WO2011155476A1 - Inkjet application device - Google Patents

Inkjet application device Download PDF

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Publication number
WO2011155476A1
WO2011155476A1 PCT/JP2011/063000 JP2011063000W WO2011155476A1 WO 2011155476 A1 WO2011155476 A1 WO 2011155476A1 JP 2011063000 W JP2011063000 W JP 2011063000W WO 2011155476 A1 WO2011155476 A1 WO 2011155476A1
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WO
WIPO (PCT)
Prior art keywords
ink
nozzle
region
nozzle surface
coating apparatus
Prior art date
Application number
PCT/JP2011/063000
Other languages
French (fr)
Japanese (ja)
Inventor
宏晃 新畑
千幸 神徳
Original Assignee
シャープ株式会社
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Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Publication of WO2011155476A1 publication Critical patent/WO2011155476A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16535—Cleaning of print head nozzles using wiping constructions

Definitions

  • the present invention generally relates to an ink jet coating apparatus, and more particularly to an ink jet coating apparatus including a cleaning mechanism for wiping the nozzle surface.
  • Japanese Patent Application Laid-Open No. 2006-248102 discloses an inkjet coating apparatus for improving the wiping state of excess ejection liquid on the nozzle surface of an inkjet head and stabilizing the ejection of the solution. (Patent Document 1).
  • the inkjet coating apparatus disclosed in Patent Document 1 includes a wiping cloth, a feeding mechanism that feeds the wiping cloth to the front surface of the nozzle surface of the inkjet head, and a roller that presses the wiping cloth against the nozzle surface.
  • the wiping cloth is formed of a band-shaped member having a low dust generation and water absorption, for example, a polyester fiber.
  • the nozzle surface is wiped off by the roller moving along the nozzle surface while pressing the wiping cloth against the nozzle surface.
  • Japanese Patent Application Laid-Open No. 2005-305845 discloses a liquid ejection head cleaning device for the purpose of improving the cleaning effect of the nozzle surface of the liquid ejection head (Patent Document 2).
  • the cleaning device disclosed in Patent Document 2 includes a cleaning roller in which a surface that contacts the nozzle surface is formed by a fibrous absorbent body and wipes the nozzle surface.
  • Patent Document 3 discloses a print cleaning mechanism aimed at improving ejection reliability (Patent Document 3).
  • the print cleaning mechanism disclosed in Patent Document 3 includes a cleaning roller made of an elastic porous material, and a cleaning paper made of a nonwoven fabric and disposed between a head portion that supplies ink when the ink is wiped off, and the cleaning roller.
  • Japanese Patent Application Laid-Open No. 2007-268378 discloses a solution coating apparatus for the purpose of preventing wiping from occurring on the nozzle tip surface when the nozzle plate tip surface is cleaned with a wiping plate.
  • Patent Document 4 discloses a solution coating apparatus for the purpose of preventing wiping from occurring on the nozzle tip surface when the nozzle plate tip surface is cleaned with a wiping plate.
  • the solution coating apparatus disclosed in Patent Document 4 includes a nozzle plate having a nozzle for discharging a solution and a screw hole provided around the nozzle. The opening surface of the screw hole is formed so as to recede in the solution application direction from the opening surface of the nozzle.
  • An inkjet coating apparatus is used in a manufacturing process for forming a functional film such as a resist or an alignment film on the surface of a substrate.
  • a cleaning device for wiping off the ink adhering to the nozzle surface is used. Specifically, the ejection stability is realized by wiping the ink so that the nozzle surface is kept moist to some extent.
  • an object of the present invention is to solve the above-mentioned problems and to provide an ink jet coating apparatus in which ink ejection is stabilized.
  • An inkjet coating apparatus includes an inkjet head having a nozzle surface and an absorber for wiping the nozzle surface.
  • the ink jet head is formed with a plurality of nozzle holes that open on the nozzle surface and eject ink, and supply holes that supply ink toward the plurality of nozzle holes.
  • the absorber absorbs ink adhering to the nozzle surface.
  • the second region is disposed at a position retracted from the first region when the nozzle surface is viewed from the front, and thus the ink adhering to the first region is wiped off by the absorber.
  • the ink can be prevented from moving from the absorber to the second region. Thereby, it can prevent that the solid substance of an ink arises on a nozzle surface, and can stabilize the discharge of the ink from an inkjet coating device.
  • the nozzle surface is continuously formed between the first region and the second region, and the second region extends so as to be inclined with respect to the first region.
  • the nozzle surface is formed such that a step is generated between the first region and the second region.
  • the absorber and the second region when the nozzle surface is wiped by the absorber, the absorber and the second region can be brought into contact with each other, and ink can be prevented from adhering to the second region.
  • the ink jet coating apparatus moves the absorber and the ink jet head relative to each other in a direction orthogonal to the direction in which the first region and the second region are arranged in a state where the absorber and the nozzle surface face each other.
  • the ink jet coating apparatus configured as described above, the ink adhering to the first region can be wiped off by the absorber while separating the absorber and the second region with the relative movement of the absorber and the ink jet head. it can. Thereby, it is possible to avoid the ink from adhering to the second region.
  • the first region is formed in a rectangular shape having a first side and a second side having a length larger than the first side.
  • the inkjet coating apparatus further includes a moving mechanism unit that relatively moves the absorber and the inkjet head along the direction in which the first side extends in a state where the absorber and the nozzle surface face each other. According to the inkjet coating apparatus configured as described above, the distance that the absorber and the inkjet head are relatively moved can be shortened when the nozzle surface is wiped off.
  • the absorber is formed by winding a belt-like member capable of absorbing ink in multiple layers.
  • the absorbent property of the absorber can be increased by the structure in which the belt-shaped member is wound in multiple layers.
  • the belt-like member is made of knitting. According to the ink jet coating apparatus configured as described above, the ink enters the stitches of the knitted fabric, so that the ink adhering to the nozzle surface can be absorbed by the absorber.
  • the polyimide solution is discharged toward the substrate through a plurality of nozzle holes.
  • the polyimide solution adhering to the nozzle surface is wiped off by the absorber.
  • the polyimide solution can be stably discharged toward the substrate.
  • FIG. 3 is a cross-sectional view showing an ink jet head taken along line III-III in FIG. 2.
  • FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. 3.
  • FIG. 2 is a bottom view showing a nozzle surface wiping process by a cleaning roller in the ink jet coating apparatus in FIG. 1.
  • FIG. 1 It is sectional drawing which shows the mode of the nozzle surface before wiping off by the cleaning roller in the inkjet coating device for a comparison.
  • FIG. 8 is a cross-sectional view illustrating a nozzle surface wiping step in the inkjet coating apparatus for comparison in FIG. 7. It is sectional drawing which shows the mode of the nozzle surface after the wiping process in FIG. 8 was implemented. It is sectional drawing which shows the wiping process of the nozzle surface at the time of using the inkjet coating device in FIG. It is sectional drawing which shows the mode of the nozzle surface after the wiping off process in FIG. 10 was implemented. It is sectional drawing which shows the 1st modification of the inkjet coating device shown in FIG. It is sectional drawing which shows the 2nd modification of the inkjet coating device shown in FIG.
  • FIG. 1 is a side view showing an ink jet coating apparatus according to an embodiment of the present invention.
  • the inkjet coating apparatus 10 in this Embodiment is used for the process of forming an alignment film on the surface of the liquid crystal substrate 16 in the manufacturing process of a liquid crystal display.
  • the inkjet coating apparatus 10 includes a mounting table 12, a transport arm 14, and an inkjet head 21.
  • a liquid crystal substrate 16 that is a target for ejecting ink is placed on the mounting table 12.
  • the liquid crystal substrate 16 has a main surface 16a on which an alignment film is formed.
  • the liquid crystal substrate 16 is mounted on the mounting table 12 so that the main surface 16a extends in the horizontal direction.
  • the liquid crystal substrate 16 has a rectangular shape when the main surface 16a is viewed from the front.
  • the liquid crystal substrate 16 is a large substrate having a size of 2160 ⁇ 2460 mm or 2850 ⁇ 3050 mm.
  • a polyimide solution is applied to the main surface 16a.
  • the material applied to the main surface 16a of the liquid crystal substrate 16 is not limited to polyimide, and a material that can be a raw material for the alignment film is appropriately selected.
  • the inkjet head 21 has a function of ejecting ink toward the liquid crystal substrate 16.
  • the inkjet head 21 is provided above the mounting table 12.
  • the inkjet head 21 has a nozzle surface 22.
  • the nozzle surface 22 extends in the horizontal direction.
  • the nozzle surface 22 is the surface of the inkjet head 21 that faces the main surface 16a when ink is ejected to the liquid crystal substrate 16.
  • the transport arm 14 is provided as a moving mechanism unit for the substrate for moving the liquid crystal substrate 16 mounted on the mounting table 12 and the inkjet head 21 relative to each other. More specifically, the transport arm 14 is connected to the mounting table 12 and is provided so as to be able to transport the mounting table 12 in the horizontal direction indicated by the arrow 101. As the transport arm 14 is driven, the liquid crystal substrate 16 mounted on the mounting table 12 passes under the inkjet head 21. During this time, a polyimide solution is discharged from the nozzle surface 22 toward the liquid crystal substrate 16, whereby a polyimide film is applied to the main surface 16a.
  • FIG. 2 is a bottom view showing the ink-jet head viewed from the direction indicated by arrow II in FIG.
  • FIG. 3 is a cross-sectional view showing the ink jet head taken along line III-III in FIG.
  • the inkjet head 21 is configured by combining a plurality of inkjet heads 21p.
  • the plurality of inkjet heads 21p are provided side by side in a direction (direction indicated by an arrow 103 in FIG. 2) orthogonal to the transport direction of the liquid crystal substrate 16 (direction indicated by an arrow 101 in FIG. 2).
  • the total length of the inkjet head 21 in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is set to be larger than the width of the liquid crystal substrate 16 in the same direction.
  • the plurality of inkjet heads 21p have the same structure.
  • the number of inkjet heads 21p to be combined is appropriately determined in consideration of the size of the liquid crystal substrate 16. Further, the method of combining the ink jet heads 21p is not limited to the above form, and for example, a plurality of ink jet heads 21p shown in FIG. 2 may be provided in a plurality of rows in the transport direction of the liquid crystal substrate 16.
  • the inkjet head 21p includes a head main body 31 and a nozzle plate 32 as a block member, a flexible plate 38, a piezoelectric (piezoelectric) element 36, and a drive unit 34.
  • the head body 31 has an opening 35 penetrating from the upper surface to the lower surface. Inside the opening 35, a drive unit 34 and a plurality of piezo elements 36 are arranged. A flexible plate 38 is provided on the lower surface of the head body 31 so as to close the opening 35.
  • the nozzle plate 32 is attached to the lower surface of the head body 31 so as to cover the flexible plate 38.
  • the nozzle plate 32 has a nozzle surface 22.
  • the nozzle surface 22 has a rectangular shape having a short side in the transport direction of the liquid crystal substrate 16 and a long side in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • a plurality of nozzle holes 24 are formed in the inkjet head 21p.
  • the nozzle hole 24 is a hole for ejecting ink toward the liquid crystal substrate 16.
