WO2012066756A1 - 触針式測定装置 - Google Patents

触針式測定装置 Download PDF

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Publication number
WO2012066756A1
WO2012066756A1 PCT/JP2011/006301 JP2011006301W WO2012066756A1 WO 2012066756 A1 WO2012066756 A1 WO 2012066756A1 JP 2011006301 W JP2011006301 W JP 2011006301W WO 2012066756 A1 WO2012066756 A1 WO 2012066756A1
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WO
WIPO (PCT)
Prior art keywords
axis direction
guide
axis
linear
stage
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Application number
PCT/JP2011/006301
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English (en)
French (fr)
Japanese (ja)
Inventor
智志 柴
佐藤　誠一
充 矢作
Original Assignee
株式会社アルバック
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Publication date
Application filed by 株式会社アルバック filed Critical 株式会社アルバック
Priority to CN2011800046226A priority Critical patent/CN102639956A/zh
Priority to JP2012511861A priority patent/JP5247934B2/ja
Priority to KR1020127009761A priority patent/KR20120085770A/ko
Publication of WO2012066756A1 publication Critical patent/WO2012066756A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments

Definitions

  • the present invention relates to a stylus-type measuring apparatus that includes a stylus that comes into contact with the surface of the object to be measured and measures the surface shape and the like of the object to be measured.
  • a stylus-type measuring apparatus that includes a Y-axis stage supported movably in the Y-axis direction via a linear guide, and that supports a stylus that contacts the surface of the object to be measured.
  • a Y-axis stage supported movably in the Y-axis direction via a linear guide, and that supports a stylus that contacts the surface of the object to be measured.
  • a pair of upper and lower guide rails long in the Y-axis direction is fixed to one side surface of the beam that is long in the Y-axis direction, and the guide surfaces formed on these guide rails have Y
  • a pair of upper and lower linear bearings that are movable in the axial direction are fixed to the Y-axis stage.
  • an object of the present invention is to provide a stylus-type measuring device that does not deteriorate the measurement accuracy even if the linear guide is worn.
  • the present invention provides a portal frame that is relatively movable in the X-axis direction with respect to the object to be measured, with the two horizontal directions orthogonal to each other as the X-axis direction and the Y-axis direction.
  • a Y-axis stage that is supported by a beam that is long in the Y-axis direction at the upper end so as to be movable in the Y-axis direction via a linear guide, and is reciprocated in the Y-axis direction by a drive mechanism having an output member that moves in the Y-axis direction;
  • the linear guide is fixed in the Y-axis direction that is fixed to the lower surface of the beam in the X-axis direction.
  • a pair of longitudinal first and second guide rails a first linear bearing which is movably in contact with the guide surface formed on one side surface in the X-axis direction of the first guide rail and is movable in the Y-axis direction; and a second guide Formed on the other side of the rail in the X-axis direction
  • the first and second linear motion bearings prevent the first and second linear motion bearings from dropping on the guide surfaces of the first and second guide rails.
  • the first linear bearing is fixed to the Y-axis stage, and the second linear bearing is free to move in the X-axis direction and the vertical direction with respect to the Y-axis stage.
  • the first urging means for urging the second linear bearing in the X-axis direction so as to press the second linear bearing against the guide surface of the second guide rail is provided, and the second linear bearing is disposed below the beam or a member fixed to the beam.
  • Second urging means for urging the second urging means is provided, and the vector direction of the resultant force of the urging force of the first urging means and the urging force of the second urging means coincides with the normal direction of the guide surface of the second guide rail. It is characterized by making it.
  • the biasing force of the first biasing means causes the guide surface and the contact surface of the linear motion bearing to Generation of a gap between the two is prevented.
  • the first linear motion bearing fixed to the Y-axis stage is pressed against the guide surface of the first guide rail inclined with respect to the vertical surface, whereby the Y-axis stage is held at a predetermined vertical position.
  • the second linear bearing is pressed in the normal direction of the guide surface of the second guide rail by the resultant force of the first and second urging means, and the second guide rail guide Uneven wear (wear that changes the inclination angle of the guide surface with respect to the vertical surface) can be prevented.
