WO2011155433A1 - Cleaning device and inkjet coating applicator - Google Patents

Cleaning device and inkjet coating applicator Download PDF

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Publication number
WO2011155433A1
WO2011155433A1 PCT/JP2011/062916 JP2011062916W WO2011155433A1 WO 2011155433 A1 WO2011155433 A1 WO 2011155433A1 JP 2011062916 W JP2011062916 W JP 2011062916W WO 2011155433 A1 WO2011155433 A1 WO 2011155433A1
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WO
WIPO (PCT)
Prior art keywords
ink
belt
nozzle surface
nozzle
cleaning device
Prior art date
Application number
PCT/JP2011/062916
Other languages
French (fr)
Japanese (ja)
Inventor
宏晃 新畑
淳 秋山
唯史 塩崎
健一 向井
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Publication of WO2011155433A1 publication Critical patent/WO2011155433A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16535—Cleaning of print head nozzles using wiping constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16585—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles for paper-width or non-reciprocating print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles

Definitions

  • the present invention generally relates to a cleaning device and an inkjet coating device, and more particularly to a cleaning device for wiping the nozzle surface of the inkjet coating device and an inkjet coating device including the cleaning device.
  • Japanese Patent Application Laid-Open No. 2006-248102 discloses an inkjet coating for the purpose of improving the wiping state of excess ejection liquid on the nozzle surface of an inkjet head and stabilizing the ejection of the solution.
  • An apparatus is disclosed (Patent Document 1).
  • the inkjet coating apparatus disclosed in Patent Document 1 includes a wiping cloth, a feeding mechanism that feeds the wiping cloth to the front surface of the nozzle surface of the inkjet head, and a roller that presses the wiping cloth against the nozzle surface.
  • the wiping cloth is formed of a band-shaped member having a low dust generation and water absorption, for example, a polyester fiber.
  • the nozzle surface is wiped off by the roller moving along the nozzle surface while pressing the wiping cloth against the nozzle surface.
  • Japanese Patent Application Laid-Open No. 2005-305845 discloses a liquid ejection head cleaning device for the purpose of improving the cleaning effect of the nozzle surface of the liquid ejection head (Patent Document 2).
  • the cleaning device disclosed in Patent Document 2 includes a cleaning roller in which a surface that contacts the nozzle surface is formed by a fibrous absorbent body and wipes the nozzle surface.
  • Patent Document 3 discloses a print cleaning mechanism aimed at improving ejection reliability (Patent Document 3).
  • the print cleaning mechanism disclosed in Patent Document 3 includes a cleaning roller made of an elastic porous material and a non-woven fabric, and is disposed between a head portion that supplies ink and a cleaning roller when wiping ink. And paper.
  • An inkjet coating apparatus is used in a manufacturing process for forming a functional film such as a resist or an alignment film on the surface of a substrate.
  • a cleaning device for wiping off the ink adhering to the nozzle surface is used. Specifically, the ejection stability is realized by wiping the ink so that the nozzle surface is kept moist to some extent.
  • an object of the present invention is to solve the above-described problems, and to provide a cleaning device and an ink jet coating device that stabilize the ejection of ink from the ink jet coating device.
  • the cleaning device is a cleaning device for wiping the nozzle surface of the ink jet coating device.
  • the cleaning device includes an absorber that absorbs ink adhering to the nozzle surface.
  • the absorber is formed to have a central portion and both side portions provided on both sides of the central portion.
  • the central portion has a first surface arranged to face the nozzle surface, and both side portions have a second surface extending continuously from the first surface.
  • the second surface is disposed at a position retracted from the first surface with respect to the nozzle surface.
  • the cleaning device configured in this manner, it is assumed that there are places where ink is likely to adhere and places where ink is difficult to adhere as ink is ejected on the nozzle surface of the ink jet coating apparatus.
  • the second surfaces on both sides are disposed at a position retracted from the nozzle surface with respect to the first surface of the central portion, so that the central portion wipes away the area where the ink on the nozzle surface is likely to adhere. Further, it is possible to prevent the ink from moving from the both sides to a place where the ink on the nozzle surface is difficult to adhere.
  • the absorber is provided so that the first surface and the second surface extend continuously, it is possible to prevent a local ink reservoir from remaining on the nozzle surface.
  • the absorber has a first width and has a first band-shaped member capable of absorbing ink, and a second width larger than the first width and capable of absorbing ink. Member.
  • the absorber is formed by further winding the second band member on the outer periphery of the first band member wound in multiple layers.
  • a large-diameter portion that consists of the first band member and the second band member and forms the central portion.
  • small diameter portions made of the second band member and forming both side portions.
  • the large-diameter portion wipes away the place where the ink on the nozzle surface is likely to adhere, and prevents the ink from moving from the small-diameter portion to the place where the ink on the nozzle surface is difficult to adhere. it can.
  • the large diameter portion since the first belt-like member and the second belt-like member are arranged to overlap each other, a large amount of ink absorbed from the nozzle surface can be held in the absorber.
  • the first belt member and the second belt member are knitted. According to the cleaning device configured as described above, the ink enters the stitches of the knitted fabric, so that the ink adhering to the nozzle surface can be absorbed by the absorber.
  • the second strip member has higher liquid absorbency than the first strip member.
  • the first belt-shaped member has higher water retention than the second belt-shaped member. According to the cleaning device configured as described above, the ink adhering to the nozzle surface can be efficiently absorbed by the absorber by the second belt-shaped member. In addition, the first strip member can hold a large amount of ink absorbed from the nozzle surface in the absorber.
  • the first belt member and the second belt member are knitted.
  • the stitch of the knitted fabric in the second strip member is larger than the stitch of the knitted fabric in the first strip member.
  • the first surface and the second surface are connected while being curved at the boundary between the central portion and both side portions. According to the cleaning device configured as described above, it is possible to more reliably prevent ink accumulation on the nozzle surface wiped off by the boundary position between the center portion and both side portions.
  • An ink jet coating apparatus is an ink jet coating apparatus including any one of the cleaning devices described above.
  • the ink jet coating apparatus includes an ink jet head having a nozzle surface and a moving mechanism unit.
  • the ink jet head is formed with a plurality of nozzle holes that open on the nozzle surface and eject ink, and supply holes that supply ink toward the plurality of nozzle holes.
  • the moving mechanism unit relatively moves the absorber and the inkjet head in a state where the absorber and the nozzle surface face each other. When the nozzle surface is viewed from the front, the nozzle surface defines a first region where a plurality of nozzle holes are opened, and a second region which is disposed on both sides of the first region and where supply holes are formed. .
  • the absorber and the inkjet head move relative to each other in a state where the central portion and the first region face each other and both the side portions and the second region face each other.
  • the ink jet coating apparatus configured as described above, it is possible to wipe off the place where the ink is easily attached by the central portion and to prevent the ink from moving from the both sides to the place where the ink is hardly attached. Further, it is possible to prevent ink accumulation from occurring at the boundary between the first region and the second region of the nozzle surface. For these reasons, it is possible to prevent ink solid matter from being generated on the nozzle surface, and to stably eject ink through the nozzle holes opened in the nozzle surface.
  • the polyimide solution is discharged toward the substrate through the nozzle hole.
  • the polyimide solution adhering to the nozzle surface is wiped off by the cleaning device.
  • the polyimide solution can be stably discharged toward the substrate.
  • FIG. 3 is a cross-sectional view showing an ink jet head taken along line III-III in FIG. 2.
  • FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. 3.
  • FIG. 6 is a cross-sectional view showing the cleaning roller along line VI-VI in FIG. 5.
  • FIG. 1 is a side view showing an ink jet coating apparatus provided with a cleaning device according to Embodiment 1 of the present invention.
  • an inkjet coating apparatus 10 provided with a cleaning device 50 according to the present embodiment is used in a process for forming an alignment film on the surface of a liquid crystal substrate 16 in a liquid crystal display manufacturing process.
  • the inkjet coating apparatus 10 includes a mounting table 12, a transport arm 14, and an inkjet head 21.
  • a liquid crystal substrate 16 that is a target for ejecting ink is placed on the mounting table 12.
  • the liquid crystal substrate 16 has a main surface 16a on which an alignment film is formed.
  • the liquid crystal substrate 16 is mounted on the mounting table 12 so that the main surface 16a extends in the horizontal direction.
  • the liquid crystal substrate 16 has a rectangular shape when the main surface 16a is viewed from the front.
  • the liquid crystal substrate 16 is a large substrate having a size of 2160 ⁇ 2460 mm or 2850 ⁇ 3050 mm.
  • a polyimide solution is applied to the main surface 16a.
  • the material applied to the main surface 16a of the liquid crystal substrate 16 is not limited to polyimide, and a material that can be a raw material for the alignment film is appropriately selected.
  • the inkjet head 21 has a function of ejecting ink toward the liquid crystal substrate 16.
  • the inkjet head 21 is provided above the mounting table 12.
  • the inkjet head 21 has a nozzle surface 22.
  • the nozzle surface 22 extends in the horizontal direction.
  • the transfer arm 14 is provided as a substrate moving mechanism for moving the liquid crystal substrate 16 mounted on the mounting table 12 and the inkjet head 21 relative to each other. More specifically, the transport arm 14 is connected to the mounting table 12 and is provided so as to be able to transport the mounting table 12 in the horizontal direction indicated by the arrow 101. As the transport arm 14 is driven, the liquid crystal substrate 16 mounted on the mounting table 12 passes under the inkjet head 21. During this time, a polyimide solution is discharged from the nozzle surface 22 toward the liquid crystal substrate 16, whereby a polyimide film is applied to the main surface 16a.
  • FIG. 2 is a bottom view showing the ink-jet head viewed from the direction indicated by arrow II in FIG.
  • FIG. 3 is a cross-sectional view showing the ink jet head taken along line III-III in FIG.
  • the inkjet head 21 is configured by combining a plurality of inkjet heads 21p.
  • the plurality of inkjet heads 21p are provided side by side in a direction (direction indicated by an arrow 103 in FIG. 2) orthogonal to the transport direction of the liquid crystal substrate 16 (direction indicated by an arrow 101 in FIG. 2).
  • the plurality of inkjet heads 21p are combined so that the nozzle surfaces 22 of the inkjet heads 21p extend on the same plane.
  • the total length of the inkjet head 21 in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is set to be larger than the width of the liquid crystal substrate 16 in the same direction.
  • the plurality of inkjet heads 21p have the same structure.
  • the number of inkjet heads 21p to be combined is appropriately determined in consideration of the size of the liquid crystal substrate 16. Further, the method of combining the ink jet heads 21p is not limited to the above form, and for example, a plurality of ink jet heads 21p shown in FIG. 2 may be provided in a plurality of rows in the transport direction of the liquid crystal substrate 16.
  • the inkjet head 21p includes a head main body 31 and a nozzle plate 32 as a block member, a flexible plate 38, a piezoelectric (piezoelectric) element 36, and a drive unit 34.
  • the head body 31 has an opening 35 penetrating from the upper surface to the lower surface. Inside the opening 35, a drive unit 34 and a plurality of piezo elements 36 are arranged. A flexible plate 38 is provided on the lower surface of the head body 31 so as to close the opening 35.
  • the nozzle plate 32 is attached to the lower surface of the head body 31 so as to cover the flexible plate 38.
  • the nozzle plate 32 has a nozzle surface 22.
  • the nozzle surface 22 has a rectangular shape having a short side in the transport direction of the liquid crystal substrate 16 and a long side in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • a plurality of nozzle holes 24 are formed in the inkjet head 21p.
  • the nozzle hole 24 is a hole for ejecting ink toward the liquid crystal substrate 16.
  • the nozzle hole 24 is formed in the nozzle plate 32.
  • the nozzle hole 24 is formed so as to open in the nozzle surface 22.
  • the plurality of nozzle holes 24 are arranged at intervals from each other in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the plurality of nozzle holes 24 are arranged in a staggered manner along a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the number of nozzle holes 24 arranged in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is larger than the number of nozzle holes 24 arranged in the transport direction of the liquid crystal substrate 16.
  • a plurality of ink chambers 26 are further formed in the inkjet head 21p.
  • the plurality of ink chambers 26 are formed in the nozzle plate 32.
  • the plurality of ink chambers 26 are formed corresponding to the plurality of nozzle holes 24, respectively.
  • Each nozzle hole 24 communicates with the ink chamber 26.
  • the ink chamber 26 is formed on the opposite side of the nozzle surface 22 with respect to the nozzle hole 24.
  • the ink chamber 26 is formed so as to open on the side opposite to the position where the nozzle hole 24 communicates. With the nozzle plate 32 attached to the head body 31, the opening of the ink chamber 26 is closed by the flexible plate 38. Ink is always stored in the ink chamber 26 by an ink supply mechanism described later.
  • a plurality of piezo elements 36 are fixed to the flexible plate 38.
  • Each of the plurality of piezo elements 36 is provided at a position facing the plurality of ink chambers 26 with a flexible plate 38 interposed therebetween.
  • the piezo element 36 is electrically connected to the drive unit 34.
  • the flexible plate 38 bends into the ink chamber 26. Since the volume in the ink chamber 26 decreases with the deformation of the flexible plate 38, the ink stored in the ink chamber 26 is ejected through the nozzle holes 24.
  • FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG.
  • the ink supply mechanism for supplying ink to the ink chamber 26 will be described with reference to FIGS.
  • An ink supply pipe 29 and an ink supply chamber 28 as supply holes and a branch pipe 27 are further formed in the inkjet head 21p.
  • the ink supply chamber 28 is formed in the nozzle plate 32.
  • the ink supply chambers 28 are respectively formed at positions on both sides of the plurality of nozzle holes 24 in the cross section shown in FIGS.
  • the branch pipe 27 is formed on the nozzle plate 32.
  • the branch pipe 27 is formed to communicate between the ink supply chamber 28 and the plurality of ink chambers 26.
  • the branch pipe 27 extends linearly along a direction perpendicular to the transport direction of the liquid crystal substrate 16 through the ink chambers 26 spaced apart in the transport direction of the liquid crystal substrate 16.
  • the two ink supply chambers 28 are communicated with each other.
  • the branch pipe 27 is branched and extended from the linearly extending portion toward each ink chamber 26.
  • the ink supply pipe 29 is formed in the head main body 31.
