WO2012089243A1 - Dispositif à scier à fil, procédé d'utilisation associé - Google Patents

Dispositif à scier à fil, procédé d'utilisation associé Download PDF

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Publication number
WO2012089243A1
WO2012089243A1 PCT/EP2010/070809 EP2010070809W WO2012089243A1 WO 2012089243 A1 WO2012089243 A1 WO 2012089243A1 EP 2010070809 W EP2010070809 W EP 2010070809W WO 2012089243 A1 WO2012089243 A1 WO 2012089243A1
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WO
WIPO (PCT)
Prior art keywords
wire
wire saw
saw device
grid
voltage
Prior art date
Application number
PCT/EP2010/070809
Other languages
English (en)
Inventor
Philippe Mottas
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to PCT/EP2010/070809 priority Critical patent/WO2012089243A1/fr
Publication of WO2012089243A1 publication Critical patent/WO2012089243A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade

Definitions

  • Embodiments of the present invention relate wire saw devices and methods of operating wire saw devices. More particularly, they relate to the operation of wire saw devices in a safe mode, wire saw devices with controllers for operation thereof, and computer program products for wire saw devices.
  • Wire saw devices exist for cutting blocks or bricks, thin slices, e.g. semiconductor wafers, from a piece of hard material such as silicon.
  • a stretched wire is fed from a spool and is both guided and tensioned by pulleys for guiding the wire in the cutting area.
  • the wire that is used for sawing is generally provided with an abrasive material.
  • the abrasive material can be provided as a slurry. This may be done shortly before the wire touches the material to be cut. Thereby, the abrasive is carried to the cutting position by the wire for cutting the material.
  • the abrasive can be provided on the wire with a coating.
  • diamond particles can be provided on a metal wire, e.g. with a coating, wherein the diamond particles are imbedded in the coating of the wire. Thereby, the abrasive is firmly connected with the wire.
  • a method of operating a wire saw device includes operating the wire saw device at a first set of predetermined parameters, the parameters including a first wire speed of a sawing wire, measuring values of one or more physical quantities being a physical quantity of the power supply grid providing power to the wire saw device or a DC converted voltage of the power supply grid, determining one or more deviations of respective values of the one or more physical quantities from desired values of the physical quantities, and operating the wire saw device at a second wire speed smaller than the first wire speed depending on the determined one or more deviations.
  • a computer program product having a program code, which is provided on a machine readable device or in a memory of a controller of a wire saw device, is provided.
  • the product conducts a method when operated on a computer or the controller of the wire saw device.
  • the method includes operating the wire saw device at a first set of predetermined parameters, the parameters including a first wire speed of a sawing wire, measuring values of one or more physical quantities being a physical quantity of the power supply grid providing power to the wire saw device or a DC converted voltage of the power supply grid, determining one or more deviations of respective values of the one or more physical quantities from desired values of the physical quantities, and operating the wire saw device at a second wire speed smaller than the first wire speed depending on the determined one or more deviations.
  • a wire saw apparatus having a wire for forming a wire web.
  • the wire saw device includes an electrical connector adapted to connect the wire saw device to a power supply grid, a measuring unit adapted to measure values of one or more physical quantities being a physical quantity of the power supply grid or a DC converted voltage of the power supply grid providing power to the wire saw device, and a control unit being operatively connected to the measuring unit and adapted for measuring one or more deviations of respective values of the one or more physical quantities from desired values of the physical quantities of the power supply grid, wherein the control unit is adapted to operate the wire saw device in a safe operation mode.
  • Embodiments are also directed at parts used for carrying out the disclosed operation method. Furthermore, embodiments according to the invention are also directed at methods by which the described wire saw device operates.
  • FIG. 1 shows a schematic view of a wire saw apparatus according to embodiments described herein;
  • FIG. 2 shows a schematic view of a portion of a yet further wire saw device according to embodiments described herein;
  • FIG. 3 shows a perspective view of a wire management unit
  • FIG. 4 shows a schematic view of a graph illustrating the voltage provided from a grid to a wire saw device
  • FIG. 5 shows a schematic view of a yet further wire saw device adapted for improved control of operational conditions
  • FIG. 6 shows a flow chart illustrating methods of operating a wire saw device according to embodiments described herein
  • FIG. 7 shows a flow chart illustrating yet further methods of operating a wire saw apparatus according to embodiments described herein;
  • FIG. 8 shows a schematic view of a yet further embodiment of a wire saw device adapted for improved control of operational conditions.