  • the vertical tilt of the Y-axis stage due to uneven wear is prevented, and the straightness of movement of the Y-axis stage in the Y-axis direction can be ensured with high accuracy. Therefore, even if the linear guide is worn, the Y-axis stage moves straight in the Y-axis direction while being held at a predetermined vertical position, and the measurement accuracy does not deteriorate.
  • the biasing force of the first biasing means causes a gap between the guide surface of the first guide rail and the first linear motion bearing.
  • the Y-axis stage is displaced in the X-axis direction so as not to create a gap.
  • the output member of the drive mechanism is fixed to the Y-axis stage, the output member is also displaced in the X-axis direction integrally with the Y-axis stage, and an uneven load acts on the drive mechanism, which adversely affects durability. It reaches. Further, the output member may swing in the X-axis direction and the vertical direction due to a manufacturing accuracy error of the drive mechanism, and this swing may be transmitted to the Y-axis stage, which may adversely affect measurement accuracy.
  • a connecting means for connecting the output member to the Y-axis table so as to have a degree of freedom of movement along a vertical plane orthogonal to the Y-axis direction. According to this, even if the Y-axis stage is displaced in the X-axis direction, the output member is not displaced. Therefore, it is possible to prevent an uneven load from acting on the drive mechanism. Furthermore, even if the output member swings in the X-axis direction and the vertical direction, this swing is not transmitted to the Y-axis stage, and the measurement accuracy is not adversely affected.
  • the connecting means may be constituted by a universal joint having freedom of movement in the X-axis direction and the vertical direction, but this makes the structure complicated and causes an increase in cost.
  • the connecting means receives the vertical receiving surface perpendicular to the Y-axis direction provided on one of the Y-axis stage and the output member, the spherical surface provided on the other of the Y-axis stage and the output member, and the spherical surface. It is desirable to be comprised with the spring pressed against a surface. According to this, the spherical surface portion is movably brought into point contact with the receiving surface, and the above-described degree of freedom of movement can be obtained, and the structure can be simplified and the cost can be reduced.
  • the front view of the stylus type measuring device of an embodiment of the present invention The expanded sectional view of the principal part of the stylus type measuring apparatus of FIG. Sectional drawing cut
  • FIG. 1 shows a stylus type measuring apparatus according to an embodiment of the present invention.
  • This measuring apparatus includes a base 1, a sample stage 2 on which a workpiece W placed on the base 1 is placed, and a portal frame 3 placed on the base 1 so as to straddle the sample stage 2. ing.
  • the sample stage 2 is supported by a pair of guide rails 2a and 2a that are long in the X-axis direction fixed on the base 1, with the two horizontal directions orthogonal to each other as the X-axis direction and the Y-axis direction.
  • the portal frame 3 with respect to the object W to be measured Is relatively moved in the X-axis direction.
  • the portal frame 3 has columns 31, 31 on both sides in the Y-axis direction standing on the base 1, and a beam 32 elongated in the Y-axis direction, which is provided between the upper ends of both columns 31, 31.
  • the sample stage 2 may be fixed on the base 1, and the portal frame 3 may be movable in the X-axis direction so that the portal frame 3 moves relative to the object W to be measured in the X-axis direction.
  • the Y-axis stage 4 is supported by the beam 32 at the upper end of the portal frame 3 so as to be movable in the Y-axis direction via a linear guide 5 described later.
  • the Y-axis stage 4 is reciprocated in the Y-axis direction by a drive mechanism having an output member that moves in the Y-axis direction.
  • the drive mechanism is constituted by a feed screw mechanism having a ball screw 6 that is long in the Y-axis direction and a nut 7 that is screwed thereto.
  • a guide block 33 is fixed to the lower surface of the beam 32.
  • the guide block 33 has a recessed portion 33a that is long in the Y-axis direction and is recessed upward from the lower surface thereof.
  • the ball screw 6 is pivotally supported via a bearing 61 on the support 33b fixed to both ends in the Y-axis direction of the recessed portion 33a.
  • the ball screw 6 is connected to a servo motor (not shown) via a pulley 62 fixed to the shaft end and a belt 63 wound around the pulley.
