WO2011159060A3 - 엘이디 검사장치 및 이를 이용한 엘이디 검사방법 - Google Patents

엘이디 검사장치 및 이를 이용한 엘이디 검사방법 Download PDF

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Publication number
WO2011159060A3
WO2011159060A3 PCT/KR2011/004204 KR2011004204W WO2011159060A3 WO 2011159060 A3 WO2011159060 A3 WO 2011159060A3 KR 2011004204 W KR2011004204 W KR 2011004204W WO 2011159060 A3 WO2011159060 A3 WO 2011159060A3
Authority
WO
WIPO (PCT)
Prior art keywords
led
inspecting
unit
wafer
inspection devices
Prior art date
Application number
PCT/KR2011/004204
Other languages
English (en)
French (fr)
Other versions
WO2011159060A2 (ko
Inventor
정병호
Original Assignee
주식회사 이노비즈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이노비즈 filed Critical 주식회사 이노비즈
Publication of WO2011159060A2 publication Critical patent/WO2011159060A2/ko
Publication of WO2011159060A3 publication Critical patent/WO2011159060A3/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2632—Circuits therefor for testing diodes
    • G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

엘이디가 안착된 웨이퍼를 측정하는 측정부와 검사가 완료된 웨이퍼에서 엘이디를 적재 및 적재하는 언로딩부가 복수개의 층에 구획되어 구비되며, 측정부와 언로딩부를 가로질러 웨이퍼를 이동시키는 이동부를 포함하는 엘이디 검사장치가 개시된다. 이와 같이 복수의 층으로 형성된 엘이디 검사장치에 의하여 엘이디 검사장치의 크기 및 너비를 감소시킬 수 있으며, 검사장치가 설치되는 공간에 설치 개수를 증가시킬 수 있다. 더불어 검사장치의 설치 개수를 증가시킴으로써, 엘이디 생산량이 증가할 수 있다.
PCT/KR2011/004204 2010-06-16 2011-06-08 엘이디 검사장치 및 이를 이용한 엘이디 검사방법 WO2011159060A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100057269A KR101032435B1 (ko) 2010-06-16 2010-06-16 엘이디 검사장치 및 이를 이용한 엘이디 검사방법
KR10-2010-0057269 2010-06-16

Publications (2)

Publication Number Publication Date
WO2011159060A2 WO2011159060A2 (ko) 2011-12-22
WO2011159060A3 true WO2011159060A3 (ko) 2012-03-08

Family

ID=44365526

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/004204 WO2011159060A2 (ko) 2010-06-16 2011-06-08 엘이디 검사장치 및 이를 이용한 엘이디 검사방법

Country Status (2)

Country Link
KR (1) KR101032435B1 (ko)
WO (1) WO2011159060A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101816223B1 (ko) * 2016-09-29 2018-01-09 주식회사 파이맥스 엘이디 광특성 검사장치 및 이를 구비한 엘이디 융합조명용 자동화 검사 및 조립 시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070002211A (ko) * 2005-06-30 2007-01-05 (주) 핸들러월드 복식 발광 다이오드 검사장치
KR20100043509A (ko) * 2008-10-20 2010-04-29 미래산업 주식회사 발광소자 테스트 핸들러
KR20100045230A (ko) * 2008-10-23 2010-05-03 미래산업 주식회사 발광소자 테스트 핸들러

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070002211A (ko) * 2005-06-30 2007-01-05 (주) 핸들러월드 복식 발광 다이오드 검사장치
KR20100043509A (ko) * 2008-10-20 2010-04-29 미래산업 주식회사 발광소자 테스트 핸들러
KR20100045230A (ko) * 2008-10-23 2010-05-03 미래산업 주식회사 발광소자 테스트 핸들러

Also Published As

Publication number Publication date
KR101032435B1 (ko) 2011-05-03
WO2011159060A2 (ko) 2011-12-22

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