201200438 六、發明說明： 【發明所屬之技術領域】 本案之發明有關於一種裝置前自動倉庫，該裝置前自動倉 庫被配置在半導體製造裝置等之產業裝置和通路之間，用來 暫時保管對象物藉以收容半導體之製造所必要之基板等。 【先前技術】 在先前技術中，將玻璃基板或矽基板等之基板從其他場所 搬入半導體製造裝置’或將處理過之基板搬出到其他場所之 情況時’將複數片之基板收容在被稱為容器、或卡！、罐等 之鈿，進行搬運。在該箱之搬運時，經由半導體工廠之省空 間化等，利用在工廠高架附近行走之高架搬送車進行。 在此處，由於半導體之製造步驟中前步驟之進行或後步驟 之進行等，發生需要暫時保管從高架行走車接受或取放之 I目所=在半導體製造裝置之附近設置具有作為箱之缓衝器 功月b之羞置珂自動倉庫。該裝置前自動倉庫具備有：棚，被 配置在半導體製造裝置之裝載器或卸載器之上方，用來暫時 保管該箱；和移載裝置，在可處理的情況下，將該箱自動地 攸娜载料㈣，和將收容有處理過之基板之箱 移載到棚。 執恭 J在專利文獻1記載有上述之裝置前自動倉庫。專利 文獻1所記叙棚為著儘可能輯成省”化，在水 或錯直方向設有通路，使移載裝置所㈣之箱可以在棚之二 100114236 201200438 方移動。另外，移載裝置為確保使通路儘可能地變廣，配置 用來使保持該箱之保持手段在鉛直方向移動之軌道，和用來 使該軌道在水平方向移動之執道，將該等執道貼附在棚。 [先前技術文獻] [專利文獻] 專利文獻1 :日本專利特開2001-298069號公報 【發明内容】 (發明所欲解決之問題） 然而，在具備有產業裝置之工廠全体採用同一品種大量生 產或其他品種少量生產等之多樣生產體制，要滿足該等生產 體制時，需要依照產業裝置之種類，在產業裝置附近保管很 多該箱等之對象物。 本發明之目的是提供一種裝置前自動倉庫，用來彈性地因 應目前多樣之生產體制。 (解決問題之手段） 為解決上述問題’本案發明之裝置前自動倉庫，係配置在 產業裝置之裝載卸載裔之上方，用來保持對上述產業裝置搬 入或搬出之對象物’具備有：棚’具有：棚板，該棚板係在 鉛直方向，和與鉛直方向垂直交又之左右方向，及與鉛直方 向和左右方向之任-方向均垂直交又之前後方向，分別配置 複數個；及通路’在被配置於左右方向之上述棚板之間，用 來使對象物通過；和移餘i ’用來將上述棚之任—上述棚板 100114236 201200438 所載置之對象物移載到其他之上述棚板：上述移載裝置具備 有：保持倾’用㈣上述對象物储成為可裝卸；前後執 道’在前後方向延伸，與上述保持手段連接射在前後方向 滑動；左右軌道，在左右方向延伸，與上述前後軌道連接成 可在左右方向滑動；和鉛直軌道，在鉛直方向延伸，與上述 前後軌道連接成可在錯直方向滑動。 利用此種方式，在產業震置之裝載卸載器之上方空間，可 以保管更多之對象物’可以儘可能地不仙讀全體之有效 空間，可以彈性地因應多樣之生產體制。 另外’亦可以使至少-部分之上述棚板更被配置成與被载 置在裝載㈣器之對象物相同高度而載置對象物。 利用此種方式，可以在裝載卸載器之附近保管更多之對象 物，有助於產業裝置之生產效率之提高。 亦可以使上述移縣置更在上述前後軌道前側具備有讀 取裝置’用來讀取對象物所具備之識別資訊；上述裝置前自 動倉庫更具財㈣部，在讀取縣物之識別 資訊時，用來 進灯使上述保持手段移動到上述前後轨道前側之控制。 利用此種方式，在保持手段不需要設置讀取裝置，在對前 後軌道滑動之保持手段不需要佈線 ，所以可以使裝置之椹、生 單純化。 偁攻 另外—除具有單純的袋置構造，亦可以確實地讀取對象物 100114236 5 a 201200438 (發明致果） 依照本室4 空間，可Z發明時，可以儘可能地不佔用讀全體之有效 於生產置更多^㈣，可以有助 【實施方式】 其次，參照圖 圖1是立體圖 業裝置等。 式用來說明本案之發明之實施形態。 ’用來一起表示裝置前自動倉庫之全體和產 圖2是| w 和產業裴；圖，用來一起表示蓋子拆卸之裝置前自動倉庫 置2〇1 i圖所示’裝置剞自動倉庫100係被配置在產業裝 200搬入。袭載卸載器2〇1之上方，成為用來保持對產業裝置 所具備入或搬出之對象物2〇2之倉庫，裝置前自動倉庫100 八之移載褽置11〇係在半導體製造裝置等之產業裝置 2〇〇之前彳目彳 ’並具備有：保持手段1〇5，用來將對象物2〇2 保持成為可裳卸；前後轨道1〇9，在前後方向延伸，與保持 手奴105連接成可在前後方向滑動；左右軌道12〇，在左右 方向延伸，與前後軌道1〇9連接成可在左右方向滑動；和鉛 直軌道103，在鉛直方向延伸，與前後執道109連接成可在 鉛直方向滑動。裝置前自動倉庫1〇〇所具備之棚3〇〇具備 有··棚板301，分別在鉛直方向、左右方甸、前後方向配置 有複數個；和通路，用來使對象物通過被配置在左右方向之 100114236 6 201200438 棚板301之間。 支柱101被配置在棚300之前側，成為被配置在鉛直方向 延伸之柱。在本實施形態之情況時，以比產業裝置2〇〇之寬 度稍寬之間隔配置，且配置成由2根之支柱1〇1所作成之平 面與裝置之前面呈平行。 左右執道120是在左右方向延伸，與前後軌道1〇9連接成 可在左右方向滑動之構件。在本實施形態之情況時，裝置前 自動倉庫1G0係使左右執道12G在錯直方向具備有2根，而 上下之左右執道120其功能與配置並不同。另外，左右執道 120經由鉛直轨道1〇3形成與前後軌道1〇9連接。 上方之左右軌道12G被配置成在水平方向延伸，成為以架 橋狀安裳在2根支柱則上部之前面側之構件。在上方之左 右軌道120之内部’設有無端皮帶用來在水平方向驅動錯直 轨道103。 下方之左右執道12〇被配置在2根之支柱ι〇ι假想形成之 平面内’配置在鉛直軌道103之下方，以兩端部分別突出到 支柱之下4之狀態，對2根之支柱1〇1安農成為架橋 狀。另外’下方之左右執道12〇與鉛直軌道⑻連接成可滑 動亦即’下方之左右執道120和錯直軌道103配置在同一 平面内，鉛直執道103成為在上述平面内移動。 另外’下方之左右執道12G和錯直執道1G3係經由滑輪箱 131連接。滑輪箱131和錯直執道1〇3被岐，-起在下方201200438 VI. Description of the Invention: [Technical Field] The present invention relates to an automatic warehouse before a device, which is disposed between an industrial device such as a semiconductor manufacturing device and a passage, and is used for temporarily storing an object. It is used to accommodate substrates and the like necessary for the manufacture of semiconductors. [Prior Art] In the prior art, when a substrate such as a glass substrate or a germanium substrate is carried into a semiconductor manufacturing apparatus from another location or when the processed substrate is carried out to another location, the substrate of the plurality of substrates is housed in a Container, or card! After handling, etc., can be carried. At the time of transportation of the container, it is carried out by an overhead transport vehicle that travels near the factory overhead via the space saving of the semiconductor factory. Here, due to the