  • the ink supply pipe 29 is formed in communication with the ink supply chamber 28.
  • the ink supply pipe 29 is formed at a position overlapping the ink supply chamber 28 when the nozzle surface 22 is viewed from the front.
  • a pipe for supplying ink from the outside to the ink jet head 21p is connected to the ink supply pipe 29.
  • the ink supply pipe 29 and the ink supply chamber 28 are formed in the ink jet head 21p without opening in the nozzle surface 22.
  • ink is supplied to the ink supply chamber 28 through the ink supply pipe 29.
  • ink is ejected through the nozzle holes 24
  • the inside of the ink chamber 26 becomes negative pressure. Therefore, the ink supplied to the ink supply chamber 28 is supplied to the ink chamber 26 as needed through the branch pipe 27.
  • the nozzle surface 22 is formed with a nozzle hole region 41 in which the nozzle holes 24 are opened, an ink supply pipe 29 and an ink supply chamber 28, and the blocked surface extends.
  • a region 42 (42m, 42n) is defined.
  • the closed area 42m, the nozzle hole area 41, and the closed area 42n are arranged in a direction orthogonal to the transport direction of the liquid crystal substrate 16. That is, the nozzle hole region 41 is disposed at the center of the nozzle surface 22 and the blocking regions 42 are disposed at both ends of the nozzle surface 22 in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
  • the cleaning device 50 in the present embodiment is a device for wiping off ink adhering to the nozzle surface 22.
  • the cleaning device 50 includes a cleaning roller 51, a base member 54, and a transport arm 56.
  • the cleaning roller 51 is detachably attached to the base member 54.
  • the transport arm 56 is provided as a moving mechanism unit for moving the cleaning roller 51 and the inkjet head 21 relative to each other.
  • the transport arm 56 is connected to the base member 54, and is provided so that the cleaning roller 51 attached to the base member 54 can be transported in the horizontal direction indicated by the arrow 102.
  • the conveyance direction of the cleaning roller 51 is the same as the conveyance direction of the liquid crystal substrate 16.
  • a plurality of cleaning rollers 51 are provided corresponding to the plurality of inkjet heads 21p shown in FIG. As the transport arm 56 is driven, the cleaning roller 51 passes below the inkjet head 21p. During this time, the cleaning roller 51 moves while being in contact with the nozzle surface 22, whereby the ink attached to the nozzle surface 22 is wiped off.
  • FIG. 5 is a perspective view showing the cleaning roller.
  • FIG. 6 is a cross-sectional view showing the cleaning roller along the line VI-VI in FIG.
  • the cleaning roller 51 has the appearance of a stepped cylinder whose diameters at both ends are narrowed.
  • the cleaning roller 51 has a core cylinder 63 and a strip-shaped knitted fabric 68 as an absorber.
  • the core cylinder 63 has a cylindrical shape extending along the axis of the central axis 110 that is a virtual line.
  • the core cylinder 63 has a constant diameter in the axial direction of the central axis 110.
  • the strip knitted fabric 68 is wound around the core cylinder 63 in multiple layers.
  • the band-shaped knitted fabric 68 is wound around the central axis 110.
  • the band-shaped knitted fabric 68 is formed to have a central portion 61 and both side portions 62 (62m, 62n). Both side portions 62 are provided on both sides of the central portion 61. Both side parts 62m, the center part 61, and both side parts 62n are arranged in the axial direction of the central axis 110 which is a winding axis of the band-shaped knitted fabric 68 in the order mentioned.
  • the central portion 61 is provided at the center of the belt-like knitted fabric 68 in the axial direction of the central shaft 110, and both side portions 62 are provided at both ends of the belt-shaped knitted fabric 68 in the axial direction of the central shaft 110.
  • the nozzle surface 22 wiped off by the cleaning roller 51 is indicated by a two-dot chain line.
  • the central portion 61 and both side portions 62 have a surface 66 and a surface 67 that are disposed to face the nozzle surface 22 when the nozzle surface 22 is wiped off, respectively.
  • the surface 66 and the surface 67 are outer peripheral surfaces of the strip-shaped knitted fabric 68 having a cylindrical shape.
  • the surface 67 is disposed at a position retracted from the surface 66 with respect to the nozzle surface 22.
  • the surface 67 extends continuously from the surface 66. That is, the surface 67 and the surface 66 extend continuously without being interrupted at the boundary between the central portion 61 and the both side portions 62.
  • the surface 66 has a straight cross section extending parallel to the central axis 110.
  • the surface 67 has a curved cross section that extends continuously from the straight cross section of the surface 66 and decreases in distance from the central axis 110 as the distance from the central portion 61 increases.
  • the surface 66 and the surface 67 are connected by a smooth curved surface.
  • the surface 66 When the strip-shaped knitted fabric 68 is cut by a plane orthogonal to the central axis 110, the surface 66 has a circular cross section having a constant diameter around the central axis 110, and the surface 67 is centered on the central axis 110. Having a circular cross section with a smaller diameter.
  • the band-shaped knitted fabric 68 includes an inner band-shaped knitted fabric 64 as a first band-shaped member and an outer band-shaped knitted fabric 65 as a second band-shaped member.
  • the inner strip knitted fabric 64 and the outer strip knitted fabric 65 have a strip shape having a long side in one direction and a short side in a direction orthogonal to the one direction.
  • the short side of the outer band knitted fabric 65 is larger than the short side of the inner band knitted fabric 64.
  • the inner band-shaped knitted fabric 64 is wound in multiple layers.
  • the inner band-shaped knitted fabric 64 is wound so that the direction in which the short side extends coincides with the axial direction of the central axis 110.
  • an outer belt-like knitted fabric 65 is further wound in multiple layers.
  • the outer belt-shaped knitted fabric 65 is wound so that the direction in which the short side extends coincides with the axial direction of the central axis 110.
  • the outer band knitted fabric 65 is wound so that both ends in the short side direction protrude from the inner band knitted fabric 64. Both ends of the outer belt-like knitted fabric 65 in the short side direction are directly wound around the core tube 63.
  • a large-diameter portion in which the inner belt-shaped knitted fabric 64 and the outer belt-shaped knitted fabric 65 overlap each other is provided in the center of the belt-shaped knitted fabric 68 in the axial direction of the central shaft 110, A central portion 61 having a relatively large diameter is formed. Further, at both ends of the belt-like knitted fabric 68 in the axial direction of the central shaft 110, a small-diameter portion in which the outer belt-shaped knitted fabric 65 is disposed is provided, and the small-diameter portion constitutes both side portions 62 having a relatively small diameter. Yes.
  • the surface 66 and the surface 67 are formed by the outer peripheral surface of the outer band knitted fabric 65.
  • the belt-shaped knitted fabric 68 (the inner belt-shaped knitted fabric 64 and the outer belt-shaped knitted fabric 65) is made of a material insoluble in a polyimide solution used as an ink, for example, polyester. Instead of knitting, for example, woven fabric or non-woven fabric may be used.
  • the knitted stitch of the outer band knitted fabric 65 is larger than the knitted stitch of the inner band knitted fabric 64.
  • the outer belt-like knitted fabric 65 has higher liquid absorbency than the inner belt-like knitted fabric 64. That is, when the lower end of the knitting forming the outer band knitted fabric 65 and the inner band knitted fabric 64 is dipped in ink for a certain time, the height at which the ink is sucked up is higher in the outer band knitted fabric 65 than in the inner band knitted fabric 64. Become.
  • the inner belt-like knitted fabric 64 has a higher water retention than the outer belt-like knitted fabric 65. That is, when the knitted material forming the outer belt-shaped knitted fabric 65 and the inner belt-shaped knitted fabric 64 is dipped in the ink and taken out from the ink, the mass after a predetermined time is measured. Is bigger.
  • ink adhering to the nozzle surface 22 can be efficiently absorbed by the outer band knitted fabric 65, and at the same time, a large amount of ink absorbed from the nozzle surface 22 can be held in the inner band knitted fabric 64.
  • FIG. 7 is a bottom view showing the nozzle surface wiping process by the cleaning roller.
  • both side portions 62m, center portion 61, and both side portions 62n are parallel to the direction in which closed region 42m, nozzle hole region 41, and closed region 42n are arranged, and orthogonal to the conveying direction of cleaning roller 51. Line up in the direction you want.
  • the cleaning roller 51 (band-shaped knitted fabric 68) is set to have a dimension slightly larger than the entire width of the nozzle surface 22 in the axial direction of the central shaft 110, that is, in the direction in which the both side portions 62m, the central portion 61, and the both side portions 62n are arranged.
  • the outer peripheral surface of the strip-shaped knitted fabric 68 moves in parallel with the surface of the nozzle surface 22 while contacting the nozzle surface 22.
  • the central portion 61 passes over the nozzle hole region 41 of the nozzle surface 22 and the both side portions 62m and the both side portions 62n pass over the closed region 42m and the closed region 42n, respectively.
  • the surface 22 is wiped off.
  • the moving direction of the band-shaped knitted fabric 68 at the time of wiping is not limited to the direction parallel to the nozzle surface 22.
  • the band-shaped knitted fabric 68 when viewed from the axial direction of the central axis 110, has an arc shape with respect to the nozzle surface. It may be moved. Alternatively, the nozzle surface 22 may be wiped by moving the inkjet head 21 with respect to the stationary cleaning roller 51.
  • FIG. 8 is a cross-sectional view showing the state of the nozzle surface before wiping.
  • a boundary portion between the closed region 42m and the nozzle hole region 41 is typically shown enlarged.
  • ink adheres to nozzle surface 22.
  • the ink adheres to a range centering on the nozzle hole region 41 in which the nozzle holes 24 are formed.
  • the driving force accompanying the deformation of the flexible plate 38 is applied to the surface layer ink on the nozzle surface 22.
  • This causes a problem that ink droplets are not properly ejected.
  • the cleaning process 50 is used and the wiping off process of the nozzle surface 22 is implemented.
  • FIG. 9 is a cross-sectional view showing a nozzle surface wiping process when a comparative cleaning device is used.
  • FIG. 10 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 9 is performed.
  • FIGS. 9 and 10 the wiping process of nozzle surface 22 in the case where cleaning roller 151 for comparison is used is shown.
  • a band-shaped knitted fabric 68 is formed with a certain diameter.
  • the ink gradually permeates into the band-shaped knitted fabric 68.
  • the belt-shaped knitted fabric 68 may absorb ink in advance so that the ink on the nozzle surface 22 is not excessively wiped off.
  • the cleaning roller 151 for comparison when used, the ink absorbed by the band-shaped knitted fabric 68 adheres to the closed region 42 along with the wiping process of the nozzle surface 22. In this case, a small amount of ink adhering to the closed region 42 is dried and solidified over time. As a result, an ink solid 73 is generated on the nozzle surface 22.
  • FIG. 11 is a cross-sectional view showing a nozzle surface wiping process when the cleaning device in FIG. 1 is used.
  • both side portions 62 that pass over closed region 42 are configured by small-diameter portions. Does not come into contact with the closed area 42. As a result, the ink absorbed by the belt-shaped knitted fabric 68 does not adhere to the closed region 42 and solidify with the wiping operation of the nozzle surface 22.
  • FIG. 12 is a cross-sectional view showing a nozzle surface wiping process when another cleaning device for comparison is used.
  • a wiping process of nozzle surface 22 when another cleaning roller 152 for comparison is used is shown.
  • the belt-shaped knitted fabric 68 does not have the both side portions 62, and is composed only of the central portion 61.
  • the strip-shaped knitted fabric 68 has end surfaces 153 arranged on both side surfaces in the winding axis direction.
  • the ink in the band-shaped knitted fabric 68 overflows from the end surface 153 as the band-shaped knitted fabric 68 is pressed against the nozzle surface 22.
  • an ink reservoir 154 that extends linearly along the boundary between the nozzle hole region 41 and the closed region 42 is generated on the nozzle surface 22.
  • the ink reservoir 154 generated in this way is solidified over time, which may lead to a decrease in the wiping performance of the nozzle surface 22 and a decrease in the dust generation of the belt-shaped knitted fabric 68.
  • surface 66 and surface 67 are formed so as to continuously extend between center portion 61 and both side portions 62. Yes.
  • the amount of ink transferred from the band-shaped knitted fabric 68 to the nozzle surface 22 in accordance with the wiping process of the nozzle surface 22 can be gradually changed between the nozzle hole region 41 and the closed region 42.
  • FIG. 13 is a cross-sectional view showing a state of the nozzle surface after the wiping process in FIG. 11 is performed.
  • the cleaning device 50 in FIG. 1 when used, an appropriate amount of ink is removed from the surface of the nozzle hole region 41, and ink absorbed by the belt-shaped knitted fabric 68 adheres to the blocking region 42. Can be prevented. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22.
  • the cleaning device 50 is a cleaning for wiping the nozzle surface 22 of the ink jet coating device 10.
  • the cleaning device 50 includes a belt-like knitted fabric 68 as an absorber that absorbs ink attached to the nozzle surface 22.
  • the belt-shaped knitted fabric 68 is formed to have a central portion 61 and both side portions 62 (62m, 62n) provided on both sides of the central portion 61.
  • the central portion 61 has a surface 66 as a first surface disposed to face the nozzle surface 22, and the both side portions 62 have a surface 67 as a second surface continuously extending from the surface 66.
  • the surface 67 is disposed at a position retracted from the surface 66 with respect to the nozzle surface 22.
  • the ink jet coating apparatus 10 includes the cleaning device 50 described above.
  • the ink jet coating apparatus 10 includes an ink jet head 21 (21p) having a nozzle surface 22 and a transport arm 56 as a moving mechanism unit.
  • the inkjet head 21 has a plurality of nozzle holes 24 that are opened in the nozzle surface 22 and eject ink, and an ink supply pipe 29 and an ink supply chamber 28 that serve as supply holes for supplying ink toward the plurality of nozzle holes 24. Is formed.
  • the transport arm 56 relatively moves the belt-shaped knitted fabric 68 and the inkjet head 21 in a state where the belt-shaped knitted fabric 68 and the nozzle surface 22 face each other.
  • the nozzle surface 22 When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is disposed on both sides of the nozzle hole region 41 as a first region where a plurality of nozzle holes 24 are opened, and the nozzle hole region 41.
