WO2011155634A1 - Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device - Google Patents
Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device Download PDFInfo
- Publication number
- WO2011155634A1 WO2011155634A1 PCT/JP2011/063623 JP2011063623W WO2011155634A1 WO 2011155634 A1 WO2011155634 A1 WO 2011155634A1 JP 2011063623 W JP2011063623 W JP 2011063623W WO 2011155634 A1 WO2011155634 A1 WO 2011155634A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric
- piezoelectric material
- tungsten bronze
- bronze structure
- metal oxide
- Prior art date
Links
- 239000000463 material Substances 0.000 title claims abstract description 137
- 239000007788 liquid Substances 0.000 title claims abstract description 36
- 238000004140 cleaning Methods 0.000 title claims abstract description 22
- 239000000428 dust Substances 0.000 title claims abstract description 21
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 91
- 239000010937 tungsten Substances 0.000 claims abstract description 89
- 239000010955 niobium Substances 0.000 claims abstract description 67
- -1 tungsten bronze structure metal oxide Chemical class 0.000 claims abstract description 44
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 21
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 9
- 229910052788 barium Inorganic materials 0.000 claims abstract description 8
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 5
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims abstract description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000011734 sodium Substances 0.000 claims description 33
- 239000011572 manganese Substances 0.000 claims description 27
- 238000002441 X-ray diffraction Methods 0.000 claims description 15
- 229910052708 sodium Inorganic materials 0.000 claims description 14
- 229910052748 manganese Inorganic materials 0.000 claims description 7
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 5
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- ZUJVZHIDQJPCHU-UHFFFAOYSA-N [Ba].[Bi] Chemical compound [Ba].[Bi] ZUJVZHIDQJPCHU-UHFFFAOYSA-N 0.000 abstract description 5
- 230000000052 comparative effect Effects 0.000 description 48
- 239000000203 mixture Substances 0.000 description 28
- 238000012545 processing Methods 0.000 description 28
- 239000000843 powder Substances 0.000 description 18
- 238000010348 incorporation Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 238000004458 analytical method Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 12
- 239000002002 slurry Substances 0.000 description 11
- 230000006870 function Effects 0.000 description 10
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 10
- 229910001930 tungsten oxide Inorganic materials 0.000 description 10
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000011575 calcium Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 5
- 229910000416 bismuth oxide Inorganic materials 0.000 description 5
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 239000004570 mortar (masonry) Substances 0.000 description 5
- 229910000484 niobium oxide Inorganic materials 0.000 description 5
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 5
- 229910000906 Bronze Inorganic materials 0.000 description 4
- 239000010974 bronze Substances 0.000 description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000011505 plaster Substances 0.000 description 4
- 229910000029 sodium carbonate Inorganic materials 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 238000003991 Rietveld refinement Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 2
- 238000001636 atomic emission spectroscopy Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007569 slipcasting Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000004876 x-ray fluorescence Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- YSZKOFNTXPLTCU-UHFFFAOYSA-N barium lithium Chemical compound [Li].[Ba] YSZKOFNTXPLTCU-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000012921 fluorescence analysis Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000009768 microwave sintering Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth based oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
- B08B7/026—Using sound waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G33/00—Compounds of niobium
- C01G33/006—Compounds containing, besides niobium, two or more other elements, with the exception of oxygen or hydrogen
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/50—Solid solutions
- C01P2002/52—Solid solutions containing elements as dopants
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3213—Strontium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3215—Barium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6027—Slip casting
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/605—Making or treating the green body or pre-form in a magnetic field
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/787—Oriented grains
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/81—Materials characterised by the absence of phases other than the main phase, i.e. single phase materials
Definitions
- the present invention relates to piezoelectric materials.
- it relates to a lead-free
- piezoelectric material It also relates to a piezoelectric element, a liquid discharge head, an ultrasonic motor, and a dust cleaning device that use the lead-free piezoelectric material .
- Lead zirconate titanate that contains lead is a piezoelectric material most widely used in various industries.
- piezoelectric materials This is to address the concern that lead-containing piezoelectric devices once discarded and exposed to acid rain may inflict damage on ecosystem as the lead component in the piezoelectric materials may leach into earth. Thus, various proposals of piezoelectric material have been made.
- the lead-free piezoelectric material is a tungsten bronze structure material containing, for example , barium bismuth niobate as a main component .
- PTL 1 discloses a material system that contains barium lithium niobate as a main component and bismuth niobate as an accessory component.
- the unit cell of crystals having a tungsten bronze structure has a high shape anisotropy, the polar axis direction lies only in the c-axis direction, i.e., the short side direction of the unit cell. Accordingly, there have been fewer effective domains that can contribute to piezoelectricity and the piezoelectric properties have been unsatisfactory.
- Another approach to enhancing the properties of a lead-free piezoelectric material having a tungsten bronze structure is to orient the piezoelectric material by using a magnetic field (magnetic orientation) .
- Magnetic orientation can increase the number of effective magnetic domains that contribute to piezoelectricity.
- PTL 2 discloses a technique of using anisotropic particles as the starting material to improve the degree of orientation in conducting magnetic orientation.
- this technique is applicable only to piezoelectric materials that have a composition that can use anisotropic particles as the starting material.
- the present invention provide a lead-free piezoelectric material including a barium bismuth niobate- based tungsten bronze structure metal oxide having a high degree of orientation.
- a piezoelectric element, a liquid discharge head, an ultrasonic motor, and a dust cleaning device that include the piezoelectric material are also provided.
- the present invention provides a piezoelectric material that includes a tungsten bronze structure metal oxide that includes metal elements which are barium, bismuth, and niobium, and tungsten.