progress of the previous step or the subsequent step in the manufacturing process of the semiconductor, it is necessary to temporarily store the I mesh received or picked up from the overhead traveling vehicle. The smashing power of the moon b is set to be an automatic warehouse. The front automatic warehouse of the device is provided with a shed disposed above the loader or unloader of the semiconductor manufacturing device for temporarily storing the box, and a transfer device that automatically handles the box if it can be handled Na loading (4), and transferring the box containing the processed substrate to the shed. In the patent document 1, the automatic warehouse before the apparatus described above is described. In the description of the patent document 1, in order to save as much as possible, a passage is provided in the water or in the wrong direction, so that the box of the transfer device (4) can be moved in the shed 2100114236 201200438. In addition, the transfer device In order to ensure that the passage is made as wide as possible, the track for holding the holding means of the box in the vertical direction and the obstruction for moving the track in the horizontal direction are attached to the shed. [Prior Art Document] [Patent Document] Patent Document 1: JP-A-2001-298069 (Summary of the Invention) (Problems to be Solved by the Invention) However, in the factory equipped with an industrial device, the same variety is mass-produced. In order to satisfy these production systems, it is necessary to store a large number of objects such as boxes in the vicinity of industrial devices in accordance with the types of industrial devices. The object of the present invention is to provide an automatic warehouse in front of the device. Used to flexibly respond to the current diverse production system. (Means for solving the problem) In order to solve the above problems, the automatic warehouse in front of the device of the present invention, It is disposed above the loading and unloading person of the industrial device, and is used to maintain the object to be moved in or out of the industrial device. The shed has a shed, which is in a vertical direction and perpendicular to the vertical direction. The left and right directions, and the vertical direction and the left and right directions are perpendicular to each other and the front and rear directions are respectively arranged in plurality; and the passages are disposed between the above-mentioned partition plates in the left and right direction for passing the object And the shifting i' is used to transfer the object placed on the shed plate 100114236 201200438 to the other slats: the transfer device is provided with: (4) the object storage It becomes detachable; the front and rear roads extend in the front-rear direction, and are connected to the above-mentioned holding means to slide in the front-rear direction; the left and right rails extend in the left-right direction, and are connected to the front and rear rails so as to be slidable in the left-right direction; and the vertical rails are vertically The direction extension is connected with the above-mentioned front and rear rails so as to be slidable in the wrong direction. In this way, the space above the loading and unloading device of the industrial shock is empty. In the meantime, you can store more objects. You can read the entire effective space as much as possible, and you can flexibly respond to various production systems. In addition, you can make at least part of the above-mentioned