WO2011148412A1 - Automated warehouse provided in front of device - Google Patents

Automated warehouse provided in front of device Download PDF

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Publication number
WO2011148412A1
WO2011148412A1 PCT/JP2010/003508 JP2010003508W WO2011148412A1 WO 2011148412 A1 WO2011148412 A1 WO 2011148412A1 JP 2010003508 W JP2010003508 W JP 2010003508W WO 2011148412 A1 WO2011148412 A1 WO 2011148412A1
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WO
WIPO (PCT)
Prior art keywords
shelf
rails
vertical
holding means
automatic warehouse
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Application number
PCT/JP2010/003508
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French (fr)
Japanese (ja)
Inventor
伊藤靖久
Original Assignee
ムラテックオートメーション株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by ムラテックオートメーション株式会社 filed Critical ムラテックオートメーション株式会社
Priority to PCT/JP2010/003508 priority Critical patent/WO2011148412A1/en
Priority to TW100114236A priority patent/TWI483878B/en
Publication of WO2011148412A1 publication Critical patent/WO2011148412A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Definitions

  • the present invention is arranged between an industrial apparatus such as a semiconductor manufacturing apparatus and a passage, temporarily stores an object in which a substrate necessary for manufacturing a semiconductor is accommodated, and sets the mounting place of the object
  • the present invention relates to an automatic warehouse in front of a device that is changed in a shelf.
  • a substrate such as a glass substrate or a silicon substrate
  • a semiconductor manufacturing apparatus from another place, or when a processed substrate is carried out to another place
  • a plurality of substrates are combined with containers, cassettes, pods and the like. It is carried out by being accommodated in a so-called box.
  • the box is transported by a ceiling transport vehicle that travels near the ceiling of the factory, for example, to save space in the semiconductor factory.
  • an automatic warehouse in front of the device that functions as a box buffer is installed.
  • This pre-equipment automatic warehouse is placed above the loader and unloader of the semiconductor manufacturing equipment, and shelves for temporarily storing boxes, and when applicable, the corresponding boxes are automatically transferred from the shelves to the loader.
  • a transfer device capable of transferring a box in which a processed substrate is stored from an unloader to a shelf.
  • Patent Document 1 describes the automatic warehouse in front of the apparatus.
  • the shelf as described in Patent Document 1 is provided with a passage in the horizontal direction or the vertical direction so that the box held by the transfer device can move inside the shelf. Yes.
  • the transfer device attaches a rail for moving the holding means for holding the box in the vertical direction and a rail for moving the rail in the horizontal direction to the shelf. It is arranged.
  • the present invention is intended to provide an automatic warehouse in front of the apparatus that can flexibly cope with these various production systems.
  • an automatic warehouse in front of an apparatus is an automatic warehouse in front of an apparatus that is disposed above a loader / unloader of an industrial apparatus and holds an object that is carried into or out of the industrial apparatus.
  • a plurality of shelves arranged in the vertical direction, the left-right direction perpendicular to the vertical direction, and the front-rear direction perpendicular to both the vertical direction and the left-right direction.
  • a shelf having a passage for passing an object between the shelf plates arranged in a direction, and a transfer for transferring an object placed on one of the shelf plates to the other shelf plate
  • the transfer device includes: a holding unit that detachably holds the object; a front and rear rail that extends in the front-rear direction and is slidably connected to the holding unit in the front-rear direction; Extends left and right with the front and rear rails Left and right rails connected slidably in the direction extending in the vertical direction, is characterized by comprising a vertical rails connected slidably to said longitudinal rails and vertical.
  • shelf boards may be further arranged to place the object at the same height as the object placed on the loader / unloader.
  • the transfer device further includes a reading device that reads identification information included in the object on the front side of the front and rear rails, and the automatic warehouse in front of the device further includes the holding means when reading the identification information of the object. You may provide the control part which performs the control which moves to the front side of a rail.
  • the present invention it is possible to store a large number of objects in the vicinity of an industrial device without eroding the effective space of the factory as much as possible, thereby contributing to an improvement in production efficiency.
  • FIG. 1 is a perspective view showing the entire automatic warehouse in front of the apparatus together with industrial equipment and the like.
  • FIG. 2 is a perspective view showing the automatic warehouse in front of the apparatus together with the industrial apparatus and the like with the cover removed.
  • FIG. 3A is a plan view showing the moving state of the holding means from the side.
  • FIG. 3B is a plan view showing the moving state of the holding means from the side.
  • FIG. 4 is a perspective view showing the shelf 300 with the transfer device omitted.
  • FIG. 5 is a diagram schematically showing a functional configuration of the automatic warehouse in front of the apparatus together with the mechanism unit.
  • FIG. 1 is a perspective view showing the entire automatic warehouse in front of the apparatus together with industrial equipment and the like.
  • FIG. 2 is a perspective view showing the automatic warehouse in front of the apparatus with the cover removed together with the industrial equipment.
  • the automatic pre-warehouse 100 is a warehouse that is disposed above the loader / unloader 201 of the industrial device 200 and holds an object 202 that is carried into or out of the industrial device 200.
  • the transfer apparatus 110 included in the front automatic warehouse 100 is a front side of the industrial apparatus 200 such as a semiconductor manufacturing apparatus, and holds the object 202 in a detachable manner, and extends in the front-rear direction.
  • the front and rear rails 109 slidably connected in the direction, the left and right rails 120 extending in the left and right direction and connected to the front and rear rails 109 and slidable in the left and right directions, and extending in the vertical direction and the front and rear rail 109 in the vertical direction.
  • the shelf 300 provided in the automatic warehouse 100 in front of the apparatus is for passing a target object between a plurality of shelf boards 301 arranged in the vertical direction, the left-right direction, and the front-rear direction, and the shelf board 301 arranged in the left-right direction. And a passage.
  • the support column 101 is a column that is arranged on the front side of the shelf 300 and extends in the vertical direction. In the case of the present embodiment, they are arranged at a slightly wider interval than the width of the industrial apparatus 200, and are arranged so that the plane formed by the two support columns 101 is parallel to the front surface of the apparatus.
  • the left and right rails 120 are members that extend in the left-right direction and are slidably connected to the front-rear rail 109 in the left-right direction.
  • the automatic warehouse 100 in front of the apparatus includes two left and right rails 120 in the vertical direction, and the functions and arrangements of the upper and lower left and right rails 120 are different.
  • the left and right rails 120 are connected to the front and rear rails 109 via the vertical rails 103.
  • the upper left and right rails 120 are members that extend in the horizontal direction and are attached to the front side surfaces of the upper portions of the two columns 101 in a bridging manner.
  • An endless belt for driving the vertical rail 103 in the horizontal direction is provided in the upper left and right rails 120.
  • the lower left and right rails 120 are arranged in a plane virtually formed by the two columns 101 and are arranged below the vertical rails 103, and the two columns with both ends abutting against the lower part of the column 101. It is attached to the support column 101 in a bridging manner.
  • the lower left and right rails 120 are slidably connected to the vertical rail 103. That is, the lower left and right rails 120 and the vertical rail 103 are arranged in the same plane, and the vertical rail 103 moves in the plane.
  • the lower left and right rails 120 and the vertical rail 103 are connected via a pulley case 131.