  • a closed region 42 (42m, 42n) is defined as a second region in which the ink supply chamber 28 is formed.
  • the knitting process of the nozzle surface 22 is performed by providing the belt-shaped knitted fabric 68 with both side portions 62 each having a small diameter portion. Accordingly, it is possible to prevent ink from adhering to the closed region 42. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22 and to realize the ink jet coating apparatus 10 in which ink is stably ejected from the nozzle hole 24.
  • the inkjet coating apparatus 10 is used for the step of forming an alignment film on the surface of a substrate for a liquid crystal display.
  • the present invention is not limited to this. You may utilize for the process of forming a resist.
  • FIG. 14 is a cross-sectional view showing a first modification of the cleaning device in FIG. FIG. 14 shows a cross section corresponding to FIG. 6 in the first embodiment.
  • the cleaning device in this modification includes a cleaning roller 81 instead of the cleaning roller 51 in FIG. 5.
  • the cleaning roller 81 has a core cylinder 63 and a strip-shaped knitted fabric 82 as an absorber.
  • the core cylinder 63 is formed having a large diameter portion 83 and a small diameter portion 84.
  • the large diameter portion 83 is provided at the center in the axial direction of the central shaft 110, and the small diameter portion 84 is provided at both ends in the axial direction of the central shaft 110.
  • the large diameter part 83 has a larger diameter than the small diameter part 84.
  • the strip-shaped knitted fabric 82 is wound around the outer circumferences of the large diameter portion 83 and the small diameter portion 84.
  • a central portion 61 is configured by the strip-shaped knitted fabric 82 disposed on the outer periphery of the large-diameter portion 83, and both side portions 62 are configured by the strip-shaped knitted fabric 82 disposed on the outer periphery of the small-diameter portion 84.
  • the central part 61 and both side parts 62 may be provided on the band-shaped knitted fabric 82 by changing the shape of the core cylinder 63.
  • FIG. 15 is a cross-sectional view showing a second modification of the cleaning device in FIG.
  • the cleaning device in this modification includes a cleaning roller 91 in place of the cleaning roller 51 in FIG. 5.
  • the cleaning roller 91 has a sponge 92 as an absorber.
  • the sponge 92 is a porous material and has an open cell structure in which individual holes are connected to each other. Like the cleaning roller 51 in FIG. 5, the sponge 92 has the appearance of a stepped cylinder with a reduced diameter at both ends, and has a central portion 61 and both side portions 62 (62 m, 62 m) aligned in the axial direction. .
  • the absorbent body in the present invention is not limited to a knitted fabric, and a member capable of absorbing ink such as sponge is appropriately selected and used.
  • the present invention is mainly used as an apparatus for forming an alignment film of a liquid crystal display and a functional film such as a resist on a substrate.
  • 10 inkjet coating device 12 mounting table, 14 transport arm, 16 liquid crystal substrate, 16a main surface, 21,21p inkjet head, 22 nozzle face, 24 nozzle hole, 26 ink chamber, 27 branch pipe, 28 ink supply chamber, 29 ink Supply pipe, 31 head body, 32 nozzle plate, 34 drive unit, 35 opening, 36 piezo element, 38 flexible plate, 41 nozzle hole area, 42, 42 m, 42 n closed area, 50 cleaning device, 51, 81, 91 151, 152 Cleaning roller, 54 Base member, 56 Transfer arm, 61 Central part, 62, 62m, 62n Both sides, 63 Core tube, 64 Inner belt knitted fabric, 65 Outer belt knitted fabric, 66, 67 Surface, 68, 82 Belt Knitting, 73 solid, 83 large diameter part, 84 The small diameter portion, 92 sponges, 110 central axis 153 end face, 154 an ink reservoir.

Abstract

The disclosed cleaning device wipes off a nozzle surface (22) of an inkjet coating applicator. The cleaning device is provided with a knitted band (68) that absorbs ink clinging to the nozzle surface (22). The knitted band (68) has a central part (61) and end parts (62 (62m, 62n)) that are provided to each end of the central part (61). The central part (61) has a surface (66) that is arranged facing the nozzle surface (22) and the end parts (62) have surfaces (67) that extend from the central surface (66) without interruption. The end surfaces (67) are arranged in a position further removed from the nozzle surface (22) than the central surface is (66). With this configuration, an inkjet coating applicator and a cleaning device that stabilises the discharge of ink from the inkjet coating applicator are possible.

Description

クリーニング装置およびインクジェット塗布装置Cleaning device and inkjet coating device
　この発明は、一般的には、クリーニング装置およびインクジェット塗布装置に関し、より特定的には、インクジェット塗布装置のノズル面を拭き取るためのクリーニング装置およびそのクリーニング装置を備えるインクジェット塗布装置に関する。 The present invention generally relates to a cleaning device and an inkjet coating device, and more particularly to a cleaning device for wiping the nozzle surface of the inkjet coating device and an inkjet coating device including the cleaning device.
　従来のインクジェットヘッドのクリーニング装置に関して、たとえば、特開２００６－２４８１０２号公報には、インクジェットヘッドのノズル面の余剰吐出液の拭き取り状態を向上させ、溶液の吐出を安定させることを目的としたインクジェット塗布装置が開示されている（特許文献１）。 Regarding a conventional inkjet head cleaning device, for example, Japanese Patent Application Laid-Open No. 2006-248102 discloses an inkjet coating for the purpose of improving the wiping state of excess ejection liquid on the nozzle surface of an inkjet head and stabilizing the ejection of the solution. An apparatus is disclosed (Patent Document 1).
　特許文献１に開示されたインクジェット塗布装置は、ワイピングクロスと、そのワイピングクロスをインクジェットヘッドのノズル面の前面に繰り出す繰り出し機構と、ワイピングクロスをノズル面に押し付けるローラとを有する。ワイピングクロスは、低発塵性の吸水性を有する帯状の部材、たとえばポリエステル繊維から形成されている。ローラがワイピングクロスをノズル面に対して押圧しつつ、ノズル面に沿って移動することによって、ノズル面が拭き取られる。 The inkjet coating apparatus disclosed in Patent Document 1 includes a wiping cloth, a feeding mechanism that feeds the wiping cloth to the front surface of the nozzle surface of the inkjet head, and a roller that presses the wiping cloth against the nozzle surface. The wiping cloth is formed of a band-shaped member having a low dust generation and water absorption, for example, a polyester fiber. The nozzle surface is wiped off by the roller moving along the nozzle surface while pressing the wiping cloth against the nozzle surface.
　また、特開２００５－３０５８４５号公報には、液体吐出ヘッドのノズル面のクリーニング効果を向上させることを目的とした、液体吐出ヘッドのクリーニング装置が開示されている（特許文献２）。特許文献２に開示されたクリーニング装置は、ノズル面に接触する面が繊維質の吸収体によって形成され、ノズル面をワイプするクリーニングローラを備える。 Also, Japanese Patent Application Laid-Open No. 2005-305845 discloses a liquid ejection head cleaning device for the purpose of improving the cleaning effect of the nozzle surface of the liquid ejection head (Patent Document 2). The cleaning device disclosed in Patent Document 2 includes a cleaning roller in which a surface that contacts the nozzle surface is formed by a fibrous absorbent body and wipes the nozzle surface.
　また、特開２００６－７５７７号公報には、吐出信頼性を向上させることを目的とした印字清掃機構が開示されている（特許文献３）。特許文献３に開示された印字清掃機構は、弾性のある多孔質材からなるクリーニングローラと、不織布からなり、インクの拭き取り時に、インクを供給するヘッド部とクリーニングローラとの間に配置されるクリーニングペーパとを備える。 In addition, Japanese Patent Laid-Open No. 2006-7577 discloses a print cleaning mechanism aimed at improving ejection reliability (Patent Document 3). The print cleaning mechanism disclosed in Patent Document 3 includes a cleaning roller made of an elastic porous material and a non-woven fabric, and is disposed between a head portion that supplies ink and a cleaning roller when wiping ink. And paper.
特開２００６－２４８１０２号公報JP 2006-248102 A 特開２００５－３０５８４５号公報JP 2005-305845 A 特開２００６－７５７７号公報JP 2006-7777 A
　基板の表面にレジストや配向膜などの機能性膜を形成する製造工程に、インクジェット塗布装置が利用されている。インクジェット塗布装置の利用に際しては、ノズル面に付着したインクの液膜によって安定したインクの吐出が妨げられるおそれがあるため、ノズル面に付着したインクを拭き取るためのクリーニング装置が用いられる。具体的には、ノズル面がある程度湿った状態を維持するようにインクを拭き取ることにより、吐出の安定性が実現される。 An inkjet coating apparatus is used in a manufacturing process for forming a functional film such as a resist or an alignment film on the surface of a substrate. When using the ink jet coating apparatus, there is a possibility that stable ink ejection may be hindered by the liquid film of the ink adhering to the nozzle surface. Therefore, a cleaning device for wiping off the ink adhering to the nozzle surface is used. Specifically, the ejection stability is realized by wiping the ink so that the nozzle surface is kept moist to some extent.
　しかしながら、インクジェット塗布装置の構造上、ノズル面にはノズル孔が形成されない領域が生じる。インクの拭き取り工程時にノズル孔が形成されない領域にインクが付着すると、その付着したインクが時間の経過とともに固形化する現象が生じる。さらに、固形化したインクによってノズル面の状態が悪化し、その状態が進行すると、インクを安定して吐出できないという懸念が生じる。 However, due to the structure of the ink jet coating apparatus, there is a region where nozzle holes are not formed on the nozzle surface. When ink adheres to a region where nozzle holes are not formed during the ink wiping process, a phenomenon occurs in which the adhered ink is solidified over time. Furthermore, when the state of the nozzle surface deteriorates due to the solidified ink and the state progresses, there is a concern that the ink cannot be stably ejected.
　そこでこの発明の目的は、上記の課題を解決することであり、インクジェット塗布装置からのインクの吐出を安定化させるクリーニング装置およびインクジェット塗布装置を提供することである。 Therefore, an object of the present invention is to solve the above-described problems, and to provide a cleaning device and an ink jet coating device that stabilize the ejection of ink from the ink jet coating device.
　この発明に従ったクリーニング装置は、インクジェット塗布装置のノズル面を拭き取るためのクリーニング装置である。クリーニング装置は、ノズル面に付着したインクを吸収する吸収体を備える。吸収体は、中央部と、中央部の両側に設けられる両側部とを有して形成される。中央部は、ノズル面に対向して配置される第１表面を有し、両側部は、第１表面から連続して延在する第２表面を有する。第２表面は、ノズル面に対して第１表面よりも後退した位置に配置される。 The cleaning device according to the present invention is a cleaning device for wiping the nozzle surface of the ink jet coating device. The cleaning device includes an absorber that absorbs ink adhering to the nozzle surface. The absorber is formed to have a central portion and both side portions provided on both sides of the central portion. The central portion has a first surface arranged to face the nozzle surface, and both side portions have a second surface extending continuously from the first surface. The second surface is disposed at a position retracted from the first surface with respect to the nozzle surface.
　このように構成されたクリーニング装置によれば、インクジェット塗布装置のノズル面に、インクの吐出に伴ってインクが付着し易い場所とインクが付着し難い場所とが生じていると想定する。この場合に、両側部の第２表面は、中央部の第１表面よりもノズル面に対して後退した位置に配置されるため、中央部によってノズル面上のインクが付着し易い場所を拭き取るとともに、両側部からノズル面上のインクが付着し難い場所にインクが移ることを防止できる。また、吸収体は、第１表面と第２表面とが連続して延在するように設けられるため、ノズル面に局所的なインク溜まりが残ることを防止できる。 According to the cleaning device configured in this manner, it is assumed that there are places where ink is likely to adhere and places where ink is difficult to adhere as ink is ejected on the nozzle surface of the ink jet coating apparatus. In this case, the second surfaces on both sides are disposed at a position retracted from the nozzle surface with respect to the first surface of the central portion, so that the central portion wipes away the area where the ink on the nozzle surface is likely to adhere. Further, it is possible to prevent the ink from moving from the both sides to a place where the ink on the nozzle surface is difficult to adhere. In addition, since the absorber is provided so that the first surface and the second surface extend continuously, it is possible to prevent a local ink reservoir from remaining on the nozzle surface.
　したがって、本発明によれば、ノズル面にインクの固形物が生じることを防止し、インクジェット塗布装置からのインクの吐出を安定化させることができる。 Therefore, according to the present invention, it is possible to prevent solid ink from being generated on the nozzle surface, and to stabilize the ejection of ink from the inkjet coating apparatus.
　また好ましくは、吸収体は、第１の幅を有し、インクを吸収可能な第１帯状部材と、第１の幅よりも大きい第２の幅を有し、インクを吸収可能な第２帯状部材とを有する。吸収体は、多層に巻き回された第１帯状部材の外周上にさらに第２帯状部材が巻き回されることによって形成される。第１帯状部材および第２帯状部材の巻回軸方向における吸収体の中央には、第１帯状部材および第２帯状部材からなり、中央部を形成する大径部が設けられる。第１帯状部材および第２帯状部材の巻回軸方向における吸収体の両端には、第２帯状部材からなり、両側部を形成する小径部が設けられる。 Preferably, the absorber has a first width and has a first band-shaped member capable of absorbing ink, and a second width larger than the first width and capable of absorbing ink. Member. The absorber is formed by further winding the second band member on the outer periphery of the first band member wound in multiple layers. At the center of the absorbent body in the winding axis direction of the first band member and the second band member, there is provided a large-diameter portion that consists of the first band member and the second band member and forms the central portion. At both ends of the absorbent body in the winding axis direction of the first band member and the second band member, there are provided small diameter portions made of the second band member and forming both side portions.
　このように構成されたクリーニング装置によれば、大径部によってノズル面上のインクが付着し易い場所を拭き取るとともに、小径部からノズル面上のインクが付着し難い場所にインクが移ることを防止できる。また、大径部では、第１帯状部材および第２帯状部材が重なって配置されるため、ノズル面から吸収したインクを多量に吸収体に保持することができる。 According to the cleaning device configured as described above, the large-diameter portion wipes away the place where the ink on the nozzle surface is likely to adhere, and prevents the ink from moving from the small-diameter portion to the place where the ink on the nozzle surface is difficult to adhere. it can. In the large diameter portion, since the first belt-like member and the second belt-like member are arranged to overlap each other, a large amount of ink absorbed from the nozzle surface can be held in the absorber.
