JP6376577B2 - Static electricity removal structure in low humidity space - Google Patents

Description

  The present invention is, for example, a space in which only a limited atmosphere is maintained in a predetermined low humidity state for performing various operations such as assembly of electronic components, manufacture of secondary batteries (including components), and experiments. In the present specification, the present invention relates to a static electricity removing structure in a “low-humidity space”.

Conventionally, booth space is made of synthetic resin in order to keep only the atmosphere of limited necessary places where various operations such as assembly of electronic parts, manufacture of secondary batteries (including parts), and experiments are held. Booths that are separated from the external space by made sheets are widely used.
Furthermore, in order to improve the airtightness and heat insulation of the booth space, a sheet having a double structure has been proposed (see, for example, Patent Documents 1 to 3).

Japanese Patent Laid-Open No. 11-83104 JP 2008-275233 A JP 2014-169816 A

By the way, in recent years, when performing various operations such as assembly of electronic parts, manufacture of secondary batteries (including parts), and experiments, there is a demand for maintaining only a limited atmosphere at a predetermined low humidity state. It is increasing.
On the other hand, since these operations often dislike static electricity, a request to remove static electricity has also been made.

  By the way, in order to remove static electricity in the space where various operations are performed, normally, an electrostatic removal device (ionizer) that causes corona discharge by concentrating an electric field on a needle-like discharge electrode and removes static electricity with ionized air. Also referred to as “static discharge device” in this specification.

However, since “decrease in humidity” and “removal of static electricity” are in a trade-off relationship, the static eliminator is used in a low-humidity space (in this specification, a space having a dew point temperature of 0 ° C. or lower). Even if it is applied, there is a problem that it is difficult to efficiently remove static electricity by ionized air because the amount of moisture in the air is small in a low humidity space.
In particular, in a conventional facility for forming a low humidity space (booth space), in order to maintain the low humidity, a large amount of dehumidified air is supplied to the space at a high wind speed. Even if the static eliminator is applied, positive ions and negative ions collide with each other and the ions disappear, and the static electricity removal effect is lost.
For this reason, it has been difficult to achieve both “decrease in humidity” and “removal of static electricity”.

  The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to provide a static electricity removal structure in a low-humidity space in which the static electricity can be efficiently removed using a static electricity removal device in the low-humidity space. And

In order to achieve the above object, the static electricity removing structure in a low humidity space of the present invention is a static electricity removing structure in a low humidity space to which dehumidified air is supplied, and the low humidity space is one of the low humidity spaces. toward the side to the low humidity space, and supplies the dehumidified air through the outlet in a state of laminar flow, configured to perform the exhaust from the other side of the low humidity space, and the air outlet, ventilation pores A synthetic resin blowout face material is provided, and a static electricity removing device is disposed downstream of the blowout port.

  In this case, the dew point temperature of the dehumidified air supplied through the air outlet can be set to −30 ° C. or lower.

  In addition, the static eliminators are arranged side by side in pairs, and each static eliminator shifts the timing of generating positive ions and negative ions in each static eliminator so that positive ions and negative ions are alternated. Can be generated.

  Further, the static eliminator can be arranged with a gap with respect to the air outlet.

  Further, the low-humidity space can be covered with a double-structure curtain, and exhaust can be forcibly exhausted from the space formed between the double-structure curtains.

According to the static electricity removing structure in the low humidity space of the present invention, static electricity is generated by the flow of air even in a low humidity space where the amount of moisture in the air is extremely small, particularly in an ultra-low humidity space where the dew point temperature is −30 ° C. or lower. In addition, ionized air can be distributed and supplied throughout the low-humidity space while preventing the disappearance of ions due to collisions between positive ions and negative ions, and static electricity can be efficiently removed using a static eliminator. be able to.

  And by providing the blowout face material in which the ventilation pores are formed at the blowout outlet, the dehumidified air can be supplied to the low humidity space in a laminar flow state with a simple structure.

Furthermore , by making the blowout face material in which the ventilation pores are formed of a synthetic resin member, positive ions and negative ions contained in ionized air are adsorbed on the blowout face material, and electrostatic discharge is caused. It is possible to prevent the removal effect from being lost.

  In addition, the static eliminators are arranged side by side in pairs, and each static eliminator shifts the timing of generating positive ions and negative ions in each static eliminator so that positive ions and negative ions are alternated. By making it generate | occur | produce, ionized air can be reliably distributed and distributed over the whole low-humidity space, preventing the disappearance of the ion by collision of a positive ion and a negative ion.

  Moreover, by providing the static eliminator with a gap with respect to the air outlet, positive ions and negative ions contained in the ionized air collide with the air outlet, and the ions disappear and the static electricity is removed. It can be prevented that the effect is lost.

