WO2012086009A1 - モード制御導波路型レーザ装置 - Google Patents
モード制御導波路型レーザ装置 Download PDFInfo
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- WO2012086009A1 WO2012086009A1 PCT/JP2010/072999 JP2010072999W WO2012086009A1 WO 2012086009 A1 WO2012086009 A1 WO 2012086009A1 JP 2010072999 W JP2010072999 W JP 2010072999W WO 2012086009 A1 WO2012086009 A1 WO 2012086009A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08072—Thermal lensing or thermally induced birefringence; Compensation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/042—Arrangements for thermal management for solid state lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
- H01S3/0635—Thin film lasers in which light propagates in the plane of the thin film provided with a periodic structure, e.g. using distributed feed-back, grating couplers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
Definitions
- the present invention relates to a mode-controlled waveguide laser device used in a high-power laser device.
- FIG. 9 is a side view showing a configuration of a conventional mode control waveguide type laser device.
- 10 is a sectional view of the section aa ′ in FIG. 9 as seen from the laser emission side
- FIG. 11 is a sectional view of the section bb ′ in FIG. 9 as seen from the top.
- a conventional mode-controlled waveguide laser device includes an excitation semiconductor laser 101 that emits excitation light, a laser medium 105 that emits laser light, and a cladding that is bonded to the lower surface of the laser medium 105. 104 and a heat sink 102 bonded to the lower surface of the clad 104 by a bonding agent 103.
- the laser medium 105 has a flat plate shape, and has a waveguide structure in the thickness direction (y-axis) of the cross section perpendicular to the optical axis 106 (z-axis) representing the laser oscillation direction. It has a periodic lens effect in a direction (x axis) perpendicular to the direction.
- An end surface 105a on the incident side of the laser medium 105 is provided with a total reflection film that reflects the laser light, and an antireflection film that reflects part of the laser light and transmits part of the end surface 105b on the emission side. It has been subjected.
- These total reflection film and partial reflection film are formed by laminating dielectric thin films, for example.
- the heat sink 102 has an extended tooth structure parallel to the optical axis 106 (z axis).
- the excitation light incident from the end face 105 a of the laser medium 105 is absorbed by the laser medium 105 and generates a gain for the laser light inside the laser medium 105. Due to the gain generated in the laser medium 105, the laser light oscillates between the end face 105a and the end face 105b perpendicular to the optical axis 106 of the laser medium 105, and a part of the oscillation light passes from the end face 105b to the laser resonator. Output to the outside.
- the excitation region in the waveguide width direction (x-axis direction) of the excitation light is determined according to the determined power scale of the excitation power, and the mutual interval between the teeth of the extended tooth structure of the heat sink 102 is To depend on.
- the excitation region in the waveguide width direction of the excitation light is determined according to the excitation power corresponding to the laser output required for the laser device, and each tooth of the heat sink depends on the excitation region. Therefore, the control range of the focal length of the generated thermal lens is limited.
- the present invention has been made in order to solve the above-described problems, and heat is exhausted over the entire area where heat generation is large, and a thermal lens is generated in the area where heat generation is small, thereby reducing the focal length of the generated thermal lens. It is an object of the present invention to obtain a mode-controlled waveguide type laser device with an extended control range and improved reliability.
- a mode-controlled waveguide laser device has a flat plate shape, a waveguide structure in the thickness direction of a cross section perpendicular to the optical axis, and a laser medium that generates a gain for laser light, and a laser A cladding that is bonded to one surface of the medium and a heat sink that is bonded to one surface of the laser medium via the cladding; the laser medium generates a lens effect by a refractive index distribution; Is a mode-controlled waveguide laser device that oscillates in a waveguide mode and oscillates in a spatial mode due to a lens effect in a direction perpendicular to the optical axis and thickness direction. A desired temperature distribution is generated in the medium to generate a refractive index distribution in the laser medium.
- the refractive index distribution generated in the laser medium and the lens effect by adjusting the bonding area between the clad and the heat sink, and in a place where heat generation is large, the entire surface is exhausted to lower the temperature and generate heat.
- the reliability can be improved by generating a thermal lens in a small area.
- Example 1 is a side view which shows the structure of the mode control waveguide type laser apparatus which concerns on Embodiment 1 of this invention.
- Example 1 FIG. 2 is a cross-sectional view of the a-a ′ cross section in FIG. 1 viewed from the laser emission side.
- Example 1 FIG. 2 is a cross-sectional view of a b-b ′ cross section in FIG. 1 as viewed from above.
- Example 1 It is explanatory drawing which shows the example of a calculation result of the temperature distribution in a laser medium at the time of excitation at the time of using the mode control waveguide type laser apparatus of FIG.
- Example 1 It is explanatory drawing which shows the effect at the time of using the mode control waveguide type laser apparatus of FIG.
- FIG. 5 is a cross-sectional view of a mode-controlled waveguide laser device according to Embodiment 2 of the present invention as viewed from the top along the b-b ′ cross section in FIG. 1.
- FIG. 5 is a cross-sectional view of a mode-controlled waveguide laser device according to a third embodiment of the present invention viewed from the top along the b-b ′ cross section in FIG. 1.