slabs more configured and loaded. The object placed on the loading device can be placed at the same height and placed on the object. In this way, more objects can be stored in the vicinity of the loading and unloading device, which contributes to the improvement of the production efficiency of the industrial device. In the front side of the front and rear rails, the shifting device is provided with a reading device for reading the identification information of the object; the automatic warehouse in front of the device is more financial (four), and is used when reading the identification information of the county object. The feed lamp moves the holding means to the front side of the front and rear rails. In this manner, the holding means does not need to be provided with a reading means, and the means for holding the front and rear rails does not require wiring, so that the apparatus can be made Simplified. In addition to having a simple bag structure, it is also possible to accurately read an object 100114236 5 a 201200438 (Inventive fruit) According to the space of the room 4, when Z is invented, it can be used as much as possible without taking up the whole reading. In the production, more (4) can be used. [Embodiment] Next, referring to Fig. 1, a stereoscopic device and the like are provided. The formula is used to illustrate the embodiment of the invention of the present invention. 'To use together to represent the whole warehouse before the device and the production map 2 is | w and industry 裴; diagram, used to indicate the device before the cover disassembly, the automatic warehouse is placed 2〇1 i picture shows the 'device 剞 automatic warehouse 100 series It is placed in the industrial equipment 200 to move in. Above the loader unloader 2〇1, it becomes a warehouse for holding the object 2〇2 that is placed in or out of the industrial device, and the automatic warehouse 100 before the device is placed in the semiconductor manufacturing facility. The industrial installation 2〇〇〇〇彳彳 has the following: maintenance means 1〇5, used to keep the object 2〇2 as a detachable; front and rear track 1〇9, extending in the front and rear direction, and keeping the slave 105 is connected to be slidable in the front-rear direction; the left and right rails 12 〇 extend in the left-right direction, and are connected to the front and rear rails 1〇9 so as to be slidable in the left-right direction; and the vertical rails 103 extend in the vertical direction and are connected to the front and rear lanes 109. It can slide in the vertical direction. The shed 3, which is provided in the front of the automatic warehouse, is provided with a plurality of sheds 301, and a plurality of sheds 301 are arranged in the vertical direction, the left and right sides, and the front and rear directions, and a passage for arranging the object through 100114236 6 201200438 in the left and right direction between the sheds 301. The pillar 101 is disposed on the front side of the shed 300, and is a column that is disposed to extend in the vertical direction. In the case of the present embodiment, it is disposed at a slightly wider width than the width of the industrial unit 2, and is arranged such that the plane formed by the two pillars 1〇1 is parallel to the front surface of the apparatus. The right and left lanes 120 are members that extend in the left-right direction and are connected to the front and rear rails 1 to 9 so as to be slidable in the left-right direction. In the case of the present embodiment, the pre-installation