  • the guide rail 71 fixed to the ceiling portion of the recessed portion 33a is provided with a nut holder 72 supported so as to be movable in the Y-axis direction within the recessed portion 33a, and the nut holder 72 is held in a state in which the nut 7 is prevented from rotating. I am letting. Then, the rotation of the ball screw 6 causes the nut holder 72, which is an output member of the drive mechanism, to move in the Y-axis direction via the nut 7, so that the Y-axis stage 4 is moved in the Y-axis direction via the nut holder 72. ing.
  • a support frame 4 a extending downward is attached to the Y-axis stage 4, and a stylus 8 that contacts the surface of the object W to be measured can be displaced in the vertical direction via the Z-axis sensor 81. It is supported by. The vertical displacement of the stylus 8 is detected by the Z-axis sensor 81.
  • the portal frame 3 is moved relative to the object W in the X-axis direction while the stylus 8 is in contact with the surface of the object W, so that the stylus 8 of the object W is measured. Scan along the surface in the X-axis direction. Then, based on the vertical displacement of the stylus 8 detected by the Z-axis sensor 81 during this scanning, the surface shape (unevenness) along one X-direction cross section of the workpiece W is measured. Next, after the Y-axis stage 4 is moved by a predetermined stroke in the Y-axis direction, the stylus 8 is scanned in the X-axis direction along the surface of the object to be measured W in the same manner as described above. The surface shape along the X-direction cross section is measured. By repeating this, the surface shape of a predetermined region of the workpiece W is measured.
  • the linear guide 5 is configured to move straight in the Y-axis direction while the Y-axis stage 4 is held at a predetermined vertical position even when the linear guide 5 is worn.
  • the linear guide 5 will be described in detail.
  • the linear guide 5 includes a pair of first and second guide rails 51 and 52 that are long in the Y-axis direction and are fixed to the lower surface of the beam 32 in the X-axis direction. Yes.
  • the first and second guide rails 51 and 52 are screwed to the lower surface of the guide block 33 so as to be positioned on both outer sides in the X-axis direction of the recessed portion 33a. Therefore, both guide rails 51 and 52 are fixed to the lower surface of the beam 32 via the guide block 33.
  • the linear guide 5 further includes a first linear bearing 53 that contacts a guide surface 51a formed on one side surface (left side surface in FIG. 4) of the first guide rail 51 so as to be movable in the Y-axis direction.
  • the second guide rail 52 is provided with a second linear bearing 54 that is movably in contact with the guide surface 52a formed on the other side surface in the X-axis direction (right side surface in FIG. 4) in the Y-axis direction.
  • Each of the first and second linear motion bearings 53, 54 is a sliding bearing that is slidably brought into surface contact with the guide surfaces 51a, 52a of the respective guide rails 51, 52.
  • the guide surfaces 51a and 52a of the respective guide rails 51 and 52 are inclined with respect to the vertical surface so that the linear motion bearings 53 and 54 do not fall, and of course, contact with the guide surfaces 51a and 52a.
  • the contact surfaces of the linear motion bearings 53, 54 are also inclined with respect to the vertical surface.
  • the first linear motion bearing 53 is fixed to the Y-axis stage 4 with screws, but the second linear motion bearing 54 is freely movable in the X-axis direction and the vertical direction with respect to the Y-axis stage 4.
  • a groove portion 41 that receives the outer end portion of the second linear motion bearing 54 is formed in the Y-axis stage 4, and the second linear motion bearing 54 is placed in the groove portion 41 in the X-axis direction. And, it is engaged freely in the vertical direction.
  • the Y-axis stage 4 is provided with first urging means 55 that urges the second linear motion bearing 54 in the X-axis direction so as to press against the guide surface 52a of the second guide rail 52.
  • the guide block 33 fixed to the beam 32 is provided with second urging means 56 for urging the second linear motion bearing 54 downward.
  • the second linear motion bearing 54 is divided into three in the Y-axis direction, and the first urging means 55 is provided for each of the divided second linear motion bearings 54.
  • a resin plate 54a that is long in the Y-axis direction is provided in sliding contact with the upper surfaces of all of the divided linear motion bearings 54.
  • the guide block 33 is provided with a plurality of second urging means 56 at intervals in the Y-axis direction so as to come into contact with the upper surface of the resin plate 54a.
  • the dynamic bearing 54 is urged downward through the resin plate 54a.
