WO2012108258A1 - 静電気帯電計測方法及び装置 - Google Patents
静電気帯電計測方法及び装置 Download PDFInfo
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- WO2012108258A1 WO2012108258A1 PCT/JP2012/051492 JP2012051492W WO2012108258A1 WO 2012108258 A1 WO2012108258 A1 WO 2012108258A1 JP 2012051492 W JP2012051492 W JP 2012051492W WO 2012108258 A1 WO2012108258 A1 WO 2012108258A1
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- electrostatic charge
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- sound wave
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
- G01R29/14—Measuring field distribution
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to an electrostatic charge measuring method and apparatus for measuring electrostatic charge generated at various manufacturing sites such as semiconductor manufacturing, electronic equipment manufacturing, precision machine manufacturing, chemical manufacturing, and food manufacturing and managing the same.
- Static electricity occurs irregularly at various manufacturing sites, causing not only the destruction of parts and products but also failure and disasters such as fires.
- static electricity often occurs in a semiconductor manufacturing site.
- Electronic elements such as ICs and LSIs manufactured at semiconductor manufacturing sites, electronic substrates on which these are mounted, and electronic devices in which these electronic substrates are incorporated are extremely vulnerable to static electricity.
- Static electricity that causes such problems is generated when a device, apparatus, or person charged by touching, peeling, or discharging touches another object. The generated static electricity causes troubles such as electrostatic breakdown and malfunction of electronic devices.
- a polymer material is an insulator having a very high electrical resistivity
- ignition may develop into an explosion or fire.
- electrostatic problems such as contamination of raw materials, semi-finished products and products, and adhesion of dust are major obstacles due to electrostatic attraction and repulsion. Static electricity control is indispensable.
- the electrostatic charge generated between each process of the manufacturing process is simply measured, the cause of the static electricity is analyzed, and the process itself may be reviewed.
- a material that is difficult to be charged is selected, or manufacturing process conditions such as contact speed and pressure are changed.
- a static elimination process is incorporated into the process at an appropriate and minimum necessary timing.
- the electrostatic charge measurement technology needs to be able to measure the electrostatic charge in a non-destructive manner so as not to reduce the production efficiency, and to be independent of the measurement target environment in the presence of mixed metals and insulators. Furthermore, the electrostatic charge measuring device needs to satisfy the condition that the electrostatic charge of the measurement target can be measured from a remote location even if there is a spatial restriction due to a manufacturing device or the like.
- Patent Document 1 As a technique relating to such electrostatic charge measurement, a technique using a surface electrometer (see, for example, Patent Document 1), a technique using a Pockels element and a CCD camera, which are primary electro-optic effects (see, for example, Patent Document 2). has been proposed.
- Non-Patent Document 1 is susceptible to environmental influences because the lines of electric force are dragged to the surrounding metal / earth in an actual manufacturing site, so it is necessary to perform proximity measurement to bring the probe closer to the subject. is there. For this reason, remote measurement and spatial resolution have an inversely proportional relationship, and the technique of Non-Patent Document 1 has a problem that electrostatic charging cannot be measured with high accuracy.
- Non-Patent Document 2 has an advantage of high-speed measurement of a two-dimensional distribution, but is restricted to a measurement object having a Pockels effect, and needs to measure electrostatic charge by bringing a Pockels crystal plate close to the measurement object. is there. That is, since accurate electrostatic charge measurement is difficult, it is difficult to use at a manufacturing site with many spatial constraints.
- Non-Patent Document 3 a pressure wave method (for example, see Non-Patent Document 3) and a pulse electrostatic acoustic method (for example, see Non-Patent Document 4) have been proposed.
- Non-Patent Document 3 and Non-Patent Document 4 are contact-type techniques in which an electrode is brought into direct contact with a side surface of a measurement object and are techniques for measuring a charge distribution in a solid, they are applied to manufacturing sites. It has a difficult problem.
- Non-patent document 5 a technique for measuring a space charge distribution by emitting a sound wave in the air and obtaining a position of a change in an electric field emitted from a floating charge from a sound wave velocity and a detection time has been proposed (for example, Non-patent document 5).
- Non-Patent Document 6 and Patent Document 1 are based on the premise that ultrasonic waves are used, and thus have a problem of requiring a medium such as water.
