WO2012052523A1 - Dispositif pouvant être déplacé en translation de manière hautement dynamique pour concentrer l'action énergétique d'un faisceau et un milieu auxiliaire en un point d'action - Google Patents

Dispositif pouvant être déplacé en translation de manière hautement dynamique pour concentrer l'action énergétique d'un faisceau et un milieu auxiliaire en un point d'action Download PDF

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Publication number
WO2012052523A1
WO2012052523A1 PCT/EP2011/068374 EP2011068374W WO2012052523A1 WO 2012052523 A1 WO2012052523 A1 WO 2012052523A1 EP 2011068374 W EP2011068374 W EP 2011068374W WO 2012052523 A1 WO2012052523 A1 WO 2012052523A1
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WO
WIPO (PCT)
Prior art keywords
point
action
movement
auxiliary medium
axis
Prior art date
Application number
PCT/EP2011/068374
Other languages
German (de)
English (en)
Inventor
Andreas Ehlerding
Original Assignee
Trumpf Werkzeugmaschinen Gmbh + Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Werkzeugmaschinen Gmbh + Co. Kg filed Critical Trumpf Werkzeugmaschinen Gmbh + Co. Kg
Priority to CN201190000830.4U priority Critical patent/CN203371169U/zh
Publication of WO2012052523A1 publication Critical patent/WO2012052523A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles

Definitions

  • Moving devices such as a machine tool, each allow a transiatory or rotational movement of an end effector relative to a workpiece in an axis of a reference coordinate system of the working space of the machine are referred to as axes.
  • Machine axes are those partial movement devices which allow a translational or rotational movement of a machine element relative to a machine element higher in the hierarchy of the machine's overall structure, the hierarchy starting at the machine frame as the highest level and ending as the lowest level at the machine axes for direct movement of an end effector , Axes and machine axes may be identical, but they may as well
  • Workpieces can be used are high accelerations of the moving
  • a branch deals with the most anticipated or fast-reacting correction of a predictable or detected motion deviation, ie error compensation.
  • the working space of a machine using parallel kinematics is relatively small when compared to a conventional machine of similar dimensions, especially when compared to machines with moving gantries.
  • variable rods In addition, the very complex dynamic behavior of the variable rods and this in conjunction with the heavily loaded joints of a highly accelerated and at the same time very precise movement limits.
  • Swivel head carries An example of this is known from US Pat. No. 7,357,049 B2.
  • WO 93/01021 A1 teaches the parallel superimposed (redundant) movement of longer base axles and shorter additional axles, wherein the additional axles are much smaller due to their smaller paths and spans and thus are lighter, that is to accelerate with less force.
  • EP 1 724 054 A1 discloses the use of additional axes with impulse compensation
  • Balancing weight is assigned, with its own drive, exactly synchronous
  • Impuisentkoppiung from the international
  • Patent Application PCT / DE 2010/001038, both by the assignee of the present invention are disclosed.
  • the focusing optics for the laser beam and the means for supplying the cutting gas are usually integrated into a common housing, the so-called cutting head.
  • Such a cutting head may well have a mass around 5 KG or more and therefore require a rather complicated additional axis configuration, in particular with aimed accelerations of up to 100 m / s 2 and jerk values of over 50,000 m / s 3 .
  • WO 2009/079760 A1 discloses a scanner head for remote laser welding, which can likewise be used as an auxiliary axis unit in the sense of the prior art, similar to the already mentioned laser cutting heads with rotor axes EP 927 596 A2 and EP 2 177 299 A1.
  • Workpiece surface (or any desired three-dimensional contour) is realized here but via an adaptive mirror in the focusing optics, which determines the focal length and thus the distance of the point of action of the scanner mirror.
  • an auxiliary axis unit is also suitable for laser cutting but not nearly with the quality and speed, which are defined with a relatively small-scale
  • the problems described occur not only in laser cutting, but also in other machining processes in which at the same time a high-energy beam in the electromagnetic wavelength range of about 50 ⁇ to 100 nm at the point of action with gaseous, liquid or powdered auxiliary media, only under conditions defined with sufficient accuracy leads to the desired result and said beam can not be generated by means of a low-mass and acceleration-insensitive device near the point of action.
  • Said desired result can be the smoothest possible cutting along a contour or the punctiform puncturing of material, as well as the defined removal, application or fusion of material and the smoothing or a targeted structuring.
  • the said supplied auxiliary medium can achieve or assist the desired result both by an endothermic or exothermic chemical or a catalytic reaction, as well as by a physical action such as pressure, flow, cooling or abrasion.
  • Machining surface at the same time in alignment and uniformity of all essential parameters, constant and at the same time the highest possible energy effect by said rays, with respect to the prior art increased efficiency and flexibility to achieve.
  • the object is achieved according to the invention by providing an element which deflects the beam in the beam direction, a deflecting element which deflects said reflection, and a translational movement in at least one axis substantially parallel and synchronous with the movement of said media feed for said reflective element. and beam focusing by means of said
  • the distance between the effective point of said high-energy beam and the last beam-influencing element is maximized in relation to the overall dimensions of a corresponding device, whereby further negative, in particular thermal, effects on said last beam-influencing element can be further reduced.
  • a beam effect is targeted application-specific by bundling the beam with a relatively short focal length towards the point of action, it may be provided to achieve the required focus solely by the radiation bundling shaping of the reflective surface of the said reflective element.
  • a beam effect when a beam effect is targeted application specific by bundling the beam with a relatively long focal length towards the point of action, it may be provided to achieve the required focus alone or at least predominantly by corresponding beam-forming elements, which are upstream of said reflective element on the beam path.
  • the latter can, for example, be realized for a laser beam application in such a way that a collimation unit is moved on the less accelerated carrier of an additional axis unit, on whose input side the coupling of a laser beam from a glass fiber takes place and on the output side a widening, focusing and deflection of the beam by means of the prior art known mirror arrangements (See, for example, WO 2009/079760 A1), but according to the invention modified such that the laser beam through a last plane deflection mirror for
  • the desired beam diameter at the point of action, below the output of a cutting gas nozzle as inventive media supply suitable for the relative position of the translationally movable deflecting! tracked.