  • a wire web will be considered as the web formed by a single wire management unit. It should be understood that a wire web may contain more than one working area which is defined as an area in which a sawing process is performed. Thus, according to some embodiments described herein, a wire web can have multiple areas that are formed by a wire from different wire management units.
  • wire saw devices like croppers, i.e. a cropping wire saw devices, squarers, i.e., a squaring wire saw device, or wire saws, i.e. wafering wire saw devices
  • the wire speed that is, the speed of the wire moving through the wire saw device, the wire management unit and the material to be sawed, respectively, can be, for example, 10 m/s or higher.
  • the wire speed can be in a range of 8 to 30 m/s.
  • higher wire speeds of 25 m/s or 30 m/s can also be desirable and could be realized under certain conditions.
  • the spool rotates with a rotation speed of up to several thousands rotations per minute. For example, 1000 to 2000 rpm can be provided for unwinding the wire.
  • a first tank can be used for unused cooling fluid or fresh coolant, e.g. in the case where the wire saw device is operated with diamond wire, or can be used e.g. for unused (fresh) slurry, in the case where the wire saw device 100 is operated with a wire requiring additional abrasive.
  • a pump pumps the cooling fluid (or slurry, respectively) towards the desired position in the cutting area.
  • the used cooling fluid (or slurry) may flow back through a conduit and is pumped by a further pump into a second tank.
  • the wire is guided from the wire handling compartment to the wire cutting area and back with a wire speed of 10 m/s or higher, typically in a range of 15 to 20 m/s or even up to 25 m/s or 30 m/s.
  • the material to be cut is positioned on the support.
  • a support for the material to be sawed and the wire web can be moved relative to each other such that the cutting of the material can be conducted.
  • the web can remain in a fixed position and the support moves the material to be cut through the wire web while the wire is at a speed of about 10 m/s or higher.
  • this movement of the support would in FIG. 1 be perpendicular to the plane of the drawing.
  • the web generated by wire 10 is moved relative to the support to cut the wire through the material.
  • both the support and the wire web can be both moved with respect to each other.
  • the wire handling sections and wire saw devices described herein are adapted for thin wires having a diameter below about 400 ⁇ , such as diameters between about 80 ⁇ and about 500 ⁇ , more particularly between about 200 ⁇ and about 300 ⁇ .
  • embodiments may also have a wire diameter as low as, for example, 100 ⁇ or even 80 ⁇ .
  • the wire saw operation processes and wire saw devices described herein are adapted for coated wires, for example a wire having a nickel coating with diamond particles embedded therein.
  • Such wires may typically have a diameter of about 300 ⁇ to about 400 ⁇ , e.g. 310 ⁇ to 340 ⁇ .
  • a twisting of the wire might increase the risk of breaking of the wire or of damaging the coating, so that a twist-free operation and an operation without or with reduced vibration is advantageous.
  • the throughput may be increased by a factor of 2 or even more.
  • further parts of the wire saw may be adapted to the diamond wire.
  • mechanical parts, electrical parts and/or software may be adapted to the use of diamond wire.
  • Fig. 2 shows a schematic front view of a wire saw device 102 illustrating further embodiments.
  • the wire saw device 102 has a wire guide device including four wire guide cylinders 212, 214, 216, 218.
  • a wire management unit 230 provides a wire to the wire guide cylinders 212, 214, 216, 218.
  • the wire management unit 230 includes a supply spool 234 on which a wire reservoir, typically holding several hundred kilometers of wire, is provided. Fresh wire 235 is fed to the wire guide device from supply coil 234.
  • the wire management unit 230 includes a take-up spool 238 on which the used wire 245 is recoiled.
  • the wire is spirally wound about the wire guide cylinders and forms between two wire guide cylinders layers 200 with working areas 210 and 220 of parallel wires.
  • This layer is typically referred to as a wire web 200.
  • wire guide cylinders 212, 214, 216, 218 are covered with a layer of synthetic resin and are scored with grooves having very precise geometry and size. The distance between the grooves determines the distance Dl between two adjacent strings or lines of wire.
