WO2012090887A1 - Tray for placing plate in flat manner - Google Patents

Tray for placing plate in flat manner Download PDF

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Publication number
WO2012090887A1
WO2012090887A1 PCT/JP2011/079947 JP2011079947W WO2012090887A1 WO 2012090887 A1 WO2012090887 A1 WO 2012090887A1 JP 2011079947 W JP2011079947 W JP 2011079947W WO 2012090887 A1 WO2012090887 A1 WO 2012090887A1
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WO
WIPO (PCT)
Prior art keywords
tray
plate
pair
outer frame
sheet
Prior art date
Application number
PCT/JP2011/079947
Other languages
French (fr)
Japanese (ja)
Inventor
資 有光
貴行 湊
知慎 水谷
島田　浩幸
Original Assignee
淀川ヒューテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 淀川ヒューテック株式会社 filed Critical 淀川ヒューテック株式会社
Priority to JP2012550913A priority Critical patent/JPWO2012090887A1/en
Publication of WO2012090887A1 publication Critical patent/WO2012090887A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Definitions

  • the present invention lays flat a sheet-like plate (B) (for example, a thin and large glass substrate, or a glass substrate with a functional layer provided with a functional layer on at least one side of such a glass substrate). It is related with the tray (T) for mounting in a shape.
  • B sheet-like plate
  • T tray
  • the thickness of a glass plate (raw glass plate or base plate glass) used in a flat panel display (FPD (Flat Panel Display)) such as Electron-emitter Display is 0.7 mm or less, for example.
  • Thin for example, 1500mm x 1850mm (G6 size), 1870m ⁇ 2200mm (G7 size), and is large in size and so on 2850mm ⁇ 3050mm (G10 size).
  • G generation / generation
  • the weight per sheet when the thickness is 0.7 mm is about 4.5 kg for the G6 size, about 7 kg for the G7 size, and about 15 kg for the G10 size.
  • the thickness of the glass substrate tends to be thinner depending on the application, and at present, the thickness of 0.5 mm, 0.4 mm, or 0.3 mm has been required.
  • containers for storing, transporting, or transporting glass substrates also called containers, boxes, cassettes, containers, etc.
  • containers, boxes, cassettes, containers, etc. There are many things that cannot be handled by containers.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 10-287382 (Patent Document 1) relating to the application of the present applicant describes a peripheral frame (referred to as an outer frame) forming a rectangular skeleton, and a bridge constructed between the peripheral frames. A grid-like tray having a basic structure is shown. The peripheral frame is provided with an interlaced engagement structure that enables stacking of trays. A substrate such as a glass substrate is placed in a horizontal state on resin pins protruding from both the peripheral frame and the crosspiece. *
  • Patent Document 2 In Japanese Patent Application Laid-Open No. 2007-200959 (Patent Document 2), a workpiece mounting portion is formed by spanning a bar (eight are shown in FIG. 1) between outer frames. In the single wafer transfer tray, the structure in which the central portion of the crosspiece is curved upward is taken into consideration in consideration of the amount of bending of the workpiece during placement. The crosspiece is bent and becomes almost horizontal when the work is placed. The “work” is a large and thin article. *
  • Patent Document 3 Japanese Patent Application Laid-Open No. 2010-120692 (Patent Document 3) describes an inspection transport tray in which a crosspiece is provided between two opposing frames of an aluminum frame. An inspection transport tray in which the surfaces of the frame and the crosspiece are coated with a matte paint is shown (claim 1). A plurality of bowl-shaped resin pads made of synthetic resin may be fitted on the surface of the crosspiece, and the surface of the resin pads may be painted with a matte paint (claim 8). There is also a description of stacking trays in multiple stages (paragraph 0043). The inspection transport tray is a tray for transporting and transporting in order to visually inspect whether dust or dirt is attached to the glass substrate. *
  • Patent Document 1 Since the method of Patent Document 1 is placed in a horizontal state on a resin pin protruding from both a peripheral frame and a crosspiece, it is a large or thin glass substrate that causes bending. There is a limit that cannot be applied. *
  • Patent Document 2 (Patent Document 2) -1--
  • the single-wafer carrying tray of Patent Document 2 allows for bending when a large, thin plate-like article is placed, and the center part of the beam receiving the article is curved upward.
  • the thin plate at the time of mounting is stored in the tray in a horizontal posture.
  • the thin plate on the tray may dance up and down due to the shaking or tilting when the tray is lifted by the robot's hand, or the position of the thin plate on the tray may be shifted due to slipping.
  • Patent Document 3 In the method of Patent Document 3, the surface of the frame and the crosspiece is painted with a matte paint. However, such a matte paint is applied to the glass substrate. It is only a device for making it easy to visually inspect whether dust or dirt is attached, and is irrelevant to prevention of bending of the crosspiece. *
  • the present invention provides a tray having a structure in which a sheet-like plate (B) (for example, a thin and large-sized glass substrate) that is bent is placed flat. It is an object of the present invention to provide a tray capable of reliably suppressing bending and slipping of the placed sheet-like plate (B).
  • B sheet-like plate
  • the flat plate mounting tray of the present invention is a tray (T) for mounting a sheet-like plate body (B) that causes bending in a flat plate shape
  • the tray (T) is The rectangular outer frame (1) in plan view and a pair of frame pieces (1x), (1x) facing each other of the outer frame (1) and four or more middle rails (2)
  • the middle pier (2) is composed of two or more pairs of middle pier pairs (22) that are paired with two adjacent middle piers (2a) and (2b), and A protective sheet (3) is stretched between the two middle rails (2a) and (2b), which are constituent members of each middle rail pair (22), in the form of an endless belt. Is.
  • the flat plate mounting tray of the present invention has a pair of opposing frame pieces (a rectangular outer frame (1) and an outer frame (1) facing each other in plan view) 1x) and four or more middle rails (2) installed between (1x), and the middle rail (2) is composed of two adjacent middle rails (2a) and (2b). It is composed of two or more pairs of middle crosspiece pairs (22). In addition to these two or more pairs of middle rails (22), an isolated middle rail (2) that does not form a pair, for example, one end side or both ends of the area surrounded by the outer frame (1), or near the center. It is also allowed to be additionally provided in the case. *
  • the flat plate mounting tray of the present invention is a pair of two adjacent middle rails (2a) and (2b) in the above "place". It has a characteristic configuration in which a protective sheet (3) is stretched between two middle beams (2a) and (2b) which are constituent members of the middle beam pair (22). Yes. *
  • This characteristic configuration can imagine a “stretcher / stretcher” in plan view. That is, a pair of middle rails (22) corresponds to the left and right support bars of the stretcher, and the protective sheet (3) corresponds to a sheet stretched between the left and right support bars of the stretcher. However, in the stretcher, the sheet is not stretched in an “endless belt shape” between the two bars. *
  • plate (B) is: ⁇ Directly above each middle beam (2a), (2b) which is a member of middle beam pair (22) In addition to being supported by the middle rails (2a), (2b) via the protective sheet (3), the individual middle rails (2a), ( 2b) is also supported by the protective sheet (3).
  • the plate (B) placed on the tray (T) is placed directly or via a cushion material on the conventional “outer frame-middle rail” tray by the support mechanism described above. As compared with the case, slip of the placed plate (B) is remarkably suppressed, and stress applied to the plate (B) is dispersed, so that concentration of force is eased.
  • a protective sheet (3) is provided between the two middle rails (2a) and (2b), which are members of each pair (two pairs in FIG. 1) of the middle rail pair (22).
  • the upper part of the loop of the protective sheet (3) is deformed downward due to the weight of the plate (B) between the intermediate rails (2a) and (2b).
  • the lower part of the loop of the protective sheet (3) is reversely tensioned and below the upper part of the protective sheet (3). The deformation to is suppressed as compared with the increase in weight of the plate (B).
  • Each of the middle beam (2a), (2b) constituting the middle beam pair (22) has a hollow portion (ho). ", The bending of the intermediate rails (2a) and (2b) is suppressed, the strength thereof is increased, and the weight can be reduced (therefore, the weight of the entire tray (T) can be reduced). . *
  • each of the middle rails (2a) and (2b) constituting the middle rail pair (22) is shown as “horizontal shape” in a cross-sectional view in the width direction of the middle rail (2).
  • the shape of an ellipse or ellipse makes it possible to reduce the short diameter of the intermediate rails (2a) and (2b) and to provide a protective sheet on the intermediate rails (2a) and (2b).
  • the substantial area of the portion receiving the load of the plate (B) placed via (3) is larger than that of a circular tube, and further, the placed plate (B) and the protective plate Since the throwing-in state between the sheet (3) also becomes gentle, it becomes more preferable overall.
  • the flat placement tray of the present invention is superior to the conventional flat placement tray composed of a frame and a middle rail as follows due to its unique structure and mechanism. The effect is played. ⁇ Applicable to “sheet-like plates that cause warping”, which had been a problem in the past. Moreover, the sheet-like plate (B) in the loaded state can be reliably prevented from bending and slipping, so that the reliability is high. ⁇ In contrast to conventional products, the structural complexity of the tray should be negligible. ⁇ Because the number of middle rails can be reduced compared to conventional products, the weight of the tray can be reduced. ⁇ There is no need to provide a receiving means such as a pin to support the plate on the middle rail. ⁇ Compared to conventional products, the cost of the tray is hardly increased, and conversely, the cost can be reduced.
  • the present invention relates to a tray (T) for placing a sheet-like plate (B) that causes bending in a flat position.
  • the flat panel display such as LCD, PDP, LED, OLED, FED described in the section of “Background Art” is manufactured.
  • the base plates that are plate bodies (especially glass plates) that are usually rigid (hard), including glass plates, ceramic plates, silicon plates, plastics plates, etc. / And because of its large size (because of its large area), it can bend. *
  • the thickness is, for example, 0.8 mm or less, particularly 0.7 mm or less, and further 0.6 mm or less, and the lower limit is not particularly limited, and may be 0.2 mm or less, for example.
  • the area (square meter) includes, for example, 2 or more, 3 or more, and 4 or more. There is no particular limitation on the upper limit.
  • Speaking of the generation of glass substrates for example, it is G5 or more, and further G6 or more.
  • ⁇ Weight is determined from “specific gravity of glass (about 2.5) ⁇ area ⁇ thickness”. *
  • the above glass substrate includes a glass substrate with a functional layer having a functional layer on at least one side thereof.
  • the above-mentioned “functional layer” includes various layers including a transparent conductive film such as an ITO film, a metal thin film, an alignment film, a liquid crystal layer, a color filter, a dielectric layer, an organic semiconductor, and a metal nanoparticle layer. Is given.
  • the functional layer may be a single layer or a multilayer, and may be a continuous layer or an intermittent layer.
  • the “layer” of the “functional layer” means that a certain function is provided on the substrate. *
  • the sheet-like plate (B) that causes the bending in addition to the plate that is usually said to be rigid (hard), a metal thin plate such as stainless steel foil, various polymer films, etc.
  • a flexible material (having flexibility) capable of forming a curved surface, winding, rewinding, folding (folding) and the like can also be exemplified.
  • the material of the outer frame (1) is not particularly limited, but aluminum is preferable in consideration of strength, lightness, cost, and the like.
  • Aluminum is not only pure aluminum but also various aluminum alloys including Al—Cu, Al—Mn, Al—Si, Al—Mg, Al—Mg—Si, and Al—Zn. It is assumed that the concept also includes in this case, as the aluminum material constituting the outer frame (1), it is particularly desirable to use an aluminum material whose surface is anodized by anodization to improve wear resistance and corrosion resistance. If necessary, it is also possible to use an aluminum material in which a resin film is further formed on such an anodized surface. *
  • FIG. 1 is a plan view of FIG. 1 showing a tray (T) of Example 1 described later
  • FIG. 4 is an enlarged view around the upper left corner of FIG. 1
  • FIG. 5 is a plan view of a corner piece (4).
  • an L-shaped corner piece (4) as shown in the plan view of FIG. 5 is inserted and arranged in the corner arranged at a right angle.
  • (4h) is a through hole for caulking
  • (h) is a through hole for weight reduction.
  • the corner piece (4) is usually made of aluminum. 3.