  • the nozzle hole 24 is formed in the nozzle plate 32.
  • the nozzle hole 24 is formed so as to open in the nozzle surface 22.
  • the plurality of nozzle holes 24 are arranged at intervals from each other in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the plurality of nozzle holes 24 are arranged in a staggered manner along a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the number of nozzle holes 24 arranged in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is larger than the number of nozzle holes 24 arranged in the transport direction of the liquid crystal substrate 16.
  • a plurality of ink chambers 26 are further formed in the inkjet head 21p.
  • the plurality of ink chambers 26 are formed in the nozzle plate 32.
  • the plurality of ink chambers 26 are formed corresponding to the plurality of nozzle holes 24, respectively.
  • Each nozzle hole 24 communicates with the ink chamber 26.
  • the ink chamber 26 is formed on the opposite side of the nozzle surface 22 with respect to the nozzle hole 24.
  • the ink chamber 26 is formed so as to open on the side opposite to the position where the nozzle hole 24 communicates. With the nozzle plate 32 attached to the head body 31, the opening of the ink chamber 26 is closed by the flexible plate 38. Ink is always stored in the ink chamber 26 by an ink supply mechanism described later.
  • a plurality of piezo elements 36 are fixed to the flexible plate 38.
  • Each of the plurality of piezo elements 36 is provided at a position facing the plurality of ink chambers 26 with a flexible plate 38 interposed therebetween.
  • the piezo element 36 is electrically connected to the drive unit 34.
  • the flexible plate 38 bends into the ink chamber 26. Since the volume in the ink chamber 26 decreases with the deformation of the flexible plate 38, the ink stored in the ink chamber 26 is ejected through the nozzle holes 24.
  • FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG.
  • the ink supply mechanism for supplying ink to the ink chamber 26 will be described with reference to FIGS.
  • An ink supply pipe 29, an ink supply chamber 28, and a branch pipe 27 are further formed in the inkjet head 21p.
  • the ink supply pipe 29 and the ink supply chamber 28 are provided as supply holes for supplying the ink introduced into the inkjet head 21 toward the nozzle holes 24.
  • the ink supply pipe 29 and the ink supply chamber 28 are provided inside the inkjet head 21 as supply holes that form a passage through which ink flows toward the nozzle holes 24.
  • the ink supply chamber 28 is formed in the nozzle plate 32.
  • the ink supply chambers 28 are respectively formed at positions on both sides of the plurality of nozzle holes 24 in the cross section shown in FIGS.
  • the branch pipe 27 is formed on the nozzle plate 32.
  • the branch pipe 27 is formed to communicate between the ink supply chamber 28 and the plurality of ink chambers 26.
  • the branch pipe 27 extends linearly along a direction perpendicular to the transport direction of the liquid crystal substrate 16 through the ink chambers 26 spaced apart in the transport direction of the liquid crystal substrate 16.
  • the two ink supply chambers 28 are communicated with each other.
  • the branch pipe 27 is branched and extended from the linearly extending portion toward each ink chamber 26.
  • the ink supply pipe 29 is formed in the head main body 31.
  • the ink supply pipe 29 is formed in communication with the ink supply chamber 28.
  • the ink supply pipe 29 is formed at a position overlapping the ink supply chamber 28 when the nozzle surface 22 is viewed from the front.
  • the ink supply pipe 29 is formed to extend in a direction away from the nozzle surface 22 with the ink supply chamber 28 as a starting point.
  • the ink supply pipes 29 are formed at positions on both sides of the opening 35, respectively.
  • a pipe for supplying ink from the outside to the ink jet head 21p is connected to the ink supply pipe 29.
  • the ink supply pipe 29 and the ink supply chamber 28 are provided on the upstream side of the ink flow with respect to the ink chamber 26 and the nozzle hole 24 on the path of the ink flowing through the inside of the inkjet head 21p.
  • the ink supply tube 29 and the ink supply chamber 28 are provided as conduits for supplying ink from the top to the bottom.
  • the ink supply pipe 29 and the ink supply chamber 28 are formed in the ink jet head 21p without opening in the nozzle surface 22.
  • ink is supplied to the ink supply chamber 28 through the ink supply pipe 29.
  • ink is ejected through the nozzle holes 24
  • the inside of the ink chamber 26 becomes negative pressure. Therefore, the ink supplied to the ink supply chamber 28 is supplied to the ink chamber 26 as needed through the branch pipe 27.
  • the nozzle surface 22 of each inkjet head 21p is formed with a nozzle hole region 41 in which the nozzle holes 24 are opened, an ink supply pipe 29 and an ink supply chamber 28, and is closed. Is defined as a closed region 42 (42m, 42n).
  • a closed region 42 42m, 42n.
  • the closed area 42m, the nozzle hole area 41, and the closed area 42n are arranged in a direction orthogonal to the transport direction of the liquid crystal substrate 16. That is, the nozzle hole region 41 is disposed at the center of the nozzle surface 22 and the blocking regions 42 are disposed at both ends of the nozzle surface 22 in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the nozzle hole region 41 is formed in a rectangular shape having a short side 46 as the first side and a long side 47 as the second side having a length larger than the short side 46.
  • the closed region 42 is formed at a position adjacent to the short side 46 of the nozzle hole region 41.
  • the nozzle surface 22 When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is formed such that the closed region 42 is disposed at a position retracted from the nozzle hole region 41. That is, the closed region 42 is disposed at a position deeper than the nozzle hole region 41.
  • the distance between the closed region 42 and the main surface 16a is larger than the distance between the nozzle hole region 41 and the main surface 16a.
  • a step 80 is provided between the closed region 42 and the nozzle hole region 41.
  • the closed region 42 extends on a plane parallel to the plane in which the nozzle hole region 41 extends.
  • the step 80 extends on a plane intersecting the closed area 42 and the nozzle hole area 41, and in the present embodiment, on a plane orthogonal to the closed area 42 and the nozzle hole area 41.
  • the inkjet coating apparatus 10 has a cleaning device 50 for wiping off ink adhering to the nozzle surface 22. Next, the structure of the cleaning device 50 will be described.
  • the cleaning device 50 includes a cleaning roller 51, a base member 54, and a transfer arm 56.
  • the cleaning roller 51 is detachably attached to the base member 54.
  • the transport arm 56 is provided as a moving mechanism unit for moving the cleaning roller 51 and the inkjet head 21 relative to each other.
  • the transport arm 56 is connected to the base member 54, and is provided so that the cleaning roller 51 attached to the base member 54 can be transported in the horizontal direction indicated by the arrow 102.
  • the conveyance direction of the cleaning roller 51 is the same as the conveyance direction of the liquid crystal substrate 16.
  • the means for transporting the cleaning roller 51 is not limited to the form of the transport arm 56, and may be, for example, a form using a rail or a conveyor.
  • a plurality of cleaning rollers 51 are provided corresponding to the plurality of inkjet heads 21p shown in FIG. As the transport arm 56 is driven, the cleaning roller 51 passes below the inkjet head 21p. During this time, the cleaning roller 51 moves while being in contact with the nozzle surface 22, whereby the ink attached to the nozzle surface 22 is wiped off.
  • FIG. 5 is a perspective view showing the cleaning roller in FIG. Referring to FIG. 5, the cleaning roller 51 has a cylindrical appearance.
  • the cleaning roller 51 has a core cylinder 63 and a strip-shaped knitted fabric 64 as an absorber.
  • the core cylinder 63 has a cylindrical shape extending along the axis of the central axis 110 that is a virtual line.
  • the strip knitted fabric 64 has a strip shape having a long side in one direction and a short side in a direction orthogonal to the one direction.
  • the strip knitted fabric 64 is wound around the core cylinder 63 in multiple layers.
  • the strip-shaped knitted fabric 64 is wound around the central axis 110.
  • the strip-shaped knitted fabric 64 has a constant diameter in the axial direction of the central shaft 110.
  • FIG. 6 is a bottom view showing a nozzle surface wiping process by a cleaning roller in the ink jet coating apparatus shown in FIG.
  • the cleaning roller 51 is positioned such that the central shaft 110 extends along a direction orthogonal to the conveyance direction.
  • the cleaning roller 51 (band-shaped knitted fabric 64) is set to have a size slightly larger than the nozzle surface 22 in the axial direction of the central shaft 110.
  • the cleaning roller 51 passes below the plurality of inkjet heads 21p while moving in parallel with the surface of the nozzle surface 22. During this time, the outer peripheral surface of the belt-shaped knitted fabric 64 comes into contact with the nozzle surface 22 of each inkjet head 21p, so that the ink attached to the nozzle surface 22 is wiped off.
  • the cleaning roller 51 is conveyed along the direction in which the short side 46 of the nozzle hole region 41 extends.
  • the moving distance of the cleaning roller 51 when wiping the nozzle surface 22 can be set shorter than when the cleaning roller 51 is conveyed along the direction in which the long side 47 extends. Thereby, the time required for wiping off the nozzle surface 22 can be shortened.
  • the moving direction of the strip knitted fabric 64 at the time of wiping is not limited to the direction parallel to the nozzle surface 22.
  • the strip knitted fabric 64 when viewed from the axial direction of the central axis 110, has an arc shape with respect to the nozzle surface. It may be moved.
  • the belt-shaped knitted fabric 64 and the inkjet head 21 are moved relative to each other by moving the cleaning roller 51.
  • the present invention is not limited to this, and, for example, stops.
  • the inkjet head 21 may be moved with respect to the cleaning roller 51.
  • the cleaning roller 51 may be configured using, for example, a woven fabric or a non-woven fabric instead of the knitted fabric. Moreover, it is not restricted to the structure which winds a strip
  • FIG. 7 is a cross-sectional view showing a state of a nozzle surface before wiping with a cleaning roller in an inkjet coating apparatus for comparison.
  • the ink jet coating apparatus in this comparative example includes an ink jet head 121p instead of the ink jet head 21p in FIG.
  • the inkjet head 121p no step is provided between the nozzle hole region 41 and the closed region 42, and the entire nozzle surface 22 extends on the same plane.
  • the ink adheres to the nozzle surface 22 as the ink is ejected from the nozzle hole 24. At this time, the ink adheres to a range centering on the nozzle hole region 41 in which the nozzle holes 24 are formed.
  • the driving force accompanying the deformation of the flexible plate 38 is applied to the surface layer ink on the nozzle surface 22. This causes a problem that ink droplets are not properly ejected. In order to solve such a problem, a wiping process of the nozzle surface 22 is performed using the cleaning device 50 in FIG.
  • FIG. 8 is a cross-sectional view illustrating a nozzle surface wiping process in the inkjet coating apparatus for comparison in FIG.
  • FIG. 9 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 8 is performed.
  • the belt-shaped knitted fabric 64 may absorb ink in advance so that the ink on the nozzle surface 22 is not excessively wiped off. In these cases, the ink absorbed in the band-shaped knitted fabric 64 adheres to the closed region 42 as the nozzle surface 22 is wiped off. In this case, the ink adhering to the closed region 42 is dried and solidified over time. As a result, an ink solid 73 is generated on the nozzle surface 22.
  • FIG. 10 is a cross-sectional view showing a nozzle surface wiping process when the ink jet coating apparatus in FIG. 1 is used.