- Example 3 is a cross-sectional view of a mode-controlled waveguide laser device according to a fourth embodiment of the present invention as viewed from the top along the b-b ′ cross section in FIG. 1.
- It is a side view which shows the structure of the conventional mode control waveguide type laser apparatus.
- FIG. 10 is a cross-sectional view of the a-a ′ cross section in FIG. 9 viewed from the laser emission side.
- FIG. 10 is a cross-sectional view of the b-b ′ cross section in FIG. 9 as viewed from above.
- FIG. 1 to 3 are diagrams showing the configuration of a mode-controlled waveguide laser device according to Embodiment 1 of the present invention.
- FIG. 1 is a side view
- FIG. 2 is a cross-sectional view taken along line aa ′ of FIG.
- FIG. 3 is a cross-sectional view of the bb ′ cross section of FIG. 1 viewed from above.
- a mode-controlled waveguide laser device includes an excitation light incident means 1, a laser medium 5 that emits laser light when the excitation light is incident, and a laser medium.
- 5 is provided with a clad 4 bonded to the lower surface of 5 and a heat sink 2 bonded to the lower surface of the clad 4 with a bonding agent 3.
- the laser medium 5 is formed on a flat plate and has a waveguide structure in the thickness direction of a cross section perpendicular to the optical axis 6 representing the laser oscillation direction or the signal light traveling direction.
- the shape of the end faces 5 a and 5 b perpendicular to the optical axis 6 is, for example, rectangular, and typically has a thickness in the y-axis direction of several ⁇ m to several tens of ⁇ m and a width in the x-axis direction. It has a size of several hundred ⁇ m to several mm.
- a coordinate system is used in which the long side direction of the rectangular end faces 5a and 5b is the x axis, the short side direction is the y axis, and the optical axis 6 direction is the z axis.
- the end surfaces 5a and 5b of the laser medium 5 do not necessarily have to be rectangular.
- the short sides of the end surfaces 5a and 5b may have an arc shape.
- the clad 4 has a refractive index smaller than that of the laser medium 5 and is bonded to one surface parallel to the xz plane of the laser medium 5.
- the clad 4 is configured by, for example, depositing a film made of an optical material as a raw material, or optically bonding the optical material to the laser medium 5 by optical contact, diffusion bonding, or the like. Further, as the clad 4, an optical adhesive having a refractive index smaller than that of the laser medium 5 may be used as the clad 4.
- the heat sink 2 is made of a material having high thermal conductivity, and has a comb shape (see the hatched portion in FIG. 3) in a part of a cross section (yz plane) parallel to the optical axis 6.
- the comb-shaped end face of the heat sink 2 is bonded to the clad 4 via the bonding agent 3.
- the heat sink 2 has end surfaces 2a and 2b corresponding to the incident side end surface 5a and the emission side end surface 5b of the laser medium 5, respectively.
- the bonding agent 3 can be realized by a metal solder, an optical adhesive, a heat conductive adhesive or the like, and exhausts heat generated in the laser medium 5 to the heat sink 2 via the clad 4.
- the lower surface of the clad 4 may be subjected to metallization (attaching a metal film) in order to increase the bonding strength with the bonding agent 3.
- the heat sink 2 is made of an optical material, the clad 4 and the heat sink 2 may be directly bonded by, for example, optical contact or diffusion bonding.
- the excitation light incident means 1 is made of, for example, a semiconductor laser and is disposed close to the end face 5 a of the laser medium 5 or, if necessary, coupled optics between the excitation light emission end face and the end face 5 a of the laser medium 5.
- a system (not shown) is inserted and arranged. Further, a cooling heat sink (not shown) is joined to the excitation light incident means 1 as necessary.
- the excitation light emitted from the excitation light incident means 1 enters the xz plane direction from the end surface 5 a of the laser medium 5 and is absorbed by the laser medium 5.
- the pumping light incident means 1 is a semiconductor laser.
- a semiconductor laser is not necessarily used as long as the laser medium 5 can have a gain.
- the end face 5a of the laser medium 5 is provided with a total reflection film that reflects laser light, and the end face 5b is provided with a partial reflection film that transmits part of the laser light.
- These total reflection film and partial reflection film are formed by laminating dielectric thin films, for example.
- the total reflection film on the end face 5a is an optical film that transmits the excitation light and reflects the laser light. .
- a general solid laser material can be used as the laser medium 5.
- Nd YAG, Nd: YLF, Nd: Glass
- the upper surface of the laser medium 5 is in contact with air, but a second cladding (not shown) having a smaller refractive index than the laser medium 5 with respect to the upper surface of the laser medium 5 is used. ) May be joined.
- the propagation mode in the y-axis direction of the laser medium 5 can be arbitrarily set by adjusting the refractive index difference between the laser medium 5 and the second clad. Can be adjusted. Further, if the thickness of the second cladding in the y-axis direction is set large, the rigidity of the laser medium 5 can be increased without affecting the waveguide mode of the laser medium 5.
- a substrate (not shown) may be bonded to the upper surface of the laser medium 5 via a second bonding agent having a smaller refractive index than the laser medium 5.
