WO2012117363A1 - Système et procédés de production d'une distribution d'intensité lumineuse homogène - Google Patents
Système et procédés de production d'une distribution d'intensité lumineuse homogène Download PDFInfo
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- WO2012117363A1 WO2012117363A1 PCT/IB2012/050960 IB2012050960W WO2012117363A1 WO 2012117363 A1 WO2012117363 A1 WO 2012117363A1 IB 2012050960 W IB2012050960 W IB 2012050960W WO 2012117363 A1 WO2012117363 A1 WO 2012117363A1
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- Prior art keywords
- lens
- lens array
- array
- atleast
- light
- Prior art date
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- 238000009826 distribution Methods 0.000 title claims abstract description 63
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S8/00—Lighting devices intended for fixed installation
- F21S8/006—Solar simulators, e.g. for testing photovoltaic panels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/02—Combinations of only two kinds of elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
- F21V14/08—Controlling the distribution of the light emitted by adjustment of elements by movement of the screens or filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V5/00—Refractors for light sources
- F21V5/008—Combination of two or more successive refractors along an optical axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
- G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
Definitions
- the present invention relates generally to light intensity, and more particularly, to system and methods for producing a homogeneous light intensity distribution on a target screen in a cost effective, environmentally safe, and secure manner.
- a solar simulator also called sun simulator or flasher is an apparatus that replicates solar light in terms of the solar spectrum and its intensity and is used for testing solar energy conversion devices.
- the purpose of the solar simulator is to provide a controllable indoor test facility under laboratory conditions, used for the testing of solar cells, sun screens, plastics, and other materials and devices.
- sun simulator devices are used in order to qualify the manufactured solar cells and solar modules.
- Such sun simulator devices consist in artificial light sources with a well- defined light spectrum and a very constant light intensity over the whole illumination area.
- Lens array based light homogenizers are currently used in sun simulator designs. These sun simulators are used in automated production lines and have to be as small as possible.
- the target screen is not at infinity and the lens array is much smaller than the screen, the rays coming from the lens matrix do not impinge perpendicularly on it. As the angle of incidence increases, the light intensity per unit area decreases. This causes a high light intensity at the centre and the light intensity reduces near the edges of the illumination area, causing undesired inhomogeneous light intensity distribution over the test device.
- the general purpose of the present invention is to provide an improved combination of convenience and utility, to include the advantages of the prior art, and to overcome the drawbacks inherent therein.
- the present invention provides a system for producing a homogeneous light intensity distribution on a target screen.
- the system comprises atleast a light source configured to generate light, atleast a first lens array having a plurality of lenses, atleast a second lens array having a plurality of lenses such that atleast a lens of the first lens array has a corresponding lens on the second lens array, and atleast a mask array associated with atleast one of the first lens array and the second lens array.
- a target screen may be adapted to project the homogeneous light intensity distribution.
- the light source may include atleast one of Xenon lamp, Halogen lamp, LED, metal halide, mercury.
- the present invention provides a method of producing a homogeneous light intensity distribution on a target screen.
- the method comprises the steps of generating a light using atleast a light source, aiming the light from the light source on atleast a first lens array, which comprises a plurality of lenses arranged in a matrix form, each lens having a focal length fl, reducing the light intensity of the light passing through a plurality of regions of the first lens array using a mask array associated with the first lens array by covering the corresponding regions of the first lens array, passing the light through atleast a second lens array for producing the homogeneous light intensity distribution, wherein the second lens array comprises a plurality of lenses, each lens having a focal length f2 equal to the focal length f 1 , such that every lens of the first lens array has a corresponding lens on the second lens array and projecting the homogeneous light intensity distribution on the target screen.
- IG. 1 illustrates an arrangement used for light homogenization with tandem lens arrays
- FIG. 2 illustrates an array of four tandem lenses
- FIGS. 3A and 3B illustrate overlapping projection cones and imaging at finite distance using lens Lp, respectively;
- FIG. 4 illustrate an optical arrangement for producing a homogeneous light intensity distribution, according to state of the art
- FIGS. 5A and 5B illustrate the effect of putting mask arrays on the resulting light intensity distribution on the target screen, according to an exemplary embodiment of the present invention
- FIG. 6 illustrates a lens array using cylindrical lenses
- FIGS. 7 illustrate a stepped displacement of the mask holder, according to an exemplary embodiment of the present invention
- FIGS. 8 illustrate the mask holder adjustment, according to an exemplary embodiment of the present invention
- FIGS. 9 illustrate the mask array shifting by using a windowed plate, according to an exemplary embodiment of the present invention.