  • each wire guide cylinder 212, 214, 216, 218 is connected to a motor 222, 224, 226, 228 (shown in broken lines in Fig. 2). In the embodiment shown in Fig.
  • wire guide cylinders 212, 214, 216, 218 are directly driven by motors 222, 224, 226, 228. As shown in Fig. 2, each wire guide cylinder may be directly mounted to the motor shaft of the corresponding motor. In some embodiments one or more of the motors are water-cooled. During operation, e.g. during the sawing process, the motors 222, 224, 226, 228 drive the wire guide cylinders 212, 214, 216, 218 so that the wire guide cylinders rotate about their longitudinal axis. Thus, the wire in wire web 200 is transported into a wire transport direction 215, 225. In one embodiment, one of the motors, e.g.
  • motor 222 serves as a master motor whereas the remaining motors 224, 226, 228 serve as slave motors.
  • master motor 222 controls the operation of slave motors 224, 226, 228 so that slave motors 224, 226, 228 follow master motor 222.
  • synchronicity of operation of motors 222, 224, 226, 228 is improved and can be maintained during the sawing process.
  • the material to be sawed e.g. blocks 202, 204, 206, 208 of semiconductor material
  • a holder e.g. silicon ingots 202, 204, 206, 208 may be mounted to a support mechanism which is not shown in Fig. 2.
  • the blocks 202, 204, 206, 208 are lowered toward web 200.
  • the wire is transported in wire moving direction 215, 225 at a considerable speed, e.g. between 15 m/s and 20 m/s.
  • the moving wire abrades the semiconductor material and, thus, saws blocks 202, 204, 206, 208 into thin slices.
  • Such slices may for example be used as wafers in semiconductor industry.
  • the total length of wire in the wire web being in contact with the material to be sawed at a time may be referred to as the effective wire cutting length.
  • the effective wire cutting length is 700 m or above, particularly the effective wire cutting length may be more than 900 m.
  • the speed with which the material to be sawed is lowered into the wire web may be referred to as the material feed rate.
  • the material feed rate is in the range of 3 ⁇ /s to 12 ⁇ /s, typically about 5 ⁇ /s to 7 ⁇ /s.
  • wire web 200 includes a first working area 210 and a second working area 220.
  • the sawing process can be simultaneously carried out in both working areas 210, 220 so that efficiency of the sawing device 100 is improved.
  • each working area 210, 220 is sufficiently large enough such that two blocks 202, 204; 206, 208 of semiconductor material can be processed in each working area 210; 220.
  • the working length of web 200 in a working area 210, 220 along the wire moving direction 215, 225 is between 500 mm to 600 mm.
  • the wire saw device 102 can, according to some embodiments, which can be combined with other embodiments described herein, include a further wire management unit 240 which is similar to wire management unit 230 described above.
  • the second wire management unit 240 includes a wire supply spool 244 and a take-up spool 248.
  • Wire supply coil 244 provides fresh wire 238 and take-up spool 248 recoils used wire 248.
  • the first management unit 230 provides a first wire for forming a first wire web portion while the second wire management unit 240 provides a second wire for forming a second wire web portion.
  • the wire guide cylinders drive both the first and second web portions so that the wire speed is identical for the first and second web portion.
  • the wire transport directions of the first and second webs portions will be identical. Since second wire management unit 240 is mirrored with respect to first wire management unit 204, the wire feeding direction and wire recoil directions are reversed.
  • a composite web 200 is formed by the first and second web portions wherein the composite web is continuous in its properties so that there is no difference to a single web with respect to the cutting process.
  • composite web 200 is adapted for cutting the blocks of semiconductor material.
  • Embodiments including a composite web 200 formed from separate wire web portions are advantageous in that the wire length of one web in a working area 210, 220 is only half of the length compared to a single wire web. When using the same amount of wire in the wire reservoir, the wire length which can be utilized for sawing is doubled.
  • a wire saw device 300 is provided.
  • the wire management unit includes a spool 312 having a spool shaft 310 and a rotation axis.
  • the spool is carried by the spool shaft 310.
  • the spool shaft 310 is rotatably mounted to the main frame portion 301 for rotation around a spool axis. Thereby, the spool shaft 310 rotates the spool about the spool axis.
  • the spool shaft rotation may be driven by a spool motor.