- the detected signal is remarkably low at 68 ⁇ V after amplification of 82 dB (about 12000 times), and in other embodiments, it is shown to be as low as nV order.
- the detected electromagnetic wave intensity is very weak. This is because of the characteristics of the piezoelectric material that generates polarization when sound pressure is applied, and the techniques of Non-Patent Document 6 and Patent Document 1 are not suitable for manufacturing sites where various charged materials are mixed.
- the technique of a nonpatent literature 6 and the patent document 1 is not suitable for a manufacturing field also in the point that an electromagnetic wave anechoic chamber is required since electromagnetic wave intensity is very weak.
- Patent Document 2 a technique has been proposed in which an object to be measured is placed in a fluid and a sound wave is irradiated to measure an electric signal or a magnetic signal generated in the fluid in a boundary layer with the object to be measured (see, for example, Patent Document 2). .
- the technique of patent document 2 can detect the chemical characteristic and biological characteristic of a measuring object, since it measures a signal directly with an electrode, it has the problem of requiring contact of an electrode.
- Hiroshi Omae Research Report, Kagoshima Prefectural Industrial Technology Center, No. 20, pp. 57-63 (2006) A. Kanno, K. Sasagawa, T. Shiozawa, and M. Tsuchiya: Optics Express18 (2010) 10029-10035 E. Eisenmenger, M. Haardt: ardSolid St. Com. 41 (1982) 2769-2775 T. Maeda, Y. Oki, A. Nishikata, T. Maeno: Trans.Inst.Elect.Engnr.Jpn. A 126 (2006) 185-190 A. Hazmi, N. Takagi, D. Wang and T. Watanabe: Sensors 7 (2007) 3058-3070 K. Ikushima, S. Watanuki, S. Komiyama: Appl. Phys. Lett. 89 (2006) 194103
- any material (metal / semiconductor / insulator) is charged.
- metal the surface is uniformly charged, and in semiconductor and insulator, positive and negative charges are charged randomly and randomly.
- the danger that charging of an electronic element leads to destruction of the electronic element is as described above.
- the positively charged electronic element means that the electric potential is high, and the charged electronic element may be an adjacent electronic element, ground, or another element that is negatively charged. Discharge occurs when in contact with a different potential.
- an existing surface potential meter When an existing surface potential meter is used to measure the electrostatic charge of an electronic element, the electrostatic charge can be measured in the case shown in FIG.
- various devices are often arranged above the production line. If the surface electrometer is arranged above the production line, there is a possibility that minute dust may be induced, which is a spatial restriction.
- a surface electrometer is disposed obliquely above the production line as shown in FIG. 1 (2), avoiding directly above the production line. In such an oblique measurement, the measured potential becomes inaccurate or is measured by the influence of the surroundings (for example, if there is a ground part, the electric field is attracted there). The potential becomes larger or smaller than the original potential. As a result, of course, the magnitude of the electrostatic charge measured is inaccurate.
- a non-contact type surface electrometer is often used.
- the surface electrometer has a measurement range with a long measurement distance as shown in FIG. Because of the spread, telemetry and spatial resolution are inversely related. Further, as shown in FIG. 2 (2), the surface potential meter has a large error when there is a ground (grounding) around it or other charged objects.
- the present invention applies (1) non-destructive electrostatic charging by applying vibration to the measurement object and measuring electromagnetic waves (radio waves and electromagnetic fields) generated along with the electrostatic charging vibration of the measurement object. , (2) Meet the three conditions simultaneously, measuring the electrostatic charge by reducing the environmental impact of the object to be measured in the presence of metal and insulators, (3) Measuring the electrostatic charge without approaching. It is an object of the present invention to provide an electrostatic charge measurement method and apparatus.
- the electrostatic charge measurement technique of the present invention measures generated electromagnetic waves (radio waves and electromagnetic fields) by applying spatial vibration to each charged measurement object or measurement location.
- the surface potential is proportional to the electromagnetic wave intensity, and the measurement object potential is measured by positive and negative. It was confirmed that the phase of the electromagnetic wave generated was different. Therefore, if this phenomenon is utilized, the electrostatic charge state of the measurement object can be measured by measuring an electromagnetic wave having the same frequency as the frequency applied to the measurement object.
- the electrostatic charge measuring method of the present invention is as follows.