　また好ましくは、第１帯状部材および第２帯状部材は、編み物からなる。このように構成されたクリーニング装置によれば、インクが編み物の編み目に浸入するため、ノズル面に付着したインクを吸収体に吸収することができる。 Also preferably, the first belt member and the second belt member are knitted. According to the cleaning device configured as described above, the ink enters the stitches of the knitted fabric, so that the ink adhering to the nozzle surface can be absorbed by the absorber.
　また好ましくは、第２帯状部材は、第１帯状部材よりも高い吸液性を有する。また好ましくは、第１帯状部材は、第２帯状部材よりも高い保水性を有する。このように構成されたクリーニング装置によれば、第２帯状部材によって、ノズル面に付着するインクを効率よく吸収体に吸収することができる。また、第１帯状部材によって、ノズル面から吸収したインクを多量に吸収体に保持しておくことができる。 Also preferably, the second strip member has higher liquid absorbency than the first strip member. Preferably, the first belt-shaped member has higher water retention than the second belt-shaped member. According to the cleaning device configured as described above, the ink adhering to the nozzle surface can be efficiently absorbed by the absorber by the second belt-shaped member. In addition, the first strip member can hold a large amount of ink absorbed from the nozzle surface in the absorber.
　また好ましくは、第１帯状部材および第２帯状部材は、編み物からなる。第２帯状部材における編み物の編み目は、第１帯状部材における編み物の編み目よりも大きい。このように構成されたクリーニング装置によれば、帯状部材を形成する編み物の編み目が大きいほど吸液性が高くなり、編み目が小さいほど保水性が高くなるため、第２帯状部材の吸液性を第１帯状部材よりも吸液性よりも高く設定し、第１帯状部材の保水性を第２帯状部材の保水性よりも高く設定することができる。 Also preferably, the first belt member and the second belt member are knitted. The stitch of the knitted fabric in the second strip member is larger than the stitch of the knitted fabric in the first strip member. According to the cleaning device configured as described above, the larger the stitches of the knitted material forming the belt-like member, the higher the liquid absorbency, and the smaller the stitches, the higher the water retention. It is possible to set the water-absorbing property higher than that of the first belt-shaped member, and the water retention of the first belt-shaped member can be set higher than that of the second belt-shaped member.
　また好ましくは、第１表面および第２表面は、中央部と両側部との境界で湾曲しながら接続される。このように構成されたクリーニング装置によれば、中央部と両側部との境界位置によって拭き取られたノズル面にインク溜まりが生じることを、より確実に防止できる。 Also preferably, the first surface and the second surface are connected while being curved at the boundary between the central portion and both side portions. According to the cleaning device configured as described above, it is possible to more reliably prevent ink accumulation on the nozzle surface wiped off by the boundary position between the center portion and both side portions.
　この発明に従ったインクジェット塗布装置は、上述のいずれかに記載のクリーニング装置を備えるインクジェット塗布装置である。インクジェット塗布装置は、ノズル面を有するインクジェットヘッドと、移動機構部とを備える。インクジェットヘッドには、ノズル面に開口し、インクを吐出する複数のノズル孔と、複数のノズル孔に向けてインクを供給する供給孔とが形成される。移動機構部は、吸収体とノズル面とを対向させた状態で、吸収体およびインクジェットヘッドを相対移動させる。ノズル面を正面から見た場合に、ノズル面には、複数のノズル孔が開口する第１領域と、第１領域の両側に配置され、供給孔が形成される第２領域とが規定される。ノズル面の拭き取り時、中央部と第１領域とが対向し、両側部と第２領域とが対向した状態で、吸収体およびインクジェットヘッドが相対移動する。 An ink jet coating apparatus according to the present invention is an ink jet coating apparatus including any one of the cleaning devices described above. The ink jet coating apparatus includes an ink jet head having a nozzle surface and a moving mechanism unit. The ink jet head is formed with a plurality of nozzle holes that open on the nozzle surface and eject ink, and supply holes that supply ink toward the plurality of nozzle holes. The moving mechanism unit relatively moves the absorber and the inkjet head in a state where the absorber and the nozzle surface face each other. When the nozzle surface is viewed from the front, the nozzle surface defines a first region where a plurality of nozzle holes are opened, and a second region which is disposed on both sides of the first region and where supply holes are formed. . At the time of wiping the nozzle surface, the absorber and the inkjet head move relative to each other in a state where the central portion and the first region face each other and both the side portions and the second region face each other.
　このように構成されたインクジェット塗布装置によれば、中央部によってインクが付着し易い場所を拭き取るとともに、両側部からインクが付着し難い場所にインクが移ることを防止できる。また、ノズル面の第１領域と第２領域との境界にインク溜まりが生じることを防止できる。これらの理由により、ノズル面にインクの固形物が生じることを防止し、ノズル面に開口するノズル孔を通じてインクを安定して吐出することができる。 According to the ink jet coating apparatus configured as described above, it is possible to wipe off the place where the ink is easily attached by the central portion and to prevent the ink from moving from the both sides to the place where the ink is hardly attached. Further, it is possible to prevent ink accumulation from occurring at the boundary between the first region and the second region of the nozzle surface. For these reasons, it is possible to prevent ink solid matter from being generated on the nozzle surface, and to stably eject ink through the nozzle holes opened in the nozzle surface.
　また好ましくは、ノズル孔を通じてポリイミドの溶液が基板に向けて吐出される。クリーニング装置によって、ノズル面に付着したポリイミドの溶液が拭き取られる。このように構成されたインクジェット塗布装置によれば、ポリイミドの溶液を安定して基板に向けて吐出することができる。 Preferably, the polyimide solution is discharged toward the substrate through the nozzle hole. The polyimide solution adhering to the nozzle surface is wiped off by the cleaning device. According to the inkjet coating apparatus configured as described above, the polyimide solution can be stably discharged toward the substrate.
　以上に説明したように、この発明に従えば、インクジェット塗布装置からのインクの吐出を安定化させるクリーニング装置およびインクジェット塗布装置を提供することができる。 As described above, according to the present invention, it is possible to provide a cleaning device and an inkjet coating device that stabilize the ejection of ink from the inkjet coating device.
この発明の実施の形態１におけるクリーニング装置を備えたインクジェット塗布装置を示す側面図である。It is a side view which shows the inkjet coating device provided with the cleaning apparatus in Embodiment 1 of this invention. 図１中の矢印ＩＩに示す方向から見たインクジェットヘッドを示す底面図である。It is a bottom view which shows the inkjet head seen from the direction shown by the arrow II in FIG. 図２中のＩＩＩ－ＩＩＩ線上に沿ったインクジェットヘッドを示す断面図である。FIG. 3 is a cross-sectional view showing an ink jet head taken along line III-III in FIG. 2. 図３中のＩＶ－ＩＶ線上に沿ったインクジェットヘッドを示す断面図である。FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. 3. クリーニングローラを示す斜視図である。It is a perspective view which shows a cleaning roller. 図５中のＶＩ－ＶＩ線上に沿ったクリーニングローラを示す断面図である。FIG. 6 is a cross-sectional view showing the cleaning roller along line VI-VI in FIG. 5. クリーニングローラによるノズル面の拭き取り工程を示す底面図である。It is a bottom view which shows the wiping process of the nozzle surface by a cleaning roller. 拭き取り前のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface before wiping off. 比較のためのクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。It is sectional drawing which shows the wiping process of the nozzle surface at the time of using the cleaning apparatus for a comparison. 図９中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface after the wiping off process in FIG. 9 was implemented. 図１中のクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。It is sectional drawing which shows the wiping process of the nozzle surface at the time of using the cleaning apparatus in FIG. 比較のための別のクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。It is sectional drawing which shows the wiping process of the nozzle surface at the time of using another cleaning apparatus for a comparison. 図１１中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。It is sectional drawing which shows the mode of the nozzle surface after the wiping off process in FIG. 11 was implemented. 図１中のクリーニング装置の第１変形例を示す断面図である。It is sectional drawing which shows the 1st modification of the cleaning apparatus in FIG. 図１中のクリーニング装置の第２変形例を示す断面図である。It is sectional drawing which shows the 2nd modification of the cleaning apparatus in FIG.
　この発明の実施の形態について、図面を参照して説明する。なお、以下で参照する図面では、同一またはそれに相当する部材には、同じ番号が付されている。 Embodiments of the present invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding members are denoted by the same reference numerals.
　（実施の形態１）
　図１は、この発明の実施の形態１におけるクリーニング装置を備えたインクジェット塗布装置を示す側面図である。図１を参照して、本実施の形態におけるクリーニング装置５０を備えたインクジェット塗布装置１０は、液晶ディスプレイの製造工程において、液晶基板１６の表面に配向膜を形成する工程に用いられる。 (Embodiment 1)
FIG. 1 is a side view showing an ink jet coating apparatus provided with a cleaning device according to Embodiment 1 of the present invention. Referring to FIG. 1, an inkjet coating apparatus 10 provided with a cleaning device 50 according to the present embodiment is used in a process for forming an alignment film on the surface of a liquid crystal substrate 16 in a liquid crystal display manufacturing process.
　まず、インクジェット塗布装置１０の基本的な構造について説明すると、インクジェット塗布装置１０は、載置台１２と、搬送アーム１４と、インクジェットヘッド２１とを有する。 First, the basic structure of the inkjet coating apparatus 10 will be described. The inkjet coating apparatus 10 includes a mounting table 12, a transport arm 14, and an inkjet head 21.
　載置台１２には、インクを吐出する対象物である液晶基板１６が載置される。液晶基板１６は、配向膜が形成される主表面１６ａを有する。液晶基板１６は、主表面１６ａが水平方向に延在するように載置台１２に載置される。液晶基板１６は、主表面１６ａを正面から見た場合に矩形形状を有する。液晶基板１６は、一例として、２１６０×２４６０ｍｍ、もしくは２８５０×３０５０ｍｍのサイズを有する大型基板である。 On the mounting table 12, a liquid crystal substrate 16 that is a target for ejecting ink is placed. The liquid crystal substrate 16 has a main surface 16a on which an alignment film is formed. The liquid crystal substrate 16 is mounted on the mounting table 12 so that the main surface 16a extends in the horizontal direction. The liquid crystal substrate 16 has a rectangular shape when the main surface 16a is viewed from the front. As an example, the liquid crystal substrate 16 is a large substrate having a size of 2160 × 2460 mm or 2850 × 3050 mm.
　本実施の形態では、液晶基板１６に配向膜を形成するため、主表面１６ａにポリイミドの溶液が塗布される。なお、液晶基板１６の主表面１６ａに塗布される材料は、ポリイミドに限られず、配向膜の原料となりうる材料が適宜選択される。 In the present embodiment, in order to form an alignment film on the liquid crystal substrate 16, a polyimide solution is applied to the main surface 16a. The material applied to the main surface 16a of the liquid crystal substrate 16 is not limited to polyimide, and a material that can be a raw material for the alignment film is appropriately selected.
　インクジェットヘッド２１は、液晶基板１６に向けてインクを吐出する機能を有する。インクジェットヘッド２１は、載置台１２の上方に設けられている。インクジェットヘッド２１は、ノズル面２２を有する。ノズル面２２は、水平方向に延在する。 The inkjet head 21 has a function of ejecting ink toward the liquid crystal substrate 16. The inkjet head 21 is provided above the mounting table 12. The inkjet head 21 has a nozzle surface 22. The nozzle surface 22 extends in the horizontal direction.
　搬送アーム１４は、載置台１２に載置された液晶基板１６とインクジェットヘッド２１とを相対移動させるための基板用の移動機構部として設けられている。より具体的には、搬送アーム１４は、載置台１２に接続されおり、載置台１２を矢印１０１に示す水平方向に搬送することが可能なように設けられている。搬送アーム１４の駆動に伴って、載置台１２に載置された液晶基板１６がインクジェットヘッド２１の下を通過する。この間、ノズル面２２から液晶基板１６に向けてポリイミドの溶液が吐出されることにより、主表面１６ａにポリイミド膜が塗布される。 The transfer arm 14 is provided as a substrate moving mechanism for moving the liquid crystal substrate 16 mounted on the mounting table 12 and the inkjet head 21 relative to each other. More specifically, the transport arm 14 is connected to the mounting table 12 and is provided so as to be able to transport the mounting table 12 in the horizontal direction indicated by the arrow 101. As the transport arm 14 is driven, the liquid crystal substrate 16 mounted on the mounting table 12 passes under the inkjet head 21. During this time, a polyimide solution is discharged from the nozzle surface 22 toward the liquid crystal substrate 16, whereby a polyimide film is applied to the main surface 16a.
　図２は、図１中の矢印ＩＩに示す方向から見たインクジェットヘッドを示す底面図である。図３は、図２中のＩＩＩ－ＩＩＩ線上に沿ったインクジェットヘッドを示す断面図である。 FIG. 2 is a bottom view showing the ink-jet head viewed from the direction indicated by arrow II in FIG. FIG. 3 is a cross-sectional view showing the ink jet head taken along line III-III in FIG.
　図２および図３を参照して、本実施の形態では、複数のインクジェットヘッド２１ｐが組み合わさってインクジェットヘッド２１が構成されている。複数のインクジェットヘッド２１ｐは、液晶基板１６の搬送方向（図２中の矢印１０１に示す方向）に直交する方向（図２中の矢印１０３に示す方向）に並んで設けられている。複数のインクジェットヘッド２１ｐは、各インクジェットヘッド２１ｐのノズル面２２が同一平面上に延在するように組み合わされている。液晶基板１６の搬送方向に直交する方向におけるインクジェットヘッド２１の全長は、同方向における液晶基板１６の幅よりも大きくなるように設定されている。複数のインクジェットヘッド２１ｐは、互いに同一構造を有する。 Referring to FIG. 2 and FIG. 3, in the present embodiment, the inkjet head 21 is configured by combining a plurality of inkjet heads 21p. The plurality of inkjet heads 21p are provided side by side in a direction (direction indicated by an arrow 103 in FIG. 2) orthogonal to the transport direction of the liquid crystal substrate 16 (direction indicated by an arrow 101 in FIG. 2). The plurality of inkjet heads 21p are combined so that the nozzle surfaces 22 of the inkjet heads 21p extend on the same plane. The total length of the inkjet head 21 in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is set to be larger than the width of the liquid crystal substrate 16 in the same direction. The plurality of inkjet heads 21p have the same structure.