- the metal elements satisfy
- the tungsten content on a metal basis is 0.40 to 3.00 parts by weight relative to 100 parts by weight of the tungsten bronze structure metal oxide.
- the tungsten bronze structure metal oxide has a c-axis orientation.
- the present invention also provides a piezoelectric element that includes a first electrode, a piezoelectric material, and a second electrode.
- the present invention also provides a liquid discharge head, an ultrasonic motor, and a dust cleaning device that include this piezoelectric element .
- the present invention can provide a piezoelectric material including a barium bismuth niobate-based tungsten bronze structure metal oxide having a high degree of
- a piezoelectric element, a liquid discharge head, an ultrasonic motor, and a dust cleaning device that have high durability can also be
- Figs. 1A and IB are diffraction patterns of
- piezoelectric materials taken by X-ray diffraction analysis in a 2 ⁇ - ⁇ mode.
- Fig. 2 is a schematic view of a piezoelectric element according to an embodiment .
- FIG. 3A and Fig. 3B are schematic diagrams showing one example of a liquid discharge head according to an embodiment .
- Fig. 4A is a schematic diagram showing an
- ultrasonic motor according to an embodiment .
- Fig. 4B is a schematic diagram showing an
- ultrasonic motor according to another embodiment .
- FIGs. 5A and 5B are schematic diagrams showing a dust cleaning device according to an embodiment .
- a piezoelectric material according to an embodiment includes a tungsten bronze structure metal oxide that
- the tungsten (W) content on a metal basis is 0.40 to 3.00 parts by weight relative to 100 parts by weight of the tungsten bronze structure metal oxide.
- the tungsten bronze structure metal oxide has a c-axis orientation.
- tungsten bronze structure refers to what is generally known as tetragonal tungsten bronze (TTB) structure, and not H x W0 3 (tungsten bronze) or a hexagonal tungsten bronze (HTB) structure known for its electrochromic phenomena.
- TTB tetragonal tungsten bronze
- H x W0 3 tungsten bronze
- HTB hexagonal tungsten bronze
- the piezoelectric material has a tungsten bronze structure and contains Ba, Bi, and Nb. It is considered that Ba and Bi occupy A sites and Nb occupies B sites.
- the ratio a of Ba to Nb on a molar basis is 0.30 ⁇ a ⁇ 0.40.
- the ratio a is less than 0.30, the curie temperature is lowered and the piezoelectric material may not function at room temperature.
- the ratio a is
- the ratio b of Bi to Nb on a molar basis is 0.012 ⁇ b ⁇ 0.084.
- the ratio b is greater than 0.084, the curie temperature is lowered and the piezoelectric material may not function at room temperature.
- the ratio b is less than 0.012, the piezoelectric property may be lowered.
- the W content "on a metal basis” is determined by measuring the contents of metals, such as Ba, Bi, Nb, and W from the tungsten bronze structure metal oxide by X-ray fluorescence analysis, ICP atomic emission spectroscopy, atomic absorption spectrometry, or the like, converting the measured contents of the elements, such as Ba, Bi, and Nb, constituting the tungsten bronze structure into oxide-based values , and determining the ratio of the weight of tungsten (W) relative to the total of the converted metal contents.
- metals such as Ba, Bi, Nb
- W atomic absorption spectrometry
- a-axis Three axes that extend along the sides of the unit cell constituting a crystal are referred to as a-axis, b- axis, and c-axis.
- a tungsten bronze structure has a cuboidal unit cell and the three axes intersect one another perpendicularly.
- the length of each axis is referred to as "axis length" .
- the c-axis length of the tungsten bronze structure is as short as about one third of the a-axis length or the b-axis length. In this
- (001) plane refers to a plane to which the c-axis is normal.
- orient means that all or part of subject crystal faces are oriented in a particular direction.
- degree of orientation indicates the degree at which the crystal faces are oriented. The degree of orientation increases when there are more portions where subject crystals faces are oriented in a particular
- c-axis orientation means that crystal faces that lie in the c-axis direction are oriented, i.e., (001) planes are oriented. In other words, the "c-axis orientation” and the “(001) plane orientation” have the same meaning.
- the pole axis direction which is the function- occurring axis of a tungsten bronze structure as a
- piezoelectric material is the c-axis direction.
- the piezoelectric property of a tungsten bronze structure metal oxide is enhanced when c-axis orientation is achieved.
- tungsten bronze structure metal oxide is expressed by a chemical formula, A 4 - 6 B 10 O30.
- A indicates elements that occupy A sites.
- Al sites (12-coordinated box-shaped sites when viewed in the c-axis direction) and A2 sites ( 15-coordinated pentagonal sites when viewed in the c-axis direction) are not
- Ba and Bi primarily occupy one of two specific positions called Al sites and A2 sites that exist around the oxygen octahedron. The maximum value of the sum of the numbers of Al sites and A2 sites is 6.
- B indicates elements that occupy B sites. Pentavalent elements primarily occupy the B sites. In this invention, B is primarily Nb and exists inside the oxygen octahedron.
- tungsten sometimes occupies some of the B sites but this is not essential.
- the form in which W is contained may be an oxide, a metal, or a metal ion.
- the piezoelectric material Since the piezoelectric material has a high degree of c-axis orientation, the piezoelectric constant thereof increases significantly.
- the W content on a metal basis is 0.40 to 3.00 parts by weight relative to 100 parts by weight of the
- the curie temperature may drop significantly. If the curie temperature is low,
- the W content is preferably 0.40 to 2.40 parts by weight and more preferably 1.20 to 2.40 parts by weight .
- the Lotgering factor F of the piezoelectric material may be 0.56 to 1.00.
- a Lotgering factor is an indicator of the degree of c-axis (or (001)) orientation of the tungsten bronze structure metal oxide determined by X- ray diffraction analysis.