- An electrostatic charge measuring method includes a step of applying vibrations having a frequency and amplitude selected in advance to a measurement object, and an intensity measurement step of measuring the intensity of electromagnetic waves generated along with the vibration of the measurement object. And a state measurement step of measuring the electrostatic charge state of the measurement object based on the intensity of the electromagnetic wave measured in the measurement step.
- the electrostatic charge measuring method according to the second invention is measured by an amplitude measuring step for measuring the amplitude of the measurement object and an intensity and amplitude measuring step of the electromagnetic wave measured in the intensity measuring step. And a charge amount measuring step of measuring the electrostatic charge amount of the measurement object based on the measured amplitude.
- the electrostatic charge measuring method according to the third invention is based on the phase of the electromagnetic wave measured in at least one of the intensity measurement step and the amplitude measurement step. It further includes a determination step of determining whether the state is negative charge or positive charge.
- the applying step irradiates the measurement target with sound waves having a frequency and sound pressure selected in advance.
- the applying step vibrates the support base that supports the measurement object at a preselected frequency and amplitude.
- the applying step has a sound wave generator that is installed at the bottom of the cylindrical member and generates a sound wave, and the measurement object is a cylindrical member. It arranges above.
- the sound wave is converged by the sound wave focusing means, and the local vibration is applied to the measurement object.
- the electrostatic charge measuring method according to the eighth invention includes a conical member, a circular concave lens, an acoustic lens, and a plurality of sound sources for focusing the sound wave generated from the sound wave generator. Use at least one of the used electronic focus.
- the applying step includes a vibrator having an end contacting the measurement object, and the vibrator is a measurement target. Contact with an object and vibrate at a preselected frequency and amplitude.
- the applying step scans a position where vibration is applied to the measurement object, and the intensity measuring step is scanned.
- the electrostatic charge distribution in the measurement object is measured by measuring the electromagnetic wave corresponding to the position.
- An electrostatic charge measuring device is a vibration applying means for applying vibrations of a predetermined amplitude and frequency to a measurement object, a receiving means for receiving an electromagnetic wave generated along with the vibration of the measurement object, and a receiving means. And calculating means for calculating the amount of electrostatic charge charged on the measurement object based on the intensity of the electromagnetic wave received at.
- the electrostatic charge measuring device according to the twelfth invention further includes a laser displacement meter for measuring the amplitude of the measurement object.
- the computing means is configured to charge the electrostatic charge of the measurement object based on the phase of the electromagnetic wave received by the receiving means. It further comprises a determination means for determining by either positive charging.
- the electrostatic charge measuring device is characterized in that the vibration applying means generates sound waves that irradiate the measurement target with sound waves having a selected frequency and sound pressure. Have the device.
- the electrostatic charge measuring device provides the vibration applying means for vibrating the support base that supports the measurement object at a preselected frequency and amplitude.
- a vibration generating device is provided.
- the sound wave generator includes a sound wave generator installed at the bottom of the cylindrical member, and the sound wave generator is located above the cylindrical member. A sound wave is irradiated to the measurement object placed on the surface.
- the electrostatic charge measuring device uses a sound wave generator, a circular concave lens, an acoustic lens, and a plurality of sound sources installed at the bottom of the conical member.
- the sound wave generator has at least one of electronic focus, and irradiates the measurement target with the converged sound wave.
- the vibration applying means includes a vibrator having an end portion that comes into contact with the measurement object. Applies vibration at a preselected frequency and amplitude at the point of contact with the measurement object.
- the electrostatic charge measuring device has an xy stage that causes the measurement object to scan, and the calculation means includes an x ⁇
- the electrostatic charge distribution in the measurement object is measured by measuring the electromagnetic wave corresponding to the scan position in the y stage.
- the electrostatic charge measurement method of the present invention applies vibration to a measurement object, and measures the strength of electromagnetic waves (radio waves and electromagnetic fields) generated along with the electrostatic charge vibration of the measurement object. Charge state can be measured. As a result, even if there is a grounded part or a high-potential part around the measurement object, non-contact measurement can be performed without being affected by these parts if they are separated from the vibration. That is, the electrostatic charge measurement method can accurately measure the electrostatic charge state without affecting the electrostatic charge state of the measurement object.