  • FIG. 11 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 10 is performed.
  • the closed region 42 is disposed deeper than the nozzle hole region 41 when the nozzle surface 22 is viewed from the front. Has been. For this reason, it is possible to absorb the ink attached to the nozzle hole region 41 into the belt-shaped knitted fabric 64 while keeping the belt-shaped knitted fabric 64 and the closed region 42 in non-contact when the nozzle surface 22 is wiped off. As a result, the ink does not adhere to the closed area 42 and solidify.
  • the inkjet coating apparatus 10 wipes the inkjet head 21 having the nozzle surface 22 and the nozzle surface 22. And a belt-like knitted fabric 64 as an absorbent body.
  • the inkjet head 21 has a plurality of nozzle holes 24 that are opened in the nozzle surface 22 and eject ink, and an ink supply pipe 29 and an ink supply chamber 28 that serve as supply holes for supplying ink toward the plurality of nozzle holes 24. Is formed.
  • the strip-shaped knitted fabric 64 absorbs ink attached to the nozzle surface 22.
  • the nozzle surface 22 When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is disposed adjacent to the nozzle hole region 41 as a first region in which a plurality of nozzle holes 24 are opened, and the nozzle hole region 41.
  • the ink supply pipe 29 and the closed region 42 as the second region onto which the ink supply chamber 28 is projected are defined.
  • the closed region 42 is disposed at a position that is retracted from the nozzle hole region 41.
  • the blocking region 42 is disposed deeper than the nozzle hole region 41, so that the nozzle surface 22 is blocked along with the wiping process. Ink can be prevented from adhering to the region 42. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22 and to realize the ink jet coating apparatus 10 in which ink is stably ejected from the nozzle hole 24.
  • the inkjet coating apparatus 10 is used for the step of forming an alignment film on the surface of a substrate for a liquid crystal display.
  • the present invention is not limited to this. You may utilize for the process of forming a resist.
  • FIG. 12 is a cross-sectional view showing a first modification of the ink jet coating apparatus shown in FIG. Referring to FIG. 12, in this modification, the closed region 42 is formed by an inclined surface 81.
  • the inclined surface 81 extends while being inclined with respect to the plane in which the nozzle hole region 41 extends.
  • the nozzle surface 22 is formed so as to be continuous between the nozzle hole region 41 and the closed region 42.
  • FIG. 13 is a cross-sectional view showing a second modification of the ink jet coating apparatus shown in FIG.
  • the closed region 42 is formed by a curved surface 82.
  • the curved surface 82 is curved so that the inclination with respect to the plane in which the nozzle hole region 41 extends increases as the distance from the nozzle hole region 41 increases.
  • the nozzle surface 22 is formed so as to be continuous between the nozzle hole region 41 and the closed region 42.
  • the present invention is mainly used as an apparatus for forming an alignment film of a liquid crystal display and a functional film such as a resist on a substrate.
  • Inkjet coating device 12 mounting table, 14 transport arm, 16 liquid crystal substrate, 16a main surface, 21, 21p, 121p inkjet head, 22 nozzle face, 24 nozzle hole, 26 ink chamber, 27 branch pipe, 28 ink supply chamber, 29 ink supply pipe, 31 head body, 32 nozzle plate, 34 drive unit, 35 opening, 36 piezo element, 38 flexible plate, 41 nozzle hole area, 42, 42m, 42n closed area, 46 short side, 47 long side , 50 cleaning device, 51 cleaning roller, 54 base member, 56 transport arm, 63 core cylinder, 64 strip knitting, 73 solid, 80 step, 81 inclined surface, 82 curved surface.

Abstract

An inkjet application device is provided with an inkjet head (21) having a nozzle surface (22) and also with a band-shaped woven member (64) for wiping the nozzle surface (22). The inkjet head (21) has formed therein: nozzle holes (24) open in the nozzle surface (22) and ejecting ink; and ink supply pipes and ink supply chambers, the ink supply pipes and chambers supplying the ink toward the nozzle holes (24). The band-shaped woven member (64) sucks ink adhering to the nozzle surface (22). In a front view of the nozzle surface (22), the nozzle surface (22) has defined thereon: a nozzle hole region (41) in which the nozzle holes (24) are open; and closed regions (42) which are disposed adjacent to the nozzle hole region (41) and on which the ink supply pipes and the ink supply chambers, which are formed within the inkjet head (21), are projected. The closed regions (42) are disposed so as to be recessed from the nozzle hole region (41).

Description

インクジェット塗布装置Inkjet coating device
　この発明は、一般的には、インクジェット塗布装置に関し、より特定的には、ノズル面を拭き取るためのクリーニング機構を備えるインクジェット塗布装置に関する。 The present invention generally relates to an ink jet coating apparatus, and more particularly to an ink jet coating apparatus including a cleaning mechanism for wiping the nozzle surface.
　従来のインクジェット塗布装置に関して、たとえば、特開２００６－２４８１０２号公報には、インクジェットヘッドのノズル面の余剰吐出液の拭き取り状態を向上させ、溶液の吐出を安定させることを目的としたインクジェット塗布装置が開示されている（特許文献１）。 Regarding a conventional inkjet coating apparatus, for example, Japanese Patent Application Laid-Open No. 2006-248102 discloses an inkjet coating apparatus for improving the wiping state of excess ejection liquid on the nozzle surface of an inkjet head and stabilizing the ejection of the solution. (Patent Document 1).
　特許文献１に開示されたインクジェット塗布装置は、ワイピングクロスと、そのワイピングクロスをインクジェットヘッドのノズル面の前面に繰り出す繰り出し機構と、ワイピングクロスをノズル面に押し付けるローラとを有する。ワイピングクロスは、低発塵性の吸水性を有する帯状の部材、たとえばポリエステル繊維から形成されている。ローラがワイピングクロスをノズル面に対して押圧しつつ、ノズル面に沿って移動することによって、ノズル面が拭き取られる。 The inkjet coating apparatus disclosed in Patent Document 1 includes a wiping cloth, a feeding mechanism that feeds the wiping cloth to the front surface of the nozzle surface of the inkjet head, and a roller that presses the wiping cloth against the nozzle surface. The wiping cloth is formed of a band-shaped member having a low dust generation and water absorption, for example, a polyester fiber. The nozzle surface is wiped off by the roller moving along the nozzle surface while pressing the wiping cloth against the nozzle surface.
　また、特開２００５－３０５８４５号公報には、液体吐出ヘッドのノズル面のクリーニング効果を向上させることを目的とした、液体吐出ヘッドのクリーニング装置が開示されている（特許文献２）。特許文献２に開示されたクリーニング装置は、ノズル面に接触する面が繊維質の吸収体によって形成され、ノズル面をワイプするクリーニングローラを備える。 Also, Japanese Patent Application Laid-Open No. 2005-305845 discloses a liquid ejection head cleaning device for the purpose of improving the cleaning effect of the nozzle surface of the liquid ejection head (Patent Document 2). The cleaning device disclosed in Patent Document 2 includes a cleaning roller in which a surface that contacts the nozzle surface is formed by a fibrous absorbent body and wipes the nozzle surface.
　また、特開２００６－７５７７号公報には、吐出信頼性を向上させることを目的とした印字清掃機構が開示されている（特許文献３）。特許文献３に開示された印字清掃機構は、弾性のある多孔質材からなるクリーニングローラと、不織布からなり、インクの拭き取り時にインクを供給するヘッド部とクリーニングローラとの間に配置されるクリーニングペーパとを備える。 In addition, Japanese Patent Laid-Open No. 2006-7577 discloses a print cleaning mechanism aimed at improving ejection reliability (Patent Document 3). The print cleaning mechanism disclosed in Patent Document 3 includes a cleaning roller made of an elastic porous material, and a cleaning paper made of a nonwoven fabric and disposed between a head portion that supplies ink when the ink is wiped off, and the cleaning roller. With.
　また、特開２００７－２６８３７８号公報には、ノズルプレートの先端面をワイピングプレートにより清掃した際に、ノズルの先端面に拭き残しが発生することを防止することを目的とした、溶液塗布装置が開示されている（特許文献４）。特許文献４に開示された溶液塗布装置は、溶液を吐出するノズルと、このノズルの周囲に設けられたねじ穴とを有するノズルプレートを備える。ねじ穴の開口面は、ノズルの開口面よりも溶液の塗布方向において後退して形成されている。 Japanese Patent Application Laid-Open No. 2007-268378 discloses a solution coating apparatus for the purpose of preventing wiping from occurring on the nozzle tip surface when the nozzle plate tip surface is cleaned with a wiping plate. (Patent Document 4). The solution coating apparatus disclosed in Patent Document 4 includes a nozzle plate having a nozzle for discharging a solution and a screw hole provided around the nozzle. The opening surface of the screw hole is formed so as to recede in the solution application direction from the opening surface of the nozzle.
特開２００６－２４８１０２号公報JP 2006-248102 A 特開２００５－３０５８４５号公報JP 2005-305845 A 特開２００６－７５７７号公報JP 2006-7777 A 特開２００７－２６８３７８号公報JP 2007-268378 A
　基板の表面にレジストや配向膜などの機能性膜を形成する製造工程に、インクジェット塗布装置が利用されている。インクジェット塗布装置の利用に際しては、ノズル面に付着したインクの液膜によって安定したインクの吐出が妨げられるおそれがあるため、ノズル面に付着したインクを拭き取るためのクリーニング装置が用いられる。具体的には、ノズル面がある程度湿った状態を維持するようにインクを拭き取ることにより、吐出の安定性が実現される。 An inkjet coating apparatus is used in a manufacturing process for forming a functional film such as a resist or an alignment film on the surface of a substrate. When using the ink jet coating apparatus, there is a possibility that stable ink ejection may be hindered by the liquid film of the ink adhering to the nozzle surface. Therefore, a cleaning device for wiping off the ink adhering to the nozzle surface is used. Specifically, the ejection stability is realized by wiping the ink so that the nozzle surface is kept moist to some extent.
　しかしながら、インクジェット塗布装置の構造上、ノズル面にはノズル孔が形成されない領域が生じる。インクの拭き取り工程時にノズル孔が形成されない領域にインクが付着すると、その付着したインクが時間の経過とともに固形化する現象が生じる。さらに、固形化したインクによってノズル面の状態が悪化し、その状態が進行すると、インクを安定して吐出できないという懸念が生じる。 However, due to the structure of the ink jet coating apparatus, there is a region where nozzle holes are not formed on the nozzle surface. When ink adheres to a region where nozzle holes are not formed during the ink wiping process, a phenomenon occurs in which the adhered ink is solidified over time. Furthermore, when the state of the nozzle surface deteriorates due to the solidified ink and the state progresses, there is a concern that the ink cannot be stably ejected.
　そこでこの発明の目的は、上記の課題を解決することであり、インクの吐出が安定化されるインクジェット塗布装置を提供することである。 Therefore, an object of the present invention is to solve the above-mentioned problems and to provide an ink jet coating apparatus in which ink ejection is stabilized.