  • the caulking operation is simultaneously performed by the caulking pressure parts of the press machine toward the four through holes (4h) of the corner piece (4) in FIG. 4.
  • the part immediately above the through hole (4h) of the frame pieces (1x) and (1y) bites into the four through holes (4h) of the corner piece (4), and the fastening of one corner is completed. . 5.
  • Such a caulking operation is also performed on the remaining three corners to complete the fastening of the four corners. *
  • the outer frame (1) is efficiently formed by the press machine, and the outer frame (4) is unavoidable when four fastenings are sequentially performed at one corner as in the case of screws.
  • the possibility of the occurrence of torsional strain 1) is eliminated.
  • the middle beam (2) is a member constructed between a pair of opposed frame pieces (1x), (1x) of the outer frame (1). Consists of more than books. These middle rails (2) are two pairs or more (for example, 2 pairs, 3 pairs, or 4 pairs) of the middle beam pairs (22) that are paired with two adjacent middle beams (2a) and (2a). Consists of. *
  • interval S1 and the interval S2 are usually set to be the same. However, there may be some differences.
  • the interval S3 is preferably narrower than the intervals S1 and S2, but there is no particular problem as long as it is about the same as the intervals S1 and S2. If the distance S3 is larger than the distances S1 and S2 beyond the allowable limit, the plate (B) is greatly bent at the distance S3, causing a problem.
  • the interval S0 Since the interval S0 is on the edge side of the placed plate (B), the interval S0 is usually narrower than the interval S3 as well as the intervals S1 and S2, but the frame piece (1y) When the left and right edge sides of the plate body (B) are supported by a part of the plate or by a guide (5) provided so as to protrude from the frame piece (1y), the interval S0 can be set to the same level as the interval S3. . In any case, while taking into account the flexibility of the plate (B), force is applied to all the middle rails (2) as evenly as possible, and the plate (B) exceeds the allowable limit at both ends. Care should be taken not to cause bending or jumping. *
  • an isolated middle beam (2) that does not participate in the middle beam pair (22) is additionally arranged, for example, toward the end of the region surrounded by the outer frame (1) on the edge side of the plate (B). There is no problem. This is because such an isolated middle rail (2) may be useful for preventing dripping (bending) of the edge of the plate (B) depending on the size of the plate (B). 2. Further, an isolated middle beam (2) that is not involved in the middle beam pair (22) is additionally arranged, for example, at an intermediate position between the left middle beam pair (22) and the right middle beam pair (22). You can do it.
  • the material of the middle rail (2) is preferably aluminum (including aluminum alloy) in consideration of strength and light weight as in the outer frame (1). Unlike the outer frame (1), the middle rail (2) is usually used as it is because it does not have to consider the metal touch when the trays are stacked in multiple stages. However, it is possible to use alumite or a resin film. *
  • Each middle beam (2a), (2b) constituting the middle beam pair (22) may be solid, but has a tube structure having a hollow portion (ho). Is particularly preferred. This is because the tube structure is advantageous in terms of weight reduction and bending strength, and is often advantageous in terms of cost. *
  • the cross-sectional shape in the width direction of the middle rails (2a) and (2b) can be various shapes, but as shown in FIGS. It is particularly preferable to have a horizontally long cross-sectional shape having a hollow portion (ho).
  • 7A is an example of a horizontally long rectangle with rounded corners
  • FIG. 7B is a horizontally long oval
  • FIG. 7C shows an example of a horizontally long ellipse
  • FIG. 7D shows a horizontally long example of multiple eyes.
  • FIGS. 7E to 7F show other examples having a horizontally long cross-sectional shape.
  • FIGS. 7G to 7H show other examples having a cross-sectional shape that is not horizontally long.
  • FIG. 7G is an example of a circle
  • FIG. 7H is a square with rounded corners. It is an example.
  • the plate (B) can be protected by being interposed between the intermediate rail (2) and the plate (B).
  • various materials such as films, sheets, foamed sheets, woven fabrics, nonwoven fabrics made of long fibers, knitted fabrics, and laminates thereof are used.
  • the protective sheet (3) preferably has cushioning properties, a foam sheet or a multilayer sheet including a foam sheet is a typical example of a preferable one.
  • the protective sheet (3) is used in an endless belt shape (loop shape), the innermost layer is preferably a heat sealable layer.
  • the endless belt shape (loop shape) can also be achieved by means such as an adhesive, an adhesive tape, ultrasonic bonding, high frequency bonding, and stitching. *
  • a particularly preferable protective sheet (3) is a high-density grade ethylene polymer obtained by polymerization using a metallocene catalyst (more specifically, by polymerization using a metallocene catalyst).
  • a metallocene catalyst more specifically, by polymerization using a metallocene catalyst.
  • It is a multilayer sheet comprising a film layer (3 m) or including the film layer (3 m).
  • Typical examples of the other layer of the film layer (3 m) in the case of multiple layers are an ethylene polymer foam sheet (3n) and a heat seal layer (3 s) with high heat seal strength (in one example, a high-density polyethylene layer) ).
  • Typical examples of the layer structure at that time are: (3m) / (3n) / (3s), (3m) / (3n) / (3m) / (3s), (3m) / (3n), (3m) / (3n) / (3m). *
  • the foamed polypropylene sheet is an example of a particularly preferable example of the protective sheet (3) because it has both cushioning properties and strong heat sealing properties.
  • the protective sheet (3) is stretched over an endless belt as shown in FIGS.
  • the protection sheet (3) is handed over by, for example, a method of extrapolating the tube-shaped protection sheet (3) to the middle beam pair (22) (middle beam (2a), (2b)), A method of removing the excess portion by wrapping the pair (22) (middle beam (2a), (2b)) with a protective sheet (3) and then heat-sealing or fusing, the middle beam pair (22) (
  • the protective sheets (3) and (3) are disposed on the upper and lower sides of the middle rails (2a) and (2b), respectively, and then the excess portion is removed by fusing or the like.
  • FIG. 1 is a plan view showing an example of a flat placing tray (T) of a plate body of the present invention, each of two pairs of middle rails (22) and (22). Has a protective sheet (3) stretched around an endless belt.
  • FIG. 2 is an enlarged view of the AA cross section of FIG.
  • FIG. 3 is a cross-sectional view showing an example of the middle rail (2).
  • FIG. 4 is an enlarged view around the upper left corner of FIG.
  • FIG. 5 is a plan view of the corner piece (4).
  • FIG. 6 is an explanatory view schematically showing the BB cross section of FIG.
  • FIG. 7 is a cross-sectional view in the width direction showing various examples of the intermediate beam (2) having a pipe structure. *
  • the outer frame (1) is composed of a pair of opposing frame pieces (1x), (1x) on its long side and a pair of opposing frame pieces on its short side ( 1y) and (1y), and has a rectangular skeleton as a whole.
  • the outer frame (1) is assembled by the method described in the section of (Outer frame (1)) in [Configuration of tray (T)] described above. *
  • the middle rail (2) is constructed between a pair of opposing frame pieces (1x) and (1x) on the long side of the outer frame (1).
  • the middle crosspiece (2) is fixed to the frame piece (1x) by screwing.
  • the middle rail (2) is a main member for supporting the plate body (B) (in this embodiment, a glass substrate with a functional layer (color filter layer)). *
  • Outer frame (1) Frame pieces (1x), (1x) constituting the long side of the outer frame (1) and frame pieces (1y) constituting the short side of the outer frame (1) ), (1y), as shown in FIG. 2, has a cross-sectional shape having a quadrangular hollow portion (a cross-sectional shape that makes an image of an angular “ ⁇ ”).
  • the left protruding portion in the upper left part of FIG. 2 serves as a grip portion by the robot when the tray (T) is lifted or lowered.
  • FIG. 2 also shows a guide (5) which is a part for supporting the edge of the plate (B) at a predetermined position.
  • This guide (5) has a total of three intermediate pieces, one end portion and the other end portion of each frame piece (1y) and (1y) constituting the short side of the outer frame (1). It is provided in the place. Further, the guide (5) is slightly different in shape, but as shown in FIG. 1, each frame piece (1x), (1x) constituting the long side of the outer frame (1) is also drawn. ) Is provided at a total of two locations, one end and the other end. *
  • Example 1 The guide (5) in Example 1 is produced by mechanically cutting a block-shaped molded body obtained by compression molding using ultra-high molecular weight polyethylene powder. It has outstanding properties such as wear resistance, fatigue resistance, self-lubrication, chemical resistance, corrosion resistance, impact resistance, strength, etc., and is shown by a two-dot chain line in FIG. It is optimal as a member for supporting the plate body (B) (glass substrate with a functional layer). *
  • the guide (5) in FIG. 2 provided on the frame pieces (1y) and (1y) is slightly so that both of the two types of substrates (plate bodies (B)) having slightly different dimensions can be handled. It is structured longer. In the first embodiment, both a substrate having a width of 1850 mm ⁇ a height of 1500 mm and a substrate having a width of 1800 mm ⁇ a height of 1500 mm (plate body (B)) can be placed. *
  • FIG. 2 (6) in FIG. 2 is a washer built-in screw, which is used for fixing the above ultra high molecular weight polyethylene guide (5) to the outer frame (1).
  • FIG. 4 showing an enlarged view of the corner part of FIG. 1, the frame piece (1) constituting the short side ( The end of 1y) and the end of the frame piece (1x) of the outer frame (1) constituting the long side are both butted in a state of being cut at 45 °.
  • the crimping operation of this butting is performed all at once by the press machine toward the four through holes (4h) of the corner piece (4) shown by broken lines in FIG.
  • FIG. 5 is a plan view of the L-shaped corner piece (4) of FIG. *
  • a pair of middle beams (22) in the tray (T) in FIG. 1 is composed of two middle beams (2a), (2b).
  • Each of the intermediate rails (2a) and (2b) has a horizontally long cross-sectional tube structure having a hollow portion (ho), the horizontal width is 32 mm, the vertical width is 6.5 mm, and the wall thickness is 1.5 mm. It is.
  • Two such intermediate beam pairs (22) are installed between the frame pieces (1x) and (1x) of the outer frame (1) constituting the long side.
  • the crosspieces (2a) and (2b) those having the four types of cross-sectional shapes shown in FIGS. 7 (A) to (D) are used. Are being tested. *
  • FIG. 1 a protective sheet (3) is stretched around each of the two middle beam pairs (22) and (22) in the form of an endless belt. B) is placed flat. The state is as shown in FIG. 6 in the BB cross section of FIG. *
  • a glass substrate with a functional layer (color filter layer) is used as the plate (B), and the tray (T) on which the plate (B) is placed is stacked on a pallet by 150 stages, and then a transparent plastic Wrapping the whole with film, transport and store in the factory, truck transport test to other factories, unloading in other factories and transport in the factory, unpacking and upper side
  • the tray (T) was taken out from the tray one by one, but no abnormality was found.
  • the flat plate mounting tray according to the present invention has a sheet-like plate body (B) that generates bending (for example, a thin and large glass substrate, or a functional layer provided on at least one surface of such a glass substrate).
  • the glass substrate with a functional layer can be suitably used as a tray (T) for placing it flat.
  • FIG. 2 is an enlarged view of a section AA in FIG. 1. It is sectional drawing which showed an example of the middle crosspiece (2).
  • FIG. 2 is an enlarged view around the upper left corner portion of FIG. 1. It is a top view of a corner piece (4).
  • FIG. 2 is an explanatory view schematically showing a BB cross section of FIG. 1. It is sectional drawing of the width direction which showed the various examples of the middle crosspiece (2) which has a pipe structure.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

[Problem] To provide a tray having a construction for placing a bendable sheet-shaped plate (B) (such as a thin, large glass substrate (particularly a glass substrate having a functional layer)) in a flat manner, wherein the tray makes it possible to reliably prevent the placed sheet-shaped plate (B) from bending or slipping. [Solution] A tray (T) for placing a bendable sheet-shaped plate (B) in a flat manner without bending, said tray (T) being characterized in that the tray (T) comprises: an outer frame (1) which is rectangular in plan view; and at least four middle bars (2) provided between a pair of mutually-facing frame parts (1x, 1x) of the outer frame (1), the middle bars (2) comprise at least two middle bar pairs (22) each constituted by two middle bars (2a, 2b) adjacent to each other, and a protection sheet (3) is arranged in the form of an endless belt between each two middle bars (2a, 2b) which are constituent members of the middle bar pairs (22).