- FIGS. 10 illustrate the variation in light intensity by changing the distance between the mask holder and the first lens array; according to an exemplary embodiment of the present invention.
- FIG. 11 illustrates a flowchart of the method of producing a homogeneous light intensity distribution on the target screen, according to an exemplary embodiment of the present invention.
- the term 'plurality' refers to the presence of more than one of the referenced item and the terms 'a', 'an', and 'at least' do not denote a limitation of quantity, but rather denote the presence of at least one of the referenced item.
- the term 'device' also includes 'engine' or 'machine' or 'system' or 'apparatus'.
- the photovoltaic device (also referred to as 'PV module') may includes atleast one of a wafer, a solar cell, two interconnected solar cells, a lay-up of solar cells, parts of the layup, a string, a matrix, a solar module, a glass plate, a plastic layer, a temporary member or any combination thereof.
- Solar cells may be of any technology such as thin film, crystalline, hetero junction (HIT) etc.
- the present invention provides improved system and methods for producing a homogeneous light intensity distribution on a target screen.
- the system of the present invention may be mass produced inexpensively and provides user an easy, robust, efficient, secure, cost effective, environment friendly and productive way of solar cells or a solar module examination.
- lens array systems are commonly used. They usually consist of two lens arrays, both arrays contains same number of lenses and are arranged in a matrix form or on a line. Every lens Li of the first lens array has a corresponding lens L2 on the second lens array. Each pair of Li and L2 may be arranged on the same optical axis and may be seen as an independent entity, which is called a tandem lens.
- FIG. 1 illustrates an arrangement used for light homogenization with tandem lens arrays with square lenses.
- a tandem lens array thus consists of several tandem lens entities which are arranged in a matrix or a line.
- the distance between the two lenses has to be equal to their focal distance.
- the shape of the lenses used in these arrays may be arbitrary. In order to get a good fill factors which is defined as surface used for lenses divided by the complete surface of the lens array, any shape may be realized for the outer shape of the lenses, the shape of the primary lens Ligiving the shape of the illuminated area onto the target screen 20. For usual photovoltaic device testing, shapes like square, rectangular, hexagonal or round are preferred as they correspond to usual shape of photovoltaic cells or modules.
- Light from one or several light sources may be aimed onto the first lens array Li.
- first lens array Li To increases the light intensity entering the first array 14, reflectors or other concentrator optics may also be used.
- the light entering lens Li may be directed onto lens L 2 , the latter imaging lens Liand project this image onto the target screen 20 which may be a target device such as PV module, cell, matrix, string, thin film layer etc.
- Lens Li Light rays hitting on the Li within a certain incidence angle, may be deviated by the lens Li and collimated towards the lens L 2 .
- the lens L 2 may be then used as imaging lens to project the collected light at infinity.
- the lens Li may be seen as an object which may be imaged by the lens L 2 .
- the distance between the lenses LI and L 2 may be equal to the focal length fl (of both lens Li and lens L 2)i the light intensity distribution on lens Li may be imaged at infinity.
- Each tandem lens may consist of two lenses (L 1 and L 2 ).
- each lens may be realized by only one refractive interface.
- the lens LI may be formed by the left surface, which has a curvature to focus parallel incoming light exactly at a distance fi.
- the lens L2 may be formed by the right surface and also has a focal length f 2 equal to fi.
- the distance between the lenses LI and L2 may be equal to their focal length fl .
- Each lens L 2 thus may images the light intensity of its corresponding lens Li and projects this intensity distribution at infinity.
- the light intensity distribution at infinity may be homogenized considering two mechanisms. According to first mechanism, the light impinging on one lens of the array may be approximately homogenous since the intensity of light may not change significantly over the surface of the lens. Since all light impinging on one lens may be imaged onto the complete target screen, this results in a homogenous image. Since all images produced by lenses may be superimposed. A superposition of homogenous images may be again homogenous, even if the intensity impinging on the different lenses of the first array may be significantly different. [0038] As per second mechanism in reality the light impinging on one lens may be not completely homogenous.