- Lotgering factor F larger than 0 indicates that the subject crystal faces are oriented.
- the Lotgering factor F is 1
- the only peak detected is the diffraction peak attributable to the subject crystal plane. In other words, all crystals detectable by X-ray diffraction analysis are aligned and oriented in the subject direction.
- the Lotgering factor F is calculated by 2 ⁇ - ⁇ X-ray diffraction analysis. It is calculated using equation 1 below by using the cumulative peak intensity of X rays diffracted by the target crystal plane at 2 ⁇ in the range of 10° to 70° :
- Equation 1 in the case of c-axis orientation, p 0 is determined by using the X-ray diffraction intensity (I 0 ) of a randomly oriented sample and calculated from equation ( 2 ) below as the ratio of the total of the diffraction
- Equation 1 in case of the c-axis orientation, p is determined by using the X-ray diffraction intensity (I) of an oriented sample and calculated from equation ( 3 ) below as the ratio of the total of the diffraction intensities of the (001) plane to the total diffraction intensity as with equation ( 2 ) above:
- the molar ratio a of Ba to Nb is 0.30 ⁇ a ⁇ 0.40.
- the ratio a is less than 0.30, the curie temperature is low and the piezoelectric material may not function at room temperature.
- the ratio a is greater than 0.40, the piezoelectric property may be lowered.
- the molar ratio b of Bi to Nb is 0.012 ⁇ b ⁇ 0.084.
- the ratio b is greater than 0.084, the curie
- the piezoelectric material may not function at room temperature.
- the ratio b is less than 0.012, the piezoelectric property may be lowered.
- the molar ratio c of Na to Nb is 0.012 ⁇ c ⁇ 0.075.
- the ratio c is larger than 0.075, the curie temperature is low and the piezoelectric material may not function at room temperature.
- the ratio c is less than 0.012, the piezoelectric property may be lowered.
- the molar ratio d of Bi to Na is 0.90 ⁇ d ⁇ 1.1.
- piezoelectricity is achieved by the effect brought by combination of Bi and Na, the tungsten bronze structure metal oxide is suitable as a piezoelectric material
- the tungsten bronze structure metal oxide contained in the piezoelectric material may be represented by
- the molar ratio e of Ba occupying the A sites is 0.60 ⁇ e ⁇ 0.80.
- the molar ratio e is less than 0.60, the curie temperature is low and the piezoelectric material may not function at room temperature.
- the tungsten bronze structure single phase may not be formed. That the piezoelectric material has a tungsten bronze structure single phase can be
- the molar ratio f of Ca occupying the A sites is 0 ⁇ f ⁇ 0.25.
- the mechanical quality factor is improved.
- abnormal grain growth may occur during sintering.
- a sintered material that has undergone abnormal grain growth is susceptible to cracking and breaking, has a low fracture strength, and thus is not suitable for use in devices.
- the molar ratio g of Bi occupying the A sites is 0.012 ⁇ g ⁇ 0.15.
- the ratio g is greater than 0.15, the curie temperature is low and the piezoelectric material may not function at room temperature.
- the molar ratio g is less than 0.012, the piezoelectric property may be low.
- the molar ratio h of Na occupying the A sites is 0.012 ⁇ h ⁇ 0.15.
- the molar ratio h is greater than 0.15, the curie temperature is low and the piezoelectric material may not function at room temperature.
- the ratio h is less than 0.012, the piezoelectric property may be low.
- a piezoelectric material having a molar ratio h less than 0.012 may be used.
- the tungsten bronze structure metal oxide contained in the piezoelectric material may be represented by (Baj.. x,Bi 2 x 3)5 bio0 3 o (0.20 ⁇ x ⁇ 0.25).
- the molar ratio x of Bi occupying the A sites is 0.20 ⁇ x ⁇ 0.25. When the molar ratio x is less than 0.20, the piezoelectric property may be lowered. When the molar ratio x is greater than 0.25, the curie temperature is low, and the piezoelectric material may not function at room temperature . [0047]
- the piezoelectric material may further contain manganese (Mn). The Mn content on a metal basis may be 0.16 to 0.48 parts by weight relative to 100 parts by weight of the tungsten bronze structure metal oxide.
- the mechanical quality factor can be improved without degrading the Lotgering factor F.
- the Mn content is 0.16 to 0.48 parts by weight. When the Mn content is less than 0.16 parts by weight, the properties may not change much compared to when no Mn is contained. When the Mn content exceeds 0.48 parts by weight, the piezoelectric properties may deteriorate and non-tungsten bronze structure phases may occur.
- the Mn content may be 0.16 to 0.32 parts by weight.
- the mechanical quality factor Qm is a factor that indicates elastic loss caused by vibration when the piezoelectric material is evaluated as a vibrator. When the magnitude of the mechanical quality factor is electrically measured, the mechanical quality factor is observed as the sharpness of a resonance curve. In other words, the mechanical quality factor is a factor that indicates the sharpness of the resonance of a vibrator.
- the region of the piezoelectric material in which Mn exists is not limited. Manganese may occupy the sites or lie in grain boundaries without occupying the sites.
- the form of incorporation of Mn may be any of metal, oxide, and metal ion. When Mn is incorporated in form of metal ion, the valence may be 2 , 3, 4 , or 6.
- Sr and Mg may occupy the A sites of the tungsten bronze structure metal oxide and elements other than Nb may occupy the B sites of the tungsten bronze structure metal oxide to facilitate production of the piezoelectric material or adjust the physical properties of the piezoelectric material.
- elements to be contained in the B sites include not only pentavalent metal elements such as Ta and V but also trivalent and tetravalent metal elements , more specifically, Fe, Al, Ti, and Zr.
