),除此以外與實例1同樣地進行而製作感光性組成物塗 佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例4) 於實例1中,將ZFR-1176 (曰本化藥公司製造、酸改 質含有乙婦性不飽和基之壞氧樹脂)(B-1)替換為合成例 5中所合成之含有羧基之高分子化合物(酸改質含有乙烯 201235781 41436pit 性=飽和基之聚胺基曱酸酯樹脂)(B_4)(於固形物中之 含量相同)’除此以外與實例丨同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 —關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例5 ) 於實例4中,將化合物T-1替換為化合物T-2,除此以 外與貫例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例6 ) 於實例4中,將化合物T-1替換為化合物T-3,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例7) 於實例4中’將化合物T-1替換為化合物T-4,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例8) 75 201235781 41436pif 於實例5中,將化合物T_2之調配量自相對於感光性 組成物塗佈液之固形物而言為i 7 wt%變更為3 〇 wt%,除 此以外與貫例5同樣地進行而製作感光性組成物塗佈液及 感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表丨中。 (實例9) 於貝例5中’將作為熱交聯劑之Ep〇t〇hto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧樹脂))替換為ETERNACOLL OXBP (宇部興產公司 製造、具有環氧丙烧基之化合物),除此以外與實例5同樣 地進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與貫例1同樣地進行評價。將結果示於表1中。 (實例10) 於實例5中,將作為熱交聯劑之Epotohto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 王衣氧树月曰))替換為Sumidur BL3175 (Sumika Bayer Urethane公司製造、具有嵌段異氰酸酯基之化合物),除此 以外一實例5同樣地進行而製作感光性組成物塗佈液及感 光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與貫例1同樣地進行評價。將結果示於表1中。 (實例11) 76 201235781 41436pif 於實例5中,將作為熱交聯劑之Epotohto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧樹脂))替換為YSLV-120TE (新日鐵化學公司製造、 具有環氧乙烷基之化合物)’除此以外與實例5同樣地進行 而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例12) 於貫例1中’將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-丨)替換為合成例 6中所合成之含有羧基之高分子化合物(酸改質含有乙烯 性不飽和基之聚胺基曱酸酯樹脂)(B-5)(於固形物中之 含量相同),除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例1) 於實例1中,並未調配τ_ 1化合物及熱交聯劑,除此 以外與實例1同樣地進行而製作感光性組成物塗佈液及感 光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例2 ) 於貫例1中,並未調配Τ-1化合物,除此以外與實例 77 201235781 41436pif 膜 @ #地•進行而製作感光性組成物塗佈液及感光性抗焊 劑 _關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例3 ) 於實例1中,將T-1化合物替換為IXE6107 (東亞合 成公司製造、無機離子交換體),除此以外與實例1同樣地 進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (比較例4) 於實例1中,將T-1化合物替換為下述結構之化合物 T:Z(1,2,4-三唾)’除此以外與實例1同樣地進行而製作感 光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價》將結果示於表1中。 [化 18] Τ-Ζ[Evaluation Criteria] ◎ • The occurrence of migration was not confirmed. 'Insulation is excellent. 迁移: The migration was confirmed only on copper, and the insulation was good. △. A slight migration was observed in SR (solder resist), and the insulation was slightly better. It was confirmed that the migration occurred, and the insulation was slightly inferior x: short-circuit between the electrodes, and the insulation was poor. - Crack resistance - The photosensitive resist film 1 was laminated in the same manner as the method described in the method for preparing a laminate. On a printed circuit board with a thick copper layer 4 on the epoxy glass substrate, a 2 mm square mask was used, and a HMW_201GX type exposure machine manufactured by 〇RC MANUFACTURING CO., LTD. was used to form 2 mm. The exposure was performed by the optimum exposure amount of the square pattern (3 〇〇 mJ/cm 2 to 1 J/cm 2 ). Secondly, it is allowed to stand at room temperature, and then by 1 wt ° at 30 ° C. The sodium carbonate aqueous solution was subjected to jet development for 6 seconds, and further heated (dried) at 8 (TC for 1 minute). Then, an ultraviolet irradiation device manufactured by ORC MANUFACTURING CO., LTD. was used, and 1 J/cm 2 was used. The amount of energy was irradiated to the ultraviolet ray 72 201235781 41436pit of the photosensitive layer. The photosensitive layer was further heat-treated at 150 ° C for 60 minutes, thereby obtaining a rectangular thickness of 25 μm formed with a rectangular portion having a square of 2 mm square. Substrate for evaluation of flux. Repeatedly, the thermal cycle was as follows: the obtained substrate was exposed to the atmosphere at -65 ° C for 15 minutes, and then exposed to the atmosphere of i5 ° ° C for 15 minutes, then The film was again exposed to an atmosphere of -65 ° C. The degree of cracking and peeling on the solder resist of the substrate for evaluation by thermal cycling was observed by an optical microscope, and evaluated by the following evaluation criteria. [Evaluation Criteria] ◎ • No cracks, flaking, deformation and excellent sturdiness on the solder resist 〇: There is a slight deformation on the solder resist, but the toughness is good: there is a slight crack on the solder resist, but the toughness is slightly better. There are cracks and flaking on the solder resist, and the kinetic properties are slightly worse. X: There are obvious cracks and flaking on the solder resist, and the toughness is poor - the mineral-resistant property - the permanent pattern is degreased and the surface is rough. After the addition, the sulfuric acid was added to carry out the addition of the sulfuric acid. Secondly, the permanent pattern was immersed in the nickel sulfate/dilute sulfuric acid solution of the crucible for 40 minutes to carry out the plating 2 and the crimping standard of the cured film in the permanent pattern was observed. [Evaluation of plating resistance] [Evaluation criteria] ◎ • There is no curling or peeling in the hardening property, and it is extremely excellent in resistance to material color, but the problem on the object, 73 201235781 41436pif △. Shrinkage phenomenon, poor mineral resistance X: bulging (peeling) was observed in the cured film, and plating resistance was extremely poor (Example 2) In Example 1, 'ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid-modified) (Epoxy Unsaturated Epoxy Resin) (B-1) is replaced by Cyclomer P200HM (Acetone Chemical Industry Co., Ltd., Acrylic Resin Containing Ethylene Unsaturated Group and Carboxyl Group) (B-2) (Content in Solids) Same) 'Other than the same as Example 1 The photosensitive composition coating liquid and the photosensitive solder resist film were produced in the same manner as in Example 1. The obtained photosensitive composition coating liquid and photosensitive resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 3) In Example 1, ZFR-1176 (manufactured by Nippon Kagaku Co., Ltd., acid modified epoxy resin containing ethylenically unsaturated group) (B-1) was replaced with UXE-3024 (Japanese chemical) Photosensitive composition was carried out in the same manner as in Example 1 except that the polyamino phthalate resin (B-3) having an ethylenically unsaturated group was produced by acid reduction (the same content in the solid content). Coating solution and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 4) In Example 1, ZFR-1176 (manufactured by Sakamoto Chemical Co., Ltd., acid modified to contain an ethylenically unsaturated group of bad oxygen resin) (B-1) was replaced with that synthesized in Synthesis Example 5. A polymer compound having a carboxyl group (acid modified with ethylene 201235781 41436 pit = saturated polyamino phthalate resin) (B_4) (the same content in the solid content) was carried out in the same manner as in Example 而A photosensitive composition coating liquid and a photosensitive solder resist film were produced. The photosensitive composition coating liquid and the photosensitive solder resist film obtained were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 5) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-2. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 6) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-3. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 7) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-4 in Example 4. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 8) 75 201235781 41436pif In Example 5, the compounding amount of the compound T_2 was changed from i 7 wt% to 3 〇 wt% with respect to the solid matter of the photosensitive composition coating liquid, and otherwise In the same manner as in Example 5, a photosensitive composition coating liquid and a photosensitive solder resist film were produced. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in the table. (Example 9) Ep〇t〇hto YDF-170 (a compound of bismuth F-type epoxy resin manufactured by Xinyi Iron Chemical Co., Ltd.) which is a thermal crosslinking agent in Shell 5 A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that it was replaced with ETERNACOLL OXBP (manufactured by Ube Industries, Ltd., having a propylene-based group). The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 10) In Example 5, Epotohto YDF-170 (manufactured by Xinyi Iron Chemical Co., Ltd., having an oxirane group (bisphenol F type Wangyi oxygen tree) was replaced by a thermal crosslinking agent) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that Sumidur BL3175 (a compound having a blocked isocyanate group manufactured by Sumika Bayer Urethane Co., Ltd.) was used. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 11) 76 201235781 41436pif In Example 5, Epotohto YDF-170 (manufactured by Xinyi Iron Chemical Co., Ltd., compound having oxirane group (bisphenol F type epoxy resin)) was replaced as a thermal crosslinking agent. A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that YSLV-120TE (manufactured by Nippon Steel Chemical Co., Ltd., having an oxirane group) was used. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 12) In Example 1, 'ZFR-1176 (epoxy resin modified by Nippon Kayaku Co., Ltd., acid-modified ethylenically unsaturated group) (B-丨) was replaced with the content synthesized in Synthesis Example 6. A polymer compound of a carboxyl group (a polyamine phthalate resin containing an ethylenically unsaturated group as an acid-modified) (B-5) (the same content in a solid content) was produced in the same manner as in Example 1. Photosensitive composition coating liquid and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 1) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 1 except that the τ-1 compound and the thermal crosslinking agent were not prepared. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 2) The photosensitive composition coating liquid and the photosensitive solder resist were prepared in the same manner as in Example 77, except that the ruthenium-1 compound was not prepared in the same manner as in Example 77, 201235781 41436 pif film @#地• The photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 3) A photosensitive composition coating liquid and a photosensitive material were produced in the same manner as in Example 1 except that the T-1 compound was replaced with IXE6107 (manufactured by Toagosei Co., Ltd., an inorganic ion exchanger). A solder mask film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 4) A photosensitive composition was produced in the same manner as in Example 1 except that the T-1 compound was replaced with the compound T:Z (1,2,4-tris) of the following structure. Coating solution and photosensitive solder resist film. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. [化 18] Τ-Ζ

HN今N Κι=/ (比較例5 ) 於實例1中,並未調配熱交聯劑,除此以外與實 同樣地進行而製作感光性組成物塗佈液及感光性' 抗焊劑 78 201235781 41436pifHN N N Κ = = (Comparative Example 5) In the same manner as in Example 1, except that the thermal crosslinking agent was not prepared, a photosensitive composition coating liquid and a photosensitive 'solder resistant agent' were prepared.

關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 [表1]The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. [Table 1]

三唾化合物 含有敵基之局 分子化合物 熱交聯劑 圖案側面 之平滑性 絕緣性 抗龜裂性 耐鍍敷性 種類 含量 (wt%) .實例1 Τ-1 1.7 Β·1 YDF-170 ο 〇Δ 〇Δ ο 實例2 Τ-1 1.7 Β-2 YDF-170 ο ◎ 〇Δ ◎ 貫例3 Τ-1 1.7 Β-3 YDF-170 ο ο ο ο 實例4 Τ-1 1.7 Β-4 YDF-170 0 ο ◎ ◎ 實例5 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ 實例6 Τ-3 1.7 Β-4 YDF-170 0 ο ◎ ◎ .實例7 Τ-4 1.7 Β-4 YDF-170 ο ο ο ◎ 實例8 Τ-2 3.0 Β-4 YDF-170 ο ◎ ◎ ◎ 實喊?~1 Τ-2 1.7 Β-4 OXBP 〇Α ο 〇Δ ◎ 實例10 Τ-2 1.7 BA BL3175 〇Δ 〇△ ◎ ◎ _實例11 Τ-2 1.7 Β-4 YSLV-120TE 〇 ◎ ο ◎ 實例12 Τ-1 1.7 Β-5 YDF-170 ο ο 〇 〇 比較例1 - - Β-1 • Δ X X X 比較例2 - - Β-1 YDF-170 Δ Δ Δ ο —比較例—3 - - Β-1 YDF-170 Δ 〇Δ X 〇 此牧例4 Τ-Ζ 1.7 Β-1 YDF-170 Δ 〇Δ ο Δ 十匕投例5 1.7 Β-1 - 〇Δ Δ X X 其中,於表1中,三唑化合物之含量(wt%)是相對 於感光性組成物塗佈液之固形物的含量。 、實例1〜實例12成為絕緣性、耐鍍敷性、圖案侧面之 性、及抗龜裂性優異之結果。於使用化合物τ_2作為 —唑化合物之情形時,成為絕緣性非常優異之結果。而且, 於使用Β-4、亦即酸改質含有乙烯性不飽和基之聚胺基曱 酸酉旨樹脂作為含魏基之高分子化合物之情形時,成為抗 79 201235781 41436pif 龜裂性優異之結果。而且,於 =為熱交聯劑之.叫成為圖案::== 於比較例1中,與實例相比 圖荦側面之孚、、典a ° 、、€緣性、耐鍍敷性、 於不含三魏合物之比較例2中,與二=… 絕緣性、圖案側面之平滑性、及抗龜裂性差。 σ -離子捕捉劑之比較例3中,與實例相比而 吕’雖然耐職性為同等程度,但圖案側 抗龜裂性非常差。 卞生左 —於使用1,2,4-三唑作為三嗤化合物之比較例4中,與 貫例相比而言,圖案側面之平滑性、耐鍍敷性差。 於不含熱交聯劑之比較例5中,成為絕緣性、抗龜裂 性、耐鍍敷性差之結果。 於實例1〜實例12中圖案側面之平滑性提高,這是比 較例1〜比較例4中無法獲得之效果,且是於感光性組成 物中使用三唑化合物之先前技術中亦未知之效果。 本發明之態樣例如可列舉以下之態樣。 &lt;1&gt; 一種感光性組成物,其特徵在於含有:具有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者與 三嗤環的化合物、聚合性化合物、光聚合起始劑、熱交聯 劑。 &lt;2&gt;如上述&lt;1&gt;所述之感光性組成物,其進一步含有 含羧基之高分子化合物。 201235781 &lt;3&gt;如上述&lt;2&gt;所述之感光性組成物’其中,含有羧 基之高分子化合物是酸改質含有乙烯性不飽和基之聚胺基 甲酸酯樹脂。 &lt;4&gt;如上述&lt;1&gt;至&lt;3&gt;中任一項所述之感光性組成 物’其中’熱交聯劑是具有選自環狀醚基、嵌段異氰酸酯 基、噁唑基、及碳酸乙二酯基之至少一種官能基的化合物。 &lt;5&gt;如上述&lt;1&gt;至&lt;4&gt;中任一項所述之感光性組成 物’其中’具有可與自由基反應之基及可與熱交聯劑反應 之基的至少任一者與三唑環的化合物是下述通式(〗)所表 示之化合物; [化 19] r 1The tri-salt compound contains the surface of the thermal crosslinking agent pattern of the molecular compound of the enemy group. The insulating insulating crack resistance plating resistance content (wt%). Example 1 Τ-1 1.7 Β·1 YDF-170 ο 〇 Δ 〇Δ ο Example 2 Τ-1 1.7 Β-2 YDF-170 ο ◎ 〇Δ ◎ Example 3 Τ-1 1.7 Β-3 YDF-170 ο ο ο ο Example 4 Τ-1 1.7 Β-4 YDF-170 0 ο ◎ ◎ Example 5 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ Example 6 Τ-3 1.7 Β-4 YDF-170 0 ο ◎ ◎ . Example 7 Τ-4 1.7 Β-4 YDF-170 ο ο ο ◎ Example 8 Τ-2 3.0 Β-4 YDF-170 ο ◎ ◎ ◎ 实 叫?~1 Τ-2 1.7 Β-4 OXBP 〇Α ο 〇Δ ◎ Example 10 Τ-2 1.7 BA BL3175 〇Δ 〇△ ◎ ◎ _ Example 11 Τ-2 1.7 Β-4 YSLV-120TE 〇◎ ο ◎ Example 12 Τ-1 1.7 Β-5 YDF-170 ο ο 〇〇Comparative Example 1 - - Β-1 • Δ XXX Comparative Example 2 - - Β-1 YDF-170 Δ Δ Δ ο - Comparative Example - 3 - - Β-1 YDF-170 Δ 〇 Δ X 〇 This burial example 4 Τ-Ζ 1.7 Β-1 YDF-170 Δ 〇Δ ο Δ Example 5 1.7 Β-1 - 〇Δ Δ XX wherein, in Table 1, the content (wt%) of the triazole compound is relative to photosensitivity The content of the solid matter of the composition coating liquid. Examples 1 to 12 were excellent in insulation properties, plating resistance, pattern side properties, and crack resistance. When the compound τ_2 is used as the azole compound, it is a very excellent insulating property. Further, when yt-4, that is, an acid-modified polyamino phthalic acid-containing resin containing an ethylenically unsaturated group, is used as a polymer compound containing a Wei group, it is excellent in anti-79 201235781 41436pif cracking property. result. Moreover, in = is a thermal crosslinking agent. It is called a pattern::== In Comparative Example 1, compared with the example, the side of the figure, the a °, the a, the plating, the plating resistance, In Comparative Example 2 containing no triad, the insulation properties, the smoothness of the side of the pattern, and the crack resistance were inferior. In Comparative Example 3 of the σ-ion trapping agent, compared with the example, although the workability was the same, the pattern side crack resistance was very poor. In the comparative example 4 in which 1,2,4-triazole was used as the triterpene compound, the smoothness and plating resistance of the pattern side surface were inferior compared with the conventional example. In Comparative Example 5 containing no thermal crosslinking agent, it was found to be inferior in insulation, crack resistance, and plating resistance. The smoothness of the side surface of the pattern in Examples 1 to 12 was improved, which was an effect which could not be obtained in Comparative Examples 1 to 4, and was not known in the prior art in which a triazole compound was used in the photosensitive composition. Examples of the aspect of the invention include the following aspects. &lt;1&gt; A photosensitive composition comprising at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, a compound of a triterpene ring, a polymerizable compound, and light Polymerization initiator, thermal crosslinking agent. The photosensitive composition according to the above <1>, which further contains a carboxyl group-containing polymer compound. The photosensitive composition of the above-mentioned <2>, wherein the polymer compound containing a carboxyl group is an acid-modified polyurethane resin containing an ethylenically unsaturated group. The photosensitive composition of any one of the above-mentioned <1> to <3> wherein the thermal crosslinking agent is selected from the group consisting of a cyclic ether group, a blocked isocyanate group, and an oxazolyl group. And a compound of at least one functional group of an ethylene carbonate group. The photosensitive composition 'in any one of the above-mentioned <1> to <4>, which has a group reactive with a radical and a group reactive with a thermal crosslinking agent, is at least any one of the above-mentioned <1> to &lt;4&gt; The compound of one and the triazole ring is a compound represented by the following formula (〖); [Chem. 19] r 1

X+Y L」η通式⑴ 其中,於所述通式(I)中,X表示三吐環;Υ表示具 有可與自由基反應之基及可與熱交聯劑反應之基的至少任 一者之有機基;η表示1〜3之整數;另外,於η為2〜3 時’ Υ可相同亦可不同。 &lt;6&gt;如上述〈5&gt;所述之感光性組成物,其中,通式(〇 中之Υ是下述通式(II)所表示之基; [化 20] Y】f Ζ! mr、 、J 通式(II) 81 201235781 «mjopif 其中’於所述通式(II)中,Yi表示碳數為2〜25之 m+1價有機基;2!表示羧基·、丙烯醯氧基、及曱基丙烯醯 氧基之任一者;m表示1〜2之整數;另外,於m為2時, Ζι可相同亦可不同。 &lt;7&gt;如上述&lt;1&gt;至&lt;6&gt;中任一項所述之感光性組成 物,其中,熱交聯劑是具有環氧乙烷基之化合物。 &lt;8&gt; —種感光性抗焊劑組成物,其特徵在於含有如上 述&lt;1&gt;至&lt;7&gt;中任一項所述之感光性組成物。 &lt;9&gt; 一種感光性抗焊劑膜,其特徵在於包含:支撐 體,感光層,於該支撐體上積層如上述&lt;8&gt;所述之感光性 抗焊劑組成物而成。 &lt;10&gt; —種永久圖案形成方法,其特徵在於將如上述 &lt;8&gt;所述之感光性抗焊劑組成物塗佈於基體之表面上,加 以乾燥而積層感光層而形成積層體之後,進行曝光後進行 顯影。 &lt;11&gt; 一種永久圖案,其特徵在於其是藉由如上述 &lt;10&gt;所述之永久圖案形成方法而形成。 &lt;12&gt; 一種印刷基板,其特徵在於藉由如上述&lt;10&gt;所 述之永久圖案形成方法而形成有永久圖案。 [產業上之可利用性] 本發明之感光性組成物可獲得絕緣性、耐鍍敷性、圖 案侧面之平滑性優異之高性能之硬倾,®此可適宜地用 於抗焊劑中。 本發明之感光性抗焊劑膜可適宜地用於保護膜、層間 82 201235781 414iOpii 絕緣膜、抗焊圖案等永久圖案等之各種圖案形成’彩色濾 光片、柱材、肋材、間隔物、隔板等液晶結構部件之製造, 全像片、微機器、打樣機之製造等中,特別是讦適宜地用 於印刷基板之永久圖案形成用途中。 本發明之圖案形成方法使用了所述感光性組成物,因 此可適宜地用於保護膜、層間絕緣膜、抗焊圖案等永久圖 案等之各種圖案形成用途,彩色濾光片、柱材、肋材、間 隔物、隔板等液晶結構部件之製造,全像片、微機器、打 樣機之製造等中,特別是矸適宜地用於印刷基板之永久圖 案形成中。 【圖式簡單說明】 益。 【主要元件符號說明】 益。X+YL"η Formula (1) wherein, in the above formula (I), X represents a three-oxime ring; Υ represents at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent. The organic group; η represents an integer of 1 to 3; and when η is 2 to 3, 'Υ may be the same or different. <6> The photosensitive composition according to the above <5>, wherein the formula (the oxime in the oxime is a group represented by the following formula (II); [Chem. 20] Y] f Ζ! mr, J Formula (II) 81 201235781 «mjopif where 'in the above formula (II), Yi represents an m+1 valent organic group having a carbon number of 2 to 25; 2! represents a carboxyl group, a propylene fluorenyl group, And any one of a mercapto acryloxy group; m represents an integer of 1 to 2; and when m is 2, Ζι may be the same or different. &lt;7&gt;&lt;1&gt; to &lt;6&gt; The photosensitive composition according to any one of the invention, wherein the thermal crosslinking agent is a compound having an oxirane group. &lt;8&gt; A photosensitive resist composition which is characterized by containing the above &lt;1&gt; The photosensitive composition according to any one of <7>. <9> A photosensitive solder resist film comprising: a support, a photosensitive layer, and a layer deposited on the support as described above &lt; The photosensitive resist composition of the above-mentioned <10>, which is characterized in that the photosensitive resist group according to the above &lt;8&gt; The object is applied onto the surface of the substrate, dried, and the photosensitive layer is laminated to form a layered body, and then exposed and developed. <11> A permanent pattern characterized by being as described above in &lt;10&gt; The printed circuit board is characterized in that a permanent pattern is formed by the permanent pattern forming method according to the above &lt;10&gt; [Industrial Applicability] The present invention is formed. The photosensitive composition can obtain a high-performance hard tilt which is excellent in insulation property, plating resistance, and smoothness of the side surface of the pattern, and can be suitably used in a solder resist. The photosensitive solder resist film of the present invention can be suitably used. Various patterns such as protective film and interlayer 82 201235781 414iOpii insulating film and permanent pattern such as solder resist pattern are used to form liquid crystal structural components such as color filters, pillars, ribs, spacers, and spacers. In the manufacture of micromachines, proofing machines, and the like, in particular, it is suitably used for permanent pattern forming applications of printed boards. The pattern forming method of the present invention uses the photosensitivity. Therefore, it can be suitably used for various pattern forming applications such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, and a liquid crystal structural member such as a color filter, a pillar, a rib, a spacer, or a spacer. Manufacturing, hologram, micro-machine, proofing machine manufacturing, etc., in particular, is suitable for permanent pattern formation of printed substrates. [Simplified description of the drawing] Benefits. [Main component symbol description] Benefit.