- Light intensity may vary a little over surface of the lens. Since this may be applicable for all lenses and assuming that intensity deviations on all lenses may be more or less independent, the inhomogenities may be cancel out on the target screen due to the superposition. Thus the light may be homogenized after passing through the tandem lens arrays.
- FIGS. 3A and 3B which illustrate overlapping projection cones and imaging at finite distance using lens Lp, respectively.
- the projection cones may be overlapping and the resulting intensity distribution on the screen may be the superposition of all the single projections.
- the intensity distribution on the target screen may be thus very well homogenized, even for very non-uniform illuminations at the first lens array Li.
- the resulting light intensity may be a nearly uniform intensity distribution over the whole target screen and may be often referred to as "flat top".
- an additional lens LF may be added directly behind the second lens array L 2. Since the rays impinging on lens Lp may be parallel, and L F may be at the object distance from the lens array, the rays may be in focus at the target screen, provided the latter may be in the image distance. A sharp flat top may be then created at a distance, equal to the focal distance fp of Lp.
- the advantage of light homogenization with lens arrays may be the ability to get a homogenous intensity distribution on the screen, even if the light distribution on the Li matrix may be very non-homogenous. Therefore (because the light may be concentrated without considering its homogeneity), capable concentrator optics may be added to the light source in order to get a maximum of light into the lens array optics, regardless of the homogeneity of the light leaving the concentrator optics. Since the lens array corrects all non-homogeneity, lens array designs may be thus an optimal way to get homogenous illumination, coupled with high light efficiencies.
- the final intensity distribution produced from above technique may be an angular projection which may results in good light homogeneities, only when projected on a hemispherical screen.
- the resulting light intensity When projected on a plane screen, the resulting light intensity will be higher in the centre of the screen than towards the edges. This may be due to the fact that light intensity decreases with the square of the distance from its source. This may be corrected to a certain amount by using additional lenses between the lens array and the target screen. The dimensions of such lenses have to be equal or bigger than the illuminated object (e.g. the cell or the solar panel).
- FIG. 4 illustrates an optical arrangement 10 for producing a homogeneous light intensity distribution, according to an exemplary embodiment of the present invention.
- the optical arrangement 10 comprises atleast a light source 12 configured to generate light, atleast a first lens array 14 with a plurality of lenses arranged in a matrix form, atleast a second lens array 18 comprises a plurality of lenses such that every lens of the first lens array 14 may has a corresponding lens on the second lens array 18, and atleast a mask array 16 (as shown in FIGS. 5-8) associated with atleast one of the first lens array 14 and the second lens array 18.
- a target screen 20 may be adapted to project the homogeneous light intensity distribution.
- the light source 12 may include atleast one of Xenon lamp, Halogen lamp, LEDs, metal halide, mercury.
- each lens of the first lens array 14 may has a focal length f 1 and each lens of the second lens array 18 may has focal length f2.
- the focal length f2 may be equal to the focal length fl, such that every lens of the first lens array 14 has a corresponding lens on the second lens array 18 and a target screen 20 to project the homogeneous light intensity distribution.
- a mask of the mask array 16 may be imaged on the target screen 20, therefore, the mask array 16 may be disposed as close as possible to the focal point of atleast a lens of the second lens array 18 to perform a desired intensity correction. If the mask array 16 is far away from the focal point, then an image of the mask array 16 may be blurred on the target plane 20. Some blur may be useful to have not too sharp edges visible on the field, but if the blur is larger than the field itself, all effect may be lost (as shown in right part of FIGS. 10.
- the mask array 16 may be on or close to a first or a second surface of atleast a lens of the first lens array 14, but the mask array 16 may have no desired effect if disposed close to second lens array 18, where an image of the mask array 16 may be so blurred that it may cover the full target screen 20.
- the mask array 16 maybe the distance from the optical center of a lens to the point where rays parallel to an optical axis, impinging the lens surface may converge.
- atleast a property of atleast a lens of the second lens array 18 may be used to image atleast the first lens of the first lens array 14 to infinity.
- the outer surface of the first lens array 14 may be at one focal length of the optical centre of the second lens array 18 o get a correct image of the first lens array 14.
