WO2011151255A1 - Dispositif de mesure et procédé de mesure pour mesurer la distance absolue - Google Patents

Dispositif de mesure et procédé de mesure pour mesurer la distance absolue Download PDF

Info

Publication number
WO2011151255A1
WO2011151255A1 PCT/EP2011/058676 EP2011058676W WO2011151255A1 WO 2011151255 A1 WO2011151255 A1 WO 2011151255A1 EP 2011058676 W EP2011058676 W EP 2011058676W WO 2011151255 A1 WO2011151255 A1 WO 2011151255A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
measuring device
interferometer
light path
measuring
Prior art date
Application number
PCT/EP2011/058676
Other languages
German (de)
English (en)
Inventor
Peter Lehmann
Original Assignee
Carl Mahr Holding Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Mahr Holding Gmbh filed Critical Carl Mahr Holding Gmbh
Publication of WO2011151255A1 publication Critical patent/WO2011151255A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Definitions

  • the present invention relates to an optoelectronic measuring device or an optoelectric measuring method for absolute distance measurement between a probe and an object surface.
  • the measuring device has an interferometer and a photosensor.
  • the photo sensor measures the intensity of the light emitted by the interferometer. By evaluating the intensity signal, the distance can be determined.
  • the provided there interferometer comprises a beam splitter which splits the light reflected from the object surface and a reference surface in a reference light into a first and ei ⁇ NEN second light path.
  • the light in the first and in the second light path is subsequently superimposed again and fed to a line scan camera.
  • ⁇ at least one of the interferometer on an optical path is thereby inclined to achieve the desired interference pattern. It has, however, shown that the Anord ⁇ planning, installation and adjustment of the interferometer is due to the inclination of a very interferometer mirror on ⁇ agile.
  • the line camera detects a measuring point on the object surface at a time, however, limits the miniaturization of the Messeinrich ⁇ processing.
  • the signal intensity may vary ⁇ rich over the Messbe.
  • a measuring device with the features of claim 1 and a measuring method with the features of claim 13. It is used by a light source, which preferably comprises a plurality of lamps, such When ⁇ game more superluminescent diodes (SLDs) short coherent light.
  • SLDs superluminescent diodes
  • the emitted light is split in a probe into a measuring light path and a reference light path.
  • the probe receives the light reflected in the measuring light path from the object surface as well as the light reflected in the reference light path from a reference surface.
  • the distance between the Refe ⁇ rence surface and the object surface is preferably greater than the coherence length of the light of the light source used, so that the light reflected at the object surface on the one hand and on the reference surface the other hand, light is not inter feriert ⁇ .
  • the light reflected at the reference surface and at the object surface is picked up by an interferometer. This divides the reflected light into a first light path and a second light path, wherein the length of the two light paths is preferably different from each other. Specifically, the difference between the two light paths is that the distance between the Refe rence ⁇ surface and the object surface is compensated so selected.
  • the length of the light paths is given by an interferometer mirror.
  • the second interferometer mirror provided in the second light path is in particular adjustable in order to adjust the difference in the two light paths. SUC The adjustment can be done manually or automatically at the distance Zvi ⁇ rule reference surface and the object surface adapted ⁇ gen.
  • the first interferometer mirror present in the first light path can be oscillated via an oscillation device.
  • the interferometer mirror is oscillated in the direction of the optical axis of the first optical path. Due to this oscillating movement, the difference between the two light paths increases or decreases by the amplitude of the oscillation movement.
  • the light reflected at the interferometer mirrors is then superimposed by a superposition means, where ⁇ occur by interference effects.
  • the intensity of the superimposed light changes depending on the oscillation movement of the first interferometer mirror and is detected by a photosensor.
  • the photosensor is preferably formed by a photodiode, a photoresistor or a photo ⁇ transistor. It is designed as a point sensor, so ⁇ say approximately zero-dimensional.