  • the pulleys to be described below are generally freely rotatable.
  • wire 10 to be provided towards the wire web is carried in a wire carrying area of the spool 312.
  • a first pulley 320 is shown in FIG. 3.
  • a pulley has a groove adapted for guiding the wire.
  • a pulley generally can have a wire guiding position for guiding one wire in the pulley, i.e., in the pulley groove.
  • the first pulley 320 is adapted for receiving the wire 10 from the spool 312, in particular directly from the spool 312, and for then redirecting the wire.
  • the first pulley is rotatably mounted to a pulley carrying unit 324, so that the first pulley 320 rotates around the first pulley axis.
  • the pulley carrying unit 324 is connected to the wire saw device, more specifically to a main frame portion 301 of the wire saw device 300, so that the pulley carrying unit 324 is longitudinally movable along which a pulley motion track, i.e., the pulley motion track is defined as the region along the pulley carrying unit is movable.
  • a first pulley motion track for the first pulley is defined, i.e., a track along which the first pulley 320 is longitudinally movable.
  • the first pulley motion track may have a length of at least 90% of the length of a wire carrying area of the spool 312.
  • the wire carrying area is the lengthwise section of the spool 312 from which the wire may emerge from the spool, i.e., generally the length from flange to flange of the spool.
  • the pulley motion track may extend over the length of the wire carrying area, from flange to flange.
  • the pulley motion track of pulley 320 is essentially parallel to the spool axis.
  • the main frame portion 301 is rigidly connected or rigidly connectable to the wire saw device chassis. Thereby, the main frame portion is very robust and, e.g., a load on the main frame portion can be absorbed by the chassis.
  • the first pulley axis is oriented at an angle of essentially 90° with respect to the spool axis.
  • the angle is defined as a spatial angle, i.e., the angle of the axes in the plane spanned by the axes (if necessary, after a parallel shift of one of the axes so that the axes cross and hence span a plane).
  • the angle is defined as an absolute value, i.e., is always positive.
  • a pulley moving device is provided. The pulley moving device is adapted to cause the pulley carrying unit to move along the pulley motion track in a bi-directional mode.
  • a wire position detection device 326 can be provided.
  • the wire position detection device detects the wire position along the direction of the motion path (here: along the spool axis), more particularly it detects at which wire position the wire traverses a detection region of the wire position detection device 326. Thereby, the position at which the wire leaves the spool 312 or the wire carrying area can be obtained (if necessary by triangulation).
  • the wire management unit of Fig. 3 has a second pulley 330, which is adapted for receiving the wire from the first pulley 320, in particular directly from the first pulley, and for redirecting the wire.
  • the second pulley 330 is rotatably mounted to the main frame portion 301 for rotation around a second pulley axis.
  • further pulleys can be provided as well.
  • the wire can be redirected by the first pulley 320 by a first redirection angle of 90°, and by the second pulley 330 by a second redirection angle of 180°. Due to the large second redirection angle, a main portion of the wire tension, especially in the case of tension peaks, is absorbed by the second pulley which is firmly supported by the main frame portion 301.
  • the pulleys 320, 330 and 340 are arranged to guide the wire in predetermined planes.
  • the pulley carrying unit 324 can be provided as a retractable or telescopic bar.
  • the retractable or telescopic bar is longitudinally movable along a bar axis parallel to the spool axis.
  • the bar is longitudinally movably mounted to a wall portion of the main frame portion 301, more precisely of a wall portion of a recess in a housing wall.
  • the main frame portion 301 includes a mounting member, to which the second and third pulley 330, 340 are mounted.
  • the mounting member being part of the main frame portion, is rigidly connected to the chassis of the wire saw device. While other designs of the mounting member are possible, in the specific embodiment of Fig. 3 the mounting member is a bar, more specifically an L-shaped bar with a first leg extending to a side surface of the main frame portion (i.e., extending parallel to the x axis), and with a second leg forming an essentially right angle with the first leg and extending to a top surface of the main frame portion (i.e., extending parallel to the z axis).
  • first pulley 320 and the second pulley 330 are mounted on a common mounting member, especially on a one-piece mounting member.
  • a plurality of motors and drives are used to operate the wire saw device.
