WO2011138901A1

WO2011138901A1 - Indoor diselectrification method and indoor diselectrification device

Info

Publication number: WO2011138901A1
Application number: PCT/JP2011/059803
Authority: WO
Inventors: 和人松本; 国彦小池; 光則川邊; 和也久保; 元平澤; 千俊野上
Original assignee: 岩谷産業株式会社
Priority date: 2010-05-07
Filing date: 2011-04-21
Publication date: 2011-11-10
Also published as: JP2011238392A; JP5552358B2; KR20130093488A; CN102884867B; CN102884867A; KR101740086B1

Abstract

Disclosed is a device that efficaciously removes dust in a room to be processed. The device comprises a plurality of wire electrodes (3) that are frame arrayed in parallel above an electrically charged body (5) that is disposed within the room to be processed; and a voltage impressor (4) that impresses a voltage upon each wire electrode (3). The voltage impressor (4) controls the flow of electricity when electricity is flowing to the wire electrodes (3) such that wire electrodes (3a, 3b) that are located adjacent to one another and are voltage impressed have different polarities, and impresses a polarity of a voltage that is supplied to each wire electrode (3), interchangeably switching same at a prescribed period.

Description

Indoor static elimination method and indoor static elimination device

The present invention eliminates static electricity in a room by extending a wire electrode over a space (hereinafter simply referred to as a room) that is required to maintain a low dust state in a clean room, hospital room, food factory, etc. in the semiconductor manufacturing field. It relates to static elimination technology.

Conventionally, a charged object is neutralized by applying a voltage of different polarity to the oppositely arranged needle-like electrodes to generate "electric field lines" to neutralize the object in the vicinity of the needle-like electrode (Patent Document 1) or a wire electrode is stretched above the traveling path of a long charged object such as a film and perpendicular to the traveling path, and a high voltage is applied to the wire electrode to There has been proposed one that is neutralized (Patent Document 2).

JP-A-9-219294 Japanese Patent Laid-Open No. 2002-367996

When neutralizing static electricity in clean rooms, hospital rooms, etc., the wire electrode that generates lines of electric force, the voltage applicator that applies voltage to the wire electrode, and the wire electrode with positive and negative polarity as a pair, By arranging a plurality of sets in the upper part and generating electric lines of force, the entire room can be neutralized.

However, if a pair of wire electrodes with positive and negative polarities are paired and a plurality of sets are arranged on the ceiling of the room (space) to be neutralized, the space part located between the wire electrodes has either positive or negative charge. However, it is possible to eliminate static electricity, but in the space located immediately below the wire electrode, there is a limitation on the objects that can be neutralized depending on the polarity of the wire electrode (having a charge of the opposite polarity to that of the wire electrode) As a result, there is an inconvenience that the neutralization effect in the space is biased.

The present invention has been proposed in view of the above-described disadvantages, and an object thereof is to eliminate the bias of the static elimination effect due to the polarity of the wire electrode.

In order to achieve the above object, the present invention according to claim 1 is an indoor static elimination method, wherein a plurality of wire electrodes are stretched in parallel at the upper part of the room, and a voltage applicator is connected to each electrode. It is characterized in that positive and negative voltages are alternately applied at a predetermined cycle, and control is performed so that wire electrodes adjacent to each other in a state where the voltage is applied are different in polarity when the voltage is applied. In addition to the structure described in claim 1, the present invention described in claim 2 forms a downward air flow in the room.

Further, the present invention according to claim 3 is an indoor static eliminator having a plurality of wire electrodes stretched in parallel at the upper part of the room, and a voltage applicator for applying a voltage to each wire electrode. The voltage applicator controls the voltage application so that adjacent wire electrodes have different polarities when a voltage is applied to the wire electrodes, and the polarity of the voltage supplied to each wire electrode is set to a predetermined value. In addition to the configuration described in claim 3, the present invention according to claim 4 is characterized in that air current is formed above the indoor wire electrode arrangement portion. Means are arranged to form a downward air flow in the room.