- the content of these elements to be contained in the B sites is preferably 20 mol% or less and more preferably 5 mol% or less of all B- site elements. The decrease in total valence of the B-site elements may be compensated by increasing the amount of the A-site elements.
- Elements such as Cu, Zn, and Co may be added to the piezoelectric material to facilitate production of the piezoelectric material and adjust the physical properties of the piezoelectric material.
- the amount of such additional element may be 5 parts by weight or less relative to 100 parts by weight of the tungsten bronze structure metal oxide. When more than 5 parts by weight of such elements are added, structures other than the tungsten bronze structure may occur and the insulating property may decrease.
- the metal elements that occupy the respective sites of the piezoelectric material can be identified by, for example, a Rietveld method. According to the Rietveld method, not only the type of metal that occupies the sites but also the ratio thereof can be identified.
- the method for preparing the piezoelectric material is not particularly limited.
- the piezoelectric material may be prepared by a common method of sintering a powder
- raw materials such as oxides , nitrates , and oxalates of the metals constituting the piezoelectric material or a molded body prepared by slip casting, the sintering being performed under a normal pressure.
- raw materials such as oxides , nitrates , and oxalates of the metals constituting the piezoelectric material or a molded body prepared by slip casting
- the sintering being performed under a normal pressure.
- other techniques include electric heating, microwave sintering, millimeter wave sintering, and hot isostatic pressing.
- a technique of sintering, under a normal pressure, a molded body formed by slip-casting a slurry may be employed.
- the method for orienting the piezoelectric material is not limited to a particular method.
- a grain orientation method using a doctor blade or a magnetic orientation method that uses a high magnetic field may be employed.
- a magnetic orientation method is preferred since a molded body having a c-axis orientation can be easily obtained.
- a magnetic orientation that uses a rotating magnetic field is more preferable.
- the method for adding W, Mn, etc., to the tungsten bronze structure metal oxide is not particularly limited.
- W may be added after the elements constituting the tungsten bronze structure metal oxide are mixed
- Fig. 2 is a schematic view of a piezoelectric element according to an embodiment .
- the element of this embodiment includes a piezoelectric material, and a first electrode and a second electrode disposed on the piezoelectric material.
- the first and second electrodes may be disposed on one surface of the piezoelectric material or on opposing surfaces of the piezoelectric material so as to sandwich the piezoelectric material.
- FIG. 3A and Fig. 3B are schematic diagrams showing one example of a liquid discharge head according to an embodiment of the present invention.
- the liquid discharge head includes a piezoelectric element 101.
- piezoelectric element 101 includes a first electrode 1011, a piezoelectric material 1012, and a second electrode 1013.
- the piezoelectric material 1012 is patterned according to need as shown in Fig. 3B.
- FIG. 3B is a schematic diagram of the liquid discharge head.
- the liquid discharge head includes discharge ports 105, individual liquid chambers 102,
- the piezoelectric element 101 in the drawing has a rectangular shape, it may have any other shape, such as elliptical, circular, rectangular parallelepiped, etc.
- the piezoelectric material 1012 has a shape corresponding to the shape of the individual liquid chambers 102.
- Fig. 3A is a cross- sectional view of the piezoelectric element taken in the width direction of the liquid discharge head shown in Fig. 3B.
- the cross-sectional shape of the piezoelectric device 101 is rectangular in this embodiment, the shape may be a trapezoidal or reversed trapezoidal shape.
- the first electrode 1011 is used as a lower electrode and the second electrode 1013 is used as an upper electrode.
- arrangement of the first electrode 1011 and the second electrode 1013 is not limited to this.
- the first electrode 1011 may be used as a lower electrode or an upper electrode.
- the second electrode 1013 may be used as an upper electrode or a lower electrode.
- a buffer layer 108 may be interposed between the vibrating plate 103 and the lower electrode.
- the vibrating plate 103 moves up and down by expansion and contraction of the piezoelectric material 1012 and pressure the liquid contained in the individual liquid chambers 102 so that the liquid is
- discharge head can be used in printers and for electronic device production.
- the thickness of the vibrating plate 103 is 1.0 ⁇ or more and 15 ⁇ or less and preferably 1.5 ⁇ or more and 8 ⁇ or less.
- the material for the vibrating plate 103 is not limited but may be silicon. Silicon constituting the vibrating plate may be doped with boron or phosphorus .
- the buffer layer and the electrode layer on the vibrating plate may form part of the vibrating plate.
- the thickness of the buffer layer 108 is 5 nm or more and 300 nm or less and more preferably 10 nm or more and 200 nm or less.
- the size of the discharge ports 105 is 5 ⁇ or more and 40 ⁇ or less in terms of circular equivalent diameter.
- the shape of the discharge ports 105 may be circular but may be a star shape, a rectangular shape, or a triangular shape.
- Figs. 4A and 4B are schematic views showing examples of embodiments of ultrasonic motors.
- Fig. 4A shows an ultrasonic motor including a piezoelectric element constituted by a single plate.
- This ultrasonic motor includes a vibrator 201, a rotor 202 abutting the sliding surface of the vibrator 201 under pressure from a pressurizing spring not shown in the drawing, and an output shaft 203 integrally formed with the rotor 202.
- the ultrasonic motor includes a vibrator 201, a rotor 202 abutting the sliding surface of the vibrator 201 under pressure from a pressurizing spring not shown in the drawing, and an output shaft 203 integrally formed with the rotor 202.
- vibrator 201 includes a metal elastic ring 2011, a
- the piezoelectric element 2012 includes a first electrode, a second electrode, and a piezoelectric material interposed between the first and second electrodes (not shown ) .