Claims (1)

201235781 41436pif 七、申請專利範圍: 1. 一種感光性組成物,其特徵在於含有:具有可與自 由基反應之基及可與熱交聯劑反應之基的至少任一者與三 唑環的化合物、聚合性化合物、光聚合起始劑、以及熱交 聯劑。 2. 如申請專利範圍第1項所述之感光性組成物,更含 有含叛基之南分子化合物。 3·如申請專利範圍第1項所述之感光性組成物,其中 含有緩基之高分子化合物是酸改質含有乙婦性不飽和基之 聚胺基曱酸g旨樹脂。 4. 如申請專利範圍第1項所述之感光性組成物,其中 熱交聯劑是具有選自環狀醚基、嵌段異氰酸酯基、噁唑基、 及碳酸乙二酯基之至少一種官能基的化合物。 5. 如申請專利範圍第1項所述之感光性組成物,其中 具有可與自由基反應之基及可與熱交聯劑反應之基的至少 任一者與三唑環的化合物是下述通式(I)所表示之化合物; [化1]201235781 41436pif VII. Patent Application Range: 1. A photosensitive composition characterized by comprising: a compound having a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring , a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 2. The photosensitive composition as described in claim 1 of the patent application further contains a compound containing a rebel base. 3. The photosensitive composition according to claim 1, wherein the polymer compound containing a slow-radical group is a polyamine-based citric acid-containing resin having an acid-modified ethylenically unsaturated group. 4. The photosensitive composition according to claim 1, wherein the thermal crosslinking agent is at least one member selected from the group consisting of a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Base compound. 5. The photosensitive composition according to claim 1, wherein the compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a triazole ring is as follows a compound represented by the formula (I); [Chemical Formula 1] 通式(I) 其中,於所述通式(I)中,X表示三唑環;Y表示具 有可與自由基反應之基及可與熱交聯劑反應之基的至少任 一者之有機基;η表示1〜3之整數;另外,於η為2〜3 84 201235781 4i4ibpif 時,y可相同亦可不同。 6.如申w專利範圍第5項所述之感光性組成物,其 中,通式(I)中之Υ是下述通式(11)所表示之基; [化2] 通式(II) 其中,於所述通式(H)中,表示碳數為2〜25之 m+1價有機基;示羧基、丙烯醯氧基、及曱基丙稀醯 氧基之任一者;m表示1〜2之整數;另外,於m為2時, Zi可相同亦可不同。 7. 如申請專利範圍第i項所述之感光性組成物,其 中,熱交聯劑是具有環氧乙烷基之化合物。 8. —種感光性抗焊劑組成物,其特徵在於含有感光性 組成物’所述感光性組成物含有具有可與自由基反應之基 及叮與熱父聯劑反應之基的至少任一者與三β坐環的化合 物、聚合性化合物、光聚合起始劑、以及熱交聯劑。 9. 一種感光性抗焊劑膜,其特徵在於包含: 支撐體; 感光層’於該支撐體上積層含有如下感光性組成物的 感光性抗焊劑組成物而成,所述感光性組成物含有具有可 與自由基反應之基及可與熱交聯劑反應之基的至少任一者 與三唑環的化合物、聚合性化合物、光聚合起始劑、熱交 聯劑。 85 201235781 41436pif 10.-種永久圖案形成方法’其特徵在於將含有如下 感光性組成物的感光性I几焊劑組成物塗佈於基體之表面 上,加以乾燥而積層感光層而形成積層體之後,進行曝光 後進行顯影,所述感光性組成物含有具有可與自由基反應 之基及可與熱父聯劑反應之基的至少任一者與三β坐環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑。 11· 一種永久圖案,其特徵在於其是藉由如下之永久 圖案升&gt; 成方法而形成’所述永久圖案形成方法是將含有如 下感光性組成物的感光性抗焊劑組成物塗佈於基體之表面 上,加以乾燥而積層感光層而形成積層體之後,進行曝光 後進行顯影,所述感光性組成物含有具有可與自由基反麻 之基及可與熱交聯劑反應之基的至少任一者與三唾環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑。 12. —種印刷基板’其特徵在於藉由如下之永久圖案 形成方法而形成有永久圖案,所述永久圖案形成方法是將 含有如下感光性組成物的感光性抗焊劑組成物塗佈於基體 之表面上’加以乾燥而積層感光層而形成積層體之後,進 行曝光後進行顯影,所述感光性組成物含有具有可與自由 基反應之基及可與熱交聯劑反應之基的至少任一者與三0坐 私·的化合物、聚合性化合物、光^合起始劑、熱交聯齊|J。 86 201235781 414^6pit 四、 指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件符號簡單說明: 無。 五、 本案若有化學式時,請揭示最能顯示發明特徵 的化學式: 無0 201235781 -Γ X 1 爲第101104021號中文說明書無劃線修正本 修正日期:101年5月10日 釐jg專利說明書 ※記號部分請勿填寫) (本說明書格式、順序,請勿任意更動 分類:' 1/ls ※申請案號:以 ※申請曰: ρ (Ά H°^K (2〇〇-^ϊ) 一、發明名稱:(中文/英文) „ ,.上,, C〇Sl Ί^/n,91) 感光性組成物、感光性抗焊劑組成物及感光性抗焊劑 膜以及永久圖案、其形成方法與印刷基板 〇 PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE SOLDER RESIST COMPOSITION, PHOTOSENSITIVE SOLDER RESIST FILM, PERMANENT PATTERN, PERMANENT PATTERN FORMING METHOD AND PRINTED BOARD 二、中文發明摘要: 一種感光性組成物’其含有:具有可與自由基反應之 基及可與熱交聯劑反應之基的至少任一者與三哇環的化合 物、聚合性化合物、光聚合起始劑、熱交聯劑。較佳的是 進一步含有含羧基之高分子化合物。較佳的是含有羧基之 高分子化合物為酸改質含有乙烯性不飽和基之聚胺基甲酸 醋樹脂。 三、英文發明摘要: A photosensitive composition contains a compound having a triazole ring and at least one of a group capable of 201235781 &quot;Ύ X χ 修正日期:1〇1年5月10曰 爲第1011(Μ621號中文說明書無劃線修正本 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種可適宜地用於抗焊劑等中之感光 性組成物、使用該感光性組成物之感光性抗焊劑組成物及 使用δ亥感光性抗焊劑組成物之感光性抗焊劑膜、以及离精 細之永久圖案(保護膜、層間絕緣膜、抗焊劑等)、豆 方法及印刷基板。 '、y 【先前技術】 近年來,電子機n以行動通信_為代表而要求小 型、薄型、輕量以及高性能、高功能、高品質、高可靠性, 於此種電子機器中所搭載之電子零件模 型、高密度化。對於此種要求,近年來用於 的基板正從陶瓷配線基板逐漸變成所謂之印刷基板,所述 陶曼配線基板是以氧她魏賴m為原材料,所述 印刷基板是在絕緣基板之表面上,使用作為低電阻金屬之 銅或金等,藉㈣_成法而形成有配線導體層,所述絕 ,基板包含能魏-步實現輕量化、高贿化之玻璃纖維 Ά祕脂。而且’該印刷基板亦逐漸向更能實現高密度 配線化之增層(buildup)配線基板轉變。 此種增層配線基板例如可藉由如下方式而製作:於包 含玻璃纖維與環㈣脂之絕縣板上層壓包含孰硬化性樹 月旨之膜’進行熱硬化而形成絕緣層,其後藉由二氧化石炭雷 ί於其上穿設開口’然後對絕緣層表面進行化學粗化,使 用無電鑛銅法及電解鍍銅法而覆層形成峨,藉此於開口 修正日期:101年5月10日In the formula (I), X represents a triazole ring; and Y represents an organic group having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent. η represents an integer of 1 to 3; in addition, when η is 2 to 3 84 201235781 4i4ibpif, y may be the same or different. 6. The photosensitive composition according to claim 5, wherein the oxime in the formula (I) is a group represented by the following formula (11); [Chemical Formula 2] Formula (II) Wherein, in the above formula (H), an m+1-valent organic group having a carbon number of 2 to 25; any of a carboxyl group, an acryloxy group, and a mercaptopropyloxy group; m represents An integer of 1 to 2; in addition, when m is 2, Zi may be the same or different. 7. The photosensitive composition of claim i, wherein the thermal crosslinking agent is a compound having an oxirane group. 8. A photosensitive solder resist composition characterized by comprising a photosensitive composition, wherein said photosensitive composition contains at least one of a group reactive with a radical and a group reactive with a hot parent. A compound having a tri-β ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. A photosensitive solder resist film comprising: a support; a photosensitive layer 'separated on the support, comprising a photosensitive resist composition containing a photosensitive composition, wherein the photosensitive composition contains At least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, a compound of a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 85 201235781 41436pif 10. A permanent pattern forming method is characterized in that a photosensitive I composition containing a photosensitive composition is applied onto a surface of a substrate, dried, and a photosensitive layer is laminated to form a laminate. Development is carried out after exposure, and the photosensitive composition contains at least one of a group reactive with a radical and a group reactive with a hot parent agent, and a compound of a tri-β ring, a polymerizable compound, and photopolymerization. Starting agent, thermal crosslinking agent. 11. A permanent pattern characterized in that it is formed by a permanent patterning method according to the following method. The permanent pattern forming method is a method of applying a photosensitive solder resist composition containing a photosensitive composition to a substrate. On the surface, after drying and laminating a photosensitive layer to form a layered body, development is carried out after exposure, and the photosensitive composition contains at least a radical reactive with a radical and a base reactive with a thermal crosslinking agent. Any of the compounds with a tri-salt ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 12. A printed circuit board characterized by forming a permanent pattern by a permanent pattern forming method of applying a photosensitive solder resist composition containing a photosensitive composition to a substrate On the surface, after drying, a photosensitive layer is formed to form a laminate, and then developed, and the photosensitive composition contains at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent. The compound, the polymerizable compound, the photo-initiator, and the thermal cross-linking|| 86 201235781 414^6pit IV. Designated representative map: (1) The representative representative of the case is: None. (2) A brief description of the component symbols of this representative figure: None. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: No 0 201235781 -Γ X 1 is the 101104021 Chinese manual without a slash correction. Amendment date: May 10, 2011 PCT specification Do not fill in the mark) (The format and order of this manual, please do not change the classification: ' 1/ls ※Application number: Apply by ※曰: ρ (Ά H°^K (2〇〇-^ϊ) Title: (Chinese / English) „ ,.上,, C〇Sl Ί^/n, 91) Photosensitive composition, photosensitive solder resist composition and photosensitive solder resist film and permanent pattern, forming method and printing thereof Substrate 〇PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE SOLDER RESIST COMPOSITION, PHOTOSENSITIVE SOLDER RESIST FILM, PERMANENT PATTERN, PERMANENT PATTERN FORMING METHOD AND PRINTED BOARD II. Abstract: A photosensitive composition 'containing: having a base reactive with free radicals and At least one of the groups reactive with the thermal crosslinking agent and the compound of the tri-wax ring, the polymerizable compound, the photopolymerization initiator, the thermal crosslinking agent It is preferable to further contain a polymer compound having a carboxyl group. Preferably, the polymer compound containing a carboxyl group is an acid-modified polyaminocarbamic acid resin containing an ethylenically unsaturated group. III. English Abstract: A photosensitive Composition contains a compound having a triazole ring and at least one of a group capable of 201235781 &quot;Ύ X χ Amendment date: May 1st, 1st, 10th, 10th, 11th (No. 621, Chinese manual, no slash correction, sixth, invention [Technical Field] The present invention relates to a photosensitive composition which can be suitably used in a solder resist or the like, a photosensitive solder resist composition using the photosensitive composition, and a photosensitive resist Photosensitive solder resist film of flux composition, and fine pattern (protective film, interlayer insulating film, solder resist, etc.), bean method, and printed substrate. ', y [Prior Art] In recent years, electronic machine n has acted Communication _ is representative of small, thin, lightweight and high performance, high functionality, high quality, high reliability, in such an electronic machine The electronic component model mounted on the device is high in density. In response to such a demand, the substrate used in recent years is gradually changing from a ceramic wiring substrate to a so-called printed substrate, which is made of oxygen weiwei m, which is on the surface of the insulating substrate. A wiring conductor layer is formed by using a copper or gold as a low-resistance metal, and the substrate includes a glass fiber Ά secret grease capable of achieving weight reduction and high brittleness. Further, the printed circuit board is gradually transitioning to a buildup wiring substrate which is more capable of achieving high-density wiring. Such a build-up wiring board can be produced, for example, by laminating a film comprising a ruthenium-curable resin layer on a board containing a glass fiber and a ring (tetra) grease, and thermally curing the film to form an insulating layer. The surface of the insulating layer is chemically roughened by the opening of the carbon dioxide carbon dioxide, and the surface of the insulating layer is formed by the electroless copper plating method and the electrolytic copper plating method, thereby correcting the opening date: May, 101 10th 201235781 τ 1 -ry 爲第1011〇4621號中文說明書無劃線修正本 内形成導體層且於絕緣層表面形成配線導體層,進而反覆 進行此種絕緣層與配線導體層之形成。 而且’為了防止配線導體狀氧化或腐仙及保護絕 緣層免受於配、縣板上縣電子零件時之熱的影響,於配 線基板之表面覆層形成有厚度為2〇 μιη〜5〇㈣之抗焊劑 2。該抗焊騎-般情町包含與輯導體層及絕緣層之 雄、接性良好祕可溶性歧祕_、具有可撓性之樹 2,為了使熱膨脹餘與絕緣層或配線導體層之熱膨脹係 數匹配而含有5 wt%〜75 wt%之無機填充劑。 然而’作為該抗焊劑層,在—般情況下,所含有之驗 可溶性光交聯性樹脂為了在以曝光及顯影而於抗焊劑層形 成開口時表現出顯影性而含有經基或縣,因此存在如下 之問題:吸水率高而緩緩地吸收空氣中之水分,該水分使 抗焊劑層之絕緣t阻降低至_以下而使配線導體層間 ^路’另外該水分對配線導體層造成腐钱,其結果使配線 基板之電氣可靠性劣化。 已知有使抗焊劑層含有含氮雜環化合物(咪唑化合 ^、三哇化合物等)之技術。若使用該技術,軸抗焊^ 曰之耐熱性變向,但存在雜敷(plating)性降低之問題。 而且若光阻圖案之側面的平滑性差,則於進行烊接 時’於焊料與光阻圖案側面之間產生空隙,該空隙由於加 熱而膨脹’從而產生焊料剝落等異常,於上述技術中存 光阻圖案侧面之平滑性並不充分之問題。 而且,作為於感光性組成物中使用三唑化合物之技 5 201235781 T A Vfpii 丄 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月1〇日 術’提出了含有如下化合物之感光性組成物:含有幾基之 高分子黏合劑、於分子中具有平均至少一個乙烯性不飽和 雙鍵及平均至少一個三唑環之化合物、可光聚合之單體、 及光聚合起始劑(例如參照曰本專利特開平6_43638號公 報)。 藉由該提案之技術,雖然顯影殘留得到抑制、獲得密 接性良好之組成物,但於該提案之技術中存在如下之問 題:無法獲得抗焊劑層所要求之絕緣性、耐鏟敷性、及光 阻圖案侧面之平滑性。 因此’現狀是要求提供絕緣性、耐鑛敷性、及光阻圖 案側面之平滑性優異之感光性組成物。 【發明内容】 本發明之課題在於解決先前之所述諸問題,達成以下 之f的。亦即’本伽之目的在於提供絕緣性、耐鑛敷性、 及光阻圖案側面之平滑性優異之感光性組成物。 用以解決所述課題之方法如下所示。亦即,本發明之 感光性組祕之雜在於対: I 及可與熱交聯劑反應之基的至少任一者自 物、聚合性化合物、光聚人的化口 [發明的效果] 起始制、熱交聨劑。 的,先前之所述諸問題,達成所述目 優異之感光性組成物。及先阻圖案側面之平滑性 【實施方式】 201235781 -τ ί -r^v/pj.il 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 (感光性組成物) 本發明之感光性組成物至少含有具有可與自由基反應 之基及可與熱交聯劑反應之基的至少任一者與三嗤環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑,較佳的 是含有含叛基之高分子化合物,進一步視需要而含有其他 成分。 &lt;具有可與自由基反應之基及可與熱交聯劑反應之基 0 的至少任一者與三嗤環的化合物&gt; 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與三唑環的化合物,如果是具有可與 自由基反應之基及可與熱交聯劑反應之基之至少任一者與 二°坐環的化合物,則並無特別限制,可視需要而適宜選擇。 所述可與自由基反應之基例如可列舉丙烯醯氧基、曱 基丙烯醯氧基(methacryl〇yl〇xy)、乙烯基苯基、烯丙基 (allyl)等。 所述可與熱交聯劑反應之基例如可列舉竣基、胺基、 ❹巯基等。 土 所述三唑環可為1,2,3-三唑環及1,2,4_三唑環之任一 者。 1,2,3-三唑及1,2,4-三唑是下述結構式所表示之化合 物。 7 201235781 Τ 1 A 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月1〇日 [化1] HIST、 Μηντ^ν 132,3-三嗤 1,234•三唾 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唑環的化合物,換言之,是具有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者之 有機基鍵結於三唑環上的化合物。所述有機基於所述三唑 %上之鍵結位置並無特別限制,可視需要而適宜選擇,可 與所述三唑環之氮原子鍵結,亦可與碳原子鍵結。 所述具有可與自由基反應之基及可與熱交聯劑反應之 基的至少任一者與三唾環的化合物較佳的是下述通式(工) 所表示之化合物。 [化2] X 广 、 -Υ η 通式(I) 其中,於所述通式(U中,χ表示三唑環。γ表示具 可與自由基反應之基及可與熱交聯劑反應之基之至少任 201235781 爲第101104621號中文說明書無劃線修正本 修正日期:101年s n 飞' 3月10日 一者的有機基。η表示1〜3之整數。另外,於n為2〜3 時,Y可相同亦可不同。 一另外,於所述通式(Ϊ)中,所述γ可與作為所述X 之三唑環之氮原子鍵結,亦可與碳原子鍵結。 所述通式(1)中之η較佳的是1〜2,更佳的是2。 述η若為2,則於絕緣性方面有利。 所述通式(I)中之Υ較佳的是下述通式(π)所表八 ◎ 之基。 不 [化3] 一 通式(II) 其中,於所述通式(11)中,Y1表示碳數為2〜25 m+Ι價有機基。4表稍基、㈣醯氧基及曱基兩歸201235781 τ 1 -ry is the Chinese manual No. 1011〇4621. The wiring layer is formed on the surface of the insulating layer without forming a scribe line, and the formation of the insulating layer and the wiring conductor layer is repeated. Moreover, in order to prevent the wiring conductor from being oxidized or rotted and protecting the insulating layer from the heat of the electronic components of the distribution board, the surface of the wiring substrate is formed to have a thickness of 2 μm to 5 〇 (4). Anti-flux 2 The solder-resistant riding-like-like town contains the conductor layer and the insulating layer, and has a good compatibility. The flexible tree 2 is used to match the thermal expansion coefficient of the thermal expansion to the insulating layer or the wiring conductor layer. It contains 5 wt% to 75 wt% of an inorganic filler. However, in the case of the solder resist layer, the soluble photocrosslinkable resin is generally contained in order to exhibit developability in forming an opening in the solder resist layer by exposure and development, and therefore contains a base or a county. There is a problem that the water absorption rate is high and the moisture in the air is gradually absorbed, and the moisture causes the insulation t resistance of the solder resist layer to be reduced to _ or less, and the wiring conductor layer is further connected to the wiring conductor layer. As a result, the electrical reliability of the wiring board is deteriorated. A technique in which a solder resist layer contains a nitrogen-containing heterocyclic compound (imidazole compound, tri-waxy compound, etc.) is known. When this technique is used, the heat resistance of the shaft welding resistance is changed, but there is a problem that the plating property is lowered. Further, when the smoothness of the side surface of the photoresist pattern is poor, a gap is formed between the solder and the side surface of the photoresist pattern when the splicing is performed, and the void expands due to heating, thereby causing an abnormality such as solder peeling, which is stored in the above technique. The smoothness of the side of the resist pattern is not sufficient. Moreover, as a technique for using a triazole compound in a photosensitive composition, the following description is given on the Japanese version of the Japanese Patent No. 101104621. Photosensitive composition: a polymer binder containing several groups, a compound having an average of at least one ethylenically unsaturated double bond in the molecule and an average of at least one triazole ring, a photopolymerizable monomer, and a photopolymerization initiation For example, refer to Japanese Laid-Open Patent Publication No. Hei 6-43638. According to the technique of the proposal, although the development residue is suppressed and a composition having good adhesion is obtained, the technique of the proposal has the following problems: the insulation required for the solder resist layer, the scratch resistance, and Smoothness of the side of the photoresist pattern. Therefore, the current state of the art is to provide a photosensitive composition excellent in insulation, mineralization resistance, and smoothness on the side of the photoresist pattern. SUMMARY OF THE INVENTION An object of the present invention is to solve the problems described above and achieve the following. That is, the purpose of the present invention is to provide a photosensitive composition excellent in insulation, mineralization resistance, and smoothness of the side surface of the photoresist pattern. The method for solving the problem is as follows. That is, the photosensitive group of the present invention is complicated by the fact that at least one of the groups which can react with the thermal crosslinking agent, the polymerizable compound, and the photopolymerization port [effect of the invention] Start-up, hot-crossing agent. The problems described above have achieved the excellent photosensitive composition of the above-mentioned purpose. And the smoothness of the side of the first-resistance pattern [Embodiment] 201235781 -τ ί -r^v/pj.il For the Chinese manual No. 101104621, there is no slash correction. This revision date: May 10, 101 (photosensitive composition) The photosensitive composition of the present invention contains at least one of a compound having a group reactive with a radical and a group reactive with a thermal crosslinking agent, a compound of a triterpene ring, a polymerizable compound, a photopolymerization initiator, and a heat. The crosslinking agent preferably contains a polymer compound containing a rebel group, and further contains other components as needed. &lt;Compound having at least one of a group reactive with a radical and a group capable of reacting with a thermal crosslinking agent with a triterpene ring&gt; as a group capable of reacting with a radical and capable of reacting with heat a compound of at least one of the group of the crosslinking reaction and a compound of the triazole ring, if it is a compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a two-degree ring, There is no particular restriction, and it is suitable to be selected as needed. Examples of the group reactive with a radical include a propylene methoxy group, a methacryl 〇 〇 oxy group, a vinyl phenyl group, an allyl group, and the like. Examples of the group reactive with the thermal crosslinking agent include a mercapto group, an amine group, a mercapto group and the like. The triazole ring may be any of a 1,2,3-triazole ring and a 1,2,4-triazole ring. 1,2,3-triazole and 1,2,4-triazole are compounds represented by the following structural formulas. 7 201235781 Τ 1 A is the Chinese manual No. 101104621. There is no slash correction. This revision date: May 1st, 101st, 2011 [Chem. 1] HIST, Μηντ^ν 132, 3-Three 嗤 1,234 • Three saliva a compound reactive with a radical and at least one of a group reactive with a thermal crosslinking agent and a compound of a triazole ring, in other words, a group reactive with a radical and reacting with a thermal crosslinking agent At least one of the organic groups is bonded to a compound on the triazole ring. The bonding position of the organic compound based on the triazole is not particularly limited, and may be appropriately selected as needed, and may be bonded to a nitrogen atom of the triazole ring or may be bonded to a carbon atom. The compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a tris-cycline is preferably a compound represented by the following formula (manufacture). X 广, -Υ η General formula (I) wherein, in the general formula (U, χ represents a triazole ring. γ represents a group reactive with a radical and can react with a thermal crosslinking agent. At least 201235781 is the 101104621 Chinese manual without a slash correction. This correction date: 101 years sn fly 'April 10th's organic base. η represents an integer from 1 to 3. In addition, n is 2~ In the case of 3, Y may be the same or different. Further, in the above formula (Ϊ), the γ may be bonded to a nitrogen atom as the X-triazole ring or may be bonded to a carbon atom. The η in the above formula (1) is preferably from 1 to 2, more preferably 2. If η is 2, it is advantageous in terms of insulation. The oxime in the formula (I) is preferred. It is a group of the following formula (π), which is represented by the following formula (π): No (Chemical Formula 3) Formula (II) wherein, in the above formula (11), Y1 represents a carbon number of 2 to 25 m+ valence organic Base. 4 table slightly base, (d) decyloxy and thiol 基之任-者。m表示卜2之整數。另外,於 ; 厶可相同亦可不同。 勺2日f, =柄數為2〜25之m+1财機基並無特別限制 視4要而適宜選擇’例如可列舉具有腺鍵、釀胺鍵 及硫脲鍵之至少任—者的碳數為2〜25之m 』 而且,所述有機基之碳數較佳的是2〜20,更佳的是有2=/ 所述具有可與自由基反應之基及可與熱 ΓΐίΓ者與三㈣的化合物之分子量並= m要㈣宜選擇,較佳的是9〇〜丨娜,更⑽ 201235781 ~T AT^V^ll.1 爲第1011〇4621號中文說明書無劃線修正本 修正日期:101年5月10日 作為所述具有可與自由基反應之基及可與熱交聯劑反 應之基的至少任一者與 三0圭環的化合物之具體例,例如可 列舉下述式所表示之化合物等。 [化4]The foundation of the person - the person. m represents an integer of Bu 2 . In addition, ; can be the same or different. The scoop 2 day f, the number of the handles is 2 to 25, and the m+1 machine base is not particularly limited, and it is suitable to select 'for example, at least one having a gland bond, a brewing amine bond, and a thiourea bond. The carbon number is 2 to 25 m. Further, the carbon number of the organic group is preferably 2 to 20, more preferably 2 = / the group having a reactive group with a radical and a heat-reducible group The molecular weight of the compound with three (four) = m should be selected (four) should be selected, preferably 9 〇 ~ 丨 na, more (10) 201235781 ~ T AT ^ V ^ ll.1 for the 1011 〇 4621 Chinese manual without a slash correction Amendment date: May 10, 101, as a specific example of the compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a compound of a ternary ring, for example, The compound represented by the formula and the like. [Chemical 4] 201235781』 ϋ f〇1104621號中文說明書無劃線修正本 修正日期:101年5月10日 [化5]201235781』 ϋ f〇1104621 Chinese manual without line correction This revision date: May 10, 101 [Chem. 5] -具有可與自由基反應之基及可與熱交聯劑反應之基 的至少任一者與三唑環的化合物之含量_ 所述具有可與自由基反應之基及可與熱交聯劑反應之 基少任一者與三唑環的化合物於所述感光性組成物中 之含ϊ並無特別限制,可視需要而適宜選擇,相對於所述 11 201235781 爲第—0462!號中文說明書無劃線修正本 修正日期:101年5月1〇日 感光性組成物之固形物而言,較佳的是i 〇 wt%〜 wt/^’更仏的疋1.5 wt%〜10 wt%。若所述含量不足1.0 wt°/〇,則存在無法發揮充分之絕緣性之現象;若超過2〇 wt%,則存在耐熱性降低之現象。若所述含量為所述更佳 之範圍内’則於兼顧耐熱性與絕緣性之方面而言有利。 &lt;聚合性化合物&gt; 所述聚合性化合物並無特別限制,可視需要而適宜選 擇’較佳的是於分子中具有至少1個可加成聚合之基的化 合物。此種化合物更佳的是選自具有(甲基)丙烯基之單體 的至少1種。 另外,所述聚合性化合物是與所述具有可與自由基反 應之基及可與熱交聯劑反應之基的至少任一者與三唑環的 化合物不同的化合物。 所述具有(曱基)丙烯基之單體並無特別限制,可視需 要而適宜,擇’例如可列舉聚乙二醇單(曱基)丙婦酸醋、 聚丙二醇單(曱基)丙烯酸酯'(甲基)丙烯酸笨氧基乙酯等單 官能丙烯酸酯或單官能曱基丙烯酸酯;聚乙二醇二(曱基) 丙烯酸酯、聚丙二醇二(曱基)丙烯酸酯 '三羥曱基乙娱^ (曱基)丙埽酸醋、三經曱基丙烧三(甲基)丙歸‘醋:三二; 基丙烧二(曱基)丙賊醋、新戍二醇二(曱基)丙稀酸醋、季 戍四醇四(曱基)丙烯酸醋、季戊四醇三(甲基)丙稀酸醋、二 季戊四醇六(甲基)丙稀酸醋、二季戍四醇五(曱基)丙稀酸 酯、己二醇二(甲基)丙烯酸酯、二環戍基二曱醇二(曱美) 丙烯酸醋、三經甲基丙燒三(丙烯醯氧基丙基)醚、三(丙&quot;稀 12 201235781 *τ 修正日期:101年5月10曰 爲第1011〇4621號中文說明書無劃線修正本 酿氧基乙基)異氰尿酸酯、三(丙烯醯氧基乙基)氣尿酸醋、 丙三醇三(曱基)丙烯酸酯、於三羥甲基丙烷或丙三醇、雙 酚等多官能醇上加成反應環氧乙烷或環氧丙烷之後進行 (曱基)丙烯酸酯化而成者、曰本專利特公昭48_417〇8號公 報、日本專利特公昭50_6034號公報、日本專利特開昭 51_37丨93號公報等各公報中所記载之丙職胺基曱酸醋 類;日本專利特開昭48_64183號公報、日本專利特公昭 〇 49-43191號公報、日本專利特公昭52-30490號公報等之各 公報中所記載之聚酯丙烯酸酯類;作為環氧樹脂與(曱基) 丙烯酸之反應產物的環氧丙烯酸酯類等多官能丙烯酸酯或 曱基丙烯酸酯等。該些單體中更佳的是二環戊基二曱醇二 (曱基)丙烯酸醋、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四 醇四(甲基)丙烯酸酯(pentaerythrit〇1 tetra(meth)肛尔你)、 二季戊四醇六(曱基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸 酉旨。 -聚合性化合物之含量_ 所述聚合性化合物於所述感光性組成物中之含量並無 特別限制’可視需要㈣宜選擇,相對於職感光性組&amp; 物之固形物而言,較佳的是2 wt%〜5〇 wt%,更佳的是3 wt%〜40 wt%,特佳的是4 wt%〜35 wt%。所述聚合性化 合物之含量若不足2 wt%,則存在無法形成圖案之現象; 若超過50 wt%,則存在抗龜裂性差之現象。另—方面,若 所述聚合性化合物之含量為所述特佳之範圍内,則於圖案 形成性、抗龜裂性提高之方面而言有利。 13 201235781 ^ΜΗ-^υριιι _ 修正日期:1〇1年5月10日 爲第101104621號中文說明書無劃線修正本 &lt;光聚合起始劑&gt; 所述光聚合起始劑只要具有使所述聚合性化合物之聚 合開始的能力,則並热特別限制,可視需要而適宜選擇, 例如可列舉鹵代烴衍生物、氧化膦、六芳基二咪唑、肟衍 生物、有機過氧化物、硫代化合物、酮化合物、芳香族鏽 鹽、酮肟醚等。 所述_代烴衍生物例如可列舉具有三嗪骨架之鹵代烴 衍生物、具有噁二唑骨架之齒代烴衍生物等。 所述具有三嗪骨架之鹵代烴衍生物並無特別限制,可 視需要而適宜選擇,例如可列舉若林等人著、日本化學學 會通報(Bull.Chem.Soc.Japan),42、2924 (1969)中所記 載之化合物 '英國專利1388492號說明書中所記載之化^ =、日本專利特_ 53_133428號公報中所記载之化合 勿、德國專利3337G24號說明書中所記載之化合物、 ^C.Schaefer等之有機化學雜諸(J 〇rg❽咖);μ、衝 八中所記載之化合物、日本專利特開昭62_58241號 Ϊ = 日本專利特開平5-而28號公報 如有噁二唑——。10骨架之鹵代烴衍生物例 女等可列舉美國專利第4謂6號_#中所記載之化合物 所述肟(〇xime)衍生物並無特別限 且選擇,例如可列舉曰本專利特開2〇〇7卿 201235781 爲第101104621號巾文__劃線修正本 修正日期:101年5月1〇曰 落「〇〇85」中所記载之化合物等。 例如=特別限制,可視需要而適宜選擇, 2〇07·2030 特開起始劑例如可列舉曰本專利 等。 〜么報之奴洛0〇86」中所記載之化合物 Ο 度或:Ϊ波= =光層進行曝光之曝光感光 劑。 ’、斤述先起始劑以外,可添加增感 =述增感射根據後述之作為光歸手段之 或兔外光雷射、可見光雷射等而適宜選擇。 、’、 Ο 如能詈純基產劑嘴產生劑等)相互作用(例 n 電子移動等)而產生自由基或酸等有用基。 中所記载之化合物;開。7-2°3 制,戶與所述增感劑之組合並無特別限 電子型起:及:^ 素、⑴供電子型起始子型起始劑及增感色 元起始系m組合。感色素及吸電子型起始劑(三 15 201235781 4I4i〇piII 爲第101 l〇462l號中文說明書無劃線修正本 修正日期·101年5月10日 所述增感劑之含量並無特別限制,可視需要而適宜選 擇’相對於所述感光性組成物之固形物而言,較佳的是0.05 wt%〜30 wt%,更佳的是0.1 wt%〜20 wt%,特佳的是0.2 wt%〜10 wt%。所述增感劑之含量若不足〇 〇5 wt%,則存 在對活性能量線之感光度降低’曝光製程耗費時間,生產 性降低之現象;若超過30 wt%,則存在於保存時所述增感 劑自所述感光層析出之現象。- a content of a compound having a radical reactive group and a group reactive with a thermal crosslinking agent and a triazole ring - the radical reactive group and the thermally reactive crosslinking agent The ruthenium containing the compound of the triazole ring and the compound of the triazole ring in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, and is in the Chinese specification No. 0046! Straight line correction This correction date: For the solid matter of the photosensitive composition on May 1st, 101, it is preferable that i 〇 wt% 〜 wt/^' is more 疋 1.5 wt% 〜 10 wt%. When the content is less than 1.0 wt%/〇, sufficient insulating properties may not be exhibited. When the content exceeds 2% by weight, the heat resistance may be lowered. If the content is in the above-described range, it is advantageous in terms of both heat resistance and insulation. &lt;Polymerizable compound&gt; The polymerizable compound is not particularly limited, and may be appropriately selected as needed. A compound having at least one addition polymerizable group in a molecule is preferable. More preferably, such a compound is at least one selected from the group consisting of monomers having a (meth)acryl group. Further, the polymerizable compound is a compound different from the compound having at least one of a group reactive with a radical reaction and a group reactive with a thermal crosslinking agent, and a triazole ring. The monomer having a (fluorenyl) propylene group is not particularly limited, and may be appropriately selected as needed, and examples thereof include polyethylene glycol mono(indenyl) acetoacetate and polypropylene glycol mono(decyl) acrylate. Monofunctional acrylate or monofunctional decyl acrylate such as (meth)acrylic acid stupidoxyethyl acrylate; polyethylene glycol bis(indenyl) acrylate, polypropylene glycol bis(indenyl) acrylate 'trihydroxy fluorenyl乙娱乐^ (曱基) 埽 埽 vinegar, 曱 曱 丙 丙 丙 ( ( ( ( ( ( 醋 醋 醋 醋 三 三 三 三 三 三 三 三 基 基 基 基 基 基 基 基 基 基 基 基 基 基 基 基 基 基Acetate vinegar, quaternary tetraol tetra(indenyl) acrylate vinegar, pentaerythritol tris(meth) acrylate vinegar, dipentaerythritol hexa(methyl) acrylate vinegar, diquaternary quinone tetraol quinone ) acrylate, hexanediol di(meth) acrylate, dicyclodecyl decyl alcohol bis(command) acryl vinegar, trimethyl methacrylate tris (propylene oxypropyl) ether, three (C) &quot;Rare 12 201235781 *τ Amendment date: May 10, 101 is the 1011〇4621 Chinese manual without a slash correction of the oxyethyl) isocyanuric acid , tris(acryloxyethyl) uric acid vinegar, glycerol tris(mercapto) acrylate, addition reaction of polyfunctional alcohol such as trimethylolpropane or glycerol, bisphenol, etc. In the case of the propylene oxide, the (meth) acrylated product is disclosed in the publications of the Japanese Patent Publication No. Sho 48-417-8, the Japanese Patent Publication No. Sho 50-6034, and the Japanese Patent Laid-Open No. 51-37-93. The exemplified in the publications of the Japanese Patent Publication No. 48-64183, the Japanese Patent Publication No. SHO-49-43191, and the Japanese Patent Publication No. Sho 52-30490 Polyester acrylates; polyfunctional acrylates such as epoxy acrylates which are reaction products of epoxy resins and (fluorenyl) acrylic acid, and mercapto acrylates. More preferred among these monomers are dicyclopentyl decyl bis(mercapto) acrylate vinegar, trimethylolpropane tri(meth) acrylate, pentaerythritol tetra (meth) acrylate (pentaerythrit 〇 1 tetra (meth) anal you), dipentaerythritol hexa(indenyl) acrylate, dipentaerythritol penta (meth) acrylate. - content of the polymerizable compound - the content of the polymerizable compound in the photosensitive composition is not particularly limited 'optional (four) is preferably selected, and is preferably relative to the solid matter of the photosensitive group & It is 2 wt% to 5 wt%, more preferably 3 wt% to 40 wt%, and particularly preferably 4 wt% to 35 wt%. When the content of the polymerizable compound is less than 2% by weight, the pattern may not be formed. If it exceeds 50% by weight, the crack resistance may be poor. On the other hand, when the content of the polymerizable compound is within the above-special range, it is advantageous in terms of improvement in pattern formability and crack resistance. 