automatic warehouse 1G0 has two left and right lanes 12G in the wrong direction, and the upper and lower lanes 120 have different functions and arrangements. Further, the right and left lanes 120 are connected to the front and rear rails 1 to 9 via the vertical rails 1〇3. The upper left and right rails 12G are arranged to extend in the horizontal direction, and are members that are bridge-shaped and are placed on the front side of the upper portion of the two pillars. An inner end of the upper left and right rails 120 is provided with an endless belt for driving the staggered rail 103 in the horizontal direction. The left and right sides of the road 12 are arranged in the plane of the two pillars ι〇ι imaginary formation, which is disposed below the vertical rail 103, and protrudes to the lower side of the pillar 4 at both ends, respectively. 1〇1 Annon became bridging. Further, the left and right left and right lanes 12 are connected to the vertical rails (8) so as to be slidable, that is, the lower left and right lanes 120 and the straight rails 103 are arranged in the same plane, and the vertical lanes 103 are moved in the above plane. Further, the left and right sides 12G and the wrong straight line 1G3 are connected via the pulley case 131. The pulley box 131 and the wrong straight line 1〇3 are smashed, up from below
100114236 S 201200438 之左右執道120之延伸方向移動。为外，在滑輪箱131之剛 性不足之情況等，亦可以回避滑輪箱131，同時設置支架等 用來連接下方之左右軌道120和鉛直軌道1〇3。 錯直轨道103係在錯直方向延伸酌置並且配置在包合有2 根之支柱101之平面内，成為可以與上方之左右軌道120 側面連接成可滑動之構件。鉛直執道103和上方之左右執道 120係配置成在前後方向重疊。 圖3A、圖3B是俯視圖’均用來表示從側面看保持手段 之移動狀態。 如該等之圖所示，前後執道1〇9在前後方向（該圖中之箭 頭方向）延伸’成為與保持手段1〇5連接成可以在前後方向 滑動之構件。 在本實施形態之情況時，前後執道109安裝成朝向後方 (忒圖中之右方）從船直執道1〇3突出，與錯直軌道 之側面連接成可滑動。另外，在前後軌道109之内部設有無 端皮帶用來在水平方向驅動保持手段1〇5。 另外，在前後執道109之前侧安裝有讀取裝置14〇，用來 讀取對象物观所具叙識別資訊。在本實施形態之情況 時，讀取裝置140為非接觸之RF讀取器，可以以無線讀取 對象物202所具備之1(：標籤。另外，讀取裝置14〇可以採 用條碼讀取H等任意資tfl讀取|置，錄讀取被設在對象物 202之條碼。 100114236 201200438 保持手段105是用以將對象物202保持成為可裝卸之裝 置’如圖3A、圖3B所示，成為被前後執道109導引，可 以在前後方向驅動之裝置。 在本實施形態之情況時’對象物202在上部設有保持用之 突緣203 ’保持手段1〇5具備有爪部，經由在水平方向移動 可以插脫突緣203，在突緣203被插入之狀態，與突緣203 之下面接合可以用來將對象物202上舉。 另外，保持手段105亦可以具備有夹持對象物202用之包 夾機構，和用來驅動該包夾機構之驅動手段。 左右驅動手段107是用來水平驅動被安裝在上方之左右 軌道120端部之鉛直軌道1〇3之裝置。在本實施形態之情況 時’左右驅動手段1〇7驅動上方之左右轨道12〇所具備之無 端皮帶，使其在順方向或逆方向傳送，連接到該無端皮帶之 鉛直軌道103被上方之左右軌道12〇或下方之左右執道12〇 導引同時在水平方向移動。左右驅動手段107可以採用例如 伺服馬達等。 另外，在本實施形態之情況時，在下方之左右軌道120 未女裝有左右驅動手段1〇7。亦即，用來使移載裝置ho之 刖侧之下部空間變大。因此，只要不會對下部空間造成影 響’亦可以安裝小型之驅動裝置。 鉛直驅動手段1〇8被安裝在鉛直執道1〇3之上端部側方， 成為在鉛直方向驅動保持手段1〇5之裝置。在本實施形態之100114236 S 201200438 The direction of the left and right lanes 120 moves. In addition, in the case where the rigidity of the pulley case 131 is insufficient, the pulley case 131 may be avoided, and a bracket or the like may be provided to connect the left and right rails 120 and the vertical rails 1〇3. The staggered rail 103 is disposed in a plane extending in the wrong direction and disposed in a plane in which the two pillars 101 are included, and is a member that can be slidably coupled to the side surfaces of the upper and lower rails 120. The lead line 103 and the upper left and right lanes 120 are arranged to overlap in the front-rear direction. 