- the antenna that detects electromagnetic waves can be installed freely within the detectable region, the electrostatic charge measurement method is not restricted by spatial constraints even if there are spatial constraints around the measurement object. Electrostatic charge can be measured.
- the electrostatic charge amount can be measured from the relationship with the intensity of the electromagnetic wave, and the electrostatic charge state is determined from the negative or positive charge from the phase of the electromagnetic wave. be able to.
- the electrostatic charge measurement method of the present invention is based on the relationship between the position where the vibration is applied and the electromagnetic wave intensity at that time, and the surface of the measurement object.
- the electrostatic charge distribution can be measured.
- the figure which shows the space restrictions of the measurement by a surface electrometer The figure which shows the influence by the environment of the measurement by a surface potential meter.
- the figure which shows the basic principle of this invention The figure which shows the installation freedom degree of this invention.
- the figure which shows one Example of this invention The figure which shows the measurement result of the electromagnetic wave intensity of this Example.
- the figure which shows the other Example of this invention The figure which shows the measurement result of the electromagnetic wave intensity when carrying out negative charge in this Example, and carrying out positive and negative charge.
- the figure which shows the further another Example of this invention The figure which shows the relationship between the measured electromagnetic wave intensity
- FIG. 1 is a diagram showing spatial constraints of measurement by a surface electrometer.
- FIG. 2 is a diagram showing the influence of the measurement environment by the surface electrometer.
- FIG. 3 is a diagram showing the basic principle of the present invention.
- FIG. 4 is a diagram showing the degree of freedom of installation according to the present invention.
- the electrostatic charge measurement method of the present invention includes a step of applying vibrations having a predetermined frequency and amplitude to a measurement object, and an intensity measurement step of measuring the intensity of electromagnetic waves generated along with the vibration of the measurement object.
- the intensity of the measured electromagnetic wave indicates an electrostatic charge state including an electrostatic charge amount of the measurement object, and the state measurement step measures the electrostatic charge state.
- the electrostatic charge amount (including the electrostatic charge polarity) of the measurement object is measured by the electrostatic measurement method of the present invention.
- an electrostatic charge measuring device in which the electrostatic charge measuring method of the present invention is embodied includes vibration applying means for applying vibrations of a predetermined amplitude and frequency to a measurement object, and electromagnetic waves generated along with the vibration of the measurement object.
- Receiving means, and calculating means for calculating the amount of electrostatic charge charged on the measurement object based on the intensity of the electromagnetic wave received by the receiving means.
- the vibration applying means applies vibration to the measurement object by various means.
- the vibration is determined in advance according to the characteristics of the measurement object.
- the measurement object generates a virtual electromagnetic wave due to the applied vibration.
- This virtual electromagnetic wave is an electromagnetic wave caused by the vertical movement of the charged charge included in the measurement object.
- the receiving means receives electromagnetic waves generated by the measurement object.
- the receiving means outputs the received electromagnetic wave to the calculating means.
- the calculation means calculates the electrostatic charge amount charged on the measurement object based on the obtained electromagnetic wave. It calculates not only the amount of electrostatic charge but also the state of electrostatic charge.
- the electrostatic charge measuring device can perform vibration and reception in a separated state, the reception means and the calculation means can be separated from the measurement object. For this reason, there is no need for the receiving means and the computing means to contact the measurement object flowing through the production line, so the electrostatic charge measuring device can measure the electrostatic charge state of the measurement object even when there is a space restriction. Further, since the vibration applying means only needs to vibrate the measurement object directly or indirectly, the vibration applying means can also vibrate the measurement object regardless of space constraints. In this respect as well, the electrostatic charge measuring device can be easily installed at the manufacturing site.
- the surface of the measurement object whose surface is positively charged is irradiated with sound waves as shown in FIG. 3 (2).
- vibration is applied to a table that supports the measurement object.
- the positive charge vibrates as shown in FIG. 3 (3) along with the vibration of the measurement object (not only the vibration of the entire measurement object but also the vibration of the region where the sound wave is applied to the measurement object).
- an electromagnetic wave having the same frequency as the frequency applied to the measurement object is generated.
- the electrostatic charge measurement method can generate electromagnetic waves only by vibrating the measurement target as a whole or by irradiating the measurement target with sound waves to vibrate. Further, based on the electromagnetic wave having the same frequency as the frequency, the electrostatic charge measuring method can accurately detect the electrostatic charge amount of the measurement object.