13 201235781 ^ΜΗ-^υριιι _ Date of revision: January 10, 2011 is No. 101104621 Chinese specification, no sizing correction &lt;photopolymerization initiator&gt; The ability to initiate polymerization of the polymerizable compound is particularly limited, and may be appropriately selected as needed, and examples thereof include a halogenated hydrocarbon derivative, a phosphine oxide, a hexaaryldiimidazole, an anthracene derivative, an organic peroxide, and sulfur. a compound, a ketone compound, an aromatic rust salt, a ketoxime or the like. Examples of the hydrocarbon derivative include a halogenated hydrocarbon derivative having a triazine skeleton, a toothed hydrocarbon derivative having a oxadiazole skeleton, and the like. The halogenated hydrocarbon derivative having a triazine skeleton is not particularly limited and may be appropriately selected as needed, and examples thereof include, for example, Lin Lin et al., Bulletin of the Chemical Society of Japan (Bull. Chem. Soc. Japan), 42, 2924 (1969) The compounds described in the 'British Patent No. 1,388,492, and the compounds described in the specification of the German Patent No. 53-133428, and the compounds described in the specification of German Patent No. 3337G24, ^C. Schaefer The organic chemical compound (J 〇rg❽); the compound described in μ, Chong Ba, Japanese Patent Laid-Open No. 62-58241 Ϊ = Japanese Patent Laid-Open No. 5- and No. 28, if there is oxadiazole. Examples of the halogenated hydrocarbon derivative of the skeleton 10, and the like, and the oxime (〇xime) derivative of the compound described in U.S. Patent No. 4, No. 6-# is not particularly limited and may be selected, for example, Open 2〇〇7卿201235781 For the 101104621 towel __ slash correction date of revision: May 1, 101, the compound described in "〇〇85". For example, it is a special limitation, and it can be selected as needed. The 2〇07·2030 special opening initiator can be exemplified by the patent. ~ The compound described in the report No. 0〇86" Ο degree or: Ϊ wave = = exposure sensitization of the light layer for exposure. </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> sensitization can be added. , ', Ο 詈 詈 pure base agent generator, etc.) interaction (example n electron movement, etc.) to generate free radicals or acids and other useful groups. The compound described in the product; 7-2°3 system, the combination of household and the sensitizer is not specifically limited to electronic type: and: ^, prime, (1) electron-donating initiator starter and sensitized color element starting system m combination . Sensitive pigments and electron-withdrawing initiators (3, 15, 2012, 357, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4, 4 It is preferable to select 'with respect to the solid matter of the photosensitive composition, preferably 0.05 wt% to 30 wt%, more preferably 0.1 wt% to 20 wt%, and particularly preferably 0.2. If the content of the sensitizer is less than wt5 wt%, there is a decrease in the sensitivity of the active energy ray, and the exposure process takes time and the productivity is lowered; if it exceeds 30 wt%, There is a phenomenon in which the sensitizer is chromatographed from the photosensitive layer during storage. 所述光聚合起始劑可單獨使用1種,亦可併用2種以 上0 所述光聚合起始劑之特佳例可列舉:於後述之曝光中 可與波長為405 nm之雷射光對應之複合光起始劑、六芳 基二咪唑化合物、二茂鈦等,所述複合光起始劑是將氧化 膦類、α·胺基絲賴、具有三嗪骨架之鹵代烴化合物與 作為增感劑之胺化合物組合而成。 -光聚合起始劑之含量_The photopolymerization initiator may be used singly or in combination of two or more kinds. The photopolymerization initiator may be specifically used as an example of a laser light having a wavelength of 405 nm in the exposure described later. a composite photoinitiator, a hexaaryldiimidazole compound, a titanocene, etc., wherein the composite photoinitiator is a halogenated hydrocarbon compound having a phosphine oxide, an α-amino group, and a triazine skeleton. The amine compound of the sensitizer is combined. - content of photopolymerization initiator 所述光聚合起始劑於所述感光性組成物中之含量孟 ^限制,可視需要㈣宜選擇,相對於所述感光性相 物之固形物而言’較佳的是Q 5 wt%〜2Qwt%,更佳的 =5 wt%〜15 wt% ’特佳的是} wt%〜Q wt%。所述光聚 =劑之含1料足〇 5 wt%,則存在曝光部於顯影遇 洛出之傾向;若超過2G wt%,則存在耐熱性降低之 Ϊ固另一方面’所述光聚合起始劑之含量若為所述特佳 耗圍内,躲可形錢好之圖案、耐紐亦 而言有利。 刀 16 201235781 τ a -r^/v^LmLX 修正日期:101年5月10日 爲第1011〇4621號中文說明書無劃線修正本 &lt;熱交聯劑&gt; 所述熱父聯劑並無特別限制,可視需要而適宜選擇, 較佳的疋具有選自環狀轉基、喪段異乳酸醋基、噪。坐基、 及碳酸乙二酯基之至少一種官能基的化合物。 所述熱交聯劑例如可列舉具有環狀醚基之化合物、具 有嵌段異氰酸酯基之化合物、具有噁唑基之化合物、具 碳酸乙二醋基之化合物等。 〇 〇 所述具有環狀醚基之化合物例如可列舉具有環氧乙烷 基之化合物、具有環氧丙烷基之化合物等。 所述具有環氧乙烧基之化合物例如可列舉於1分子内 具有至少2個環氧乙烷(oxirane)基的環氧化合物等。 所述具有環氧丙烷(oxetane)基之化合物例如可列舉 於1分子内具有至少2個環氧丙絲的環氧槐化合物等牛。 所述環氧化合物並無特別限制,可視需要而適 聯二甲*酚型或聯笨二酚型環氧樹脂 (YX4_,三羡化學公司製造」等)或該些之混合物 她旨骨架等之雜環式環氧樹月旨(「TEPIC;曰產 化子業么司製造」、「AralditePT81〇 ;汽巴籍士 公司劁¥ μ 几巴精化股份有限 a J衣以」荨)、雙酚a型環氧樹脂、酚 脂、雙❹型環氧樹脂(「Ep〇t〇ht〇 環氧f )、钱㈣Α型魏樹脂、縮水甘油胺型 月二乙内轉型環氧樹脂、脂環族環氧樹脂 ί Si ί環氧樹脂、雙盼S型環氧樹脂、雙盼A _ '魏树脂、四苯紛基乙烧型環氧樹脂、鄰苯二甲酸 17 201235781 Tl-Γ^ Wpn. χ 爲第1011〇462l號中文說鴨無劃線修正本 修正日期:101年5月10日 縮水甘油基醋樹脂、四縮水甘油基二曱苯酚乙烷樹脂、含 有萘基之環氧樹脂(「ESN-190、ESN-360 ;新日鐵化學公 司製造」、「HP-4032、EXA-4750、EXA-4700 ; DIC 公司製 造」等)、具有二環戊二烯骨架之環氧樹脂(「HP-7200、 HP-7^〇〇H」DIC公司製造」#)、曱基丙烯酸縮水甘油酿 共聚系環氧樹脂(「CP-5〇s、CP-5〇M;日油公司製造」等)、 環己基馬細亞㈣?基__水甘油紅共聚環氧樹The content of the photopolymerization initiator in the photosensitive composition is limited, and may be selected according to the need (4), and is preferably Q 5 wt% with respect to the solid matter of the photosensitive phase. 2Qwt%, better = 5 wt% ~ 15 wt% 'extra good is} wt% ~ Q wt%. If the photopolymerization agent contains 1 wt% of the material, the exposed portion tends to be in the development; if it exceeds 2 G wt%, the heat resistance is reduced and the photopolymerization is carried out. If the content of the initiator is within the special consumption, it is advantageous to avoid the shape of the good shape and the resistance. Knife 16 201235781 τ a -r^/v^LmLX Revision date: May 10, 2011 is No. 1011〇4621 Chinese manual No sizing correction &lt;Hot crosslinking agent&gt; The hot parent agent is not It is particularly limited, and may be appropriately selected as needed. Preferably, the hydrazine has a ring-shaped transalkyl group, a succulent iso-lactic acid acrylate group, and a noise. A compound having at least one functional group of a base group and an ethylene carbonate group. Examples of the thermal crosslinking agent include a compound having a cyclic ether group, a compound having a blocked isocyanate group, a compound having an oxazolyl group, a compound having an ethylene carbonate group, and the like. 〇 〇 The compound having a cyclic ether group may, for example, be a compound having an oxirane group or a compound having an oxypropylene group. The compound having an ethylene oxide group may, for example, be an epoxy compound having at least two oxirane groups in one molecule. The compound having an oxetane group may, for example, be a cow such as an epoxy oxime compound having at least two propylene propylene fibers in one molecule. The epoxy compound is not particularly limited, and may be optionally combined with a dimethyl phenol type or a biphenyl phenol type epoxy resin (YX4_, manufactured by Sanken Chemical Co., Ltd.) or the like, or a mixture thereof. Heterocyclic Epoxy Tree ("TEPIC; 曰 化 么 么 」 」 、 、 、 、 Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar Ar 、 、 、 、 、 、 、 、 、 、 Type a epoxy resin, phenolic fat, double bismuth type epoxy resin ("Ep〇t〇ht〇 epoxy f", money (four) 魏 type Wei resin, glycidylamine type dimethyldiene internal conversion epoxy resin, alicyclic Epoxy Resin ί Si ί Epoxy Resin, Double Hope S Type Epoxy Resin, Double Hope A _ 'Wei Resin, Tetraphenyl Ethylene Ethylene Epoxy Resin, Phthal Acid 17 201235781 Tl-Γ^ Wpn. χ For the Chinese version of No. 1011〇462l, the duck has no underline correction. The date of this amendment: May 10, 101, glycidyl vinegar resin, tetraglycidyl dinonyl phenol ethane resin, epoxy resin containing naphthyl ("ESN -190, ESN-360; manufactured by Nippon Steel Chemical Co., Ltd., "HP-4032, EXA-4750, EXA-4700; manufactured by DIC", etc.) Epoxy resin having a dicyclopentadiene skeleton ("HP-7200, HP-7^〇〇H" DIC company" #), methacrylic acid glycidyl brewing copolymer epoxy resin ("CP-5〇 s, CP-5〇M; manufactured by Nippon Oil Company, etc.), Cycloheximide (4)? Base __ water glycerin red copolymerized epoxy tree 脂等。該些環氧化合物可單獨使用】種,亦可併用2種以 上。 所述%氧丙絲合物並無制限制,可視需要而適宝 選擇’例如可列舉日本專利特開薦·· 「_、」中所記載之多官能環氧丙統合物等。 、a 有嵌&amp;異氰酸§旨基之化合物並無特別限制,^ 1=显選擇丄例如可列舉使阻斷劑(bl°ck agent) ^來此 其竹生物之異級酿基反應而所得之化名Fat and so on. These epoxy compounds may be used singly or in combination of two or more. The % oxypropyl ketone compound is not limited, and may be selected as appropriate. For example, a polyfunctional epoxy propylene compound described in Japanese Patent Laid-Open No. _, "," may be mentioned. , a compound having an embedded &amp; isocyanate § group is not particularly limited, and 1 1 is a selective choice, for example, a blocking agent (bl°ck agent) can be cited as a heterogeneous brewing reaction of the bamboo organism. And the pseudonym obtained 如可列舉日本專利特開平5.號公_ U古i所記载之嵌段聚異氰_等。 適宜選;?例:二基之化合物並無特別限制’可視需要市 與其他不飽和單體㉔基之不飽和單體視需5 之不齡。麟具有_ 所述市售品例如===使用市售品。 ΕΠ1005等。 觸某Α司製造之EPOCRO 18 201235781 爲第10n嶋號中文說明書無劃線修正本 修正鳴1〇1年5月1Q日 所述具有碳酸乙二酯基之化合物並無特別限制,可視 需要而適宜選擇’例如可列舉具有碳酸乙二酯基之丙稀酸 樹脂等。所述具有碳酸乙二酯基之丙烯酸樹脂例如可列舉 日本專利特開平1-146968號公報中所記載之含有碳酸醋 基之共聚物等。 t曰 該些化合物可單獨使用1種,亦可併用2種以上。 該些化合物中,具有環氧乙烷基之化合物於圖案側面 0 之平滑性及絕緣性之方面而言較佳。 -熱交聯劑之含量- 所述熱交聯劑於所述感光性組成物中之含量並無特別 限制,可視需要而適宜選擇,相對於所述感光性組^物之 固形物而言’較佳的是1 wt%〜5〇 wt〇/〇,更佳的是2 〜40 wt% ’特佳的是3 wt%〜30 wt%。所述熱交聯劑之含 量若不足1 wt%,則存在耐熱性惡化之現象;若超過5〇 wt%,則存在顯影性或抗龜裂性惡化之現象。另一方面, 若所述含量為所述特佳之範圍内,則可以良好之感光度製 作硬化膜,所形成之硬化膜於兼顧耐熱性與抗龜裂性之方 面而言亦有利。 &lt;含有羧基之高分子化合物&gt; 所述含有羧基之高分子化合物若為具有羧基之高分子 化合物則並無特別限制,可視需要而適宜選擇,例如可列 舉酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂、酸改 質含有乙烯性不飽和基之環氧樹脂、含有乙烯性不飽和基 及羧基之丙烯酸樹脂、聚醯亞胺前驅物等。該些化合物中, 19 201235781 Τ X A 修正日期:1〇1年5月10曰 爲第101104621號中文說明書無劃線修正本 酸改質含有乙雜不飽和基之聚絲甲義娜於抗龜裂 性優異之方面而言較佳。 酯樹脂等 -(i) 月旨一 酉文改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂_ …作2所述酸改質含有乙稀性不飽和基之聚胺基甲酸醋 樹脂,若為具有料酸基之羧基與乙雜不飽和基的聚胺 基甲酉夂§日糾日’則並無特別限制,可視需要而適宜選擇, 列舉⑴於側鏈具有乙稀性不飽和基之聚胺基甲酸 二、(Γ)含有縣之聚胺基f酸®旨與於分子中具有環 5二二:5烯財鮮基之化合喊絲觸的聚胺基甲酸 於側鏈具有乙婦性不飽和基之聚胺基甲酸醋樹 並無鏈基之聚胺基甲酸_旨 鏈具有下述诵、而要而適宜選擇,例如可列舉於其側 少1個的化^。〜通式(3)所表示之官能基中之至 [化6] 0 —X〜〇 ^ V R3 5C〆 R1 、 R2 通式(1 或通式⑴中’Μ分.地表示氫原子 20 201235781u 修正日期:101年5月1〇日 爲第Γ〇1104621號中文說明書無劃線修正本 所述R並無特別限制,可視需要而適宜選擇,例如可 歹傳氫原子、亦可具妹代基找料。於自由基反應性 咼之方面而言,該些基中較佳的是氫原子、曱基。For example, block polyisocyanide _ etc. described in Japanese Patent Laid-Open No. Hei. Suitable for selection; Example: The compound of the dibasic group is not particularly limited. It is desirable to have an unsaturated monomer of 24 groups based on the demand of other unsaturated monomers. Lin has the commercial product, for example, === using a commercial item. ΕΠ1005 and so on. EPOCRO 18 201235781 manufactured by a certain company is the 10th nickname Chinese manual without a slash correction. This correction is not limited to the compound having ethylene carbonate group as described on May 1st, 1st, 1st, and may be suitable as needed. The selection 'for example, an acrylic resin having an ethylene carbonate group or the like can be cited. The acrylic acid-containing copolymer described in Japanese Laid-Open Patent Publication No. Hei No. 1-146968, and the like. t曰 These compounds may be used alone or in combination of two or more. Among these compounds, the compound having an oxiranyl group is preferred in terms of smoothness and insulation of the pattern side 0. - the content of the thermal crosslinking agent - the content of the thermal crosslinking agent in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, relative to the solid matter of the photosensitive composition. It is preferably 1 wt% to 5 〇 wt 〇 / 〇, more preferably 2 〜 40 wt% 'extra good is 3 wt% 〜 30 wt%. When the content of the thermal crosslinking agent is less than 1% by weight, the heat resistance is deteriorated, and when it exceeds 5 % by weight, the developability or the crack resistance is deteriorated. On the other hand, when the content is within the above-mentioned range, the cured film can be produced with good sensitivity, and the formed cured film is also advantageous in terms of both heat resistance and crack resistance. &lt;Polymer compound containing a carboxyl group&gt; The polymer compound having a carboxyl group is not particularly limited as long as it is a polymer compound having a carboxyl group, and may be appropriately selected if necessary. For example, an acid-modified ethylenically unsaturated group may be mentioned. The polyurethane resin, an acid-modified epoxy resin containing an ethylenically unsaturated group, an acrylic resin containing an ethylenically unsaturated group and a carboxyl group, a polyimide precursor, and the like. Among these compounds, 19 201235781 Τ XA Revision date: 1〇1月10月10曰第101104621号 Chinese manual No underline correction This acid modification contains polyunsaturated group of polymethylmethyx in anti-cracking It is preferable in terms of excellentness. Ester Resin, etc. - (i) Modification of Polyurethane Resin Containing Ethylene Unsaturated Groups as Acid Hydrogenated Ethyl Carbamate Containing Ethylene Unsaturated Groups The resin is not particularly limited as long as it is a polyaminocarbazide having a carboxyl group and an ethylidene group having an acid group, and may be appropriately selected as needed, and enumerated (1) having a vinyl group in the side chain. The saturated polyaminocarbamate, the polyamine-based acid group of the county contains a polyaminocarboxylic acid having a ring 5:5:5 olefinic acid in the molecule. The polyaminocarbamic acid having a polyunsaturated group having an ethylenically unsaturated group and having no chain group has the following oxime, and is suitably selected, and for example, it can be exemplified by one having less than one side. - in the functional group represented by the formula (3) to [Chem. 6] 0 - X ~ 〇 ^ V R3 5C 〆 R1, R2 Formula (1 or (1) in the formula "1" represents the hydrogen atom 20 201235781u Amendment date: May 1, 2011 is No. 1104621 Chinese manual without scribe correction. R is not particularly limited. It can be selected as needed. For example, hydrogen atoms can be transmitted. In the aspect of radical reactivity, a preferred one of the groups is a hydrogen atom or a mercapto group. 而且’所述R及R3並無特別限制,可視需要而適宜 ,擇’分別獨立地列舉例如氫原子、鹵素原子、胺基、羧 基、烧乳基錄、雜、硝基、氰基、亦可具有取代基之 絲、亦可具有取代基之絲、亦可具有取代基之烧氧基、 亦可具有減基之綠基、亦可具有取代基之炫基胺基、 亦可具有取代基之絲胺基、亦可具有取代基之烧基顧 基、亦可具有取絲之絲伽基等。於自由基反應性高 之方面而言,該些基幢佳的是氫原子、絲、烧氧基幾 基、亦可具有取代基之烷基、亦可具有取代基之芳基。 於所述通式(1)中,X表示氧原子、硫原子、或 _N(R12)- ’所述Ri2表示氫原子、或i價有機基。所述rU 並無特別限制,可視需要而適宜選擇,例如可列舉亦可具 有取代基之烧基等。於自由基反應性高之方面而言,該些 基中較佳的是氫原子、曱基、乙基、異丙基。^ 一 此處,可導入之所述取代基並無特別限制,可視需要 而適且選擇,例如可列舉烧基、稀·基、快基、芳基、院氧 基、芳氧基、鹵素原子、胺基、烷基胺基、芳基胺基、羧 基、烷氧基羰基、磺基、硝基、氰基、醯胺基、烷基磺醯 基、芳基磺醯基等。 21 201235781 _ ▲ I w *w ·* 修正日期:101年5月1〇日 爲第101104621號中文說明書無劃線修正本 [化7] R4 R8 —Y''C—C=C Λδ 〇6 p7 H H通式(2) ,所述通式(42) f ’ R4〜R8分別獨立地表示氫原子 或1½基。所述R〜R並無特別限制,可視需要而適宜選 擇’例如可列舉氫原子、函素原子、胺基、二烧基胺基、 羧基、烧氧基、縣、硝基、I基、亦可具有取代基 之烧基、亦可具有取代基之絲、,村具有取代基之烧氧 基、亦可具有取代基之芳氧基、亦可具有取代基之烧基胺 基、亦可具有取代基之芳基胺基、亦可具有取代基之烧基 磺醯基、亦可具有取代基之芳基磺醯基等。於自由基反應 性Ϊ之方面而言,該些基中較佳的是氫原子、羧基、烷氧 基羰基、亦可具有取代基之烷基、亦可具有取代基之芳基。 可導入之取代基可列舉與所述通式(丨)相同者等。而 且,Y表示氧原子、硫原子、或(Rl2) _。所述Rl2與所 述通式(1)之R12之情形同義,較佳例亦相同。 [化8]Further, 'the R and R3 are not particularly limited, and may be appropriately selected as needed, and each of them may independently be, for example, a hydrogen atom, a halogen atom, an amine group, a carboxyl group, a calcined base, a hetero atom, a nitro group, a cyano group, or a filament having a substituent, a filament which may have a substituent, an alkoxy group which may have a substituent, a green group which may have a minus group, a sulfhydryl group which may have a substituent, or a substituent The silk amine group may also have a substituent base group, or may have a silk gamma group or the like. In terms of high radical reactivity, the base group is preferably a hydrogen atom, a silk, an alkoxy group, an alkyl group which may have a substituent, or an aryl group which may have a substituent. In the above formula (1), X represents an oxygen atom, a sulfur atom, or _N(R12)-', and Ri2 represents a hydrogen atom or an i-valent organic group. The rU is not particularly limited and may be appropriately selected as needed, and examples thereof include a calcining group which may have a substituent. Preferred among the radicals in terms of high radical reactivity are a hydrogen atom, a mercapto group, an ethyl group, and an isopropyl group. ^ The substituent which can be introduced here is not particularly limited, and may be appropriately selected as needed, and examples thereof include an alkyl group, a dilute group, a fast group, an aryl group, an alkoxy group, an aryloxy group, and a halogen atom. Amino, alkylamino, arylamino, carboxy, alkoxycarbonyl, sulfo, nitro, cyano, decylamino, alkylsulfonyl, arylsulfonyl and the like. 21 201235781 _ ▲ I w *w ·* Revision date: May 1st, 101st is the 101104621 Chinese manual without a slash correction [7] R4 R8 —Y''C—C=C Λδ 〇6 p7 HH Formula (2), wherein the formula (42) f ' R4 to R8 each independently represent a hydrogen atom or a 11⁄2 group. R to R are not particularly limited, and may be appropriately selected as needed. For example, a hydrogen atom, a hydroxyl atom, an amine group, a dialkylamino group, a carboxyl group, an alkoxy group, a county, a nitro group, an I group, and the like may be mentioned. An alkyl group which may have a substituent, a filament which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, an alkyl group which may have a substituent, or may have The arylamino group of the substituent, the alkylsulfonyl group which may have a substituent, the arylsulfonyl group which may have a substituent, and the like. Preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Examples of the substituent which can be introduced include the same as those of the above formula (丨). Further, Y represents an oxygen atom, a sulfur atom, or (Rl2) _. The R1 is synonymous with the case of R12 of the above formula (1), and the preferred examples are also the same. [化8] 通式(3) 22 201235781^ 修正日期:ι〇ι年5月ίο日 爲第ΰηι〇462ΐ號中文說明書無劃線修正本 於所述通式(3) t,R9〜Ru分別獨立地表示氫原子 或1價基。 所述R並無特別限制,可視需要而適宜選擇,例如可 列舉氫原子或亦可具有取代基之燒基等。於自由基反應性 高之方面而^,該些基中較佳的是氯原子、甲基。 所述R及R11並無特別限制,可視需要而適宜選擇, 例如可列舉氫原子、鹵素原子、胺基、二絲胺基、魏基、 〇 絲基減、雜m基、亦可具有取代基之烧基、 亦可具有取代基之芳基、亦可具有取代基之烧氧基、亦可 具有取代基之芳氧基、亦可具有取代基之烧基胺基、亦可 具有取代基之芳基胺基、亦可具有取代基之烷基磺醯基、 亦可具有取代基之芳基磺醯基等。於自由基反應性高之方 面而言,該些基中較佳的是氫原子、羧基、烷氧基羰基、 亦可具有取代基之烷基、亦可具有取代基之芳基。 此處,可導入之取代基可例示與所述通式(1)相同老 等。而且,於所述通式(3)中,z表示氧原子、硫原子、 υ -n(r13)-、或亦可具有取代基之伸苯基(phenylene)。所述 R並無特別限制,可視需要而適宜選擇,例如可列舉亦&lt; 具有取代基之烧基等。於自由基反應性高之方面而言,該 些基中較佳的是曱基、乙基、異丙基。 所述於侧鏈具有乙埽性不飽和基之聚胺基甲酸g旨樹腐 是以如下之化合物的反應產物所表示之結構單元為基本贵 架的t胺基甲酸醋樹脂.下述通式(4)所表示之二里氛酸 酯化合物之至少1種與下述通式(5)所表示之二醇化合物 23 201235781 爲第ΰ)1104621號中文說明書無劃線修正本 修正日期:1〇1年5月1〇曰 之至少1種。 OCN-X°-NCO ···通式(4) HO-Y°-〇H . · ·通式(5) 於所述通式(4)及所述通式(5)中,X0、Y0分別獨 立地表示2價有機殘基(organic residue )。 如果所述通式(4)所表示之二異氰酸酯化合物、或所 述通式(5 )所表示之二醇化合物之至少任意一方具有所述 通式(1)〜通式(3)所表示之基中之至少1個,則生成 於側鏈導入有所述通式(1)〜通式(3)所表示之基的聚 胺基曱酸酯樹脂作為該二異氰酸酯化合物與該二醇化合物 之反應產物。藉由所述方法,可較於聚胺基甲酸酯樹脂之 反應生成後對所期望之側鏈進行取代及/或導入而言更容 易地製造於側鏈導入有所述通式(1)〜通式(3)所表示 之基的聚胺基曱酸酯樹脂。 所迖通式(4)所表示之二異氰酸酯化合物並無特別限 可視需要而適宜選擇,例如可列舉可藉由使三異氰酸 醋化合物與1當量之具有乙烯性*飽和基之單官能醇或單 Γ槪合物進行加成反應而 獲得之二異氰酸酯化合物 所述. —、$担…、氰酸酯化合物並無特別限制,可視需要而搞 且&amp; 例如可列舉日本專利特開2005-250438號公報^ 24 201235781 X 修正日期:101年5月10日 爲第1〇1娜2丨號蚊_書細線修正本 段落「0034」〜錄「嶋」中所記載之化合物等。 所述具有乙烯性不飽和基之單官能醇或所述單官能胺 化合物並無特別限制,可視需要而適宜選擇,例如可列舉 日本專利制期_25議H之棘「⑻ 「0040」中所記載之化合物等。 又洛 此處於所述聚胺基旨樹脂之側鏈導人乙稀性不 釦和基的方去並無特別限制,可視需要而適宜選擇,較佳 Ο 用於側鏈含有乙稀性不飽和基的二異氰酸i旨化合物 作為製造聚胺基甲酸醋樹脂之原料的方法。所述二異氛酸 ^化合物並無制限制’可視需要而適宜選擇,可列舉可 精^使三異氰酸醋化合物與1當量之具有乙稀性不飽和基 之單官能醇或單官能胺化合物進行加成反應而所得之二異 氛^旨化合物,例如日本專利特開2005_250438號公報ς =洛0042」〜段落「0049」中所記載之於侧鏈具有乙婦 性不飽和基之化合物等。 作為所述於侧鏈具有乙婦性不飽和基之聚胺基甲酸酉旨 Μ脂,自使與感光性組成物中之其他成分的相溶性提高、 使保存穩定性提高等觀點考慮,亦可共聚所述含有乙稀性 不飽和基之二異氰酸醋化合物以外的二異氮酸醋化合物。 所述共聚之二異氰酸醋化合物並無特別限制,可視需 要而適宜選擇,例如可列舉下述通式⑷所表示之二 酸酯化合物等。 OCN-L^NCO .··通式(6) 25 201235781 爲第1011(Μ621號中文說明書無劃線修正本 乂 修正日期:101年5月10日 於所述通式(6)中,T1主_ 較佳的是燒基、找基、芳基具有取代基(例如 之2價脂肪族或芳香族煙基基之任一者) 異氰酸S旨基反應之其他官缺柯視需要而具有旅不與 酿胺基、脲基之任-者。例域基、胺基甲酸醋基、 制之二異氮酸酉旨化合物並無特別限 制,可視需要而適宜選擇,例如可列舉如24_甲苯二里氣 酸醋、2,4-甲苯二異氰酸醋之二聚 甲;氰; f4:對苯^二獅旨、間苯二亞甲基二異氛酸醋、 厂一本基曱燒一異氰酸醋、1&gt;5_萘二#氛酸醋、3,3,_二甲 ,聯苯_4,4’_二異氰酸轉這樣的芳香族二異氰酸醋化合 物,六亞曱基二異氰酸醋、三甲基六亞曱基二異氛酸醋、 離月女&amp;一異氰酸酯、一聚酸二異氰酸酯等脂肪族二異氰酸 酉曰化合物,異佛爾酮二異氰酸g旨、4,4'_亞甲基雙(環己其異 氛酸醋)、曱基環己烧-2,4(或2,6)二異氰酸酯、n(異氰 酸酯基曱基)環己烷等脂環族二異氰酸酯化合物;丨^耳 丁一醇與2莫耳甲本一異鼠酸S旨之加成物等作為二醇 與二異氰酸酯之反應物之二異氰酸酯化合物等。該些化合 物可單獨使用1種,亦可併用2種以上。 所述通式(5 )所表示之一醇化合物並無特別限制,可 視需要而適宜選擇,例如可列舉聚醚二醇化合物、聚醋二 醇化合物、聚碳酸酯二醇化合物等高分子二醇化合物;乙 二醇、新戊二醇等低分子二醇化合物;具有乙烯性不飽和 26 201235781 -----Γ.η 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 基之一醇化合物;具有叛酸基之二醇化合物等。General formula (3) 22 201235781^ Revision date: ι〇ι年五月 ίο日 is the first ΰηι〇462 中文 Chinese manual without a slash correction in the general formula (3) t, R9 ~ Ru independently represent hydrogen Atom or a monovalent group. The R is not particularly limited and may be appropriately selected as necessary, and examples thereof include a hydrogen atom or a burnt group which may have a substituent. In terms of high radical reactivity, a chlorine atom or a methyl group is preferred among the groups. R and R11 are not particularly limited and may be appropriately selected as necessary, and examples thereof include a hydrogen atom, a halogen atom, an amine group, a di-silyl group, a thiol group, a fluorenyl group, a hetero m group, and a substituent. An alkyl group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, an alkyl group which may have a substituent, or a substituent An arylamine group, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent, and the like. In the case of high radical reactivity, preferred among these groups are a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent. Here, the substituent which can be introduced can be exemplified as the same as the above formula (1). Further, in the above formula (3), z represents an oxygen atom, a sulfur atom, υ-n(r13)-, or a phenylene group which may have a substituent. The R is not particularly limited and may be appropriately selected as needed, and examples thereof include a base having a substituent and the like. Preferred among these groups are a mercapto group, an ethyl group, and an isopropyl group in terms of high radical reactivity. The polyaminocarbamic acid having an ethylenically unsaturated group in the side chain is a t-amino formic acid resin which is a structural unit represented by the reaction product of the following compound. (4) At least one of the diaryl acid ester compounds and the diol compound 23 represented by the following general formula (5): 201235781 is the third specification of the Chinese Patent Specification No. 1104621. At least one of the first one in May of the year. OCN-X°-NCO ··· (4) HO-Y°-〇H . · · (5) In the above formula (4) and the formula (5), X0, Y0 The divalent organic residue is independently represented. At least one of the diisocyanate compound represented by the formula (4) or the diol compound represented by the formula (5) has the formula (1) to the formula (3). A polyamino phthalate resin in which a group represented by the above formula (1) to the formula (3) is introduced as a side chain, and the diisocyanate compound and the diol compound are formed in at least one of the groups. reaction product. By the method, the substitution of the desired side chain after the formation of the reaction of the polyurethane resin can be more easily produced in the side chain and introduced into the side chain (1). a polyamino phthalate resin represented by the formula (3). The diisocyanate compound represented by the formula (4) is not particularly limited as it is, and may, for example, be a monofunctional alcohol having an ethylenic acid group and an equivalent amount of a monofunctional alcohol. The diisocyanate compound obtained by the addition reaction of the mono-complex is not particularly limited, and may be carried out as needed. For example, Japanese Patent Laid-Open No. 2005- Bulletin No. 250438 ^ 24 201235781 X Date of revision: May 10, 101 is the first 〇 1 Na 2 蚊 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The monofunctional alcohol or the monofunctional amine compound having an ethylenically unsaturated group is not particularly limited, and may be appropriately selected as needed, and for example, it can be exemplified in the Japanese patent system "(25) "0040" The compound or the like described. Further, there is no particular limitation on the side chain of the polyamine-based resin to introduce the ethylidene and the base, and it may be appropriately selected as needed, preferably Ο for the side chain containing ethylenic unsaturation. The base diisocyanate compound is used as a method for producing a raw material of a polyurethane resin. The diisocyanuric acid compound is not limited by the definition, and may be appropriately selected, and examples thereof include a triisocyanate compound and one equivalent of a monofunctional alcohol or a monofunctional amine compound having an ethylenically unsaturated group. The diisomeric compound obtained by the addition reaction, for example, a compound having an ethylenically unsaturated group in a side chain, as described in JP-A-2005-250438, pp. The polyurethane sulfonate having an ethylenically unsaturated group in the side chain may be improved in compatibility with other components in the photosensitive composition, and the storage stability may be improved. A diisocyanate compound other than the diisocyanate compound containing an ethylenically unsaturated group is copolymerized. The copolymerized diisocyanate compound is not particularly limited and may be appropriately selected, and examples thereof include a diester compound represented by the following formula (4). OCN-L^NCO .