3A and 3B are plan views showing the moving state of the holding means as viewed from the side. As shown in the figures, the front and rear lanes 1〇9 extend in the front-rear direction (the direction of the arrow in the figure) to be connected to the holding means 1〇5 so as to be slidable in the front-rear direction. In the case of this embodiment, the front and rear lanes 109 are attached so as to protrude rearward (to the right in the figure) from the ship straight lane 1〇3, and are slidably connected to the side surface of the staggered rail. Further, an endless belt is provided inside the front and rear rails 109 for driving the holding means 1〇5 in the horizontal direction. Further, a reading device 14A is mounted on the front side of the front and rear lanes 109 for reading the identification information of the object object. In the case of the present embodiment, the reading device 140 is a non-contact RF reader, and can read the 1 (: tag) of the object 202 wirelessly. In addition, the reading device 14 can read the barcode using a barcode. And the recording is set to the bar code of the object 202. 100114236 201200438 The holding means 105 is a device for holding the object 202 as a detachable device, as shown in FIG. 3A and FIG. 3B. In the case of the present embodiment, the object 202 is provided with a flange 203 for holding the upper portion of the object 202. The holding means 1〇5 is provided with a claw portion. The horizontal direction can be inserted into the flange 203, and the flange 203 can be inserted into the lower surface of the flange 203 to lift the object 202. The holding means 105 can also be provided with the object 202. The clamping mechanism and the driving means for driving the clamping mechanism. The left and right driving means 107 is means for horizontally driving the vertical rails 1〇3 attached to the upper ends of the left and right rails 120. In this embodiment Situation When the left and right driving means 1 〇 7 drives the endless belt provided on the left and right rails 12 上方 above, the belt is conveyed in the forward direction or the reverse direction, and the vertical rail 103 connected to the endless belt is slid by the upper left and right rails 12 or below. The right and left driving guides are simultaneously moved in the horizontal direction. The left and right driving means 107 can be, for example, a servo motor or the like. Further, in the case of the present embodiment, the left and right rails 120 are not worn by the women and women. That is, it is used to make the space below the side of the transfer device ho larger. Therefore, as long as it does not affect the lower space, a small driving device can be installed. The vertical driving means 1〇8 is installed in the lead. The side of the upper end of the channel 1〇3 is a device for driving the holding means 1〇5 in the vertical direction.
S 100114236 9 201200438 情況時，鉛直驅動手段108與上方之左右軌道120同樣地， 驅動鉛直執道103所具備之無端皮帶，使其在順方向或逆方 向傳送，連接到該無端皮帶之保持手段1〇5被鉛直執道103 導引同時在水平方向移動。鉛直驅動手段1〇8可以採用例如 伺服馬達等。 在本實施形態之情況時，上方之左右軌道丨2 〇被配置在鉛 直驅動手段108之下方’當鉛直執道1〇3和鉛直驅動手段 108 —起移動時，上方之左右執道12〇和鉛直驅動手段1〇8 亦不會互相干涉。 前後驅動手段111安裴在前後軌道109之前側，成為在前 後方向驅動保持手段105之襞置。在本實施形態之情況時， 則後驅動手段ill係與上方之左右軌道12()同樣地，驅動前 後執道109所具備之無端皮帶，使其在順方向或逆方向傳 运’連接到該無端皮帶之保持手段1〇5被前後軌道1〇9導引 同時在則後方向移動。前後驅動手段U1可以採用例如伺服 馬達等。 盍子106在移載裝置u〇之動作時，成為用來隔絕人和移 載裝置110之壁，被配置在2根之支柱1〇1之前側，而成為 用以覆盖在保持手段1〇5之可動區域全體區域之蓋子。另 外’蓋子106以覆蓋在上方之左右軌道120之方式膨出到前 側’為具備有沿著上方之左右軌道12G之膨出部161之板狀 構件。在本實施形態之情況時，蓋子106在膨出部161之下 100114236 201200438 方設有3個門162, 或裝载卸載器201 經由將該門162打開可以對移載裝 進行存取。 置110 圖4是將移載裝置省略表示棚300之立體圖。 :〇0被配綱載卸載器2〇1之上方和前方，成為所謂 衝區，料暫時保管自高架行走料所接受之對 和對同木行走車等暫時保管並取放對象物202。 在本實施形態之情況，棚3〇〇在棚3〇〇之後部具備有在錯 直方向為3片’在左右方向為3片合計9片之棚板3〇ι，在 棚通之全部分別在左右具備有配置在錯直方向之3片棚板 30卜另外，棚300在與被載置於裝載卸載器2〇1之對象物 2〇2相同高度可載置對象物搬之位置，亦具傭有棚板3〇1。 另外’被配置在裝載卸載器2〇1之前側大致相同高度之棚板 301，由從支柱1〇1延伸之保持構件31丨保持。 另外’棚300具備有在棚板3〇1之間於上下方向延伸之通 路（°亥圖中之箭頭），構成為使對象物202在棚300之内方 且於釔直方向和左右方向移動。在本實施形態之情況，在棚 300全部之中央未配置有棚板3〇1，所以不只是鉛直方向或 左右方向’亦可以使對象物202在傾斜方向移動。 裝載卸载器201是對產業裝置200搬入被收容在對象物 2〇2之基板等，或搬出處理後之基板等，將其收容在對象物 202之裝置。