  • the pulley case 131 and the vertical rail 103 are fixed, and move together in the extending direction of the lower left and right rails 120. If the pulley case 131 has insufficient rigidity, a bracket or the like for connecting the lower left and right rails 120 and the vertical rail 103 may be provided while avoiding the pulley case 131.
  • the vertical rail 103 is a member that extends in the vertical direction and is disposed in a plane including the two support columns 101 and is slidably connected to the side surfaces of the upper left and right rails 120.
  • the vertical rail 103 and the upper left and right rails 120 are arranged so as to overlap in the front-rear direction.
  • 3A and 3B are both plan views showing the moving state of the holding means from the side.
  • the front and rear rail 109 is a member that extends in the front-rear direction (arrow direction in the figure) and is slidably connected to the holding means 105 in the front-rear direction.
  • the front and rear rail 109 is attached in a protruding manner from the vertical rail 103 toward the rear (right direction in the figure), and is slidably connected to the side surface of the vertical rail 103.
  • An endless belt for driving the holding means 105 in the horizontal direction is provided inside the front and rear rail 109.
  • a reading device 140 that reads identification information included in the object 202 is attached to the front side of the front and rear rail 109.
  • the reading device 140 is a non-contact RF reader that can wirelessly read an IC tag included in the object 202.
  • any information reading device such as a barcode reader for reading a barcode provided on the object 202 can be adopted.
  • the holding means 105 is a device that detachably holds the object 202, and is a device that can be guided in the front-rear rail 109 and driven in the front-rear direction as shown in FIGS. 3A and 3B.
  • the object 202 is provided with a holding flange 203 at the top, and the holding means 105 can be inserted and removed by moving in the horizontal direction. In the inserted state, a claw that can engage with the lower surface of the flange 203 to lift the object 202 is provided.
  • the holding means 105 may include a chucking mechanism for holding the object 202 and a driving means for driving the chucking mechanism.
  • the left and right drive means 107 is a device that is attached to the end of the upper left and right rails 120 and drives the vertical rail 103 horizontally.
  • the left and right drive means 107 is driven so as to send the endless belt provided in the upper left and right rails 120 in the forward direction and the reverse direction, and the vertical rail 103 connected to the endless belt is moved upward. It moves in the horizontal direction while being guided by the left and right rails 120 and the lower left and right rails 120.
  • a servo motor can be employed as the left / right driving unit 107.
  • the left and right drive means 107 is not attached to the lower left and right rails 120. This is to widen the lower space on the front side of the transfer device 110. Accordingly, a small drive device may be attached as long as the lower space is not affected.
  • the vertical driving means 108 is a device that is attached to the side of the upper end of the vertical rail 103 and drives the holding means 105 in the vertical direction.
  • the vertical drive means 108 is driven to feed the endless belt provided in the vertical rail 103 in the forward direction or the reverse direction, similarly to the upper left and right rails 120, and is connected to the endless belt.
  • the holding means 105 to be moved moves in the horizontal direction while being guided by the vertical rail 103.
  • a servo motor can be employed as the vertical driving means 108.
  • the upper left and right rails 120 are arranged below the vertical driving means 108, and even if the vertical driving means 108 moves together with the vertical rail 103, the upper left and right rails 120 and the vertical driving means 108 Is not interfering.
  • the front / rear driving means 111 is a device that is attached to the front side of the front / rear rail 109 and drives the holding means 105 in the front / rear direction.
  • the front-rear driving means 111 is driven so as to send the endless belt provided in the front-rear rail 109 in the forward and reverse directions, like the upper left and right rails 120, and is connected to the endless belt.
  • the holding means 105 is moved in the front-rear direction while being guided by the front-rear rail 109.
  • a servo motor can be employed as the front-rear driving means 111.
  • the cover 106 is a wall that separates the person and the transfer device 110 when the transfer device 110 is in operation, and is disposed on the front side of the two columns 101 to cover the entire movable region of the holding means 105. It is a cover.
  • the cover 106 is a plate-like member including a bulging portion 161 that bulges forward to cover the upper left and right rails 120 and extends along the upper left and right rails 120.
  • the cover 106 is provided with three doors 162 below the bulging portion 161, and the transfer device 110 and the loader unloader 201 can be accessed by opening the doors 162. It has become.
  • FIG. 4 is a perspective view showing the shelf 300 with the transfer device omitted.
  • the shelf 300 is disposed above and in front of the loader / unloader 201, temporarily stores the object 202 received from an overhead traveling vehicle, and temporarily stores the object 202 for delivery to the overhead traveling vehicle.
  • a so-called pre-device buffer is disposed above and in front of the loader / unloader 201, temporarily stores the object 202 received from an overhead traveling vehicle, and temporarily stores the object 202 for delivery to the overhead traveling vehicle.
  • the shelf 300 includes a total of nine shelf plates 301 in the vertical direction and three in the left-right direction at the rear of the shelf 300, and all of the shelves 300 have 3 in the vertical direction.
  • positioned 1 sheet is provided in the left and right, respectively.
  • the shelf 300 includes a shelf plate 301 at a position where the object 202 can be placed at the same height as the object 202 placed on the loader / unloader 201. Note that the shelf plate 301 disposed at substantially the same height on the front side of the loader unloader 201 is held by a holding member 311 extending from the support column 101.
  • the shelf 300 includes a passage (an arrow in the figure) extending in the vertical direction between the shelf boards 301, and the object 202 can be moved in the vertical direction and the left-right direction inside the shelf 300. It has become.
  • the shelf plate 301 is not arranged at the center of the entire shelf 300, the object 202 can be moved not only in the vertical direction and the left-right direction but also in the oblique direction. ing.
  • the loader / unloader 201 is a device for carrying a substrate or the like accommodated in the object 202 into the industrial apparatus 200, and accommodating and carrying out a processed substrate or the like in the object 202.
  • the loader unloader 201 also functions as a shelf 300 that temporarily stores the object 202.
  • FIG. 5 is a diagram schematically showing the functional configuration of the automatic warehouse in front of the apparatus together with the mechanism unit.
  • the automatic warehouse 100 in front of the apparatus includes a control unit 141.
  • the control unit 141 is connected to the left / right driving unit 107, the vertical driving unit 108, and the front / rear driving unit 111.
  • the control unit 141 controls these individually (in some cases) to determine the vertical position of the holding unit 105, By determining the position in the left-right direction and the position in the front-rear direction, the object 202 is transferred from one shelf board 301 to another shelf board 301.
  • the control unit 141 controls the front / rear drive unit 111 to move the holding unit 105 to the front side of the front / rear rail 109 as shown in FIGS. 3A and 3B. It is intended to do. Then, identification information and other information provided in the object 202 moved to the near side are acquired from the reading device 140, and the object 202 is managed.
  • a large number of objects 202 can be stored in the vicinity of the industrial device 200 by using the front space or the upper space of the loader / unloader 201 of the industrial device 200. Since all routes for transferring the object 202 are inside the shelf 300, it is not necessary to secure a new space for the transfer. Therefore, many objects can function as a buffer of the industrial apparatus 200 without eroding the effective space in the factory.
  • the loader unloader 201 since the loader unloader 201 includes the shelf 301 at the same level as the level on which the object 202 is placed, the object 202 is carried out from the loader unloader 201 through the closest path, and the object is transferred to the loader unloader 201.
  • the object 202 can be carried in. Therefore, it is possible to contribute to the improvement of the production efficiency of the industrial device 200.