·· (6) 25 201235781 is the 1011 (Μ621 Chinese manual without a slash correction) 乂 Revision date: May 10, 101 in the general formula (6), T1 main Preferably, the alkyl group, the aryl group, and the aryl group have a substituent (for example, any of a divalent aliphatic or aromatic fluorenyl group). There is no particular limitation on the compound of the amino group or the ureido group. The compound of the amino group, the urethane carboxylic acid group, and the diisoxamate compound are not particularly limited, and may be appropriately selected as needed, for example, 24_ Toluene gas vinegar, dimerization of 2,4-toluene diisocyanate vinegar; cyanide; f4: p-benzophenone sylvestre, m-xylylene methylene diisocyanic acid vinegar, factory one base Burning an aromatic diisocyanate compound such as isocyanuric acid, 1&gt;5_naphthalene diacetate, 3,3,-dimethyl, biphenyl_4,4'-diisocyanate, Anthraquinone diisocyanate, such as hexamethylene diisocyanate, trimethylhexadecyl diisoacetoic acid vinegar, anthraquinone &amp; monoisocyanate, monopoly diisocyanate, etc. Ketone diisocyanate , 4,4'-methylene double (cyclohexyl acetoacetate), mercaptocyclohexane-2,4 (or 2,6) diisocyanate, n (isocyanate decyl) cyclohexane and other fats a cycloisocyanate compound; a diisocyanate compound or the like which is a reaction product of a diol and a diisocyanate, etc., which are used as a reaction product of a diol and a diisocyanate. One type of the alcohol compound represented by the above formula (5) is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a polyether diol compound, a polyglycol diol compound, and a poly High molecular weight diol compound such as carbonate diol compound; low molecular weight diol compound such as ethylene glycol or neopentyl glycol; having ethylenic unsaturation 26 201235781 -----Γ.η is No. 101104621 Line correction date of this revision: May 10, 101, a base alcohol compound; a diol compound having a tickic acid group. 此處’作為於聚胺基甲酸酯樹脂之侧鏈導入乙稀性不 飽和基的方法,除了前述方法以外,使用於侧鏈含有乙烯 性不飽和基之二醇化合物作為製造胺基曱酸酯樹脂之原料 的方法亦較佳。所述於側鏈含有乙烯性不飽和基之二醇化 合物例如可為如三羥曱基丙烷單烯丙基醚這樣的市售之化 合物,亦可列舉可藉由ώ化二醇化合物、三醇化合物、胺 ,二醇化合物等化合物與含有乙烯性不飽和基之羧酸、醯 氣、異氰酸酯、醇、胺、硫醇、_化烷基化合物等化合物 之反應而容易地製造之化合物等。 所述於側鏈含有乙烯性不飽和基之二醇化合物並盔特 別限制,可視需要而適宜選擇,例如可鱗日本專利特開 2005-250438號公報之段落「〇〇57」〜段落「⑻6〇」中所 ,載之化合物、日本專利制2齡讓38號公報之段落 =95」〜段落「_」中所記載之藉由二醇化合物使四 =二酐開環而成之化合物、下述通式⑹所表示之日 卞專利特開20〇5_25()438號公報之段落「賴」〜 〇〇66」巾所記載之化合鱗。該些化合物巾較佳的是下 G)戶斤表示之曰本專利特開2〇〇5_25〇4 之段洛「_4」〜g「嶋」中所記载之化合物蚁報 27 201235781 i JL I JLi ·&amp; 修正臼期:1〇1年5月10日 爲第101104621號中文說明書無劃線修正本 [化9] OHHere, as a method of introducing an ethylenically unsaturated group into a side chain of a polyurethane resin, in addition to the above method, a diol compound having an ethylenically unsaturated group in a side chain is used as a product for producing an amino decanoic acid. The method of the raw material of the ester resin is also preferred. The diol compound having an ethylenically unsaturated group in the side chain may be, for example, a commercially available compound such as trihydroxydecylpropane monoallyl ether, and may also be exemplified by a hydrazine diol compound or a triol. A compound which can be easily produced by reacting a compound such as a compound, an amine or a diol compound with a compound containing an ethylenically unsaturated group such as a carboxylic acid, an anthracene, an isocyanate, an alcohol, an amine, a thiol or an alkyl group compound. The diol compound containing an ethylenically unsaturated group in the side chain is particularly limited, and may be appropriately selected as needed. For example, the paragraph "〇〇57" to the paragraph "(8)6〇 of the Japanese Patent Laid-Open Publication No. 2005-250438 In the middle of the article, the compound of the Japanese Patent No. 3, the paragraph of the No. 38 publication, paragraph 95 = paragraph "", the compound which is obtained by ring-opening the tetra-dianhydride by the diol compound, The compound scales described in the paragraph "Lai" ~ 〇〇 66" in the paragraph of the Japanese Patent Laid-Open Publication No. 20-55-1( 438). Preferably, the compound towels are represented by the following G). The compound described in the paragraph "〇〇4"~g "嶋" of the patent opening 2〇〇5_25〇4 is a compound ant 27 27 201235781 i JL I JLi ·&amp; Revision period: May 1st, 1st, May 10th, No. 101104621 Chinese manual, no underline correction [Chemistry 9] OH R3 八 R2 通式(G) 於所述通式⑹中,r1〜r3分別獨立地表 表示2〗2價有機殘基,x表示氧原子、硫原子、 或_ ()-,所述R表示氫原子、或i價有機基。 中=外’f述通式⑹中之R1〜R3及X與所述通式⑴ 之〜R及X同義’較佳之態樣亦相同。 藉由使㈣自所述通式⑹所表 :;=:=:=nr 產生:抑 強度提高。 刀子運動的效果,可達成層的覆膜 樹脂作=:=4乙:性不飽和基之聚胺基甲酸酷 * ^目使與感先性組成物中之其他成分的相溶性提 二稀===考慮,可共聚所述於側鏈含 —醇化合物以外的二醇化合物。 -醢於側鏈含有乙烯性不飽和基之二醇化合物以外的 ;舉聚制,可視需要而適宜選擇,例如可 —坪化S物、聚酯二醇化合物、聚碳酸酯二醇化 28 201235781^ 修正日期:101年5月10日 號中文_書無劃線修疋本 合物等。 選二===別限制,可視需要而適宜 落段 二化口物亚無特別限制,可視需要而適宜 ;ΟοΓΙ 2005-2^8R3 八 R2 Formula (G) In the above formula (6), r1 to r3 each independently represent a 2 valent organic residue, and x represents an oxygen atom, a sulfur atom, or _ ()-, and the R represents hydrogen. An atom, or an i-valent organic group. The same applies to the preferred aspects of R1 to R3 and X in the above formula (6) and the synonymous to R and X of the above formula (1). By (4) from the above formula (6):; =:=:=nr: the strength is increased. The effect of the knife movement can reach the layer of the film resin as ===4 B: The unsaturated amino group of the polyaminocarbamate is used to make the compatibility with other components in the sensitizing composition. == It is considered that the diol compound other than the side chain-containing alcohol compound can be copolymerized. - other than the diol compound containing an ethylenically unsaturated group in the side chain; it can be suitably selected as needed, for example, can be smothered, polyester diol compound, polycarbonate diol 28 201235781^ Revision date: May 10, 101, Chinese _ book without line to repair the compound and so on. Select two ===Do not limit, it may be suitable according to the needs. There is no special restriction on the second section of the mouth. It can be suitable according to the needs; ΟοΓΙ 2005-2^8 中之N 1」N又广〇〇79」、段落「〇〇83」〜段落「〇〇85」 中之ν〇1〜^·8及Νο·13〜Ν〇 18中所記載之化合物等。 、卜戶 二醇化合物並無特別限制,可視需要而 適且=擇,例如可列舉日本專利特開2〇〇5_25〇438號公報 之段洛「〇080」〜段落「〇〇81」及段落「〇〇84」中之灿9 〜No.12中所記載之化合物等。 而且於所述於侧鏈具有乙稀性不飽和基之聚胺基曱 酸酯樹脂之合成中,除了上述二醇化合物以外,亦可併用 具有並不與異氰酸酯基反應之取代基之二醇化合物。 所述具有並不與異氰酸酯基反應之取代基之二醇化合 物並無特別限制,可視需要而適宜選擇,例如可列舉曰本 專利特開2005-250438號公報之段落「0087」〜段落「〇〇88」 中所記載之化合物等。 另外,於所述於侧鏈具有乙烯性不飽和基之聚胺基甲 酸酯樹脂之合成中,除了上述二醇化合物以外,亦可併用 具有幾基之二醇化合物。所述具有叛基之二醇化合物並無 特別限制,可視需要而適宜選擇,例如可列舉下述通式(8 ) 〜通式(10)所表示之化合物等。 29 201235781 —r jl ~τ-/vf !/*▲*· 爲第l〇ll〇4621號中文說明書無劃線修ίΕ本 修正日期:101年5月10曰 [化 10] R15HO-L9-今-L10-〇H L11 通式(8)COOH HO-L9—Ar—L10~OH L11 COOH HO-L9—N-L10-〇H L11 COOH 通式(9) 通式(10) 於所述通式(8)〜通式(10)中,R15表示氫原子、 亦可具有取代基(例如包括氰基、确基(nitro group)、鹵 素原子(-F、-a、-Br、-I)、-CONH2、-COOR16、-OR16、 -NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16 (此 處’所述R16表示碳數為1〜10之烷基、或碳數為7〜15 之方烧基)專各基)之炫*基、方烧基、芳基、烧氧基、芳 氣基。該些基中較佳的是氫原子、碳數為1個〜8個之炫 基、碳數為6個〜15個之芳基。 於所述通式(8)〜通式(10)中,l9、L10、L11可分 別相同亦可不同,表示單鍵、亦可具有取代基(例如較佳 的是烷基、芳烷基、芳基、烷氧基、_基之各基)之2價 之脂肪族或料族烴基。該些基巾較佳岐碳數為i個」 2〇個之伸烧基、碳數為6個〜15個之伸芳基,更佳的是破 30 201235781 τ ι~τ«^ 爲第 101104621 號中 修正日期:101年5月10日 儿十又說明書無劃線修正本 ^ 1個〜8個之伸烷基。而且,於所述L、LU中亦可視 :=有::與異氰酸酯基反應之其他官能基,例如羰 ί可二述!^胺基、脲基、喊。另外, 通式⑼中 〇 〇 彳 1她基者,職無制關,可視需要而適宜 &amp;擇’較佳岐碳數為6個〜15個之芳香族基。 化人(8)〜通式(10)所表示之具有羧基之二醇 口物‘,、、特別限制’可視需要而適宜選擇,例如可列舉 3,5:二祕苯甲酸、2,2_雙(經基甲基)丙酸、2,2-雙(2-經基 =土)丙k 2,2-雙(3-經基丙基)丙酸、雙(經基曱基)乙酸、 經基苯基)乙酸、2,2_雙(經基甲基)丁酸、4,4_雙(4·經 二苯基)戊敲、酒石酸、N,N_二羥基乙基甘胺酸、n,n_雙(2_ 說基乙基)-3-緩基_丙醯胺等。 由於此種幾基之存在,可賦予聚胺基曱酸醋樹脂氫鍵 結性與驗可溶性等特性,於此方面而言較佳。更具體而言, 所述於側鏈具有乙烯性不飽和基之聚胺基旨樹脂是進 步於側鏈具有叛基之樹脂,更具體而言,側鏈之乙稀性 不飽和基較佳的是〇.〇5 mm〇1/g〜3 〇 mm〇1/g,更佳的是〇 5 mmol/g 2’7 mmol/g ’ 特佳的是 〇 75 mm〇i/g 〜2.4 mmol/g,且較佳的是於侧鏈具有羧基,酸值較佳的是2〇 mgKOH/g〜120 mgK〇H/g ’ 更佳的是 30 mgK0H/g〜11〇 mgKOH/g ’ 特佳的是 35 mgK:〇H/g〜1〇〇 mgKOH/g。 另外,所述酸值例如可依據JISK〇〇7〇而測定。其中, 31 201235781 爲第1^1 HM621號中文說明書無劃線修正本 修正日期:101年5月10臼 於樣品並不溶解之情形時,使用二噁烷或四氫呋喃等作為 溶劑。 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 可藉由如下方式而合成··將上述二異氰酸酯化合物及二醇 化合物,於非質子性溶劑中添加與各自之反應性對應之活 性之公知觸媒而進行加熱。合成中所使用之二異氰酸酯以 及二醇化合物之莫耳比(Ma: Mb)並無特別限制,可視需 要而適宜選擇’較佳的是1 : 1〜1.2 : 1 ’藉由以醇類或^ 類等進行處理,以最終並不殘存異氰酸酯基之形熊合成 有分子量或黏度等所期望之物性的產物。 &amp; 、 而且 所述於侧鏈具有乙烯性不飽和基之聚胺基曱酸 醋樹脂亦可適宜使用於聚合物末端、主鏈具有乙稀性不飽 和基之聚胺基曱酸酯樹脂。藉由於聚合物末端、主鏈具 乙稀性不飽和基’可進-步使感光性組成物與於側鍵^ 乙烯性不飽和基之聚胺基曱酸酯樹脂之間、或於側鏈具 乙烯性不飽和基之聚胺基曱_旨_之_交聯反應性 南,使光硬化物強度增加。其結果,於平版印刷版等 用於侧鏈具有乙雜雜和基之聚絲f酸触 提供強韌性優異之材料。 、了 於聚合物末端導入乙烯性不飽和基 :示之方法。亦即,使用上述之於側下 七,基甲酸_脂之合成步驟中的聚合物末端之: ,、《I旨基’無藉由賴或胺轉進行處 子 使用具有乙雕補和基之軸或胺崎即可。々, 32 201235781 I Λ. I 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10曰 作為此種化合物’具體而§首先可列舉與作為具有乙 烯性不飽和基之單官能醇或單官能胺化合物而列舉之例示 化合物相同之化合物。 另外’自導入置之控制容易且可使導入量增加,而且 使交聯反應效率提高等觀點考慮,較佳的是與聚合物末端 相比而言更向聚合物側鏈導入乙埽性不飽和基。 所導入之乙烯性不飽和基並無特別限制,可視需要而 0 適宜選擇,於交聯硬化膜形成性之方面而言,較佳的是烯 丙基、曱基丙烯醯基、丙烯醯基、乙烯基苯基,更佳的是 曱基丙烯醯基、丙烯臨基,於兼顧交聯硬化膜之形成性與 原始保存性之方面而言,特佳的是曱基丙烯醯基。 而且,曱基丙烯醯基之導入量並無特別限制,可視需 要而適宜選擇,以乙烯性不餘和基當量計而言較佳的是 〇.〇5 mmol/g〜3.0 mmol/g,更佳的是 〇5 mm〇1/g〜27 mmol/g,特佳的是 0.75 mmol/g〜2.4 mmol/g。 力主鏈導入乙烯性不飽和基之方法,存在有將於主鏈 方向具有乙烯性不飽和基之二醇化合物用於聚胺基甲酸酯 樹脂之合成中的方法。所述於主鏈方向具有乙烯性不飽和 基之二醇化合物並無特別限制,可視需要而適宜選擇,可 列舉順-2-丁烯-1,4-二醇、反_2_丁稀],4_二醇、聚丁二婦二 醇等。 所述於側鏈具有乙烯性不飽和基之聚胺基曱酸酯樹脂 亦可併用如下之鹼可溶性高分子··所述鹼可溶性高分子包 含具有與該特定聚胺基甲酸酿樹脂不同之結構的聚胺基甲 33 201235781 « Λ- I A 爲第101104621號中文說明書無劃線修正本 修正日期..101年5月10日 酸酯樹脂。例如,所述於側鏈具有乙烯性不飽和基之聚胺 基曱酸酯樹脂可併用於主鏈及/或側鏈含有芳香族基之聚 胺基曱酸酉旨樹脂。 作為所述(i)於側鍵具有乙稀性不飽和基之聚胺基曱 酸酯樹脂之具體例,例如可列舉曰本專利特開2〇〇5_25〇438 號公報之段落「0293」〜段落「0310」中所示之pq〜p_31 之聚合物等。該些化合物中較佳的是段落「〇3〇8」及段落 「0309」中所示之p_27及P-28之聚合物。 --(ii)含有鲮基之聚胺基曱酸醋與於分子中具有環氧 基及乙稀性不飽和基之化合物反應而所得之聚胺基曱酸酯 樹脂-_ 所述含有敌基之聚胺基甲酸醋與於分子中具有環氧基 及乙烯性不飽和基之化合物反應而所得之聚胺基曱酸酯樹 脂是以二異氰酸酯與含有叛酸基之二醇為必需成分的含有 羧基之聚胺基曱酸酯、與於分子中具有環氧基及乙烯性不 飽和基之化合物反應而所得之聚胺基甲酸酯樹脂。亦可視 需要而添加作為二醇成分之重量平均分子量為3〇〇以下之 低分子二醇或重量平均分子量為500以上之低分子二醇作 為共聚成分。 藉由使用所述聚胺基甲酸g旨樹脂,與無機填充劑之穩 定之分散性或抗龜裂性或耐衝擊性優異,因此耐熱性、耐 濕熱性、密接性、機械特性、電氣特性提高。 而且,所述聚胺基甲酸酯樹脂是以亦可具有取代基之 二價脂肪族以及芳香族烴之二異氰酸酯、與c原子以及N 34 201235781 -TlT^VFjJlxT. 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 原子之任一者介隔而具有COOH基與2個〇H基之含有羧 酸之二醇為必需成分的反應物,且亦可為所得之反應物與 介隔-COO-鍵而於分子中具有環氧基與乙稀性不飽和基之 化合物反應而所得之化合物。 而且’所述聚胺基甲酸自旨樹脂亦可為以下述通式(11 ) 所表示之二異氰酸酯與選自下述通式(12-1)〜通式(12_3) 所示之含有羧酸基之二醇的至少1種為必需成分之產物、 Ο 與下述通式(丨3·1)〜通式(13-16)所示之於分子中具有 環氧基及乙稀性不飽和基之化合物進行反應而所得之化人 物。 。 [化 11]In the case of N 1 "N and N. 79", paragraph "〇〇83" - paragraph "〇〇85", ν〇1~^·8 and Νο·13~Ν〇 18 are listed as compounds. The benzene compound is not particularly limited, and may be appropriately selected according to the need, and for example, the paragraph "〇080" to the paragraph "〇〇81" and paragraphs of the Japanese Patent Laid-Open Publication No. 2〇〇5_25〇438 The compound described in Can 9 to No. 12 in "〇〇84". Further, in the synthesis of the polyamino phthalate resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a substituent which does not react with an isocyanate group may be used in combination. . The diol compound having a substituent which does not react with an isocyanate group is not particularly limited and may be appropriately selected as needed, and for example, the paragraph "0087" to the paragraph "〇〇" of the Japanese Patent Laid-Open Publication No. 2005-250438 The compound described in 88". Further, in the synthesis of the polyurethane resin having an ethylenically unsaturated group in the side chain, in addition to the above diol compound, a diol compound having a plurality of groups may be used in combination. The diol compound having a thiol group is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a compound represented by the following formula (8) to formula (10). 29 201235781 —r jl ~τ-/vf !/*▲*· For the l〇ll〇4621 Chinese manual without underline repairΕ Revision date: May 10, 2011 [10] R15HO-L9-present -L10-〇H L11 Formula (8) COOH HO-L9-Ar-L10~OH L11 COOH HO-L9-N-L10-〇H L11 COOH General formula (9) Formula (10) (8) In the formula (10), R15 represents a hydrogen atom, and may have a substituent (for example, a cyano group, a nitro group, a halogen atom (-F, -a, -Br, -I), -CONH2, -COOR16, -OR16, -NHCONHR16, -NHCOOR16, -NHCOR16, -OCONHR16 (wherein R16 represents an alkyl group having a carbon number of 1 to 10 or a carbon number of 7 to 15) Dedicated to the base), aryl group, aryl group, alkoxy group, aromatic group. Preferred among these groups are a hydrogen atom, a condensed group having 1 to 8 carbon atoms, and an aryl group having 6 to 15 carbon atoms. In the above formula (8) to formula (10), l9, L10 and L11 may be the same or different, and each represents a single bond, and may have a substituent (for example, an alkyl group, an aralkyl group, preferably a divalent aliphatic or a hydrocarbon group of a aryl group, an alkoxy group, or a group of a group. Preferably, the base towels have a carbon number of i"2", and a carbon number of 6 to 15 exfoliation groups, and more preferably a broken 30 201235781 τ ι~τ«^ is the 101104621 Correction date in the number: May 10, 101, 10, and the instructions are not slashed to correct this ^ 1 to 8 alkyl groups. Moreover, it can also be seen in the L and LU: = Yes:: Other functional groups reactive with isocyanate groups, such as carbonyl can be described separately! ^Amino, ureido, shout. In addition, in the general formula (9), 〇 〇 彳 1 her base, the job is not controlled, and it may be appropriate to use &amp; preferably, preferably, the carbon number is 6 to 15 aromatic groups. The diol (s) to the diol having a carboxyl group represented by the formula (10) is particularly limited to be appropriately selected, and examples thereof include 3, 5: dibenzoic acid, 2, 2 _ Bis(transmethyl)propionic acid, 2,2-bis(2-transbasic = soil) propane k 2,2-bis(3-propylpropyl)propionic acid, bis(transmethyl)acetic acid, Phenylphenyl)acetic acid, 2,2-bis(ylmethyl)butyric acid, 4,4-bis(4-diphenyl)pentazone, tartaric acid, N,N-dihydroxyethylglycine , n, n_bis(2_ethylidene)-3-sulfanyl-propionamine, and the like. Due to the presence of such a group, characteristics such as hydrogen bonding property and solubility of the polyamino phthalic acid vinegar resin can be imparted, and it is preferable in this respect. More specifically, the polyamine group having an ethylenically unsaturated group in the side chain is a resin which is improved in the side chain, and more specifically, the ethylenically unsaturated group of the side chain is preferred. 〇.〇5 mm〇1/g~3 〇mm〇1/g, more preferably mmol5 mmol/g 2'7 mmol/g ' Particularly good is 〇75 mm〇i/g ~2.4 mmol/ g, and preferably having a carboxyl group in the side chain, and the acid value is preferably 2 〇 mgKOH/g to 120 mg K 〇 H/g ' More preferably 30 mg K0H/g to 11 〇 mgKOH/g 'excellent It is 35 mgK: 〇H/g~1〇〇mgKOH/g. Further, the acid value can be measured, for example, in accordance with JIS K〇〇7〇. Among them, 31 201235781 is the 1st HM621 Chinese manual without a slash correction. Amendment date: May 10, 101. When the sample is not dissolved, use dioxane or tetrahydrofuran as the solvent. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain can be synthesized by adding the above-mentioned diisocyanate compound and diol compound to an aprotic solvent and reacting with each other. Heating is carried out in accordance with a known catalyst of activity. The molar ratio (Ma: Mb) of the diisocyanate and the diol compound used in the synthesis is not particularly limited, and may be appropriately selected as needed. Preferably, it is 1: 1 to 1.2: 1 ' by alcohol or ^ The class or the like is treated to form a product having a desired physical property such as molecular weight or viscosity, in which a bear which does not have an isocyanate group remains. Further, the polyamino phthalic acid vinegar resin having an ethylenically unsaturated group in the side chain may be suitably used in a polyamino phthalate resin having a terminal of a polymer and a ethylenically unsaturated group in the main chain. By the end of the polymer, the main chain has an ethylenically unsaturated group, the photosensitive composition can be further mixed with the polyethyl phthalate resin of the pendant ethylenically unsaturated group or the side chain. The polyamine-based oxime having an ethylenically unsaturated group has a cross-linking reactivity to increase the strength of the photocured material. As a result, a material excellent in toughness is provided in a lithographic printing plate or the like which is used for a side chain having a polystyrene and a base. Introduction of an ethylenically unsaturated group at the end of the polymer: the method shown. That is, using the above-mentioned polymer terminal in the synthesis step of the sub-seven, carboxylic acid-lipid: , "I base" is not used by the lysate or the amine to carry the cleavage with the axis of the engraving and the base Or amines can be. 々, 32 201235781 I Λ. I is No. 101104621 Chinese manual without scribe correction. Amendment date: May 10, 101 as a compound of this kind 'specifically § first can be cited as a monofunctional with ethylenically unsaturated group The compound of the exemplified compound is exemplified by an alcohol or a monofunctional amine compound. In addition, from the viewpoints of easy control of the introduction, increase of the amount of introduction, and improvement of the efficiency of crosslinking reaction, it is preferred to introduce ethyl hydrazine into the polymer side chain more than the polymer terminal. base. The ethylenically unsaturated group to be introduced is not particularly limited, and may be appropriately selected as needed. In terms of crosslinkable cured film formability, allyl group, mercaptopropenyl group, acrylonitrile group, The vinylphenyl group is more preferably a mercaptopropenyl group or a propylene-based group, and a mercaptopropenyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the original preservability. Further, the amount of the mercaptopropenyl group to be introduced is not particularly limited and may be appropriately selected as needed, and it is preferably 〇.5 mmol/g to 3.0 mmol/g, more preferably in terms of ethylene and base equivalent. Preferably, 〇5 mm〇1/g~27 mmol/g, particularly preferably 0.75 mmol/g to 2.4 mmol/g. A method of introducing an ethylenically unsaturated group into a main chain, and a method of using a diol compound having an ethylenically unsaturated group in the main chain direction for the synthesis of a polyurethane resin. The diol compound having an ethylenically unsaturated group in the main chain direction is not particularly limited, and may be appropriately selected as needed, and examples thereof include cis-2-butene-1,4-diol and trans-_2-butylene] , 4_diol, polybutadiene glycol, and the like. The polyamino phthalate resin having an ethylenically unsaturated group in the side chain may also be used in combination with an alkali-soluble polymer as described above. The alkali-soluble polymer contains a structure different from the specific polyaminocarboxylic acid styrene resin. Polyamine A 33 201335781 « Λ- IA is the 101104621 Chinese manual without a slash correction. This amendment date: May 10, 101 acid ester resin. For example, the polyamino phthalate resin having an ethylenically unsaturated group in the side chain can be used in combination with a polyamine phthalic acid resin having an aromatic group in a main chain and/or a side chain. Specific examples of the (i) polyamino phthalate resin having an ethylenically unsaturated group in the side bond include, for example, paragraph "0293" of the Japanese Patent Publication No. 2〇〇5_25〇438. The polymer of pq to p_31 shown in the paragraph "0310". Preferred among these compounds are the polymers of p_27 and P-28 shown in the paragraph "〇3〇8" and paragraph "0309". - (ii) a polyamino phthalate resin obtained by reacting a fluorenyl-containing polyamino phthalic acid vinegar with a compound having an epoxy group and an ethylenically unsaturated group in the molecule - _ containing an enemy group The polyamino phthalate resin obtained by reacting a polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule is a component containing a diisocyanate and a diol containing a tickic acid group as an essential component. A polyurethane resin obtained by reacting a polyamino phthalic acid ester of a carboxyl group with a compound having an epoxy group and an ethylenically unsaturated group in the molecule. A low molecular weight diol having a weight average molecular weight of 3 Å or less or a low molecular weight diol having a weight average molecular weight of 500 or more as a diol component may be added as a copolymerization component. By using the polyglycolic acid g-based resin, the inorganic filler is excellent in dispersibility, crack resistance, or impact resistance, and thus heat resistance, moist heat resistance, adhesion, mechanical properties, and electrical properties are improved. . Further, the polyurethane resin is a divalent isocyanate which may have a substituent and a diisocyanate of an aromatic hydrocarbon, and a c atom and N 34 201235781 - TlT^VFjJlxT. Straight line correction This correction date: a reaction product in which any one of the atoms is separated on May 10, 101, and the carboxylic acid-containing diol having a COOH group and two 〇H groups is an essential component, and may also be obtained. A compound obtained by reacting a reactant with a compound having an epoxy group and an ethylenically unsaturated group in the molecule and a -COO-bond. Further, the polyaminocarbamic acid-based resin may be a diisocyanate represented by the following formula (11) and a carboxylic acid selected from the group consisting of the following formulas (12-1) to (12-3). At least one of the diols of the diol is an essential component product, Ο and the following formula (丨3.1) to (13-16) have an epoxy group and an ethylenic unsaturated group in the molecule. The resulting compound is obtained by reacting a compound. . [化11] OCN-R^NCO HO— R3 —C~R4 —OH COOH HO—R3—Ar— R4—〇H COOH HO—R3—N— R4 〇H COOH 通式(11) 通式(12-2) 通式(12-3) 其中,於所述通式(11)中,Ri表示亦可具有取代基 (例如較佳的是烷基、芳烷基、芳基、烷氧基、鹵基之任 35 201235781 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 一者)之二價之脂肪族或芳香族烴。所述R!亦可視需要而 具有並不與異氰酸酯基反應之其他官能基,例如酯基、胺 基甲酸Sa基、酿胺基、腺基之任一者。於所述通式(12-1 ) 中’ R2表示氳原子、亦可具有取代基(例如包括氰基、硝 基、鹵素原子(-F、-CU、-Br、-I)、-CONH2、-COOR6、-〇R6、 _NHCONHR6、-NHCO〇R6、_NHCOR6、-〇CONHR6、 -CONHR“此處,r6表示碳數為卜忉之烧基、碳數為7 〜15之芳烧基之任一者)等各基)之烷基、芳烷基、芳基、 烧氧基、或芳氧基。該些基中較佳的是氫原子、碳數為1 個〜3個之院基、碳數為6個〜15個之芳基。於所述通式 (m)、通式(12-2)及通式(12-3)中,R3、R4 及 R5 =分別相同亦可不同’表示單鍵、亦可具有取代基(例如 較t的^燒基、芳烧基、芳基、烧氧基、鹵基之各基)之 一價之脂肪族或芳香族烴。該些基中較佳的是碳數為1個 :20個之伸烷基、碳數為ό個〜15個之伸芳基,更佳的是 :數,1個〜8個之伸院基。而且,於所述R3、R4及R5 美亦7視、?要而具有並不與異氰酸酯基反應之其他官能 ^羰基、酯基、胺基甲酸酯基、醯胺基、脲基、醚 土之壬-者。另外,亦可由所述&amp; 個或3個而形忐掙Λ 士一 烴,較佳^ir表 有取代基之三價芳香族 二 的疋奴數為6個〜15個之芳香族基。 36 201235781 -*T I ~r^J wpxfl 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 [化 12] CH2=CRi4-CO〇-QJ-J2=CR*|4OO〇— R-(5_ o o ❹ CH2=CRi4COO- ^OCN-R^NCO HO— R3 —C~R4 —OH COOH HO—R3—Ar— R4—〇H COOH HO—R3—N— R4 〇H COOH General formula (11) General formula (12-2) (12-3) wherein, in the above formula (11), Ri represents a group which may have a substituent (for example, an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or a halogen group is preferred) 35 201235781 For the Chinese manual No. 101104621, there is no slash correction of the aliphatic or aromatic hydrocarbons of the divalent price of this revision date: one on May 10, 2011. The R! may optionally have any other functional group which does not react with the isocyanate group, such as an ester group, an amino group of the amino group, a Sa group, an amine group, or a gland group. In the general formula (12-1), 'R2 represents a halogen atom, and may have a substituent (for example, including a cyano group, a nitro group, a halogen atom (-F, -CU, -Br, -I), -CONH2, -COOR6, -〇R6, _NHCONHR6, -NHCO〇R6, _NHCOR6, -〇CONHR6, -CONHR "here, r6 represents any of the aromatic groups having a carbon number of argon and a carbon number of 7 to 15. Or an alkyl group, an arylalkyl group, an aryl group, an alkoxy group, or an aryloxy group. Among these groups, preferred are a hydrogen atom, a carbon number of 1 to 3, and a carbon group. The number is 6 to 15 aryl groups. In the above formula (m), formula (12-2) and formula (12-3), R3, R4 and R5 = respectively the same or different 'representation' a single bond, or an aliphatic or aromatic hydrocarbon having a substituent (for example, each of a t-alkyl group, an arylalkyl group, an aryl group, an alkoxy group, or a halogen group). It is preferred that the carbon number is one: 20 alkyl groups, carbon number ό 〜 15 aryl groups, more preferably: number, 1 ~ 8 of the extension base. R3, R4, and R5 are also observed, and have other functional groups that do not react with isocyanate groups. , an ester group, a urethane group, a guanamine group, a urea group, an ether soil. In addition, it is also possible to make a hydrocarbon by the &amp; or 3, preferably ^ir The number of the trivalent aromatic dinuclear having a substituent is 6 to 15 aromatic groups. 36 201235781 -*TI ~r^J wpxfl is the 101104621 Chinese manual without a slash correction. Amendment date: 1 〇1年10月10日[12] CH2=CRi4-CO〇-QJ-J2=CR*|4OO〇— R-(5_ oo ❹ CH2=CRi4COO- ^ o 〇o 〇 :0 QHj=CR-f 4ΌΟ N—R-j §—0~ Rig™ \ 通式(13-1) 通式(13_2) 通式(13-3) 通式(13-4) 通式(13-5) 通式(13-6) 通式(13-7) 通式(13-8) 37 201235781 nuujjiii 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10曰 [化 13] R14 CH2=CR14C〇N-Ri5 -…CH- OH CHjssCR^COORts_—τ'&quot;* HO.’'〜〆 -〇 通式(13-9) ^ CH^OCO :0 通式(13-10) CRi4〇OORi5'w— HO C〇〇CH〇:0 通式 C13-M) CH2^CR14€〇a r15 o- /— \ 通式(13-12) OH CH2— CR-ί 4COO —( O 通式〔13-13) CH2=CRi4COO- 通式(13-14) HO R 16 ^ CORtsO - COH ^15 通式(13-15) R, s~ 〇 十~ COR&quot;。COM R 扣 CH2=CR14COO-R1§ 〇( COR1sO-- )s·CON P I ~CC^isO^·—COHR^g CX I I ^ 通式(13-16) 其中,於所述通式(13-1 )〜通式(13-16)中,R14 表示氫原子或曱基,R15表示碳數為1〜10之伸烷基,r16 表示碳數為1〜10之烴基。P表示0或1〜10之整數。 38 20123578丄 ϋ Γ〇11〇4621號中文說明書無劃線修正本 修正日期:101年5月1〇臼 所述聚胺基曱酸酯樹脂特別適宜的是使所述通式(u ) 所表示之一異亂酸S旨與選自所述通式(12-1)〜通式(12-3 ) 所表示之含有羧酸基之二醇之至少1種的反應物,進—步 與所述通式(13-1)〜通式(13_16)之任一者所表示之於 分子中具有1個環氧基與至少1個(曱基)丙烯基的化合物 反應而所得之酸值為20 mgKOH/g〜120 mgKOH/g之驗可 溶性光交聯性聚胺基曱酸酯樹脂。 〇 該些高分子化合物可單獨使用,亦可併用2種以上。 -3有叛基之聚胺基曱酸g旨與於分子中具有環氧其 及乙烯性不飽和基之化合物反應而所得之聚胺基曱酸酯樹 脂之合成法… 作為所述聚胺基曱酸酯樹脂之合成方法,可藉由如下 方式而合成.將上述二異氰酸酯化合物以及二醇化合物, 於非質子性溶劑中添加與各自之反應性對應之活性之公知 觸媒而進行加熱。所使用之二異氰酸酯以及二醇化合物之 ◎ 彳,較佳的是G.8 : 1〜1.2 : 1,於聚合物末端殘存異氮 酸酯基之情形時,藉由醇類或胺類等進行處理而以最終並 不殘存異氰酸酯基之形態而合成。 一異鼠酸S旨— 所述通式(11)所表示之二異氰酸酯化合物並無特別 限制,可視需要而適宜選擇,例如可列舉曰本專利特開 2007-2030 !虎公報之段落「〇〇21」中所記载之化合物等。 含有羧酸基之二醇…_ 而且,所述通式(12-1)〜通式(12-3)所表示之具 39 201235781 I X I X 爲第1〇n则號中文說明書無劃線修正本 修正日期:101年5月1〇日 有羧基之二醇化合物並無特別限制,可視需要而適宜選 擇’例如可列舉日本專利特開2〇〇7_2_號公報之段落 「〇〇47」中所記載之化合物等。 -…不含羧酸基之低分子量二醇…_ 所述不含羧酸基之低分子量二醇並無特別限制,可視 需要而適宜選擇’例如可列舉曰本專利特開2〇〇7_2謂號 公報之段落「0048」中所記載之化合物等。 作為所述不含羧酸基之二醇之共聚量,較佳 子量二醇中之95 以下,更佳的是⑽_%以下,-特 佳的是50 mol%以下。所述共聚量若超過%瓜〇1%,則存 在不能獲得顯影性良好之胺基甲酸酯樹脂之現象。' 作為所述(ii)含有羧基之聚胺基甲酸酯與於分子中 具有環氧基及乙烯性不飽和基之化合物反應而所得之聚胺 基甲酸酯樹脂之具體例,例如可列舉將日本專利特開 2007_2030號公報之段落「0314」〜「0315」中所示之卩! U13 U1〜U4、U6〜U11之聚合物中的作為含有環氧基 及乙烯性不飽和基之化合物的丙烯酸縮水甘油酯,替換為 y基丙烯酸縮水甘油g旨、丙烯酸_ 3,4 _環氧環己基f基醋(商 品名:Cyd〇merA400 (大赛璐化學工業公司製造))、甲基 丙烯酸·3,4_環氧環己基甲醋(商品名:cyci〇merM400 (二 賽璐化學工業公司製造))而所得之聚合物等。 -酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂之 重量平均分子量― 所述酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂 40 201235781^ 爲第1〇1_丨號中文說明書無劃線修正本 修正日期侧年5月10日 之重量平均分子量並無特別限制,可視需要而適宜選擇, 較佳的疋2,000〜60,000,更佳的是3,〇〇〇〜50 000,特佳 的是3,000〜30,000。若所述重量平均分子量不足2 〇〇〇, 則存在無法獲得硬化膜於高溫時之充分之低彈性模數之現 象,右超過60,000,則存在塗佈適合性及顯影性惡化之現 象。另一方面,若重量平均分子量為2〇〇〇〜6〇〇〇〇,則於 將所述感光性組成物用於感光性抗焊劑中之情形時,抗龜 Ο 、雜性優異紐㈣液之非縣部之顯影性 優異。 另外’所述重量平均分子量例如可使用高速Gpc裝置 (東洋曹達工業股份有限公司製造之HLC_8〇2A),以〇 5 wt%之四氫呋喃(THF)溶液為試樣溶液,管柱使用【根 TSKgei HZM_M ’注入2〇〇队之試樣,藉由所述雨溶 液進订溶離’於25。