　この発明に従ったインクジェット塗布装置は、ノズル面を有するインクジェットヘッドと、ノズル面を拭き取るための吸収体とを備える。インクジェットヘッドには、ノズル面に開口し、インクを吐出する複数のノズル孔と、複数のノズル孔に向けてインクを供給する供給孔とが形成される。吸収体は、ノズル面に付着したインクを吸収する。ノズル面を正面から見た場合に、ノズル面には、複数のノズル孔が開口する第１領域と、第１領域と隣り合って配置され、インクジェットヘッドの内部に形成された供給孔が投影される第２領域とが規定される。第２領域は、第１領域よりも後退した位置に配置される。 An inkjet coating apparatus according to the present invention includes an inkjet head having a nozzle surface and an absorber for wiping the nozzle surface. The ink jet head is formed with a plurality of nozzle holes that open on the nozzle surface and eject ink, and supply holes that supply ink toward the plurality of nozzle holes. The absorber absorbs ink adhering to the nozzle surface. When the nozzle surface is viewed from the front, a first region where a plurality of nozzle holes are opened and a supply hole formed inside the inkjet head are projected onto the nozzle surface, adjacent to the first region. The second region is defined. The second region is disposed at a position that is recessed from the first region.
　このように構成されたインクジェット塗布装置によれば、ノズル面を正面から見て第２領域は第１領域よりも後退した位置に配置されるため、吸収体によって第１領域に付着したインクを拭き取るとともに、吸収体から第２領域にインクが移ることを回避できる。これにより、ノズル面にインクの固形物が生じることを防止し、インクジェット塗布装置からのインクの吐出を安定化させることができる。 According to the ink jet coating apparatus configured as described above, the second region is disposed at a position retracted from the first region when the nozzle surface is viewed from the front, and thus the ink adhering to the first region is wiped off by the absorber. At the same time, the ink can be prevented from moving from the absorber to the second region. Thereby, it can prevent that the solid substance of an ink arises on a nozzle surface, and can stabilize the discharge of the ink from an inkjet coating device.
　また好ましくは、ノズル面は、第１領域と第２領域との間で連続して連なり、第２領域が第１領域に対して傾斜して延在するように形成される。また好ましくは、ノズル面は、第１領域と第２領域との間で段差が生じるように形成される。 Also preferably, the nozzle surface is continuously formed between the first region and the second region, and the second region extends so as to be inclined with respect to the first region. Preferably, the nozzle surface is formed such that a step is generated between the first region and the second region.
　このように構成されたインクジェット塗布装置によれば、吸収体によるノズル面の拭き取り時に、吸収体と第２領域とを非接触とし、第２領域にインクが付着することを回避できる。 According to the ink jet coating apparatus configured as described above, when the nozzle surface is wiped by the absorber, the absorber and the second region can be brought into contact with each other, and ink can be prevented from adhering to the second region.
　また好ましくは、インクジェット塗布装置は、吸収体とノズル面とを対向させた状態で、吸収体およびインクジェットヘッドを、第１領域および第２領域が並ぶ方向に直交する方向に相対移動させる移動機構部をさらに備える。このように構成されたインクジェット塗布装置によれば、吸収体およびインクジェットヘッドの相対移動に伴って、吸収体と第２領域とを離しつつ、吸収体によって第１領域に付着したインクを拭き取ることができる。これにより、第２領域にインクが付着することを回避できる。 Preferably, the ink jet coating apparatus moves the absorber and the ink jet head relative to each other in a direction orthogonal to the direction in which the first region and the second region are arranged in a state where the absorber and the nozzle surface face each other. Is further provided. According to the ink jet coating apparatus configured as described above, the ink adhering to the first region can be wiped off by the absorber while separating the absorber and the second region with the relative movement of the absorber and the ink jet head. it can. Thereby, it is possible to avoid the ink from adhering to the second region.
　また好ましくは、第１領域は、第１辺と、第１辺よりも大きい長さを有する第２辺とを有する矩形形状に形成される。インクジェット塗布装置は、吸収体とノズル面とを対向させた状態で、吸収体およびインクジェットヘッドを、第１辺が延伸する方向に沿って相対移動させる移動機構部をさらに備える。このように構成されたインクジェット塗布装置によれば、ノズル面の拭き取り時に、吸収体およびインクジェットヘッドを相対移動させる距離を短くすることができる。 Also preferably, the first region is formed in a rectangular shape having a first side and a second side having a length larger than the first side. The inkjet coating apparatus further includes a moving mechanism unit that relatively moves the absorber and the inkjet head along the direction in which the first side extends in a state where the absorber and the nozzle surface face each other. According to the inkjet coating apparatus configured as described above, the distance that the absorber and the inkjet head are relatively moved can be shortened when the nozzle surface is wiped off.
　また好ましくは、吸収体は、インクを吸収可能な帯状部材が多層に巻き回されて形成される。このように構成されたインクジェット塗布装置によれば、帯状部材を多層に巻き回す構造によって、吸収体の吸液性を高めることができる。 Preferably, the absorber is formed by winding a belt-like member capable of absorbing ink in multiple layers. According to the ink jet coating apparatus configured as described above, the absorbent property of the absorber can be increased by the structure in which the belt-shaped member is wound in multiple layers.
　また好ましくは、帯状部材は、編み物からなる。このように構成されたインクジェット塗布装置によれば、インクが編み物の編み目に浸入するため、ノズル面に付着したインクを吸収体に吸収することができる。 Also preferably, the belt-like member is made of knitting. According to the ink jet coating apparatus configured as described above, the ink enters the stitches of the knitted fabric, so that the ink adhering to the nozzle surface can be absorbed by the absorber.
　また好ましくは、複数のノズル孔を通じてポリイミドの溶液が基板に向けて吐出される。吸収体によって、ノズル面に付着したポリイミドの溶液が拭き取られる。このように構成されたインクジェット塗布装置によれば、ポリイミドの溶液を安定して基板に向けて吐出することができる。 Preferably, the polyimide solution is discharged toward the substrate through a plurality of nozzle holes. The polyimide solution adhering to the nozzle surface is wiped off by the absorber. According to the inkjet coating apparatus configured as described above, the polyimide solution can be stably discharged toward the substrate.
　以上に説明したように、この発明に従えば、インクの吐出が安定化されるインクジェット塗布装置を提供することができる。 As described above, according to the present invention, it is possible to provide an ink jet coating apparatus in which ink ejection is stabilized.
この発明の実施の形態におけるインクジェット塗布装置を示す側面図である。It is a side view which shows the inkjet coating apparatus in embodiment of this invention. 図１中の矢印ＩＩに示す方向から見たインクジェットヘッドを示す底面図である。It is a bottom view which shows the inkjet head seen from the direction shown by the arrow II in FIG. 図２中のＩＩＩ－ＩＩＩ線上に沿ったインクジェットヘッドを示す断面図である。FIG. 3 is a cross-sectional view showing an ink jet head taken along line III-III in FIG. 2. 図３中のＩＶ－ＩＶ線上に沿ったインクジェットヘッドを示す断面図である。FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. 3. 図１中のクリーニングローラを示す斜視図である。It is a perspective view which shows the cleaning roller in FIG. 図１中のインクジェット塗布装置において、クリーニングローラによるノズル面の拭き取り工程を示す底面図である。FIG. 2 is a bottom view showing a nozzle surface wiping process by a cleaning roller in the ink jet coating apparatus in FIG. 1. 比較のためのインクジェット塗布装置において、クリーニングローラによる拭き取り前のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface before wiping off by the cleaning roller in the inkjet coating device for a comparison. 図７中の比較のためのインクジェット塗布装置において、ノズル面の拭き取り工程を示す断面図である。FIG. 8 is a cross-sectional view illustrating a nozzle surface wiping step in the inkjet coating apparatus for comparison in FIG. 7. 図８中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface after the wiping process in FIG. 8 was implemented. 図１中のインクジェット塗布装置を用いた場合のノズル面の拭き取り工程を示す断面図である。It is sectional drawing which shows the wiping process of the nozzle surface at the time of using the inkjet coating device in FIG. 図１０中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface after the wiping off process in FIG. 10 was implemented. 図３中に示すインクジェット塗布装置の第１変形例を示す断面図である。It is sectional drawing which shows the 1st modification of the inkjet coating device shown in FIG. 図３中に示すインクジェット塗布装置の第２変形例を示す断面図である。It is sectional drawing which shows the 2nd modification of the inkjet coating device shown in FIG.
　この発明の実施の形態について、図面を参照して説明する。なお、以下で参照する図面では、同一またはそれに相当する部材には、同じ番号が付されている。 Embodiments of the present invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding members are denoted by the same reference numerals.
　図１は、この発明の実施の形態におけるインクジェット塗布装置を示す側面図である。図１を参照して、本実施の形態におけるインクジェット塗布装置１０は、液晶ディスプレイの製造工程において、液晶基板１６の表面に配向膜を形成する工程に用いられる。 FIG. 1 is a side view showing an ink jet coating apparatus according to an embodiment of the present invention. With reference to FIG. 1, the inkjet coating apparatus 10 in this Embodiment is used for the process of forming an alignment film on the surface of the liquid crystal substrate 16 in the manufacturing process of a liquid crystal display.
　まず、インクジェット塗布装置１０の基本的な構造について説明すると、インクジェット塗布装置１０は、載置台１２と、搬送アーム１４と、インクジェットヘッド２１とを有する。 First, the basic structure of the inkjet coating apparatus 10 will be described. The inkjet coating apparatus 10 includes a mounting table 12, a transport arm 14, and an inkjet head 21.
　載置台１２には、インクを吐出する対象物である液晶基板１６が載置される。液晶基板１６は、配向膜が形成される主表面１６ａを有する。液晶基板１６は、主表面１６ａが水平方向に延在するように載置台１２に載置される。液晶基板１６は、主表面１６ａを正面から見た場合に矩形形状を有する。液晶基板１６は、一例として、２１６０×２４６０ｍｍ、もしくは２８５０×３０５０ｍｍのサイズを有する大型基板である。 On the mounting table 12, a liquid crystal substrate 16 that is a target for ejecting ink is placed. The liquid crystal substrate 16 has a main surface 16a on which an alignment film is formed. The liquid crystal substrate 16 is mounted on the mounting table 12 so that the main surface 16a extends in the horizontal direction. The liquid crystal substrate 16 has a rectangular shape when the main surface 16a is viewed from the front. As an example, the liquid crystal substrate 16 is a large substrate having a size of 2160 × 2460 mm or 2850 × 3050 mm.
　本実施の形態では、液晶基板１６に配向膜を形成するため、主表面１６ａにポリイミドの溶液が塗布される。なお、液晶基板１６の主表面１６ａに塗布される材料は、ポリイミドに限られず、配向膜の原料となりうる材料が適宜選択される。 In the present embodiment, in order to form an alignment film on the liquid crystal substrate 16, a polyimide solution is applied to the main surface 16a. The material applied to the main surface 16a of the liquid crystal substrate 16 is not limited to polyimide, and a material that can be a raw material for the alignment film is appropriately selected.