  • the holding means 105 engages with a flange 203 provided at the upper part of the object 202 to transfer the object 202 in a suspended state, and also lifts the object 202 by inserting a nail into the lower part of the object 202.
  • the holding means 105 may be used.
  • the shelf 300 has shown what can mount the target object 202 in 3 steps
  • the loader unloader 201 shown in this Embodiment also mounts the target object 202, The loader unloader 201 also constitutes a part of the shelf 300.
  • left and right rails 120 are shown to be connected to the front and rear rails 109 via the vertical rails 103, but the left and right rails 120 and the front and rear rails 109 are directly connected, and the vertical rails 103 are connected via the left and right rails 120.
  • the front and rear rails 109 may be connected.
  • the present invention can be applied to a buffer that temporarily stores an object in the vicinity of an industrial apparatus such as a semiconductor manufacturing apparatus.

Abstract

An automated warehouse provided in front of a device, comprising: a rack (300) which has shelves (301) arranged in the vertical direction, the left-right direction, and the front-rear direction and which also has a path located between the shelves (301) arranged in the left-right direction, the path allowing an object to pass therethrough; and a transfer device (110) which is disposed in front of the rack (300) and transfers an object (202) to be placed on any of the shelves (301). The transfer device (110) is provided with: a holding means (105) for releasably holding the object (202); a front-rear rail (109) extending in the front-rear direction and connected to the holding means (105) so as to be slidable in the front-rear direction; a left-right rail (120) extending in the left-right direction and connected to the front-rear rail (109) so as to be slidable in the left-right direction; and a vertical rail (103) extending in the vertical direction and connected to the front-rear rail (109) so as to be slidable in the vertical direction.

Description

装置前自動倉庫Automatic warehouse in front of equipment
　本願発明は、半導体製造装置等の産業装置と通路との間に配置され、半導体の製造に必要な基板などが収容される対象物を一時的に保管し、前記対象物の載置場所を前記棚内で変更する装置前自動倉庫に関する。 The present invention is arranged between an industrial apparatus such as a semiconductor manufacturing apparatus and a passage, temporarily stores an object in which a substrate necessary for manufacturing a semiconductor is accommodated, and sets the mounting place of the object The present invention relates to an automatic warehouse in front of a device that is changed in a shelf.
　従来、半導体製造装置に対しガラス基板やシリコン基板等の基板を他の場所から搬入したり、処理済の基板を他の場所に搬出したりする場合、複数枚の基板をコンテナやカセット、ポッドと称される箱に収容して搬送することが行われている。当該箱の搬送は、半導体工場の省スペース化のためなどにより、工場の天井付近を走行する天井搬送車により行われる。 Conventionally, when a substrate such as a glass substrate or a silicon substrate is carried into a semiconductor manufacturing apparatus from another place, or when a processed substrate is carried out to another place, a plurality of substrates are combined with containers, cassettes, pods and the like. It is carried out by being accommodated in a so-called box. The box is transported by a ceiling transport vehicle that travels near the ceiling of the factory, for example, to save space in the semiconductor factory.
　ここで、半導体の製造工程における前工程の進捗や後工程の進捗などにより、天井走行車から受け取り、また、受け渡すための箱を一時的に保管する必要が発生するため、半導体製造装置の近傍には箱のバッファとして機能する装置前自動倉庫が設置される場合がある。この装置前自動倉庫は、半導体製造装置のローダやアンローダの上方に配置され、箱を一時的に保管する棚と、処理可能になれば該当する箱を棚からローダに自動的に移載し、処理済の基板が収容される箱をアンローダから棚に移載することができる移載装置とを備えている。 Here, because it is necessary to temporarily store a box for receiving from the overhead traveling vehicle due to the progress of the previous process or the progress of the subsequent process in the semiconductor manufacturing process, the vicinity of the semiconductor manufacturing apparatus In some cases, an automatic warehouse in front of the device that functions as a box buffer is installed. This pre-equipment automatic warehouse is placed above the loader and unloader of the semiconductor manufacturing equipment, and shelves for temporarily storing boxes, and when applicable, the corresponding boxes are automatically transferred from the shelves to the loader. And a transfer device capable of transferring a box in which a processed substrate is stored from an unloader to a shelf.
　例えば、特許文献１には、上記の装置前自動倉庫が記載されている。特許文献１に記載されるような棚は、省スペース化をできる限り図るために、移載装置が保持する箱が棚の内方で移動できるように水平方向や鉛直方向に通路が設けられている。また、移載装置は、できるだけ通路を広く確保するために、箱を保持する保持手段を鉛直方向に移動させるためのレールと当該レールを水平方向に移動させるためのレールとを棚に張り付くように配置している。 For example, Patent Document 1 describes the automatic warehouse in front of the apparatus. In order to save space as much as possible, the shelf as described in Patent Document 1 is provided with a passage in the horizontal direction or the vertical direction so that the box held by the transfer device can move inside the shelf. Yes. Further, in order to secure a wide passage as much as possible, the transfer device attaches a rail for moving the holding means for holding the box in the vertical direction and a rail for moving the rail in the horizontal direction to the shelf. It is arranged.
特開２００１－２９８０６９号公報JP 2001-298069 A
　ところが、産業装置を備える工場全体においては、同一品種の大量生産や、他品種少量生産など多様な生産体制が採用されており、これらの生産体制を満足させるためには、産業装置の種類によって箱などの対象物を産業装置の近傍により多く保管する必要が発生している。 However, the entire factory equipped with industrial equipment employs a variety of production systems such as mass production of the same product type and small-quantity production of other product types. It is necessary to store more objects such as in the vicinity of industrial equipment.
　本願発明は、これら昨今の多様な生産体制にも柔軟に対応しうる装置前自動倉庫の提供を目的としている。 The present invention is intended to provide an automatic warehouse in front of the apparatus that can flexibly cope with these various production systems.
　上記課題を解決するために、本願発明にかかる装置前自動倉庫は、産業装置のローダアンローダの上方に配置され、前記産業装置に対し搬入または搬出される対象物を保持する装置前自動倉庫であって、鉛直方向、および、鉛直方向と垂直に交差する左右方向、および、鉛直方向と左右方向とのいずれにも垂直に交差する前後方向にそれぞれに複数個配置される棚板を有し、左右方向に配置される前記棚板の間に対象物を通過させるための通路を有する棚と、前記棚のいずれかの前記棚板に載置される対象物を他の前記棚板に移載する移載装置とを備え、前記移載装置は、前記対象物を着脱可能に保持する保持手段と、前後方向に延び、前記保持手段と前後方向に摺動可能に接続される前後レールと、左右方向に延び、前記前後レールと左右方向に摺動可能に接続される左右レールと、鉛直方向に延び、前記前後レールと鉛直方向に摺動可能に接続される鉛直レールとを備えることを特徴としている。 In order to solve the above problems, an automatic warehouse in front of an apparatus according to the invention of the present application is an automatic warehouse in front of an apparatus that is disposed above a loader / unloader of an industrial apparatus and holds an object that is carried into or out of the industrial apparatus. A plurality of shelves arranged in the vertical direction, the left-right direction perpendicular to the vertical direction, and the front-rear direction perpendicular to both the vertical direction and the left-right direction. A shelf having a passage for passing an object between the shelf plates arranged in a direction, and a transfer for transferring an object placed on one of the shelf plates to the other shelf plate The transfer device includes: a holding unit that detachably holds the object; a front and rear rail that extends in the front-rear direction and is slidably connected to the holding unit in the front-rear direction; Extends left and right with the front and rear rails Left and right rails connected slidably in the direction extending in the vertical direction, is characterized by comprising a vertical rails connected slidably to said longitudinal rails and vertical.