  The low-humidity space is covered with a double-structure curtain, and the exhaust space is forcibly exhausted from the space formed between the double-structure curtains. This reduces the amount of dehumidified air supplied to the low-humidity space, reduces energy costs, and prevents the generation of static electricity due to air flow. be able to.

An example of the drive source which applies the static electricity removal structure in the low humidity space of this invention is shown, (a) is front sectional drawing, (b) is XX sectional drawing of (a). One Example of the drive source which applied the static electricity removal structure in the low-humidity space of this invention is shown, (a) is a top view, (b) is front sectional drawing. It is a graph which shows the measurement result of the change of a wind speed. It is a graph which shows the measurement result of discharge time.

  Embodiments of the static electricity removing structure in a low humidity space according to the present invention will be described below with reference to the drawings.

  The static electricity removal structure in the low humidity space of the present invention is the static electricity removal structure in the low humidity space to which dehumidified air is supplied, and the low humidity space is directed from one side of the low humidity space to the low humidity space. The dehumidified air is supplied through the air outlet in a laminar flow state, exhausted from the other side of the low-humidity space facing the air outlet, and static electricity is removed downstream of the air outlet. A device is provided.

  FIG. 1 shows an example of a drive source for applying the static electricity removing structure in a low humidity space of the present invention, that is, for forming a low humidity space.

  In this drive source 1, the curtain 3 constituting the peripheral wall of the booth body 2 has a double structure of an inner curtain 3a and an outer curtain 3b, and is forced from a space 5 formed between the double curtains 3a and 3b. While exhausting, the booth space (low-humidity space) 4 partitioned by the inner curtain 3a through the dehumidifying unit 6 and the space 5 formed between the double curtains 3a and 3b In addition, the space 5 formed between the double-structure curtains 3a and 3b is supplied so as to be maintained at a negative pressure with respect to at least the booth space 4 (in some cases, the external space 9). It is.

  The booth main body 2 has a chamber 20 disposed on the top of the booth main body 2 and four support columns 23 erected on the floor surface FL, and the four corners of the chamber 20 are upper ends of the four support columns 23. Are connected to each other.

The chamber 20 is formed by combining an upstream chamber 21 connected from the dehumidifying unit 6 via the duct 7 and a downstream chamber 22 disposed downstream thereof.
The upstream chamber 21 is provided with an air filter unit 21 a as necessary, and the air sent from the dehumidifying unit 6 via the duct 7 is purified and supplied to the downstream chamber 22.
The downstream chamber 22 constitutes an air outlet for dehumidified air, and includes a diffusion plate 22a, a screen mesh, a punching material, a blowout face material 22b and a ventilation hole formed with ventilation pores such as a sheet having pores. The dry air sent from the dehumidifying unit 6 is divided into the booth space 4 partitioned by the inner curtain 3a and the space 5 formed between the double-structured curtains 3a and 3b. Each of them is supplied uniformly.
Thereby, the dehumidified air that has passed through the downstream chamber 22 is supplied to the booth space 4 in a laminar state.

Here, the structure of the downstream chamber 22 is not particularly limited as long as the dehumidified air can be supplied to the booth space 4 in a laminar flow state.
Further, the blowout face material 22c in which the air holes are formed is not necessarily provided, and may be omitted so that the blowout face material 22b directly faces the booth space 4.

Moreover, it is preferable to use a member made of a synthetic resin such as a polyester resin, a polyolefin resin, or a vinyl chloride resin for the blowing face material 22b having the ventilation pores and the blowing face material 22c having the ventilation holes.
As a result, it is possible to prevent the positive ions and negative ions contained in the ionized air from being adsorbed by the blowing face materials 22b and 22c, and the effect of removing static electricity being lost.

  In addition, the ratio of the air supplied to both the spaces 4 and 5 is adjusted by adjusting the ventilation pores formed in the blowing face material 22b and the blowing face material 22c and the opening area of the ventilation holes with a closing plate (not shown). Can be adjusted arbitrarily.

The dehumidifying unit 6 can introduce air forcedly exhausted from the exhaust section 8 disposed in the outer curtain 3b from the space 5 formed between the double-structured curtains 3a and 3b, and can release dry air. If it is a thing, the system will not be specifically limited, A conventionally well-known dehumidification unit can be used.
The dehumidifying unit 6 may be provided with a temperature control unit, or a unit having a dehumidifying function and a temperature control function as necessary.

By the way, in this embodiment, in order to exhaust the air in the space 5 formed between the curtains 3 a and 3 b having the double structure, the exhaust portion 8 is positioned below the outer curtain 3 b at the diagonal position of the booth body 2. It arranges to.
In this way, by exhausting air from a plurality of locations below the space 5 formed between the double-structured curtains 3a and 3b, the pressure in the space 5 formed between the curtains 3a and 3b is biased. Therefore, it is possible to reliably prevent the air in the external space 9 from flowing into the booth space 4 and stably maintain the atmosphere of the booth space 4 in a predetermined state.
In addition, the position and the number of the exhaust units 8 can be arbitrarily set.