　なお、組み合わされるインクジェットヘッド２１ｐの数は、液晶基板１６の大きさを考慮して適宜決定される。また、インクジェットヘッド２１ｐの組み合わせ方は、上記形態に限られず、たとえば、図２中に示す複数のインクジェットヘッド２１ｐが液晶基板１６の搬送方向に複数列並んで設けられてもよい。 The number of inkjet heads 21p to be combined is appropriately determined in consideration of the size of the liquid crystal substrate 16. Further, the method of combining the ink jet heads 21p is not limited to the above form, and for example, a plurality of ink jet heads 21p shown in FIG. 2 may be provided in a plurality of rows in the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐは、ブロック部材としてのヘッド本体３１およびノズル板３２と、可撓板３８と、ピエゾ（圧電）素子３６と、駆動部３４とを有する。 The inkjet head 21p includes a head main body 31 and a nozzle plate 32 as a block member, a flexible plate 38, a piezoelectric (piezoelectric) element 36, and a drive unit 34.
　ヘッド本体３１には、その上面から下面に貫通する開口部３５が形成されている。開口部３５の内側には、駆動部３４および複数のピエゾ素子３６が配置されている。ヘッド本体３１の下面には、開口部３５を塞ぐように可撓板３８が設けられている。ノズル板３２は、可撓板３８を覆うようにヘッド本体３１の下面に取り付けられている。ノズル板３２は、ノズル面２２を有する。ノズル面２２は、液晶基板１６の搬送方向に短辺を有し、液晶基板１６の搬送方向に直交する方向に長辺を有する、矩形形状を有する。 The head body 31 has an opening 35 penetrating from the upper surface to the lower surface. Inside the opening 35, a drive unit 34 and a plurality of piezo elements 36 are arranged. A flexible plate 38 is provided on the lower surface of the head body 31 so as to close the opening 35. The nozzle plate 32 is attached to the lower surface of the head body 31 so as to cover the flexible plate 38. The nozzle plate 32 has a nozzle surface 22. The nozzle surface 22 has a rectangular shape having a short side in the transport direction of the liquid crystal substrate 16 and a long side in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐには、複数のノズル孔２４が形成されている。ノズル孔２４は、液晶基板１６に向けてインクを吐出するための孔である。ノズル孔２４は、ノズル板３２に形成されている。ノズル孔２４は、ノズル面２２に開口するように形成されている。複数のノズル孔２４は、液晶基板１６の搬送方向に直交する方向に互いに間隔を隔てて並んでいる。 A plurality of nozzle holes 24 are formed in the inkjet head 21p. The nozzle hole 24 is a hole for ejecting ink toward the liquid crystal substrate 16. The nozzle hole 24 is formed in the nozzle plate 32. The nozzle hole 24 is formed so as to open in the nozzle surface 22. The plurality of nozzle holes 24 are arranged at intervals from each other in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　本実施の形態では、複数のノズル孔２４が、液晶基板１６の搬送方向に直交する方向に沿って千鳥状に並んでいる。液晶基板１６の搬送方向に直交する方向に配列されるノズル孔２４の数は、液晶基板１６の搬送方向に配列されるノズル孔２４の数よりも多い。 In the present embodiment, the plurality of nozzle holes 24 are arranged in a staggered manner along a direction orthogonal to the transport direction of the liquid crystal substrate 16. The number of nozzle holes 24 arranged in the direction orthogonal to the transport direction of the liquid crystal substrate 16 is larger than the number of nozzle holes 24 arranged in the transport direction of the liquid crystal substrate 16.
　インクジェットヘッド２１ｐには、複数のインク室２６がさらに形成されている。複数のインク室２６は、ノズル板３２に形成されている。複数のインク室２６は、それぞれ、複数のノズル孔２４に対応して形成されている。各ノズル孔２４は、インク室２６に連通している。インク室２６は、ノズル孔２４に対してノズル面２２の反対側に形成されている。インク室２６は、ノズル孔２４が連通する位置とは反対側で開口するように形成されている。ノズル板３２がヘッド本体３１に取り付けられた状態で、インク室２６の上記開口が可撓板３８によって閉塞されている。インク室２６には、後述するインク供給機構によって、インクが常時貯留される。 A plurality of ink chambers 26 are further formed in the inkjet head 21p. The plurality of ink chambers 26 are formed in the nozzle plate 32. The plurality of ink chambers 26 are formed corresponding to the plurality of nozzle holes 24, respectively. Each nozzle hole 24 communicates with the ink chamber 26. The ink chamber 26 is formed on the opposite side of the nozzle surface 22 with respect to the nozzle hole 24. The ink chamber 26 is formed so as to open on the side opposite to the position where the nozzle hole 24 communicates. With the nozzle plate 32 attached to the head body 31, the opening of the ink chamber 26 is closed by the flexible plate 38. Ink is always stored in the ink chamber 26 by an ink supply mechanism described later.
　可撓板３８には、複数のピエゾ素子３６が固着されている。複数のピエゾ素子３６は、それぞれ、可撓板３８を隔てて複数のインク室２６と向かい合う位置に設けられている。開口部３５の内部において、ピエゾ素子３６は駆動部３４に電気的に接続されている。駆動部３４からピエゾ素子３６に駆動電力が供給されると、可撓板３８がインク室２６内に向けて撓む。この可撓板３８の変形に伴ってインク室２６内の容積が減少するため、インク室２６に貯留されたインクがノズル孔２４を通じて吐出される。 A plurality of piezo elements 36 are fixed to the flexible plate 38. Each of the plurality of piezo elements 36 is provided at a position facing the plurality of ink chambers 26 with a flexible plate 38 interposed therebetween. Inside the opening 35, the piezo element 36 is electrically connected to the drive unit 34. When drive power is supplied from the drive unit 34 to the piezo element 36, the flexible plate 38 bends into the ink chamber 26. Since the volume in the ink chamber 26 decreases with the deformation of the flexible plate 38, the ink stored in the ink chamber 26 is ejected through the nozzle holes 24.
　図４は、図３中のＩＶ－ＩＶ線上に沿ったインクジェットヘッドを示す断面図である。図２から図４を参照して、インク室２６にインクを供給するためのインク供給機構について説明する。インクジェットヘッド２１ｐには、供給孔としてのインク供給管２９およびインク供給室２８と、枝管２７とがさらに形成されている。 FIG. 4 is a cross-sectional view showing the ink jet head taken along line IV-IV in FIG. The ink supply mechanism for supplying ink to the ink chamber 26 will be described with reference to FIGS. An ink supply pipe 29 and an ink supply chamber 28 as supply holes and a branch pipe 27 are further formed in the inkjet head 21p.
　インク供給室２８は、ノズル板３２に形成されている。インク供給室２８は、図３および図４中に示す断面において、複数のノズル孔２４の両側の位置にそれぞれ形成されている。枝管２７は、ノズル板３２に形成されている。枝管２７は、インク供給室２８と、複数のインク室２６との間をそれぞれ連通させるように形成されている。図４中に示す断面において、枝管２７は、液晶基板１６の搬送方向に距離を隔てたインク室２６間を通って、液晶基板１６の搬送方向に直交する方向に沿って直線状に延び、２つのインク供給室２８間を連通させている。さらに枝管２７は、その直線状に延びる部分から各インク室２６に向けて枝分かれして延びている。 The ink supply chamber 28 is formed in the nozzle plate 32. The ink supply chambers 28 are respectively formed at positions on both sides of the plurality of nozzle holes 24 in the cross section shown in FIGS. The branch pipe 27 is formed on the nozzle plate 32. The branch pipe 27 is formed to communicate between the ink supply chamber 28 and the plurality of ink chambers 26. In the cross section shown in FIG. 4, the branch pipe 27 extends linearly along a direction perpendicular to the transport direction of the liquid crystal substrate 16 through the ink chambers 26 spaced apart in the transport direction of the liquid crystal substrate 16. The two ink supply chambers 28 are communicated with each other. Further, the branch pipe 27 is branched and extended from the linearly extending portion toward each ink chamber 26.
　インク供給管２９は、ヘッド本体３１に形成されている。インク供給管２９は、インク供給室２８に連通して形成されている。インク供給管２９は、ノズル面２２を正面から見た場合に、インク供給室２８に重なる位置に形成されている。インク供給管２９には、外部からインクジェットヘッド２１ｐにインクを供給する配管が接続されている。 The ink supply pipe 29 is formed in the head main body 31. The ink supply pipe 29 is formed in communication with the ink supply chamber 28. The ink supply pipe 29 is formed at a position overlapping the ink supply chamber 28 when the nozzle surface 22 is viewed from the front. A pipe for supplying ink from the outside to the ink jet head 21p is connected to the ink supply pipe 29.
　インク供給管２９およびインク供給室２８は、ノズル面２２に開口することなく、インクジェットヘッド２１ｐの内部に形成されている。 The ink supply pipe 29 and the ink supply chamber 28 are formed in the ink jet head 21p without opening in the nozzle surface 22.
　このような構成により、インク供給室２８には、インク供給管２９を通じてインクが供給される。一方、ノズル孔２４を通じてインクが吐出されるのに伴って、インク室２６の内部は負圧となる。このため、インク供給室２８に供給されたインクが、枝管２７を通って随時、インク室２６に補給される。 With this configuration, ink is supplied to the ink supply chamber 28 through the ink supply pipe 29. On the other hand, as ink is ejected through the nozzle holes 24, the inside of the ink chamber 26 becomes negative pressure. Therefore, the ink supplied to the ink supply chamber 28 is supplied to the ink chamber 26 as needed through the branch pipe 27.
　図２および図３を参照して、ノズル面２２には、ノズル孔２４が開口するノズル孔領域４１と、インク供給管２９およびインク供給室２８が形成され、閉塞された表面が延在する閉塞領域４２（４２ｍ，４２ｎ）とが規定されている。閉塞領域４２ｍと、ノズル孔領域４１と、閉塞領域４２ｎとは、液晶基板１６の搬送方向に直交する方向に並んでいる。すなわち、液晶基板１６の搬送方向に直交する方向において、ノズル孔領域４１は、ノズル面２２の中央に配置され、閉塞領域４２は、ノズル面２２の両端に配置されている。 2 and 3, the nozzle surface 22 is formed with a nozzle hole region 41 in which the nozzle holes 24 are opened, an ink supply pipe 29 and an ink supply chamber 28, and the blocked surface extends. A region 42 (42m, 42n) is defined. The closed area 42m, the nozzle hole area 41, and the closed area 42n are arranged in a direction orthogonal to the transport direction of the liquid crystal substrate 16. That is, the nozzle hole region 41 is disposed at the center of the nozzle surface 22 and the blocking regions 42 are disposed at both ends of the nozzle surface 22 in a direction orthogonal to the transport direction of the liquid crystal substrate 16.
　続いて、インクジェット塗布装置１０が備えるクリーニング装置５０について説明を行なう。 Subsequently, the cleaning device 50 provided in the inkjet coating apparatus 10 will be described.
　図１を参照して、本実施の形態におけるクリーニング装置５０は、ノズル面２２に付着したインクを拭き取るための装置である。クリーニング装置５０は、クリーニングローラ５１と、ベース部材５４と、搬送アーム５６とを有する。 Referring to FIG. 1, the cleaning device 50 in the present embodiment is a device for wiping off ink adhering to the nozzle surface 22. The cleaning device 50 includes a cleaning roller 51, a base member 54, and a transport arm 56.
　クリーニングローラ５１は、ベース部材５４に対して着脱可能に設けられている。搬送アーム５６は、クリーニングローラ５１とインクジェットヘッド２１とを相対移動させるための移動機構部として設けられている。搬送アーム５６は、ベース部材５４に接続されており、ベース部材５４に装着されたクリーニングローラ５１を矢印１０２に示す水平方向に搬送することが可能なように設けられている。クリーニングローラ５１の搬送方向は、液晶基板１６の搬送方向と同一方向である。 The cleaning roller 51 is detachably attached to the base member 54. The transport arm 56 is provided as a moving mechanism unit for moving the cleaning roller 51 and the inkjet head 21 relative to each other. The transport arm 56 is connected to the base member 54, and is provided so that the cleaning roller 51 attached to the base member 54 can be transported in the horizontal direction indicated by the arrow 102. The conveyance direction of the cleaning roller 51 is the same as the conveyance direction of the liquid crystal substrate 16.
　複数のクリーニングローラ５１が、それぞれ図２中に示す複数のインクジェットヘッド２１ｐに対応して設けられている。搬送アーム５６の駆動に伴ってクリーニングローラ５１がインクジェットヘッド２１ｐの下方を通過する。この間、クリーニングローラ５１がノズル面２２に当接しながら移動することにより、ノズル面２２に付着したインクが拭き取られる。 A plurality of cleaning rollers 51 are provided corresponding to the plurality of inkjet heads 21p shown in FIG. As the transport arm 56 is driven, the cleaning roller 51 passes below the inkjet head 21p. During this time, the cleaning roller 51 moves while being in contact with the nozzle surface 22, whereby the ink attached to the nozzle surface 22 is wiped off.
　図５は、クリーニングローラを示す斜視図である。図６は、図５中のＶＩ－ＶＩ線上に沿ったクリーニングローラを示す断面図である。 FIG. 5 is a perspective view showing the cleaning roller. FIG. 6 is a cross-sectional view showing the cleaning roller along the line VI-VI in FIG.
　図５および図６を参照して、クリーニングローラ５１は、両端の直径が絞られた段差付き円柱の外観を有する。クリーニングローラ５１は、芯筒６３と、吸収体としての帯状編み物６８を有する。 Referring to FIG. 5 and FIG. 6, the cleaning roller 51 has the appearance of a stepped cylinder whose diameters at both ends are narrowed. The cleaning roller 51 has a core cylinder 63 and a strip-shaped knitted fabric 68 as an absorber.
