201139239 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種搬送車系統’尤其係關於一種包括在複 數個處理裝置之間沿著軌道行駛之搬送車之搬送車系統。 【先前技術】 眾所周知有一種用以搬送經大型化之玻璃基板或收納有 複數片該玻璃基板之匣盒的搬送車。搬送車於工廠内之無塵 室内自動行駛而於處理裝置之間搬送物品。 供搬送車行駛之執道為例如自頂棚垂下來之軌道或地面 上所設置之軌道。於該情形時，執道及搬送車行駛之空間成 為與外部遮斷之無塵室。 於平台設置有採用選擇順應性裝配機器手臂（SCARA arm，Selective Compliance Assembly Robot Arm)之移載裳 置。採用選擇順應性裝配機器手臂之移載裝置係將玻璃基板 或匣盒自搬送車移載至平台之載置地點，與此相反，將玻璃 基板或匣盒自平台之載置地點移載至搬送車(例如，參照專 利文獻1)。又’亦眾所周知有一種在搬送車設置有採用選 擇順應性裝配機器手臂之移載裝置之型態。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2001-294302號公報 【發明内容】 100102076 3 201139239 (發明所欲解決之問題） 另一方面’考慮於搬送重量物之搬送車系統中，於處理裝 置之附近配置侧缓衝區（side buffer)。然而，若於用以保管 重量物之側緩衝區使用採用選擇順應性裝配機器手臂之移 載裝置’則會存在有侧緩衝區之成本上升、或者搬送車之重 量變得過大之問題。 本發明之課題在於降低搬送車系統中與重量物相對應之 侧緩衝區之成本。 (解決問題之手段） 本發明之搬达車系統係用以於複數個處理裝置之間搬送 物品者；其包括軌道、搬送車及载置台。軌道沿著複數個處 理裝置而設置。搬送車於執道上行敌 而搬送物品。載置台被 配置於執狀财，並具有魅面。搬送車包含支持台及推 挽(PUShpUll)裝置。支持台具有與載置台之載置面呈相同高 度之支持Φ減移龜置藉由推拉物品聽物品於 與支持台之間移動。 σ 於該系統中，搬送車於载置台之側方停止，藉 裝置而使物品於支持台與载置台之間移動。 免移栽 裝置作用於物品時，物 田 挽移戟 此，可侧輪移=：^6⑽㈣動1 令，降低與《物㈣應之^衝[結果，可純送車系殊 罟於:Τ祥击々较恭 &衝區之成本。進而，由 置於搬达車之㈣裝置為推挽移載裝置，因此搬送^ 100102076 \ 里 3 201139239 將減小。 再者，支持台之支持面與載置台之載置面之高度於移載物 品時相同即可。亦即，任一面或兩個面均可變更高度，搬送 車之行駛中或停止中兩個面之高度亦可不同。 載置台亦可更包括罩蓋及用以提高載置於罩蓋内物品之 周圍清潔度之清潔裝置。 於該系統中，載置台上物品之周圍清潔度將增高。再者， 罩蓋例如可僅配置於物品之上方，亦可僅配置於物品之上方 及左右’亦可酉己置於物品之上方、左右及内面。 載置口之载置面亦可為可滾動自如之輪送帶，搬送車之支 持面亦可為可料自如之輸送帶。 於該系、、先中，由於輸送帶可滾動自如，因此於移載物品時 可抑制磨耗粉產生。 軌道亦可包含與複數個處理裝置相鄰接之環路。搬送車亦 1於％路上以單向通行地行駛。載置台亦可包含於至少一個 S 内側與環路之兩侧部分相接近配置、且於環路之長度 ^向排成—行而配置之第1載置台及第2載置台。第i載置 及第2栽置台亦可分別包含朝著環路之兩側部分之單侧 開口部及㈣環路之兩側部分之相反側開放之 於該系統中，載置台係包含在環 而分別開放之第i開口部及第 内朝著環路之兩側部分 汗〇部。因此，於臨時放置 100102076 201139239 。以上之 物品時，可選擇位於目的地處理裝置附近之载置a 結果，可&南物品之搬送效率。 m置口 者上下方向通過載置面而可支持物。 持構件、及驅動支持構件之驅動機構，若於載置面栽置之支 品之狀態下經由驅動機構來驅動支持構件，則支持構件有物 通過載置面使物品上升，由此可雜於載置面上亦可 品之空間。 欲置物 於該系統中，若將物品放置於載置面，則經由驅動機構驅 動支持構件使其上升’由此可使物品移動至較載置面更言 位置處。於該狀態下’可將物品自搬送車搬送至載置面。^ 上之結果，可提高载置台上之物品收容能力。 1 (發明效果） 於本發明之搬送車系統中，可降低移載裝置之成本。 【實施方式】 (1)搬送車系統 使用圖1’對本發明之搬送車系統工進行說明。圖i係採 用本發明-實施形態之搬送車系統之模式平關。於該實施 形態中，搬送車系統1被採用於製造A型液晶之液晶製造工 廠。於液晶製造讀，配置有複數個處理裝置2及檢查裝置 4 〇 搬送車系統1為於複數個處理裝置2之間搬送物品（例 如，收容有概健板之”)之純，其包財執道3、 100102076 6 201139239 搬送車5、自動倉庫7及複數個緩衝區9。於搬送車系統^ 中’軌道3包含複數個環路(環繞路），搬送車5可於各環路 上單向通行地行駛。 執道3包含第1〜第4環路11、13、15、17。第1〜第3 環路11、13、15沿著一個方向較長地延伸，因此包含有直 線狀之兩侧部分及位於兩端之曲線。第1〜第3環路11、13、 15相互平行地並列延伸。第4環路17以沿第1〜第3環路 U、13、15之單側端間延長之方式進行配置。於該實施形 態中，未於第1〜第3環路n、13、15中與第4環路17相 反側，設置有執道。因此，可容易將裝置搬入至第2〜第4 環路1卜13、15、17之間，或者容易自該等之間搬出裂置。 第1環路11係藉由設置複數個第1捷徑用連結部19而實 現第1小環路11a、第2小環路llb、第3小環路Uc。第2 環路13係藉由設置複數個第2捷徑用連結部21而實現第* 小環路13a、第5小環路13b、第6小環路Uc。第3環路 15係藉由設置複數個第3捷徑用連結部23而實現第7小環 路15a、第8小環路15b、第9小環路15c。 第4環路17係藉由設置第4捷徑用連結部25而實現第 10小環路17a、第11小環路17卜第10小環路na藉由複 數個連結部27而連結於第1環路11及第2環路13。第u 小環路17b藉由連結部28而連結於第3環路i5。 複數個處理裝置2係多個並列地而配置於第1〜第4環路 100102076 s 201139239 11、13、15、17之外侧。由於處理裝置2之構成及種類已 為人所知，故而此處省略詳細說明。 作為複數個處理裝置2之一種，設置有在各環路之間連續 配置之連續處理裝置29。連續處理裝置29被配置於第1環 路11與第2環路13之間、以及第2環路13與第3環路15 之間。連續處理裝置29包含以可直接移動物品之方式而連 結配置之第1處理裝置29a及第2處理裝置2%。例如，第 1處理裝置29a為蝕刻裝置，第2處理裝置2%為剝離裝置。 因此，物品自位於第丨環路n之搬送車5搬入至第丨處理 裝置29a之入口平台36而進行處理，接著搬入至第2處理 裝置29b而進行處理，最後搬出至位於第2環路13之出口 平台38之搬送車5。如上所述，因未於複數個處理裝置2 之間設置有搬送轨道’故搬送車系統i整體之搬送步驟數將 減少。 自動倉庫7被配置於第丨環路n與第2環路13之間。自 動倉庫7包含有可載置物品之複數個支架及起重機。由於自 動倉庫7之構成已為人所知，故而此處省略說明。自動 7包含沿著第1環路11及第μ 七人 弟2裱路π延伸之方向較長地延 伸且向第1環路11側延伸之第i平台Μ及向第2環路13 侧延伸之第2平台33 1此，自動倉庫7可於與在第1# 路11或第2環路13上行R搬送車5之間搬人搬出物^ 再者，於該實施形態中，複數個檢查裝置4以連接於自動 100102076 8 201139239 倉庫7之形態而配置於自動倉庫7之周圍。但是，檢查裝置 之位置並不特別受限。 複數個緩衝區9係具有於處理裝置2之間搬送物品時之臨 時放置地點作用之載置台。複數個緩衝區9係配置於第卜 第4環路11〜Π内，更具體而言係配置於各小環路内。緩 衝區9沿著環路之長度方向而較長地形成，如下所述包含設 置有開口部之複數個收納部。於第丨〜第9小環路iia、ub、 11c 13a、13b、13c、15a、15b、15c 内，分別配置有 4 個 緩衝區9。於第10小環路17a内配置有6個緩衝區9。於第 11小環路17b β，則配置有成一行且直線狀4個緩衝區9。 使用圖4，對第1缓衝區9Α與第2緩衝區9Β之配置及 構造進行詳細說明。圖4係圖丨之部分放大圖。於各小環路 内，交替配置有第1緩衝區9Α與第2緩衝區9Β。第工緩 衝區9Α與第2緩衝區9Β基本構造相同，但開口部之朝向 相反。如圖4所示，於第i小環路m内，第1緩衝區9Α 包3 3台第1單位緩衝區85。第丨單位緩衝區85包含朝向 相鄰接之軌道、具體而言朝向第！小環路m 一邊之直線部 分之第1開口部85a。第2緩衝區9B包含3台第2單位緩 衝區86。第2單位緩衝區86包含朝向相鄰接之軌道、具體 而。朝向第1小環路lla另一邊之直線部分之第2開口部 86a。絲上所述，第1緩衝區9A之第1開口部85a與第2 緩衝區9B之第2開口部86a於第1小環路na内朝向相反 100102076 髫. 201139239 侧。以上之結果，可相對於第i緩衝區9A自第卜】、環路⑴ 之第1側進行存取，且可相對於第2緩衝區9B自第i小環 路11 a之第2側進行存取。如此於一個小環路内能確保可自 小壞路之任-舰行存取之緩衝區，因此可短時間内執行搬 送車5與緩衝區9間之移載。 藉由以上構成，於與各處理裝置2相_之環路内存在緩 衝區9’尤其存在包含朝著環路之兩側部分分別開口之開口 部的緩衝區9°因此’於2個處理裝置2之間搬送物品時， 通常可藉由2個命令實現搬送。具體而言，藉由第i命令， 搬送車5自作為出發地之處理裝置2搬出物品，並將其搬送 至目的地處理裝置2附近之緩衝區9。藉由第2命令，搬送 車5將物品自緩衝區9搬送至目的地處理裝置：。如此藉由 搬送車5之2次移動而可結束物品之搬送，因而搬送車系統 1中之物品之搬送處理量將提高。 使用圖5,作為搬送車系統1之變形例，對確保停止地點 之佈局進行說明。圖5係表示軌道之變形例之搬送車系統之 部分模式平面圖。 於圖5中，卸除處理裝置2之一部分，並於此部位配置有 自第7〗、％路15a延伸之旁路線89<>旁路線89兩端係連接 於第7小環路以’且其中間部成為既定長度之直線狀而與 第7小環路以之直線部分平行。於旁路線89可仔停有複 數口之搬送車5。再者’旁路線89之配置位置及形狀並不 100102076 201139239 受限於該實施形態。又，旁路線δ9之可停車台數亦可為一 台。 需要檢測或維護之搬送車5將進入旁路線89而於直線部 分停止。於該狀態下，操作者可檢測或維護搬送車$。綜上 所述，不會雜測或維護操作，而停止在處理裝置2之間進 •行搬送之搬送車5之操作。㈣，可降低·除搬送車系統 1之停工時間。 (2)搬送車 使用圖2及圖3 ’對搬送車5之構造進行說明。圖2係作 為本發明-實施形狀搬送車系統之部分剖視圖。圖3係搬 送車之模式平面圖。於圖2中’與紙面正交之方向為搬送車 5之搬送方向’紙面之左右方向為物品之移載方向。於圖3 中’紙面之上下方向為搬送車5之搬送方向，紙面之左右方 向為物品之移載方向。 於圖2中，表示出底面32及頂棚面34,並進而表示出搬 送車5、緩衝區9及處理農置2之平台2a。搬送車5、緩衝 •區9、處理裝置2之平台2a之上表面之高度大致相同，均 靠近頂棚面34。 . 搬送車5為用以於處理襄置2之平台之間搬送玻璃基板或 E盒等物品之搬送手段。搬送車5包含本體35、行驶部37、 親式輸送機39、推挽移载裝置41及微環境機構幻。 本體35係具有大致呈箱形之形狀。 100102076 201139239 行駛部37包含設置於本體35之左右前後之車輪45、連 接於車輪45之行驶馬達131(圖7)、及設置於行駛馬達131 之編碼器139(圖7)。供車輪45行駛之軌道47係如圖2所 明示’被配置於底面32所形成之凹部32a内’且被配置於 較底面32更靠下方處。 再者，如圖14所示，可於搬送車5不行駛部位之執道47 上放置保護蓋70。保護蓋70係覆蓋軌道47而與底面32平 行地進行配置。藉由保護蓋而可使底面32平坦，因此將 不存在因操作者越過軌道47移動時而損壞轨道47之虞。 輥式輸送機39可滾動地設置於本體35之上表面，構成搬 达車5之支持面。如圖2及圖3所示，輥式輪送機％之輥 口著與打歇方向成直角之方向進行排列，藉此可使物品 合易石著左右方向移動。再者，輥式輸送機39由在行驶方 向上間離之—對輥列構成。輥式輸送機39之輥39a均為自 由親(無法獨立驅動之如，錢列僅構成物品之導向構件。 因:’可_㈣物品時之阻力，故而可適 之物品之情況。如此搬送車 ^有重里 構成之輕式輪送機39, ^支持為由可滚動自如之親 產生。 此於移載物品時可抑制磨耗粉之 縮之臂機構、設置於=载裝置41包含可於左右方向 置於#機構51之掛鉤構件53、及 100102076 、薄 12 201139239 構51上下·左右.進退之推挽驅動機構圖乃。於圖2所 不之狀態下’推挽移載裝置41被配置於較輥式輸送機39 而更罪下方處。再者，推挽移載裝置41無需要支持物品之 載重’因此構成簡單。因此’可實現搬送車5之輕量化。 掛鉤構件53包含有自臂麟51之最上段臂進而向左右方 向兩側延伸之第1部分53a、及自第1部分53b之端部向上 方延伸之第2部分53b。Μ 9却八r· b弟2。卩分饥彼此間之左右方向距 離係稍長於物品之左右方向長度。 微環境機構43係包含有框體55、—_板57及卿_ rUnit;風扇過濾單元)59。微環境機㈣為用以提高 搬运車5中物之周圍環境之清潔度之機構。框體55設置 於本體35之上部及前後而遮蔽既定空㈣㈣55之左右 兩侧形成有開口部，於開口部f 有對擔板5 7。擔板5 7 可藉由擋板驅動馬達叫圖7) 以反 疋订開閉動作。於圖2所 示之狀態下’一對擋板57為自外部遮蔽框 之 FFU59為用以向框體55内供仏、龙細 m工间 FFU驅動馬達137(圖7)而進行驅動。 罝其藉由 (3)緩衝區 使用圖2,對缓衝區9(相當於圖 第2單位緩衝H 86)之構造進行㈣ * *緩衝區85 緩衝區9例如於第1小環路11& 進行配置。緩衝區9包含有載置& 之内侧與兩側部分接近而 61、輥式輪送機63及微 100102076 13 s 201139239 環境機構65 載置台61具有大致箱形形狀。 設置於載置台61之上表s Μ心㈣63係可滚動地 又上表面，構成緩衝區9 輸送機63之高度無鱗5之 輥式 送機《之輥沿著與行財向成直角之觀式輪 可使物品容易沿著左右方向移動。再者’藉此 在行駛方向間離之一對輥構 "輸迗機63由 ώ成輕式輪送機63之^ 自由輥。如此，緩衝區9之載置面為由可 麵均為 成之報式輸送機63,因此於移载物品時可抑所構 微環境機構65包含罩蓋67及FFmQ 傻耗私產生。 於缓鮮9由微環境機構65為 ^中用以提高罩蓋67内、亦即提高物品周圍^ 〜絮度之機構。罩蓋67設置於載置台6ι之上部而遮蔽： 疋空間。於罩蓋67之軌道側形成有開口部心(相當於圖4 之第1開π部85a、第2開d部86a)。於該實施形態中罩 蓋係僅配置於物品之上方，但罩蓋可僅配置於物品之上方及 左右，亦可配置於物品之上方 '左右友内面。於該實施形態 t，於開口部未设置有擋板，但亦可視需要設置有擋板。 FFU69為向框體55内供給清潔空氣以提高所載置物品之周 圍清潔度之裝置。FFU69係藉由fFU驅動馬達137(圖乃而 進行驅動。 (4)平台 使用圖2，對處理裝置2之平台2a進行說明。平台2a包 100102076 14 201139239 含載置台71及輥式輸送機73。 