　これにより、産業装置のローダアンローダの上方空間により多くの対象物を保管することができ、工場全体の有効スペースをできる限り侵食することなく多様な生産体制に柔軟に対応することが可能となる。 This makes it possible to store a large number of objects in the space above the loader / unloader of the industrial device, and flexibly handle various production systems without eroding the effective space of the entire factory as much as possible.
　また、少なくとも一部の前記棚板はさらに、ローダアンローダに載置される対象物と同じ高さに対象物を載置するように配置されるものでもよい。 Further, at least some of the shelf boards may be further arranged to place the object at the same height as the object placed on the loader / unloader.
　これにより、ローダアンローダの直近に多くの対象物を保管することができ、産業装置の生産効率の向上に寄与することが可能となる。 This makes it possible to store a large number of objects in the immediate vicinity of the loader / unloader and contribute to improving the production efficiency of industrial equipment.
　前記移載装置はさらに、対象物が備える識別情報を読み取る読み取り装置を前記前後レールの前側に備え、前記装置前自動倉庫はさらに、対象物の識別情報を読み取る際に、前記保持手段を前記前後レールの前側に移動させる制御を行う制御部を備えるものでもよい。 The transfer device further includes a reading device that reads identification information included in the object on the front side of the front and rear rails, and the automatic warehouse in front of the device further includes the holding means when reading the identification information of the object. You may provide the control part which performs the control which moves to the front side of a rail.
　これにより、保持手段に読み取り装置を設ける必要が無く、前後レールに対して摺動する保持手段に配線をする必要が無いため、装置構造を単純化することができる。 Thereby, it is not necessary to provide a reading device in the holding means, and it is not necessary to wire the holding means that slides with respect to the front and rear rails, so that the device structure can be simplified.
　また、装置構造が単純で有るにもかかわらず、確実に対象物の識別情報を読み取ることが可能である。 Also, despite the simple structure of the device, it is possible to reliably read the identification information of the object.
　本願発明によれば、工場の有効スペースをできる限り侵食することなく産業装置の近傍に多くの対象物を保管でき、生産効率の向上に寄与することができる。 According to the present invention, it is possible to store a large number of objects in the vicinity of an industrial device without eroding the effective space of the factory as much as possible, thereby contributing to an improvement in production efficiency.
図１は、装置前自動倉庫の全体を産業装置などと共に示す斜示図である。FIG. 1 is a perspective view showing the entire automatic warehouse in front of the apparatus together with industrial equipment and the like. 図２は、カバーを外した装置前自動倉庫を産業装置などと共に示す斜示図である。FIG. 2 is a perspective view showing the automatic warehouse in front of the apparatus together with the industrial apparatus and the like with the cover removed. 図３Ａは、保持手段の移動状態を側面から示す平面図である。FIG. 3A is a plan view showing the moving state of the holding means from the side. 図３Ｂは、保持手段の移動状態を側面から示す平面図である。FIG. 3B is a plan view showing the moving state of the holding means from the side. 図４は、棚３００を移載装置を省略して示す斜示図である。FIG. 4 is a perspective view showing the shelf 300 with the transfer device omitted. 図５は、装置前自動倉庫の機能構成を機構部と共に模式的に示す図である。FIG. 5 is a diagram schematically showing a functional configuration of the automatic warehouse in front of the apparatus together with the mechanism unit.
　次に、本願発明の実施の形態を、図面を参照しつつ説明する。 Next, an embodiment of the present invention will be described with reference to the drawings.
　図１は、装置前自動倉庫の全体を産業装置などと共に示す斜示図である。 FIG. 1 is a perspective view showing the entire automatic warehouse in front of the apparatus together with industrial equipment and the like.
　図２は、カバーを外した装置前自動倉庫を産業装置などと共に示す斜示図である。 FIG. 2 is a perspective view showing the automatic warehouse in front of the apparatus with the cover removed together with the industrial equipment.
　これらの図に示すように、装置前自動倉庫１００は、産業装置２００のローダアンローダ２０１の上方に配置され、産業装置２００に対し搬入または搬出される対象物２０２を保持する倉庫であって、装置前自動倉庫１００が備える移載装置１１０は、半導体製造装置などの産業装置２００の前側であって、対象物２０２を着脱可能に保持する保持手段１０５と、前後方向に延び、保持手段１０５と前後方向に摺動可能に接続される前後レール１０９と、左右方向に延び、前後レール１０９と左右方向に摺動可能に接続される左右レール１２０と、鉛直方向に延び、前後レール１０９と鉛直方向に摺動可能に接続される鉛直レール１０３とを備える。装置前自動倉庫１００が備える棚３００は、鉛直方向、左右方向、前後方向にそれぞれに複数個配置される棚板３０１と、左右方向に配置される棚板３０１の間に対象物を通過させるための通路とを備えている。 As shown in these drawings, the automatic pre-warehouse 100 is a warehouse that is disposed above the loader / unloader 201 of the industrial device 200 and holds an object 202 that is carried into or out of the industrial device 200. The transfer apparatus 110 included in the front automatic warehouse 100 is a front side of the industrial apparatus 200 such as a semiconductor manufacturing apparatus, and holds the object 202 in a detachable manner, and extends in the front-rear direction. The front and rear rails 109 slidably connected in the direction, the left and right rails 120 extending in the left and right direction and connected to the front and rear rails 109 and slidable in the left and right directions, and extending in the vertical direction and the front and rear rail 109 in the vertical direction. And a vertical rail 103 that is slidably connected. The shelf 300 provided in the automatic warehouse 100 in front of the apparatus is for passing a target object between a plurality of shelf boards 301 arranged in the vertical direction, the left-right direction, and the front-rear direction, and the shelf board 301 arranged in the left-right direction. And a passage.
　支柱１０１は、棚３００の前側に配置され、鉛直方向に延びて配置される柱である。本実施の形態の場合、産業装置２００の幅よりも若干広い間隔で配置され、２本の支柱１０１が作る平面が装置の前面と平行となるように配置されている。 The support column 101 is a column that is arranged on the front side of the shelf 300 and extends in the vertical direction. In the case of the present embodiment, they are arranged at a slightly wider interval than the width of the industrial apparatus 200, and are arranged so that the plane formed by the two support columns 101 is parallel to the front surface of the apparatus.
　左右レール１２０は、左右方向に延び、前後レール１０９と左右方向に摺動可能に接続される部材である。本実施の形態の場合、装置前自動倉庫１００は、左右レール１２０を、鉛直方向に２本備えており、上下の左右レール１２０で機能と配置が異なっている。また、左右レール１２０は、鉛直レール１０３を介して前後レール１０９と接続されている。 The left and right rails 120 are members that extend in the left-right direction and are slidably connected to the front-rear rail 109 in the left-right direction. In the case of this embodiment, the automatic warehouse 100 in front of the apparatus includes two left and right rails 120 in the vertical direction, and the functions and arrangements of the upper and lower left and right rails 120 are different. The left and right rails 120 are connected to the front and rear rails 109 via the vertical rails 103.