- travelling wave occurs in the vibrator 201, and individual points on the sliding surface of the vibrator 201 undergo elliptical motions.
- the rotor 202 When the rotor 202 is pressure- contacted with the sliding surface of the vibrator 201, the rotor 202 receives friction force from the vibrator 201 and rotates in the direction opposite to the bending travelling wave.
- An object to be driven not shown in the drawing is joined to the output shaft 203 and is driven by the turning force of the rotor 202.
- a voltage is applied to the piezoelectric material, the piezoelectric material expands and contracts by a transversal piezoelectric effect.
- an elastic body such as a metal
- the elastic body is bent by the expansion and contraction of the piezoelectric material.
- the type of ultrasonic motor described here utilizes this principle .
- Fig. 4B shows an example of an ultrasonic motor that includes a piezoelectric element having a multilayer structure.
- a vibrator 204 includes cylindrical metal elastic bodies 2041 and a multilayer piezoelectric element 2042 interposed between the cylindrical metal elastic bodies 2041.
- the multilayer piezoelectric element 2042 is an element that includes two or more layers of piezoelectric materials not shown in the drawing and includes a first electrode and a second electrode on the outer surface of the multilayer structure and inner electrodes inside the
- the cylindrical metal elastic bodies 2041 are joined with bolts to fix the multilayer piezoelectric element 2042 therebetween to make a vibrator 204.
- the vibrator 204 excites two vibrations orthogonal to each other. These two vibrations are combined to form circular vibrations for driving at the tip of the vibrator 204. Note that an annular groove is formed in the upper portion of the vibrator 204 to increase the displacement of the vibration for driving.
- a rotor 205 pressure-contacts the vibrator 204 due to a spring 206 for pressurization and obtains frictional force for driving.
- the rotor 205 is rotatably supported by bearings .
- FIGs. 5A and 5B are schematic diagrams showing an embodiment of a dust cleaning device.
- a dust cleaning device 310 includes a plate-shaped piezoelectric element 330 and a vibrating plate 320.
- the material of the vibrating plate 320 is not limited, a transparent material or a light -reflecting material may be used in the vibrating plate 320 when the dust cleaning device 310 is to be used in optical devices .
- the piezoelectric element may be used in a liquid discharge head, an ultrasonic motor, etc., as mentioned above. When the lead-free piezoelectric material containing a tungsten bronze structure metal oxide is used in a liquid discharge head, a nozzle density and discharge force
- a dust cleaning efficiency comparable or superior to that of a dust cleaning device that uses a lead-containing piezoelectric material can be achieved .
- the piezoelectric material can also be used in devices other than the liquid discharge head and motor, such as ultrasonic vibrators, piezoelectric actuators,
- a slurry was prepared from the calcined powder. That is, the calcined powder was pulverized, mixed with particular amounts of pure water and a dispersant, and dispersed with a pot mill to obtain a slurry.
- Figs. 1A and IB are diagrams observed by 2 ⁇ - ⁇ XRD.
- Fig. 1A is the XRD pattern of a piezoelectric material of Example 10
- Fig. IB is the XRD pattern of a piezoelectric material of Comparative Example 1.
- the patterns show that both profiles are that of a tungsten bronze structure metal oxide single phase.
- the term "single phase" is used when all or nearly all parts of the sintered body are constituted by tungsten bronze structure crystals.
- the piezoelectric material had a tungsten bronze structure represented by (Ba,Bi,Na) 5 Nbio0 3 o.
- the sintered body was polished to a thickness of 1 mm and heat-treated in air at 500° C to 1000° C for 1 hour to remove organic matter on the surfaces.
- Au electrodes 500 ⁇ in thickness were formed by DC-sputtering on both surfaces of the sintered body.
- the resulting product was cut to 2.5 mm x 10 mm by using a cutting machine and used for evaluating various electrical characteristics.
- Polarizing was conducted by applying a voltage of 2 to 5 kV/cm for 10 minutes at 120° C to 200° C in a silicone oil.
- the piezoelectric property was evaluated using a d 33 meter (PiezoMeter System produced by Piezotest).
- Table 1 shows the composition, Lotgering factor F, and d 33 of the piezoelectric materials.
- a denotes the ratio Ba/Nb on a molar basis
- b denotes the ratio Bi/Nb on a molar basis
- c denotes the ratio Na/Nb on a molar basis
- d denotes the ratio Bi/Na on a molar basis.
- W parts by weight indicates the ratio of the weight of metallic tungsten to the total weight of the elements, such as Ba, Bi, Na, and Nb, constituting the tungsten bronze structure on an oxide basis
- F denotes the Lotgering factor F indicating the degree of orientation of (001) plane
- d 33 denotes the piezoelectric constant d 33 .
- a slurry was prepared as in Examples 1 to 13.
- Molded bodies were obtained as in Examples 1 to 13 including performance the magnetic-field processing except that the tungsten oxide powder was not used.
- a molded body was obtained as in Examples 1 to 13 including performance of the magnetic-field processing.
- the molded body was sintered as in Examples 1 to 13 including performance of the magnetic-field processing to obtain a sample of Comparative Example 4.
- the electrical characteristics of the sample of Comparative Example 4 were evaluated as in Examples 1 to 13.
- the composition, F, and d 33 of the obtained piezoelectric material are shown in Table 1.
- Example 10 Comparison of Example 10 (with magnetic-field processing) and Comparative Example 1 (without magnetic- field processing) having the same composition and the same W content shows that the piezoelectric constant d 33 of Example 10 is significantly increased by conducting the magnetic orientation .
- Example 1 (with magnetic-field processing) having a W content of 1.20 parts by weight and Comparative Example 2 (with magnetic field processing) containing no shows that the Lotgering factor F and the piezoelectric constant d 33 of the Example 1 are improved. This result suggests that incorporation of W increases the Lotgering factor F and the piezoelectric constant d 33 when magnetic-field processing is conducted.