  • the wire guided cylinders are used to drive the web
  • the spools are used to unwind and wind the wire provided to the wire management unit
  • the material to be sawed and the wire web are moved with respect to each other at a feed rate for moving the wire through with the material to be cut.
  • a particularly critical operation condition during which wire breakage can occur is the stopping of the wire saw apparatus or device, that is stopping the motors and drives of the wire saw device during cutting, for example during an emergency stop.
  • a control unit of the wire saw device determines the need to stop the sawing process, for example as fast as possible.
  • re-starting a wire saw device or apparatus while the wire is within the material to be sawed might experience an increased risk of wire breakage because there is a tendency that the wire gets stuck within the material if the wire speed is not maintained until the sawing process is completed.
  • an emergency stop is generally beneficial as compared to an uncontrolled failure of one drive or motor, which might result in damage to the wire saw device or uncontrolled behavior of the wire that would in turn significantly increase downtime of the system. Even though there might be the option of slowing down the stopping process during an emergency stop, this does still include the risk of a wire breakage during re-start of the saw while the wire is located within the material to be cut.
  • the value of the grid voltage can be the nominal grid voltage or a stable average value, which is close to the nominal quick voltage.
  • the grid voltage will not be fully stable and small deviations from the nominal or average grid value can occur.
  • the curve 401 may drop below a threshold value, which is indicated by reference numeral 412.
  • the controller of a wire saw device might take these deviations as an indication of a requirement for an emergency stop.
  • Another scenario is shown in time period 406. Thereby, a comparably small deviation from the nominal value is experienced. The deviation is sufficiently large to be below the threshold of 412 and extends over a certain (longer) period of time.
  • the last scenario 408 of curve 400 shows a more significant voltage drop. Thereby the curve 401 drops below a second threshold value 414.
  • the voltage drop of the grid voltage and/or the current provided by the grid power supply can be used as an indication of abnormality.
  • all physical quantities of a power supply grid i.e. deviations in the voltage, the frequency, the power factor or the phase (real vs. reactive power) and existence of other overlapping harmonic frequencies on the AC voltage could trigger an event, which would normally result in an emergency stop, could initiate indication of abnormality.
  • an emergency stop has an increased probability of resulting in wire breakage.
  • the deviation of a value of a physical quantity of the grid from a nominal and/or average value does not directly result in an emergency stop.
  • determination of such the deviation results in the reduction of one or more of the velocities of motors and drives in the wire saw apparatus.
  • the reduction of the wire speed and the reduction of the material feed rate i.e. the velocity at which the material to be sawed and the wire web are moved with respect to each other, is initiated when a deviation of a physical quantity of the grid is determined.
  • the wire speed and the material feed rate are reduced by at least 30 rel.-%, for example by 40 rel.- to 70 rel.- , e.g., 50 rel.- .
  • the controller of the wire saw device evaluates, whether a further reduction of the sawing speed, which can be reduced to result in a stop of the wire saw device, is required or whether the abnormality of the one or more physical quantities of the power supply grid is not significant enough to bring the wire saw device to a full stop.
  • an evaluation of the physical quantities of the power supply grid can find that the values of the grid have been changed back to nominal conditions such that the wire saw device can be re- accelerated to normal operation conditions.
  • the improved method of operating a wire saw device can be described as follows.
  • the voltage is essentially not deviating from the predetermined grid value such that the wire saw device can operate under normal conditions.
  • a method of operating a wire saw apparatus or device can thus be conducted at a reduced speed on occurrence of these voltage drops.
  • these voltage drops are relatively short and the grid voltage increases back to an essentially nominal value after the voltage drops.
  • the wire saw device can be reduced in speed, when the voltage drop 422 is detected and can return to normal operation, that is full speed, after the voltage has increased again. Thereafter, when the voltage drop 424 is detected the speed of the wire saw device is again reduced and after the voltage drop 424, the wire saw device can return to normal operation.
  • the voltage drop 426 is also below the threshold 412. Accordingly, when the curve drops below the threshold, the wire saw is reduced in speed.
  • the wire saw operation process can decide after a determined time period that the wire saw has to change from the reduced speed mode to a full stop after a certain time. A similar reaction can result from the voltage drop 428 in time period 408.
  • the system goes into a preventive state or a safe mode of operation when a voltage drop or another deviation of a physical quantity of the electrical network, i.e. the grid power supply, does occur, for example, in a plant for photovoltaic wafer manufacturing.