載置台71具有大致箱形形狀。輥式輸送機73可滾動地役 置於載置台Ή之上表面。輥式輸送機73之輥沿著與行驶方 向成直角之方向進行排列，藉此可使物品容易沿著左右方向 移動°再者’輥式輸送機73由行駛方向上間離之—對辕列 構成°觀式輪送機73之輥均為自由輥。 (5)控制構成 使用圖6 ’對搬送車系統1之控制系統120進行說明。圖 6係表不搬送車系統之控制系統之方塊圖。 控制系統120包含製造控制器121、物流控制器123、自 動倉庫控制器丨25及搬送車控制器127。 物流控制器123為自動倉庫控制器125及搬送車控制器 127之上位控制器。搬送車控制器127係具有管理複數個搬 送車5且分配該等搬送指令之分配功能。再者，「搬送指令」 包括與行歇有關之指令、及與|載位置及㈣位置有關之指 〇 製造控制器121可與處理襞置2之間進行通信。處理裝置 2將已結束處理之物品之搬送要求(裝載要求•卸載要求)發 送至製造控制器121。 製造控制器121將來自處理裴置2之搬送要求發送至物流 控制器123’物流控制H 123則將報告發送至製造控制器 121。 100102076 15 201139239 物流控制器123當自製造控制器121接收到搬送要求時， 在伴隨於自動倉庫7中之入庫或出庫之情形時，以既定之時 序將入庫或出庫指令發送炱自動倉庫控制器125。而且，自 動倉庫控制器125與此相應地將入庫或出庫指令發送至自 動倉庫7。物流控制器123當進而自製造控制器121接收搬 送要求時’則將其轉換為搬送指令’並對搬送車5進行搬送 指令之分配動作。 搬送車控制器127為了作成搬送指令而連續地與各搬送 車5進行通信，根據自各搬送車5發送之位置資料獲得其位 置資訊。 使用圖7 ’對搬送車5之搬送車内控制器129進行說明。 圖7係表示搬送車内之控制器之構成之方塊圖。 搬送車内控制器129為由中央處理單元（CPU ’CentralBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transport vehicle system, and more particularly to a transport vehicle system including a transport vehicle that travels along a track between a plurality of processing devices. [Prior Art] A transport vehicle for transporting a large-sized glass substrate or a cassette containing a plurality of the glass substrates is known. The transport vehicle moves automatically in the clean room of the factory and transports items between the processing devices. The way to transport the car is, for example, a track that has been suspended from the ceiling or a track that is placed on the ground. In this case, the space for driving and transporting the vehicle becomes a clean room that is blocked from the outside. The platform is equipped with a transfer armature with a Selective Compliance Assembly Robot Arm (SCARA arm). The transfer device that selects the compliant assembly robot arm transfers the glass substrate or the cassette to the loading place of the platform. On the contrary, the glass substrate or the cassette is transferred from the loading place of the platform to the transfer place. A car (for example, refer to Patent Document 1). Further, it is also known that there is a type in which the transfer vehicle is provided with a transfer device that selects a compliant assembly robot. [Prior Art Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-294302 (Summary of the Invention) 100102076 3 201139239 (Problem to be Solved by the Invention) On the other hand, 'consideration of a transport vehicle for transporting weights In the system, a side buffer is disposed in the vicinity of the processing device. However, if the side load buffer for storing the weight is used, the loader device using the selective compliant assembly arm will have a problem that the cost of the side buffer increases, or the weight of the transport vehicle becomes excessive. An object of the present invention is to reduce the cost of a side buffer corresponding to a weight in a transport vehicle system. (Means for Solving the Problem) The traveling vehicle system of the present invention is for transporting articles between a plurality of processing apparatuses; it includes a rail, a transport vehicle, and a mounting table. The track is set along a plurality of processing devices. The transport vehicle carries the goods while carrying the enemy. The mounting table is configured to hold the money and has a charm. The transport vehicle consists of a support stand and a push-pull (PUShpUll) unit. The support table has the same height as the mounting surface of the mounting table. The support Φ reduction turtle moves between the support and the support table by pushing and pulling the article. σ In this system, the transport vehicle stops at the side of the mounting table, and the article moves between the support table and the mounting table by means of the device. When the transplant-free device is applied to the article, the object can be moved, and the side wheel can be shifted::^6(10)(4) move 1 command, lowering with the object (four) should be rushed [results, can be purely delivered to the car system: Τ Cheung hits the cost of the Gongong & Furthermore, since the device placed in the (4) of the moving car is a push-pull transfer device, the transfer of 100102076 \ 里 3 201139239 will be reduced. Further, the height of the support surface of the support table and the mounting surface of the mounting table may be the same as when the object is transferred. That is, the height can be changed on either or both sides, and the height of the two sides of the moving or stopping of the transport vehicle can be different. The mounting table may further include a cover and a cleaning device for improving the cleanliness of the items placed in the cover. In this system, the cleanliness of the surrounding items on the mounting table will increase. Further, the cover may be disposed only above the article, or may be disposed only above and to the left and right of the article. The mounting surface of the loading port can also be a rolling belt that can be rolled freely, and the supporting surface of the conveying vehicle can also be a conveyor belt that can be freely conveyed. In this system, the conveyor belt can be rolled freely, so that the generation of abrasion powder can be suppressed when the article is transferred. The track may also include a loop adjacent to a plurality of processing devices. The transport vehicle also travels on a one-way road in one-way traffic. The mounting table may include a first mounting table and a second mounting table disposed on the inner side of at least one of the S and adjacent to both side portions of the loop, and arranged in a row along the length of the loop. The i-th mounting and the second mounting table may also include a single-sided opening toward both side portions of the loop and (4) opposite sides of the two sides of the loop, respectively, in the system, the mounting platform is included in the ring And the i-th opening portion and the inner portion of the inner side of the loop are respectively open to the sweat portion. Therefore, temporarily place 100102076 201139239. In the case of the above items, the result of the placement a near the destination processing device can be selected, and the transfer efficiency of the & South items can be selected. The m-mounter can support the object by the mounting surface in the vertical direction. When the holding member and the driving mechanism for driving the supporting member drive the supporting member via the driving mechanism in a state in which the supporting member is placed on the mounting surface, the supporting member has the object raised by the mounting surface, thereby being mixed The space on the mounting surface can also be used. In the system, if the article is placed on the placement surface, the support member is driven to rise via the drive mechanism, thereby moving the article to a position further than the placement surface. In this state, the article can be transported from the transport vehicle to the loading surface. ^ As a result, the ability to accommodate items on the mounting table can be improved. 