In the present invention, by switching the polarity of the voltage applied to the wire electrode at a predetermined cycle, it is possible to remove the charge regardless of the position / charge of the object, and to uniformly remove the entire space. Thereby, it is possible to effectively neutralize the equipment installed in the space and dust and pollen floating in the entire space. Moreover, adhesion of dust, pollen, etc. to the wire electrode can be reduced.

It is a schematic block diagram which shows an example of the embodiment of this invention. It is a front view of static elimination experimental equipment. It is a graph which shows the time-dependent change of the amount of charge in the state which applied the voltage of the fixed polarity to the wire electrode. It is a graph which shows the time-dependent change of the charge amount in the state which switched the polarity of the voltage added to a wire electrode. It is a graph which shows the time-dependent change of the amount of charge in the state which applied the voltage to the wire electrode and made the downward flow act.

FIG. 1 schematically shows an apparatus according to the present invention, which is an upper space of a space (a processing target room) (1) required to maintain a low dust state in a clean room, a hospital room, a food factory, etc. in the semiconductor manufacturing field. A plurality of wire electrodes (3) for generating electric lines of force are stretched in parallel in (2), and positive and negative voltages are applied to each wire electrode (3) from the voltage applicator (4). When a voltage is applied, the adjacent wire electrodes (3a) and (3b) among the wire electrodes (3) have different polarities. A downward airflow is always formed in the space (1).

In addition, in FIG. 1, the state which applied the voltage to all the wire electrodes (3) is displayed, but you may make it apply a voltage every other line. Even in this case, the adjacent wire electrodes (3a) and (3b) are made to have different polarities in a state where a voltage is applied.

The voltage applicator (4) is configured to reversely switch the polarity of the voltage applied to each wire electrode (3) in a certain cycle.

Reference numeral (5) in FIG. 1 denotes a charged body existing in the processing target chamber. Examples of the charged body (5) include devices in a semiconductor manufacturing apparatus, a human body, pollen, viruses, dust, etc. that have entered the room. Can be considered.

As an experimental facility, as shown in FIG. 2, four wire electrodes are placed at a height of 2 m from the floor inside a booth (treatment target room) having a width of 5 m, a depth of 3.5 m, and a height of 2.45 m. (3) is arranged parallel to the ceiling surface at an interval of 1 m, and a charging plate (5) is arranged to monitor the charge amount of the charged body at a position of 1.05 m from the horizontal plane including the wire electrode (3). . Further, a fan as the air flow forming means (6) was arranged above the horizontal plane including the wire electrode (3) to form a downward flow in the booth. As the air flow forming means (6), in addition to the above-described fan, a discharge port of an air conditioner can be considered.

Since the effect of static elimination is concerned about the influence of temperature and humidity, in this experimental example, the temperature was 15.2 to 15.5 ° C. and the relative humidity was 69 to 70% under almost constant conditions.

In the above booth, the measurement points (a) and (b) are positioned immediately below the adjacent wire electrodes (3a) and (3b), and are equidistant from the wire electrodes (3a) and (3b). The measurement points (c) are arranged at the positions where the charging plates (5) are charged at + 5000V or -5000V at the measurement points (a), (b) and (c), and all the wire electrodes (3a) ( In 3b), a positive voltage and a negative voltage were alternately applied, and the change in charge amount over time was measured. The results are shown in Table 1 and FIG. In the case of “No application” in Table 1, the measurement was performed at the measurement point (a) with the voltage supply to the wire electrode (3) cut off.

As a result of the above,
(1) If no voltage is applied to the wire electrode (3), which is a line of electric force, the decrease of the charged voltage with respect to time of the charged plate charged to ± 5000V is about 6% after 4 minutes. Yes, very small,
(2) In addition, the final voltage under the electric field lines is stable on the polarity side of the electric field lines. Therefore, at this position, it will be charged to the polarity of the lines of electric force.
(3) The position between the adjacent lines of electric force is stable at + 55 ± 15V after 1 minute with charging plate + 5000V and + 38 ± 8V after 1 minute with -5000V charging. The effect of static elimination can be expected.
I understand that.