- Examples 8 to 10 with magnetic field processing
- Comparative Example 4 with magnetic field processing
- All samples had the same composition except for the W content. Comparison shows that the Lotgering factor F and the piezoelectric constant d 33 increase with the W content. In Comparative Example 4 in which the W content was 0.20 parts by weight, the Lotgering factor F was not significantly different from that of a sample with zero W content.
- the W content may be 0.40 to 3.00 parts by weight.
- Example 11 (with magnetic field processing). Comparative Example 5 (with magnetic field processing) , and Example 12 (with magnetic field processing) and Comparative Example 6 (with magnetic field processing) are compared. In these samples, the Bi/Na ratio d on a molar basis is
- Table 1 suggests that when W is added to the material system containing Ba, Bi, Na, and Nb, the Lotgering factor F and the piezoelectric constant d 33 are increased.
- Piezoelectric materials of these examples differ from the piezoelectric materials mentioned above in that manganese (Mn) is further added.
- Mn manganese
- Barium carbonate, bismuth oxide, sodium carbonate, niobium oxide, manganese oxide, and tungsten oxide powders were used as the raw materials. The powders were weighed and dry-mixed in a mortar. The mixture was then placed in an alumina crucible and calcined at 900° C to 1100° C for 2 to 5 hours in air.
- Table 2 shows the composition, F, and d 33 of the obtained piezoelectric materials.
- a denotes the ratio Ba/Nb on a molar basis
- b denotes the ratio Bi/Nb on a molar basis
- c denotes the ratio Na/Nb on a molar basis
- d denotes the ratio Bi/Na on a molar basis.
- W parts by weight indicates the ratio of the weight of metallic tungsten to the total weight of the elements, such as Ba, Bi, Na, and Nb, constituting the tungsten bronze structure on an oxide basis
- Mn parts by weight is the ratio of the weight of metallic tungsten to the total weight of the elements
- d 33 denotes the piezoelectric constant d 33 .
- Molded bodies were obtained as in Examples 14 to 17 including the performance of the magnetic field processing except that the tungsten oxide powder was not used.
- Examples 14, 16, and 17 are compared. These samples had the same composition except for the Mn content. Comparison shows that the Lotgering factor F increases with the Mn content. In contrast, the piezoelectric constant d 33 does not increase monotonically . These results suggest that incorporation of Mn is effective when the Mn content is within the range of 0.16 to 0.48 parts by weight and more preferably within the range of 0.16 to 0.32 parts by weight.
- the mechanical quality factors of all samples of Examples 14 to 17 and Comparative Examples 8 to 10 were 500 or higher.
- the mechanical quality factor of Example 6 not containing Mn is 278. This shows that the material system containing Mn has a higher mechanical quality factor than the material system that contains no Mn.
- Examples 18 to 22 Barium carbonate, strontium carbonate, bismuth oxide, sodium carbonate, niobium oxide, and tungsten oxide powders were used as the raw materials . The powders were weighed and dry-mixed in a mortar. The mixture was then placed in an alumina crucible and calcined at 900° C to
- Table 3 shows the composition, F, and d 33 of the obtained piezoelectric materials.
- a denotes the ratio Ba/Nb on a molar basis
- b denotes the ratio Bi/Nb on a molar basis
- c denotes the ratio Na/Nb on a molar basis
- d denotes the ratio Bi/Na on a molar basis
- tungsten bronze structure denotes the ratio of Sr to Nb on a molar basis.
- W parts by weight indicates the ratio of the weight of metallic tungsten to the total weight of the elements, such as Ba, Bi, Na, Sr, and Nb, constituting the tungsten bronze structure on an oxide basis .
- F denotes the Lotgering factor F indicating the degree of orientation of (001) plane, and d 33 denotes the piezoelectric constant d 33 . Note that the piezoelectric property was little affected when the value b was slightly low.
- Molded bodies were obtained as in Examples 18 to 22 including performance of the magnetic field processing except that the tungsten oxide powder was not used.
- composition, F, and d 33 of the obtained piezoelectric materials are shown in Table 3 .
- Example 22 0.300 0.0500 0.0500 1.00 0.100 0.40 0.66 71.2
- Example 14 [0117] First, Example 18 and Comparative Example 11 are compared. These samples had the same composition except for the W content . Comparison shows that incorporation of W increases the Lotgering factor F and the piezoelectric constant d 33 . The same tendency was observed in comparison between Example 19 and Comparative Example 12, between
- Table 4 shows the composition, F, and d 33 of the obtained piezoelectric materials.
- a denotes the ratio Ba/Nb on a molar basis
- b denotes the ratio Bi/Nb on a molar basis
- c denotes the ratio Na/Nb on a molar basis
- d denotes the ratio Bi/Na on a molar basis
- d 33 denotes the piezoelectric constant d 33 .
- Molded bodies were obtained as in Examples 23 to 26 including performance of the magnetic field processing except that the tungsten oxide powder was not used.
- Example 23 and Comparative Example 15 are compared. These samples had the same composition except for the W content . Comparison shows that incorporation of W increases the Lotgering factor F and the piezoelectric constant d 33 . The same tendency was observed in comparison between Example 24 and Comparative Example 16, between
- Barium carbonate, bismuth oxide, niobium oxide, and tungsten oxide powders were used as the raw materials. The powders were weighed and dry-mixed in a mortar. The mixture was placed in an alumina crucible and calcined at 900° C to 1100° C for 2 to 5 hours in air.
- Table 5 shows the composition, F, and d 33 of the obtained piezoelectric materials.