- a vibration generator for vibrating the measurement object may be installed in a part of the transport line as shown in FIG.
- a sound wave generator such as a speaker
- the amount of electrostatic charge of the measurement object can be accurately measured by measuring the electromagnetic wave with an antenna disposed at a proper location avoiding spatial constraints.
- FIG. 5 is a diagram showing an embodiment of the present invention.
- an acrylic tube 2 having a diameter of 60 mm, a height of 1 m, and a thickness of 5 mm is placed on the vibration surface of the speaker 1 as a sound wave generator.
- a polyimide film 3 is attached as a measurement object to the upper surface opening of the acrylic tube 2, and the speaker 1 attached to the lower surface opening of the acrylic tube 2 is driven via the function generator 4.
- a sound wave having a frequency of 2 to 10 Hz is irradiated onto the polyimide film 3 as a measurement object.
- the time dependence of the electromagnetic wave intensity was measured by the oscilloscope 7 through the monopole antenna 5 and the preamplifier 6. Due to the time dependence, the electrostatic charge amount of the polyimide film 3 which is a measurement object is measured.
- the acrylic tube 2 is used in order not to diffuse the sound pressure of the speaker 1.
- a sound wave irradiation device is configured by the speaker 1 and the acrylic tube 2 that vibrate the polyimide film 3 with an amplitude of about 1 to 3 mm by irradiating the sound wave of 2 to 10 Hz generated from the speaker 1 into the acrylic tube.
- FIG. 6 shows measurement results when the polyimide film 3 is not charged and charged by irradiating the acrylic tube with a 2 Hz sound wave through the speaker 1.
- FIG. 6 is a diagram showing the measurement result of the electromagnetic wave intensity of this example.
- FIG. 7 is a diagram showing the measurement result of the electromagnetic wave intensity when the frequency of the sound wave to be irradiated is changed.
- FIG. 7 shows a measurement result when the frequency of the irradiation sound wave from the speaker 1 is sequentially changed from 2 Hz to 10 Hz (however, the charge amount is different from that in FIG. 6).
- FIG. 7 shows that the electromagnetic wave intensity changes following the frequency of the sound wave irradiated by the speaker 1.
- the frequency of the irradiation sound wave by the speaker 1 also affects the amplitude of the measurement object, and the amplitude of the measurement object has a large influence on the generated electromagnetic wave intensity, the material, shape, and thickness of the measurement object are large. The optimum frequency needs to be selected accordingly.
- the frequency of the sound wave irradiated by the speaker 1 is several tens to several hundreds of Hz. It is preferable. In actual experiments, the electrostatic charge amount was detected with high accuracy.
- the polyimide film 3 is directly attached to the acrylic cylinder 2, but the periphery of the polyimide film 3 is held by an insulated frame, and through a slight gap from the opening of the acrylic cylinder 2, The polyimide film 3 may be arranged.
- the amplitude of the measurement object and the intensity of the electromagnetic wave generated by the charged measurement object are in a proportional relationship, and the detection sensitivity of the electromagnetic wave is improved by adding the frequency of the sound wave that increases the amplitude of the measurement object.
- the entire object to be measured such as a polyimide film
- it is effective to use a sound wave including this frequency synthetic wave with ultrasonic waves, etc.
- the speaker 1 is arranged above the measurement object placed on the insulating support base and output from the speaker 1.
- the target object may be irradiated with a sound wave.
- the object to be measured is on a film, the surroundings are supported by a frame made of an insulator, and if the sound wave from the speaker is irradiated on the surface, the object to be measured can be made efficient with extremely low sound pressure. Can vibrate well.
- the measurement object when the measurement object is a hard material and is restrained, vibration cannot be expected even if a sound wave is partially irradiated. In such a case, it is preferable that vibration is applied to the support base itself that restrains the measurement object.
- the electrostatic charge can be measured by generating a surface acoustic wave (wave traveling on the surface) having a frequency of several tens of kHz to several tens of MHz with which the amplitude can be obtained relatively easily.
- the vibration frequency and sound pressure of the irradiation sound wave are changed, and accurate charging is performed. These may be adjusted to optimum values so that state detection can be obtained. At this time, it is preferable to automatically detect a vibration frequency having a high amplitude based on a detection value of a measuring device such as the oscilloscope 7 and to feed back a sound pressure at which an optimum amplitude is obtained.