　インクジェットヘッド２１は、液晶基板１６に向けてインクを吐出する機能を有する。インクジェットヘッド２１は、載置台１２の上方に設けられている。インクジェットヘッド２１は、ノズル面２２を有する。ノズル面２２は、水平方向に延在する。ノズル面２２は、液晶基板１６へのインクの吐出時に、主表面１６ａと向かい合うインクジェットヘッド２１の表面である。 The inkjet head 21 has a function of ejecting ink toward the liquid crystal substrate 16. The inkjet head 21 is provided above the mounting table 12. The inkjet head 21 has a nozzle surface 22. The nozzle surface 22 extends in the horizontal direction. The nozzle surface 22 is the surface of the inkjet head 21 that faces the main surface 16a when ink is ejected to the liquid crystal substrate 16.
　搬送アーム１４は、載置台１２に載置された液晶基板１６と、インクジェットヘッド２１とを相対移動させるための基板用の移動機構部として設けられている。より具体的には、搬送アーム１４は、載置台１２に接続されおり、載置台１２を矢印１０１に示す水平方向に搬送することが可能なように設けられている。搬送アーム１４の駆動に伴って、載置台１２に載置された液晶基板１６がインクジェットヘッド２１の下を通過する。この間、ノズル面２２から液晶基板１６に向けてポリイミドの溶液が吐出されることにより、主表面１６ａにポリイミド膜が塗布される。 The transport arm 14 is provided as a moving mechanism unit for the substrate for moving the liquid crystal substrate 16 mounted on the mounting table 12 and the inkjet head 21 relative to each other. More specifically, the transport arm 14 is connected to the mounting table 12 and is provided so as to be able to transport the mounting table 12 in the horizontal direction indicated by the arrow 101. As the transport arm 14 is driven, the liquid crystal substrate 16 mounted on the mounting table 12 passes under the inkjet head 21. During this time, a polyimide solution is discharged from the nozzle surface 22 toward the liquid crystal substrate 16, whereby a polyimide film is applied to the main surface 16a.
　図２は、図１中の矢印ＩＩに示す方向から見たインクジェットヘッドを示す底面図である。図３は、図２中のＩＩＩ－ＩＩＩ線上に沿ったインクジェットヘッドを示す断面図である。 FIG. 2 is a bottom view showing the ink-jet head viewed from the direction indicated by arrow II in FIG. FIG. 3 is a cross-sectional view showing the ink jet head taken along line III-III in FIG.
　図２および図３を参照して、本実施の形態では、複数のインクジェットヘッド２１ｐが組み合わさってインクジェットヘッド２１が構成されている。複数のインクジェットヘッド２１ｐは、液晶基板１６の搬送方向（図２中の矢印１０１に示す方向）に直交する方向（図２中の矢印１０３に示す方向）に並んで設けられている。液晶基板１６の搬送方向に直交する方向におけるインクジェットヘッド２１の全長は、同方向における液晶基板１６の幅よりも大きくなるように設定されている。複数のインクジェットヘッド２１ｐは、互いに同一構造を有する。 Referring to FIG. 2 and FIG. 3, in the present embodiment, the inkjet head 21 is configured by combining a plurality of inkjet heads 21p. The plurality of inkjet heads 21p are provided side by side in a direction (direction indicated by an arrow 103 in FIG. 2) orthogonal to the transport direction of the liquid crystal substrate 16 (direction indicated by an arrow 101 in FIG. 2). The total length of the inkjet head 21 in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is set to be larger than the width of the liquid crystal substrate 16 in the same direction. The plurality of inkjet heads 21p have the same structure.
　なお、組み合わされるインクジェットヘッド２１ｐの数は、液晶基板１６の大きさを考慮して適宜決定される。また、インクジェットヘッド２１ｐの組み合わせ方は、上記形態に限られず、たとえば、図２中に示す複数のインクジェットヘッド２１ｐが液晶基板１６の搬送方向に複数列並んで設けられてもよい。 The number of inkjet heads 21p to be combined is appropriately determined in consideration of the size of the liquid crystal substrate 16. Further, the method of combining the ink jet heads 21p is not limited to the above form, and for example, a plurality of ink jet heads 21p shown in FIG. 2 may be provided in a plurality of rows in the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐは、ブロック部材としてのヘッド本体３１およびノズル板３２と、可撓板３８と、ピエゾ（圧電）素子３６と、駆動部３４とを有する。 The inkjet head 21p includes a head main body 31 and a nozzle plate 32 as a block member, a flexible plate 38, a piezoelectric (piezoelectric) element 36, and a drive unit 34.
　ヘッド本体３１には、その上面から下面に貫通する開口部３５が形成されている。開口部３５の内側には、駆動部３４および複数のピエゾ素子３６が配置されている。ヘッド本体３１の下面には、開口部３５を塞ぐように可撓板３８が設けられている。ノズル板３２は、可撓板３８を覆うようにヘッド本体３１の下面に取り付けられている。ノズル板３２は、ノズル面２２を有する。ノズル面２２は、液晶基板１６の搬送方向に短辺を有し、液晶基板１６の搬送方向に直交する方向に長辺を有する、矩形形状を有する。 The head body 31 has an opening 35 penetrating from the upper surface to the lower surface. Inside the opening 35, a drive unit 34 and a plurality of piezo elements 36 are arranged. A flexible plate 38 is provided on the lower surface of the head body 31 so as to close the opening 35. The nozzle plate 32 is attached to the lower surface of the head body 31 so as to cover the flexible plate 38. The nozzle plate 32 has a nozzle surface 22. The nozzle surface 22 has a rectangular shape having a short side in the transport direction of the liquid crystal substrate 16 and a long side in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐには、複数のノズル孔２４が形成されている。ノズル孔２４は、液晶基板１６に向けてインクを吐出するための孔である。ノズル孔２４は、ノズル板３２に形成されている。ノズル孔２４は、ノズル面２２に開口するように形成されている。複数のノズル孔２４は、液晶基板１６の搬送方向に直交する方向に互いに間隔を隔てて並んでいる。 A plurality of nozzle holes 24 are formed in the inkjet head 21p. The nozzle hole 24 is a hole for ejecting ink toward the liquid crystal substrate 16. The nozzle hole 24 is formed in the nozzle plate 32. The nozzle hole 24 is formed so as to open in the nozzle surface 22. The plurality of nozzle holes 24 are arranged at intervals from each other in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　本実施の形態では、複数のノズル孔２４が、液晶基板１６の搬送方向に直交する方向に沿って千鳥状に並んでいる。液晶基板１６の搬送方向に直交する方向に配列されるノズル孔２４の数は、液晶基板１６の搬送方向に配列されるノズル孔２４の数よりも多い。 In the present embodiment, the plurality of nozzle holes 24 are arranged in a staggered manner along a direction orthogonal to the transport direction of the liquid crystal substrate 16. The number of nozzle holes 24 arranged in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is larger than the number of nozzle holes 24 arranged in the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐには、複数のインク室２６がさらに形成されている。複数のインク室２６は、ノズル板３２に形成されている。複数のインク室２６は、それぞれ、複数のノズル孔２４に対応して形成されている。各ノズル孔２４は、インク室２６に連通している。インク室２６は、ノズル孔２４に対してノズル面２２の反対側に形成されている。インク室２６は、ノズル孔２４が連通する位置とは反対側で開口するように形成されている。ノズル板３２がヘッド本体３１に取り付けられた状態で、インク室２６の上記開口が可撓板３８によって閉塞されている。インク室２６には、後述するインク供給機構によって、インクが常時貯留される。 A plurality of ink chambers 26 are further formed in the inkjet head 21p. The plurality of ink chambers 26 are formed in the nozzle plate 32. The plurality of ink chambers 26 are formed corresponding to the plurality of nozzle holes 24, respectively. Each nozzle hole 24 communicates with the ink chamber 26. The ink chamber 26 is formed on the opposite side of the nozzle surface 22 with respect to the nozzle hole 24. The ink chamber 26 is formed so as to open on the side opposite to the position where the nozzle hole 24 communicates. With the nozzle plate 32 attached to the head body 31, the opening of the ink chamber 26 is closed by the flexible plate 38. Ink is always stored in the ink chamber 26 by an ink supply mechanism described later.
　可撓板３８には、複数のピエゾ素子３６が固着されている。複数のピエゾ素子３６は、それぞれ、可撓板３８を隔てて複数のインク室２６と向かい合う位置に設けられている。開口部３５の内部において、ピエゾ素子３６は駆動部３４に電気的に接続されている。駆動部３４からピエゾ素子３６に駆動電力が供給されると、可撓板３８がインク室２６内に向けて撓む。この可撓板３８の変形に伴ってインク室２６内の容積が減少するため、インク室２６に貯留されたインクがノズル孔２４を通じて吐出される。 A plurality of piezo elements 36 are fixed to the flexible plate 38. Each of the plurality of piezo elements 36 is provided at a position facing the plurality of ink chambers 26 with a flexible plate 38 interposed therebetween. Inside the opening 35, the piezo element 36 is electrically connected to the drive unit 34. When drive power is supplied from the drive unit 34 to the piezo element 36, the flexible plate 38 bends into the ink chamber 26. Since the volume in the ink chamber 26 decreases with the deformation of the flexible plate 38, the ink stored in the ink chamber 26 is ejected through the nozzle holes 24.
　図４は、図３中のＩＶ－ＩＶ線上に沿ったインクジェットヘッドを示す断面図である。図２から図４を参照して、インク室２６にインクを供給するためのインク供給機構について説明する。インクジェットヘッド２１ｐには、インク供給管２９およびインク供給室２８と、枝管２７とがさらに形成されている。インク供給管２９およびインク供給室２８は、インクジェットヘッド２１に導入されたインクをノズル孔２４に向けて供給するための供給孔として設けられている。インク供給管２９およびインク供給室２８は、インクジェットヘッド２１の内部において、ノズル孔２４に向かうインクが通る通路を形成する供給孔として設けられている。 FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. The ink supply mechanism for supplying ink to the ink chamber 26 will be described with reference to FIGS. An ink supply pipe 29, an ink supply chamber 28, and a branch pipe 27 are further formed in the inkjet head 21p. The ink supply pipe 29 and the ink supply chamber 28 are provided as supply holes for supplying the ink introduced into the inkjet head 21 toward the nozzle holes 24. The ink supply pipe 29 and the ink supply chamber 28 are provided inside the inkjet head 21 as supply holes that form a passage through which ink flows toward the nozzle holes 24.
　インク供給室２８は、ノズル板３２に形成されている。インク供給室２８は、図３および図４中に示す断面において、複数のノズル孔２４の両側の位置にそれぞれ形成されている。枝管２７は、ノズル板３２に形成されている。枝管２７は、インク供給室２８と、複数のインク室２６との間をそれぞれ連通させるように形成されている。図４中に示す断面において、枝管２７は、液晶基板１６の搬送方向に距離を隔てたインク室２６間を通って、液晶基板１６の搬送方向に直交する方向に沿って直線状に延び、２つのインク供給室２８間を連通させている。さらに枝管２７は、その直線状に延びる部分から各インク室２６に向けて枝分かれして延びている。 The ink supply chamber 28 is formed in the nozzle plate 32. The ink supply chambers 28 are respectively formed at positions on both sides of the plurality of nozzle holes 24 in the cross section shown in FIGS. The branch pipe 27 is formed on the nozzle plate 32. The branch pipe 27 is formed to communicate between the ink supply chamber 28 and the plurality of ink chambers 26. In the cross section shown in FIG. 4, the branch pipe 27 extends linearly along a direction perpendicular to the transport direction of the liquid crystal substrate 16 through the ink chambers 26 spaced apart in the transport direction of the liquid crystal substrate 16. The two ink supply chambers 28 are communicated with each other. Further, the branch pipe 27 is branched and extended from the linearly extending portion toward each ink chamber 26.