  • the desired measurement range can be predetermined and influenced by the amplitude of the oscillation movement of the first interferometer mirror.
  • the oscillation amplitude can be between ei ⁇ nigen micrometers and a few hundred micrometers.
  • the measuring frequency of the measuring device or the measuring method is determined.
  • Favor ⁇ te oscillation frequencies are in the range of a few hundred hertz to about 100 kilohertz.
  • the interferometer are designed as plane mirrors, extending perpendicularly to the op ⁇ tables axis of the respective light path.
  • Flat mirrors are inexpensive to produce.
  • the center wavelengths of the emitted light from the two superluminescent are different.
  • the desired short-coherent light can be generated.
  • the difference between the centroid wavelengths may be 50 to 100 nanometers.
  • the centroid wavelength of one diode is 750 nanometers and that of the other diode is 830 nanometers.
  • the spektra ⁇ le width of the radiated from a superluminescent light is approximately 20 to 30 nanometers.
  • ⁇ ser also merely a superluminescent diode may be used with correspondingly wider spectral instead of two superluminescent diodes to testify sufficiently short coherent light to he ⁇ .
  • Other combinations of bulbs are possible, for example, a superluminescent diode with egg ⁇ ner laser diode or the like.
  • a collimator element is preferably present on the probe, which serves to radiate the light into the measuring light path.
  • the collimator element By means of the collimator element, focusing of the measuring light beam on the object surface can be achieved.
  • the probe has at this Ausges ⁇ taltung a very compact design and requires little space.
  • an optical element may be provided between the interferometer and the photosensor. This optical element can also change the propagation direction of the light between the interferometer and the photosensor.
  • the electrical sensor signal generated by the photo sensor is preferably transmitted to an evaluation device which determines the distance value.
  • the analog sensor signal is converted into a digital signal.
  • an analog filtering of the sensor signal is carried out in particular before the analog-to-digital conversion.
  • an analog filter in the form of a bandpass filter may be arranged in the evaluation device before the analog-to-digital converter.
  • the analog to digital converter of the evaluation device is preferably configured as a 2-channel analog-to-digital converter that samples the sensor signal, as well as the oscillation of the first interferometer mirror describing oscillations ⁇ acceleration signal synchronously.
  • the digitized oscillations ⁇ acceleration signal serves as a reference signal for determining the zero position of the digitized sensor signal for the further distance value determination.
  • a measuring method with one or more of three steps can be carried out in the evaluation device.
  • a distance value can be determined thereby, wherein the clarity and reliability of the individual From ⁇ resistance values are different.
  • two of these steps, during the measurement process in the off ⁇ values means are at least performed.
  • the first distance value is determined on the basis of the interference maximum.
  • a phase difference between different light colors reflected by the object surface is determined.
  • the phase is determined at least a light color of the re ⁇ inflected from the object surface light and compared with a predetermined phase value. Based on the comparison result, the third distance value is determined.
  • the accuracy increases from the first to the third distance value, while the uniqueness decreases. Therefore, it is particularly preferred the three steps in the order named Maschinenpsy ⁇ reindeer to get as big a uniqueness, as well as a large ⁇ SSE measurement accuracy.
  • FIG. 1 shows a block diagram of a first execution ⁇ embodiment of a measuring device
  • Figures 2 and 3 the course of a Oszillati ⁇ onscho each of the first interferometer mirror of the measuring device
  • FIG. 4 shows a diagram which schematically illustrates the steps of a measuring method for determining distance values
  • FIG. 5 is a block diagram of a modified Aus ⁇ guide example of the measuring device shown in Figure 1 and
  • FIG. 6 shows a modified embodiment of a probe for a measuring device according to FIGS. 1 or 5.
  • FIG. 1 shows an embodiment of a Messein ⁇ device 10, used for determining a distance value d Zvi ⁇ rule a light exit surface 11, a probe 12 and ei ⁇ ner object surface 13 is used.
  • the distance d is determined praxisför ⁇ mig along the optical axis 14 of the probe 12.