1 (Effect of the Invention) In the transport vehicle system of the present invention, the cost of the transfer device can be reduced. [Embodiment] (1) Transport vehicle system The transport vehicle system of the present invention will be described with reference to Fig. 1'. Fig. i is a schematic diagram of the mode of the transport vehicle system according to the present invention. In this embodiment, the transport vehicle system 1 is used in a liquid crystal manufacturing factory that manufactures an A-type liquid crystal. In the liquid crystal manufacturing read, a plurality of processing apparatuses 2 and an inspection apparatus 4 are disposed. The transport system 1 is a pure product that transports articles (for example, a soundboard) between a plurality of processing apparatuses 2, and Road 3, 100102076 6 201139239 Transport truck 5, automatic warehouse 7 and a plurality of buffers 9. In the transport vehicle system ^ 'Track 3 contains a plurality of loops (surrounding roads), transport truck 5 can be unidirectional on each loop The road 3 includes the first to fourth loops 11, 13, 15, and 17. The first to third loops 11, 13, and 15 extend long in one direction, and thus include two straight lines. a side portion and a curve at both ends. The first to third loops 11, 13, and 15 extend in parallel with each other. The fourth loop 17 has a one-side end along the first to third loops U, 13, and 15. In this embodiment, the first to third loops n, 13, and 15 are not provided on the opposite side of the fourth loop 17 from the first to third loops. Therefore, the device can be easily carried in. The second to fourth loops are between 1, 13, 15, and 17 or are easily moved out of the gap. The first loop 11 is set by plural The first small loop connecting portion 19 realizes the first small loop 11a, the second small loop 11b, and the third small loop Uc. The second loop 13 is realized by providing a plurality of second shortcut connecting portions 21 The fourth small loop 13a, the fifth small loop 13b, and the sixth small loop Uc. The third loop 15 realizes the seventh small loop 15a and the eighth by providing a plurality of third shortcut connecting portions 23. The small loop 15b and the ninth small loop 15c. The fourth loop 17 is provided with the fourth shortcut connecting portion 25 to realize the 10th small loop 17a and the 11th small loop 17 and the 10th small loop na The first loop 11 and the second loop 13 are connected by a plurality of connecting portions 27. The u-th loop 17b is connected to the third loop i5 by the connecting portion 28. The plurality of processing devices 2 are plural The first to fourth loops are arranged in the outer side of the first to fourth loops 100102076 s 201139239 11, 13, 15, and 17. Since the configuration and type of the processing device 2 are known, detailed descriptions thereof are omitted here. One of the devices 2 is provided with a continuous processing device 29 that is continuously disposed between the respective loops. The continuous processing device 29 is disposed between the first loop 11 and the second loop 13, and the second loop 13 The third processing unit 29 includes a first processing unit 29a and a second processing unit 2% that are connected to each other so as to be directly movable. For example, the first processing unit 29a is an etching apparatus, and the second processing unit 2 2% of the processing device is a peeling device. Therefore, the article is transported from the transport vehicle 5 located in the second loop n to the entrance platform 36 of the second processing device 29a, and then processed, and then transferred to the second processing device 29b for processing. The transport vehicle 5 is carried out to the exit platform 38 located on the second loop 13. As described above, since the transport path is not provided between the plurality of processing apparatuses 2, the number of transport steps of the entire transport system i is reduced. The automatic warehouse 7 is disposed between the second loop n and the second loop 13. The automatic warehouse 7 includes a plurality of brackets and cranes on which articles can be placed. Since the configuration of the automatic warehouse 7 is known, the description thereof is omitted here. The automatic 7 includes an i-th stage 较长 extending toward the first loop 11 side and extending toward the second loop 13 side, extending in the direction in which the first loop 11 and the seventh seventh brother 2 裱 are extended. The second platform 33 1 , the automatic warehouse 7 can move the object between the first # road 11 or the second loop 13 and the upper R transport vehicle 5, and in the embodiment, a plurality of checks are performed. The device 4 is disposed around the automatic warehouse 7 in a form connected to the automatic 100102076 8 201139239 warehouse 7. However, the position of the inspection device is not particularly limited. The plurality of buffers 9 are mounting stations that function as temporary placement points when the articles are transported between the processing devices 2. A plurality of buffers 9 are arranged in the fourth loop 11 to Π, and more specifically, in the small loops. The buffer region 9 is formed long along the longitudinal direction of the loop, and includes a plurality of housing portions in which the openings are provided as follows. Four buffers 9 are arranged in the second to ninth small loops iia, ub, 11c 13a, 13b, 13c, 15a, 15b, and 15c, respectively. Six buffers 9 are arranged in the 10th small loop 17a. In the 11th small loop 17b β, four buffers 9 are arranged in a line and linearly. The arrangement and structure of the first buffer 9 第 and the second buffer Β 9 will be described in detail with reference to Fig. 4 . Figure 4 is a partial enlarged view of the figure 。. In the small loops, the first buffer 9 Α and the second buffer 9 交替 are alternately arranged. The first buffer zone 9 is the same as the second buffer zone 9Β, but the opening is oriented in the opposite direction. As shown in Fig. 4, in the i-th small loop m, the first buffer 9 packs 3 3 first unit buffers 