- the copper plate 8 is arranged as a measurement object as shown in FIG.
- the copper plate 8 is uniformly charged by corona discharge from the high voltage power supply 9 while being electrically insulated.
- the speaker 1 applies vibration to the copper plate 8 through the function generator 4 in the same manner as the polyimide film 3.
- the electrostatic charge amount of the copper plate 8 to which vibration was applied was measured by the surface potential meter 12.
- the signal of the function generator 4 and the antenna 5 are connected to the lock-in amplifier 10 that detects the spectrum of the signal line segment with a high S / N ratio.
- the lock-in amplifier 10 measures the electromagnetic wave intensity and phase detected by the antenna 5 when the copper plate 8 is vibrated, and takes the measurement data into the computer PC11.
- the potential of the copper plate 8 is measured by the surface potential meter 12, and the relationship between the electromagnetic wave intensity measured by the present invention and the potential of the copper plate 8 measured by the surface potential meter 12 is shown in FIG. 9A shows a case where the copper plate 8 is negatively charged, and FIG. 9B shows a case where the copper plate 8 is positively charged.
- FIG. 10 shows the relationship between the phase angle (Phase) of the electromagnetic wave detected by the antenna 5 and the potential of the copper plate.
- the signal of the function generator 4 is used as a comparison signal (reference).
- the phase angle (Phase) of the signal indicating the electromagnetic wave intensity is negative (approximately ⁇ 100 °).
- the signal indicating the electromagnetic wave intensity is positive (approximately + 50 °).
- FIG. 11 when measuring the electromagnetic wave intensity of the copper plate 8, the amplitude of the copper plate 8 is measured using the laser displacement meter 13. The amount of the measured amplitude is taken into the computer PC11, and the relationship between the measured electromagnetic wave intensity and the amplitude is measured.
- FIG. 12 shows the relationship between the measured electromagnetic wave intensity and amplitude.
- the horizontal axis indicates the amplitude normalized by each frequency measured by the laser displacement meter 13
- the vertical axis indicates the electromagnetic wave intensity normalized by each frequency, and it can be confirmed that the amplitude and the electromagnetic wave intensity are in a proportional relationship. . For this reason, since the electromagnetic wave intensity can be increased by increasing the amplitude at any frequency, the sensitivity is improved.
- the amplitude of the copper plate 8 that is the measurement object is actually measured using the laser displacement meter 13. Yes.
- the map is obtained by measuring the relationship between the output of the function generator 4 to the speaker 1 and the amplitude of the object to be measured in advance, the laser can be obtained.
- the displacement meter 13 is not always necessary.
- the example shown in FIG. 13 is for measuring the distribution of electrostatic charge charged in a synthetic resin film.
- the polypropylene film 14 is used as a measurement object, and the periphery is held by an insulator (not shown).
- a tapered conical acrylic cylinder 15 is used instead of the cylindrical acrylic cylinder 2 . Sound waves generated from the speaker 1 installed at the bottom of the acrylic cylinder 15 are converged in a dot shape on the back surface of the polypropylene film 14 by the tapered top.
- the xy stage 16 is controlled by the computer PC11, the irradiation position is scanned in the x and y directions, and the electromagnetic wave intensity received by the antenna 5 in correspondence with the coordinates (x, y) of the scan position.
- the measurement results are shown in FIGS. 14 (1) and (2).
- FIG. 14 (1) shows the result obtained by discriminating and calculating the negative charge and the positive charge in consideration of the phase ⁇ of the measurement result of the electromagnetic wave intensity as described above. "0.0007477 to 0.0006434" indicates a minimum value and a maximum value.
- FIG. 14 (2) shows the measurement result of the electromagnetic wave intensity as it is, ignoring the phase.
- “2.64E-5 to 0.0007477” indicates the minimum and maximum values at that time. The value is shown.
- FIGS. 15 (1) and 15 (2) the surface potential distribution of the polypropylene film 14 measured using a surface potential meter is shown in FIGS. 15 (1) and 15 (2).
- the surface electrometer a type utilizing electrostatic induction was used.
- FIG. 15 shows the measurement results obtained by measuring the surface potential in correspondence with the coordinates (x, y) of the scan position using the xy stage as described above.