在本實施形態之情況時，裝載卸載器2〇1具有 作為暫時保管對象物202之棚300之功能。 100114236 11 201200438 圖5係表示裝置前自動倉庫之功能構造和機構部之模式 圖。 如該圖所示，裝置前自動倉庫100具備有控制部141。 控制部141係與左右驅動手段1〇7或鉛直驅動手段108、 前後驅動手段111連接，個別地（亦可以同時地）控制該等， 經由決定保持手段105之鉛直方向之位置、左右方向之位 置、前後方向之位置，用來將對象物202從一個棚板301 移載到其他之棚板3〇 1。 控制部141在讀取對象物202之識別資訊時，如圖3A、 圖3B所不，控制前後驅動手段in，進行使保持手段1〇5 移動到剷後執道1〇9前側之控制。然後，從讀取裝置 取得移動到近前側之對象物搬所具備之識別資訊、或其他 資说’用來進行對象物202之管理。 依照以上之震置前自動倉庫刚日γ，經由利用產業裝 200之裝細載器2()1《前方空間或上方空間，可以在產 裝置200之附近保管报多之對象物加。另外，因為移載 象物2〇2<路徑全部在棚300之内方，所以不需要確保移 用之新的空間。因此，不會大幅佔用工廠内 以=很多之對象物，可以具有作為產業裝置咖之缓衝 100114236 S' 12 201200438 201搬出對象物2〇2，或將對象物2〇2搬入到裝载卸载哭 2〇ι。因此，有助於產業裝置200之生產效率之提高。 另外，使保持手段105所保持之對象物2〇2移動到前方， 經由進行讀取上方之控制，可以使佈線簡化，可以抑制纜線 和保持手段1〇5之互相干涉之問題之發生。 另外，本案之發明並不只限於上述之實施形態。例如，保 持手段105不只可以接合在設於對象物202之上部之突緣 2〇3，以吊下狀態移送對象物2〇2，亦可成為以爪插入並上 舉到對象物202下部的方式之保持手段105 ^另外，棚3〇〇 所不者是可以以縱3段橫3列載置對象物2〇2者，但是本實 施形態所示之裝載卸載器201亦可以成為載置對象物2〇2 者’裝载卸載器201亦構成棚300之一部分。另外，所示之 構造是左右軌道120經由鉛直執道1〇3形成與前後轨道1〇9 連接’但是亦可以使左右軌道12〇和前後執道1〇9直接連 接，鉛直軌道103經由左右執道120形成與前後軌道1〇9 連接。 另外’亦可以將本說明書所記載之構成元件任意地組合， 使所貫現之其他實施形態作為本案之發明之實施形態。對於 上述之實施形態，在不脫離本案發明之主旨，亦即在不脫離 申睛專利範圍所記載之文句所示之意思之範圍，可以施加業 者所想到之各種變化，所獲得之變化例亦被包含在本案之發 明。S 100114236 9 201200438 In the case of the left and right rails 120, the vertical driving means 108 drives the endless belt provided in the lead straight track 103 to be conveyed in the forward or reverse direction, and is connected to the endless belt holding means 1 〇5 is guided by the lead trajectory 103 while moving horizontally. The vertical driving means 1 〇 8 can be, for example, a servo motor or the like. In the case of the present embodiment, the upper left and right rails 〇2 〇 are disposed below the vertical driving means 108. When the lead trajectory 1 〇 3 and the vertical driving means 108 move together, the upper left and right sides are 12 〇 and The vertical drive means 1〇8 will not interfere with each other. The front and rear driving means 111 are mounted on the front side of the front and rear rails 109, and are placed in the front and rear directions to drive the holding means 105. In the case of the present embodiment, the rear drive means ill drives the endless belt provided in the front and rear lanes 109 in the same manner as the upper and lower rails 12 (), and transmits it in the forward or reverse direction. The endless belt holding means 1〇5 is guided by the front and rear rails 1〇9 while moving in the subsequent direction. The front and rear driving means U1 can be, for example, a servo motor or the like. When the transfer device u is operated, the dice 106 serves as a wall for isolating the person and the transfer device 110, and is disposed on the front side of the two pillars 1〇1, and is used to cover the holding means 1〇5. The cover of the entire area of the movable area. Further, the cover 106 is bulged to the front side so as to cover the right and left rails 120, and is a plate-like member provided with the bulging portion 161 along the upper and lower rails 12G. In the case of this embodiment, the cover 106 is provided with three doors 162 under the bulging portion 161 100114236 201200438, or the loading unloader 201 can access the transfer device by opening the door 162. FIG. 4 is a perspective view showing the transfer device omitted from the display booth 300. 