  • the ratio between the distance of the focal point from the moving deflecting mirror to the distance of the focal point from the last beam-shaping element is not so low that a problematic high beam concentration can already result on a moving Umienkspiegel. Therefore, a not too low overall height of a cutting head according to the invention should be provided, also to allow despite the translationally movable deflecting mirror, yet at the same time the smallest possible relative change in focus, which is technically less expensive to control. ⁇ In this case, however, an application-specific optimum is to be striven for, since, on the other hand, tracking of the focal distance over a relatively large distance range, by way of very small change in the setting of the said adaptive mirror, too
  • Design of the last used in the beam direction deflecting mirror be preferred, usually even if this leads at a relatively large required focal length either to a relatively high in the beam direction built translationally movable unit, which contains both the said deflecting mirror and the said media feed, or if thereby two separate but parallel and synchronously transiatorisch movable units are necessary.
  • the auxiliary medium to be supplied at the point of action is an inert gas or air, that nevertheless these two units are parallel in a common space pressurized with said medium (“housing"). ), which minimizes the number of unit-to-unit media-transparent transitions (“windows”) transparent to said radiation.
  • At least one of the elements for beam deflection or shaping can be moved in translation by a small angular amount or over a small distance, so that the beam emerging from the respective element can be accelerated more rapidly over a small distance at the point of action is movable, as said media feed.
  • the invention is advantageously applicable where motion sequences occur at high constant speeds along longer complex shaped contours, or for whatever reason overall motion over longer distances at frequent intermittent high accelerations is required.
  • Material usually along the larger dimension of the processing space, which in most machines comprises a horizontal processing field of 3 x 2 meters up to 5 x 3 meters and usually only has a height of a few centimeters.
  • Fig. 1 shows the total view of a laser cutting machine, consisting of a
  • Guiding device (3) is provided for moving a pulse-decoupled additional axis unit (10) to be improved according to the invention in the Y direction.
  • Fig. 2 shows details of a said unit (10) according to the invention.
  • Fig. 3 shows details of a laser cutting head (21) according to the invention.
  • the laser cutting machine in Fig. 1 includes a device cabinet (4) containing the controller (5) and units, not shown, such as drive amplifiers, other electrical components, laser source and gas supplies.
  • In the working space (6) is a shuttle table with the material to be processed.
  • the movement of the unit (10) along the device (3) in the Y direction also takes place by means of linear direct drives, but in each case on both sides and closely adjacent to the dashed lines (11) of the unit (10) fitting, so that an impairment of freedom of movement within the unit (10) is avoided.
  • Said drive allows a maximum acceleration of 15 m / s 2 along said device (3), and, together with the drive of device (3) along said bridge (2), serves as a relatively low accelerating drive of the base axes.
  • FIG. 2 shows a pulse-decoupled device to be improved according to the invention
  • Additional axis unit (10) in a particularly preferred embodiment.
  • the unit (10) by means of the guide elements (12) is movable. A relatively low-speed drive of the unit (10) takes place by means of the active
  • An additional axis (20) for the high-speed movement of the laser cutting head (21) contains guides (22) as well as drives (23) for moving the laser cutting head (21) in the direction of X-direction.
  • FIG. 3 Details of the laser cutting head (21) according to the invention are shown in FIG. 3.
  • the additional axis (20) is guided by means of the guide elements (15) on the unit (0) and by means of the drives (16), driven as a high-speed drive system, with respect to the outer part of said unit (10), which, in this particularly preferred Embodiment of the invention, is also used as a balancing mass for pulse decoupling.
  • the acceleration feedback from the movement of the laser cutting head (21) along the guides (22) by the drives (23) within the additional axis (20) is transmitted in this particular embodiment via said guide elements (15) on the outer part of the unit (10) , and compensated by balancing masses (24) which are movable along the guides (25) by means of drives (26).
  • the here preferably active portions of the drives (16) and (26) are additionally shown on the outside of the unit (10).
  • the additional axis (20) has in the X direction over a range of motion of about 24 cm, which is also effectively available without compromise, which, using the known design rules, a largely constant for both axes
  • Cutting speed of up to 100 m min is usable and, preferably using powerful linear direct drives, in conjunction with the invention low-mass laser cutting heads, accelerations of up to about 150 m / s 2 can be achieved in both axes.
  • accelerations are likely
  • the laser cutting head (21) is fed by a plane deflecting mirror (29), a laser beam which has been previously expanded by a collimation unit (28) and aligned in parallel.
  • Said collimation unit (28) the laser beam is supplied through an optical fiber cable, which is fed from a laser source, such as a fiber laser, which is located in said equipment cabinet (4).
  • the inventively equipped cutting head (21) is low in mass and therefore highly accelerated with little driving force.
  • a parallel height adjustment is provided both for the mirror within the laser cutting head (21) and for the collimation unit (28), which is represented by a double line at the lower edge of these elements in FIG. 2 is indicated. Details on this are explained in FIG. 3 for the laser cutting head (21) and apply mutatis mutandis to the collimation unit (28).
  • the planar deflecting mirror (29) is preferably not movable, but adapted in height of the usable mirror surface.
  • FIG. 3 A particularly preferred variant of a laser cutting head (21) according to the invention is finally shown, in FIG. 3, as a schematic section in the X / Z plane.
  • the laser cutting head consists of three mutually movable units; the main part (31) guided in the X-axis and immovable in the Z-axis, at the top a mirror housing (33) which is movable in the Z-axis and at the bottom a cutting nozzle which is movable independently of the mirror housing (33) in the Z-axis ( 41) are mounted.