  The curtains 3a and 3b are connected to the upstream chamber 21 at their upper ends, and are set to a length such that their lower ends are substantially in contact with the floor surface FL, thereby enabling the booth space 4 and the double structure partitioned by the inner curtain 3a. The airtightness of the space 5 formed between the curtains 3a and 3b is maintained to some extent with respect to the space 5 and the external space 9 formed between the curtains 3a and 3b having a double structure.

The distance between the inner curtain 3a and the outer curtain 3b can be arbitrarily set in the range of several centimeters to several tens of centimeters, but the distance between the places where people enter and exit is the double curtains 3a, 3b. It is preferable to set the dimension once retained in the space 5 formed between them, specifically, 50 cm or more.
Thereby, when a person goes in and out, it is not necessary to open the inner curtain 3a and the outer curtain 3b at the same time, and the atmosphere of the space 5 formed between the double curtains 3a and 3b is stable. Since the inner curtain 3a can be opened, the influence of people coming and going can be eliminated as much as possible.

  The curtains 3a and 3b may be made of a synthetic resin sheet such as a polyolefin resin, a vinyl chloride resin, or a polyester resin, or may be made of any non-breathable material such as a cloth laminated with a synthetic resin film. it can.

The atmospheric pressure in the booth space 4 is slightly higher than the atmospheric pressure in the external space 9 (usually atmospheric pressure), specifically, the atmospheric pressure in the external space 9 + several Pa, more specifically, a positive pressure of about +2 to +3 Pa. It is preferable to be held in the area.
For this reason, the atmospheric pressure condition of each space is the atmospheric pressure of the space 5 formed between the curtains 3a and 3b of the double structure <the atmospheric pressure of the external space 9 <the atmospheric pressure of the booth space 4 (or the atmospheric pressure of the external space 9 <the atmospheric pressure of the space 5 < The equipment constituting the air circulation path including the dehumidifying unit 6 is operated so as to satisfy the atmospheric pressure condition of the booth space 4).
Thereby, air flows from the booth space 4 and the external space 9 into the space 5 formed between the curtains 3a and 3b having a double structure through the gap between the lower ends of the curtains 3a and 3b and the floor surface FL. Become.

  According to the drive source 1, the space 5 formed between the curtains 3 a and 3 b having the double structure is held at a negative pressure with respect to the booth space 4 and the external space 9. Is less susceptible to the atmosphere of the external space 9 and the entry and exit of people compared to the case where the pressure is maintained at a positive pressure or a negative pressure. For example, in order to keep the dew point temperature of the air in the booth space 4 low, The amount of air-conditioned air supplied to 4 can be reduced, the energy cost can be reduced, and it is formed between the curtains 3a and 3b having a double structure held at a negative pressure with respect to the booth space 4 and the external space 9. By interposing the space 5 formed, it is possible to suppress the substances in the booth space 4 from riding on the air and flowing out to the external space 9, and the booth can be used safely and at low cost.

  Next, FIG. 2 shows an embodiment of the static electricity removing structure in the low humidity space of the present invention using this drive source 1.

  In FIG. 2, when dehumidified air is supplied from the chamber 20 to the booth space (low-humidity space) 4 through the blowout face material 22 b in which ventilation pores are formed (example (displayed as “laminar flow”). )), And when the air dehumidified in the booth space (low-humidity space) 4 is pinpointed, for example, from the lateral direction, which is a method widely used in dry space (comparative example ("turbulent flow" and A comparative test was conducted with respect to display.)).

  A general-purpose static eliminator can be used as the static eliminator 10, but in the present embodiment, two static eliminators 10 are arranged side by side so as to form a pair. Specifically, one of the static eliminators 10 generates positive ions so that positive ions and negative ions are alternately generated by shifting the timing of generation of positive ions and negative ions in each static eliminator 10. The other generates negative ions, and when one generates negative ions, the other generates positive ions.

  Here, the static eliminator 10 used in the present embodiment is a rod-shaped device, and is 40% or more, preferably 50% or more of the length of one side of the substantially square booth space 4 (in this embodiment) Is approximately 70% long), and the two static eliminating devices 10 are arranged in parallel with a distance of about the same length on the downstream side of the blowout face material 22b. The air ionized by the removing device 10 can be distributed and supplied over the entire booth space 4.

  Further, the static eliminator 10 is disposed with a gap D (about 30 mm to 200 mm. In the present embodiment, about 50 mm) with respect to the blowout face material 22b. The positive ions and negative ions contained therein are prevented from colliding with the blowout face material 22b and disappearing, and the effect of removing static electricity is lost.