  • a voltage drop or another deviation of a physical quantity of the electrical network i.e. the grid power supply
  • the wire saw device goes into a safe mode of operation, where the electrical components controlling the process such as the wire speed, the table speed, the slurry flow, heating means, cooling means or other electrical components, switch to the about 40% to 60% of the normal operation values.
  • the device can switch to 7 to 8 m/s wire speed and 150 to 250 microns/min table speed.
  • the wire saw device can continue operating for a few seconds in a safe mode during which the voltage drop might disappear.
  • a critical level for example about 30% to 70% of the nominal values, and/or the deviations do not occur over a long period of time, for examples more than 5 s, 10 s or 30 s
  • the equipment can continue operation. If the deviation of the value of the physical quantity of the grid continues to exist and/or reaches a critical level, the system can proceed with an emergency stop. If the physical quantity of the grid continues to a normal level, then the system can return to its normal operating mode.
  • the determination or evaluation of deviations can be conducted based on a threshold, based on a threshold and a time, or based on the product of threshold and time. In the latter case, a relatively small deviation could result in triggering an abnormality if it extends over a correspondingly longer time period.
  • the level, which results in an emergency stop can be a fixed level, which would result in a stop after an internal DC voltage, which has been converted from the AC power supply (the grid or network), or another quantity of the grid or network experiences a deviation from a nominal value, i.e., a desired value. For the emergency stop this can typically be a fixed deviation from a fixed value, e.g.
  • the threshold or another criterion for operating the wire saw device can be a voltage drop by e.g. 5% of a desired value, which can be a calculated value.
  • the safety mode value can be a floating desired value, which takes into account the grid stability over time. For example, if the average grid voltage slowly but continuously decreases over time, the threshold for the safety mode can be a drop by 3% to 10% of the continuously decreasing voltage. Particularly in regions with instable grids, this might result in an operation condition where the safety mode threshold has continuously decreased such that the safety mode threshold has dropped below the emergency stop threshold. In such a case, the wire saw device could conduct an emergency stop without a previous safety mode operation.
  • FIG. 5 illustrates embodiments of a wire saw device 500, which are adapted for the operation methods described herein.
  • the wire saw device 500 includes a housing 502 and an electrical cabinet 510.
  • the electrical cabinet 510 can be separated from the housing 502 or it can be fully or partly integrated into housing 502.
  • the power supply 503 is connected to the electrical cabinet 510.
  • the power supply can be an electrical connection in the plant or the fabrication system, which provides power to the wire saw device from an electrical network or a grid, such as a public electrical network, an internal grid, or the like. As indicated by that miniaturized copy of graph 400 next to the power supply 503, variations and deviations of physical quantities of the grid are fed into the wire saw device 500.
  • a measuring unit 512 for measuring values of physical quantities of the power supply is provided in the electrical cabinet 510.
  • the measuring unit 512 can determine variations and deviations of desire values of the physical quantity of the power supply. If a deviation is determined to be above a deviation, which has to be considered as normal, the measurement unit having an output for outputting a signal to an input of a control unit 514, sends a signal to the control unit 514.
  • the measuring unit and/or the control unit 514 can evaluate the deviations and correspondingly send a signal from the output of the control unit 514 to an input of the drives and motors 522 and 524, respectively, to reduce the operation speed thereof.
  • the measuring unit 512 could additionally or alternatively also measure the DC voltage provided within the wire saw device 500 based upon the grid power supply.
  • the measuring unit 512 and the control unit 514 may also be provided within the housing 502 of the wire saw device and does not necessarily need to be located in an electrical cabinet 510.
  • the measuring unit can be separated or integrated into an electrical converter, an electrical inverter, or the like.
  • FIG. 6 illustrates in further embodiments of operating a wire saw device.
  • determining deviations can be understood such that the value of the physical quantity deviates from the desired value, nominal value, calculated value and/or an average value to a certain degree. Thereby, such a deviation can be for example a drop by 3% to 15% or 5% to 10%, e.g. 5%, from that desired value of the physical quantity of the power supply grid.
  • the physical quantity can be at least one physical quantity selected from the group consisting of: a voltage (DC or AC), a frequency, a power factor, and harmonics of a frequency.