　上方の左右レール１２０は、水平方向に延びて配置され、２本の支柱１０１の上部の前側面に架橋状に取り付けられる部材である。上方の左右レール１２０の内部には、鉛直レール１０３を水平方向に駆動するための無端ベルトが設けられている。 The upper left and right rails 120 are members that extend in the horizontal direction and are attached to the front side surfaces of the upper portions of the two columns 101 in a bridging manner. An endless belt for driving the vertical rail 103 in the horizontal direction is provided in the upper left and right rails 120.
　下方の左右レール１２０は、２本の支柱１０１が仮想的に形成する平面内に配置され、鉛直レール１０３の下方に配置されており、支柱１０１の下部に両端部がそれぞれ突き合わせた状態で２本の支柱１０１に対して架橋状に取り付けられている。また、下方の左右レール１２０は、鉛直レール１０３と摺動可能に接続されている。つまり、下方の左右レール１２０と鉛直レール１０３とは、同一平面内に配置され、鉛直レール１０３は、前記平面内を移動するものとなっている。 The lower left and right rails 120 are arranged in a plane virtually formed by the two columns 101 and are arranged below the vertical rails 103, and the two columns with both ends abutting against the lower part of the column 101. It is attached to the support column 101 in a bridging manner. The lower left and right rails 120 are slidably connected to the vertical rail 103. That is, the lower left and right rails 120 and the vertical rail 103 are arranged in the same plane, and the vertical rail 103 moves in the plane.
　また、下方の左右レール１２０と鉛直レール１０３とは、プーリーケース１３１を介して接続されている。プーリーケース１３１と鉛直レール１０３とは固定されており、下方の左右レール１２０の延びている方向に共に移動するものとなっている。なお、プーリーケース１３１に剛性が足りない場合などは、プーリーケース１３１を回避しつつ下方の左右レール１２０と鉛直レール１０３とを接続するブラケットなどを設けてもかまわない。 The lower left and right rails 120 and the vertical rail 103 are connected via a pulley case 131. The pulley case 131 and the vertical rail 103 are fixed, and move together in the extending direction of the lower left and right rails 120. If the pulley case 131 has insufficient rigidity, a bracket or the like for connecting the lower left and right rails 120 and the vertical rail 103 may be provided while avoiding the pulley case 131.
　鉛直レール１０３は、鉛直方向に延びて配置されると共に２本の支柱１０１を含む平面内に配置され、上方の左右レール１２０の側面と摺動可能に接続される部材である。鉛直レール１０３と上方の左右レール１２０とは、前後方向に重なり合うように配置されている。 The vertical rail 103 is a member that extends in the vertical direction and is disposed in a plane including the two support columns 101 and is slidably connected to the side surfaces of the upper left and right rails 120. The vertical rail 103 and the upper left and right rails 120 are arranged so as to overlap in the front-rear direction.
　図３Ａ、図３Ｂは、共に、保持手段の移動状態を側面から示す平面図である。 3A and 3B are both plan views showing the moving state of the holding means from the side.
　これらの図に示すように、前後レール１０９は、前後方向（同図中矢印方向）に延び、保持手段１０５と前後方向に摺動可能に接続される部材である。 As shown in these drawings, the front and rear rail 109 is a member that extends in the front-rear direction (arrow direction in the figure) and is slidably connected to the holding means 105 in the front-rear direction.
　本実施の形態の場合、前後レール１０９は、後方（同図中右方向）に向かって鉛直レール１０３から突出状に取り付けられており、鉛直レール１０３の側面と摺動可能に接続されている。また、前後レール１０９の内部には、保持手段１０５を水平方向に駆動するための無端ベルトが設けられている。 In the case of the present embodiment, the front and rear rail 109 is attached in a protruding manner from the vertical rail 103 toward the rear (right direction in the figure), and is slidably connected to the side surface of the vertical rail 103. An endless belt for driving the holding means 105 in the horizontal direction is provided inside the front and rear rail 109.
　また、前後レール１０９の前側には、対象物２０２が備える識別情報を読み取る読み取り装置１４０が取り付けられている。本実施の形態の場合、読み取り装置１４０は、対象物２０２が備えるＩＣタグを無線で読み取ることのできる非接触のＲＦリーダである。なお、読み取り装置１４０は、対象物２０２に設けられたバーコードを読み取るバーコードリーダーなど任意の情報読み取り装置を採用することが可能である。 Also, a reading device 140 that reads identification information included in the object 202 is attached to the front side of the front and rear rail 109. In the case of the present embodiment, the reading device 140 is a non-contact RF reader that can wirelessly read an IC tag included in the object 202. As the reading device 140, any information reading device such as a barcode reader for reading a barcode provided on the object 202 can be adopted.
　保持手段１０５は、対象物２０２を着脱可能に保持する装置であって、図３Ａ、図３Ｂに示すように、前後レール１０９に案内されて、前後方向に駆動することができる装置である。 The holding means 105 is a device that detachably holds the object 202, and is a device that can be guided in the front-rear rail 109 and driven in the front-rear direction as shown in FIGS. 3A and 3B.
　本実施の形態の場合、対象物２０２は、上部に保持用のフランジ２０３が設けられており、保持手段１０５は、水平方向に移動することでフランジ２０３を挿脱可能することができ、フランジ２０３が挿入された状態において、フランジ２０３の下面と係合して対象物２０２を持ち上げることのできるかぎ爪を備えている。 In the case of the present embodiment, the object 202 is provided with a holding flange 203 at the top, and the holding means 105 can be inserted and removed by moving in the horizontal direction. In the inserted state, a claw that can engage with the lower surface of the flange 203 to lift the object 202 is provided.
　なお、保持手段１０５は、対象物２０２を挟み持つためのチャッキング機構と当該チャッキング機構を駆動する駆動手段を備えるものでもよい。 Note that the holding means 105 may include a chucking mechanism for holding the object 202 and a driving means for driving the chucking mechanism.
　左右駆動手段１０７は、上方の左右レール１２０の端部に取り付けられ鉛直レール１０３を水平に駆動する装置である。本実施の形態の場合、左右駆動手段１０７は、上方の左右レール１２０に備えられる無端ベルトを順方向や逆方向に送るように駆動しており、当該無端ベルトに接続される鉛直レール１０３が上方の左右レール１２０や下方の左右レール１２０に案内されながら水平方向に移動するものとなっている。左右駆動手段１０７は、例えばサーボモータなどを採用することが可能である。 The left and right drive means 107 is a device that is attached to the end of the upper left and right rails 120 and drives the vertical rail 103 horizontally. In the case of the present embodiment, the left and right drive means 107 is driven so as to send the endless belt provided in the upper left and right rails 120 in the forward direction and the reverse direction, and the vertical rail 103 connected to the endless belt is moved upward. It moves in the horizontal direction while being guided by the left and right rails 120 and the lower left and right rails 120. For example, a servo motor can be employed as the left / right driving unit 107.
　なお、本実施の形態の場合、下方の左右レール１２０には左右駆動手段１０７は取り付けられていない。これは、移載装置１１０の前側の下部空間を広くするためである。従って、前記下部空間に影響を与えなければ、小型の駆動装置を取り付けてもかまわない。 In the case of this embodiment, the left and right drive means 107 is not attached to the lower left and right rails 120. This is to widen the lower space on the front side of the transfer device 110. Accordingly, a small drive device may be attached as long as the lower space is not affected.