In FIG. 3, the result of having measured the change of the wind speed of an Example and a comparative example over 5 minutes is shown.
Here, the measurement of the wind speed was performed at the positions indicated by the circled numbers 1 to 5 in FIG. 2A (the place where the charged plate monitor shown in FIG. 2B is installed).
In the examples, both the wind speed and the dispersion are lower than those in the comparative example, and positive ions and negative ions collide with each other to prevent the ions from disappearing, and the effect of removing static electricity can be prevented. It is thought that the occurrence of

The dehumidified air supplied to the booth space 4 is low-humidity air having a dew point temperature of 0 ° C. or lower, particularly ultra-low humidity air having a dew point temperature of −30 ° C. or lower (−60 ° C. in this embodiment). In addition, static electricity is removed from a low-humidity space (ultra-low-humidity space) formed by supplying this low-humidity air (ultra-low-humidity air).
In addition, the lower limit value of the dew point temperature in the low humidity space targeted by the static electricity removal structure in the low humidity space of the present invention is, for example, a dew point temperature lower than −100 ° C. increases the load on the dehumidifying unit 6, but is particularly limited. There is no.

  FIG. 4 shows the results of measuring the time (discharge time) when the charged voltage of the charged plate charged to −5000 V is −500 V using a charged plate monitor.

As is clear from this result, the discharge time of the example was lower than that of the comparative example, and it was confirmed that static electricity can be removed uniformly throughout the booth space 4.
Moreover, when supplying the dehumidified air to the booth space 4 in the state of a laminar flow from a measurement result, a wind speed is 0.005-0.1 m / s, Preferably, it is 0.008-0.05 m / s. More preferably, it has been confirmed that it is effective to set the pressure as low as about 0.01 to 0.02 m / s.

  As described above, according to the static electricity removing structure in the low humidity space of the present invention, the low humidity space in which the amount of moisture in the air is extremely small, in particular, the dew point temperature is −30 ° C. or lower (−60 ° C. in this embodiment). Even in an ultra-low humidity space, while preventing the generation of static electricity due to the flow of air and the disappearance of ions due to the collision of positive and negative ions, ionized air can be distributed and supplied throughout the low-humidity space. Static electricity can be efficiently removed using the static eliminator.

  As mentioned above, although the static electricity removal structure in the low humidity space of this invention was demonstrated based on the Example, this invention is not limited to the structure described in the said Example, For example, with respect to a low humidity space The configuration of the dehumidified air can be changed as appropriate without departing from the spirit of the present invention, for example, by setting the direction in which the dehumidified air is supplied to be lateral or upward other than downward.

Since the static electricity removing structure in the low humidity space of the present invention can efficiently remove static electricity using the static eliminator in the low humidity space, for example, assembly of electronic parts, secondary batteries (including parts) .) Is used for various purposes such as manufacturing, experiments, and the like, in a space where only a limited necessary area is maintained in a predetermined low humidity state, more specifically, for static electricity removal in a booth space. be able to.

DESCRIPTION OF SYMBOLS 1 Drive source 2 Booth main body 20 Chamber 21 Upstream side chamber 22 Downstream side chamber 22a Diffusion plate 22b Outlet surface material 22c Outlet surface material 23 Support | pillar 3 Curtain 3a Inner curtain 3b Outer curtain 4 Booth space (low humidity space)
5 Space formed between curtains of double structure 6 Dehumidifying unit 7 Duct 8 Exhaust part 9 External space 10 Static electricity removing device

Claims (5)

A static elimination structure in a low humidity space where dehumidified air is supplied,
The low humidity space is directed from one side of the low humidity space to the low humidity space, dehumidified air is supplied in a laminar flow state through the outlet , and exhausted from the other side of the low humidity space And
In addition, a low-humidity space characterized in that a synthetic resin blow-out face material in which vent holes are formed is provided at the blow-out port, and a static electricity removing device is disposed downstream of the blow-out port. Static electricity removal structure in   2. The static electricity removing structure in a low humidity space according to claim 1, wherein a dew point temperature of the dehumidified air supplied through the air outlet is −30 ° C. or lower. The static eliminators are arranged side by side in pairs, and each static eliminator generates positive ions and negative ions alternately by shifting the timing of the positive ions and negative ions of each static eliminator. static elimination structure in low humidity space according to claim 1 or 2, characterized in that the the like. Static elimination structure in low humidity space according to claim 1, 2 or 3, characterized in that formed by the static eliminator, such that disposed at a gap with respect to the air outlet. The low-humidity space is covered with a double-structure curtain, and exhaust is forced from the space formed between the double-structure curtains. , 3 or static off structure at low humidity space according to 4.

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