85. The second unit buffer 85 is oriented toward the adjacent track, specifically toward the first! The first opening 85a of the straight portion of the small loop m side. The second buffer area 9B includes three second unit buffer areas 86. The second unit buffer 86 includes tracks that are adjacent to each other, specifically. The second opening portion 86a is a portion of the straight portion of the other side of the first small loop 11a. In the wire, the first opening 85a of the first buffer zone 9A and the second opening 86a of the second buffer zone 9B face the opposite side 100102076 髫. 201139239 side in the first small loop na. As a result, the ith buffer 9A can be accessed from the first side of the second and second loops (1), and can be made from the second side of the ith small loop 11a with respect to the second buffer 9B. access. In this way, in a small loop, it is possible to ensure that the buffer can be accessed from the small and bad roads, so that the transfer between the transport vehicle 5 and the buffer 9 can be performed in a short time. According to the above configuration, in the buffer region 9' existing in the loop of each processing device 2, there is in particular a buffer region 9 including opening portions respectively opening toward both side portions of the loop. When you transfer items between 2, you can usually transfer them by two commands. Specifically, by the ith command, the transport vehicle 5 carries the articles from the processing device 2 as the departure place, and transports them to the buffer 9 near the destination processing device 2. By the second command, the transport vehicle 5 transports the articles from the buffer zone 9 to the destination processing device: As a result of the two movements of the transport vehicle 5, the conveyance of the articles can be terminated, and the amount of conveyance processing of the articles in the transport vehicle system 1 is improved. The layout of the stop position will be described as a modification of the transport vehicle system 1 with reference to Fig. 5 . Fig. 5 is a partial schematic plan view showing a transport vehicle system in a modified example of the rail. In Fig. 5, one portion of the processing device 2 is removed, and a bypass line 89 <> extending from the seventh and % roads 15a is disposed in this portion; > both ends of the bypass line 89 are connected to the seventh small loop to ' And the middle portion thereof has a linear shape of a predetermined length and is parallel to the straight portion of the seventh small loop. On the bypass line 89, a plurality of transport vehicles 5 can be parked. Further, the arrangement position and shape of the bypass line 89 are not limited to 100102076 201139239. Further, the number of parking spaces of the bypass line δ9 may be one. The transport vehicle 5 that needs to be detected or maintained will enter the bypass line 89 and stop at the straight line. In this state, the operator can detect or maintain the transport vehicle $. As described above, the operation of the transport vehicle 5 that is transported between the processing devices 2 is stopped without miscellaneous or maintenance operations. (4) It can reduce the downtime of the transport system 1 . (2) Transport vehicle The structure of the transport vehicle 5 will be described with reference to Figs. 2 and 3'. Fig. 2 is a partial cross-sectional view showing the embodiment of the present invention. Figure 3 is a schematic plan view of the transport vehicle. In Fig. 2, the direction orthogonal to the plane of the paper is the transport direction of the transport vehicle 5. The left-right direction of the paper surface is the transfer direction of the article. In Fig. 3, the direction of the upper and lower sides of the paper is the transport direction of the transport vehicle 5, and the left and right directions of the paper surface are the transfer directions of the articles. In Fig. 2, the bottom surface 32 and the ceiling surface 34 are shown, and the transport vehicle 5, the buffer zone 9, and the platform 2a for processing the farm 2 are further shown. The transport vehicle 5, the buffering area 9, and the upper surface of the platform 2a of the processing apparatus 2 have substantially the same height, and are all close to the ceiling surface 34. The transport vehicle 5 is a transport means for transporting an object such as a glass substrate or an E-box between the platforms of the processing unit 2. The transport vehicle 5 includes a main body 35, a traveling portion 37, a personal conveyor 39, a push-pull transfer device 41, and a micro-environment mechanism. The body 35 has a substantially box shape. 100102076 201139239 The traveling portion 37 includes wheels 45 disposed on the left and right sides of the main body 35, a travel motor 131 (FIG. 7) connected to the wheels 45, and an encoder 139 (FIG. 7) provided in the travel motor 131. The rail 47 for traveling on the wheel 45 is disposed in the recess 32a formed by the bottom surface 32 as shown in Fig. 2, and is disposed below the bottom surface 32. Further, as shown in FIG. 14, the protective cover 70 can be placed on the road 47 where the transport vehicle 5 is not traveling. The protective cover 70 covers the rail 47 and is disposed in parallel with the bottom surface 32. The bottom surface 32 can be made flat by the protective cover, so there will be no damage to the track 47 as the operator moves over the track 47. The roller conveyor 39 is rollably disposed on the upper surface of the body 35 to constitute a support surface of the vehicle 5. As shown in Fig. 2 and Fig. 3, the roll of the roller type wheel conveyor is arranged in a direction at right angles to the direction of the break, whereby the article can be moved in the left and right direction. Further, the roller conveyor 39 is constituted by a pair of roller rows which are separated in the traveling direction. The rollers 39a of the roller conveyor 39 are all free (can not be driven independently, for example, the money column only constitutes the guiding member of the article. Because: 'may be _ (four) the resistance of the article, so it can be suitable for the article. So transport the car ^The light-weighting machine 39 consisting of heavy weights, ^Support is produced by the rollable and freely. This is an arm mechanism that can suppress the shrinkage of the abrasion powder when the article is transferred, and is provided in the carrier device 41. The push-pull drive mechanism is placed in the direction of the hook mechanism 53 of the #51, and 100102076, and