　鉛直駆動手段１０８は、鉛直レール１０３の上端部側方に取り付けられ、保持手段１０５を鉛直方向に駆動する装置である。本実施の形態の場合、鉛直駆動手段１０８は、上方の左右レール１２０と同様に、鉛直レール１０３に備えられる無端ベルトを順方向や逆方向に送るように駆動しており、当該無端ベルトに接続される保持手段１０５が鉛直レール１０３に案内されながら水平方向に移動するものとなっている。鉛直駆動手段１０８は、例えばサーボモータなどを採用することが可能である。 The vertical driving means 108 is a device that is attached to the side of the upper end of the vertical rail 103 and drives the holding means 105 in the vertical direction. In the case of the present embodiment, the vertical drive means 108 is driven to feed the endless belt provided in the vertical rail 103 in the forward direction or the reverse direction, similarly to the upper left and right rails 120, and is connected to the endless belt. The holding means 105 to be moved moves in the horizontal direction while being guided by the vertical rail 103. As the vertical driving means 108, for example, a servo motor can be employed.
　本実施の形態の場合、上方の左右レール１２０は、鉛直駆動手段１０８の下方に配置されており、鉛直レール１０３と共に鉛直駆動手段１０８が移動しても上方の左右レール１２０と鉛直駆動手段１０８とが干渉しないものとなっている。 In the case of the present embodiment, the upper left and right rails 120 are arranged below the vertical driving means 108, and even if the vertical driving means 108 moves together with the vertical rail 103, the upper left and right rails 120 and the vertical driving means 108 Is not interfering.
　前後駆動手段１１１は、前後レール１０９の前側に取り付けられ、保持手段１０５を前後方向に駆動する装置である。本実施の形態の場合、前後駆動手段１１１は、上方の左右レール１２０と同様に、前後レール１０９に備えられる無端ベルトを順方向や逆方向に送るように駆動しており、当該無端ベルトに接続される保持手段１０５が前後レール１０９に案内されながら前後方向に移動するものとなっている。前後駆動手段１１１は、例えばサーボモータなどを採用することが可能である。 The front / rear driving means 111 is a device that is attached to the front side of the front / rear rail 109 and drives the holding means 105 in the front / rear direction. In the case of the present embodiment, the front-rear driving means 111 is driven so as to send the endless belt provided in the front-rear rail 109 in the forward and reverse directions, like the upper left and right rails 120, and is connected to the endless belt. The holding means 105 is moved in the front-rear direction while being guided by the front-rear rail 109. As the front-rear driving means 111, for example, a servo motor can be employed.
　カバー１０６は、移載装置１１０の稼働時においては、人と移載装置１１０とを隔絶する壁であって、２本の支柱１０１の前側に配置され、保持手段１０５の可動領域の全域を覆うカバーである。また、カバー１０６は、上方の左右レール１２０を覆うように前側に膨出し、上方の左右レール１２０に沿って延びる膨出部１６１を備える板状の部材である。本実施の形態の場合、カバー１０６は、膨出部１６１の下方に扉１６２が３枚設けられており、当該扉１６２を空けることで、移載装置１１０や、ローダアンローダ２０１にアクセスできるものとなっている。 The cover 106 is a wall that separates the person and the transfer device 110 when the transfer device 110 is in operation, and is disposed on the front side of the two columns 101 to cover the entire movable region of the holding means 105. It is a cover. The cover 106 is a plate-like member including a bulging portion 161 that bulges forward to cover the upper left and right rails 120 and extends along the upper left and right rails 120. In the case of the present embodiment, the cover 106 is provided with three doors 162 below the bulging portion 161, and the transfer device 110 and the loader unloader 201 can be accessed by opening the doors 162. It has become.
　図４は、棚３００を移載装置を省略して示す斜示図である。 FIG. 4 is a perspective view showing the shelf 300 with the transfer device omitted.
　棚３００は、ローダアンローダ２０１の上方及び前方に配置され、天井走行車などから受け取った対象物２０２を一時的に保管し、天井走行車などに受け渡すための対象物２０２を一時的に保管する、いわゆる装置前バッファである。 The shelf 300 is disposed above and in front of the loader / unloader 201, temporarily stores the object 202 received from an overhead traveling vehicle, and temporarily stores the object 202 for delivery to the overhead traveling vehicle. A so-called pre-device buffer.
　本実施の形態の場合、棚３００は、棚３００の後部に棚板３０１を鉛直方向に３枚、左右方向に３枚の合計９枚備えており、棚３００の全部には、鉛直方向に３枚配置した棚板３０１を左右にそれぞれ備えている。さらに、棚３００は、ローダアンローダ２０１に載置される対象物２０２と同じ高さに対象物２０２を載置しうる位置にも棚板３０１を備えている。なお、ローダアンローダ２０１の前側のほぼ同じ高さに配置される棚板３０１は、支柱１０１から延びる保持部材３１１によって保持されている。 In the case of the present embodiment, the shelf 300 includes a total of nine shelf plates 301 in the vertical direction and three in the left-right direction at the rear of the shelf 300, and all of the shelves 300 have 3 in the vertical direction. The shelf board 301 arrange | positioned 1 sheet is provided in the left and right, respectively. Further, the shelf 300 includes a shelf plate 301 at a position where the object 202 can be placed at the same height as the object 202 placed on the loader / unloader 201. Note that the shelf plate 301 disposed at substantially the same height on the front side of the loader unloader 201 is held by a holding member 311 extending from the support column 101.
　また、棚３００は、棚板３０１の間に上下方向に延びる通路（同図中矢印）を備えており、対象物２０２を棚３００の内方で鉛直方向、及び、左右方向に移動できる構成となっている。本実施の形態の場合、棚３００の全部の中央には棚板３０１が配置されていないため、鉛直方向や左右方向ばかりでなく、斜め方向にも対象物２０２を移動させることができるものとなっている。 In addition, the shelf 300 includes a passage (an arrow in the figure) extending in the vertical direction between the shelf boards 301, and the object 202 can be moved in the vertical direction and the left-right direction inside the shelf 300. It has become. In the case of the present embodiment, since the shelf plate 301 is not arranged at the center of the entire shelf 300, the object 202 can be moved not only in the vertical direction and the left-right direction but also in the oblique direction. ing.
　ローダアンローダ２０１は、産業装置２００に対し、対象物２０２に収容されている基板などを搬入し、また、処理後の基板などを対象物２０２に収容して搬出するための装置である。本実施の形態の場合、ローダアンローダ２０１は、一時的に対象物２０２を保管する棚３００としても機能している。 The loader / unloader 201 is a device for carrying a substrate or the like accommodated in the object 202 into the industrial apparatus 200, and accommodating and carrying out a processed substrate or the like in the object 202. In the case of the present embodiment, the loader unloader 201 also functions as a shelf 300 that temporarily stores the object 202.
　図５は、装置前自動倉庫の機能構成を機構部と共に模式的に示す図である。 FIG. 5 is a diagram schematically showing the functional configuration of the automatic warehouse in front of the apparatus together with the mechanism unit.
　同図に示すように、装置前自動倉庫１００は、制御部１４１を備えている。 As shown in the figure, the automatic warehouse 100 in front of the apparatus includes a control unit 141.