  • a voltage can be used as the physical quantity.
  • the voltage can be a grid voltage supplied to the wire saw device and/or an internal voltage within the wire saw device, such as the DC voltage.
  • the wire saw device operates in a safe operation mode in step 606.
  • the sawing speed of the wire saw device is reduced.
  • one or more of the velocities of drives or motors can be reduced to about 30% to 70%, e.g. 50%, of the respective speed during normal operation.
  • the velocities of drives or motors can be selected from the group consisting of: the wire speed, the material feed rate, the speed of a wire tracking system, and combinations thereof.
  • the controller can have a CPU and memory such that a self-learning process for tracking the wire position can be implemented.
  • a spool-pitch teach-in capability can be provided for some embodiments.
  • the wire saw device During operation, in a normal operation mode and in safe operation mode, the wire saw device continues to measure values of at least one physical quantity correlating to one or more physically quantities of the power supply grid. Accordingly, determination of a deviation of such a value from a nominal value is evaluated in step 608. If the previous deviation disappeared, the wire saw device can return to normal operation in step 602. Thereby, the drives and motors, which have been operating at reduced velocities during the safe operation mode, are accelerated to return to a normal operation sawing speed. If the deviation still exists but has not reached a critical value sufficiently high enough to trigger an emergency stop, the wire saw device continues to operate in the safe operation mode in step 606. If the deviation has further increased and/or has been existent for a certain time period, step 608 determines a yes and stops the wire saw device in step 610.
  • a critical deviation for triggering an emergency stop can be a deviation from a desired value by at least 25% to 75%, such as 20 % or 35%.
  • a deviation by, e.g., 20% of the desired value is to be understood as a deviation to 80% of the desired value.
  • a critical deviation triggering an emergency stop can be a deviation for triggering the safe operation mode in the event that this deviation occurs for a time of at least 3 seconds, 5 seconds, 15 seconds, and above.
  • Figure 7 illustrates yet further embodiments of operating a wire saw device.
  • the wire saw device After the wire saw device has started in step 702, it is, in step 704, operated under normal conditions. Thereby, values of one or more physical quantities of a power supply grid are measured. Typically a voltage drop of the grid voltage and/or of a resulting DC voltage in the wire saw device is measured. If in step 706 essentially no deviation from a predetermined voltage is detected, the wire saw device continues to operate under normal conditions. Thereby, according to some embodiments, which can be combined with other embodiments described herein, essentially no deviation is to be understood to include small deviations, which are common to a normal status of the power supply.
  • the wire saw device operates in a safe operation mode in step 708.
  • the sawing speed of the wire saw device is reduced.
  • one or more of the velocities of drives or motors can be reduced to about 30% to 70%, e.g. 50%, of the respective speed during normal operation.
  • the velocities of drives or motors can be selected from the group consisting of: the wire speed, the material feed rate, the speed of a wire tracking system, and combinations thereof.
  • step 710 determines a "no" and conducts an emergency stop of the wire saw device in step 712. After stopping, the system determines the system status in step 714 and can either restart the wire saw device in step 702 or can request maintenance if desired by continuing to step 716.
  • FIG. 8 illustrates yet further embodiments of a wire saw device 500, which are adapted for the operation methods described herein.
  • the wire saw device 500 includes a housing 502 and an electrical cabinet 510.
  • the power supply 503 is connected to the electrical cabinet 510.
  • the power supply can be an electrical connection in the plant or the fabrication system, which provides power to the wire saw device from an electrical network or a grid, such as a public electrical network, i.e. a public grid, an internal grid, or the like.
  • variations and deviations of physical quantities of the grid are fed into the wire saw device 500.
  • a measuring unit 512 for measuring values of physical quantities of the power supply is provided in the electrical cabinet 510.
  • a computer program product or software can be provided, which is adapted to operate a wire saw device according to any of the embodiments described herein, and/or which can conduct any of the improved methods according to any of the embodiments described herein, when run on a computer.
  • the measuring unit can have a signal output, the control unit has a signal input adapted for receiving a signal originating from the signal output of the measuring unit; the device can further include at least one drive or motor for operating a component of the wire saw device, wherein the at least one drive or motor has a signal input adapted for receiving a signal originating from the control unit and/or can further include a computer program product according to embodiments described herein.