the thin 12 201139239. The push-pull drive mechanism of the advance and retreat is in the state of FIG. 2, and the push-pull transfer device 41 is disposed in the state of FIG. Further, the roller conveyor 39 is more sinful. In addition, the push-pull transfer device 41 does not need to support the load of the article. Therefore, the configuration is simple. Therefore, the weight of the transport vehicle 5 can be reduced. The hook member 53 includes the self-arm. The uppermost arm of the lining 51 further has a first portion 53a extending to both sides in the left-right direction and a second portion 53b extending upward from the end portion of the first portion 53b. Μ 9 but eight r·b brother 2. The distance between the left and right directions is slightly longer than the left and right sides of the article. The length of the micro-environment-based mechanism 43 comprises a frame 55, plate 57 and Qing _ -_ RunIt; fan filter unit) 59. The micro-environmental machine (4) is a mechanism for improving the cleanliness of the surroundings of the object in the transport vehicle 5. The frame body 55 is provided on the upper portion of the main body 35 and the front and rear sides, and is shielded from the predetermined space (four) (four) 55. The opening portion is formed on both sides, and the pair of support plates 57 are provided in the opening portion f. The support plate 5 7 can be driven by the baffle drive motor (Fig. 7) to reverse the opening and closing action. In the state shown in Fig. 2, the pair of baffles 57 are externally shielded from the FFU 59 for driving the inside of the casing 55 and the MFU FFU drive motor 137 (Fig. 7).进行, by using (3) buffer, using Figure 2, for the construction of buffer 9 (equivalent to the second unit buffer H 86 of the figure) (4) * * buffer 85 buffer 9 for example in the first small loop 11 & Configure it. The buffer zone 9 includes the inner side of the mounting & and the side portions are close to each other. 61. The roller conveyor 63 and the micro 100102076 13 s 201139239 environmental mechanism 65 The mounting table 61 has a substantially box shape. Set on the mounting table 61, the table s center (4) 63 is scrollable and the upper surface, forming a buffer belt 9 conveyor belt 63 height without scale 5 roller feeder "the roller is at right angles to the line of money The viewing wheel makes it easy to move the item in the left and right direction. Further, 'by the pair of rollers in the direction of travel, the shovel 63 is smashed into a free roller of the lighter 63. Thus, the loading surface of the buffer zone 9 is a newspaper conveyor 63 which can be formed by the surface. Therefore, when the article is transferred, the micro-environment mechanism 65 can be made to include the cover 67 and the FFmQ. The mechanism for improving the freshness of the article 67 by the micro-environment mechanism 65 is to increase the wrinkle around the article. The cover 67 is disposed on the upper portion of the mounting table 6 ι to shield the space. An opening center (corresponding to the first opening π portion 85a and the second opening d portion 86a of FIG. 4) is formed on the rail side of the cover 67. In this embodiment, the cover is disposed only above the article, but the cover may be disposed only above and to the left and right of the article, or may be disposed above the article. In this embodiment t, a baffle is not provided in the opening, but a baffle may be provided as needed. The FFU 69 is a device that supplies clean air to the frame 55 to improve the cleanliness of the surrounding articles. The FFU 69 is driven by the fFU drive motor 137 (Fig. 2) The platform 2a of the processing apparatus 2 will be described with reference to Fig. 2. The platform 2a package 100102076 14 201139239 includes a mounting table 71 and a roller conveyor 73. The mounting table 71 has a substantially box shape, and the roller conveyor 73 can be rolled and placed on the upper surface of the mounting table. The rollers of the roller conveyor 73 are arranged at right angles to the traveling direction, whereby The article is easy to move in the left-right direction. Further, the 'roller conveyor 73 is separated from the traveling direction—the pair of rollers that form the observation wheel conveyor 73 are all free rollers. (5) Control structure is shown in Fig. 6. 'The control system 120 of the transport vehicle system 1 will be described. Fig. 6 is a block diagram showing the control system of the transport vehicle system. The control system 120 includes a manufacturing controller 121, a logistics controller 123, an automatic warehouse controller 丨25, and a transport system. The vehicle controller 127. The logistics controller 123 is an upper controller of the automatic warehouse controller 125 and the transportation vehicle controller 127. The transportation vehicle controller 127 has a distribution function of managing a plurality of transportation vehicles 5 and allocating the transportation commands. The "transport command" includes a command relating to the line break, and the fingerprint manufacturing controller 121 relating to the position of the load and the position of (4) can communicate with the processing unit 2. The processing device 2 will end the processed item. The transport request (loading request/unloading request) is sent to the manufacturing controller 121. The manufacturing controller 121 sends the transport request from the processing device 2 to the logistics controller 123. The logistics control H 123 sends the report to the manufacturing controller 121. 100102076 15 201139239 When receiving the transfer request from the manufacturing controller 121, the logistics controller 123 sends the inbound or outbound command to the automatic warehouse controller at a predetermined timing when accompanied by the inbound or outbound in the automated warehouse 7. 125. Further, the automatic warehouse controller 125 transmits the inbound or outbound instruction to the automatic warehouse 7 accordingly. When the logistics controller 123 further receives the transportation request from the manufacturing controller 121, 'converts it to a transportation instruction' and The transport vehicle 5 performs a transfer operation of the transport command. The transport vehicle controller 127 continuously communicates with each transport vehicle 5 in order to create a transport command. The information is obtained based on the position data transmitted from each of the transport vehicles 5. The transport interior controller 129 of the transport vehicle 5 will be described with reference to Fig. 7. Fig. 7 is a block diagram showing the configuration of the controller in the transport vehicle. Controller 129 is operated by central processing unit (CPU 'Central