- a second bonding agent for example, an optical adhesive is used
- the substrate for example, an optical material or metal is used.
- the y axis direction of the laser medium 5 is adjusted.
- the propagation mode can be arbitrarily adjusted. If the thickness of the substrate in the y-axis direction is set large, the rigidity of the laser medium 5 can be increased without affecting the waveguide mode of the laser medium 5.
- the second bonding agent optical adhesive
- the second bonding agent has lower rigidity than the crystal or glass material, and deforms according to the expansion of the laser medium 5.
- the stress applied to the laser medium 5 can be relaxed.
- an optical film (not shown) having a refractive index smaller than that of the laser medium 5 is applied to the upper surface of the laser medium 5, and the optical film surface is almost the same as the laser medium 5 by optical contact or diffusion bonding. You may join the board
- substrate (not shown) which has a thermal expansion coefficient.
- the propagation mode in the y-axis direction of the laser medium 5 is arbitrarily adjusted by adjusting the refractive index difference between the laser medium 5 and the optical film. can do. If the thickness of the substrate in the y-axis direction is set large, the rigidity of the laser medium 5 can be increased without affecting the waveguide mode of the laser medium 5.
- the laser medium 5 and the substrate have substantially the same thermal expansion coefficient, when thermal expansion occurs due to the temperature increase of the laser medium 5, the substrate also expands at substantially the same rate.
- the optical film between the laser medium 5 and the substrate has a lower density and lower rigidity than a crystal or glass material. Therefore, the optical film is deformed in accordance with the expansion of the substrate and relaxes the stress applied to the laser medium 5. It is possible. Further, when the optical film and the substrate are bonded, it is possible to increase the bonding strength by selecting an optical film material and a substrate that are easy to optically bond.
- a desired temperature distribution is generated in the laser medium 5 to generate a refractive index distribution in the laser medium 5.
- a method for generating a lens effect from this refractive index distribution will be described.
- FIG. 3 focusing on the heat sink 2, in order to clarify the difference between the bonding region bonded to the cladding 4 via the bonding agent 3 and the region not bonded to the cladding 4, the cladding 4 is bonded via the bonding agent 3.
- the joining region (comb shape) of the heat sink 2 to be joined with is shown by hatching.
- the total length of the laser medium 5 in the direction of the optical axis 6 (z-axis) is Lo
- the width of the comb structure portion installed in a part of the optical axis direction is A.
- the joint part (adjustment side for forming the width A) of the comb structure is provided on the end face 2 b, that is, the emission side of the optical axis 6.
- the optical material such as the laser medium 5 changes in refractive index almost in proportion to the temperature difference, and a material having a positive refractive index change dn / dT per unit temperature is used as the optical material of the laser medium 5.
- the refractive index at the center of the two comb teeth having a high temperature increases, and the refractive index decreases as it approaches the comb tooth portion.
- a thermal lens effect is generated in the x-axis direction with the center portion of the two comb teeth as the optical axis.
- the refractive index distribution is opposite to the temperature distribution, and the portion of the portion bonded to the comb teeth is used.
- the refractive index is large, and the refractive index at the center of the two comb teeth is small.
- a thermal lens effect is generated with the portion bonded to the comb teeth as the optical axis. Since the same effect can be obtained regardless of whether dn / dT is positive or negative, the following description will be made using the case where dn / dT is positive unless otherwise specified.
- the temperature distribution generated in the laser medium 5 can be changed by changing to the case (when the heat sink 2 has a comb structure in the entire optical axis direction). Therefore, the thermal lens effect generated in the laser medium 5 can be adjusted.
- the focal length of the thermal lens can be adjusted by changing the width A of the comb structure portion.
- the comb structure can be installed on the end surface 5a side on the incident side.
- the temperature rise in the laser medium 5 is highest on the end face 5a side, and the temperature distribution on the end face 5a side is most prominent.
- the thermal lens focal length can be most easily adjusted by installing a joint having a comb structure on the side end face 5a side.
- the comb structure may be installed on the end face 5b side on the output side, and when the joint portion having the comb structure is arranged on the end face 5b side, Since the joining surface area with the heat sink 2 is increased on the incident side end face 5a side, the efficiency of exhaust heat is improved. As a result, the thermal lens effect generated in the laser medium 5 can be adjusted, and the thermal lens effect can be suppressed.
- the optical system in the direction of the optical axis 6 (z axis) is asymmetrical at both end faces 5a, 5b of the laser medium 5, and the laser medium 5 It is obvious that the same effect can be obtained by installing the comb structure portion when the temperature distribution in the inside is distributed in the optical axis direction. Further, the comb structure in the optical axis direction in the laser medium 5 may be provided on both end faces 5a and 5b of the laser medium. With this configuration, the thermal lens focal length can be adjusted even when a temperature distribution symmetrical in the laser optical axis direction in the laser medium 5 occurs, such as side excitation.
- gap between the comb teeth of the heat sink 2 is normally air, you may fill with the heat insulating material which has a thermal conductivity smaller than the heat sink 2.