  • Each of the first and second urging means 55 and 56 is constituted by a spring plunger that is screwed into the Y-axis stage 4 or the guide block 33 from the outside in the X-axis direction or from above. Then, the urging force of each urging means 55, 56 is adjusted according to the screwing depth, and each urging means 55, 56 is fixed to the Y-axis stage 4 and the guide block by the fixing nuts 55a, 56a at the required screwing depth. 33 to be fixed.
  • the urging force of the first urging means 55 and the urging force of the second urging means 56 are adjusted so that the vector direction of the resultant force of these urging forces coincides with the normal direction of the guide surface 52a.
  • the second linear motion bearing 54 is pressed in the normal direction of the guide surface 52 a of the second guide rail 52, and the contact surface 52 a of the second guide rail 52 and the contact surface of the second linear motion bearing 54. Can be prevented (wear that changes the inclination angle of the guide surface 52a with respect to the vertical surface).
  • a V-shaped groove 54 b extending in the vertical direction and serving as a contact portion of the first biasing means 55 is formed on the outer surface of the second linear bearing 54 in the X-axis direction.
  • the second linear bearing 54 can move in the vertical direction relative to the first biasing means 55, and the second linear bearing 54 cannot move in the Y-axis direction relative to the first biasing means 55. become. Therefore, it is possible to prevent the second linear motion bearing 54 from moving in the Y axis direction with respect to the Y axis stage 4 by an amount corresponding to an insertion clearance inevitably generated between the second linear motion bearing 54 and the groove portion 41.
  • the guide rails 51, 52 and the linear motion bearings 53, 54 are made of hard ceramic and the linear motion bearings 53 and 54 are made of resin having excellent lubricity such as PTFE and PCTFE, they are hardly affected by wear.
  • a connecting means 9 for connecting the nut holder 72 to the Y-axis stage 4 so as to have a degree of freedom of movement along a vertical plane orthogonal to the Y-axis direction is provided.
  • the connecting means 9 is pressed against the vertical receiving surface 91 provided on the Y-axis stage 4 and perpendicular to the Y-axis direction, the spherical portion 92 provided on the nut holder 72, and the spherical portion 92 against the receiving surface 91.
  • a spring 93 is used.
  • a convex portion 72a projecting downward is provided in a part of the nut holder 72 in the Y-axis direction, and the Y-axis stage 4 has a substantially rectangular shape for receiving the convex portion 72a as shown in FIG.
  • a window hole 42 is formed.
  • a screw having a flat head is screwed onto one side surface of the window hole 42 in the Y-axis direction, and the receiving surface 91 is constituted by the head of the screw.
  • a screw having a spherical head is screwed onto one side surface of the convex portion 72a in the Y-axis direction, and the spherical portion 92 is configured by the head of this screw.
  • the Y-axis stage 4 is formed with a pair of through-holes 43 and 43 that are spaced apart from each other in the X-axis direction and open on the other side surface of the window hole 42 in the Y-axis direction. Inserting. Then, a spring 93 made of a coil spring is contracted between each spring receiver 94 and the other side surface in the Y-axis direction of the convex portion 72 a, and the spherical surface portion 92 is pressed against the receiving surface 91 by the urging force of the spring 93. .
  • an adjusting means for adjusting the biasing force of the spring 93 is provided. That is, an adjusting screw 95 that is inserted into each through-hole 43 and abuts against the spring receiver 94 and is screwed into the plate 44 screwed to the other outer surface in the Y-axis direction of the Y-axis stage 4 is screwed. ing. Then, the spring receiver 94 is displaced in the Y-axis direction by the adjusting screw 95 so that the urging force of the spring 93 can be adjusted.
  • the urging force of the spring 93 is within a range that is less than the force that causes the spherical portion 92 to be elastically deformed, and is greater than or equal to the total force of the friction force generated by the linear guide 5 and the force required for acceleration / deceleration of the Y-axis stage 4. Adjusted to be. Thereby, even if the nut holder 72 moves in either the Y-axis direction or the other direction, the spherical surface portion 92 does not move away from the receiving surface 91, and the followability of the Y-axis stage 4 to the nut holder 72 is ensured. .