- a denotes the ratio Ba/Nb on a molar basis
- b denotes the ratio Bi/Nb on a molar basis.
- W parts by weight indicates the ratio of the weight of metallic tungsten to the total weight of the elements, such as Ba, Bi, and Nb, constituting the tungsten bronze structure on an oxide basis.
- F denotes the Lotgering factor F indicating the degree of orientation of (001) plane
- d 33 denotes the piezoelectric constant d 33 .
- composition, F, and d 33 of the obtained piezoelectric materials are shown in Table 5 .
- Example 27 and Comparative Example 19 are compared. These samples had the same composition except for the W content . Comparison shows that incorporation of W increases the Lotgering factor F and the piezoelectric constant d 33 . The same tendency was observed in comparison between Example 28 and Comparative Example 20. These results suggest that incorporation of W increases the Lotgering factor F and the piezoelectric constant d 33 in the material system containing Ba, Bi, and Nb.
- Tables 1 to 5 suggest that the piezoelectric materials of Examples have high Lotgering factor F and piezoelectric constant d 33 and thus have superior
- Liquid discharge head, ultrasonic motor, and dust cleaning device that use piezoelectric materials of Examples 10 and 16
- a liquid discharge head shown in Figs. 3A and 3B, ultrasonic motors shown in Figs. 4A and 4B, and a dust cleaning device shown in Figs . 5A and 5B were fabricated using the piezoelectric materials of Example 10 and Example 16. It was confirmed that ink was discharged from the liquid discharge head according to an input electrical signal and that the ultrasonic motors were rotated by application of alternating voltage. A good dust cleaning rate was observed when plastic beads were spread onto the surface of the dust cleaning device by application of alternating voltage. [0139] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments . The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
- the present invention provides a piezoelectric material containing no components harmful to environment and having high piezoelectricity.
- the present invention also provides a piezoelectric element, a liquid discharge head, an ultrasonic motor, and a dust cleaning device that use the piezoelectric material.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/702,998 US9076969B2 (en) | 2010-06-10 | 2011-06-07 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device |
CN201180027713.1A CN102934248B (en) | 2010-06-10 | 2011-06-07 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device |
EP20110729778 EP2537193B1 (en) | 2010-06-10 | 2011-06-07 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device |
KR1020137000038A KR101368085B1 (en) | 2010-06-10 | 2011-06-07 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010133291 | 2010-06-10 | ||
JP2010-133291 | 2010-06-10 | ||
JP2011-115837 | 2011-05-24 | ||
JP2011115837A JP5791371B2 (en) | 2010-06-10 | 2011-05-24 | Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, dust removing device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011155634A1 true WO2011155634A1 (en) | 2011-12-15 |
Family
ID=44350915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/063623 WO2011155634A1 (en) | 2010-06-10 | 2011-06-07 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device |
Country Status (6)
Country | Link |
---|---|
US (1) | US9076969B2 (en) |
EP (1) | EP2537193B1 (en) |
JP (1) | JP5791371B2 (en) |
KR (1) | KR101368085B1 (en) |
CN (1) | CN102934248B (en) |
WO (1) | WO2011155634A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2425467B1 (en) * | 2009-04-27 | 2013-06-19 | Canon Kabushiki Kaisha | Tungsten bronze-type piezoelectric material and production method therefor |
JP5791372B2 (en) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
JP5791371B2 (en) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, dust removing device |
JP5791370B2 (en) | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
TWI545814B (en) * | 2012-11-02 | 2016-08-11 | 佳能股份有限公司 | Piezoelectric material, piezoelectric element, and electronic equipment |
KR101718259B1 (en) * | 2012-11-02 | 2017-03-20 | 캐논 가부시끼가이샤 | Piezoelectric material, piezoelectric element, multilayered piezoelectric element, liquid discharge head, liquid discharge apparatus, ultrasonic motor, optical apparatus, vibratory apparatus, dust removing device, image pickup apparatus, and electronic equipment |
JP7012430B2 (en) * | 2016-12-21 | 2022-01-28 | 東芝テック株式会社 | Chemical discharge device and chemical droplet lowering device |
CN107952370A (en) * | 2017-11-22 | 2018-04-24 | 北京科技大学 | Piezoelectric transducer for cylindrical membrane component automatically cleaning technology and preparation method thereof |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001072466A (en) | 1999-08-31 | 2001-03-21 | Kyocera Corp | Piezoelectric ceramic composition |
US20070120164A1 (en) * | 2005-10-20 | 2007-05-31 | Canon Kabushiki Kaisha | Film forming method and oxide thin film element |
US20080067898A1 (en) * | 2006-09-15 | 2008-03-20 | Canon Kabushiki Kaisha | Piezoelectric element, and liquid jet head and ultrasonic motor using the piezoelectric element |
JP2008208004A (en) | 2007-02-27 | 2008-09-11 | Nagaoka Univ Of Technology | Method for producing crystalline orientation ceramic |
JP2010133291A (en) | 2008-12-03 | 2010-06-17 | Nissan Motor Co Ltd | Cooling device for internal combustion engine |
WO2010125987A1 (en) * | 2009-04-27 | 2010-11-04 | Canon Kabushiki Kaisha | Tungsten bronze-type piezoelectric material and production method therefor |
WO2011010566A1 (en) * | 2009-07-24 | 2011-01-27 | 株式会社ユーテック | Pzt film, electronic component, method for manufacturing an oxide film, and steam pressure rapid heating device |