- FIG. In this case, the refractive index distribution in the laser medium 5 is generated by the temperature distribution generated by the difference in thermal conductivity between the tip of the comb teeth and the thermal insulating material.
- the front surface on the exhaust heat side of the clad 4 is bonded to the bonding agent 3 and the heat generated in the laser medium 5 is exhausted, so that the temperature rise of the laser medium 5 is suppressed. be able to.
- the rigidity of the heat sink 2 can be increased as compared with the case where the clad 4 is fixed only by the comb-shaped tip.
- the mode-controlled waveguide laser device has a flat plate shape and is guided in the thickness direction of the cross section perpendicular to the optical axis 6.
- a laser medium 5 having a waveguide structure and generating a gain for laser light; a clad 4 joined to one surface of the laser medium 5; a heat sink 2 joined to one surface side of the laser medium 5 via the clad 4;
- the laser medium 5 generates a lens effect based on the refractive index distribution, and the laser light oscillates in a waveguide mode in the thickness direction, and also due to the lens effect in a direction perpendicular to the optical axis 6 and the thickness direction. Oscillates in spatial mode.
- a desired temperature distribution is generated in the laser medium 5 according to the bonding area between the clad 4 and the heat sink 2 to generate a refractive index distribution in the laser medium 5.
- the heat sink 2 includes a joint portion (hatched portion in FIG. 3) having a comb structure parallel to the optical axis 6 in a part of the optical axis 6 of the laser light, and adjusts the range of the comb structure.
- a desired temperature distribution is generated in the laser medium to generate a refractive index distribution in the laser medium.
- the junction area between the clad 4 and the heat sink 2 can be adjusted to adjust the refractive index distribution and the lens effect generated in the laser medium 5.
- a mode-controlled waveguide laser device with improved reliability can be realized.
- the joint portion (open portion on the adjustment side) having a comb structure is installed on the joint surface excluding the incident surface on which the laser beam of the optical axis 6 of the laser medium 5 is incident. That is, the joint portion having the comb structure is disposed on the end surface 2b side, that is, the joint surface of the emission surface (end surface 5b) from which the laser beam of the optical axis 6 of the laser medium 5 is emitted, and does not constitute a comb tooth. Is disposed on the end surface 2a side, that is, on the joint surface of the incident surface (end surface 5a) of the laser medium 5.
- Example 2 In the first embodiment (FIGS. 1 to 5), in order to adjust the thermal lens generated in the laser medium 5, a comb structure is formed on a part of the heat sink 2 in the direction of the optical axis 6 (z axis). The temperature distribution in the waveguide is adjusted by adjusting the width A of the comb structure portion. However, as shown in FIG. 6, even if a plurality of comb structure portions in the optical axis direction of the heat sink 2 are provided intermittently, Good.
- FIG. 6 is a cross-sectional view showing the shape of the heat sink 2 of the mode control waveguide type laser apparatus according to Embodiment 2 of the present invention, and shows the cross section bb ′ of FIG. In this case, the entire configuration is as shown in FIG. 1 except that the comb shape of the heat sink 2 is different from that described above.
- a plurality of comb structures in the optical axis direction of the heat sink 2 are intermittently arranged, and the focal length of the thermal lens generated in the laser medium 5 can be adjusted by adjusting the width of each comb structure portion. It is. Also, the focal length of the thermal lens can be adjusted by adjusting the number of comb structures having a certain width. In FIG. 6, the width of each comb structure portion is constant, but each width is not necessarily uniform.
- the joint portion having the comb structure is the laser beam on the optical axis 6 of the laser medium 5.
- the portions where the and are not joined are alternately distributed. This increases the heat conduction in the optical axis direction.
- the heat distribution generated in the y-axis direction can be averaged in the direction parallel to the optical axis 6 and the generation of thermal lenses in the y-axis direction is reduced. can do.
- the gap between the comb teeth of the heat sink 2 is usually air, but may be filled with a heat insulating material having a lower thermal conductivity than the heat sink 2.
- the refractive index distribution in the laser medium 5 is generated by a temperature distribution generated by a difference in thermal conductivity between the tip of the comb teeth and the thermal insulating material.
- Example 3 In laser oscillation in the x-axis direction in the laser resonator, the width (x-axis) of the laser medium 5 is Since it is sufficiently larger than the wavelength of the laser beam, mode selection by the waveguide in the y-axis is not performed, and a spatial mode laser resonator is obtained. Therefore, as shown in FIG. 7, a plurality of comb teeth bonded to the clad 4 via the bonding agent 3 are provided in a direction parallel to the optical axis 6 of the heat sink 2, and two in the x-axis direction in the laser medium 5 are provided. A plurality of oscillation modes that are periodic in the x-axis direction may be generated by periodically generating a thermal lens effect having the center of the comb teeth as the optical axis.
- FIG. 7 is a cross-sectional view showing the shape of the heat sink 2 of the mode control waveguide type laser apparatus according to Embodiment 3 of the present invention, and shows the cross section bb ′ of FIG. In this case, the entire configuration is as shown in FIG. 1 except that the comb shape of the heat sink 2 is different from that described above.