- the arrangement wherein the first lens array 14 has to be at one focal length of the second lens array 18 may ensure the best possible energy transfer. If it is not the case, more rays may escape and may not be used for final illumination.
- the projected light of a single tandem lens corresponds to the light intensity distribution over its surface.
- each tandem lens accounts for a certain percentage of the total light intensity. Covering certain regions of some tandem lenses, allows reducing the light intensity in the corresponding regions of the resulting light distribution on the target screen and thus target device.
- the mask array 16 may comprises of a plurality of masks which covers a plurality of selected regions of the first lens array 14 for reducing the intensity of the light passing through those regions of the first lens array 14.
- the use of the mask arrays 16 on the first lens arrays 14 may subtract light from selected regions of the illumination distribution, thus reducing the light impinging at the centre of the target screen 20.
- light intensity may be too high at the centre (due to the rays impinging perpendicularly on the surface) of the final light distribution.
- Partially transparent or completely opaque masks may be added at the centre of some lenses of the first lens array 14, in order to reduce the intensity in the centre of the target screen 20.
- every lens of the first lens array 14 and its corresponding lens on the second lens array 18 may be arranged on same optical axis and act as an independent entity called a tandem lens.
- the distance between the first lens array 14 and the second lens array 18 may be equal to the focal length fl.
- Each lens of the first lens array 14 and the second lens array 18 may be of any arbitrary shapes like square, hexagonal, round lens shapes.
- the system 10 may further comprise an additional lens L F located between the second lens array 18 and the target screen 20.
- FIGS. 5A and 5B which illustrate the effect of putting mask arrays 16 on the resulting light intensity distribution on the target screen 20.
- FIG. 5A has three parts: the left part shows a lens array 30 of nine tandem lenses. The middle part shows the intensity distribution as a radial plot of the intensity on each lens of the lens array 30. The right part shows the resulting light intensity distribution on the target screen 20. It may be seen that each tandem lens of the lens array may 30 has the same contribution to the final intensity distribution on the target screen and may be equal to nine times the intensity distribution of one single tandem lens.
- FIG. 5B shows the same lens array 30 as shown in FIG. 5A but in this case the mask array 16 may be added in the form of three masks on the lens array 30. Each of the masks may cover a certain amount of the central part of the lens array 30.
- the middle part of the FIGS 5B shows the intensity distribution as a radial plot of the intensity on each lens of the lens array 30.
- the resulting light intensity on the target screen 20 which may be shown on right part of the FIG. 5B may be the sum of the intensity distribution of the nine tandem cells whereof three have a covered central part.
- the intensity in the centre originates from only six tandem lenses (with no mask). Three lenses do not attribute as much to the intensity at the centre, which reduces the intensity there.
- the theoretical intensity distribution shows abrupt intensity changes, which in reality may be smoothed due to diffraction, optical blur and other optical imperfections. Adding a mask array with correct dimensions on a lens array system, thus allows correcting intensity distributions.
- cylindrical lenses may also be used. With certain production techniques it may be easier to get shorter focal distances and thus bigger projection angles with cylindrical lenses.
- FIG. 6 shows a lens array 40 using cylindrical lenses.
- Using cylindrical lenses requires at least four refractive interfaces, two for the vertical lens array 42 and two for the horizontal lens array 44.
- Each lens array consists of two cylindrical lens arrays which may be spaced by the focal distance f of their cylinder lenses. The distance between the two lens arrays may be freely chosen, but may be small in respect to the size of the arrays.
- the mask array 16 may be added on the cylindrical lens array 40 in order to correct inhomogeneous illumination.
- the mask array 16 may consists of lines with adapted widths which may be arbitrarily distributed on the cylinder lenses.
- the mask array 16 may be applied both, on the vertical lens array 42 and on the horizontal lens array 44 in order to correct vertical and horizontal intensity non-uniformities.
- the mask array 16 may be one of a metallic layer, a metallic sheet, a plastic or any combination of these. It may also be made with plastic having a metallic layer.
- the mask array 16 may be made from one of an opaque, a semi-transparent, a spectrally filtering optical object or any combination thereof.
- the mask array 16 may be printed on front or back surface of the first lens array 14 to become integrated with the first lens array 14.