JP2011115837A (en) | 2009-12-07 | 2011-06-16 | Furukawa-Sky Aluminum Corp | Method of producing aluminum alloy molded article |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5684612A (en) | 1993-06-11 | 1997-11-04 | Board Of Trustees Of The Leland Stanford Junior University | Method and system for maintaining and controlling the signal-to-noise ratio of hologams recorded in ferroelectric photorefractive materials |
JP3827131B2 (en) | 1998-09-28 | 2006-09-27 | 日産自動車株式会社 | Piezoelectric material and manufacturing method thereof |
JP3842022B2 (en) | 2000-07-19 | 2006-11-08 | 本田技研工業株式会社 | Vehicle hood device |
JP2003261379A (en) | 2002-03-06 | 2003-09-16 | National Institute Of Advanced Industrial & Technology | Polycrystalline piezoelectric material and method of producing the same |
US7381671B2 (en) | 2004-02-06 | 2008-06-03 | Murata Manufacturing Co., Ltd. | Ferroelectric ceramic composition and applied ferroelectric element including same |
JP4375560B2 (en) | 2004-12-07 | 2009-12-02 | セイコーエプソン株式会社 | Method for manufacturing transistor-type ferroelectric memory |
JP2006182643A (en) | 2006-01-27 | 2006-07-13 | Kyocera Corp | Piezoelectric ceramic composition |
DE102006008742B4 (en) | 2006-02-24 | 2010-01-28 | Siemens Ag | Lead-free piezoceramic material with Erdalkalidotierung, method for producing a piezoceramic component with the material and use of the component |
US8518290B2 (en) * | 2008-07-30 | 2013-08-27 | Canon Kabushiki Kaisha | Piezoelectric material |
CN101575213B (en) | 2009-06-05 | 2011-11-16 | 北京工业大学 | Preparation process for improving dielectric and piezoelectric properties of Sr<2-x>CaxNaNb5O15 ceramic |
WO2011040630A1 (en) | 2009-09-30 | 2011-04-07 | Canon Kabushiki Kaisha | Piezolectric material comprising tungsten bronze structure metal oxide |
JP5791370B2 (en) | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
JP5791371B2 (en) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, dust removing device |
JP5791372B2 (en) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
-
2011
- 2011-05-24 JP JP2011115837A patent/JP5791371B2/en active Active
- 2011-06-07 WO PCT/JP2011/063623 patent/WO2011155634A1/en active Application Filing
- 2011-06-07 KR KR1020137000038A patent/KR101368085B1/en active IP Right Grant
- 2011-06-07 EP EP20110729778 patent/EP2537193B1/en not_active Not-in-force
- 2011-06-07 US US13/702,998 patent/US9076969B2/en not_active Expired - Fee Related
- 2011-06-07 CN CN201180027713.1A patent/CN102934248B/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001072466A (en) | 1999-08-31 | 2001-03-21 | Kyocera Corp | Piezoelectric ceramic composition |
US20070120164A1 (en) * | 2005-10-20 | 2007-05-31 | Canon Kabushiki Kaisha | Film forming method and oxide thin film element |
US20080067898A1 (en) * | 2006-09-15 | 2008-03-20 | Canon Kabushiki Kaisha | Piezoelectric element, and liquid jet head and ultrasonic motor using the piezoelectric element |
JP2008208004A (en) | 2007-02-27 | 2008-09-11 | Nagaoka Univ Of Technology | Method for producing crystalline orientation ceramic |
JP2010133291A (en) | 2008-12-03 | 2010-06-17 | Nissan Motor Co Ltd | Cooling device for internal combustion engine |
WO2010125987A1 (en) * | 2009-04-27 | 2010-11-04 | Canon Kabushiki Kaisha | Tungsten bronze-type piezoelectric material and production method therefor |
WO2011010566A1 (en) * | 2009-07-24 | 2011-01-27 | 株式会社ユーテック | Pzt film, electronic component, method for manufacturing an oxide film, and steam pressure rapid heating device |
JP2011115837A (en) | 2009-12-07 | 2011-06-16 | Furukawa-Sky Aluminum Corp | Method of producing aluminum alloy molded article |
Non-Patent Citations (1)
Title |
---|
OLIVER J R ET AL: "Ferroelectric properties of tungsten bronze morphotropic phase boundary systems", JOURNAL OF THE AMERICAN CERAMIC SOCIETY, BLACKWELL PUBLISHING, MALDEN, MA, US, vol. 72, no. 2, 1 February 1989 (1989-02-01), pages 202 - 211, XP002594221, ISSN: 0002-7820 * |
Also Published As
Publication number | Publication date |
---|---|
JP2012017249A (en) | 2012-01-26 |
CN102934248A (en) | 2013-02-13 |
CN102934248B (en) | 2015-01-14 |
KR101368085B1 (en) | 2014-02-26 |
JP5791371B2 (en) | 2015-10-07 |
EP2537193A1 (en) | 2012-12-26 |
US9076969B2 (en) | 2015-07-07 |
US20130088120A1 (en) | 2013-04-11 |
KR20130036042A (en) | 2013-04-09 |
EP2537193B1 (en) | 2014-05-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9054309B2 (en) | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device | |
US9076969B2 (en) | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device | |
KR101541022B1 (en) | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device | |
KR20140036249A (en) | Oriented piezoelectric ceramic, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device | |
KR20130132988A (en) | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device | |
US8884498B2 (en) | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaning device | |
WO2011040630A1 (en) | Piezolectric material comprising tungsten bronze structure metal oxide | |
JP5597368B2 (en) | Multilayer electronic component and manufacturing method thereof | |
JP5484180B2 (en) | COMPOUND HAVING PIEZOELECTRIC CHARACTERISTICS, PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD AND ULTRASONIC MOTOR USING THE SAME | |
JP5894222B2 (en) | Multilayer electronic component and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201180027713.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11729778 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011729778 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13702998 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20137000038 Country of ref document: KR Kind code of ref document: A |