　インク供給管２９は、ヘッド本体３１に形成されている。インク供給管２９は、インク供給室２８に連通して形成されている。インク供給管２９は、ノズル面２２を正面から見た場合に、インク供給室２８に重なる位置に形成されている。インク供給管２９は、インク供給室２８を起点にノズル面２２から遠ざかる方向に延びて形成されている。インク供給管２９は、開口部３５の両側の位置にそれぞれ形成されている。インク供給管２９には、外部からインクジェットヘッド２１ｐにインクを供給する配管が接続されている。インク供給管２９およびインク供給室２８は、インクジェットヘッド２１ｐの内部を流通するインクの経路上において、インク室２６およびノズル孔２４よりもインク流れの上流側に設けられている。インク供給管２９およびインク供給室２８は、インクを上方から下方に向けて供給する管路として設けられている。 The ink supply pipe 29 is formed in the head main body 31. The ink supply pipe 29 is formed in communication with the ink supply chamber 28. The ink supply pipe 29 is formed at a position overlapping the ink supply chamber 28 when the nozzle surface 22 is viewed from the front. The ink supply pipe 29 is formed to extend in a direction away from the nozzle surface 22 with the ink supply chamber 28 as a starting point. The ink supply pipes 29 are formed at positions on both sides of the opening 35, respectively. A pipe for supplying ink from the outside to the ink jet head 21p is connected to the ink supply pipe 29. The ink supply pipe 29 and the ink supply chamber 28 are provided on the upstream side of the ink flow with respect to the ink chamber 26 and the nozzle hole 24 on the path of the ink flowing through the inside of the inkjet head 21p. The ink supply tube 29 and the ink supply chamber 28 are provided as conduits for supplying ink from the top to the bottom.
　インク供給管２９およびインク供給室２８は、ノズル面２２に開口することなく、インクジェットヘッド２１ｐの内部に形成されている。 The ink supply pipe 29 and the ink supply chamber 28 are formed in the ink jet head 21p without opening in the nozzle surface 22.
　このような構成により、インク供給室２８には、インク供給管２９を通じてインクが供給される。一方、ノズル孔２４を通じてインクが吐出されるのに伴って、インク室２６の内部は負圧となる。このため、インク供給室２８に供給されたインクが、枝管２７を通って随時、インク室２６に補給される。 With this configuration, ink is supplied to the ink supply chamber 28 through the ink supply pipe 29. On the other hand, as ink is ejected through the nozzle holes 24, the inside of the ink chamber 26 becomes negative pressure. Therefore, the ink supplied to the ink supply chamber 28 is supplied to the ink chamber 26 as needed through the branch pipe 27.
　図２および図３を参照して、各インクジェットヘッド２１ｐのノズル面２２には、ノズル孔２４が開口するノズル孔領域４１と、インク供給管２９およびインク供給室２８が形成され、閉塞された表面が延在する閉塞領域４２（４２ｍ，４２ｎ）とが規定されている。ノズル面２２を正面から見た場合に、インク供給管２９およびインク供給室２８は閉塞領域４２に投影される。閉塞領域４２ｍと、ノズル孔領域４１と、閉塞領域４２ｎとは、液晶基板１６の搬送方向に直交する方向に並んでいる。すなわち、液晶基板１６の搬送方向に直交する方向において、ノズル孔領域４１は、ノズル面２２の中央に配置され、閉塞領域４２は、ノズル面２２の両端に配置されている。 2 and 3, the nozzle surface 22 of each inkjet head 21p is formed with a nozzle hole region 41 in which the nozzle holes 24 are opened, an ink supply pipe 29 and an ink supply chamber 28, and is closed. Is defined as a closed region 42 (42m, 42n). When the nozzle surface 22 is viewed from the front, the ink supply pipe 29 and the ink supply chamber 28 are projected onto the closed area 42. The closed area 42m, the nozzle hole area 41, and the closed area 42n are arranged in a direction orthogonal to the transport direction of the liquid crystal substrate 16. That is, the nozzle hole region 41 is disposed at the center of the nozzle surface 22 and the blocking regions 42 are disposed at both ends of the nozzle surface 22 in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　ノズル孔領域４１は、第１辺としての短辺４６と、短辺４６よりも大きい長さを有する第２辺としての長辺４７とを有する矩形形状に形成されている。閉塞領域４２は、ノズル孔領域４１の短辺４６に隣接する位置に形成されている。 The nozzle hole region 41 is formed in a rectangular shape having a short side 46 as the first side and a long side 47 as the second side having a length larger than the short side 46. The closed region 42 is formed at a position adjacent to the short side 46 of the nozzle hole region 41.
　ノズル面２２を正面から見た場合に、ノズル面２２は、閉塞領域４２がノズル孔領域４１よりも後退した位置に配置されるように形成されている。すなわち、閉塞領域４２は、ノズル孔領域４１よりも奥まった位置に配置されている。ノズル面２２と対向して液晶基板１６が位置決めされた時に、閉塞領域４２と主表面１６ａとの間の距離は、ノズル孔領域４１と主表面１６ａとの間の距離よりも大きい。本実施の形態では、閉塞領域４２とノズル孔領域４１との間に段差８０が設けられている。閉塞領域４２は、ノズル孔領域４１が延在する平面と平行な平面上で延在している。段差８０は、閉塞領域４２およびノズル孔領域４１と交差する平面上、本実施の形態では、閉塞領域４２およびノズル孔領域４１と直交する平面上で延在している。 When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is formed such that the closed region 42 is disposed at a position retracted from the nozzle hole region 41. That is, the closed region 42 is disposed at a position deeper than the nozzle hole region 41. When the liquid crystal substrate 16 is positioned facing the nozzle surface 22, the distance between the closed region 42 and the main surface 16a is larger than the distance between the nozzle hole region 41 and the main surface 16a. In the present embodiment, a step 80 is provided between the closed region 42 and the nozzle hole region 41. The closed region 42 extends on a plane parallel to the plane in which the nozzle hole region 41 extends. The step 80 extends on a plane intersecting the closed area 42 and the nozzle hole area 41, and in the present embodiment, on a plane orthogonal to the closed area 42 and the nozzle hole area 41.
　図１を参照して、インクジェット塗布装置１０は、ノズル面２２に付着したインクを拭き取るためのクリーニング装置５０を有する。続いて、クリーニング装置５０の構造について説明する。 Referring to FIG. 1, the inkjet coating apparatus 10 has a cleaning device 50 for wiping off ink adhering to the nozzle surface 22. Next, the structure of the cleaning device 50 will be described.
　クリーニング装置５０は、クリーニングローラ５１と、ベース部材５４と、搬送アーム５６とを有する。 The cleaning device 50 includes a cleaning roller 51, a base member 54, and a transfer arm 56.
　クリーニングローラ５１は、ベース部材５４に対して着脱可能に設けられている。搬送アーム５６は、クリーニングローラ５１とインクジェットヘッド２１とを相対移動させるための移動機構部として設けられている。搬送アーム５６は、ベース部材５４に接続されており、ベース部材５４に装着されたクリーニングローラ５１を矢印１０２に示す水平方向に搬送することが可能なように設けられている。クリーニングローラ５１の搬送方向は、液晶基板１６の搬送方向と同一方向である。 The cleaning roller 51 is detachably attached to the base member 54. The transport arm 56 is provided as a moving mechanism unit for moving the cleaning roller 51 and the inkjet head 21 relative to each other. The transport arm 56 is connected to the base member 54, and is provided so that the cleaning roller 51 attached to the base member 54 can be transported in the horizontal direction indicated by the arrow 102. The conveyance direction of the cleaning roller 51 is the same as the conveyance direction of the liquid crystal substrate 16.
　なお、クリーニングローラ５１を搬送する手段は、搬送アーム５６の形態に限られず、たとえば、レールやコンベアを利用した形態であってもよい。 The means for transporting the cleaning roller 51 is not limited to the form of the transport arm 56, and may be, for example, a form using a rail or a conveyor.
　複数のクリーニングローラ５１が、それぞれ図２中に示す複数のインクジェットヘッド２１ｐに対応して設けられている。搬送アーム５６の駆動に伴ってクリーニングローラ５１がインクジェットヘッド２１ｐの下方を通過する。この間、クリーニングローラ５１がノズル面２２に当接しながら移動することにより、ノズル面２２に付着したインクが拭き取られる。 A plurality of cleaning rollers 51 are provided corresponding to the plurality of inkjet heads 21p shown in FIG. As the transport arm 56 is driven, the cleaning roller 51 passes below the inkjet head 21p. During this time, the cleaning roller 51 moves while being in contact with the nozzle surface 22, whereby the ink attached to the nozzle surface 22 is wiped off.
　図５は、図１中のクリーニングローラを示す斜視図である。図５を参照して、クリーニングローラ５１は、円柱状の外観を有する。クリーニングローラ５１は、芯筒６３と、吸収体としての帯状編み物６４とを有する。 FIG. 5 is a perspective view showing the cleaning roller in FIG. Referring to FIG. 5, the cleaning roller 51 has a cylindrical appearance. The cleaning roller 51 has a core cylinder 63 and a strip-shaped knitted fabric 64 as an absorber.
　芯筒６３は、仮想線である中心軸１１０の軸線に沿って延在する筒形状を有する。帯状編み物６４は、一方向に長辺を有し、その一方向に直交する方向に短辺を有する帯形状を有する。帯状編み物６４は、芯筒６３に対して多層に巻き回されている。帯状編み物６４は、中心軸１１０を中心に巻き回されている。帯状編み物６４は、中心軸１１０の軸方向において一定の直径を有する。 The core cylinder 63 has a cylindrical shape extending along the axis of the central axis 110 that is a virtual line. The strip knitted fabric 64 has a strip shape having a long side in one direction and a short side in a direction orthogonal to the one direction. The strip knitted fabric 64 is wound around the core cylinder 63 in multiple layers. The strip-shaped knitted fabric 64 is wound around the central axis 110. The strip-shaped knitted fabric 64 has a constant diameter in the axial direction of the central shaft 110.
　図６は、図１中のインクジェット塗布装置において、クリーニングローラによるノズル面の拭き取り工程を示す底面図である。図６を参照して、クリーニングローラ５１は、その搬送方向に直交する方向に沿って中心軸１１０が延びるように位置決めされる。クリーニングローラ５１（帯状編み物６４）は、中心軸１１０の軸方向において、ノズル面２２よりも若干大きい寸法に設定されている。 FIG. 6 is a bottom view showing a nozzle surface wiping process by a cleaning roller in the ink jet coating apparatus shown in FIG. Referring to FIG. 6, the cleaning roller 51 is positioned such that the central shaft 110 extends along a direction orthogonal to the conveyance direction. The cleaning roller 51 (band-shaped knitted fabric 64) is set to have a size slightly larger than the nozzle surface 22 in the axial direction of the central shaft 110.