〇0 is placed above and in front of the unloader 2〇1, and is a so-called rushing area. The material is temporarily stored in a pair that is received by the overhead traveling material, and is temporarily stored and picked up and placed on the same wooden traveling vehicle. In the case of the present embodiment, the shed 3 has three slabs 3 in the wrong direction in the rear of the shed, and three slabs in the left-right direction. In the left and right sides, there are three slats 30 arranged in the wrong direction. In addition, the shed 300 can be placed at the same height as the object 2 〇 2 placed on the loading and unloading device 2〇1. There is a shed with a shed 3〇1. Further, the panel 301 disposed at substantially the same height on the front side of the loading unloader 2〇1 is held by the holding member 31丨 extending from the pillar 1〇1. Further, the shed 300 is provided with a passage extending in the vertical direction between the slabs 3〇1 (an arrow in the shovel), and is configured such that the object 202 moves inside the shed 300 in the vertical direction and the left-right direction. . In the case of the present embodiment, since the slabs 3〇1 are not disposed in the entire center of the shed 300, the object 202 can be moved in the oblique direction not only in the vertical direction or the left-right direction. The loading/unloading device 201 is a device that carries the substrate or the like housed in the object 2〇2 to the industrial device 200, or the substrate after the unloading process, and stores the object in the object 202. In the case of the present embodiment, the loading and unloading device 2〇1 has a function as a shed 300 for temporarily storing the object 202. 100114236 11 201200438 Figure 5 is a schematic diagram showing the functional structure and mechanism of the automatic warehouse in front of the device. As shown in the figure, the pre-installation automatic warehouse 100 is provided with a control unit 141. The control unit 141 is connected to the left and right driving means 1〇7, the vertical driving means 108, and the front and rear driving means 111, and individually (may also simultaneously) control the position of the holding means 105 in the vertical direction and the position in the left and right direction. The position in the front-rear direction is used to transfer the object 202 from one shelf 301 to the other shelf 3〇1. When the identification information of the object 202 is read, the control unit 141 controls the front and rear driving means in to control the front and rear driving means in, and controls the holding means 1 〇 5 to move to the front side of the shovel rear path 1 〇 9 when the identification information of the object 202 is read. Then, the identification information provided by the object moving to the near side is acquired from the reading device, or the other asset is used to manage the object 202. According to the above-mentioned automatic warehouse γ immediately before the shock, the object can be stored in the vicinity of the production device 200 by using the front loader 2 (1) in the front loading space or the upper space. In addition, since the transfer object 2〇2<the path is entirely inside the shed 300, there is no need to ensure a new space for the transfer. Therefore, it is not necessary to take up a large number of objects in the factory, and it is possible to carry out the object 2〇2 as a buffer for the industrial device, 100114236 S' 12 201200438 201, or move the object 2〇2 into the loading and unloading cry. 2〇ι. Therefore, it contributes to an increase in the production efficiency of the industrial device 200. Further, by moving the object 2〇2 held by the holding means 105 to the front, the wiring can be simplified by controlling the upper reading, and the problem of interference between the cable and the holding means 1〇5 can