Next, the wire electrode (3a) (3b) located at the center of the four wire electrodes (3) is used, the charging plate (5) is charged to +5000 V, and the polarity of the supplied voltage is switched. Then, the stable amplitude of the charged voltage was measured. Here, the measurement position is the position of the measurement point (a) in FIG. 2, and the polarity change time (switching interval) is changed to 5 seconds, 10 seconds, and 30 seconds to change the charge amount of the charging plate (5). Was measured. The results are shown in Table 2 and FIG.

As can be seen from Table 2 and FIG. 4, unless the polarity of the wire electrodes (3a) and (3b) is changed, the charging plate (5) is charged to about -1300 V under the influence of -potential. It was confirmed that the charging voltage of the charging plate (5) approaches 0V by changing the polarity of the wire electrode. Furthermore, it was confirmed that the shorter the switching time (switching interval), the smaller the fluctuation of the charged voltage and the closer to 0V. And it turns out that the effect is so high that switching time becomes short.

Then, in order to investigate the influence of the wind, the fan (6) is disposed directly above the measurement points (a) and (c) and above the horizontal plane including the wire electrode (3), and is directed vertically downward with respect to the floor. An air flow was formed at a wind speed of 1.3 m / sec, and the state of charge amount change of the charging plate (5) installed at the measurement points (a) and (c) was measured. The results are shown in Table 3 and FIG.

As can be seen from Table 3 and FIG. 5, when the wind was sent directly below the minus line of the measurement point (a), the time to reach the saturation band voltage of -1000 V was shortened. In addition, shortening of the time required for the charged voltage to approach 0 V was observed at a position equidistant from the − + line of the measurement point (c).

From the above, it was confirmed that it is effective to alternately switch the polarity of the supply voltage and the presence of wind in order to eliminate static electricity evenly in the space.

In the above experimental equipment, a plurality of wire electrodes (3) are installed in parallel and applied to all the wire electrodes in parallel with the ceiling surface, but a plurality of wire electrodes (3) are arranged. May be used by thinning out at a predetermined pitch. Also in this case, the wire electrodes (3a) and (3b) located adjacent to each other by applying a voltage are made to have different polarities.

Further, in the above experimental equipment, a plurality of wire electrodes (3) are stretched in parallel with the ceiling surface. The wire electrodes (3) extend from the rising wall of the processing target chamber to the ceiling surface. You may make it install in parallel. Furthermore, not only the virtual plane assumed to include each wire electrode (3) is formed parallel to the ceiling surface of the processing target chamber, but also at least one pair when the ceiling piece is formed on an inclined surface. You may make it arrange | position the virtual surface comprised by these wire electrodes in step shape.

The present invention can be used not only for clean rooms in the semiconductor manufacturing field, but also for static electricity removal in spaces (rooms) that are required to maintain a low dust state in spaces such as hospital rooms and food factories.

DESCRIPTION OF SYMBOLS 1 ... Processing chamber, 2 ... Upper part of processing coping room, 3 ... Wire electrode (3a * 3b ... Adjacent wire electrode), 4 ... Voltage applicator, 5 ... Charged body, 6 ... Airflow formation means.

Claims

A plurality of wire electrodes (3) are stretched in parallel on the upper part (2) of the processing target chamber (1), and positive and negative voltages are alternately applied to each wire electrode (3) from a voltage applicator at a predetermined cycle. The room static elimination method characterized by controlling so that the voltage-applied wire electrodes (3a) and (3b) adjacent to each other may have different polarities when the voltage is applied.
The room static elimination method according to claim 1, wherein a downward air flow is formed in the processing target chamber.
It has a plurality of wire electrodes (3) stretched in parallel in the upper part (2) of the processing target chamber (1), and a voltage applicator (4) for applying a voltage to each wire electrode (3). The voltage applicator (4) controls the voltage application so that the voltage applied to the wire electrodes (3a) and (3b) adjacent to each other have different polarities when the voltage is applied to the wire electrode (3). An indoor static eliminator characterized in that the polarity of the voltage supplied to the wire electrode (3) is alternately applied at a predetermined cycle.
The indoor static eliminator according to claim 3, wherein the air flow forming means (6) is disposed above a surface including the wire electrode (3) in the processing target chamber to form a downward air flow in the room.