DE102010022421B4 - Messeinrichtung und Messverfahren zur absoluten Abstandsmessung - Google Patents

Messeinrichtung und Messverfahren zur absoluten Abstandsmessung Download PDF

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Publication number
DE102010022421B4
DE102010022421B4 DE201010022421 DE102010022421A DE102010022421B4 DE 102010022421 B4 DE102010022421 B4 DE 102010022421B4 DE 201010022421 DE201010022421 DE 201010022421 DE 102010022421 A DE102010022421 A DE 102010022421A DE 102010022421 B4 DE102010022421 B4 DE 102010022421B4
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Germany
Prior art keywords
light
light path
measuring device
interferometer
measuring
Prior art date
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DE201010022421
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German (de)
English (en)
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DE102010022421A1 (de
Inventor
Auf Nichtnennung Antrag
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Carl Mahr Holding GmbH
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Carl Mahr Holding GmbH
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Priority to DE201010022421 priority Critical patent/DE102010022421B4/de
Priority to PCT/EP2011/058676 priority patent/WO2011151255A1/fr
Publication of DE102010022421A1 publication Critical patent/DE102010022421A1/de
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Publication of DE102010022421B4 publication Critical patent/DE102010022421B4/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE201010022421 2010-06-01 2010-06-01 Messeinrichtung und Messverfahren zur absoluten Abstandsmessung Active DE102010022421B4 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE201010022421 DE102010022421B4 (de) 2010-06-01 2010-06-01 Messeinrichtung und Messverfahren zur absoluten Abstandsmessung
PCT/EP2011/058676 WO2011151255A1 (fr) 2010-06-01 2011-05-26 Dispositif de mesure et procédé de mesure pour mesurer la distance absolue

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010022421 DE102010022421B4 (de) 2010-06-01 2010-06-01 Messeinrichtung und Messverfahren zur absoluten Abstandsmessung

Publications (2)

Publication Number Publication Date
DE102010022421A1 DE102010022421A1 (de) 2011-12-01
DE102010022421B4 true DE102010022421B4 (de) 2012-01-05

Family

ID=44511699

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201010022421 Active DE102010022421B4 (de) 2010-06-01 2010-06-01 Messeinrichtung und Messverfahren zur absoluten Abstandsmessung

Country Status (2)

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DE (1) DE102010022421B4 (fr)
WO (1) WO2011151255A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306411B6 (cs) * 2015-05-22 2017-01-11 Fyzikální ústav AV ČR, v.v.i. Zařízení pro bezkontaktní měření tvaru předmětu

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011056002A1 (de) * 2011-12-02 2013-06-06 Grintech Gmbh Optisch korrigierende Mikrosonde zur Weißlicht-Interferometrie
EP3789727B1 (fr) * 2019-09-04 2024-04-10 Taylor Hobson Limited Dispositif de mesure interférométrique

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808273A1 (de) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
US20040061867A1 (en) * 2000-11-17 2004-04-01 Arnaud Dubois Method and device for high-speed interferential microscopic imaging of an object
DE102005061464A1 (de) * 2005-12-22 2007-07-05 Carl Mahr Holding Gmbh Verfahren und Vorrichtung zur optischen Abstandsmessung
US20080100848A1 (en) * 2006-10-25 2008-05-01 Koji Kobayashi Optical tomograph

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808273A1 (de) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
US20040061867A1 (en) * 2000-11-17 2004-04-01 Arnaud Dubois Method and device for high-speed interferential microscopic imaging of an object
DE102005061464A1 (de) * 2005-12-22 2007-07-05 Carl Mahr Holding Gmbh Verfahren und Vorrichtung zur optischen Abstandsmessung
US20080100848A1 (en) * 2006-10-25 2008-05-01 Koji Kobayashi Optical tomograph

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306411B6 (cs) * 2015-05-22 2017-01-11 Fyzikální ústav AV ČR, v.v.i. Zařízení pro bezkontaktní měření tvaru předmětu

Also Published As

Publication number Publication date
DE102010022421A1 (de) 2011-12-01
WO2011151255A1 (fr) 2011-12-08

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