　芯筒６３は、仮想線である中心軸１１０の軸線に沿って延在する筒形状を有する。芯筒６３は、中心軸１１０の軸線方向において一定の直径を有する。帯状編み物６８は、芯筒６３に対して多層に巻き回されている。帯状編み物６８は、中心軸１１０を中心に巻き回されている。 The core cylinder 63 has a cylindrical shape extending along the axis of the central axis 110 that is a virtual line. The core cylinder 63 has a constant diameter in the axial direction of the central axis 110. The strip knitted fabric 68 is wound around the core cylinder 63 in multiple layers. The band-shaped knitted fabric 68 is wound around the central axis 110.
　帯状編み物６８は、中央部６１および両側部６２（６２ｍ，６２ｎ）を有して形成されている。両側部６２は、中央部６１の両側に連なって設けられている。両側部６２ｍ、中央部６１および両側部６２ｎが、挙げた順に、帯状編み物６８の巻回軸である中心軸１１０の軸方向に並んでいる。中央部６１は、中心軸１１０の軸方向における帯状編み物６８の中央に設けられ、両側部６２は、中心軸１１０の軸方向における帯状編み物６８の両端に設けられている。 The band-shaped knitted fabric 68 is formed to have a central portion 61 and both side portions 62 (62m, 62n). Both side portions 62 are provided on both sides of the central portion 61. Both side parts 62m, the center part 61, and both side parts 62n are arranged in the axial direction of the central axis 110 which is a winding axis of the band-shaped knitted fabric 68 in the order mentioned. The central portion 61 is provided at the center of the belt-like knitted fabric 68 in the axial direction of the central shaft 110, and both side portions 62 are provided at both ends of the belt-shaped knitted fabric 68 in the axial direction of the central shaft 110.
　図６中には、クリーニングローラ５１により拭き取られるノズル面２２が２点鎖線により示されている。中央部６１および両側部６２は、それぞれ、ノズル面２２の拭き取り時にノズル面２２に対向して配置される表面６６および表面６７を有する。表面６６および表面６７は、円柱形状を有する帯状編み物６８の外周面である。表面６７は、ノズル面２２に対して表面６６よりも後退した位置に配置されている。 In FIG. 6, the nozzle surface 22 wiped off by the cleaning roller 51 is indicated by a two-dot chain line. The central portion 61 and both side portions 62 have a surface 66 and a surface 67 that are disposed to face the nozzle surface 22 when the nozzle surface 22 is wiped off, respectively. The surface 66 and the surface 67 are outer peripheral surfaces of the strip-shaped knitted fabric 68 having a cylindrical shape. The surface 67 is disposed at a position retracted from the surface 66 with respect to the nozzle surface 22.
　表面６７は、表面６６から連続して延在している。すなわち、表面６７と表面６６とは、中央部６１と両側部６２との境界で途切れることなく連なって延在している。図６中に示す断面において、表面６６は、中心軸１１０と平行に延びる直線断面を有する。表面６７は、その表面６６の直線断面から連なって延び、中央部６１から離れるほど中心軸１１０からの距離が小さくなる湾曲断面を有する。表面６６と表面６７との間は、滑らかな湾曲面によって接続されている。中心軸１１０に直交する平面により帯状編み物６８を切断した場合に、表面６６は、中心軸１１０を中心に一定に直径を有する円断面を有し、表面６７は、中心軸１１０を中心に表面６６よりも小さい直径を有する円断面を有する。 The surface 67 extends continuously from the surface 66. That is, the surface 67 and the surface 66 extend continuously without being interrupted at the boundary between the central portion 61 and the both side portions 62. In the cross section shown in FIG. 6, the surface 66 has a straight cross section extending parallel to the central axis 110. The surface 67 has a curved cross section that extends continuously from the straight cross section of the surface 66 and decreases in distance from the central axis 110 as the distance from the central portion 61 increases. The surface 66 and the surface 67 are connected by a smooth curved surface. When the strip-shaped knitted fabric 68 is cut by a plane orthogonal to the central axis 110, the surface 66 has a circular cross section having a constant diameter around the central axis 110, and the surface 67 is centered on the central axis 110. Having a circular cross section with a smaller diameter.
　本実施の形態におけるクリーニング装置５０においては、帯状編み物６８が、第１帯状部材としての内側帯状編み物６４と、第２帯状部材としての外側帯状編み物６５とから構成されている。内側帯状編み物６４および外側帯状編み物６５は、一方向に長辺を有し、その一方向に直交する方向に短辺を有する帯形状を有する。外側帯状編み物６５の短辺は、内側帯状編み物６４の短辺よりも大きい。 In the cleaning device 50 according to the present embodiment, the band-shaped knitted fabric 68 includes an inner band-shaped knitted fabric 64 as a first band-shaped member and an outer band-shaped knitted fabric 65 as a second band-shaped member. The inner strip knitted fabric 64 and the outer strip knitted fabric 65 have a strip shape having a long side in one direction and a short side in a direction orthogonal to the one direction. The short side of the outer band knitted fabric 65 is larger than the short side of the inner band knitted fabric 64.
　芯筒６３の外周上にまず、内側帯状編み物６４が多層に巻き回されている。内側帯状編み物６４は、その短辺が延びる方向が中心軸１１０の軸線方向に一致するように巻き回されている。芯筒６３の巻き回された内側帯状編み物６４の外周上にさらに外側帯状編み物６５が多層に巻き回されている。外側帯状編み物６５は、その短辺が延びる方向が中心軸１１０の軸線方向に一致するように巻き回されている。外側帯状編み物６５は、その短辺方向における両端が内側帯状編み物６４から突出するように巻き回されている。外側帯状編み物６５のその短辺方向における両端は、芯筒６３に直接巻き回されている。 First, on the outer periphery of the core cylinder 63, the inner band-shaped knitted fabric 64 is wound in multiple layers. The inner band-shaped knitted fabric 64 is wound so that the direction in which the short side extends coincides with the axial direction of the central axis 110. On the outer periphery of the inner belt-like knitted fabric 64 around which the core cylinder 63 is wound, an outer belt-like knitted fabric 65 is further wound in multiple layers. The outer belt-shaped knitted fabric 65 is wound so that the direction in which the short side extends coincides with the axial direction of the central axis 110. The outer band knitted fabric 65 is wound so that both ends in the short side direction protrude from the inner band knitted fabric 64. Both ends of the outer belt-like knitted fabric 65 in the short side direction are directly wound around the core tube 63.
　このような構成により、中心軸１１０の軸方向における帯状編み物６８の中央には、内側帯状編み物６４と外側帯状編み物６５とが重なって配置される大径部が設けられ、この大径部によって、相対的に大きい直径を有する中央部６１が構成されている。また、中心軸１１０の軸方向における帯状編み物６８の両端には、外側帯状編み物６５が配置される小径部が設けられ、この小径部によって、相対的に小さい直径を有する両側部６２が構成されている。表面６６および表面６７は、外側帯状編み物６５の外周面により形成されている。 With such a configuration, a large-diameter portion in which the inner belt-shaped knitted fabric 64 and the outer belt-shaped knitted fabric 65 overlap each other is provided in the center of the belt-shaped knitted fabric 68 in the axial direction of the central shaft 110, A central portion 61 having a relatively large diameter is formed. Further, at both ends of the belt-like knitted fabric 68 in the axial direction of the central shaft 110, a small-diameter portion in which the outer belt-shaped knitted fabric 65 is disposed is provided, and the small-diameter portion constitutes both side portions 62 having a relatively small diameter. Yes. The surface 66 and the surface 67 are formed by the outer peripheral surface of the outer band knitted fabric 65.
　帯状編み物６８（内側帯状編み物６４，外側帯状編み物６５）は、インクとして用いられるポリイミドの溶液に対して不溶性の材質、たとえば、ポリエステルから形成されている。なお、編み物に替わって、たとえば、織り物や不織布などが用いられてもよい。 The belt-shaped knitted fabric 68 (the inner belt-shaped knitted fabric 64 and the outer belt-shaped knitted fabric 65) is made of a material insoluble in a polyimide solution used as an ink, for example, polyester. Instead of knitting, for example, woven fabric or non-woven fabric may be used.
　本実施の形態では、外側帯状編み物６５における編み物の編み目が、内側帯状編み物６４における編み物の編み目よりも大きい。 In the present embodiment, the knitted stitch of the outer band knitted fabric 65 is larger than the knitted stitch of the inner band knitted fabric 64.
　編み物の編み目が粗いほどインクが吸収され易くなり、編み物の編み目が細かいほどインクが吸収され難くなるため、この場合、外側帯状編み物６５は、内側帯状編み物６４よりも高い吸液性を有する。すなわち、外側帯状編み物６５および内側帯状編み物６４をそれぞれ形成する編み物の下端をインクに一定時間、浸した場合、インクが吸い上げられる高さが、内側帯状編み物６４よりも外側帯状編み物６５の方が高くなる。 The coarser the knitted stitches, the easier the ink is absorbed, and the finer the knitted stitches, the more difficult the ink is absorbed. In this case, the outer belt-like knitted fabric 65 has higher liquid absorbency than the inner belt-like knitted fabric 64. That is, when the lower end of the knitting forming the outer band knitted fabric 65 and the inner band knitted fabric 64 is dipped in ink for a certain time, the height at which the ink is sucked up is higher in the outer band knitted fabric 65 than in the inner band knitted fabric 64. Become.
　また、編み物の編み目が細かいほどインクを蓄え易くなり、編み物の編み目が粗いほどインクを蓄え難くなるため、この場合、内側帯状編み物６４は、外側帯状編み物６５よりも高い保水性を有する。すなわち、外側帯状編み物６５および内側帯状編み物６４をそれぞれ形成する編み物をインクに浸し、インクから取り出した後、一定時間後の質量を測定すると、その質量は、外側帯状編み物６５よりも内側帯状編み物６４の方が大きくなる。 Further, the finer the stitches of the knitted fabric, the easier the ink is stored, and the coarser the knitted stitches, the harder the ink is stored. In this case, the inner belt-like knitted fabric 64 has a higher water retention than the outer belt-like knitted fabric 65. That is, when the knitted material forming the outer belt-shaped knitted fabric 65 and the inner belt-shaped knitted fabric 64 is dipped in the ink and taken out from the ink, the mass after a predetermined time is measured. Is bigger.
　このような構成により、ノズル面２２に付着するインクを効率よく外側帯状編み物６５によって吸収すると同時に、ノズル面２２から吸収したインクを多量に内側帯状編み物６４に保持しておくことができる。 With such a configuration, ink adhering to the nozzle surface 22 can be efficiently absorbed by the outer band knitted fabric 65, and at the same time, a large amount of ink absorbed from the nozzle surface 22 can be held in the inner band knitted fabric 64.
　図７は、クリーニングローラによるノズル面の拭き取り工程を示す底面図である。図７を参照して、両側部６２ｍ、中央部６１および両側部６２ｎは、閉塞領域４２ｍ、ノズル孔領域４１および閉塞領域４２ｎが並ぶ方向と平行方向に、かつ、クリーニングローラ５１の搬送方向に直交する方向に並ぶ。クリーニングローラ５１（帯状編み物６８）は、中心軸１１０の軸方向、すなわち両側部６２ｍ、中央部６１および両側部６２ｎが並ぶ方向において、ノズル面２２の全幅よりも若干大きい寸法に設定されている。 FIG. 7 is a bottom view showing the nozzle surface wiping process by the cleaning roller. Referring to FIG. 7, both side portions 62m, center portion 61, and both side portions 62n are parallel to the direction in which closed region 42m, nozzle hole region 41, and closed region 42n are arranged, and orthogonal to the conveying direction of cleaning roller 51. Line up in the direction you want. The cleaning roller 51 (band-shaped knitted fabric 68) is set to have a dimension slightly larger than the entire width of the nozzle surface 22 in the axial direction of the central shaft 110, that is, in the direction in which the both side portions 62m, the central portion 61, and the both side portions 62n are arranged.
　図１中に示す搬送アーム５６によってクリーニングローラ５１が搬送されると、帯状編み物６８の外周面がノズル面２２に接触しながら、ノズル面２２の表面に対して平行移動する。このとき、中央部６１がノズル面２２のノズル孔領域４１上を通過し、両側部６２ｍおよび両側部６２ｎが、それぞれ、閉塞領域４２ｍおよび閉塞領域４２ｎ上を通過することによって、インクが付着したノズル面２２が拭き取られる。 When the cleaning roller 51 is transported by the transport arm 56 shown in FIG. 1, the outer peripheral surface of the strip-shaped knitted fabric 68 moves in parallel with the surface of the nozzle surface 22 while contacting the nozzle surface 22. At this time, the central portion 61 passes over the nozzle hole region 41 of the nozzle surface 22 and the both side portions 62m and the both side portions 62n pass over the closed region 42m and the closed region 42n, respectively. The surface 22 is wiped off.
　なお、拭き取り時における帯状編み物６８の移動方向は、ノズル面２２に平行な方向に限られず、たとえば、中心軸１１０の軸方向から見た場合に、帯状編み物６８をノズル面に対して円弧状に移動させてもよい。また、静止するクリーニングローラ５１に対してインクジェットヘッド２１を移動させることによって、ノズル面２２の拭き取りを行なってもよい。 The moving direction of the band-shaped knitted fabric 68 at the time of wiping is not limited to the direction parallel to the nozzle surface 22. For example, when viewed from the axial direction of the central axis 110, the band-shaped knitted fabric 68 has an arc shape with respect to the nozzle surface. It may be moved. Alternatively, the nozzle surface 22 may be wiped by moving the inkjet head 21 with respect to the stationary cleaning roller 51.
　次に、図１中のインクジェット塗布装置１０にクリーニング装置５０を適用した場合に奏される作用、効果について説明する。 Next, the operation and effect exhibited when the cleaning device 50 is applied to the ink jet coating device 10 in FIG. 1 will be described.
　図８は、拭き取り前のノズル面の様子を示す断面図である。図８および後に説明する図中には、代表的に、閉塞領域４２ｍおよびノズル孔領域４１の境界部分が拡大して示されている。 FIG. 8 is a cross-sectional view showing the state of the nozzle surface before wiping. In FIG. 8 and the drawings that will be described later, a boundary portion between the closed region 42m and the nozzle hole region 41 is typically shown enlarged.