- a desired temperature distribution is generated in the laser medium 5 to generate a refractive index distribution in the laser medium 5, and a plurality of lenses are arranged in the x-axis direction based on this refractive index distribution.
- a lens effect that is an effect is generated, and a mode-controlled waveguide laser device that oscillates in a waveguide mode in the y-axis direction and oscillates in a spatial mode by the lens effect in the x-axis direction is realized.
- the width A (see FIG. 3) of the comb structure in the direction of the optical axis 6 (z-axis) of the heat sink 2 is determined when the comb structure does not exist in the optical axis direction (when the portions of the comb structures are in contact with each other).
- the focal length of the thermal medium of the laser medium 5 is adjusted by changing until the entire optical axis direction has a comb structure, or by adjusting the number of comb structure portions existing in the optical axis direction. be able to.
- the user medium 2 has the optical axis 6 and the thickness direction due to the refractive index distribution.
- a lens effect that is an effect of arranging a plurality of lenses in a direction perpendicular to (x-axis) is generated, and the laser light oscillates in a waveguide mode in the thickness direction (y-axis), and the optical axis 6 and thickness In the direction perpendicular to the direction (x-axis), a plurality of oscillations occur in the spatial mode due to the lens effect.
- high output power can be achieved by using a broad area LD having a wide light emitting region that is easy to achieve high output, and an LD array in which emitters are arranged in a row, thereby increasing the output power of excitation light. Even in the mode control waveguide type laser apparatus capable of outputting the laser beam, the thermal lens generated in the laser medium 5 can be controlled.
- the gap between the comb teeth of the heat sink 2 is usually air, but may be filled with a heat insulating material having a lower thermal conductivity than the heat sink 2.
- the refractive index distribution in the laser medium 5 is generated by a temperature distribution generated by a difference in thermal conductivity between the tip of the comb teeth and the thermal insulating material.
- Example 4 in order to adjust the thermal lens focal length generated in the laser medium 5, a plurality of lens effects are generated in the x-axis direction, and in the waveguide mode in the y-axis direction.
- a comb structure is provided in the optical axis direction of the heat sink 2, and the width A of the comb structure part or the number of comb structure parts existing is adjusted.
- the temperature distribution in the waveguide is adjusted.
- a plurality of comb structures in the direction of the optical axis (z-axis) of the heat sink 2 may be provided intermittently.
- FIG. 8 is a cross-sectional view showing the shape of the heat sink 2 of the mode control waveguide type laser apparatus according to Embodiment 4 of the present invention, and shows the cross section bb ′ of FIG. In this case, the entire configuration is as shown in FIG. 1 except that the comb shape of the heat sink 2 is different from that described above.
- a refractive index distribution is generated in the laser medium 5, and a lens effect that is an effect of arranging a plurality of lenses in the x-axis direction is generated by the refractive index distribution, and oscillation is performed in a waveguide mode in the y-axis direction.
- the above problem can be solved even in an apparatus that oscillates in a spatial mode due to the lens effect.
- a plurality of comb structure portions in the direction of the optical axis (z axis) of the heat sink 2 are intermittently arranged, and the width A (see FIG. 3) of the comb structure portion is adjusted to adjust the inside of the laser medium 5. It is possible to adjust the focal length of the thermal lens generated in the above, and it is also possible to adjust the focal length of the thermal lens generated in the laser medium 5 by adjusting the number of comb structures having a certain width. In addition, the width A of each comb structure part does not necessarily need to be constant.
- the heat sink 2 and the clad 4 are bonded via the bonding agent 3 in the optical axis direction.
- heat conduction in the direction parallel to the optical axis 6 is increased.
- y The heat distribution generated in the axial direction can be averaged in the direction parallel to the optical axis 6, and the thermal lens in the y-axis direction can be reduced.
- the gap between the comb teeth of the heat sink 2 is usually air, but may be filled with a heat insulating material having a lower thermal conductivity than the heat sink 2.
- the refractive index distribution in the laser medium 5 is generated by a temperature distribution generated by a difference in thermal conductivity between the tip of the comb teeth and the thermal insulating material.
- the entire surface is exhausted on the incident side where heat generation is large, and the thermal lens is adjusted and generated on the emission side where heat generation is small. Therefore, as shown in FIGS.
- the joint portion having the structure is disposed on the joint surface of the emission surface (end surface 5b) from which the laser beam of the optical axis 6 of the laser medium 5 is emitted. If priority is given to the above, a joint portion having a comb structure may be provided on the joint surface of the incident-side end surface 5a having a strong temperature distribution.