Description

板体の平置き載置用トレイFlat plate mounting tray
本発明は、撓みを生ずるシート状の板体（Ｂ）（たとえば、薄くかつ大サイズのガラス基板や、そのようなガラス基板の少なくとも片面に機能層を設けた機能層付きガラス基板）を平置き状に載置するためのトレイ（Ｔ）に関するものである。 The present invention lays flat a sheet-like plate (B) (for example, a thin and large glass substrate, or a glass substrate with a functional layer provided with a functional layer on at least one side of such a glass substrate). It is related with the tray (T) for mounting in a shape.
［薄くかつ大サイズの基板用ガラス板］　ＬＣＤ（Ｌｉｑｕｉｄ　Ｃｒｙｓｔａｌ　Ｄｉｓｐｌａｙ）、ＰＤＰ（Ｐｌａｓｍａ　Ｄｉｓｐｌａｙ　Ｐａｎｅｌ）、ＬＥＤ（Ｌｉｇｈｔ　Ｅｍｉｔｔｉｎｇ　Ｄｉｏｄｅ）、ＯＬＥＤ（Ｏｒｇａｎｉｃ　ＬＥＤ）、ＦＥＤ（Ｆｉｅｌｄ　Ｅｍｉｓｓｉｏｎ　Ｄｉｓｐｌａｙ）、ＳＥＤ（Ｓｕｒｆａｃｅ－ｃｏｎｄｕｃｔｉｏｎ　Ｅｌｅｃｔｒｏｎ－ｅｍｉｔｔｅｒ　Ｄｉｓｐｌａｙ）などのフラットパネル・ディスプレイ（ＦＰＤ（Ｆｌａｔ　Ｐａｎｅｌ　Ｄｉｓｐｌａｙ））に用いられるガラス板（素ガラス板または素板ガラス）は、現在では、その厚みはたとえば０．７ｍｍまたはそれ以下というように薄く、そのサイズはたとえば１５００ｍｍ×１８５０ｍｍ（Ｇ６サイズ）、１８７０ｍｍ×２２００ｍｍ（Ｇ７サイズ）、さらには２８５０ｍｍ×３０５０ｍｍ（Ｇ１０サイズ）というように大型化している。ただし、Ｇ（世代／ｇｅｎｅｒａｔｉｏｎ）はおおよその目安であり、同じＧでも厚みやサイズは実際には種々のバリエーションがある。　 [Thin and large-sized glass plate for substrates] LCD (Liquid Crystal Display), PDP (Plasma Display Panel), LED (Light Emitting Diode), OLED (Organic LED), FED (Field Seismic ED). At present, the thickness of a glass plate (raw glass plate or base plate glass) used in a flat panel display (FPD (Flat Panel Display)) such as Electron-emitter Display is 0.7 mm or less, for example. Thin, for example, 1500mm x 1850mm (G6 size), 1870m × 2200mm (G7 size), and is large in size and so on 2850mm × 3050mm (G10 size). However, G (generation / generation) is an approximate guide, and even with the same G, there are actually various variations in thickness and size. *
ガラスの比重は２．５程度であるので、厚みが０．７ｍｍの場合の１枚当りの重量は、Ｇ６サイズで４．５ｋｇ程度、Ｇ７サイズで７ｋｇ程度、Ｇ１０サイズでは１５ｋｇ程度にもなる。そして、ガラス基板の厚みは、用途によってはさらに薄くなる傾向があり、現在においては厚みが０．５ｍｍとか０．４ｍｍとか０．３ｍｍのものも要求されるようになってきている。　 Since the specific gravity of glass is about 2.5, the weight per sheet when the thickness is 0.7 mm is about 4.5 kg for the G6 size, about 7 kg for the G7 size, and about 15 kg for the G10 size. And the thickness of the glass substrate tends to be thinner depending on the application, and at present, the thickness of 0.5 mm, 0.4 mm, or 0.3 mm has been required. *
そして、ガラス基板の薄層化や大サイズ化が進むと、そのガラス基板を保管、搬送または輸送するための容器（容器のほか、箱、カセット、コンテナなどとも称される）についても、従来の容器では対応できないことが多くなってきている。　 As glass substrates become thinner and larger, containers for storing, transporting, or transporting glass substrates (also called containers, boxes, cassettes, containers, etc.) There are many things that cannot be handled by containers. *
［複数枚のガラス基板を載せたトレイを積み重ねる方式１］－１－　ガラス基板の薄層化や大サイズ化に対処するために、１つのトレイに数枚ないし数１０枚のガラス基板を積み重ねた状態で収容したものを、さらに多段に積み重ねる方式が知られている。このときには、トレイと最下層のガラス基板との間に保護用シートを介在させると共に、それぞれのガラス基板間にも保護用シートを介在させることが多い。　 [Method 1 for stacking trays with a plurality of glass substrates 1] -1-- In order to cope with the thinning and large size of glass substrates, several to several tens of glass substrates were stacked on one tray. There is known a method of stacking what is housed in a state in multiple stages. At this time, a protective sheet is often interposed between the tray and the lowermost glass substrate, and a protective sheet is often interposed between the glass substrates. *
－２－　しかしながら、ガラス基板の薄層化や大サイズ化がさらに進んでガラス基板が撓むようになると、上記の方式１では対処しえなくなる。　 -2- However, when the glass substrate is further thinned and enlarged and the glass substrate is bent, the above method 1 cannot deal with it. *
［１枚のガラス基板を載せたトレイを積み重ねる方式２］－１－　この問題に対処するためには、１つのトレイに１枚のガラス基板を収容したものを１ユニットとし、さらにそのユニットを多段に積み重ねる方式２を採用することが必要となる。　 [Method 2 for stacking trays with a single glass substrate 2] -1-- To deal with this problem, a single tray containing a single glass substrate is treated as one unit, and the units are further arranged in multiple stages. It is necessary to adopt the method 2 of stacking. *
－２－　この場合、ガラス基板の薄層化や大サイズ化が進むと、そのガラス基板をトレイの外枠（周枠）の部分のみにて支承することは困難になるので、トレイの外枠に格子状の桟（１方向に平行な桟または縦横方向の桟）を架設し、その桟（または桟と外枠との双方）にてガラス基板を支承することが必要となることが多い。そのような「外枠－桟」方式にかかるものとして、たとえば次のような提案がなされている。　 -2- In this case, as the glass substrate becomes thinner or larger, it becomes difficult to support the glass substrate only at the outer frame (circumferential frame) portion of the tray. It is often necessary to construct a grid-like crosspiece (a crosspiece parallel to one direction or a crosspiece in the vertical and horizontal directions) and to support the glass substrate on the crosspiece (or both the crosspiece and the outer frame). For example, the following proposals have been made for such an “outer frame-crossing” system. *
（特許文献１）　本出願人の出願にかかる特開平１０－２８７３８２号公報（特許文献１）には、矩形骨格を形作る周枠（外枠のこと）とその周枠間に架設された桟とからなる基本構造を有する格子状のトレイが示されている。周枠には、トレイの積み重ねを可能にする入り組み係合構造が設けられている。ガラス基板などの基板は、周枠と桟との双方に突設された樹脂ピン上に水平状態で載置される。　 (Patent Document 1) Japanese Patent Application Laid-Open No. 10-287382 (Patent Document 1) relating to the application of the present applicant describes a peripheral frame (referred to as an outer frame) forming a rectangular skeleton, and a bridge constructed between the peripheral frames. A grid-like tray having a basic structure is shown. The peripheral frame is provided with an interlaced engagement structure that enables stacking of trays. A substrate such as a glass substrate is placed in a horizontal state on resin pins protruding from both the peripheral frame and the crosspiece. *
（特許文献２）　特開２００７－２００９５９号公報（特許文献２）には、外枠間に桟（その図１には８本が示されている）を掛け渡すことによってワーク載置部を形成する枚葉搬送用トレイにおいて、載置時のワークの撓み量を考慮して、その桟の中央部を上に凸に湾曲させた構造が示されている。桟はワークが載置されることにより、撓んでほぼ水平となる。なお「ワーク」とは、大型で薄板状の物品のことである。　 (Patent Document 2) In Japanese Patent Application Laid-Open No. 2007-200959 (Patent Document 2), a workpiece mounting portion is formed by spanning a bar (eight are shown in FIG. 1) between outer frames. In the single wafer transfer tray, the structure in which the central portion of the crosspiece is curved upward is taken into consideration in consideration of the amount of bending of the workpiece during placement. The crosspiece is bent and becomes almost horizontal when the work is placed. The “work” is a large and thin article. *
（特許文献３）　特開２０１０－１２０６９２号公報（特許文献３）には、アルミニウム枠が取り付けられたフレーム枠の対向する２辺の枠間に桟材が設けられた検査用搬送トレイにおいて、そのフレーム枠および桟材の表面が無光沢塗料によって塗装されている検査用搬送トレイが示されている（請求項１）。桟材の表面には、合成樹脂よりなる鋲状の樹脂パッドが複数個嵌着され、その樹脂パッドの表面が無光沢塗料によって塗装されていてもよいとある（請求項８）。トレイを多段に積み重ねることについても記載がある（段落００４３）。なお、検査用搬送トレイとは、ガラス基板にゴミや汚れが付着しているか否かを目視により検査するために、移送、運搬するためのトレイのことである。　 (Patent Document 3) Japanese Patent Application Laid-Open No. 2010-120692 (Patent Document 3) describes an inspection transport tray in which a crosspiece is provided between two opposing frames of an aluminum frame. An inspection transport tray in which the surfaces of the frame and the crosspiece are coated with a matte paint is shown (claim 1). A plurality of bowl-shaped resin pads made of synthetic resin may be fitted on the surface of the crosspiece, and the surface of the resin pads may be painted with a matte paint (claim 8). There is also a description of stacking trays in multiple stages (paragraph 0043). The inspection transport tray is a tray for transporting and transporting in order to visually inspect whether dust or dirt is attached to the glass substrate. *
特開平１０－２８７３８２号公報Japanese Patent Laid-Open No. 10-287382 特開２００７－２００９５９号公報JP 2007-200959 A 特開２０１０－１２０６９２号公報JP 2010-120682 A
（特許文献１）　特許文献１の方式は、周枠と桟との双方に突設された樹脂ピン上に水平状態で載置するものであるので、撓みを生ずるような大型ないし薄型のガラス基板には適用できないという限界がある。　 (Patent Document 1) Since the method of Patent Document 1 is placed in a horizontal state on a resin pin protruding from both a peripheral frame and a crosspiece, it is a large or thin glass substrate that causes bending. There is a limit that cannot be applied. *
（特許文献２）－１－　特許文献２の枚葉搬送用トレイは、大型で薄板状の物品を載置時の撓みを見込んで、該物品を受ける桟の中央部を上に凸に湾曲させたものであり、そのような機構を採用することにより載置時の薄板は水平姿勢でトレイに収容されるとしている。ただし、そのような工夫のみでは、トレイをロボットのハンドで持ち上げたときの揺れや傾きにより、トレイ上の薄板が上下に踊ったり、滑りによりトレイ上の薄板の位置がずれたりするおそれがある。　 (Patent Document 2) -1-- The single-wafer carrying tray of Patent Document 2 allows for bending when a large, thin plate-like article is placed, and the center part of the beam receiving the article is curved upward. By adopting such a mechanism, the thin plate at the time of mounting is stored in the tray in a horizontal posture. However, with only such a device, there is a possibility that the thin plate on the tray may dance up and down due to the shaking or tilting when the tray is lifted by the robot's hand, or the position of the thin plate on the tray may be shifted due to slipping. *
－２－　なお、特許文献２においては、桟（その段落００２５によれば金属製または樹脂製）の中央部を上に凸に湾曲させ、その上に薄板を載せたときには桟が撓んで水平になるとしているが（その段落００３４を参照）、外枠の相対向する辺間の距離は一定であるので、桟が水平姿勢になりうるためには何らかの工夫がなければならない。さもないと、湾曲した桟の円弧の長さと、その円弧の両端を結ぶ弦の長さとが同じになってしまうからである。上に凸に湾曲した桟の上に薄板を載せたときには、円弧状に湾曲した桟の両端側を除く部分がフラット面になるように変形すると考えられるところ、そのときにはフラット面は当初の円弧の中央の位置よりも低い位置になるため、その変形の分を吸収すべく当初の円弧の両端側の傾斜が大きくなるように変形するようになる。しかしながら、そのような状態は不安定状態であり、移送や輸送にあたっての揺れや振動によって上記のフラット面が振動したり傾いたりしやすくなるため、その上に載置されている薄板もその振動や傾きの影響を受けることになる。　 -2- In addition, in Patent Document 2, when the center part of the crosspiece (made of metal or resin according to paragraph 0025) is curved upward and a thin plate is placed on the crosspiece, the crosspiece bends horizontally. However, since the distance between the opposite sides of the outer frame is constant, some measure must be taken in order for the crosspiece to be in a horizontal posture. Otherwise, the length of the arc of the curved beam and the length of the string connecting both ends of the arc will be the same. When a thin plate is placed on a convexly curved beam, it is considered that the portion excluding both ends of the circularly curved beam will be deformed so that it becomes a flat surface. Since the position is lower than the center position, the original arc is deformed so that the inclinations on both ends are increased in order to absorb the deformation. However, such a state is an unstable state, and the flat surface is likely to vibrate or tilt due to shaking or vibration during transportation or transportation. It will be affected by the tilt. *
（特許文献３）　特許文献３の方式においては、フレーム枠および桟材の表面が無光沢塗料によって塗装されているという工夫を講じているが、そのような無光沢塗料による塗装は、ガラス基板にゴミや汚れが付着しているか否かを目視により検査しやすくするための工夫にとどまり、桟材の撓みの防止とは無関係である。　 (Patent Document 3) In the method of Patent Document 3, the surface of the frame and the crosspiece is painted with a matte paint. However, such a matte paint is applied to the glass substrate. It is only a device for making it easy to visually inspect whether dust or dirt is attached, and is irrelevant to prevention of bending of the crosspiece. *
（発明の目的）　本発明は、このような背景下において、撓みを生ずるシート状の板体（Ｂ）（たとえば薄くかつ大サイズのガラス基板）を平置き状に載置する構造のトレイにおいて、載置したシート状の板体（Ｂ）の撓みや滑りを確実に抑制することができるトレイを提供することを目的とするものである。 (Object of the Invention) Under such a background, the present invention provides a tray having a structure in which a sheet-like plate (B) (for example, a thin and large-sized glass substrate) that is bent is placed flat. It is an object of the present invention to provide a tray capable of reliably suppressing bending and slipping of the placed sheet-like plate (B).