  • These units are shaped and sealed to each other, for example by means not shown sealing beads at the transition edges that they form a common housing, by the air or other low-response and for the respective wavelength of the laser beam (30) sufficiently optically neutral gases, even below a pressure of some bar, to the cutting nozzle (41) can be performed.
  • the mirror housing (33) can be moved about ⁇ 5 mm in the Z axis relative to the main part (31).
  • the laser beam (30) passes vertically through a window (34), preferably one
  • the concave deflection mirror (35) is preferably aspherical, for a particularly high focussing quality and minimizing deviations in deflections.
  • Said deflections are generated in this example by a total of about 1 mm deflectable and precise and highly dynamically controllable immersion coil drives (37), which in Fig. 3 only for the movement of the point of action (40) in the X direction, in the active space (48). , are shown.
  • a beam deflection by means of deflecting mirrors (35) can be achieved by maximum accelerations of up to approximately 1000 m / s 2 achievable at the point of action (40), in a square of approximately 12 ⁇ 12 mm.
  • the cooling of the mirror (35) also takes place via the mirror carrier.
  • the bearings and guides (42), between the cutting nozzle (41) and the main part (31) serve this purpose.
  • a simple linear stepper motor drive either at least partially integrated in elements of the bearings and guides (42) or separately between the cutting nozzle (41) and Hauptteii (31) to provide.
  • a range of motion of 30 mm in the Z axis is provided in order to be able to achieve a sufficient distance between the cutting nozzle (41) and shuttle table when the laser source is switched off, for example for material change.
  • the cutting nozzle (41) shown in Fig. 3 is composed, in addition to its permanently installed main part, of two other exchangeable elements.
  • an adapter (44) is directly attached, which carries the nozzle end (45).
  • the adapter (44) serves to influence the flow of the cutting gas suitable for the particular application and the necessary cross-section at the nozzle end (45) and at the same time provides a safe as possible, yet fast
  • Replacement part should be designed to minimize costs due to wear and damage, which occur predominantly near the point of action (40).
  • said nozzle end (45) must be designed to match the respective adapter (44).
  • the need for different nozzle cross-sections over the active space (48) may result, for example, from the fact that, depending on the application, the working field, which is maximally achievable by movement of the mirror (35) in the active space (48), need not be exploited and thus the gas consumption a narrower nozzle cross-section can be reduced.
  • auxiliary media at least in addition, can be used for cutting, which can not cause the housing of the laser cutting head (21) without errors or damage.
  • nozzle end (45) where such embodiments may preferably be provided when a useful or necessary auxiliary medium, inevitably or with high probability to high wear or damage to a complex to be manufactured and / or auzuleyenden adapter ( 44).
  • Sensory elements can also be integrated into all parts of the cutting nozzle (41).
  • the invention enables comparable and, by introducing a third level of redundancy in the movement of the beam, even much higher power, with far greater flexibility in adaptability to different application needs. Even if, in certain applications, this flexibility is not required, there are economic advantages of the invention, both in use, because of the possibility of robust and maintenance-friendly construction, and also in the production of such machines or corresponding sub-facilities, since largely similar machines and devices for a variety of applications can be used and thus can be manufactured in higher quantities.
  • the invention can also be used advantageously in installations in which the point of action is preferably not continuously moved from point to point with respect to a workpiece, when high speeds are to be achieved with minimal vibration excitation of the machine structures, for example by particularly precise point-shaped machining or point measurements to perform high throughput. From this it can be seen that the invention can be used advantageously for a large number of scarcely enumerable applications, in a form that is easily recognizable to the person skilled in the art.
  • the type of main or base axes of machines that can be realized according to the invention can be very diverse.
  • Both systems with moving gantries, mobile or pivoting stands, with fixed or movable material, as well as various hinge-based kinematics, such as six-axis industrial robots or any parallel kinematic configurations can form the base axes.
  • Main and base axles are usually driven by direct drives in the form of linear drives, hollow shaft motors, rack and pinion drives or ball screw spindles.
  • direct drives in the form of linear drives, hollow shaft motors, rack and pinion drives or ball screw spindles.
  • other electrically, hydraulically or pneumatically active drives can be used according to the invention.
  • a machine tool according to the invention can advantageously be designed for shipbuilding or aircraft construction for processing the largest components in the highest detail complexity, or for more common dimensions, for example in the size of car bodies, washing machines or circuit boards for electronic circuits, down to the dimensions of a few millimeters ,
  • a machine tool according to the invention can advantageously be designed for shipbuilding or aircraft construction for processing the largest components in the highest detail complexity, or for more common dimensions, for example in the size of car bodies, washing machines or circuit boards for electronic circuits, down to the dimensions of a few millimeters ,
  • Machining methods for which a machine according to the invention is particularly suitable are the welding, cutting, engraving, marking, application of complex contours and structures to materials such as sheet metal, plastic, glass, ceramics, wood and textiles.
  • rapid prototyping is a suitable application, in particular processes in which layers are cut, material applied on a small scale or, for other reasons, must be worked with an energy or material introduction oriented essentially perpendicular to the material.
  • precise machining of very small structures or the precise application and removal of the finest details at high speed are equally possible applications