  • To the measuring device 10 includes a light source 15, which has several and in particular two lamps in the embodiment.
  • two superluminescent diodes 16 (SLDs) are preferably used.
  • the superluminescent diodes 16 each emit light having a spectral width of about 20 to 40 nm.
  • Her main ⁇ center wavelengths are different, the superluminescent diode 16 has a center wavelength of about 750 nm and the other a superluminescent
  • the two superluminescent diodes 16 are each provided with a monomode fiber, whereby a so-called fiber pigtail 17 is formed.
  • the superluminescent diodes 16 are connected to a first fiber coupler 18 via the respective fiber pigtail 17.
  • the first fiber coupler 18 is connected via a first Monomo ⁇ dentura 22 with a second fiber coupler 23.
  • a second monomode fiber 24 connects the second fiber coupler 23 to the probe 12.
  • the probe 12 is preferably configured as an optical microprobe.
  • the light exit ⁇ surface 11 may in this case be designed curved in parallel to the current through them spherical optical wave is as shown in phantom in Figure 1 illustrated by the light emergence ⁇ surface 11 '.
  • the plane light exit surface 11 shown by solid Li ⁇ never can be provided if the distance d is small enough, so that only negligible disturbances in the measurement occur.
  • the numerical aperture of the optical element 25 of the probe 12 is large and preferably greater than 0.1. As a result, high resolutions can be achieved and the measurement is insensitive to local inclinations of the object surface 13.
  • As an optical element 25 also so-called GRIN lenses (gradient index lenses) can be used. It is also possible to arrange an inclined mirror 26 within the probe 12 between the second monomode fiber 24 and the optical element 25. The direction of light entry at the end of the monomode fiber 24 into the probe 12 is thereby changed with respect to the light exit direction and the optical axis 14. Characterized measuring probes can be constructed so to speak, to the side 12, as is shown by way of example ⁇ schematically in FIG. 6
  • the optical element 25 of the probe 12 is designed as a collimation ⁇ gate member and also serves to focus the exiting at the light exit surface 11 of light.
  • the light coupled from the light source 15 through the single mode fibers 22, 24 in the probe 12 light passes through the part a re ⁇ ferenzetterweg R and partly a measuring light path M.
  • the Re ⁇ ferenzanderweg terminates at a reference surface 27 in the Son ⁇ en 12, for example in accordance with on the optical element 25 and is preferably provided at the light exit surface 11.
  • Both the light reflected in the reference light path R and the light reflected in the measurement light path M are fed back into the second monomode fiber 24 and forwarded to an interferometer 30 via a third monomode fiber 29 which is connected to the second fiber coupler 23. In this transmission, there is no interference, since the difference between the two light paths M, R is greater than the coherence length of the light.
  • the interferometer 30 is preferably designed as a Michelson interferometer.
  • a collimator 31 is provided, which generates a substantially parallel light beam which exits at the collimator 31 and is directed onto a beam splitter 32 of the interferometer 30.
  • the beam splitter 32 divides the light emitted by the collimator 31 into a first light path LI and a second light path L2.
  • the two light paths LI, L2 are under ⁇ differently long.
  • the first light path LI is bounded by the beam divider 32 and a first interferometer mirror 33 and the second light path L2 by the beam splitter 32 and a second interferometer mirror 34.
  • the light reflected at the interferometer mirrors 33, 34 becomes light at the beam splitter 32 superimposed again and interferes.
  • the interference is detected by a photosensor 35.
  • a further optical element 36 may be provided to optimally illuminate the photosensitive surface of the photosensor 35.
  • the photosensor 35 is preferably formed by a photodiode.
  • the photosensor 35 transmits a sensor signal S to an evaluation device 37 of the measuring device 10.
  • the two interferometer mirrors 33, 34 are designed as plan ⁇ mirror.
  • the first interferometer mirror 33 is oriented at right angles to the optical axis 40 of the first light path LI and the second interferometer mirror 34 is oriented perpendicular to the optical axis 41 of the second light path L2.
  • the length difference of the two light paths LI, L2 corresponds to the difference in length between the measuring light path M and the reference light R.