本発明の板体の平置き載置用トレイは、　撓みを生ずるシート状の板体（Ｂ）を平置き状に載置するためのトレイ（Ｔ）であって、　前記のトレイ（Ｔ）は、平面視で矩形の外枠（１）と、その外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）間に架設する４本以上の中桟（２）とで構成されていること、　前記の中桟（２）は、隣接する２本の中桟（２ａ），（２ｂ）で１対となる中桟対（２２）の２対以上からなること、  そして、それぞれの中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間には、保護用シート（３）をエンドレスベルト状に掛け渡してあること、を特徴とするものである。 The flat plate mounting tray of the present invention is a tray (T) for mounting a sheet-like plate body (B) that causes bending in a flat plate shape, and the tray (T) is The rectangular outer frame (1) in plan view and a pair of frame pieces (1x), (1x) facing each other of the outer frame (1) and four or more middle rails (2) The middle pier (2) is composed of two or more pairs of middle pier pairs (22) that are paired with two adjacent middle piers (2a) and (2b), and A protective sheet (3) is stretched between the two middle rails (2a) and (2b), which are constituent members of each middle rail pair (22), in the form of an endless belt. Is.
－１－（場にかかる要件）　本発明の板体の平置き載置用トレイは、平面視で矩形の外枠（１）とその外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）間に架設する４本以上の中桟（２）とで構成されると共に、その中桟（２）は、隣接する２本の中桟（２ａ），（２ｂ）で１対となる中桟対（２２）の２対以上で構成される。なお、これらの２対以上の中桟対（２２）のほかに、対にならない孤立した中桟（２）をたとえば外枠（１）で囲まれる領域の片端側や両端側、あるいは中央部付近に付加的に配設することも許容される。　 -1-- (Requirements for the Field) The flat plate mounting tray of the present invention has a pair of opposing frame pieces (a rectangular outer frame (1) and an outer frame (1) facing each other in plan view) 1x) and four or more middle rails (2) installed between (1x), and the middle rail (2) is composed of two adjacent middle rails (2a) and (2b). It is composed of two or more pairs of middle crosspiece pairs (22). In addition to these two or more pairs of middle rails (22), an isolated middle rail (2) that does not form a pair, for example, one end side or both ends of the area surrounded by the outer frame (1), or near the center. It is also allowed to be additionally provided in the case. *
－２－（特徴的構成要件）　そして、本発明の板体の平置き載置用トレイは、上記の「場」において、隣接する２本の中桟（２ａ），（２ｂ）で１対となる中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間に、保護用シート（３）をエンドレスベルト状に掛け渡してあるという特徴的構成を有している。　 -2- (Characteristic configuration requirements) And, the flat plate mounting tray of the present invention is a pair of two adjacent middle rails (2a) and (2b) in the above "place". It has a characteristic configuration in which a protective sheet (3) is stretched between two middle beams (2a) and (2b) which are constituent members of the middle beam pair (22). Yes. *
この特徴的構成は、平面視では「担架／ストレッチャー」をイメージすることができる。すなわち、１対の中桟対（２２）が担架の左右の支持棒に対応し、保護用シート（３）がその担架の左右の支持棒の間に張設したシートに対応する。ただし、担架においてはシートは２本の棒の間に「エンドレスベルト状」に張設されているわけではない。　 This characteristic configuration can imagine a “stretcher / stretcher” in plan view. That is, a pair of middle rails (22) corresponds to the left and right support bars of the stretcher, and the protective sheet (3) corresponds to a sheet stretched between the left and right support bars of the stretcher. However, in the stretcher, the sheet is not stretched in an “endless belt shape” between the two bars. *
そして、本発明の板体の平置き載置用トレイにあっては、そのような「保護用シート（３）をエンドレスベルト状に掛け渡した中桟対（２２）」が、「２対以上」あるわけである。　 And in the flat placing tray of the plate body of the present invention, there are “two or more pairs of middle rail pairs (22) in which the protective sheet (3) is stretched in an endless belt shape”. That ’s why. *
－３－（板体（Ｂ）の載置）　本発明の平置き載置用トレイを使用するにあたっては、上記の「２対以上」の「保護用シート（３）をエンドレスベルト状に掛け渡した中桟対（２２）」上に、撓みを生ずるシート状の板体（Ｂ）が平置き状に載置される。（図１、６を参照）　 -3- (Plate (B) placement) When using the flat placement tray of the present invention, the above-mentioned "two or more pairs" of the "protection sheets (3) are stretched in an endless belt form" The sheet-like plate body (B) that causes the bending is placed on the middle pair (22) "in a flat place. (See Figures 1 and 6)
－４－（板体（Ｂ）の支持機構と作用）　このときには、板体（Ｂ）は、　・中桟対（２２）の構成メンバーである個々の中桟（２ａ），（２ｂ）の直上においては、それらの中桟（２ａ），（２ｂ）に保護用シート（３）を介して支承されるのみならず、　・中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）間の部位においても、保護用シート（３）によって支承される。　 -4- (Supporting mechanism and action of plate (B)) At this time, plate (B) is: ・ Directly above each middle beam (2a), (2b) which is a member of middle beam pair (22) In addition to being supported by the middle rails (2a), (2b) via the protective sheet (3), the individual middle rails (2a), ( 2b) is also supported by the protective sheet (3). *
上に述べた支承機構により、トレイ（Ｔ）上に載置される板体（Ｂ）は、従来の「外枠－中桟」からなるトレイ上に直接またはクッション材を介して載置される場合に比し、載置された板体（Ｂ）の滑りが格段に抑制される上、板体（Ｂ）に加わる応力が分散するので力の集中が緩和される。　 The plate (B) placed on the tray (T) is placed directly or via a cushion material on the conventional “outer frame-middle rail” tray by the support mechanism described above. As compared with the case, slip of the placed plate (B) is remarkably suppressed, and stress applied to the plate (B) is dispersed, so that concentration of force is eased. *
そして、各対（図１においては２対）の中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間には保護用シート（３）をエンドレスベルト状（つまりループ状）に掛け渡してあるので、中桟（２ａ），（２ｂ）「間」において板体（Ｂ）の重量により保護用シート（３）のループの上側の部分に下方への変形を生じても、エンドレスベルト（ループ）の周長は変わらないことから、その保護用シート（３）のループの下側の部分は逆に緊張し、保護用シート（３）の上側の部分の下方への変形は板体（Ｂ）の重量増に比しては（重量増の割には）抑制される。　 A protective sheet (3) is provided between the two middle rails (2a) and (2b), which are members of each pair (two pairs in FIG. 1) of the middle rail pair (22). In other words, since it is looped over, the upper part of the loop of the protective sheet (3) is deformed downward due to the weight of the plate (B) between the intermediate rails (2a) and (2b). Even if it occurs, since the circumference of the endless belt (loop) does not change, the lower part of the loop of the protective sheet (3) is reversely tensioned and below the upper part of the protective sheet (3). The deformation to is suppressed as compared with the increase in weight of the plate (B). *
しかも、保護用シート（３）のループの上側の部分の「変形曲線」はなだらかになるので、その変形の度合いの影響を受ける板体（Ｂ）の撓み
もなだらかになる（つまり、板体（Ｂ）に加わる歪みが抑制される）。繰り返しの使用により、たとえエンドレスベルト状に掛け渡した保護用シート（３）の周長が若干伸びたとしても、保護用シート（３）のループの上側の部分の撓みは抑制される。もし、保護用シート（３）の周長の伸びが限界を越したときには、中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間の間隔を、やや広がる方向に調整するだけで対処できる。　 In addition, since the “deformation curve” of the upper part of the loop of the protective sheet (3) becomes gentle, the bending of the plate (B) affected by the degree of deformation also becomes gentle (that is, the plate ( The strain applied to B) is suppressed). By repeated use, even if the circumferential length of the protective sheet (3) stretched in an endless belt shape is slightly extended, bending of the upper portion of the loop of the protective sheet (3) is suppressed. If the elongation of the circumference of the protective sheet (3) exceeds the limit, the interval between the two middle rails (2a) and (2b), which are members of the middle rail pair (22), is slightly widened. It can be handled simply by adjusting the direction.