Processing Unit)、隨機存取記憶體(ram，Random AccessProcessing Unit), random access memory (ram, Random Access)
Memory)、唯讀記憶體(ROM，Read Only Memory)等構成而 執行程式之電腦。搬送車内控制器129之記憶體中保存有路 線圖。搬送車5 —面將記載於路線圖之座標及本機之内部座 標（藉由編碼器139(下述)所求出之座標）加以比較，一面持 續行驶。 於搬送車内控制器129連接有行駛馬達131、推挽驅動機 構133、擋板驅動馬達135、1??<11驅動馬達137及編碼器139。 (6)搬送車系統之動作 100102076 201139239 使用圖2及圖8〜圖13，對搬送車系統1之動作進行說 明。圖8〜圖13係作為本發明之一實施形態之搬送車系統 之部分剖視圖。於圖2之狀態下，搬送車5以載置有物品 C1之狀態停止於缓衝區9與處理裝置2之平台2a之間。於 平台2a載置有物品C2。自該狀態下，搬送車5將物品C1 下降至缓衝區9，而且自平台2a裝載物品C2。以下，對該 動作進行詳細說明。 自圖2之狀態下，於搬送車5中，驅動擋板驅動馬達135, 藉此打開緩衝區9側之擋板57。進而，驅動推挽驅動機構 133之升降機構(未圖示）而使臂機構51上升。其結果，掛鉤 構件53之第2部分53b被配置於物品C1之左右方向兩側。 臂機構51上升後之狀態係於圖8所示。 自圖8之狀態下，於搬送車5中，驅動推挽驅動機構133 之滑動機構(未圖示）而使臂機構51向缓衝區9側滑動。藉 此，物品C1被推至掛鉤構件53之第2部分53b而自搬送 車5搬送至緩衝區9内。具體而言，物品C1於輥式輸送機 39及報式輸送機63上滑動而移動。物品C1移動後之狀態 係於圖9所示。 自圖9之狀態下，於搬送車5中，驅動推挽驅動機構133 之升降機構(未圖示）而使臂機構51下降。其結果，掛鉤構 件53之第2部分53b被配置於較物品C1之左右方向兩側 更靠下方處。其次，驅動推挽驅動機構133之滑動機構(未 100102076 17 201139239 圖示)而可使臂機構51向搬送車5側滑動。藉此，臂機構 51將返回搬送車5内。最後，驅動擋板驅動馬達135，而關 閉緩衝區9側之擋板57。關閉擋板57後之狀態係於圖10 所示。 如上况明般，搬送車5於緩衝區9之側方停止，藉由推挽 移載裝置41而使物品於本體35與緩衝區9之間移動。當力 自推挽移载襞置41作用於物品時，該物品會於輥式輸送機 39及輥式輸送機63上移動。如此，可藉由簡單之構造而移 載重量物。 自圖10之狀態下，於搬送車5中，藉由驅動擋板軀動馬 達135而打開平台2a側之擋板57。進而，驅動推挽驅動機 構133之滑動機構(未圖示）而使臂機構51向緩衝區9側滑 動。臂機構51滑動後之狀態係於圖11所示。 自圖11之狀態下，於搬送車5中，驅動推挽驅動機構133 之升降機構(未圖示）而使臂機構51上升。其結果，掛鉤構 件53之第2部分53b被配置於物品C2之左右方向兩側。 臂機構51上升後之狀癌係於圖12所示。 自圖12之狀態下，驅動推挽驅動機構133之滑動機構而 使臂機構51向搬送車5側滑動。藉此，臂機構51將返回至 搬送車5内。又，物品C2會被推至掛鉤構件53之第2部 分53b而自平台2a搬送至搬送車5内。具體而言，物品C2 將於輥式輸送機73及輥式輸送機39上進行滑動移動。進 100102076 18 201139239 而，驅動推挽驅動機構133之升降機構(未圖示）而使臂機構 51下降。其結果，掛鉤構件53之第2部分53b被配置於較 物品C2之左右方向兩側更靠下方處。最後，驅動擋板驅動 馬達135而關閉平台2a側之擋板57。關閉擋板57後之狀 態係於圖13所示。 藉由以上處理，可結束一連串移載動作。 (7)其他實施形態 以上，已對本發明之一實施形態進行說明，但本發明並不 受限於上述實施形態，可於不脫離發明主旨之範圍内進行各 種變更。 尤其，本說明書所記載之複數個實施形態及變形例可視需 要任意組合。 (A)於上述實施形態中，係每次各一個地交替設置有分別 包含複數個朝向不同側之開口部之第1緩衝區9A與第2緩 衝區9B，但本發明並不受限於此種實施形態。 缓衝區只要包含在環路内分別朝著環路之兩側部分開放 之第1開口部及第2開口部，則可為任何構造。例如，亦可 連續配置有一種緩衝區。進而，亦可使用僅包含有一個開口 部之缓衝區。亦即，關於缓衝區之形狀及各個緩衝區之連續 數量，並不受特別限定。 藉由以上構造，緩衝區包含在環路内分別朝著環路之兩側 部分開放之第1開口部及第2開口部。因此，於將物品搬入 100102076 19 201139239 =^^_树！2賴且包含 提高物品之搬送效L之開〇部的緩衝區。以上之結果，可 是9 __直線狀。但 區9配置/ 見度不會極端過大’較佳為將複數個缓衝 I W 行。再者，於將緩衝區9配置成直線狀之情形 寻’ °最切度地設定祕之寬度。 /Q於圖15所示之搬送車祕中，軌道3係除上述實施形 態之構造❸卜，更於第1〜第3環路11、13、15中與第4 環路17相反侧包含第5環路77。 第5環路77係藉由設置第5捷徑連結部79而實現第12 小環路77a、第13小環路m。第12小環路π藉由複數 個連結部81而連結於第1環路11及第2環路13。第13小 環路77b藉由連結部83而連結於第3環路15。 ，第1〜第5環路心⑴化仏乃之執道如上述實施 形態中說明般’係收納於底面32之凹部32a内。於該實施 形態中，例如平常時，預先於第5環路77之軌道上蓋上保 護蓋。藉由配置保護蓋而可使底面32平垣，因此可容易將 裝置搬入至第i〜第4環路u、13、15、l7d^^ 易自該等之P細出裝^又，亦無當操作者越過第$環: 77移動時會損壞執道之虞。而且，例如緊 ± τ、呷，可卸除保 護盖而使搬送車5於第5環路77上行駛。 100102076 20 201139239 於該實施形態中，於坌s掙敗π咖a β ★、 於第5 %路77内未設置有緩衝區。但 疋，亦可視需要配置有緩衝區。 (::使用圖16〜圖19，對提高緩衝區之物品收容能力之其 =ΓΓ說明。圖16係採用本發明之進而其他實施 :之搬送車錄之部分剖視圖。圖17係載置台之模式平 面圖:圖賴置台之部分側視圖。圖 部分剖視圖。 如圖16及圖17所示，緩衝區91包含 持機構95。 ㈣1匕3輥式輪送機93及支 送機93與上述實施形態相同，但於 定空隙。觀式輸送機93更包括對觀…進行支持 支持。卩93b、支柱93c及支持棒93d 斟鈕cn …丄 又符部93b為直接 伸1拉 之部分，_昆％所經排列之方向延 持部剌_自__ 93a +_ ^之端部進行支持。支柱93e係將支持部娜維持為既定 支持棒㈣係自支柱93c傾斜地延伸而可旋轉自如地 對報％中與其他_相反歉端部崎支持。亦即，於輥 93a中與其他輥列相反側並未設置有支柱。 、支持機構95為用以使輕式輸送機％上之物品向較輥式輸 送機93更罪上方處移動之機構，其包含支持構件及驅動 機構99。支持構件97為沿著上下方向分別㈣—對報式輸 送機93而可支持物口口之一對構件，如圖所示，其包含底 100102076 21 i 201139239 框1〇1及自底框101延伸之複數個較細之支持部1〇3。各底 框101被配置於各輥式輪送機93之前後方向外側沿著親 式輸送機93之各輕93a所經排列之方向延伸。如圖16及圖 ^所示，複數個支持部103於輥式輸送機93之輥93&之間 乙伸支持部1〇3之上表面為平坦面，其被配置於較輥 之上表面更靠下方處。驅動機構99為用以驅動支持構件97 之機構包含支柱1〇5、升降馬達(未圖示)及鍵條(未圖示）。 支柱例如設置於四角而沿著上下方向延伸，如圖心斤 不，可上下移動地對支持構件9?之底框ι〇ι之兩端進行支 持。升降馬達(未圖示)可經由鏈條(未圖示）而使支持 上下移動。 7品之罩蓋67之頂棚部亦會增高，進而頂棚面34中與 緩衝區91相對應之部分亦將增高。 ^A computer that executes a program, such as Memory) and Read Only Memory (ROM). A road map is stored in the memory of the in-vehicle controller 129. The transport vehicle 5 is continuously driven while comparing the coordinates of the road map with the internal coordinates of the unit (the coordinates obtained by the encoder 139 (described below)). A travel motor 131, a push-pull drive mechanism 133, a shutter drive motor 135, a ??11 motor drive 137, and an encoder 139 are connected to the transport in-vehicle controller 129. (6) Operation of the transport vehicle system 100102076 201139239 The operation of the transport vehicle system 1 will be described with reference to Figs. 2 and 8 to 13 . 8 to 13 are partial cross-sectional views of a transport vehicle system as an embodiment of the present invention. In the state of Fig. 2, the transport vehicle 5 is stopped between the buffer zone 9 and the platform 2a of the processing apparatus 2 in a state in which the article C1 is placed. The article C2 is placed on the platform 2a. From this state, the transport vehicle 5 lowers the article C1 to the buffer zone 9, and loads the article C2 from the platform 2a. Hereinafter, this operation will be described in detail. In the state of Fig. 2, in the transport vehicle 5, the shutter driving motor 135 is driven, thereby opening the shutter 57 on the buffer side 9. Further, the lift mechanism (not shown) of the push-pull drive mechanism 133 is driven to raise the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on both sides in the left-right direction of the article C1. The state in which the arm mechanism 51 is raised is as shown in FIG. In the state of Fig. 8, in the transport vehicle 5, a slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the buffer area 9. Thereby, the article C1 is pushed to the second portion 53b of the hook member 53, and is transported from the transport vehicle 5 into the buffer zone 9. Specifically, the article C1 slides on the roller conveyor 39 and the newspaper conveyor 63 and moves. The state after the movement of the article C1 is as shown in Fig. 9. In the state of Fig. 9, in the transport vehicle 5, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed further below the left and right sides of the article C1. Next, the slide mechanism of the push-pull drive mechanism 133 (not shown as 100102076 17 201139239) is driven to slide the arm mechanism 51 toward the transport vehicle 5 side. Thereby, the arm mechanism 51 will return to the inside of the transport vehicle 5. Finally, the shutter drive motor 135 is driven to close the shutter 57 on the buffer side 9. The state after the shutter 57 is closed is shown in FIG. As described above, the transport vehicle 5 is stopped on the side of the buffer zone 9, and the article is moved between the main body 35 and the buffer zone 9 by the push-pull transfer device 41. When the force is applied to the article from the push-pull transfer device 41, the article moves on the roller conveyor 39 and the