- FIG. 15 (1) “ ⁇ 352.7 to 406.9” indicates that the minimum value is ⁇ 352.7V and the maximum value is 406.9V. Further, FIG. 15B shows that negative charging and positive charging are not distinguished, and the absolute value has a minimum value of 0.845V and a maximum value of 406.9.
- FIGS. 15 (1) and (2) show the results corresponding to FIGS. 14 (1) and (2), respectively.
- a slight gap is formed between the tip of the conical acrylic cylinder 15 and the back surface of the polypropylene film 14 so as not to make direct contact. You may make it the front-end
- FIG. it is a risk that static electricity may be generated at the contact portion as the tip of the tapered conical acrylic cylinder 15 moves in the xy direction. It is preferable to suppress the generation of static electricity by reducing the contact area.
- the divergence of the sound wave is prevented or converged in a dot shape with respect to the measurement object via the cylindrical acrylic cylinder 2 or the conical acrylic cylinder 15.
- a cylindrical acrylic cylinder 2 or 15 conical acrylic cylinders are not used, and the sound wave generator installed at a position separated from the measurement object is used as the measurement object. It is also possible to apply vibration by directly irradiating the sound wave.
- the conical acrylic cylinder 15 is used as the sound wave converging means for converging the sound wave on the surface of the measurement object in a point shape.
- an acoustic focusing device an acoustic lens formed in a convex shape with a material with low sound velocity propagating inside, such as silicon rubber, or a device such as an electronic focus that converges sound waves by providing time differences between multiple sound sources May be.
- the vibration generation apparatus is arranged on a holding stand for holding the measurement object, and the measurement object is directly It may be vibrated.
- the electrostatic charge distribution may be measured by locally applying vibration to the measurement object using a convergent sound wave or a contact that can move in the xy direction using an xy stage.
- the contact area is made uneven to make point contact, reducing the contact area as much as possible, and effectively suppressing the generation of static electricity due to vibration It is preferable to do.
- the electrostatic charge measuring method described above may be realized as an electrostatic charge measuring device.
- the electrostatic charge measuring method and the electrostatic charge measuring apparatus of the present invention generate an electromagnetic wave by irradiating a measurement object with a sound wave or directly applying a minute vibration, and detect the electromagnetic wave with an antenna or the like.
- the electrostatic charge state of the measurement object can be measured.
- the electrostatic charge measuring device can be easily installed at a position where reception by the antenna is possible even when there are severe restrictions on the installation location such as in the semiconductor manufacturing process. In particular, it can be incorporated at low cost.
- the electrostatic charge amount exceeds the dangerous value, for example, the charge generation by the ground is suppressed, or the charge relaxation is promoted by the surface conductivity for the insulator in the manufacturing process. be able to.
- measures such as ionization using an ionizer or soft X-ray are taken, the occurrence of defective products due to electrostatic breakdown or the like is effectively prevented. In this respect, the yield can be improved.
- the film coating process it is possible to prevent the occurrence of unevenness due to electrostatic charging. As a result, a high quality coating can be produced.