－５－（中桟（２ａ），（２ｂ）の管構造）　上記の中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）を中空部（ｈｏ）を有する「管構造」としたときには、それらの中桟（２ａ），（２ｂ）の撓みが抑制されると共に、その強度も大きくなり、かつ軽量化も達成できる（従ってトレイ（Ｔ）全体の軽量化も図られる）。　 -5- (Tube structure of the middle beam (2a), (2b)) Each of the middle beam (2a), (2b) constituting the middle beam pair (22) has a hollow portion (ho). ", The bending of the intermediate rails (2a) and (2b) is suppressed, the strength thereof is increased, and the weight can be reduced (therefore, the weight of the entire tray (T) can be reduced). . *
そして、上記の中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）の中空部（ｈｏ）を、その中桟（２）の幅方向の断面視で「横長の形状」（殊に長円や楕円のような形状）にすると、中桟（２ａ），（２ｂ）の短径を小さくすることができる上、その中桟（２ａ），（２ｂ）上に保護用シート（３）を介して載置する板体（Ｂ）の荷重を受ける部位の実質面積が円形の管の場合に比し広がることになり、さらには載置された板体（Ｂ）と保護用シート（３）との間のつきまわり状態もなだらかになるので、総合的に見て一段と好ましいものとなる。　 Then, the hollow portion (ho) of each of the middle rails (2a) and (2b) constituting the middle rail pair (22) is shown as “horizontal shape” in a cross-sectional view in the width direction of the middle rail (2). (In particular, the shape of an ellipse or ellipse) makes it possible to reduce the short diameter of the intermediate rails (2a) and (2b) and to provide a protective sheet on the intermediate rails (2a) and (2b). (3) The substantial area of the portion receiving the load of the plate (B) placed via (3) is larger than that of a circular tube, and further, the placed plate (B) and the protective plate Since the throwing-in state between the sheet (3) also becomes gentle, it becomes more preferable overall. *
－６－（効果）　本発明の平置き載置用トレイは、枠体と中桟とからなる従来の平置き載置用トレイに比し、その独特の構造および機構により、次のようなすぐれた効果が奏される。　・従来においては対処に窮していた「撓みを生ずるシート状の板体」に対しても適用できること。　・しかも、その載置状態におけるシート状の板体（Ｂ）の撓みや滑りを確実に抑制することができるので、信頼性が高いこと。　・従来品との対比において、トレイの構造上の複雑さをほとんど招かないこと。　・従来品に比し中桟の本数を減ずることができるので、トレイの軽量化も可能となること。　・中桟に板体を支承するピン等の受け手段を設けなくてもよいこと。　・従来品に比し、トレイのコストの上昇をほとんど招かないばかりか、逆にコストの低減も可能であること。 -6- (Effects) The flat placement tray of the present invention is superior to the conventional flat placement tray composed of a frame and a middle rail as follows due to its unique structure and mechanism. The effect is played.・ Applicable to “sheet-like plates that cause warping”, which had been a problem in the past. Moreover, the sheet-like plate (B) in the loaded state can be reliably prevented from bending and slipping, so that the reliability is high.・ In contrast to conventional products, the structural complexity of the tray should be negligible.・ Because the number of middle rails can be reduced compared to conventional products, the weight of the tray can be reduced.・ There is no need to provide a receiving means such as a pin to support the plate on the middle rail. · Compared to conventional products, the cost of the tray is hardly increased, and conversely, the cost can be reduced.
以下、本発明を詳細に説明する。　 Hereinafter, the present invention will be described in detail. *
［板体(B) ］－１－　本発明は、撓みを生ずるシート状の板体（Ｂ）を平置き状に載置するためのトレイ（Ｔ）にかかるものである。ここで、撓みを生ずるシート状の板体（Ｂ）の代表例としては、［背景技術］の箇所で述べたＬＣＤ、ＰＤＰ、ＬＥＤ、ＯＬＥＤ、ＦＥＤなどのフラットパネル・ディスプレイ（ＦＰＤ）の製造のためのガラス板、セラミックス板、シリコン板、プラスチックス板をはじめとする通常はリジッド（硬質）であるとされている板体（特にガラス板）である素板のうち、厚みが薄いためにまたは／およびサイズが大きいために（面積が広いために）、撓みを生ずるものがあげられる。　 [Plate (B)] -1- The present invention relates to a tray (T) for placing a sheet-like plate (B) that causes bending in a flat position. Here, as a representative example of the sheet-like plate (B) that causes the bending, the flat panel display (FPD) such as LCD, PDP, LED, OLED, FED described in the section of “Background Art” is manufactured. Among the base plates that are plate bodies (especially glass plates) that are usually rigid (hard), including glass plates, ceramic plates, silicon plates, plastics plates, etc. / And because of its large size (because of its large area), it can bend. *
－２－　板体がガラス基板であるときの厚み、サイズ、重量の例は、次の如くである。　・厚みについては、たとえば０．８ｍｍ以下、殊に０．７ｍｍ以下、さらには０．６ｍｍ以下のもので、下限については特に限定はなく、たとえば０．２ｍｍとかそれよりも薄くても差し支えない。・   サイズについては、面積（平方メートル）で、たとえば２以上、 ３以上、さらには４以上のものがあげられる。上限については特に限定はない。ガラス基板の世代で言えば、たとえばＧ５以上、さらにはＧ６以上である。　・重量は、「ガラスの比重（２．５程度）×面積×厚み」から求められる。　 -2- Examples of thickness, size, and weight when the plate is a glass substrate are as follows. The thickness is, for example, 0.8 mm or less, particularly 0.7 mm or less, and further 0.6 mm or less, and the lower limit is not particularly limited, and may be 0.2 mm or less, for example. -Regarding the cocoon size, the area (square meter) includes, for example, 2 or more, 3 or more, and 4 or more. There is no particular limitation on the upper limit. Speaking of the generation of glass substrates, for example, it is G5 or more, and further G6 or more.・ Weight is determined from “specific gravity of glass (about 2.5) × area × thickness”. *
－３－　なお、上記のガラス基板とは、素板ガラスのほか、その少なくとも片面に機能層を有する機能層付きガラス基板を含むものとする。上記に言う「機能層」としては、ＩＴＯ膜のような透明導電膜、金属薄膜、配向膜、液晶層、カラーフィルタ、誘電体層、有機半導体、金属ナノ粒子層をはじめとする多種多様の層があげられる。機能層は、単層であっても多層であってもよく、また連続層であても断続層であってもよい。「機能層」の「層」とは、基板上に何らかの機能を付与したものという意味である。　 -3- In addition to the base glass, the above glass substrate includes a glass substrate with a functional layer having a functional layer on at least one side thereof. The above-mentioned “functional layer” includes various layers including a transparent conductive film such as an ITO film, a metal thin film, an alignment film, a liquid crystal layer, a color filter, a dielectric layer, an organic semiconductor, and a metal nanoparticle layer. Is given. The functional layer may be a single layer or a multilayer, and may be a continuous layer or an intermittent layer. The “layer” of the “functional layer” means that a certain function is provided on the substrate. *
－４－　撓みを生ずるシート状の板体（Ｂ）としては、上述の通常はリジッド（硬質）であるとされている板体のほか、ステンレススチール箔などの金属薄板、各種高分子フィルムのように、曲面形成、巻き取り、巻き戻し、折り曲げ（折り返し）などが可能なフレキシブルな（可撓性を有する）ものも例示できる。　 -4- As the sheet-like plate (B) that causes the bending, in addition to the plate that is usually said to be rigid (hard), a metal thin plate such as stainless steel foil, various polymer films, etc. In addition, a flexible material (having flexibility) capable of forming a curved surface, winding, rewinding, folding (folding) and the like can also be exemplified. *
［トレイ（Ｔ）の構成］（外枠（１）と中桟（２））　上述の撓みを生ずるシート状の板体（Ｂ）を平置き状に載置するためのトレイ（Ｔ）は、平面視で矩形の外枠（１）と、その外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）間に架設する４本以上の中桟（２）とで構成される。　 [Configuration of Tray (T)] (Outer Frame (1) and Middle Cross (2)) The tray (T) for placing the sheet-like plate (B) that causes the above-described bending in a flat state is as follows. Consists of a rectangular outer frame (1) in plan view, and a pair of frame pieces (1x), (1x) facing each other of the outer frame (1) and four or more middle frames (2) Is done. *
（外枠（１））－１－　外枠（１）の材質は、特に限定はないものの、強度、軽量性およびコスト等を考慮すると、アルミニウムとすることが好ましい。ここでアルミニウムとは、純アルミニウムのほか、Ａｌ－Ｃｕ系、Ａｌ－Ｍｎ系、Ａｌ－Ｓｉ系、Ａｌ－Ｍｇ系、Ａｌ－Ｍｇ－Ｓｉ系、Ａｌ－Ｚｎ系をはじめとする各種のアルミニウム合金をも含む概念であるとする。この場合、外枠（１）を構成するアルミニウム材としては、陽極酸化によりその表面をアルマイト化して耐摩耗性や耐腐食性を向上させたものを用いることが特に望ましい。もし必要なら、そのようなアルマイト化した表面上にさらに樹脂膜を形成したアルミニウム材を用いることも可能である。　 (Outer frame (1))-1- The material of the outer frame (1) is not particularly limited, but aluminum is preferable in consideration of strength, lightness, cost, and the like. Aluminum is not only pure aluminum but also various aluminum alloys including Al—Cu, Al—Mn, Al—Si, Al—Mg, Al—Mg—Si, and Al—Zn. It is assumed that the concept also includes In this case, as the aluminum material constituting the outer frame (1), it is particularly desirable to use an aluminum material whose surface is anodized by anodization to improve wear resistance and corrosion resistance. If necessary, it is also possible to use an aluminum material in which a resin film is further formed on such an anodized surface. *
－２－　平面視で矩形の外枠（１）を形成するには種々の方法が採用しうるものの、次のような方法を採用することが特に好ましい。（後述の実施例１のトレイ（Ｔ）を示す図１の平面図、その図１の左上のコーナー部周りの拡大図を示す図４、さらにはコーナーピース（４）の平面図を示す図５を参照。）　１．まず、外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）と、もう１対の枠片（１ｙ），（１ｙ）とを構成する部材について、それらの部材の両端を４５°にカットしたものを準備しておく。　２．ついで、枠片（１ｘ）と枠片（１ｙ）とを図４のように直角になるように突き合わせ配置する。このとき、その直角に配置した隅部の内部には、図５に平面図を示したようなＬ形のコーナーピース（４）を挿入配置しておく。図５において、（４ｈ）はカシメのための貫通孔、（ｈ）は軽量化のための貫通孔である。なお、このコーナーピース（４）もアルミニウム製とするのが通常である。　３．ついで、図４のコーナーピース（４）の４つの貫通孔（４ｈ）に向けて、プレス機のカシメ用の加圧部により同時にカシメ操作を行う。　４．このカシメ操作により、枠片（１ｘ），（１ｙ）の貫通孔（４ｈ）直上の部位はそのコーナーピース（４）の４つの貫通孔（４ｈ）に食い込み、１つの隅部の締結が完了する。　５．このようなカシメ操作を残りの３つの隅部についても行い、４つの隅部の締結を完了する。　 -2- Although various methods can be adopted to form the rectangular outer frame (1) in plan view, it is particularly preferable to adopt the following method. 1 is a plan view of FIG. 1 showing a tray (T) of Example 1 described later, FIG. 4 is an enlarged view around the upper left corner of FIG. 1, and FIG. 5 is a plan view of a corner piece (4). (See 1) First, regarding the members constituting a pair of opposing frame pieces (1x), (1x) and another pair of frame pieces (1y), (1y) of the outer frame (1), both ends of those members Prepare the one cut at 45 °. 2. Next, the frame piece (1x) and the frame piece (1y) are butt-arranged so as to form a right angle as shown in FIG. At this time, an L-shaped corner piece (4) as shown in the plan view of FIG. 5 is inserted and arranged in the corner arranged at a right angle. In FIG. 5, (4h) is a through hole for caulking, and (h) is a through hole for weight reduction. The corner piece (4) is usually made of aluminum. 3. Next, the caulking operation is simultaneously performed by the caulking pressure parts of the press machine toward the four through holes (4h) of the corner piece (4) in FIG. 4. By this caulking operation, the part immediately above the through hole (4h) of the frame pieces (1x) and (1y) bites into the four through holes (4h) of the corner piece (4), and the fastening of one corner is completed. . 5. Such a caulking operation is also performed on the remaining three corners to complete the fastening of the four corners. *