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un dispositif pouvant être déplacé en translation de manière hautement dynamique pour concentrer l'action énergétique d'un faisceau et un milieu auxiliaire en un point d'action, ledit dispositif comprenant un élément (35) influant sur le faisceau dans la direction dudit faisceau et un dispositif (41) pour acheminer un milieu auxiliaire jusqu'au point d'action (40) mentionné, ledit élément et ledit dispositif étant déplacés conjointement dans le point d'action (40), dans au moins un axe, transversalement à la direction du faisceau. Le dispositif selon l'invention se caractérise en ce que l'élément (35) influant sur le faisceau dans la direction dudit faisceau est conçu de manière à dévier ledit faisceau par réflexion et une focalisation du faisceau intervient au moyen dudit élément (35) réfléchissant ou au moyen d'autres éléments influant sur le faisceau précédant ledit élément. Un dispositif selon l'invention fait de préférence partie intégrante d'un système pour déplacer un point d'action (40) par rapport à un espace de travail global au moyen d'arbres de machine mobiles superposés de manière redondante avec des marges de mouvement étagées de manière appropriée et des possibilités d'accélération.
PCT/EP2011/068374 2010-10-23 2011-10-20 Dispositif pouvant être déplacé en translation de manière hautement dynamique pour concentrer l'action énergétique d'un faisceau et un milieu auxiliaire en un point d'action WO2012052523A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201190000830.4U CN203371169U (zh) 2010-10-23 2011-10-20 用于使有能量的射束作用与辅助介质在工作点上会聚的可高动态平移运动的装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010049453A DE102010049453A1 (de) 2010-10-23 2010-10-23 Hochdynamisch translatorisch bewegbare Einrichtung zur Zusammenführung einer energetischen Strahlwirkung und eines Hilfsmediums an einem Wirkpunkt
DE102010049453.4 2010-10-23

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WO2012052523A1 true WO2012052523A1 (fr) 2012-04-26

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CN (1) CN203371169U (fr)
DE (1) DE102010049453A1 (fr)
WO (1) WO2012052523A1 (fr)

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US11618101B2 (en) 2017-03-27 2023-04-04 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Wear-resistant sleeve for a gas nozzle for encapsulating a cutting gas jet

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CN105149796A (zh) * 2015-10-19 2015-12-16 无锡清杨机械制造有限公司 激光切割工艺
TWI685392B (zh) * 2018-11-29 2020-02-21 財團法人金屬工業研究發展中心 複合式加工主軸裝置

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