　図８を参照して、ノズル孔２４からインクが吐出されるのに伴って、ノズル面２２にインクが付着する。この際、インクは、ノズル孔２４が形成されたノズル孔領域４１を中心とする範囲に付着する。ノズル面２２に厚膜のインク膜が形成されたままインクの吐出工程が実行されると、可撓板３８（図３を参照のこと）の変形に伴う駆動力がノズル面２２の表層のインクにまで十分に伝わらず、インク滴が適切に吐出されないという問題が生じる。このため、本実施の形態におけるインクジェット塗布装置１０においては、クリーニング装置５０を用いてノズル面２２の拭き取り工程を実施する。 Referring to FIG. 8, as ink is ejected from nozzle hole 24, ink adheres to nozzle surface 22. At this time, the ink adheres to a range centering on the nozzle hole region 41 in which the nozzle holes 24 are formed. When the ink ejection process is executed while the thick ink film is formed on the nozzle surface 22, the driving force accompanying the deformation of the flexible plate 38 (see FIG. 3) is applied to the surface layer ink on the nozzle surface 22. This causes a problem that ink droplets are not properly ejected. For this reason, in the inkjet coating apparatus 10 in this Embodiment, the cleaning process 50 is used and the wiping off process of the nozzle surface 22 is implemented.
　図９は、比較のためのクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。図１０は、図９中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。 FIG. 9 is a cross-sectional view showing a nozzle surface wiping process when a comparative cleaning device is used. FIG. 10 is a cross-sectional view illustrating a state of the nozzle surface after the wiping process in FIG. 9 is performed.
　図９および図１０を参照して、図中では、比較のためのクリーニングローラ１５１を用いた場合のノズル面２２の拭き取り工程が示されている。クリーニングローラ１５１においては、帯状編み物６８が一定の直径を有して形成されている。 Referring to FIGS. 9 and 10, the wiping process of nozzle surface 22 in the case where cleaning roller 151 for comparison is used is shown. In the cleaning roller 151, a band-shaped knitted fabric 68 is formed with a certain diameter.
　クリーニングローラ１５１による拭き取り工程を重ねると、帯状編み物６８にはインクが徐々に浸透していく。また、クリーニングローラ１５１を最初に使用する際に、ノズル面２２上のインクが過剰に拭き取られないように、帯状編み物６８に予めインクを吸収させておく場合がある。これらの場合において、比較のためのクリーニングローラ１５１を用いると、帯状編み物６８に吸収されたインクが、ノズル面２２の拭き取り工程に伴って閉塞領域４２に付着する。この場合、閉塞領域４２に付着した微量のインクが時間の経過とともに乾燥し、固形化する。その結果、ノズル面２２にインクの固形物７３が生じる。このような固形物７３が生じた状態で、クリーニングローラ１５１による拭き取り工程を続行すると、固形物７３に起因して、帯状編み物６８の外周面とノズル面２２との間に微小な隙間が生じ、ノズル面２２の拭き取り性が低下するおそれが生じる。また、帯状編み物６８の外周面と固形物７３とが擦れることによって、帯状編み物６８の発塵性が低下するおそれが生じる。 When the wiping process by the cleaning roller 151 is repeated, the ink gradually permeates into the band-shaped knitted fabric 68. In addition, when the cleaning roller 151 is used for the first time, the belt-shaped knitted fabric 68 may absorb ink in advance so that the ink on the nozzle surface 22 is not excessively wiped off. In these cases, when the cleaning roller 151 for comparison is used, the ink absorbed by the band-shaped knitted fabric 68 adheres to the closed region 42 along with the wiping process of the nozzle surface 22. In this case, a small amount of ink adhering to the closed region 42 is dried and solidified over time. As a result, an ink solid 73 is generated on the nozzle surface 22. When the wiping process by the cleaning roller 151 is continued in a state where such a solid material 73 is generated, a minute gap is generated between the outer peripheral surface of the band-shaped knitted fabric 68 and the nozzle surface 22 due to the solid material 73, There is a risk that the wiping performance of the nozzle surface 22 may be reduced. In addition, when the outer peripheral surface of the belt-shaped knitted fabric 68 and the solid material 73 are rubbed, the dust generation property of the belt-shaped knitted fabric 68 may be reduced.
　図１１は、図１中のクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。 FIG. 11 is a cross-sectional view showing a nozzle surface wiping process when the cleaning device in FIG. 1 is used.
　図１１を参照して、これに対して、本実施の形態におけるクリーニング装置５０では、閉塞領域４２上を通過する両側部６２が小径部により構成されるため、ノズル面２２の拭き取り時に両側部６２が閉塞領域４２に接触するということがない。これにより、帯状編み物６８に吸収されたインクが、ノズル面２２の拭き取り作業に伴って閉塞領域４２に付着し、固形化するということがなくなる。 Referring to FIG. 11, on the other hand, in cleaning device 50 in the present embodiment, both side portions 62 that pass over closed region 42 are configured by small-diameter portions. Does not come into contact with the closed area 42. As a result, the ink absorbed by the belt-shaped knitted fabric 68 does not adhere to the closed region 42 and solidify with the wiping operation of the nozzle surface 22.
　図１２は、比較のための別のクリーニング装置を用いた場合のノズル面の拭き取り工程を示す断面図である。図１２を参照して、図中では、比較のための別のクリーニングローラ１５２を用いた場合のノズル面２２の拭き取り工程が示されている。クリーニングローラ１５２においては、帯状編み物６８が両側部６２を有さず、中央部６１のみから構成されている。帯状編み物６８は、その巻回軸方向における両側面に配置される端面１５３を有する。 FIG. 12 is a cross-sectional view showing a nozzle surface wiping process when another cleaning device for comparison is used. Referring to FIG. 12, a wiping process of nozzle surface 22 when another cleaning roller 152 for comparison is used is shown. In the cleaning roller 152, the belt-shaped knitted fabric 68 does not have the both side portions 62, and is composed only of the central portion 61. The strip-shaped knitted fabric 68 has end surfaces 153 arranged on both side surfaces in the winding axis direction.
　このようなクリーニングローラ１５２によってノズル面２２の拭き取り工程を実施した場合、帯状編み物６８がノズル面２２に押圧されるのに伴って、帯状編み物６８内のインクが端面１５３から溢れ出す。これにより、ノズル面２２に、ノズル孔領域４１と閉塞領域４２との境界に沿って線状に延びるインク溜まり１５４が生じる。このように生じたインク溜まり１５４が、時間の経過とともに固形化することによって、ノズル面２２の拭き取り性の低下や、帯状編み物６８の発塵性の低下を招くおそれがある。 In the case where the wiping process of the nozzle surface 22 is performed by such a cleaning roller 152, the ink in the band-shaped knitted fabric 68 overflows from the end surface 153 as the band-shaped knitted fabric 68 is pressed against the nozzle surface 22. As a result, an ink reservoir 154 that extends linearly along the boundary between the nozzle hole region 41 and the closed region 42 is generated on the nozzle surface 22. The ink reservoir 154 generated in this way is solidified over time, which may lead to a decrease in the wiping performance of the nozzle surface 22 and a decrease in the dust generation of the belt-shaped knitted fabric 68.
　図１１を参照して、これに対して、本実施の形態におけるクリーニング装置５０では、中央部６１と両側部６２との間で表面６６および表面６７が連続して延在するように形成されている。このような構成により、ノズル面２２の拭き取り工程に伴って帯状編み物６８からノズル面２２に移るインクの量を、ノズル孔領域４１と閉塞領域４２との間で徐々に変化させることができる。これにより、ノズル面２２に線状のインク溜まりが形成され、そのインク溜まりが固形化するという現象を回避できる。 Referring to FIG. 11, on the other hand, in cleaning device 50 in the present embodiment, surface 66 and surface 67 are formed so as to continuously extend between center portion 61 and both side portions 62. Yes. With such a configuration, the amount of ink transferred from the band-shaped knitted fabric 68 to the nozzle surface 22 in accordance with the wiping process of the nozzle surface 22 can be gradually changed between the nozzle hole region 41 and the closed region 42. As a result, it is possible to avoid the phenomenon that a linear ink reservoir is formed on the nozzle surface 22 and the ink reservoir is solidified.
　図１３は、図１１中の拭き取り工程が実施された後のノズル面の様子を示す断面図である。図１３を参照して、図１中のクリーニング装置５０を用いた場合、ノズル孔領域４１の表面から適度な量のインクを取り去るとともに、帯状編み物６８に吸収されたインクが閉塞領域４２に付着することを防止できる。これにより、ノズル面２２にインクの固形物が生じることを防止できる。 FIG. 13 is a cross-sectional view showing a state of the nozzle surface after the wiping process in FIG. 11 is performed. Referring to FIG. 13, when the cleaning device 50 in FIG. 1 is used, an appropriate amount of ink is removed from the surface of the nozzle hole region 41, and ink absorbed by the belt-shaped knitted fabric 68 adheres to the blocking region 42. Can be prevented. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22.
　以上に説明した、この発明の実施の形態１におけるクリーニング装置およびインクジェット塗布装置の構造についてまとめて説明すると、本実施の形態におけるクリーニング装置５０は、インクジェット塗布装置１０のノズル面２２を拭き取るためのクリーニング装置である。クリーニング装置５０は、ノズル面２２に付着したインクを吸収する吸収体としての帯状編み物６８を備える。帯状編み物６８は、中央部６１と、中央部６１の両側に設けられる両側部６２（６２ｍ，６２ｎ）とを有して形成される。中央部６１は、ノズル面２２に対向して配置される第１表面としての表面６６を有し、両側部６２は、表面６６から連続して延在する第２表面としての表面６７を有する。表面６７は、ノズル面２２に対して表面６６よりも後退した位置に配置される。 The structure of the cleaning device and the ink jet coating device according to the first embodiment of the present invention described above will be described together. The cleaning device 50 according to the present embodiment is a cleaning for wiping the nozzle surface 22 of the ink jet coating device 10. Device. The cleaning device 50 includes a belt-like knitted fabric 68 as an absorber that absorbs ink attached to the nozzle surface 22. The belt-shaped knitted fabric 68 is formed to have a central portion 61 and both side portions 62 (62m, 62n) provided on both sides of the central portion 61. The central portion 61 has a surface 66 as a first surface disposed to face the nozzle surface 22, and the both side portions 62 have a surface 67 as a second surface continuously extending from the surface 66. The surface 67 is disposed at a position retracted from the surface 66 with respect to the nozzle surface 22.
　また、本実施の形態におけるインクジェット塗布装置１０は、上述のクリーニング装置５０を備える。インクジェット塗布装置１０は、ノズル面２２を有するインクジェットヘッド２１（２１ｐ）と、移動機構部としての搬送アーム５６とを備える。インクジェットヘッド２１には、ノズル面２２に開口し、インクを吐出する複数のノズル孔２４と、複数のノズル孔２４に向けてインクを供給する供給孔としてのインク供給管２９およびインク供給室２８とが形成される。搬送アーム５６は、帯状編み物６８とノズル面２２とを対向させた状態で、帯状編み物６８およびインクジェットヘッド２１を相対移動させる。ノズル面２２を正面から見た場合に、ノズル面２２には、複数のノズル孔２４が開口する第１領域としてのノズル孔領域４１と、ノズル孔領域４１の両側に配置され、インク供給管２９およびインク供給室２８が形成される第２領域としての閉塞領域４２（４２ｍ，４２ｎ）とが規定される。ノズル面２２の拭き取り時、中央部６１とノズル孔領域４１とが対向し、両側部６２と閉塞領域４２とが対向した状態で、帯状編み物６８およびインクジェットヘッド２１が相対移動する。 In addition, the ink jet coating apparatus 10 according to the present embodiment includes the cleaning device 50 described above. The ink jet coating apparatus 10 includes an ink jet head 21 (21p) having a nozzle surface 22 and a transport arm 56 as a moving mechanism unit. The inkjet head 21 has a plurality of nozzle holes 24 that are opened in the nozzle surface 22 and eject ink, and an ink supply pipe 29 and an ink supply chamber 28 that serve as supply holes for supplying ink toward the plurality of nozzle holes 24. Is formed. The transport arm 56 relatively moves the belt-shaped knitted fabric 68 and the inkjet head 21 in a state where the belt-shaped knitted fabric 68 and the nozzle surface 22 face each other. When the nozzle surface 22 is viewed from the front, the nozzle surface 22 is disposed on both sides of the nozzle hole region 41 as a first region where a plurality of nozzle holes 24 are opened, and the nozzle hole region 41. In addition, a closed region 42 (42m, 42n) is defined as a second region in which the ink supply chamber 28 is formed. When the nozzle surface 22 is wiped, the band-shaped knitted fabric 68 and the inkjet head 21 are relatively moved while the central portion 61 and the nozzle hole region 41 face each other and the both side portions 62 and the closed region 42 face each other.
　このように構成された、この発明の実施の形態１におけるクリーニング装置５０およびインクジェット塗布装置１０によれば、帯状編み物６８に小径部からなる両側部６２を設けることによって、ノズル面２２の拭き取り工程に伴って閉塞領域４２にインクが付着することを防止できる。これにより、ノズル面２２にインクの固形物が生じることを防止し、ノズル孔２４から安定してインクが吐出されるインクジェット塗布装置１０を実現することができる。 According to the cleaning device 50 and the inkjet coating device 10 according to the first embodiment of the present invention configured as described above, the knitting process of the nozzle surface 22 is performed by providing the belt-shaped knitted fabric 68 with both side portions 62 each having a small diameter portion. Accordingly, it is possible to prevent ink from adhering to the closed region 42. Thereby, it is possible to prevent the ink solid matter from being generated on the nozzle surface 22 and to realize the ink jet coating apparatus 10 in which ink is stably ejected from the nozzle hole 24.
　なお、本実施の形態では、インクジェット塗布装置１０が、液晶ディスプレイ用の基板表面に配向膜を形成する工程に用いられる場合を説明したが、本発明は、これに限られず、たとえば、基板表面にレジストを形成する工程に利用されてもよい。 In the present embodiment, the case where the inkjet coating apparatus 10 is used for the step of forming an alignment film on the surface of a substrate for a liquid crystal display has been described. However, the present invention is not limited to this. You may utilize for the process of forming a resist.