－３－　このカシメ法によれば、プレス機により効率よく外枠（１）が形成される上、ビスどめのように１つの隅部につき４つの締結を順次行うときには避けがたい外枠（１）の捻り歪みの発生のおそれが解消する。　 -3- According to this caulking method, the outer frame (1) is efficiently formed by the press machine, and the outer frame (4) is unavoidable when four fastenings are sequentially performed at one corner as in the case of screws. The possibility of the occurrence of torsional strain 1) is eliminated. *
－４－　付言するに、［背景技術］の箇所で述べた特許文献３においても、両端を４５°にカットした部材を突き合わせてねじどめすることによりフレーム枠（外枠）を形成しているが、その段落００４２の説明および図４、５のように、そのねじどめ方式、ねじの向き、コーナーピースの使い方にかかる外枠組み立て方式は、本発明において好適に採用される推奨される上述のカシメ方式とは大きく相違している。　 -4- In addition, in Patent Document 3 described in [Background Art], a frame frame (outer frame) is formed by abutting and screwing members cut at 45 ° at both ends. However, as described in the paragraph 0042 and FIGS. 4 and 5, the screwing method, the direction of the screw, and the outer frame assembling method according to the usage of the corner piece are recommended as described above that are preferably employed in the present invention. This is very different from the caulking method. *
（中桟（２））－１－　中桟（２）は、上記の外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）間に架設される部材であり、４本以上で構成される。これらの中桟（２）は、隣接する２本の中桟（２ａ），（２ａ）で１対となる中桟対（２２）の２対以上（たとえば、２対、３対または４対）からなる。　 (Medium beam (2))-1- The middle beam (2) is a member constructed between a pair of opposed frame pieces (1x), (1x) of the outer frame (1). Consists of more than books. These middle rails (2) are two pairs or more (for example, 2 pairs, 3 pairs, or 4 pairs) of the middle beam pairs (22) that are paired with two adjacent middle beams (2a) and (2a). Consists of. *
－２－　ここで、外枠（１）の相対向する１対の枠片（１ｘ），（１ｘ）間に架設される中桟（２）の間隔について、中桟対（２２）が２対の場合を例にとって説明する。図１の左側の中桟対（２２）における「中桟（２ａ）－中桟（２ｂ）」間の間隔をＳ１、それに隣り合う右側の中桟対（２２）における「中桟（２ａ）－中桟（２ｂ）」間の間隔をＳ２、左側の中桟対（２２）と右側の中桟対（２２）との間の間隔をＳ３、左側の枠片（１ｙ）と左側の中桟対（２２）の中桟（２ａ）との間の間隔をＳ０、右側の枠片（１ｙ）と右側の中桟対（２２）の中桟（２ｂ）との間の間隔をＳ０とすると、次のように表わされる。
Figure JPOXMLDOC01-appb-I000001
-2- Here, with respect to the distance between the middle frame (2) installed between the pair of opposed frame pieces (1x), (1x) of the outer frame (1), two pairs of middle beams (22) An example will be described. The distance between “middle beam (2a) -middle beam (2b)” in the left middle beam pair (22) in FIG. 1 is S1, and “middle beam (2a) — The distance between the middle rail (2b) "is S2, the distance between the left middle rail pair (22) and the right middle rail pair (22) is S3, the left frame piece (1y) and the left middle rail pair If the distance between the middle rail (2a) of (22) is S0 and the distance between the right frame piece (1y) and the middle rail (2b) of the right middle rail pair (22) is S0, It is expressed as
Figure JPOXMLDOC01-appb-I000001
－３－　これらの間隔については、次のように設定することが望ましい。　・中桟（２）上に板体（Ｂ）を載置する関係上、間隔Ｓ１と間隔Ｓ２とは同一に設定するのが通常である。ただし、多少の相違があっても差し支えない。　・間隔Ｓ３は、間隔Ｓ１，Ｓ２よりも狭くすることが好ましいが、間隔Ｓ１，Ｓ２と同程度までであれば特に支障とはならない。なお、間隔Ｓ３が間隔Ｓ１，Ｓ２よりも許容限度を越えて広くなると、間隔Ｓ３のところで板体（Ｂ）の撓みが大きくなって支障を来す。　・間隔Ｓ０は、載置した板体（Ｂ）の端縁側になるので、間隔Ｓ１，Ｓ２よりも狭くすることはもとより、間隔Ｓ３よりも狭くするのが通常であるが、枠片（１ｙ）の一部分によってあるいは枠片（１ｙ）から張り出すように設けたガイド（５）によって板体（Ｂ）の左右の端縁側を支承するときは、間隔Ｓ０は間隔Ｓ３と同程度とすることもできる。　・いずれにせよ、板体（Ｂ）の撓み性も考慮しながら、できるだけ中桟（２）の全てに均等に力がかかるようにすると共に、板体（Ｂ）がその両端側において許容限度以上の撓みや跳ね上がりを生じないように留意する。　 -3- It is desirable to set these intervals as follows.・ In view of placing the plate (B) on the middle rail (2), the interval S1 and the interval S2 are usually set to be the same. However, there may be some differences. · The interval S3 is preferably narrower than the intervals S1 and S2, but there is no particular problem as long as it is about the same as the intervals S1 and S2. If the distance S3 is larger than the distances S1 and S2 beyond the allowable limit, the plate (B) is greatly bent at the distance S3, causing a problem. Since the interval S0 is on the edge side of the placed plate (B), the interval S0 is usually narrower than the interval S3 as well as the intervals S1 and S2, but the frame piece (1y) When the left and right edge sides of the plate body (B) are supported by a part of the plate or by a guide (5) provided so as to protrude from the frame piece (1y), the interval S0 can be set to the same level as the interval S3. . In any case, while taking into account the flexibility of the plate (B), force is applied to all the middle rails (2) as evenly as possible, and the plate (B) exceeds the allowable limit at both ends. Care should be taken not to cause bending or jumping. *
－４－　１．なお、中桟対（２２）に関与しない孤立した中桟（２）を、たとえば板体（Ｂ）の端縁側となる外枠（１）で囲まれる領域の端の方に付加的に配置したりすることは差し支えない。そのような孤立した中桟（２）は、板体（Ｂ）のサイズによっては、板体（Ｂ）の端縁の垂れ（撓み）を防止するために役立つことがあるからである。　２．また、中桟対（２２）に関与しない孤立した中桟（２）を、たとえば左側の中桟対（２２）と右側の中桟対（２２）との中間の部位に付加的に配置したりすることは差し支えない。左右の位置に中桟対（２２）があれば、それらの中間の部位に孤立した中桟（２）を配置しても、板体（Ｂ）の支承にそれほどのマイナスにはならないからである。　３．しかしながら、孤立した中桟（２）の付加的な設置は重量的に不利になることがあるので、中桟（２）の全数が増えないような設計が可能な場合に限った方がよいであろう。　 -4- 1. In addition, an isolated middle beam (2) that does not participate in the middle beam pair (22) is additionally arranged, for example, toward the end of the region surrounded by the outer frame (1) on the edge side of the plate (B). There is no problem. This is because such an isolated middle rail (2) may be useful for preventing dripping (bending) of the edge of the plate (B) depending on the size of the plate (B). 2. Further, an isolated middle beam (2) that is not involved in the middle beam pair (22) is additionally arranged, for example, at an intermediate position between the left middle beam pair (22) and the right middle beam pair (22). You can do it. This is because if there is a pair of intermediate rails (22) at the left and right positions, even if an isolated intermediate rail (2) is arranged at an intermediate position between them, the support of the plate (B) is not so negative. . 3. However, the additional installation of the isolated middle beam (2) may be disadvantageous in weight, so it should be limited to the case where a design that does not increase the total number of middle beams (2) is possible. Let's go. *
－５－　中桟（２）の材質も、外枠（１）と同様に強度と軽量性とを考慮して、アルミニウム（アルミニウム合金を含む）とすることが好ましい。中桟（２）については、外枠（１）とは異なりトレイ同士を多段に積み重ねたときのメタルタッチを顧慮しなくてもよいので、そのまま用いるのが通常である。ただし、アルマイト化したものを用いたり、樹脂膜を形成したものを用いることは、差し支えない。　 -5 The material of the middle rail (2) is preferably aluminum (including aluminum alloy) in consideration of strength and light weight as in the outer frame (1). Unlike the outer frame (1), the middle rail (2) is usually used as it is because it does not have to consider the metal touch when the trays are stacked in multiple stages. However, it is possible to use alumite or a resin film. *
－６－　上記の中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）は、中実であってもよいが、中空部（ｈｏ）を有する管構造をしていることが特に好ましい。管構造とすることは、軽量化や曲げ強度の点で有利であり、またコスト上も有利であることが多いからである。　 -6- Each middle beam (2a), (2b) constituting the middle beam pair (22) may be solid, but has a tube structure having a hollow portion (ho). Is particularly preferred. This is because the tube structure is advantageous in terms of weight reduction and bending strength, and is often advantageous in terms of cost. *
－７－　１．管構造の場合の中桟（２ａ），（２ｂ）の幅方向の断面形状は種々の形状とすることができるが、図７（Ａ）～（Ｄ）のように、１眼または多眼の中空部（ｈｏ）を有する横長の断面形状を有するものであることが特に好ましい。図７（Ａ）は角を丸めた横長の長方形の例、図７（Ｂ）は横長の長円形、
図７（Ｃ）は横長の楕円形の例、図７（Ｄ）は横長でかつ多眼の例である。　２．図７（Ｅ）～（Ｆ）は、横長の断面形状を有する他の例を示したものである。　３．図７（Ｇ）～（Ｈ）は、横長ではない断面形状を有する他の例を示したものであり、図７（Ｇ）は円形の例、図７（Ｈ）は角を丸めた正方形の例である。　 -7-1. In the case of the tube structure, the cross-sectional shape in the width direction of the middle rails (2a) and (2b) can be various shapes, but as shown in FIGS. It is particularly preferable to have a horizontally long cross-sectional shape having a hollow portion (ho). 7A is an example of a horizontally long rectangle with rounded corners, FIG. 7B is a horizontally long oval,
FIG. 7C shows an example of a horizontally long ellipse, and FIG. 7D shows a horizontally long example of multiple eyes. 2. FIGS. 7E to 7F show other examples having a horizontally long cross-sectional shape. 3. FIGS. 7G to 7H show other examples having a cross-sectional shape that is not horizontally long. FIG. 7G is an example of a circle, and FIG. 7H is a square with rounded corners. It is an example.