　制御部１４１は、左右駆動手段１０７や、鉛直駆動手段１０８、前後駆動手段１１１と接続されており、これらを個別に（同時の場合もある）制御して、保持手段１０５の鉛直方向の位置、左右方向の位置、前後方向の位置を決定することで、対象物２０２を一の棚板３０１から他の棚板３０１へ移載するものとなっている。 The control unit 141 is connected to the left / right driving unit 107, the vertical driving unit 108, and the front / rear driving unit 111. The control unit 141 controls these individually (in some cases) to determine the vertical position of the holding unit 105, By determining the position in the left-right direction and the position in the front-rear direction, the object 202 is transferred from one shelf board 301 to another shelf board 301.
　また、制御部１４１は、対象物２０２の識別情報を読み取る際に、図３Ａ、図３Ｂに示すように、前後駆動手段１１１を制御して、保持手段１０５を前後レール１０９の前側に移動させる制御を行うものとなっている。そして、手前側に移動させた対象物２０２に備えられている識別情報やその他の情報を読み取り装置１４０から取得して、対象物２０２の管理を行うものとなっている。 In addition, when reading the identification information of the object 202, the control unit 141 controls the front / rear drive unit 111 to move the holding unit 105 to the front side of the front / rear rail 109 as shown in FIGS. 3A and 3B. It is intended to do. Then, identification information and other information provided in the object 202 moved to the near side are acquired from the reading device 140, and the object 202 is managed.
　以上の装置前自動倉庫１００によれば、産業装置２００のローダアンローダ２０１の前方空間や上方空間を利用することで、産業装置２００の近傍に多くの対象物２０２を保管することが可能となる。そして、対象物２０２を移載する経路がすべて棚３００の内方であるため、移載のために新たな空間を確保する必要が不要となる。従って、工場内の有効スペースをあまり侵食することなく多くの対象物を産業装置２００のバッファとして機能させることができる。 According to the automatic pre-warehouse 100 described above, a large number of objects 202 can be stored in the vicinity of the industrial device 200 by using the front space or the upper space of the loader / unloader 201 of the industrial device 200. Since all routes for transferring the object 202 are inside the shelf 300, it is not necessary to secure a new space for the transfer. Therefore, many objects can function as a buffer of the industrial apparatus 200 without eroding the effective space in the factory.
　また、ローダアンローダ２０１が対象物２０２を載置するレベルと同レベルに棚板３０１を備えているため、最も近い経路で、ローダアンローダ２０１から対象物２０２を搬出し、また、ローダアンローダ２０１へ対象物２０２を搬入することが可能となる。従って、産業装置２００の生産効率の向上に寄与することが可能となる。 In addition, since the loader unloader 201 includes the shelf 301 at the same level as the level on which the object 202 is placed, the object 202 is carried out from the loader unloader 201 through the closest path, and the object is transferred to the loader unloader 201. The object 202 can be carried in. Therefore, it is possible to contribute to the improvement of the production efficiency of the industrial device 200.
　また、保持手段１０５により保持した対象物２０２を前方に移動させて上方を読み取る制御を行うことで、配線を簡略化することができ、ケーブルと保持手段１０５とが干渉するような不具合の発生を抑止することが可能となる。 In addition, by controlling the object 202 held by the holding means 105 to move forward and reading the upper side, wiring can be simplified, and the occurrence of a problem that the cable and the holding means 105 interfere with each other is generated. It becomes possible to deter.
　なお、本願発明は、上記実施の形態に限定されるものではない。例えば、保持手段１０５は、対象物２０２の上部に設けられるフランジ２０３と係合し、対象物２０２をつり下げ状態で移送するものばかりでなく、対象物２０２の下部に爪を挿入して持ち上げる方式の保持手段１０５であってもかまわない。また、棚３００は、対象物２０２を縦３段、横３列で載置できるものを示したが、本実施の形態で示したローダアンローダ２０１も対象物２０２が載置されるものであり、ローダアンローダ２０１も棚３００の一部を構成している。また、左右レール１２０が、鉛直レール１０３を介して前後レール１０９と接続されている構成を示したが、左右レール１２０と前後レール１０９とが直接接続され、鉛直レール１０３が、左右レール１２０を介して前後レール１０９と接続されるものでもよい。 Note that the present invention is not limited to the above embodiment. For example, the holding means 105 engages with a flange 203 provided at the upper part of the object 202 to transfer the object 202 in a suspended state, and also lifts the object 202 by inserting a nail into the lower part of the object 202. The holding means 105 may be used. Moreover, although the shelf 300 has shown what can mount the target object 202 in 3 steps | paragraphs and 3 horizontal rows, the loader unloader 201 shown in this Embodiment also mounts the target object 202, The loader unloader 201 also constitutes a part of the shelf 300. Further, the left and right rails 120 are shown to be connected to the front and rear rails 109 via the vertical rails 103, but the left and right rails 120 and the front and rear rails 109 are directly connected, and the vertical rails 103 are connected via the left and right rails 120. The front and rear rails 109 may be connected.
　また、本明細書において記載した構成要素を任意に組み合わせて実現される別の実施の形態を本願発明の実施の形態としてもよい。上記実施の形態に対して本願発明の主旨、すなわち、特許請求の範囲に記載される文言が示す意味を逸脱しない範囲で当業者が思いつく各種変形を施して得られる変形例も本願発明に含まれる。 Further, another embodiment realized by arbitrarily combining the components described in this specification may be used as an embodiment of the present invention. Modifications obtained by subjecting the above embodiments to various modifications conceived by those skilled in the art within the scope of the gist of the present invention, that is, the meanings described in the claims, are also included in the present invention. .
　また、「鉛直」や「平面」「平行」「垂直」などの文言は、本願発明の趣旨を逸脱しない程度の誤差を許容する意味で使用している。 Further, the terms “vertical”, “plane”, “parallel”, “vertical”, and the like are used to allow an error that does not depart from the spirit of the present invention.
　本願発明は、半導体製造装置など産業装置の近傍に対象物を一時的に保管するバッファに適用できる。 The present invention can be applied to a buffer that temporarily stores an object in the vicinity of an industrial apparatus such as a semiconductor manufacturing apparatus.