- the mask array 16 may be mounted separately on a mask holder 17 in front of the front surface or behind the back surface of the first lens array 14.
- the mask holder 17 may be adapted to be moved relative to the first lens array 14 for switching between different mask sets. Small relative movements between the mask holder 17 and the first lens array 14 may be used to correct possible non- homogeneous light intensity distributions on the target screen 20.
- a stepped displacement along lateral direction of a mask holder 17 (which may be bigger than the lens array 14) allows switching between different mask sets, when the step width corresponds to a multiple of the lens pitch. This may be used for correcting different non-uniformity distributions.
- FIGS. 8 which illustrate mask holder 17 adjustment. If the resulting intensity distribution on the target screen 20 may be required to be non-symmetrical, e.g. with a maximum at the right side of the centre, the mask holder 17 may be slightly shifted in that direction in order to achieve the desired effect in the light intensity distribution on the target screen 20.
- the graph on right part of the figure shows the intensity distribution.
- the dashed line may be the intensity distribution without any masks and the continuous line shows intensity distribution with shifted masks.
- FIGS. 9 which illustrate an exemplary embodiment when the mask array 16 may be integrated with the first lens array 14, the a windowed plate 36 may be provided which may be adapted to be moved relative to the first lens array 14 for switching between different mask sets.
- the left part of the figure shows that the first lens array 14 has three circular masks on its central lenses.
- the windowed plate 36 may be moved the mask patter on the first lens array 14 may be covered by bigger diameter masks as shown in right part of the figure.
- a mask holder 17 may be adapted to be moved relative to the first lens array 14 to change distance between the mask holder 17 and the first lens array 14. Changing the distance between the lenses and the masks, modifies the apparent size of the masks, which allows adjusting the resulting intensity distribution. This may be used in order to correct small variations in the uniformity distribution (as shown in FIGS. 10).
- the combination of relative movements i.e. left right, up down, or rotation or changing the distance between the mask array 16 and the first lens array 14 may be used to achieve the desired light intensity distribution on the target screen 20.
- the first lens array 14 or the second lens array 18 may have more than 16, 49 or 100 lenses.
- the term 'array' may refers any multitude of lenses that may or may not be bordering. The lenses may, for example, each lens separately or a few of the lenses may be held in a separate frame.
- FIG. 11 shows a flowchart of a method 100 of producing a homogeneous light intensity distribution on the target screen 20.
- the method 100 starts with step 110 of generating a light using the light source 12.
- the light generated from the light source may be aimed on a first lens array 14, which comprises a plurality of lenses arranged in a matrix form, each lens having a focal length fl.
- the light intensity of the light passing through a plurality of selected regions of the first lens array 14 may be reduced using the mask array 16 which may be associated with the first lens array 14.
- the mask array 16 reduces the light by covering the corresponding selected regions of the first lens array 14.
- the light after the mask array 16 may be passed through the second lens array 18 for producing a collimated light.
- the second lens array 18 comprises a plurality of lenses, each lens having a focal length f2 equal to the focal length fl, such that every lens of the first lens array 14 has a corresponding lens on the second lens array 18.
- Step 150 may be projecting the homogeneous light intensity distribution on the target screen 20.
- the method 100 may further comprises a step of changing size, shape, orientation and location of the mask arrays to produce desired light intensity distribution.
- the operations discussed herein may be implemented through computing devices such as hardware, software, firmware, or combinations thereof, which may be provided as a computer program product, e.g., including a machine-readable or computer-readable medium having stored thereon instructions or software procedures used to program a computer to perform a process discussed herein.
- the machine- readable medium may include a storage device.
- the operation of components of the system 10 and method 100 may be controlled by such machine-readable medium.
- automated masks such as LCD screens may be used.