  • the second interferometers Mirror mirror 34 in the direction of the optical axis 41 of the second light path L2 slidably.
  • the adjustment or positioning of the second interferometer mirror 34 may ⁇ SUC gene, either manually or by an adjustment drive 42, which is controlled by the evaluation device 37th In this way, tracking of the second interferometer mirror 34 can depend on the determined distance value d done automatically.
  • the difference in length in the light paths LI, L2 then automatically compensates for the difference in length between the reference light path R and the measuring light path M.
  • the measuring device 10 further comprises an oscillation device 45.
  • the oscillating means 45 contains an oscillating drive 46 which is connected to the first ⁇ In terferometerapt 33rd
  • the oscillation ⁇ SDRIVE 46 may assert the first interferometer 33, an oscillatory movement in the direction of the optical axis 40 of the first light path LI. In this case, enlarged and verrin ⁇ Gert the first interferometer 33 the first light path LI, starting from its zero position periodically.
  • Oszillati ⁇ onsantrieb 45 can serve for example a piezoelectric actuator or a micromechanical translation actuator.
  • the oscillation drive 46 is driven by a signal generator 47.
  • the signal generator 47 generates a vibration signal P having an amplitude A and a frequency f. Both the amplitude A and the frequency f can be varied and set by the operator of the measuring device 10. exemplary
  • Vibration waveforms P are shown in Figures 2 and 3.
  • An oscillation half-wave signal is preferential ⁇ symmetrical to a straight line through the maximum or minimum. It can be caused triangular or sinusoidal vibra ⁇ tion signal waveforms. Due to the raised stabili ⁇ hung in the oscillation frequency f, the measuring rate of the measuring device 10 can be increased or vice versa.
  • the amplitude A defines the measuring range of the measuring device 10.
  • On the oscillating signal P can be adapted to be performed by the measuring device 10 ⁇ measurement process to the respective measurement task.
  • the evaluation device 37 has an analog filter 50 for filtering the sensor signal S on.
  • the analog Fil ⁇ ter 50 removes high frequency disturbances and sliding parts Chan ⁇ .
  • the analog filter 50 from the sensor signal p can be configured for example as a band pass or as a combination of low and high pass ⁇ .
  • the filtered signal G is then transmitted to an analog-to-digital converter 51.
  • the analog-to-digital conversion takes place synchronously with the oscillation signal P of the signal generator 47.
  • the analog-to-digital converter 51 is designed as a 2-channel converter.
  • the oscillation signal and the filtered signal P G tet it tas ⁇ synchronously and generates from the analog filtered signal G a first digital signal Dl and from the vibration signal P ⁇ a second digital signal D2.
  • the second digi ⁇ tales signal D2 serves as a reference signal for determining the zero position of the first digital signal Dl. This synchronous sampling provides an accurate determination of the zero position securely and increases the accuracy in
  • the sampling frequency is determined taking into account the oscillation frequency f and / or the bandwidth of the analog bandpass 50. Starting from the consideration that the distance d with respect to the oscillation frequency f varies only very slowly, a sub-sampling for digitizing the filtered sensor signal G without Informa ⁇ tion loss may be sufficient.
  • the first digital signal Dl is then evaluated in an evaluation block 52 of the evaluation device 37. At least one value for the distance d is determined.
  • the ⁇ He mediation of the distance value d is done in three steps:
  • the light emitted by the light source 15 of the light The superluminescent diode 16 is fed into the reference light path R and into the measuring light path M of the probe 12.
  • ⁇ probably the most from the reference light R, and the light path of the measuring ⁇ M reflected light is in the interferometer 30 in the first and second optical path LI, L2 divided and then superimposed again to witness an interference to he ⁇ .
  • the interference is detected by the photosensor 35 and transmitted as a sensor signal S to the evaluation unit 37.
  • ⁇ 2 phase of the light of the spot wavelength ⁇ 2 ,
  • ⁇ is a synthetic wavelength that is depen ⁇ gig of the two center wavelengths ⁇ 2 of the X lr
  • the second distance value d 2 is clearly more accurate than the first distance value d i.
  • the factor m 2 is in equation
  • phase values ci, ⁇ 2 are performed to obtain the phase values ci, ⁇ 2 .
  • a third distance value d 3 is determined whose accuracy is further increased.
