WO2012057502A3 - 전압인가 밀폐형 접촉식 프로브 장치 - Google Patents

전압인가 밀폐형 접촉식 프로브 장치 Download PDF

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Publication number
WO2012057502A3
WO2012057502A3 PCT/KR2011/007985 KR2011007985W WO2012057502A3 WO 2012057502 A3 WO2012057502 A3 WO 2012057502A3 KR 2011007985 W KR2011007985 W KR 2011007985W WO 2012057502 A3 WO2012057502 A3 WO 2012057502A3
Authority
WO
WIPO (PCT)
Prior art keywords
contact
probe apparatus
voltage
applying system
electric resistance
Prior art date
Application number
PCT/KR2011/007985
Other languages
English (en)
French (fr)
Other versions
WO2012057502A2 (ko
Inventor
이윤희
백운봉
박종서
남승훈
Original Assignee
한국표준과학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국표준과학연구원 filed Critical 한국표준과학연구원
Publication of WO2012057502A2 publication Critical patent/WO2012057502A2/ko
Publication of WO2012057502A3 publication Critical patent/WO2012057502A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

본 발명은 단수 혹은 복수의 표면 접촉식 프로브 성능 개량에 관한 것으로, 더욱 상세하게는 병렬 형태의 복수의 전기저항 측정 코어와 시편 표면과의 접촉 비동등성(non-equivalency) 문제를 해결하기 위하여 개발된 정압력 전기저항 측정 프로브 장치(국내 특허등록 제10-0981677호 및 PCT 특허출원 KR2009-006449)의 활용, 성능 향상과 구조적 간략화를 위해 전압을 인가하는 방식을 채택하고 리드선이 공압조를 수직으로 관통하도록 리드선 결선구조를 개량하는 것이다.
PCT/KR2011/007985 2010-10-26 2011-10-25 전압인가 밀폐형 접촉식 프로브 장치 WO2012057502A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0104359 2010-10-26
KR1020100104359A KR101093816B1 (ko) 2010-10-26 2010-10-26 전압인가 밀폐형 접촉식 프로브 장치

Publications (2)

Publication Number Publication Date
WO2012057502A2 WO2012057502A2 (ko) 2012-05-03
WO2012057502A3 true WO2012057502A3 (ko) 2012-06-14

Family

ID=45506279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/007985 WO2012057502A2 (ko) 2010-10-26 2011-10-25 전압인가 밀폐형 접촉식 프로브 장치

Country Status (2)

Country Link
KR (1) KR101093816B1 (ko)
WO (1) WO2012057502A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115507735B (zh) * 2022-11-22 2023-03-17 山东天厚新材料科技有限公司 一种铜箔厚度测量装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0735773A (ja) * 1993-07-20 1995-02-07 Tara Tec:Kk 電気計測装置のプローブ
JP2004354334A (ja) * 2003-05-30 2004-12-16 Nitto Denko Corp 電子部品の検査方法
JP2007047155A (ja) * 2005-07-14 2007-02-22 Jsr Corp 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0735773A (ja) * 1993-07-20 1995-02-07 Tara Tec:Kk 電気計測装置のプローブ
JP2004354334A (ja) * 2003-05-30 2004-12-16 Nitto Denko Corp 電子部品の検査方法
JP2007047155A (ja) * 2005-07-14 2007-02-22 Jsr Corp 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法

Also Published As

Publication number Publication date
KR101093816B1 (ko) 2011-12-19
WO2012057502A2 (ko) 2012-05-03

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