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Abstract
Description
図9は従来のモード制御導波路型レーザ装置の構成を示す側面図である。また、図10は図9内のa-a’断面をレーザ出射側から見た断面図、図11は図9内のb-b’断面を上面から見た断面図である。
また、図10、図11のように、ヒートシンク102は、光軸106(z軸)に対して平行な延長歯構造を有する。
レーザ媒質105内部で発生した利得により、レーザ光は、レーザ媒質105の光軸106に垂直な端面105aと端面105bとの間でレーザ発振し、発振光の一部が端面105bからレーザ共振器の外部に出力される。
また、決定した励起パワーのパワースケールにしたがって、励起光の導波路幅方向(x軸方向)の励起領域が決定し、さらに、ヒートシンク102の延長歯構造の各歯の相互間隔は、励起領域に依存して決定する。
以下、図面を参照しながら、この発明を実施するための最良の形態について説明する。
図1~図3はこの発明の実施の形態1に係るモード制御導波路型レーザ装置の構成を示す図であり、図1は側面図、図2は図1のa-a’断面を光軸方向から見た断面図、図3は図1のb-b’断面を上面から見た断面図である。
レーザ媒質5は、平板上をなし、レーザ発振方向または信号光進行方向を表す光軸6に対して垂直な断面の厚さ方向に導波路構造を有する。
なお、レーザ媒質5の端面5a、5bは、必ずしも長方形でなくてもよく、たとえば、端面5a、5bの短辺側は円弧形状であっていてもよい。
クラッド4は、たとえば、光学材料を原料とした膜を蒸着するか、または、オプティカルコンタクトや拡散接合などで光学材料をレーザ媒質5と光学的に接合することにより構成される。また、クラッド4として、レーザ媒質5に比べて小さな屈折率を有する光学接着剤を用いてもよい。
また、ヒートシンク2は、レーザ媒質5の入射側の端面5aおよび出射側の端面5bにそれぞれ対応した端面2a、2bを有する。
なお、クラッド4の下面は、接合剤3との接合の強度を上げるために、メタライズ(金属膜を付着)を施してもよい。
また、ヒートシンク2を光学材料で構成した場合には、クラッド4とヒートシンク2とを、たとえば、オプティカルコンタクトや拡散接合などにより直接接合してもよい。
また、励起光入射手段1には、必要に応じて、冷却用のヒートシンク(図示せず)が接合される。
なお、ここでは一例として、励起光入射手段1を半導体レーザとしたが、レーザ媒質5に利得を持たせることが可能な構成であれば、必ずしも半導体レーザを用いなくてもよい。
なお、励起光入射手段1から出射される励起光を、レーザ媒質5の端面5aから入射する場合には、端面5aの全反射膜は、励起光を透過しレーザ光を反射する光学膜となる。
また、第2のクラッドのy軸方向の厚さを大きく設定すれば、レーザ媒質5の導波モードに影響を与えずに、レーザ媒質5の剛性を高くすることが可能である。
第2の接合剤としては、たとえば光学接着剤が用いられ、基板としては、たとえば光学材料または金属などが用いられる。
また、基板のy軸方向の厚さを大きく設定すれば、レーザ媒質5の導波モードに影響を与えずに、レーザ媒質5の剛性を高くすることが可能である。
また、基板のy軸方向の厚さを大きく設定すれば、レーザ媒質5の導波モードに影響を与えずに、レーザ媒質5の剛性を高くすることが可能である。
その際、レーザ媒質5と基板との間の光学膜は、結晶やガラス材料に比べて密度が低く、剛性が低いので、基板の膨張に合わせて変形され、レーザ媒質5に与える応力を緩和することが可能である。
また、光学膜と基板とを接合する際に、光学接合が容易な光学膜材料および基板を選択することにより、接合の強度を高めることが可能である。
また、図3に示すように、レーザ媒質5の光軸6(z軸)の方向の全長をLoとし、光軸方向の一部に設置された櫛構造部分の幅をAとする。
この場合、櫛構造の接合部(幅Aを形成する調整側)は、端面2bすなわち光軸6の出射側に設置されている。
この結果、x軸方向には、2つの櫛歯の中心部を光軸とした熱レンズ効果が発生する。
この結果、x軸方向には、櫛歯に接合された部分を光軸とした熱レンズ効果が発生する。なお、dn/dTの正負によらず、同様の効果が得られるので、以後、特に明記しない限り、dn/dTが正の場合を用いて説明する。
したがって、レーザ媒質5内に発生する熱レンズ効果を調整することができる。
また、図5はDiopter[1/m](熱レンズ焦点距離の逆数)の変化を示ており、A/Lo=0からA/Lo=1まで櫛構造部分の幅Aを変化させた場合のDiopterの変化を示している。
また、A/Lo=1のときには、レーザ媒質5内で発生する熱レンズ焦点距離は74.3mm(Diopter=13.46[1/m])となる。
すなわち、幅Aを「0」から「1」まで変化させることにより、熱レンズ焦点距離を「2.9m~74.3mm」の範囲で任意に調整することが可能となる。
このように、レーザ媒質5の端面5a側から励起を行う端面励起の場合、レーザ媒質5内の温度上昇は、端面5a側が最も高くなり、端面5a側の温度分布が最も顕著となるので、入射側の端面5a側に櫛構造を有する接合部を設置することにより、最も容易に熱レンズ焦点距離の調整が可能となる。
この結果、レーザ媒質5内で発生する熱レンズ効果を調整することができ、且つ、熱レンズ効果を抑制することができる。