(:下利用折射率檢測器或uv檢測器(檢 測波長為254 nm )而測定。 --酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂之 U 酸值-- 所述酸改貝含有乙烯性不飽和基之聚胺基曱酸酯樹脂 之酸值並無特別限制,可視需要而適宜選擇,較佳的是2〇 mgKOH/g〜12〇 mgK〇H/g ’ 更佳的是 3〇 mgK〇H/g〜110 mgKOH/g ’ 特佳的是 35 mgKOH/g〜1〇〇 mgK〇H/g。所述 酸值若不足20 mgKOH/g,則存在顯影性變得不充分之現 象’若超過120mgKOH/g ’則存在顯影速度過高而變得難 以控制顯影之現象。 41 201235781 T X Vj_»Al. A 修正日期:1〇1年5月日 爲第101 UM621號中文說明書無劃線修正本 另外,所述酸值例如可依據Jis K0070而進行測定。 其中’於樣品並不溶解之情形時’使用二。惡炫或四盡咕0占 等作為溶劑。 --酸改質含有乙烯性不飽和基之聚胺基曱酸酯樹脂之 乙烯性不飽和基當量-- 所述酸改質含有乙烯性不飽和基之聚胺基甲酸酯樹脂 之乙烯性不飽和基當量並無特別限制,可視需要而適宜選 擇,較佳的是0.05 mmol/g〜3.0 mm〇i/g,更佳的是〇5 mmol/g 〜2.7 mmol/g,特佳的是 〇 75 mm〇1/g 〜2 4 mmol/g。若所述乙烯性不飽和基當量不足〇 〇5 mm〇i/g,則 存在硬化膜之耐熱性差之現象;若超過3 〇 mm〇1/g,則 在硬化膜之脆性提高之現象。 、 所述乙烯性不飽和基當量例如可藉由測定溴值而求 出。另外,所述溴值例如可依據JISK26〇5而測定。 -酸改質含有乙稀性不飽和基之環氧樹脂_ 所述酸改質含有乙稀性不餘和基之環氧樹脂並無特別 限制’可視f要㈣輯擇,例如可列舉:於日本專利 則㈣號公報巾所記載之作為產物⑴鮮元酸奸 j應物驗改質含有乙烯性補和基之環氧樹脂,所述 iL⑴疋於1分子中具有至少2個以上環氧基的環氧化 :=a)與於1分子中具有至少2個以上羥基以及與環氧 基反應的除祕料之!個反縣的化合物⑻ 烯^飽和基之單缓酸(e)之產物;作為產物;;)與多 兀-夂酐(d)與含有乙烯性不飽和基之單異氰酸g旨⑷之 42 201235781 • a · 一 士 1 爲第lOUO462!號中文說嘯編線修正本 修正日期:UH年5月10日 產物的酸改質含有乙烯性不飽和基之環氧樹脂等,所述產 物(I)是於1分子中具有至少2個以上環氧基的環氧化合 物(a)與於1分子中具有至少2個以上魏基以及與環氧基 反應的除羥基以外之1個反應基的化合物(b)盥 二 性不飽和基之單羧酸(c)之產物。 所述酸改質含有乙烯性不飽和基之環氧樹脂可使用市 售品。所述酸改質含有乙烯性不飽和基之環氧樹脂之市售 Ο 品例如可列舉ZFR系列、CCR系列、PCR系列(曰本^ 藥公司製造)等。 -含有乙烯性不飽和基及羧基之丙烯酸樹脂_ 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂並無特 別限制,可視需要而適宜選擇,例如可列舉於由(曱基)丙 烯酸酯與含有乙稀性不飽和基且具有至少丨個酸基之化合 物而所得之共聚物之一部分酸基上,加成具有環氧基之(甲 基)丙烯酸酯而成的丙烯酸樹脂。 ◎ η此種丙烯酸樹脂例如可列舉曰本專利特開2009-86376 號公報中所記載之於由(甲基)丙烯酸酯與含有乙烯性不飽 和基且具有至少1個酸基之化合物而所得之共聚物之一部 分酸基上,加成(甲基)丙烯酸縮水甘油酯而成的改質共聚 物等。 所述含有乙烯性不飽和基及羧基之丙烯酸樹脂可使用 市售品。所述含有乙烯性不飽和基及羧基之丙烯酸樹脂的 市售品例如可列舉Cyclomer P 200HM(大赛璐化學工業公 司製造)等。 43 201235781 號中文說明書無劃線修正本 飯日期:1〇1年5月10曰 -聚醢亞胺前驅物_ 所述聚醯亞胺前驅物並無特別限制,可視需要而適寬 選擇,例如可列舉日本專利特開2〇1〇_6946號公報中所記 載之聚醯亞胺前驅物等。 --含有羧基之局分子化合物之含量__ 所述含有羧基之高分子化合物於所述感光性組成物中 之含量並無特別限制,可視需要而適宜選擇,相對於所述 感光性組成物之固形物而言’較佳的是5 wt%〜8〇 wt%, 更佳的是20 wt%〜75 wt%,特佳的是3〇 wt%〜7〇 wt%。 若所述含量从5 Wt%,畴在無法良好地保持抗龜 裂性之現^ ;若超過80 wt% ’贿在耐熱轉低之現象。 另一方面,若所述含量為所述特佳之範圍内,則於兼顧良 好之抗龜裂性與耐熱性之方面而言有利。 &lt;其他成分&gt; 所述其他成分例如可列舉熱塑性彈性體、埶硬化促進 劑、密接促進劑、熱聚合抑制劑、無機填充劑、著色劑、 有機溶劑、觸變性賦予劑、消泡劑、均化劑等。 -熱塑性彈性體(elastomer) - 藉由於所述感光性組成物中添加所述熱塑性彈性體, 可賦•予所述感光性組成物耐熱性、柔軟性 擇所述熱塑性彈性體並無特別限制,可it而適宜選 ^,例如可列舉苯乙烯系彈性體 '烯烴系彈性體、胺基甲 生體、聚醋系彈性體、聚醯胺系彈性體、丙烯酸 糸译性體、聚魏緖性體、樹膠改質之環氧 44 201235781 ~r 1 u ν,ρ,Π mm 101104621 修正日期:101年5月l〇日 些化合物可單獨使用1種,亦可併用2種以上。 般情性體包含硬鏈段成分與軟鏈段成分,- ΐ方2選擇,例如於顯影步驟之生產效率性 4方面而S,純的是具核可雜或膨潤性。 〇:0 QHj=CR-f 4ΌΟ N—Rj §—0~ RigTM \ General formula (13-1) General formula (13_2) General formula (13-3) General formula (13-4) General formula (13-5 ) General formula (13-6) General formula (13-7) General formula (13-8) 37 201235781 nuujjiii No. 101104621 Chinese manual no straight line correction This revision date: 1〇1年May 10曰[化13 ] R14 CH2=CR14C〇N-Ri5 -...CH- OH CHjssCR^COORts_—τ'&quot;* HO.''~〆-〇General formula (13-9) ^ CH^OCO :0 General formula (13-10 CRi4〇OORi5'w— HO C〇〇CH〇:0 Formula C13-M) CH2^CR14€〇a r15 o- /— \ General formula (13-12) OH CH2— CR-ί 4COO —( O General formula [13-13) CH2=CRi4COO- General formula (13-14) HO R 16 ^ CORtsO - COH ^15 General formula (13-15) R, s~ 〇10~ COR&quot;. COM R buckle CH2=CR14COO-R1§ 〇( COR1sO-- )s·CON PI ~CC^isO^·—COHR^g CX II ^ General formula (13-16) wherein, in the general formula (13-1) In the formula (13-16), R14 represents a hydrogen atom or a fluorenyl group, R15 represents an alkylene group having a carbon number of 1 to 10, and r16 represents a hydrocarbon group having a carbon number of 1 to 10. P represents an integer of 0 or 1 to 10. 38 20123578丄ϋ Γ〇11〇4621 Chinese manual without scribe correction This revision date: May 1st, 101. The polyamino phthalate resin is particularly suitable for the expression of the formula (u) One of the heterogeneous acids S is a reaction product selected from at least one selected from the group consisting of the carboxylic acid group-containing diols represented by the above formulas (12-1) to (12-3). An acid value of 20 obtained by reacting a compound having one epoxy group and at least one (fluorenyl) propenyl group in the molecule represented by any one of the general formulae (13-1) to (13-16) The soluble photocrosslinkable polyamine phthalate resin was tested at mgKOH/g~120 mgKOH/g. 〇 These polymer compounds may be used singly or in combination of two or more. -3 a method for synthesizing a polyamino phthalate resin obtained by reacting a polyamino decanoic acid g with a compound having an epoxy group and an ethylenically unsaturated group in the molecule... as the polyamino group The method for synthesizing the phthalate resin can be synthesized by adding the above-mentioned diisocyanate compound and diol compound to a non-protic solvent by adding a known catalyst having an activity corresponding to each reactivity. The diisocyanate to be used and the diol compound are preferably G.8: 1 to 1.2:1. When an isophthalate group remains at the terminal of the polymer, it is carried out by an alcohol or an amine. The treatment is carried out in such a manner that the isocyanate group does not remain at all. The isocyanic acid S is not particularly limited, and may be appropriately selected as needed, and for example, it may be exemplified in the section of the Japanese Patent Publication No. 2007-2030. Compounds and the like described in 21". a diol containing a carboxylic acid group. _ Moreover, the compound represented by the above formula (12-1) to the formula (12-3) is 39 201235781 IXIX is the first 〇n. Date: The diol compound having a carboxyl group on May 1st, 101, is not particularly limited, and may be appropriately selected as needed. For example, it can be exemplified in the paragraph "〇〇47" of the Japanese Patent Laid-Open Publication No. 2〇〇7_2_. Compounds and the like. - The low molecular weight diol having no carboxylic acid group... The low molecular weight diol having no carboxylic acid group is not particularly limited, and may be appropriately selected as needed. For example, it may be exemplified by the patent opening 2〇〇7_2 Compounds and the like described in paragraph "0048" of the Gazette. The copolymerization amount of the carboxylic acid group-free diol is preferably 95 or less, more preferably (10)% or less, and most preferably 50% by mole or less. When the amount of copolymerization exceeds 1% of guar, there is a phenomenon that a urethane resin having good developability cannot be obtained. Specific examples of the polyurethane resin obtained by reacting the (i) carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, The paragraphs shown in paragraphs "0314" to "0315" of the Japanese Patent Laid-Open Publication No. 2007_2030! In the polymer of U13 U1 to U4 and U6 to U11, glycidyl acrylate as a compound containing an epoxy group and an ethylenically unsaturated group, replaced by y-acrylic acid glycidol, acrylic acid _ 3,4 _ epoxy Cyclohexyl f-based vinegar (trade name: Cyd〇mer A400 (manufactured by Daicel Chemical Industries, Ltd.)), methacrylic acid, 3,4_epoxycyclohexyl ketone (trade name: cyci〇mer M400 (two celluloid chemical industry company) The polymer obtained by manufacturing)). - Acid-modified weight average molecular weight of a polyurethane resin containing an ethylenically unsaturated group - The acid modified polyurethane resin containing an ethylenically unsaturated group 40 201235781^ is the first _ 中文 Chinese manual without sizing correction The date of weight change on May 10th of this revision date is not particularly limited, and may be appropriately selected as needed. Preferably, 疋 2,000 to 60,000, more preferably 3, 〇〇〇 ~50 000, especially good is 3,000~30,000. If the weight average molecular weight is less than 2 Å, there is a case where a sufficiently low modulus of elasticity of the cured film at a high temperature cannot be obtained, and if the right side exceeds 60,000, coating suitability and developability are deteriorated. On the other hand, when the weight average molecular weight is 2 〇〇〇 to 6 〇〇〇〇, when the photosensitive composition is used in a photosensitive solder resist, the anti-turtle and the hybrid are excellent. The non-prefecture department has excellent developability. Further, the weight average molecular weight can be, for example, a high-speed Gpc apparatus (HLC_8〇2A manufactured by Toyo Soda Industrial Co., Ltd.), a wt5 wt% tetrahydrofuran (THF) solution as a sample solution, and a column using TSKgei HZM_M. 'Injection of the sample of the 2 , team, by the rain solution to dissolve the dissolution ' at 25. (: measured by a refractive index detector or a uv detector (detection wavelength of 254 nm). - Acid-modified U-acid value of a polyamino phthalate resin containing an ethylenically unsaturated group - the acid The acid value of the polyamino phthalate resin containing an ethylenically unsaturated group is not particularly limited, and may be appropriately selected as needed, preferably 2 〇 mgKOH/g to 12 〇 mgK 〇 H/g 'better. It is 3 〇 mg K 〇 H / g ~ 110 mg KOH / g ' Particularly preferred is 35 mg KOH / g ~ 1 〇〇 mg K 〇 H / g. If the acid value is less than 20 mg KOH / g, the developability becomes Insufficient phenomenon 'If it exceeds 120 mg KOH/g', the development speed is too high and it becomes difficult to control development. 41 201235781 TX Vj_»Al. A Revision date: May 1st, May 1st is 101st UM621 In addition, the acid value can be measured, for example, according to Jis K0070. In the case where 'the sample is not dissolved, 'use two. Ecstasy or tetradoxime 0 as a solvent. Ethylene unsaturated group equivalent of a polyamino phthalate resin containing an ethylenically unsaturated group - the acid The ethylenically unsaturated group equivalent of the polyurethane resin containing an ethylenically unsaturated group is not particularly limited and may be appropriately selected as needed, and is preferably 0.05 mmol/g to 3.0 mm〇i/g. Preferably, 〇5 mmol/g to 2.7 mmol/g, particularly preferably 〇75 mm〇1/g ~2 4 mmol/g. If the ethylenically unsaturated group equivalent is less than 〇5 mm〇i/g In addition, the heat resistance of the cured film is poor; when it exceeds 3 〇mm〇1/g, the brittleness of the cured film is improved. The ethylenically unsaturated group equivalent can be determined, for example, by measuring the bromine number. In addition, the bromine number can be determined, for example, according to JIS K26 〇 5. - Acid-modified epoxy resin containing ethylenically unsaturated group - The acid modification contains an epoxy resin and a base epoxy resin There is no particular limitation. For example, it can be exemplified by the Japanese Patent No. (4), which is described as a product (1) Fresh sorrel, which is an epoxy resin containing an ethylene-based compound. The iL(1) has an epoxidation of at least 2 or more epoxy groups in one molecule: = a) and at least 2 in 1 molecule In addition to the secret material, and the hydroxyl group reactive with an epoxy! a product of the anti-county compound (8) a product of the mono-supplemented acid (e); as a product;;) with a polyfluorene-phthalic anhydride (d) and a mono-isocyanate containing an ethylenically unsaturated group (4) 42 201235781 • a · 1 士 1 is the 1st OUO462! Chinese said the whistle line correction this revision date: UH, May 10, the acid modification of the product contains an ethylenically unsaturated group of epoxy resin, etc. I) is an epoxy compound (a) having at least two or more epoxy groups in one molecule, and one reactive group other than a hydroxyl group having at least two or more Wei groups in one molecule and reacting with an epoxy group. The compound (b) is a product of the monocarboxylic acid (c) of the bismuth unsaturation. Commercially available products can be used as the epoxy resin containing an ethylenically unsaturated group. The commercially available product of the acid-modified epoxy resin containing an ethylenically unsaturated group may, for example, be a ZFR series, a CCR series, or a PCR series (manufactured by PharmaTech Co., Ltd.). —Acrylic resin containing an ethylenically unsaturated group and a carboxyl group— The acrylic resin containing an ethylenically unsaturated group and a carboxyl group is not particularly limited, and may be appropriately selected as necessary, and examples thereof include (meth) acrylate and the like. An acrylic resin obtained by adding a (meth) acrylate having an epoxy group to a partial acid group of a copolymer having at least an acid group and having at least an acid group. η η such an acrylic resin is obtained by, for example, a (meth) acrylate and a compound having an ethylenically unsaturated group and having at least one acid group described in JP-A-2009-86376. A modified copolymer obtained by adding glycidyl (meth)acrylate to a part of the acid group of the copolymer. A commercially available product can be used as the acrylic resin containing an ethylenically unsaturated group and a carboxyl group. A commercially available product of the acrylic resin containing an ethylenically unsaturated group and a carboxyl group is exemplified by Cyclomer P 200HM (manufactured by Daicel Chemical Industries, Ltd.). 43 201235781 Chinese manual without sizing correction This meal date: 1 5 1 May 10 曰 - Polyimine precursor _ The polyimide precursor is not particularly limited, and can be selected as needed, for example The polyimine precursor described in Japanese Laid-Open Patent Publication No. Hei. No. Hei. The content of the macromolecular compound containing a carboxyl group __ The content of the polymer compound having a carboxyl group in the photosensitive composition is not particularly limited, and may be appropriately selected as needed, with respect to the photosensitive composition. The solid content is preferably from 5 wt% to 8 wt%, more preferably from 20 wt% to 75 wt%, particularly preferably from 3 wt% to 7 wt%. If the content is from 5 Wt%, the domain cannot maintain good resistance to cracking; if more than 80 wt%, the bribe is in a heat-resistant state. On the other hand, when the content is within the above-mentioned range, it is advantageous in terms of both good crack resistance and heat resistance. &lt;Other components&gt; Examples of the other components include a thermoplastic elastomer, a cerium hardening accelerator, an adhesion promoter, a thermal polymerization inhibitor, an inorganic filler, a colorant, an organic solvent, a thixotropic imparting agent, and an antifoaming agent. Homogenizer, etc. - a thermoplastic elastomer (elastomer) - The thermoplastic elastomer is added to the photosensitive composition, and the photosensitive composition can be imparted with heat resistance and flexibility. The thermoplastic elastomer is not particularly limited. For example, a styrene-based elastomer olefin-based elastomer, an amine-based elastomer, a polyester-based elastomer, a polyamine-based elastomer, an acrylic acid-translating body, and a poly-integrated property can be mentioned. Epoxy modified by body and gum 44 201235781 ~r 1 u ν,ρ,Π mm 101104621 Revision date: May, 2011. Some compounds may be used alone or in combination of two or more. The general body includes a hard segment component and a soft segment component, and the ΐ2 is selected, for example, in the production efficiency of the development step, and S is purely nuclear or swellable. 〇 :述J乙烯_生體、烯烴系彈性體、胺基甲酸醋系 系彈性體、聚醯胺系彈性體、丙稀酸系彈性 彈性體、卿改質之環氧樹脂例如可列舉 =本專利㈣2G09_()14745號錢之段㈣ 中所記載者等。 」 心 -熱塑性彈性體之含量__ 所述熱塑性彈性體於所述感光性組成物中之含量並益 ^別限制’可視f要而適宜選擇,相對於所述感光性組成 物之固形物而言’較佳的是1 Wt%〜5G wt%,更佳的是2 wt/〇 20 wt/i) ’特佳的是3 wt%〜1〇 wt%。若所述含量不 足1 Wt% ’則存在抗龜裂性差之現象;若超過50 wt%,則 f在未曝光部並不由於顯影液而溶出之現象。另一方面, 右所述含置為所述特佳之範圍内’則於提高顯影性或抗龜 裂性方面而言有利。 _熱硬化促進劑_ 所述熱硬化促進劑並無特別限制,可視需要而適宜選 擇,例如可列舉日本專利特開2〇〇7_2〇3〇號公報之段落 「0101」中所記载之化合物等。 45 201235781 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月1〇曰 -熱硬化促進劑之含量-- 所述熱硬化促進劑於所述感光性組成物中之含量並無 特別限制’可視需要而適宜選擇,相對於所述感光性組成 物之固形物而言,較佳的是0.01 wt%〜2〇 wt%,更佳的是 0.05 wt%〜15 wt% ’特佳的是〇·ΐ wt%〜10 wt%。若所述 熱硬化促進劑之含量不足〇.〇1 wt%,則存在無法表現硬化 臈之強韌性之現象;若超過20 wt%,則存在感光性組成物 之保存穩定性惡化之現象。另一方面,若所述熱硬化促進 劑之含量為所述特佳之範圍内,則於提高感光性組成物之 保存穩定性及硬化膜物性之方面而言有利。 -密接促進劑- 所述密接促進劑並無特別限制,可視需要而適宜選 擇,例如可列舉日本專利特開2007-2030號公報之段落 「0108」中所記載之化合物等。 —密接促進劑之含量— 所述密接促進劑於所述感光性組成物中之含量並無特 別限制’可視需要而適宜選擇’相對於所述感級組成物 之固形物而言,較佳的是〇·() i Wt%〜2G g,更佳的是〇 〇5 職〜Μ Μ% ’特佳的(Q4〜μ㈣。若所述密接 促進劑之含量不足G‘〇l wt% ’則存在無法表現出硬化膜之 ,輪性之現象;若超過2G wt%,畴在感光隨成物之保 二性惡化之現^ m若所述含量為所述特佳之範 圍内’則於提高感紐組成物之保存穩定性及硬化膜物性 之方面而言有利。 46 201235781 爲第1011G4621齡書細線修_ 修正日期:1〇1年5月1〇日 -熱聚合抑制劑_ 擇抑制劑並無特別限制,可視需要而適宜選 擇’例如可列舉曰本專利 、且进 「簡」中所記載之化=。2咖物之段落 -無機填充劑- Ο 摆適宜選 擇二較佳的疋含有平均粒徑(d5〇)為㈣帅〜 ^ :乳化雜子。藉由使魏無機填純含有二氧 艾,可使硬化狀物域高,且與含有録之高分子: 佳之範_,從峨得健之塗佈適合性。轉為車父 所述二氧化石夕粒子中之二氧化石夕並無特別 需要而適宜選擇,例如可列舉氣相法二氧切、沾曰^視 氧化矽、熔融二氧化矽等。 。日日! 生一 Ο 所述二,粒子之平均粒徑()並無特別限制, 了視需要而適宜選擇,較佳的是⑪一〜3。_ = 疋0.1 μιη二2」5^n,特佳的是〇」μπι〜2 〇从取。 的 若所述-氧化石夕粒子之平均粒徑(d5〇)不足〇 則存在塗佈黏度變高之現象;若超過3 〇帅存^ 維持平·之現H方面,若雜二氧切 均粒徑(d50)為所述特佳之範圍内,則於 I 膜之平滑性糾熱性方_対利。 〜硬化 另外,所述二氡化石夕粒子之平均粒徑(咖 (累積)重量百分率而表示時之累計值5()%之粒度而定義 47 201235781 修正日期:101年5月〗0日 爲第丨01 HM621號中文說明書無劃線修正本 者’定義為d50(D50)等,例如使用動態光散射光度計(商 品名DLS7_、大塚電子股份有限公司製造),將測定原 理設為動態光散射法,將尺寸分布解析手法設為累積法及/ 或分布圖法而進行測定。 -無機填充劑之含量― 別限:述充劑於所述感光性組成物中之含量並無特 ’相對於所述感光性組成物 以/叨。孕乂佳的疋1 wt%〜6〇wt% i5jt%〜6() wt% °若所述無機填充劑 ::二 量為所述特伟夕铲图# 方面’若所述含 面而言=内’則於提高圖案形成性與耐熱性方 -著色劑_ 所述著色劑並無特別限制 使用;色顏料或自公知之染料中適宜選擇,可 所述著色顏料並無特別_ 木料。 :如可列舉曰本專利特開2007棚‘而適宜選擇, 中所記载之化合物等。 之段落「0106」 所述著色劑於所述感光 制’可視需要而適宜選擇。之含量並無特別限 -有機溶劑_ 例=述有機溶劑並無特別限制,可視需I 可列舉日本專利特開平i 要而適宜選擇, υ號公報之段落 48 201235781 爲第1011〇4621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 ,43」=記載之化合物、曰本專利特開跡2 公報之段落「0121」中所記载之化合物等。 -有機溶劑之含量 〇 所述有機溶劑於所述感光性組成物中之含量並益特別 P艮制’可視需料適宜選擇,相對於所述感紐組之 固形物而言’較佳的是丨wt%〜8G福,更佳的是2感 二曰0 wt%,特佳的是3 wt%〜6〇 _/〇。若所述有機溶劑之 3篁不足i Wt% ’則存在組成物之黏度高且塗膜之形成變 困難之現象;若超過8 G W t %,則所期望之膜厚之控制變困 難。另-方面,若所述有機關之含量為所述特佳之範圍 内,則於塗膜製造適合性方面而言有利。 (感光性抗焊劑組成物) 本發明之感光性抗烊劑组成物含有所述本發明之减光 性組成物。 〜 藉由本發明之感光性抗焊劑組成物,可獲得絕緣性、 〇 圖案侧面之平滑性、耐鍍敷性優異之抗焊劑。 (感光性抗焊劑膜) 本發明之感光性抗焊劑組成物亦可藉由塗佈於形成有 導體配線之基板上加以乾燥而作為液狀光阻使用,對 造感光性抗焊劑膜特別有用。 ' 本發明之感光性抗焊劑膜至少包含支撐體愈 較佳的是包含保護膜,進—步視需要包含塾(⑶-η);、 阻氧層(以下有時簡稱為rpc層」)等其他層。 所述感光性抗焊劑膜之形態並無特別限i,可視需要 49 201235781 HlHJUpill 爲第101104621號巾文說明書無劃線修正本 修正日期:1〇1年5月K)日 而適宜選擇,例如可列舉··於所述支撐體上順次具有所述 感光層、所述保護膜之形態,於所述支撐體上順次具有所 述PC層、所述感光性層、所述保護膜之形態,於所述支 撐體上順次具有所述墊層、所述pc層、所述感光層、所 述保護膜之形態等。另外,所述感光層可為單層亦可為多 層。 &lt;支撐體&gt; 要而適宜選擇,較 良好,更佳的是表 所述支撐體並無特別限制,可視需 佳的疋可剝離所述感光層且光之透過性 面之平滑性進一步良好。 =切ϋ並無__,可視•㈣宜 如可列舉透明之合成樹脂製膜。 所述透明之合成樹脂製膜並無特 適宜選擇’例如可列舉聚對苯二曱酸乙二=ΖΪ 乙二醋、聚丙烯、聚乙烯、三乙酸纖維素了乙二;;酸 :甲基)丙稀酸_、聚(曱基)丙豨‘乙 埽聚乙烯醇、聚碳酸醋、聚苯乙稀 … 乙烯共聚物、聚醯胺、聚醯亞胺、氣 來烏一虱 物、聚四氟乙嬌、Κ 烯-乙酸乙烯酯共聚 伞四氟乙知、t二鼠乙婦、纖維 種塑膠膜等。該些支撐體可單獨使用1種、=龍^各 以上。於該些支撐體巾,所述透明之 亦可併用2種 是聚對苯二甲酸乙二酯。 Q成樹脂製膜較佳的 所述支撐體並無特別限制,可視啦 如可列舉日本專稱開平㈣㈣^“適宜選擇’例 'U 4報、曰本專利特開 50 201235781 爲第101KM621號中文說明書無劃線修正本 修正日期:丨〇1年5月10日 :號公報、日本專利特開平5_17332G號公報、日 本專利特開平5-72724號公報等中所記載之支撐體等。 擇’可視需要而適宜選 擇,更佳的是5_〜17&gt;。 擇Sit 無特別限制,可視需要而射選 擇,較L的疋長條狀。所述長條狀支撐體之 〇 限制,可視需要而適宜選擇,較佳 X、、,、寺別 &lt;感光層 &gt; 早〜20,_m。 而形i斤述感光層可藉由本發明之所述感光性抗焊劑組成物 所述感光層於所述感光性抗焊劑膜 ϊ別限制’可視需要而適宜選擇,通常積‘所述支撐體 所述感光層之厚度並無特別限 擇,較佳的是3 _〜100帅, J視南要而適且選 所述感光層之形成方法可列舉如下之路 之所述感光性抗焊劑組成物溶解 明 所述支撐體上,使=燥=層將該溶液直接塗佈於 可視物溶液之溶劑並無特別限制, 胺、二甲基亞二::二子基甲釀胺、二甲基乙釀 所述醇類例如可列料醇、乙醇、正丙醇、異丙醇、 51 201235781 修正日期:101年5月10日 ϊ^υ/ίΰΐ〇4621號中文說明書無劃線修正本 正丁醇、第二丁醇、正己醇等。 所述酮類例如可列舉丙酮、丁酮、甲基異丁基酮、環 己酮、二異丁酮等。 所述醋類例如可列舉乙酸乙醋、乙酸丁醋、乙酸正戊 醋、硫酸甲S旨、丙酸乙酉旨、鄰苯二甲酸二甲酿、苯甲酸乙 酯、乙酸甲氧基丙酯等。 ^所述芳香族烴類例如可列舉曱苯、二曱笨、苯、乙基 苯等。 尸坏述國代煙類例如可列皇 灰只1J夕J舉四录二虱乙烯、氯仿、 M,l-二虱乙烷、二氯曱烷、單氯苯等。 所述_例如可列舉四氯 鱗、乙二醇單乙峻、L甲氧基_2_丙醇等。秘乙一醇早甲 物可單獨使用1種,亦可併用2種以上。 限制錄狀目職濃度並無特別 更佳的是Hwt%〜5GwtG/f。較佳的疋1G㈣〜德, 所述塗佈之方法並無特別限制 擇,例如可列舉使用斿涂 祝而要而適且選 佈機、簾幕式塗佈^等而亩^狹縫旋塗機、輕塗機、模塗 所述乾燥之條件並盔特體上之方法。 擇’雖然因各成分、ζϋΓΙ,可視f要而適宜選 常情況下是於6(rc〜 吏用比例等而異’但通 右。 /皿度下進行30秒〜15分鐘左 &lt;保護膜&gt; 52 201235781 爲第__21號中文_書_線修正本 修正日期:⑻年5月10曰 ,述保護膜具有防止所述感光層之污垢或損傷而保護 所述感光層之功能。 斤述保邊膜於所述感光性抗焊劑膜中所設之位置並盈 =1制’可視需要而教騎,騎情訂設於所述^ Ο 石夕氧Γΐ護膜例如可列舉於所述切體中所使用者,聚 氟乙稀薄片曰ί有聚乙稀、聚丙婦之紙、聚烯烴薄片、聚四 擇,之厚度並無特別限制,可視需要而適宜選 〜100卿’更佳的是—〜30师。 所述支撐’較佳的是所述感光層及 是接=^力椒保敝接著力β 如可:護膜之組合(支細保護膜)例 ο 二甲酸乙二,輯苯二甲酸乙^胺/聚㈣、聚對苯 處理而支撐體及保護膜之至少任-者進行表面 之表面處理,著力之關係。作為所述支撐體 ::如可列舉下塗層之塗力而實施, =照射處理、高頻波照射處理、紫 性電裝照射處理1射光線照射處=放電照射處理、活 而且,所述支撐體與所述保護膜之靜摩擦係數較佳的 53 201235781 爲第101104621號中文說明書無劃線修正本 修正賺簡年5月10日 是0.3=4 ’更佳的是〇 5〜12。若所述靜摩捧 之3現ί 製二狀之情形時產峨偏移 現象。 Μ貝,】存在變得難以捲為良好之車昆狀之 需要方法並無特別限制’可視 以長條狀而捲為捲繞於圓筒狀之捲芯上, 性抗焊劑膜之長度並無__, 為了便於使用者亦可 ==;:::;:r 行捲繞,,二 防止邊緣融合之觀點考慮 保蠖、 別是防濕性之間隔物、放置間隔物(特 的是包裝亦使用透:二^之間隔物)’而且較佳 光層=:::表護膜與所述感 述保護膜之表面形成包含聚有機㈣=面於所 等聚合物之下塗層。作為該下4: _述聚合物之塗佈液㈣㈣ 表面之後,於3(rc〜⑽。c (_是5代 】分鐘〜30分鐘之乾燥而形成。 2〇c)下進行 而且’除了所述感光層、所述切體、所述保護厲以 54 201235781 爲第101104621號中文說明書無劃線修正本 修正曰期:1〇1年5月10日 外,亦可包含墊層、阻氧層(pC層)、剝離層、接著層、 光吸收層、表面保護層等層。 所述墊層疋於常溫下無黏性,於真空及加熱條件下進 行積層之情形時溶融、流動之層。 所述PC層通常是以聚乙烯醇為主成分而形成之1.5 μπι左右之覆膜。 所述感光性抗焊劑膜具有表面之黏性小,層壓性及使 0 用性良好,絕緣性、耐鍍敷性、圖案側面之平滑性優異之 積層有感光性抗焊劑組成物之感光層。因此,可廣泛用作 印刷線路板、彩色濾光片或柱材、肋材、間隔物、隔板等 顯示器用部件,全像片、微機器、打樣機等永久圖案形成 用途’且可適宜地用於本發明之永久圖案及其形成方法中。 特別是本發明之感光性抗焊劑膜,由於該膜之厚度均 一’因此於形成永久圖案時,可更精細地積層於基材上。 (永久圖案及永久圖案形成方法) 本發明之永久圖案可藉由本發明之永久圖案形成方法 U 而獲得。 作為所述永久圖案,較佳的是保護膜、層間絕緣膜及 抗焊圖案之至少任一者。 所述永久圖案為抗焊圖案之情形時,22〇°c下之動彈性 係數較佳的是20 MPa〜100 MPa,更佳的是25 MPa〜80 MPa ’特佳的是3〇 MPa〜50 MPa。若該動彈性係數不足 20 MPa ’則存在耐熱性差之現象;若超過1〇〇Mpa,則存 在耐熱衝擊性差,於硬化膜上產生龜裂之現象。 55 201235781 414^〇pm 爲第㈣G彻號中文說明書無劃線修正本 修正日期駕年5月1〇日 本發明之永久圖案形成方法之第!態樣是將本發明之 感光性抗焊劑組成物塗佈於基材表面上,進行乾燥而形 感光層後,進行曝光(曝光步驟)、顯影(顯影步驟)。 而且,本發明之永久圖案形成方法之第2態樣是於加 熱及加壓之至少任-者下將本發明之感光性抗焊劑膜積層 於基材之表©後’進行曝光(曝光步驟)、顯影(顯影步驟)。 以下,通過本發明之永久圖案形成方法之說明亦使本 發明之永久圖案之詳細變明瞭。 &lt;基材〉 、 η 所述基材並無特別限制,可視需要而適宜選擇,例如 可列舉覆銅積層板等印刷線路板形成用基板、納玻璃板等 玻璃板、合成樹脂性之膜、紙、金屬板等。 該些基材中,於可實現半導體等於多層配線基板或增 層配線基板等上之高密度封裝化之方面而言,較佳的是已 形成有配線之印刷線路板形成用基板。 所述基材可形成如下之積層體而㈣:作為所述第1 態樣之於該基材上形成所述感光性抗焊劑組成物之感光層 0 的積層體,或者作為所述第2態樣之明述感光性抗焊&amp; 膜中之感光層重#之方式進行積層而成之積層體。亦即, 可對所述積層體中之所述感光層進行後述之曝光,藉此使 曝光之區域硬化,然後藉由後述之顯影而形成永久圖荦。 &lt;積層體&gt; 所述第1態樣之積層體之形成方法並無特別限制,可 視需要而適宜選擇,較佳的是於所述基材上積層塗佈所述 56 201235781 修正日期:1〇1年5月1〇曰 爲第丨01104621號中文說明書無劃線修正本 感光性抗焊劑組成物並加以乾燥而形成之感光層。 =述塗佈及乾狀方法並無制限制,可視需要而適 且j擇’例如可解使賤塗機、狹縫旋塗機、輕塗機、 ==幕式塗佈機等而塗佈所述感光性抗焊劑組成 „態樣之積層體之形成方法並無特別限制,可 〇 G = t佳的是—面對所述感光性膜進行加 及加堡之至^、任—者—面將其積層於所述基材上之方 =^外,於所聽級抗㈣臈具麵魏制之情形 時,較佳的是將該保護膜剥離, 基材上之方式而進行積層。 層重喊所述 ,述加熱之溫度並無__,可視需要 擇,較佳的是m:〜13(rc,更佳岐8叱〜⑽。c。^ 所述加壓之壓力並無特別限制,可 擇,較佳的是0.01 MPa〜1.0 MPa 1.0 MPa。 旯隹的疋0.05 MPa〜 進行所述加熱及加壓之至少任一者的裝置並益 =’ ^視需要而適宜選擇,例如可列舉熱壓機、執親貼人 11 Tmsei Laminator Co., Ltd.tit^ VP_„) . ^ : 如之名裝機置製作所股份有限公司製造之等 &lt;曝光步驟&gt; =曝光步驟是對所述感光層進行圖案曝光之步驟。 作為所达曝光之對象,只要是具有感光層之材料則並 57 201235781 HIHJOpm 爲第1011046U號中文說明書無劃線修正本 修正日期:1〇1年5月10日 無特別限制,可視需要而適宜選擇,較佳的是對在基材上 形成有所述感光性抗焊劑組成物或所述感光性抗焊劑膜之 所述積層體進行。 所述對積層體之曝光並無特別限制,可視需要而適宜 選擇,例如可介隔所述支撐體、墊層及PC層而對所述感 光層進行曝光;亦可將所述支撐體剝離後,介隔所述墊層 及PC層而對所述感光層進行曝光;亦可將所述支撐體及 墊層剝離後,介隔所述PC層而對所述感光層進行曝光; 亦可將所述支撐體、墊層及PC層剝離之後,對所述感光 所述曝光並無特別限制,可視需要而適宜選擇,可列 舉數位曝光、模擬曝光等。該些中較佳的是數位曝光。 所述數位曝光並無特別限制,可視需要而適宜選擇, 例如較佳的是基於所形成之圖案形成信息而生成控 號,使用與該控制訊號對應地調變之光而進行。卫° 所述數位曝光之機構並無特別限制,可視需要 選擇,例如可列舉照射光之光照射機構、基於所 案信息而使自該光照射機構所照射之光調變的光‘變:; 專0 «光調變機構》 ’則並無 n個描素 作為所述光調變機構,只要可對光進行調變 特別限制,可視需要而適宜選擇,較佳的是呈2 部之光調變機構。 有 所述具有η個描素部之光調變機構並無特別限制,可 58 201235781 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 視需要而適宜選擇,較佳的是空間光調變元件。 所述空間光調變元件並無特別限制,可視需要而適宜 選擇,例如可列舉數位微鏡裝置(Digital Micro-minOr Device,DMD)、微機電系統(Micro Electro Mechanical Systems, MEMS )類之空間光調變元件(SLM; Spatial Light Modulator)、利用電光效應對透射光進行調變之光學元件 (PLZT元件)、液晶光閘(FLC)等。: J ethylene _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ (4) Those recorded in paragraph 2 (4) of 2G09_() 14745. The content of the core-thermoplastic elastomer __ the content of the thermoplastic elastomer in the photosensitive composition is advantageously selected as appropriate, relative to the solid content of the photosensitive composition. It is preferable that 1 Wt% to 5G wt%, more preferably 2 wt/〇20 wt/i) 'excellent is 3 wt% to 1 wt%. If the content is less than 1 Wt%', the crack resistance is poor. When it exceeds 50% by weight, f is not eluted by the developer in the unexposed portion. On the other hand, the inclusion of the right side in the above-mentioned range is advantageous in terms of improving developability or crack resistance. _Thermal hardening accelerator _ The thermosetting accelerator is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a compound described in paragraph "0101" of JP-A-2-27-2〇3〇. Wait. 45 201235781 is the Chinese manual No. 101104621. There is no slash correction. The date of this revision: May 1st, 1st, 1st - the content of the thermal hardening accelerator - the content of the thermosetting accelerator in the photosensitive composition It is not particularly limited to being appropriately selected as needed, and is preferably 0.01 wt% to 2 wt%, more preferably 0.05 wt% to 15 wt%, relative to the solid content of the photosensitive composition. Particularly good is 〇·ΐ wt%~10 wt%. When the content of the thermosetting accelerator is less than 〇1〇%, there is a phenomenon that the toughness of the hardened enamel cannot be expressed. When it exceeds 20% by weight, the storage stability of the photosensitive composition is deteriorated. On the other hand, when the content of the thermosetting accelerator is within the above-described range, it is advantageous in terms of improving the storage stability of the photosensitive composition and the physical properties of the cured film. - The adhesion promoter - The adhesion promoter is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a compound described in paragraph "0108" of JP-A-2007-2030. —The content of the adhesion promoter—the content of the adhesion promoter in the photosensitive composition is not particularly limited to be appropriately selected as needed. Relative to the solid matter of the level composition, preferably Yes 〇·() i Wt%~2G g, more preferably 〇〇5 jobs~Μ Μ% 'extra good (Q4~μ(4). If the content of the adhesion promoter is less than G'〇l wt%' then There is a phenomenon that the hardened film cannot exhibit a roundness; if it exceeds 2 G wt%, the domain is deteriorated in the retention of the photosensitive composition, and if the content is within the above-mentioned range, the feeling is improved. It is advantageous in terms of storage stability and physical properties of the cured film. 46 201235781 For the 1011G4621 book book fine line repair _ Revision date: May 1st, 1st, 1st - Thermal polymerization inhibitor _ Selective inhibitor It is particularly limited and can be selected as needed. For example, it can be cited in this patent, and it is described in the "Simplified". 