roller conveyor 63. Thus, the weight can be transferred by a simple configuration. In the state of Fig. 10, in the transport vehicle 5, the shutter 57 on the side of the platform 2a is opened by driving the shutter body motor 135. Further, the slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the buffer area 9. The state in which the arm mechanism 51 is slid is shown in FIG. In the state of Fig. 11, in the transport vehicle 5, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to raise the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on both sides in the left-right direction of the article C2. The cancer of the arm mechanism 51 is as shown in Fig. 12. In the state shown in Fig. 12, the slide mechanism of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the transport vehicle 5 side. Thereby, the arm mechanism 51 returns to the inside of the transport vehicle 5. Further, the article C2 is pushed to the second portion 53b of the hook member 53, and is transported from the platform 2a to the transport vehicle 5. Specifically, the article C2 is slidably moved on the roller conveyor 73 and the roller conveyor 39. Further, 100102076 18 201139239, the lift mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed below the both sides in the left-right direction of the article C2. Finally, the shutter is driven to drive the motor 135 to close the shutter 57 on the side of the platform 2a. The state after the shutter 57 is closed is shown in Fig. 13. By the above processing, a series of transfer actions can be ended. (7) Other Embodiments The embodiments of the present invention have been described above, but the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention. In particular, the plurality of embodiments and modifications described in the present specification may be arbitrarily combined as needed. (A) In the above embodiment, the first buffer area 9A and the second buffer area 9B each including a plurality of openings facing different sides are alternately provided one at a time, but the present invention is not limited thereto. An embodiment. The buffer may have any configuration as long as it includes the first opening and the second opening which are open to both sides of the loop in the loop. For example, a buffer can be configured continuously. Further, a buffer buffer including only one opening portion can also be used. That is, the shape of the buffer zone and the number of consecutive buffers are not particularly limited. According to the above configuration, the buffer includes the first opening and the second opening which are respectively opened to both side portions of the loop in the loop. Therefore, move the item into 100102076 19 201139239 =^^_ tree! 2 Include and include a buffer to increase the opening efficiency of the item. The above results are 9 __ linear. However, the area 9 configuration/visibility is not extremely too large. It is preferable to buffer a plurality of I W lines. Furthermore, in the case where the buffer zone 9 is arranged in a straight line, the width of the secret is set to the most sever. /Q In the transport vehicle shown in Fig. 15, the track 3 is in addition to the structure of the above-described embodiment, and includes the first side of the first to third loops 11, 13, and 15 opposite to the fourth loop 17 5 loop 77. The fifth loop 77 realizes the twelfth small loop 77a and the thirteenth small loop m by providing the fifth shortcut connecting portion 79. The twelfth small loop π is connected to the first loop 11 and the second loop 13 by a plurality of connecting portions 81. The 13th small loop 77b is connected to the third loop 15 by the connecting portion 83. The first to fifth loops (1) are in the recess 32a of the bottom surface 32 as described in the above embodiment. In this embodiment, for example, the protective cover is attached to the track of the fifth loop 77 in advance. By arranging the protective cover, the bottom surface 32 can be flattened, so that the device can be easily carried into the i-th to fourth loops u, 13, 15, and l7d^^. The operator crosses the $th ring: 77 moves when it breaks the road. Further, for example, ± τ, 呷, the protective cover can be removed to drive the transport vehicle 5 on the fifth loop 77. 100102076 20 201139239 In this embodiment, the buffer is not provided in the fifth channel 77. However, you can also configure a buffer as needed. (:: The use of FIG. 16 to FIG. 19 for improving the accommodation capacity of the buffer zone. FIG. 16 is a partial cross-sectional view showing another embodiment of the present invention: the transporting car record. FIG. 17 is a mode of the mounting table. Fig. 16 and Fig. 17, the buffer zone 91 includes a holding mechanism 95. (4) The 1匕3 roller type wheeler 93 and the feeder 93 are the same as the above embodiment. However, the gap is fixed. The observation conveyor 93 further includes support for the support. 卩93b, the pillar 93c and the support rod 93d, the button cn ... 丄 符 93 93b is a part of the direct extension 1 pull, _ Kun% The aligned direction extending portion 剌_ is supported from the end of __93a +_ ^. The support member 93e maintains the support portion Na as a predetermined support rod (4) and extends obliquely from the support member 93c to be rotatably Contrary to other _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Machine 93 is more guilty of the mechanism that moves above, which contains supporting components And the driving mechanism 99. The supporting member 97 is a pair of members of the supportable mouthpiece respectively in the up and down direction (four)-to the newspaper conveyor 93, as shown in the figure, which comprises a bottom 100102076 21 i 201139239 frame 1〇1 and A plurality of thin support portions 1〇3 extending from the bottom frame 101. Each of the bottom frames 101 is disposed on the outer side of each of the roller conveyors 93 and arranged along the respective light 93a of the parent conveyor 93. As shown in FIG. 16 and FIG. 2, the plurality of support portions 103 are flat surfaces on the upper surface of the support portion 1〇3 between the rollers 93& of the roller conveyor 93, which are disposed on the rollers. The upper surface is further downward. The mechanism for driving the support member 97 includes a support 1〇5, a lift motor (not shown), and a key bar (not shown). The pillars are provided, for example, at four corners The direction is extended, and as shown in the figure, the support member 9 is supported by the bottom frame ι〇ι. The lift motor (not shown) can be supported to move up and down via a chain (not shown). The top of the cover 7 of the 7 will also be increased, and the ceiling surface 34 will be in the buffer zone 91. The section will also be increased. ^