また、レーザ媒質5内の光軸方向の櫛構造は、レーザ媒質の端面5a、5b両面に設置してもよい。
このように構成することによって、側面励起など、レーザ媒質5内のレーザ光軸方向に対称な温度分布が発生する場合でも、熱レンズ焦点距離の調整が可能となる。
このように熱絶縁材料を埋めることにより、クラッド4の排熱側の前面が接合剤3に接合されて、レーザ媒質5で発生した熱を排熱するので、レーザ媒質5の温度上昇を抑制することができる。また、クラッド4を櫛形の先端のみで固定した場合に比べて、ヒートシンク2の剛性を高めることができる。
具体的には、ヒートシンク2は、レーザ光の光軸6の一部に、光軸6に平行な櫛構造を有する接合部(図3内のハッチング部)を備え、櫛構造の範囲を調整することにより、レーザ媒質に所望の温度分布を発生させてレーザ媒質内の屈折率分布を生成する。
すなわち、櫛構造を有する接合部は、端面2b側すなわち、レーザ媒質5の光軸6のレーザ光が出射する出射面(端面5b)の接合面に設置されており、櫛歯を構成しない接合部は、端面2a側すなわち、レーザ媒質5の入射面(端面5a)の接合面に設置されている。
なお、上記実施の形態1(図1~図5)では、レーザ媒質5内で発生する熱レンズを調整するために、ヒートシンク2の光軸6(z軸)の方向の一部に櫛構造を設け、櫛構造部分の幅Aを調整することにより導波路内の温度分布を調整したが、図6のように、ヒートシンク2の光軸方向の櫛構造部分を、断続的に複数本設けてもよい。
図6はこの発明の実施の形態2に係るモード制御導波路型レーザ装置のヒートシンク2の形状を示す断面図であり、前述(図1)の断面b-b’を示している。
この場合、全体構成は、ヒートシンク2の櫛形状が前述と異なる点を除けば、図1に示した通りであり、特に明記しない限り、前述(図1)の励起光入射手段1~レーザ媒質5と同等の機能を有するものとする。
これに対し、この発明の実施の形態2(図6)によれば、ヒートシンク2の光軸方向の櫛構造部分を断続的に複数本設けることにより、上記不具合(y軸方向の熱レンズの発生)を解消することができる。
また、ある幅の櫛構造の本数を調整することによっても、熱レンズの焦点距離を調整することができる。
なお、図6においては、各櫛構造部分の幅が一定であるが、各幅は必ずしも均一である必要はない。
これにより、光軸方向の熱伝導が増大し、この結果、y軸方向に発生する熱分布を光軸6に平行な方向に平均化することができ、y軸方向の熱レンズの発生を低減することができる。
このように熱絶縁材料を埋めることにより、クラッド4の排熱側の前面が接合剤3に接合されて、レーザ媒質5で発生した熱を排熱するので、レーザ媒質5の温度上昇を抑制することができる。また、クラッド4を櫛形の先端のみで固定した場合に比べて、ヒートシンク2の剛性を高めることができる。
なお、上記実施の形態1、2(図1~図6)では、特に言及しなかったが、レーザ共振器内のx軸方向におけるレーザ発振においては、レーザ媒質5の幅(x軸)が、レーザ光の波長に比べて十分大きいので、y軸での導波路によるモード選択は行われず、空間モードのレーザ共振器となる。
そこで、図7のように、ヒートシンク2の光軸6に平行な方向に、接合剤3を介してクラッド4に接合される櫛歯を複数本設け、レーザ媒質5内のx軸方向に2つの櫛歯の中心を光軸とする熱レンズ効果を周期的に発生させることにより、x軸方向に周期的な複数の発振モードを生成可能に構成してもよい。
図7はこの発明の実施の形態3に係るモード制御導波路型レーザ装置のヒートシンク2の形状を示す断面図であり、前述(図1)の断面b-b’を示している。
この場合、全体構成は、ヒートシンク2の櫛形状が前述と異なる点を除けば、図1に示した通りであり、特に明記しない限り、前述(図1)の励起光入射手段1~レーザ媒質5と同等の機能を有するものとする。
このように熱絶縁材料を埋めることにより、クラッド4の排熱側の前面が接合剤3に接合されて、レーザ媒質5で発生した熱を排熱するので、レーザ媒質5の温度上昇を抑制することができる。また、クラッド4を櫛形の先端のみで固定した場合に比べて、ヒートシンク2の剛性を高めることができる。
なお、上記実施の形態3(図7)では、レーザ媒質5内で発生する熱レンズ焦点距離を調整するために、x軸方向に複数のレンズ効果を生成し、y軸方向では導波路モードで発振し、x軸方向ではレンズ効果による空間モードで複数発振する装置において、ヒートシンク2の光軸方向に櫛構造を設け、櫛構造部分の幅Aまたは複数本存在する櫛構造部分の本数を調整することにより、導波路内の温度分布を調整したが、図8にように、ヒートシンク2の光軸(z軸)の方向の櫛構造部分を断続的に複数本設けてもよい。
図8はこの発明の実施の形態4に係るモード制御導波路型レーザ装置のヒートシンク2の形状を示す断面図であり、前述(図1)の断面b-b’を示している。
この場合、全体構成は、ヒートシンク2の櫛形状が前述と異なる点を除けば、図1に示した通りであり、特に明記しない限り、前述(図1)の励起光入射手段1~レーザ媒質5と同等の機能を有するものとする。
これに対し、この発明の実施の形態4(図8)によれば、ヒートシンク2の光軸方向の櫛構造部分を断続的に複数本設けることにより、レーザ媒質5に所望の温度分布を発生させてレーザ媒質5内に屈折率分布を生成し、この屈折率分布により、x軸方向に複数のレンズを並べた効果であるレンズ効果を生成し、y軸方向においては導波路モードで発振し、x軸方向においてはレンズ効果による空間モードで複数発振する装置においても、上記不具合を解消することができる。