　図１中に示す搬送アーム５６による搬送時、クリーニングローラ５１は、ノズル面２２の表面に対して平行移動しながら、複数のインクジェットヘッド２１ｐの下方を通過する。この間、帯状編み物６４の外周面が各インクジェットヘッド２１ｐのノズル面２２に接触することにより、ノズル面２２に付着したインクが拭き取られる。 1 is carried by the carrying arm 56 shown in FIG. 1, the cleaning roller 51 passes below the plurality of inkjet heads 21p while moving in parallel with the surface of the nozzle surface 22. During this time, the outer peripheral surface of the belt-shaped knitted fabric 64 comes into contact with the nozzle surface 22 of each inkjet head 21p, so that the ink attached to the nozzle surface 22 is wiped off.
　本実施の形態では、クリーニングローラ５１が、ノズル孔領域４１の短辺４６が延伸する方向に沿って搬送される。このような構成により、クリーニングローラ５１が長辺４７が延伸する方向に沿って搬送される場合と比較して、ノズル面２２の拭き取り時のクリーニングローラ５１の移動距離を短く設定することができる。これにより、ノズル面２２の拭き取りに要する時間を短縮化することができる。 In the present embodiment, the cleaning roller 51 is conveyed along the direction in which the short side 46 of the nozzle hole region 41 extends. With this configuration, the moving distance of the cleaning roller 51 when wiping the nozzle surface 22 can be set shorter than when the cleaning roller 51 is conveyed along the direction in which the long side 47 extends. Thereby, the time required for wiping off the nozzle surface 22 can be shortened.
　なお、拭き取り時における帯状編み物６４の移動方向は、ノズル面２２に平行な方向に限られず、たとえば、中心軸１１０の軸方向から見た場合に、帯状編み物６４をノズル面に対して円弧状に移動させてもよい。 Note that the moving direction of the strip knitted fabric 64 at the time of wiping is not limited to the direction parallel to the nozzle surface 22. For example, when viewed from the axial direction of the central axis 110, the strip knitted fabric 64 has an arc shape with respect to the nozzle surface. It may be moved.
　また、本実施の形態では、ノズル面２２の拭き取り時、クリーニングローラ５１を移動させることによって帯状編み物６４とインクジェットヘッド２１とを相対移動させたが、本発明はこれに限られず、たとえば、静止するクリーニングローラ５１に対してインクジェットヘッド２１を移動させてもよい。 In the present embodiment, when the nozzle surface 22 is wiped, the belt-shaped knitted fabric 64 and the inkjet head 21 are moved relative to each other by moving the cleaning roller 51. However, the present invention is not limited to this, and, for example, stops. The inkjet head 21 may be moved with respect to the cleaning roller 51.
　また、クリーニングローラ５１は、編み物に替わって、たとえば、織り物や不織布などを用いて構成されてもよい。また、帯状部材を多層に巻き回す構造に限られず、たとえば、連続気泡構造を有するスポンジを用いてノズル面２２の拭き取りを行なってもよい。 Further, the cleaning roller 51 may be configured using, for example, a woven fabric or a non-woven fabric instead of the knitted fabric. Moreover, it is not restricted to the structure which winds a strip | belt-shaped member in a multilayer, For example, you may wipe off the nozzle surface 22 using the sponge which has an open cell structure.
　次に、図１中のインクジェット塗布装置１０によって奏される作用、効果について説明する。 Next, functions and effects achieved by the ink jet coating apparatus 10 in FIG. 1 will be described.
　図７は、比較のためのインクジェット塗布装置において、クリーニングローラによる拭き取り前のノズル面の様子を示す断面図である。図７を参照して、本比較例におけるインクジェット塗布装置は、図３中のインクジェットヘッド２１ｐに替えて、インクジェットヘッド１２１ｐを有する。インクジェットヘッド１２１ｐでは、ノズル孔領域４１と閉塞領域４２との間に段差が設けられておらず、ノズル面２２の全体が同一平面上に延在する。 FIG. 7 is a cross-sectional view showing a state of a nozzle surface before wiping with a cleaning roller in an inkjet coating apparatus for comparison. Referring to FIG. 7, the ink jet coating apparatus in this comparative example includes an ink jet head 121p instead of the ink jet head 21p in FIG. In the inkjet head 121p, no step is provided between the nozzle hole region 41 and the closed region 42, and the entire nozzle surface 22 extends on the same plane.
　ノズル孔２４からインクが吐出されるのに伴って、ノズル面２２にインクが付着する。この際、インクは、ノズル孔２４が形成されたノズル孔領域４１を中心とする範囲に付着する。ノズル面２２に厚膜のインク膜が形成されたままインクの吐出工程が実行されると、可撓板３８（図３を参照のこと）の変形に伴う駆動力がノズル面２２の表層のインクにまで十分に伝わらず、インク滴が適切に吐出されないという問題が生じる。このような問題を解決するために、図１中のクリーニング装置５０を用いてノズル面２２の拭き取り工程を実施する。 The ink adheres to the nozzle surface 22 as the ink is ejected from the nozzle hole 24. At this time, the ink adheres to a range centering on the nozzle hole region 41 in which the nozzle holes 24 are formed. When the ink ejection process is executed while the thick ink film is formed on the nozzle surface 22, the driving force accompanying the deformation of the flexible plate 38 (see FIG. 3) is applied to the surface layer ink on the nozzle surface 22. This causes a problem that ink droplets are not properly ejected. In order to solve such a problem, a wiping process of the nozzle surface 22 is performed using the cleaning device 50 in FIG.
　図８は、図７中の比較のためのインクジェット塗布装置において、ノズル面の拭き取り工程を示す断面図である。図９は、図８中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。 FIG. 8 is a cross-sectional view illustrating a nozzle surface wiping process in the inkjet coating apparatus for comparison in FIG. FIG. 9 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 8 is performed.
　図８および図９を参照して、クリーニングローラ５１による拭き取り工程を重ねると、帯状編み物６４にはインクが徐々に浸透していく。また、クリーニングローラ５１を最初に使用する際に、ノズル面２２上のインクが過剰に拭き取られないように、帯状編み物６４に予めインクを吸収させておく場合がある。これらの場合において、帯状編み物６４に吸収されたインクが、ノズル面２２の拭き取り工程に伴って閉塞領域４２に付着する。この場合、閉塞領域４２に付着したインクが時間の経過とともに乾燥し、固形化する。その結果、ノズル面２２にインクの固形物７３が生じる。このような固形物７３が生じた状態で、クリーニングローラ５１による拭き取り工程を続行すると、固形物７３に起因して、帯状編み物６４の外周面とノズル面２２との間に微小な隙間が生じ、ノズル面２２の拭き取り性が低下するおそれが生じる。また、帯状編み物６４の外周面と固形物７３とが擦れることによって、帯状編み物６４の発塵性が低下するおそれが生じる。 8 and 9, when the wiping process by the cleaning roller 51 is repeated, the ink gradually permeates into the band-shaped knitted fabric 64. In addition, when the cleaning roller 51 is used for the first time, the belt-shaped knitted fabric 64 may absorb ink in advance so that the ink on the nozzle surface 22 is not excessively wiped off. In these cases, the ink absorbed in the band-shaped knitted fabric 64 adheres to the closed region 42 as the nozzle surface 22 is wiped off. In this case, the ink adhering to the closed region 42 is dried and solidified over time. As a result, an ink solid 73 is generated on the nozzle surface 22. When the wiping process by the cleaning roller 51 is continued in a state where such a solid material 73 is generated, a minute gap is generated between the outer peripheral surface of the band-shaped knitted fabric 64 and the nozzle surface 22 due to the solid material 73, There is a risk that the wiping performance of the nozzle surface 22 may be reduced. Moreover, when the outer peripheral surface of the strip-shaped knitted fabric 64 and the solid material 73 are rubbed, there is a possibility that the dust generation property of the strip-shaped knitted fabric 64 is lowered.
　図１０は、図１中のインクジェット塗布装置を用いた場合のノズル面の拭き取り工程を示す断面図である。図１１は、図１０中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。 FIG. 10 is a cross-sectional view showing a nozzle surface wiping process when the ink jet coating apparatus in FIG. 1 is used. FIG. 11 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 10 is performed.
　図１０および図１１を参照して、これに対して、本実施の形態におけるインクジェット塗布装置１０では、ノズル面２２を正面から見た場合に、閉塞領域４２がノズル孔領域４１よりも奥まって配置されている。このため、ノズル面２２の拭き取り時に帯状編み物６４と閉塞領域４２とを非接触にしつつ、ノズル孔領域４１に付着したインクを帯状編み物６４に吸収することができる。これにより、インクが閉塞領域４２に付着し、固形化するということがなくなる。 With reference to FIG. 10 and FIG. 11, in contrast, in the inkjet coating apparatus 10 according to the present embodiment, the closed region 42 is disposed deeper than the nozzle hole region 41 when the nozzle surface 22 is viewed from the front. Has been. For this reason, it is possible to absorb the ink attached to the nozzle hole region 41 into the belt-shaped knitted fabric 64 while keeping the belt-shaped knitted fabric 64 and the closed region 42 in non-contact when the nozzle surface 22 is wiped off. As a result, the ink does not adhere to the closed area 42 and solidify.
　以上に説明した、この発明の実施の形態におけるインクジェット塗布装置１０の構造についてまとめて説明すると、本実施の形態におけるインクジェット塗布装置１０は、ノズル面２２を有するインクジェットヘッド２１と、ノズル面２２を拭き取るための吸収体としての帯状編み物６４とを備える。インクジェットヘッド２１には、ノズル面２２に開口し、インクを吐出する複数のノズル孔２４と、複数のノズル孔２４に向けてインクを供給する供給孔としてのインク供給管２９およびインク供給室２８とが形成される。帯状編み物６４は、ノズル面２２に付着したインクを吸収する。ノズル面２２を正面から見た場合に、ノズル面２２には、複数のノズル孔２４が開口する第１領域としてのノズル孔領域４１と、ノズル孔領域４１と隣り合って配置され、インクジェットヘッド２１の内部に形成されたインク供給管２９およびインク供給室２８が投影される第２領域としての閉塞領域４２とが規定される。閉塞領域４２は、ノズル孔領域４１よりも後退した位置に配置される。 The structure of the inkjet coating apparatus 10 according to the embodiment of the present invention described above will be described collectively. The inkjet coating apparatus 10 according to the present embodiment wipes the inkjet head 21 having the nozzle surface 22 and the nozzle surface 22. And a belt-like knitted fabric 64 as an absorbent body. The inkjet head 21 has a plurality of nozzle holes 24 that are opened in the nozzle surface 22 and eject ink, and an ink supply pipe 29 and an ink supply chamber 28 that serve as supply holes for supplying ink toward the plurality of nozzle holes 24. Is formed. The strip-shaped knitted fabric 64 absorbs ink attached to the nozzle surface 22. When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is disposed adjacent to the nozzle hole region 41 as a first region in which a plurality of nozzle holes 24 are opened, and the nozzle hole region 41. The ink supply pipe 29 and the closed region 42 as the second region onto which the ink supply chamber 28 is projected are defined. The closed region 42 is disposed at a position that is retracted from the nozzle hole region 41.