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- Life Sciences & Earth Sciences (AREA)
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Abstract
La présente invention concerne un système et un procédé permettant de produire au moins une distribution d'intensité lumineuse homogène sur au moins un écran cible (20). Le système (10) comprend au moins une source de lumière (12) conçue pour générer une lumière, au moins une première matrice de lentilles (14) comportant une pluralité de lentilles, au moins une seconde matrice de lentilles (18) comportant une pluralité de lentilles, au moins une matrice de masquage associée à la première matrice de lentilles (14) et/ou à la seconde matrice de lentilles (18) de sorte que chaque lentille de la première matrice de lentilles (14) peut avoir une lentille correspondante sur la seconde matrice de lentilles (18). Le système (10) peut être utilisé par un simulateur solaire.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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IN565DE2011 | 2011-03-03 | ||
IN565/DEL/2011 | 2011-03-03 |
Publications (1)
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WO2012117363A1 true WO2012117363A1 (fr) | 2012-09-07 |
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PCT/IB2012/050960 WO2012117363A1 (fr) | 2011-03-03 | 2012-03-01 | Système et procédés de production d'une distribution d'intensité lumineuse homogène |
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WO (1) | WO2012117363A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015048591A1 (fr) * | 2013-09-28 | 2015-04-02 | Newport Corporation | Système de simulateur solaire à base de del et son procédé d'utilisation |
US9907636B2 (en) | 2015-07-01 | 2018-03-06 | 3M Innovative Properties Company | Curing lights with homogenous light patch |
EP3438524A1 (fr) * | 2017-08-02 | 2019-02-06 | ERCO GmbH | Luminaire |
US10458608B2 (en) | 2016-03-25 | 2019-10-29 | Newport Corporation | LED solar simulator and method of use |
JP2021006905A (ja) * | 2015-09-04 | 2021-01-21 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 光学自由曲面を含む投影装置および投影方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1060265A (en) * | 1964-09-30 | 1967-03-01 | Ass Elect Ind | Improvements relating to radiating apparatus |
EP1139014A2 (fr) * | 2000-03-31 | 2001-10-04 | Seiko Epson Corporation | Source de lumière, système optique d'éclairage et projecteur l'utilisant |
US6471358B1 (en) * | 1996-08-26 | 2002-10-29 | Seiko Epson Corporation | Lighting device and projector |
US6769777B1 (en) * | 2003-08-20 | 2004-08-03 | Honeywell International Inc. | Multi-aperture optical dimming system |
EP1860479A1 (fr) * | 2005-03-18 | 2007-11-28 | Harison Toshiba Lighting Corporation | Systeme d eclairage |
EP2146137A2 (fr) * | 2008-07-16 | 2010-01-20 | The Boeing Company | Procédé et système pour simulateur solaire |
-
2012
- 2012-02-29 TW TW101106440A patent/TW201243388A/zh unknown
- 2012-03-01 WO PCT/IB2012/050960 patent/WO2012117363A1/fr active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1060265A (en) * | 1964-09-30 | 1967-03-01 | Ass Elect Ind | Improvements relating to radiating apparatus |
US6471358B1 (en) * | 1996-08-26 | 2002-10-29 | Seiko Epson Corporation | Lighting device and projector |
EP1139014A2 (fr) * | 2000-03-31 | 2001-10-04 | Seiko Epson Corporation | Source de lumière, système optique d'éclairage et projecteur l'utilisant |
US6769777B1 (en) * | 2003-08-20 | 2004-08-03 | Honeywell International Inc. | Multi-aperture optical dimming system |
EP1860479A1 (fr) * | 2005-03-18 | 2007-11-28 | Harison Toshiba Lighting Corporation | Systeme d eclairage |
EP2146137A2 (fr) * | 2008-07-16 | 2010-01-20 | The Boeing Company | Procédé et système pour simulateur solaire |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015048591A1 (fr) * | 2013-09-28 | 2015-04-02 | Newport Corporation | Système de simulateur solaire à base de del et son procédé d'utilisation |
US9907636B2 (en) | 2015-07-01 | 2018-03-06 | 3M Innovative Properties Company | Curing lights with homogenous light patch |
JP2021006905A (ja) * | 2015-09-04 | 2021-01-21 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 光学自由曲面を含む投影装置および投影方法 |
JP7282721B2 (ja) | 2015-09-04 | 2023-05-29 | フラウンホッファー-ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 光学自由曲面を含む投影装置および投影方法 |
US10458608B2 (en) | 2016-03-25 | 2019-10-29 | Newport Corporation | LED solar simulator and method of use |
EP3438524A1 (fr) * | 2017-08-02 | 2019-02-06 | ERCO GmbH | Luminaire |
US11199306B2 (en) | 2017-08-02 | 2021-12-14 | Erco Gmbh | Lamp |
Also Published As
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