  • the first and second guide rails 51 and 52 of the guide surfaces 51a and 52a and the first and second linear motion bearings 53 and 54 are worn even if wear occurs. Due to the urging force of the first urging means 55, the generation of a gap between the guide surfaces 51a, 52a and the linear motion bearings 53, 54 is prevented. Then, the first guide rail 52 is fixed to the Y-axis stage 4 by the urging reaction force of the first urging means 55 acting on the Y-axis stage 4 via the second linear motion bearing 54 with the second guide rail 52 as a reaction force receiver.
  • the linear motion bearing 53 is in pressure contact with the guide surface 51a of the first guide rail 51 inclined with respect to the vertical surface.
  • the upper surface portion of the Y-axis stage 4 facing the lower surface of the first guide rail 51 is brought into contact with the lower surface of the first guide rail 51 by the upward force component of the pressure reaction force, and the Y-axis stage 4 is held at a predetermined vertical position.
  • the straightness of movement of the Y-axis stage 4 in the Y-axis direction is highly accurate.
  • the Y-axis stage 4 is not tilted in the vertical direction.
  • the Y-axis stage 4 moves straight in the Y-axis direction while being held at a predetermined vertical position, and the vertical position change or inclination of the Y-axis stage 4 is caused.
  • the resulting measurement accuracy does not deteriorate.
  • the biasing force of the first biasing means 55 causes the gap between the guide surface 51 a and the first linear motion bearing 53.
  • the Y-axis stage 4 is displaced in the X-axis direction so that no gap is generated.
  • the nut holder 72 is fixed to the Y-axis stage 4, the nut holder 72 is also displaced in the X-axis direction integrally with the Y-axis stage 4, and an offset load perpendicular to the axial direction acts on the ball screw 6.
  • uneven wear of the ball screw 6 occurs, and the durability is adversely affected.
  • the nut holder 72 is shaken in the X-axis direction and the vertical direction via the nut 7, and this deflection is transmitted to the Y-axis stage 4 for measurement accuracy. May be adversely affected.
  • the nut holder 72 makes point contact with the vertical receiving surface 91 orthogonal to the Y-axis direction provided on the Y-axis stage 4 movably in the X-axis direction and the vertical direction on the spherical surface portion 92. That is, since the nut holder 72 is connected to the Y-axis table 4 so as to have a degree of freedom of movement along a vertical plane orthogonal to the Y-axis direction, the Y-axis stage 4 can be displaced in the X-axis direction. The nut holder 72 is not displaced. Therefore, an uneven load orthogonal to the axial direction does not act on the ball screw 6, and uneven wear of the ball screw 6 can be prevented.
  • the connecting means 9 can also be constituted by a universal joint having freedom of movement in the X-axis direction and the vertical direction.
  • this complicates the structure and increases the cost.
  • the connection means 9 of this embodiment is comprised by the receiving surface 91, the spherical part 92, and the spring 93, it can simplify a structure and can aim at a cost reduction.
  • the Y axis stage 4 is provided with the receiving surface 91 and the nut holder 72 is provided with the spherical surface portion 92.
  • the Y axis stage 4 is provided with the spherical surface portion 92 and the nut holder 72 has the receiving surface. 91 may be provided.
  • the first and second linear motion bearings 53 and 54 are constituted by sliding bearings, but at least one of the linear motion bearings 53 and 54 may be constituted by a rolling bearing.
  • the second linear bearing 54 may be configured by a rolling bearing made of a ball or a roller that is slidably in contact with the guide surface 52 a of the second guide rail 52.
  • a collar 54c is provided between the first urging means 55 and the second linear motion bearing 54 so as to hold the second linear motion bearing 54 so that the second linear motion bearing 54 can freely roll.
  • 54 is urged in the X-axis direction by the first urging means 55 via the collar 54c.
  • Other configurations of the second embodiment are the same as those of the first embodiment.
  • the drive mechanism is configured by the feed screw mechanism using the ball screw 6, but the drive mechanism may be configured by another mechanism such as a rack and pinion mechanism.
  • the connecting means described above may prevent the output member (rack) from swinging up and down due to manufacturing accuracy errors of the rack and pinion teeth and the eccentricity of the bear link, and this swing is not transmitted to the Y-axis stage 4. It is desirable to connect the output member to the Y-axis stage 4 via 9.
  • the present invention is applied to a stylus type measuring device in which the stylus 8 is supported by the Z-axis sensor 81 so as to be displaceable in the vertical direction.