2 paragraphs of the coffee - inorganic filler - Ο suitable for the selection of two preferred 疋 containing average particles The diameter (d5〇) is (four) handsome ~ ^: emulsified miscellaneous. By making Wei no Filling purely with dioxin, the hardened material is high, and it is combined with the recorded polymer: Good _, from the coating suitability of 峨得健. The cerium dioxide is not particularly necessary and is suitable for selection, and examples thereof include gas phase dioxotomy, bismuth oxide oxidized cerium oxide, molten cerium oxide, etc., daily, raw Ο, the second, the average particle size The diameter () is not particularly limited, and is appropriately selected as needed, preferably 11 to 3 . _ = 疋 0.1 μιη 2 2" 5^n, particularly good is 〇"μπι~2 〇 从. If the average particle diameter (d5〇) of the oxidized stone particles is insufficient, the coating viscosity becomes high; if more than 3 〇 存 ^ 维持 维持 维持 维持 维持 维持 维持 维持 维持 维持 , , , When the diameter (d50) is within the above-mentioned range, the smoothness of the I film is corrected. The hardening is further represented by the average particle diameter (calculated by the coffee). The cumulative value of the time is 5 ()% of the granularity and is defined 47 201235781 Revision date: May, 2011, the 0th is the first 丨01 HM621 In the specification, the definition is d50 (D50), and the dynamic light scattering photometer (trade name: DLS7_, manufactured by Otsuka Electronics Co., Ltd.) is used, and the measurement principle is defined as a dynamic light scattering method to analyze the size distribution. The method is performed by the accumulation method and/or the profile method. - The content of the inorganic filler - the content of the filler in the photosensitive composition is not particularly 'relative to the photosensitive composition叨 wt 乂 wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt wt 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机 无机The inclusion of the surface = the inner portion is to improve the pattern formability and the heat resistance. The colorant is not particularly limited. The color pigment or the known dye is suitably selected, and the coloring pigment is not particularly _ timber. : For example, the compounds described in the "Special Selections", and the compounds described in the article can be cited. In the paragraph "0106", the coloring agent is appropriately selected depending on the needs of the photosensitive film. The content is not particularly limited - organic solvent _ Example = The organic solvent is not particularly limited, and may be selected as a Japanese patent, and may be selected as a Japanese Patent Application No. 48 201235781 is the Chinese manual No. 1011〇4621 There is no slash correction. The date of this revision: May 1, 1st, May, 43" = the compound described, and the compound described in paragraph "0121" of the essay of this patent. - the content of the organic solvent 〇 the content of the organic solvent in the photosensitive composition and the special P ' 'optional selection is appropriate, relative to the solids of the sensory group' is preferred丨wt%~8G Fu, more preferably 2 senses 曰0 wt%, especially good 3 wt%~6〇_/〇. If 3 篁 of the organic solvent is less than i Wt% ', the viscosity of the composition is high and the formation of the coating film becomes difficult. If it exceeds 8 G W t %, the control of the desired film thickness becomes difficult. On the other hand, when the content of the above-mentioned organ is within the above-mentioned range, it is advantageous in terms of suitability for coating film production. (Photosensitive solder resist composition) The photosensitive anti-caries composition of the present invention contains the above-described light-reducing composition of the present invention. ~ By the photosensitive solder resist composition of the present invention, it is possible to obtain a solder resist having excellent insulating properties, smoothness of the side surface of the ruthenium pattern, and excellent plating resistance. (Photosensitive solder resist film) The photosensitive solder resist composition of the present invention can be used as a liquid photoresist by being applied to a substrate on which a conductor wiring is formed and dried, and is particularly useful for producing a photosensitive resist film. The photosensitive resist film of the present invention preferably contains at least a support film, and contains a protective film, and further includes ruthenium ((3)-η), an oxygen barrier layer (hereinafter sometimes abbreviated as rpc layer), etc. Other layers. The shape of the photosensitive solder resist film is not particularly limited to i, and may be selected as required by the method of 2012 201281 HlHJUpill No. 101104621, which has no underline correction date: 1〇1 May 5). In the form of the photosensitive layer and the protective film in the form of the protective layer, the PC layer, the photosensitive layer, and the protective film are sequentially provided on the support. The support body sequentially has the pad layer, the pc layer, the photosensitive layer, the shape of the protective film, and the like. Further, the photosensitive layer may be a single layer or a plurality of layers. &lt;Support; It is preferable to select it as appropriate, and it is more preferable that the support is not particularly limited, and the photosensitive layer can be peeled off, and the smoothness of the light transmissive surface is further improved. . = There is no __ in the cut, and it is visible. (4) It is advisable to exemplify a transparent synthetic resin film. The transparent synthetic resin film is not particularly suitable for selection, for example, polyethylene terephthalate, ethylene diacetate, polypropylene, polyethylene, cellulose triacetate, and ethylene; )Acrylic acid _, poly (fluorenyl) propylene 豨 ' acetyl alcohol, polycarbonate, polystyrene ... ethylene copolymer, polyamine, polyimine, gas, uranium, poly Tetrafluoroethylene, decene-vinyl acetate copolymer umbrella tetrafluoroethylene, t two mouse, women, fiber plastic film. These support bodies can be used alone or in combination with each other. For the support tissues, the transparent ones may be used in combination with two kinds of polyethylene terephthalate. The support body which is preferably formed by forming a resin into a resin is not particularly limited, and may be exemplified by the Japanese name Kaiping (4) (4) ^ "suitable selection" example 'U 4 newspaper, 曰本专利特开50 201235781 is the 101KM621# Chinese In the specification, there is no slash correction. The date of the correction is as follows: 支撑 公报 5 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视 可视More suitable is needed, preferably 5_~17&gt; There is no special restriction on Sit, and it can be selected as needed, which is longer than L. The length of the long support is limited and can be selected as needed. Preferably, X,,,, temple, &lt;photosensitive layer&gt; is earlier than 20, _m. The photosensitive layer can be formed by the photosensitive layer of the photosensitive resist composition of the present invention. The size of the solder resist film is limited to 'optional and can be selected as appropriate. Generally, the thickness of the photosensitive layer of the support is not particularly limited. It is preferably 3 _~100 handsome, and J is suitable for the south. The method for forming the photosensitive layer can be selected The photosensitive solder resist composition of the following method dissolves the support on the support, so that the solvent of the dry solution is directly applied to the visible solution, and the amine, dimethyl sub: : bis-mercaptoamine, dimethyl ethyl alcohol, such as alcohol, ethanol, n-propanol, isopropanol, 51 201235781 Revision date: May 10, 2011 ϊ^υ/ίΰΐ〇4621 The Chinese manual has no underline to correct the n-butanol, the second butanol, the n-hexanol, etc. Examples of the ketone include acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, and diisobutyl ketone. Examples of the vinegar include ethyl acetate, butyl acetate, n-pentyl acetate, sulfuric acid, sodium propionate, phthalic acid, ethyl benzoate, methoxypropyl acetate, and the like. ^ The aromatic hydrocarbons include, for example, anthracene, quinone, benzene, ethylbenzene, etc. The corpse of the dynasty, such as the genus of the genus, can be listed as a ash, only 1J 夕J, four recordings of ethylene, chloroform, M, l-dioxaethane, dichlorodecane, monochlorobenzene, etc. The _, for example, tetrachloroscale, ethylene glycol single Ethyl sulphate, L-methoxy-2-propanol, etc. Ethyl alcohol may be used alone or in combination of two or more. It is not particularly preferable to limit the concentration of the recorded target to be Hwt%~5GwtG. /f. Preferably, 疋1G(四)-德, the coating method is not particularly limited, and for example, it can be exemplified by using a smear coating, and a cloth sorting machine, a curtain coating method, etc. The sewing machine, the light coating machine, the mold coating method for the drying conditions and the method of the helmet body. Selecting 'Although it is suitable for each component, ζϋΓΙ, and f, it is usually 6 (rc~ 吏) The proportions vary and 'but pass right. /30 degrees to 15 minutes left &lt;protective film&gt; 52 201235781 For the __21 Chinese _ book _ line correction this revision date: (8) May 10 曰, the protective film has the prevention of the photosensitive layer The function of the photosensitive layer is protected by dirt or damage. The position of the edge-preserving film in the photosensitive solder resist film is set at the position of the photosensitive resist film, and the riding is performed as needed. The riding condition is set in the film, for example, The user of the cut body, the polyvinyl fluoride sheet, the polyethylene sheet, the polypropylene sheet, the polyolefin sheet, and the polytetrazed, the thickness is not particularly limited, and may be appropriately selected as needed. The best is - ~ 30 divisions. The support 'preferably, the photosensitive layer and the contact resistance ^ ^ 椒 敝 敝 敝 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 ο ο ο Amine/poly(tetra), poly(p-phenylene) treatment, and at least any of the support and the protective film are surface-treated. The support body is: if the coating force of the undercoat layer is applied, the irradiation treatment, the high-frequency wave irradiation treatment, the purple electric equipment irradiation treatment, the irradiation of the first light, the discharge treatment, the operation, and the support. The static friction coefficient with the protective film is preferably 53 201235781 is the 101104621 Chinese manual without a slash correction. The correction earns a simple year on May 10 is 0.3=4 'better 〇5~12. If the static friction is in the case of a two-shape, the phenomenon of offset is produced. Mussels,] There is no particular limitation on the method that becomes difficult to roll into a good car shape. 'It can be wound into a cylindrical core by a long strip, and the length of the anti-flux film is not __, for the convenience of the user can also ==;:::;:r row winding, and the second point to prevent edge fusion, consider the protection, other moisture-proof spacers, spacers (especially packaging) Also, a transparent layer is used: and a preferred light layer =::: a surface protective film and a surface of the sensory protective film are formed to have a coating comprising a polyorganic (tetra) = surface under the polymer. As the coating liquid (4) (4) of the lower 4: polymer, the surface is formed after 3 (rc~(10).c (_ is 5 generations) minutes to 30 minutes. 2〇c) is carried out and 'except the The photosensitive layer, the cut body, and the protection are as described in the Chinese language specification of No. 101104621, which is not marked by the slash correction period: May 1st, 1st, 1st, and may also include a cushion layer and an oxygen barrier layer. (pC layer), layer of peeling layer, adhesive layer, light absorbing layer, surface protective layer, etc. The underlayer is a layer which melts and flows when laminated under vacuum and heating conditions without stickiness at normal temperature. The PC layer is usually a film having a composition of about 1.5 μm which is formed mainly of polyvinyl alcohol. The photosensitive solder resist film has a small surface tackiness, good lamination property and good usability, and insulation property. The laminate having excellent plating resistance and smoothness on the side of the pattern has a photosensitive layer of a photosensitive solder resist composition. Therefore, it can be widely used as a printed wiring board, a color filter or a column, a rib, a spacer, and a spacer. Such as display components, full-image, micro-machine, proofing machine, etc. The pattern forming use 'is suitable for use in the permanent pattern of the present invention and the method of forming the same. In particular, the photosensitive solder resist film of the present invention has a uniform thickness of the film, and thus can be finer when forming a permanent pattern Lamination on a substrate. (Permanent Pattern and Permanent Pattern Forming Method) The permanent pattern of the present invention can be obtained by the permanent pattern forming method U of the present invention. As the permanent pattern, a protective film, an interlayer insulating film, and At least one of the solder resist patterns. When the permanent pattern is a solder resist pattern, the dynamic elastic coefficient at 22 〇 ° c is preferably 20 MPa to 100 MPa, more preferably 25 MPa to 80 MPa ' Particularly preferred is 3 〇 MPa to 50 MPa. If the dynamic elastic modulus is less than 20 MPa ', there is a phenomenon of poor heat resistance; if it exceeds 1 〇〇 Mpa, the thermal shock resistance is poor, and cracking occurs on the cured film. 55 201235781 414^〇pm For the fourth (G), the Chinese manual, no slash correction, the date of revision, the date of the first year of the invention, the first method of permanent pattern formation invented in Japan! The solder resist composition is applied onto the surface of the substrate, dried to form a photosensitive layer, and then exposed (exposure step) and developed (developing step). Further, the second aspect of the permanent pattern forming method of the present invention is heating. And at least any of the pressure-sensitive solder resist films of the present invention are laminated on the surface of the substrate to perform exposure (exposure step) and development (development step). Hereinafter, the permanent pattern forming method of the present invention is used. In addition, the details of the permanent pattern of the present invention are also clarified. The substrate is not particularly limited, and may be appropriately selected as necessary, and examples thereof include a substrate for forming a printed wiring board such as a copper-clad laminate. A glass plate such as a nano glass plate, a synthetic resin film, paper, a metal plate, or the like. Among these substrates, a substrate for forming a printed wiring board on which a wiring has been formed is preferable in terms of achieving high-density encapsulation of a semiconductor equal to a multilayer wiring board or a multilayer wiring board. The substrate may be formed as a laminate or (4) as a laminate of the photosensitive layer 0 on which the photosensitive resist composition is formed on the substrate as the first aspect, or as the second state A layered body in which a photosensitive resist is welded and a photosensitive layer in the film is laminated. Namely, the photosensitive layer in the laminate may be subjected to exposure described later, whereby the exposed region is hardened, and then a permanent pattern is formed by development as will be described later. &lt;Laminated body&gt; The method for forming the laminated body of the first aspect is not particularly limited, and may be appropriately selected as needed, and it is preferable to laminate the coating on the substrate. 56 201235781 Revision date: 1 〇1年1月1〇曰 is the Chinese version of No. 01104621. The photosensitive layer formed by modifying the photosensitive resist composition and drying it without a scribe line. = There is no restriction on the method of coating and drying, and it can be selected as needed, for example, by applying a coating machine, a slit coater, a light coater, a == curtain coater, etc. The method for forming the photosensitive resist composition is not particularly limited, and it is preferable that the photosensitive film is added to the photosensitive film to the surface of the film. When the layer is laminated on the substrate, it is preferable to peel the film and laminate the film on the substrate. Recalling that the temperature of the heating is not __, as needed, preferably m: ~ 13 (rc, more preferably 叱 8 叱 ~ (10). c. ^ The pressure of the pressure is not particularly limited Alternatively, it is preferably 0.01 MPa to 1.0 MPa 1.0 MPa. 旯隹 0.05 MPa to 旯隹 进行 进行 进行 进行 至少 至少 至少 至少 至少 至少 至少 至少 至少 加热 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' List hot presses, and stick to people 11 Tmsei Laminator Co., Ltd.tit^ VP_„) . ^ : Manufactured by the name Machine Manufacturing Co., Ltd. &Lt; Exposure Step &gt; = is a step of exposing the photosensitive layer of the pattern exposure step. As the object of exposure, as long as it is a material with a photosensitive layer, and 57 201235781 HIHJOpm is the Chinese manual of No. 1011046U. There is no slash correction. This revision date: May 10, 1 year, there is no special restriction, and it is suitable for selection as needed. Preferably, the laminated body in which the photosensitive solder resist composition or the photosensitive resist film is formed on a substrate is performed. The exposure to the laminated body is not particularly limited, and may be appropriately selected as needed. For example, the photosensitive layer may be exposed by interposing the support, the underlayer and the PC layer; or the support may be peeled off. Exposing the photosensitive layer through the underlayer and the PC layer; after the support and the underlayer are peeled off, the photosensitive layer may be exposed through the PC layer; After the support, the underlayer, and the PC layer are peeled off, the exposure by the sensitization is not particularly limited, and may be appropriately selected as needed, and examples thereof include digital exposure, simulated exposure, and the like. Preferred among these are digital exposures. The digital exposure is not particularly limited and may be appropriately selected as needed. For example, it is preferable to generate a control based on the formed pattern formation information, and perform light modulation in accordance with the control signal. The mechanism for the digital exposure is not particularly limited, and may be selected as needed, and for example, a light irradiation mechanism that irradiates light, and a light that is modulated by light irradiated by the light irradiation mechanism based on the information to be reported may be changed: Special 0 «Light Modulation Mechanism" 'There is no n characterization as the light modulation mechanism, as long as the light can be modulated, it is particularly limited, and it can be selected as needed. It is better to have 2 parts of light. Variable mechanism. There is no particular limitation on the optical modulation mechanism having the n moiré sections. The method of the Japanese version of the specification is no change, and the correction date is as follows: May 10, 101, if necessary, it is preferable to select, preferably. It is a spatial light modulation component. The spatial light modulation element is not particularly limited and may be appropriately selected as needed, and examples thereof include a space micro-mirror device (DMD) and a micro electro mechanical system (MEMS) spatial light. A variable element (SLM; Spatial Light Modulator), an optical element (PLZT element) that modulates transmitted light by an electrooptic effect, a liquid crystal shutter (FLC), or the like. 〇亥些中車乂佳的疋數位微鏡裝置(Digital Micro-mirror Device,DMD )。 而且,較佳的是所述光調變機構具有基於所形成之圖 案信息而生成控制訊號之圖案訊號生成機構。於此情形 時’所述光調變機縣據所述圖案訊號生成機構所生成之 控制訊號而對光進行調變。 所述控制號並無特別限制,可視需要而適宜選擇, 例如可列舉數位訊號。 &lt;顯影步驟&gt; —所述顯影步驟是於藉由所述曝光步驟對所述感光層進 行曝光,使麵光層之曝光之區域硬化後,藉由將未硬化 區域除去而進行顯影,形成永久圖案之步驟。 而、硬化^域之除去^法並無制關,可視需要 ^且L擇’例如可列舉使用顯影液而除去之方法等。 液並無特別限制,可視需要而適宜選擇,例 鹽:氨水、鹼土金屬之氫氧化物或碳酸鹽、碳酸氫 四、’錢鹽之水溶液等。該些中較佳的是碳酸納 59 201235781 爲第101腦21料文_魏嶋修正本 修正日期:101年5月1〇曰 水溶液。 所述顯影液亦可盘界 以促進顯影之有機溶劑泡劑、有機驗或用 如可:並:特::限制,可視需要而適宜選擇,例 乙三胺、三乙㈣乂 醇胺、四甲基氫氧化錢、二 醇胺等。 * tnethylene pentamine)、嗎琳、三乙 例如=機溶劑並無特別限制,可視需要而適宜選擇, 例如可列舉醇類、酮_ 、且込擇, 而且曰頰、_、酿胺類、内醋類等。 合:水=液與有機溶劑混 &lt;硬化處理步驟&gt; 處理^的是她之永久圖__—步包含硬化 所,硬化處理步驟是於進行所述顯影步驟後,對卿 水圖案中之感光層進行硬化處理的步驟。 J 所述硬化處理並無特別限制,可視需要而適 歹1如可列舉整個面曝光處理、整個面加熱處理等。 、所述整個面曝域理之方法並祕舰制, 而適宜選擇,例如可列舉於所述顯影步驟後, 述永久圖案之所述積層體上的整個面進行曝光之^法^所 藉由該整㈣曝光’促進形成所述感光層之感紐2 組成物中之樹脂之硬化,所述永久圖案之表面硬化。沖 進行所述整個面曝光之裝置並無特別限制,可視需 60 201235781 爲第101104621號中文說明書無劃線修正本 修正日期:1G1年5月10日 而適宜選擇,例如可列舉超高壓水銀燈等uv曝光機等。 所述整個面加熱處理之方法並無特別限制:可視需要 而適宜選擇,例如可列舉於所述顯影步驟後,對形成^ 述永久圖案之所述積層體上之整個面進行加熱之^法等。 藉由該整個面加熱’可提高職永久随之表面之膜強声。 〇 所述整個面加熱之加熱溫度並無特別限制,可視又 而適宜選擇,較佳的是12〇。(:〜250。(:,更佳的是12(Π:〜 200°C。若所述加熱溫度不足12(rc,則存在盔 = 處理所帶來之_度提高之現象;若超過2聊 所述感維抗焊成物巾之旨赵分解,變 脆之現象。 、、文如交 所述整個面加熱中之加熱時間並無特別限制,可 要而適宜選擇,較佳的是1()分鐘〜m分鐘 分鐘〜60分鐘。 人丨玉即疋u 進行所述整個面加熱之褒置並無特別限制,可視 〇 而適宜選擇’例如可列舉烘箱、加熱板、紅外線(IR)加 熱器等。 另外,於所述基材為多層配線基板等印刷線路板之情 形時,可於該印概路板上形成本發明之永 扳= 步以如下方式進行焊接。 # ^ 亦即’藉由所述顯影步驟,形成所述永久圖荦之硬化 層,f斤述Ϊ刷線路板之表面露出金屬層。對該印刷線路 板之表面所路出之金屬層之部位進行錢金後接。 其次,於騎焊接之部位域半㈣或零件等。此=接所 201235781 HlHJUpill 爲桌101104621號中文說明書無劃線修正本 修正曰期:1〇1年5月10日 述硬化層之永久圖案發揮作為保護膜或絕 膜)之功能’防止來自外部之衝mm、1層間、’、邑緣 衡擎或者彼此相鄰之電極之 導通0 膜及,較佳的是形成保護 ϊΐί 者。由所述永久圖案形成方法 而形成之水久圖紅為所述賴膜或所述層間絕緣膜,則 可保護配線衫外部之衝擊或轉,制是於其為 =層間絕緣膜之情科,例如可㈣將轉體或零件高 欲度地封裝於多層配線基板或增層配線基板等上。 本發明之永久_形成方法可高速地形成圖案,因此 可廣泛地用於各種_之形成中,_是可適宜地用於配 線圖案之形成中。 而且仙本發明之永久圖案形成方法*形成之永久 圖案具有優異之絕緣性、耐錄性、圖案侧面之平滑性等, 可適宜地料賴膜、層_賴.、 。 (印刷基板) 、本發明之印刷基板至少包含基材、藉由所述永久圖案 形成方法而形成之永久圖案,進一步視需要而包含適宜選 擇之其他構成。 其他構成並無特別限制,可視需要而適宜選擇,例如 可列舉於基材與所述永久®案之間進-步設有麟層之增 層基板等。 [實例] 以下列舉實例對本發明加以更具體之說明,但本發 62 201235781fl 爲第1^1104621號中文說明書無劃線修正本 修正曰期:101年5月10曰 明並不受該些實例任何限制。 (合成例1) &lt;化合物T-1之合成&gt; 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫呋喃150 g、N-甲基吡咯啶酮1()〇 g、及3-胺基_ι,2,4-三唑84.1 g (默克股份有限公司製造)。於攪拌下以3〇分 鐘滴加四氫呋喃l〇〇g、及曱基丙烯酸-2-異氰酸基乙基酯 〇 155_2g(karenzMOI、昭和電工公司製造)。其後,於4〇°c 下攪拌1小時後’於70°C下進行4小時之反應。冷卻至室 溫後,將反應液投入至強烈攪拌下的離子交換水2 L中, 析出目標物晶體。精由甲醇進行清洗而遽取析出物,使其 乾燥而獲得下述結構之化合物T-1 222 g。 [化 14]The Digital Micro-mirror Device (DMD) is a good medium-sized micro-mirror device (DMD). Moreover, it is preferable that the optical modulation means has a pattern signal generating means for generating a control signal based on the formed pattern information. In this case, the optical modulator unit modulates the light according to the control signal generated by the pattern signal generating unit. The control number is not particularly limited and may be appropriately selected as needed, and for example, a digital signal may be cited. &lt;Developing Step&gt; The developing step is performed by exposing the photosensitive layer by the exposure step, curing the exposed region of the smoothing layer, and developing by removing the uncured region to form The steps of the permanent pattern. Further, the method of removing the hardening region is not controlled, and the method of selecting and using the developing solution can be exemplified. The liquid is not particularly limited and may be appropriately selected as needed. Examples of the salt: ammonia water, hydroxide or carbonate of an alkaline earth metal, hydrogen carbonate, and an aqueous solution of 'salt salt. The preferred ones are sodium carbonate. 59 201235781 is the 101st brain 21 material _ Wei Wei revised this revision date: May 1, 101 aqueous solution. The developing solution may also be used to promote the development of the organic solvent foaming agent, organic testing or use, and the like: and: special:: limited, may be selected as needed, such as ethylene triamine, triethyl (tetra) sterol amine, four Methyl hydroxide, glycolamine, and the like. * tnethylene pentamine), morphine, and triethyl, for example, the solvent is not particularly limited, and may be appropriately selected according to needs, and examples thereof include alcohols, ketones, and choices, and cheeks, _, aramids, and internal vinegars. Classes, etc. Combination: water = liquid mixed with organic solvent &lt; hardening treatment step &gt; treatment ^ is her permanent map __ - step contains hardening, the hardening treatment step is after the development step, in the water pattern The step of performing a hardening treatment on the photosensitive layer. J The hardening treatment is not particularly limited, and may be, for example, the entire surface exposure treatment, the entire surface heat treatment, or the like. The method for exposing the entire surface of the surface to the shackle is suitably selected, for example, after the developing step, the entire surface of the laminated body of the permanent pattern is exposed. The whole (four) exposure 'facilitates the hardening of the resin in the composition of the photosensitive layer 2 which forms the photosensitive layer, and the surface of the permanent pattern is hardened. There is no particular limitation on the apparatus for performing the entire surface exposure. It is not necessary to use 60 201235781 for the Chinese manual No. 101104621. There is no scribe line correction. This correction date is suitable for May 10, 1G1. For example, an ultra-high pressure mercury lamp or the like can be cited. Exposure machine, etc. The method of heat treatment of the entire surface is not particularly limited, and may be appropriately selected as needed. For example, after the development step, the entire surface of the laminate on which the permanent pattern is formed may be heated. . By heating the entire surface, it is possible to enhance the permanent sound of the surface along with the surface.加热 The heating temperature for heating the entire surface is not particularly limited, and is visually and suitably selected, preferably 12 Å. (:~250. (:, more preferably 12 (Π: ~ 200 ° C. If the heating temperature is less than 12 (rc, there is a phenomenon that the helmet = the degree of increase caused by the treatment; if more than 2 chat The feeling of the anti-welding of the towel is decomposed and becomes brittle. The heating time in the heating of the whole surface is not particularly limited, and may be appropriately selected, preferably 1 ( ) Minutes ~ m minutes minutes ~ 60 minutes. People's jade is the most suitable for heating the entire surface. It is suitable for the choice of ', for example, oven, hot plate, infrared (IR) heater In the case where the substrate is a printed wiring board such as a multilayer wiring board, the soldering of the present invention can be performed on the printed circuit board in the following manner: # ^ That is, by In the developing step, the hardened layer of the permanent pattern is formed, and the surface of the circuit board is exposed to expose a metal layer, and the portion of the metal layer on the surface of the printed circuit board is subjected to money and gold. , riding the welding part of the field half (four) or parts, etc. This = pick-up 201235781 HlHJUpill is the Chinese manual of the table 101104621. There is no slash correction. This revision period: 1) May 10th, the permanent pattern of the hardened layer is used as a protective film or a film to prevent the impact from the outside. The interlayer, the '', the edge of the balance or the electrodes adjacent to each other and the film 0, preferably forming a protective layer. The pattern formed by the permanent pattern forming method is the film or the The interlayer insulating film protects the impact or the rotation of the outside of the wiring shirt, and is made of the interlayer insulating film. For example, (4) the rotating body or the component is highly encapsulated in the multilayer wiring substrate or the build-up wiring. The permanent-forming method of the present invention can form a pattern at a high speed, and thus can be widely used in the formation of various types, and can be suitably used in the formation of a wiring pattern. Method * The permanent pattern formed has excellent insulation property, recording resistance, smoothness of the side surface of the pattern, etc., and can be suitably used for film, layer, (printing substrate), printing of the present invention. The substrate includes at least a base material and a permanent pattern formed by the permanent pattern forming method, and further includes other structures that are appropriately selected as needed. The other configuration is not particularly limited, and may be appropriately selected as needed, and may be, for example, a substrate. In addition to the permanent® case, a layered substrate or the like of the lining layer is provided. [Examples] The present invention will be more specifically described below by way of examples, but the present invention 62 201235781fl is the first Chinese version of No. 11104621. Line Correction This revision period: May 10, 101 is not subject to any limitations of these examples. (Synthesis Example 1) &lt;Synthesis of Compound T-1&gt; 3 2,000 mL with reflux tube and thermometer To the flask were placed 150 g of tetrahydrofuran, N-methylpyrrolidone 1 () g, and 3-amino-m, 2,4-triazole 84.1 g (manufactured by Merck & Co., Inc.). Tetrahydrofuran l〇〇g, and 2-isocyanatoethyl methacrylate 155 155_2g (Karenz MOI, manufactured by Showa Denko Co., Ltd.) were added dropwise thereto at a temperature of 3 Torr. Thereafter, the mixture was stirred at 4 ° C for 1 hour and then reacted at 70 ° C for 4 hours. After cooling to room temperature, the reaction liquid was poured into 2 L of ion-exchanged water under vigorous stirring to precipitate a target crystal. The precipitate was washed with methanol, and the precipitate was taken and dried to obtain the compound T-1 222 g of the following structure. [Chem. 14] T-1 (合成例2 ) &lt;化合物T-2之合成&gt; 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 四氫吱喃120 g、N-曱基0比略0定酮70 g、3,5-二胺基-i,2,4-三唑49.5 g (Degussa公司製造)及2,4-二-第三丁基-4-曱 基苯酚1.8 g (PN-01、大内新興化學工業公司製造)。