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Abstract
Description
次に具体的な実施例を、図面に基づいて説明する。図5は、本発明の一実施例を示す図である。
2 アクリル筒
3 ポリイミドフィルム
4 ファンクションジェネレータ
5 モノポールアンテナ
6 プリアンプ
7 オシロスコープ
8 銅板
9 高電圧電源
10 ロックインアンプ
11 コンピュータ(PC)
12 表面電位計
13 レーザー変位計
14 ポリプロピレンフィルム
15 円錐状のアクリル筒
16 x-yステージ
Claims (19)
- 計測対象物に予め選定した振動数、振幅の振動を与える付与工程と、
前記計測対象物の振動に伴って発生する電磁波の強度を計測する強度計測工程と、
前記計測工程で計測された電磁波の強度に基づいて、前記計測対象物の静電気帯電状態を計測する状態計測工程と、を備える静電気帯電計測方法。 - 前記計測対象物の振幅を計測する振幅計測工程と、
前記強度計測工程で計測された電磁波の強度および前記振幅計測工程で計測された振幅に基づいて、前記計測対象物の静電気帯電量を計測する帯電量計測工程と、を更に備える、請求の範囲第1項に記載の静電気帯電計測方法。 - 前記強度計測工程および前記振幅計測工程の少なくとも一方で計測された電磁波の位相に基づいて、前記計測対象物の静電気帯電状態が負帯電であるか、正帯電であるかを判別する判別工程をさらに備える、請求の範囲第1項または第2項に記載の静電気帯電計測方法。
- 前記付与工程は、前記計測対象物に、予め選定した振動数及び音圧の音波を照射する、請求の範囲第1項から第3項のいずれかに記載の静電気帯電計測方法。
- 前記付与工程は、前記計測対象物を支持する支持台を、予め選定した振動数及び振幅で振動させる、請求の範囲第1項から第3項のいずれか記載の静電気帯電計測方法。
- 前記付与工程は、円筒状部材の底部に設置されて音波を発生する音波発生器を有し、前記計測対象物を前記円筒部材の上方に配置する、請求の範囲第4項記載の静電気帯電計測方法。
- 前記付与工程は、音波集束手段により音波を収束させて、前記計測対象物に局所的な振動を加える、請求の範囲第4項記載の静電気帯電計測方法。
- 前記音波集束手段は、音波発生器から発生される音波を集束させる円錐状部材、円形凹面レンズ、音響レンズ及び複数の音源を用いた電子フォーカスの少なくとも一つを使用する、請求の範囲第7項記載の静電気帯電計測方法。
- 前記付与工程は、前記計測対象物に接触する端部を有する振動子を備え、前記振動子を前記計測対象物と接触させて、予め選定した振動数及び振幅で振動させる、請求の範囲第1項から第3項のいずれか記載の静電気帯電計測方法。
- 前記付与工程は、前記計測対象物に振動を与える位置をスキャンし、
前記強度計測工程は、スキャンされる位置に対応して電磁波を計測することにより、前記計測対象物における静電気帯電分布を計測する、請求の範囲第7項から第9項のいずれか記載の静電気帯電計測方法。 - 計測対象物に所定の振幅、周波数の振動を与える振動付与手段と、
前記計測対象物の振動に伴って発生する電磁波を受信する受信手段と、
前記受信手段で受信した電磁波の強度に基づいて、前記計測対象物に帯電した静電気帯電量を演算する演算手段と、を備える静電気帯電計測装置。 - 前記計測対象物の振幅を計測するレーザー変位計を更に備える、請求の範囲第11項に記載の静電気帯電計測装置。
- 前記演算手段は、前記受信手段が受信する電磁波の位相に基づいて、前記計測対象物の静電気帯電を、負帯電もしくは正帯電のいずれかで判別する判断手段をさらに備える、請求の範囲第11項又は第12項記載の静電気帯電計測装置。
- 前記振動付与手段は、前記計測対象物に予め選定した振動数及び音圧の音波を照射する音波発生装置を有する、請求の範囲第11項から第13項のいずれか記載の静電気帯電計測装置。
- 前記振動付与手段は、前記計測対象物を支持する支持台を、予め選定した振動数及び振幅で振動させる振動発生装置を有する、請求の範囲第11項から第13項のいずれか記載の静電気帯電計測装置。
- 前記音波発生装置は、円筒状部材の底部に設置した音波発生器を有し、前記音波発生器は、前記円筒状部材の上方に配置される前記計測対象物に音波を照射する、請求の範囲第14項記載の静電気帯電計測装置。
- 前記音波発生装置は、円錐状部材の底部に設置した音波発生器、円形凹面レンズ、音響レンズ及び複数の音源を用いた電子フォーカスの少なくとも一つを有し、前記音波発生装置は、収束させた音波を前記計測対象物に照射する、請求の範囲第14項記載の静電気帯電計測装置。
- 前記振動付与手段は、前記計測対象物に接触する端部を備えた振動子を有し、前記振動子は、前記計測対象物との接触点において、予め選定した振動数及び振幅で振動を付与する、請求の範囲第11項から第13項のいずれか記載の静電気帯電計測装置。
- 前記振動付与手段は、前記計測対象物に対してスキャンさせるx-yステージを有し、前記演算手段は、前記x-yステージにおけるスキャン位置に対応して電磁波を計測することにより、前記計測対象物における静電気帯電分布を計測する、請求の範囲第17項または第18項記載の静電気帯電計測装置。
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