１００　装置前自動倉庫
１０１　支柱
１０３　鉛直レール
１０５　保持手段
１０６　カバー
１０７　左右駆動手段
１０８　鉛直駆動手段
１０９　前後レール
１１０　移載装置
１１１　前後駆動手段
１２０　左右レール
１３１　プーリーケース
１４０　読み取り装置
１４１　制御部
１６１　膨出部
１６２　扉
２００　産業装置
２０１　ローダアンローダ
２０２　対象物
２０３　フランジ
３００　棚
３０１　棚板
３１１　保持部材 DESCRIPTION OF SYMBOLS 100 Front automatic warehouse 101 Support | pillar 103 Vertical rail 105 Holding means 106 Cover 107 Left-right drive means 108 Vertical drive means 109 Front-rear rail 110 Transfer device 111 Front-rear drive means 120 Left-right rail 131 Pulley case 140 Reading device 141 Control part 161 Swelling part 162 Door 200 Industrial device 201 Loader unloader 202 Object 203 Flange 300 Shelf 301 Shelf plate 311 Holding member

Claims (4)

  1. 　産業装置のローダアンローダの上方に配置され、前記産業装置に対し搬入または搬出される対象物を保持する装置前自動倉庫であって、
    　鉛直方向、および、鉛直方向と垂直に交差する左右方向、および、鉛直方向と左右方向とのいずれにも垂直に交差する前後方向にそれぞれに複数個配置される棚板を有し、左右方向に配置される前記棚板の間に対象物を通過させるための通路を有する棚と、
    　前記棚の前側に配置され、前記棚のいずれかの前記棚板に載置される対象物を他の前記棚板に移載する移載装置とを備え、
    　前記移載装置は、
    　前記対象物を着脱可能に保持する保持手段と、
    　前後方向に延び、前記保持手段と前後方向に摺動可能に接続される前後レールと、
    　左右方向に延び、前記前後レールと左右方向に摺動可能に接続される左右レールと、
    　鉛直方向に延び、前記前後レールと鉛直方向に摺動可能に接続される鉛直レールとを備える
    装置前自動倉庫。     An automatic warehouse in front of a device that is disposed above a loader / unloader of an industrial device and holds an object carried into or out of the industrial device,
    It has a plurality of shelves arranged in the vertical direction, the left-right direction perpendicular to the vertical direction, and the front-rear direction perpendicular to both the vertical direction and the left-right direction. A shelf having a passage for passing an object between the shelves arranged;
    A transfer device that is arranged on the front side of the shelf and transfers an object placed on the shelf plate of any of the shelves to the other shelf plate;
    The transfer device is
    Holding means for detachably holding the object;
    Front and rear rails extending in the front-rear direction and slidably connected to the holding means in the front-rear direction;
    Left and right rails extending in the left-right direction and slidably connected to the front and rear rails in the left-right direction;
    An automatic warehouse in front of the apparatus comprising a vertical rail extending in the vertical direction and connected to the front and rear rails and slidable in the vertical direction.
  2. 　少なくとも一部の前記棚板はさらに、
    　ローダアンローダに載置される対象物と同じ高さに対象物を載置するように配置される
    請求項１に記載の装置前自動倉庫。     At least some of the shelf boards further include
    The automatic warehouse in front of an apparatus according to claim 1, which is arranged so as to place an object at the same height as an object placed on a loader / unloader.
  3. 　前記移載装置はさらに、
    　対象物が備える識別情報を読み取る読み取り装置を前記前後レールの前側に備え、
    　前記装置前自動倉庫はさらに、
    　対象物の識別情報を読み取る際に、前記保持手段を前記前後レールの前側に移動させる制御を行う制御部
    を備える請求項１に記載の装置前自動倉庫。     The transfer device further includes
    A reading device for reading the identification information included in the object is provided on the front side of the front and rear rails,
    The automatic warehouse in front of the device further includes
    The automatic warehouse in front of an apparatus according to claim 1, further comprising a control unit that performs control to move the holding unit to the front side of the front and rear rails when reading identification information of an object.
  4. 　産業装置のローダアンローダの上方に配置され、前記産業装置に対し搬入または搬出される対象物を保持する装置前自動倉庫に適用される前記対象物の識別情報読み取り方法であって、
    　前記装置前自動倉庫は、
    　鉛直方向、左右方向、前後方向にそれぞれに複数個配置される棚板を有し、左右方向に配置される前記棚板の間に対象物を通過させるための通路を有する棚と、
    　前記棚の前側に配置され、前記棚のいずれかの前記棚板に載置される対象物を他の前記棚板に移載する移載装置とを備え、
    　前記移載装置は、
    　前記対象物を着脱可能に保持する保持手段と、
    　前後方向に延び、前記保持手段と前後方向に摺動可能に接続される前後レールと、
    　左右方向に延び、前記前後レールと左右方向に摺動可能に接続される左右レールと、
    　鉛直方向に延び、前記前後レールと鉛直方向に摺動可能に接続される鉛直レールと、
    　前記前後レールの前側に配置され、対象物が備える識別情報を読み取る読み取り装置とを備え、
    　前記対象物を前記保持手段に保持させ、
    　前記保持手段を前記前後レールの前側に移動させ、
    　前記対象物の識別情報を前記読み取り装置で読み取る
    識別情報読み取り方法。     A method for reading identification information of an object, which is disposed above a loader / unloader of an industrial apparatus and applied to an automatic warehouse in front of an apparatus for holding an object carried into or out of the industrial apparatus,
    The automatic warehouse in front of the device is
    A shelf having a plurality of shelves arranged in each of the vertical direction, the left-right direction, and the front-rear direction, and having a passage for passing an object between the shelves arranged in the left-right direction;
    A transfer device that is arranged on the front side of the shelf and transfers an object placed on the shelf plate of any of the shelves to the other shelf plate;
    The transfer device is
    Holding means for detachably holding the object;
    Front and rear rails extending in the front-rear direction and slidably connected to the holding means in the front-rear direction;
    Left and right rails extending in the left-right direction and slidably connected to the front and rear rails in the left-right direction;
    A vertical rail extending in the vertical direction and slidably connected to the front and rear rails in the vertical direction;
    A reading device that is arranged on the front side of the front and rear rails, and that reads identification information included in the object;
    Holding the object on the holding means;
    Moving the holding means to the front side of the front and rear rails;
    An identification information reading method for reading the identification information of the object by the reading device.
PCT/JP2010/003508 2010-05-26 2010-05-26 Automated warehouse provided in front of device WO2011148412A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140137396A (en) * 2012-04-05 2014-12-02 무라다기카이가부시끼가이샤 Conveyance system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6192610U (en) * 1984-11-22 1986-06-16
JP2001509465A (en) * 1997-07-11 2001-07-24 アシスト テクノロジーズ インコーポレイテッド SMIF pod storage, transport and recovery system
JP2003309158A (en) * 2002-04-12 2003-10-31 Tokyo Electron Ltd Handling device
JP2004363363A (en) * 2003-06-05 2004-12-24 Tokyo Electron Ltd Carrying apparatus, processing apparatus and carrying method
JP2008263004A (en) * 2007-04-11 2008-10-30 Rorze Corp Device of delivery and receipt, keeping and feeding of container

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
US20030077153A1 (en) * 2001-10-19 2003-04-24 Applied Materials, Inc. Identification code reader integrated with substrate carrier robot

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6192610U (en) * 1984-11-22 1986-06-16
JP2001509465A (en) * 1997-07-11 2001-07-24 アシスト テクノロジーズ インコーポレイテッド SMIF pod storage, transport and recovery system
JP2003309158A (en) * 2002-04-12 2003-10-31 Tokyo Electron Ltd Handling device
JP2004363363A (en) * 2003-06-05 2004-12-24 Tokyo Electron Ltd Carrying apparatus, processing apparatus and carrying method
JP2008263004A (en) * 2007-04-11 2008-10-30 Rorze Corp Device of delivery and receipt, keeping and feeding of container

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140137396A (en) * 2012-04-05 2014-12-02 무라다기카이가부시끼가이샤 Conveyance system
EP2835325A4 (en) * 2012-04-05 2016-01-06 Murata Machinery Ltd Conveyance system
KR101661633B1 (en) * 2012-04-05 2016-09-30 무라다기카이가부시끼가이샤 Conveyance system
US9845193B2 (en) 2012-04-05 2017-12-19 Murata Machinery, Ltd. Conveyance system

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