（保護用シート（３））－１－　保護用シート（３）としては、中桟（２）と板体（Ｂ）との間に介在させることにより板体（Ｂ）の保護を図ることができるものであれば、フィルム、シート、発泡シート、織布、長繊維で作られた不織布、編布などや、それらのラミネート品をはじめとして、種々のものが用いられる。　１．保護用シート（３）はクッション性を有することが好ましいので、発泡シートまたは発泡シートを含む多層シートは好ましいものの代表例である。　２．また、本発明においては保護用シート（３）をエンドレスベルト状（ループ状）にして用いるので、その最内層はヒートシール可能な層であることが望ましい。ただし、エンドレスベルト状（ループ状）にすることは、接着剤、接着テープ、超音波接合、高周波接合、縫合などの手段によっても達成できる。　 (Protective sheet (3))-1- As the protective sheet (3), the plate (B) can be protected by being interposed between the intermediate rail (2) and the plate (B). As long as it can be used, various materials such as films, sheets, foamed sheets, woven fabrics, nonwoven fabrics made of long fibers, knitted fabrics, and laminates thereof are used. 1. Since the protective sheet (3) preferably has cushioning properties, a foam sheet or a multilayer sheet including a foam sheet is a typical example of a preferable one. 2. In the present invention, since the protective sheet (3) is used in an endless belt shape (loop shape), the innermost layer is preferably a heat sealable layer. However, the endless belt shape (loop shape) can also be achieved by means such as an adhesive, an adhesive tape, ultrasonic bonding, high frequency bonding, and stitching. *
－２－　保護用シート（３）として特に好ましいものの一例は、メタロセン触媒を用いて重合することにより得られた高密度グレードのエチレン系重合体（より詳しくは、メタロセン触媒を用いて重合することにより得られた、ＪＩＳ　Ｋ７１１２法により測定した密度が立法メートル当り９４０ｋｇ 以上でかつＧＰＣ法により測定した重量平均分子量Ｍｗと数平均分子量Ｍｎとの比Ｍｗ／Ｍｎが３～６のエチレン系重合体）のフィルム層（３ｍ）からなるか、あるいは該フィルム層（３ｍ）を含む多層のシートである。多層の場合のフィルム層（３ｍ）の相手方の層の代表例は、エチレン系重合体発泡シート（３ｎ）や、ヒートシール強度の大きいヒートシール層（３ｓ）（１例をあげれば高密度ポリエチレン層）である。そのときの層構成の代表例は、　・（３ｍ）／（３ｎ）／（３ｓ）、　・（３ｍ）／（３ｎ）／（３ｍ）／（３ｓ）、　・（３ｍ）／（３ｎ）、　・（３ｍ）／（３ｎ）／（３ｍ）などである。　 -2- An example of a particularly preferable protective sheet (3) is a high-density grade ethylene polymer obtained by polymerization using a metallocene catalyst (more specifically, by polymerization using a metallocene catalyst). (Ethylene-based polymer having a density measured by the JIS K7112 method of 940 kg or more per cubic meter and a ratio Mw / Mn of the weight average molecular weight Mw and the number average molecular weight Mn measured by the GPC method of 3 to 6) It is a multilayer sheet comprising a film layer (3 m) or including the film layer (3 m). Typical examples of the other layer of the film layer (3 m) in the case of multiple layers are an ethylene polymer foam sheet (3n) and a heat seal layer (3 s) with high heat seal strength (in one example, a high-density polyethylene layer) ). Typical examples of the layer structure at that time are: (3m) / (3n) / (3s), (3m) / (3n) / (3m) / (3s), (3m) / (3n), (3m) / (3n) / (3m). *
－３－　また、発泡ポリプロピレンシートは、クッション性と強力なヒートシール性を兼ね備えているので、保護用シート（３）として特に好ましいものの一例である。　 -3- In addition, the foamed polypropylene sheet is an example of a particularly preferable example of the protective sheet (3) because it has both cushioning properties and strong heat sealing properties. *
（中桟対（２２）への保護用シート（３）のエンドレスベルト状の掛け渡し構造）  それぞれの中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間には、保護用シート（３）が図１および図６のようにエンドレスベルト状に掛け渡される。保護用シート（３）の掛け渡しは、たとえば、　・チューブ状の保護用シート（３）を中桟対（２２）（中桟（２ａ），（２ｂ））に外挿する方法、　・中桟対（２２）（中桟（２ａ），（２ｂ））を保護用シート（３）で包むようにしてから、ヒートシールまたは溶断を行い、過剰の部分を除去する方法、　・中桟対（２２）（中桟（２ａ），（２ｂ））の上下のそれぞれに保護用シート（３），（３）を配置してから、その過剰の部分を溶断などにより除去する方法、などによりなされる。　 (Endless belt-like spanning structure of protective sheet (3) to middle rail pair (22)) 間 Between two middle rails (2a) and (2b), which are members of each middle rail pair (22) The protective sheet (3) is stretched over an endless belt as shown in FIGS. The protection sheet (3) is handed over by, for example, a method of extrapolating the tube-shaped protection sheet (3) to the middle beam pair (22) (middle beam (2a), (2b)), A method of removing the excess portion by wrapping the pair (22) (middle beam (2a), (2b)) with a protective sheet (3) and then heat-sealing or fusing, the middle beam pair (22) ( The protective sheets (3) and (3) are disposed on the upper and lower sides of the middle rails (2a) and (2b), respectively, and then the excess portion is removed by fusing or the like. *
そして、そのような「保護用シート（３）をエンドレスベルト状に掛け渡した中桟対（２２）」が２対以上あるので、その上に、撓みを生ずるシート状の板体（Ｂ）が平置き状に載置される（図１、図６を参照）。　 And since there are two or more pairs of such “intermediate pair (22) in which the protective sheet (3) is stretched in an endless belt shape”, a sheet-like plate body (B) that causes bending is formed thereon. It is placed in a flat position (see FIGS. 1 and 6). *
中桟対（２２）への保護用シート（３）をエンドレスベルト状に掛け渡すという独特の構成が、本発明のポイントとなる技術思想であり、そのために［発明の効果］の箇所で述べたようなすぐれた効果が奏されるのである。　 The unique configuration of suspending the protective sheet (3) to the middle rail pair (22) in the form of an endless belt is the technical idea that is the point of the present invention, and as described in the section [Effects of the invention]. Such an excellent effect is produced. *
［トレイ（Ｔ）の積み重ね］　板体（Ｂ）を平置き載置した上記のトレイ（Ｔ）は、これをたとえば数１０個から数１００個積み上げた状態で搬送、輸送、保管に供される。 [Stacking of trays (T)] The above-described trays (T) on which the plate bodies (B) are placed flat are used for transportation, transportation, and storage in a state where, for example, several tens to several hundreds are stacked. .
次に実施例をあげて本発明をさらに説明する。　 The following examples further illustrate the invention. *
［図面の説明］　図１は、本発明の板体の平置き載置用トレイ（Ｔ）の一例を示した平面図であり、２対の中桟対（２２），（２２）のそれぞれには保護用シート（３）をエンドレスベルト状に掛け渡してある。　図２は、図１のＡ－Ａ断面の拡大図である。　図３は、中桟（２）の一例を示した断面図である。　図４は、図１の左上のコーナー部周りの拡大図である。　図５は、コーナーピース（４）の平面図である。　図６は、図１のＢ－Ｂ断面を模式的に示した説明図である。　図７は、管構造を有する中桟（２）の種々の例を示した幅方向の断面図である。　 [Explanation of Drawings] FIG. 1 is a plan view showing an example of a flat placing tray (T) of a plate body of the present invention, each of two pairs of middle rails (22) and (22). Has a protective sheet (3) stretched around an endless belt. FIG. 2 is an enlarged view of the AA cross section of FIG. FIG. 3 is a cross-sectional view showing an example of the middle rail (2). FIG. 4 is an enlarged view around the upper left corner of FIG. FIG. 5 is a plan view of the corner piece (4). FIG. 6 is an explanatory view schematically showing the BB cross section of FIG. FIG. 7 is a cross-sectional view in the width direction showing various examples of the intermediate beam (2) having a pipe structure. *
［実施例］（外枠（１）と中桟（２））－１－　図１のトレイ（Ｔ）は、外枠（１）と中桟（２）とから組み立てられている。外枠（１）および中桟（２）はいずれも押出法により得られたアルミニウム成形物を用いているが、外枠（１）については押出法により得られたアルミニウムの表面をさらに硬質アルマイト化したものを用いており、中桟（２）については押出法により得られたアルミニウムの表面をアルマイト化をしたものを用いてある。　 [Example] (Outer frame (1) and middle rail (2))-1- The tray (T) in FIG. 1 is assembled from the outer frame (1) and the middle rail (2). Both the outer frame (1) and the intermediate beam (2) use an aluminum molded product obtained by the extrusion method. For the outer frame (1), the surface of the aluminum obtained by the extrusion method is made harder anodized. As for the middle rail (2), the aluminum surface obtained by the extrusion method is anodized. *
－２－　上記の外枠（１）は、その長辺側となる相対向する１対の枠片（１ｘ），（１ｘ）と、その短辺側となる相対向する１対の枠片（１ｙ），（１ｙ）とで構成され、全体として矩形の骨格を有している。この外枠（１）は、先に述べた［トレイ（Ｔ）の構成］の（外枠（１））の箇所で説明した方法により組み立てられている。　 2-2 The outer frame (1) is composed of a pair of opposing frame pieces (1x), (1x) on its long side and a pair of opposing frame pieces on its short side ( 1y) and (1y), and has a rectangular skeleton as a whole. The outer frame (1) is assembled by the method described in the section of (Outer frame (1)) in [Configuration of tray (T)] described above. *
－３－　中桟（２）は、上記の外枠（１）の長辺側となる相対向する１対の枠片（１ｘ），（１ｘ）間に架設されている。枠片（１ｘ）に対する中桟（２）の固定は、ビスどめによりなされている。中桟（２）は、板体（Ｂ）（この実施例においては機能層（カラーフィルター層）付きのガラス基板）を支承するための主部材である。　 -3- The middle rail (2) is constructed between a pair of opposing frame pieces (1x) and (1x) on the long side of the outer frame (1). The middle crosspiece (2) is fixed to the frame piece (1x) by screwing. The middle rail (2) is a main member for supporting the plate body (B) (in this embodiment, a glass substrate with a functional layer (color filter layer)). *
（外枠(1) ）　外枠（１）の長辺側を構成している枠片（１ｘ），（１ｘ）と、外枠（１）の短辺側を構成している枠片（１ｙ），（１ｙ）とは、図２に示したように、四角形の中空部を有する断面形状（角張った「§」をイメージさせる断面形状）を有している。図２の左上部の左方向の張り出し部は、トレイ（Ｔ）を持ち上げたり降ろしたりするときのロボットによる把持部となる。　 (Outer frame (1)) Frame pieces (1x), (1x) constituting the long side of the outer frame (1) and frame pieces (1y) constituting the short side of the outer frame (1) ), (1y), as shown in FIG. 2, has a cross-sectional shape having a quadrangular hollow portion (a cross-sectional shape that makes an image of an angular “§”). The left protruding portion in the upper left part of FIG. 2 serves as a grip portion by the robot when the tray (T) is lifted or lowered. *
（外枠（１）に設けたガイド（５））－１－　図２には、板体（Ｂ）の端縁を所定の位置に支承する部品であるガイド（５）も描かれている。このガイド（５）は、外枠（１）の短辺側を構成しているそれぞれの枠片（１ｙ），（１ｙ）については、それらの中間部と片端部と他端部との計３箇所に設けられている。またそのガイド（５）は、少し形状は相違するが、図１にも描かれているように、外枠（１）の長辺側を構成しているそれぞれの枠片（１ｘ），（１ｘ）の片端部と他端部との計２箇所にも設けられている。　 (Guide (5) provided on outer frame (1))-1-- FIG. 2 also shows a guide (5) which is a part for supporting the edge of the plate (B) at a predetermined position. This guide (5) has a total of three intermediate pieces, one end portion and the other end portion of each frame piece (1y) and (1y) constituting the short side of the outer frame (1). It is provided in the place. Further, the guide (5) is slightly different in shape, but as shown in FIG. 1, each frame piece (1x), (1x) constituting the long side of the outer frame (1) is also drawn. ) Is provided at a total of two locations, one end and the other end. *
－２－　上記のガイド（５）は、この実施例１においては、超高分子量ポリエチレンの粉体を用いて圧縮成形することにより得たブロック状の成形体を機械的に切削加工することにより作製されたものであって、耐摩耗性、耐疲労性、自己潤滑性、耐化学薬品性、耐食性、耐衝撃性、強度などの特性が顕著にすぐれており、図２に２点鎖線で示された板体（Ｂ）（機能層付きガラス基板）を支承する部材として最適である。　 2-2 The guide (5) in Example 1 is produced by mechanically cutting a block-shaped molded body obtained by compression molding using ultra-high molecular weight polyethylene powder. It has outstanding properties such as wear resistance, fatigue resistance, self-lubrication, chemical resistance, corrosion resistance, impact resistance, strength, etc., and is shown by a two-dot chain line in FIG. It is optimal as a member for supporting the plate body (B) (glass substrate with a functional layer). *
－３－　また、枠片（１ｙ），（１ｙ）に設けた図２のガイド（５）は、寸法が若干異なる２種の基板（板体（Ｂ））のどちらにも対処できるようにやや長めに構成してある。この実施例１においては、横幅１８５０ｍｍ×縦幅１５００ｍｍの基板および横幅１８００ｍｍ×縦幅１５００ｍｍの基板（板体（Ｂ））のいずれをも載置できるようにしてある。　 -3- In addition, the guide (5) in FIG. 2 provided on the frame pieces (1y) and (1y) is slightly so that both of the two types of substrates (plate bodies (B)) having slightly different dimensions can be handled. It is structured longer. In the first embodiment, both a substrate having a width of 1850 mm × a height of 1500 mm and a substrate having a width of 1800 mm × a height of 1500 mm (plate body (B)) can be placed. *