　このように構成された、この発明の実施の形態におけるインクジェット塗布装置１０によれば、閉塞領域４２がノズル孔領域４１よりも奥まって配置されることによって、ノズル面２２の拭き取り工程に伴って閉塞領域４２にインクが付着することを防止できる。これにより、ノズル面２２にインクの固形物が生じることを防止し、ノズル孔２４から安定してインクが吐出されるインクジェット塗布装置１０を実現することができる。 According to the inkjet coating apparatus 10 according to the embodiment of the present invention configured as described above, the blocking region 42 is disposed deeper than the nozzle hole region 41, so that the nozzle surface 22 is blocked along with the wiping process. Ink can be prevented from adhering to the region 42. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22 and to realize the ink jet coating apparatus 10 in which ink is stably ejected from the nozzle hole 24.
　なお、本実施の形態では、インクジェット塗布装置１０が、液晶ディスプレイ用の基板表面に配向膜を形成する工程に用いられる場合を説明したが、本発明は、これに限られず、たとえば、基板表面にレジストを形成する工程に利用されてもよい。 In the present embodiment, the case where the inkjet coating apparatus 10 is used for the step of forming an alignment film on the surface of a substrate for a liquid crystal display has been described. However, the present invention is not limited to this. You may utilize for the process of forming a resist.
　図１２は、図３中に示すインクジェット塗布装置の第１変形例を示す断面図である。図１２を参照して、本変形例では、閉塞領域４２が傾斜面８１によって形成されている。傾斜面８１は、ノズル孔領域４１が延在する平面に対して傾斜して延在する。ノズル面２２は、ノズル孔領域４１と閉塞領域４２との間で連続して連なるように形成されている。 FIG. 12 is a cross-sectional view showing a first modification of the ink jet coating apparatus shown in FIG. Referring to FIG. 12, in this modification, the closed region 42 is formed by an inclined surface 81. The inclined surface 81 extends while being inclined with respect to the plane in which the nozzle hole region 41 extends. The nozzle surface 22 is formed so as to be continuous between the nozzle hole region 41 and the closed region 42.
　図１３は、図３中に示すインクジェット塗布装置の第２変形例を示す断面図である。図１３を参照して、本変形例では、閉塞領域４２が湾曲面８２によって形成されている。湾曲面８２は、ノズル孔領域４１から離れるに従って、ノズル孔領域４１が延在する平面に対する傾きが大きくなるように湾曲している。ノズル面２２は、ノズル孔領域４１と閉塞領域４２との間で連続して連なるように形成されている。 FIG. 13 is a cross-sectional view showing a second modification of the ink jet coating apparatus shown in FIG. Referring to FIG. 13, in this modification, the closed region 42 is formed by a curved surface 82. The curved surface 82 is curved so that the inclination with respect to the plane in which the nozzle hole region 41 extends increases as the distance from the nozzle hole region 41 increases. The nozzle surface 22 is formed so as to be continuous between the nozzle hole region 41 and the closed region 42.
　図１２および図１３中に示す変形例においても、ノズル面２２の拭き取り工程時に閉塞領域４２にインクが付着することを防止できる。 12 and 13 can also prevent the ink from adhering to the closed region 42 during the wiping process of the nozzle surface 22.
　今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
　この発明は、主に、液晶ディスプレイの配向膜や、レジストなどの機能膜を基板上に形成する装置として利用される。 The present invention is mainly used as an apparatus for forming an alignment film of a liquid crystal display and a functional film such as a resist on a substrate.
　１０　インクジェット塗布装置、１２　載置台、１４　搬送アーム、１６　液晶基板、１６ａ　主表面、２１，２１ｐ，１２１ｐ　インクジェットヘッド、２２　ノズル面、２４　ノズル孔、２６　インク室、２７　枝管、２８　インク供給室、２９　インク供給管、３１　ヘッド本体、３２　ノズル板、３４　駆動部、３５　開口部、３６　ピエゾ素子、３８　可撓板、４１　ノズル孔領域、４２，４２ｍ，４２ｎ　閉塞領域、４６　短辺、４７　長辺、５０　クリーニング装置、５１　クリーニングローラ、５４　ベース部材、５６　搬送アーム、６３　芯筒、６４　帯状編み物、７３　固形物、８０　段差、８１　傾斜面、８２　湾曲面。 10 Inkjet coating device, 12 mounting table, 14 transport arm, 16 liquid crystal substrate, 16a main surface, 21, 21p, 121p inkjet head, 22 nozzle face, 24 nozzle hole, 26 ink chamber, 27 branch pipe, 28 ink supply chamber, 29 ink supply pipe, 31 head body, 32 nozzle plate, 34 drive unit, 35 opening, 36 piezo element, 38 flexible plate, 41 nozzle hole area, 42, 42m, 42n closed area, 46 short side, 47 long side , 50 cleaning device, 51 cleaning roller, 54 base member, 56 transport arm, 63 core cylinder, 64 strip knitting, 73 solid, 80 step, 81 inclined surface, 82 curved surface.

Claims (8)

  1. 　ノズル面（２２）を有し、前記ノズル面（２２）に開口し、インクを吐出する複数のノズル孔（２４）と、前記複数のノズル孔（２４）に向けてインクを供給する供給孔（２９，２８）とが形成されるインクジェットヘッド（２１）と、
    　前記ノズル面（２２）に付着したインクを吸収し、前記ノズル面（２２）を拭き取るための吸収体（６４）とを備え、
    　前記ノズル面（２２）を正面から見た場合に、前記ノズル面（２２）には、前記複数のノズル孔（２４）が開口する第１領域（４１）と、前記第１領域（４１）と隣り合って配置され、前記インクジェットヘッド（２１）の内部に形成された前記供給孔（２９，２８）が投影される第２領域（４２）とが規定され、前記第２領域（４２）は、前記第１領域（４１）よりも後退した位置に配置される、インクジェット塗布装置。     A plurality of nozzle holes (24) that have a nozzle surface (22), open to the nozzle surface (22), and discharge ink; and supply holes (ink) that supply ink toward the plurality of nozzle holes (24) 29, 28) and an inkjet head (21) formed;
    An absorber (64) for absorbing ink adhering to the nozzle surface (22) and wiping the nozzle surface (22);
    When the nozzle surface (22) is viewed from the front, the nozzle surface (22) includes a first region (41) in which the plurality of nozzle holes (24) are opened, and the first region (41). A second region (42) that is disposed adjacent to and projected from the supply holes (29, 28) formed inside the inkjet head (21) is defined, and the second region (42) An ink jet coating apparatus disposed at a position retracted from the first region (41).
  2. 　前記ノズル面（２２）は、前記第１領域（４１）と前記第２領域（４２）との間で連続して連なり、前記第２領域（４２）が前記第１領域（４１）に対して傾斜して延在するように形成される、請求項１に記載のインクジェット塗布装置。 The nozzle surface (22) is continuously connected between the first region (41) and the second region (42), and the second region (42) is connected to the first region (41). The ink jet coating apparatus according to claim 1, wherein the ink jet coating apparatus is formed so as to extend in an inclined manner.
  3. 　前記ノズル面（２２）は、前記第１領域（４１）と前記第２領域（４２）との間で段差が生じるように形成される、請求項１または２に記載のインクジェット塗布装置。 The ink jet coating apparatus according to claim 1 or 2, wherein the nozzle surface (22) is formed such that a step is generated between the first region (41) and the second region (42).
  4. 　前記吸収体（６４）と前記ノズル面（２２）とを対向させた状態で、前記吸収体（６４）および前記インクジェットヘッド（２１）を、前記第１領域（４１）および前記第２領域（４２）が並ぶ方向に直交する方向に相対移動させる移動機構部（５６）をさらに備える、請求項１から３のいずれか１項に記載のインクジェット塗布装置。 With the absorber (64) and the nozzle surface (22) facing each other, the absorber (64) and the inkjet head (21) are connected to the first region (41) and the second region (42). The inkjet coating apparatus according to any one of claims 1 to 3, further comprising a movement mechanism section (56) that relatively moves in a direction orthogonal to a direction in which the two are arranged.
  5. 　前記第１領域（４１）は、第１辺と、前記第１辺よりも大きい長さを有する第２辺とを有する矩形形状に形成され、
    　前記吸収体（６４）と前記ノズル面（２２）とを対向させた状態で、前記吸収体（６４）および前記インクジェットヘッド（２１）を、前記第１辺が延伸する方向に沿って相対移動させる移動機構部（５６）をさらに備える、請求項１から４のいずれか１項に記載のインクジェット塗布装置。     The first region (41) is formed in a rectangular shape having a first side and a second side having a length larger than the first side,
    With the absorber (64) and the nozzle surface (22) facing each other, the absorber (64) and the inkjet head (21) are relatively moved along the direction in which the first side extends. The inkjet coating apparatus according to any one of claims 1 to 4, further comprising a moving mechanism section (56).
  6. 　前記吸収体（６４）は、インクを吸収可能な帯状部材が多層に巻き回されて形成される、請求項１から５のいずれか１項に記載のインクジェット塗布装置。 The ink jet coating apparatus according to any one of claims 1 to 5, wherein the absorber (64) is formed by winding a belt-like member capable of absorbing ink in multiple layers.
  7. 　前記帯状部材（６４）は、編み物からなる、請求項６に記載のインクジェット塗布装置。 The ink jet coating apparatus according to claim 6, wherein the belt-like member (64) is made of knitting.
  8. 　前記複数のノズル孔（２４）を通じてポリイミドの溶液が基板に向けて吐出され、
    　前記吸収体（６４）によって、前記ノズル面（２２）に付着したポリイミドの溶液が拭き取られる、請求項１から７のいずれか１項に記載のインクジェット塗布装置。     A polyimide solution is discharged toward the substrate through the plurality of nozzle holes (24),
    The inkjet coating apparatus according to any one of claims 1 to 7, wherein a polyimide solution attached to the nozzle surface (22) is wiped off by the absorber (64).
PCT/JP2011/063000 2010-06-08 2011-06-07 Inkjet application device WO2011155476A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002079680A (en) * 2000-09-05 2002-03-19 Ricoh Co Ltd Recording head and ink jet recording apparatus
JP2002178530A (en) * 2000-12-18 2002-06-26 Seiko Epson Corp Ink jet recorder
JP2006272791A (en) * 2005-03-29 2006-10-12 Shibaura Mechatronics Corp Inkjet application device, and method of cleaning inkjet head
JP2009196243A (en) * 2008-02-22 2009-09-03 Sharp Corp Inkjet device and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002079680A (en) * 2000-09-05 2002-03-19 Ricoh Co Ltd Recording head and ink jet recording apparatus
JP2002178530A (en) * 2000-12-18 2002-06-26 Seiko Epson Corp Ink jet recorder
JP2006272791A (en) * 2005-03-29 2006-10-12 Shibaura Mechatronics Corp Inkjet application device, and method of cleaning inkjet head
JP2009196243A (en) * 2008-02-22 2009-09-03 Sharp Corp Inkjet device and its manufacturing method

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