  • a stylus is attached to one end of the lever, and a sensor for detecting the oscillating displacement of the lever in the vertical direction is provided.
  • the vertical direction of the stylus is in contact with the surface of the object to be measured.
  • the present invention can be similarly applied to a stylus type measuring apparatus of a type in which displacement is detected by a sensor via a lever.
  • W ... object to be measured, 3 ... portal frame, 32 ... beam, 33 ... guide block (member fixed to beam), 4 ... Y-axis stage, 5 ... linear guide, 51 ... first guide rail, 52 ... second Guide rail, 51a, 52a ... guide surface, 53 ... first linear motion bearing, 54 ... second linear motion bearing, 55 ... first biasing means, 56 ... second biasing means, 6 ... ball screw (drive mechanism) , 7 ... nut (drive mechanism), 72 ... nut holder (output member), 8 ... stylus, 9 ... connecting means, 91 ... receiving surface, 92 ... spherical portion, 93 ... spring.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
PCT/JP2011/006301 2010-11-15 2011-11-10 触針式測定装置 WO2012066756A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2011800046226A CN102639956A (zh) 2010-11-15 2011-11-10 触针式测定装置
JP2012511861A JP5247934B2 (ja) 2010-11-15 2011-11-10 触針式測定装置
KR1020127009761A KR20120085770A (ko) 2010-11-15 2011-11-10 촉침식 측정 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-255030 2010-11-15
JP2010255030 2010-11-15

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WO2012066756A1 true WO2012066756A1 (ja) 2012-05-24

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JP (1) JP5247934B2 (zh)
KR (1) KR20120085770A (zh)
CN (1) CN102639956A (zh)
TW (1) TW201239314A (zh)
WO (1) WO2012066756A1 (zh)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN107597478A (zh) * 2017-11-06 2018-01-19 济南大学 义齿饰面瓷涂覆机器人及涂覆方法

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CN104197825B (zh) * 2014-09-26 2016-10-26 南车株洲电机有限公司 一种轴承外圈轮廓度检测方法
JP6229959B2 (ja) * 2016-03-08 2017-11-15 パナソニックＩｐマネジメント株式会社 スタイラス及び測定方法
KR102372409B1 (ko) * 2020-12-31 2022-03-07 주토스 주식회사 제진대 정밀 측정테이블의 진동최소화를 위한 석정반 체결방법

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Publication number Priority date Publication date Assignee Title
JPS58173425A (ja) * 1982-04-06 1983-10-12 Mitsutoyo Mfg Co Ltd 三次元測定機
JPS5979108A (ja) * 1982-10-27 1984-05-08 Mitsutoyo Mfg Co Ltd スケ−ルの保護装置
JPH085362A (ja) * 1994-06-20 1996-01-12 Nikon Corp 座標測定機
JPH11118473A (ja) * 1997-10-17 1999-04-30 Tokyo Seimitsu Co Ltd 表面粗さ形状測定機のデータ処理装置
JP2004529354A (ja) * 2001-05-09 2004-09-24 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ くさび形のガイドを有する移動段を備えた、物体の測定又はマシニングのための装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173425A (ja) * 1982-04-06 1983-10-12 Mitsutoyo Mfg Co Ltd 三次元測定機
JPS5979108A (ja) * 1982-10-27 1984-05-08 Mitsutoyo Mfg Co Ltd スケ−ルの保護装置
JPH085362A (ja) * 1994-06-20 1996-01-12 Nikon Corp 座標測定機
JPH11118473A (ja) * 1997-10-17 1999-04-30 Tokyo Seimitsu Co Ltd 表面粗さ形状測定機のデータ処理装置
JP2004529354A (ja) * 2001-05-09 2004-09-24 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ くさび形のガイドを有する移動段を備えた、物体の測定又はマシニングのための装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107597478A (zh) * 2017-11-06 2018-01-19 济南大学 义齿饰面瓷涂覆机器人及涂覆方法

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JP5247934B2 (ja) 2013-07-24
JPWO2012066756A1 (ja) 2014-05-12
KR20120085770A (ko) 2012-08-01
CN102639956A (zh) 2012-08-15
TW201239314A (en) 2012-10-01

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