be suppressed. Further, the invention of the present invention is not limited to the above embodiments. For example, the holding means 105 can be joined not only to the flange 2〇3 provided on the upper portion of the object 202, but also to the object 2〇2 in a suspended state, or to be inserted into the lower portion of the object 202 by the claw. In the case of the shed 3, the object 2 〇 2 can be placed in three vertical rows and three columns. However, the load unloader 201 shown in the present embodiment can also be placed on the object. The 2'-loader unloader 201 also forms part of the shed 300. In addition, the configuration shown is that the left and right rails 120 are connected to the front and rear rails 1〇9 via the lead line 1〇3, but the left and right rails 12〇 and the front and rear rails 1〇9 can also be directly connected, and the vertical rails 103 are connected by left and right. The track 120 is formed to be connected to the front and rear rails 1〇9. Further, the constituent elements described in the present specification may be arbitrarily combined, and other embodiments that have been realized may be used as an embodiment of the invention of the present invention. In the above-described embodiments, various changes that are thought of by the operator can be applied without departing from the gist of the invention, that is, without departing from the scope of the meaning of the document described in the scope of the patent application. Included in the invention of this case.
100114236 13 S 201200438 另外，「鉛直」、「平面」、「平行」或「垂直」等文句意思 之使用，容許在不脫離本案之主旨之程度之誤差。 (產業上之可利用性） 本案之發明可適用在用來暫時保管半導體製造裝置等之 產業裝置之附近之對象物之緩衝器。 【圖式簡單說明】 圖1是立體圖，用來一起表示裝置前自動倉庫之全體和產 業裝置等。 圖2是立體圖，用來一起表示將蓋子拆卸之裝置前自動倉 庫和產業裝置等。 圖3A是俯視圖，用來表示從側面看之保持手段之移動狀 態。 圖3B是俯視圖，用來表示從側面看之保持手段之移動狀 態。 圖4是立體圖，用來表示將移載裝置省略之棚300。 圖5係用來一起表示裝置前自動倉庫之功能構造和機構 部之模式圖。 【主要元件符號說明】 100 裝置前自動倉庫 101 支柱 103 錯直執道 105 保持手段 100114236 14 蓋子 左右驅動手段 鉛直驅動手段 前後軌道 移載裝置 前後驅動手段 左右軌道 滑輪箱 讀取裝置 控制部 膨出部 門 產業裝置 裝載卸載器 對象物 突緣 棚 棚板 保持構件100114236 13 S 201200438 In addition, the use of the terms “vertical”, “planar”, “parallel” or “vertical” allows for errors in the degree of the subject matter of the case. (Industrial Applicability) The invention of the present invention can be applied to a buffer for temporarily storing an object in the vicinity of an industrial device such as a semiconductor manufacturing apparatus. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a whole of an automatic warehouse in front of a device, an industrial device, and the like. Fig. 2 is a perspective view showing the automatic storage and industrial equipment before the device for detaching the cover. Fig. 3A is a plan view showing the state of movement of the holding means as viewed from the side. Fig. 3B is a plan view showing the state of movement of the holding means as viewed from the side. Fig. 4 is a perspective view showing a shed 300 in which the transfer device is omitted. Fig. 5 is a schematic view showing the functional configuration and the mechanism of the automatic warehouse in front of the apparatus together. [Main component symbol description] 100 Pre-installation automatic warehouse 101 Pillar 103 Wrong straight road 105 Holding means 100114236 14 Left and right driving means of the lid Vertical driving means Front and rear rail transfer device Front and rear driving means Left and right track pulley box Reading device Control part Bulging department Industrial device loading and unloading device object flange shed plate holding member
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