  • the control unit and/or the measuring unit can be integrated in the at least one drive or motor.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

La présente invention a trait à un procédé permettant d'utiliser un dispositif à scier à fil. Le procédé inclut les étapes consistant à utiliser le dispositif à scier à fil suivant un premier ensemble de paramètres prédéterminés, lesdits paramètres incluant une première vitesse de fil d'un fil à scier, à mesurer les valeurs d'une ou de plusieurs quantités physiques constituant une quantité physique du réseau électrique qui fournit l'énergie au dispositif à scier à fil ou une tension continue convertie du réseau électrique, à déterminer un ou plusieurs écarts de valeurs respectives de la ou des quantités physiques à partir de valeurs souhaitées des quantités physiques, et à utiliser le dispositif à scier à fil suivant une seconde vitesse de fil inférieure à la première vitesse de fil en fonction du ou des écarts déterminés.
PCT/EP2010/070809 2010-12-28 2010-12-28 Dispositif à scier à fil, procédé d'utilisation associé WO2012089243A1 (fr)

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PCT/EP2010/070809 WO2012089243A1 (fr) 2010-12-28 2010-12-28 Dispositif à scier à fil, procédé d'utilisation associé

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PCT/EP2010/070809 WO2012089243A1 (fr) 2010-12-28 2010-12-28 Dispositif à scier à fil, procédé d'utilisation associé

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012221904A1 (de) * 2012-11-29 2014-06-05 Siltronic Ag Verfahren zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
CN108400106A (zh) * 2018-03-14 2018-08-14 义乌市满旺机械设备有限公司 一种新型半导体集成圆片制造设备
CN113050620A (zh) * 2019-12-26 2021-06-29 南京德朔实业有限公司 自驱动设备系统及其边界线断线检测方法
WO2023013509A1 (fr) * 2021-08-03 2023-02-09 コマツＮｔｃ株式会社 Dispositif et procédé de diagnostic d'anomalie de scie à fil

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Publication number Priority date Publication date Assignee Title
US2674238A (en) * 1953-02-10 1954-04-06 Joseph T Dessureau Abrasive cutting wire stone saw with automatic down feed
US5947798A (en) * 1995-06-22 1999-09-07 Shin-Etsu Handotai Co., Ltd. Wire saw cutting apparatus synchronizing workpiece feed speed with wire speed
EP1738886A1 (fr) * 2005-06-27 2007-01-03 HCT Shaping Systems S.A. Procédé de détection d'un dysfonctionnement dans un dispositif de sciage par fil et dispositif pour la mise en oeuvre dudit procédé
CH696757A5 (fr) * 2003-11-11 2007-11-30 Hct Shaping Systems Sa Procédé et dispositif de sciage par fil.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2674238A (en) * 1953-02-10 1954-04-06 Joseph T Dessureau Abrasive cutting wire stone saw with automatic down feed
US5947798A (en) * 1995-06-22 1999-09-07 Shin-Etsu Handotai Co., Ltd. Wire saw cutting apparatus synchronizing workpiece feed speed with wire speed
CH696757A5 (fr) * 2003-11-11 2007-11-30 Hct Shaping Systems Sa Procédé et dispositif de sciage par fil.
EP1738886A1 (fr) * 2005-06-27 2007-01-03 HCT Shaping Systems S.A. Procédé de détection d'un dysfonctionnement dans un dispositif de sciage par fil et dispositif pour la mise en oeuvre dudit procédé

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012221904A1 (de) * 2012-11-29 2014-06-05 Siltronic Ag Verfahren zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
US9427888B2 (en) 2012-11-29 2016-08-30 Siltronic Ag Method for resuming a wire sawing process of a workpiece after an unplanned interruption
DE102012221904B4 (de) * 2012-11-29 2018-05-30 Siltronic Ag Verfahren zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
CN108400106A (zh) * 2018-03-14 2018-08-14 义乌市满旺机械设备有限公司 一种新型半导体集成圆片制造设备
CN113050620A (zh) * 2019-12-26 2021-06-29 南京德朔实业有限公司 自驱动设备系统及其边界线断线检测方法
WO2023013509A1 (fr) * 2021-08-03 2023-02-09 コマツＮｔｃ株式会社 Dispositif et procédé de diagnostic d'anomalie de scie à fil

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