  • the Be ⁇ statement is reported using the following equation: _L
  • the factor m 3 is the integer value at which the difference between the third distance value d 3 and the second distance value d 2 is minimal.
  • the value ⁇ 0 is determined by calibration and represents a constant. In the evaluation block 52 can also be only one or two of the above to determine the distance value d
  • FIG. 5 shows a modified embodiment of the measuring device 10 is shown.
  • the difference with respect to the embodiment according to FIG. 1 is that the reference surface 27 is not provided on the optical element 25 of the probe 12, but on a separate mirror 57 in the reference light path R.
  • the reference light path R is executed separately from the measuring light path M in this embodiment.
  • a further, fourth monomode fiber 58 is connected to the second monomode fiber 24 via a third fiber coupler 59 for this purpose.
  • the third fiber coupler 59 is inserted into the second single-mode fiber 24 connecting the second fiber coupler 23 to the probe 12.
  • the exemplary embodiment according to FIG. 5 corresponds to the first exemplary embodiment according to FIG. 1, so that reference is made to the above description.
  • the present invention relates to a Messeinrich ⁇ processing and a measurement method for determining an absolute distance value between a probe 12 and an object surface 13.
  • the distance value d of the probe 12 is thereby punctiform Be ⁇ area of the optical axis 14 determines.
  • the measuring device has a light source 15, which emits Bogdanko ⁇ hdtes light. In a measuring light path, the light is M ge ⁇ directed through the probe 12 to the object surface 13 and receive the light reflected there again. Another part of the light of the light source 15 passes through a reference light path R up to a reference surface 27 and from there back. The light reflected on the reference surface 27 and the object surface 13 is fed to an interferometer 30 and there split into a first light path LI and a second light path L2.
  • the two light paths LI, L2 are of different lengths and compensate for the difference between the reference light path R and the measuring light path M.
  • the first interferometer mirror 33 present in the first light path LI oscillates in the direction of the optical axis 40 of the first light path LI.
  • the light from the two Lichtwe ⁇ gen LI, L2 is superimposed and because of the oscillation of the first interferometer mirror 33, a Interfe ⁇ ence pattern forms in the superimposed light, which are detected by a photo sensor 35th
  • the distance value d is determined in an evaluation device 37 connected to the photosensor 35.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un dispositif de mesure et un procédé de mesure pour déterminer une valeur de distance absolue entre une sonde (12) et une surface d'objet (13). La valeur de distance (d) est déterminée ponctuellement dans la zone de l'axe optique (14) de la sonde (12). Le dispositif de mesure présente une source lumineuse (15) qui émet de la lumière à faible cohérence. Sur un chemin optique de mesure (M), la lumière est dirigée par la sonde (12) sur la surface d'objet (13) et la lumière qui y est réfléchie est de nouveau reçue. Une autre partie de la lumière de la source lumineuse (15) parcourt un chemin optique de référence jusqu'à une surface de référence (27) et en revient. La lumière réfléchie sur la surface de référence (27) ainsi que sur la surface d'objet (13) est amenée vers un interféromètre (30) et y est répartie en un premier chemin optique (L1) ainsi qu'en un deuxième chemin optique (L2). Les deux chemins optiques (L1), (L2) sont de longueurs différentes et compensent la différence entre le chemin optique de référence (R) et le chemin optique de mesure (M). Le premier miroir d'interféromètre (33) présent sur le premier chemin optique (L1) oscille en direction de l'axe optique (40) du premier chemin optique (L1). La lumière provenant des deux chemins optiques (L1), (L2) est superposée et des motifs d'interférence se forment dans la lumière superposée en raison de l'oscillation du premier miroir d'interféromètre (33), ces motifs d'interférence étant détectés par un photocapteur (35). La valeur absolue (d) est déterminée dans un dispositif d'évaluation (37) raccordé au photocapteur (35).
PCT/EP2011/058676 2010-06-01 2011-05-26 Dispositif de mesure et procédé de mesure pour mesurer la distance absolue WO2011151255A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010022421.9 2010-06-01
DE201010022421 DE102010022421B4 (de) 2010-06-01 2010-06-01 Messeinrichtung und Messverfahren zur absoluten Abstandsmessung