なお、各櫛構造部分の幅Aは必ずしも一定である必要はない。
このように熱絶縁材料を埋めることにより、クラッド4の排熱側の前面が接合剤3に接合されて、レーザ媒質5で発生した熱を排熱するので、レーザ媒質5の温度上昇を抑制することができる。また、クラッド4を櫛形の先端のみで固定した場合に比べて、ヒートシンク2の剛性を高めることができる。
Claims (8)
- 平板状をなし、光軸に対して垂直な断面の厚さ方向に導波路構造を有し、レーザ光に対する利得を発生するレーザ媒質と、
前記レーザ媒質の一面に接合されたクラッドと、
前記レーザ媒質の一面側に前記クラッドを介して接合されたヒートシンクと、を備え、
前記レーザ媒質は、屈折率分布によりレンズ効果を生成し、
前記レーザ光は、前記厚さ方向において導波路モードで発振するとともに、前記光軸および前記厚さ方向に垂直な方向において、前記レンズ効果による空間モードで発振するモード制御導波路型レーザ装置であって、
前記クラッドと前記ヒートシンクとの接合面積により、前記レーザ媒質に所望の温度分布を発生させて前記レーザ媒質内の前記屈折率分布を生成することを特徴とするモード制御導波路型レーザ装置。 - 前記レーザ媒質は、前記屈折率分布により、前記光軸および前記厚さ方向に垂直な方向に複数のレンズを並べた効果であるレンズ効果を生成し、
前記レーザ光は、前記厚さ方向において導波路モードで発振するとともに、前記光軸および前記厚さ方向に垂直な方向において、前記レンズ効果による空間モードで複数発振することを特徴とする請求項1に記載のモード制御導波路型レーザ装置。 - 前記ヒートシンクは、前記レーザ光の光軸の一部に、前記光軸に平行な櫛構造を有する接合部を備え、
前記櫛構造の範囲を調整することにより、前記レーザ媒質に所望の温度分布を発生させて前記レーザ媒質内の屈折率分布を生成することを特徴とする請求項1または請求項2に記載のモード制御導波路型レーザ装置。 - 前記櫛構造を有する接合部は、前記レーザ媒質の光軸のレーザ光が入射する入射面の接合面に設置されたことを特徴とする請求項3に記載のモード制御導波路型レーザ装置。
- 前記櫛構造を有する接合部は、前記レーザ媒質の光軸のレーザ光が出射する出射面の接合面に設置されたことを特徴とする請求項3または請求項4に記載のモード制御導波路型レーザ装置。
- 前記櫛構造を有する接合部は、前記レーザ媒質の光軸のレーザ光が入射する入射面を除く接合面に設置されたことを特徴とする請求項3に記載のモード制御導波路型レーザ装置。
- 前記櫛構造を有する接合部は、前記レーザ媒質の光軸のレーザ光が出射する出射面を除く接合面に設置されたことを特徴とする請求項3または請求項6に記載のモード制御導波路型レーザ装置。
- 前記櫛構造を有する接合部は、前記レーザ媒質の光軸のレーザ光が入射する入射面から断続的に複数個設置されたことを特徴とする請求項3から請求項7までのいずれか1項に記載のモード制御導波路型レーザ装置。
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2010
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- 2010-12-21 CN CN201080068982.8A patent/CN103098318B/zh active Active
- 2010-12-21 WO PCT/JP2010/072999 patent/WO2012086009A1/ja active Application Filing
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0685357A (ja) * | 1992-09-04 | 1994-03-25 | Nippon Steel Corp | 固体レーザ発振器 |
WO2006103767A1 (ja) * | 2005-03-30 | 2006-10-05 | Mitsubishi Denki Kabushiki Kaisha | モード制御導波路型レーザ装置 |
JP4392024B2 (ja) | 2005-03-30 | 2009-12-24 | 三菱電機株式会社 | モード制御導波路型レーザ装置 |
Also Published As
Publication number | Publication date |
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JP5389277B2 (ja) | 2014-01-15 |
JPWO2012086009A1 (ja) | 2014-05-22 |
EP2590276A4 (en) | 2014-01-15 |
EP2590276B1 (en) | 2018-12-19 |
EP2590276A1 (en) | 2013-05-08 |
US20130121355A1 (en) | 2013-05-16 |
US9197029B2 (en) | 2015-11-24 |
CN103098318B (zh) | 2014-10-22 |
CN103098318A (zh) | 2013-05-08 |
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