於擾 拌下,以2小時滴加四氫呋喃80g、及丙烯酸-2-異氰酸基 63 201235781 修正日期:101年5月10曰 爲第101104621號中文說明書無劃線修正本 乙酯141.1 g (Karenz AOI、昭和電工公司製造)。其後’ 於40。(:下使其反應20小時。冷卻至室溫後,將反應液投 入至強烈攪拌下的離子交換水2 L中,析出目標物晶體。 藉由曱醇進行清洗而濾取析出物,使其乾燥而獲得下述結 構之化合物T-2 165.1 g。 [化 15]T-1 (Synthesis Example 2) &lt;Synthesis of Compound T-2&gt; In a 2,000 mL 3-neck flask equipped with a reflux tube and a thermometer, tetrahydrofuran 120 g, N-fluorenyl group 0, and slightly ketone were added. 70 g, 3,5-diamino-i, 2,4-triazole 49.5 g (manufactured by Degussa) and 2,4-di-tert-butyl-4-nonylphenol 1.8 g (PN-01, Manufactured by Ouchi New Chemical Industry Co., Ltd.). Under stirring, add 80g of tetrahydrofuran, and 2-isocyanato acid 63 in 2 hours. 201235781 Revision date: May 10, 101, No. 101104621 Chinese manual No underline correction of ethyl ester 141.1 g (Karenz AOI, manufactured by Showa Denko). Thereafter, at 40. (: The reaction was allowed to proceed for 20 hours. After cooling to room temperature, the reaction liquid was poured into 2 L of ion-exchanged water under vigorous stirring to precipitate a target crystal. The precipitate was collected by washing with decyl alcohol to cause the precipitate to be filtered. Drying gave the compound T-2 165.1 g of the following structure. (合成例3) &lt;化合物T-3之合成&gt; 於具有回流管及溫度計之2,000 mL之3 口燒瓶中加入 N-曱基》比咯啶酮250 g、及3,5-二胺基三唑49.5 g (Degnssa公司製造)。於攪拌下,以2小時滴加N_乙基吡 咯啶酮80g、及四氫鄰苯二甲酸酐152 2 g(RIKACIDTH、 新曰本理化公司製造)。其後,於4(rc下進行丨小時之攪 拌後,於100C下使其反應12小時。冷卻至室溫後,將反 應液投入至強烈攪拌下之離子交換水12 L中,析出目標 物晶體。藉由異_/己烧(2/8 (重量比))進行清洗而遽 取析出物’使其乾燥而獲得下述結構之化合物τ_3 i2i i g。 [化 16] 64 201235781 ~r χ —r^j vuaIX 修正日期:1〇1年5月10日 爲第101104621號中文說明書無劃線修正本 HOOC 〇(Synthesis Example 3) &lt;Synthesis of Compound T-3&gt; In a 2,000 mL 3-necked flask equipped with a reflux tube and a thermometer, N-fluorenylpyrrolidone 250 g and 3,5-diamino group were added. Triazole 49.5 g (manufactured by Degenssa Co., Ltd.). Under stirring, 80 g of N-ethylpyrrolidone and 152 2 g of tetrahydrophthalic anhydride (RIKACIDTH, manufactured by Shin Sakamoto Chemical Co., Ltd.) were added dropwise thereto over 2 hours. Thereafter, the mixture was stirred at 4 (rc) for 12 hours, and then reacted at 100 C for 12 hours. After cooling to room temperature, the reaction liquid was poured into 12 L of ion-exchanged water under vigorous stirring to precipitate a target crystal. By washing with a different amount of _/hexane (2/8 (weight ratio)), the precipitate was taken and dried to obtain a compound τ_3 i2i ig of the following structure. [Chem. 16] 64 201235781 ~r χ —r ^j vuaIX Revision date: May 1st, 1st, May 10th, No. 101104621 Chinese manual, no underline correction, this HOOC 〇 〇 COOH〇 COOH Τ-3 (合成例4 ) &lt;化合物Τ-4之合成&gt; 〇 於具有回流管及溫度計之1〇〇〇 mL之3 口燒瓶中加入 第三丁基曱基酮250 g、1,2,4-三唑34.5 g (純正化學工業 公司製造)、二環戊基二曱醇二丙烯酸酯145.7g(A-DCP、 新中村化學工業公司製造)' 及2,4-二-第三丁基-4-甲基苯 酚1.9 g (PN-01、大内新興化學工業公司製造)。於4〇。〇 下攪拌1小時後’於80°C下使其反應52小時。冷卻至室 溫後,藉由減壓濃縮而除去有機溶劑,由此而獲得下述結 構之化合物T-4 178 g。 [化Π] 〇Τ-3 (Synthesis Example 4) &lt;Synthesis of Compound Τ-4&gt; 第三Into a 3-neck flask having a reflux tube and a thermometer, a third butyl fluorenyl ketone 250 g, 1, 2 was added. , 4-triazole 34.5 g (manufactured by Junsei Chemical Industry Co., Ltd.), dicyclopentyl decyl diacrylate diacrylate 145.7 g (A-DCP, manufactured by Shin-Nakamura Chemical Co., Ltd.) and 2,4-di-third Benzyl-4-methylphenol 1.9 g (PN-01, manufactured by Ouchi Shinko Chemical Industry Co., Ltd.). At 4〇. After stirring for 1 hour under 〇, the reaction was carried out at 80 ° C for 52 hours. After cooling to room temperature, the organic solvent was removed by concentration under reduced pressure, whereby Compound T-4 178 g of the following structure was obtained. [Π化] 〇 T-4 (合成例5) &lt;含有羧基之高分子化合物B-4(酸改質含有乙烯性不 飽和基之聚胺基曱酸酯樹脂)之合成&gt; 於具有冷凝器及攪拌機之500 mL之三口圓底燒瓶 65 201235781 爲第101HM621號中文說明書無劃線修正本 修正日期:101年5月10日 内,使蘋果酸2.41 g (0.018莫耳)、2,2-雙(經基甲基)丙酸 (DMPA) 5.23 g ( 0.039莫耳)、及丙三醉單甲基丙婦酸醋 17.78 g (0.111莫耳)溶解於環己酮74 mL中。於其中添 加4,4-二苯基甲烷二異氰酸酯(MDI)30.03 g( 0.12莫耳)、 六亞甲基二異氰酸酯(HMDI) 5.05 g (〇.〇3莫耳)、2,6-二-第三丁基羥基曱苯〇·1 g、及作為觸媒之商品名: NEOSTANN U-600 (日東化成公司製造)〇·2 g,於75〇c下 進行5小時之加熱攪拌。其後,藉由甲醇9.61 mL加以稀 釋而攪拌30分鐘,獲得165 g之含有羧基之高分子化合物 B-4溶液(固形物為45 wt%)。 所得之含有羧基之高分子化合物B-4溶液之固形物酸 值為68 mgKOH/g ’藉由凝膠滲透層析法(GPC)而測定 之重量平均分子量(聚苯乙烯標準)為6,500,乙烯性不 飽和基當量為1.83 mmol/g。 所述酸值是依據JIS K0070而測定。其中,於樣品並 不溶解之情形時’使用二魏或四氫σ夫喃等作為溶劑。 所述重量平均分子量是使用高速GPC裝置(東洋曹達 工業股份有限公司製造之HLC-802A),Μ 〇·5 wt%之四氫 呋喃(THF)溶液為試樣溶液,管柱使用1根TSKgel HZM-M ’注入2〇〇队之試樣,藉由所述THF溶液進行溶 離,於25 C下利用折射率檢測器或uv檢測器(檢測 為254 nm)而測定。 所述乙烯性不飽和基當量可藉由依據JIS K2605測定 溴、值而求出。 ' 66 201235781n -τ Λ. -Γ-/ν/1^ΐΠ 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10曰 (合成例6 ) &lt;含有羧基之高分子化合物B-5(酸改質含有乙烯性不 飽和基之聚胺基甲酸g旨樹脂)之合成&gt; 於具有冷凝器及攪拌機之500 mL之三口圓底燒瓶 中’使2,2-雙(羥基曱基)丙酸(DMBA) 32.00 g (0.216莫 耳)、聚丙二醇(分子量為 1,〇〇〇) (PPGl〇〇〇)9.00 g(0.009 莫耳)溶解於丙二醇單曱醚單乙酸酯118 mL中。於其中 〇 添加4,4-二苯基曱烷二異氰酸酯(MDI) 37.54 g (0.15莫 耳)、2,6-二-第三丁基羥基甲苯〇 j g、及NEOSTANN U-600 (曰東化成公司製造)〇·2 g,於75。(:下攪拌5小時後,添 加甲醇9.61 g。其後,進一步添加作為含有乙烯性不飽和 基之環氧化合物的甲基丙稀酸縮水甘油醋(GMA) 17.91 g (0.126莫耳)與作為觸媒之三苯基膦5 〇〇〇ppm,於11〇&lt;^ 下攪拌5小時後,冷卻至室溫,獲得214 g之含有羧基之 高分子化合物B-5溶液。 q 所得之含有羧基之高分子化合物B-5溶液之固形物酸 值為75 mgKOH/g’藉由凝膠滲透層析法(GPC)而測定 之重量平均分子量(聚苯乙烯標準)為12,〇〇〇,乙烯性不 飽和基當量為1.3 mmol/g。 (實例1) &lt;感光性組成物塗佈液1之調製&gt; 將下述各成分加以混合’調製感光性組成物塗佈液1 (感光性抗焊劑組成物塗佈液)。 67 201235781 爲第1011(M621號中文說明書無劃線修正本 修正日期:101年5月10日 ZFR-1776 (日本化藥公司製造、酸改質含有乙烯性不 飽和基之環氧樹脂之65 wt%乙酸曱氧基丙酯溶液)(Β-1) 32.3重量份 化合物T-1 0.8重量份 著色顏料:HELIOGEN BLUE D7086 (BASF 公司製 造) 0.021重量份 著色顏料·· Pariotol Yellow D0960 ( BASF 公司製造) 0.006重量份 分散劑:Solsperse 24000GR (路博潤公司製造) 0.22重量份 聚合性化合物:DCP-A (共榮社化學公司製造) 5.3重量份 起始劑:Irgacure 907 ( BASF公司製造) 0.6重量份 增感劑:DETX-S (曰本化藥股份有限公司製造) 〇.〇05重量份 反應助劑:EAB-F (保土谷化學公司製造) 〇.〇19重量份 硬化劑:三聚氰胺(和光純藥公司製造) 〇j6重量份 熱交聯劑:Epotohto YDF-170 2.9重量份 (新日鐵化學公司製造、具有環氧乙烷裊之化合物(雙 酚F型環氧樹脂)) 填料:SO-C2 (AdmatechsCo.Ltd.製造) 68 201235781 修正日期:101年5月10日 爲第1011〇46:21號中文說明書無劃線修正本 δ.〇重量份 離子捕捉劑.ΙΧΕ-6107 (東亞合成公司製造) 0.82重量份 塗佈助劑:Megafac F-780F 〇 2重量份 (DIC公司製造,30 wt%丁酮溶液) 彈性體:Espel 1612 2 7重量份 %己酮(溶劑) 38.7重量份 〇 &lt;感光性抗焊劑膜1之製作&gt; 使用厚度為25 μηι之聚對苯二曱酸乙二酯膜(PET) 作為支樓體,藉由棒式塗佈機將所述感光性組成物塗佈液 1以乾燥後之感光層之厚度成為約30 μιη之方式塗佈於該 支撐體上,於、熱風循環式乾燥機中使其乾燥3〇分 鐘,製作感光性抗焊劑膜1。 &lt;永久圖案之形成&gt; -積層體之調製_ Q 使用於表面實施了化學研磨處理之已形成有配線之覆 .銅積層板(無通孔、銅厚12 μιη之印刷線路板)作為基材。 使用真空貼合機(名機製作所股份有限公司製造、 MVLP5〇G) ’以所述感紐抗焊麵1之感光層與所述覆 銅,層板相接之方式而使其積層於該覆銅積層板上,調製 順次積層有所述覆銅積層板、所述感光層、所述聚對笨二 曱酸^二S旨膜(支撐體)之積層體。 壓接條件是壓接溫度為90。(:、壓接壓力為0.4 MPa、 層壓速度為1 m/min。 69 201235781 修正日期:1〇1年5月】〇曰 爲第ioii〇462i號中文說明書無畫g線修正本 關於上述所得之積層體,藉由以下所示之步驟而形成 光阻圖案。 -曝光步驟- 對於所述調製之積層體中之感光層,使用具有規定圖 案之利用藍紫光雷射曝光之圖案形成裝置,自聚對苯二甲 酸乙二酯膜(支撐體)㈣,以獲得規定圖案之方式以4〇 mJ/cm2之能量之量照射4〇5 nm之雷射光而進行曝光,使 所述感光層之一部分區域硬化。 -顯影步驟- 二甲述積層體上剝下聚對笨 T,於 層之整·進行喷射顯影 域溶解除去。其後’進行水洗,使其乾燥二 -硬化處理步驟- 下實= = 整個面,於, 膜強度而製H、處使从歐表面硬化,提高 &lt;評價方法&gt; 藉由以下所示之評價方法,關賴面之 緣^、耐熱衝擊性(抗龜裂性)、及雜敷性 、絕 結果示於表1中。 °子仏。將 圖案側面之平滑性_ 70 201235781 修正日期:101年5月1〇日 爲第l〇ll〇462l號中文說明書無劃線修正本 用%描式電子顯微鏡( 成之永久圖案之側面進行所述顯影步驟中所形 案侧面之平滑性進行評Γ 以下之評價基準對圖 [評價基準] ο:圖案側面平滑,圖案形狀優異。 案形2:於圖案侧面觀察到稍許之凹凸,但為良好之圖 〇 △:於圖案侧面存在凹凸,圖案形狀稍差。 x:於圖案側面發現凝聚物,圖案形狀差。 -絕緣性- 之扣ίΐ魏玻璃基材上積層有12 _厚鋪的印刷基板 之銅治貫施侧,獲得線寬/間隙寬為50 μΙη/50 μιη、 並不接觸之相互對向之同一面上的梳型電極。盥 述積層體之調製方法中所記載之方法同樣地將感光性y 劑膜\積層於該基板之梳型電極上,藉由最佳曝光量(_ 〇 = ^〜1 J/Cm2)進行曝光。其次,於常溫下靜置1小時 後,猎由3(TC之1 wt%碳酸鈉水溶液進行6〇秒之 3 影,進一步於80〇C下進行10分鐘之加熱(乾燥頌 用 〇Rc MANUFACTURING ca, LTD 製造之紫外線= f置而藉由1 W之能量之量進行對感光層之紫外C ^。進一步於15(TC下對感光層進行60分鐘之加熱處’=‘、、,、 藉此獲得形成有厚度為25 μιη之抗焊劑的評價用義^ , 以對加熱後之評價用積層體之梳型電極間施二_ 方式,藉由Sn/Pb焊錫將聚四氟乙烯製遮蔽線連接於 201235781 爲第^_21號中文說明書無麵修正本 修正日期:1〇1年5月10日 梳型電極上之後,於對評價用積層體施加5V之電壓之狀 態下,將該評價用積層體於13(TC、85%RH之超加速高溫 高濕壽命試驗(HAST)槽内靜置200小時。藉由1〇〇倍 之金相顯微鏡而觀察其後之評價用積層體的抗焊劑之遷^ 之產生程度,藉由以下之評價基準而進行評價。 [評價基準] ◎:未確認到遷移之產生,絕緣性優異 〇 :僅僅於銅上確認到遷移之產生,絕緣性良好 〇△.於SR (抗;fcp劑)中確認到稍許遷移,絕緣性猶 好 '、、 △:確認到遷移之產生,絕緣性稍差 x :電極間短路,絕緣性差 •抗龜裂性- 與所述積層體之調製方法中所記載之方法同樣地將感 光性抗焊劑膜1積層於在環氧玻璃基材上積層有12卜〇厚 銅箔的印刷基板上,介隔2 mm見方之光罩,使用〇RC I^ANUFACTURING CO.,LTD.製造之 JJMW-201GX 型曝 光機,藉由可形成2 mm見方之圖案的最佳曝光量(3〇〇 J/cm2)而進行曝光。其次,於常溫下靜置i小 4後,藉由30C之1 wt%碳酸納水溶液進行6〇秒之喷射 顯影,進一步於80X:下進行10分鐘之加熱(乾燥)。繼而, 使用ORC MANUFACTURING CO., LTD.製造之紫外線照 射裝置而藉由1 J/cm2之能量之量進行對感光層之紫外線 照射。進一步於15(TC下對感光層進行6〇分鐘之加熱處 72 201235781 -ri-rjwpifl 爲第⑼麵丨號中文說明書無劃線修正本 修正日期:101年5月1〇日 理,藉此獲得且古ry 為25 之抗焊劑的:用::矩形開口部的形成有厚度 65°C之^之熱循環:將所得之基板於 f 八/ 5分鐘後,其次於b(TC之大氣中i 路15 /刀鐘,然後再次暴露於-大乳中暴 微鏡觀察通過_環 ^巾1由光學顯 〇 離程度,藉由下述評價==劑上的裂痕及剝 [評價基準J f. ::几f劑上無裂痕、剝落、變形,強韌性優異 ;几&amp;劑上存在稍許變形,但強韌性良好 〇△•於抗焊劑上存在稍許裂痕,但強動性稍好 △:於抗焊劑上存在稍許裂痕、剝落,_性稍差 於抗:fcf劑上明顯存在裂痕、剝落,強勃性差 -耐鏡敷性- 對所述永久圖案進行脫脂而進行表面之粗化後,添力口 〇 硫敝而進行觸媒加成。其次,將永久圖案於7G°C之硫酸 錄/稀硫酸溶液中浸潰4〇分鐘而進行鍛敷處理,然後藉由 目視而觀察永久圖案中之硬化膜之捲縮、剝落,基於下述 基準而進行耐鍍敷性之評價。 [評價基準] ◎ •於硬化膜中並無捲縮、剝落,对鍵敷性極其優異 〇 :硬化膜之一部分變色,但並不成為實用上之問題, 耐鍍敷性優異 △:於硬化膜中存在捲縮現象,耐鍍敷性差 73 201235781 HlHJUpUX 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 X :於硬化膜中觀察到隆起(剝落),耐鍍敷性極差 (實例2) 於實例1中,將ZFR-1176(日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1 )替換為 Cyclomer P 200HM (大賽璐化學工業公司製造、含有乙烯 性不飽和基及羧基之丙烯酸樹脂)(B-2)(於固形物中之 含量相同),除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例3 ) 於實例1中,將ZFR-1176 (日本化藥公司製造、酸改 質含有乙細性不飽和基之環氧樹脂)(B-1 )替換為 UXE-3024 (日本化藥公司製造、酸改質含有乙烯性不飽和 基之聚胺基曱酸酯樹脂)(B-3 )(於固形物中之含量相 同除此以外與實例1同樣地進行而製作感光性組成物塗 佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例4) 於實例1中,將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(B-1)替換為合成例 5中所合成之含有羧基之高分子化合物(酸改質含有乙烯 性不飽和基之聚胺基曱酸酯樹脂)(B-4)(於固形物中之 74 201235781 *. 爲第101104621號中文晒書無劃線修正本 修正日期:1〇1年5月10日 含置相同)’除此以外與實例1同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例5) 於實例4中,將化合物T-1替換為化合物T-2,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 0 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例6) 於實例4中’將化合物τ_ι替換為化合物τ_3,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 ◎ (實例7) 於只例4中,將化合物Τ-1替換為化合物Τ-4,除此以 外與實例4同樣地進行而製作感光性組成物塗佈液及感光 性抗烊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表丨中。 (實例8 ) 於實例5中,將化合物Τ-2之調配量自相對於感光性 75 201235781 HiHOUpiii 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10曰 組成物塗佈液之固形物而言為1.7 wt%變更為3.0 wt%,除 此以外與實例5同樣地進行而製作感光性組成物塗佈液及 感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例9) 於實例5中,將作為熱交聯劑之Epotohto YDF-170(新 曰鐵化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧樹脂))替換為ETERNACOLLOXBP (宇部興產公司 製造、具有環氧丙烷基之化合物),除此以外與實例5同樣 地進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例10 ) 於實例5中’將作為熱交聯劑之Epotohto YDF-170(新 二,化學公司製造、具有環氧乙烷基之化合物(雙酚F型 % 氧樹脂替換為 Sumidur BL3175 ( Sumika Bayer yrethane公司製造、具有嵌段異氰酸酯基之化合物),除此 止卜與實例5同樣地進行而製作感光性組成物塗佈液及感 先性抗焊劑瞑。 斑關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 一、例1同樣地進行評價。將結果示於表1中。 (實例11) ;只例5中,將作為熱交聯劑之Epotohto YDF-170(新 76 201235781 • * j j[ 爲第1〇11〇4621號中文麵書無劃線修正本 修正曰期:101年5月10日 化學公司製造、具有環氧乙烷基之化合物(雙酚F型 環氧,脂))替換為YSLV_120TE (新日鐵化學公司製造、 具氧乙烷基之化合物),除此以外與實例5同樣地進行 而製作感光性組成物塗佈液及感光性抗焊劑膜。 —關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 (實例12 ) 〇 人於實例1中’將ZFR-1176 (日本化藥公司製造、酸改 質含有乙烯性不飽和基之環氧樹脂)(叫替換為合成例 中所合成之含有幾基之高分子化合物(酸改質含有乙烯 飽和基之聚胺基曱酸酯樹脂)(B_5)(於固形物中之 含量相同)’除此以外與實例i同樣地進行而製作感光性組 成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表i中。 〇 (:較例η、 、於Λ例1中,並未調配T-i化合物及熱交聯劑,除此 以外與實例1同樣地進行而製作感光性組成物塗佈液及感 光性抗焊劑膜。 〜 關於所得之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表丨中。 、 (比較例2) 於實例1中,並未調配Τ·4化合物,除此以外與實例 同樣地進行而製作感光性組成物塗佈液及感光性抗焊劑 77 201235781 ΗΐΗουμαι 爲第1〇11〇462丨號中文說明書無劃線修正本 修正日期:10丨年5月10曰 膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜’ 與實例1同樣地進行評價。將結果示於表1中。 (比較例3 ) 於實例1中,將Τ-1化合物替換為ΙΧΕ61〇7 (東亞合 成公司製造、無機離子交換體),除此以外與實例1同樣地 進行而製作感光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜’ 與實例1同樣地進行評價。將結果示於表1中。 (比較例4 ) 於實例1中’將Τ-1化合物替換為下述結構之化合物 T~Z(l,2,4-三唑),除此以外與實例1同樣地進行而製作感 光性組成物塗佈液及感光性抗焊劑膜。 關於所得之感光性組成物塗佈液及感光性抗焊劑膜’ 與實例1同樣地進行評價。將結果示於表1中。 [化 18] HN^N 丁一Z (比較例5 ) 於實例1中,並未調配熱交聯劑,除此以外與實例1 同樣地進行而製作感光性組成物塗佈液及感光性抗焊劑 興。 78 201235781 -ΓΧ-T^VFpJlfl 爲第101HM621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 關於所付之感光性組成物塗佈液及感光性抗焊劑膜, 與實例1同樣地進行評價。將結果示於表1中。 [表1]T-4 (Synthesis Example 5) &lt;Synthesis of a polymer compound B-4 containing a carboxyl group (a polyamine phthalate resin having an acid-modified ethylenically unsaturated group) &gt; 500 with a condenser and a stirrer Three-neck round bottom flask of mL 65 201235781 is the Chinese manual of No. 101HM621 without a slash correction. Amendment date: May 10, 101, make malic acid 2.41 g (0.018 mol), 2,2-bis (radiomethyl) Propionic acid (DMPA) 5.23 g (0.039 mol), and C3 drunk monomethyl acetoacetate 17.78 g (0.111 mol) were dissolved in 74 mL of cyclohexanone. 4,4-diphenylmethane diisocyanate (MDI) 30.03 g (0.12 mol), hexamethylene diisocyanate (HMDI) 5.05 g (〇.〇3 mol), 2,6-di- Third butyl hydroxyphthalide · 1 g, and a commercial name of a catalyst: NEOSTANN U-600 (manufactured by Nitto Chemical Co., Ltd.) 〇 2 g, heated and stirred at 75 ° C for 5 hours. Thereafter, the mixture was stirred for 30 minutes by diluting with 9.61 mL of methanol to obtain 165 g of a polymer compound B-4 solution containing a carboxyl group (solid content: 45 wt%). The obtained carboxyl group-containing polymer compound B-4 solution had a solid acid value of 68 mgKOH/g. The weight average molecular weight (polystyrene standard) determined by gel permeation chromatography (GPC) was 6,500, ethylene. The unsaturation equivalent weight was 1.83 mmol/g. The acid value is measured in accordance with JIS K0070. Here, in the case where the sample is not dissolved, "diwei or tetrahydrothymolfane or the like is used as a solvent. The weight average molecular weight is a high-speed GPC apparatus (HLC-802A manufactured by Toyo Soda Industrial Co., Ltd.), a wt 5 wt% tetrahydrofuran (THF) solution, and a TSKgel HZM-M column. A sample injected into the 2 〇〇 team was subjected to dissolution by the THF solution, and was measured at 25 C using a refractive index detector or a uv detector (detected as 254 nm). The ethylenically unsaturated group equivalent can be determined by measuring the bromine value according to JIS K2605. ' 66 201235781n -τ Λ. -Γ-/ν/1^ΐΠ is the 101104621 Chinese manual without a slash correction. Amendment date: May 10, 101 (synthesis example 6) &lt;carboxyl-containing polymer compound B -5 (Synthesis of Acid Modified Polyethylureate Containing Ethylene Unsaturated Group) - In a 500 mL three-neck round bottom flask equipped with a condenser and a mixer, '2'2-bis(hydroxyindole) Propionate (DMBA) 32.00 g (0.216 mol), polypropylene glycol (molecular weight 1, 〇〇〇) (PPGl〇〇〇) 9.00 g (0.009 mol) dissolved in propylene glycol monoterpene ether monoacetate 118 In mL. Among them, 4,4-diphenyldecane diisocyanate (MDI) 37.54 g (0.15 mol), 2,6-di-t-butylhydroxytoluene jg, and NEOSTANN U-600 (曰东化成) Made by the company) 〇·2 g, at 75. (: After stirring for 5 hours, 9.61 g of methanol was added. Thereafter, methyl acrylate glycerol (GMA) 17.91 g (0.126 mol) as an epoxy compound containing an ethylenically unsaturated group was further added and The catalyst triphenylphosphine 5 〇〇〇 ppm was stirred at 11 Torr for 5 hours, and then cooled to room temperature to obtain 214 g of a carboxyl group-containing polymer compound B-5 solution. q The obtained carboxyl group was obtained. The polymer compound B-5 solution has a solid acid value of 75 mgKOH/g. The weight average molecular weight (polystyrene standard) determined by gel permeation chromatography (GPC) is 12, oxime, ethylene. (Example 1) &lt;Preparation of photosensitive composition coating liquid 1&gt; The following components were mixed to prepare a photosensitive composition coating liquid 1 (photosensitive resistance) Flux composition coating solution) 67 201235781 is the 1011 (M621 Chinese manual without a slash correction. This revision date: May 10, 101, ZFR-1776 (manufactured by Nippon Kayaku Co., Ltd., acid-modified contains ethylenic unsaturation) 65 wt% methoxypropyl acetate solution of epoxy resin) (Β-1 32.3 parts by weight of compound T-1 0.8 parts by weight of coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF Corporation) 0.021 parts by weight of coloring pigment·· Pariotol Yellow D0960 (manufactured by BASF Corporation) 0.006 parts by weight of dispersing agent: Solsperse 24000GR (Lubrizol Corporation) Manufactured) 0.22 parts by weight of a polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by weight of initiator: Irgacure 907 (manufactured by BASF Corporation) 0.6 parts by weight of sensitizer: DETX-S (Sakamoto Chemical Co., Ltd.) Ltd.) 〇.〇05 parts by weight of reaction aid: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 〇.〇19 parts by weight of hardener: melamine (manufactured by Wako Pure Chemical Industries, Ltd.) 〇j6 parts by weight of thermal crosslinking agent: Epotohto YDF-170 2.9 parts by weight (a compound of ethylene oxide oxime (bisphenol F type epoxy resin) manufactured by Nippon Steel Chemical Co., Ltd.) Filler: SO-C2 (manufactured by Admatechs Co. Ltd.) 68 201235781 Revision date: May 10, 101 is the 1011〇46:21 Chinese manual without a slash correction δ. 〇 by weight ion trapping agent. ΙΧΕ-6107 (manufactured by Toagosei Co., Ltd.) 0. 82 parts by weight of coating aid: Megafac F-780F 〇 2 parts by weight (manufactured by DIC Corporation, 30 wt% butanone solution) Elastomer: Espel 1612 2 7 parts by weight of hexanone (solvent) 38.7 parts by weight 〇 &lt;photosensitive Preparation of the solder resist film 1 &gt; Using a polyethylene terephthalate film (PET) having a thickness of 25 μm as a support, the photosensitive composition coating liquid was applied by a bar coater. (1) The photosensitive layer was dried and applied to the support so as to have a thickness of about 30 μm, and dried in a hot air circulation dryer for 3 minutes to prepare a photosensitive solder resist film 1. &lt;Formation of permanent pattern&gt; - Modulation of laminated body _ Q A copper-clad laminate (a printed wiring board having no via hole and a copper thickness of 12 μm) having a surface formed by chemical polishing treatment is used as a base. material. Using a vacuum laminating machine (manufactured by Nago Seisakusho Co., Ltd., MVLP5〇G), the photosensitive layer of the inductive solder resist surface 1 is laminated to the copper clad and the lamination. On the copper laminate board, a laminate in which the copper clad laminate, the photosensitive layer, and the poly(p-bismuth diacid) film (support) are laminated is sequentially laminated. The crimping condition is a crimping temperature of 90. (:, the crimping pressure is 0.4 MPa, and the laminating speed is 1 m/min. 69 201235781 Revision date: 1 5 1 May] 〇曰 is the ioii 〇 462i Chinese manual without a g-line correction. The laminate body is formed by the steps shown below. - Exposure step - For the photosensitive layer in the modulated laminate, a pattern forming device using a blue-violet laser exposure with a predetermined pattern is used. a polyethylene terephthalate film (support) (4), irradiating 4 〇 5 nm of laser light with an amount of energy of 4 〇 mJ/cm 2 to obtain a predetermined pattern, and exposing one part of the photosensitive layer Area hardening. - Development step - Stripping the poly-pair on the dimethyl layer, and removing it in the layer. The solution is dissolved and removed. Then it is washed with water to dry it. = The whole surface, and the film strength is made H, and the surface is hardened from the European surface. The evaluation method is as follows. By the evaluation method shown below, the edge of the surface is controlled, and the thermal shock resistance (crack resistance) ), and the complexity, the knot It is shown in Table 1. ° 仏 仏. Smoothness of the side of the pattern _ 70 201235781 Revision date: May 1st, 101st is the first l 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 (The side of the permanent pattern is evaluated for the smoothness of the side surface in the development step. The following evaluation criteria are given to the figure [Evaluation Criteria]. ο: The pattern side is smooth and the pattern shape is excellent. Case 2: On the side of the pattern A slight unevenness was observed, but it was a good figure 〇 △: There were irregularities on the side of the pattern, and the shape of the pattern was slightly poor. x: Condensate was found on the side of the pattern, and the shape of the pattern was poor. - Insulation - Buckle on the glass substrate The copper-coated side of the 12-thick printed substrate is laminated to obtain a comb-shaped electrode having a line width/gap width of 50 μΙη/50 μm, which is not in contact with each other on the same side. In the same manner as the method described in the preparation method, a photosensitive y film is laminated on the comb-shaped electrode of the substrate, and exposure is performed by an optimum exposure amount (_ 〇 = ^ 〜 1 J/cm 2 ). Second, at room temperature After standing for 1 hour, 3 (6 sec. 1 wt% sodium carbonate aqueous solution was subjected to 6 sec 3 shadows, and further heated at 80 〇 C for 10 minutes (dry 颂 〇 Rc MANUFACTURING ca, LTD manufactured by UV = f set by 1 The amount of energy of W is subjected to the ultraviolet C ^ of the photosensitive layer. Further, at 15 (the heating layer of the photosensitive layer is heated for 60 minutes, '=', and, thereby, the evaluation of the formation of a solder resist having a thickness of 25 μm is obtained. Use the meaning ^ to apply the two-layer method between the comb-shaped electrodes for the evaluation of the laminated body after heating, and connect the PTFE shielding line with the Sn/Pb solder to 201235781. This revision date: After applying a voltage of 5 V to the laminated body for evaluation after the comb-shaped electrode on May 10, 1st, the laminated body for evaluation was super accelerated at 13 (TC, 85% RH). The high humidity life test (HAST) tank was allowed to stand for 200 hours. The degree of occurrence of the solder resist of the laminated body for evaluation after the subsequent one-times metallographic microscope was observed and evaluated by the following evaluation criteria. [Evaluation Criteria] ◎: The migration was not confirmed, and the insulation was excellent. 〇: The migration was confirmed only on copper, and the insulation was good. △. A slight migration was observed in SR (anti-fcp agent), and insulation was still observed. Good ', △: The occurrence of migration was confirmed, and the insulation was slightly inferior x: short circuit between electrodes, poor insulation, and crack resistance - Photosensitive solder resist was used in the same manner as the method described in the method for preparing a laminate. The film 1 was laminated on a printed circuit board having 12 thick copper foil laminated on a glass substrate, and a mask of 2 mm square was used, and JJMW-201GX type manufactured by 〇RC I^ANUFACTURING CO., LTD. was used. The exposure machine was exposed by an optimum exposure amount (3 〇〇 J/cm 2 ) which can form a pattern of 2 mm square. Next, after standing at room temperature, i small 4 was spray-developed by a 30 C 1 wt% aqueous sodium carbonate solution, and further heated (dried) at 80X: for 10 minutes. Then, the ultraviolet ray of the photosensitive layer was irradiated with an amount of energy of 1 J/cm 2 using an ultraviolet ray irradiation apparatus manufactured by ORC MANUFACTURING CO., LTD. Further, at 15 (TC), the photosensitive layer is heated for 6 minutes. 72 201235781 -ri-rjwpifl is the (9) surface nickname Chinese manual without a slash correction. Amendment date: May 1, 2011 And the ancient ry is 25 solder resist: with:: the rectangular opening is formed with a thermal cycle of 65 ° C: the resulting substrate is after f 8 / 5 minutes, followed by b (the atmosphere of TC i Road 15 / knife clock, and then again exposed to - large milk in the micro-mirror observation through the _ ring ^ towel 1 by optical display degree, by the following evaluation = = agent on the crack and peeling [evaluation benchmark J f. ::Several f agent has no cracks, peeling, deformation, excellent toughness; slight deformation on several &amp; agents, but good toughness 〇 △• There is a slight crack on the solder resist, but the strongness is slightly better △: There is a slight crack and peeling on the solder resist, and the _ property is slightly worse than the anti-fcf agent. There are obvious cracks and flaking on the fcf agent, and the strong boring property is poor - the mirror-resistant property - after the permanent pattern is degreased and the surface is roughened, Catalyst addition is carried out with sulphur and sulphur. Secondly, the permanent pattern is recorded at 7G °C. The forging treatment was carried out by immersing in a sulfuric acid solution for 4 minutes, and then the crimping and peeling of the cured film in the permanent pattern were observed by visual observation, and the plating resistance was evaluated based on the following criteria. [Evaluation Criteria] ◎ • It is not crimped or peeled off in the cured film, and it is extremely excellent in bondability. 之一: One part of the cured film is discolored, but it is not a practical problem. It is excellent in plating resistance. △: There is curling in the cured film. , plating resistance is poor 73 201235781 HlHJUpUX is the 101104621 Chinese manual without scribe correction This revision date: 1 5 1 May 10 X: bulging (flaking) observed in the cured film, plating resistance is extremely poor ( Example 2) In Example 1, ZFR-1176 (manufactured by Nippon Kagaku Co., Ltd., acid modified epoxy resin containing ethylenic unsaturated group) (B-1) was replaced with Cyclomer P 200HM (manufactured by Daicel Chemical Industries, Ltd.) In the same manner as in Example 1, except that the acrylic resin containing an ethylenically unsaturated group and a carboxyl group (B-2) was used in the same manner as in Example 1, a photosensitive composition coating liquid and a photosensitive anti-resistance were produced. Solder film. The obtained photosensitive composition coating liquid and photosensitive resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 3) In Example 1, ZFR-1176 (Japanese chemical) was used. The company manufactures, acid-modified epoxy resin containing ethylenic unsaturated group) (B-1) is replaced by UXE-3024 (manufactured by Nippon Kagaku Co., Ltd., acid modified polyamine phthalic acid containing ethylenically unsaturated group) The photosensitive resin coating liquid and the photosensitive solder resist film were produced in the same manner as in Example 1 except that the ester resin (B-3) was used in the same manner as in the solid content. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 4) In Example 1, ZFR-1176 (manufactured by Nippon Kagaku Co., Ltd., acid modified epoxy resin containing ethylenically unsaturated group) (B-1) was replaced with carboxyl group synthesized in Synthesis Example 5. Polymer compound (acid modified polyaluminum phthalate resin containing ethylenically unsaturated group) (B-4) (in solid form 74 201235781 *. No. 101104621 The date of the correction was the same as in Example 1 except that the photosensitive composition coating liquid and the photosensitive resist film were produced in the same manner as in Example 1. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 5) A photosensitive composition coating liquid and a photosensitive photoresist film were produced in the same manner as in Example 4 except that the compound T-1 was replaced with the compound T-2. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 6) A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 4 except that the compound τ_ι was replaced with the compound τ_3 in Example 4. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 7) A photosensitive composition coating liquid and a photosensitive anti-caries film were produced in the same manner as in Example 4 except that the compound Τ-1 was replaced with the compound Τ-4. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in the table. (Example 8) In Example 5, the compound Τ-2 was formulated in an amount of from 75 to 35,357,811, HiHOUpiii, No. 101,104,621, which is not underlined. Revision date: May 10, 101 曰 Composition coating liquid A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the solid content was changed from 1.7 wt% to 3.0 wt%. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 9) In Example 5, Epotohto YDF-170 (manufactured by Xinyi Iron Chemical Co., Ltd., having an oxirane group (bisphenol F type epoxy resin)) as a thermal crosslinking agent was replaced with ETERNACOLLOXBP ( A photosensitive composition coating liquid and a photosensitive solder resist film were produced in the same manner as in Example 5 except that the epoxidized group-containing compound was produced by the Ube Industries Co., Ltd. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 10) In Example 5, 'Epotohto YDF-170, which is a thermal crosslinking agent (New II, a compound having an oxirane group manufactured by Chemical Co., Ltd. (bisphenol F type % oxygen resin was replaced with Sumidur BL3175 (Sumika) In the same manner as in Example 5, a photosensitive composition coating liquid and a photosensitive solder resist were prepared in the same manner as in Example 5. The plaque was coated with the obtained photosensitive composition. The cloth liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 11); In Example 5 alone, Epotohto YDF-170 (New 76) was used as a thermal crosslinking agent. 201235781 • * jj[ is the first Chinese version of No. 11〇4621 without a slash correction. The revised period: May 10, 101, chemical compound, epoxide-based compound (bisphenol F-type epoxy) A photosensitive composition coating liquid and a photosensitive resist film were produced in the same manner as in Example 5 except that YSLV_120TE (a compound of oxyethylene group produced by Nippon Steel Chemical Co., Ltd.) was used. About the obtained photosensitive composition The coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Example 12) In the example 1, the ZFR-1176 (manufactured by Nippon Kayaku Co., Ltd., acid modified) An epoxy resin containing an ethylenically unsaturated group) (replaced as a polymer compound containing a few groups synthesized in the synthesis example (acid-modified polyamino phthalate resin containing an ethylene saturated group) (B_5) ( In the same manner as in Example i, the photosensitive composition coating liquid and the photosensitive resist film were produced in the same manner as in Example i. The obtained photosensitive composition coating liquid and photosensitive solder resist film were obtained. The evaluation was carried out in the same manner as in Example 1. The results are shown in Table 1. In the same manner as in Example 1, except that the Ti compound and the thermal crosslinking agent were not prepared in Example 1 and Example 1 were used. The photosensitive composition coating liquid and the photosensitive solder resist film were produced. The obtained photosensitive composition coating liquid and the photosensitive solder resist film were evaluated in the same manner as in Example 1. The results are shown in the table. (Comparative Example 2) In Example 1, A photosensitive composition coating liquid and a photosensitive anti-solder 77 were produced in the same manner as in the example except that the Τ·4 compound was not prepared. The method of the present invention is not limited to the correction of the correction. 77 201235781 ΗΐΗουμαι is the first 〇11〇462丨Date: The film of the photosensitive composition coating liquid and the photosensitive solder resist film obtained was evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 3) In the same manner as in Example 1, except that the ruthenium-1 compound was replaced by ΙΧΕ61〇7 (manufactured by Toagosei Co., Ltd., an inorganic ion exchanger), a photosensitive composition coating liquid and a photosensitive resist film were produced. . The obtained photosensitive composition coating liquid and photosensitive resist film ' were evaluated in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 4) A photosensitive composition was produced in the same manner as in Example 1 except that the compound of the following structure was replaced with the compound T-Z (1,2,4-triazole) of the following structure. Coating solution and photosensitive solder resist film. The obtained photosensitive composition coating liquid and photosensitive resist film ' were evaluated in the same manner as in Example 1. The results are shown in Table 1. In the same manner as in Example 1, except that the thermal cross-linking agent was not prepared, the photosensitive composition coating liquid and the photosensitive anti-resistance were produced in the same manner as in Example 1. Flux is booming. 78 201235781 -ΓΧ-T^VFpJlfl No. 101HM621 Chinese manual without scribe correction This revision date: May 10, 1st, about the photosensitive composition coating liquid and photosensitive solder resist film, and examples 1 Evaluation was performed in the same manner. The results are shown in Table 1. [Table 1] 3SH .實例2 三。坐化合物 含有羧基之高 分子化合物 熱交聯劑 圖案側面 之平滑性 絕緣性 抗龜裂性 耐鍍敫性 種類 含量 (wt%) T-l T-l 1.7 1.7 Β-1 Β-2 YDF-170 YDF-1 70 〇 〇△ 〇Δ - -· ο 實例3 _實例4 Τ-1 1.7 Β·3 YDF-170 ο ◎ 〇 ο 〇Δ ο (S) ◎ 〇 (Ο) ~~ Τ-1 1.7 Β-4 YDF-170 ο 賞例5 實例9 25Πο~ 3grr 351Γ 比转似1 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ Τ-3 1.7 Β-4 YDF-170 ο 〇 ◎ ◎〜 Τ-4 1.7 Β-4 YDF-170 ο ο ο ◎ Τ-2 JT-2 3.0 Β-4 YDF-170 〇 ◎ ◎ 1.7 Β-4 OXBP 〇△ ο 〇Δ Τ-2 1.7 Β-4 BL3175 〇Δ 〇Δ ◎ _Τ-2 1.7 Β-4 YSLV-120TE ο ο Τ-1 1.7 Β·5 YDF-170 ο ο ο ---—. 〇 人 |yij ι - Β-1 - Δ X X X Β-1 Β-1 YDF-170 vnc i ίγϊ Δ Δ Δ ο Τ-Ζ 1·7 Β-1 YDF-170 Δ Δ 〇Δ 〇Δ X 〇 ο Δ~~~ _Τ-1 1.7 Β-1 - °Δ Δ X —— χ 於/其中,於表1中,三唑化合物之含量(wt%)是相對 ;感光性組成物塗佈液之固形物的含量。 X只例1〜實例丨2成為絕緣性、耐鍍敷性、圖案側面之 j二性、及抗龜裂性優異之結果。於使用化合物τ_2作為 ^ ^化合物之情形時,成為絕緣性非常優異之結果。而且, 萨Β 4、亦即酸改質含有乙烯性不飽和基之聚胺基甲 脂作為含錢基之高分子化合物之情形時,成為抗 ^生優異之結果。而且,於使用具有環氧乙烷基之化合 79 201235781 兮IHJOpiii 爲第1011〇4621號中文說明書無劃線修正 修正日期:1〇1年5月1〇日 物作為熱交聯劑之情形時, 結果。 成為圖案側面之平滑性優異之 於比較例丨中,與實例相比而言, 圖案側面之平滑性、及抗龜裂性之任-者均非常Γ 於不含三唾化合物之比較例2中,盘實作吊目比而&lt;, 絕緣性、圖案側面之平滑性、及抗龜裂性差 於使用無機離子捕捉劑之比較例3中,例相比而 言,雖然着祕為同㈣度,㈣蚊差, 抗龜裂性非常差。 卞 於使用1,2,4-二唾作為三n坐化合物之比較例4中,與 實例相比而言,圖案側面之平祕、耐鍍敷性差。 於不含熱交聯劑之比較例5中,成為絕緣性、抗龜裂 性、耐鍍敷性差之結果。 於實例1〜實例12中圖案側面之平滑性提高,這是比 較例1〜比較例4中無法獲得之效果,且是於感光性組成 物中使用三唑化合物之先前技術中亦未知之效果。 本發明之態樣例如可列舉以下之態樣。 一種感光性組成物,其特徵在於含有:兵有可與 自由基反應之基及可與熱交聯劑反應之基的至少任一者與 二唑環的化合物、聚合性化合物、光聚合起始劑、熱交聯 劑。 &lt;2&gt;如上述&lt;ι&gt;所述之感光性組成物,其進〆步含有 含幾·基之南分子化合物。 &lt;3&gt;如上述&lt;2&gt;所述之感光性組成物,其中,含有羧 80 201235781 tl 爲第101HM621號中文說明書無劃線修正本 修正日期:101年5月1〇日 基之高分子化合物是酸改質含有乙烯性不飽和基之聚胺基 甲酸酯樹脂。 &lt;4&gt;如上述&lt;1&gt;至&lt;3&gt;中任一項所述之感光性組成 物,其中,熱交聯劑是具有選自環狀醚基、嵌段異氰酸酯 基、噁唑基、及碳酸乙二酯基之至少一種官能基的化合物。 &lt;5&gt;如上述&lt;1&gt;至&lt;4&gt;中任一項所述之感光性組成 物,其中,具有可與自由基反應之基及可與熱交聯劑反應 φ 之基的至少任一者與三唑環的化合物是下述通式(I)所表 示之化合物; [化 19] r λ Χ-Υ L」n通式⑴ 其中,於所述通式(I)中,X表示三唑環;Υ表承臭 有可與自由基反應之基及可與熱交聯劑反應之基的至少任 一者之有機基;η表示1〜3之整數;另外,於η為2〜3 時’ Υ可相同亦可不同。 &lt;6&gt;如上述&lt;5&gt;所述之感光性組成物,其中,通式(1) 中之γ是下述通式(II)所表示之基; [化 20]3SH. Example 2 III. Sitting on the side of the compound with a carboxyl group-containing polymer compound, the thermal cross-linking agent has a smooth insulating, crack-resistant, rhodium-resistant type (wt%) Tl Tl 1.7 1.7 Β-1 Β-2 YDF-170 YDF-1 70 〇〇△ 〇Δ - -· ο Example 3 _Example 4 Τ-1 1.7 Β·3 YDF-170 ο ◎ 〇ο 〇Δ ο (S) ◎ 〇(Ο) ~~ Τ-1 1.7 Β-4 YDF- 170 ο Reward Example 5 Example 9 25Πο~ 3grr 351Γ Ratio like 1 Τ-2 1.7 Β-4 YDF-170 ο ◎ ◎ ◎ Τ-3 1.7 Β-4 YDF-170 ο 〇◎ ◎~ Τ-4 1.7 Β- 4 YDF-170 ο ο ο ◎ Τ-2 JT-2 3.0 Β-4 YDF-170 〇◎ ◎ 1.7 Β-4 OXBP 〇△ ο 〇Δ Τ-2 1.7 Β-4 BL3175 〇Δ 〇Δ ◎ _Τ-2 1.7 Β-4 YSLV-120TE ο ο Τ-1 1.7 Β·5 YDF-170 ο ο ο ---—. 〇人|yij ι - Β-1 - Δ XXX Β-1 Β-1 YDF-170 vnc i Ϊγϊ Δ Δ Δ ο Τ-Ζ 1·7 Β-1 YDF-170 Δ Δ 〇Δ 〇Δ X 〇ο Δ~~~ _Τ-1 1.7 Β-1 - °Δ Δ X —— χ / /, in In Table 1, the content (wt%) of the triazole compound is relative; the content of the solid matter of the photosensitive composition coating liquid. X only Example 1 to Example 丨 2 were excellent in insulation, plating resistance, pattern side, and crack resistance. When the compound τ_2 was used as the ^^ compound, it was a very excellent insulating property. Further, in the case where the acid-modified polyaminomethyl group containing an ethylenically unsaturated group is used as a polymer compound having a hydroxyl group, it is excellent as a result of resistance to growth. Moreover, in the case of using a compound having an oxirane group, the amount of the oxirane group is the same as that of the case where the substance is used as the thermal crosslinking agent in the case of the first day of May 1st, when the object is used as the thermal crosslinking agent. result. In the comparative example, the smoothness of the side of the pattern was excellent, and the smoothness of the side of the pattern and the crack resistance were all in comparison with Comparative Example 2 containing no trisal compound as compared with the examples. The disc is actually the same as the &lt;, the insulating property, the smoothness of the side of the pattern, and the crack resistance are inferior to those of the comparative example 3 using the inorganic ion scavenger, and the secret is the same (four) degree. (4) Mosquito is poor, and the crack resistance is very poor. In Comparative Example 4 in which 1,2,4-disal was used as the three-n-seat compound, the pattern side surface was inferior in flatness and plating resistance as compared with the example. In Comparative Example 5 containing no thermal crosslinking agent, it was found to be inferior in insulation, crack resistance, and plating resistance. The smoothness of the side surface of the pattern in Examples 1 to 12 was improved, which was an effect which could not be obtained in Comparative Examples 1 to 4, and was not known in the prior art in which a triazole compound was used in the photosensitive composition. Examples of the aspect of the invention include the following aspects. A photosensitive composition comprising: a compound capable of reacting with a radical and a compound capable of reacting with a thermal crosslinking agent, a compound of a diazole ring, a polymerizable compound, and a photopolymerization initiation Agent, thermal crosslinking agent. &lt;2&gt; The photosensitive composition according to the above &lt;1&gt;, which further comprises a south molecular compound containing a group. &lt;3&gt; The photosensitive composition according to the above &lt;2&gt;, which contains carboxy 80 201235781 tl is the 101st HM621 Chinese specification without a slash correction. Amendment date: May 1, 2011 The compound is an acid modified polyurethane resin containing an ethylenically unsaturated group. The photosensitive composition according to any one of the above-mentioned <1>, wherein the thermal crosslinking agent has a cyclic ether group, a blocked isocyanate group, and an oxazolyl group. And a compound of at least one functional group of an ethylene carbonate group. The photosensitive composition according to any one of the above-mentioned <1> to <4>, wherein at least a group reactive with a radical and a group reactive with a thermal crosslinking agent are reacted at least The compound of any one of the triazole rings is a compound represented by the following formula (I); [Chem. 19] r λ Χ-Υ L"n Formula (1) wherein, in the above formula (I), X Represents a triazole ring; the oxime is an organic group having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent; η represents an integer of 1 to 3; When ~3, 'Υ can be the same or different. The photosensitive composition of the above-mentioned <5>, wherein γ in the formula (1) is a group represented by the following formula (II); [Chem. 20] 通式(II) 其中,於所述通式(η)中,Υι表示碳數為2〜25之 81 201235781 HlHJOpm 爲第101104621號中文說明書無劃線修正本 修不口拥 修正日期:101年5月10日 m+Ι價有機基;21表示羧基、丙烯醯氧基、及甲基丙烯醯 氧基之任一者;m表示1〜2之整數;另外,於111為2時二 Ζι可相同亦可不同。 ' &lt;7&gt;如上述小至&lt;6&gt;中任一項所述之感光性組成 物,其中,熱交聯劑是具有環氧乙烷基之化合物。 &lt;8&gt; —種感光性抗焊劑組成物,其特徵在於含有如上 述&lt;1&gt;至&lt;7&gt;中任一項所述之感光性組成物。、 &lt;9&gt; 種感光性抗焊劑膜,其特徵在於包含:支撐 ;感光層,於該支撐體上積層如上述&lt;8&gt;所述之感光^ 抗烊劑組成物而成 &lt;1〇&gt; -種永久圖案形成方法,其魏在於將如上述 命所述之感光性抗焊劑喊物塗佈於基體之表面上,加 以乾燥㈣層歧層㈣絲層體讀,進行曝光後進行 顯影。 &lt;11&gt; 一種永久圖案,其特徵在於其是藉由如上述 &lt;1〇&gt;所述之永久圖案形成方法而形成。 12種印刷基板,其特徵在於藉由如上述&lt;1〇&gt;所 述之永久圖案形成方法而形成有永久圖案。 [產業上之可利用性] 本發明之感光性組成物可獲得絕緣性、耐鑛敷性、圖 二側面之平滑性優異之高性能之硬化膜,因 地用 於抗焊劑中。 本發明之感紐抗焊_可適宜地用於保護膜、層間 、、.膜J干圖案等永久圖案等之各種圖案形成,彩色遽 82 201235781t1 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 光片、柱材、肋材、間隔物、隔板等液晶結構部件之製造, 全像片、微機器、打樣機之製造等中,特別是可適宜地用 於印刷基板之永久圖案形成用途中。 本發明之圖案形成方法使用了所述感光性組成物’因 此可適宜地用於保護膜、層間絕緣膜、抗焊圖案等永久圖 案等之各種圖案形成用途,彩色濾光片、柱材、肋材、間 隔物、隔板等液晶結構部件之製造’全像片、微機器、打 〇 樣機之製造等中,特別是&lt;適宜地用於印刷基板之永久圖 案形成中。 【圖式簡單說明】 無。 【主要元件符號說明】 無。In the above formula (η), Υι denotes a carbon number of 2 to 25 81 201235781 HlHJOpm is the 101104621 Chinese manual without a sizing correction This repair does not have a correction date: 101 years 5 m+ valence organic group on the 10th of the month; 21 represents any one of a carboxyl group, an acryloxy group, and a methacryloxy group; m represents an integer of 1 to 2; in addition, when 111 is 2, the same may be the same. It can also be different. The photosensitive composition according to any one of the above-mentioned items, wherein the thermal crosslinking agent is a compound having an oxirane group. The photosensitive composition of any one of the above-mentioned <1> to <7>, which is a photosensitive composition. &lt;9&gt; A photosensitive resist film comprising: a support; a photosensitive layer on which a layer of the photosensitive agent composition according to the above &lt;8&gt; is formed &lt;1〇 &gt; - A permanent pattern forming method in which a photosensitive solder resist as described above is applied onto the surface of a substrate, dried (four) layer (4), and subjected to development after exposure. . &lt;11&gt; A permanent pattern which is formed by the permanent pattern forming method as described in &lt;1〇&gt; above. The twelve types of printed boards are characterized in that a permanent pattern is formed by the permanent pattern forming method as described in the above &lt;1〇&gt;. [Industrial Applicability] The photosensitive composition of the present invention can obtain a high-performance cured film having excellent insulating properties, mineralization resistance, and smoothness on the side surface of Fig. 2, and is used for a solder resist. The inductive solder resist of the present invention can be suitably used for various patterns such as a protective film, an interlayer, a permanent pattern such as a film J dry pattern, and the like, and the color 遽82 201235781t1 is the 101104621 Chinese manual without a slash correction. :In the manufacture of liquid crystal structural components such as solar wafers, pillars, ribs, spacers, separators, etc., in the manufacture of full-image sheets, micro-machines, proofing machines, etc., especially suitable for use in Permanent pattern formation for printed substrates. The pattern forming method of the present invention uses the photosensitive composition', and thus can be suitably used for various pattern forming applications such as a protective film, an interlayer insulating film, a permanent pattern such as a solder resist pattern, and the like, a color filter, a pillar, and a rib. In the manufacture of liquid crystal structural members such as materials, spacers, and separators, in the manufacture of a full-image sheet, a micromachine, a smashing machine, and the like, it is particularly suitable for use in permanent pattern formation of a printed substrate. [Simple description of the diagram] None. [Main component symbol description] None. 83 201235781 -Γ X 1 爲第101104021號中文說明書無劃線修正本 修正日期:101年5月10日 釐jg專利說明書 ※記號部分請勿填寫) (本說明書格式、順序,請勿任意更動 分類:' 1/ls ※申請案號:以 ※申請曰: ρ (Ά H°^K (2〇〇-^ϊ) 一、發明名稱:(中文/英文) „ ,.上,, C〇Sl Ί^/n,91) 感光性組成物、感光性抗焊劑組成物及感光性抗焊劑 膜以及永久圖案、其形成方法與印刷基板 〇 PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE SOLDER RESIST COMPOSITION, PHOTOSENSITIVE SOLDER RESIST FILM, PERMANENT PATTERN, PERMANENT PATTERN FORMING METHOD AND PRINTED BOARD 二、中文發明摘要: 一種感光性組成物’其含有:具有可與自由基反應之 基及可與熱交聯劑反應之基的至少任一者與三哇環的化合 物、聚合性化合物、光聚合起始劑、熱交聯劑。較佳的是 進一步含有含羧基之高分子化合物。較佳的是含有羧基之 高分子化合物為酸改質含有乙烯性不飽和基之聚胺基甲酸 醋樹脂。 三、英文發明摘要: A photosensitive composition contains a compound having a triazole ring and at least one of a group capable of 201235781 I Μ. X_/^/ X Λ- Λ. 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 reacting with free radicals and a group capable of reacting with a thermal cross-linking agent, a polymerizable compound, a photopolymerization initiator, and a thermal cross-linking agent. The better one further contains a polymer compound having a carboxyl group. The polymer compound having a carboxyl group is better a polyurethane resin acid which is an acid denaturation and contains an ethylene characteristic unsaturated group. 201235781 HiHOOpUi 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 七、申請專利範圍: 1. 一種感光性組成物,其特徵在於含有:具有可與自 由基反應之基及可與熱交聯劑反應之基的至少任一者與三 β坐環的化合物、聚合性化合物、光聚合起始劑、以及熱交 聯劑。 2. 如申請專利範圍第1項所述之感光性組成物,更含 有含羧基之高分子化合物。 3. 如申請專利範圍第1項所述之感光性組成物,其中 含有羧基之高分子化合物是酸改質含有乙烯性不飽和基之 聚胺基曱酸醋樹脂。 4. 如申請專利範圍第1項所述之感光性組成物,其中 熱交聯劑是具有選自環狀醚基、嵌段異氰酸酯基、噁唑基、 及碳酸乙二酯基之至少一種官能基的化合物。 5. 如申請專利範圍第1項所述之感光性組成物,其中 具有可與自由基反應之基及可與熱交聯劑反應之基的至少 任者與二σ坐環的化合物是下述通式(I)所表示之化合物; [化1] x-fvl n 通式⑴ 其中’於所述通式(I)中,X表示三唑環;γ表示具 有可與自由基反應之基及可與熱交聯劑反應之基的至少任 一者之有機基;η表示1〜3之整數;另外,於η為2〜3 84 201235781 TX-r-^ 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月10日 時,γ可相同亦可不同。 6.如申請專利範圍第5項所述之感光性組成物,其 中’通式(I)中之Y是下述通式(Π)所表示之基; [化2] 通式(II) —Ylf Zi]m83 201235781 -Γ X 1 is the 101104021 Chinese manual without a slash correction. Amendment date: May 10, 101 PCT patent specification ※ Do not fill in the symbol part) (The format and order of this manual, please do not arbitrarily change the classification: '1/ls ※Application number: Apply by ※曰: ρ (Ά H°^K (2〇〇-^ϊ) I. Name of the invention: (Chinese/English) „ ,.,,, C〇Sl Ί^ /n,91) Photosensitive composition, photosensitive solder resist composition and photosensitive solder resist film, and permanent pattern, method of forming the same, and printed substrate 〇PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE SOLDER RESIST COMPOSITION, PHOTOSENSITIVE SOLDER RESIST FILM, PERMANENT PATTERN, PERMANENT PATTERN FORMING METHOD AND PRINTED BOARD 2. Abstract: A photosensitive composition containing: at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a compound of a tri-wax ring a polymerizable compound, a photopolymerization initiator, a thermal crosslinking agent, preferably further containing a carboxyl group-containing polymer compound, preferably containing a carboxyl group. The polymer compound is an acid modified polyaluminum carboxylic acid resin containing an ethylenically unsaturated group. III. English Abstract: A photosensitive composition contains a compound having a triazole ring and at least one of a group capable of 201235781 I Μ X_/^/ X Λ- Λ. For the Chinese manual No. 101104621, there is no slash correction. This revision date: May 10, 1st, 10th, reacting with free radicals and a group capable of reacting with a thermal cross-linking agent, a polymerizable compound, a photopolymerization initiator, and a thermal cross-linking agent. The better one further contains a polymer compound having a carboxyl group. The polymer compound having a carboxyl group is better a polyurethane resin acid which is an acid denaturation and contains an 201235781 HiHOOpUi is the 101104621 Chinese manual without a slash correction. Amendment date: May 10, 101. VII. Patent application scope: 1. A photosensitive composition characterized by: possession and freedom base At least one of a reaction group and a group reactive with a thermal crosslinking agent, a compound having a triazine, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 2. The photosensitive composition according to item 1 of the patent application, further comprising a polymer compound having a carboxyl group. 3. The photosensitive composition according to claim 1, wherein the polymer compound having a carboxyl group is an acid modified polyamine phthalic acid resin containing an ethylenically unsaturated group. 4. The photosensitive composition according to claim 1, wherein the thermal crosslinking agent is at least one member selected from the group consisting of a cyclic ether group, a blocked isocyanate group, an oxazolyl group, and an ethylene carbonate group. Base compound. 5. The photosensitive composition according to claim 1, wherein the compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent and a di-sigma ring is the following a compound represented by the formula (I); [Chemical Formula 1] x-fvl n Formula (1) wherein 'in the above formula (I), X represents a triazole ring; γ represents a group reactive with a radical and An organic group of at least one of the groups reactive with the thermal crosslinking agent; η represents an integer of 1 to 3; in addition, η is 2 to 3 84 201235781 TX-r-^ is No. 101104621 Amend this revision date: May 10, 101, γ can be the same or different. 6. The photosensitive composition according to claim 5, wherein Y in the general formula (I) is a group represented by the following formula (Π); [Chemical Formula 2] Formula (II) — Ylf Zi]m 0 其中,於所述通式(II)中,Yi表示碳數為2〜25之 m+l價有機基;乙1表示羧基、丙烯醯氧基、及甲基丙烯醯 氧基之任一者;m表示1〜2之整數;另外’於m為2時, Ζι可相同亦可不同。 7.如申請專利範圍第1項所述之感光性組成物,其 中’熱交聯劑是具有環氧乙烷基之化合物。 8· —種感光性抗焊劑組成物,其特徵在於含有感光性 組成物’所述感光性組成物含有具有可與自由基反應之基 及可與熱交聯劑反應之基的至少任一者與三唑環的化合 物、聚合性化合物、光聚合起始劑、以及熱交聯劑。 9· 一種感光性抗焊劑膜,其特徵在於包含: 支撐體; 、感光層’於該支撐體上積層含有如下感光性組成物的 感光性抗焊劑組成物而成,所述感光性組成物含有具有可 與自由基反應之基及可與熱交聯劑反應之基的至少任一者 與二°坐環的化合物、聚合性化合物、光聚合起始劑、熱交 聯劑。 85 201235781 HlHOOpm 爲第101104621號中文說明書無劃線修正本 修正日期:101年5月1〇日 i〇. —種永久圖案形成方法,其特徵在於將含有如下 感光性組成物的感光性抗桿劑組成物塗佈於基體之表面 上加以乾餘而積層感光層而形成積層體之後,進行曝光 後進行顯影,所述感光性組成物含有具有可與自由基反廣 之基及可與熱交聯劑反應之基的至少任—者與三唑環的^ 合物、聚合性化合物、光聚合起始劑、熱交聯劑。 u. —種永久圖案,其特徵在於其是藉由如下之永久 圖案形成方法而形成’所述永久圖案形成方法是將含有如 下感光性組成物的感光性抗焊劑組成物塗佈於基體之表面 上’加以乾燥而積層感光層而形成積層體之後,進行曝光 後進行顯影’所述感光性組成藉貧具有可與自由基反應 之基及可與熱交聯劑反慮之i的至少任一者與三唑環的化 合物、聚合性化合物、光聚合起始劑、熱交聯劑。 12. —種印刷基板,其特徵在於藉由如下之永久圖案 形成方法而形成有永久圖案’所述永久圖案形成方法是將 含有如下感光性組成物的感光性抗坪劑組成物塗佈於基體 之表面上’加以乾燥而積層感光層而形成積層體之後,進 行曝光後進行顯影,所述感光性組成物含有具有可與自由 基反應之基及可與熱交聯劑反應之基的至少任一者與三„坐 環的化合物、聚合性化合物、光聚合起始劑、熱交聯劑。 86 201235781 ~Γ 丄一Γ_&gt; 爲第101104621號中文說明書無劃線修正本 修正日期:1〇1年5月10日 四、 指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件符號簡單說明: 無。 五、 本案若有化學式時,請揭示最能顯示發明特徵 的化學式: 〇 無0Wherein, in the above formula (II), Yi represents an m+l-valent organic group having a carbon number of 2 to 25; and B represents any one of a carboxyl group, an acryloxy group, and a methacryloxy group. m represents an integer from 1 to 2; in addition, when m is 2, Ζι may be the same or different. 7. The photosensitive composition according to claim 1, wherein the 'thermal crosslinking agent is a compound having an oxirane group. 8. A photosensitive solder resist composition characterized by comprising a photosensitive composition, wherein the photosensitive composition contains at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent A compound with a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. A photosensitive resist film comprising: a support; and a photosensitive layer comprising a photosensitive resist composition containing a photosensitive composition, wherein the photosensitive composition contains A compound having at least one of a group reactive with a radical and a group reactive with a thermal crosslinking agent, and a cyclized compound, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 85 201235781 HlHOOpm is the Chinese manual of No. 101104621. There is no slash correction. This revision date: May 1st, 101, i. A permanent pattern forming method, which is characterized in that a photosensitive anti-roding agent containing the following photosensitive composition is used. The composition is applied onto the surface of the substrate, dried, and a photosensitive layer is laminated to form a layered body, and then developed and exposed, and the photosensitive composition contains a base which can be reversibly reacted with a radical and can be thermally crosslinked. At least any of the groups of the agent reaction and the triazole ring compound, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. u. A permanent pattern characterized in that it is formed by a permanent pattern forming method in which a photosensitive resist composition containing a photosensitive composition is applied to a surface of a substrate At least 'drying and laminating a photosensitive layer to form a laminated body, and then performing development after exposure.' The photosensitive composition has at least one of a group reactive with a radical and a retardation i with a thermal crosslinking agent. A compound of a triazole ring, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. 12. A printed circuit board characterized in that a permanent pattern is formed by a permanent pattern forming method in which a photosensitive resist composition containing a photosensitive composition is applied to a substrate On the surface, after drying, a photosensitive layer is formed to form a layered body, and then developed, and the photosensitive composition contains at least a group having a group reactive with a radical and reacting with a thermal crosslinking agent. One and three „ ring-ring compounds, polymerizable compounds, photopolymerization initiators, thermal cross-linking agents. 86 201235781 ~Γ 丄一Γ_&gt; For the 101104621 Chinese manual without a slash correction, this revision date: 1〇1 May 10th, 2010. The designated representative map: (1) The representative representative of the case is: No. (2) The symbol of the symbol of the representative figure is simple: No. 5. If there is a chemical formula in this case, please reveal the best display invention. Characteristic chemical formula: 〇 no 0
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* Cited by examiner, † Cited by third party
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CN107382719A (en) * 2017-06-23 2017-11-24 武汉长盈鑫科技有限公司 A kind of preparation method of anhydride modified biphenyl oxetanes acrylic ester prepolymer
CN107382719B (en) * 2017-06-23 2020-07-14 武汉长盈鑫科技有限公司 Preparation method of anhydride modified biphenyl oxetane acrylate prepolymer
CN114524807A (en) * 2022-03-03 2022-05-24 波米科技有限公司 Triazole-based cross-linking agent, and preparation method and application thereof

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