ς ’如圖19所示，物品C藉由複數 ;緩衝區91内之最高位置。於該狀 上確保可搬入下一物品之空間。如 ^該實施形態中’支柱1〇5可較高地延伸，伴隨於此，緩 輸送機93之輥93a。最終， 個支持部103而受支持於緩 態下，於輥式輪送機93 100102076 22 201139239 此方式，可將2個物品搬入至 91之物品收容能力將提高。 緩衝區91内。 亦即，緩衝區 丹考·，用 施形態㈣上述實 崎9叫輪送機63 均可變更高Γ搬:=同即可。亦即’任—面或兩個面 可不同。运車5之行故中或停止申兩個面之高度亦 一行 (F)於上述實施形態中，將環路内之緩衝區配置 配 但本發明並不限定於此種實施耗。例如，村於觀 置有兩行緩衝區。 (產業上之可利用性） 本發明係可廣泛應用於包含可於複數個處理裳置之間沿 著執道行駛之搬送車之搬送車系統。 & 【圖式簡單說明】 圖1係採用本發明一實施形態之搬送車系統之模式平面 圖0 圖2係作為本發明—實祕態之搬送車系統之部分剖視 圖。 圖3係搬送車之模式平面圖。 圖4係圖1之部分放大圖。 圖5係表示轨道之變形例之搬送車系統之部分模式平面 100102076 〇〇 201139239 圖。 圖6係表示搬送車系統之控制系統之方塊圖。 圖7係表示搬送車内控制器之構成之方塊圖。 圖8係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖9係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖10係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖11係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖12係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖13係作為本發明一實施形態之搬送車系統之部分剖視 圖。 圖14係用以說明在軌道上放置有保護蓋之狀態之搬送車 系統之部分剖視圖。 圖15係採用本發明其他實施形態之搬送車系統之模式平 面圖。 圖16係採用本發明進而其他實施形態之搬送車系統之部 分剖視圖。 圖17係載置台之模式平面圖。 100102076 24 201139239 圖18係載置台之部分侧視圖。 圖19徐搬送車系統之部分剖視圖。 【主要元件符號說明】 1 搬送車系統 2 處理裝置 " 2a 平台 ' 3 執道 4 檢查裝置 5 搬送車 7 自動倉庫 9 緩衝區 9A 第1緩衝區 9B 第2緩衝區 11 第1環路 11a 第1小環路 lib 第2小環路 11c 第3小環路 13 第2環路 13a 第4小環路 13b 第5小環路 13c 第6小環路 15 第3環路 S. 100102076 25 第7小環路 第8小環路 第9小環路 第4環路 第10小環路 第11小環路 第1捷徑用連結部 第2捷徑用連結部 第3捷徑用連結部 第4捷徑用連結部 連結部 連結部 連續處理裝置 第1處理裝置 第2處理裝置 第1平台 底面 凹部 第2平台 頂棚面 本體（支持台） 入口平台 26 行駛部 出口平台 幸昆式輸送機（支持面) 輥 推挽移載裝置 微環境機構 車輪 執道 臂機構 掛鉤構件 第1部分 第2部分 框體 擋板 FFU(清潔裝置） 載置台 輥式輸送機（載置面) 微環境機構 罩蓋 開口部ς ' As shown in Fig. 19, the item C is by the plural; the highest position in the buffer 91. Make sure that you can move into the next item in this shape. As in the embodiment, the "pillar 1" 5 can be extended relatively high, and along with this, the roller 93a of the conveyor 93 is lowered. Finally, the support portions 103 are supported by the roll conveyor 93 100102076 22 201139239. In this manner, the article storage capacity for moving the two articles to 91 will be improved. Inside the buffer 91. That is to say, the buffer zone Dan Kao, the application form (4) the above-mentioned Shisaki 9-called round-trip machine 63 can be changed higher and higher: That is, the 'anything' or the two sides may be different. In the above embodiment, the buffers in the loop are arranged in the same manner as in the above-described embodiment. However, the present invention is not limited to such an implementation. For example, the village has two rows of buffers. (Industrial Applicability) The present invention is widely applicable to a transport vehicle system including a transport vehicle that can travel between a plurality of processing skirts along the road. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of a transport vehicle system according to an embodiment of the present invention. Fig. 2 is a partial cross-sectional view showing a transport vehicle system of the present invention. Figure 3 is a schematic plan view of the transport vehicle. Figure 4 is a partial enlarged view of Figure 1. Fig. 5 is a view showing a partial mode plane 100102076 〇〇 201139239 of the transport vehicle system in a modified example of the rail. Fig. 6 is a block diagram showing a control system of the transport vehicle system. Fig. 7 is a block diagram showing the configuration of a controller for transporting a vehicle. Fig. 8 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Fig. 9 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Fig. 10 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Fig. 11 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Fig. 12 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Fig. 13 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Figure 14 is a partial cross-sectional view showing the transport vehicle system in a state in which a protective cover is placed on a rail. Fig. 15 is a schematic plan view showing a transport vehicle system according to another embodiment of the present invention. Fig. 16 is a partial cross-sectional view showing a transport vehicle system according to another embodiment of the present invention. Figure 17 is a schematic plan view of the mounting table. 100102076 24 201139239 Figure 18 is a partial side view of the mounting table. Figure 19 is a partial cross-sectional view of the Xu transport system. [Description of main components] 1 Transport system 2 Processing unit " 2a Platform' 3 Execution 4 Inspection device 5 Transport truck 7 Automated warehouse 9 Buffer 9A 1st buffer 9B 2nd buffer 11 First loop 11a 1 small loop lib second small loop 11c third small loop 13 second loop 13a fourth small loop 13b fifth small loop 13c sixth small loop 15 third loop S. 100102076 25 seventh Small loop, the eighth small loop, the ninth small loop, the fourth loop, the tenth small loop, the eleventh small loop, the first shortcut, the second shortcut, the third link, the third shortcut, the fourth shortcut, and the fourth shortcut. Part connection unit connection unit continuous processing device first processing device second processing device first platform bottom surface concave portion second platform ceiling surface main body (supporting table) entrance platform 26 traveling portion exit platform 幸昆式 conveyor (support surface) roller push-pull Transfer device micro-environment mechanism wheel arm mechanism hook member part 1 part 2 frame baffle FFU (cleaning device) table roller conveyor (mounting surface) micro-environment mechanism cover opening
FFU 保護蓋FFU protective cover
S 27 載置台 式輸送機 第5環路 第12小環路 第13小環路 第5捷徑用連結部 連結部 連結部 第1單位緩衝區 第1開口部 第2單位緩衝區 第2開口部 旁路線 缓衝區 幸昆式輸送機 輥 支持部 支柱 支持棒 支持機構 支持構件 驅動機構 28 201139239 101 底框 103 支持部 105 支柱 120 控制系統 121 製造控制器 123 物流控制器 125 自動倉庫控制器 127 搬送車控制器 129 搬送車内控制器 131 行駛馬達 133 推挽驅動機構 135 擋板驅動馬達 137 FFU驅動馬達 139 編瑪 C、（Π、C2 物品 100102076 29S 27 Mounting table conveyor fifth loop 12th small loop 13th small loop 5th shortcut connecting portion connecting portion connecting unit first unit buffer first opening second unit buffer second opening Route buffer 幸昆式 conveyor roller support struts support rod support mechanism support member drive mechanism 28 201139239 101 bottom frame 103 support portion 105 struts 120 control system 121 manufacturing controller 123 logistics controller 125 automatic warehouse controller 127 transport vehicle Controller 129 transports in-vehicle controller 131 travel motor 133 push-pull drive mechanism 135 flapper drive motor 137 FFU drive motor 139 Ma Ma C, (Π, C2 Article 100102076 29