－４－　なお、図２中の（６）は座金組み込みねじであり、上記の超高分子量ポリエチレン製のガイド（５）を外枠（１）に固定するために使われている。　 -4- In addition, (6) in FIG. 2 is a washer built-in screw, which is used for fixing the above ultra high molecular weight polyethylene guide (5) to the outer frame (1). *
（外枠（１）のコーナー部とコーナーピース（４））　図１のコーナー部の拡大図を示した図４のように、短辺側を構成している外枠（１）の枠片（１ｙ）の端部と、長辺側を構成している外枠（１）の枠片（１ｘ）の端部とは、いずれも４５°にカットされた状態で突き合わせられている。この突き合わせのカシメ操作は、図４に破線で示されているコーナーピース（４）の４つの貫通孔（４ｈ）に向けてプレス機により一挙になされている。図５は、図４のＬ形のコーナーピース（４）の平面図である。　 (Corner part and corner piece (4) of outer frame (1)) As shown in FIG. 4 showing an enlarged view of the corner part of FIG. 1, the frame piece (1) constituting the short side ( The end of 1y) and the end of the frame piece (1x) of the outer frame (1) constituting the long side are both butted in a state of being cut at 45 °. The crimping operation of this butting is performed all at once by the press machine toward the four through holes (4h) of the corner piece (4) shown by broken lines in FIG. FIG. 5 is a plan view of the L-shaped corner piece (4) of FIG. *
（中桟（２）、保護用シート（３））－１－　図１のトレイ（Ｔ）における１対の中桟対（２２）は、その構成メンバーである２本の中桟（２ａ），（２ｂ）からなる。中桟（２ａ），（２ｂ）は、いずれも中空部（ｈｏ）を有する横長の断面形状の管構造をしており、その横幅は３２ｍｍ、縦幅は６．５ｍｍ、肉厚は１．５ｍｍである。そのような中桟対（２２）が、長辺側を構成している外枠（１）の枠片（１ｘ），（１ｘ）間に２対架設してある。なお、事前の予備的検討に基き、この実施例においては、中桟（２ａ），（２ｂ）として、図７（Ａ）～（Ｄ）の４種の断面形状を有するものをそれぞれ用いた場合につき試験を行っている。　 (Medium beam (2), protective sheet (3))-1- A pair of middle beams (22) in the tray (T) in FIG. 1 is composed of two middle beams (2a), (2b). Each of the intermediate rails (2a) and (2b) has a horizontally long cross-sectional tube structure having a hollow portion (ho), the horizontal width is 32 mm, the vertical width is 6.5 mm, and the wall thickness is 1.5 mm. It is. Two such intermediate beam pairs (22) are installed between the frame pieces (1x) and (1x) of the outer frame (1) constituting the long side. Based on preliminary preliminary studies, in this embodiment, as the crosspieces (2a) and (2b), those having the four types of cross-sectional shapes shown in FIGS. 7 (A) to (D) are used. Are being tested. *
－２－　そして、図１のように、２対ある中桟対（２２），（２２）のそれぞれには保護用シート（３）をエンドレスベルト状に掛け渡してあり、その上から板体（Ｂ）が平置き状に載置される。その状態は、図１のＢ－Ｂ断面においては図６のようになる。　 -2- And, as shown in FIG. 1, a protective sheet (3) is stretched around each of the two middle beam pairs (22) and (22) in the form of an endless belt. B) is placed flat. The state is as shown in FIG. 6 in the BB cross section of FIG. *
－３－　なお、事前の予備的検討に基き、この実施例においては、保護用シート（３）として次のものを用いた。　・メタロセン触媒を用いて重合することにより得られた厚み５０μｍの高密度グレードのエチレン系重合体のフィルム層（３ｍ）と、厚み１ｍｍのエチレン系重合体発泡シート（３ｎ）と、高密度ポリエチレンの厚み０．２ｍｍのヒートシール層（３ｓ）とからなる（３ｍ）／（３ｎ）／（３ｓ）の積層シート。　・クッション性と強力なヒートシール性とを兼ね備えた厚み１ｍｍの発泡ポリプロピレンシート。　 -3- In addition, based on the preliminary examination in advance, in this example, the following was used as the protective sheet (3). A film layer (3 m) of a high density grade ethylene polymer having a thickness of 50 μm obtained by polymerization using a metallocene catalyst, an ethylene polymer foam sheet (3 n) having a thickness of 1 mm, and a high density polyethylene A laminated sheet of (3m) / (3n) / (3s) comprising a heat seal layer (3s) having a thickness of 0.2 mm.・ A foamed polypropylene sheet with a thickness of 1 mm that combines cushioning and powerful heat-sealability. *
（試験）　板体（Ｂ）として機能層（カラーフィルター層）付きのガラス基板を用い、その板体（Ｂ）を載置したトレイ（Ｔ）をパレット上に１５０段積み上げてから、透明なプラスチックスフィルムで全体を包み、工場内での移送と保管、他工場へのトラック輸送試験、さらにはその他工場における荷降ろしとその工場内での移送を行い、さらには梱包を解くと共に、上段の側からトレイ（Ｔ）の１段ずつの取り出しを行ったが、異常は全く見られなかった。 (Test) A glass substrate with a functional layer (color filter layer) is used as the plate (B), and the tray (T) on which the plate (B) is placed is stacked on a pallet by 150 stages, and then a transparent plastic Wrapping the whole with film, transport and store in the factory, truck transport test to other factories, unloading in other factories and transport in the factory, unpacking and upper side The tray (T) was taken out from the tray one by one, but no abnormality was found.
本発明の板体の平置き載置用トレイは、撓みを生ずるシート状の板体（Ｂ）（たとえば、薄くかつ大サイズのガラス基板や、そのようなガラス基板の少なくとも片面に機能層を設けた機能層付きガラス基板）を平置き状に載置するためのトレイ（Ｔ）として好適に使用しうる。 The flat plate mounting tray according to the present invention has a sheet-like plate body (B) that generates bending (for example, a thin and large glass substrate, or a functional layer provided on at least one surface of such a glass substrate). The glass substrate with a functional layer) can be suitably used as a tray (T) for placing it flat.
本発明の板体の平置き載置用トレイ（Ｔ）の一例を示した平面図である。It is the top view which showed an example of the flat placing tray (T) of the plate body of this invention. 図１のＡ－Ａ断面の拡大図である。FIG. 2 is an enlarged view of a section AA in FIG. 1. 中桟（２）の一例を示した断面図である。It is sectional drawing which showed an example of the middle crosspiece (2). 図１の左上のコーナー部周りの拡大図である。FIG. 2 is an enlarged view around the upper left corner portion of FIG. 1. コーナーピース（４）の平面図である。It is a top view of a corner piece (4). 図１のＢ－Ｂ断面を模式的に示した説明図である。FIG. 2 is an explanatory view schematically showing a BB cross section of FIG. 1. 管構造を有する中桟（２）の種々の例を示した幅方向の断面図である。It is sectional drawing of the width direction which showed the various examples of the middle crosspiece (2) which has a pipe structure.
（Ｔ）…トレイ、　（Ｂ）…板体、　（１）…外枠、　　（１ｘ）…枠片、（１ｙ）…枠片、　（２）…中桟、　　（２２）…中桟対、　　（２ａ），（２ｂ）…中桟対（２２）の構成メンバーである中桟、　　　（ｈｏ）…中桟対（２２）の構成メンバーである中桟の中空部、　（３）…保護用シート、　（４）…コーナーピース、　　（４ｈ）…カシメのための貫通孔、（ｈ）…軽量化のための貫通孔、　（５）…ガイド、　（６）…座金組み込みねじ   (T) ... tray, (B) ... plate, (1) ... outer frame, (1x) ... frame piece, (1y) ... frame piece, (2) ... medium beam, (22) ... medium beam pair, ( 2a), (2b): Middle pier, which is a member of the middle pier pair (22), (ho): hollow portion of the middle pier, which is a member of the middle pier pair (22), (3) ... protection sheet, (4) ... Corner piece, (4h) ... Through hole for caulking, (h) ... Through hole for weight reduction, (5) ... Guide, (6) ... Washer built-in screw rod

Claims (3)

  1. 撓みを生ずるシート状の板体（Ｂ）を平置き状に載置するためのトレイ（Ｔ）であって、　前記のトレイ（Ｔ）は、平面視で矩形の外枠（１）と、その外枠（１）
    の相対向する１対の枠片（１ｘ），（１ｘ）間に架設する４本以上の中桟（２）とで構成されていること、　前記の中桟（２）は、隣接する２本の中桟（２ａ），（２ｂ）で１対となる中桟対（２２）の２対以上からなること、  そして、それぞれの中桟対（２２）の構成メンバーである２本の中桟（２ａ），（２ｂ）間には、保護用シート（３）をエンドレスベルト状に掛け渡してあること、を特徴とする板体の平置き載置用トレイ。     A tray (T) for placing a sheet-like plate body (B) that causes bending in a flat position, the tray (T) including a rectangular outer frame (1) in plan view and Outer frame (1)
    A pair of frame pieces (1x) facing each other, and four or more middle rails (2) installed between (1x), the middle rails (2) are adjacent two It consists of two or more pairs of the middle beam pair (22), which is a pair of the middle beam (2a), (2b), and two middle beams (which are members of each middle beam pair (22)) A plate-mounted flat mounting tray characterized in that a protective sheet (3) is stretched between the 2a) and (2b) in an endless belt shape.
  2. 前記の中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）が、中空部（ｈｏ）を有する管構造をしていること、を特徴とする請求項１記載の板体の平置き載置用トレイ。 2. The plate according to claim 1, wherein each of the middle rails (2a) and (2b) constituting the middle rail pair (22) has a tube structure having a hollow portion (ho). Flat placement tray.
  3. 前記の中桟対（２２）を構成する個々の中桟（２ａ），（２ｂ）が、中桟（２）の幅方向の断面視で、１眼または多眼の中空部（ｈｏ）を有する横長の形状を有すること、を特徴とする請求項２記載の板体の平置き載置用トレイ。 Each of the middle rails (2a) and (2b) constituting the middle rail pair (22) has a single-lens or multi-eye hollow portion (ho) in a cross-sectional view in the width direction of the middle rail (2). 3. The plate placing flat tray according to claim 2, which has a horizontally long shape.
PCT/JP2011/079947 2010-12-27 2011-12-23 Tray for placing plate in flat manner WO2012090887A1 (en)

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Publication number Priority date Publication date Assignee Title
JP2014072274A (en) * 2012-09-28 2014-04-21 Dainippon Printing Co Ltd Substrate holding member
JP2015063328A (en) * 2013-09-25 2015-04-09 アキレス株式会社 Wafer protection film

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JPS643035A (en) * 1987-06-26 1989-01-06 Central Glass Co Ltd Formation of film
JPH0416736U (en) * 1990-05-30 1992-02-12
WO2000068118A1 (en) * 1999-05-06 2000-11-16 Tokyo Electron Limited Transfer system for lcd glass substrate
JP2003231524A (en) * 2002-02-05 2003-08-19 Zenkoku Coil Center Kogyo Kumiai Steel skid
JP2006182493A (en) * 2004-12-27 2006-07-13 Arsnova:Kk Carry-in/-out device for carried object member
JP2007200959A (en) * 2006-01-24 2007-08-09 Murata Mach Ltd Tray for sheet transfer
JP2010275006A (en) * 2009-06-01 2010-12-09 Yodogawa Hu-Tech Kk Protective member for protecting substrate and protecting method for substrate using this protective member
JP2010274926A (en) * 2009-05-26 2010-12-09 Toppan Printing Co Ltd Substrate transporting tray
JP2011246189A (en) * 2010-05-31 2011-12-08 Toppan Printing Co Ltd Substrate transporting tray

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Publication number Priority date Publication date Assignee Title
JPS643035A (en) * 1987-06-26 1989-01-06 Central Glass Co Ltd Formation of film
JPH0416736U (en) * 1990-05-30 1992-02-12
WO2000068118A1 (en) * 1999-05-06 2000-11-16 Tokyo Electron Limited Transfer system for lcd glass substrate
JP2003231524A (en) * 2002-02-05 2003-08-19 Zenkoku Coil Center Kogyo Kumiai Steel skid
JP2006182493A (en) * 2004-12-27 2006-07-13 Arsnova:Kk Carry-in/-out device for carried object member
JP2007200959A (en) * 2006-01-24 2007-08-09 Murata Mach Ltd Tray for sheet transfer
JP2010274926A (en) * 2009-05-26 2010-12-09 Toppan Printing Co Ltd Substrate transporting tray
JP2010275006A (en) * 2009-06-01 2010-12-09 Yodogawa Hu-Tech Kk Protective member for protecting substrate and protecting method for substrate using this protective member
JP2011246189A (en) * 2010-05-31 2011-12-08 Toppan Printing Co Ltd Substrate transporting tray

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014072274A (en) * 2012-09-28 2014-04-21 Dainippon Printing Co Ltd Substrate holding member
JP2015063328A (en) * 2013-09-25 2015-04-09 アキレス株式会社 Wafer protection film

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