Publications (1)

Publication Number Publication Date
WO2011151255A1 true WO2011151255A1 (fr) 2011-12-08

Family

ID=44511699

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/058676 WO2011151255A1 (fr) 2010-06-01 2011-05-26 Dispositif de mesure et procédé de mesure pour mesurer la distance absolue

Country Status (2)

Country Link
DE (1) DE102010022421B4 (fr)
WO (1) WO2011151255A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9074862B2 (en) 2011-12-02 2015-07-07 Grintech Gmbh Corrective fiber-optic microprobe for white light interferometric measurements

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ2015348A3 (cs) * 2015-05-22 2017-01-11 Fyzikální ústav AV ČR, v.v.i. Zařízení pro bezkontaktní měření tvaru předmětu
EP3789727B1 (fr) * 2019-09-04 2024-04-10 Taylor Hobson Limited Dispositif de mesure interférométrique

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4596466A (en) * 1980-11-24 1986-06-24 Reinhard Ulrich Method for the measurement of lengths and displacements
DE19808273A1 (de) 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
EP1598635A1 (fr) * 2004-04-15 2005-11-23 Davidson Instruments Conditionneur de signal interféromètrique pour la mesure des déplacements d'un interféromètre Fabry-Pérot
DE102005061464A1 (de) 2005-12-22 2007-07-05 Carl Mahr Holding Gmbh Verfahren und Vorrichtung zur optischen Abstandsmessung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2817030B1 (fr) * 2000-11-17 2003-03-28 Centre Nat Rech Scient Procede et dispositif d'imagerie microscopique interferentielle d'un objet a haute cadence
US20080100848A1 (en) * 2006-10-25 2008-05-01 Koji Kobayashi Optical tomograph

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4596466A (en) * 1980-11-24 1986-06-24 Reinhard Ulrich Method for the measurement of lengths and displacements
DE19808273A1 (de) 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
EP1598635A1 (fr) * 2004-04-15 2005-11-23 Davidson Instruments Conditionneur de signal interféromètrique pour la mesure des déplacements d'un interféromètre Fabry-Pérot
DE102005061464A1 (de) 2005-12-22 2007-07-05 Carl Mahr Holding Gmbh Verfahren und Vorrichtung zur optischen Abstandsmessung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9074862B2 (en) 2011-12-02 2015-07-07 Grintech Gmbh Corrective fiber-optic microprobe for white light interferometric measurements

Also Published As

Publication number Publication date
DE102010022421B4 (de) 2012-01-05
DE102010022421A1 (de) 2011-12-01

Similar Documents

Publication Publication Date Title
DE102008029459B4 (de) Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
EP1379857B1 (fr) Ensemble interferometrique permettant de determiner le temps de propagation de la lumiere dans un echantillon
EP0618439B1 (fr) Dispositif d'imagerie optique pour l'examen de milieux fortement diffusants
DE102005061464B4 (de) Verfahren und Vorrichtungen zur optischen Abstandsmessung
DE19743493C2 (de) Verfahren und Vorrichtung zur Laserfrequenzmessung und -Stabilisierung
WO1988008519A1 (fr) Interferometrie a deux longueurs d'onde avec procede heterodyne optique
DE10041041A1 (de) Interferometeranordnung und Interferometrisches Verfahren
DE10057540A1 (de) Interferometrische Messvorrichtung
DE69920312T2 (de) Erfassung von Luft-Strömungsgeschwindigkeit und -Strömungsrichtung
DE19823951A1 (de) Fokussensor für Hochenergielaser
DE10155203A1 (de) Laserbearbeitungsvorrichtung
DE19504444B4 (de) Interferometeranordnung mit verstellbarer optischer Weglängendifferenz
DE102005023489B4 (de) Positionsmesseinrichtung zur Bestimmung der Position zweier entlang einer Messrichtung zueinander beweglicher Objekte und Verfahren zur Bildung eines Referenzimpulses für eine derartige Positionsmesseinrichtung
DE4400680C2 (de) Vorrichtung zur Bestimmung von Abstandsänderungen eines Objekts
DE102011085599B3 (de) Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
DE19628200A1 (de) Vorrichtung und Verfahren zur Durchführung interferometrischer Messungen
WO2011151255A1 (fr) Dispositif de mesure et procédé de mesure pour mesurer la distance absolue
DE2528209C3 (de) Optischer Feintaster
DE102004053082A1 (de) Positionsmesssystem
EP1314953A2 (fr) Interféromètre et procédé de mesure interférométrique
DE102010062842B9 (de) Verfahren und Vorrichtung zur Bestimmung der absoluten Position eines Objekts
EP1025417B1 (fr) Procede et dispositif de mesure des caracteristiques optiques d'objets transparents et/ou diffusants
DE102011001161B4 (de) Vorrichtung und Verfahren zur interferometrischen Abstandsbestimmung
DE3527245A1 (de) Verfahren und vorrichtung zur laengen- und positionsmessung
DE112006001780T5 (de) Messsystem, das eine modulierte Laserquelle aufweist

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11729386

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11729386

Country of ref document: EP

Kind code of ref document: A1