　（実施の形態２）
　本実施の形態では、実施の形態１におけるクリーニング装置５０の各種変形例について説明する。 (Embodiment 2)
In the present embodiment, various modifications of the cleaning device 50 in the first embodiment will be described.
　図１４は、図１中のクリーニング装置の第１変形例を示す断面図である。図１４中には、実施の形態１における図６に対応する断面が示されている。図１４を参照して、本変形例におけるクリーニング装置は、図５中のクリーニングローラ５１に替えてクリーニングローラ８１を有する。クリーニングローラ８１は、芯筒６３と、吸収体としての帯状編み物８２を有する。 FIG. 14 is a cross-sectional view showing a first modification of the cleaning device in FIG. FIG. 14 shows a cross section corresponding to FIG. 6 in the first embodiment. Referring to FIG. 14, the cleaning device in this modification includes a cleaning roller 81 instead of the cleaning roller 51 in FIG. 5. The cleaning roller 81 has a core cylinder 63 and a strip-shaped knitted fabric 82 as an absorber.
　本変形例では、芯筒６３が、大径部８３および小径部８４を有して形成されている。大径部８３は、中心軸１１０の軸方向における中央に設けられ、小径部８４は、中心軸１１０の軸方向における両端に設けられている。大径部８３は、小径部８４よりも大きい直径を有する。帯状編み物８２は、大径部８３および小径部８４の外周上に巻き回されている。大径部８３の外周上に配置された帯状編み物８２によって中央部６１が構成され、小径部８４の外周上に配置された帯状編み物８２によって両側部６２が構成されている。 In the present modification, the core cylinder 63 is formed having a large diameter portion 83 and a small diameter portion 84. The large diameter portion 83 is provided at the center in the axial direction of the central shaft 110, and the small diameter portion 84 is provided at both ends in the axial direction of the central shaft 110. The large diameter part 83 has a larger diameter than the small diameter part 84. The strip-shaped knitted fabric 82 is wound around the outer circumferences of the large diameter portion 83 and the small diameter portion 84. A central portion 61 is configured by the strip-shaped knitted fabric 82 disposed on the outer periphery of the large-diameter portion 83, and both side portions 62 are configured by the strip-shaped knitted fabric 82 disposed on the outer periphery of the small-diameter portion 84.
　本変形例に示すように、芯筒６３の形状を変化させることによって、帯状編み物８２に中央部６１および両側部６２を設けてもよい。 As shown in this modification, the central part 61 and both side parts 62 may be provided on the band-shaped knitted fabric 82 by changing the shape of the core cylinder 63.
　図１５は、図１中のクリーニング装置の第２変形例を示す断面図である。図１５を参照して、本変形例におけるクリーニング装置は、図５中のクリーニングローラ５１に替えてクリーニングローラ９１を有する。クリーニングローラ９１は、吸収体としてのスポンジ９２を有して形成されている。 FIG. 15 is a cross-sectional view showing a second modification of the cleaning device in FIG. Referring to FIG. 15, the cleaning device in this modification includes a cleaning roller 91 in place of the cleaning roller 51 in FIG. 5. The cleaning roller 91 has a sponge 92 as an absorber.
　スポンジ９２は、多孔質材であり、個々の孔同士が繋がった連続気泡構造を有する。スポンジ９２は、図５中のクリーニングローラ５１と同様に、両端の直径が絞られた段差付き円柱の外観を有し、その軸方向に並ぶ中央部６１および両側部６２（６２ｍ，６２ｍ）を有する。 The sponge 92 is a porous material and has an open cell structure in which individual holes are connected to each other. Like the cleaning roller 51 in FIG. 5, the sponge 92 has the appearance of a stepped cylinder with a reduced diameter at both ends, and has a central portion 61 and both side portions 62 (62 m, 62 m) aligned in the axial direction. .
　本変形例に示すように、本発明における吸収体は、編み物に限られず、スポンジなどのインクを吸収可能な部材が適宜選択して使用される。 As shown in this modification, the absorbent body in the present invention is not limited to a knitted fabric, and a member capable of absorbing ink such as sponge is appropriately selected and used.
　以上に説明した、この発明の実施の形態２におけるクリーニング装置によれば、実施の形態１に記載の効果を同様に得ることができる。 According to the cleaning device in the second embodiment of the present invention described above, the effects described in the first embodiment can be obtained similarly.
　今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
　この発明は、主に、液晶ディスプレイの配向膜や、レジストなどの機能膜を基板上に形成する装置として利用される。 The present invention is mainly used as an apparatus for forming an alignment film of a liquid crystal display and a functional film such as a resist on a substrate.
　１０　インクジェット塗布装置、１２　載置台、１４　搬送アーム、１６　液晶基板、１６ａ　主表面、２１，２１ｐ　インクジェットヘッド、２２　ノズル面、２４　ノズル孔、２６　インク室、２７　枝管、２８　インク供給室、２９　インク供給管、３１　ヘッド本体、３２　ノズル板、３４　駆動部、３５　開口部、３６　ピエゾ素子、３８　可撓板、４１　ノズル孔領域、４２，４２ｍ，４２ｎ　閉塞領域、５０　クリーニング装置、５１，８１，９１，１５１，１５２　クリーニングローラ、５４　ベース部材、５６　搬送アーム、６１　中央部、６２，６２ｍ，６２ｎ　両側部、６３　芯筒、６４　内側帯状編み物、６５　外側帯状編み物、６６，６７　表面、６８，８２　帯状編み物、７３　固形物、８３　大径部、８４　小径部、９２　スポンジ、１１０　中心軸、１５３　端面、１５４　インク溜まり。 10 inkjet coating device, 12 mounting table, 14 transport arm, 16 liquid crystal substrate, 16a main surface, 21,21p inkjet head, 22 nozzle face, 24 nozzle hole, 26 ink chamber, 27 branch pipe, 28 ink supply chamber, 29 ink Supply pipe, 31 head body, 32 nozzle plate, 34 drive unit, 35 opening, 36 piezo element, 38 flexible plate, 41 nozzle hole area, 42, 42 m, 42 n closed area, 50 cleaning device, 51, 81, 91 151, 152 Cleaning roller, 54 Base member, 56 Transfer arm, 61 Central part, 62, 62m, 62n Both sides, 63 Core tube, 64 Inner belt knitted fabric, 65 Outer belt knitted fabric, 66, 67 Surface, 68, 82 Belt Knitting, 73 solid, 83 large diameter part, 84 The small diameter portion, 92 sponges, 110 central axis 153 end face, 154 an ink reservoir.

Claims (9)

  1. 　インクジェット塗布装置のノズル面（２２）を拭き取るためのクリーニング装置であって、
    　ノズル面（２２）に付着したインクを吸収する吸収体（６８，８２，９２）を備え、
    　前記吸収体（６８，８２，９２）は、ノズル面（２２）に対向して配置される第１表面（６６）を有する中央部（６１）と、前記第１表面（６６）から連続して延在する第２表面（６７）を有し、前記中央部（６１）の両側に設けられる両側部（６２）とを有して形成され、
    　前記第２表面（６７）は、ノズル面（２２）に対して前記第１表面（６６）よりも後退した位置に配置される、クリーニング装置。     A cleaning device for wiping the nozzle surface (22) of an inkjet coating device,
    An absorber (68, 82, 92) for absorbing ink adhering to the nozzle surface (22);
    The absorber (68, 82, 92) continues from the first surface (66) and a central portion (61) having a first surface (66) disposed opposite to the nozzle surface (22). A second surface (67) extending, and having both side portions (62) provided on both sides of the central portion (61),
    The cleaning device, wherein the second surface (67) is disposed at a position retracted from the first surface (66) with respect to the nozzle surface (22).
  2. 　前記吸収体（６８）は、第１の幅を有し、インクを吸収可能な第１帯状部材（６４）と、前記第１の幅よりも大きい第２の幅を有し、インクを吸収可能な第２帯状部材（６５）とを有し、多層に巻き回された前記第１帯状部材（６４）の外周上にさらに前記第２帯状部材（６５）が巻き回されることによって形成され、
    　前記第１帯状部材（６４）および前記第２帯状部材（６５）の巻回軸方向における前記吸収体（６８）の中央には、前記第１帯状部材（６４）および前記第２帯状部材（６５）からなり、前記中央部（６１）を形成する大径部が設けられ、
    　前記第１帯状部材（６４）および前記第２帯状部材（６５）の巻回軸方向における前記吸収体（６８）の両端には、前記第２帯状部材（６５）からなり、前記両側部（６２）を形成する小径部が設けられる、請求項１に記載のクリーニング装置。     The absorber (68) has a first width and a first strip member (64) capable of absorbing ink and a second width larger than the first width and can absorb ink. A second belt-like member (65), and is formed by further winding the second belt-like member (65) on the outer periphery of the first belt-like member (64) wound in multiple layers,
    In the center of the absorber (68) in the winding axis direction of the first belt member (64) and the second belt member (65), the first belt member (64) and the second belt member (65). A large diameter portion forming the central portion (61),
    At both ends of the absorbent body (68) in the winding axis direction of the first belt-like member (64) and the second belt-like member (65), the second belt-like member (65) is formed on both ends (62). The cleaning device according to claim 1, wherein a small-diameter portion is formed.
  3. 　前記第１帯状部材（６４）および前記第２帯状部材（６５）は、編み物からなる、請求項２に記載のクリーニング装置。 The cleaning device according to claim 2, wherein the first belt-like member (64) and the second belt-like member (65) are made of knitting.
  4. 　前記第２帯状部材（６５）は、前記第１帯状部材（６４）よりも高い吸液性を有する、請求項２または３に記載のクリーニング装置。 The cleaning device according to claim 2 or 3, wherein the second strip member (65) has higher liquid absorbency than the first strip member (64).
  5. 　前記第１帯状部材（６４）は、前記第２帯状部材（６５）よりも高い保水性を有する、請求項２から４のいずれか１項に記載のクリーニング装置。 The cleaning device according to any one of claims 2 to 4, wherein the first belt-like member (64) has higher water retention than the second belt-like member (65).
  6. 　前記第１帯状部材（６４）および前記第２帯状部材（６５）は、編み物からなり、
    　前記第２帯状部材（６５）における編み物の編み目は、前記第１帯状部材（６４）における編み物の編み目よりも大きい、請求項２から５のいずれか１項に記載のクリーニング装置。     The first belt member (64) and the second belt member (65) are knitted,
    The cleaning device according to any one of claims 2 to 5, wherein a stitch of the knitted fabric in the second strip-shaped member (65) is larger than a stitch of the knitted fabric in the first strip-shaped member (64).
  7. 　前記第１表面（６６）および前記第２表面（６７）は、前記中央部（６１）と前記両側部（６２）との境界で湾曲しながら接続される、請求項１から６のいずれか１項に記載のクリーニング装置。 The first surface (66) and the second surface (67) are connected while being curved at a boundary between the central portion (61) and the both side portions (62). The cleaning device according to item.
  8. 　請求項１から７のいずれか１項に記載のクリーニング装置を備えるインクジェット塗布装置であって、
    　ノズル面（２２）を有し、前記ノズル面（２２）に開口し、インクを吐出する複数のノズル孔（２４）と、前記複数のノズル孔（２４）に向けてインクを供給する供給孔（２９，２８）とが形成されるインクジェットヘッド（２１）と、
    　前記吸収体（６８，８２，９２）と前記ノズル面（２２）とを対向させた状態で、前記吸収体（６８，８２，９２）および前記インクジェットヘッド（２１）を相対移動させる移動機構部（５６）とを備え、
    　前記ノズル面（２２）を正面から見た場合に、前記ノズル面（２２）には、前記複数のノズル孔（２４）が開口する第１領域（４１）と、前記第１領域（４１）の両側に配置され、前記供給孔（２９，２８）が形成される第２領域（４２）とが規定され、
    　前記ノズル面（２２）の拭き取り時、前記中央部（６１）と前記第１領域（４１）とが対向し、前記両側部（６２）と前記第２領域（４２）とが対向した状態で、前記吸収体（６８，８２，９２）および前記インクジェットヘッド（２１）が相対移動する、インクジェット塗布装置。     An inkjet coating apparatus comprising the cleaning device according to any one of claims 1 to 7,
    A plurality of nozzle holes (24) that have a nozzle surface (22), open to the nozzle surface (22), and discharge ink; and supply holes (ink) that supply ink toward the plurality of nozzle holes (24) 29, 28) and an inkjet head (21) formed;
    A moving mechanism (relatively moving the absorber (68, 82, 92) and the inkjet head (21) in a state where the absorber (68, 82, 92) and the nozzle surface (22) face each other. 56)
    When the nozzle surface (22) is viewed from the front, the nozzle surface (22) includes a first region (41) in which the plurality of nozzle holes (24) are opened, and a first region (41). A second region (42) disposed on both sides and defining the supply hole (29, 28) is defined;
    At the time of wiping the nozzle surface (22), the central portion (61) and the first region (41) face each other, the both side portions (62) and the second region (42) face each other, An inkjet coating apparatus in which the absorber (68, 82, 92) and the inkjet head (21) move relative to each other.
  9. 　前記ノズル孔（２４）を通じてポリイミドの溶液が基板に向けて吐出され、
    　前記クリーニング装置によって、前記ノズル面（２２）に付着したポリイミドの溶液が拭き取られる、請求項８に記載のインクジェット塗布装置。     A polyimide solution is discharged toward the substrate through the nozzle hole (24),
    The inkjet coating apparatus according to claim 8, wherein a polyimide solution attached to the nozzle surface (22) is wiped off by the cleaning device.
PCT/JP2011/062916 2010-06-07 2011-06-06 Cleaning device and inkjet coating applicator WO2011155433A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003266746A (en) * 2002-03-20 2003-09-24 Sony Corp Ink jet head, method for cleaning head and imaging apparatus
JP2004114619A (en) * 2002-09-27 2004-04-15 Sony Corp Inkjet recorder
JP2008100354A (en) * 2006-10-17 2008-05-01 Kyocera Mita Corp Liquid removing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003266746A (en) * 2002-03-20 2003-09-24 Sony Corp Ink jet head, method for cleaning head and imaging apparatus
JP2004114619A (en) * 2002-09-27 2004-04-15 Sony Corp Inkjet recorder
JP2008100354A (en) * 2006-10-17 2008-05-01 Kyocera Mita Corp Liquid removing device

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